WO2006068354A1

WO2006068354A1 - System for manufacturing metal nano vapor using air chuck

Info

Publication number: WO2006068354A1
Application number: PCT/KR2005/001655
Authority: WO
Inventors: Yong-Hun Jung; Yong-Gi Jung; Soon-Ho Jeong
Original assignee: Nano Advance Co., Ltd.
Priority date: 2004-12-24
Filing date: 2005-06-02
Publication date: 2006-06-29
Also published as: KR20050009969A; KR100558378B1

Abstract

Disclosed is a system for manufacturing metal nano vapor using resistance heating plasma. This system includes a metal nano vapor manufacturing apparatus (40) having a wire supplier (lθ), a wire carrier (20) and a current applying unit (30); and a controller for controlling them. The wire supplier (lθ) includes a winder (l 1) winding a wire (l), a support (12) supporting the winder, and a wire corrector (13) having disk-shaped elastic bodies (13b) with through holes therein and formed in a case (13a) having a through inside. The wire carrier (20) includes a carrier air chuck (22) having holders (23) and carried by a carrier cylinder (21). The current applying unit (30) includes holders (32) having Y-shaped body (32a) and electrode (32b) and is mounted to the electrode air chuck (22). While the holders (23) hold the wire (l), the carrier cylinder (21) carries and places the wire between the electrodes (32b). If the holders (32) hold the carried wire(l) with applying high current to each electrode (32b), metal nano vapor is manufactured using generated resistance heating.

Description

SYSTEM FOR MANUFACTURING METAL NANO VAPOR

USING AIR CHUCK

Technical Field

[1] The present invention relates to a system for manufacturing metal nano vapor using resistance-heating plasma, and more particularly to a method for successively manufacturing metal nano vapor by applying a high current to an electrode of a holder when a supplied wire is transferred to the electrode by means of a transferring air chuck and the holder of an air chuck for an electrode holds the wire. Background Art

[2] Generally, nano technology is defined as a technique for looking into, controlling and creating substances of 1 to 100 nm. In particular, as particle sizes are extremely decreased, there appear unusual mechanical and physical features, not shown in general powder materials. In addition, since the nano metal powder particles have abundant potential functions due to their peculiar characteristics, it is expected that the nano metal powder particles are applied to high-temperature structural materials, tool materials, electric and electronic materials, filters and sensors as a new functional material. Moreover, the nano metal powder particles are expected to create new techniques and new industrial demands over the entire industries. Thus, all developed countries in the world severely compete with each other to develop nano powder- related techniques.

[3] The metal nano powder manufacturing techniques are commonly classified into chemical methods for composing nano powder using chemical reactions, and physical methods such as an evaporation condensation method, a plasma heating method, a Co laser beam method, a mechanical alloy method, and an electric explosion method.

[4] In particular, the pulsed wire evaporation method using electric explosion of wire, which employs resistance-heating plasma, evaporate (or, steam) and condenses a meta wire by means of resistance heating to manufacture powder by instantly discharging a high- voltage high current, charged in a capacitor, to a metal wire using pulse power. This method can make all kinds of metals, which can be made into a wire such as Al, Cu, Au, In, Fe, Mo, Ni, Pd, Pt, Ag, Sn, Ti, W, and Zr, into nano powder, easily make oxide or nitride by making the inside of an explosion chamber into an oxygen or nitrogen circumstance, make an alloyed nano powder without any change of constitution using an alloyed wire, control a size of powder in the range of 5 to 150 nm, and be eco-friendly with less energy consumption of 5 kW per one hour and without any residues other than the made powder, and allow high efficiency, so this method is considered as a technique having higher applicability rather than other composing methods.

[5] Seeing Korean Patent Registration No. 407160 related to the above method, when a metal wire is supplied in the above electric explosion method, if a motor of a metal wire supplier is rotated at a certain rate, a pair of rollers connected to the motor is rotated to supply a metal wire wound around a wheel, and this metal wire is transferred to an electrode through a deforming unit that lowers its stiffness so that nano metal powder may be manufactured.

