WO2011064505A1 - System for the optical analysis of a sample comprising a laser pump-probe source - Google Patents

System for the optical analysis of a sample comprising a laser pump-probe source Download PDF

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Publication number
WO2011064505A1
WO2011064505A1 PCT/FR2010/052532 FR2010052532W WO2011064505A1 WO 2011064505 A1 WO2011064505 A1 WO 2011064505A1 FR 2010052532 W FR2010052532 W FR 2010052532W WO 2011064505 A1 WO2011064505 A1 WO 2011064505A1
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WO
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Prior art keywords
sample
analysis
imager
analysis system
optical analysis
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PCT/FR2010/052532
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French (fr)
Inventor
Thomas Pezeril
Keith Adam Nelson
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Centre National De La Recherche Scientifique (C.N.R.S)
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Publication of WO2011064505A1 publication Critical patent/WO2011064505A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/178—Methods for obtaining spatial resolution of the property being measured

Definitions

  • Optical analysis system of a sample comprising a laser pump-probe source
  • the present invention relates to a system for optical analysis of a sample. More particularly, the invention relates to such a system which comprises a laser pump-probe source modulated sample analysis, adapted to deliver from the sample, on the one hand a reference signal and on the other hand, an analysis signal of the latter and means for analyzing these signals to deliver a response information of the sample.
  • a laser pump-probe source modulated sample analysis adapted to deliver from the sample, on the one hand a reference signal and on the other hand, an analysis signal of the latter and means for analyzing these signals to deliver a response information of the sample.
  • Modulated laser pump-probe sources of analysis are already well known in the state of the art and such analysis systems are used to study ultra-fast and dynamic phenomena by using photodiodes associated with synchronous detection systems enabling removing most of the unwanted noise and thus allowing extremely low signal detection.
  • the object of the invention is therefore to solve these problems.
  • the subject of the invention is an optical analysis system of a sample of the type comprising a modulated laser sample pump-probe source, adapted to deliver from the sample, a part of a reference signal and secondly an analysis signal thereof and means for analyzing these signals to deliver a response information of the sample, characterized in that the source comprises generating means from a single probe beam, two out of phase derivative probe beams, one of which is intended to form the reference signal and the other of which is intended to interact with the pump beam at the sample level , to deliver the analysis signal of the sample and in that the analysis means comprise matrix imager means of the reference and analysis signals for delivering corresponding images of these signals to means for processing these samples. pictures p to extract an image of the sample response.
  • the optical analysis system comprises one of the following features:
  • the source comprises means for amplitude modulation of the laser pump beam before it is applied to the sample
  • the source comprises means for optical demultiplexing of the probe beam issuing from the sample, in reference and sample analysis signals, the matrix imager means are formed by two different imagers, the matrix imager means are formed by two distinct areas of the same imager,
  • the matrix imager is a CCD imager
  • the matrix imager is a CMOS imager
  • the image processing means furthermore comprise means for subtracting the reference image from the analysis image.
  • FIG. 1 represents a block diagram illustrating the structure and operation of an analysis system according to the invention
  • FIG. 2 illustrates various images obtained by means of an analysis system according to the invention.
  • an optical analysis system of a sample designated by the general reference 1 has been illustrated, this system comprising a modulated laser pump-probe source for analyzing the sample. , this source being designated by the general reference 2 in this figure.
  • This source uses a laser probe beam and a laser pump beam after passing through optical amplitude modulation means of this beam designated by the general reference 3a in this figure.
  • the source also comprises means for generating from a single probe beam, two shifted / out of phase derivative probe beams one of which is intended to form the reference signal and the other of which is intended to interact with the pump beam at the sample level, to deliver the analysis signal of the sample.
  • These generation means are designated by the general reference 3b in this Figure 1 and output a reference signal SR and an analysis signal SA.
  • these generation means may be formed by dividing means and / or optical delay means for generating the two reference and analysis signals from a single probe signal.
  • Synchronization can be provided between the modulation means 3a and the generation means 3b.
  • This source also comprises means designated by the general reference 4 of optical demultiplexing of the beam from the sample into reference signals and analysis of the sample.
  • the system according to the invention also comprises means for analyzing these signals to deliver a response information of the sample.
  • These analysis means are designated by the general reference 5 in this FIG. 1 and in fact comprise matrix imager means of the reference and analysis signals for delivering corresponding images of these signals to means for processing these images for extract an image from the sample response.
  • the matrix imager means are in fact designated by the general reference 6 for the means intended to form an image of the analysis signal of the sample and 7 for the means intended to form an image of the reference signal.
  • imager means then deliver corresponding images designated respectively image 1 and image 2, image analysis means designated by the general reference 8 which are adapted to process them in order to extract an image of the response of the sample.
  • This extraction is for example illustrated in FIG.
  • the image processing means 8 may, for example, furthermore comprise means for subtracting the reference image from the analysis image in order to obtain the image of the response of this sample.
  • these imaging means may be formed by two separate imagers or by two separate areas of the same imager.
  • This may for example have a number of advantages in terms of the coherence of the images formed.
  • this matrix imager possibly being formed by a CCD imager, a CMOS imager, etc.

