WO2017103997A1

WO2017103997A1 - Robot simulation device, robot simulation method, robot simulation program, and robot

Info

Publication number: WO2017103997A1
Application number: PCT/JP2015/085080
Authority: WO
Inventors: 勝田　信一
Original assignee: 株式会社安川電機
Priority date: 2015-12-15
Filing date: 2015-12-15
Publication date: 2017-06-22

Abstract

A robot simulation device is provided with a generating section, a compositing section, a display control section, a calculating section, a determining section, and an instructing section. The generating section generates a path that shows the area through which a robot conveying a substrate is to pass. The compositing section composites a background image, which comprises obstacles disposed around the robot, with the path. The display control section displays the composite image composited by the compositing section on a display unit. The calculating section calculates the distances between the path and the obstacles. The determining section determines that the path is near an obstacle when the distance is smaller than a specified threshold. When the determining section determines that the path is near an obstacle, the instructing section instructs the compositing section to composite a notification image, which comprises the distance calculated by the calculating section, with the composite image.

Description

Robot simulation apparatus, robot simulation method, robot simulation program, and robot

The disclosed embodiment relates to a robot simulation apparatus, a robot simulation method, a robot simulation program, and a robot.

Conventionally, by displaying an image that reproduces the movement of a robot, such as a substrate transfer robot, on the display unit, it is possible to check the positional relationship between the robot and the surrounding environment of the robot, and robot simulation that assists in examining the position and movement of the robot The device is known.

As such a robot simulation apparatus, there is an apparatus that expresses the surrounding environment as a two-dimensional image, converts a three-dimensional image reproducing the operation of the robot into a two-dimensional image, and then combines the two-dimensional images (for example, Patent Document 1).

Japanese Patent Laying-Open No. 2015-093345

However, even when the robot and the surrounding environment are each represented by a two-dimensional image and combined as in the conventional technique described above, from the viewpoint of easily informing the operator of the possibility of interference between the robot and the surrounding environment. There is room for improvement.

An object of one embodiment is to provide a robot simulation apparatus, a robot simulation method, a robot simulation program, and a robot that can easily notify an operator of the possibility of interference between the robot and the surrounding environment.

The robot simulation apparatus according to an aspect of the embodiment includes a generation unit, a synthesis unit, a display control unit, a calculation unit, a determination unit, and an instruction unit. The generation unit generates a trajectory indicating a range through which the robot that transports the substrate passes. The synthesizing unit synthesizes the background image including the obstacle arranged around the robot and the locus. The display control unit causes the display unit to display the synthesized image synthesized by the synthesis unit. The calculation unit calculates a distance between the trajectory and the obstacle. The determination unit determines that the trajectory has approached the obstacle when the distance is smaller than a predetermined threshold. When the determination unit determines that the locus has approached the obstacle, the instruction unit causes the combining unit to combine the notification image including the distance calculated by the calculation unit with the combined image. Instruct.

According to one embodiment of the present invention, it is possible to provide a robot simulation apparatus, a robot simulation method, a robot simulation program, and a robot that can easily notify the operator of the possibility of interference between the robot and the surrounding environment. .

FIG. 1 is an explanatory diagram showing an outline of a robot simulation apparatus. FIG. 2 is a perspective view of a robot to be simulated. FIG. 3 is a schematic top view of the hand. FIG. 4 is a block diagram of the robot simulation apparatus. FIG. 5 is a diagram illustrating a display example of the selection screen. FIG. 6 is a diagram illustrating a display example of the change screen. FIG. 7 is an explanatory diagram illustrating a distance calculation process. FIG. 8 is a diagram illustrating a display example of a still image of the robot. FIG. 9 is a flowchart showing a processing procedure executed by the robot simulation apparatus.

Hereinafter, a robot simulation apparatus, a robot simulation method, a robot simulation program, and a robot disclosed in the present application will be described in detail with reference to the accompanying drawings. In addition, this invention is not limited by embodiment shown below.

In the embodiment described below, expressions such as “vertical” and “center” may be used, but it is not necessary to strictly satisfy these conditions. That is, each expression described above allows for deviations in manufacturing accuracy, installation accuracy, processing accuracy, detection accuracy, and the like.

First, an outline of the robot simulation apparatus 20 (see FIG. 4) according to the embodiment will be described with reference to FIG. FIG. 1 is an explanatory diagram showing an outline of the robot simulation apparatus 20. Note that the

images

300a and 300b illustrated in FIG. 1 are simulation images generated by the robot simulation apparatus 20. The

images

300a and 300b are two-dimensional images of the robot 10 and the surrounding environment of the robot 10 as viewed from above.

