WO2004065289A2 - Micromechanical or microoptoelectronic devices with deposit of getter material and integrated heater, and support for the production thereof - Google Patents
Micromechanical or microoptoelectronic devices with deposit of getter material and integrated heater, and support for the production thereof Download PDFInfo
- Publication number
- WO2004065289A2 WO2004065289A2 PCT/IT2003/000857 IT0300857W WO2004065289A2 WO 2004065289 A2 WO2004065289 A2 WO 2004065289A2 IT 0300857 W IT0300857 W IT 0300857W WO 2004065289 A2 WO2004065289 A2 WO 2004065289A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- getter material
- deposit
- base
- layer
- getter
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0035—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS
- B81B7/0038—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004567099A JP2006513046A (en) | 2003-01-17 | 2003-12-24 | Micromechanical or microoptoelectronic devices with getter material deposits and built-in heaters, and support for their manufacture |
AU2003295223A AU2003295223A1 (en) | 2003-01-17 | 2003-12-24 | Micromechanical or microoptoelectronic devices with deposit of getter material and integrated heater, and support for the production thereof |
EP03786227A EP1592643A2 (en) | 2003-01-17 | 2003-12-24 | Micromechanical or microoptoelectronic devices with deposit of getter material and integrated heater, and support for the production thereof |
CA002511836A CA2511836A1 (en) | 2003-01-17 | 2003-12-24 | Micromechanical or microoptoelectronic devices with deposit of getter material and integrated heater, and support for the production thereof |
NO20053804A NO20053804L (en) | 2003-01-17 | 2005-08-12 | Micromechanical or microoptoelectronic device with deposition of getter material and integrated heating device and support plate for production thereof |
HK06107278.2A HK1087090A1 (en) | 2003-01-17 | 2006-06-28 | Micromechanical or microoptoelectronic devices and support for the production thereof |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITMI2003A000069 | 2003-01-17 | ||
IT000069A ITMI20030069A1 (en) | 2003-01-17 | 2003-01-17 | MICROMECHANICAL OR MICROOPTOELECTRONIC DEVICES WITH STORAGE OF GETTER MATERIAL AND INTEGRATED HEATER. |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004065289A2 true WO2004065289A2 (en) | 2004-08-05 |
WO2004065289A3 WO2004065289A3 (en) | 2005-01-06 |
Family
ID=32750478
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/IT2003/000857 WO2004065289A2 (en) | 2003-01-17 | 2003-12-24 | Micromechanical or microoptoelectronic devices with deposit of getter material and integrated heater, and support for the production thereof |
Country Status (12)
Country | Link |
---|---|
EP (1) | EP1592643A2 (en) |
JP (1) | JP2006513046A (en) |
KR (1) | KR20050092426A (en) |
CN (1) | CN100453442C (en) |
AU (1) | AU2003295223A1 (en) |
CA (1) | CA2511836A1 (en) |
HK (1) | HK1087090A1 (en) |
IT (1) | ITMI20030069A1 (en) |
MY (1) | MY157923A (en) |
NO (1) | NO20053804L (en) |
TW (1) | TW200500291A (en) |
WO (1) | WO2004065289A2 (en) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1834924A2 (en) | 2006-03-16 | 2007-09-19 | Commissariat A L'energie Atomique | Packaging of a microelectronic component, in particular a MEMS, in an airtight cavity |
EP1878693A1 (en) * | 2006-07-13 | 2008-01-16 | Commissariat à l'Energie Atomique | Encapsulated microcomponent equipped with at least one getter |
JP2009518191A (en) * | 2005-12-06 | 2009-05-07 | サエス ゲッターズ ソチエタ ペル アツィオニ | Method of manufacturing micromechanical device including getter material and manufactured device |
