WO2013161369A1

WO2013161369A1 - Diaphragm and recriprocating pump

Info

Publication number: WO2013161369A1
Application number: PCT/JP2013/054487
Authority: WO
Inventors: 伸治九鬼; 裕貴木上
Original assignee: 日東電工株式会社
Priority date: 2012-04-24
Filing date: 2013-02-22
Publication date: 2013-10-31
Also published as: JP2013227870A

Abstract

Provided is a diaphragm having excellent corrosion resistance and durability with respect to liquids containing oxidizing substances. This diaphragm (100), which undergoes reciprocal motion and is used to transport a liquid (50), is equipped with: a nonporous film (14) formed from a fluorine-based resin; a rubber film member (10) laminated on the nonporous film (14); and a gas barrier film (12) arranged between the rubber film member (10) and the nonporous film (14). The nonporous film (14) and the gas barrier film (12) are bonded together by thermo-compression bonding.

Description

Diaphragm and reciprocating pump

The present invention relates to a diaphragm and a reciprocating pump. In particular, the present invention relates to a diaphragm excellent in corrosion resistance or durability against a liquid containing an oxidizing substance, and a reciprocating pump using the diaphragm.
Note that this application claims priority based on Japanese Patent Application No. 2012-98383 filed on April 24, 2012, the entire contents of which are incorporated herein by reference. .

Generally, tap water is made from the water of rivers and dams that serve as water sources. The water of rivers and dams, which are water sources, contain microorganisms, pathogenic organisms, viruses, etc., and cannot be used as tap water as they are. Therefore, it is necessary to sterilize and disinfect bacteria, microorganisms and viruses. For this sterilization / disinfection, alkali hypochlorites such as sodium hypochlorite (NaClO) and calcium hypochlorite (Ca (ClO ₂ )) are very often used.

When alkali hypochlorite is made into an aqueous solution, hypochlorous acid (HClO), hypochlorite ions (HClO ⁻ ) and the like called residual chlorine are generated. This residual chlorine is said to inhibit the respiratory enzymes of bacteria and microorganisms, stop the assimilation of cells, and kill bacteria and microorganisms. Recently, chlorine dioxide (ClO ₂ ) having excellent sterilizing power is also used instead of sterilizing treatment with alkali hypochlorite. Unlike alkali hypochlorite, chlorine dioxide is hardly affected by the sterilization effect depending on the pH value, and can be killed by oxidative decomposition of bacteria and microorganisms by the oxidation reaction itself.

Such sterilization is not limited to tap water, but is also used for sterilization of water in pools, super public baths, hot springs, and the like. In addition, sterilization treatment methods using acidic ion water, hydrogen peroxide water (H ₂ O ₂ ), chlorine water, hypochlorous acid aqueous solution, etc. are also known.

Thus, oxidizing substances are widely used for bacteria, disinfection, bleaching, and the like. As a method for transporting the solution containing the oxidizing substance to the liquid to be sterilized, a method of transporting a fixed amount by a reciprocating pump is used. For example, Patent Document 1 discloses a diaphragm pump which is one of reciprocating pumps.

FIG. 1 shows a reciprocating pump (diaphragm pump) 1000 disclosed in Patent Document 1. A reciprocating pump 1000 shown in FIG. 1 includes a pump head 110 and a diaphragm 120. A piston portion 130 that is driven by a drive source is attached to the diaphragm 120. Then, by reciprocating the diaphragm 120 by the drive source, the fluid to be transported (for example, from the suction part 111a provided in the first joint 111 to the discharge part 112a provided in the second joint 112) (Alkaline hypochlorite aqueous solution or the like) can be transported. A fluid supply source (not shown) for supplying fluid is connected to the first joint 111, and a fluid receiving unit (not shown) for receiving fluid supply is connected to the second joint 112. . The suction part 111a is provided with a suction side check ball 113, and the discharge part 112a is provided with a discharge side check ball 114.

The pump head 110 is formed with a pump chamber 110a for transporting fluid. Then, by moving the diaphragm 120 in the direction of arrow B, negative pressure is generated in the pump chamber 110a and each of the

check balls

113, 114, and the suction side check balls 113 are moved (moved in the direction of arrow C). A fluid is caused to flow into the pump chamber 110a through the suction part 111a. On the other hand, by moving the diaphragm 120 in the direction opposite to the arrow B, positive pressure is generated in the pump chamber 110a and the

check balls

113 and 114, and the discharge side check balls 114 are moved (moved in the direction of arrow D). ), Fluid is discharged from the pump chamber 110a through the discharge part 112a. Thus, the reciprocating pump 1000 can transport the fluid by reciprocating the diaphragm 120.

