WO2011155544A1 - Mounting table vibration suppression device, and mounting table vibration suppression method - Google Patents

Mounting table vibration suppression device, and mounting table vibration suppression method Download PDF

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Publication number
WO2011155544A1
WO2011155544A1 PCT/JP2011/063179 JP2011063179W WO2011155544A1 WO 2011155544 A1 WO2011155544 A1 WO 2011155544A1 JP 2011063179 W JP2011063179 W JP 2011063179W WO 2011155544 A1 WO2011155544 A1 WO 2011155544A1
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WO
WIPO (PCT)
Prior art keywords
mounting table
vibration
arch
fixing member
leaf spring
Prior art date
Application number
PCT/JP2011/063179
Other languages
French (fr)
Japanese (ja)
Inventor
仁士 松下
宏和 吉岡
良典 高橋
Original Assignee
株式会社竹中工務店
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Filing date
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Application filed by 株式会社竹中工務店 filed Critical 株式会社竹中工務店
Publication of WO2011155544A1 publication Critical patent/WO2011155544A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
    • F16F15/073—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only leaf springs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type

Definitions

  • the present invention relates to a vibration suppression device for a mounting table and a vibration suppression method for the mounting table.
  • Patent Document 1 merely converts vibration energy into electric energy and consumes it.
  • the present invention has been made in view of the above facts, and an object thereof is to suppress the vibration of the mounting table that occurs with the movement of the mounted devices.
  • a vibration suppressing device for a mounting table comprising: a fixing member mounted on a mounting table on which devices are mounted and supported by a frame by vibration absorbing means; Sensing means which is provided on the gantry and moves toward the fixing member, supports the mounting table by sandwiching the fixing member from both sides, and detects a vibration of the mounting table and outputs a signal And a control means for moving the clamping means based on the signal from the sensing means.
  • the holding means is provided on both surfaces of the fixing member fixed to the mounting table with a predetermined gap from the fixing member.
  • the control means can move the holding means toward the fixing member based on the signal from the sensing means, and can support the fixing member by sandwiching it from both sides. As a result, it is possible to suppress the vibration of the mounting table that occurs with the movement of the devices mounted on the mounting table.
  • the clamping means includes an arch member disposed so that the top portions thereof face both surfaces of the fixing member, and the arch member And an actuator that changes the curvature of the arch member and moves the top to the fixed member side.
  • the arch member which comprises a clamping means is arrange
  • the actuator which changes the curvature of an arch member and moves a top part to the fixing member side is provided. Is provided.
  • the actuator is a film-type piezoelectric element that is joined to the arch member and expands and contracts based on an applied voltage. It is said.
  • the film-type piezoelectric element joined to the arch member is expanded and contracted based on the applied voltage, and changes the curvature to move the top of the arch member to the fixed member side. That is, by controlling the voltage applied to the film type piezoelectric element, the film type piezoelectric element can be made to act as an actuator that changes the magnitude of the curvature of the arch member.
  • a receiving member supported by the top portion and bridged above the membrane-type piezoelectric element supports the fixing member. It is characterized by that. Thereby, since a receiving member supports a fixing member, damage to a film type piezoelectric element is prevented.
  • an end of the arch member is slidably attached to the frame, and is attached to the frame. Is provided with a locking means for locking the end portion.
  • the edge part of an arch member is attached to the mount frame so that sliding is possible. Thereby, the change of the curvature of an arch member becomes easy and the movement of the top part to the fixed member side is ensured. Further, the end of the arch member is locked to the gantry by the locking means. Thereby, even if the impact force exceeding the binding force of the actuator is propagated from the mounting table, the shape of the arch member is maintained.
  • the invention described in claim 6 is the mounting table vibration suppressing device according to any one of claims 2 to 5, wherein the arch member is an arch support plate formed by bending a steel plate, A ridge line at the top of the arch support plate arranged on the upper side of the fixing member and a ridge line at the top of the arch support plate arranged on the lower side are orthogonal to each other. Thereby, the freedom degree of selection of the arrangement direction of an arch support plate becomes high, and size reduction of a clamping means can be achieved.
  • the sensing means is distorted by deformation of the arch member due to vibration of the fixed member.
  • the control means controls the voltage applied to the film-type piezoelectric element so as to apply vibration having a phase opposite to that of the mounting table from the arch member to the fixing member.
  • the sensing means and the actuator are provided on an upper or lower arch member of the fixed member. It is characterized by being provided in at least one of them.
  • the location of the arch member to which the sensing means and the actuator are attached is determined by the upper side of the fixed member depending on conditions such as the control accuracy required for the mounting table, the magnitude of impact force expected on the mounting table, and the weight of the mounting table. Only the lower arch member, only the lower arch member, or both of the upper arch member and the lower arch member can be selected, and vibration of the mounting table can be effectively suppressed.
  • the vibration suppression method of the mounting table according to the invention described in claim 9 is a vibration detection step of generating a signal by detecting the vibration of the mounting table on which equipment is mounted and supported by the frame by the vibration absorbing means by the sensing means. And changing the curvature of the arch member arranged with a predetermined gap on both sides of the fixing member fixed to the mounting table, and controlling the actuator based on the signal to move the top to the fixing member side.
  • the mounting table supported by the vibration absorbing means can be supported by the clamping means instead of the vibration absorbing means when vibration of the mounting table is detected, and with the operation of the mounted equipment The generated vibration of the mounting table can be suppressed.
  • the present invention has the above-described configuration, it is possible to suppress the vibration of the mounting table that occurs due to the movement of the mounted devices.
  • FIG. 1 shows the basic composition of the active vibration isolator with which the vibration suppression apparatus of the mounting base which concerns on the 1st Embodiment of this invention was integrated. It is a perspective view which shows the basic composition of the clamping part of the vibration suppression apparatus of the mounting base which concerns on the 1st Embodiment of this invention. It is sectional drawing which shows the basic composition of the clamping part of the vibration suppression apparatus of the mounting base which concerns on the 1st Embodiment of this invention. It is sectional drawing which shows the clamping state of the clamping part of the vibration suppression apparatus of the mounting base which concerns on the 1st Embodiment of this invention.
  • a mounting table vibration suppression device 10 As shown in FIG. 1, a mounting table vibration suppression device (hereinafter referred to as a vibration suppression device) 10 according to the first embodiment is provided on a frame 16 of an active vibration isolation table 50, and precision instruments are The mounting table 12 to be mounted is supported and vibration of the mounting table 12 is suppressed.
  • the gantry 16 is made of steel, has four leg portions 44, and a lateral member 46 that connects the leg portions 44 is fixed to a side wall of the leg portion 44.
  • the gantry 16 is formed in a rectangular shape in plan view, and supports the mounting table 12 on the upper surface.
  • a flange 44F is attached to the upper and lower ends of the leg portion 44, and the lower flange 44F is fixed to the floor surface 34 with bolts 48.
  • an air spring 32 filled with air and having a spring function is attached between the upper flange 44F of the leg portion 44 and the mounting table 12.
  • the air springs 32 are respectively provided on the upper portions of the four leg portions 44 and softly support the mounting table 12. Thereby, vibration from the floor surface 34 is absorbed by the air spring 32, and propagation to the mounting table 12 is suppressed.
  • An auxiliary column 42 is provided around the air spring 32, and the mounting table 12 is firmly supported by the leg portion 44 when the active vibration isolation table 50 is not operating.
  • the vibration suppressing device 10 is provided on the upper surface of the transverse member 46 and supports the mounting table 12 in parallel with the air spring 32.
  • Two vibration suppression devices 10 are provided on the upper surface of each transverse member 46 (eight in total), and each is controlled independently. By appropriately controlling the vibration suppressing device 10, vibration and inclination of the mounting table 12 are suppressed.
  • An auxiliary column 40 is provided between the vibration suppressing device 10 and the central portion of the horizontal member 46.
  • the auxiliary support column 40 is disposed between the horizontal member 46 and the mounting table 12, and fixes the mounting table 12 to the horizontal member 46 when the active vibration isolation table 50 is not operating.
  • the quantity of the vibration suppression apparatus 10 is determined by the specification of the active vibration isolation base 50, and is not limited to the quantity of the present embodiment.
  • the horizontal member 46 is formed of H-shaped steel, and a controller 36 for controlling the air spring 32 and the vibration suppressing device 10 is provided in a space between the upper and lower flanges 46F arranged in the horizontal direction. Further, a regulator 38 for controlling these currents is provided next to the controller 36. In addition, description of wiring is abbreviate
  • FIG. 2 and FIGS. 3 and 4 which are cross-sectional views taken along the line XX of FIG. 2, the back surface of the vibration suppression device 10 is fixed to the mounting table 12 and the vibration of the mounting table 12 propagates.
  • a fixed plate 14 is provided.
  • the fixing plate 14 is made of a steel plate, a flat central portion 14C is provided horizontally, and vertical portions 14E bent in the direction of the mounting table 12 are fixed to the lower surface of the mounting table 12 at both ends.
  • a clamping portion 54 described later is arranged on both side surfaces of the central portion 14C.
  • a space partitioned into a rectangular shape by the mounting table 12 and a fixed plate 14 fixed to the mounting table 12 is formed in the lower part of the mounting table 12.
  • a central portion 18C of the upper leaf spring mounting base 18 made of a steel plate is inserted into the rectangular partitioned space.
  • the central portion 18C is provided horizontally, and at both ends, a vertical portion (leg portion) 18E bent in the direction of the mounting base 17 provided on the upper surface of the gantry 16 is provided, and the lower end of the leg portion 18E is It is fixed to the upper surface of the mounting base 17.
  • a sandwiching portion 54 disposed above and below the fixed plate 14 is provided.
  • the sandwiching portion 54 sandwiches the fixing plate 14 from above and below.
  • the holding portion 54 is configured by the upper leaf spring 20 provided above the fixed plate 14 and the lower leaf spring 22 provided below the fixed plate 14.
  • the upper leaf spring 20 and the lower leaf spring 22 are both formed in an arch shape, and are attached with the tip of the arch portion facing the fixed plate 14.
  • the upper leaf spring 20 has the arch portion facing downward, and both end portions of the leg portion 20 ⁇ / b> L are attached to the lower surface of the central portion 18 ⁇ / b> C of the upper leaf spring mounting base 18.
  • the tip of the arch portion is attached with a predetermined gap S (about several tens of ⁇ m) from the upper surface of the central portion 14C of the fixed plate 14.
  • a lower leaf spring 22 is attached to the upper surface of the mounting base 17 with the arch portion facing upward at a position facing each other across the central portion 14C.
  • the tip of the arch portion is attached to the lower surface of the fixed plate 14 with a predetermined gap S (about several tens of ⁇ m).
  • An actuator 24 is attached to the surface of the lower leaf spring 22.
  • the actuator 24 is formed in a flat plate shape and is attached to the surface of the arch support plate 23 of the lower leaf spring 22.
  • the arch support plate 23 is formed by bending a steel plate into an arch shape, and a round bar 28 is fixed to the tip of the leg portion of the arch support plate 23.
  • a film-type piezoelectric element is used in which a polyimide film with electrodes printed on both sides of a fiber-shaped piezoelectric ceramic formed into a film is bonded with an epoxy resin.
  • the film type piezoelectric element is distorted according to the applied voltage value in the piezoelectric ceramic, and the film type piezoelectric element.
  • the film-type piezoelectric element has a characteristic of generating a voltage proportional to the amount of strain when the piezoelectric ceramic is bent and strain is generated.
  • the actuator 24 can be extended in the direction of the arrow Q1.
  • tip part of the arch support plate 23 can be bend
  • the tip of the arch portion is extended in the direction of the center portion 14 ⁇ / b> C, and the fixing plate 14 can be held between the upper leaf spring 20 and the lower leaf spring 22.
  • the actuator 24 has a configuration in which a plurality of the above-described film-type piezoelectric elements are stacked, and a part of them can act as the strain sensor 27 and the rest can act as the actuator 24. . That is, if the voltage generated in the membrane type piezoelectric element accompanying the deformation of the arch support plate 23 is guided to the controller 30 by the sensor lead wire integrally drawn by the lead wire 26, the voltage can be measured by the controller 30. . By using this voltage, the actuator 24 can be controlled.
  • the force with which the actuator 24 deforms the arch support plate 23 can be increased if the actuator 24 is increased.
  • the actuator 25 is pasted not only on the surface of the arch support plate 23 but also on the back surface, and the actuator 24 on the surface is extended in the direction of the arrow Q1, If the actuator 25 on the back surface is contracted in the direction of the arrow Q2, the tip of the arch support plate 23 can be greatly deformed in the direction of the arrow P2.