[6] However, since the metal wire is supplied using the rollers, if the wire to be supplied is relatively thick (with a diameter of at least 0.3 mm), the metal wire is apt to bend in a specific direction due to its kink and heat treatment properties or cannot keep a constant distance from the electrode, so particle sizes of the made metal nano powder are distributed in a broader range. Furthermore, an electric current may not be applied due to a distance from the electrode in excess of a critical distance, and, in case metal nano powder is manufactured for a long time, powder or metal wire pieces soldered to a cathode may intercept supply of the metal wire and makes the metal wire be deviated, which may stop the manufacturing process.

[7] In addition, since a high voltage (3 to 30 kV) and an excessive energy (at least

500J) are required in the manufacturing device, the made metal nano powder may be adsorbed to electrodes, feeding devices, nozzles or the like to demolish insulation, and the excessive energy is accumulated in the chamber to deteriorate an insulating resistance of insulating parts, thereby leaking an electric current to break down electric parts. In more severe cases, impurities generated from melt insulating parts may seriously deteriorate the purity of metal nano powder.

[8] Also, in case a relatively thin metal wire (e.g., having a diameter of 3mm or less) is supplied to the above device using a roller, the metal wire is apt to be deviated with passing through a roller groove or be bent in a specific direction due to its stiffness, which makes the metal wire not reach the electrode. In addition, due to its thin thickness, it cannot frequently pass the deforming unit that pushes and twists the metal wire. Thus, the above device has a limit as an industrial metal nano powder manufacturing device that requires reproduction, durability and mass production.

[9] Furthermore, the conventional metal nano powder has an activated structure after being made, so there are problems of condensation of the metal nano powder, deterioration of quality such as purity, and increase of incidental expenses through complex procedures for making, storing, carrying and applying the metal nano powder. Disclosure of Invention Technical Problem [10] The present invention is designed in consideration of the above problems, and therefore it is an object of the invention to provide a system for manufacturing metal nano vapor, which includes a metal nano vapor manufacturing apparatus; and a controller for controlling the metal nano vapor manufacturing apparatus, wherein the metal nano vapor manufacturing apparatus includes a wire supplier including a winder around which a wire is wound, a support for supporting the winder, and a wire corrector provided with a plurality of disk- shaped elastic bodies having through holes therein and formed in a case having a through inside; a wire carrier by which a carrier air chuck having a pair of holders mounted thereto is carried by means of a carrier cylinder; and a current applying unit provided with a pair of holders that has a Y- shaped body and an electrode fixed to the Y-shaped body and is mounted to the electrode air chuck, wherein, when a wire supplied from the wire supplier is carried to the current applying unit by means of the wire carrier, a high current is applied to the current applying unit so as to manufacture metal nano vapor, thereby capable of manufacturing and using metal nano powder together and also providing a high-purity high- quality metal nano powder.

[11] In addition, another object of the present invention is to provide a system for manufacturing metal nano vapor, which may supply a wire in a linear shape through a wire corrector, be applied to a wire having certain sectional area and stiffness by using a forward carrying method for carrying the wire to a current applying unit and then returning after manufacture of metal nano vapor, and also successively manufacture metal nano vapor without cutoff of a wire though a supplied wire has small sectional area or stiffness by using a return carrying method for carrying the wire to the current applying unit and then instantly returning and manufacturing metal nano vapor. Technical Solution

[12] In order to accomplish the above object, the present invention provides a system for manufacturing metal nano vapor using an air chuck, which includes a metal nano vapor manufacturing apparatus; and a controller for controlling the metal nano vapor manufacturing apparatus, wherein the metal nano vapor manufacturing apparatus includes a wire supplier including a winder around which a wire is wound, a support for supporting the winder, and a wire corrector provided with a plurality of disk-shaped elastic bodies having through holes therein and formed in a case having a through inside; a wire carrier by which a carrier air chuck having a pair of holders mounted thereto is carried by means of a carrier cylinder; and a current applying unit provided with a pair of holders that has a Y-shaped body and an electrode fixed to the Y-shaped body and is mounted to the electrode air chuck, wherein, when a wire supplied from the wire supplier is carried to the current applying unit by means of the wire carrier, a high current is applied to the current applying unit so as to manufacture metal nano vapor.