Abstract

The invention relates to a system for the optical analysis of a sample (1), said system comprising a modulated laser pump-probe source (2) for analysing the sample and suitable for outputting, from the sample, a reference signal as well as an analysis signal thereof, and a means (5) for analysing said signals for outputting a piece of sample response information, characterised in that the source comprises a means (3b) for generating two phase-shifted, derived probe beams from a single probe beam, one of which is for forming the reference signal (SR) and the other one of which is for interacting with the pump beam in the sample (1), in order to output the sample analysis signal (SA), and in that the analysis means (5) includes means defining a matrix imager (6, 7) of the reference and analysis signals for outputting corresponding images of said signals to an image processing means (8) in order to extract an image of the sample response.

Description

Système d'analyse optique d'un échantillon comportant une source pompe- sonde laser  Optical analysis system of a sample comprising a laser pump-probe source
La présente invention concerne un système d'analyse optique d'un échantillon. Plus particulièrement, l'invention se rapporte à un tel système qui comporte une source pompe-sonde laser modulée d'analyse de l'échantillon, adaptée pour délivrer à partir de l'échantillon, d'une part un signal de référence et d'autre part un signal d'analyse de celui-ci et des moyens d'analyse de ces signaux pour délivrer une information de réponse de l'échantillon.  The present invention relates to a system for optical analysis of a sample. More particularly, the invention relates to such a system which comprises a laser pump-probe source modulated sample analysis, adapted to deliver from the sample, on the one hand a reference signal and on the other hand, an analysis signal of the latter and means for analyzing these signals to deliver a response information of the sample.
Les sources pompe-sonde laser modulées d'analyse sont déjà bien connues dans l'état de la technique et de tels systèmes d'analyse sont utilisés pour étudier des phénomènes ultra rapides et dynamiques en utilisant des photodiodes associées à des systèmes de détection synchrone permettant la suppression de la majeure partie du bruit indésirable et permettant ainsi une détection de signaux extrêmement faibles.  Modulated laser pump-probe sources of analysis are already well known in the state of the art and such analysis systems are used to study ultra-fast and dynamic phenomena by using photodiodes associated with synchronous detection systems enabling removing most of the unwanted noise and thus allowing extremely low signal detection.
Le problème de l'utilisation de ces photodiodes est qu'elles ne permettent d'obtenir qu'une analyse ponctuelle, ou tout au mieux à faible résolution spatiale, de la réponse.  The problem of the use of these photodiodes is that they make it possible to obtain only a point analysis, or at best a low spatial resolution, of the response.
Le but de l'invention est donc de résoudre ces problèmes.  The object of the invention is therefore to solve these problems.
A cet effet l'invention a pour objet un système d'analyse optique d'un échantillon du type comportant une source pompe-sonde laser modulée d'analyse de l'échantillon, adaptée pour délivrer à partir de l'échantillon, d'une part un signal de référence et d'autre part un signal d'analyse de celui-ci et des moyens d'analyse de ces signaux pour délivrer une information de réponse de l'échantillon, caractérisé en ce que la source comporte des moyens de génération à partir d'un faisceau de sonde unique, de deux faisceaux de sonde dérivés déphasés, dont l'un est destiné à former le signal de référence et dont l'autre est destiné à interagir avec le faisceau de pompe au niveau de l'échantillon, pour délivrer le signal d'analyse de l'échantillon et en ce que les moyens d'analyse comprennent des moyens formant imageur matriciel des signaux de référence et d'analyse pour délivrer des images correspondantes de ces signaux à des moyens de traitement de ces images pour en extraire une image de la réponse de l'échantillon.  For this purpose, the subject of the invention is an optical analysis system of a sample of the type comprising a modulated laser sample pump-probe source, adapted to deliver from the sample, a part of a reference signal and secondly an analysis signal thereof and means for analyzing these signals to deliver a response information of the sample, characterized in that the source comprises generating means from a single probe beam, two out of phase derivative probe beams, one of which is intended to form the reference signal and the other of which is intended to interact with the pump beam at the sample level , to deliver the analysis signal of the sample and in that the analysis means comprise matrix imager means of the reference and analysis signals for delivering corresponding images of these signals to means for processing these samples. pictures p to extract an image of the sample response.
