WO2013002380A1 - Analysis device - Google Patents

Abstract

Provided is an analysis device which uses a new analysis method that has not been introduced in the past. The analysis device (1) is provided with: an elastic body layer (2) which is displaced by shearing stress from fluid (FL) caused by the fluid (FL) flowing along a flow path surface (2a); and a sensor part (3) which is covered by the elastic body layer (2) and has a cantilever part (21) that can be moved by the displacement of the elastic body layer (2). As a result, unlike a conventional rotary type viscometer which measures fluid viscosity on the basis of viscous resistance, the viscosity of the fluid (FL) can be specified on the basis of change in the cantilever part (21). It is possible to provide the analysis device (1) which uses a new analysis method.

Description

Analysis equipment

The present invention relates to an analyzer, and is suitable for application to an analyzer that analyzes the viscosity of a fluid such as fluid food.

Currently, a rotational viscometer called a rheometer is used as a method for measuring the viscosity of fluid food. For example, this rotary viscometer is based on the viscous resistance of the fluid that the bottom surface receives from the fluid when the rotor is rotated after the conical bottom surface of the rotor is immersed in the fluid whose viscosity is to be measured. Can be measured (see, for example, Patent Document 1).

JP-A-9-61333

By the way, the measurement of the viscosity of fluids such as fluid foods is also important when elderly people with reduced swallowing ability cook fluid foods that are easy to swallow. It is desirable to be able to measure the viscosity of a fluid at various locations. In addition, for example, even when comparing the viscosity of multiple types of fluid foods, in addition to using a viscosity analysis method with a rotary viscometer that rotates a rotor, the viscosity of each fluid can be analyzed. Proposals for new analytical methods are also desired.

Therefore, the present invention has been made in consideration of the above points, and an object of the present invention is to propose an analysis apparatus using a novel analysis technique that has not been conventionally used.

In order to solve such a problem, claim 1 of the present invention is an analyzer for identifying the viscosity of a fluid, and an elastic layer that is displaced by shear stress from the fluid when the fluid flows on the surface of a flow path. A sensor unit that is covered with the elastic body layer, and that obtains a measurement result that specifies the viscosity of the fluid based on a change state of a movable part that is movable when the elastic body layer is displaced. To do.

According to a second aspect of the present invention, the sensor unit includes a piezoresistive layer that detects the movable state of the movable unit as a change in resistance value, and the measurement result is obtained from the piezoresistive layer. It is characterized by being.

Further, according to a third aspect of the present invention, there is provided a shear stress calculating means for calculating a shear stress received from the fluid based on the resistance value change rate obtained from the sensor unit.

According to a fourth aspect of the present invention, there is provided a sensor body covered with the elastic body layer, a pressure sensor for measuring a pressure received from the fluid, and a main body moved in the fluid, and the sensor Viscosity coefficient calculating means for calculating the viscosity coefficient of the fluid from the measurement result obtained from the section and the pressure measurement result obtained from the pressure sensor.

According to a fifth aspect of the present invention, the main body is provided with the sensor portion covered with the elastic body layer on a side surface orthogonal to a moving direction in which the main body is moved in the fluid, The pressure sensor is provided on one end surface perpendicular to the moving direction in the fluid.

According to a sixth aspect of the present invention, the main body is provided with a plurality of the sensor portions, and each of the sensor portions detects a shear stress from the fluid in three axial directions and specifies the viscosity of the fluid. The measurement result is obtained.

Further, according to a seventh aspect of the present invention, a surface flow velocity of the fluid flowing on the surface of the flow path and a fluid height that is a height from the surface of the flow path of the fluid flowing on the flow path surface are acquired, It is characterized by comprising a calculation means for calculating a viscosity coefficient of the fluid from the measurement result from the sensor unit, the surface flow velocity, and the fluid height.

In addition, an eighth aspect of the present invention includes a rotating substrate that moves the fluid by rotating in a state where the fluid is disposed between the flow path surfaces of the elastic body layer, and the sensor unit includes the sensor unit, A measurement result that specifies the viscosity of the fluid is obtained based on a change state of the movable part that is moved by the displacement of the elastic layer when the rotating substrate is rotated.

According to a ninth aspect of the present invention, there is provided a tubular main body through which the fluid passes through an internal hollow region, and the wall of the main body is provided with the sensor unit covered with the elastic layer. The sensor unit obtains a measurement result that specifies the viscosity of the fluid based on a change state of the movable unit that is moved when the elastic body layer is displaced when the fluid passes through the hollow region. It is characterized by.

According to the present invention, it is possible to propose an analysis apparatus that uses a novel analysis technique that has not existed before.

It is the schematic which shows the whole structure of the analyzer by 1st Embodiment. It is the schematic which shows a mode when a fluid flows through the flow-path surface of a shear force sensor. It is the schematic which shows the velocity distribution of the fluid which flows through the flow-path surface. It is the schematic which shows the detailed structure of a shear force sensor. It is the schematic where it uses for description of the manufacturing method of a shear force sensor. It is the schematic where it uses for description of the manufacturing method of a shear force sensor. It is the schematic where it uses for description of the manufacturing method of a shear force sensor. It is the schematic where it uses for description of the manufacturing method of a shear force sensor. It is the schematic where it uses for description when raising the movable part of a cantilever part. It is the schematic which shows the detailed structure of a cantilever part. It is the schematic which showed the mode of the displacement of the sensor part before and after the fluid flows into the flow-path surface of a shear force sensor. It is a graph which shows the time change of the resistance value change rate when a fluid flows through the flow-path surface. It is a photograph which shows a mode when a fluid flows through the flow-path surface. It is a graph which shows the relationship between resistance value change rate and flow volume. It is a graph which shows the relationship between a surface flow velocity and a flow volume. It is a graph which shows the relationship between a shear stress and a surface flow velocity. It is a graph which shows the relationship between the calculated viscosity coefficient and sample viscosity. It is the schematic which shows the structure of the analyzer by 2nd Embodiment. It is the schematic which shows the mode of the fluid which flows around the main body when moving a main body. It is the schematic which shows a mode that a fluid flows around a shear force sensor and a pressure sensor. It is the schematic which shows the analyzer by 3rd Embodiment. It is the schematic which shows the mode of the fluid which flows through the peripheral surface of a main body when a main body is moved. It is the schematic which shows the structure of the sensor group in a shear force sensor. It is the schematic which shows the detailed structure of a 1st sensor part, a 2nd sensor part, and a 3rd sensor part. It is the schematic which shows the mode of a 1st sensor part, a 2nd sensor part, and a 3rd sensor part when shear stress is given to the y-axis direction from the fluid. It is the schematic which shows the mode of a 1st sensor part, a 2nd sensor part, and a 3rd sensor part when a pressure is given to the z-axis direction from the fluid. It is the schematic which shows an example when moving the analyzer by 3rd Embodiment to arbitrary directions. It is the schematic which shows the structure of the analyzer by 4th Embodiment. It is the schematic which shows the structure of the analyzer of the modification in 4th Embodiment. It is the schematic which shows the structure of the analyzer by 5th Embodiment. It is the schematic which shows the structure of the analyzer by 6th Embodiment. It is the schematic which shows the structure of the analyzer by 7th Embodiment. It is sectional drawing which shows the detailed structure of the analyzer of FIG. FIG. 5 is a side sectional view of a doubly supported beam schematically shown for explaining the relationship between the resistance value change rate ΔR / R and the pressure P. It is a graph which shows the shearing stress and pressure when an analyzer is reciprocated in water.

1,35,41,55,61,70,80,90 Analyzer 2,45,87,98a, 98b Elastic layer 3 Sensor unit 7 Information processing device (calculation means)
50a 1st sensor part (sensor part)
50b Second sensor part (sensor part)
50c 3rd sensor part (sensor part)
95a Cantilever sensor unit (sensor unit)
95b Dual beam sensor unit (sensor unit)

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(1) First embodiment (1-1) Overall configuration of analyzer

In FIG. 1, reference numeral 1 denotes an analyzer according to the present invention, in which a sensor unit 3 includes a viscosity sensor 4a having a shear force sensor 4 covered with an elastic layer 2, and a surface flow velocity of a fluid whose viscosity is to be specified (described later). ) And fluid height (described later), an amplifier 6 that amplifies an output signal from the sensor unit 3, and an information processing device 7 electrically connected to the imaging device 5 and the amplifier 6 It consists of and.

Here, the viscosity sensor 4a includes a flow path forming portion 9 and a base 10, and the flow path forming portion 9 includes the shear force sensor 4. The flow path forming portion 9 is installed on the base 10 so that the flow path surface 2a of the shear force sensor 4 is inclined at an inclination angle θ with respect to the horizontal line, and the fluid is self-weighted on the flow path surface 2a. It is made to flow down. In FIG. 1, the axis parallel to the flow channel surface 2a of the shear force sensor 4 is taken as the x axis, and the fluid flows in the x direction along the flow channel surface 2a.

In practice, the flow path forming portion 9 is provided with a rectangular plate portion 12 made of, for example, an acrylic plate, and a wall portion 13a made of, for example, an acrylic plate along the upper end portion and both side portions of the plate portion 12. , 13b, 13c are provided, and a rectangular channel forming region ER1 surrounded by the walls 13a, 13b, 13c is formed on the plate portion 12. The flow path forming unit 9 is provided with a shear force sensor 4 in the flow path forming region ER1.

Further, the flow path forming portion 9 has a discharge port 15 formed in the center of a wall portion 13a provided along the upper end portion of the plate portion 12, and fluid is supplied to the discharge port 15 via a tube 16. Means 17 are connected. When the fluid is supplied from the fluid supply means 17, the flow path forming unit 9 can discharge the fluid from the discharge port 15 onto the flow path surface 2 a of the elastic layer 2 of the shear force sensor 4. As a result, the fluid discharged from the discharge port 15 of the wall portion 13a flows down to the elastic body layer 2 along the planar flow channel surface 2a and can pass through the flow channel surface 2a on the sensor unit 3. Has been made.

The shear force sensor 4 is formed in the flow path forming region ER1 so as to cover the sensor section 3 described later provided at a predetermined position on the plate section 12 of the flow path forming section 9 and the plate section 12 and the sensor section 3. And an elastic body layer 2. The elastic body layer 2 has flexibility, and the fluid flows on the channel surface 2a exposed to the outside, and the shear stress generated from the fluid at this time (acts in the x direction parallel to the flow velocity surface 2a) It can be elastically deformed in the x direction by force).

In practice, in the case of this embodiment, the elastic body layer 2 is mainly composed of silicon rubber such as PDMS (Polydimethylsiloxane), and a two-component liquid comprising PDMS and a curing agent is mixed at a predetermined mixing ratio (for example, , 20: 1), and is cured while adjusting flexibility, and can be elastically deformed in the x direction by shearing stress from the fluid flowing down the flow path surface 2a. As shown in FIG. 2, the elastic body layer 2 has a flow path surface 2a on which the fluid FL flows in a flat shape, and the fluid FL flows evenly on the flow path surface 2a. It passes through the surface 2a and flows to the lower end opening of the flow path forming part 9.

