WO2013177829A1 - Optical anti-counterfeit element and preparation method thereof - Google Patents

Optical anti-counterfeit element and preparation method thereof Download PDF

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Publication number
WO2013177829A1
WO2013177829A1 PCT/CN2012/076801 CN2012076801W WO2013177829A1 WO 2013177829 A1 WO2013177829 A1 WO 2013177829A1 CN 2012076801 W CN2012076801 W CN 2012076801W WO 2013177829 A1 WO2013177829 A1 WO 2013177829A1
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Prior art keywords
dielectric layer
security element
optical security
sub
element according
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PCT/CN2012/076801
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French (fr)
Chinese (zh)
Inventor
张巍巍
王晓利
孙凯
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中钞特种防伪科技有限公司
中国印钞造币总公司
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Publication of WO2013177829A1 publication Critical patent/WO2013177829A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1809Diffraction gratings with pitch less than or comparable to the wavelength
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/18Diffraction gratings
    • G02B5/1814Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G02B5/1819Plural gratings positioned on the same surface, e.g. array of gratings
    • G02B5/1823Plural gratings positioned on the same surface, e.g. array of gratings in an overlapping or superposed manner

Definitions

  • the invention relates to the field of optical anti-counterfeiting, in particular to an optical anti-counterfeiting component and a preparation method thereof. Background technique
  • the optically altered coatings can be rendered in different colors at different viewing angles, are easy to describe, are easily identifiable to the public, and cannot be mimicked or reproduced using electronic devices such as cameras, scanners, printers, etc., the optically altered coatings have high anti-counterfeiting capabilities and It is widely used for public security of high security securities such as banknotes.
  • the prior art mostly combines two kinds of optically-deformed layers to realize two kinds of light-changing effects.
  • the interference light-changing security element includes two light-varying regions, wherein one light-densing region includes a first light-varying structure, and the other light-variable region includes a second light-varying structure, and two regions at a certain viewing angle There are matching colors, and the two areas have different colors at other viewing angles.
  • the present invention is directed to the above-described drawbacks existing in the prior art, and provides an optical security element capable of overcoming the above-mentioned drawbacks and a method of fabricating the same.
  • the present invention provides an optical security element comprising a substrate, the substrate comprising a first surface and a second surface, a partial region on the first surface being a sub-wavelength microrelief structure, and a partial region being flat a surface structure, the sub-wavelength microrelief structure and the flat surface structure are sequentially laminated with a first dielectric layer, a second dielectric layer and a third dielectric layer, and the sub-wavelength microrelief structure region is at a specific viewing angle
  • the color of the flat surface structure region is the same, and the color of the sub-wavelength microrelief structure region and the flat surface structure region are different at other viewing angles.
  • the invention also provides a method of preparing an optical security element, the method comprising:
  • the substrate comprising a first surface and a second surface
  • a third dielectric layer is simultaneously formed on the second dielectric layer.
  • a subwavelength microrelief structure and a flat surface structure are formed on a first surface of a substrate of the optical security element according to the present invention, and the first medium is sequentially laminated on the subwavelength microrelief structure and the flat surface structure
  • the layer, the second dielectric layer and the third dielectric layer have a selective effect on the incident white light due to the plating structure composed of the three dielectric layers, so that when the incident angle changes, the corresponding optical path changes, and the interference band also A change occurs such that the color of the sub-wavelength microrelief structure region and the flat surface structure region changes as the viewing angle changes.
  • the subwavelength microrelief structure parameters can be achieved at a specific viewing angle, the subwavelength microrelief structure region and the flat surface structure region have the same color, and at other viewing angles, the subwavelength microrelief structure region and the flat surface structure There are significant differences in the colors of the areas.
  • "the same color” means that the perceived color of the human eye is the same or similar, and the reflection spectra of the two are not exactly the same.
  • the traditional process of achieving the same color in the two regions generally undergoes the process of "printing evaporation and demetallization evaporation", and in the above process, the precise positioning control of the printing and the precise control of the thickness of the coating in the two evaporation processes are large. Difficulty.
  • the structure and preparation method of the optical security element according to the present invention can solve the above problems well.
  • the subwavelength microrelief structure region and the flat surface structure region involved in the present invention can be obtained by laser direct etching or electron beam direct etching and other micromachining methods, and the laser direct etching or electron direct etching technology has extremely high precision. It is able to reach the nanometer level so that precise registration of these two regions can be achieved.
  • the first dielectric layer, the second dielectric layer and the third dielectric layer are simultaneously vapor-deposited on the sub-wavelength microrelief structure region and the flat surface structure region, thereby realizing the two regions in a specific Observe the optical effects of the same color and different colors at other viewing angles. Therefore, it is possible to achieve a good anti-counterfeiting effect by designing an appropriate plating thickness without separately controlling the thickness of the plating in the two regions.
  • the three dielectric layers in the optical security element according to the present invention can be formed in one vapor deposition process, the process complexity is also simplified.
  • FIG. 1 is a cross-sectional view of an optical security element in accordance with an embodiment of the present invention
  • Figure 2 is a diagram showing changes in color coordinates of different regions of the optical security element according to the present invention as a function of observation angle;
  • Figure 3 is another variation of the color coordinates of different regions of the optical security element according to the present invention as a function of viewing angle
  • FIG. 4 is a cross-sectional view of an optical security element having a hollow structure in accordance with an embodiment of the present invention.
  • FIG. 5 is still another schematic diagram of an optical security element according to an embodiment of the present invention.
  • FIG. 6 is a flow chart of preparing an optical security element in accordance with an embodiment of the present invention. detailed description
  • an optical security element according to an embodiment of the present invention includes a substrate 3 including a first surface 31 and a second surface 32, and a partial region on the first surface 31 is a sub-region
  • the wavelength microrelief structure and a partial region are flat surface structures.
  • the first dielectric layer 101, the second dielectric layer 102, and the third dielectric layer 103 are sequentially laminated on the subwavelength microrelief structure and the flat surface structure region, thereby respectively forming the interference structure 10 located in the subwavelength microrelief structure region and An interference structure 20 located in a flat surface structure region.
  • the coordinate z in Fig. 1 indicates the vertical direction
  • the coordinate X indicates the horizontal direction.
  • the three-layer dielectric layer structure composed of the first dielectric layer 101, the second dielectric layer 102 and the third dielectric layer 103 has a Fabry-Perot cavity structure, which has a selective effect on incident white light, and the emitted light only contains a certain The light of these bands forms a specific color; however, when the incident angle changes, the corresponding optical path changes, and the interference band changes, causing the color of the display to change accordingly, thereby exhibiting a light-changing effect.
  • the three-layer dielectric layer optically variable structure according to the present invention is combined with the sub-wavelength microrelief structure, interference and diffraction work together to obtain other wavelength bands, which is related to the incident angle of the light, and also obtains a light-changing effect. .
  • two kinds of light-changing effects are obtained by one vapor-deposited optically variable structure.
  • each interface of the dielectric layer can be considered as a virtual equivalent interface.
  • the sub-wavelength microrelief structure according to the present invention has a plurality of parameters, such as a period, a groove depth, a groove shape, etc., when combining a sub-wavelength microrelief structure with a three-layer dielectric layer structure, it is also necessary to consider three layers of dielectric layer plating. Parameters such as thickness of each layer and refractive index of the material.
  • vector diffraction theory such as rigorous coupling wave method (RCW) and time domain finite difference method (FDTD) is used to solve Maxwell's equations in combination with boundary conditions. The theory of vector diffraction is discussed in detail in "Micro-Optics and Systems" edited by Yang Guoguang, published by Zhejiang University Press.
  • the design parameters of the optical security element it is possible to determine the design parameters of various aspects, such as the groove depth of the relief structure, based on the specific conditions of the problem and the optical feature design algorithm and programming calculation.
  • the program is programmed according to the boundary conditions of the sub-wavelength multi-layer structure plating structure: Calculate according to the initial structural parameters; optimize the structural parameters according to the calculation results; then calculate and optimize according to the optimized parameters until satisfactory results are achieved .
  • the first dielectric layer 101 and the third dielectric layer 103 have a refractive index greater than or equal to 1.7, and the material thereof is selected from, for example, ZnS, TiN, Ti0 2 , TiO, Ti 2 0 3 , Ti. Any material or combination of 3 0 5 , Ta 2 0 5 , Nb 2 0 5 , Ce0 2 , Bi 2 0 3 , Cr 2 0 3 , Fe 2 0 3 , etc., and further, the first dielectric layer 101 and the third medium
  • the layer 103 may have a thickness of 10 nm to 300 nm, preferably 50 nm to 200 nm.
  • the second dielectric layer 102 has a refractive index of less than 1.7, the material of which is selected from, for example, Any material or combination of Si0 2 , MgF 2 , Na 3 A10 6 , A1 2 0 3 , and the second dielectric layer 102 may have a thickness of 50 nm to 100 nm, preferably 100 nm to 500 nm.
  • the sub-wavelength microrelief structure may be a one-dimensional grating and the direction is variable.
  • the period of the sub-wavelength microrelief structure is also variable, wherein the period of the sub-wavelength microrelief structure in the X direction and/or the y direction may be 50 nm to 500 nm, preferably 200 nm to 400 nm.
  • the groove depth of the sub-wavelength microrelief structure is also variable, wherein the groove depth is in the range of lOnm to 500 nm, preferably in the range of 50 nm to 200 nm.
  • the groove shape of the sub-wavelength microrelief structure is also variable, for example, the groove shape may be at least one of a sinusoidal shape, a rectangular shape, and a zigzag shape.
