WO2005095798A1 - Vacuum system - Google Patents

Vacuum system Download PDF

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Publication number
WO2005095798A1
WO2005095798A1 PCT/EP2005/000625 EP2005000625W WO2005095798A1 WO 2005095798 A1 WO2005095798 A1 WO 2005095798A1 EP 2005000625 W EP2005000625 W EP 2005000625W WO 2005095798 A1 WO2005095798 A1 WO 2005095798A1
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WO
WIPO (PCT)
Prior art keywords
vacuum
damping ring
vacuum chamber
flange
flanges
Prior art date
Application number
PCT/EP2005/000625
Other languages
German (de)
French (fr)
Inventor
Dieter Müller
Heinz-Josef Wirtzfeld
Hans Wischott
Gerhard-Wilhelm Walter
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Publication of WO2005095798A1 publication Critical patent/WO2005095798A1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/12—Casings; Cylinders; Cylinder heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum system comprising a vacuum chamber and a unit connected to it via a flange connection.
  • the invention has for its object to provide a vacuum system in which the vacuum chamber and unit are sealingly connected at the beginning of vacuum generation, with vibration decoupling taking place as the vacuum increases.
  • the vacuum system according to the invention is characterized by claim 1.
  • an elastomeric damping ring is arranged between the flanges of the vacuum chamber and the unit, which is compressed in the vacuum generated by the vacuum pump in such a way that the at least one spring element arranged around the clamping bolt is relieved and therefore no longer transmits vibrations.
  • the invention is based on the idea that when the vacuum is initially generated, the flanges, including the damping ring, are pressed against one another by the tensioning bolts, with inevitable transmission of vibrations from the unit via the tensioning bolts to the vacuum chamber. Vibrations are dampened by the spring elements, but not completely kept away from the vacuum chamber.
  • the desired working value which is, for example, 10 "7 mbar
  • the flanges are pressed against each other so strongly by the effect of the vacuum that the damping ring located between them is compressed. This relieves the spring elements on the clamping bolts, so that practically no vibrations are transmitted via the clamping bolts.
  • the only value of the vibration transmission runs through the damping ring arranged between the flanges.
  • the flanges are arranged to a certain extent floating on this damping ring, whereby they are only held in axial alignment by the clamping bolts, but are not pressed against one another. The flanges are pressed on only after the stationary working state has been reached by vacuum action.
  • the vacuum chamber and unit are preferably arranged one above the other so that the influence of gravity acts axially to the flange connection.
  • the vacuum pump being attached to the side of the vacuum chamber.
  • the design has proven to be insensitive to the effects of gravity.
  • the invention can be used with advantage in units which are vacuum pumps or cold heads.
  • Cryopumps and turbopumps, in which high-frequency bearing vibrations can occur, are particularly suitable as the vacuum pump.
  • a cold head has a piston that moves back and forth in a cylinder and carries out about 50 strokes per minute, which create a high level of vibration.
  • the damping ring is thicker than the sum of the thicknesses of the spring elements on a clamping bolt.
  • the relatively thick damping ring ensures that the vacuum causes a long deformation path of the damping ring, whereby the Spring elements on the clamping bolts can be effectively relieved.
  • a thick damping ring causes high vibration damping during vacuum operation.
  • the spring elements are preferably made of an elastomer material that is similar to that of the damping layer.
  • the invention makes it possible to connect the flanges of the vacuum chamber and the unit directly to one another.
  • a base flange which is an integral part of an assembly, is provided with a coupling flange, which is fastened in a latching manner.
  • the clamping bolts can then extend through the coupling flange, which together with the base flange forms the flange.
  • Fig. 1 is a side view of a first embodiment of the vacuum system
  • FIG. 2 shows a section through detail II of FIG. 1.
  • the vacuum system of FIG. 1 has a vacuum chamber 10 which is connected to an aggregate, which here is a vacuum pump 11.
  • the vacuum chamber 10 is, for example, a recipient for the semiconductor production or for the surface treatment of other workpieces.
  • the vacuum chamber is a vacuum-tight container which has a vacuum connection 12 with a flange 13.
  • the vacuum pump 11 is a cryopump or another high-vacuum pump with a flange 14. Between the flanges 13 and 14 there is a damping ring 15 made of elastomer material with a thickness of approximately 20 mm, but preferably not less than 15 mm.
  • the vacuum pump 11 is a high-vacuum pump with a connection 16 for a forevacuum pump.
  • FIG. 2 shows the flange connection 20 with the two flanges 13 and 14 and the damping ring 15 arranged between them.
  • the flanges and the damping ring have openings which are aligned with one another and through which clamping bolts 21 are inserted.
  • the clamping bolt 21 has a molded head 22 at one end and a head 23 in the form of a threaded nut seated on a thread at its opposite end.
  • the head 23 presses against an elastomeric spring element 24 and the head 23 presses against an elastomeric spring element 25.
  • Each of these spring elements is supported by a washer 26 or 27 on the flange 13, 14 in question.
  • the screw connection is secured by a lock nut 23a.
  • the clamping bolt 21 pulls the flanges 13 and 14 against one another in such a way that they are pressed sealingly against the damping ring 15.
  • the vacuum chamber is tightly connected to the vacuum pump.
  • vibrations are transmitted along path 30, namely from Flange 14 of the vacuum pump via the spring element 25 onto the head 23 and the shaft of the clamping bolt 21, and further via the head 22, the spring element 24 and the washer 26 onto the flange 13 of the vacuum chamber.
  • the damping ring When the vacuum has reached its final value mbar, for example 10 "7, the damping ring is axially compressed between the flanges 15, so that the thickness of originally about 20 mm, for example, 19 mm is reduced.
  • the Shore hardness of the damping ring is in the present Embodiment 50
  • the damping ring 15 is a Viton ring. It dampens the vibrations by a factor between 5 and 20 depending on the frequency. In the vacuum state there is no rigid connection between the vacuum chamber and the unit.
  • the flange 14 of the vacuum pump 11 consists of a base flange part 31, which is a component of the vacuum pump, and a coupling flange part 32, which surrounds the base flange part 31 and is fastened with a clamping ring 33.
  • the clamping ring 33 blocks movement of the coupling flange part 32 in the direction of the vacuum chamber, but permits removal of the coupling flange part 32 to the rear.
  • the clamping bolts 21 extend through the coupling flange part 32.