The elastic body layer 2 moves in the direction of the flow of the fluid FL (x direction) due to the shear stress from the fluid FL generated when the fluid FL flows down along the flow path surface 2a. An angle of the sensor unit 3 is displaced, and a resistance value R of a piezoresistive layer (described later) included in the sensor unit 3 can be changed. Thus, when the resistance value of the piezoresistive layer before displacement is R, when the fluid flows down the flow path surface 2a, the sensor unit 3 is displaced by the load given by the displacement of the elastic body layer 2, This can be measured as a resistance value change rate ΔR / R.

Here, τ is the shear stress applied to the shear force sensor 4 by the fluid FL, μ is the viscosity coefficient (also referred to herein as viscosity), and as shown in FIG. The flow velocity on the surface of the flowing fluid FL (hereinafter referred to as the surface flow velocity) is U, and the height from the flow path surface 2a of the fluid FL extending in the y axis orthogonal to the x axis (hereinafter referred to as the fluid height). ) Is h, the following relationship is established.

Therefore, the analyzer 1 calculates the shear stress τ based on the resistance value change rate ΔR / R in the sensor unit 3, and measures the surface flow velocity U of the fluid FL flowing on the flow path surface 2a separately from this, In addition to this, by determining the fluid height h on the flow path surface 2a, the information processing device 7 can calculate the viscosity coefficient μ, and based on this viscosity coefficient μ, how much viscosity the fluid FL has. It is possible to make the user determine whether or not he / she is doing. The calculation of the shear stress τ will be described later in “(1-2) Configuration of sensor unit”.

The surface flow velocity U is the speed (surface flow velocity) = measurement distance / time based on how long the fluid FL traveled between the measurement distances (20 [mm]) across the sensor unit 3 calculate. Actually, in the analysis device 1, the fluid FL is imaged by the imaging device 5 from the wall 13b side, and the imaging data obtained from the imaging device 5 is analyzed by the information processing device 7 to obtain the surface velocity U and the fluid height h. Can be characterized. In practice, the imaging device 5 is composed of, for example, a camera, and as shown in FIG. 2, the side surface side (x of the fluid FL) is such that the fluid FL flowing within the measurement distance of the flow path surface 2a falls within the angle of view range. The fluid FL is adjusted so as to be imaged from the z-axis direction side orthogonal to the axis and the y-axis.

Based on the image data received from the image pickup device 5, the information processing device 7 measures how much time the characteristic points such as bubbles of the fluid FL move within the angle of view, and measures the measurement distance. The surface flow velocity U can be calculated from the result and a preset measurement distance.

Further, when calculating the surface flow velocity U, even if the fluid FL has the same viscosity, the surface flow velocity U also changes depending on the flow rate flowing through the flow channel surface 2a. It becomes important. Therefore, the imaging device 5 captures an image of the fluid FL flowing on the flow path surface 2a from the wall 13b side, and analyzes the captured data by the information processing device 7, thereby allowing the fluid height h of the fluid FL from the flow path surface 2a Can be measured.

Incidentally, any method may be used as a method for calculating the fluid height h. For example, the flow rate of the fluid FL discharged from the fluid supply means 17 to the flow path surface 2a so as to have a preset fluid height h. And the information processing device 7 may store the fluid height h as a constant in advance. In this case, the imaging device 5 may be used to calculate only the fluid velocity U, and may capture the feature point of the fluid FL from the upper surface side (y-axis direction side).

In this way, the analysis apparatus 1 uses the information processing apparatus 7 based on the equation 1 given above based on the shear stress τ due to the fluid FL, the surface flow velocity U of the fluid FL, and the fluid height h of the fluid FL. The viscosity coefficient μ is calculated from the above, and the user can determine the viscosity of the fluid FL by notifying the user of the viscosity coefficient μ using a display unit or the like.

(1-2) Detailed Configuration of Sensor Unit Next, a detailed configuration of the sensor unit 3 in the shear force sensor 4 will be described. As shown in FIG. 4, the sensor part 3 of the shear force sensor 4 includes a base part 20 fixed to the plate part 12 of the flow path forming part 9, and the base part 20 is bent in an L shape. One end of the cantilever portion 21 is fixed.

The cantilever part 21 is provided at one end and fixed to the base part 20, a pair of hinge parts 21b connected to the base part 21a, and provided at the other end, with the hinge part 21b interposed in the base part 21a. The movable portion 21c is connected to the flat plate-like movable portion 21c, and when the external force is not applied, the movable portion 21c can be held substantially vertically with respect to the plate portion 12 by the bent hinge portion 21b.

The cantilever portion 21 has an L-shaped Si upper layer 23 formed of an Si thin film, and a thin film piezoresistive layer 24 is formed on the surface of the Si upper layer 23, and the piezo of the base portion 21a and the movable portion 21c. Au / Ni thin films 25 and 26 are provided on the resistance layer 24. The base portion 20 is provided with an Si lower layer 27, and a base portion 21a of the cantilever portion 21 is provided at a predetermined position of the Si lower layer 27 with an SiO ₂ layer 28 interposed therebetween.

In the cantilever part 21, since the Si upper layer 23 and the piezoresistive layer 24 are formed in a thin film shape of nm order, and each hinge part 21b is formed in an elongated rectangular shape, when an external force is applied from the elastic body layer 2, The movable portion 21c receives an external force and can easily tilt around the hinge portion 21b of the bent portion, and the piezoresistive layer 24 of the hinge portion 21b can function as a piezo element.

Here, in the case of this embodiment, the cantilever part 21 is covered with the Au / Ni thin films 25 and 26 except for the hinge part 21b, so that only deformation of the hinge part 21b can be measured as a resistance value. Has been made. That is, in the cantilever portion 21, when the hinge portion 21b is deformed by an external force, the crystal lattice of the hinge portion 21b is distorted, and the amount of semiconductor carriers and mobility are changed to change the resistance value. Thus, in the sensor unit 3, a potential difference is applied between the electrodes (Au / Ni thin film 25) at the end points of the hinge part 21b of the bipod structure, and the resistance value change rate ΔR / R of the hinge part 21b is measured. The force acting on the cantilever portion 21 (shear stress τ from the fluid) can be measured.

The cantilever portion 21 is electrically connected to the Au / Ni thin film 25 provided on the base portion 21a, and the resistance value change rate ΔR / R at the hinge portion 21b is measured. The wiring 29 is electrically connected to the amplifier 6 using a Wheatstone bridge circuit.

The sensor unit 3 is covered with a protective film 30 having a thickness of about 1 [μm] made of polyparaxylene (trade name: Parylene) that covers the plate part 12. Although the upright state of the movable portion 21c is maintained, the movable portion 21c can be tilted accordingly when the elastic layer 2 is displaced.

(1-3) Method for Manufacturing Shear Force Sensor and Viscosity Sensor Next, a method for manufacturing the above-described shear force sensor 3 will be described below. As shown in FIGS. 5A and 5B, an SOI (Silicon On Insulator) substrate 32 is prepared in which an Si upper layer 23, an SiO ₂ layer 28, and an Si lower layer 27 are stacked in this order from the surface. The SOI substrate 32 is washed in an HF (hydrogen fluoride) solution, and the natural oxide film formed on the surface of the SOI substrate 32 is removed.

Immediately thereafter, n-type impurity reagent P-59230 (OCD, Tokyo Ohka) is spin-coated on the surface of the SOI substrate 32, and the SOI substrate 32 is thermally diffused using a thermal oxidation furnace, and impurities are 100 [nm] or less. The piezoresistive layer 24 is formed on the Si upper layer 23 as shown in FIGS. 6A and 6B. Next, an Au / Ni layer is formed on the surface of the piezoresistive layer 24 of the SOI substrate 32 by sputtering, and then patterned into a predetermined shape. Using this Au / Ni layer as a mask, the piezoresistive layer 24 and the Si upper layer 23 are formed. Etching is performed by DRIE (Deep Reactive Ion Etching). As a result, as shown in FIGS. 7A and 7B, the SOI substrate 32 has the Au / Ni thin film 25 formed in the base forming region 33a to be the base 21a and the piezoelectric in the hinge forming region 33b to be the hinge 21b. The resistance layer 24 is exposed, and the Au / Ni thin film 26 can be formed in the movable part region 33c to be the movable part 21c.

Next, the Si lower layer 27 directly under the hinge portion forming region 33b and the movable portion region 33c is etched by DRIE while leaving the base portion forming region 33a, and the SiO ₂ layer 28 is removed by HF (hydrofluoric acid) gas. 8A and 8B, the hinge part 21b and the movable part 21c of the cantilever part 21 are arranged in the opening region 27a of the base part 27, and a state where the movable part 21c is a free end can be formed.

Next, separately from this, a flow path forming portion 9 formed by bonding an acrylic plate with an adhesive is prepared, and as shown in FIG. 9, a plate portion 12 of this flow path forming portion 9 is interposed with an adhesive. After fixing the sensor part 3 described above, a magnetic field (in the direction of arrow B in the figure) is applied in the y-axis direction from below the plate part 12, and the movable part that is a free end having the Au / Ni thin film 26 by the magnetic field. 21c can be displaced in the y-axis direction. Thereby, in the cantilever portion 21, the hinge portion 21b is bent and the movable portion 21c is erected, and the surface portion of the movable portion 21c is arranged perpendicular to the x-axis direction. The magnetic field is applied using a neodymium magnet (NE009, 26 Manufacturing Co., Ltd.).

In this state, as shown in FIG. 4, a protective film 30 having a thickness of 1 [μm] made of parylene is formed on the plate part 12 and the sensor part 3 by the CVD method to protect the movable part 21c from standing. It can be maintained by the membrane 30. Next, the wiring 29 connected to the amplifier 6 is connected to the Au / Ni thin film 25 provided as an electrode on the base 20 of the sensor unit 3.

Subsequently, the flow path region ER1 (FIG. 1) surrounded by the walls 13a, 13b, and 13c of the flow path forming section 9 covers the entire sensor section 3, and the elastic surface layer 2 having a flat flow path surface 2a. Form. Specifically, Polydimethylsioxane (PDMS: manufactured by Toray Dow Corning Co., Ltd., SILPOT184) is used as the elastic material for the elastic layer 2 here. In this case, first, the base material of PDMS and the curing agent are mixed at a weight ratio of 20: 1, for example, to produce an elastic material to be the elastic layer 2. Here, in order to improve the measurement accuracy of the viscosity of the fluid FL in the shear force sensor 4, for example, the weight ratio 20: lower Young's modulus than the elastic member in which the weight ratio of the main agent and the curing agent is 10: 1: It is preferable to use 1 elastic member.