  • the sub-wavelength microrelief structure is a one-dimensional sinusoidal grating having a characteristic period of 340 nm and a trench depth of 180 nm ;
  • the first dielectric layer 101 is TiN, the thickness is 50 nm, and the second dielectric layer 102 is A1 2 0 3 , and the thickness is At 180 nm, the third dielectric layer 103 is Ti0 2 and has a thickness of 70 nm.
  • Fig. 2 shows the variation of the color coordinate of the interference structure 10 and the interference structure 20 of the optical security element according to the present invention with the observation angle in this case.
  • the color coordinate of the interference structure 10 is (-3.2, 67.8), which is yellow; the color coordinate of the interference structure 20 is (2.4, 78.1), which also appears yellow, both The color difference ⁇ is 13.2, and the two colors are the same for human vision.
  • the color coordinate of the interference structure 10 is (1.9, -47.9), which is blue; the color coordinate of the interference structure 20 is (-24.4, 63.9), which is green, and the colors of the two are significant. The difference.
  • the sub-wavelength micro-relief structure region and the flat surface region covered with the sub-wavelength grating can form characters and patterns of a specific meaning, and the characters and patterns are hidden in the background when the front view is observed, and the oblique observation is performed. Text, pattern appearing optics Anti-counterfeiting effect.
  • CIELAB chromaticity space is used when evaluating the color of the sub-wavelength microrelief structure region and the flat surface structure region.
  • CIELAB (CIELab) Chromaticity space is the uniform color space recommended by the International Commission on Illumination in 1976. In 1987, GB792-87 released in China adopted LAB space as the national standard. In the current color design and reproduction industries, CIELAB space has been widely used in color correction, calculation and DTP systems. Where +a represents red, -a represents green, +b represents yellow, -b represents blue, and L represents brightness.
  • Table 1 gives the L, a, b parameters of the interference structure 10 and the interference structure 20 in this example at 0 ° and 40 ° observation angles, respectively giving the difference ⁇ between the two colors, where ⁇ uses the following formula obtain:
  • the sub-wavelength microrelief structure is a one-dimensional sinusoidal grating having a characteristic period of 280 nm and a groove depth of 150 nm;
  • the first dielectric layer 101 is Ti0 2 , the thickness is 55 nm, and the second dielectric layer 102 is A1 2 0 3 , thickness 270 nm,
  • the third dielectric layer 103 is Ti0 2 and has a thickness of 85 nm.
  • the sub-wavelength microrelief structure is a one-dimensional sinusoidal grating having a characteristic period of 250 nm and a groove depth of 80 nm ; the first dielectric layer 101 is Ti0 2 , the thickness is 100 nm, the second dielectric layer 102 is A1 2 0 3 , and the thickness is 210 nm, the third dielectric layer 103 is Ti0 2 , and the thickness is 100 nm, then the first observation angle When the degree is 0°, both the interference structure 10 and the interference structure 20 appear blue; when the second viewing angle is 20°, the interference structure 10 appears purple, and the interference structure 20 appears orange, and the colors of the two have significant differences.
  • the sub-wavelength microrelief structure is a one-dimensional sinusoidal grating with a characteristic period of 340 m.
  • the trench depth is 130 nm; the first dielectric layer 101 is Ti0 2 , the thickness is 100 nm, the second dielectric layer 102 is Na 3 AlF 6 , the thickness is 250 nm, and the third dielectric layer 103 is ZnS and has a thickness of 40 nm.
  • the color coordinate of the interference structure 10 is (3.7, 46.0), which is yellow; the color coordinate of the interference structure 20 is (-44.2, -19.1), which is blue-green, two The color difference ⁇ is 82.2, and the color has a significant difference.
  • the color coordinate of the interference structure 10 is (-32.3, -36.6), which is blue; the color coordinate of the interference structure 20 is (-9.2, -38.8), which also appears blue, two The color difference ⁇ is 23.4, the colors are similar, and the human eye cannot distinguish the obvious difference.
  • the color difference ⁇ increases to 110.2, and the color difference between the two becomes larger again.
  • the optical security element according to an embodiment of the present invention may further have a hollow structure 5.
  • a first region 1 and a second region 2 are provided on the first surface 31 of the substrate 3 of the optical security element, wherein the first region 1 is a sub-wavelength microrelief structure covered with an interference structure 10;
  • the second region 2 is a flat surface structure covered with the interference structure 20, wherein the interference structure 10 and the interference structure 20 can adopt various structures as described above.
  • An absorbing layer 4 (for example, black ink or other color absorbing paint) is selectively applied or printed on the second surface 32 of the substrate 3, thereby forming a hollowed out region 5, wherein the hollowed out region 5 can be appropriately selected by Form words, logos, patterns.
  • the interference structures 10 and 20 over the coated absorbing layer 4 have only a reflection spectrum, presenting a bright, easily recognizable color, and the interference structures 10 and 20 above the hollowed out region 5 are in a transparent state.
  • a carrier such as paper
  • the color of the carrier such as paper is mainly exhibited.
  • the absorption layer 4 absorbs the transmitted light, enhances the recognition of the reflected light by the human eye, and enhances the visual effect of the optical security element according to the present invention.
  • Figure 5 shows a further embodiment of an optical security element according to the invention.
  • the first surface 31 of the substrate 3 is covered with at least two sub-wavelength gratings whose directions are perpendicular to each other, and the sub-wavelength grating is covered with the multi-layer dielectric layer plating structure as described above, thereby forming the interference structure 10 and interfering.
  • the interference structure 10 In the vertical observation, the interference structure 10, the interference structure 20, and the interference structure 30 have the same color; when the angle is obliquely observed, the interference structure 10 is maintained in color. The color does not change, the color of the interference structure 20 and the interference structure 30 changes and the color obtained after the change is different; at this time, the optical security element is rotated by 90°, the interference structure 10 and the interference structure 30 undergo color exchange, and the color of the interference structure 20 remains. Keep the angle down There is no color. This feature can be used to realize the optical characteristics of the image when hidden, tilted and rotated during vertical observation.
  • the sub-wavelength microrelief structure is a one-dimensional sinusoidal grating having a characteristic period of 340 nm and a groove depth of 130 nm, and having two sub-wavelength grating regions perpendicular to each other on the first surface 31 of the substrate 3, thereby Forming an interference structure 10, an interference structure 20, and an interference structure 30, wherein the interference structure 10 and the interference structure 30 are respectively covered on two mutually perpendicular sub-wavelength gratings, the interference structure 20 is located on a flat surface, and the sub-wavelength grating is covered There is a multilayer dielectric layer plating structure as described above, wherein the first dielectric layer 101 is TiN, the thickness is 50 nm, the second dielectric layer 102 is A1 2 0 3 , the thickness is 180 nm, and the third dielectric layer 103 is Ti0 2 , thickness It is 70 nm.
  • the colors of the interference structure 10, the interference structure 20, and the interference structure 30 are both yellow; when the optical security element is tilted so that the second viewing angle is 40°, the color of the interference structure 10 becomes Blue, the interference structure 20 turns green, the color of the interference structure 30 remains yellow; when the optical security element is rotated 90° at the oblique angle, the color of the interference structure 20 is still green, and the color of the interference structure 10 turns blue The color of the interference structure 30 changes to yellow, and the color of the interference structure 10 and the interference structure 30 is interchanged.
  • FIG. 4 and FIG. 5 are only examples. In fact, according to actual needs, various parameters and arrangement manners of the sub-wavelength microrelief structure may be optimized, combined, and covered with corresponding dielectric layers. And combined with hollowing out to form a high security anti-counterfeiting component.
  • the substrate 3 described above may be a transparent or non-transparent, colored or colorless film.
  • it may be polyethylene terephthalate, polyvinyl chloride, polyethylene, polycarbonate, polypropylene, metal, glass, paper, etc., and may have a thickness of 5 to 500 ⁇ m, preferably 10 to 100 ⁇ . Micron.
  • the substrate 3 when the light-transmitting observation mode is employed, the substrate 3 may be subjected to no treatment or a transparent/translucent coating to transmit light.
  • color matching herein refers to a similarity in color to a certain degree, and does not mean that the colors must be identical.
  • the optical security element according to the present invention can be manufactured in the form of a window security thread, a sticker, a label, and the like.
  • One or both sides of the optical security element for ease of application on the product It is coated with an adhesive to adhere to the carrier by a process such as hot stamping or pasting.
  • the optical security element according to the present invention can be applied to high security or high value-added products such as banknotes, cards, and high-end goods.
  • the present invention also provides a method of preparing an optical security element, the method comprising:
  • the sub-wavelength microrelief structure can be formed by laser double beam interference exposure, laser direct exposure or electron beam direct engraving, or batch copying by ultraviolet casting, molding, nanoimprinting.
  • the sub-wavelength microrelief structure can be made into a master by a holographic interferometry, a laser direct lithography technique, an electron beam etching technique, etc., and can be made into a working plate by an electroforming process, and then transferred to a base by a molding process such as molding and UV replication. On the material.
  • the first dielectric layer, the second dielectric layer and the third dielectric layer may be formed by physical vapor deposition or chemical vapor deposition such as thermal evaporation, electron beam evaporation, magnetron sputtering or the like.
  • the dielectric layer structure according to the present invention can be formed by a single evaporation process, and the micro-nano processing process such as laser direct etching or electron beam direct etching can control the position of the sub-wavelength microrelief structure on the micrometer or even nanometer level.
  • the optical security element according to the present invention not only improves the anti-counterfeiting performance, but also reduces the process difficulty and saves cost.
  • optical security element according to the present invention has been described above with reference to the preferred embodiments, but those skilled in the art will appreciate that various modifications and changes can be made to the present invention without departing from the spirit and scope of the invention. modify.