FR2956521A1 (en) * | 2010-02-16 | 2011-08-19 | Thales Sa | DEVICE COMPRISING ELECTRICAL, ELECTRONIC, ELECTROMECHANICAL OR ELECTRO-OPTICAL COMPONENTS WITH REDUCED SENSITIVITY AT LOW RATE OF DOSE |
EP2736071A1 (en) | 2012-11-22 | 2014-05-28 | Tronics Microsystems S.A. | Wafer level package with getter |
WO2014187505A1 (en) * | 2013-05-24 | 2014-11-27 | Epcos Ag | Microelectromechanical systems device package and method for producing the microelectromechanical systems device package |
EP2813465A1 (en) | 2013-06-12 | 2014-12-17 | Tronics Microsystems S.A. | MEMS device with getter layer |
US9260291B2 (en) | 2008-07-01 | 2016-02-16 | Commissariat A L'energie Atomique | Suspended getter material-based structure |
US9491802B2 (en) | 2012-02-17 | 2016-11-08 | Honeywell International Inc. | On-chip alkali dispenser |
US10109446B2 (en) | 2007-02-16 | 2018-10-23 | Saes Getters S.P.A. | Air-stable alkali or alkaline-earth metal dispensers |
US10199515B2 (en) | 2016-06-15 | 2019-02-05 | Seiko Epson Corporation | Vacuum package, electronic device, and vehicle |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005001449B3 (en) * | 2005-01-12 | 2006-07-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | A method for generating a predetermined internal pressure in a cavity of a semiconductor device |
US7402905B2 (en) * | 2006-08-07 | 2008-07-22 | Honeywell International Inc. | Methods of fabrication of wafer-level vacuum packaged devices |
JP2010251702A (en) * | 2009-03-27 | 2010-11-04 | Kyocera Corp | Electronic component, package and infrared sensor |
FR3008965B1 (en) * | 2013-07-26 | 2017-03-03 | Commissariat Energie Atomique | ENCAPSULATION STRUCTURE COMPRISING A MECHANICALLY REINFORCED HOOD AND GETTER EFFECT |
CN104743502A (en) * | 2013-12-31 | 2015-07-01 | 北京有色金属研究总院 | MEMS component with composite getter layer and preparation method thereof |
CN109173690B (en) * | 2018-09-20 | 2020-10-09 | 内蒙古科技大学 | Air consumption agent for metal material heat treatment |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5610438A (en) * | 1995-03-08 | 1997-03-11 | Texas Instruments Incorporated | Micro-mechanical device with non-evaporable getter |
EP0794558A1 (en) * | 1996-02-26 | 1997-09-10 | Ford Motor Company | Hermetic seal for an electronic component having a secondary chamber |
US5734226A (en) * | 1992-08-12 | 1998-03-31 | Micron Technology, Inc. | Wire-bonded getters useful in evacuated displays |
WO1998037392A1 (en) * | 1997-02-20 | 1998-08-27 | Cecap Ab | A sensor element having an integrated reference pressure |
US20020063322A1 (en) * | 2000-11-30 | 2002-05-30 | Robbins Roger A. | Micromechanical getter anchor |
-
2003
- 2003-01-17 IT IT000069A patent/ITMI20030069A1/en unknown
- 2003-12-24 CA CA002511836A patent/CA2511836A1/en not_active Abandoned
- 2003-12-24 EP EP03786227A patent/EP1592643A2/en not_active Withdrawn
- 2003-12-24 KR KR1020057013228A patent/KR20050092426A/en not_active Application Discontinuation
- 2003-12-24 CN CNB200380108858XA patent/CN100453442C/en not_active Expired - Fee Related
- 2003-12-24 WO PCT/IT2003/000857 patent/WO2004065289A2/en active Application Filing
- 2003-12-24 AU AU2003295223A patent/AU2003295223A1/en not_active Abandoned
- 2003-12-24 JP JP2004567099A patent/JP2006513046A/en active Pending
-
2004
- 2004-01-07 TW TW093100361A patent/TW200500291A/en unknown
- 2004-01-15 MY MYPI20040115A patent/MY157923A/en unknown
-
2005
- 2005-08-12 NO NO20053804A patent/NO20053804L/en unknown
