WO2011133014A1 - Planar micropump with integrated microvalves - Google Patents

Planar micropump with integrated microvalves Download PDF

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Publication number
WO2011133014A1
WO2011133014A1 PCT/MY2010/000254 MY2010000254W WO2011133014A1 WO 2011133014 A1 WO2011133014 A1 WO 2011133014A1 MY 2010000254 W MY2010000254 W MY 2010000254W WO 2011133014 A1 WO2011133014 A1 WO 2011133014A1
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WO
WIPO (PCT)
Prior art keywords
micropump
microvalve
fluid
flow
inlet
Prior art date
Application number
PCT/MY2010/000254
Other languages
French (fr)
Inventor
Hing Wah Lee
Bien Chia Sheng Daniel
Syono Mohd. Ismahadi
Buyong Muhd. Ramdzan
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Publication of WO2011133014A1 publication Critical patent/WO2011133014A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502738—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by integrated valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0005—Lift valves
    • F16K99/0007—Lift valves of cantilever type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0051—Electric operating means therefor using electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
    • B01L2200/16—Reagents, handling or storing thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0861—Configuration of multiple channels and/or chambers in a single devices
    • B01L2300/0867—Multiple inlets and one sample wells, e.g. mixing, dilution
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
    • B01L2400/0481—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure squeezing of channels or chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/06—Valves, specific forms thereof
    • B01L2400/0633—Valves, specific forms thereof with moving parts
    • B01L2400/0638—Valves, specific forms thereof with moving parts membrane valves, flap valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0094—Micropumps