  • the end of the arch portion is extended toward the upper leaf spring 20 by reducing the curvature of the arch support plate 23 of the lower leaf spring 22 with the actuator 24.
  • Can do In this configuration, when the mounting table 12 is light and the impact force generated by the mounting table 12 is small, the tip of the arch portion of the lower leaf spring 22 is extended by the actuator 24 by a distance h1 of the gap 2S or more. Can do.
  • the fixed plate 14 and the mounting table 12 are lifted by a distance h2 that is greater than or equal to the gap S. In this state, the fixed plate 14 is sandwiched between the upper plate spring 20 and the lower plate spring 22 from the up and down direction.
  • a receiving material 64 may be attached above the arch portion of the lower leaf spring 22 across the actuator 24.
  • the receiving material 64 is made of steel and has a length larger than the entire width of the actuator 24 attached to the upper portion of the arch support plate 23, and the lower surface of the receiving material 64 and the actuator 24 are not in contact with each other. Thereby, even if the arch part of the arch support plate 23 extends toward the fixed plate 14, the receiving member 64 comes into contact with the fixed plate 14, so that the actuator 24 can be prevented from being damaged.
  • one leg portion of the lower leaf spring 22 is attached to the upper portion of the fixed portion 48, and the other leg portion is installed on the upper portion of the slide portion 49.
  • the lower part of the fixed part 48 and the lower part of the slide part 49 are both arranged on the upper surface of the lock table 58.
  • the lower portion of the slide portion 49 is configured to slide on the upper surface of the lock base 58.
  • the lock table 58 is fixed to the mounting table 17 provided on the upper surface of the lateral member 46.
  • the fixing portion 48 is fixed to one end of the lock base 58 and fixes one leg portion of the lower leaf spring 22.
  • the slide portion 49 is disposed at the other end of the lock table 58, and a lower end portion is slidably inserted into a slide groove (not shown) provided in the lock table 58. That is, the slide portion 49 is slidable in the direction parallel to the direction in which the arch support plate 23 is bent (the direction indicated by the arrow A). Thereby, when the curvature of the arch support plate 23 of the lower leaf spring 22 is reduced by the actuator 24, the arch portion of the arch support plate 23 can be smoothly extended upward.
  • a magnet unit 52 is attached between the fixed unit 48 and the slide unit 49, and the electromagnetic magnet attracting unit is directed to the slide unit 49. And the magnet part 52 and the slide part 49 become the nearest in the position (position which extended the arch part most upwards) where the slide part 49 slid to the fixed part 48 side most. If the magnet unit 52 is energized at the closest position, the slide unit 49 is attracted to the magnet unit 52 and the attracted state is maintained. Thereby, the arch support plate 23 is maintained in a state where the arch portion is extended upward.
  • the upper surface of the receiving material 64 that is bridged above the arch portion of the lower leaf spring 22 is disposed so as to be opened from the lower surface of the fixed plate 14 by a predetermined gap S (about several tens of ⁇ m).
  • FIG. 10 shows a case where the work equipment moves on the upper surface of the mounting table (stage) 12 to a place, for example, a distance of 0.8 m, performs the work determined at the destination, and returns to the original position after the work.
  • a place for example, a distance of 0.8 m
  • the horizontal axis indicates the elapsed time (s), and the vertical axis indicates the stage position (m).
  • a solid line H indicates the movement path of the work equipment on the stage.
  • the hatched range indicates the work time zone of the work equipment, and the open range indicates the movement time zone of the work equipment.
  • the stage 12 When the stage 12 is softly supported by the air spring 32 in the movement time zone of the work equipment (for example, times t 0 to t 1 , t 2 to t 3, etc.), the center of gravity of the stage 12 is shifted by the movement of the work equipment. Vibration occurs in the stage 12. Also, during this time period, the work equipment is moving and no precise work is performed. Therefore, in this time zone, it is necessary to support the stage 12 with high rigidity so that the stage 12 itself does not vibrate in preparation for precision work after the movement, rather than suppressing the propagation of vibration from the floor surface 34.
  • each step shown in FIG. 11 is executed to smoothly switch between a state in which the stage 12 is softly supported and a state in which the stage 12 is supported with high rigidity.
  • the vibration detection process 66 is executed. Specifically, when the stage 12 is vibrated by the movement of the work equipment or the like, the vibration of the stage 12 is propagated to the fixed plate 14. When the amplitude of the fixed plate 14 is equal to or greater than the predetermined gap S, the fixed plate 14 deforms the lower leaf spring 22 and distortion occurs in the lower leaf spring 22. This strain is detected by a strain sensor provided in the actuator 24 of the lower leaf spring 22, and the detection result is output to the controller 30.
  • the controller 30 generates an applied voltage based on a signal from the strain sensor and outputs the applied voltage to the actuator 24.
  • the actuator 24 is deformed according to the applied voltage, and changes the curvature of the arch support plate 23. When the curvature of the arch support plate 23 is reduced, the top of the arch portion is extended to the fixed plate 14 side.
  • the clamping process 68 is executed. Specifically, the fixed plate 14 is moved in the direction of the upper plate spring 20 at the top of the arch support plate 23 of the lower plate spring 22 extended to the fixed plate 14 side. By moving the fixing plate 14 to the top of the upper plate spring 20, the fixing plate 14 can be sandwiched between the lower plate spring 22 and the upper plate spring 20 from above and below. Thereby, the mounting table 12 can be firmly supported.
  • the lock process 69 is executed. Specifically, when the top portion of the lower leaf spring 22 extends toward the fixed plate 14, one end portion of the arch support plate 23 slidably attached slides toward the magnet portion 52 together with the slide portion 49. Approach. When the slide part 49 and the magnet part 52 are closest, the magnet part 52 is energized. Thereby, the slide part 49 is attracted
  • the vibration suppression process 70 is executed. Specifically, in a state where the fixed plate 14 is sandwiched between the lower plate spring 22 and the upper plate spring 22 from above and below, a voltage is applied from the controller 30 to the actuator 24 to suppress the vibration of the mounting table 12.
  • the controller 30 generates a vibration having an opposite phase to the vibration transmitted from the mounting table 12 to the lower leaf spring 22 and outputs the applied voltage to the actuator 24.
  • the vibration of the mounting table 12 can be suppressed in a short time.
  • the vibration stop detection step 71 is executed. Specifically, it is determined that the distortion due to the vibration of the mounting table 12 is no longer detected by the strain sensor, and it is determined that the movement of the work equipment is finished. The determination result is output to the controller 30.
  • the lock release step 72 is executed. That is, the controller 30 stops energization of the magnet unit 52 and unlocks the lower leaf spring 22 when the end of movement of the work device is input.
  • the deformation release step 73 is executed. Specifically, the controller 30 stops the voltage applied to the actuator 24 at the same time as the energization of the magnet unit 52 is stopped, and releases the deformation of the lower leaf spring 22.
  • the mounting table 12 softly supported by the air spring 32 is detected by the vibration from the mounting table 12 and replaced with the air spring 32 to be firmly supported by the holding portion 54. Thereby, the vibration of the mounting table 12 generated with the movement of the mounted work device can be suppressed.
  • the mounting table vibration suppressing device 80 has a configuration in which the actuator 24 is attached only to the upper leaf spring 76. That is, as shown in FIG. 12, the upper leaf spring 76 and the lower leaf spring 77 are arranged on both surfaces of the central portion 14 ⁇ / b> C of the fixed plate 14. At this time, the top portions of the upper leaf spring 76 and the lower leaf spring 77 are arranged with a predetermined distance S therebetween.
  • the actuator 24 is attached to the upper leaf spring 76 and is connected to the controller 30 by the lead wire 26. The actuator 24 is not attached to the lower leaf spring 77.
  • the controller 30 outputs the applied voltage.
  • the actuator 24 to which the voltage is applied changes the curvature of the top part of the upper leaf spring 76 and expands the top part.
  • the top of the upper leaf spring 76 moves in the direction of the arrow (downward) by a distance h3 that is greater than the predetermined distance 2S.
  • the upper leaf spring 76 and the lower leaf spring 77 can sandwich the central portion 14C of the fixed plate 14 from both sides. As a result, it is possible to suppress the vibration of the mounting table 12 that occurs with the movement of the mounted work equipment.
  • This configuration has the advantage that the lower leaf spring 77 can be configured to be robust when the weight of the mounting table 12 is large or when the expected impact force is large.
  • the configuration of other parts is the same as that of the first embodiment, and the description thereof is omitted.
  • the mounting table vibration suppressing device 82 has a configuration in which the actuator 24 is attached to both the upper leaf spring 76 and the lower leaf spring 22. That is, as shown in the cross-sectional view of FIG. 13, the upper plate spring 76 and the lower plate spring 22 are arranged on both surfaces of the central portion 14C of the fixed plate 14. At this time, the top portions of the upper leaf spring 76 and the lower leaf spring 77 are arranged with a predetermined distance S therebetween, and the actuator 24 is attached to each of the upper leaf spring 76 and the lower leaf spring 22.
  • the actuators 24 are connected to the respective controllers 30 by lead wires 26, and the actuators 24 are controlled independently.
  • both the upper leaf spring 76 and the lower leaf spring 22 are independently controlled by the actuators 24 attached to the upper leaf spring 76 and each of the upper leaf spring 76 and the lower leaf spring 22 is moved by a distance h5 larger than the predetermined distance S by changing the curvature of the top portion. be able to. Accordingly, the central portion 14 ⁇ / b> C of the fixed plate 14 can be sandwiched from both sides by the upper leaf spring 76 and the lower leaf spring 22.
  • the mounting table vibration suppressing device 84 has a configuration in which the actuator 24 is attached to both the upper plate spring and the 76 lower plate spring 22 described in the third embodiment. Two actuators 24 are controlled by one controller 31. That is, as shown in FIG. 14, the lead wires 26 from the actuators 24 of the upper leaf spring 76 and the lower leaf spring 22 are both connected to the controller 31.
  • the lead wire 26 includes both a lead wire for an output signal from a sensor provided in the actuator 24 and a lead wire for supplying a control voltage to the actuator 24.
  • the shape information from the sensors provided in the actuator 24 of the upper leaf spring 76 and the lower leaf spring 22 is input to the controller 31. Further, the control voltage from the controller 31 can be applied to the upper leaf spring and the 76 lower leaf spring 22. As a result, for example, the actuator 24 of the upper leaf spring 76 or the lower leaf spring 22 is deformed in accordance with the output from the sensor of the upper leaf spring 76 or the lower leaf spring 22, and the upper leaf spring 76 or the lower leaf spring 22 is changed.
  • the fixed plate 14 can be sandwiched from both sides by moving.
  • the controller 30 generates a vibration having a phase opposite to that of the vibration transmitted to the lower leaf spring 22 from the mounting table 12 and applies the vibration to the mounting table 12 via the fixed plate 14. Thereby, the vibration of the mounting table 12 can be suppressed in a short time.
  • the actuator 24 of the lower leaf spring 22 can be controlled by the output from the sensor provided on the actuator 24 of the upper leaf spring 76 with the fixing plate 14 sandwiched from both sides. That is, with the fixed plate 14 sandwiched from both sides, the controller 30 generates a vibration having a phase opposite to that transmitted from the mounting table 12 to the upper leaf spring 76, and controls the actuator 24 of the lower leaf spring 22 to fix it.
  • the vibration of the mounting table 12 can be suppressed in a short time.
  • FIG. 15 shows the result of verifying the effect with the transmission rate indicating the degree of vibration transmission.
  • the horizontal axis represents frequency (Hz)
  • the vertical axis represents transmission rate (dB).
  • a characteristic A indicated by a broken line is a transmission rate when the vibration is not controlled
  • a characteristic B indicated by a solid line is a transmission rate when the control described in the present embodiment is performed. From the results, it can be seen that when the control described in the present embodiment is performed, the transmissibility can be reduced by about 105 dB from about 15 dB to about 5 dB at a resonance point centered at a frequency of 20 Hz.
  • the vibration transmission rate can be greatly reduced.
  • the actuator 24 of the upper leaf spring 76 can be controlled by an output from a sensor provided in the actuator 24 of the lower leaf spring 22. Even in this configuration, the same effect as described above can be obtained.
  • Other configurations are the same as those of the first embodiment, and a description thereof will be omitted.