Selon d'autres aspects de l'invention, le système d'analyse optique comprend l'une des caractéristiques suivantes :  According to other aspects of the invention, the optical analysis system comprises one of the following features:
la source comporte des moyens de modulation en amplitude du faisceau de pompe laser avant son application à l'échantillon,  the source comprises means for amplitude modulation of the laser pump beam before it is applied to the sample,
la source comporte des moyens de démultiplexage optique du faisceau sonde issu de l'échantillon, en signaux de référence et d'analyse de l'échantillon, - les moyens formant imageur matriciel sont formés par deux imageurs distincts, les moyens formant imageur matriciel sont formés par deux zones distinctes d'un même imageur, the source comprises means for optical demultiplexing of the probe beam issuing from the sample, in reference and sample analysis signals, the matrix imager means are formed by two different imagers, the matrix imager means are formed by two distinct areas of the same imager,
l'imageur matriciel est un imageur CCD,  the matrix imager is a CCD imager,
l'imageur matriciel est un imageur CMOS, et  the matrix imager is a CMOS imager, and
- les moyens de traitement d'images comprennent en outre des moyens de soustraction de l'image de référence de l'image d'analyse.  the image processing means furthermore comprise means for subtracting the reference image from the analysis image.
L'invention sera mieux comprise à l'aide de la description qui va suivre donnée uniquement à titre d'exemple et faite en se référant aux dessins annexés, sur lesquels :  The invention will be better understood with the aid of the following description given solely by way of example and with reference to the appended drawings, in which:
la figure 1 représente un schéma synoptique illustrant la structure et le fonctionnement d'un système d'analyse selon l'invention, et la figure 2 illustre différentes images obtenues grâce à un système d'analyse selon l'invention.  FIG. 1 represents a block diagram illustrating the structure and operation of an analysis system according to the invention, and FIG. 2 illustrates various images obtained by means of an analysis system according to the invention.
On a en effet illustré sur ces figures et en particulier sur la figure 1 , un système d'analyse optique d'un échantillon désigné par la référence générale 1 , ce système comportant une source pompe-sonde laser modulée d'analyse de l'échantillon, cette source étant désignée par la référence générale 2 sur cette figure.  In these figures and in particular in FIG. 1, an optical analysis system of a sample designated by the general reference 1 has been illustrated, this system comprising a modulated laser pump-probe source for analyzing the sample. , this source being designated by the general reference 2 in this figure.
Cette source met en effet en œuvre un faisceau de sonde laser et un faisceau de pompe laser après passage dans des moyens de modulation optique en amplitude de ce faisceau désignés par la référence générale 3a sur cette figure.  This source uses a laser probe beam and a laser pump beam after passing through optical amplitude modulation means of this beam designated by the general reference 3a in this figure.
La source comporte également des moyens de génération à partir d'un faisceau de sonde unique, de deux faisceaux de sonde dérivés décalés dans le temps/déphasés dont l'un est destiné à former le signal de référence et dont l'autre est destiné à interagir avec le faisceau de pompe au niveau de l'échantillon, pour délivrer le signal d'analyse de l'échantillon.  The source also comprises means for generating from a single probe beam, two shifted / out of phase derivative probe beams one of which is intended to form the reference signal and the other of which is intended to interact with the pump beam at the sample level, to deliver the analysis signal of the sample.
Ces moyens de génération sont désignés par la référence générale 3b sur cette figure 1 et délivrent en sortie un signal de référence SR et un signal d'analyse SA.  These generation means are designated by the general reference 3b in this Figure 1 and output a reference signal SR and an analysis signal SA.
Différents modes de réalisation de ces moyens de génération peuvent être envisagés. Ainsi par exemple ils peuvent être formés par des moyens de division et/ou formant retardateur optique permettant de générer les deux signaux de référence et d'analyse à partir d'un seul signal de sonde.  Different embodiments of these generation means can be envisaged. For example, they may be formed by dividing means and / or optical delay means for generating the two reference and analysis signals from a single probe signal.
