WO2005057604A3 - Dispositifs a emission de champ. - Google Patents

Dispositifs a emission de champ. Download PDF

Info

Publication number
WO2005057604A3
WO2005057604A3 PCT/FR2004/050632 FR2004050632W WO2005057604A3 WO 2005057604 A3 WO2005057604 A3 WO 2005057604A3 FR 2004050632 W FR2004050632 W FR 2004050632W WO 2005057604 A3 WO2005057604 A3 WO 2005057604A3
Authority
WO
WIPO (PCT)
Prior art keywords
field emission
emission device
layer
cathode
relates
Prior art date
Application number
PCT/FR2004/050632
Other languages
English (en)
Other versions
WO2005057604A2 (fr
Inventor
Jean Dijon
Bruno Mourey
Jean-Frederic Clerc
Original Assignee
Commissariat Energie Atomique
Jean Dijon
Bruno Mourey
Jean-Frederic Clerc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique, Jean Dijon, Bruno Mourey, Jean-Frederic Clerc filed Critical Commissariat Energie Atomique
Priority to JP2006541992A priority Critical patent/JP2007513477A/ja
Priority to EP04805870A priority patent/EP1690277A2/fr
Priority to US10/581,485 priority patent/US20070200478A1/en
Publication of WO2005057604A2 publication Critical patent/WO2005057604A2/fr
Publication of WO2005057604A3 publication Critical patent/WO2005057604A3/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H01J1/3044—Point emitters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30453—Carbon types
    • H01J2201/30469—Carbon nanotubes (CNTs)

Abstract

L'invention concerne un dispositif à émission de champs, comportant : - une cathode (22, 30), - une couche isolante poreuse (26, 36), dont les pores contiennent des émetteurs (29) d'électrons, - une couche (28, 38, 48) conductrice, dite couche de grille.
PCT/FR2004/050632 2003-12-02 2004-11-30 Dispositifs a emission de champ. WO2005057604A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2006541992A JP2007513477A (ja) 2003-12-02 2004-11-30 電界放出デバイス
EP04805870A EP1690277A2 (fr) 2003-12-02 2004-11-30 Dispositifs a emission de champ.
US10/581,485 US20070200478A1 (en) 2003-12-02 2004-11-30 Field Emission Device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0350953A FR2863102B1 (fr) 2003-12-02 2003-12-02 Dispositifs a emission de champ.
FR0350953 2003-12-02

Publications (2)

Publication Number Publication Date
WO2005057604A2 WO2005057604A2 (fr) 2005-06-23
WO2005057604A3 true WO2005057604A3 (fr) 2005-12-08

Family

ID=34566390

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2004/050632 WO2005057604A2 (fr) 2003-12-02 2004-11-30 Dispositifs a emission de champ.

Country Status (5)

Country Link
US (1) US20070200478A1 (fr)
EP (1) EP1690277A2 (fr)
JP (1) JP2007513477A (fr)
FR (1) FR2863102B1 (fr)
WO (1) WO2005057604A2 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2873852B1 (fr) 2004-07-28 2011-06-24 Commissariat Energie Atomique Structure de cathode a haute resolution
TWI489507B (zh) * 2011-01-04 2015-06-21 Hon Hai Prec Ind Co Ltd 場發射電子器件及場發射顯示裝置
RU171957U1 (ru) * 2016-09-09 2017-06-22 Акционерное общество "Научно-производственное предприятие "Торий" Металлопористый резервуарный катод
JP6605553B2 (ja) * 2017-09-11 2019-11-13 シャープ株式会社 電子放出素子およびその製造方法ならびに電子素子の製造方法
DE102020129541A1 (de) * 2019-11-18 2021-05-20 Electronics And Telecommunications Research Institute Elektronenemissionsstruktur und Röntgenröhre, die sie enthält

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5559389A (en) * 1993-09-08 1996-09-24 Silicon Video Corporation Electron-emitting devices having variously constituted electron-emissive elements, including cones or pedestals
WO1999023680A1 (fr) * 1997-11-03 1999-05-14 Commissariat A L'energie Atomique Procede de fabrication d'une source d'electrons a micropointes
EP0951047A2 (fr) * 1998-03-27 1999-10-20 Canon Kabushiki Kaisha Nanostructure, dispositif émetteur d'électrons, dispositif à nanotube de carbone, et leurs procédés de fabrication
US5973444A (en) * 1995-12-20 1999-10-26 Advanced Technology Materials, Inc. Carbon fiber-based field emission devices
US6465132B1 (en) * 1999-07-22 2002-10-15 Agere Systems Guardian Corp. Article comprising small diameter nanowires and method for making the same
FR2829873A1 (fr) * 2001-09-20 2003-03-21 Thales Sa Procede de croissance localisee de nanotubes et procede de fabrication de cathode autoalignee utilisant le procede de croissance de nanotubes
US20030143398A1 (en) * 2000-02-25 2003-07-31 Hiroshi Ohki Carbon nanotube and method for producing the same, electron source and method for producing the same, and display

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2623013A1 (fr) * 1987-11-06 1989-05-12 Commissariat Energie Atomique Source d'electrons a cathodes emissives a micropointes et dispositif de visualisation par cathodoluminescence excitee par emission de champ,utilisant cette source
GB9416754D0 (en) * 1994-08-18 1994-10-12 Isis Innovation Field emitter structures
JP2000021287A (ja) * 1998-06-30 2000-01-21 Sharp Corp 電界放出型電子源及びその製造方法
KR100421218B1 (ko) * 2001-06-04 2004-03-02 삼성전자주식회사 선택 성장된 탄소나노튜브 전자 방출원을 이용한 전자방출 리소그래피 장치 및 리소그래피 방법
JP2005116232A (ja) * 2003-10-03 2005-04-28 Ngk Insulators Ltd 電子放出素子及びその製造方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5559389A (en) * 1993-09-08 1996-09-24 Silicon Video Corporation Electron-emitting devices having variously constituted electron-emissive elements, including cones or pedestals
US5973444A (en) * 1995-12-20 1999-10-26 Advanced Technology Materials, Inc. Carbon fiber-based field emission devices
WO1999023680A1 (fr) * 1997-11-03 1999-05-14 Commissariat A L'energie Atomique Procede de fabrication d'une source d'electrons a micropointes
EP0951047A2 (fr) * 1998-03-27 1999-10-20 Canon Kabushiki Kaisha Nanostructure, dispositif émetteur d'électrons, dispositif à nanotube de carbone, et leurs procédés de fabrication
US6465132B1 (en) * 1999-07-22 2002-10-15 Agere Systems Guardian Corp. Article comprising small diameter nanowires and method for making the same
US20030143398A1 (en) * 2000-02-25 2003-07-31 Hiroshi Ohki Carbon nanotube and method for producing the same, electron source and method for producing the same, and display
FR2829873A1 (fr) * 2001-09-20 2003-03-21 Thales Sa Procede de croissance localisee de nanotubes et procede de fabrication de cathode autoalignee utilisant le procede de croissance de nanotubes

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
DAVYDOV D N ET AL: "Field emitters based on porous aluminum oxide templates", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 86, no. 7, 1 October 1999 (1999-10-01), pages 3983 - 3987, XP012048750, ISSN: 0021-8979 *

Also Published As

Publication number Publication date
FR2863102A1 (fr) 2005-06-03
JP2007513477A (ja) 2007-05-24
WO2005057604A2 (fr) 2005-06-23
US20070200478A1 (en) 2007-08-30
EP1690277A2 (fr) 2006-08-16
FR2863102B1 (fr) 2006-04-28

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