As shown in FIG. 2, the diaphragm 120 in Patent Document 1 includes a base cloth 121 and a pair of

film bodies

122 and 123 so as to sandwich the base cloth 121. In addition, as shown in FIG. 3, a fluorine-based resin 124 is provided on the first film body 122 of the diaphragm 120. In order to increase the strength of the diaphragm 120, a metal core material can be included.

The base fabric 121, the first film body 122, the second film body 123, and the fluororesin 124 of the diaphragm 120 are joined together using an adhesive, and are integrated by vulcanization molding. The first film body 122 is made of chlorinated polyethylene made of polyethylene containing chlorine. The second film body 123 is made of neoprene rubber (or ethylene propylene rubber or fluorine rubber).

According to the diaphragm 120, the first film body 122 disposed on the transport target fluid side is made of chlorinated polyethylene having excellent corrosion resistance against an oxidizing substance. Therefore, even if it contacts with an oxidizing substance, it will not corrode. Further, since the first film body 122 does not allow the gas composed of the oxidizing substance to enter, the first film body 122 prevents corrosion of other members constituting the diaphragm due to the permeation of the gas composed of the oxidizing substance. Can do. Therefore, the diaphragm 120 can be made excellent in corrosion resistance or durability against an oxidizing substance. Furthermore, since the fluororesin 124 can be disposed on the diaphragm 120, even a fluid other than a fluid containing an oxidizing substance can be used without damaging the diaphragm 120.

JP 2006-207533 A

The inventor of the present application examined the problem of durability of a reciprocating pump using a diaphragm. First, in a reciprocating pump using a rubber diaphragm, there is a problem that the components constituting the reciprocating pump are corroded by the strong oxidizing power of a solution containing an oxidizing substance (liquid to be sterilized). Specifically, the rubber material of the diaphragm is corroded and damaged by the oxidizing power of the oxidizing substance. These oxidizing substances are also present in the aqueous solution in a gaseous state. Since the gas has higher permeability and stronger corrosiveness than liquid, the gas penetrates into the rubber material, expands, and further deteriorates the rubber material due to strong oxidizing power. Furthermore, since the rubber material cannot prevent gas permeation, there arises a problem that the pump components such as metal inside the diaphragm are corroded.

Also, in order to prevent the corrosion of the rubber material, the corrosion resistance is improved in the case of the diaphragm in which the fluororesin is applied to the surface of the rubber material as compared with the case of the rubber material alone. However, although fluororesin has excellent corrosion resistance to various solutions, it is corrosion resistant to various solutions in the liquid state, and therefore prevents the permeation of oxidizing substances present in the gas state. The rubber material is deteriorated by the permeable gas.

In addition, when the fluororesin and the rubber material are bonded with an adhesive, the adhesive and the rubber material are deteriorated by the permeable gas made of an oxidizing substance. In addition, with the deterioration of the adhesive, the bonding between the fluororesin and the rubber material becomes weak, and the movement of the reciprocating pump is likely to be hindered.

For this reason, with a reciprocating pump, it is necessary to replace the diaphragm about once a month even if it is a type to which a fluororesin is applied. Although it is desirable to use the reciprocating pump continuously, it is necessary to stop the reciprocating pump at the time of the replacement, and the labor and cost of exchanging the diaphragm are increased. And also in the structure disclosed by patent document 1, since each layer which comprises a diaphragm is joined by the adhesive agent, the trouble accompanying deterioration of an adhesive agent arises.

In this situation, the inventor of the present application has intensively studied a diaphragm excellent in corrosion resistance and / or durability against a liquid containing an oxidizing substance, and has completed the present invention. The present invention has been made in view of such a point, and a main object thereof is to provide a diaphragm excellent in corrosion resistance and / or durability against a liquid containing an oxidizing substance, and a reciprocating pump using the diaphragm. There is.

The diaphragm according to the present invention is a diaphragm used to reciprocate and convey a fluid, and includes a non-porous film made of a fluorine-based resin and a rubber made of a rubber material laminated on the non-porous film. A film member, and a gas barrier film disposed between the rubber film member and the non-porous film are provided, and the non-porous film and the gas barrier film are joined by thermocompression bonding.

In a preferred embodiment, the gas barrier film is made of a resin film that blocks permeation of chlorine-based gas, and no adhesive is used for joining the non-porous film and the gas barrier film.

In a preferred embodiment, the gas barrier film is made of polyvinylidene chloride.

In a preferred embodiment, the gas barrier film is composed of a laminated film of a gas barrier layer that blocks gas and a thermoplastic resin film, and the thermoplastic resin film of the gas barrier film is in contact with the non-porous film.