Abstract

The vacuum system consists of a vacuum chamber (10) and of a unit (11) that are connected by a flange connection (20). In order to prevent the transmission of vibrations from the unit (11) to the vacuum chamber (10), an elastomeric damping ring (15) is provided between the flanges (13, 14). Draw bolts (21), which press the flanges (13, 14) against the damping ring (15), contain spring elements (24, 25) under the heads (22, 23). When the vacuum has reached the quantity having the dimensions of work, the damping ring (15) is compressed under the action of the vacuum until the draw bolts (21) and the spring elements (24, 25) are relieved from pressure. This interrupts the vibration transmission path (30) over the draw bolts.

Description

Vakuumsystem vacuum system
Die Erfindung betrifft ein Vakuumsystem aus einer Vakuumkammer und einer damit über eine Flanschverbindung verbundenen Aggregat .The invention relates to a vacuum system comprising a vacuum chamber and a unit connected to it via a flange connection.
Bei einem Vakuumsystem aus Vakuumkammer und Aggregat besteht die Gefahr, dass Vibrationen, die von dem Aggregat erzeugt werden, auf die Vakuumkammer übertragen werden. Besonders Aggregate, wie Kryopumpen oder Kryo-Refrigeratoren, Kaltköpfe und ähnliche Kälteerzeuger, enthalten Kolben, die Schwingungen erzeugen und starke Vibrationen hervorrufen können. Wenn zwischen der Vakuumkammer und dem Aggregat Vibrationsdämpfer angeordnet sind, die im allgemeinen aus Membranbälgen bestehen, besteht die Gefahr, dass bei großen Nennweiten die Vibrationsdämpfer infolge des erzeugten Vakuums kontrahieren. Durch die hervorgerufene Versteifung wird der Dämpfungseffekt geringer. Nur mit sehr aufwendigen Abstützungen, die auch die Einbaulage einschränken, kann hier abgeholfen werden.In the case of a vacuum system comprising a vacuum chamber and a unit, there is a risk that vibrations generated by the unit will be transmitted to the vacuum chamber. In particular, aggregates such as cryopumps or cryogenic refrigerators, cold heads and similar refrigerators contain pistons that generate vibrations and can cause strong vibrations. If vibration dampers, which generally consist of membrane bellows, are arranged between the vacuum chamber and the unit, there is a risk that with large nominal diameters the Contract the vibration damper as a result of the vacuum created. The resulting stiffening reduces the damping effect. This can only be remedied with very complex supports, which also restrict the installation position.
Der Erfindung liegt die Aufgabe zugrunde, ein Vakuumsystem zu schaffen, bei dem Vakuumkammer und Aggregat zu Beginn der Vakuumerzeugung abdichtend verbunden sind, wobei mit zunehmender Verstärkung des Vakuums eine Schwingungsentkopplung stattfindet .The invention has for its object to provide a vacuum system in which the vacuum chamber and unit are sealingly connected at the beginning of vacuum generation, with vibration decoupling taking place as the vacuum increases.
Das erfindungsgemäße Vakuumsystem wird durch den Patentanspruch 1 charakterisiert. Erfindungsgemäß ist zwischen den Flanschen von Vakuumkammer und Aggregat ein elastomerer Dämpfungsring angeordnet, der bei dem von der Vakuumpumpe erzeugten Vakuum derart komprimiert wird, dass das mindestens eine um den Spannbolzen angeordnete Federelement entlastet wird und dadurch keine Vibrationen mehr überträgt.The vacuum system according to the invention is characterized by claim 1. According to the invention, an elastomeric damping ring is arranged between the flanges of the vacuum chamber and the unit, which is compressed in the vacuum generated by the vacuum pump in such a way that the at least one spring element arranged around the clamping bolt is relieved and therefore no longer transmits vibrations.