Seul le faisceau d'analyse est alors destiné à interagir avec le faisceau de pompe au niveau de l'échantillon pour transcrire l'effet de ce signal de pompe au niveau de celui- ci sous la forme d'un signal d'analyse de l'échantillon.  Only the analysis beam is then intended to interact with the pump beam at the level of the sample to transcribe the effect of this pump signal at the level of the latter in the form of an analysis signal. 'sample.
Une synchronisation peut être prévue entre les moyens de modulation 3a et les moyens de génération 3b. Cette source comporte également des moyens désignés par la référence générale 4 de démultiplexage optique du faisceau issu de l'échantillon en signaux de référence et d'analyse de l'échantillon. Synchronization can be provided between the modulation means 3a and the generation means 3b. This source also comprises means designated by the general reference 4 of optical demultiplexing of the beam from the sample into reference signals and analysis of the sample.
Le système selon l'invention comporte également des moyens d'analyse de ces signaux pour délivrer une information de réponse de l'échantillon.  The system according to the invention also comprises means for analyzing these signals to deliver a response information of the sample.
Ces moyens d'analyse sont désignés par la référence générale 5 sur cette figure 1 et comprennent en fait des moyens formant imageur matriciel des signaux de référence et d'analyse pour délivrer des images correspondantes de ces signaux à des moyens de traitement de ces images pour en extraire une image de la réponse de l'échantillon.  These analysis means are designated by the general reference 5 in this FIG. 1 and in fact comprise matrix imager means of the reference and analysis signals for delivering corresponding images of these signals to means for processing these images for extract an image from the sample response.
Les moyens formant imageur matriciel sont en effet désignés par la référence générale 6 pour les moyens destinés à former une image du signal d'analyse de l'échantillon et 7 pour les moyens destinés à former une image du signal de référence.  The matrix imager means are in fact designated by the general reference 6 for the means intended to form an image of the analysis signal of the sample and 7 for the means intended to form an image of the reference signal.
Ces moyens formant imageur délivrent alors des images correspondantes appelées respectivement image 1 et image 2, à des moyens d'analyse d'images désignés par la référence générale 8 qui sont adaptés pour traiter celles-ci afin d'en extraire une image de la réponse de l'échantillon.  These imager means then deliver corresponding images designated respectively image 1 and image 2, image analysis means designated by the general reference 8 which are adapted to process them in order to extract an image of the response of the sample.
Cette extraction est par exemple illustrée sur la figure 2.  This extraction is for example illustrated in FIG.
On voit que les moyens de traitement d'images 8 peuvent par exemple comporter en outre des moyens de soustraction de l'image de référence de l'image d'analyse pour obtenir l'image de la réponse de cet échantillon.  It can be seen that the image processing means 8 may, for example, furthermore comprise means for subtracting the reference image from the analysis image in order to obtain the image of the response of this sample.
Bien entendu, des traitements complémentaires peuvent être envisagés sur ces images. Ces traitements peuvent être des traitements classiques d'optimisation des images.  Of course, complementary treatments can be envisaged on these images. These treatments may be conventional image optimization treatments.
Plusieurs modes de réalisation des moyens formant imageur matriciel peuvent être envisagés.  Several embodiments of the matrix imager means can be envisaged.
C'est ainsi par exemple que ces moyens formant imageur peuvent être formés par deux imageurs distincts ou encore par deux zones distinctes d'un même imageur.  For example, these imaging means may be formed by two separate imagers or by two separate areas of the same imager.
Ceci peut par exemple présenter un certain nombre d'avantages au niveau de la cohérence des images formées.  This may for example have a number of advantages in terms of the coherence of the images formed.
De même, plusieurs technologies d'imageur peuvent être envisagées, cet imageur matriciel pouvant être formé par un imageur CCD, un imageur CMOS, etc ..  Likewise, several imager technologies can be envisaged, this matrix imager possibly being formed by a CCD imager, a CMOS imager, etc.
Bien entendu, d'autres modes de réalisation encore peuvent être envisagés.  Of course, other embodiments may be envisaged.