Brief Description of the Drawings

[13] These and other features, aspects, and advantages of preferred embodiments of the present invention will be more fully described in the following detailed description, taken accompanying drawings. In the drawings:

[14] FIG. 1 is a perspective view showing an appearance of an apparatus for manufacturing metal nano vapor according to the present invention; [15] FIG. 2 is a perspective view showing the apparatus for manufacturing metal nano vapor according to the present invention; [16] FIG. 3 is a perspective bottom view showing the apparatus for manufacturing metal nano vapor according to the present invention; [17] FIG. 4 is an exploded perspective view showing the apparatus for manufacturing metal nano vapor according to the present invention; [18] FIG. 5 is a perspective view showing a winder employed in the apparatus according to the present invention; [19] FIG. 6 is a perspective view showing a wire corrector employed in the apparatus according to the present invention; [20] FIG. 7 is a side view showing the apparatus for manufacturing metal nano vapor according to the present invention; [21] FIG. 8 is a partial side view showing the apparatus for manufacturing metal nano vapor according to the present invention; [22] FIG. 9 is a front view showing the apparatus for manufacturing metal nano vapor according to the present invention; [23] FIG. 10 is a partial front view showing the apparatus for manufacturing metal nano vapor according to the present invention; [24] FIG. 11 is a bottom view showing the apparatus for manufacturing metal nano vapor according to the present invention; [25] FIG. 12 is a flowchart illustrating the operation procedure using a forward carrying method according to the present invention; and [26] FIG. 13 is a flowchart illustrating the operation procedure using a return carrying method according to the present invention.

Best Mode for Carrying Out the Invention [27] The present invention relates to a system for manufacturing metal nano vapor using resistance-heating plasma, which applies a high current to an electrode of holders to successively manufacture metal nano vapor if a supplied wire is carried to the electrode by means of a carrier air chuck and the holders of the electrode air chuck hold the supplied wire.

[28] The system of the present invention is generally composed of a metal nano vapor manufacturing apparatus 40 including a wire supplier 10, a wire carrier 20 and a current applying unit 30, and a controller (not shown) for controlling the above components. In brief, the wire supplier 10 including a winder 11 around which a wire (1) is wound, a support 12 for supporting the winder, and a wire corrector 13 provided with a plurality of disk-shaped elastic bodies 13b having through holes therein and formed in a case 13a having a through inside. The wire carrier 20 makes a carrier air chuck 22 having a pair of holders 23 mounted thereto be carried by means of a carrier cylinder 21. The current applying unit 30 is provided with a pair of holders 32 that has a Y-shaped body 32a and an electrode 32b fixed to the Y-shaped body and is mounted to the electrode air chuck 31. Thus, a wire 1 wound around the winder 11 is supplied through the wire corrector 13. In addition, while the holders 23 of the carrier air chuck 22 hold this wire 1, the wire is carried by the carrier cylinder 21 to be placed between the electrodes 32b. Thus, if the holders 32 of the electrode air chuck 31 holds the carried wire 1 and a high current is applied to each electrode 32b, it generates resistance heating, which manufactures metal nano vapor.

[29] Detailed configuration of the present invention will be described with reference to the accompanying drawings. First, seeing the wire supplier 10, the wire supplier 10 is composed of the winder 11, the support 12 and the wire corrector 13, and is used for supplying the wire 1. The winder 11 has a cylindrical shape with a through inside. As shown in FIG. 5, the winder 11 has projections 1 Ia formed at its both ends so that the wire 1 is not taken off out of the sides of the winder 11. The projections 11a form a shaft 1 Ib through which the wire 1 may pass without any restraint. Bearings 1 Ic and housings 1 Id for surrounding the bearings 1 Ic are formed at both ends of the shaft 1 Ib. This housings 1 Id are fixed to the support 12 that supports the winder 11 so that the winder 11 may rotate without any friction as the wire 1 is unwound, thereby minimizing a force required for unwinding the wire 1.

[30] In addition, as shown in FIG. 13, the wire corrector 13 is composed of a case 13a, a main nozzle 13c, a plurality of elastic bodies 13b and both end covers 13d. The case 13a has a cylindrical shape with a through inside. The main nozzle 13c has a cylindrical shape with a through inside and it is divided into two parts along a length direction. The elastic body 13b has a disk shape with elasticity, and a through hole with a diameter smaller than a diameter of the wire is formed at the center of the elastic body 13b. The both end covers 13d fix the elastic bodies 13b at both ends of the main nozzle 13c. Thus, the wire corrector 13 is configured so that the elastic bodies are fixed to both ends of the main nozzle 13c by means of the both end covers 13d and are inserted into the case 13a. [31] Now, it will be described how the wire passes through the wire corrector 13 configured as mentioned above. First, the wire 1 is inserted into the elastic body 13b, and then the main nozzle 13c is spread out and the wire is inserted into the main nozzle 13c. Then, the main nozzle 13c is folded, and then the elastic bodies 13b and the both end covers 13d are fixed to both ends thereof. And then, it is inserted into the case 13a so that the wire 1 may pass through the wire corrector 13. As the wire 1 successively passes through the wire corrector 13, the wire corrector 13 may straighten the wire 1 that is wound around the winder 11 and thus deformed. Number and thickness of the elastic bodies 13b and diameter and size of the holes formed in the elastic bodies 13b are adjusted depending on stiffness and diameter of the supplied wire 1 so that a wire 1 may be supplied without deformation.