Die Erfindung geht von dem Gedanken aus, dass bei anfänglicher Erzeugung des Vakuums die Flansche unter Einschluss des Dämpfungsringes von den Spannbolzen gegeneinander gedrückt werden, wobei unvermeidlich eine Schwingungsübertragung von dem Aggregat über die Spannbolzen auf die Vakuumkammer erfolgt. Vibrationen werden dabei durch die Federelemente zwar gedämpft, aber nicht von der Vakuumkammer völlig ferngehalten. Wenn das Vakuum den angestrebten Arbeitswert erreicht hat, der beispielsweise 10"7 mbar beträgt, werden die Flansche durch die Wirkung des Vakuums so stark gegeneinander gepresst, dass der zwischen ihnen befindliche Dämpfungsring komprimiert wird. Dadurch werden die Federelemente an den Spannbolzen entlastet, so dass über die Spannbolzen praktisch keine Schwingungen mehr übertragen werden. Der einzige Wert der Schwingungsübertragung verläuft durch den zwischen den Flanschen angeordneten Dämpfungsring. An diesem Dämpfungsring sind die Flansche gewissermaßen schwimmend angeordnet, wobei sie durch die Spannbolzen lediglich in axialer Ausrichtung gehalten, nicht aber gegeneinander gepresst werden. Das Anpressen der Flansche erfolgt nach Erreichen des stationären Arbeitszustandes ausschließlich durch Vakuumwirkung.The invention is based on the idea that when the vacuum is initially generated, the flanges, including the damping ring, are pressed against one another by the tensioning bolts, with inevitable transmission of vibrations from the unit via the tensioning bolts to the vacuum chamber. Vibrations are dampened by the spring elements, but not completely kept away from the vacuum chamber. When the vacuum has reached the desired working value, which is, for example, 10 "7 mbar, the flanges are pressed against each other so strongly by the effect of the vacuum that the damping ring located between them is compressed. This relieves the spring elements on the clamping bolts, so that practically no vibrations are transmitted via the clamping bolts. The only value of the vibration transmission runs through the damping ring arranged between the flanges. The flanges are arranged to a certain extent floating on this damping ring, whereby they are only held in axial alignment by the clamping bolts, but are not pressed against one another. The flanges are pressed on only after the stationary working state has been reached by vacuum action.
Vorzugsweise sind Vakuumkammer und Aggregat übereinander angeordnet, so dass der Schwerkrafteinfluss axial zur Flanschverbindung wirkt. Es besteht aber auch die Möglichkeit einer anderen Orientierung, beispielsweise mit horizontaler Achse der Flanschverbindung, wobei die Vakuumpumpe seitlich an der Vakuumkammer angebracht ist. Die Konstruktion hat sich als unempfindlich gegen Schwerkrafteinflüsse erwiesen.The vacuum chamber and unit are preferably arranged one above the other so that the influence of gravity acts axially to the flange connection. However, there is also the possibility of a different orientation, for example with a horizontal axis of the flange connection, the vacuum pump being attached to the side of the vacuum chamber. The design has proven to be insensitive to the effects of gravity.
Die Erfindung ist mit Vorteil bei Aggregaten anwendbar, bei denen es sich um Vakuumpumpen oder Kaltköpfe handelt. Als Vakuumpumpe kommen insbesondere Kryopumpen und Turbopumpen in Betracht, bei denen hochfrequente Lagervibrationen auftreten können. Ein Kaltkopf hat einen Kolben, der sich in einem Zylinder hin- und herbewegt und etwa 50 Hübe pro Minute ausführt, die eine starke Schwingungsbeanspruchung bilden.The invention can be used with advantage in units which are vacuum pumps or cold heads. Cryopumps and turbopumps, in which high-frequency bearing vibrations can occur, are particularly suitable as the vacuum pump. A cold head has a piston that moves back and forth in a cylinder and carries out about 50 strokes per minute, which create a high level of vibration.
Gemäß einer bevorzugten Ausgestaltung der Erfindung ist der Dämpfungsring dicker als die Summe der Dicken der Federelemente an einem Spannbolzen. Durch den relativ dicken Dämpfungsring wird erreicht, dass das Vakuum einen langen Deformationsweg des Dämpfungsringes hervorruft, wodurch die Federelemente an den Spannbolzen wirksam entlastet werden können. Andererseits bewirkt ein dicker Dämpfungsring während des Vakuumbetriebes eine hohe Vibrationsdämpfung.According to a preferred embodiment of the invention, the damping ring is thicker than the sum of the thicknesses of the spring elements on a clamping bolt. The relatively thick damping ring ensures that the vacuum causes a long deformation path of the damping ring, whereby the Spring elements on the clamping bolts can be effectively relieved. On the other hand, a thick damping ring causes high vibration damping during vacuum operation.