Claims

REVENDICATIONS
1 . - Système d'analyse optique d'un échantillon (1 ) du type comportant une source pompe-sonde laser modulée (2) d'analyse de l'échantillon, adaptée pour délivrer à partir de l'échantillon, d'une part un signal de référence et d'autre part un signal d'analyse de celui-ci et des moyens d'analyse (5) de ces signaux pour délivrer une information de réponse de l'échantillon, caractérisé en ce que la source comporte des moyens de génération (3b) à partir d'un faisceau de sonde unique, de deux faisceaux de sonde dérivés déphasés, dont l'un est destiné à former le signal de référence (SR) et dont l'autre est destiné à interagir avec le faisceau de pompe au niveau de l'échantillon (1 ), pour délivrer le signal d'analyse de l'échantillon (SA) et en ce que les moyens d'analyse (5) comprennent des moyens (6, 7) formant imageur matriciel des signaux de référence et d'analyse pour délivrer des images correspondantes de ces signaux à des moyens (8) de traitement de ces images pour en extraire une image de la réponse de l'échantillon.  1. - Optical analysis system of a sample (1) of the type comprising a laser pump-probe source modulated (2) analysis of the sample, adapted to deliver from the sample, on the one hand a signal reference and on the other hand an analysis signal thereof and means for analyzing (5) these signals to provide a response information of the sample, characterized in that the source comprises generation means (3b) from a single probe beam, two out-of-phase derivative probe beams, one of which is to form the reference signal (SR) and the other of which is intended to interact with the pump beam at the level of the sample (1), for outputting the sample analysis signal (SA) and in that the analyzing means (5) comprise means (6, 7) forming a matrix imager of the reference and analysis for delivering corresponding images of these signals to means (8) for processing this s images to extract an image of the sample response.
2. - Système d'analyse optique selon la revendication 1 , caractérisé en ce que la source comporte des moyens (3a) de modulation en amplitude du faisceau de pompe laser avant son application à l'échantillon (1 ). 2. - optical analysis system according to claim 1, characterized in that the source comprises means (3a) of amplitude modulation of the laser pump beam before its application to the sample (1).
3.- Système d'analyse optique selon la revendication 1 ou 2, caractérisé en ce qu'il comporte des moyens (4) de démultiplexage optique du faisceau sonde issu de l'échantillon, en signaux de référence et d'analyse de l'échantillon. 3.- optical analysis system according to claim 1 or 2, characterized in that it comprises means (4) of optical demultiplexing of the probe beam from the sample, in reference and analysis signals of the sample.
4. - Système d'analyse optique selon l'une quelconque des revendications précédentes, caractérisé en ce que les moyens (6, 7) formant imageur matriciel sont formés par deux imageurs distincts. 4. - optical analysis system according to any one of the preceding claims, characterized in that the means (6, 7) imager matrix are formed by two separate imagers.
5. - Système d'analyse optique selon l'une quelconque des revendications 1 à 3, caractérisé en ce que les moyens (6, 7) formant imageur matriciel sont formés par deux zones distinctes d'un même imageur. 5. - optical analysis system according to any one of claims 1 to 3, characterized in that the means (6, 7) imager matrix are formed by two separate areas of the same imager.
6. - Système d'analyse optique selon l'une quelconque des revendications précédentes, caractérisé en ce que l'imageur matriciel (6, 7) est un imageur CCD. 7.- Système d'analyse optique selon l'une quelconque des revendications 1 à 5, caractérisé en ce que l'imageur matriciel (6, 6. - optical analysis system according to any one of the preceding claims, characterized in that the matrix imager (6, 7) is a CCD imager. 7.- optical analysis system according to any one of claims 1 to 5, characterized in that the matrix imager (6,
7) est un imageur CMOS. 7) is a CMOS imager.
8.- Système d'analyse optique selon l'une quelconque des revendications précédentes, caractérisé en que les moyens (8) de traitement d'images comprennent en outre des moyens de soustraction de l'image de référence de l'image d'analyse. 8. An optical analysis system according to any one of the preceding claims, characterized in that the means (8) for image processing further comprise means for subtracting the reference image from the analysis image. .
PCT/FR2010/052532 2009-11-25 2010-11-25 System for the optical analysis of a sample comprising a laser pump-probe source WO2011064505A1 (en)