In a preferred embodiment, the gas barrier layer is a polyvinylidene chloride film, and the thermoplastic resin film includes a linear low density polyethylene film.

In a preferred embodiment, the non-porous film is composed of a tetrafluoroethylene film.

In a preferred embodiment, the non-porous film is a cutting film or a casting film.

In a preferred embodiment, the rubber film member and the gas barrier film are joined by thermocompression bonding.

In a preferred embodiment, a piston portion for reciprocating the diaphragm is connected to the rubber film member, and no adhesive is used for joining the rubber film member and the gas barrier film.

In a preferred embodiment, the gas barrier film is composed of a laminated film of a gas barrier layer that blocks gas and a thermoplastic resin film formed on both surfaces of the gas barrier layer.

In a preferred embodiment, the rubber film member is made of ethylene propylene rubber.

The reciprocating pump according to the present invention is a reciprocating pump provided with the above diaphragm.

Another reciprocating pump according to the present invention is a reciprocating pump that reciprocates to convey a fluid, and includes a diaphragm to which a piston portion is attached, and a pump head to which the diaphragm is set. It is comprised from the film member laminated | stacked by thermocompression bonding without using an adhesive agent, The gas barrier film | membrane is contained in the said film member.

In a preferred embodiment, the film member includes a fluorine-based resin film located on the pump head side, and a rubber film member bonded to the fluorine-based resin film via a gas barrier film.

In a preferred embodiment, the fluororesin film is a non-porous cutting film or casting film, and the gas barrier film is a polyvinylidene chloride film.

In a preferred embodiment, the thermoplastic resin film is formed on at least one of the surface on the fluororesin film side and the surface on the rubber film member side of the gas barrier film.

In a preferred embodiment, the fluid to be transported is selected from the group consisting of an aqueous alkali hypochlorite solution, an aqueous hypochlorous acid solution, chlorine water, chlorine dioxide water, and hydrogen peroxide solution.

According to the present invention, a non-porous film made of a fluororesin, a rubber film member laminated on the non-porous film, and a gas barrier film disposed between the rubber film member and the non-porous film are provided. The non-porous film and the gas barrier film are joined by thermocompression bonding. Therefore, a non-porous membrane can make a solution containing an oxidizing substance water repellent (liquid repellency) with a fluororesin, and gas that has permeated through the non-porous membrane can be prevented from entering further into the interior by a gas barrier membrane. can do. Moreover, since the non-porous film and the gas barrier film are bonded by thermocompression bonding, it is possible to avoid deterioration of the adhesive by the gas as compared with the case of bonding by the adhesive. As a result, a diaphragm excellent in corrosion resistance and / or durability against a liquid containing an oxidizing substance can be realized. In addition, the replacement frequency of the diaphragm can be reduced, and a reciprocating pump excellent in corrosion resistance and / or durability against a liquid containing an oxidizing substance can be realized.

It is sectional drawing which shows the conventional reciprocating pump (diaphragm pump) 1000. FIG. It is sectional drawing which shows the conventional diaphragm 120. FIG. It is sectional drawing which shows the conventional diaphragm 120. FIG. It is sectional drawing which shows the structure of the reciprocating pump 200 provided with the diaphragm 100 which concerns on embodiment of this invention. (A) And (b) is sectional drawing for demonstrating operation | movement of the reciprocating pump 200 which concerns on embodiment of this invention. It is a partially expanded sectional view which shows the structure of the diaphragm 100 which concerns on embodiment of this invention. 3 is a partially enlarged cross-sectional view showing a configuration of a diaphragm 101. FIG.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. In the following drawings, components having substantially the same function are denoted by the same reference numerals for the sake of brevity. Further, matters necessary for the implementation of the present invention other than matters specifically mentioned in the present specification can be grasped as design matters of those skilled in the art based on the prior art in this field. The present invention can be carried out based on the contents disclosed in the present specification and drawings and the common general technical knowledge in the field. In addition, the present invention is not limited to the following embodiments.

A reciprocating pump 200 according to an embodiment of the present invention will be described with reference to FIG. FIG. 4 is a cross-sectional view schematically showing the configuration of the reciprocating pump 200 according to the embodiment of the present invention.

The reciprocating pump 200 of the present embodiment is a reciprocating pump (diaphragm pump) that reciprocates and conveys a fluid (solution) 50. The reciprocating pump 200 includes a diaphragm 100 to which the piston portion 20 is attached, and a pump head 30 to which the diaphragm 100 is set.