[32] Meanwhile, the supplied wire 1 may be made of all kinds of metals that can be made into a wire 1 such as Au, Ag, Li, Al, Ti, V, Fe, Ni, Cu, Zn, Zr, Nb, Mo, Pd, In, Sn, Ta, W, Pt and Pb. In addition, when being supplied, the wire 1 may be in a linear form with a circular section or in a sheet form with a rectangular section. In case the wire 1 has a circular section, its diameter is ranged from 0.01 mm to 0.3 mm, while, in case the wire 1 has a rectangular section, its sectional area is ranged from 7.8x10 mm to 7x10 mm .

[33] Now, seeing the wire carrier 20, as shown in FIG. 3, the wire carrier 20 is composed of the carrier cylinder 21, the carrier air chuck 22, and a pair of holders 23. The carrier cylinder 21 has a cylinder shape with a through inside, in which a piston (not shown) and a rod 21a connected to the piston are linear moved by means of fluid. A magnetic ring (not shown) is mounted to the piston, and a magnetic sensor 21b (e.g., an automatic sensor or a lead sensor) is mounted to an outside of the carrier cylinder 21 so as to check a stroke state and control the processing procedure. The carrier air chuck 22 has a pair of fingers 22a, which may hold or release an object with moving along a guide rail (not shown).

[34] In addition, the holder 23 is composed of a body 23a and a leg 23b. The body 23a has a rectangular parallelepiped shape and made of insulating material. The body 23a is fixed to a pair of fingers 22a. The leg 23b has a long rectangular parallelepiped shape elongated in a length direction and fixed to the body 23 a. The leg 23b is made of material with good durability and good abrasion resistance. The leg 23b has a smoothness of ±10 μm on a surface directly contacted with the wire 1 so as to easily hold and carry a thin and minute wire 1. As mentioned above, if the holders 23 hold the wire 1 by means of the carrier air chuck 22, the wire carrier 20 moves the carrier air chuck 22 by means of the carrier cylinder 21 so as to carry the wire 1.

[35] Finally, seeing the current applying unit 30, as shown in FIGs. 2 and 3, the current applying unit 30 is composed of the electrode air chuck 31 and the pair of holders 32. The electrode air chuck 31 includes a pair of fingers 31a that may hold or release an object with moving along a guide rail (not shown). The holder 32 is composed of a body 32a and an electrode 32b. The body 32a is made of material with good insulating property and has a Y shape. The electrode 32b is made of electric contact point material or other material with good oxidation resistance. The body 32a fixing the electrode 32b is fixed to the finger 31a of the electrode air chuck 31. The electrode 32b is connected only to the body 32a and does not contact with the finger 31a or other components.

[36] In addition, a high current is applied to the electrode 32b to form an anode and a cathode respectively, which are spaced apart from each other by a distance of 30 mm to 150 mm. The electrode 32b directly contacted with the wire 1 has a streamline shape convexly protruded in a length direction thereof so as to prevent soldering. If the wire 1 is carried into the holders 32, the electrode 32b of the holders 32 holds the wire 1 and then the current applying unit 30 formed as mentioned above receives a high current to manufacture metal nano vapor.

[37] The wire supplier 10, the wire carrier 20 and the current applying unit 30 formed s mentioned above configure the metal nano vapor manufacturing apparatus 40. Since the leg 23b of the carrier air chuck 22 is positioned at a portion of the wire corrector 13 where the wire 1 is emitted, the leg 23b holds the wire 1 passing through the wire corrector 13. In addition, as the carrier air chuck 22 is carried by the carrier cylinder 21, the wire 1 is carried, and the holder 32 of the electrode air chuck 31 holds the wire 1, and the electrode 32b receives a high current to manufacture metal nano vapor.