In FIG. 1, in order to make the explanation easy to understand, the Z axis with the vertical upward direction as the positive direction, the X axis as the direction along the long side of the transfer chamber 201, and the direction along the short side of the transfer chamber 201 are shown. A three-dimensional orthogonal coordinate system with the Y axis is shown. Such an orthogonal coordinate system may be shown in other drawings used in the following description.

Here, the transfer chamber 201 is a so-called EFEM (Equipment Front End Module), and is a locally-cleaned casing that allows a clean downflow airflow to flow inside. In addition, dimensions such as the position, size, and spacing of the openings provided on the side walls of the transfer chamber 201 for installing the cassette 202 and the processing chamber 203 comply with the SEMI (Semiconductor Equipment and Materials International) standard. In addition, various dimensions in apparatuses such as the cassette 202 and the processing chamber 203 also conform to the SEMI standard.

The cassette 202 is a so-called FOUP (Front-Opening Unified Pod) and is a device that stores the substrates 30 in multiple stages. Although three cassettes 202 are shown in FIG. 1, the number of cassettes 202 may be an arbitrary number. Further, the mounting position and the number of the processing chambers 203 shown in FIG. 1 may be arbitrary.

First, the image 300a will be described. As shown in FIG. 1, the image 300 a is a composite image obtained by combining the robot 10 and the image showing the substrate 30 transported by the robot 10 and the background image 200. An image 300a illustrated in FIG. 1 is a composite image of the background image 200 and the still images of the robot 10 and the substrate 30.

The background image 200 includes an image of the transfer chamber 201 in which the robot 10 is arranged, a cassette 202 provided on the side wall of the transfer chamber 201, and a processing chamber 203 also provided on the side wall. That is, the background image 200 includes an obstacle 210 that is arranged around the robot 10 and may interfere with the robot 10. In FIG. 1, the obstacle 210 is represented by a line or a hatched area. However, the display form is not limited as long as it represents the existence range of the obstacle 210.

When confirming the interference state between the robot 10 and the substrate 30 and the obstacle 210 using the robot simulation apparatus 20 according to the embodiment, the virtual robot 10 is operated along a previously prepared operation path, and the interference state is determined. Will be confirmed. However, in the past, it has not been said that the possibility of interference between the robot 10 and the obstacle 210 is sufficiently informed to the operator.

Therefore, in the robot simulation apparatus 20 according to the embodiment, the motion trajectory (hereinafter simply referred to as “trajectory 100”) of the robot 10 or the substrate 30 may interfere with the obstacle 210 as in the image 300b illustrated in FIG. When there is, the notification image 400 is displayed.

Specifically, as shown in the image 300 b, for example, when the substrate 30 is selected as the target of the trajectory 100, the robot simulation device 20 is a trajectory 100 that is a range through which the substrate 30 passes in accordance with the operation of the robot 10. Is generated.

Subsequently, the robot simulation device 20 calculates the distance between the generated trajectory 100 and the obstacle 210 included in the background image 200. When the calculated distance is smaller than the predetermined threshold, the robot simulation apparatus 20 determines that the trajectory 100 has approached the obstacle 210, and displays the notification image 400 including the distance information 402 indicating the calculated distance. Generate. Further, the robot simulation device 20 synthesizes the notification image 400 with the synthesized image of the trajectory 100 and the background image 200.

Here, the notification image 400 may include a mark 401 indicating a corresponding point on the outer periphery of the obstacle 210. Further, the distance information 402 included in the notification image 400 may be a distance in an actual environment (“X.XX (mm)” in FIG. 1) as shown in FIG. It is good also as a set of deviation | shift amount about X-axis and Y-axis. Moreover, it is good also as including both distance and deviation | shift amount.

Thus, since the robot simulation apparatus 20 according to the embodiment displays the distance between the trajectory 100 and the obstacle 210 included in the background image 200, the possibility of interference between the robot 10 and the surrounding environment is displayed. The operator can be notified in an easy-to-understand manner. Thereby, for example, it becomes clear how much the relative position between the robot 10 and the obstacle 210 should be changed, so that the teaching data of the robot 10 can be generated efficiently.

In the image 300b shown in FIG. 1, the locus 100 is shown as a superimposed image in which still images indicating the position of the substrate 30 during operation are superimposed at a predetermined time interval. In this way, by making the trajectory 100 a superimposed image, the passing range of the robot 10 and the substrate 30 can be notified intuitively and easily.

However, the present invention is not limited to this, and the outer shape of the range through which the robot 10 and the substrate 30 pass may be generated as the locus 100. Further, such a passing range may be highlighted by changing the display color or blinking.