  • the vibration suppressing device 60 for the mounting table according to the fifth embodiment has the upper leaf spring 20 and the lower leaf spring 62 crossing the upper and lower sides of the central portion 14C across the central portion 14C of the fixing plate 14, and intersects the ridge line of the top portion. It is the structure arranged. As shown in the perspective view of FIG. 16, the lower leaf spring 62 is different from the lower leaf spring 22 in the vibration suppressing device 10 of the mounting table in the first embodiment by rotating the mounting direction by 90 degrees, Is attached. That is, the ridgelines at the top of the upper leaf spring 20 and the lower leaf spring 62 are orthogonal to each other.
  • the degree of freedom of arrangement of the lower leaf spring 22 is increased. Further, the holding portion 54 can be reduced in size. Other parts are the same as those in the first embodiment, and a description thereof will be omitted.
  • Placement table vibration suppression device 12 Stage (mounting stage) 14 Fixing plate (fixing member) 16 Base 20 Upper leaf spring (clamping means) 22 Lower leaf spring (clamping means) 23 Arch support plate (arch member) 24 Actuator (membrane type piezoelectric element) 27 Sensor (Sensing means, membrane-type piezoelectric element) 30 controller (control means) 32 Air spring (vibration absorbing means) 54 Clamping part (Clamping means) 56 Locking part (locking means) 64 Receiving material (receiving member)

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  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
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  • Vibration Prevention Devices (AREA)
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Abstract

The vibration of a mounting table caused by equipment mounted on the mounting table being moved is suppressed. A vibration suppression device (10) is provided with a fixing member (14). The fixing member (14) is affixed to a mounting table (12) mounted with equipment and supported by a mount by means of a vibration absorption means. The fixing member (14) has a flat center section (14C) and is affixed to the mounting table (12) by means of perpendicular sections (14E) formed by bending both ends of center section (14C). A clamping means (54) is disposed on both ends of center section (14C). The clamping means (54) has an upper leaf spring (20) and a lower leaf spring (22). The upper leaf spring (20) is affixed to center section (18C) of an upper leaf spring attachment base (18), and the lower leaf spring (22) is attached to an attachment base (17) disposed on the mount. Center section (18C) is inserted into a space surrounded by the fixing member (14) and the mounting table (12) and is attached to the attachment base (17) by means of leg sections formed by bending both ends of center section (18C). An actuator (24) for transforming the lower leaf spring (22) is attached to the lower leaf spring (22).

Description

載置台の振動抑制装置及び載置台の振動抑制方法Mounting table vibration suppressing device and mounting table vibration suppressing method
　本発明は、載置台の振動抑制装置及び載置台の振動抑制方法に関する。 The present invention relates to a vibration suppression device for a mounting table and a vibration suppression method for the mounting table.
　超ＬＳＩや液晶ディスプレイなどの精密機器の製造装置では、嫌振機器類（以下機器類と記す。）が載せられる載置台に周辺機器等による床振動が伝わらないように、空気バネ等で柔らかく載置台を支持して床振動を抑制している。 In manufacturing equipment for precision equipment such as VLSI and liquid crystal displays, it is softly mounted with air springs or the like so that floor vibrations from peripheral equipment etc. are not transmitted to the mounting table on which vibration isolating equipment (hereinafter referred to as equipment) is placed. Floor vibration is suppressed by supporting the table.
　しかし、空気バネ等で柔らかく載置台を支持した場合、載置台に設置された機器類自身の走行による重心移動や、機器類の稼動に伴い発生する衝撃力等に基づく載置台の振動を防止することができない。この課題を解決するため、例えば、圧電素子を載置台に貼り付け、圧電素子で振動エネルギーを電気エネルギーに変換し、載置台の振動を抑制する方法が提案されている（特許文献１）。 However, when the mounting table is softly supported by an air spring or the like, it prevents the mounting table from vibrating due to the movement of the center of gravity of the equipment installed on the mounting table itself or the impact force generated by the operation of the equipment. I can't. In order to solve this problem, for example, a method has been proposed in which a piezoelectric element is attached to a mounting table, vibration energy is converted into electric energy by the piezoelectric element, and vibration of the mounting table is suppressed (Patent Document 1).
　しかし、特許文献１の方法は、振動エネルギーを電気エネルギーに変換して消費するだけに過ぎない。 However, the method of Patent Document 1 merely converts vibration energy into electric energy and consumes it.
特開２０００－３５７８２４号公報JP 2000-357824 A
　本発明は、上記事実に鑑み、載置された機器類の移動等に伴い発生する載置台の振動を抑制することを目的とする。 The present invention has been made in view of the above facts, and an object thereof is to suppress the vibration of the mounting table that occurs with the movement of the mounted devices.
　請求項１に記載の発明に係る載置台の振動抑制装置は、機器類が載せられ振動吸収手段によって架台に支持された載置台に固定された固定部材と、前記固定部材の両面と所定の隙間を開けて前記架台に設けられ、前記固定部材に向かって移動し、前記固定部材を両面から挟んで前記載置台を支持する挟持手段と、前記載置台の振動を検知して信号を出力するセンシング手段と、前記センシング手段からの前記信号に基づき、前記挟持手段を移動させる制御手段と、を有することを特徴としている。 According to the first aspect of the present invention, there is provided a vibration suppressing device for a mounting table, comprising: a fixing member mounted on a mounting table on which devices are mounted and supported by a frame by vibration absorbing means; Sensing means which is provided on the gantry and moves toward the fixing member, supports the mounting table by sandwiching the fixing member from both sides, and detects a vibration of the mounting table and outputs a signal And a control means for moving the clamping means based on the signal from the sensing means.
　請求項１に記載の発明によれば、載置台に固定された固定部材の両面に、固定部材と所定の隙間を開けて挟持手段が設けられている。センシング手段が載置台の振動を検出すると、制御手段がセンシング手段からの信号に基づいて、挟持手段を固定部材に向けて移動させ、固定部材を両側から挟んで支持することができる。
　これにより、載置台に載置された機器類の移動等に伴い発生する、載置台の振動を抑制することができる。 According to the first aspect of the present invention, the holding means is provided on both surfaces of the fixing member fixed to the mounting table with a predetermined gap from the fixing member. When the sensing means detects the vibration of the mounting table, the control means can move the holding means toward the fixing member based on the signal from the sensing means, and can support the fixing member by sandwiching it from both sides.
As a result, it is possible to suppress the vibration of the mounting table that occurs with the movement of the devices mounted on the mounting table.
　請求項２に記載の発明は、請求項１に記載の載置台の振動抑制装置において、前記挟持手段は、前記固定部材の両面に頂部が対向するように配置されたアーチ部材と、前記アーチ部材に設けられ、前記アーチ部材の曲率を変えて前記頂部を前記固定部材側に移動させるアクチュエータと、を有することを特徴としている。 According to a second aspect of the present invention, in the vibration suppression device for the mounting table according to the first aspect, the clamping means includes an arch member disposed so that the top portions thereof face both surfaces of the fixing member, and the arch member And an actuator that changes the curvature of the arch member and moves the top to the fixed member side.
　請求項２に記載の発明によれば、挟持手段を構成するアーチ部材は、固定部材の両面に頂部を対向させて配置され、アーチ部材の曲率を変えて頂部を固定部材側に移動させるアクチュエータが設けられている。
　これにより、アクチュエータでアーチ部材の曲率を変えて頂部を固定部材側に移動させ、アーチ部材により固定部材を両面から挟み、載置台の振動を抑制することができる。 According to invention of Claim 2, the arch member which comprises a clamping means is arrange | positioned with the top part facing both surfaces of a fixing member, The actuator which changes the curvature of an arch member and moves a top part to the fixing member side is provided. Is provided.
As a result, the curvature of the arch member can be changed by the actuator to move the top to the fixed member side, and the fixed member can be sandwiched from both sides by the arch member to suppress the vibration of the mounting table.
　請求項３に記載の発明は、請求項２に記載の載置台の振動抑制装置において、前記アクチュエータは、前記アーチ部材に接合され、印加電圧に基づいて伸縮する膜型圧電素子であることを特徴としている。
　請求項３に記載の発明によれば、アーチ部材に接合された膜型圧電素子が、印加電圧に基づいて伸縮され、曲率を変えてアーチ部材の頂部を固定部材側に移動させる。
　即ち、膜型圧電素子に印加する電圧を制御することで、膜型圧電素子を、アーチ部材の曲率の大きさを変えるアクチュエータとして作用させることができる。 According to a third aspect of the present invention, in the vibration suppressor for a mounting table according to the second aspect, the actuator is a film-type piezoelectric element that is joined to the arch member and expands and contracts based on an applied voltage. It is said.
According to the third aspect of the present invention, the film-type piezoelectric element joined to the arch member is expanded and contracted based on the applied voltage, and changes the curvature to move the top of the arch member to the fixed member side.
That is, by controlling the voltage applied to the film type piezoelectric element, the film type piezoelectric element can be made to act as an actuator that changes the magnitude of the curvature of the arch member.
　請求項４に記載の発明は、請求項３に記載の載置台の振動抑制装置において、前記頂部に支持され、前記膜型圧電素子の上方に架け渡された受け部材が前記固定部材を支持することを特徴としている。
　これにより、受け部材が固定部材を支持するので、膜型圧電素子の損傷が防止される。 According to a fourth aspect of the present invention, in the vibration suppressing device for the mounting table according to the third aspect, a receiving member supported by the top portion and bridged above the membrane-type piezoelectric element supports the fixing member. It is characterized by that.
Thereby, since a receiving member supports a fixing member, damage to a film type piezoelectric element is prevented.
　請求項５に記載の発明は、請求項２～４のいずれか１項に記載の載置台の振動抑制装置において、前記アーチ部材の端部は、前記架台にスライド可能に取り付けられ、前記架台には前記端部をロックするロック手段が設けられていることを特徴としている。
　請求項５に記載の発明によれば、アーチ部材の端部がスライド可能に架台に取り付けられている。これにより、アーチ部材の曲率の変更が容易になり、固定部材側への頂部の移動が確保される。また、ロック手段によりアーチ部材の端部が架台にロックされる。これにより、アクチュエータの拘束力を上回る衝撃力が載置台から伝播されても、アーチ部材の形状が維持される。 According to a fifth aspect of the present invention, in the vibration suppressing device for a mounting table according to any one of the second to fourth aspects, an end of the arch member is slidably attached to the frame, and is attached to the frame. Is provided with a locking means for locking the end portion.
According to invention of Claim 5, the edge part of an arch member is attached to the mount frame so that sliding is possible. Thereby, the change of the curvature of an arch member becomes easy and the movement of the top part to the fixed member side is ensured. Further, the end of the arch member is locked to the gantry by the locking means. Thereby, even if the impact force exceeding the binding force of the actuator is propagated from the mounting table, the shape of the arch member is maintained.
　請求項６に記載の発明は、請求項２～５のいずれか１項に記載の載置台の振動抑制装置において、前記アーチ部材は、鋼板を湾曲させて形成されたアーチ支持板であり、前記固定部材の上側に配置された前記アーチ支持板の頂部の稜線と、下側に配置された前記アーチ支持板の頂部の稜線が直交していることを特徴としている。
　これにより、アーチ支持板の配置方向の選択の自由度が高くなり、挟持手段の小型化が図れる。 The invention described in claim 6 is the mounting table vibration suppressing device according to any one of claims 2 to 5, wherein the arch member is an arch support plate formed by bending a steel plate, A ridge line at the top of the arch support plate arranged on the upper side of the fixing member and a ridge line at the top of the arch support plate arranged on the lower side are orthogonal to each other.
Thereby, the freedom degree of selection of the arrangement direction of an arch support plate becomes high, and size reduction of a clamping means can be achieved.
　請求項７に記載の発明は、請求項３～６のいずれか１項に記載の載置台の振動抑制装置において、前記センシング手段は、前記固定部材の振動で前記アーチ部材が変形され歪が発生したとき、前記歪を検知して電圧を発生させるセンシング用の膜型圧電素子、又はセンシング機能とアクチュエータ機能を合わせ持つ膜型圧電素子であり、前記制御手段は、前記固定部材の振動と逆位相の振動を前記アーチ部材から前記固定部材に加えるよう、前記膜型圧電素子への印加電圧を制御することを特徴としている。 According to a seventh aspect of the present invention, in the vibration suppressor for a mounting table according to any one of the third to sixth aspects, the sensing means is distorted by deformation of the arch member due to vibration of the fixed member. A sensing film type piezoelectric element that detects the strain and generates a voltage, or a film type piezoelectric element that has both a sensing function and an actuator function, and the control means has a phase opposite to that of the vibration of the fixing member. The voltage applied to the film-type piezoelectric element is controlled so that the above vibration is applied from the arch member to the fixing member.