The diaphragm 100 is composed of a film member 15, and a piston portion 20 driven by a driving source (for example, a motor) is connected to the film member 15. The piston portion 20 moves in the directions of

arrows

51 and 52, and the diaphragm 100 (film member 15) moves following the movement of the piston portion 20. Specifically, when moving in the direction of the arrow 52, the diaphragm 100 generates a negative pressure, and when moving in the direction of the arrow 51, the diaphragm 100 generates a positive pressure.

The pump head 30 includes a pump chamber (including fluid paths 34 and 35) for transporting fluid. A supply unit 31 that supplies the solution 50 and a delivery unit 32 that sends out the solution 50 are connected to the pump head 110. In the reciprocating pump 200 of the present embodiment, the supply unit 31 is disposed below the gravity direction, while the delivery unit 32 is disposed above the gravity direction. In addition, the piston part 20 is arrange | positioned so that it may extend in a horizontal direction.

The supply section 31 is provided with an introduction path 31a for the solution 50. In addition, a check valve (check ball) 41 that closes the outlet of the introduction path 31 a is set in the internal space 33 of the supply unit 31. In this example, the check valve 41 is a lower check valve and has a role of preventing the solution 50 from flowing back into the introduction path 31a. Further, an end portion of the fluid path 34 of the pump head 30 is connected to the internal space 33 of the supply unit 31.

The delivery section 32 is provided with a delivery path (discharge path) 32a for the solution 50. An end of the fluid path 35 of the pump head 30 is connected to the internal space 36 of the delivery unit 32. In addition, a check valve (check ball) 42 is set in the internal space 36 of the delivery unit 32, and the check valve 42 closes the outlet of the fluid path 35 of the pump head 30, and the solution 50 is in the fluid path 35. It has a role to prevent backflow.

The fluid (solution) 50 of the present embodiment is a liquid containing an oxidizing substance. The fluid 50 is, for example, an alkali hypochlorite aqueous solution, a hypochlorous acid aqueous solution, chlorine water, chlorine dioxide water, hydrogen peroxide solution, or the like, but is not limited thereto. The reciprocating pump 200 according to the present embodiment is mainly used for water sterilization treatment, but is not limited to that use, and other uses (for example, medical sterilization use, foods) Sanitary sterilization applications, bleaching applications, industrial production applications, etc.).

Next, the operation of the reciprocating pump 200 of this embodiment will be described with reference to FIGS. 5 (a) and 5 (b). First, when the diaphragm 100 is moved from the state shown in FIG. 4 in the direction of the arrow 52, the pump chamber 30a of the pump head 30 becomes negative pressure as shown in FIG. Then, the liquid 50 is sucked up. Next, when the diaphragm 100 is moved in the direction of the arrow 51, the pump chamber 30 a of the pump head 30 becomes positive pressure, and the liquid 50 is sent out as indicated by

arrows

63 and 64. By repeating this, the liquid 50 can be continuously supplied and discharged (inflow and delivery).

Here, the contact surface (surface) 15a to the solution 50 in the film member 15 constituting the diaphragm 100 touches an oxidizing substance of the solution 50 and also touches a gas (particularly a chlorine-based gas) from the oxidizing substance. It will be. Although the back surface 15b of the film member 15 of this embodiment is comprised from the rubber material, a rubber material will deteriorate with the gas from an oxidizing substance. In particular, sterilizing solutions that are frequently used in diaphragm pumps have changed from alkali hypochlorite to chlorine dioxide (ClO ₂ ), which has excellent sterilizing power. For example, the influence of chlorine gas) is also increasing. In order to prevent such deterioration due to gas, the diaphragm 100 of the present embodiment has a structure as shown in FIG.

FIG. 6 is a cross-sectional view showing the structure of the diaphragm 100 according to the present embodiment. The diaphragm 100 according to the present embodiment includes a non-porous film 14 made of a fluororesin, a rubber film member 10 laminated on the non-porous film 14 and made of a rubber material, and a rubber film. A gas barrier film 12 is provided between the member 10 and the non-porous film 14. Furthermore, in the configuration of the present embodiment, the non-porous film 14 and the gas barrier film 12 are joined by thermocompression bonding.

The non-porous film 14 of this embodiment is composed of a film made of tetrafluoroethylene (PTFE). Fluorine resin films include porous films and non-porous films (non-porous films). In this embodiment, the permeation of chlorine-based gases (such as chlorine gas) derived from oxidizing substances is suppressed as much as possible. Therefore, a non-porous film is used. Such a fluorine resin film (non-porous film 14) is a cutting film or a casting film.

In this embodiment, a cutting film is produced as follows, for example. First, a commercially available PTFE molding powder is filled into a cylindrical mold (but closed at the lower end), and is preliminarily molded by pressurizing at a pressure of 200 kgf / cm ² . Next, the preform (the round bar) is fired at a temperature of 380 ° C. for 3 hours. Then, a cutting film can be produced by cutting this fired product into a film shape with a lathe.