Further, the image 300b shown in FIG. 1 shows a case where the range through which the substrate 30 passes is displayed as the trajectory 100, but the target of the trajectory 100 can be selected as will be described later with reference to FIG.

For example, the robot simulation apparatus 20 can select all or part of the robot 10 that transports the substrate 30 as the target of the trajectory 100. The image 300b shows the route 100C at the center of the substrate 30 for reference, but the route 100C may not be displayed.

In addition, in the image 300b illustrated in FIG. 1, one notification image 400 is illustrated, but when there are a plurality of locations to be notified, the same number of notification images 400 as the locations to be notified are displayed. Also good. Moreover, it is good also as displaying only the alerting | reporting image 400 corresponding to the location which is closest among the location used as alerting | reporting object.

Further, the robot simulation device 20 has a function of changing the relative position between the trajectory 100 and the background image 200, which will be described later with reference to FIG. A procedure for calculating the distance between the trajectory 100 and the obstacle 210 included in the background image 200 will be described later with reference to FIG.

Next, the configuration of the robot 10 to be simulated by the robot simulation apparatus 20 will be described with reference to FIG. FIG. 2 is a perspective view of the robot 10 to be simulated. As shown in the figure, the robot 10 includes a main body 10 a, a lifting shaft 10 b, a first arm 11, a second arm 12, and a hand 13. In addition, although the robot 10 provided with the two hands 13 is illustrated in FIG. 2, the hand 13 is good also as one.

The main body 10a is fixed to the floor surface of the transfer chamber 201 (see FIG. 1) and has a built-in lifting mechanism (not shown) that lifts and lowers the lifting shaft 10b. The elevating shaft 10b supports the base end portion of the first arm 11 so as to be pivotable about the first axis A1, and moves up and down along the first axis A1. The lifting shaft 10b itself may be rotated around the first axis A1.

The first arm 11 supports the proximal end portion of the second arm 12 at the distal end portion so as to be rotatable around the second axis A2. The second arm 12 supports the proximal end portions of the two hands 13 at the distal end portions so as to be independently rotatable about the third axis A3. That is, the hands 13 are independently turned by a rotation mechanism (not shown) arranged coaxially.

As described above, the robot 10 is a three-link horizontal articulated robot including the first arm 11, the second arm 12 and the hand 13. Moreover, since the robot 10 has the lifting mechanism as described above, the robot 10 can access each of the substrates 30 arranged in multiple stages in the cassette 202.

Furthermore, the robot 10 can access, for example, a processing chamber 203 (see FIG. 1) arranged at a different height from the cassette 202 and an aligner device (not shown) for adjusting the orientation of the substrate. The second arm 12 may be omitted from the robot 10 and a two-link horizontal articulated robot of the first arm 11 and the hand 13 may be used.

Next, the hand 13 shown in FIG. 2 will be described in more detail with reference to FIG. FIG. 3 is a schematic top view of the hand 13. In FIG. 3 and subsequent figures, only one hand 13 is shown for easy understanding. In FIG. 3, the substrate 30 placed at the correct position is indicated by a broken line for reference.

As shown in FIG. 3, the hand 13 includes a base portion 13a and a fork portion 13b. The base end side of the base portion 13a is supported by the second arm 12 (see FIG. 2) so as to be rotatable around the third axis A3. The fork portion 13b is provided on the distal end side of the base portion 13a, and the distal end side is divided into two forks. In addition, it is good also as providing the sensor (what is called a mapping sensor) which detects the board | substrate 30 accommodated in the cassette 202 in each front end side of the fork part 13b divided into two forks.

Further, as shown in FIG. 3, the position corresponding to the center of the substrate 30 held by the hand 13 is a reference position 13 </ b> C of the hand 13. For example, a line connecting the third axis A3 and the reference position 13C is a hand center line 13CL indicating the direction of the hand 13. Note that the hand 13 includes a gripping mechanism that grips the substrate 30. The hand 13 may include a holding mechanism such as a suction mechanism instead of the gripping mechanism.

Next, the robot simulation apparatus 20 will be described with reference to FIG. FIG. 4 is a block diagram of the robot simulation apparatus 20. As shown in FIG. 4, the robot simulation apparatus 20 includes a control unit 21, a storage unit 22, an input unit 23, and a display unit 24.

The control unit 21 includes a selection unit 21a, a generation unit 21b, a change unit 21c, a synthesis unit 21d, a display control unit 21e, a calculation unit 21f, a determination unit 21g, and an instruction unit 21h. The storage unit 22 stores teaching data 22a and background information 22b.

Here, the robot simulation device 20 includes, for example, a computer having various types of circuits such as a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), an HDD (Hard Disk Drive), and an input / output port. including.