Definitions

  • the present invention relates generally to a planar micropump with integrated microvalves which is capable of efficiently controlling fluid flow in a miniaturised chemical analyser system to maintain isolation of chemical fluids until the appropriate time for mixing.
  • Microvalves that are required to control the flow in and out of the pump are a vital part of the micropump. This is because when fluids are not isolated but allowed to mix at an inappropriate time the result of the chemical analysis will be affected.
  • the trend today is to miniaturised microfluidic systems.
  • a miniaturised microfluidic system requires the means of introducing sample, reagent and buffer solutions while maintaining isolation between chemicals until appropriate times. This necessitates the fabrication of microchannels, microvalves and micropumps.
  • a typical stack micromechanical pump with a set of inlet-outlet valves, a pressure chamber, flexible diaphragm and an actuator requires complex alignment and processing in multiple substrate surfaces which is a barrier to further miniaturisation of the overall system.
  • valves are fabricated in-plane with the channels on the same substrate surface; hence it eases fabrication and alignment complexities.
  • the planar type pump is capable of eliminating fluid leakage or back flow issue that is prevalent in conventional models.
  • Yet a further object of the present invention is to provide a planar micropump with integrated microvalves which eases fabrication and alignment complexities as the microvalves and microchannels are on the same substrate surface.
  • Yet another object of the present invention is to provide a planar micropump with integrated microvalves having the ability to perform multiple different assays leading to reduced cost per assay.
  • a micropump (2) to control fluid flow comprising, at least a pump chamber (8); at least a fluid inlet port (4); at least a fluid inlet microchannel (6) to direct flow of fluids; at least a fluid outlet port (14); characterised in that said pump chamber (8) is integrated with active microvalves (10).
  • FIG. 1 is a schematic diagram of a micropump to control fluid flow for use chemical analysis integrated with microvalves.
  • FIGS. 2-A shows a sectional view of the micropump illustrating the deflection of the diaphragm of the pump in relation to the microvalves when in operation mode.
  • FIG. 2-B shows fluid flow in the pump chamber during deflection of the diaphragm shown in FIG. 2-A.
  • FIG. 3 is a view of one embodiment of the micropump with the active microvalve being provided to electrostatic parallel electrode actuators.
  • FIG. 4 is a view of another embodiment of the micropump with the active microvalve being electrostatic curved electrode actuators.
  • FIGS. 1, 2-A and 2-B there are respectively shown a micropump (2) to control fluid flow for use in chemical analysis provided with integrated microvalves (10), a sectional view of the micropump illustrating the diaphragm of the pump in relation to the microvalves when in operation mode and fluid flow in the pump chamber during deflection of the diaphragm shown in FIG. 2-A.
  • the said micropump (2) illustrated in FIG. 1 comprises at least a fluid inlet port (4), at least a fluid inlet microchannel (6), at least a pump chamber (8) integrated with at least an active microvalve (10), at least a fluid exit microchannel (12) and an fluid outlet port (14).
  • a generalised chemical analysis procedure requires the flow of liquid sample and chemical reagents to one or more testing points. Subsequent flushing with buffer solutions or treatment with additional reagents may be required. The reaction occurring at the test unit can be quantified by measuring the changes in mass, chemical properties or colour.
  • a miniaturised system thus requires a means of inducing sample, reagent and buffer as well as maintaining isolation between the chemicals until appropriate times. This necessitates the fabrication of microchannels, microvalves and micropumps. Fluid such as fluid samples buffer or chemical reagents for chemical analysis procedure are stored in the fluid inlet port (4).
  • the microvalves (10) are fabricated on the same substrate (22) surface as the fluid inlet microchannels (6) and this greatly eases fabrication and alignment complexities as both are on the same substrate surface and not set in different planes.
  • the normally open microvalves (10) are controlled by electro-thermal or electro-static actuation requiring minimal actuation voltage as low as below 5 volts (V) thereby saving energy.
  • the pump diaphragm (11) as illustrated in FIG. 2-A will be actuated to allow fluid from the fluid inlet port (4) to be drawn into the fluid inlet microchannel (6) connected to the pump chamber (8) and then into the pump chamber (8).