Next, PDMS, which is an elastic material in which the main agent and curing agent are mixed, is stirred using a centrifugal defoaming device (Awatori Rentaro ARE-250, Sinky), defoamed with a desiccator, and then passed through the flow path. Pour into the channel region ER1 surrounded by the walls 13a, 13b, 13c of the forming unit 9, and the channel forming unit 9 is again placed in the desiccator to perform defoaming. After that, it is baked for 40 minutes in an oven maintained at about 70 [° C.], and the elastic layer 2 is formed by curing PDMS as an elastic member, thereby forming a shear force on the flow path forming region ER1 of the flow path forming portion 9. A sensor 4 can be formed.

At this time, if the flow path forming portion 9 is inclined, the flow path surface 2a of the elastic body layer 2 is not flat and it is difficult to ensure a uniform flow. It is preferable to bake while rotating 90 degrees every 3 minutes. Finally, the viscosity sensor 4a can be manufactured by fixing the flow path forming portion 9 to the base 10 in a state where the flow path surface 2a of the elastic body layer 2 is inclined at a predetermined inclination angle θ with respect to the horizontal line.

(1-4) Relationship between the change rate of resistance value of the shear force sensor and the shear stress Here, the change rate of resistance value ΔR / R measured by the sensor unit 3 of the shear force sensor 4 and the shear stress from the fluid FL The relationship with τ will be described. As shown in FIG. 10A, since the thickness of the movable part 21c and the hinge part 21b is very small, the thickness of the movable part 21c and the hinge part 21b is t [m], and the movable part 21c and the hinge part 21b are movable as shown in FIG. 10B. Total length L1 [m] of the part 21c and the hinge part 21b, plate length L2 [m] of the movable part 21c, full width b [m] of the movable part 21c, leg width w [m] of one hinge part 21b, movable part 21c When the force F [N] applied to the tip of the (beam), the Young's modulus E [Pa] of the movable part 21c (beam), and the piezoelectric coefficient πL of the cantilever part 21, the displacement ν at the tip of the cantilever part 21; The relationship of the resistance value change rate ΔR / R of the cantilever portion 21 is as follows. However, here, the deformation of the cantilever portion 21 can be approximated to the primary mode deformation of the cantilever beam, and other deformations can be ignored.

Further, considering the deformation of the cantilever part 21 as a static beam problem, the displacement ν at the tip of the cantilever part 21 generated by the force F is as follows.

However, I is a cross-sectional second moment of the movable part 21c (beam), and is obtained from the following equation.

When these equations 3 and 4 are used, the above equation 2 can be expressed by the relationship between the load F due to the shear stress τ of the fluid FL and the resistance value change rate ΔR / R, as in the following equation.

Further, when the surface area S [m ² ] of the sensor unit 3 is given, the above formula 5 is expressed as follows.

Thus, in the analyzer 1, the thickness t of the cantilever portion 21 [m], the total length L1 [m], Itacho L _{2 [m],} the full width b [m], Ashihaba w [m], a Young's modulus E [Pa ], Constants of piezoelectric coefficient πL and surface area S [m ² ] are stored in advance in the information processing apparatus, and the resistance value change rate ΔR / R measured in sensor unit 3 is processed via amplifier 6 as information processing. Send to device 7. As a result, the information processing apparatus 7 can calculate the shear stress τ based on each constant related to the cantilever part 21 and the resistance value change rate ΔR / R measured by the sensor part 3.

Then, in the information processing device 7, the surface flow velocity U of the fluid FL flowing on the channel surface 2a measured based on the imaging data from the imaging device 5, the fluid height h on the specified channel surface 2a, and the above-described Based on the shear stress τ obtained based on the resistance value change rate ΔR / R of the sensor unit 3, the viscosity coefficient (viscosity) μ of the fluid FL can be calculated from the above equation (1). By notifying the user with a notification means such as a display unit, the viscosity of the fluid FL can be analyzed.

(1-5) Operation and Effect In the configuration described above, in the shear force sensor 4, the elastic body layer 2 covers the sensor portion 3 in which the resistance value of the piezoresistive layer 24 changes due to the deformation of the hinge portion 21b. The planar flow channel surface 2a of the elastic layer 2 is provided so as to be inclined at a predetermined inclination angle θ.

Further, in this shear force sensor 4, a predetermined input voltage is applied in advance to the sensor unit 3, and in this state, the fluid FL flows from above along the flow path surface 2a of the elastic layer 2. Thus, in the shear force sensor 4, as shown in FIG. 11A, the cantilever portion 21 of the sensor portion 3 standing upright on the plate portion 12 before the fluid FL flows on the flow path surface 2a, and the fluid FL on the flow path surface 2a. By flowing, as shown in FIG. 11B, the elastic body layer 2 is deformed in the flow direction (X direction) of the fluid FL by the shear stress τ from the fluid FL, and the deformation of the elastic body layer 2 is transmitted to the cantilever portion 21. The upright cantilever portion 21 is tilted in the direction in which the fluid FL flows.

Here, the elastic body layer 2 is formed of an elastic member having a low Young's modulus by mixing the main agent of PDMS and a curing agent at a predetermined weight ratio, so that the shear stress τ from the fluid FL is temporarily Even if it is small, it can be reliably deformed in the direction of the applied shear stress τ, and the cantilever portion 21 can be tilted by the shear stress τ from the fluid FL.

Thereby, in the analyzer 1, the change in the resistance value can be measured by the deformation of the hinge part 21b of the sensor part 3. In the information processing apparatus 7, the shear stress τ from the fluid FL can be calculated using Equation 6 described above based on the resistance value change rate ΔR / R in the sensor unit 3.

Thus, in this analyzer 1, for example, when comparing a plurality of types of fluids FL, by flowing these fluids FL at the same flow rate, the user can refer to the difference in the shearing stress τ as the measurement result from the sensor unit 3 by referring to the user. The difference in the viscosity of the fluid FL can be compared, and as a result, the viscosity of the fluid FL can be analyzed.

Further, in this analyzer 1, the imaging device 5 can image the state of the fluid FL flowing through a predetermined measurement distance by simultaneously imaging the fluid FL flowing on the flow path surface 2a, and at the same time, the fluid It is possible to image how much fluid height h the FL is from the flow path surface 2a.

Thereby, in this analyzer 1, the moving distance and moving time of the fluid FL flowing on the flow path surface 2a are identified by analyzing the imaging data from the imaging device 5, and the fluid FL is determined from these moving distance and moving time. It is possible to calculate the surface velocity U when the gas flows on the flow path surface 2a.

Further, in the analyzer 1, the fluid FL flowing on the flow channel surface 2a is imaged by the imaging device 5 from the side surface, so that the image data obtained thereby is analyzed by the information processing device 7 and the flow channel surface 2a The fluid height h of the fluid FL flowing through the fluid can be specified.

Thereby, in the information processing device 7, the resistance value change rate ΔR / R of the fluid FL obtained from the shear force sensor 4, and the surface velocity U of the fluid FL specified based on the imaging data obtained from the imaging device 5 , Based on the fluid height h of the fluid FL, the viscosity coefficient (viscosity) μ of the fluid FL can be calculated based on the above-described Equation 1, and the user can be notified of the viscosity coefficient μ, and the fluid FL The degree of viscosity can be recognized.

Further, the shear force sensor 4 is covered with the elastic body layer 2, and the cantilever part 21 is in an unexposed state to the outside, thereby preventing damage caused by direct contact with a substance such as the fluid FL, It is possible to provide a shear force sensor 4 that is not easily broken.

According to the above configuration, when the fluid FL flows on the flow path surface 2a, the elastic body layer 2 is displaced by the shearing stress from the fluid FL, and the elastic body layer 2 is covered with the elastic body layer 2. Unlike the conventional rotary viscometer that measures the viscosity of the fluid based on the viscous resistance force, the change state of the movable part 21c is changed by providing the sensor part 3 having the movable part 21c that moves by being displaced. Therefore, it is possible to analyze the viscosity of the fluid FL, and thus to propose an analysis apparatus 1 that uses a novel analysis technique that has not existed before.

(1-6) Verification Test Next, the analyzer 1 including the viscosity sensor 4a manufactured according to the above-mentioned “(1-3) Manufacturing method of shear force sensor and viscosity sensor” was prepared, and various verification tests were performed. In practice, the viscosity sensor 4a uses the flow path forming section 9 having a sufficiently large flow path width of 30 [mm] with respect to the chip of the sensor section 3 which is about 2 [mm] square. Further, in the flow path forming part 9, the sensor part 3 is arranged at a position away from the lower end opening to about 40 [mm] which is about 5 times the height of the wall surface. Further, in the flow path forming unit 9, the length of the flow path region ER1 from the wall 13a to the lower end opening is set to 200 [mm] in order to measure a steady flow of the fluid FL. The flow path forming unit 9 was installed on the base 10 inclined at 45 degrees, and the flow path surface 2a was inclined at about 45 degrees.

The fluid FL used as a sample is a Newtonian fluid whose shear stress τ can be easily calculated, and a silicone oil (KF-96-100cs, KF-96H-30,000cs, Shin-Etsu Silicone) that can adjust the viscosity. Using. Here, in order to set the viscosity coefficient μ as a parameter, the viscosity coefficient μ was adjusted by mixing two types of silicone oils having different viscosity coefficients. KF-96-100cs has a kinematic viscosity of 100 [cs], a density of 0.965 × 10 ³ [kg / m ³ ], and a viscosity coefficient μ of 9.65 × 10 ⁻² [Pa · s]. KF-96H-30000cs has a kinematic viscosity of 30000 [cs], a density of 0.976 × 10 ³ [kg / m ³ ], and a viscosity coefficient μ of 29.28 [Pa · s].

Here, the fluid FL whose viscosity is analyzed by the analyzer 1 is adjusted for the viscosity coefficient μ by mixing the two types of silicone oils described above, with the food having a viscosity range of 0.1 to 1.0 [Pa · s] in mind. Four types of sample fluids having different sample viscosities having viscosity coefficients μ of 0.1 [Pa · s], 0.5 [Pa · s], 0.75 [Pa · s], and 1.0 [Pa · s] were prepared. The weight ratio (weight ratio KF-96-100cs: KF-96H-30000cs) of the two types of KF-96-100cs and KF- 96H-30000cs used for the preparation of the sample fluid is shown in Table 1 below.

In the analyzer 1, when the cantilever part 21 receives a load, the resistance value changes accordingly. However, since the resistance value output from the cantilever part 21 is very small, a Wheatstone bridge circuit is provided for measurement. An amplifier 6 was used.

Here, fluid supply means 17 with 12 [ml], an inner diameter of 15 [mm], a cross-sectional area of 177 [mm ² ] and filled with a sample fluid inside is prepared, and the syringe is fixed to a uniaxial movable stage (not shown) Then, by driving the uniaxial movable stage, the sample fluid in the syringe was discharged from the discharge port 15 (FIG. 1) of the flow path forming unit 9 to the flow path surface 2a. At this time, the discharge amount of the sample fluid per unit time onto the flow path surface 2a was kept constant by driving the uniaxial movable stage at a constant speed.