Abstract

An optical anti-counterfeit element comprises a base material (3). The base material (3) comprises a first surface (31) and a second surface (32). A part of areas on the first surface (31) are of a sub-wavelength relief structure, and a part of the areas are of a flat surface structure. A first dielectric layer (101), a second dielectric layer (102), and a third dielectric layer (103) are successively stacked on the sub-wavelength relief structure and the flat surface structure. From a specific observing angle, the color of areas of the sub-wavelength relief structure is the same as that of areas of the flat surface structure, and from another observing angle, the color of the areas of the sub-wavelength relief structure is different from that of the areas of the flat surface structure. Also provided is a method for preparing an optical anti-counterfeit element. The optical anti-counterfeit element overcomes the defects that the process is complex and a coating thickness is difficult to be accurately controlled for two coating structures to implement color matching in the prior art.

Description

一种光学防伪元件及其制备方法  Optical security element and preparation method thereof
技术领域  Technical field
本发明涉及光学防伪领域, 尤其涉及一种光学防伪元件及其制备方法。 背景技术  The invention relates to the field of optical anti-counterfeiting, in particular to an optical anti-counterfeiting component and a preparation method thereof. Background technique
由于光变镀层在不同的观察角度下能够呈现不同的颜色、 便于描述、 易于公众识别且无法利用照相机、 扫描仪、 打印机等电子设备进行模仿或 复制, 因此光变镀层具有很高的防伪能力并被广泛用于钞票等高防伪有价 证券的公众防伪。  Because the optically altered coatings can be rendered in different colors at different viewing angles, are easy to describe, are easily identifiable to the public, and cannot be mimicked or reproduced using electronic devices such as cameras, scanners, printers, etc., the optically altered coatings have high anti-counterfeiting capabilities and It is widely used for public security of high security securities such as banknotes.
为了提高光变镀层的防伪能力, 现有技术多是将两种光变镀层组合在 一起来实现两种光变效果。例如, US5766738、 US6114018以及 US7729026 提出了通过选择适当的光变镀层厚度与颜色来实现光变匹配特征的干涉光 变防伪元件。 具体地, 该干涉光变防伪元件包括两个光变区域, 其中一个 光变区域包含第一光变结构, 另一光变区域包含第二光变结构, 而且在某 一个观察角度下两个区域具有匹配的颜色, 而在其他观察角度下两个区域 都具有不同的颜色。  In order to improve the anti-counterfeiting ability of the optically-deformed layer, the prior art mostly combines two kinds of optically-deformed layers to realize two kinds of light-changing effects. For example, U.S. Patent No. 5,766,738, U.S. Patent No. 6,114, 018, issued to U.S. Pat. Specifically, the interference light-changing security element includes two light-varying regions, wherein one light-densing region includes a first light-varying structure, and the other light-variable region includes a second light-varying structure, and two regions at a certain viewing angle There are matching colors, and the two areas have different colors at other viewing angles.
为了保证良好的颜色匹配效果, 需要精确控制两个区域的镀层厚度。 然而, 在实际生产中, 通常难以精确控制上述干涉光变防伪元件的镀层厚 度以达到颜色匹配的要求, 从而导致在设计的匹配角度下颜色有明显差异, 影响了防伪效果。 另外, 两种镀层不能在一次蒸镀过程中获得, 从而必须 增加精确的定位印刷保护胶、 脱金属以及二次蒸镀光变镀层等工艺, 这增 加了工艺复杂度和成本。 发明内容 本发明针对现有技术中存在的上述缺陷, 提供一种能够克服上述缺陷 的光学防伪元件及其制备方法。 In order to ensure a good color matching effect, it is necessary to precisely control the plating thickness of the two regions. However, in actual production, it is often difficult to accurately control the plating thickness of the above-mentioned interference light-changing security element to achieve the color matching requirement, thereby causing a significant difference in color at the matching angle of the design, which affects the anti-counterfeiting effect. In addition, the two coatings cannot be obtained in a single evaporation process, so that it is necessary to add precise processes such as printing protective glue, demetallization, and secondary vapor deposition, which increases process complexity and cost. SUMMARY OF THE INVENTION The present invention is directed to the above-described drawbacks existing in the prior art, and provides an optical security element capable of overcoming the above-mentioned drawbacks and a method of fabricating the same.
本发明提供一种光学防伪元件, 该光学防伪元件包括基材, 所述基材 包括第一表面和第二表面, 所述第一表面上的部分区域为亚波长微浮雕结 构、 部分区域为平坦表面结构, 所述亚波长微浮雕结构和所述平坦表面结 构上均依次层叠有第一介质层、 第二介质层和第三介质层, 在特定观察角 度下, 所述亚波长微浮雕结构区域和所述平坦表面结构区域的颜色相同, 在其他观察角度, 所述亚波长微浮雕结构区域和所述平坦表面结构区域的 颜色不相同。  The present invention provides an optical security element comprising a substrate, the substrate comprising a first surface and a second surface, a partial region on the first surface being a sub-wavelength microrelief structure, and a partial region being flat a surface structure, the sub-wavelength microrelief structure and the flat surface structure are sequentially laminated with a first dielectric layer, a second dielectric layer and a third dielectric layer, and the sub-wavelength microrelief structure region is at a specific viewing angle The color of the flat surface structure region is the same, and the color of the sub-wavelength microrelief structure region and the flat surface structure region are different at other viewing angles.
本发明还提供一种制备光学防伪元件的方法, 该方法包括:  The invention also provides a method of preparing an optical security element, the method comprising:
提供基材, 所述基材包括第一表面和第二表面;  Providing a substrate, the substrate comprising a first surface and a second surface;
在所述第一表面上形成亚波长微浮雕结构, 使得所述第一表面上的部 分区域为所述亚波长微浮雕结构、 部分区域为平坦表面结构;  Forming a sub-wavelength microrelief structure on the first surface such that a portion of the first surface is a sub-wavelength microrelief structure and a portion of the region is a flat surface structure;
在亚波长微浮雕结构区域和平坦表面结构区域上同时形成第一介质 层;  Forming a first dielectric layer simultaneously on the sub-wavelength microrelief structure region and the flat surface structure region;
在所述第一介质层上同时形成第二介质层;  Forming a second dielectric layer simultaneously on the first dielectric layer;
在所述第二介质层上同时形成第三介质层。  A third dielectric layer is simultaneously formed on the second dielectric layer.
由于根据本发明的光学防伪元件的基材的第一表面上形成有亚波长微 浮雕结构和平坦表面结构, 而且所述亚波长微浮雕结构和所述平坦表面结 构上均依次层叠有第一介质层、 第二介质层和第三介质层, 由于由三层介 质层所构成的镀层结构对入射的白光具有选择作用, 这样在入射角度变化 时, 与之对应的光程发生变化, 干涉波段也发生变化, 从而使得亚波长微 浮雕结构区域和平坦表面结构区域的颜色随着观察角度的变化而变化。 当 通过适当设计由第一介质层、 第二介质层和第三介质层构成的镀层结构、 亚波长微浮雕结构的参数时, 可以实现在特定的观察角度下, 亚波长微浮 雕结构区域和平坦表面结构区域具有相同的颜色, 在其他观察角度下, 亚 波长微浮雕结构区域和平坦表面结构区域的颜色存在明显的差异。 在此说 明 "相同的颜色"指人眼观察感知到的颜色相同或相近, 并非两者反射光 谱完全相同。 Since a subwavelength microrelief structure and a flat surface structure are formed on a first surface of a substrate of the optical security element according to the present invention, and the first medium is sequentially laminated on the subwavelength microrelief structure and the flat surface structure The layer, the second dielectric layer and the third dielectric layer have a selective effect on the incident white light due to the plating structure composed of the three dielectric layers, so that when the incident angle changes, the corresponding optical path changes, and the interference band also A change occurs such that the color of the sub-wavelength microrelief structure region and the flat surface structure region changes as the viewing angle changes. When suitably designed by a first dielectric layer, a second dielectric layer, and a third dielectric layer, The subwavelength microrelief structure parameters can be achieved at a specific viewing angle, the subwavelength microrelief structure region and the flat surface structure region have the same color, and at other viewing angles, the subwavelength microrelief structure region and the flat surface structure There are significant differences in the colors of the areas. Here, "the same color" means that the perceived color of the human eye is the same or similar, and the reflection spectra of the two are not exactly the same.