[38] Meanwhile, the carrier air chuck 22 and the electrode air chuck 31 respectively have a cylinder. Thus, as a compressed air is supplied thereto, a rod integrated with the piston is moved to transfer a force to a pair of levers having a L shape. In addition, as the center of the levers are rotated, the force is transferred to a pair of fingers connected to the guide rail. Thus, as the fingers move along the guide rail, the fingers become narrowed to hold an object or broadened to release an object. An exit of the rod and a gap of the fingers are sealed using a dustproof rubber, thereby preventing introduction of the made metal nano vapor.

[39] Now, material and characteristics of each component mentioned above are explained. First, the elastic body 13b formed in the wire corrector 13 is made of elastic silicon. The case 13a of the wire corrector 13, the body 32a attached to the carrier air chuck 22, and the body 32a attached to the electrode air chuck 31 are made of synthetic resin with excellent insulation, good abrasion resistance, good oxidation resistance, good chemical resistance, and so on, for example bakelite and Teflon (fluorine resin) with light weight, excellent dielectric strength over 3 kV, and low strain or torsion, or POM (polyoxymethylene) with excellent durability, excellent oxidation resistance and excellent chemical resistance.

[40] In addition, the leg 23b of the holder 23 fixed to the carrier air chuck 22 is made of material with good abrasion resistance, namely SCM4 that is a kind of structural alloy steel, SM45C that is a kind of mechanical structural alloy steel, or STS304 having good corrosion resistance, which is stainless steel including Ni (8 to 10.5 wt%) and Cu (18 to 20 wt%). In addition, the electrode 32b of the holder 32 fixed to the electrode air chuck 31 is made of W-Cu alloy powder that is a very high pressure contact material with good arc resistance and excellent abrasion resistance so as to minimize soldering, or STS304, STS420J1, STS420J1 and so on, which has excellent oxidation resistance.

[41] The wire supplier 10, the wire carrier 20, and the current applying unit 30 formed as mentioned above may configure the metal nano vapor manufacturing apparatus 40 with efficient arrangement. As shown in FIGs. 2 to 4, the base 41 is prepared using aluminum or synthetic resin, and the support 12 is fixed to the upper portion of the base 41 to install the winder 11. The carrier cylinder 21 is fixed at a predetermined height, and the block 44 receiving the wire corrector 13 is seated and fixed onto the base 41 below the winder 11 so as to fix the wire corrector 13 to the block 44.

[42] In addition, the floating joint 21c is connected to the rod 21a of the carrier cylinder

21 so as to move through the base 41. The bracket 24 having a plate shape is formed below the base 41, and the floating joint 21c and a plurality of guide rods 25 are fixed to its upper portion. The linear bushing 26 is fixed to the base 41 according to the fixed positions of the guide rods 25, and the bracket 24 and the guide rods 25 are moved with a small friction according to the operation of the carrier cylinder 21. The carrier air chuck 22 having the holders 23 is seated and fixed below the bracket 24, and the electrode air chuck 31 having the holders 32 is seated and fixed at a suitable position below the base 41.

[43] In addition, the base 41 configured as mentioned above is coupled to a chamber 42 at its lower portion as shown in FIGs. 1, 7 and 9, and a plurality of packings 45 are installed around the base 41 to which edges of the chamber 42 are adhered, thereby keeping its inside tightly. A cover 43 is installed above the base 41. A plurality of connectors 42a having holes perforated at suitable positions are mounted to the chamber 42 and the cover 43 so as to collect the made metal nano vapor, or a vacuum pump (not shown) is connected thereto to make the inside of the chamber 42 vacuous. Also, a blower (not shown) may be connected to the connectors 42a to transfer the made metal nano vapor outside. The metal nano vapor manufacturing apparatus 40 configured as mentioned above may have a compact design, and may be easily dissembled.

[44] Meanwhile, the floating joint 21c connected to the rod 21a offsets eccentricity, moving axis error, and deficient parallelism of the rod 21a, caused by the change of center of gravity and vibration generated in the carrier cylinder 21. In addition, a dustproof rubber (not shown) is attached to the exit of the rod 21a of the carrier cylinder 21 and the floating joint 21c, thereby preventing introduction of the made metal nano vapor.