Next, in order to measure the surface flow velocity U of the sample fluid flowing on the flow channel surface 2a in the flow channel forming unit 9, the sample fluid flowing on the flow channel surface 2a was imaged using the camera as the imaging device 5. At this time, feature points such as bubbles formed on the surface of the sample fluid flowing on the channel surface 2a were used as an index of the surface flow velocity U of the sample fluid. A line was drawn every 5 [mm] across 20 [mm] across the sensor part 3 across the wall 13b of the flow path forming part 9. The time during which the characteristic point of the sample fluid passes is measured to identify the surface flow velocity U of the sample fluid. In addition, since the camera used here can divide 1 second into 30 frames, it can measure in units of 1/30 second.

At this time, the resistance value change rate ΔR / R from the sensor unit 3 is stored in the information processing device 7. Then, when all of the sample fluid contained in the syringe of the fluid supply means 17 has been completely flowed, the recording of the captured image by the camera is stopped, and the resistance value change rate ΔR / R from these sensor units 3 and the imaging from the camera Image recordings were recorded for each sample fluid. Here, since the sensor part 3 of the shear force sensor 4 is very fragile, the flow path surface 2a cannot be wiped directly. Therefore, the sample fluid that flows next on the channel surface 2a was flowed three times on the channel surface 2a, and the channel surface 2a was washed away so that the previous sample fluid did not remain on the channel surface 2a.

Here, as a measurement result of the resistance value change rate ΔR / R obtained from the sensor part 3 fixed to the plate part 12 of the flow path forming part 9, a result as shown in FIG. 12 was obtained. From this result, it can be seen that the sample fluid passed over the sensor unit 3 about 1.5 seconds after the sample fluid started to flow on the channel surface 2a. Further, as a captured image obtained by the camera, results as shown in FIGS. 13A to 13D were obtained. In FIGS. 13A to 13D, a dotted line DL1 indicates the outline of the sample flow path, and the inside of the dotted line DL1 indicates the sample fluid.

Here, in FIG. 12, A from 0 [s] to less than 1.5 [s] is a state before the sample fluid passes over the sensor unit 3 as shown in FIG. 13A. B in s] is when the sample fluid starts to pass over the sensor unit 3 as shown in FIG. 13B. In FIG. 12, C between 1.5 [s] and less than 3.25 [s] is shown in FIG. Is a state before the sample fluid stably passes over the sensor unit 3, and in FIG. 12, D from 3.25 [s] to 5 [s] is sample fluid as shown in FIG. 13D. This is when a constant amount is flowing stably and constantly on the sensor unit 3.

From the image shown in FIG. 13C, the sample fluid in C does not sufficiently spread in the channel width, and the sample fluid moves not only in the flow direction (x direction) but also in the channel width direction perpendicular to the sample fluid flow. It is thought that there is. Therefore, it is considered that the data at stage C is not due to shear stress in the flow direction of pure sample fluid. When the sample fluid is in a state as shown in FIG. 13D, the sample fluid is sufficiently spread over the channel width, and the flow is considered to be stable and in a steady state.

Here, if the average resistance value of the sensor unit 3 in the state of the sample fluid as shown in FIG. 13A is R _A and the average resistance value of the sensor unit 3 in the state of the sample fluid as shown in FIG. 13D is R _D When the sample fluid is in the state shown in FIG. 13D, it can be seen that a force corresponding to (R _D −R _A ) / R _A is acting on the sensor unit 3.

However, _RA took the average of 1 second immediately before from B shown in FIG. 12, and _RD took the average of 1 second immediately after from C shown in FIG. For each of the four types of sample fluids, the resistance value change rate ΔR / R was measured for each of the five stages of flow rates. As a result, the flow rate Q of each sample fluid and the shear force at that time were measured. With respect to the relationship with the resistance value change rate ΔR / R of the sensor 4, the result as shown in FIG. 14 was obtained. Such measurement was performed three times, and the dispersion is shown in FIG. 14 as error bars. From the results shown in FIG. 14, it was confirmed that the resistance value change rate ΔR / R in the sensor unit 3 tends to increase as the flow rate Q of the sample fluid increases and the viscosity increases.

Next, when the relationship between the surface flow velocity U of the sample fluid and the flow rate Q of the sample fluid was confirmed, a result as shown in FIG. 15 was obtained. The surface flow velocity U is obtained by analyzing a captured image from the camera, measuring a time ΔT required for the feature point such as a bubble of the fluid FL to move 20 [mm], and the surface flow velocity U = 20 / ΔT [ mm / s]. From the results shown in FIG. 15, it was confirmed that in the sample fluid, when the flow rate Q increases, the surface flow velocity U tends to increase accordingly.

Next, for each sample fluid, the relationship between the surface flow velocity U on the shear force sensor 4 and the shear stress τ of each sample fluid calculated based on the resistance value change rate ΔR / R from the shear force sensor 4 As a result of the verification, a result as shown in FIG. 16 was obtained. From the result shown in FIG. 16, the surface flow velocity U [m / s] of the sample fluid and the shear stress τ (resistance value conversion rate ΔR / R) from the sample fluid in the shear force sensor 4 are in a proportional relationship. Was confirmed.

Furthermore, the fluid height h of each sample fluid on the channel surface 2a was measured, and the viscosity coefficient μ was calculated based on the above equation 1 from the surface flow velocity U, shear stress τ, and fluid height h. Then, as a result of examining the relationship between the calculated viscosity coefficient μ and the sample viscosity μ ′ at the time of adjusting each sample fluid, a result as shown in FIG. 17 was obtained. From the results shown in FIG. 17, it can be confirmed that the calculated viscosity coefficient μ and the sample viscosity μ ′ are compatible, and based on the surface flow velocity U, the shear stress τ, and the fluid height h measured by the analyzer. It was confirmed that the optimum viscosity coefficient μ of the sample fluid could be calculated.

(2) Second Embodiment In FIG. 18, reference numeral 35 denotes a stick-type analyzer according to the second embodiment, and the viscosity of the fluid FL can be increased only by moving it in a predetermined direction in the fluid FL. It is configured so that it can be measured, and the size is reduced so that the user can easily carry it. In practice, the analyzer 35 includes a main body 36 made of a rod-like member formed in an elongated quadrangular prism shape, and a shear force sensor 37 is provided on one side surface 36a of the four sides of the main body 36, and A pressure sensor 38 is provided on one end surface 36b arranged at right angles to the one side surface 36a.

Here, the main body 36 is provided with both a shear force sensor 37 and a pressure sensor 38 in the vicinity of the lower end lower than the center position. Thus, the main body 36 can be immersed in the fluid FL at the same time by placing the fluid FL whose viscosity is to be analyzed into the container CA in which the fluid FL is stored up to the vicinity of the center position.

Such an analyzer 1 is moved in the front-rear direction (movement direction) x2 in which the one end surface 36b and the other end surface 36c are opposed to each other with the shear force sensor 37 and the pressure sensor 38 disposed in the fluid FL. Accordingly, as shown in FIG. 19 showing the cross-sectional configuration of the AA ′ portion of FIG. 18, the fluid FL hits the one end surface 36b of the main body 36, and the fluid FL flows along the one side surface 36a. Thereby, in the analyzer 1, the shear stress from the fluid FL flowing along the one side surface 36a can be measured by the shear force sensor 37, and the pressure from the fluid FL can be measured by the pressure sensor 38.

In practice, the main body 36 is also formed with a flat surface on which the one side surface 36a and the other side surface 36d are not uneven, and has a shear force sensor 37 in a recess 36e formed in a part of the one side surface 36a. The flow path surface 2a of the elastic body layer 2 of the force sensor 37 and the one side surface 36a are formed flush with each other. Here, for example, when moved in the front-rear direction x2 in the fluid FL, the fluid FL that flows along one side surface and the other side surface of the main body also flows to the flow path surface 2a of the shear force sensor 37 (in FIG. 19, (Indicated by arrow FL1).

Here, the shear stress from the fluid FL applied to the shear force sensor 37 can be considered as follows. However, here, it is assumed that the fluid FL has a sufficiently high viscosity like a food and the moving speed of the main body 36 in the front-rear direction x2 is slow (the Reynolds number of the generated flow is sufficiently small, for example, 1 or less). In this case, when the coordinates are set with the axis parallel to the side surface 36a as the x axis and the axis perpendicular to the side surface 36a as the y axis, the shear force sensor 37 is near the flow path surface 2a. In the (boundary layer), a velocity gradient as shown in FIG. 20A is generated. The frictional force applied to the flow path surface 2a of the shear force sensor 37 by the flow of the fluid FL becomes a shear stress expressed by the following equation.

Here, τ (x) is a shear stress applied to the flow path surface 2a of the shear force sensor 37, u is a flow velocity in the x-axis direction generated on the flow path surface 2a, and μ is a viscosity (viscosity coefficient) of the fluid FL. Here, according to the Blaus equation concerning the flow velocity of the fluid FL on the flow path surface 2a, the flow velocity in the x-axis direction on the flat plate is expressed as follows.

However, U is the surface flow velocity in the region where the flow velocity outside the boundary layer is constant, and η is similar regardless of the velocity distribution of the fluid FL flow on the flow path surface 2a regardless of the position on the x-axis. It is a similar variable that represents taking a shape, and δ is the thickness of the boundary layer (the distance from the flow path surface 2a to the position where the velocity distribution becomes constant). According to the Navier-Stokes equation, the thickness of the boundary layer generated on the flow path surface 2a is a time-varying function as shown below, and is determined by the surface velocity of the steady flow and the position of the shear force sensor 37. be able to. Where ρ is the density of the liquid.

From the equations 7 to 9, the shear stress τ (x) applied from the fluid FL to the flow path surface 2a of the shear force sensor 37 can be expressed as follows. However, k is a proportionality constant.

On the other hand, the force F in the pressure direction applied to the pressure sensor 38 provided on the one end surface 36b of the main body 36 can be expressed as follows. However, Q is the flow rate of the fluid FL applied to the pressure sensor 38 per unit time, and A is the surface area of the pressure sensor 38 (FIG. 20B).

From the above formulas (11) and (12), the fluid viscosity μ can be expressed as follows.

However, P is the pressure of the fluid FL applied to the front surface of the pressure sensor 38, and K is a proportional constant. As shown in Equation 14, the proportional constant K includes two variables, that is, a sensor portion (described later) position x of the shear force sensor 37 and a density ρ of the fluid FL. Can be determined uniquely. Density ρ is limited to foods, etc., and most viscometric analytes have a density of about 1.0. Can do.

Thus, in the analyzer 1 according to the second embodiment, as shown by the above-described result of Equation 13, the pressure sensor 38 is provided on the one end surface 36b of the main body 36, and the shear force sensor 37 is provided on one side surface 36a of the main body 36. By providing the above, the viscosity (viscosity coefficient) μ of the fluid FL can be measured.

As shown in FIG. 4, the shear force sensor 37 has the same configuration as the shear force sensor 4 of the first embodiment described above, and the sensor unit 3 is disposed on the plate unit 12. The elastic body layer 2 is provided so as to cover the sensor unit 3. In the sensor unit 3, a cantilever portion 21 is disposed so as to stand upright with respect to one side surface 36a of the main body 36, and a surface portion of the movable portion 21c in the cantilever portion 21 is disposed perpendicular to the front-rear direction x2. (FIG. 4).