Die Federelemente bestehen vorzugsweise aus einem Elastomermaterial, das ähnlich demjenigen der Dämpfungsschicht ist.The spring elements are preferably made of an elastomer material that is similar to that of the damping layer.
Die Erfindung ermöglicht es, die Flansche von Vakuumkammer und Aggregat direkt miteinander zu verbinden. Es besteht aber auch die Möglichkeit, dass ein Basisflansch, der fester Bestandteil eines Aggregats ist, mit einem Überwurfflansch versehen ist, welcher rastend befestigt ist. Die Spannbolzen können sich dann durch den Überwurfflansch erstrecken, der zusammen mit dem Basisflansch den Flansch bildet .The invention makes it possible to connect the flanges of the vacuum chamber and the unit directly to one another. However, there is also the possibility that a base flange, which is an integral part of an assembly, is provided with a coupling flange, which is fastened in a latching manner. The clamping bolts can then extend through the coupling flange, which together with the base flange forms the flange.
Im Folgenden werden Ausführungsbeispiele der Erfindung unter Bezugnahme auf die Zeichnungen näher erläutert.Exemplary embodiments of the invention are explained in more detail below with reference to the drawings.
Es zeigen:Show it:
Fig. 1 eine Seitenansicht einer ersten Ausführungsform des Vakuumsystems, undFig. 1 is a side view of a first embodiment of the vacuum system, and
Fig. 2 einen Schnitt durch die Einzelheit II von Figur 1.2 shows a section through detail II of FIG. 1.
Das Vakuumsystem von Figur 1 weist eine Vakuumkammer 10 auf, die mit einem Aggregat verbunden ist, das hier eine Vakuumpumpe 11 ist. Die Vakuumkammer 10 ist beispielsweise ein Rezipient für die Halbleiterherstellung oder für die Oberflächenbehandlung anderer Werkstücke. Die Vakuumkammer ist ein vakuumdichter Behälter, der einen Vakuumanschluss 12 mit einem Flansch 13 aufweist.The vacuum system of FIG. 1 has a vacuum chamber 10 which is connected to an aggregate, which here is a vacuum pump 11. The vacuum chamber 10 is, for example, a recipient for the semiconductor production or for the surface treatment of other workpieces. The vacuum chamber is a vacuum-tight container which has a vacuum connection 12 with a flange 13.
Die Vakuumpumpe 11 ist eine Kryopumpe oder eine andere Hochvakuumpumpe mit einem Flansch 14. Zwischen den Flanschen 13 und 14 befindet sich ein Dämpfungsring 15 aus Elastomermaterial mit einer Stärke von etwa 20 mm, jedoch vorzugsweise nicht weniger als 15 mm. Die Vakuumpumpe 11 ist eine Hochvakuumpumpe mit einem Anschluss 16 für eine Vorvakuumpumpe .The vacuum pump 11 is a cryopump or another high-vacuum pump with a flange 14. Between the flanges 13 and 14 there is a damping ring 15 made of elastomer material with a thickness of approximately 20 mm, but preferably not less than 15 mm. The vacuum pump 11 is a high-vacuum pump with a connection 16 for a forevacuum pump.
In Figur 2 ist die Flanschverbindung 20 mit den beiden Flanschen 13 und 14 und dem dazwischen angeordneten Dämpfungsring 15 detailliert dargestellt. Die Flansche und der Dämpfungsring haben miteinander fluchtende Öffnungen, durch die Spannbolzen 21 hindurch gesteckt sind. Der Spannbolzen 21 weist an seinem einen Ende einen angeformten Kopf 22 und an seinem gegenüberliegenden Ende einen Kopf 23 in Form einer auf einem Gewinde sitzenden Gewindemutter auf. Der Kopf 23 drückt gegen ein elastomeres Federelement 24 und der Kopf 23 drückt gegen ein elastomeres Federelement 25. Jedes dieser Federelemente ist mit einer Unterlegscheibe 26 bzw. 27 an dem betreffenden Flansch 13,14 abgestützt. Die Schraubverbindung ist durch eine Kontermutter 23a gesichert.FIG. 2 shows the flange connection 20 with the two flanges 13 and 14 and the damping ring 15 arranged between them. The flanges and the damping ring have openings which are aligned with one another and through which clamping bolts 21 are inserted. The clamping bolt 21 has a molded head 22 at one end and a head 23 in the form of a threaded nut seated on a thread at its opposite end. The head 23 presses against an elastomeric spring element 24 and the head 23 presses against an elastomeric spring element 25. Each of these spring elements is supported by a washer 26 or 27 on the flange 13, 14 in question. The screw connection is secured by a lock nut 23a.