　請求項７に記載の発明によれば、膜型圧電素子で形成されたセンシング手段により、固定部材の振動でアーチ部材が変形されて歪が発生したとき、膜型圧電素子に発生した電圧が検出される。また、制御手段は、載置台の振動と逆位相の振動を、アーチ部材から固定部材に加えるよう、膜型圧電素子へ印加する電圧を制御する。 According to the seventh aspect of the present invention, when the arch member is deformed by the vibration of the fixed member and the distortion is generated by the sensing means formed of the film type piezoelectric element, the voltage generated in the film type piezoelectric element is detected. Is done. Further, the control means controls the voltage applied to the film-type piezoelectric element so as to apply vibration having a phase opposite to that of the mounting table from the arch member to the fixing member.
　これにより、センシング機能を有する膜型圧電素子、又は、センシング機能とアクチュエータ機能を合わせ持つ膜型圧電素子をアーチ部材に取り付けることで、固定部材の振動により発生したアーチ部材の歪を直接検出できる。また、検出結果に基づいて制御手段により、載置台の振動と逆位相の振動をアーチ部材から固定部材に加えるよう、膜型圧電素子への印加電圧が制御される。この結果、載置台を支持したときの載置台の振動を短時間で減衰させることができる。 Thus, by attaching a film-type piezoelectric element having a sensing function or a film-type piezoelectric element having both a sensing function and an actuator function to the arch member, it is possible to directly detect the distortion of the arch member caused by the vibration of the fixed member. Further, the voltage applied to the film-type piezoelectric element is controlled by the control means based on the detection result so as to apply a vibration having a phase opposite to that of the mounting table from the arch member to the fixed member. As a result, the vibration of the mounting table when the mounting table is supported can be attenuated in a short time.
　請求項８に記載の発明は、請求項２～７のいずれか１項に記載の載置台の振動抑制装置において、前記センシング手段及び前記アクチュエータが、前記固定部材の上側又は下側のアーチ部材の少なくともいずれか一方に設けられていることを特徴としている。 According to an eighth aspect of the present invention, in the mounting table vibration suppressing device according to any one of the second to seventh aspects, the sensing means and the actuator are provided on an upper or lower arch member of the fixed member. It is characterized by being provided in at least one of them.
　これにより、センシング手段及びアクチュエータを取り付けるアーチ部材の場所を、載置台に要求される制御精度、載置台で予想される衝撃力の大きさ、及び載置台の重量等の条件により、固定部材の上側のアーチ部材のみ、下側のアーチ部材のみ、上側のアーチ部材と下側のアーチ部材の両方の３つの選択肢の中から選択することができ、効果的に載置台の振動を抑制できる。 Thus, the location of the arch member to which the sensing means and the actuator are attached is determined by the upper side of the fixed member depending on conditions such as the control accuracy required for the mounting table, the magnitude of impact force expected on the mounting table, and the weight of the mounting table. Only the lower arch member, only the lower arch member, or both of the upper arch member and the lower arch member can be selected, and vibration of the mounting table can be effectively suppressed.
　請求項９に記載の発明に係る載置台の振動抑制方法は、センシング手段により、機器類が載せられ振動吸収手段によって架台に支持された載置台の振動を検出して信号を発生させる振動検出工程と、前記載置台に固定された固定部材の両面に所定の隙間を開けて配置されたアーチ部材の曲率を変え、前記頂部を前記固定部材側に移動させるアクチュエータに、前記信号に基づいて、制御手段により電圧を印加する電圧出力工程と、印加した前記電圧により、アーチ部材の前記頂部を前記固定部材側に移動させ、前記固定部材を両面から挟んで前記載置台を支持する挟持工程と、前記頂部が前記固定部材側に移動したとき、前記架台にスライド可能に取り付けられたアーチ部材の端部を、前記架台に取り付けられたロック手段でロックするロック工程と、前記固定部材を前記アーチ部材で支持した状態で、前記アクチュエータへの印加電圧を変化させ、前記載置台に前記振動と逆位相の振動を加える振動抑制工程と、を有することを特徴としている。 The vibration suppression method of the mounting table according to the invention described in claim 9 is a vibration detection step of generating a signal by detecting the vibration of the mounting table on which equipment is mounted and supported by the frame by the vibration absorbing means by the sensing means. And changing the curvature of the arch member arranged with a predetermined gap on both sides of the fixing member fixed to the mounting table, and controlling the actuator based on the signal to move the top to the fixing member side. A voltage output step of applying a voltage by means, a pinching step of moving the top of the arch member toward the fixing member by the applied voltage, and supporting the mounting table by sandwiching the fixing member from both sides; and When the top portion moves to the fixing member side, the end of the arch member slidably attached to the gantry is locked by the locking means attached to the gantry. And a vibration suppressing step of changing a voltage applied to the actuator and applying a vibration having a phase opposite to the vibration to the mounting table in a state where the fixing member is supported by the arch member. It is said.
　これにより、振動吸収手段で支持されていた載置台を、載置台の振動が検出されたときに振動吸収手段に替えて挟持手段で支持することができ、載置された機器類の稼動に伴い発生する載置台の振動を抑制することができる。 Thereby, the mounting table supported by the vibration absorbing means can be supported by the clamping means instead of the vibration absorbing means when vibration of the mounting table is detected, and with the operation of the mounted equipment The generated vibration of the mounting table can be suppressed.
　本発明は、上記構成としてあるので、載置された機器類の移動等に伴い発生する載置台の振動を抑制することができる。 Since the present invention has the above-described configuration, it is possible to suppress the vibration of the mounting table that occurs due to the movement of the mounted devices.
本発明の第１の実施の形態に係る載置台の振動抑制装置が組み込まれたアクティブ除振台の基本構成を示す図である。It is a figure which shows the basic composition of the active vibration isolator with which the vibration suppression apparatus of the mounting base which concerns on the 1st Embodiment of this invention was integrated. 本発明の第１の実施の形態に係る載置台の振動抑制装置の挟持部の基本構成を示す斜視図である。It is a perspective view which shows the basic composition of the clamping part of the vibration suppression apparatus of the mounting base which concerns on the 1st Embodiment of this invention. 本発明の第１の実施の形態に係る載置台の振動抑制装置の挟持部の基本構成を示す断面図である。It is sectional drawing which shows the basic composition of the clamping part of the vibration suppression apparatus of the mounting base which concerns on the 1st Embodiment of this invention. 本発明の第１の実施の形態に係る載置台の振動抑制装置の挟持部の挟持状態を示す断面図である。It is sectional drawing which shows the clamping state of the clamping part of the vibration suppression apparatus of the mounting base which concerns on the 1st Embodiment of this invention. 本発明の第１の実施の形態に係る載置台の振動抑制装置の下側板ばねの基本構成を示す斜視図である。It is a perspective view which shows the basic composition of the lower leaf | plate spring of the vibration suppression apparatus of the mounting base which concerns on the 1st Embodiment of this invention. 本発明の第１の実施の形態に係る載置台の振動抑制装置の下側板ばねの基本構成を示す断面図である。It is sectional drawing which shows the basic composition of the lower leaf | plate spring of the vibration suppression apparatus of the mounting base which concerns on the 1st Embodiment of this invention. 本発明の第１の実施の形態に係る載置台の振動抑制装置の下側板ばねの他の基本構成を示す斜視図である。It is a perspective view which shows the other basic structure of the lower leaf | plate spring of the vibration suppression apparatus of the mounting base which concerns on the 1st Embodiment of this invention. 本発明の第１の実施の形態に係る載置台の振動抑制装置の下側板ばねの他の基本構成を示す断面図である。It is sectional drawing which shows the other basic structure of the lower leaf | plate spring of the vibration suppression apparatus of the mounting base which concerns on the 1st Embodiment of this invention. 本発明の第１の実施の形態に係る載置台の振動抑制装置のロック部の基本構成を示す図である。It is a figure which shows the basic composition of the lock | rock part of the vibration suppression apparatus of the mounting base which concerns on the 1st Embodiment of this invention. 本発明の第１の実施の形態に係る載置台の振動抑制装置の制御概要を示す図である。It is a figure which shows the control outline | summary of the vibration suppression apparatus of the mounting base which concerns on the 1st Embodiment of this invention. 本発明の第１の実施の形態に係る載置台の振動抑制装置の制御手順を示すブロック図である。It is a block diagram which shows the control procedure of the vibration suppression apparatus of the mounting base which concerns on the 1st Embodiment of this invention. 本発明の第２の実施の形態に係る載置台の振動抑制装置の挟持部の基本構成を示す図である。It is a figure which shows the basic composition of the clamping part of the vibration suppression apparatus of the mounting base which concerns on the 2nd Embodiment of this invention. 本発明の第３の実施の形態に係る載置台の振動抑制装置の挟持部の基本構成を示す図である。It is a figure which shows the basic composition of the clamping part of the vibration suppression apparatus of the mounting base which concerns on the 3rd Embodiment of this invention. 本発明の第４の実施の形態に係る載置台の振動抑制装置の挟持部の基本構成を示す図である。It is a figure which shows the basic composition of the clamping part of the vibration suppression apparatus of the mounting base which concerns on the 4th Embodiment of this invention. 本発明の第４の実施の形態に係る載置台の振動抑制装置の挟持部の伝達率の実測データを示す図である。It is a figure which shows the actual measurement data of the transmission rate of the clamping part of the vibration suppression apparatus of the mounting base which concerns on the 4th Embodiment of this invention. 本発明の第５の実施の形態に係る載置台の振動抑制装置の挟持部の基本構成を示す図である。It is a figure which shows the basic composition of the clamping part of the vibration suppression apparatus of the mounting base which concerns on the 5th Embodiment of this invention.
（第１の実施の形態）
　図１に示すように、第１の実施の形態に係る載置台の振動抑制装置（以後、振動抑制装置と記載する）１０は、アクティブ除振台５０の架台１６に設けられ、精密機器類が載せられる載置台１２を支持し、載置台１２の振動を抑制する。 (First embodiment)
As shown in FIG. 1, a mounting table vibration suppression device (hereinafter referred to as a vibration suppression device) 10 according to the first embodiment is provided on a frame 16 of an active vibration isolation table 50, and precision instruments are The mounting table 12 to be mounted is supported and vibration of the mounting table 12 is suppressed.
　架台１６は鋼材製とされ、４本の脚部４４を有し、脚部４４の側壁には、脚部４４同士を連結する横部材４６が固定されている。架台１６は、平面視が矩形状に形成され、上面で載置台１２を支持している。脚部４４の上下端部にはフランジ４４Ｆが取り付けられ、下部フランジ４４Ｆは、ボルト４８で床面３４に固定されている。 The gantry 16 is made of steel, has four leg portions 44, and a lateral member 46 that connects the leg portions 44 is fixed to a side wall of the leg portion 44. The gantry 16 is formed in a rectangular shape in plan view, and supports the mounting table 12 on the upper surface. A flange 44F is attached to the upper and lower ends of the leg portion 44, and the lower flange 44F is fixed to the floor surface 34 with bolts 48.
　脚部４４の上部フランジ４４Ｆと載置台１２との間には、空気が充填され、ばね機能を有する空気ばね３２が取り付けられている。空気ばね３２は、４本の脚部４４の上部にそれぞれ設けられ、載置台１２を柔らかく支持している。これにより、床面３４からの振動が空気ばね３２で吸収され、載置台１２への伝播を抑制している。なお、空気ばね３２の周囲には、補助支柱４２が設けられ、アクティブ除振台５０が稼働していないときには、載置台１２を脚部４４に固く支持する。 Between the upper flange 44F of the leg portion 44 and the mounting table 12, an air spring 32 filled with air and having a spring function is attached. The air springs 32 are respectively provided on the upper portions of the four leg portions 44 and softly support the mounting table 12. Thereby, vibration from the floor surface 34 is absorbed by the air spring 32, and propagation to the mounting table 12 is suppressed. An auxiliary column 42 is provided around the air spring 32, and the mounting table 12 is firmly supported by the leg portion 44 when the active vibration isolation table 50 is not operating.