The elastic body layer 2 covering the sensor unit 3 is made of an elastic member similar to that of the first embodiment described above, the flow path surface 2a exposed to the outside is formed in a flat shape, and the flow path plane 2a is the main body 35. Is formed flush with one side surface 36a. When the main body 35 is moved in the front-rear direction x2, the elastic body layer 2 flows the fluid FL along the flow path surface 2a, and when shear stress from the fluid FL is applied to the flow path surface 2a, The sensor unit 3 can be deformed and tilted in the front-rear direction x2. Thus, in the sensor unit 3, the tilting degree of the cantilever unit 21 changes in accordance with the magnitude of the shear stress from the fluid FL, and the resistance value of the piezoresistive layer 24 can also change in accordance with this.

Here, the main body 35 incorporates information processing means (not shown) composed of a CPU or the like, and by this information processing means, based on the resistance value change rate ΔR / R from the shear force sensor 37, The shear stress τ from the fluid FL can be calculated from Equation 6 described above. Further, the information processing means receives the pressure P from the fluid FL applied to the pressure sensor 38 from the pressure sensor 38, and calculates the viscosity coefficient μ from the measured shear stress τ and the pressure P based on the above formula 13. It is made to be able to do.

In the above configuration, in the analyzer 35, the shear force sensor 37 and the pressure sensor 38 are immersed in the fluid FL, and the main body 36 is moved in the front-rear direction x2 in this state, so that the sensor unit 3 of the shear force sensor 37 Is deformed, whereby the resistance value change rate ΔR / R can be measured.

Further, in the analyzer 1, the information processing means built in the main body 36 calculates the shear stress τ from the fluid FL using Equation 6 described above based on the resistance value change rate ΔR / R in the sensor unit 3. Thus, based on the resistance value change rate ΔR / R from the shear force sensor 37, the user can analyze the viscosity of the fluid FL.

In addition, the analyzer 1 is provided with the pressure sensor 38, so that when the main body 36 is moved in the front-rear direction x2 in the fluid FL, the pressure sensor 38 measures the pressure P received from the fluid FL. Can do. Thereby, in the analyzer 1, the viscosity coefficient of the fluid FL (from the shear stress τ of the fluid FL and the pressure P received from the fluid FL is calculated by the information processing means provided in the main body 36 based on the above-described Expression 13. (Viscosity) μ can be calculated, and thus the user can be notified by displaying the viscosity coefficient μ on the voice notification or the display unit, and can recognize the viscosity of the fluid FL.

Incidentally, the pressure sensor 38 described above can be applied to various structures, for example, a third cantilever 51 having a cantilever 51 described in “(3) Third Embodiment” described later. A pressure sensor that includes a sensor unit 50c (described with reference to FIG. 24) and is covered with an elastic layer may be applied.

According to the above configuration, when the fluid FL flows on the flow path surface 2a, the elastic body layer 2 is displaced by the shearing stress from the fluid FL, and the elastic body layer 2 is covered with the elastic body layer 2. Unlike the conventional rotary viscometer that measures the viscosity of the fluid based on the viscous resistance force, the change state of the movable part 21c is changed by providing the sensor part 3 having the movable part 21c that moves by being displaced. Based on this, it is possible to analyze the viscosity of the fluid FL, and thus it is possible to propose an analysis apparatus 35 that uses a novel analysis technique that has not existed before.

Further, in this analyzer 35, the measurement result obtained from the sensor unit 3 is provided by providing the sensor unit 3 covered with the elastic body layer 2a and the pressure sensor 38 for measuring the pressure received from the fluid FL. From the pressure measurement result obtained from the pressure sensor 38, the viscosity coefficient μ of the fluid FL can be calculated, and thus the viscosity of the fluid FL is analyzed based on the viscosity coefficient μ. Can do.

(3) Third Embodiment In FIG. 21, reference numeral 41 denotes a portable analyzer according to the third embodiment. This analyzer 41 is different from the analyzer 35 according to the second embodiment in the fluid FL. The direction in which the fluid is stirred is not particularly determined, and the viscosity of the fluid FL can be measured simply by moving the main body 42 in the fluid FL in an arbitrary direction.

In practice, the analyzer 41 includes a main body 42 formed of a rod-shaped member formed in a columnar shape, and a plurality of shear force sensors 44a, 44b,... Are provided on a peripheral surface 42a near the lower end of the main body 42. ing. In the case of this embodiment, as shown in FIG. 22, the main body 42 is provided with four shear force sensors 44a, 44b, 44c, 44d at equal intervals, and the main body 42 is placed in the fluid FL. By moving in a predetermined direction, the fluid FL flows along the peripheral surface 42a of the main body 42, and the fluid FL also flows on the flow path surface 45a of the shear force sensors 44a, 44b, 44c, 44d. . Here, since the plurality of shear force sensors 44a, 44b, 44c, and 44d all have the same configuration, the configuration will be described by focusing on one of the shear force sensors 44a.

As shown in FIG. 23, the shear force sensor 44a includes a sensor group 46 and a rectangular parallelepiped elastic body layer 45 that covers the sensor group 46, and includes 3 in the x-axis direction, the y-axis direction, and the z-axis direction orthogonal to each other. The sensor group 46 can measure the shear stress from the fluid FL applied in the axial direction. The sensor group 46 includes a first sensor unit 50a that senses an external force acting in the x-axis direction, a second sensor unit 50b that senses an external force acting in the y-axis direction orthogonal to the x-axis direction, and the x-axis direction and the y-axis direction. A third sensor unit 50c that senses an external force acting in the z-axis direction orthogonal to the base unit 49 is provided on the base unit 49, and the first sensor unit 50a, the second sensor unit 50b, and the third sensor unit 50c are predetermined to each other. It has the structure arrange | positioned on the base part 49 at intervals.

As shown in FIG. 24, the first sensor unit 50a and the second sensor unit 50b have the same configuration as the sensor unit 3 according to the first embodiment described above and are fixed to the base unit 49. 21a, a pair of hinge parts 21b connected to the base part 21a, and a cantilever part 21 composed of a movable part 21c as a free end, and the movable part 21c is connected to the base part 49 by the hinge part 21b having a two-leg structure. And can be held upright. In the case of this embodiment, in the first sensor unit 50a, the surface part of the movable part 21c is arranged perpendicular to the x-axis direction, and the movable part 21c becomes x by shearing stress from the fluid FL applied in the x-axis direction. It can be tilted in the axial direction.

In the second sensor unit 50b, the surface part of the movable part 21c is arranged perpendicular to the y-axis direction, and the movable part 21c tilts in the y-axis direction due to the shear stress from the fluid FL applied in the y-axis direction. Has been made to get. On the other hand, the third sensor unit 50c is different from the first sensor unit 50a and the second sensor unit 50b in that the planar movable unit 51c is provided substantially flush with the base unit 49. A planar cantilever 51 is provided.

The cantilever part 51 is provided with thin plate-like hinge parts 51b at both opposing ends of the movable part 51c, and deformed when shear stress from the fluid FL is applied to the flow path surface 2a from the z-axis direction. The force from the elastic layer 45 is received by the movable portion 51c, and the movable portion 51c can be displaced in the z-axis direction. Thus, in the third sensor unit 50c, the degree of displacement of the cantilever 51 changes according to the magnitude of the shear stress applied in the z-axis direction from the fluid FL, and the resistance value of the piezoresistive layer can also change accordingly. Has been made.

Thus, when the external force is applied from the elastic body layer 45, the first sensor unit 50a, the second sensor unit 50b, and the third sensor unit 50c respectively apply the external force applied from the three axial directions to the corresponding movable units 21c and 51c. Therefore, only the deformation of the hinge portions 21b and 51b can be measured as a resistance value by the piezoresistive layer of the hinge portions 21b and 51b by the displacement of the hinge portions 21b and 51b. That is, the first sensor unit 50a, the second sensor unit 50b, and the third sensor unit 50c give a potential difference between the electrodes at the end points of the hinge units 21b and 51b, and the resistance value change ΔR / R of the hinge units 21b and 51b. The force acting on the cantilever parts 21 and 51 (shear stress τ from the fluid FL) can be measured from the measurement result.

As shown in FIG. 22, in the analyzer 1, when the main body 42 is immersed in the fluid FL and moved in an arbitrary direction, for example, it faces the flow of the fluid FL (the fluid FL Based on the direction and magnitude of the resultant force calculated from the outputs from the two shear force sensors 44b and 44c (reacting to the flow), the pressure P on the channel surface 45a of the main body 42 and the channel surface 45a It is configured to measure the shear coefficient τ from the fluid FL, derive the same relationship as the above-described Expression 13 based on the magnitude, and measure the viscosity coefficient μ.

In practice, when the main body 42 is moved in the fluid FL and the fluid FL flows in the y-axis direction as shown in FIG. 25 where the same reference numerals are given to the same parts as in FIG. 4, for example, the shear force sensor 44b The fluid FL also flows on the flow path surface 45a of the elastic body layer 45, and the elastic body layer 45 of the shear force sensor 44b can be moved and displaced in the flow direction y1 of the fluid FL due to the shear stress received from the fluid FL. As a result, in the sensor group 46, the cantilever portions 21 of the first sensor portion 50a and the second sensor portion 50b in which the movable portion 21c stands upright with respect to the flow path surface 2a are tilted as the elastic body layer 45 is displaced, Thus, the resistance values of the first sensor unit 50a and the second sensor unit 50b can change. Incidentally, the shearing force sensor 44b shown in FIG. 25 can be manufactured according to the shearing force sensor 4 and the manufacturing method described in “(1-3) Manufacturing method of shearing force sensor and viscosity sensor” described above.

On the other hand, as shown in FIG. 26, when the main body 42 is moved in the fluid FL and the fluid FL flows in the z-axis direction, for example, in the shear force sensor 44b, the fluid FL is applied to the flow path surface 45a of the elastic body layer 45. The elastic body layer 45 of the shear force sensor 44b is pushed inward from the z-axis direction by the pressure P received from the fluid FL, and the elastic body layer 45 can be displaced in the direction z1 in which the fluid FL flows. As a result, the sensor group 46 has the cantilever 51 of the third sensor part 50c having the movable part 51c parallel to the flow path surface 2a receiving the external force from the elastic layer 45, so that the movable part 51c is recessed. The resistance value at the bent hinge portion 51b can change.

Here, in the analyzer 41, the shear force sensors 44a, 44b, 44c, and 44d are arranged at four locations in consideration of the flow of the fluid FL when the main body 42 is moved in the fluid FL (FIG. 22). The direction and magnitude of the resultant force of the fluid FL that is directly opposed to the flow of the fluid FL (that is, that reacts to the flow of the fluid), for example, based on the outputs obtained from the two shear force sensors 44b and 44c, respectively. And the pressure P from the fluid FL and the shear stress τ from the fluid FL can be measured from the direction and magnitude of these resultant forces.