  • the pump diaphragm (11) can typically be driven by electrostatic, thermo- pneumatic, piezoelectric, bimetallic and shape-memory type actuation. The working principle of the pump can be described as a process cycle.
  • the inlet microvalve (10A) When the diaphragm (11) deflects downwards, the inlet microvalve (10A) is actuated to close and outlet microvalve (10B) is actuated to open causing fluid to exit from the pump chamber (8) through the outlet microvalve (10B) as shown by the arrows illustrated in FIGS. 2-A and 2-B while the inlet microvalve (10A) blocks tl e back-flow of fluid into tlie fluid inlet microchannel (6).
  • outlet microvalve (10B) When the diaphragm (11) relaxes to its initial or original position the opposite will occur that is the outlet microvalve (10B) is actuated to close and inlet microvalve (10A) is actuated to open causing fluid to flow through the inlet microvalve (10A) filling up the pump chamber (8) with fluid while at the same time the outlet microvalve (10B) will block the back-flow from the fluid outlet microchannel (12) into tlie pump chamber (8).
  • the simultaneous closing and opening of the outlet microvalve (10B) and inlet microvalve (10A) respectively and vice versa ensures isolation of fluids so that different fluids do not mix when not required to.
  • the micropump (2) is designed to ease fabrication complexities where only a single substrate is required and is capable of further miniaturisation for nanofluidic applications. It is capable of Hmiting fluid leakage or back flow issues as when inlet microvalve (10A) is opened the outlet microvalve (10B) is simultaneously closed and vice versa thus not giving an opportunity for such instances to occur.
  • Electrostatic actuation is very attractive for micro-electromechanical systems (MEMs) because of good scaling properties to small dimensions, high energy densities and its relative ease of fabrication. Electrostatic actuation is utilized in this invention to control the opening and closing of microvalves.
  • One embodiment of the micropump (2) has the said active microvalve (10) being actuated using electrostatic parallel electrode actuators (16A) wherein the said electrode (16A) is parallel to the microvalve (10) and therefore has a consistent gap distance (20A) between the microvalve (10) and the said parallel electrode (16A) as illustrated in FIG.
  • micropump (2) has the said active microvalve (10) being actuated using electrostatic curved electrode actuators (16B) wherein the said electrode (1613) is curved in relation to the microvalve (10) and therefore has a gap distance (20B) that gradually increases towards the point of maximum displacement as illustrated in FIG. 4.
  • electrostatic electrode actuators large displacement and large forces can be realized and hence able to save energy thus the microvalves (10) can be operated at less than 5V.
  • the fluid that exits from the pump chamber (8) into the fluid exit microchannel (12) will be channelled into the fluid outlet port (14) for collection.
  • micropump (2) and microvalve (10) can be fabricated on various types of substrates and materials, namely, silicon, polysilicon, silicon on insulator, glass, plastic, metal or polymer by surface machining or bulk machining or a combination of both techniques.
  • inlet microvalve (10A) and only one outlet microvalve (10B) have been described and illustrated it is to be understood that the number of inlet microvalves and outlet microvalves may be more than one, as what is advantageous is the effective isolation of fluids until an appropriate time where mixing is required.
  • the overall invention is designed to ease fabrication complexities where only a single substrate is required and is capable of further miniaturisation for nanofluidic applications.
  • the planar design wherein the said micropump (2) with integrated active microvalves (10) are fabricated utilising CMOS-compatible surface micromachining fabrication process flow which presents the possibility of mass production, integration with other electronics and cost reductions.
  • the complete integrated form of such systems is more commonly known as laboratory- on-a-chip (LOC) or a micro-total-analysis-system ( ⁇ 8) wherein the whole device or system is integrated and fabricated in-plane on a single substrate (or the same wafer) thereby allowing total analysis (sample preparation, pre-treatment, analytical reactions, detection, and results) to be combined in a single device or chip. It can be extended into the field of environmental monitoring apphcations in the area of sensors for detection of ah and water pollution.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Clinical Laboratory Science (AREA)
  • Hematology (AREA)
  • General Health & Medical Sciences (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Reciprocating Pumps (AREA)