传统工艺实现两区域颜色相同的方式一般要经过 "印刷 蒸镀 脱金属 蒸发" 的过程, 并且在上述工艺中, 印刷的定位套准精度、 两 次蒸镀中镀层厚度的精确控制均存在很大难度。 本发明中涉及的光学防伪 元件的结构与制备方法则能够很好的解决上述问题。 本发明中所涉及的亚 波长微浮雕结构区域和平坦表面结构区域均可以通过激光直刻或电子束直 刻等微加工方法获得, 而激光直刻或电子直刻等技术具有极高的精度, 能 够达到纳米级别, 从而可以实现这两个区域的精确套准定位。 当亚波长微 浮雕结构的参数决定后, 在亚波长微浮雕结构区域与平坦表面结构区域上 同时依次蒸镀第一介质层、 第二介质层和第三介质层, 即可实现两区域在 特定观察角度下颜色相同、 其他观察角度下颜色不同的光学效果。 因此能 够在不需要分别精确控制两区域镀层厚度的情况下, 通过设计适当的镀层 厚度来实现很好的防伪效果。 另外, 由于根据本发明的光学防伪元件中的 三层介质层能够在一次蒸镀过程中形成, 所以还简化了工艺复杂度。 附图说明  The traditional process of achieving the same color in the two regions generally undergoes the process of "printing evaporation and demetallization evaporation", and in the above process, the precise positioning control of the printing and the precise control of the thickness of the coating in the two evaporation processes are large. Difficulty. The structure and preparation method of the optical security element according to the present invention can solve the above problems well. The subwavelength microrelief structure region and the flat surface structure region involved in the present invention can be obtained by laser direct etching or electron beam direct etching and other micromachining methods, and the laser direct etching or electron direct etching technology has extremely high precision. It is able to reach the nanometer level so that precise registration of these two regions can be achieved. After the parameters of the sub-wavelength microrelief structure are determined, the first dielectric layer, the second dielectric layer and the third dielectric layer are simultaneously vapor-deposited on the sub-wavelength microrelief structure region and the flat surface structure region, thereby realizing the two regions in a specific Observe the optical effects of the same color and different colors at other viewing angles. Therefore, it is possible to achieve a good anti-counterfeiting effect by designing an appropriate plating thickness without separately controlling the thickness of the plating in the two regions. In addition, since the three dielectric layers in the optical security element according to the present invention can be formed in one vapor deposition process, the process complexity is also simplified. DRAWINGS
图 1是根据本发明一种实施方式的光学防伪元件的剖面图;  1 is a cross-sectional view of an optical security element in accordance with an embodiment of the present invention;
图 2是根据本发明的光学防伪元件的不同区域的颜色坐标随观察角度 的变化情况;  Figure 2 is a diagram showing changes in color coordinates of different regions of the optical security element according to the present invention as a function of observation angle;
图 3是根据本发明的光学防伪元件的不同区域的颜色坐标随观察角度 的另一变化情况;  Figure 3 is another variation of the color coordinates of different regions of the optical security element according to the present invention as a function of viewing angle;
图 4是根据本发明一种实施方式的具有镂空结构的光学防伪元件的剖 图 5是根据本发明一种实施方式的光学防伪元件的又一示意图; 4 is a cross-sectional view of an optical security element having a hollow structure in accordance with an embodiment of the present invention. FIG. 5 is still another schematic diagram of an optical security element according to an embodiment of the present invention; FIG.
图 6是根据本发明一种实施方式的制备光学防伪元件的流程图。 具体实施方式  6 is a flow chart of preparing an optical security element in accordance with an embodiment of the present invention. detailed description
下面结合附图来详细描述根据本发明的光学防伪元件及其制备方法。 如图 1所示, 根据本发明一种实施方式的光学防伪元件包括基材 3, 所 述基材 3包括第一表面 31和第二表面 32, 所述第一表面 31上的部分区域 为亚波长微浮雕结构、 部分区域为平坦表面结构。 所述亚波长微浮雕结构 和平坦表面结构区域上均依次层叠有第一介质层 101、第二介质层 102以及 第三介质层 103, 从而分别形成位于亚波长微浮雕结构区域的干涉结构 10 和位于平坦表面结构区域的干涉结构 20。 其中, 图 1中的坐标 z表示垂直 方向, 坐标 X表示水平方向。  The optical security element according to the present invention and a method of manufacturing the same will be described in detail below with reference to the accompanying drawings. As shown in FIG. 1, an optical security element according to an embodiment of the present invention includes a substrate 3 including a first surface 31 and a second surface 32, and a partial region on the first surface 31 is a sub-region The wavelength microrelief structure and a partial region are flat surface structures. The first dielectric layer 101, the second dielectric layer 102, and the third dielectric layer 103 are sequentially laminated on the subwavelength microrelief structure and the flat surface structure region, thereby respectively forming the interference structure 10 located in the subwavelength microrelief structure region and An interference structure 20 located in a flat surface structure region. Here, the coordinate z in Fig. 1 indicates the vertical direction, and the coordinate X indicates the horizontal direction.
由第一介质层 101、第二介质层 102和第三介质层 103构成的三层介质 层结构具有法布里 -泊罗谐振腔结构, 其对入射的白光具有选择作用, 出射 光线只包含某些波段的光线, 形成特定的颜色; 但当入射角度变化时, 与 之相对应的光程发生变化, 干涉波段发生变化, 导致呈现的颜色也随之变 化, 从而呈现光变效果。  The three-layer dielectric layer structure composed of the first dielectric layer 101, the second dielectric layer 102 and the third dielectric layer 103 has a Fabry-Perot cavity structure, which has a selective effect on incident white light, and the emitted light only contains a certain The light of these bands forms a specific color; however, when the incident angle changes, the corresponding optical path changes, and the interference band changes, causing the color of the display to change accordingly, thereby exhibiting a light-changing effect.
当将根据本发明的三层介质层光变结构与亚波长微浮雕结构组合时, 干涉与衍射共同作用, 可以得到其他波段, 这种作用与光线的入射角度相 关, 同样获得一种光变效果。 这样就通过一次蒸镀光变结构获得两种光变 效果。 当适当选择亚波长微浮雕结构的特征周期与介质层参数后, 可以实 现同色异步现象, 即在一个观察角度下, 亚波长微浮雕区域与无亚波长微 浮雕的平面区域的反射 /透射光谱不同但颜色相同或相近; 当观察角度发生 变化时, 两者光变效果不同, 各自经历不同的光变过程, 产生差别。 这将 在下文中结合具体参数进行详细描述。 可以利用 Maxwell方程计算电场和磁场矢量经过各层和各界面处的强 度和相位变化, 并考虑边界条件, 来获得各个介质层以及各个界面对光线 产生的相位差和强度变化参数, 从而实现根据本发明的光学防伪元件中的 三层介质层镀层结构的参数设计。 具体计算时, 可将介质层各界面考虑为 虚拟的等效界面, 通过计算组合导纳和膜层的特征矩阵获得光线在镀层中 传播的全部信息, 特别是强度随波长的变化关系, 即镀层的反射光谱。 最 后通过将反射光谱与三刺激值函数进行积分获得镀层的在 CIE色彩空间中 颜色坐标。 When the three-layer dielectric layer optically variable structure according to the present invention is combined with the sub-wavelength microrelief structure, interference and diffraction work together to obtain other wavelength bands, which is related to the incident angle of the light, and also obtains a light-changing effect. . Thus, two kinds of light-changing effects are obtained by one vapor-deposited optically variable structure. When the characteristic period of the sub-wavelength microrelief structure and the dielectric layer parameters are properly selected, the same color asynchronous phenomenon can be realized, that is, the reflection/transmission spectrum of the sub-wavelength microrelief region and the planar region without the subwavelength microrelief are different under one observation angle. But the colors are the same or similar; when the observation angle changes, the two light-changing effects are different, and each undergoes different light-changing processes, resulting in a difference. This will be described in detail below in conjunction with specific parameters. The Maxwell equation can be used to calculate the intensity and phase changes of the electric and magnetic field vectors through the layers and interfaces, and the boundary conditions are used to obtain the phase difference and intensity variation parameters of the light in each dielectric layer and each interface. Parameter design of the three-layer dielectric layer plating structure in the optical security element of the invention. In the specific calculation, each interface of the dielectric layer can be considered as a virtual equivalent interface. By calculating the combined admittance and the characteristic matrix of the film layer, all the information of the light propagating in the coating layer is obtained, especially the relationship of the intensity with the wavelength, that is, the plating layer. The reflection spectrum. Finally, the color coordinates of the plating in the CIE color space are obtained by integrating the reflection spectrum with the tristimulus value function.
根据本发明的亚波长微浮雕结构具有多项参数, 例如周期、 槽深、 槽 型等, 在将亚波长微浮雕结构与三层介质层结构组合时, 还需考虑三层介 质层镀层中的各层厚度、 材料折射率等参数。 具体设计时, 需利用严格耦 合波法 (RCW)、 时域有限差分法 (FDTD) 等矢量衍射理论, 结合边界条 件求解麦克斯韦方程组。 矢量衍射理论在浙江大学出版社出版的、 杨国光 编著的 《微光学与系统》 中有详细的论述。 在设计根据本发明的光学防伪 元件的结构参数时, 可以从基本理论出发, 根据问题的具体情况以及要实 现光学特征设计算法、 编程计算, 最终确定各方面设计参数, 例如浮雕结 构的槽深、 槽型、 占空比以及 X方向或 /和 y方向上的特征尺寸, 根据本发 明的镀层的层数以及各层厚度、 金属材料、 介质材料、 基材材料等。 然后 依据光学矢量理论, 根据亚波长多层结构镀层结构的边界条件编制程序: 根据初始结构参数进行计算; 根据计算结果优化结构参数; 再根据优化后 的参数进行计算、 优化, 直到达到满意的结果。  The sub-wavelength microrelief structure according to the present invention has a plurality of parameters, such as a period, a groove depth, a groove shape, etc., when combining a sub-wavelength microrelief structure with a three-layer dielectric layer structure, it is also necessary to consider three layers of dielectric layer plating. Parameters such as thickness of each layer and refractive index of the material. In the specific design, vector diffraction theory such as rigorous coupling wave method (RCW) and time domain finite difference method (FDTD) is used to solve Maxwell's equations in combination with boundary conditions. The theory of vector diffraction is discussed in detail in "Micro-Optics and Systems" edited by Yang Guoguang, published by Zhejiang University Press. When designing the structural parameters of the optical security element according to the present invention, it is possible to determine the design parameters of various aspects, such as the groove depth of the relief structure, based on the specific conditions of the problem and the optical feature design algorithm and programming calculation. The groove shape, the duty ratio, and the feature size in the X direction or/and the y direction, the number of layers of the plating layer according to the present invention, and the thickness of each layer, the metal material, the dielectric material, the substrate material, and the like. Then according to the optical vector theory, the program is programmed according to the boundary conditions of the sub-wavelength multi-layer structure plating structure: Calculate according to the initial structural parameters; optimize the structural parameters according to the calculation results; then calculate and optimize according to the optimized parameters until satisfactory results are achieved .