The CPU of the computer reads, for example, a program stored in the ROM, and executes a selection unit 21a, a generation unit 21b, a change unit 21c, a synthesis unit 21d, a display control unit 21e, a calculation unit 21f, It functions as a determination unit 21g and an instruction unit 21h.

In addition, at least one or all of the selection unit 21a, the generation unit 21b, the change unit 21c, the synthesis unit 21d, the display control unit 21e, the calculation unit 21f, the determination unit 21g, and the instruction unit 21h of the control unit 21 are set to ASIC (Application It can also be configured with hardware such as Specific Integrated Circuit) or FPGA (Field Programmable Gate Array).

The storage unit 22 corresponds to, for example, a RAM or an HDD. The RAM and HDD can store teaching data 22a and background information 22b. Note that the robot simulation apparatus 20 may acquire the above-described program and various information via another computer or a portable recording medium connected via a wired or wireless network.

The input unit 23 is an input device such as a keyboard, a touch panel, or a mouse. The display unit 24 is a display device such as a liquid crystal display. In FIG. 4, the input unit 23 and the display unit 24 are described separately, but an input / output device that also serves as the input unit 23 and the display unit 24, such as a touch panel display, may be used.

4 shows a case where the robot simulation device 20 includes the input unit 23 and the display unit 24, but at least one of the input unit 23 and the display unit 24 is an external device connected to the robot simulation device 20. It is good also as providing in.

The selection unit 21 a of the control unit 21 selects the target of the trajectory 100 illustrated in FIG. 1 through an operation on the input unit 23. Then, the selection unit 21a notifies the generation unit 21b of the selected site (hereinafter referred to as “selected site”). Here, as the target of the trajectory 100, it is possible to select the whole or a part of the robot 10 that transports the substrate 30, and this point will be described later with reference to FIG.

The generation unit 21b generates a trajectory 100 that is a range through which the selected portion selected by the selection unit 21a passes when the robot 10 performs a predetermined operation. For example, as illustrated in FIG. 1, when the substrate 30 is selected, the generation unit 21 b generates a range through which the substrate 30 passes as a trajectory 100.

Note that, as shown in FIG. 1, the trajectory 100 can be a superimposed image in which a still image indicating the position of the selected part during the operation of the robot 10 is superimposed at a predetermined time interval. The trajectory 100 may be the outer shape of the range through which the selected site passes.

Further, the generation unit 21b causes the robot 10 to perform the predetermined operation described above by operating the robot 10 according to the teaching data 22a. Here, the predetermined operation is, for example, an operation of transporting the substrate 30 from the cassette 202 showing the substrate 30 in the image 300a of FIG. 1 to another cassette 202 or the processing chamber 203.

The changing unit 21c changes the relative position between the trajectory 100 illustrated in FIG. 1 and the background image 200 through an operation on the input unit 23. Then, the changing unit 21c notifies the combining unit 21d of the changed relative position. Details of the change of the relative position will be described later with reference to FIG.

The combining unit 21d generates a combined image by combining the trajectory 100 generated by the generating unit 21b and the background image 200 (see FIG. 1) included in the background information 22b. Here, the relative position between the trajectory 100 and the background image 200 can be changed via the changing unit 21c. The combining unit 21d further combines the notification image 400 illustrated in FIG. 1 with the above-described combined image based on an instruction from the instruction unit 21h described later.

Then, the combining unit 21d notifies the display control unit 21e of the combined image obtained by combining the notification images 400, and notifies the calculation unit 21f of the trajectory 100, the background image 200, and the relative positions of both.

In addition, when the change of the relative position between the locus 100 and the background image 200 is completed, the composition unit 21d corrects the teaching data 22a using the changed relative position. Thereby, the teaching data 22a in which the interval between the robot 10 and the obstacle 210 included in the background image 200 is adjusted to a predetermined interval or more can be obtained.

The display control unit 21e displays the composite image received from the synthesis unit 21d on the display unit 24. For example, the display control unit 21e causes the display unit 24 to display a GUI (Graphical User Interface) screen illustrated in FIGS.

Based on the trajectory 100, the background image 200, and the relative positions of the two received from the combining unit 21d, the calculation unit 21f corresponds to the distance between the trajectory 100 and the obstacle 210 included in the background image 200 and the outer periphery of the obstacle 210. Calculate points. Then, the calculation unit 21f notifies the determination unit 21g of the calculated distance and point.

The determination unit 21g determines whether or not the distance received from the calculation unit 21f is smaller than a predetermined threshold value. Then, the determination unit 21g notifies the instruction unit 21h of a set of distances and points that satisfy the determination condition.