[45] Now, the controller (not shown) for controlling the metal nano vapor manufacturing apparatus 40 is described. The controller independently includes an electrode control unit for configuring a charging circuit to discharge a charged current and apply a high current to the electrode 32b, and then charge a current within a predetermined time, and a pneumatic control unit for controlling the carrier cylinder 21, the carrier air chuck 22 and the electrode air chuck 31 together with the vacuum pump and the blower, which have independent power devices. Thus, the controller prevents reduction of life or malfunction of the circuit board formed in the electrode control unit, caused by shock current generated while the metal nano vapor is manufactured.

[46] The metal nano vapor manufacturing system composed of the metal nano vapor manufacturing apparatus and the controller for controlling the apparatus may allow successive manufacture according to an operation order, which may be classified into a forward carrying method and return carrying method, as described below.

[47] First, the forward carrying method is explained with reference to FIGs. 8, 10 and

12. The forward carrying method completes a first cycle in the order of an electrode air chuck releasing process Gl for releasing the holders 23 of the electrode air chuck 31, a carrier air chuck holding/carrying process G2 in which the carrier air chuck 22 holds the wire 1 passing through the wire corrector 13 and is carried by the carrier cylinder 21, an electrode air chuck holding process G3 in which the electrode air chuck 31 holds the carried wire 1, a current applying and nano vapor manufacturing process G4 in which a high current is applied to the electrode 32b to manufacture metal nano vapor, an electrode air chuck releasing process G5 in which the holders 23 of the electrode air chuck 31 are released again, and a carrier air chuck returning/releasing process G6 in which the holders 32 of the carrier air chuck 22 are released. Then, the forward carrying method repeats the above processes from the carrier air chuck holding/carrying process G2 in which the carrier air chuck 22 holds the wire 1 passing through the wire corrector 13 and is carried, thereby successively manufacturing metal nano vapor.

[48] Now, the return carrying method is described with reference to FIGs. 8, 10, 13. The return carrying method completes a first cycle in the order of an electrode air chuck releasing process S 1 in which the holders 32 of the electrode air chuck 31 are released, a carrier air chuck holding/carrying process S2 in which the carrier air chuck 22 holds a wire 1 passing through the wire corrector 13 and is carried by the carrier cylinder 21, a carrier air chuck releasing/returning process S3 in which the holders 32 of the carrier air chuck 22 are released again and returned by the carrier cylinder 21 again, a carrier air chuck holding process S4 in which the returned carrier air chuck 22 holds the wire 1 passing through the wire corrector 13 again, an electrode air chuck holding process S 5 in which the holders 23 of the electrode air chuck 31 holds the carried wire 1, a current applying and nano vapor manufacturing process S6 in which a high current is applied to the electrode 32b to manufacture metal nano vapor, and an electrode air chuck releasing process S7 in which the electrode air chuck 31 is released again. Then, the return carrying method executes a carrier air chuck carrying process S 8 in which the carrier air chuck 22 holding the wire 1 is carried again, and then repeats the above processes from the carrier air chuck releasing/returning process S3 in which the holders 32 are returned again by the carrier cylinder 21.

[49] Thus, the forward carrying method is used when diameter and sectional area of the wire 1 are somewhat great or the wire 1 has great stiffness. If the supplied wire 1 has small sectional area or stiffness, the return carrying method is used so that the carrier air chuck 22 returns in advance to hold the wire 1 passing through the wire corrector 13 before the electrode 32b manufactures metal nano vapor, thereby preventing cutoff of the wire 1. Thus, the system for manufacturing metal nano vapor according to the present invention may manufacture metal nano vapor successively by selecting a carrying method depending on stiffness of a wire 1 to be supplied and then inputting related data to the controller. Industrial Applicability