In the analyzer 41, for example, the fluid FL is calculated from the above-described relational expression 13 based on the pressure P from the fluid FL obtained from the two shear force sensors 44b and 44c and the shear stress τ from the fluid FL. The viscosity coefficient μ can be measured.

In the above-described configuration, the analyzer 41 is provided with a plurality of shear force sensors 44a, 44b, 44c, and 44d on the peripheral surface 42a of the main body 42, and a sensor group 46 capable of measuring shear stress in three axial directions is provided for each shear force. Each of the sensors 44a, 44b, 44c, and 44d is provided. In such an analyzer 41, these shear force sensors 44a, 44b, 44c, and 44d are immersed in the fluid FL, and the longitudinal direction of the main body 42 is maintained vertical by the user, for example, as shown in FIG. Even if the main body 42 is moved horizontally, the surface portion of the movable portion 21c is perpendicular to the x-axis direction among the first sensor portion 50a, the second sensor portion 50b, and the third sensor portion 50c shown in FIG. The shear stress τ from the fluid FL can be measured by the arranged first sensor unit 50a. At the same time, in the analyzer 41, the pressure P from the fluid FL can be measured by the third sensor unit 50c in which the surface part of the movable part 51c is arranged perpendicular to the z-axis direction. As a result, the analyzer 41 can calculate the viscosity coefficient μ from the above equation 13 based on the shear stress τ and the pressure P of the fluid FL obtained from the sensor group 46.

Further, in the analyzer 41, these shear force sensors 44a, 44b, 44c, and 44d are immersed in the fluid FL, and, for example, as shown in FIG. Even if the main body 42 is moved along this angular direction in the state where it is held, among the first sensor unit 50a, the second sensor unit 50b and the third sensor unit 50c shown in FIG. A shear stress τ from the fluid FL is generated by the first sensor unit 50a disposed perpendicular to the x-axis direction and the second sensor unit 50b in which the surface portion of the movable unit 21c is disposed perpendicular to the y-axis direction. Can be measured. At the same time, in the analyzer 41, the pressure P from the fluid FL can be measured by the third sensor unit 50c in which the surface part of the movable part 51 is arranged perpendicular to the z-axis direction. As a result, the analyzer 41 can calculate the viscosity coefficient μ from the above equation 13 based on the shear stress τ and the pressure P of the fluid FL obtained from the sensor group 46.

Thus, in the analyzer 41, the direction in which the fluid FL is agitated is not particularly determined, and the sensor group 46 simply moves the main body 42 in the fluid FL, and the sensor group 46 causes the shear stress τ and pressure of the fluid FL. P can be measured, and the viscosity coefficient μ of the fluid FL can be calculated from these measurement results, thus notifying the user of the viscosity coefficient μ and recognizing how much viscosity the fluid FL has. it can.

(4) Fourth Embodiment In FIG. 28, 55 denotes a portable analyzer according to the fourth embodiment, and this analyzer 55 is different from the analyzer 35 according to the second embodiment in the main body 52. Is different in that it is formed in a Y shape and in that two shear force sensors 37 are provided.

In this case, the main body 52 has a predetermined thickness and bifurcates into a first leg portion 54a and a second leg portion 54b from the lower end portion of the rod-shaped gripping portion 53, and the first leg portion 54a and the first leg portion 54a. The two leg portions 54b are formed so as to become wider as the distance from the lower end portion increases. In addition, in the first leg 54a, two shear force sensors 37 are arranged in the vertical direction on the inner surface 52b facing the second leg 54b, and the front surface 52a orthogonal to the inner surface 52b. A pressure sensor 38 is provided.

Such an analyzer 55 can be obtained by immersing the shear force sensor 37 and the pressure sensor 38 provided in the main body 52 in the fluid FL and moving the main body 52 in the front-rear direction (movement direction) x2 in this state. It is configured so that the viscosity coefficient μ of FL can be measured. Here, the shear force sensor 37 has the same configuration as that of the first and second embodiments described above, and the sensor unit 3 is disposed on the plate unit 12 (FIG. 4). The elastic body layer 2 is provided so as to cover it. In the sensor unit 3, the cantilever part 21 is arranged so as to stand upright with respect to the inner surface 52b of the first leg part 54a, and the surface part of the movable part 21c in the cantilever part 21 is arranged perpendicular to the front-rear direction x2. Has been.

The elastic body layer 2 covering the sensor unit 3 has a channel surface 2a exposed to the outside formed in a flat shape, and the channel surface 2a is formed flush with the inner surface 52b of the first leg 54b. When the main body 52 is moved in the front-rear direction x2, the elastic body layer 2 flows the fluid FL along the flow path surface 2a, and is deformed by the shear stress from the fluid FL to transmit an external force to the sensor unit 3. The sensor unit 3 can be tilted in the front-rear direction x2. Thus, in the sensor unit 3, the tilting degree of the cantilever part 21 changes according to the magnitude of the shear stress from the fluid FL, and the resistance value of the piezoresistive layer can also change according to this.

The main body 52 is provided with information processing means (not shown) including a CPU or the like, and the information processing means described above based on the resistance value change rate ΔR / R from the sensor unit 3. From Equation 6, the shear stress τ from the fluid FL can be calculated. Further, the information processing means receives the pressure P from the fluid FL applied to the pressure sensor 38 from the pressure sensor 38, and can calculate the viscosity coefficient μ from the measured shear stress τ and the pressure P based on the above equation 13.

In the above-described embodiment, the case where the analyzer 55 including the Y-shaped main body 52 in which the distance between the first leg portion 54a and the second leg portion 54b gradually increases is described. The present invention is not limited to this, and as shown in FIG. 29, an analyzer 61 including a main body 62 in which the distance between the first leg 63a and the second leg 63b is kept constant may be applied. .

In practice, the main body 62 has one end portion of the first leg portion 63a and one end portion of the second leg portion 63b connected by a rod-like connecting portion 64, and a rod-like shape extending outwardly in the center of the connecting portion 64. The gripping portion 65 has a configuration in which it stands upright. In the first leg 63a, for example, three shear force sensors 37 are arranged in the longitudinal direction on the inner surface 62b facing the second leg 63b, and the pressure sensor 38 is disposed on the front surface 62a orthogonal to the inner surface 62b. Is provided.

Even in the analyzer 62 having such a main body 62, the other components have the same configuration as that of the analyzer 55 according to the fourth embodiment described above. Based on the resistance value change rate ΔR / R from the sensor unit 3 in the sensor 37, the shear stress τ from the fluid FL is calculated from the above equation 6, and the pressure P from the fluid FL applied to the pressure sensor 38 is measured. From the shear stress τ, the viscosity coefficient μ can be calculated on the basis of Equation 13 described above.

(5) Fifth Embodiment In FIG. 30, reference numeral 70 denotes a rotary analyzer according to the fifth embodiment, and a shear force sensor 37 having the same configuration as that of the second embodiment is a substrate. 72 is provided. The analysis device 70 has a configuration in which a rotating substrate 73 is installed so as to face an upright sensor portion (not shown) covered with the elastic layer 2 in the shear force sensor 37. The rotating substrate 73 is formed in a disc shape, and the planar opposed surface portion can be arranged substantially parallel to the planar flow path surface 2a of the elastic body layer 2, and the flow path surface of the elastic body layer 2 It may be arranged so that a predetermined gap can be formed between 2a.

In addition, the rotating substrate 73 is maintained in a state where the facing surface portion is substantially parallel to the flow channel surface 2a of the shear force sensor 37, and the rotation substrate z is centered on the rotation axis z3, for example, either clockwise or counterclockwise. It can rotate in one direction at a constant shear rate. As another embodiment, at this time, with the surface facing the flow path surface 2a of the shear force sensor 37 being substantially parallel, the counter surface portion is kept substantially parallel at a constant shear rate clockwise around the rotation axis z3. After the rotation, it may be reversed counterclockwise and rotated at a constant shear speed, and these clockwise and counterclockwise rotations may be repeated at a constant cycle.

Further, the rotating substrate 73 can move along the direction of the rotation axis z3 and has a configuration capable of adjusting a gap between the shearing force sensor 37 and the flow path surface 2a. Thus, in the analyzer 70, after the gap between the flow channel surface 2a of the shear force sensor 37 and the facing surface portion of the rotating substrate 73 is spaced, the fluid FL having a predetermined viscosity is disposed between the flow channel surface 2a and the facing surface portion. Then, the fluid FL is sandwiched between the flow path surface 2a of the shear force sensor 37 and the facing surface portion by moving the rotating substrate 73 closer to the fluid FL side.

Here, in the shear force sensor 37, a sensor unit 3 (not shown in FIG. 30) having the same configuration as that of the first embodiment described above is fixed to the plate unit 12 and covers the sensor unit 3. The elastic body layer 2 is formed, and the cantilever portion 21 of the sensor section 3 is tilted and the resistance value of the sensor section 3 is changed according to the deformation of the elastic body layer 2 as in the first embodiment. Has been made to get.

In practice, the shear force sensor 37 is disposed on the substrate 72 so as to avoid the rotation axis z3 of the rotating substrate 73, and the sensor unit 3 is provided at a position facing the facing surface portion of the rotating substrate 73. The surface part of the movable part of the sensor part 3 is arranged perpendicular to the rotational direction x4 of the rotary substrate 73.

As a result, the shear force sensor 37 rotates the rotating substrate 73 at a predetermined shear speed while the fluid FL is closely disposed between the rotating substrate 73 and the elastic body layer 2, thereby rotating the fluid FL in the rotation direction. It can be moved to x4. At this time, the sensor unit 3 receives the shear stress from the fluid FL moving in the rotation direction x4 from the elastic body layer 2, and the cantilever unit 21 tilts toward the rotation direction x4, so that the resistance value can change.

In practice, as the fluid FL disposed between the rotating substrate 73 and the elastic layer 2, the fluid FL having a low viscosity and the fluid FL having a high viscosity are more viscous than the fluid FL having a low viscosity. Since the shear stress is high and the resistance value change rate ΔR / R generated in the sensor unit 3 is accordingly increased, the user can determine the viscosity of the fluid FL based on the resistance value change rate ΔR / R. Can be analyzed.
(6) Sixth embodiment

In FIG. 31, reference numeral 80 denotes an analyzer according to the sixth embodiment. This analyzer 80 has a tubular main body 81 formed in a cylindrical shape, and has a hollow region ER2 formed in the main body 81. The fluids FL3 and FL4 are configured to pass through. This analyzer 80 does not take out the fluids FL3 and FL4 flowing in the main body 81 from the main body 81, and the viscosity of the fluids FL3 and FL4 flowing in the main body 81 is high. It is possible to obtain a measurement result capable of guessing in what state the current flows.

In practice, the main body 81 has a configuration in which a semi-cylindrical half-body wall portion 82 and a semi-cylindrical shear force sensor 83 are fixed in a state where the edges are aligned and formed into a cylindrical shape. ing. In practice, the shear force sensor 83 is provided with a semi-cylindrical substrate 85, and a plurality of sensor portions 86a, 86b, 86c, 86d, 86e, 86f, and 86g are provided on the inner peripheral surface of the substrate 85. An elastic body layer 87 is formed so as to cover all of the plurality of sensor portions 86a, 86b, 86c, 86d, 86e, 86f, and 86g.