在根据本发明的一个优选实施方式中, 第一介质层 101 和第三介质层 103的折射率大于或等于 1.7,其材料选自例如 ZnS、 TiN、 Ti02、 TiO、 Ti203、 Ti305、 Ta205、 Nb205、 Ce02、 Bi203、 Cr203、 Fe203等中的任意材料或组合, 而且,第一介质层 101和第三介质层 103的厚度可以为 10nm至 300nm,优 选为 50nm至 200nm。 第二介质层 102的折射率小于 1.7, 其材料选自例如 Si02、 MgF2、 Na3A106、 A1203中的任意材料或组合, 而且第二介质层 102 的厚度可以为 50nm至 lOOOnm, 优选为 lOOnm至 500nm。 In a preferred embodiment according to the present invention, the first dielectric layer 101 and the third dielectric layer 103 have a refractive index greater than or equal to 1.7, and the material thereof is selected from, for example, ZnS, TiN, Ti0 2 , TiO, Ti 2 0 3 , Ti. Any material or combination of 3 0 5 , Ta 2 0 5 , Nb 2 0 5 , Ce0 2 , Bi 2 0 3 , Cr 2 0 3 , Fe 2 0 3 , etc., and further, the first dielectric layer 101 and the third medium The layer 103 may have a thickness of 10 nm to 300 nm, preferably 50 nm to 200 nm. The second dielectric layer 102 has a refractive index of less than 1.7, the material of which is selected from, for example, Any material or combination of Si0 2 , MgF 2 , Na 3 A10 6 , A1 2 0 3 , and the second dielectric layer 102 may have a thickness of 50 nm to 100 nm, preferably 100 nm to 500 nm.
在根据本发明的一个优选实施方式中, 所述亚波长微浮雕结构可以为 一维光栅且方向可变。 而且, 所述亚波长微浮雕结构的周期也是可变的, 其中, 所述亚波长微浮雕结构在 X方向和 /或 y方向上的周期可以为 50nm 至 500nm, 优选为 200nm至 400nm。 另外, 所述亚波长微浮雕结构的槽深 也是可变的,其中,所述槽深位于 lOnm至 500nm的范围内,优选位于 50nm 至 200nm的范围内。 所述亚波长微浮雕结构的槽型也是可变的, 例如, 所 述槽型可以为正弦形、 矩形、 锯齿形中的至少一者。  In a preferred embodiment according to the present invention, the sub-wavelength microrelief structure may be a one-dimensional grating and the direction is variable. Moreover, the period of the sub-wavelength microrelief structure is also variable, wherein the period of the sub-wavelength microrelief structure in the X direction and/or the y direction may be 50 nm to 500 nm, preferably 200 nm to 400 nm. Further, the groove depth of the sub-wavelength microrelief structure is also variable, wherein the groove depth is in the range of lOnm to 500 nm, preferably in the range of 50 nm to 200 nm. The groove shape of the sub-wavelength microrelief structure is also variable, for example, the groove shape may be at least one of a sinusoidal shape, a rectangular shape, and a zigzag shape.
下面给出一些具体的结构参数来进一步描述根据本发明的光学防伪元 件。  Some specific structural parameters are given below to further describe the optical security element in accordance with the present invention.
例如, 亚波长微浮雕结构为一维正弦光栅, 其特征周期为 340nm, 沟 槽深度为 180nm; 第一介质层 101为 TiN、 厚度为 50nm, 第二介质层 102 为 A1203、 厚度为 180nm, 第三介质层 103为 Ti02、 厚度为 70nm。 图 2给 出了这种情况下根据本发明的光学防伪元件的干涉结构 10和干涉结构 20 的颜色度坐标随着观察角度的变化情况。 可以看到, 在第一观察角度为 0 ° 时, 干涉结构 10 的颜色坐标为 (-3.2, 67.8), 呈现黄色; 干涉结构 20 的颜色坐标为 (2.4, 78.1 ), 也呈现黄色, 两者的色差 ΔΕ为 13.2, 对于人 的视觉而言两者颜色相同。 在第二观察角度为 40°时, 干涉结构 10的颜色 坐标为(1.9, -47.9), 呈现蓝色; 干涉结构 20的颜色坐标为(-24.4, 63.9), 呈现绿色, 两者颜色具有显著的区别。 可见, 第一观察角度为 0° 时, 即垂 直观察亚波长微浮雕结构区域和平坦表面结构这两个区域时, 它们的颜色 基本相同; 随着观察角度的增加, 两区域的颜色差别变大, 成为显著不同 的两种色调。 这样, 通过制版上的适当设计, 能够使覆盖有亚波长光栅的 亚波长微浮雕结构区域和平坦表面区域形成特定意义的文字、 图案, 实现 正视观察时文字、 图案隐藏于背景中, 倾斜观察时文字、 图案显现的光学 防伪效果。 亚波长微浮雕结构区域和平坦表面结构区域的颜色进行评价时, 采用 CIELAB色度空间。 CIELAB( CIELab) 色度空间是 1976年国际照明委 员会推荐的均匀颜色空间, 1987年我国发布的 GB792-87将 LAB空间作为 国家标准。 目前色彩设计及复制等行业在色彩校正、计算以及 DTP系统中, CIELAB空间已被普遍使用。其中 +a表示红色, -a表示绿色, +b表示黄色, -b表示蓝色, L表示亮度。表 1给出该示例中的干涉结构 10与干涉结构 20 在 0 ° 与 40° 观察角度下的 L、 a、 b参数, 分别给出了两者颜色之间的差 别 ΔΕ, 其中 ΔΕ利用以下公式获得: For example, the sub-wavelength microrelief structure is a one-dimensional sinusoidal grating having a characteristic period of 340 nm and a trench depth of 180 nm ; the first dielectric layer 101 is TiN, the thickness is 50 nm, and the second dielectric layer 102 is A1 2 0 3 , and the thickness is At 180 nm, the third dielectric layer 103 is Ti0 2 and has a thickness of 70 nm. Fig. 2 shows the variation of the color coordinate of the interference structure 10 and the interference structure 20 of the optical security element according to the present invention with the observation angle in this case. It can be seen that when the first viewing angle is 0 °, the color coordinate of the interference structure 10 is (-3.2, 67.8), which is yellow; the color coordinate of the interference structure 20 is (2.4, 78.1), which also appears yellow, both The color difference ΔΕ is 13.2, and the two colors are the same for human vision. When the second viewing angle is 40°, the color coordinate of the interference structure 10 is (1.9, -47.9), which is blue; the color coordinate of the interference structure 20 is (-24.4, 63.9), which is green, and the colors of the two are significant. The difference. It can be seen that when the first observation angle is 0°, that is, when the two regions of the sub-wavelength microrelief structure region and the flat surface structure are vertically observed, their colors are basically the same; as the observation angle increases, the color difference between the two regions becomes larger. , became significantly different in two shades. In this way, through the appropriate design on the plate making, the sub-wavelength micro-relief structure region and the flat surface region covered with the sub-wavelength grating can form characters and patterns of a specific meaning, and the characters and patterns are hidden in the background when the front view is observed, and the oblique observation is performed. Text, pattern appearing optics Anti-counterfeiting effect. The CIELAB chromaticity space is used when evaluating the color of the sub-wavelength microrelief structure region and the flat surface structure region. CIELAB (CIELab) Chromaticity space is the uniform color space recommended by the International Commission on Illumination in 1976. In 1987, GB792-87 released in China adopted LAB space as the national standard. In the current color design and reproduction industries, CIELAB space has been widely used in color correction, calculation and DTP systems. Where +a represents red, -a represents green, +b represents yellow, -b represents blue, and L represents brightness. Table 1 gives the L, a, b parameters of the interference structure 10 and the interference structure 20 in this example at 0 ° and 40 ° observation angles, respectively giving the difference ΔΕ between the two colors, where ΔΕ uses the following formula obtain:
AE=((L-L,†+(a-a,†+(b-b,)2)m 表 1 不同观察角度下干涉结构 10与干涉结构 20的 CIELab坐标 AE=((LL , †+(aa , †+(bb , ) 2 ) m Table 1 CIELab coordinates of the interference structure 10 and the interference structure 20 at different viewing angles
Figure imgf000009_0001
优选地, 可以通过调整亚波长微浮雕结构的槽型、 周期、 槽深等参数 与各介质层的材料、 厚度等参数来获得不同的颜色匹配情况。 例如, 亚波 长微浮雕结构为一维正弦光栅, 其特征周期为 280nm, 沟槽深度为 150nm; 第一介质层 101为 Ti02、 厚度为 55nm, 第二介质层 102为 A1203、 厚度为 270nm, 第三介质层 103为 Ti02、 厚度为 85nm, 在第一观察角度为 0° 时, 干涉结构 10与干涉结构 20均呈现绿色; 在第二观察角度为 20°时, 干涉结 构 10呈现紫色, 干涉结构 20呈现青色, 两者颜色具有显著的区别。 或者 亚波长微浮雕结构为一维正弦光栅, 其特征周期为 250nm, 沟槽深度为 80nm; 第一介质层 101为 Ti02、 厚度为 lOOnm, 第二介质层 102为 A1203、 厚度为 210nm, 第三介质层 103为 Ti02、 厚度为 lOOnm, 则在第一观察角 度为 0° 时, 干涉结构 10与干涉结构 20均呈现蓝色; 在第二观察角度为 20°时, 干涉结构 10呈现紫色, 干涉结构 20呈现橙色, 两者颜色具有显著 的区别。
Figure imgf000009_0001
Preferably, different color matching conditions can be obtained by adjusting parameters such as the groove shape, the period, the groove depth and the like of the sub-wavelength microrelief structure and the materials, thicknesses and the like of the respective dielectric layers. For example, the sub-wavelength microrelief structure is a one-dimensional sinusoidal grating having a characteristic period of 280 nm and a groove depth of 150 nm; the first dielectric layer 101 is Ti0 2 , the thickness is 55 nm, and the second dielectric layer 102 is A1 2 0 3 , thickness 270 nm, the third dielectric layer 103 is Ti0 2 and has a thickness of 85 nm. When the first viewing angle is 0°, both the interference structure 10 and the interference structure 20 are green; when the second viewing angle is 20°, the interference structure 10 Presenting purple, the interference structure 20 exhibits a cyan color, and the colors of the two have significant differences. Or the sub-wavelength microrelief structure is a one-dimensional sinusoidal grating having a characteristic period of 250 nm and a groove depth of 80 nm ; the first dielectric layer 101 is Ti0 2 , the thickness is 100 nm, the second dielectric layer 102 is A1 2 0 3 , and the thickness is 210 nm, the third dielectric layer 103 is Ti0 2 , and the thickness is 100 nm, then the first observation angle When the degree is 0°, both the interference structure 10 and the interference structure 20 appear blue; when the second viewing angle is 20°, the interference structure 10 appears purple, and the interference structure 20 appears orange, and the colors of the two have significant differences.