Im Ruhezustand, also vor Einschaltung der Vakuumpumpe, zieht der Spannbolzen 21 die Flansche 13 und 14 derart gegeneinander, dass sie abdichtend gegen den Dämpfungsring 15 gedrückt werden. Dadurch wird die Vakuumkammer dicht mit der Vakuumpumpe verbunden. Beim Betrieb der Vakuumpumpe werden Schwingungen entlang des Weges 30 übertragen, nämlich vom Flansch 14 der Vakuumpumpe über das Federelement 25 auf den Kopf 23 und den Schaft des Spannbolzens 21, sowie weiter über den Kopf 22, das Federelement 24 und die Unterlegscheibe 26 auf den Flansch 13 der Vakuumkammer. Wenn das Vakuum seinen Endwert erreicht hat von beispielsweise 10"7 mbar, wird der Dämpfungsring 15 zwischen den Flanschen axial komprimiert, so dass seine Dicke von ursprünglich etwa 20 mm auf beispielsweise 19 mm reduziert ist. Die Shore-Härte des Dämpfungsringes beträgt bei dem vorliegenden Ausführungsbeispiel 50.In the idle state, that is to say before the vacuum pump is switched on, the clamping bolt 21 pulls the flanges 13 and 14 against one another in such a way that they are pressed sealingly against the damping ring 15. As a result, the vacuum chamber is tightly connected to the vacuum pump. During the operation of the vacuum pump, vibrations are transmitted along path 30, namely from Flange 14 of the vacuum pump via the spring element 25 onto the head 23 and the shaft of the clamping bolt 21, and further via the head 22, the spring element 24 and the washer 26 onto the flange 13 of the vacuum chamber. When the vacuum has reached its final value mbar, for example 10 "7, the damping ring is axially compressed between the flanges 15, so that the thickness of originally about 20 mm, for example, 19 mm is reduced. The Shore hardness of the damping ring is in the present Embodiment 50
Durch die Dickenreduzierung des Dämpfungsringes wird der Spannbolzen 21 entlastet, so dass die Schwingungsübertragungsstrecke über die Federelemente 24 und 25 unterbrochen ist. Der Dämpfungsring 15 ist ein Vitonring. Er dämpft die Vibrationen je nach Frequenz um einen Faktor zwischen 5 und 20. Im Vakuumzustand besteht keine starre Verbindung zwischen Vakuumkammer und Aggregat.By reducing the thickness of the damping ring, the clamping bolt 21 is relieved, so that the vibration transmission path via the spring elements 24 and 25 is interrupted. The damping ring 15 is a Viton ring. It dampens the vibrations by a factor between 5 and 20 depending on the frequency. In the vacuum state there is no rigid connection between the vacuum chamber and the unit.
Bei dem vorliegenden Ausführungsbeispiel besteht der Flansch 14 der Vakuumpumpe 11 aus einem Basisflanschteil 31, das Bestandteil der Vakuumpumpe ist und einem Überwurfflanschteil 32, das das Basisflanschteil 31 umgibt und mit einem Klemmring 33 befestigt ist. Der Klemmring 33 blockiert ein Bewegen des Überwurfflanschteils 32 in Richtung auf die Vakuumkammer, lässt jedoch ein Entfernen des Überwurfflanschteils 32 nach hinten zu. Die Spannbolzen 21 erstrecken sich durch das Überwurfflanschteil 32. In the present exemplary embodiment, the flange 14 of the vacuum pump 11 consists of a base flange part 31, which is a component of the vacuum pump, and a coupling flange part 32, which surrounds the base flange part 31 and is fastened with a clamping ring 33. The clamping ring 33 blocks movement of the coupling flange part 32 in the direction of the vacuum chamber, but permits removal of the coupling flange part 32 to the rear. The clamping bolts 21 extend through the coupling flange part 32.