The shearing force sensor 83 is formed such that the thickness of the substrate 85 is thinner than the thickness of the half wall portion 82, and an elastic body that covers the sensor portions 86a, 86b, 86c, 86d, 86e, 86f, and 86g on the substrate 85. The flow path surface 87a of the layer 87 is formed flush with the inner peripheral surface of the half wall portion 82, and the hollow region ER2 has no unevenness on the boundary with the half wall portion 82, and the hollow region ER2 in the main body 81 is Fluids FL3 and FL4 flow smoothly.

Actually, in the shear force sensor 83, for example, a plurality of sensor portions 86a, 86b, 86c, 86d, 86e, 86f, 86g are provided at predetermined intervals along the circumferential direction from the upper end portion to the lower end portion. In the case of this embodiment, the shear force sensor 83 is provided with sensor portions 86a, 86d, 86g at the upper end portion, the intermediate portion, and the lower end portion, respectively, and two sensor portions 86b, 86c are provided between the upper end portion and the intermediate portion. And two sensor portions 86e, 86f are also provided between the intermediate portion and the lower end portion, and a total of six sensor portions 86a, 86b, 86c, 86d, 86e, 86f, 86g are provided along the circumferential direction. Has been placed.

Here, each sensor part 86a, 86b, 86c, 86d, 86e, 86f, 86g has the same configuration as the sensor part 3 according to the first embodiment described above, and the movable part 21c of the cantilever part 21 has the same configuration. The surface portion (FIG. 4) is disposed perpendicular to the direction in which the fluids FL3 and FL4 flow, and the movable portion 21c is formed upright with respect to the surface of the substrate 85. The elastic body layer 87 covers the plurality of sensor parts 86a, 86b, 86c, 86d, 86e, 86f, and 86g, so that the sensor parts 86a, 86b, 86c, 86d, 86e, 86f, and 86g are included in the main body 81. Is not exposed. In addition, the elastic body layer 87 has a flow path surface 87a exposed in the main body 81 formed in a smooth semicircular shape with no irregularities, and the fluids FL3 and FL4 flowing in the main body 81 are formed on the flow path surface 87a. It is formed to flow smoothly along.

In the above-described configuration, in such an analyzer 80, when the fluids FL3 and FL4 flow into the main body 81, the elastic body layer 87 portion in contact with the fluids FL3 and FL4 is caused by shear stress from the fluids FL3 and FL4. The resistance value can be changed by the displacement in the flow direction and the deformation of the sensor portions 86a, 86b, 86c, 86d, 86e, 86f, 86g corresponding thereto. Further, in the analyzer 80, by measuring output voltages from the sensor units 86a, 86b, 86c, 86d, 86e, 86f, 86g by an information processing means (not shown), the sensor units 86a, 86b, 86c, 86d, 86e, Changes in resistance at 86f and 86g can be measured.

Thus, the analyzer 80 analyzes the viscosity of the fluids FL3 and FL4 flowing in the main body 81 based on the resistance value change rate ΔR / R in the sensor units 86a, 86b, 86c, 86d, 86e, 86f, and 86g. be able to. Further, in this analyzer 80, the elastic layer 87 in the region not in contact with the fluids FL3 and FL4 is not displaced, and only the elastic layer 87 in contact with the fluids FL3 and FL4 is removed from the fluids FL3 and FL4. Only the resistance values of the sensor portions 86d, 86e, 86f, 86g are changed to the height at which the fluids FL3, FL4 flow by being displaced by the shear stress. Thus, in the analyzer 80, the fluid FL3, FL4 flows in the main body 81 up to what height based on the resistance value change rate ΔR / R of the sensor units 86a, 86b, 86c, 86d, 86e, 86f, 86g. You can easily guess.

Further, in this analyzer 80, for example, when a mixed fluid of water and oil flows in the main body 81, water (in this case, the fluid FL4) is placed in the lower portion of the main body 81 as shown in FIG. The oil with low specific gravity (in this case, fluid FL3) flows in the upper part. At this time, in the analyzer 80, due to the difference in viscosity between water and oil, the degree of displacement between the elastic layer 87 part in contact with water and the elastic layer 87 part in contact with oil is different. The resistance value change rate ΔR / R from the sensor units 86e, 86f, 86g in the region where water flows, and the resistance value change rate ΔR / R from the sensor unit 86d in the region where oil flows Will be different.

In this case, in the analyzer 80, the flow rate when water flows into the main body 81, and the resistance value change rate ΔR / R from the sensor units 86a, 86b, 86c, 86d, 86e, 86f, 86g at that time The flow rate when oil flows into the main body and the rate of change in resistance value from the sensor parts 86a, 86b, 86c, 86d, 86e, 86f, 86g at that time ΔR / R Is previously measured, and this relationship data is stored in the information processing means.

Thus, in the analyzer 80, when water and oil are flowed into the main body 81 and analyzed, the resistance value change rate ΔR / measured by the sensor units 86a, 86b, 86c, 86d, 86e, 86f, 86 is analyzed. By comparing R with this relational data, the flow rate of water flowing in the main body 81 and the flow rate of oil can be estimated.

(7) Seventh Embodiment In FIG. 32, in which parts corresponding to those in FIG. 18 are assigned the same reference numerals, reference numeral 90 denotes a stick-type analyzer according to the seventh embodiment. Similar to the embodiment, the fluid viscosity μ can be measured only by reciprocating in a predetermined direction in the fluid. In practice, the analyzer 90 includes a main body 91 made of a rod-like member formed in an elongated quadrangular prism shape so that the user can hold the main body 91 with the thumb, forefinger and middle finger, and is easy for the user to carry. The main body 91 is downsized.

The main body 91 has a configuration in which a shear force sensor 92 is provided on one side surface 91a of the four sides, and a pressure sensor 93 is provided on one end surface 91b arranged at right angles to the one side surface 91a. Here, the main body 91 is provided with both a shear force sensor 92 and a pressure sensor 93 in the vicinity of the lower end, so that the shear force sensor 92 and the pressure sensor 93 can be immersed in the fluid stored in the container at the same time. Yes.

Similar to the second embodiment, such an analyzer 90 has a shear force sensor 92 and a pressure sensor 93 arranged in the fluid in a direction perpendicular to the one end surface 91b (the longitudinal direction of the main body 91 ( Z-axis direction) and the front-rear direction x2 that is perpendicular to the perpendicular direction (y-axis direction) from one side 91a (y-axis direction), the fluid directly hits one end surface 91b of the main body 91, A fluid flows along one side 91a. As a result, when the fluid flows along the one side surface 91a, the analyzer 90 can calculate the shear stress τ that the one side surface 91a receives from the fluid based on the measurement result detected by the shear force sensor 92. Yes. At the same time, the analyzer 90 can calculate the pressure P received by the one end face 91b from the fluid based on the measurement result detected by the pressure sensor 93.

Actually, the main body 91 is formed with quadrilateral recesses 91e and 91f in a part near the lower end portion of the one side surface 91a and the one end surface 91b formed in a flat shape, and the inside of the one recess 91e The shear force sensor 92 is disposed in the second recess 91f, and the pressure sensor 93 is disposed in the other recess 91f. In the main body 91, the flow path surface of the elastic layer 98a provided in the shear force sensor 92 is exposed to the outside, and the flow path surface is flush with the one side surface 91a. In the main body 91, the surface of the elastic layer 98b provided in the pressure sensor 93 is also exposed to the outside, and the surface of the flow path is also formed flush with the one end face 91b.

Here, the analyzer 90 according to the seventh embodiment differs from the second embodiment described above in the configuration of the shear force sensor 92 and the configuration of the pressure sensor 93, and is shown in FIG. A cantilever sensor unit 95a having the same configuration as that of the first sensor unit 50a of the cantilever according to the third embodiment is provided in the shear force sensor 92, and the third embodiment shown in FIG. This is characterized in that a pressure sensor 93 is provided with a doubly supported beam sensor part 95b having the same configuration as the third sensor part 50c of the doubly supported beam.

In practice, as shown in FIG. 33, this shear force sensor 92 has a cantilever sensor portion 95a installed at the bottom of the recess 91e, and is elastic so as to cover the entire cantilever sensor portion 95a. The layer 98a is provided. When the main body 91 is moved in the fluid along the x-axis direction in the fluid, the shear force sensor 92 deforms the elastic body layer 98a by the external force received from the fluid, and cantilever the external force acting in the x-axis direction accordingly. The beam sensor unit 95a can sense it.

Incidentally, as described above, the cantilever sensor unit 95a and the cantilever sensor unit 95b have the same configuration as the first sensor unit 50a and the third sensor unit 50c shown in FIG. Since the description of such a configuration is redundant, the description is omitted here. In this case, in the cantilever sensor unit 95a, the surface portion of the movable portion 21c is arranged perpendicular to the x-axis direction, and the movable portion 21c tilts in the x-axis direction due to the shear stress τ from the fluid applied in the x-axis direction. It is made to be able to do.

In the cantilever sensor portion 95a, the degree of displacement of the cantilever portion 21 changes according to the magnitude of the shear stress τ applied from the fluid, and the resistance value of the piezoresistive layer can also change accordingly. . In this case, the cantilever sensor part 95a applies a potential difference between the electrodes at the end of the hinge part 21b, measures the resistance value change ΔR / R of the hinge part 21b, and determines the force acting on the cantilever part 21 from the measurement result. (Shear stress τ from fluid) can be measured.

On the other hand, the pressure sensor 93 has a structure in which a double-supported beam sensor portion 95b is disposed at the bottom of the recessed portion 91f and an elastic body layer 98a is provided so as to cover the entire dual-supported beam sensor portion 95b. In this case, the recess 91f is formed with a gap 91h at the bottom, and the movable part 51c and the hinge part 51b of the doubly supported beam sensor part 95b are positioned on the gap 91h. A base portion 51a of 95b is fixed to the bottom.

Thus, when the pressure P from the fluid is applied to the flow path surface of the elastic body layer 98b from the x-axis direction side, the pressure sensor 93 causes the elastic body layer 98b to be slightly crushed and deformed by the pressure P. The force from 98b is received by the movable portion 51c, and the movable portion 51c can be displaced in the x-axis direction. Thus, in the doubly-supported beam sensor part 95b, the degree of displacement of the cantilever part 51 changes according to the magnitude of the pressure applied from the fluid in the x-axis direction, and the resistance value of the piezoresistive layer can also change accordingly. Has been made. In this case, the doubly supported beam sensor part 95b gives a potential difference between the electrodes at the end of the hinge part 51b, measures the resistance value change ΔR / R of the hinge part 51b, and determines the force acting on the cantilever part 51 from the measurement result ( The pressure P) from the fluid can be measured.