　振動抑制装置１０は、横部材４６の上面に設けられ、空気ばね３２と並列に載置台１２を支持している。振動抑制装置１０は、各横部材４６の上面に２個ずつ（合計８個）設けられ、それぞれが独立して制御されている。振動抑制装置１０を適切に制御することにより、載置台１２の振動や傾斜が抑制される。 The vibration suppressing device 10 is provided on the upper surface of the transverse member 46 and supports the mounting table 12 in parallel with the air spring 32. Two vibration suppression devices 10 are provided on the upper surface of each transverse member 46 (eight in total), and each is controlled independently. By appropriately controlling the vibration suppressing device 10, vibration and inclination of the mounting table 12 are suppressed.
　横部材４６の中央部であり振動抑制装置１０の間には、補助支柱４０が設けられている。補助支柱４０は、横部材４６と載置台１２の間に配置され、アクティブ除振台５０が稼働していないときに、載置台１２を横部材４６に固定する。なお、振動抑制装置１０の数量は、アクティブ除振台５０の仕様により決定されるものであり、本実施の形態の数量に限定されるものではない。 An auxiliary column 40 is provided between the vibration suppressing device 10 and the central portion of the horizontal member 46. The auxiliary support column 40 is disposed between the horizontal member 46 and the mounting table 12, and fixes the mounting table 12 to the horizontal member 46 when the active vibration isolation table 50 is not operating. In addition, the quantity of the vibration suppression apparatus 10 is determined by the specification of the active vibration isolation base 50, and is not limited to the quantity of the present embodiment.
　横部材４６はＨ形鋼で形成され、横方向に配置された上下フランジ４６Ｆの間の空間には、空気ばね３２及び振動抑制装置１０を制御するコントローラ３６が設けられている。また、コントローラ３６の隣には、これらの電流を制御するレギュレータ３８が設けられている。なお、配線類の記載は省略している。 The horizontal member 46 is formed of H-shaped steel, and a controller 36 for controlling the air spring 32 and the vibration suppressing device 10 is provided in a space between the upper and lower flanges 46F arranged in the horizontal direction. Further, a regulator 38 for controlling these currents is provided next to the controller 36. In addition, description of wiring is abbreviate | omitted.
　次に、振動抑制装置１０の挟持部について説明する。
　図２の斜視図、及び図２のＸ－Ｘ線断面図である図３、４に示すように、振動抑制装置１０の裏面には、載置台１２に固定され、載置台１２の振動が伝播される固定板１４が設けられている。固定板１４は鋼板製とされ、平板状の中央部１４Ｃが水平に設けられ、両端部には載置台１２の方向に折り曲げられた鉛直部１４Ｅが載置台１２の下面に固定されている。中央部１４Ｃの両側面には、後述する挟持部５４が配置されている。 Next, the clamping part of the vibration suppression device 10 will be described.
As shown in the perspective view of FIG. 2 and FIGS. 3 and 4 which are cross-sectional views taken along the line XX of FIG. 2, the back surface of the vibration suppression device 10 is fixed to the mounting table 12 and the vibration of the mounting table 12 propagates. A fixed plate 14 is provided. The fixing plate 14 is made of a steel plate, a flat central portion 14C is provided horizontally, and vertical portions 14E bent in the direction of the mounting table 12 are fixed to the lower surface of the mounting table 12 at both ends. On both side surfaces of the central portion 14C, a clamping portion 54 described later is arranged.
　載置台１２の下部には、載置台１２と、載置台１２に固定された固定板１４とで矩形状に区画された空間が形成されている。この矩形状に区画された空間の内部には、鋼板製とされた上側板ばね取付台１８の中央部１８Ｃが挿入されている。中央部１８Ｃは、水平に設けられ、両端部には、架台１６の上面に設けられた取付台１７の方向に折り曲げられた鉛直部（脚部）１８Ｅが設けられ、脚部１８Ｅの下端が、取付台１７の上面に固定されている。 A space partitioned into a rectangular shape by the mounting table 12 and a fixed plate 14 fixed to the mounting table 12 is formed in the lower part of the mounting table 12. A central portion 18C of the upper leaf spring mounting base 18 made of a steel plate is inserted into the rectangular partitioned space. The central portion 18C is provided horizontally, and at both ends, a vertical portion (leg portion) 18E bent in the direction of the mounting base 17 provided on the upper surface of the gantry 16 is provided, and the lower end of the leg portion 18E is It is fixed to the upper surface of the mounting base 17.
　固定板１４の中央部１４Ｃには、固定板１４の上下に配置された挟持部５４が設けられている。挟持部５４は、固定板１４を上下方向から挟んで挟持する。具体的には、固定板１４の上方に設けられた上側板ばね２０と、固定板１４の下方に設けられた下側板ばね２２で挟持部５４が構成されている。上側板ばね２０と下側板ばね２２は、いずれもアーチ状に形成され、アーチ部の先端を固定板１４に向けて取り付けられている。 At the center portion 14C of the fixed plate 14, a sandwiching portion 54 disposed above and below the fixed plate 14 is provided. The sandwiching portion 54 sandwiches the fixing plate 14 from above and below. Specifically, the holding portion 54 is configured by the upper leaf spring 20 provided above the fixed plate 14 and the lower leaf spring 22 provided below the fixed plate 14. The upper leaf spring 20 and the lower leaf spring 22 are both formed in an arch shape, and are attached with the tip of the arch portion facing the fixed plate 14.
　即ち、図３に示すように、上側板ばね２０はアーチ部を下に向け、脚部２０Ｌの両端部を、上側板ばね取付台１８の中央部１８Ｃの下面に取り付けている。このとき、アーチ部の先端は、固定板１４の中央部１４Ｃの上面と所定の隙間Ｓ（数十μｍ程度）を開けて取り付けられている。
　また、中央部１４Ｃを挟んで対向する位置には、下側板ばね２２が、アーチ部を上に向けて、取付台１７の上面に取り付けられている。このとき、アーチ部の先端は、固定板１４の下面と所定の隙間Ｓ（数十μｍ程度）を開けて取り付けられている。下側板ばね２２の表面には、アクチュエータ２４が貼り付けられている。 That is, as shown in FIG. 3, the upper leaf spring 20 has the arch portion facing downward, and both end portions of the leg portion 20 </ b> L are attached to the lower surface of the central portion 18 </ b> C of the upper leaf spring mounting base 18. At this time, the tip of the arch portion is attached with a predetermined gap S (about several tens of μm) from the upper surface of the central portion 14C of the fixed plate 14.
Further, a lower leaf spring 22 is attached to the upper surface of the mounting base 17 with the arch portion facing upward at a position facing each other across the central portion 14C. At this time, the tip of the arch portion is attached to the lower surface of the fixed plate 14 with a predetermined gap S (about several tens of μm). An actuator 24 is attached to the surface of the lower leaf spring 22.
　アクチュエータ２４は、図５に示すように、平板状に形成され、下側板ばね２２のアーチ支持板２３の表面に貼り付けられている。アーチ支持板２３は、鋼板をアーチ状に折り曲げて形成され、アーチ支持板２３の脚部の先端には丸棒２８が固定されている。 As shown in FIG. 5, the actuator 24 is formed in a flat plate shape and is attached to the surface of the arch support plate 23 of the lower leaf spring 22. The arch support plate 23 is formed by bending a steel plate into an arch shape, and a round bar 28 is fixed to the tip of the leg portion of the arch support plate 23.
　アクチュエータ２４の内部構造の図示は省略するが、膜状とされた繊維状の圧電セラミックの両側面に、電極が印刷されたポリイミドフィルムをエポキシ樹脂で接合した膜型圧電素子が使用されている。この膜型圧電素子は、圧電セラミックの両側面に取り付けられたリード線２６を介してコントローラ３０から電圧を印加すれば、印加された電圧値に従った歪が圧電セラミックに生じ、膜型圧電素子が、例えば図５の斜視図に示す矢印Ｐの方向に変形する。
　更に、膜型圧電素子は、圧電セラミックが折り曲げられ歪が生じると、歪量に比例した電圧を発生する特性を有している。 Although illustration of the internal structure of the actuator 24 is omitted, a film-type piezoelectric element is used in which a polyimide film with electrodes printed on both sides of a fiber-shaped piezoelectric ceramic formed into a film is bonded with an epoxy resin. When a voltage is applied from the controller 30 via the lead wires 26 attached to both sides of the piezoelectric ceramic, the film type piezoelectric element is distorted according to the applied voltage value in the piezoelectric ceramic, and the film type piezoelectric element. However, it is deformed in the direction of the arrow P shown in the perspective view of FIG.
Furthermore, the film-type piezoelectric element has a characteristic of generating a voltage proportional to the amount of strain when the piezoelectric ceramic is bent and strain is generated.
　即ち、図６の断面図に示すように、アーチ支持板２３の側面に貼り付けられたアクチュエータ２４に、コントローラ３０から電圧を印加すれば、アクチュエータ２４を矢印Ｑ１の方向に伸張させることができる。これにより、アーチ支持板２３の先端部を矢印Ｐ１の方向に折り曲げることができる。この結果、アーチ部の先端が中央部１４Ｃの方向に伸張され、上側板ばね２０と下側板ばね２２で固定板１４を挟持することができる。 That is, as shown in the sectional view of FIG. 6, if a voltage is applied from the controller 30 to the actuator 24 attached to the side surface of the arch support plate 23, the actuator 24 can be extended in the direction of the arrow Q1. Thereby, the front-end | tip part of the arch support plate 23 can be bend | folded in the direction of arrow P1. As a result, the tip of the arch portion is extended in the direction of the center portion 14 </ b> C, and the fixing plate 14 can be held between the upper leaf spring 20 and the lower leaf spring 22.
　ここに、アクチュエータ２４は、上述した膜型圧電素子を積層して複数個使用した構成とされており、その中の一部を歪センサ２７として作用させ、残りをアクチュエータ２４として作用させることができる。
　即ち、アーチ支持板２３の変形に伴い膜型圧電素子で発生した電圧を、リード線２６で一体に描かれたセンサ用リード線でコントローラ３０に導けば、コントローラ３０で電圧を計測することができる。この電圧を利用すれば、アクチュエータ２４を制御することができる。 Here, the actuator 24 has a configuration in which a plurality of the above-described film-type piezoelectric elements are stacked, and a part of them can act as the strain sensor 27 and the rest can act as the actuator 24. .
That is, if the voltage generated in the membrane type piezoelectric element accompanying the deformation of the arch support plate 23 is guided to the controller 30 by the sensor lead wire integrally drawn by the lead wire 26, the voltage can be measured by the controller 30. . By using this voltage, the actuator 24 can be controlled.
　なお、アクチュエータ２４がアーチ支持板２３を変形させる力は、アクチュエータ２４を増やせば増大できる。例えば、図７の斜視図及び図８の断面図に示すように、アーチ支持板２３の表面のみでなく、裏面にもアクチュエータ２５を貼り付け、表面のアクチュエータ２４を矢印Ｑ１の方向に伸張させ、裏面のアクチュエータ２５を矢印Ｑ２の方向に収縮させれば、アーチ支持板２３の先端部を、矢印Ｐ２の方向により大きく変形させることができる。 The force with which the actuator 24 deforms the arch support plate 23 can be increased if the actuator 24 is increased. For example, as shown in the perspective view of FIG. 7 and the cross-sectional view of FIG. 8, the actuator 25 is pasted not only on the surface of the arch support plate 23 but also on the back surface, and the actuator 24 on the surface is extended in the direction of the arrow Q1, If the actuator 25 on the back surface is contracted in the direction of the arrow Q2, the tip of the arch support plate 23 can be greatly deformed in the direction of the arrow P2.
　即ち、図４の挟持状態の断面図に示すように、アクチュエータ２４で、下側板ばね２２のアーチ支持板２３の曲率を小さくすることで、アーチ部の先端を上板ばね２０側に伸張させることができる。
　この構成において、載置台１２が軽量で、かつ載置台１２で発生する衝撃力が小さい場合には、下側板ばね２２のアーチ部の先端を隙間２Ｓ以上の距離ｈ１だけ、アクチュエータ２４で伸張させることができる。この結果、固定板１４及び載置台１２が隙間Ｓ以上の距離ｈ２だけ持ち上げられる。この状態において、固定板１４が、上側板ばね２０と下側板ばね２２で上下方向から挟持される。 That is, as shown in the cross-sectional view of the clamped state in FIG. 4, the end of the arch portion is extended toward the upper leaf spring 20 by reducing the curvature of the arch support plate 23 of the lower leaf spring 22 with the actuator 24. Can do.
In this configuration, when the mounting table 12 is light and the impact force generated by the mounting table 12 is small, the tip of the arch portion of the lower leaf spring 22 is extended by the actuator 24 by a distance h1 of the gap 2S or more. Can do. As a result, the fixed plate 14 and the mounting table 12 are lifted by a distance h2 that is greater than or equal to the gap S. In this state, the fixed plate 14 is sandwiched between the upper plate spring 20 and the lower plate spring 22 from the up and down direction.