图 3给出了根据本发明的光学防伪元件的干涉结构 10和干涉结构 20 的色度坐标随着观察角度的变化情况, 其中, 亚波长微浮雕结构为一维正 弦光栅,其特征周期为 340m,沟槽深度为 130nm;第一介质层 101为 Ti02、 厚度为 lOOnm, 第二介质层 102为 Na3AlF6、 厚度为 250nm, 第三介质层 103为 ZnS、 厚度为 40nm。 可以看到, 在第一观察角度为 0° 时, 干涉结 构 10的颜色坐标为(3.7, 46.0),呈现黄色;干涉结构 20的颜色坐标为 (-44.2, -19.1 ), 呈现蓝绿色, 两者的色差 ΔΕ为 82.2, 颜色具有明显的差异。 在第 二观察角度为 20° 时, 干涉结构 10的颜色坐标为 (-32.3, -36.6), 呈现蓝 色; 干涉结构 20的颜色坐标为 (-9.2, -38.8), 也呈现蓝色, 两者色差 ΔΕ 为 23.4, 颜色相近, 人眼不能分辨出明显的区别。 当观察角度继续增大至 40° 时, 两者色差 ΔΕ又增大为 110.2, 两者之间的颜色差别再次变大。 可 见, 第一观察角度为 0° 时, 即垂直观察两区域时, 两个区域的颜色差别较 大, 为两种不同的色调; 随着观察角度的增加, 两区域颜色均向蓝色变化, 当达到 20°时, 两者颜色均为蓝色, 形成相同的颜色; 当观察角度继续增加 后, 两者颜色再次发生变化, 出现明显差异。 表 2给出这种情况下干涉结 构 10与干涉结构 20在不同观察角度下的 L、 a、 b参数。 因此, 通过适当 的设计, 可以实现图文随观察角度从显现到隐藏再到显现的过程。 3 shows the chromaticity coordinates of the interference structure 10 and the interference structure 20 of the optical security element according to the present invention as a function of the viewing angle, wherein the sub-wavelength microrelief structure is a one-dimensional sinusoidal grating with a characteristic period of 340 m. The trench depth is 130 nm; the first dielectric layer 101 is Ti0 2 , the thickness is 100 nm, the second dielectric layer 102 is Na 3 AlF 6 , the thickness is 250 nm, and the third dielectric layer 103 is ZnS and has a thickness of 40 nm. It can be seen that when the first viewing angle is 0°, the color coordinate of the interference structure 10 is (3.7, 46.0), which is yellow; the color coordinate of the interference structure 20 is (-44.2, -19.1), which is blue-green, two The color difference ΔΕ is 82.2, and the color has a significant difference. When the second viewing angle is 20°, the color coordinate of the interference structure 10 is (-32.3, -36.6), which is blue; the color coordinate of the interference structure 20 is (-9.2, -38.8), which also appears blue, two The color difference ΔΕ is 23.4, the colors are similar, and the human eye cannot distinguish the obvious difference. When the viewing angle continues to increase to 40°, the color difference ΔΕ increases to 110.2, and the color difference between the two becomes larger again. It can be seen that when the first observation angle is 0°, that is, when the two regions are observed vertically, the color difference between the two regions is large, which is two different color tones; as the observation angle increases, the colors of the two regions all change to blue. When it reaches 20°, both colors are blue, forming the same color; when the viewing angle continues to increase, the colors of the two changes again, and there is a significant difference. Table 2 gives the L, a, b parameters of the interference structure 10 and the interference structure 20 at different viewing angles in this case. Therefore, through proper design, the process of image and text from observation to hiding to visualization can be realized.
表 2 不同观察角度下干涉结构 10与干涉结构 20的 、 a、 b参数 Table 2 Interference structure 10 and interference structure 20, a, b parameters under different viewing angles
干涉结构 10 干涉结构 20  Interference structure 10 interference structure 20
观察角度 ΔΕ  Observation angle ΔΕ
L a b L, a' b'  L a b L, a' b'
0。 69.6 3.7 46.0 54.8 -44.2 -19.1 82.2 20。 41.3 -32.3 -36.6 44.8 -9.2 -38.8 23.4 0. 69.6 3.7 46.0 54.8 -44.2 -19.1 82.2 20. 41.3 -32.3 -36.6 44.8 -9.2 -38.8 23.4
40。 20.2 44.4 -67.7 60.2 24.0 33.0 110.2 当然, 为了构成文字、 标识等图案, 根据本发明一种实施方式的光学 防伪元件还可以具有镂空结构 5。 如图 4所示, 在该光学防伪元件的基材 3 的第一表面 31上具有第一区域 1和第二区域 2, 其中第一区域 1为亚波长 微浮雕结构, 其上覆盖有干涉结构 10; 第二区域 2为平坦表面结构, 其上 覆盖有干涉结构 20, 其中, 干涉结构 10和干涉结构 20可以采用上述的各 种结构。 在基材 3的第二表面 32上选择性地涂布或印刷吸收层 4 (例如, 黑墨或其他彩色吸收型涂料), 从而形成镂空区域 5, 其中可以通过适当地 选择以使镂空区域 5形成文字、 标识、 图案。 这样, 当从第一表面 31观察 时, 涂布吸收层 4之上的干涉结构 10和 20只有反射光谱, 呈现明亮、 易 于辨识的颜色, 镂空区域 5之上的干涉结构 10和 20呈现透明状态, 特别 是附着在纸张等载体上时, 主要呈现出纸张等载体的颜色。 特别地, 当在 干涉结构 10与干涉结构 20呈现相同颜色的观察角度下进行观察时, 通过 镂空区域 5可以增加一种图文效果, 提升该防伪元件的视觉捕捉力, 增强 防伪效果。 这样, 当采取反射观察方式时, 吸收层 4将透射光线吸收, 加 强人眼对反射光线的识别, 增强根据本发明的光学防伪元件的视觉效果。  40. 20.2 44.4 -67.7 60.2 24.0 33.0 110.2 Of course, in order to constitute a pattern of characters, logos, etc., the optical security element according to an embodiment of the present invention may further have a hollow structure 5. As shown in FIG. 4, a first region 1 and a second region 2 are provided on the first surface 31 of the substrate 3 of the optical security element, wherein the first region 1 is a sub-wavelength microrelief structure covered with an interference structure 10; The second region 2 is a flat surface structure covered with the interference structure 20, wherein the interference structure 10 and the interference structure 20 can adopt various structures as described above. An absorbing layer 4 (for example, black ink or other color absorbing paint) is selectively applied or printed on the second surface 32 of the substrate 3, thereby forming a hollowed out region 5, wherein the hollowed out region 5 can be appropriately selected by Form words, logos, patterns. Thus, when viewed from the first surface 31, the interference structures 10 and 20 over the coated absorbing layer 4 have only a reflection spectrum, presenting a bright, easily recognizable color, and the interference structures 10 and 20 above the hollowed out region 5 are in a transparent state. In particular, when it is attached to a carrier such as paper, the color of the carrier such as paper is mainly exhibited. In particular, when the observation is made under the observation angle that the interference structure 10 and the interference structure 20 exhibit the same color, a graphic effect can be added through the hollowed out area 5, the visual capturing power of the security element is improved, and the anti-counterfeiting effect is enhanced. Thus, when the reflection observation mode is adopted, the absorption layer 4 absorbs the transmitted light, enhances the recognition of the reflected light by the human eye, and enhances the visual effect of the optical security element according to the present invention.