Even in the analyzer 90 having such a configuration, the relationship of the above equations 7 to 14 is established, the shear stress τ is calculated from the measurement result of the shear force sensor 92, and the pressure P is calculated from the measurement result of the pressure sensor 93. By calculating, the viscosity (viscosity coefficient) μ of the fluid can be calculated based on μ = K (τ ² / P ^3/2 ) of ^Equation 13. Specifically, the cantilever sensor unit 95a of the shear force sensor 92 can obtain a resistance value change rate ΔR / R as a measurement result and send it to an information processing means (not shown) built in the main body 91. Thus, the information processing means can calculate the shear stress τ based on the resistance value change rate ΔR / R received from the shear force sensor 92 and the above-described equation 6.

On the other hand, when the pressure sensor 93 receives the pressure P, it is considered that the following relationship is established between the resistance value change rate ΔR / R and the pressure P. Here, FIGS. 34A and 34B are side cross-sectional views schematically showing the doubly supported beam sensor portion 95b of the pressure sensor 93 in order to explain the relationship between the resistance value change rate ΔR / R and the pressure P. FIG. .

First, as shown in FIG. 34A, when pressure P [Pa] is applied to the doubly supported beam sensor portion 95b of the doubly supported beam structure embedded in the elastic body layer 98b, the end portion of the cantilever beam 51d A strain ε generated in the hinge portion 51b is calculated. Incidentally, at this time, assuming that the magnitude of the pressure P is sufficiently small and the deformation amount of the elastic layer 98b is sufficiently small, the elastic body of the elastic layer 98b also enters the lower portion of the both-end supported beam 51d. However, the deformation of the elastic body in this part is considered to be almost negligible. Under this assumption, when a pressure P [Pa] is applied to the elastic layer 98b from the x-axis direction, as shown in FIG. 34B, a pressure P having the same magnitude as the pressure P applied to the surface of the elastic layer 98b. However, it is considered that it is also added to the doubly supported beam 51d whose both ends are fixed by the hinge portion 51b.

Here, if the length of the double-supported beam 51d is L [mm], the width is W [mm], and the thickness is T [mm], the magnitude of the moment generated at the end of the double-supported beam 51d (hinge 51b) M can be expressed as the following Expression 15.

At this time, the strain ε generated in the hinge part 51b which is the end part can be expressed as in the following Expression 16, considering that the cross section of the doubly supported beam 51d is rectangular.

(However, Z is the second-order coefficient of cross section of the cantilever beam 51d, and E is the Young's modulus of the cantilever beam 51d.) The resistance value change rate ΔR / R of the piezoresistive element caused by the strain ε can be expressed as the following Expression 17, where K is the gauge factor of the piezoresistive element.

As described above, the pressure sensor 93 can calculate the pressure P based on the equations 16 and 17 using the resistance value change rate ΔR / R obtained as a measurement result. In practice, the doubly-supported beam sensor unit 95b of the pressure sensor 93 can obtain the resistance value change rate ΔR / R from the external force received from the fluid as a measurement result, and sends this to the information processing means. The information processing means can calculate the pressure P based on the resistance value change rate ΔR / R received from the pressure sensor 93 and the above-described equations 16 and 17. As a result, the analysis apparatus 90 uses the shear stress τ calculated from the measurement result of the shear force sensor 92 and the pressure P calculated from the measurement result of the pressure sensor 93 by the information processing means, and μ = K (τ ² / P ^3/2 ), the viscosity μ can be calculated.

Next, the analyzer 90 shown in FIG. 32 was actually produced, and the measurement test of the shear stress τ and the pressure P was performed using the analyzer 90. The shear force sensor 92 that measures shear stress in the moving direction is provided with a cantilever sensor unit 95a of about 200 [μm], and the pressure sensor 93 that measures pressure from the moving direction has about 200 [μm]. A double-supported beam sensor portion 95b of about μm] is provided.

In this case, a drive device having an arm portion that performs a fixed piston motion is prepared, and after the analyzer 90 is vertically fixed to the arm portion, the shear force sensor 92 and the pressure sensor 93 of the analyzer 90 are placed in water. I put it in. And it was made to reciprocate linearly in the direction (x-axis direction in FIG. 32) perpendicular to the one end surface 91b of the main body 91 by the driving device (frequency 2 [Hz], reciprocating width 50 [mm]. ). When the pressure P and the shear stress τ obtained from the analyzer 90 were examined at this time, the result shown in FIG. 35 was obtained. Of the results shown in FIG. 35, the values were read using the peaks and valleys of the waveform as sampling points. The pressure P was 10 [Pa] and the shear stress τ was 0.4 [Pa].

The viscosity m of the sample (water) measured in advance with another viscometer was 0.9 [mPa · s]. Therefore, when the viscosity μ is set to 0.9 [mPa · s], the pressure P is set to 10 [Pa], the shear stress τ is set to 0.4 [Pa], the above-described formula 13 μ = K (τ ² / P ^3/2 ) The proportionality constant K was determined to be 175.8. Therefore, in the analyzer 90, the number 13 obtained by substituting the proportional constant K = 175.8 is stored in advance, thereby calculating the shear stress τ calculated from the measurement result of the shear force sensor 92 and the measurement result of the pressure sensor 93. Using the pressure P, the viscosity μ can be calculated from Equation 13.

Incidentally, in the above-described embodiment, the cantilever sensor portion 95a in which the movable portion 21c can tilt in the x-axis direction is provided on the one side surface 91b, and the one-end surface 91b that receives the pressure applied in the x-axis direction is provided. Although the case where the portion 95b is provided and the main body 91 is reciprocated in the fluid along the x-axis direction to calculate the fluid viscosity μ has been described, the present invention is not limited thereto, The surface portion of the portion 21c is disposed perpendicular to the z-axis direction (the axial direction of the main body 91), and the cantilever sensor portion on which the movable portion 21c can be tilted in the z-axis direction is provided on one side surface 91b and applied in the z-axis direction A doubly supported beam sensor unit 95b may be provided on the bottom surface of the main body 91 that receives the pressure, and the main body 91 may be moved up and down along the z-axis direction in the fluid to calculate the viscosity μ of the fluid.

(8) Other Embodiments The present invention is not limited to the present embodiment, and various modifications can be made within the scope of the gist of the present invention, and these embodiments described above are combined. Alternatively, an acceleration sensor may be provided in each of the analysis device 35 according to the second embodiment, the analysis device 41 according to the third embodiment, and the like.

When the acceleration sensor is provided in this way, when the acceleration detected by the acceleration sensor is 0, if the measurement results of the shear force sensor 37, the pressure sensor 38, etc. are measured, the main body has started to move. Instead, the shear stress τ and the pressure P when the main body is moved in the fluid FL at a constant speed can be measured, and a more accurate viscosity coefficient μ can be calculated.

In the above-described embodiment, the case where the pressure sensor 38 is used has been described. However, the present invention is not limited thereto, and various measurement means such as a gyro sensor are provided, and measurement results obtained from these measurement means. May be used as supplementary data for calculating the viscosity coefficient τ. Incidentally, when an acceleration sensor is incorporated, the movement speed of the acceleration sensor can be calculated by integrating the output from the acceleration sensor. In this case, no pressure sensor is required, and the viscosity can be calculated only by the acceleration sensor and the shear force sensor.

Furthermore, in the first embodiment described above, the flow path forming unit 9 is used as a calculation means for calculating the viscosity coefficient of the fluid from the measurement result from the sensor unit, the surface flow velocity, and the fluid height. However, the present invention is not limited to this, and information processing means built in the flow path forming unit 9 may be applied as calculation means.

Furthermore, in the second to fourth and seventh embodiments described above, the viscosity coefficient of the fluid is calculated from the measurement result obtained from the sensor unit and the pressure measurement result obtained from the pressure sensor. Although the case where the information processing means (not shown) incorporated in the main bodies 36, 42, 52, 62, 91 is applied as the viscosity coefficient calculating means has been described, the present invention is not limited thereto, and the main bodies 36, 42, 52 are not limited thereto. , 62, 91 may be applied as the viscosity coefficient calculating means.

Furthermore, the configurations of the first to seventh embodiments described above may be appropriately combined. For example, in the analyzers 55 and 61 according to the fourth embodiment, a shearing force for detecting an external force in one direction is used. Instead of the sensor 37, a shear force sensor 44a that can detect an external force in the three-axis directions used in the third embodiment may be applied.

The analyzer according to the present invention adds, for example, a trolley adjusting agent to food such as milk, juice, nursing food, etc. It can be used when you want to check if

Claims (9)

1. An analyzer for identifying the viscosity of a fluid,
   An elastic body layer that is displaced by shearing stress from the fluid when the fluid flows on the surface of the flow path;
   A sensor unit that is covered with the elastic body layer, and that obtains a measurement result that specifies the viscosity of the fluid based on a change state of a movable part that is movable when the elastic body layer is displaced. Analysis equipment.
2. The said sensor part is provided with the piezoresistive layer which detects the movable state of the said movable part as a change of resistance value, The said measurement result is a resistance value change rate obtained from the said piezoresistive layer. The analyzer described.
3. The analysis apparatus according to claim 2, further comprising a shear stress calculation unit that calculates a shear stress received from the fluid based on the resistance value change rate obtained from the sensor unit.
4. A main body that is provided with the sensor section covered with the elastic body layer and a pressure sensor that measures a pressure received from the fluid;
   The viscosity coefficient calculating means for calculating a viscosity coefficient of the fluid from a measurement result obtained from the sensor unit and a pressure measurement result obtained from the pressure sensor. Any one of them.
5. The main body is provided with the sensor section covered with the elastic layer on a side surface orthogonal to a moving direction in which the main body is moved in the fluid, and is perpendicular to the moving direction in which the main body is moved in the fluid. The analyzer according to claim 4, wherein the pressure sensor is provided on one end surface.
6. The main body is provided with a plurality of the sensor units, and each sensor unit detects the shear stress from the fluid in three axial directions and obtains the measurement result specifying the viscosity of the fluid. The analyzer according to any one of claims 1 to 3.
7. Obtaining the surface flow velocity of the fluid flowing through the flow path surface and the fluid height that is the height of the fluid flowing through the flow path surface from the flow path surface, the measurement result from the sensor unit, and The analyzer according to any one of claims 1 to 3, further comprising calculation means for calculating a viscosity coefficient of the fluid from a surface flow velocity and the fluid height.
8. A rotating substrate that moves the fluid by rotating in a state where the fluid is disposed between the flow path surface of the elastic layer;
   The sensor unit obtains a measurement result that specifies the viscosity of the fluid based on a change state of the movable unit that is moved when the elastic layer is displaced when the rotating substrate is rotated. The analyzer according to any one of claims 1 to 3.
9. Comprising a tubular body through which the fluid passes through an internal hollow region;
   The sensor unit covered with the elastic body layer is provided on the wall of the main body,
   The sensor unit obtains a measurement result that specifies the viscosity of the fluid based on a change state of the movable unit that is moved when the elastic layer is displaced when the fluid passes through the hollow region. The analyzer according to any one of claims 1 to 3, characterized in that:
   
   

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