　なお、図５～８に示すように、下側板ばね２２のアーチ部の上方に、アクチュエータ２４を跨いで受け材６４を取り付けても良い。受け材６４は鋼材製とされ、アーチ支持板２３上部に取り付けられたアクチュエータ２４の全幅より大きい長さとされ、受け材６４の下面とアクチュエータ２４は接していない。これにより、アーチ支持板２３のアーチ部が固定板１４側に伸張しても、受け材６４が固定板１４と当接するため、アクチュエータ２４の損傷を防止できる。 As shown in FIGS. 5 to 8, a receiving material 64 may be attached above the arch portion of the lower leaf spring 22 across the actuator 24. The receiving material 64 is made of steel and has a length larger than the entire width of the actuator 24 attached to the upper portion of the arch support plate 23, and the lower surface of the receiving material 64 and the actuator 24 are not in contact with each other. Thereby, even if the arch part of the arch support plate 23 extends toward the fixed plate 14, the receiving member 64 comes into contact with the fixed plate 14, so that the actuator 24 can be prevented from being damaged.
　次に、振動抑制装置１０のロック部について説明する。
　図９の部分断面図に示すように、下側板ばね２２の一方の脚部は固定部４８の上部に取り付けられ、他方の脚部はスライド部４９の上部に設置されている。そして、固定部４８の下部とスライド部４９の下部は、いずれもロック台５８の上面に配置されている。ここに、スライド部４９の下部は、ロック台５８の上面をスライドする構成である。ロック台５８は、横部材４６の上面に設けられた取付台１７に固定されている。 Next, the lock part of the vibration suppression device 10 will be described.
As shown in the partial cross-sectional view of FIG. 9, one leg portion of the lower leaf spring 22 is attached to the upper portion of the fixed portion 48, and the other leg portion is installed on the upper portion of the slide portion 49. The lower part of the fixed part 48 and the lower part of the slide part 49 are both arranged on the upper surface of the lock table 58. Here, the lower portion of the slide portion 49 is configured to slide on the upper surface of the lock base 58. The lock table 58 is fixed to the mounting table 17 provided on the upper surface of the lateral member 46.
　固定部４８はロック台５８の一端に固定され、下側板ばね２２の一方の脚部を固定する。スライド部４９は、ロック台５８の他端に配置され、ロック台５８に設けられたスライド溝（図示せず）に、下端部がスライド可能に挿入されている。即ち、スライド部４９は、アーチ支持板２３が折り曲げられる方向と平行（矢印Ａで示す方向）にスライド可能とされている。これにより、アクチュエータ２４で、下側板ばね２２のアーチ支持板２３の曲率を小さくしたとき、スムーズにアーチ支持板２３のアーチ部を上方に伸張させることができる。 The fixing portion 48 is fixed to one end of the lock base 58 and fixes one leg portion of the lower leaf spring 22. The slide portion 49 is disposed at the other end of the lock table 58, and a lower end portion is slidably inserted into a slide groove (not shown) provided in the lock table 58. That is, the slide portion 49 is slidable in the direction parallel to the direction in which the arch support plate 23 is bent (the direction indicated by the arrow A). Thereby, when the curvature of the arch support plate 23 of the lower leaf spring 22 is reduced by the actuator 24, the arch portion of the arch support plate 23 can be smoothly extended upward.
　固定部４８とスライド部４９の間には、マグネット部５２が取り付けられ、電磁マグネットの吸着部をスライド部４９に向けている。そして、スライド部４９が最も固定部４８側にスライドした位置（アーチ部を上方に最も伸張させた位置）で、マグネット部５２とスライド部４９が最も近くなる。この最も近い位置でマグネット部５２に通電すれば、スライド部４９がマグネット部５２に吸着され、吸着状態が維持される。これにより、アーチ支持板２３はアーチ部を上方に伸張させた状態で維持される。 A magnet unit 52 is attached between the fixed unit 48 and the slide unit 49, and the electromagnetic magnet attracting unit is directed to the slide unit 49. And the magnet part 52 and the slide part 49 become the nearest in the position (position which extended the arch part most upwards) where the slide part 49 slid to the fixed part 48 side most. If the magnet unit 52 is energized at the closest position, the slide unit 49 is attracted to the magnet unit 52 and the attracted state is maintained. Thereby, the arch support plate 23 is maintained in a state where the arch portion is extended upward.
　これにより、アクチュエータ２４の変形による拘束力を上回る衝撃力が、載置台１２から伝播されても、アーチ支持板２３の形状を維持することができる。マグネット部５２への通電を停止すると、マグネット部５２との吸着状態は解除され、スライド部４９はスライド可能となる。 Thereby, even if the impact force exceeding the restraint force due to the deformation of the actuator 24 is propagated from the mounting table 12, the shape of the arch support plate 23 can be maintained. When the energization to the magnet unit 52 is stopped, the attracted state with the magnet unit 52 is released, and the slide unit 49 becomes slidable.
　なお、下側板ばね２２のアーチ部の上方に架け渡された受け材６４の上面は、固定板１４の下面と所定の隙間Ｓ（数十μｍ程度）だけ開けて配置されている。これにより、アーチ支持板２３のアーチ部が固定板１４側に伸張しても、受け材６４が固定板１４と当接するため、アクチュエータ２４の損傷を防止できる。 In addition, the upper surface of the receiving material 64 that is bridged above the arch portion of the lower leaf spring 22 is disposed so as to be opened from the lower surface of the fixed plate 14 by a predetermined gap S (about several tens of μm). Thereby, even if the arch part of the arch support plate 23 extends toward the fixed plate 14, the receiving member 64 comes into contact with the fixed plate 14, so that the actuator 24 can be prevented from being damaged.
　次に、振動抑制装置１０の制御方法について説明する。
　図１０は、載置台（ステージ）１２の上面を作業機器が、例えば距離０．８ｍ離れた場所まで移動して、移動先で定められた作業を行い、作業後、元の位置まで戻る場合における、移動時間とステージ位置の関係を示している。 Next, a control method of the vibration suppression device 10 will be described.
FIG. 10 shows a case where the work equipment moves on the upper surface of the mounting table (stage) 12 to a place, for example, a distance of 0.8 m, performs the work determined at the destination, and returns to the original position after the work. The relationship between the movement time and the stage position is shown.
　図１０の横軸は経過時間（ｓ）を示し、縦軸はステージ位置（ｍ）を示している。また、実線Ｈがステージ上の作業機器の移動経路を示している。なお、ハッチングした範囲が作業機器の作業時間帯を示し、白抜きの範囲が作業機器の移動時間帯を示している。 10, the horizontal axis indicates the elapsed time (s), and the vertical axis indicates the stage position (m). A solid line H indicates the movement path of the work equipment on the stage. The hatched range indicates the work time zone of the work equipment, and the open range indicates the movement time zone of the work equipment.
　作業機器の移動時間帯（例えば時間ｔ０～ｔ１、ｔ２～ｔ３等）においては、ステージ１２を空気ばね３２で柔らかく支持した場合、作業機器の移動でステージ１２の重心がずれるため、ステージ１２に振動が発生する。また、この時間帯は作業機器が移動中であり、精密な作業は行われていない。従って、この時間帯は、床面３４からの振動の伝播を抑制するより、移動後の精密作業に備えてステージ１２自身が振動しないように、高い剛性でステージ１２を支持する必要がある。 When the stage 12 is softly supported by the air spring 32 in the movement time zone of the work equipment (for example, times t 0 to t 1 , t 2 to t 3, etc.), the center of gravity of the stage 12 is shifted by the movement of the work equipment. Vibration occurs in the stage 12. Also, during this time period, the work equipment is moving and no precise work is performed. Therefore, in this time zone, it is necessary to support the stage 12 with high rigidity so that the stage 12 itself does not vibrate in preparation for precision work after the movement, rather than suppressing the propagation of vibration from the floor surface 34.
　一方、作業機器の作業時間帯（例えば時間ｔ１～ｔ２、ｔ３～ｔ４等）においては、精密な作業が行われるため、作業機器の作業に支障が生じないように、載置台１２を柔らかく支持して、床面からの振動の伝播を遮断する必要がある。
　このため、図１１に示す各工程を実行して、柔らかくステージ１２を支持する状態と、高い剛性でステージ１２を支持する状態をスムーズに切り替えている。 On the other hand, in the work time zone of the work equipment (for example, time t 1 to t 2 , t 3 to t 4, etc.), since the precise work is performed, the mounting table 12 does not cause any trouble in the work equipment work. Must be softly supported to block the propagation of vibrations from the floor.
For this reason, each step shown in FIG. 11 is executed to smoothly switch between a state in which the stage 12 is softly supported and a state in which the stage 12 is supported with high rigidity.
　先ず、振動検出工程６６を実行する。具体的には、作業機器等の移動によりステージ１２に振動が発生したとき、ステージ１２の振動が固定板１４に伝播される。固定板１４の振幅が所定の隙間Ｓ以上のとき、固定板１４が下側板ばね２２を変形させ、下側板ばね２２に歪が生じる。この歪が、下側板ばね２２のアクチュエータ２４に設けられた歪センサで検出され、検出結果がコントローラ３０に出力される。 First, the vibration detection process 66 is executed. Specifically, when the stage 12 is vibrated by the movement of the work equipment or the like, the vibration of the stage 12 is propagated to the fixed plate 14. When the amplitude of the fixed plate 14 is equal to or greater than the predetermined gap S, the fixed plate 14 deforms the lower leaf spring 22 and distortion occurs in the lower leaf spring 22. This strain is detected by a strain sensor provided in the actuator 24 of the lower leaf spring 22, and the detection result is output to the controller 30.
　次に、電圧出力工程６７を実行する。具体的には、歪センサからの信号に基づいて、コントローラ３０が印加電圧を発生させ、アクチュエータ２４に出力する。アクチュエータ２４は、印加電圧に従って変形され、アーチ支持板２３の曲率を変える。アーチ支持板２３は曲率を小さくされると、アーチ部の頂部が固定板１４側に伸張される。 Next, the voltage output process 67 is executed. Specifically, the controller 30 generates an applied voltage based on a signal from the strain sensor and outputs the applied voltage to the actuator 24. The actuator 24 is deformed according to the applied voltage, and changes the curvature of the arch support plate 23. When the curvature of the arch support plate 23 is reduced, the top of the arch portion is extended to the fixed plate 14 side.
　次に、挟持工程６８を実行する。具体的には、固定板１４側に伸張させた下側板ばね２２のアーチ支持板２３の頂部で、固定板１４を上側板ばね２０の方向に移動させる。固定板１４を上側板ばね２０の頂部まで移動させることで、下側板ばね２２と上側板ばね２０で固定板１４を上下から挟んで挟持することができる。これにより、載置台１２を固く支持することができる。 Next, the clamping process 68 is executed. Specifically, the fixed plate 14 is moved in the direction of the upper plate spring 20 at the top of the arch support plate 23 of the lower plate spring 22 extended to the fixed plate 14 side. By moving the fixing plate 14 to the top of the upper plate spring 20, the fixing plate 14 can be sandwiched between the lower plate spring 22 and the upper plate spring 20 from above and below. Thereby, the mounting table 12 can be firmly supported.
　次に、ロック工程６９を実行する。具体的には、下側板ばね２２の頂部が固定板１４側に伸張したとき、スライド可能に取り付けられたアーチ支持板２３の一方の端部は、スライド部４９と共にマグネット部５２の方にスライドして近づく。最もスライド部４９とマグネット部５２が近づいたとき、マグネット部５２に通電される。これにより、スライド部４９がマグネット部５２に吸着され、アーチ支持板２３の頂部が固定板１４側に伸張した状態でロックされる。 Next, the lock process 69 is executed. Specifically, when the top portion of the lower leaf spring 22 extends toward the fixed plate 14, one end portion of the arch support plate 23 slidably attached slides toward the magnet portion 52 together with the slide portion 49. Approach. When the slide part 49 and the magnet part 52 are closest, the magnet part 52 is energized. Thereby, the slide part 49 is attracted | sucked to the magnet part 52, and it locks in the state which the top part of the arch support plate 23 extended to the stationary plate 14 side.