Abstract

The present invention relates generally to a planar micropump (2) with integrated microvalves (10) which is capable of efficiently controlling fluid flow in a miniaturised chemical analyser system to maintain isolation of chemical fluids until the appropriate time for mixing.

Description

PLANAR MICROPUMP WITH INTEGRATED MICROVALVES
TECHNICAL FIELD OF THE INVENTION
The present invention relates generally to a planar micropump with integrated microvalves which is capable of efficiently controlling fluid flow in a miniaturised chemical analyser system to maintain isolation of chemical fluids until the appropriate time for mixing.
BACKGROUND OF THE INVENTION
Microvalves that are required to control the flow in and out of the pump are a vital part of the micropump. This is because when fluids are not isolated but allowed to mix at an inappropriate time the result of the chemical analysis will be affected. The trend today is to miniaturised microfluidic systems. A miniaturised microfluidic system requires the means of introducing sample, reagent and buffer solutions while maintaining isolation between chemicals until appropriate times. This necessitates the fabrication of microchannels, microvalves and micropumps. A typical stack micromechanical pump with a set of inlet-outlet valves, a pressure chamber, flexible diaphragm and an actuator, requires complex alignment and processing in multiple substrate surfaces which is a barrier to further miniaturisation of the overall system.
Until today, typical planar type micropumps have been fabricated with passive nozzle-diffuser type valves which have an issue of large leakage flow or a series of active pump-valve system which is typically large in dimensions and thus does not facilitate miniaturisation.
It would hence be extremely advantageous if the above shortcoming is overcome by having a novel planar type micropump with integrated active valves capable of facilitating miniaturisation. The valves are fabricated in-plane with the channels on the same substrate surface; hence it eases fabrication and alignment complexities. With the integration of valves the planar type pump is capable of eliminating fluid leakage or back flow issue that is prevalent in conventional models. SUMMARY OF THE INVENTION
Accordingly, it is the primary aim of the present invention to provide a planar micropump with integrated microvalves wherein the whole device or system is integrated and fabricated in-plane on a single substrate (or the same wafer) thereby allowing total analysis, (sample preparation, pre- treatment, analytical reactions, detection, and results) to be combined in a single device or chip.
Yet a further object of the present invention is to provide a planar micropump with integrated microvalves which eases fabrication and alignment complexities as the microvalves and microchannels are on the same substrate surface.
It is yet another object of the present invention to provide a planar micropump with integrated microvalves which is capable of eliminating fluid leakage and back-flow problems.
It is yet another object of the present invention to provide a planar micropump with integrated microvalves which saves energy as the micropump and micro valves can be driven electrostatically requiring minimal actuation voltage as low as below 5 volts (V). It is yet another object of the present invention to provide a planar micropump with integrated microvalves which facilitates portability of the overall system thereby allowing analysis to be performed close to the sample source. Yet a further object of the present invention is to provide a planar micropump with integrated microvalves which encourages or facilitates miniaturization to greatly reduce the volume of chemicals involved, typically to the microlitre and nanolitre ranges, promotes low chemical consumption and affords a speedy response time. It is a further object of the present invention to provide a planar micropump with integrated microvalves which is applicable for microfluidic applications typically in the areas of drug delivery, agriculture, environmental monitoring and micro-analyser systems.
Yet another object of the present invention is to provide a planar micropump with integrated microvalves having the ability to perform multiple different assays leading to reduced cost per assay.
Other and further objects of the invention will become apparent with an understanding of the following detailed description of the invention or upon employment of the invention in practice. According to a preferred embodiment of the present invention there is provided,
A micropump (2) to control fluid flow comprising, at least a pump chamber (8); at least a fluid inlet port (4); at least a fluid inlet microchannel (6) to direct flow of fluids; at least a fluid outlet port (14); characterised in that said pump chamber (8) is integrated with active microvalves (10).
BRIEF DESCRIPTION OF THE DRAWINGS
Other aspect of the present invention and their advantages will be discerned after studying the Detailed Description in conjunction with the accompanying drawings in which: FIG. 1 is a schematic diagram of a micropump to control fluid flow for use chemical analysis integrated with microvalves.
FIGS. 2-A shows a sectional view of the micropump illustrating the deflection of the diaphragm of the pump in relation to the microvalves when in operation mode.
FIG. 2-B shows fluid flow in the pump chamber during deflection of the diaphragm shown in FIG. 2-A.
FIG. 3 is a view of one embodiment of the micropump with the active microvalve being provided to electrostatic parallel electrode actuators.
FIG. 4 is a view of another embodiment of the micropump with the active microvalve being electrostatic curved electrode actuators.
5. DETAILED DESCRIPTION OF THE DRAWINGS
In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the invention. However, it will be understood by those of ordinary skill in the art that the invention may be practised without these specific details. In other instances, well known methods, procedures and/ or components have not been described in detail so as not to obscure the invention.
The invention will be more clearly understood from the following description of the embodiments thereof, given by way of example only with reference to the accompanying drawings, which are not drawn to scale.