The instruction unit 21h sends the notification image 400 (see FIG. 1) including the distance and point set received from the determination unit 21g to the combining unit 21d so as to further combine the notification image 400 (see FIG. 1) with the combined image of the trajectory 100 and the background image 200. Instruct. Here, when there are a plurality of pairs of distances and points, the combining unit 21d is instructed to display the notification image 400 by the number of pairs.

In addition, the instruction unit 21h displays the notification image 400 even when the determination result by the determination unit 21g changes from approach to non-approach as a result of the relative position between the locus 100 and the background 200 being changed by the change unit 21c. The composing unit 21d is instructed to compose the composite image.

That is, when the determination result by the determination unit 21g changes from approach to non-approach, the notification image 400 is not displayed. However, once the notification image 400 is displayed, it is confirmed that the trajectory 100 and the background image 200 are sufficiently separated by displaying the notification image 400 even when the determination result changes from approach to non-approach. It becomes possible to do. Therefore, it is possible to inform the operator that the change of the relative position is appropriate, which contributes to the reduction of the operator's work load.

The teaching data 22 a is information including a “job” that is a program that defines the operation of the robot 10 including the movement trajectory of the hand 13. Further, as described above, the teaching data 22a is corrected by the combining unit 21d.

The background information 22b is information including the background image 200 shown in FIG. Further, as already described, the background image 200 includes an area of the obstacle 210 that may come into contact with the robot 10. That is, the background information 22b is information including the area and the position of the obstacle 210 arranged around the robot 10.

Next, the selection screen 310 corresponding to the selection unit 21a shown in FIG. 4 will be described with reference to FIG. FIG. 5 is a diagram illustrating a display example of the selection screen 310. As shown in FIG. 5, the selection screen 310 includes a display area 311, a selection area 312, an “execute” button, and a “cancel” button.

The display area 311 displays a selected part that is a part selected in the selection area 312. For example, as shown in FIG. 5, the display area 312 displays a top view of the robot 10 (see FIG. 2) and highlights the selected portion selected in the selection area 312. In FIG. 5, since the hand 13 is selected in the selection area 312, the hand 13 portion is highlighted in the display area 311. Note that the highlighting may be in any form as long as the selected portion can be visually recognized, such as a color change or blinking.

In the selection area 312, check boxes indicating the selected parts and combinations of names are displayed as many as the number of selected parts. The selection area 312 includes, for example, a “select all” button and a “select all” button.

FIG. 5 shows the first arm 11, the elbow part 311a, the second arm 12, the wrist part 311b, the hand 13 and the substrate 30 as selected parts. Here, the elbow part 311a can be made into the area | region where the 1st arm 11 and the 2nd arm 12 overlap, for example, when the 2nd arm 12 is rotated with respect to the 1st arm 11. FIG. Further, the wrist portion 311b can be an area where the second arm 12 and the hand 13 overlap when the hand 13 is turned with respect to the second arm 12.

Thus, in the selection area 312, an input operation for selecting a target portion of the locus 100 (see FIG. 1) is accepted. Then, the part (the hand 13 in FIG. 5) whose check box is checked is selected. Note that a check or non-check can be selected for each check box.

If you want to select all the selected parts, check all the check boxes. Or, if the “Select All” button is pressed, all the check boxes are checked. If a check is made by mistake, all check boxes return to the unchecked state by pressing the “Deselect All” button.

When the selection of the selected part in the selection area 312 is completed, the selected part is notified to the generation unit 21b (see FIG. 4) by pressing the “execute” button. If the “Cancel” button is pressed, the selection state of the selection area 312 is canceled and the selection screen 310 is not displayed. That is, the selected part is not notified to the generation unit 21b.

In this way, by making it possible to select a target part of the trajectory 100, it is possible to display the trajectory 100 of a part that is particularly focused on, such as a joint portion of the robot 10, and to reduce the workload on the operator. can do.

Next, the change screen 320 corresponding to the change unit 21c shown in FIG. 4 will be described with reference to FIG. FIG. 6 is a diagram illustrating a display example of the change screen 320. As illustrated in FIG. 6, the change screen 320 includes the image 300 b illustrated in FIG. 1, a selection area 321, an input area 322, an “execute” button, and a “cancel” button.

The image 300b includes a trajectory 100, a background image 200, and a notification image 400. The notification image 400 includes a mark 401 and distance information 402. Note that the image 300b corresponds to the case where the substrate 30 is selected as a selected portion on the selection screen 310 illustrated in FIG.