[50] The system for manufacturing metal nano vapor using an air chuck according to the present invention includes a metal nano vapor manufacturing apparatus; and a controller for controlling the metal nano vapor manufacturing apparatus, wherein the metal nano vapor manufacturing apparatus includes a wire supplier including a winder around which a wire is wound, a support for supporting the winder, and a wire corrector provided with a plurality of disk- shaped elastic bodies having through holes therein and formed in a case having a through inside; a wire carrier by which a carrier air chuck having a pair of holders mounted thereto is carried by means of a carrier cylinder; and a current applying unit provided with a pair of holders that has a Y- shaped body and an electrode fixed to the Y-shaped body and is mounted to the electrode air chuck, wherein, when a wire supplied from the wire supplier is carried to the current applying unit by means of the wire carrier, a high current is applied to the current applying unit so as to be capable of manufacturing metal nano vapor. Thus, the metal nano vapor manufacturing apparatus and the controller may be easily moved with a small size, so it is possible to manufacture and use metal nano vapor together and provide high-purity high-quality metal nano vapor. [51] In addition, the system of the present invention may supply a linear wire through the wire corrector, and may be applied to a wire with certain sectional area and stiffness by adopting the forward carrying method, which carries the wire to the current applying unit and then returns it after manufacturing metal nano vapor. In other case, by using the return carrying method that carries a wire to the current applying unit, returns instantly and then manufactures metal nano vapor, the system of the present invention may manufacture metal nano vapor successively without any cutoff of the wire though the supplied wire has small sectional area or stiffness. Thus, the system of the present invention may manufacture metal nano vapor regardless of sectional area and stiffness of a supplied wire.

Claims

[1] A system for manufacturing metal nano vapor using an air chuck, comprising: a metal nano vapor manufacturing apparatus (40); and a controller for controlling the metal nano vapor manufacturing apparatus, wherein the metal nano vapor manufacturing apparatus (40) includes: a wire supplier (10) including a winder (11) around which a wire (1) is wound, a support (12) for supporting the winder, and a wire corrector (13) provided with a plurality of disk-shaped elastic bodies (13b) having through holes therein and formed in a case (13a) having a through inside; a wire carrier (20) by which a carrier air chuck (22) having a pair of holders (23) mounted thereto is carried by means of a carrier cylinder (21); and a current applying unit (30) provided with a pair of holders (32) that has a Y- shaped body (32a) and an electrode (32b) fixed to the Y-shaped body and is mounted to the electrode air chuck (22), wherein, when a wire supplied from the wire supplier is carried to the current applying unit by means of the wire carrier, a high current is applied to the current applying unit so as to manufacture metal nano vapor.

[2] The system for manufacturing metal nano vapor using an air chuck according to claim 1, wherein the supplied wire (1) is one selected from the group consisting of Au, Ag, Li, Al, Ti, V, Fe, Ni, Cu, Zn, Zr, Nb, Mo, Pd, In, Sn, Ta, W, Pt and Pb, and has a sectional area of 7.8x10 mm to 7x10 mm .

[3] The system for manufacturing metal nano vapor using an air chuck according to claim 1, wherein a proximity sensor is installed to the support (12) so as to check whether a wire is supplied.

[4] The system for manufacturing metal nano vapor using an air chuck according to claim 1, wherein the wire corrector (13) has both end covers (13d) for fixing the elastic bodies (13b) at both end of a main nozzle (13c) that has a through inside and is divided into two parts along a length direction so that the elastic bodies are inserted into the case (13a), whereby the wire corrector allows easy insertion of a wire and supply of a wire having a minimized deformation.

[5] The system for manufacturing metal nano vapor using an air chuck according to claim 1, wherein a magnetic ring is mounted to a piston of the carrier cylinder (21), and a magnetic sensor (21b) is mounted to an appropriate position of an outside of the carrier cylinder (21), whereby the magnetic ring and the magnetic sensor allow easy control of the process by checking a stroke state of the carrier cylinder.

[6] The system for manufacturing metal nano vapor using an air chuck according to claim 1, wherein the pair of holders (23) attached to the carrier air chuck (22) include a pair of bodies (23a) made of synthetic resin, and a pair of legs (23b) made of metal and having a smoothness of ±10 μm on one surface so that the bodies (23a) with the fixed legs (23b) are fixed to the carrier air chuck (22), whereby the holders allow easy carriage of the wire.

[7] The system for manufacturing metal nano vapor using an air chuck according to claim 1, wherein a high current is applied to the current applying unit (30) so that the electrode (32b) forms a convex streamlined shape in a surface directly contacting with the wire (1), thereby forming an anode and a cathode spaced apart by a distance of 30 to 150 mm, whereby soldering is prevented thereto when metal nano vapor is manufactured.