Claims

PATENTANSPRUCHE PATENT CLAIMS
1. Vakuumsystem aus einer Vakuumkammer (10) und einer damit über eine Flanschverbindung (20) verbundenen Aggregat (11) , wobei die Flanschverbindung (20) Spannbolzen (21) mit an beiden Enden vorgesehenen Köpfen (22,23) und für jeden Spannbolzen mindestens ein Federelement (24,25) aufweist, d a du r c h g e k e n n z e i c h n e t , dass zwischen den Flanschen (13,14) von Vakuumkammer (10) und Aggregat (11) ein elastomerer Dämpfungsring (15) angeordnet ist, der bei dem von der Vakuumpumpe erzeugten Vakuum derart komprimiert wird, dass das mindestens eine Federelement (24,25) entlastet wird und dadurch keine Vibrationen mehr überträgt .1. Vacuum system comprising a vacuum chamber (10) and a unit (11) connected to it via a flange connection (20), the flange connection (20) clamping bolts (21) with heads (22, 23) provided at both ends and at least for each clamping bolt has a spring element (24, 25), since you rch characterized in that between the flanges (13, 14) of the vacuum chamber (10) and unit (11) an elastomeric damping ring (15) is arranged, which in the vacuum generated by the vacuum pump in such a way is compressed so that the at least one spring element (24, 25) is relieved and therefore no longer transmits vibrations.
2. Vakuumsystem nach Anspruch 1, dadurch gekennzeichnet, dass der Dämpfungsring (15) dicker ist als die Summe der Dicken der Federelement.e (24,25) an einem Spannbolzen (21).2. Vacuum system according to claim 1, characterized in that the damping ring (15) is thicker than the sum of the thicknesses of the Federelemente.e (24,25) on a clamping bolt (21).
3. Vakuumsystem nach Anspruch 1 oder 2 , dadurch gekennzeichnet, dass die Federelemente (24,25) aus einem Elastomermaterial bestehen, das ähnlich demjenigen des Dämpfungsringes (15) ist.3. Vacuum system according to claim 1 or 2, characterized in that the spring elements (24, 25) consist of an elastomer material which is similar to that of the damping ring (15).
4. Vakuumsystem nach einem der Ansprüche 1 - 3, dadurch gekennzeichnet, dass mindestens ein Flansch (14) ein erstes Flanschteil (31) und ein dieses umgebendes Überwurf- flanschteil (32) aufweist, durch das die Spannbolzen (21) hindurchgehen. 4. Vacuum system according to one of claims 1-3, characterized in that at least one flange (14) has a first flange part (31) and a union sleeve surrounding it. has flange part (32) through which the clamping bolts ( 21 ) pass.
PCT/EP2005/000625 2004-03-16 2005-01-22 Vacuum system WO2005095798A1 (en)

Applications Claiming Priority (2)

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DE102004012677.1 2004-03-16
DE200410012677 DE102004012677A1 (en) 2004-03-16 2004-03-16 vacuum system

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EP2918843A1 (en) * 2014-03-14 2015-09-16 Pfeiffer Vacuum Gmbh Vacuum pump damper
JP2017096286A (en) * 2015-11-19 2017-06-01 プファイファー・ヴァキューム・ゲーエムベーハー Vacuum pump
US9995421B2 (en) 2010-04-16 2018-06-12 Agilent Technologies, Inc. Vibration damper for vacuum pumps

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US9995421B2 (en) 2010-04-16 2018-06-12 Agilent Technologies, Inc. Vibration damper for vacuum pumps
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