Referring now to FIGS. 1, 2-A and 2-B, there are respectively shown a micropump (2) to control fluid flow for use in chemical analysis provided with integrated microvalves (10), a sectional view of the micropump illustrating the diaphragm of the pump in relation to the microvalves when in operation mode and fluid flow in the pump chamber during deflection of the diaphragm shown in FIG. 2-A. The said micropump (2) illustrated in FIG. 1 comprises at least a fluid inlet port (4), at least a fluid inlet microchannel (6), at least a pump chamber (8) integrated with at least an active microvalve (10), at least a fluid exit microchannel (12) and an fluid outlet port (14). A generalised chemical analysis procedure requires the flow of liquid sample and chemical reagents to one or more testing points. Subsequent flushing with buffer solutions or treatment with additional reagents may be required. The reaction occurring at the test unit can be quantified by measuring the changes in mass, chemical properties or colour. A miniaturised system thus requires a means of inducing sample, reagent and buffer as well as maintaining isolation between the chemicals until appropriate times. This necessitates the fabrication of microchannels, microvalves and micropumps. Fluid such as fluid samples buffer or chemical reagents for chemical analysis procedure are stored in the fluid inlet port (4). The passage of fluid that is directed through the said fluid inlet microchannel (6) to the pump chamber (8) where the active valves or microvalves (10) are integrated therein the pump chamber (8). The microvalves (10) are fabricated on the same substrate (22) surface as the fluid inlet microchannels (6) and this greatly eases fabrication and alignment complexities as both are on the same substrate surface and not set in different planes. The normally open microvalves (10) are controlled by electro-thermal or electro-static actuation requiring minimal actuation voltage as low as below 5 volts (V) thereby saving energy.
When the micropump (2) operates, the pump diaphragm (11) as illustrated in FIG. 2-A will be actuated to allow fluid from the fluid inlet port (4) to be drawn into the fluid inlet microchannel (6) connected to the pump chamber (8) and then into the pump chamber (8). The pump diaphragm (11) can typically be driven by electrostatic, thermo- pneumatic, piezoelectric, bimetallic and shape-memory type actuation. The working principle of the pump can be described as a process cycle. When the diaphragm (11) deflects downwards, the inlet microvalve (10A) is actuated to close and outlet microvalve (10B) is actuated to open causing fluid to exit from the pump chamber (8) through the outlet microvalve (10B) as shown by the arrows illustrated in FIGS. 2-A and 2-B while the inlet microvalve (10A) blocks tl e back-flow of fluid into tlie fluid inlet microchannel (6). When the diaphragm (11) relaxes to its initial or original position the opposite will occur that is the outlet microvalve (10B) is actuated to close and inlet microvalve (10A) is actuated to open causing fluid to flow through the inlet microvalve (10A) filling up the pump chamber (8) with fluid while at the same time the outlet microvalve (10B) will block the back-flow from the fluid outlet microchannel (12) into tlie pump chamber (8). The simultaneous closing and opening of the outlet microvalve (10B) and inlet microvalve (10A) respectively and vice versa ensures isolation of fluids so that different fluids do not mix when not required to.
The micropump (2) is designed to ease fabrication complexities where only a single substrate is required and is capable of further miniaturisation for nanofluidic applications. It is capable of Hmiting fluid leakage or back flow issues as when inlet microvalve (10A) is opened the outlet microvalve (10B) is simultaneously closed and vice versa thus not giving an opportunity for such instances to occur.
Electrostatic actuation is very attractive for micro-electromechanical systems (MEMs) because of good scaling properties to small dimensions, high energy densities and its relative ease of fabrication. Electrostatic actuation is utilized in this invention to control the opening and closing of microvalves. One embodiment of the micropump (2) has the said active microvalve (10) being actuated using electrostatic parallel electrode actuators (16A) wherein the said electrode (16A) is parallel to the microvalve (10) and therefore has a consistent gap distance (20A) between the microvalve (10) and the said parallel electrode (16A) as illustrated in FIG. 3 and another embodiment of the micropump (2) has the said active microvalve (10) being actuated using electrostatic curved electrode actuators (16B) wherein the said electrode (1613) is curved in relation to the microvalve (10) and therefore has a gap distance (20B) that gradually increases towards the point of maximum displacement as illustrated in FIG. 4. By employing these electrostatic electrode actuators large displacement and large forces can be realized and hence able to save energy thus the microvalves (10) can be operated at less than 5V. The fluid that exits from the pump chamber (8) into the fluid exit microchannel (12) will be channelled into the fluid outlet port (14) for collection.
The micropump (2) and microvalve (10) can be fabricated on various types of substrates and materials, namely, silicon, polysilicon, silicon on insulator, glass, plastic, metal or polymer by surface machining or bulk machining or a combination of both techniques.
Although only one inlet microvalve (10A) and only one outlet microvalve (10B) have been described and illustrated it is to be understood that the number of inlet microvalves and outlet microvalves may be more than one, as what is advantageous is the effective isolation of fluids until an appropriate time where mixing is required.
The overall invention is designed to ease fabrication complexities where only a single substrate is required and is capable of further miniaturisation for nanofluidic applications. The planar design wherein the said micropump (2) with integrated active microvalves (10) are fabricated utilising CMOS-compatible surface micromachining fabrication process flow which presents the possibility of mass production, integration with other electronics and cost reductions. The complete integrated form of such systems is more commonly known as laboratory- on-a-chip (LOC) or a micro-total-analysis-system ( ΤΑ8) wherein the whole device or system is integrated and fabricated in-plane on a single substrate (or the same wafer) thereby allowing total analysis (sample preparation, pre-treatment, analytical reactions, detection, and results) to be combined in a single device or chip. It can be extended into the field of environmental monitoring apphcations in the area of sensors for detection of ah and water pollution.
While the preferred embodiment of the present invention and its advantages has been disclosed in the above Detailed Description, the invention is not limited tliereto but only by the spirit and scope of the appended claim.