In the present embodiment, the casting film is produced, for example, as follows. First, a commercially available aqueous dispersion having a PTFE powder concentration of 60% by weight is applied to one side of a polyimide sheet (carrier sheet) having a thickness of 0.1 mm. Thereafter, the mixture is heated at 90 ° C. for 2 minutes and then heated at 360 ° C. for 2 minutes to evaporate and remove water as a dispersion medium, form a PTFE film, and fire the film. Next, after applying the dispersion to the polyimide sheet and multi-stage heating twice, a cast film can be produced by peeling the calcined PTFE film from the polyimide sheet.

The film thus produced is non-porous PTFE (or PTFE substantially free of pores), unlike porous PTFE. Here, a non-porous PTFE sheet (PTFE film) has pores of about 1 nm or less in a region through which ions and low molecules pass, and is not a porous PTFE sheet. Although the gas barrier property is ensured by the gas barrier film 12, the size and number of holes of the fluororesin film do not necessarily need to be considered important.

Moreover, since the fluororesin film 14 is excellent in water repellency (liquid repellency), the diaphragm 100 (film member 15) can be prevented from being deteriorated by the oxidizing power of the oxidizing substance. In this regard, the corrosion resistance and / or durability of the diaphragm 100 can be improved as compared with the case where the gas barrier film 12 is positioned on the surface 15a of the film member 15 without the fluorine resin film 14 being present. .

The gas barrier film 12 of the present embodiment is composed of a resin film that blocks permeation of an oxidative substance-derived chlorine-based gas (such as chlorine gas). Examples of the material of the resin film constituting the gas barrier film 12 (that is, a polymer material having high gas barrier properties) include, for example, polyvinyl alcohol (PVA), ethylene vinyl alcohol copolymer (EVOH), and polyvinylidene chloride (PVDC, VDC). -MA copolymer), polyacrylonitrile (PAN), polyethylene terephthalate (PET), nylon 6, polyvinyl chloride (PVC), and the like. In consideration of durability to oxidizing gas and gas generated from a solution containing an oxidizing substance, moisture may be included. Therefore, polyvinylidene chloride (PVDC), Polyacrylonitrile (PAN) and polyethylene terephthalate (PET) are preferable. Of these, polyvinylidene chloride (PVDC) is particularly preferable.

Here, in this embodiment, the gas permeability of the gas barrier film 12 is evaluated by the permeability of oxygen gas smaller than the size of chlorine gas in order to obtain more stringency. The gas permeability of the gas barrier film 12 is evaluated by O ₂ permeability as follows. When the O ₂ permeability index is (cc / m ² · 24 h · atom), 25 ° C., 65% RH (relative humidity), and a film thickness of 25 μm, PVDC is 1 to 2, EVOH is 0.2 to 1.5, PAN is 5, and PET is 80. As a gas barrier property, PVDC and EVOH are excellent, and PVDC is excellent in terms of durability to a gas having an oxidizing power. Although PTFE in the case of Teflon (registered trademark) is excellent in water repellency (liquid repellency), the O ₂ permeability index is about 7894, which allows gas to permeate as compared with PVDC. End up. The gas barrier property of the high-density polyethylene is about 2900 as an index of the O ₂ permeability. Therefore, the gas barrier property of chlorinated polyethylene obtained by chlorinating a part of the structure in polyethylene is expected to be the same as or around that of high-density polyethylene. In other words, the gas barrier property of chlorinated polyethylene is , PVDC (or EVOH) is not expected to be a good value.

Further, the thicker the gas barrier film 12, the higher the effect of the gas barrier property, but it is desirable that the thickness of the gas barrier film 12 is such that the deformation in the reciprocating motion of the diaphragm 100 is not hindered. Specifically, the thickness of the gas barrier film 12 may be appropriately determined based on indices (tensile strength, elastic modulus, durability as a diaphragm) that determine the flexibility of the diaphragm 100. As an example, the thickness of both the gas barrier film 12 and the fluororesin film 14 can be set to 0.01 mm to 3 mm, for example. The thickness of the gas barrier film 12 can be set to 0.001 mm to 1 mm, for example. The tensile strength and elastic modulus of the gas barrier film 12 are those having desired values that satisfy the function of the diaphragm 100.

The rubber film member 10 of the present embodiment is made of, for example, ethylene propylene rubber (EPDM), neoprene rubber, fluorine rubber, silicone rubber, or nitrile rubber. In the configuration of the present embodiment, an ethylene propylene rubber sheet is preferable as the rubber film member 10 in terms of chemical resistance, weather resistance, and the like, but is not limited thereto. Here, the thickness of the rubber film member 10 is not particularly limited, but may be, for example, 0.1 mm to 5 mm.