[8] The system for manufacturing metal nano vapor using an air chuck according to claim 1, wherein the controller independently includes a charging circuit control unit for applying a high current to the electrode (32b) and charging a current, and a pneumatic control unit for controlling other components, which have independent power devices, whereby the controller prevents reduction of life or malfunction of a circuit board due to an impulsive current.

[9] The system for manufacturing metal nano vapor using an air chuck according to claim 1, wherein the controller executes a forward carrying method, which completes a first cycle in the order of an electrode air chuck releasing process (Gl) for releasing the holders (23) of the electrode air chuck (31), a carrier air chuck holding/carrying process (G2) in which the carrier air chuck (22) holds the wire (1) passing through the wire corrector (13) and is carried by the carrier cylinder (21), an electrode air chuck holding process (G3) in which the electrode air chuck (31) holds the carried wire (1), a current applying and nano vapor manufacturing process (G4) in which a high current is applied to the electrode (32b) to manufacture metal nano vapor, an electrode air chuck releasing process (G5) in which the holders (23) of the electrode air chuck (31) are released again, and a carrier air chuck returning/releasing process (G6) in which the holders (32) of the carrier air chuck (22) are released, and then repeats the above processes from the carrier air chuck holding/carrying process (G2) in which the carrier air chuck (22) holds the wire (1) passing through the wire corrector (13) and is carried, wherein the forward carrying method is used when the wire has great diameter and stiffness.

[10] The system for manufacturing metal nano vapor using an air chuck according to claim 1, wherein the controller executes a return carrying method, which completes a first cycle in the order of an electrode air chuck releasing process (Sl) in which the holders (32) of the electrode air chuck (31) are released, a carrier air chuck holding/carrying process (S2) in which the carrier air chuck (22) holds a wire (1) passing through the wire corrector (13) and is carried by the carrier cylinder (21), a carrier air chuck releasing/returning process (S3) in which the holders (32) of the carrier air chuck (22) is released again and returned by the carrier cylinder (21) again, a carrier air chuck holding process (S4) in which the returned carrier air chuck (22) holds the wire (1) passing through the wire corrector (13) again, an electrode air chuck holding process (S5) in which the holders (23) of the electrode air chuck (31) holds the carried wire (1), a current applying and nano vapor manufacturing process (S6) in which a high current is applied to the electrode (32b) to manufacture metal nano vapor, and an electrode air chuck releasing process (S7) in which the electrode air chuck (31) is released again, then executes a carrier air chuck carrying process (S8) in which the carrier air chuck (22) holding the wire (1) is carried again, and then repeats the above processes from the carrier air chuck releasing/returning process (S3) in which the holders (32) are returned again by the carrier cylinder (21), and wherein the return carrying method is used when the wire has great diameter and stiffness so as to minimize cutoff of the wire.

[11] The system for manufacturing metal nano vapor using an air chuck according to any of claims 1 to 10, wherein the system further comprises a base (41), the support (12) being fixed on the base (41) to install the winder (11) thereto, the carrier cylinder (21) being fixed at a predetermined height, a block (44) receiving the wire corrector (13) being seated and fixed on the base (41) below the winder (11), a floating joint (21c) being provided thereto so that one side thereof is connected to a rod (21a) of the carrier cylinder (21) and the other side is fixed to a plate- shaped bracket (24) formed below the base (41), a plurality of guide rods (26) being formed above the bracket (24), a linear bushing (26) inserted therein being fixed to the base (41), the carrier air chuck (22) having the holders (23) being seated and fixed below the bracket (24), the electrode air chuck (24) having the holders (32) being seated and fixed below the base (41), whereby effective arrangement using the base allows to manufacture a small metal nano vapor manufacturing apparatus.

[12] The system for manufacturing metal nano vapor using an air chuck according to claim 11, wherein a chamber (42) and a cover (43) that keep sealed are respectively formed above or below the base (41) so that a vacuum pump is connected to a plurality of connectors (42a) formed thereto and connected to outside, whereby an inside of the system comes to a vacuum circumstance, which allows to manufacture high-purity metal nano vapor.

[13] The system for manufacturing metal nano vapor using an air chuck according to claim 11, wherein a chamber (42) and a cover (43) that keep sealed are respectively formed above or below the base (41) so that a blower is connected to a plurality of connectors (42a) formed thereto and connected to outside, whereby it is enabled to cool the manufactured metal nano vapor appropriately or carry the manufactured metal nano vapor to outside.