-
2006
- 2006-06-28 HK HK06107278.2A patent/HK1087090A1/en not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5734226A (en) * | 1992-08-12 | 1998-03-31 | Micron Technology, Inc. | Wire-bonded getters useful in evacuated displays |
US5610438A (en) * | 1995-03-08 | 1997-03-11 | Texas Instruments Incorporated | Micro-mechanical device with non-evaporable getter |
EP0794558A1 (en) * | 1996-02-26 | 1997-09-10 | Ford Motor Company | Hermetic seal for an electronic component having a secondary chamber |
WO1998037392A1 (en) * | 1997-02-20 | 1998-08-27 | Cecap Ab | A sensor element having an integrated reference pressure |
US20020063322A1 (en) * | 2000-11-30 | 2002-05-30 | Robbins Roger A. | Micromechanical getter anchor |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009518191A (en) * | 2005-12-06 | 2009-05-07 | サエス ゲッターズ ソチエタ ペル アツィオニ | Method of manufacturing micromechanical device including getter material and manufactured device |
EP1834924A2 (en) | 2006-03-16 | 2007-09-19 | Commissariat A L'energie Atomique | Packaging of a microelectronic component, in particular a MEMS, in an airtight cavity |
EP1834924B1 (en) * | 2006-03-16 | 2016-05-25 | Commissariat à l'Énergie Atomique et aux Énergies Alternatives | Packaging of a microelectronic component, in particular a MEMS, in an airtight cavity |
US7786561B2 (en) | 2006-07-13 | 2010-08-31 | Commissariat A L'energie Atomique | Encapsulated microcomponent equipped with at least one getter |
EP1878693A1 (en) * | 2006-07-13 | 2008-01-16 | Commissariat à l'Energie Atomique | Encapsulated microcomponent equipped with at least one getter |
US10109446B2 (en) | 2007-02-16 | 2018-10-23 | Saes Getters S.P.A. | Air-stable alkali or alkaline-earth metal dispensers |
US9260291B2 (en) | 2008-07-01 | 2016-02-16 | Commissariat A L'energie Atomique | Suspended getter material-based structure |
FR2956521A1 (en) * | 2010-02-16 | 2011-08-19 | Thales Sa | DEVICE COMPRISING ELECTRICAL, ELECTRONIC, ELECTROMECHANICAL OR ELECTRO-OPTICAL COMPONENTS WITH REDUCED SENSITIVITY AT LOW RATE OF DOSE |
US9491802B2 (en) | 2012-02-17 | 2016-11-08 | Honeywell International Inc. | On-chip alkali dispenser |
EP2736071A1 (en) | 2012-11-22 | 2014-05-28 | Tronics Microsystems S.A. | Wafer level package with getter |
WO2014187505A1 (en) * | 2013-05-24 | 2014-11-27 | Epcos Ag | Microelectromechanical systems device package and method for producing the microelectromechanical systems device package |
US9479138B2 (en) | 2013-05-24 | 2016-10-25 | Epcos Ag | Microelectromechanical systems device package and method for producing the microelectromechanical systems device package |
EP2813465A1 (en) | 2013-06-12 | 2014-12-17 | Tronics Microsystems S.A. | MEMS device with getter layer |
US9884756B2 (en) | 2013-06-12 | 2018-02-06 | Tronics Microsystems S.A. | MEMS device with getter layer |
US10199515B2 (en) | 2016-06-15 | 2019-02-05 | Seiko Epson Corporation | Vacuum package, electronic device, and vehicle |
Also Published As
Publication number | Publication date |
---|---|
CA2511836A1 (en) | 2004-08-05 |
JP2006513046A (en) | 2006-04-20 |
ITMI20030069A1 (en) | 2004-07-18 |
NO20053804L (en) | 2005-08-12 |
HK1087090A1 (en) | 2006-10-06 |
EP1592643A2 (en) | 2005-11-09 |
AU2003295223A1 (en) | 2004-08-13 |
KR20050092426A (en) | 2005-09-21 |
MY157923A (en) | 2016-08-15 |
CN100453442C (en) | 2009-01-21 |
WO2004065289A3 (en) | 2005-01-06 |
TW200500291A (en) | 2005-01-01 |
CN1738765A (en) | 2006-02-22 |
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