图 5给出了根据本发明的光学防伪元件的又一实施方式。 其中基材 3 的第一表面 31上至少覆盖有两种方向相互垂直的亚波长光栅, 并且所述亚 波长光栅上覆盖有如上所述的多层介质层镀层结构,从而形成干涉结构 10、 干涉结构 20和干涉结构 30, 其中干涉结构 10、 干涉结构 30分别覆盖在两 种相互垂直的亚波长光栅上, 干涉结构 20位于平坦表面上。 通过适当调节 亚波长光栅的参数与镀层结构的参数, 可以获得如下效果: 在垂直观察时, 干涉结构 10、 干涉结构 20和干涉结构 30的颜色相同; 一定角度倾斜观察 时, 干涉结构 10颜色保持颜色不变, 干涉结构 20与干涉结构 30的颜色发 生变化且变化后得到的颜色不同; 此时 90° 旋转该光学防伪元件, 干涉结 构 10与干涉结构 30发生颜色交换, 干涉结构 20的颜色仍保持该角度下原 有颜色不变。 利用该特点可以实现垂直观察时隐藏, 倾斜和旋转时图文显 现的光学特征。 作为示例, 例如, 亚波长微浮雕结构为一维正弦光栅, 其 特征周期为 340nm, 沟槽深度为 130nm, 在基材 3的第一表面 31上具有相 互垂直的两个亚波长光栅区域, 从而形成干涉结构 10、干涉结构 20和干涉 结构 30, 其中干涉结构 10、 干涉结构 30分别覆盖在两种相互垂直的亚波 长光栅上, 干涉结构 20位于平坦表面上, 并且所述亚波长光栅上覆盖有如 上所述的多层介质层镀层结构,其中第一介质层 101为 TiN、厚度为 50nm, 第二介质层 102为 A1203、 厚度为 180nm, 第三介质层 103为 Ti02、 厚度为 70nm。 则在第一观察角度为 0° 时, 干涉结构 10、 干涉结构 20与干涉结构 30的颜色均为黄色; 当倾斜该光学防伪元件使第二观察角度为 40° 时, 干 涉结构 10颜色变为蓝色, 干涉结构 20变为绿色, 干涉结构 30颜色保持黄 色不变; 当在该倾斜角度下旋转该光学防伪元件 90° 时, 干涉结构 20颜色 仍为绿色, 干涉结构 10颜色变为蓝色, 干涉结构 30颜色变为黄色, 实现 干涉结构 10与干涉结构 30的颜色互换。 Figure 5 shows a further embodiment of an optical security element according to the invention. The first surface 31 of the substrate 3 is covered with at least two sub-wavelength gratings whose directions are perpendicular to each other, and the sub-wavelength grating is covered with the multi-layer dielectric layer plating structure as described above, thereby forming the interference structure 10 and interfering. The structure 20 and the interference structure 30, wherein the interference structure 10 and the interference structure 30 are respectively covered on two mutually perpendicular sub-wavelength gratings, and the interference structure 20 is located on a flat surface. By appropriately adjusting the parameters of the sub-wavelength grating and the parameters of the plating structure, the following effects can be obtained: In the vertical observation, the interference structure 10, the interference structure 20, and the interference structure 30 have the same color; when the angle is obliquely observed, the interference structure 10 is maintained in color. The color does not change, the color of the interference structure 20 and the interference structure 30 changes and the color obtained after the change is different; at this time, the optical security element is rotated by 90°, the interference structure 10 and the interference structure 30 undergo color exchange, and the color of the interference structure 20 remains. Keep the angle down There is no color. This feature can be used to realize the optical characteristics of the image when hidden, tilted and rotated during vertical observation. As an example, for example, the sub-wavelength microrelief structure is a one-dimensional sinusoidal grating having a characteristic period of 340 nm and a groove depth of 130 nm, and having two sub-wavelength grating regions perpendicular to each other on the first surface 31 of the substrate 3, thereby Forming an interference structure 10, an interference structure 20, and an interference structure 30, wherein the interference structure 10 and the interference structure 30 are respectively covered on two mutually perpendicular sub-wavelength gratings, the interference structure 20 is located on a flat surface, and the sub-wavelength grating is covered There is a multilayer dielectric layer plating structure as described above, wherein the first dielectric layer 101 is TiN, the thickness is 50 nm, the second dielectric layer 102 is A1 2 0 3 , the thickness is 180 nm, and the third dielectric layer 103 is Ti0 2 , thickness It is 70 nm. Then, when the first viewing angle is 0°, the colors of the interference structure 10, the interference structure 20, and the interference structure 30 are both yellow; when the optical security element is tilted so that the second viewing angle is 40°, the color of the interference structure 10 becomes Blue, the interference structure 20 turns green, the color of the interference structure 30 remains yellow; when the optical security element is rotated 90° at the oblique angle, the color of the interference structure 20 is still green, and the color of the interference structure 10 turns blue The color of the interference structure 30 changes to yellow, and the color of the interference structure 10 and the interference structure 30 is interchanged.
应当理解的是, 图 4和图 5仅是示例, 实际上, 根据实际需要, 可以 对亚波长微浮雕结构的各项参数、 排列方式进行优化、 组合, 并在其上覆 盖相应的介质层, 并与镂空相结合来形成高防伪的光学防伪元件。  It should be understood that FIG. 4 and FIG. 5 are only examples. In fact, according to actual needs, various parameters and arrangement manners of the sub-wavelength microrelief structure may be optimized, combined, and covered with corresponding dielectric layers. And combined with hollowing out to form a high security anti-counterfeiting component.
优选地, 上述的基材 3可以为透明或非透明、 有色或无色的薄膜。 例 如可以是聚对苯二甲酸二醇酯、 聚氯乙烯、 聚乙烯、 聚碳酸酯、 聚丙烯、 金属、 玻璃和纸张等, 并且其厚度可以为 5微米至 500微米, 优选为 10微 米至 100微米。  Preferably, the substrate 3 described above may be a transparent or non-transparent, colored or colorless film. For example, it may be polyethylene terephthalate, polyvinyl chloride, polyethylene, polycarbonate, polypropylene, metal, glass, paper, etc., and may have a thickness of 5 to 500 μm, preferably 10 to 100 μ. Micron.
在根据本发明的一个实施方式中, 当采用透光观察方式时, 基材 3可 以不做任何处理或者涂布透明 /半透明的涂层, 以使光线透过。  In one embodiment according to the present invention, when the light-transmitting observation mode is employed, the substrate 3 may be subjected to no treatment or a transparent/translucent coating to transmit light.
另外, 应该理解, 本文中的颜色匹配是指颜色达到一定程度的相似, 并非意指颜色必须完全相同。  In addition, it should be understood that color matching herein refers to a similarity in color to a certain degree, and does not mean that the colors must be identical.
另外, 根据本发明的光学防伪元件可以制作成开窗安全线、 贴条, 贴 标等产品形式。 为了方便在产品上应用, 该光学防伪元件的一面或者两面 涂有粘结胶, 以便通过烫印或粘贴等工艺附着在承载物上。 而且, 根据本 发明的光学防伪元件可以应用于钞票、 证卡和高档商品等高安全或高附加 值的产品上。 Further, the optical security element according to the present invention can be manufactured in the form of a window security thread, a sticker, a label, and the like. One or both sides of the optical security element for ease of application on the product It is coated with an adhesive to adhere to the carrier by a process such as hot stamping or pasting. Moreover, the optical security element according to the present invention can be applied to high security or high value-added products such as banknotes, cards, and high-end goods.
如图 6所示, 本发明还提供一种制备光学防伪元件的方法, 该方法包 括:  As shown in FIG. 6, the present invention also provides a method of preparing an optical security element, the method comprising:
561、 提供基材, 所述基材包括第一表面和第二表面;  561. Providing a substrate, the substrate comprising a first surface and a second surface;
562、 在所述第一表面上形成亚波长微浮雕结构, 使得所述第一表面上 的部分区域为所述亚波长微浮雕结构、 部分区域为平坦表面结构;  562. Form a sub-wavelength microrelief structure on the first surface, such that a partial region on the first surface is the sub-wavelength microrelief structure, and a partial region is a flat surface structure;
其中, 所述亚波长微浮雕结构可以通过激光双光束干涉曝光、 激光直 刻曝光或电子束直刻的方式形成, 或者通过紫外浇注、 模压、 纳米压印的 方式进行批量复制。 例如, 亚波长微浮雕结构可以通过全息干涉法、 激光 直刻技术、 电子束刻蚀技术等方法制作母版, 通过电铸工艺制成工作版、 再通过模压、 UV复制等生产工艺转移到基材上。  Wherein, the sub-wavelength microrelief structure can be formed by laser double beam interference exposure, laser direct exposure or electron beam direct engraving, or batch copying by ultraviolet casting, molding, nanoimprinting. For example, the sub-wavelength microrelief structure can be made into a master by a holographic interferometry, a laser direct lithography technique, an electron beam etching technique, etc., and can be made into a working plate by an electroforming process, and then transferred to a base by a molding process such as molding and UV replication. On the material.
563、在亚波长微浮雕结构区域和平坦表面结构区域上同时形成第一介 质层;  563. Form a first dielectric layer simultaneously on the subwavelength microrelief structure region and the flat surface structure region;
564、 在所述第一介质层上同时形成第二介质层;  564, simultaneously forming a second dielectric layer on the first dielectric layer;
565、 在所述第二介质层上同时形成第三介质层。  565. Form a third dielectric layer on the second dielectric layer.
其中, 所述第一介质层、 所述第二介质层和所述第三介质层可以通过 热蒸发、 电子束蒸发、 磁控溅射等物理气相沉积或化学气相沉积的方式形 成。  The first dielectric layer, the second dielectric layer and the third dielectric layer may be formed by physical vapor deposition or chemical vapor deposition such as thermal evaporation, electron beam evaporation, magnetron sputtering or the like.