The selection area 321 is an area for selecting which of the trajectory 100 and the background image 200 to move when the relative position between the trajectory 100 and the background image 200 is changed. As shown in FIG. 6, the selection area 321 displays a set of radio buttons and names indicating shift targets. That is, either the locus 100 or the background 200 can be selected as the shift target.

The input area 322 is an area for inputting a shift amount indicating how much the shift target selected in the selection area 321 is moved in the X axis positive direction (X direction) and the Y axis positive direction (Y direction). It is. In the input area 322,

text boxes

322a and 322b for receiving an input of a shift amount and a set of names are displayed. That is, the shift amount can be input in each of the X direction and the Y direction.

In FIG. 6, the locus 100 is selected as the shift target, and “−0.50 (mm)” for the X direction and “−1.00 (mm)” for the Y direction are input as the shift amounts. Shows the case.

6 shows a case where the distance “X.XX (mm)” between the trajectory 100 and the obstacle 210 included in the background image 200 is displayed as the distance information 402 of the notification image 400. However, the present invention is not limited thereto, and a set of deviation amounts in the X direction and the Y direction corresponding to the distance may be used. Moreover, it is good also as including both distance and deviation | shift amount.

In this way, the operator can easily determine the shift amount to be input to the input area 322 based on the shift amounts in the X direction and the Y direction displayed in the distance information 402. That is, the operator's workload can be reduced. In this case, the initial value of the shift amount displayed in the input area 322 may be automatically displayed based on the shift amounts in the X direction and the Y direction displayed in the distance information 402.

When the selection of the shift target in the selection area 321 and the input of the shift amount in the input area 322 are completed, the relative position after the change between the locus 100 and the background image 200 is performed by pressing the “execute” button. Is notified to the combining unit 21d (see FIG. 4). Then, the content of the image 300b is updated so as to correspond to the changed relative position.

When the “Cancel” button is pressed, the selection state of the selection area 321 and the input information of the input area 322 are canceled, and the change screen 320 is not displayed. That is, the changed relative position is not notified to the combining unit 21d.

Although FIG. 6 shows a case where the shift amount is changed by inputting to the text box, for example, an input component such as a slide bar that changes the shift amount continuously or stepwise may be used. In this case, the content of the image 300b may be updated in real time so as to correspond to the change in the shift amount. In this case, the distance information 402 included in the notification image 400 may be updated in real time.

Next, distance calculation processing performed by the calculation unit 21f illustrated in FIG. 4 will be described with reference to FIG. FIG. 7 is an explanatory diagram illustrating a distance calculation process. FIG. 7 illustrates a part of the trajectory 100 and the obstacle 210 that is the target of distance calculation for the range through which the substrate 30 (see FIG. 1 and the like) passes.

The calculation unit 21f (see FIG. 4) sets the moving point 100p that moves on the outline of the locus 100 shown in FIG. Further, the normal 100n of the locus 100 at the moving point 100p is calculated. When the obstacle 210 and the normal line 100n intersect while moving the moving point 100p along the outline of the trajectory 100, the distance between the moving point 100p and the obstacle 210 is calculated.

In addition, the determination unit 21g compares the calculated distance with a predetermined threshold, and when the calculated distance is smaller than the threshold, the determination unit 21g determines a point on the outer periphery of the obstacle 210 corresponding to the calculated distance as shown in FIG. The notification image 400 shown in FIG. Here, when the points on the outer periphery of the obstacle 210 are continuously below the threshold, the point having the smallest distance among the consecutive points is set as the target of the notification image 400. Instead of comparing with the threshold value, a point on the outer periphery of the obstacle 210 corresponding to the smallest distance among the calculated distances may be the target of the notification image 400.

In FIG. 7, a mark 401 (see FIG. 1) indicating a point on the outer periphery of the obstacle 210 corresponding to the minimum distance between the locus 100 and the obstacle 210, and a point 100 a on the outer shape of the locus 100 are shown. Shown for reference. FIG. 7 also shows the outer shape 30a of the substrate 30 corresponding to the point 100a on the outer shape of the trajectory 100 for reference.

Next, a display example of a still image of the robot 10 corresponding to the notification image 400 will be described with reference to FIG. FIG. 8 is a diagram illustrating a display example of a still image of the robot 10. FIG. 8 shows the posture of the robot 10 when the substrate 30 is at a position corresponding to the outer shape 30a shown in FIG.

The trajectory 100 is shown in the image 300b shown in FIGS. However, when the notification image 400 including the mark 401 and the distance information 402 is displayed, the operator may want to confirm the posture of the robot 10 corresponding to the displayed notification image 400.

