WO2005045470A3 - Pyrolyzed-parylene based sensors and method of manufacture - Google Patents

Pyrolyzed-parylene based sensors and method of manufacture Download PDF

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Publication number
WO2005045470A3
WO2005045470A3 PCT/US2004/035985 US2004035985W WO2005045470A3 WO 2005045470 A3 WO2005045470 A3 WO 2005045470A3 US 2004035985 W US2004035985 W US 2004035985W WO 2005045470 A3 WO2005045470 A3 WO 2005045470A3
Authority
WO
WIPO (PCT)
Prior art keywords
based material
carbon based
pyrolyzed
film
manufacture
Prior art date
Application number
PCT/US2004/035985
Other languages
French (fr)
Other versions
WO2005045470A2 (en
Inventor
Yu-Chong Tai
Matthieu Liger
Scott Miserendino
Original Assignee
California Inst Of Techn
Yu-Chong Tai
Matthieu Liger
Scott Miserendino
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/821,790 external-priority patent/US7378655B2/en
Application filed by California Inst Of Techn, Yu-Chong Tai, Matthieu Liger, Scott Miserendino filed Critical California Inst Of Techn
Publication of WO2005045470A2 publication Critical patent/WO2005045470A2/en
Publication of WO2005045470A3 publication Critical patent/WO2005045470A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
    • H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
    • H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation

Abstract

A method (and resulting structure) for fabricating a sensing device. The method includes providing a substrate comprising a surface region and forming an insulating material overlying the surface region. The method also includes forming a film of carbon based material overlying the insulating material and treating to the film of carbon based material to pyrolyzed the carbon based material to cause formation of a film of substantially carbon based material having a resistivity ranging within a predetermined range. The method also provides at least a portion of the pyrolyzed carbon based material in a sensor application and uses the portion of the pyrolyzed carbon based material in the sensing application. In a specific embodiment, the sensing application is selected from chemical, humidity, piezoelectric, radiation, mechanical strain or temperature.
PCT/US2004/035985 2003-10-27 2004-10-27 Pyrolyzed-parylene based sensors and method of manufacture WO2005045470A2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US51462703P 2003-10-27 2003-10-27
US60/514,627 2003-10-27
US53859404P 2004-01-23 2004-01-23
US60/538,594 2004-01-23
US10/821,790 2004-04-09
US10/821,790 US7378655B2 (en) 2003-04-11 2004-04-09 Apparatus and method for sensing electromagnetic radiation using a tunable device

Publications (2)

Publication Number Publication Date
WO2005045470A2 WO2005045470A2 (en) 2005-05-19
WO2005045470A3 true WO2005045470A3 (en) 2005-11-03

Family

ID=34577653

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/035985 WO2005045470A2 (en) 2003-10-27 2004-10-27 Pyrolyzed-parylene based sensors and method of manufacture

Country Status (1)

Country Link
WO (1) WO2005045470A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007003489A1 (en) * 2005-07-01 2007-01-11 Siemens Aktiengesellschaft Method for producing a structured parylene coating, and corresponding structured parylene coating

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6489616B2 (en) * 2001-03-19 2002-12-03 The Board Of Governors Of Southwest Missouri State University Doped, organic carbon-containing sensor for infrared detection and a process for the preparation thereof

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6489616B2 (en) * 2001-03-19 2002-12-03 The Board Of Governors Of Southwest Missouri State University Doped, organic carbon-containing sensor for infrared detection and a process for the preparation thereof

Also Published As

Publication number Publication date
WO2005045470A2 (en) 2005-05-19

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