WO2009066370A1 - レーザ発振器内出射ミラーの劣化状態測定方法およびレーザ加工装置 - Google Patents

レーザ発振器内出射ミラーの劣化状態測定方法およびレーザ加工装置 Download PDF

Info

Publication number
WO2009066370A1
WO2009066370A1 PCT/JP2007/072452 JP2007072452W WO2009066370A1 WO 2009066370 A1 WO2009066370 A1 WO 2009066370A1 JP 2007072452 W JP2007072452 W JP 2007072452W WO 2009066370 A1 WO2009066370 A1 WO 2009066370A1
Authority
WO
WIPO (PCT)
Prior art keywords
laser
output mirror
processing apparatus
laser beam
laser oscillator
Prior art date
Application number
PCT/JP2007/072452
Other languages
English (en)
French (fr)
Inventor
Kenji Ito
Takamitsu Kimura
Osami Yamaoka
Original Assignee
Mitsubishi Electric Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corporation filed Critical Mitsubishi Electric Corporation
Priority to KR1020107008220A priority Critical patent/KR101233506B1/ko
Priority to US12/741,930 priority patent/US8461470B2/en
Priority to CN200780101632.5A priority patent/CN101878087B/zh
Priority to PCT/JP2007/072452 priority patent/WO2009066370A1/ja
Priority to JP2009542429A priority patent/JP5110087B2/ja
Priority to TW096149663A priority patent/TWI380543B/zh
Publication of WO2009066370A1 publication Critical patent/WO2009066370A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/0014—Monitoring arrangements not otherwise provided for

Abstract

　レーザ発振器（１）から出射されるレーザビーム（４）により加工を行うレーザ加工装置において、レーザ発振器（１）から出射されたレーザビーム（４）の光路上に配置され、このレーザビーム（４）の周辺部分を遮蔽し中央部分を透過させるためのアパーチャ（５）と、このアパーチャ（５）を透過したレーザビーム（２０）のビームパワーを測定するビームパワー測定センサー（６）とを備えたレーザ加工機において、高ビームパワーなレーザビームによりレーザ発振器（１）の出射ミラーが高熱負荷状態になった場合に、アパーチャ（５）を透過するレーザビームのビームパワーが、出射ミラー（２）の劣化状態により顕著に変化（劣化するほどビームパワーが上昇）することを利用し、出射ミラー（２）の劣化状態を判断するものである。
PCT/JP2007/072452 2007-11-20 2007-11-20 レーザ発振器内出射ミラーの劣化状態測定方法およびレーザ加工装置 WO2009066370A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
KR1020107008220A KR101233506B1 (ko) 2007-11-20 2007-11-20 레이저 발진기 내 출사미러의 열화상태 측정방법 및 레이저 가공장치
US12/741,930 US8461470B2 (en) 2007-11-20 2007-11-20 Method of measuring degradation condition of output mirror in laser oscillator and laser machining apparatus
CN200780101632.5A CN101878087B (zh) 2007-11-20 2007-11-20 激光振荡器内出射镜的老化状态测定方法以及激光加工装置
PCT/JP2007/072452 WO2009066370A1 (ja) 2007-11-20 2007-11-20 レーザ発振器内出射ミラーの劣化状態測定方法およびレーザ加工装置
JP2009542429A JP5110087B2 (ja) 2007-11-20 2007-11-20 レーザ発振器内出射ミラーの劣化状態測定方法およびレーザ加工装置
TW096149663A TWI380543B (en) 2007-11-20 2007-12-24 Method for measuring deterioration status of outgoing mirror in laser oscillator and laser processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/072452 WO2009066370A1 (ja) 2007-11-20 2007-11-20 レーザ発振器内出射ミラーの劣化状態測定方法およびレーザ加工装置

Publications (1)

Publication Number Publication Date
WO2009066370A1 true WO2009066370A1 (ja) 2009-05-28

Family

ID=40667208

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/072452 WO2009066370A1 (ja) 2007-11-20 2007-11-20 レーザ発振器内出射ミラーの劣化状態測定方法およびレーザ加工装置