In the configuration of the present embodiment, the fluororesin film (non-porous film) 14 and the gas barrier film 12 are joined by thermocompression bonding. Therefore, it is not necessary to use an adhesive to join the fluorine resin film 14 and the gas barrier film 12. Therefore, it is possible to prevent the adhesive from being deteriorated by a gas (for example, chlorine gas) from the oxidizing substance. Therefore, the fluorine-based resin film 14 and the gas barrier film 12 are caused by the deterioration of the adhesive. Can be prevented from peeling off (separating).

Further, in the present embodiment, the thermocompression bonding can be performed by the following method, for example. For example, as a method of thermocompression bonding, a hot plate type method in which the film is sandwiched between heating plates installed on the top and bottom of the film, and the film is heated and pressure-bonded, or hot air is blown between two films and heated, Hot air type method that heats and presses by pressure, or roll type that heats and presses between two rolls (one heated roll or both heated rolls) through two films The method of etc. can be mentioned. The hot plate type has a limit on the size of the hot plate, and the hot air type has a problem that it is difficult to manage the hot air such as the hot air temperature, the air volume, and the position of the blowing nozzle. It is desirable because it can be continuously produced and is easy to manage. In addition, in order to facilitate the laminating process by thermocompression bonding, it is preferable to perform chemical treatment (rough surface treatment) or sputter etching treatment on the surface of the fluororesin film 14 to which the gas barrier film 12 is applied.

In addition to the technique of thermocompression bonding of the fluorine-based resin film (non-porous film) 14 and the gas barrier film 12 to each other, the compatibility between the two is improved (or the compatibility between the materials is relaxed as much as possible). In order to improve laminating properties, a thermoplastic resin film (for example, a thermoplastic film having a melting point of 300 ° C. or lower) may be interposed between the fluorine-based resin film 14 and the gas barrier film 12. . As such a thermoplastic resin film, linear low density polyethylene (LLDPE or linear polyethylene), ethylene vinyl acetate copolymer (EVA), unstretched polypropylene (CPP), or the like can be used. The thickness of the interposed thermoplastic resin film is, for example, 0.001 mm to 0.5 mm. In the configuration of the present embodiment, in order to thermocompression bond the fluororesin film 14 and the gas barrier film 12 via the thermoplastic resin film, for example, the above-described thermocompression bonding method can be used.

Further, a thermoplastic resin film is disposed on the fluorine resin film 14, and lamination (lamination by thermocompression bonding) with the gas barrier film 12 may be executed. Alternatively, a thermoplastic resin film may be disposed on the gas barrier film 12, and lamination (laminating by thermocompression bonding) with the fluororesin film 14 may be performed.

Furthermore, it is preferable that the gas barrier film 12 and the rubber film member 10 are joined by thermocompression bonding. By joining the gas barrier film 12 and the rubber film member 10 by thermocompression bonding, it is possible to eliminate the need for joining using an adhesive. Since the bonding between the gas barrier film 12 and the rubber film member 10 is a portion where the gas is blocked by the gas barrier film 12, even if an adhesive is used, the influence of the deterioration of the adhesive due to the gas can be avoided. Therefore, it is possible to use an adhesive for the joining. On the other hand, by laminating the fluororesin film 14, the gas barrier film 12, and the rubber film member 10 together by thermocompression bonding, there is an advantage that the diaphragm 100 can be manufactured collectively without using an adhesive. is there.

Even when the bonding between the gas barrier film 12 and the rubber film member 10 is performed by thermocompression bonding, in order to improve the bonding property between the two (or to improve the laminating property by relaxing the compatibility between the materials as much as possible). It is also possible to interpose a thermoplastic resin film (for example, a thermoplastic film having a melting point of 300 ° C. or lower). Note that a thermoplastic resin film is disposed on the gas barrier film 12, and lamination with the rubber film member 10 (laminate by thermocompression bonding) may be executed. Alternatively, a thermoplastic resin film may be disposed on the rubber film member 10 and lamination (lamination by thermocompression bonding) with the gas barrier film 12 may be performed. Furthermore, a thermoplastic resin film is disposed on both surfaces of the gas barrier film 12, and the fluororesin film 14, the gas barrier film 12, and the rubber film member 10 may be laminated (lamination by thermocompression bonding).

Further, if the fluorine-based resin film 14 and the gas barrier film 12 are bonded (adhered) by thermocompression bonding, an adhesive may be used to improve the bonding property. In this case, even if the adhesive is deteriorated, the bonding between the two is ensured by thermocompression bonding, and the joining property by thermocompression bonding is further improved.