　次に、振動抑制工程７０を実行する。具体的には、固定板１４を下側板ばね２２と上側板ばね２２で上下から挟んで挟持した状態で、コントローラ３０からアクチュエータ２４へ電圧を印加して、載置台１２の振動を抑制させる。 Next, the vibration suppression process 70 is executed. Specifically, in a state where the fixed plate 14 is sandwiched between the lower plate spring 22 and the upper plate spring 22 from above and below, a voltage is applied from the controller 30 to the actuator 24 to suppress the vibration of the mounting table 12.
　このとき、印加電圧を、例えば、載置台１２から下側板ばね２２に伝播された振動と逆位相の振動をコントローラ３０で発生させ、アクチュエータ２４に出力する。載置台１２の振動と逆位相の振動を、アクチュエータ２４から、固定板１４を介して載置台１２に加えることにより、載置台１２の振動を短時間で抑制できる。 At this time, for example, the controller 30 generates a vibration having an opposite phase to the vibration transmitted from the mounting table 12 to the lower leaf spring 22 and outputs the applied voltage to the actuator 24. By applying vibration having a phase opposite to that of the mounting table 12 from the actuator 24 to the mounting table 12 via the fixed plate 14, the vibration of the mounting table 12 can be suppressed in a short time.
　次に、振動停止検出工程７１を実行する。具体的には、載置台１２の振動による歪が歪センサで検出されなくなったことを確認して、作業機器の移動が終了したと判断する。判断結果をコントローラ３０に出力する。 Next, the vibration stop detection step 71 is executed. Specifically, it is determined that the distortion due to the vibration of the mounting table 12 is no longer detected by the strain sensor, and it is determined that the movement of the work equipment is finished. The determination result is output to the controller 30.
　次に、ロック解除工程７２を実行する。即ち、コントローラ３０は、作業機器の移動の終了が入力されたとき、マグネット部５２への通電を停止し、下側板ばね２２のロックを解除する。 Next, the lock release step 72 is executed. That is, the controller 30 stops energization of the magnet unit 52 and unlocks the lower leaf spring 22 when the end of movement of the work device is input.
　最後に、変形解除工程７３を実行する。具体的には、コントローラ３０は、マグネット部５２への通電の停止と同時に、アクチュエータ２４への印加電圧を停止し、下側板ばね２２の変形を解除する。 Finally, the deformation release step 73 is executed. Specifically, the controller 30 stops the voltage applied to the actuator 24 at the same time as the energization of the magnet unit 52 is stopped, and releases the deformation of the lower leaf spring 22.
　以上説明したように、空気ばね３２で柔らかく支持されていた載置台１２を、載置台１２からの振動を検出して空気ばね３２に替えて、挟持部５４で固く支持する。これにより、載置された作業機器の移動に伴い発生する載置台１２の振動を抑制することができる。 As described above, the mounting table 12 softly supported by the air spring 32 is detected by the vibration from the mounting table 12 and replaced with the air spring 32 to be firmly supported by the holding portion 54. Thereby, the vibration of the mounting table 12 generated with the movement of the mounted work device can be suppressed.
　そして、作業機器類の移動の終了を検知して、挟持部５４での挟持を解除し、載置台１２を再び空気ばね３２で支持させる。
　これにより、作業機器が載置台１２の上を移動しても、載置台１２に生じる振動を効果的に抑制することができる。作業機器類が異なる方向に移動して作業をするときや、移動する距離が異なるときも、同じ考えで制御すればよい。 And the completion | finish of a movement of work equipments is detected, the clamping in the clamping part 54 is cancelled | released, and the mounting base 12 is again supported by the air spring 32. FIG.
Thereby, even if the work equipment moves on the mounting table 12, it is possible to effectively suppress the vibration generated on the mounting table 12. Control may be performed based on the same idea when the work equipment is moved in different directions to work or when the moving distance is different.
（第２の実施の形態）
第２の実施の形態に係る載置台の振動抑制装置８０は、上側板ばね７６にのみアクチュエータ２４を取り付けた構成である。
　即ち、図１２に示すように、固定板１４の中央部１４Ｃの両面に、上側板ばね７６と下側板ばね７７が配置されている。このとき、上側板ばね７６と下側板ばね７７の頂部は所定の距離Ｓだけ開けて配置され、上側板ばね７６にはアクチュエータ２４が取り付けられ、コントローラ３０とリード線２６で接続されている。下側板ばね７７には、アクチュエータ２４は取り付けていない。 (Second Embodiment)
The mounting table vibration suppressing device 80 according to the second embodiment has a configuration in which the actuator 24 is attached only to the upper leaf spring 76.
That is, as shown in FIG. 12, the upper leaf spring 76 and the lower leaf spring 77 are arranged on both surfaces of the central portion 14 </ b> C of the fixed plate 14. At this time, the top portions of the upper leaf spring 76 and the lower leaf spring 77 are arranged with a predetermined distance S therebetween. The actuator 24 is attached to the upper leaf spring 76 and is connected to the controller 30 by the lead wire 26. The actuator 24 is not attached to the lower leaf spring 77.
　これにより、載置台１２の振動がアクチュエータ２４に設けられたセンサで検出されたとき、コントローラ３０が印加電圧を出力する。電圧を印加されたアクチュエータ２４は、上側板ばね７６の頂部の曲率を変えて頂部を伸張させる。この結果、上側板ばね７６の頂部が矢印の方向（下側）に、所定の距離２Ｓより大きい距離ｈ３だけ移動する。これにより、上側板ばね７６と下側板ばね７７が、固定板１４の中央部１４Ｃを両面から挟むことができる。
　この結果、載置された作業機器の移動に伴い発生する載置台１２の振動を抑制することができる。 Thereby, when the vibration of the mounting table 12 is detected by the sensor provided in the actuator 24, the controller 30 outputs the applied voltage. The actuator 24 to which the voltage is applied changes the curvature of the top part of the upper leaf spring 76 and expands the top part. As a result, the top of the upper leaf spring 76 moves in the direction of the arrow (downward) by a distance h3 that is greater than the predetermined distance 2S. Thus, the upper leaf spring 76 and the lower leaf spring 77 can sandwich the central portion 14C of the fixed plate 14 from both sides.
As a result, it is possible to suppress the vibration of the mounting table 12 that occurs with the movement of the mounted work equipment.
　この構成は、載置台１２の重量が大きい場合や、予想される衝撃力が大きいときに、下側板ばね７７を頑強に構成することで対応できる長所を有する。
　他の部分の構成は、第１の実施の形態と同じであり説明は省略する。 This configuration has the advantage that the lower leaf spring 77 can be configured to be robust when the weight of the mounting table 12 is large or when the expected impact force is large.
The configuration of other parts is the same as that of the first embodiment, and the description thereof is omitted.
（第３の実施の形態）
第３の実施の形態に係る載置台の振動抑制装置８２は、上側板ばね７６及び下側板ばね２２の両方にアクチュエータ２４を取り付けた構成である。
　即ち、図１３の断面図に示すように、固定板１４中央部１４Ｃの両面に、上側板ばね７６と下側板ばね２２を配置した構成である。このとき、上側板ばね７６と下側板ばね７７の頂部は所定の距離Ｓだけ開けて配置され、上側板ばね７６と下側板ばね２２には、それぞれアクチュエータ２４が取り付けている。アクチュエータ２４は、それぞれのコントローラ３０とリード線２６で接続されており、アクチュエータ２４は、それぞれ独立して制御される。 (Third embodiment)
The mounting table vibration suppressing device 82 according to the third embodiment has a configuration in which the actuator 24 is attached to both the upper leaf spring 76 and the lower leaf spring 22.
That is, as shown in the cross-sectional view of FIG. 13, the upper plate spring 76 and the lower plate spring 22 are arranged on both surfaces of the central portion 14C of the fixed plate 14. At this time, the top portions of the upper leaf spring 76 and the lower leaf spring 77 are arranged with a predetermined distance S therebetween, and the actuator 24 is attached to each of the upper leaf spring 76 and the lower leaf spring 22. The actuators 24 are connected to the respective controllers 30 by lead wires 26, and the actuators 24 are controlled independently.
　これにより、上側板ばね７６と下側板ばね２２の両方を、それぞれに取り付けられたアクチュエータ２４で独立して制御し、頂部の曲率を変えて所定の距離Ｓより大きい距離ｈ５だけ、それぞれを移動させることができる。これにより、上側板ばね７６と下側板ばね２２で固定板１４の中央部１４Ｃを両面から挟むことができる。 As a result, both the upper leaf spring 76 and the lower leaf spring 22 are independently controlled by the actuators 24 attached to the upper leaf spring 76 and each of the upper leaf spring 76 and the lower leaf spring 22 is moved by a distance h5 larger than the predetermined distance S by changing the curvature of the top portion. be able to. Accordingly, the central portion 14 </ b> C of the fixed plate 14 can be sandwiched from both sides by the upper leaf spring 76 and the lower leaf spring 22.
　この結果、載置された作業機器の移動に伴い発生する載置台１２の振動を抑制することができる。
　この構成は、載置台１２に上下方向の移動が生じないため、載置台１２の高さ制御に、より高い精度が要求されるときに対応できる長所を有する。他の部分は、第１の実施の形態と同じであり、説明は省略する。 As a result, it is possible to suppress the vibration of the mounting table 12 that occurs with the movement of the mounted work equipment.
Since this configuration does not cause the mounting table 12 to move in the vertical direction, it has an advantage that can be used when higher accuracy is required for height control of the mounting table 12. Other parts are the same as those in the first embodiment, and a description thereof will be omitted.
（第４の実施の形態）
第４の実施の形態に係る載置台の振動抑制装置８４は、第３の実施の形態で説明した、上側板ばね及び７６下側板ばね２２の両方にアクチュエータ２４を取り付けた構成である。そして、２つのアクチュエータ２４を、１つのコントローラ３１で制御する。
　即ち、図１４に示すように、上側板ばね７６及び下側板ばね２２のアクチュエータ２４からのリード線２６を、いずれもコントローラ３１に接続している。ここに、リード線２６には、アクチュエータ２４に設けられたセンサからの出力信号用のリード線、及びアクチュエータ２４への制御電圧供給用のリード線のいずれも含まれている。 (Fourth embodiment)
The mounting table vibration suppressing device 84 according to the fourth embodiment has a configuration in which the actuator 24 is attached to both the upper plate spring and the 76 lower plate spring 22 described in the third embodiment. Two actuators 24 are controlled by one controller 31.
That is, as shown in FIG. 14, the lead wires 26 from the actuators 24 of the upper leaf spring 76 and the lower leaf spring 22 are both connected to the controller 31. Here, the lead wire 26 includes both a lead wire for an output signal from a sensor provided in the actuator 24 and a lead wire for supplying a control voltage to the actuator 24.
　これにより、上側板ばね７６及び下側板ばね２２のアクチュエータ２４に設けられたセンサからの形状情報が、コントローラ３１に入力される。また、コントローラ３１からの制御電圧を上側板ばね及び７６下側板ばね２２に印加させることができる。
　この結果、例えば、上側板ばね７６又は下側板ばね２２のセンサからの出力に対応させて、上側板ばね７６又は下側板ばね２２のアクチュエータ２４を変形させ、上側板ばね７６又は下側板ばね２２を移動させ、固定板１４を両面から挟むことができる。 As a result, the shape information from the sensors provided in the actuator 24 of the upper leaf spring 76 and the lower leaf spring 22 is input to the controller 31. Further, the control voltage from the controller 31 can be applied to the upper leaf spring and the 76 lower leaf spring 22.
As a result, for example, the actuator 24 of the upper leaf spring 76 or the lower leaf spring 22 is deformed in accordance with the output from the sensor of the upper leaf spring 76 or the lower leaf spring 22, and the upper leaf spring 76 or the lower leaf spring 22 is changed. The fixed plate 14 can be sandwiched from both sides by moving.
　更に、固定板１４を両面から挟んだ状態で、載置台１２から、下側板ばね２２に伝播された振動と逆位相の振動をコントローラ３０で発生させ、固定板１４を介して載置台１２に加えることにより、載置台１２の振動を短時間で抑制させることができる。 Further, with the fixed plate 14 sandwiched from both sides, the controller 30 generates a vibration having a phase opposite to that of the vibration transmitted to the lower leaf spring 22 from the mounting table 12 and applies the vibration to the mounting table 12 via the fixed plate 14. Thereby, the vibration of the mounting table 12 can be suppressed in a short time.