Country Status (6)

Country Link
US (1) US8461470B2 (ja)
JP (1) JP5110087B2 (ja)
KR (1) KR101233506B1 (ja)
CN (1) CN101878087B (ja)
TW (1) TWI380543B (ja)
WO (1) WO2009066370A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015109247A (ja) * 2013-12-06 2015-06-11 株式会社東芝 レーザイオン源、イオン加速器及び重粒子線治療装置
US10556295B2 (en) 2017-08-23 2020-02-11 Fanuc Corporation Laser machining device that detects contamination of optical system before laser machining
JP2020142289A (ja) * 2019-03-07 2020-09-10 株式会社ディスコ レーザー加工装置
DE102018119900B4 (de) * 2017-08-23 2020-12-10 Fanuc Corporation Laserbearbeitungsverfahren, das vor einer Laserbearbeitung eine Brennpunktverschiebung je nach der Art und des Grads der Verschmutzung eines externen optischen Systems reguliert

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8183536B2 (en) * 2009-02-20 2012-05-22 Corning Incorporated System for monitoring optical modules of high-power lasers
JP5907819B2 (ja) * 2011-11-24 2016-04-26 三菱電機株式会社 レンズユニットおよびレーザ加工装置
JP5911903B2 (ja) * 2014-03-28 2016-04-27 ファナック株式会社 レーザ光の強度分布を計測するビームプロファイラ、レーザ発振器、およびレーザ加工装置
DE102014016889A1 (de) 2014-11-15 2016-05-19 Mbda Deutschland Gmbh Überwachungsvorrichtung für einen Laserstrahl
US10008093B2 (en) * 2016-05-06 2018-06-26 DISH Technologies L.L.C. Systems, methods and apparatus for determining button degradation of a user input device
JP6987453B2 (ja) * 2018-01-29 2022-01-05 住友重機械工業株式会社 評価装置、及び評価方法
CN115647615B (zh) * 2022-12-28 2023-03-21 歌尔股份有限公司 激光切割器的模组驱动方法、装置、设备及存储介质

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03240282A (ja) * 1990-02-17 1991-10-25 Canon Inc レーザ装置
JPH07245437A (ja) * 1994-03-04 1995-09-19 Toshiba Corp ガスレーザ発振器の出力ミラーの寿命判定方法及びその装置並びにレーザ加工機
JP2000012923A (ja) * 1998-06-26 2000-01-14 Sumitomo Heavy Ind Ltd レーザ加工装置の光学部品の劣化診断装置及び方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3162254B2 (ja) * 1995-01-17 2001-04-25 三菱電機株式会社 レーザ加工装置
TW320586B (ja) * 1995-11-24 1997-11-21 Hitachi Ltd
JP3844848B2 (ja) * 1997-06-24 2006-11-15 三菱電機株式会社 レーザ加工機
US5991319A (en) * 1997-11-21 1999-11-23 Trw Inc. Mirror failure detector for high power lasers
US6635849B1 (en) * 1999-03-05 2003-10-21 Mitsubishi Denki Kabushiki Kaisha Laser beam machine for micro-hole machining
JP2005175245A (ja) * 2003-12-12 2005-06-30 Ntn Corp レーザ装置およびそれを用いたレーザ加工装置
CN100386611C (zh) 2004-03-02 2008-05-07 华为技术有限公司 一种检测激光器失效的方法
JP3845650B1 (ja) * 2005-06-13 2006-11-15 株式会社日本製鋼所 レーザ照射方法及びその装置
CN100452573C (zh) 2007-02-12 2009-01-14 武汉光迅科技股份有限公司 大功率泵浦激光器组的驱动及控制保护方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03240282A (ja) * 1990-02-17 1991-10-25 Canon Inc レーザ装置
JPH07245437A (ja) * 1994-03-04 1995-09-19 Toshiba Corp ガスレーザ発振器の出力ミラーの寿命判定方法及びその装置並びにレーザ加工機
JP2000012923A (ja) * 1998-06-26 2000-01-14 Sumitomo Heavy Ind Ltd レーザ加工装置の光学部品の劣化診断装置及び方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015109247A (ja) * 2013-12-06 2015-06-11 株式会社東芝 レーザイオン源、イオン加速器及び重粒子線治療装置
US10556295B2 (en) 2017-08-23 2020-02-11 Fanuc Corporation Laser machining device that detects contamination of optical system before laser machining
DE102018119900B4 (de) * 2017-08-23 2020-12-10 Fanuc Corporation Laserbearbeitungsverfahren, das vor einer Laserbearbeitung eine Brennpunktverschiebung je nach der Art und des Grads der Verschmutzung eines externen optischen Systems reguliert
US10946484B2 (en) 2017-08-23 2021-03-16 Fanuc Corporation Laser machining method adjusting focus shift depending on type and level of contamination of external optical system before laser machining
DE102018119902B4 (de) 2017-08-23 2023-01-05 Fanuc Corporation Laserbearbeitungsvorrichtung, die vor einer Laserbearbeitung eine Detektion der Verschmutzung eines optischen Systems vornimmt
JP2020142289A (ja) * 2019-03-07 2020-09-10 株式会社ディスコ レーザー加工装置
JP7356235B2 (ja) 2019-03-07 2023-10-04 株式会社ディスコ レーザー加工装置

Also Published As

Publication number Publication date
TWI380543B (en) 2012-12-21
JPWO2009066370A1 (ja) 2011-03-31
KR101233506B1 (ko) 2013-02-14
CN101878087A (zh) 2010-11-03
US20100245830A1 (en) 2010-09-30
TW200924328A (en) 2009-06-01
US8461470B2 (en) 2013-06-11
JP5110087B2 (ja) 2012-12-26
CN101878087B (zh) 2015-05-13
KR20100065381A (ko) 2010-06-16

Similar Documents

Publication Publication Date Title
WO2009066370A1 (ja) レーザ発振器内出射ミラーの劣化状態測定方法およびレーザ加工装置
WO2009035768A3 (en) Nonlinear imaging using passive pulse splitters
WO2004031741A3 (en) Illumination system for optical inspection
WO2006093783A3 (en) Laser produced plasma euv light source
WO2007109344A3 (en) Vibrational circular dichroism spectrometer using reflective optics
EP2090918A8 (de) Kalibriervorrichtung und Laser-Scanning-Mikroskop mit einer derartigen Kalibriervorrichtung
TW200702883A (en) Laser source device, display device, and projector
WO2011026251A8 (fr) Dispositif pour horloge atomique
BRPI0814669A2 (pt) comutador de múltiplos comprimentos de onda, comutador óptico, método par direcionar componentes de comprimento de onda de um feixe óptio de uma porta de entrada para pelo menos uma porta de saída, e, aparelho de comutação óptica.
WO2009047888A1 (ja) 固体レーザー装置及び画像表示装置
WO2010006985A3 (en) Optical arrangement and method
EP1981135A3 (en) Optical communication module and output control method of semiconductor laser
WO2009016709A1 (ja) 波長変換レーザ装置
WO2010078057A3 (en) Optical microresonator system
WO2009029189A3 (en) Device for laser pulse conditioning by stretching, delaying and modulating
WO2009028506A1 (ja) プラズマ処理装置、プラズマ処理方法および終点検出方法
TW200801397A (en) Illumination system and projection apparatus
JP2009177140A5 (ja)
TW200602630A (en) Optical cell measurement apparatus
EP1760847A3 (en) Side-pumped solid state laser source, and pumping process for a solid-state laser source
WO2009014664A3 (en) Optical configurations for wavelength-converted laser sources
TW200722216A (en) Laser machining system
MY144488A (en) Laser processing apparatus using laser beam splitting
TWI255933B (en) Optical polarization beam combiner
WO2007137175A3 (en) High-temperature operation of vertical cavity surface emitting lasers

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200780101632.5

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07832182

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 2009542429

Country of ref document: JP

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 20107008220

Country of ref document: KR

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 12741930

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 07832182

Country of ref document: EP

Kind code of ref document: A1