Next, examples of the present invention will be described. In addition, a present Example demonstrates this invention in detail, This invention is not limited to these Examples.

The following sample was used as Example 1. A film sample having a gas barrier property is PTFE sheet No. manufactured by Nitto Denko Corporation. A sample obtained by laminating (thermocompression) 901UL (thickness: 100μm) Asahi Kasei Chemicals Co., Ltd. Varioflex film (configuration: LLDPE (linear low density polyethylene) 30μm / Saran UB (polyvinylidene chloride) 15μm / LLDPE 30μm)) is there. Oxygen permeability measurement was performed on the sample of Example 1 using an oxygen permeability measuring device (Model 8001 manufactured by Illinois Instruments, USA). As a result, the oxygen permeability of the film sample having gas barrier properties was 52.02 cc / (m ² · day) in terms of 23 ° C. · RH 60% and thickness 20 μm.

The thermocompression bonding of PTFE and LLDPE / PVDC / LLDPE in this example is performed under the conditions of a roll temperature of 160 ° C. (only one of the two rolls), a pressure of 0.5 MPa, and a roll speed of 0.1 m / min. Thus, a laminate was produced. LLDPE / PVDC / LLDPE is manufactured by Asahi Kasei Chemicals Corporation, and this film is a film produced by coextrusion.

In addition, as Comparative Example 1, a reference value of a Teflon (registered trademark) sheet is used as a sample, and the oxygen permeability of the sample is about 16000 cc / (m in terms of 23 ° C./RH 60% and thickness 20 μm. ² · day). That is, when compared with Example 1 and Comparative Example 1, it can be seen that the gas barrier properties in Example 1 are significantly improved. Therefore, chlorine gas larger than oxygen (or an oxidizing substance-derived gas) can be blocked by the gas barrier film 12 of this embodiment (that is, a laminate of the fluorine resin film 14 and the gas barrier film 12), Therefore, deterioration of the rubber film member 10 can be suppressed.

According to the diaphragm 100 of the present embodiment, a laminated body of the fluorine resin film 14, the gas barrier film 12, and the rubber film member 10 is provided, and the fluorine resin film 14 and the gas barrier film 12 are joined by thermocompression bonding. Therefore, the fluorine resin film 14 can make the solution 50 containing an oxidizing substance water-repellent (liquid repellency) with the fluorine resin film 14, and a gas (chlorine gas or the like) that has passed through the fluorine resin film 14. The gas barrier film 12 can prevent further penetration. Moreover, since the fluororesin film 14 and the gas barrier film 12 are bonded by thermocompression bonding, it is possible to avoid deterioration of the adhesive by the gas as compared with the case of bonding by the adhesive. . As a result, the diaphragm 100 having excellent corrosion resistance and / or durability against the liquid 50 containing an oxidizing substance can be realized. In addition, the replacement frequency of the diaphragm 100 can be reduced, and the reciprocating pump 200 having excellent corrosion resistance and / or durability against the liquid 50 containing an oxidizing substance can be realized.

As a modification of the diaphragm 100 of the present embodiment, a diaphragm 101 as shown in FIG. 7 can be constructed. A diaphragm 101 shown in FIG. 7 has a structure in which a vapor-deposited film 13 is vapor-deposited on a fluorine-based resin film 14 and is laminated on a rubber film member 10. Since the vapor deposition film 13 is made of an inorganic material and is vapor deposition of an inorganic material, a film having excellent gas barrier properties can be constructed. Examples of the inorganic material here include silica (SiO ₂ ) and alumina (Al ₂ O ₃ ).

As an index of O ₂ permeability, when using (cc / m ² · 24h · atom), 25 ° C., 65% RH (relative humidity), and a film thickness of 25 μm, silica (SiO ₂ ) is 1 to 5, and alumina (Al ₂ O ₃ ) is 1 to 5. These are excellent in gas barrier properties, but when the diaphragm 101 is used as the reciprocating pump 200, the above-described diaphragm 100 is superior in flexibility and flexibility. Aluminum (Al) is 1 to 5 and niobium / palladium (hydrogen separation membrane) is almost 0. These are also excellent in gas barrier properties, but aluminum is inferior in corrosion resistance to chlorine, and niobium / palladium is cost-effective. There is a problem. When a structure that can solve these problems is employed, the diaphragm 101 can be employed in the reciprocating pump 200.