　具体的には、固定板１４を両面から挟んだ状態で、上側板ばね７６のアクチュエータ２４に設けられたセンサからの出力で、下側板ばね２２のアクチュエータ２４を制御することができる。即ち、固定板１４を両面から挟んだ状態で、載置台１２から上側板ばね７６に伝播された振動と逆位相の振動をコントローラ３０で発生させ、下側板ばね２２のアクチュエータ２４を制御し、固定板１４を介して載置台１２に加えることにより、載置台１２の振動を短時間で抑制させることができる。 Specifically, the actuator 24 of the lower leaf spring 22 can be controlled by the output from the sensor provided on the actuator 24 of the upper leaf spring 76 with the fixing plate 14 sandwiched from both sides. That is, with the fixed plate 14 sandwiched from both sides, the controller 30 generates a vibration having a phase opposite to that transmitted from the mounting table 12 to the upper leaf spring 76, and controls the actuator 24 of the lower leaf spring 22 to fix it. By adding to the mounting table 12 via the plate 14, the vibration of the mounting table 12 can be suppressed in a short time.
図１５に振動の伝達度合いを示す伝達率で効果を検証した結果を示す。ここに、横軸は周波数（Ｈｚ）であり、縦軸は伝達率（ｄＢ）である。
図１５において、破線で示す特性Ａは、振動を制御しない場合の伝達率であり、実線で示す特性Ｂは、本実施の形態で説明した制御を行った場合の伝達率である。結果から、本実施の形態で説明した制御を行った場合、振動数２０Ｈｚを中心とした共振点において、伝達率を約１５ｄＢから約５ｄＢまで、約１０５ｄＢ程度低減させることができることが分かる。 FIG. 15 shows the result of verifying the effect with the transmission rate indicating the degree of vibration transmission. Here, the horizontal axis represents frequency (Hz), and the vertical axis represents transmission rate (dB).
In FIG. 15, a characteristic A indicated by a broken line is a transmission rate when the vibration is not controlled, and a characteristic B indicated by a solid line is a transmission rate when the control described in the present embodiment is performed. From the results, it can be seen that when the control described in the present embodiment is performed, the transmissibility can be reduced by about 105 dB from about 15 dB to about 5 dB at a resonance point centered at a frequency of 20 Hz.
即ち、上側板ばね７６のアクチュエータ２４に設けられたセンサからの出力で、下側板ばね２２のアクチュエータ２４を制御することで、振動の伝達率を大きく低減させることができる。
　なお、他の構成として、下側板ばね２２のアクチュエータ２４に設けられたセンサからの出力で、上側板ばね７６のアクチュエータ２４を制御することもできる。この構成においても、上記と同様の効果を得ることができる。
　他の構成は、第１の実施の形態と同じであり、説明は省略する。 That is, by controlling the actuator 24 of the lower leaf spring 22 with the output from the sensor provided on the actuator 24 of the upper leaf spring 76, the vibration transmission rate can be greatly reduced.
As another configuration, the actuator 24 of the upper leaf spring 76 can be controlled by an output from a sensor provided in the actuator 24 of the lower leaf spring 22. Even in this configuration, the same effect as described above can be obtained.
Other configurations are the same as those of the first embodiment, and a description thereof will be omitted.
（第５の実施の形態）
第５の実施の形態に係る載置台の振動抑制装置６０は、固定板１４の中央部１４Ｃを挟んで、中央部１４Ｃの上下に上側板ばね２０と下側板ばね６２を、頂部の稜線を交差させて配置した構成である。
図１６の斜視図に示すように、下側板ばね６２は、第１の実施の形態における載置台の振動抑制装置１０における下側板ばね２２と異なり、取り付け方向を９０度回転させて、取付台１７に取り付けられている。即ち、上側板ばね２０と下側板ばね６２は、頂部の稜線が互いに直交している。 (Fifth embodiment)
The vibration suppressing device 60 for the mounting table according to the fifth embodiment has the upper leaf spring 20 and the lower leaf spring 62 crossing the upper and lower sides of the central portion 14C across the central portion 14C of the fixing plate 14, and intersects the ridge line of the top portion. It is the structure arranged.
As shown in the perspective view of FIG. 16, the lower leaf spring 62 is different from the lower leaf spring 22 in the vibration suppressing device 10 of the mounting table in the first embodiment by rotating the mounting direction by 90 degrees, Is attached. That is, the ridgelines at the top of the upper leaf spring 20 and the lower leaf spring 62 are orthogonal to each other.
　これにより、下側板ばね２２の配置の自由度が高くなる。また、挟持部５４の小型化が図れる。他の部分は、第１の実施の形態と同じであり、説明は省略する。 Thereby, the degree of freedom of arrangement of the lower leaf spring 22 is increased. Further, the holding portion 54 can be reduced in size. Other parts are the same as those in the first embodiment, and a description thereof will be omitted.
　１０　載置台の振動抑制装置
　１２　ステージ（載置台）
　１４　固定板（固定部材）
　１６　架台
　２０　上側板ばね（挟持手段）
　２２　下側板ばね（挟持手段）
　２３　アーチ支持板（アーチ部材）
　２４　アクチュエータ（膜型圧電素子）
　２７　センサ（センシング手段、膜型圧電素子）
　３０　コントローラ（制御手段）
　３２　空気ばね（振動吸収手段）
　５４　挟持部（挟持手段）
　５６　ロック部（ロック手段）
　６４　受け材（受け部材） 10 Placement table vibration suppression device 12 Stage (mounting stage)
14 Fixing plate (fixing member)
16 Base 20 Upper leaf spring (clamping means)
22 Lower leaf spring (clamping means)
23 Arch support plate (arch member)
24 Actuator (membrane type piezoelectric element)
27 Sensor (Sensing means, membrane-type piezoelectric element)
30 controller (control means)
32 Air spring (vibration absorbing means)
54 Clamping part (Clamping means)
56 Locking part (locking means)
64 Receiving material (receiving member)

Claims (9)

  1. 　機器類が載せられ振動吸収手段によって架台に支持された載置台に固定された固定部材と、
    　前記固定部材の両面と所定の隙間を開けて前記架台に設けられ、前記固定部材に向かって移動し、前記固定部材を両面から挟んで前記載置台を支持する挟持手段と、
    　前記載置台の振動を検知して信号を出力するセンシング手段と、
    　前記センシング手段からの前記信号に基づき、前記挟持手段を移動させる制御手段と、
    　を有する載置台の振動抑制装置。     A fixed member fixed to a mounting table on which equipment is mounted and supported by the frame by vibration absorbing means;
    A clamping means that is provided on the frame with a predetermined gap from both surfaces of the fixing member, moves toward the fixing member, and sandwiches the fixing member from both surfaces to support the mounting table;
    Sensing means for detecting vibration of the table and outputting a signal;
    Control means for moving the clamping means based on the signal from the sensing means;
    A vibration suppressing device for a mounting table.
  2. 　前記挟持手段は、前記固定部材の両面に頂部が対向するように配置されたアーチ部材と、
    　前記アーチ部材に設けられ、前記アーチ部材の曲率を変えて前記頂部を前記固定部材側に移動させるアクチュエータと、
    　を有する請求項１に記載の載置台の振動抑制装置。     The clamping means includes an arch member arranged so that the tops thereof face both surfaces of the fixing member;
    An actuator that is provided on the arch member and moves the top to the fixed member side by changing the curvature of the arch member;
    The vibration suppressing device for a mounting table according to claim 1, comprising:
  3. 　前記アクチュエータは、前記アーチ部材に接合され、印加電圧に基づいて伸縮する膜型圧電素子である請求項２に記載の載置台の振動抑制装置。 3. The vibration suppression device for a mounting table according to claim 2, wherein the actuator is a film-type piezoelectric element that is bonded to the arch member and expands and contracts based on an applied voltage.
  4. 　前記頂部に支持され、前記膜型圧電素子の上方に架け渡された受け部材が前記固定部材を支持する請求項３に記載の載置台の振動抑制装置。 4. The vibration suppressing device for a mounting table according to claim 3, wherein a receiving member supported on the top and bridged above the film-type piezoelectric element supports the fixing member.
  5. 　前記アーチ部材の端部は、前記架台にスライド可能に取り付けられ、前記架台には前記端部をロックするロック手段が設けられている請求項２～４のいずれか１項に記載の載置台の振動抑制装置。 The mounting table according to any one of claims 2 to 4, wherein an end portion of the arch member is slidably attached to the gantry, and the gantry is provided with a locking unit that locks the end portion. Vibration suppression device.
  6. 　前記アーチ部材は、鋼板を湾曲させて形成されたアーチ支持板であり、前記固定部材の上側に配置された前記アーチ支持板の頂部の稜線と、下側に配置された前記アーチ支持板の頂部の稜線が直交している請求項２～５のいずれか１項に記載の載置台の振動抑制装置。 The arch member is an arch support plate formed by bending a steel plate, the ridge line of the top portion of the arch support plate disposed on the upper side of the fixing member, and the top portion of the arch support plate disposed on the lower side The mounting table vibration suppressing device according to any one of claims 2 to 5, wherein the ridge lines are orthogonal to each other.
  7. 　前記センシング手段は、前記固定部材の振動で前記アーチ部材が変形され歪が発生したとき、前記歪を検知して電圧を発生させるセンシング用の膜型圧電素子、又はセンシング機能とアクチュエータ機能を合わせ持つ膜型圧電素子であり、
    　前記制御手段は、前記固定部材の振動と逆位相の振動を前記アーチ部材から前記固定部材に加えるよう、前記膜型圧電素子への印加電圧を制御する請求項３～６のいずれか１項に記載の載置台の振動抑制装置。     The sensing means has a sensing film type piezoelectric element that detects the strain and generates a voltage when the arch member is deformed due to deformation of the fixing member, or has a sensing function and an actuator function. A membrane-type piezoelectric element,
    The control unit according to any one of claims 3 to 6, wherein the control unit controls a voltage applied to the film-type piezoelectric element so as to apply a vibration having a phase opposite to that of the fixing member from the arch member to the fixing member. The vibration suppression apparatus of the mounting table as described.
  8. 　前記センシング手段及び前記アクチュエータが、前記固定部材の上側又は下側のアーチ部材の少なくともいずれか一方に設けられている請求項２～７のいずれか１項に記載の載置台の振動抑制装置。 The mounting table vibration suppressing device according to any one of claims 2 to 7, wherein the sensing means and the actuator are provided on at least one of an upper arch member and a lower arch member of the fixing member.
  9. 　センシング手段により、機器類が載せられ振動吸収手段によって架台に支持された載置台の振動を検出して信号を発生させる振動検出工程と、
    　前記載置台に固定された固定部材の両面に所定の隙間を開けて配置されたアーチ部材の曲率を変え、前記頂部を前記固定部材側に移動させるアクチュエータに、前記信号に基づいて、制御手段により電圧を印加する電圧出力工程と、
    　印加した前記電圧により、アーチ部材の前記頂部を前記固定部材側に移動させ、前記固定部材を両面から挟んで前記載置台を支持する挟持工程と、
    　前記頂部が前記固定部材側に移動したとき、前記架台にスライド可能に取り付けられたアーチ部材の端部を、前記架台に取り付けられたロック手段でロックするロック工程と、
    　前記固定部材を前記アーチ部材で支持した状態で、前記アクチュエータへの印加電圧を変化させ、前記載置台に前記振動と逆位相の振動を加える振動抑制工程と、
    　を有する載置台の振動抑制方法。     A vibration detecting step for detecting a vibration of a mounting table on which equipment is mounted by the sensing means and supported by the gantry by the vibration absorbing means, and generating a signal;
    Based on the signal, the control means changes the curvature of the arch member arranged with a predetermined gap on both surfaces of the fixing member fixed to the mounting table and moves the top to the fixing member side. A voltage output step of applying a voltage;
    A clamping step of supporting the mounting table by moving the top of the arch member to the fixing member side by the applied voltage and sandwiching the fixing member from both sides;
    A locking step of locking an end portion of the arch member slidably attached to the gantry with a locking means attached to the gantry when the top portion moves to the fixing member side;
    In a state where the fixing member is supported by the arch member, a voltage suppression step of changing a voltage applied to the actuator and applying a vibration having a phase opposite to the vibration to the mounting table,
    A method for suppressing vibration of the mounting table.
PCT/JP2011/063179 2010-06-09 2011-06-08 Mounting table vibration suppression device, and mounting table vibration suppression method WO2011155544A1 (en)

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DE102013215701A1 (en) * 2013-08-08 2015-02-12 Siemens Aktiengesellschaft Electric machine with superconducting rotor coil and supporting device
JP6393514B2 (en) * 2014-04-30 2018-09-19 株式会社竹中工務店 Displacement suppression device
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