Therefore, as shown in FIG. 8, if a still image of the robot 10 corresponding to the notification image 400 is displayed, confirmation of the posture of the robot 10 when the robot 10 or the substrate 30 and the obstacle 210 are close to each other is confirmed. Becomes easy. Therefore, if the still image of the robot 10 is displayed, the position and operation of the robot 10 can be easily reconsidered, which contributes to a reduction in workload.

In FIG. 8, a case where a still image of the robot 10 is displayed instead of the locus 100 is shown. However, the present invention is not limited to this, and the locus 100 and the robot 10 may be displayed in a superimposed manner. In this case, it is preferable to superimpose the trajectory 100 on the back side and the robot 10 on the front side because the posture of the robot 10 can be easily seen. Even if the locus 100 is not displayed on the back side, the display form is not limited as long as the posture of the robot 10 can be visually recognized, such as a semi-transparent display.

Next, a processing procedure executed by the robot simulation apparatus 20 (see FIG. 4) will be described with reference to FIG. FIG. 9 is a flowchart showing a processing procedure executed by the robot simulation apparatus 20.

The selection unit 21a of the control unit 21 in the robot simulation apparatus 20 receives selection of the target of the trajectory 100 via, for example, the selection screen 310 illustrated in FIG. 5 (step S101). And the production | generation part 21b produces | generates the locus | trajectory 100 reflecting the selection result of step S101 (step S102).

Subsequently, the combining unit 21d generates a combined image by combining the locus 100 and the background image 200 (step S103). For example, the calculating unit 21f calculates the distance between the trajectory 100 and the obstacle 210 included in the background image 200 in the procedure shown in FIG. 7 (step S104).

Further, the combining unit 21d determines whether or not the shift operation for changing the relative position between the locus 100 and the background image 200 is performed via the change screen 320 illustrated in FIG. 6 (Step S105). . And when it determines with it being after a shift operation (step S105, Yes), the point alert | reported before the shift operation is added to notification object (step S106). On the other hand, if it is determined that the shift operation has not been performed (No at Step S105), a point on the obstacle 210 closest to the trajectory 100 is set as a notification target (Step S107).

That is, when the determination condition of step S105 is satisfied (step S105, Yes), the point notified before the shift operation and the point on the obstacle 210 closest to the trajectory 100 become the notification target. In some cases, both are the same point. On the other hand, when the determination condition of step S105 is not satisfied (step S105, No), a point on the obstacle 210 closest to the trajectory 100 is a notification target.

Subsequently, based on the instruction from the instruction unit 21h, the synthesis unit 21d generates a notification image 400 including a point and a distance on the obstacle 210 that is a notification target (step S108). The locus 100 and the background image 200 are combined into a combined image (step S109).

Subsequently, the changing unit 21c determines whether or not the above-described shift operation has been performed via the change screen 320 illustrated in FIG. 6 (Step S110). If it is determined that there is a shift operation (step S110, Yes), the relative position between the trajectory 100 and the background image 200 is changed based on the shift amount input to the change screen 320 (step S111). The processes after step S103 are repeated. On the other hand, when the determination condition of step S110 is not satisfied (step S110, No), the process ends.

As described above, the robot simulation apparatus 20 according to this embodiment includes the generation unit 21b, the synthesis unit 21d, the display control unit 21e, the calculation unit 21f, the determination unit 21g, and the instruction unit 21h. The generation unit 21 b generates a trajectory 100 indicating a range through which the robot 10 that transports the substrate 30 passes. The combining unit 21d combines the background image 200 including the obstacles 210 arranged around the robot 10 and the trajectory 100.

The display control unit 21e causes the display unit 24 to display the combined image combined by the combining unit 21d. The calculating unit 21f calculates the distance between the trajectory 100 and the obstacle 210. The determination unit 21g determines that the locus 100 has approached the obstacle 210 when the distance calculated by the calculation unit 21f is smaller than a predetermined threshold. When the determination unit 21g determines that the locus 100 has approached the obstacle 210, the instruction unit 21h instructs the combining unit 21d to combine the notification image 400 including the distance calculated by the calculation unit 21f with the combined image. Instruct.

Therefore, according to the robot simulation apparatus 20 according to the present embodiment, it is possible to easily notify the operator of the possibility of interference between the robot 10 and the surrounding environment.

In addition, the robot 10 according to the present embodiment operates based on the teaching data 22a generated by the robot simulation device 20. Therefore, according to the robot 10 according to the present embodiment, interference with the surrounding environment can be prevented.

In the above embodiment, the robot 10 is a horizontal articulated robot. However, the robot 10 may be another type of robot such as a so-called serial link robot. Further, the shape of the substrate 30 is not limited to a circular shape, and may be other shapes such as a rectangular shape.