综上所述, 根据本发明的介质层结构可以通过一次蒸镀过程形成, 而 通过激光直刻或电子束直刻等微纳加工工艺可以在微米甚至纳米级别上控 制亚波长微浮雕结构的位置和特征尺寸, 所以, 根据本发明的光学防伪元 件不仅提高了防伪性能, 而且降低了工艺难度, 节约了成本。  In summary, the dielectric layer structure according to the present invention can be formed by a single evaporation process, and the micro-nano processing process such as laser direct etching or electron beam direct etching can control the position of the sub-wavelength microrelief structure on the micrometer or even nanometer level. And the feature size, therefore, the optical security element according to the present invention not only improves the anti-counterfeiting performance, but also reduces the process difficulty and saves cost.
应当理解, 上面仅参照优选实施方式描述了根据本发明的光学防伪元 件, 但是本领域技术人员将意识到, 在不背离本发明的精神和范围的前提 下, 可以对本发明做出各种变形和修改。  It should be understood that the optical security element according to the present invention has been described above with reference to the preferred embodiments, but those skilled in the art will appreciate that various modifications and changes can be made to the present invention without departing from the spirit and scope of the invention. modify.

Claims

权利要求 Rights request
1、 一种光学防伪元件, 该光学防伪元件包括基材 (3), 所述基材 (3) 包括第一表面 (31 ) 和第二表面 (32), 所述第一表面 (31 ) 上的部分区域 为亚波长微浮雕结构、 部分区域为平坦表面结构, 所述亚波长微浮雕结构 和所述平坦表面结构上均依次层叠有第一介质层、 第二介质层和第三介质 层, 在特定观察角度下, 所述亚波长微浮雕结构区域和所述平坦表面结构 区域的颜色相同, 在其他观察角度, 所述亚波长微浮雕结构区域和所述平 坦表面结构区域的颜色不相同。 What is claimed is: 1. An optical security element comprising a substrate (3), the substrate (3) comprising a first surface (31) and a second surface (32), the first surface (31) The partial region is a sub-wavelength microrelief structure, and the partial region is a flat surface structure, and the first dielectric layer, the second dielectric layer and the third dielectric layer are sequentially laminated on the sub-wavelength microrelief structure and the flat surface structure. The color of the sub-wavelength microrelief structure region and the flat surface structure region are the same at a particular viewing angle, and the color of the sub-wavelength microrelief structure region and the flat surface structure region are different at other viewing angles.
2、 根据权利要求 1所述的光学防伪元件, 其中, 所述特定观察角度是 0度或者大于 0度的其他值。 2. The optical security element according to claim 1, wherein the specific viewing angle is 0 degrees or other values greater than 0 degrees.
3、 根据权利要求 1所述的光学防伪元件, 其中, 所述第一介质层和所 述第三介质层的折射率大于或等于 1.7。 The optical security element according to claim 1, wherein the first dielectric layer and the third dielectric layer have a refractive index greater than or equal to 1.7.
4、 根据权利要求 1所述的光学防伪元件, 其中, 所述第一介质层和所 述第三介质层的厚度为 10nm至 300nm。 The optical security element according to claim 1, wherein the first dielectric layer and the third dielectric layer have a thickness of 10 nm to 300 nm.
5、 根据权利要求 1所述的光学防伪元件, 其中, 所述第一介质层和所 述第三介质层的厚度为 50nm至 200nm。 The optical security element according to claim 1, wherein the first dielectric layer and the third dielectric layer have a thickness of 50 nm to 200 nm.
6、 根据权利要求 3至 5中任一权利要求所述的光学防伪元件, 其中, 所述第一介质层和所述第三介质层的材料选自 ZnS、 TiN、 Ti02、 TiO、 Ti203、 Ti305、 Ta205、 Nb205、 Ce02、 Bi203、 Cr203、 Fe203中的任意材料或其组合。 7、 根据权利要求 1所述的光学防伪元件, 其中, 所述第二介质层的折 射率小于 1.The optical security element according to any one of claims 3 to 5, wherein materials of the first dielectric layer and the third dielectric layer are selected from the group consisting of ZnS, TiN, Ti0 2 , TiO, Ti 2 Any material of 0 3 , Ti 3 0 5 , Ta 2 0 5 , Nb 2 0 5 , Ce0 2 , Bi 2 0 3 , Cr 2 0 3 , Fe 2 0 3 or a combination thereof. The optical security element according to claim 1, wherein the second dielectric layer has a refractive index of less than 1.
7。 7.
8、 根据权利要求 1所述的光学防伪元件, 其中, 所述第二介质层的厚 度为 50nm至 1000nm。  The optical security element according to claim 1, wherein the second dielectric layer has a thickness of 50 nm to 1000 nm.
9、 根据权利要求 1所述的光学防伪元件, 其中, 所述第二介质层的厚 度为 lOOnm至 500nm。  The optical security element according to claim 1, wherein the second dielectric layer has a thickness of from 100 nm to 500 nm.
10、 根据权利要求 7至 9中任一权利要求所述的光学防伪元件, 其中, 所述第二介质层的材料选自 Si02、 MgF2、 Na3A106、 A1203中的任意材料或 其组合。 The optical security element according to any one of claims 7 to 9, wherein the material of the second dielectric layer is selected from any one of SiO 2 , MgF 2 , Na 3 A10 6 , and A1 2 0 3 Material or a combination thereof.
11、 根据权利要求 1 所述的光学防伪元件, 其中, 所述亚波长微浮雕 结构为一维光栅且方向可变。 The optical security element according to claim 1, wherein the sub-wavelength microrelief structure is a one-dimensional grating and the direction is variable.
12、 根据权利要求 1 所述的光学防伪元件, 其中, 所述亚波长微浮雕 结构的周期、 槽深和槽型中的至少一者是可变的。 The optical security element according to claim 1, wherein at least one of a period, a groove depth, and a groove shape of the sub-wavelength microrelief structure is variable.
13、 根据权利要求 12所述的光学防伪元件, 其中, 所述亚波长微浮雕 结构在 X方向和 /或 y方向上的周期为 50nm至 500nm。 The optical security element according to claim 12, wherein the period of the sub-wavelength microrelief structure in the X direction and/or the y direction is 50 nm to 500 nm.
14、 根据权利要求 12所述的光学防伪元件, 其中, 所述亚波长微浮雕 结构在 X方向和 /或 y方向上的周期为 200nm至 400nm。  The optical security element according to claim 12, wherein the period of the sub-wavelength microrelief structure in the X direction and/or the y direction is 200 nm to 400 nm.
15、根据权利要求 12所述的光学防伪元件,其中,所述槽深位于 lOnm 至 500nm的范围内 The optical security element according to claim 12, wherein the groove depth is at lOnm Up to 500nm
16、根据权利要求 12所述的光学防伪元件,其中,所述槽深位于 50nm 至 200nm的范围内。 The optical security element according to claim 12, wherein the groove depth is in the range of 50 nm to 200 nm.
17、根据权利要求 12所述的光学防伪元件,其中,所述槽型为正弦形、 矩形、 锯齿形中的至少一者。 The optical security element according to claim 12, wherein the groove shape is at least one of a sinusoidal shape, a rectangular shape, and a zigzag shape.
18、 根据权利要求 1所述的光学防伪元件, 其中, 所述基材 (3 ) 为透 明或非透明、 有色或无色的薄膜。 The optical security element according to claim 1, wherein the substrate (3) is a transparent or non-transparent, colored or colorless film.
19、 根据权利要求 1所述的光学防伪元件, 其中, 所述基材 (3 ) 的第 一表面 (31 ) 上覆盖有透明 /半透明的涂层, 以使光线透过。 The optical security element according to claim 1, wherein the first surface (31) of the substrate (3) is covered with a transparent/translucent coating to transmit light.
20、 根据权利要求 1所述的光学防伪元件, 其中, 所述基材 (3 ) 的部 分或全部第二表面 (32) 上覆盖有吸收层。 The optical security element according to claim 1, wherein a part or all of the second surface (32) of the substrate (3) is covered with an absorbing layer.
21、 一种制备光学防伪元件的方法, 该方法包括: 21. A method of making an optical security element, the method comprising:
提供基材 (3), 所述基材 (3 ) 包括第一表面 (31 ) 和第二表面 (32) ; 在所述第一表面 (31 ) 上形成亚波长微浮雕结构, 使得所述第一表面 ( 31 )上的部分区域为所述亚波长微浮雕结构、 部分区域为平坦表面结构; 在亚波长微浮雕结构区域和平坦表面结构区域上同时形成第一介质 层;  Providing a substrate (3) comprising a first surface (31) and a second surface (32); forming a sub-wavelength microrelief structure on the first surface (31) such that the a partial region on a surface (31) is the sub-wavelength microrelief structure, and a partial region is a flat surface structure; a first dielectric layer is simultaneously formed on the sub-wavelength microrelief structure region and the flat surface structure region;
在所述第一介质层上同时形成第二介质层;  Forming a second dielectric layer simultaneously on the first dielectric layer;
在所述第二介质层上同时形成第三介质层。 A third dielectric layer is simultaneously formed on the second dielectric layer.
22、 根据权利要求 21所述的方法, 其中, 所述亚波长微浮雕结构通过 激光双光束干涉曝光、 激光直刻曝光或电子束直刻的方式形成, 或者通过 紫外浇注、 模压、 纳米压印的方式进行批量复制。 22. The method according to claim 21, wherein the sub-wavelength microrelief structure is formed by laser double beam interference exposure, laser direct exposure or electron beam direct etching, or by ultraviolet casting, molding, nanoimprinting The way to bulk copy.
23、 根据权利要求 21所述的方法, 其中, 所述第一介质层、 所述第二 介质层和所述第三介质层通过物理气相沉积或化学气相沉积的方式形成。 23. The method according to claim 21, wherein the first dielectric layer, the second dielectric layer, and the third dielectric layer are formed by physical vapor deposition or chemical vapor deposition.
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