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FR0958341A FR2953020B1 (en) 2009-11-25 2009-11-25 OPTICAL ANALYSIS SYSTEM OF A SAMPLE COMPRISING A LASER SENSOR PUMP SOURCE
FR0958341 2009-11-25

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000020841A1 (en) * 1998-10-05 2000-04-13 Kla-Tencor Corporation Interferometric system for measurement disturbance of a sample
WO2003010518A2 (en) * 2001-07-26 2003-02-06 Koninklijke Philips Electronics N.V. Opto-acoustic apparatus with optical heterodyning for measuring solid surfaces and thin films
US6552799B1 (en) * 2000-02-17 2003-04-22 Japan Science And Technology Corporation Two-arm sagnac interferometer with two beam splitters
US20080151239A1 (en) * 2006-12-26 2008-06-26 Yoshinori Iketaki Microscopy method and microscope
US20080304046A1 (en) * 2007-06-08 2008-12-11 Korea Research Institute Of Standards And Science Imaging Apparatus for Infrared Rays Nonlinear Molecular Vibrational Microscopy

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000020841A1 (en) * 1998-10-05 2000-04-13 Kla-Tencor Corporation Interferometric system for measurement disturbance of a sample
US6552799B1 (en) * 2000-02-17 2003-04-22 Japan Science And Technology Corporation Two-arm sagnac interferometer with two beam splitters
WO2003010518A2 (en) * 2001-07-26 2003-02-06 Koninklijke Philips Electronics N.V. Opto-acoustic apparatus with optical heterodyning for measuring solid surfaces and thin films
US20080151239A1 (en) * 2006-12-26 2008-06-26 Yoshinori Iketaki Microscopy method and microscope
US20080304046A1 (en) * 2007-06-08 2008-12-11 Korea Research Institute Of Standards And Science Imaging Apparatus for Infrared Rays Nonlinear Molecular Vibrational Microscopy

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FR2953020A1 (en) 2011-05-27

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