Further effects and modifications can be easily derived by those skilled in the art. Thus, the broader aspects of the present invention are not limited to the specific details and representative embodiments shown and described above. Accordingly, various modifications can be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents.

DESCRIPTION OF SYMBOLS 10 Robot 10a Main-body part 10b Elevating shaft 11 1st arm 12 2nd arm 13 Hand 13a Base 13b Fork part 13C Reference position 13CL Hand center line 20 Robot simulation apparatus 21 Control part

21a Selection part

21b Generation part

21c Change part

21d Composition part 21e Display control unit

21f Calculation unit

21g Determination unit

21h Instruction unit 22 Storage unit

22a Teaching data

22b Background information 23 Input unit 24 Display unit 30 Substrate 100 Trajectory 200 Background image 210 Obstacle 400 Notification image

Claims

A generating unit that generates a trajectory indicating a range through which a robot that transports a substrate passes;
A synthesis unit that synthesizes a background image including an obstacle arranged around the robot and the locus;
A display control unit that causes a display unit to display a combined image combined by the combining unit;
A calculation unit for calculating a distance between the trajectory and the obstacle;
A determination unit that determines that the locus has approached the obstacle when the distance is smaller than a predetermined threshold;
When the determination unit determines that the locus has approached the obstacle, the instruction unit instructs the combining unit to combine the notification image including the distance calculated by the calculation unit with the combined image. A robot simulation apparatus comprising:
The generator is
The robot simulation apparatus according to claim 1, wherein a superimposed image in which a still image of the robot during operation is superimposed at a predetermined time interval is generated as the trajectory.
The instruction unit includes:
The robot according to claim 2, wherein the synthesizing unit is instructed to synthesize the notification image including the distance and a point on the outer periphery of the obstacle corresponding to the distance with the synthesized image. Simulation device.
The instruction unit includes:
The robot simulation apparatus according to claim 3, wherein the synthesizing unit is instructed to synthesize the notification image including the smallest distance and the point corresponding to the distance with the synthesized image.
The instruction unit includes:
The robot simulation apparatus according to claim 4, wherein the synthesis unit is instructed to synthesize the still image of the robot corresponding to the point with the synthesized image.
A selection unit that selects one or more of the predetermined part and the substrate of the robot as the target of the trajectory;
The generator is
The robot simulation apparatus according to any one of claims 1 to 5, wherein the trajectory is generated for the object selected by the selection unit.
The robot simulation apparatus according to any one of claims 1 to 6, further comprising a changing unit that changes a relative position between the background image synthesized by the synthesizing unit and the locus.
The instruction unit includes:
As a result of changing the relative position in the changing unit, the combining unit is instructed to combine the notification image with the combined image even when the determination result by the determining unit changes from approach to non-approach. The robot simulation apparatus according to claim 7, wherein:
Generating a trajectory indicating a range through which a robot carrying the substrate passes;
Synthesizing a background image including obstacles arranged around the robot and the trajectory;
Displaying a synthesized image synthesized by the synthesizing step on a display unit;
Calculating a distance between the trajectory and the obstacle;
Determining that the trajectory has approached the obstacle when the distance is less than a predetermined threshold;
Instructing the synthesizing step to synthesize the notification image including the distance calculated in the calculating step with the synthesized image when it is determined in the determining step that the locus has approached the obstacle. A robot simulation method comprising the steps of:
A procedure for generating a trajectory indicating a range through which a robot carrying a substrate passes;
A procedure for synthesizing a background image including an obstacle placed around the robot and the locus;
A procedure for displaying a synthesized image synthesized by the procedure of synthesizing on a display unit;
Calculating the distance between the trajectory and the obstacle;
A procedure for determining that the trajectory has approached the obstacle when the distance is smaller than a predetermined threshold;
Instructing the compositing procedure to synthesize the notification image including the distance calculated in the calculating procedure with the composite image when the trajectory is determined to have approached the obstacle by the determining procedure. A robot simulation program that causes a computer to execute
A generating unit that generates a trajectory indicating a range through which a robot that transports a substrate passes;
A synthesis unit that synthesizes a background image including an obstacle arranged around the robot and the locus;
A display control unit that causes a display unit to display a combined image combined by the combining unit;
A calculation unit for calculating a distance between the trajectory and the obstacle;
A determination unit that determines that the locus has approached the obstacle when the distance is smaller than a predetermined threshold;
When the determination unit determines that the locus has approached the obstacle, the instruction unit instructs the combining unit to combine the notification image including the distance calculated by the calculation unit with the combined image. A robot that operates based on teaching data generated by a robot simulation device comprising: