WO2007023605A1

WO2007023605A1 - Surface roughness/outline shape measurement device

Info

Publication number: WO2007023605A1
Application number: PCT/JP2006/311150
Authority: WO
Inventors: Masafumi Ishii
Original assignee: Tokyo Seimitsu Co., Ltd.
Priority date: 2005-08-23
Filing date: 2006-05-29
Publication date: 2007-03-01
Also published as: JPWO2007023605A1

Abstract

A surface roughness/outline shape measurement device (1) has a stylus orientation changing section (9) and a balance member (63). In the surface roughness/outline shape measurement device (1), a pivot support section (62, 64, 71a, 71b) supports a cantilever (7) so that it can pivot about a pivot axis that is in the direction normal to the longitudinal direction of the cantilever (7), and the stylus orientation changing section (9) rotates the pivot support section (62, 64, 71a, 71b) about a rotation axis that is in the longitudinal direction of the cantilever (7), changing the orientation of a stylus (11) provided at the forward end of the cantilever (7). The balance member (63) causes the cantilever (7) supported at the pivot axis to balance in weight in order to eliminate influence of gravity acting on the cantilever (7) that rotates as the pivot support section (62, 64, 71a, 71b) rotates.

Description

Technical field

The present invention relates to a surface roughness Z contour shape measuring apparatus, and in particular, by detecting the amount of displacement of the stylus by moving the stylus along the surface of the workpiece (workpiece), the present invention relates to the roughness of the surface of the workpiece. The present invention relates to a surface roughness / contour shape measuring apparatus for measuring a thickness or a contour shape. Background art

The surface roughness / contour shape measuring device moves the pickup with the stylus along the surface of the workpiece (workpiece), converts the stylus displacement into an electrical signal, and reads it into a computer such as a computer. Measure the surface roughness or contour of the workpiece (workpiece). Such a surface roughness Z contour shape measuring apparatus is disclosed in, for example, Japanese Patent Application Laid-Open No. 2 0 0 2-1 0 7 1 4 4. Figure 1 shows the basic configuration of a conventional surface roughness / contour shape measuring device.

The surface roughness / contour shape measuring apparatus 1 is provided with a table 2 along the XY plane for placing a workpiece, and a column 3 is erected on the table 2. The movable part 4 is attached to the column 3. The column 3 incorporates a motor (not shown), and the movable part 4 can be moved up and down along the column 3 (along the Z direction) by this motor. The movable part 4 is provided with a holder 5 that supports the pickup 6 via the arm part 10. The movable part 4 also has a built-in mode (not shown), and the holder 5 can be driven in the X direction. The tip of the arm 10 is provided with a measuring element (pickup) 6 for measuring the surface roughness of the workpiece placed on the table 2, and this pick-up 6 has a stylus 1 at one end. With a cantilever 7 with 1. The cantilever 7 is provided in the pickup 6 so that its longitudinal direction is along the X direction which is the driving direction of the movable part 4. The pickup 6 is provided with the cantilever 7 and the stylus 11. At the other end opposite to the other end, the longitudinal direction of the cantilever 7 and the direction perpendicular to the protruding direction of the stylus 11 (Z direction) (Y direction) are supported rotatably.

Therefore, when the stylus 11 is moved in the X direction by the drive unit 4 while being in contact with the measurement surface, the stylus 11 slightly moves in the Z direction according to the unevenness of the measurement surface. This amount of displacement is converted into a rotational motion by the cantilever 7 and transmitted to a differential inductance built in the pickup 6 (not shown) and converted into an electric signal. This electric signal is converted into a digital signal by an AZD converter (not shown).

Then, the stylus 11 is moved over the entire measurement surface, and the signals sequentially output from the A / D converter at that time are converted into a data processing device (not shown) composed of a computer or the like. By collecting in, measurement data indicating the surface roughness of the cake is obtained. Disclosure of the invention

In the conventional surface roughness / contour shape measuring device 1, the protruding direction of the stylus 1 1 (or the rotational axis direction of the rotational movement of the cantilever 7 associated with the fine movement of the stylus 11) is fixed in a specific direction. (Normally, the protruding direction of the stylus 1 1 is set vertically downward (Z-axis direction), and the rotation axis of the rotary motion of the cantilever 7 is set in the Y-axis direction). This is because in surface roughness / contour measurement, the measurement force (force to press the stylus 1 1 against the surface to be measured) is determined by each standard (for example, JIS standard B 0 6 5 1) and is affected by gravity. In order to keep the measuring force constant, the direction of the stylus 11 is preferably fixed.

However, in order to measure the surface roughness / contour shape of various surfaces of the workpiece with the conventional surface roughness Z contour measurement device 1 with the direction of the stylus 1 1 fixed, the stylus 1 on each measurement surface In order to bring 1 into contact, it is necessary to change the direction in which the workpiece is placed on the table 2 and cope with it. This work requires a lot of labor when the work is heavy.

Further, for example, the following problem arises when measuring the surface shape of the inner surface of the cylinder 10 1 of the cylinder block 1 100 of the engine shown in FIG. 2A.

FIG. 2B is an enlarged cross-sectional view of the opening of the cylinder 101 shown in FIG. 2A. In the example shown in FIG. 2B, taper portions (1 0 2, 1 0 3) are formed in the opening of the cylinder 1 0 1.

Of this taper portion, the surface is facing upward. 10 2 Surface roughness Z To measure the contour shape, for example, as shown in FIG. Just tilt the entire workpiece 100 and level the taper 1 0 2 and the stylus 1 1 along the surface.

On the other hand, in order to measure the surface roughness and contour shape of the taper portion with the surface facing downward, the first part of the workpiece is rotated by 180 degrees with the X axis as the rotation axis. Thus, the surface of the taper portion 10 3 portion needs to face upward.

By the way, when measuring the surface roughness and contour shape, the table 2 The position of the workpiece 100 placed on the top needs to be known. In particular, when it is necessary to rotate the workpiece 100 during measurement as described above, the position and direction of the rotating shaft that rotates the workpiece 100 must be known. This is because if the actual rotation axis deviates from the assumed rotation axis, a deviation occurs in the position and direction of the measurement surface, causing an error.

However, in the case of a so-called square workpiece such as a cylinder block 100 shown in FIG. 2A, for example, unlike a columnar workpiece, there is no target for setting the rotation axis, and the workpiece 100 is rotated. This makes it difficult to set the rotation axis of the rotating jig to match the expected rotation axis. Therefore, depending on the conventional surface roughness / contour shape measuring device 1 in which the direction of the stylus 1 1 is fixed, the work of measuring the surface roughness / contour shape of each part of the square workpiece as shown in FIG. Becomes very cumbersome.

In view of the above problems, the present invention provides a surface roughness / measurement that can measure the measurement surface in various directions without changing the mounting direction of the workpiece by changing the direction of the stylus according to the direction of the measurement surface. An object is to provide a contour shape measuring device.

In order to achieve the above object, a surface roughness Z contour shape measuring apparatus according to the present invention comprises a rotation support shaft member that rotatably supports a force nail lever with a direction orthogonal to the longitudinal direction of the cantilever as a rotation axis. Rotate the cantilever as the axis of rotation to change the direction of the stylus provided at the tip of the cantilever.

Furthermore, in order to eliminate the influence of gravity acting on the cantilever that rotates with the rotation of the rotation support portion, a balance member is provided that balances the weight of the force cantilever with the rotation axis of the cantilever as a fulcrum. And the tip of the stylus contacts the measurement surface by rotating the rotation support part Orient the stylus in the direction and measure the surface shape with the stylus along the measurement surface.

The above and other objects and features of the present invention will become more apparent by reading the description of the preferred embodiment shown below with reference to the accompanying drawings. Brief Description of Drawings

FIG. 1 is a basic configuration diagram of a conventional surface roughness Z contour shape measuring apparatus. FIG. 2A is a diagram showing a cylinder block as an example of a workpiece of the surface roughness / contour shape measuring apparatus.

FIG. 2B is an enlarged cross-sectional view of the opening of the cylinder 10 1 shown in FIG. 2A.

FIG. 3 is an explanatory diagram of a measurement method using a conventional surface roughness measuring apparatus.

FIG. 4 is a basic configuration diagram of a surface roughness / contour shape measuring apparatus according to an embodiment of the present invention.

FIG. 5A is an XZ sectional view of the pickup shown in FIG.

Fig. 5B is a cross-sectional view taken along line AA in Fig. 5A.

FIG. 5C is a perspective view of the fixing portion shown in FIG. 5A.

FIG. 6A is a perspective view of the pickup rotating unit shown in FIG.

6B is an XZ cross-sectional view of the pick-up rotating unit shown in FIG. 6A. FIG. 7A shows a state in which the measurement surface 1 1 0 is measured by the measurement method using the surface roughness / contour shape measuring device of FIG. FIG.

FIG. 7B is a diagram showing a state in which the measurement surface 1 1 1 is measured by the measurement method using the surface roughness / contour shape measurement device of FIG. FIG. 7C is a diagram showing a state in which the measurement surface 1 1 2 is measured by the measurement method using the surface roughness measurement apparatus in FIG.

FIG. 7D is a diagram showing a state in which the measurement surface 1 1 3 is measured by the measurement method using the surface roughness / contour shape measuring device of FIG.

FIG. 8A is a diagram showing a state in which the taper portion 100 2 is measured by the measuring method using the surface roughness Z contour shape measuring apparatus of FIG.

FIG. 8B is a diagram showing a state in which the tapered portion 10 3 is measured by the measuring method using the surface roughness / contour shape measuring device of FIG. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 4 is a basic configuration diagram of the surface roughness Z contour shape measuring apparatus according to the embodiment of the present invention.

As shown in the figure, the surface roughness Z contour shape measuring apparatus 1 is provided with a table 2 along the XY plane for placing a workpiece, and a column 3 is erected on the table 2. The first movable part 4 is attached to the column 3. The column 3 has a built-in motor (not shown), and the first movable part 4 can be moved up and down along the column 3 (along the Z direction) by this motor.

The first movable part 4 is provided with a second movable part 8. The first movable part 4 also has a built-in motor, not shown, and can drive the second movable part 8 in the X direction. Further, the second movable portion 8 is provided with a pickup rotating portion 9 that supports the pickup 6 via the arm portion 10. The second movable part 8 also incorporates a motor (not shown), and the pickup rotating part 9 can be driven in the Y direction.

A measuring element (pickup) 6 is provided at the tip of the arm 10, and the pickup 6 includes a cantilever 7 having a stylus 11 at one end. The The cantilever 7 is provided in the pick-up 6 so that its longitudinal direction is along the X direction which is the driving direction of the movable part 4. One end of the cantilever 7 is provided with a stylus 11 that protrudes in a direction substantially perpendicular to the longitudinal direction of the cantilever.

The pickup 6 rotates the cantilever 7 at the other end opposite to the one where the stylus 11 is provided, with the longitudinal direction of the cantilever 7 and the direction perpendicular to the protruding direction of the stylus 11 as the rotation axis. Supports in a movable manner. FIG. 5A is a sectional view on the XZ plane side of the pickup 6 shown in FIG. 4, and FIG. 5B is a sectional view taken along the line AA ′ of FIG. 5A. The pick-up 6 is rotatably supported by the fixing portion 62 with the fixing portion 6 2 fixed to the case 6 1 and the pipe shaft 6 4 along the Y direction as a rotation axis. The balance movable part 6 3 is provided. FIG. 5C is a perspective view illustrating the shape of the fixing portion 62 shown in FIG. 5A.

As shown in FIG. 5C, the fixed portion 6 2 is formed with arm portions 7 2 a and 7 2 b for holding the pivot shaft 6 4 of the balance movable portion 6 3 from both ends. Bearings 7 1 a and 7 lb supporting the pivot shaft 6 4 are attached to 2 a and 7 2 b, respectively.

In addition, the movable cantilever part 63 is provided with a cantilever mounting pin 70 for fixing the cantilever 7 to the movable balance part 63. When the cantilever mounting pin 70 fixed to the balance movable portion 63 is inserted into the mounting hole provided at the mounting end of the cantilever 7, the cantilever 7 is fixed to the balance movable portion 63.

In addition, the movable movable part 63 has a movable balance that cantilever 7 is fixed so that the stylus 11 provided at the end opposite to the end where the cantilever 7 is attached contacts the surface of the workpiece. There is provided an urging means 65 such as a panel for urging the portion 63 in the rotating direction. It is. In the example of FIG. 5A, the urging means 65 is a compression spring 65 attached to the spring receiving recess 66 of the fixed part 62, and the balance movable part 63 and the balance movable part 63 by this compression spring 65. The attached cantilever 7 is urged in a direction to rotate in the direction (protruding direction) of the stylus 11.

Therefore, when the pick-up 6 is moved by the first movable part 4 and the second movable part 8, the stylus 11 is slid on the surface of the work so as to follow the unevenness of the work surface. Can do. Then, when the displacement of the stylus 11 caused by the unevenness of the surface of the hook is transmitted to the balance movable part 63 via the cantilever 7, the balance movable part 63 is rotated around the pivot shaft 64. Move.

Further, when the stylus 11 that slides on the surface of the workpiece is displaced by the unevenness on the surface of the workpiece, the amount of displacement is converted into an electric signal by the differential inductance sensor provided in the pickup 6. This differential inductance sensor is configured to insert the magnetic core 6 7 when the balance movable portion 63 is supported by the fixed portion 62 and the magnetic core 6 7 provided in the balance movable portion 63. A core insertion port 6 8 provided in the fixed portion 62 and two coils 69 provided around the core rod inlet 6 8 so as to surround the magnetic core 6 7. This differential inductance sensor detects the movement of the magnetic core 6 7 as the balance movable part 6 3 rotates, as a change in the difference in inductance between the two coils 6 9, and the balance movable part 6 3 Then, the stylus 11 is moved over the entire surface of the measurement surface, and the signals sequentially output from the coil 69 are converted into A / D converters (not shown). The surface roughness of the workpiece is converted to a digital signal using a computer and collected by a data processing device (not shown) such as a computer. Is obtained.

Here, the pickup rotating section 9 described later rotates the pickup 6 with the longitudinal direction of the cantilever 7 as the rotation axis, and moves in the direction of the pivot shaft 6 4 (that is, the rotating axis of the cantilever 7 and the balance movable section 63). Even if the angle between the vertical direction and the vertical direction changes, the balance movable part 6 3 is arranged so that the force (that is, the measurement force) pressing the stylus 1 1 against the surface to be measured by the biasing means 6 5 does not fluctuate. The shape and position of the pivot shaft 6 4 are determined so as to balance the weight of the assembly of the cantilever 7, the balance movable portion 63, and the magnetic core 6 7 with the pivot shaft 64 as a fulcrum. Configured.

Specifically, the through-hole of the pivot shaft 6 4 provided in the balance movable portion 63 is a set of the cantilever 7, the balance movable portion 63, and the magnetic core 6 7 in a plane orthogonal to the pivot shaft 64. It is provided at the center of gravity of the solid.

By determining the position of the pipette shaft 6 4 in this way, the angle between the direction of the pipette shaft 6 4 and the vertical direction is changed by the rotation of the pickup 6, and the cantilever 7, the balance movable portion 6 3 and Even if the posture of the magnetic core 67 is changed, no moment due to gravity is generated in the assembly, so that the measuring force by the biasing means 65 can be kept constant.

The pickup 6 is moved in the Y direction by the second movable part 8 and is moved to the cantilever 7 by the friction force in the Y direction generated between the stylus 11 and the surface of the workpiece. The tip of the pivot shaft 6 4 is formed in a substantially conical shape so that the balance movable part 6 3 can rotate smoothly even if the force is applied, and the bearings 7 1 a and 7 lb are the pivot shaft 6 The substantially conical tip of 4 may be configured to be supported by a spherical surface. FIG. 6A is a perspective view of the pickup rotating unit 9, and FIG. 6B is an XZ sectional view of the pickup rotating unit 6. The pickup rotating unit 9 includes a case unit 9 1 supported by the second movable unit 8 so as to be drivable in the Y direction, a rotation attachment unit 9 2 for fixing the arm unit 10 having the pickup 6 attached to the tip, and a rotation A motor 9 3 for supplying a driving force for rotating the attachment part 9 2 with the longitudinal direction of the arm part 10 (ie, the longitudinal direction of the cantilever 7) as the rotation axis, and the rotational attachment part 9 2 to the arm part 1 Gears 9 5 and 9 which transmit the rotational motion of the bearing 9 4 fixed to the case 9 1 to be rotatable about the longitudinal direction of 0 as the rotation axis and the rotary shaft 9 6 of the motor 9 3 to the rotary attachment 9 2 7 and.

When the motor 93 rotates, the rotational force generated in the rotation shaft 96 is transmitted to the gears 95 and 97 to rotate the rotation attachment part 92. Since the rotation attachment portion 92 is connected to the pick-up 6 via the arm portion 10, the pickup 6 rotates with the longitudinal direction of the cantilever 7 as the rotation axis by the rotation of the rotation attachment portion 92.

Then, the balance movable part 6 3 that is rotatably supported by the fixed part 62 of the pickup 6 and the force cantilever 7 attached to the balance movable part 63 also have the longitudinal direction of the cantilever 7 as the rotation axis. As a result, as shown in FIGS. 7A to 7D, the direction of the erosion needle (protruding direction) changes.

For example, as shown in Fig. 7A, when measuring the measuring surface 110 that is parallel to the XY plane and faces the positive direction of the Z axis, the orientation of the stylus 11 is the same as in the conventional measuring method. Keep the direction of the Z axis in the negative direction. Next, when measuring the measurement surface 1 1 1 parallel to the ZX plane and facing the negative direction of the Y-axis, the pickup 6 must be By rotating the cantilever 7 in the direction of the arrow 90 degrees in the longitudinal direction (X direction) as the rotation axis, the stylus 1 1 is oriented in the positive direction of the Y axis, and the tip is measured 1 1 In this state, place the stylus 1 1 along the measurement surface 1 1 1 and measure its surface roughness / surface contour.

Furthermore, when measuring the measurement surface 1 1 2 parallel to the XY plane and facing the negative direction of the Z axis, as shown in Fig. 7 C, the pickup 6 is further moved 90 degrees in the direction of the arrow in the figure. Rotate the stylus 1 1 to point in the positive direction of the Z-axis so that the tip can contact the measurement surface 1 1 2 and in this state, bring the stylus 1 1 along the measurement surface 1 1 2 Measure the surface roughness Z surface Contour shape.

When measuring the measurement surface 1 1 3 parallel to the XZ plane and facing the positive direction of the Y axis, as shown in Fig. 7D, move the pickup 6 further 90 degrees in the direction of the arrow in the figure. Rotate the stylus 1 1 in the negative direction of the Y-axis so that the tip can come into contact with the measurement surface 1 1 3 and keep the stylus 1 1 along the measurement surface 1 1 3 in this state. The surface roughness Z surface contour shape is measured.

In this way, by rotating the pickup 6 in accordance with the direction of the measurement surface and changing the direction of the stylus 11, the measurement that was impossible with conventional measuring devices was not possible without changing the direction of the workpiece. It is possible to measure the surface without changing the direction of the cake.

In addition, when measuring a square workpiece such as a cylinder block 100 described above with reference to FIGS. 2 and 3, the rotation direction in which the workpiece 100 needs to be rotated during measurement is also required. Reduces the number of slashes, and saves labor for setting the rotation axis of the rotating jig for rotating the workpiece 100.

For example, the taper part of the opening of the cylinder 1 0 1 shown in Fig. 2B ( The case of measuring the surface roughness / contour shape of 1 0 2, 10 3) will be described with reference to FIGS. 8A and 8B.

In order to measure the surface roughness / contour shape of the taper portion (1 0 2, 1 0 3) whose surface is facing upward (Z-axis positive direction), for example, the conventional Fig. 3 Like A, the Y axis in the figure is the axis of rotation, and the taper 1 0 2 is inclined by tilting the entire tape 1 0 0 to make the taper part 1 0 2 horizontal, and the stylus 1 1 is in contact with the surface (Fig. 8 A).

On the other hand, in order to measure the surface roughness Z contour shape of the taper part 10 3 part where the surface is facing downward (Z axis negative direction), rotate the Y axis in the figure as shown in Fig. 8B. Tilt the entire taper angle by one taper angle (one Θ) as an axis to level the taper part 1 0 3 and rotate the force lever 7 1 180 degrees to change the orientation of the stylus 1 1 By directing in the positive direction of the Z-axis, the tip of the stylus can contact the tapered portion 10 3.

In this way, in the surface roughness / contour shape of the workpiece 100, which has conventionally been required to measure the workpiece 100 while rotating the plurality of directions about the rotation axis, the direction of the stylus 11 side is changed. By (by rotating), it becomes possible to reduce the direction of the rotation axis of the work 100 by one dimension.

As described above, according to the present invention, by providing a balance member that balances the weight of the cantilever, it is possible to remove the influence of gravity acting on the cantilever even if the direction of the stylus is changed by rotating the cantilever. Become. As a result, the direction of the stylus can be changed in accordance with the direction of various measurement surfaces, and measurement surfaces in various directions can be measured without changing the workpiece placement direction.

INDUSTRIAL APPLICABILITY The present invention can be used for a surface roughness / contour shape measuring apparatus, and in particular, by moving the stylus along the surface of the object to be measured (workpiece), the displacement of the stylus By detecting, it can be used in a surface roughness / contour shape measuring device that measures the roughness or contour shape of the surface of the object to be measured.

The preferred embodiments of the present invention have been described in detail above, but it will be understood by those skilled in the art that various modifications and changes can be made, and the scope of the claims is within the true spirit and scope of the present invention. It is to be understood by those skilled in the art that all such modifications and changes are included in the scope of the present invention.

Claims

The scope of the claims

1. a cantilever, a stylus provided at one end of the cantilever, a rotation support portion that rotatably supports the cantilever with a direction orthogonal to the longitudinal direction of the cantilever as a rotation axis, and the cantilever in front An urging member that urges the stylus to rotate in the direction of the stylus; a detector that detects rotational displacement generated in the cantilever when the stylus is moved while being in contact with the measurement surface of the workpiece; A surface roughness contour shape measuring device comprising:

By rotating the rotation support portion with the longitudinal direction of the cantilever as the rotation axis, the stylus direction changing portion for changing the direction of the stylus and the weight balance of the cantilever with the rotation shaft as a fulcrum are obtained. A balance member;

A surface roughness / contour shape measuring apparatus comprising:

2. The surface shape of the measurement surface is measured by orienting the stylus in a direction in which the tip of the stylus contacts the measurement surface by the stylus direction changing unit. Surface roughness Z contour shape measuring device.