Claims

WHAT IS CLAIMED IS:
1. A micropump (2) to control fluid flow comprising, at least a pump chamber (8); at least a fluid inlet port (4); at least a fluid inlet microchannel (6) to direct flow of fluids; at least a fluid outlet port (14); characterised in that said pump chamber (8) is integrated with active microvalves (10).
2. A micropump (2) to control fluid flow as in Claim 1 further characterised in that all devices or system are fabricated in-plane on a single substrate.
3. A micropump (2) to control fluid flow as in Claim 2 wherein the substrate is made of silicon, polysilicon, silicon on insulator, glass, plastic, metal or polymer by surface machining or bulk machining or a combination of both techniques. A micropump (2) to control fluid flow as in Claim 1, 2 or 3 wherein the said micropump (2) with integrated active microvalves (10) are fabricated using CMOS-compatible surface micromachining.
A micropump (2) to control fluid flow as in Claim 1 or 2 wherein the microvalve (10) is actuated by electrostatic parallel electrode actuators.
A micropump (2) to control fluid flow as in Claim 1 or 2 wherein the microvalve (10) is actuated by electrostatic curved electrode actuators.
A micropump (2) to control fluid flow as in Claim 1 or 2 for use in chemical analysis.
A micropump (2) to control fluid flow as in Claim 1 or 2 which is applicable to the field of environmental monitoring applications in the area of sensors for detection of air and water pollution.
A method of controlling the flow of fluid in a micropump (2) comprising steps of, deflecting the pump diaphragm downwards, actuating the inlet microvalve (10A) to close while simultaneously actuating tl e outlet microvalve (1013) to open using electrostatic electrodes; causing fluid to exit from the pump chamber (8) through tlie outlet microvalve (10B) while tlie inlet microvalve blocks the back-flow of fluid into the fluid inlet microchaimel (6); relaxing the pump diaphragm to its initial or original position; actuating the outlet microvalve (10B) to close while simultaneously actuating the inlet microvalve (10A) to open using electrostatic electrodes; causing fluid to flow through the inlet microvalve (10A) filling up the pump chamber (8) while tlie closed outlet microvalve (10B) blocks the back-flow of fluid from the outlet microchannel (12) into the pump chamber (8); collecting fluid in the fluid outlet port (14).
PCT/MY2010/000254 2010-04-19 2010-11-08 Planar micropump with integrated microvalves WO2011133014A1 (en)

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WO2013066145A1 (en) * 2011-11-01 2013-05-10 Mimos Berhad A microfluidic system and method thereof
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CN106334589A (en) * 2016-10-13 2017-01-18 中国石油大学(华东) Micro-fluidic chip simulating organic solvent pollution in underground water system
CN110073196A (en) * 2017-12-11 2019-07-30 霍尼韦尔国际公司 Micro-optical particulate matter sensors module

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