As mentioned above, although this invention has been demonstrated by suitable embodiment, such description is not a limitation matter and, of course, various modifications are possible. For example, the reciprocating pump 200 has been described with reference to FIGS. 4 and 5 (a) and 5 (b). However, if the diaphragm 100 according to the embodiment of the present invention can be used, the structure thereof is described. -Any type. In addition, in the present embodiment, the laminated body (film member 15) of the fluorine-based resin film 14 / the gas barrier film 12 / the rubber film member 10 is shown as the configuration of the diaphragm 100. The formation of the protective film is not prohibited, and a suitable layer (in the above example, a low melting point resin film) can be appropriately disposed between the layers. Furthermore, the second gas barrier film 12 may be formed on the back surface side (15b) of the rubber film member 10 so that the gas does not enter the reciprocating pump 200.

According to the present invention, it is possible to provide a diaphragm having excellent corrosion resistance and / or durability against a liquid containing an oxidizing substance, and a reciprocating pump using the diaphragm.

10 Rubber film member 10a Pump chamber 12 Gas barrier film 13 Deposition film (gas barrier film)
14 Non-porous membrane (fluorinated resin film)
15 Film member 16 DLC film (surface protective film)
20 Piston part 30 Pump head 30a Pump chamber 31 Supply part 31a Introduction path 32 Delivery part 34 Fluid path 35 Fluid path 41 Check valve 42 Check valve 50 Fluid (solution)
DESCRIPTION OF SYMBOLS 100 Diaphragm 101 Diaphragm 102 Diaphragm 110 Pump head 120 Diaphragm 121 Base fabric 122 1st film body 123 2nd film body 124 Fluorine resin 130 Piston part 200 Reciprocating pump 1000 Reciprocating pump

Claims

A diaphragm used to reciprocate and convey a fluid,
A non-porous membrane composed of a fluorine-based resin;
A rubber film member laminated on the non-porous film and made of a rubber material;
A gas barrier film disposed between the rubber film member and the non-porous film,
The non-porous film and the gas barrier film are diaphragms joined by thermocompression bonding.
The gas barrier film is composed of a resin film that blocks permeation of chlorine-based gas,
The diaphragm according to claim 1, wherein an adhesive is not used for joining the non-porous film and the gas barrier film.
The diaphragm according to claim 1 or 2, wherein the gas barrier film is made of polyvinylidene chloride.
The gas barrier film is composed of a laminated film of a gas barrier layer for blocking gas and a thermoplastic resin film,
The diaphragm according to claim 1 or 2, wherein the thermoplastic resin film of the gas barrier film is in contact with the non-porous film.
The gas barrier layer is a polyvinylidene chloride film,
The diaphragm according to claim 4, wherein the thermoplastic resin film of the gas barrier film includes a linear low-density polyethylene film.
The diaphragm according to any one of claims 1 to 5, wherein the non-porous film is composed of a tetrafluoroethylene film.
The diaphragm according to claim 6, wherein the non-porous film is a cutting film or a casting film.
The diaphragm according to any one of claims 1 to 7, wherein the rubber film member and the gas barrier film are bonded by thermocompression bonding.
The rubber film member is connected to a piston part that reciprocates the diaphragm,
The diaphragm according to any one of claims 1 to 8, wherein an adhesive is not used for joining the rubber film member and the gas barrier film.
The diaphragm according to any one of claims 1 to 9, wherein the gas barrier film is formed of a laminated film of a gas barrier layer that blocks gas and a thermoplastic resin film formed on both surfaces of the gas barrier layer. .
The diaphragm according to any one of claims 1 to 10, wherein the rubber film member is made of ethylene propylene rubber.
A reciprocating pump comprising the diaphragm according to any one of claims 1 to 11.
A reciprocating pump that reciprocates and conveys fluid,
A diaphragm with an attached piston,
A pump head on which the diaphragm is set,
The diaphragm is composed of a film member laminated by thermocompression bonding without using an adhesive,
A reciprocating pump, wherein the film member includes a gas barrier film.
The film member is
A fluorine-based resin film located on the pump head side;
The reciprocating pump according to claim 13, further comprising: a rubber film member joined to the fluororesin film via a gas barrier film.
The fluororesin film is a non-porous cutting film or casting film,
The reciprocating pump according to claim 14, wherein the gas barrier film is a polyvinylidene chloride film.
The thermoplastic resin film according to any one of claims 13 to 15, wherein the thermoplastic resin film is formed on at least one of the surface on the fluororesin film side and the surface on the rubber film member side in the gas barrier film. Reciprocating pump.
The fluid to be conveyed is selected from the group consisting of an aqueous alkali hypochlorite solution, an aqueous hypochlorous acid solution, chlorine water, chlorine dioxide water and hydrogen peroxide solution, according to any one of claims 13 to 16. The described reciprocating pump.