WO2002079863A2 - Optoelectronic filters - Google Patents
Optoelectronic filters Download PDFInfo
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- WO2002079863A2 WO2002079863A2 PCT/GB2002/001341 GB0201341W WO02079863A2 WO 2002079863 A2 WO2002079863 A2 WO 2002079863A2 GB 0201341 W GB0201341 W GB 0201341W WO 02079863 A2 WO02079863 A2 WO 02079863A2
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- WO
- WIPO (PCT)
- Prior art keywords
- waveguide
- filter
- filter according
- dbr
- optical
- Prior art date
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/225—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure
- G02F1/2257—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference in an optical waveguide structure the optical waveguides being made of semiconducting material
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/212—Mach-Zehnder type
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
- G02F1/213—Fabry-Perot type
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/06—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide
- G02F2201/066—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 integrated waveguide channel; buried
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/30—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 grating
- G02F2201/307—Reflective grating, i.e. Bragg grating
Definitions
- This invention relates to optoelectronic filters, and is concerned more particularly, but not exclusively, with optoelectronic filters utilising distributed Bragg reflectors (DBRs) in Fabry-Perot cavities.
- DBRs distributed Bragg reflectors
- optical and “optoelectronic” are used in this specification in a non-specific sense, that is so as to cover use with radiation in the visible and non-visible parts of the spectrum, and so as not to be limited to use with visible light.
- a silicon waveguide structure typically comprises a rib or ridge formed in the upper silicon layer of a SOI (silicon-on-insulator) chip, the rib having a top surface and side walls and serving to confine an optical transmission along the waveguide.
- SOI silicon-on-insulator
- optoelectronic device may be integrated in such optical circuits in order to vary the amplitude, pulse length or phase of the optical transmission along the waveguide from a light source, such as a light-emitting diode or a laser diode.
- a light source such as a light-emitting diode or a laser diode.
- One such optoelectronic device is a wavelength-dependent filter which may be used to pass light of wavelength within a narrow passband, whilst preventing the passage of light of wavelengths outside this passband.
- WDM wavelength division multiplexing
- Signal processing in such WDM systems involves multiple combination and/or separation of the individual channels, and thus the key components of any WDM system are the optical filters providing selection of the distinct wavelength bands corresponding to the different data channels from the whole spectrum of the transmitted light signal.
- Optical filters are also necessary for further processing of the signals of different wavelength bands corresponding to such separated channels.
- An ideal optical filter can be characterised by a perfectly flat passband that would transmit all of the light energy of the designated range of wavelengths and block any contribution form the rest of the spectrum (so as to minimise any crosstalk from other channels).
- optical filter Various types of optical filter are available for this purpose, including filters based on distributed Bragg reflectors (DBRs) utilised in a Fabry-Perot (FP) cavity scheme.
- DBRs distributed Bragg reflectors
- FP Fabry-Perot
- Such FP-DBR filters are typically implemented by means of a multilayer surface coating structure defining interfaces between layers of different refractive indices which provide wavelength-dependent reflection and corresponding phase shifting of the light transmission.
- the design criteria of such filters are discussed in P.W. Baumeister, Applied Optics, Nol. 37, No. 28, pages 6609-14, 1998, and J. Pan et al., Society of Vacuum Coaters 41st Annual Technical Conference Proceedings, ISSN 0737-5921, pages 217-9, 1998.
- US 5080503 discloses a DBR-based filter (not in a FP cavity scheme) in which Bragg gratings are embedded in two different positions along the waveguide, the gratings being formed by parts of the waveguide for which the refractive index has been modified by a series of fabrication steps including masking and immersion in a bath of molten salt to change the refractive index of the material.
- the fabrication of such filters is complex and is incompatible with conventional fabrication technology used in the production of waveguide-based optical chips.
- the relatively small differences in the refractive indices of the different parts of such filters renders them of only limited use.
- US 4963177 discloses a grating-assisted optical waveguide device in which a
- Bragg grating is formed by masking and by immersing selected parts of the substrate in baths of molten salt to change the refractive index of those parts of the substrate by an ion-exchange process.
- Such a device suffers from the same disadvantages as the device of US 5080503.
- an optoelectronic filter comprising a substrate, an optical waveguide formed on the substrate for conducting a beam of radiation along an optical transmission path, a filter element in the optical transmission path of the waveguide consisting of two distributed Bragg reflector (DBR) elements separated by a Fabry-Perot (FP) cavity, and phase shifting means for controlling the phase shift along the waveguide between the DBR elements in order to tune the passband of the filter element, the phase shifting means comprising heater means for controlling the temperature of at least a part of the waveguide between the DBR elements.
- DBR distributed Bragg reflector
- FP Fabry-Perot
- each DBR is formed by at least one trench extending transversely of the optical transmission path and providing at least one air gap in the optical transmission path which results in wavelength-dependent reflection of the beam.
- a filter design allows high refractivity at the air/material interfaces for incident radiation at angles less than the angle of total reflection, and as a result allows filters of compact size to be produced.
- trenches that they assist in containing the heat produced by the heater means in the region in which it is required to heat the waveguide.
- Such a design can be used to implement a wide range of optical waveguide filters, and in particular allows components of DWDM optical communication systems, such as interleavers, to be produced with an almost ideal passband.
- w 2 m 2 ⁇ o/4n where ⁇ o is the wavelength corresponding to the maximum reflectivity of the filter, n is the effective refractive index for the waveguide mode at the wavelength ⁇ o and m 2 is an odd integer in the range 5 to 101.
- Figure 1 is a schematic diagram showing a view from above of an optoelectronic filter in accordance with the invention
- Figure 2 is a schematic diagram showing a section along the line I-I in Figure 1;
- FIGS. 3 to 7 are diagrams illustrating various filter implementations in accordance with the invention.
- Figures 8a to 8f are diagrams illustrating successive steps in a preferred method of fabrication of the filter of Figure 1;
- Figures 9 and 10 are respectively a cross-sectional view and a view from above of a phase shifting element used in the filters of the invention.
- FIG. 1 shows the top view of a segment of a SOI chip 1 incorporating a silicon rib or ridge waveguide 2 formed in a silicon layer 6 which typically has a thickness in the range of 2 to 10 ⁇ m, a silica confinement layer 3 providing optical confinement in a vertical direction, and a silicon substrate 4.
- Deep trenches 5 are etched perpendicularly to the waveguide direction up to the confinement layer 3 to form a distributed Bragg reflector (DBR).
- Figure 2 shows a vertical section through one of the trenches 5 from which it is apparent that the trench extends completely through the waveguide 2 and through the supporting layer 6 up to the confinement layer 3 and for some distance either side of the waveguide 2.
- DBR distributed Bragg reflector
- the trench may extend only part of the way through the supporting layer 6 so that it does not extend to the depth of the confinement layer 3. Furthermore the trench may extend transversely to the waveguide at angles other then 90° in some embodiments of the invention.
- the DBR may comprise one or more such trenches, the particular embodiment of Figures 1 and 2 having four trenches 5 extending parallel to one another. Furthermore the trenches 5 have identical widths w 1; and are spaced apart by equal distances w 2> which are defined by Bragg resonance conditions:
- ⁇ 0 is the wavelength corresponding to the maximum reflectivity R of the DBR, mi and are odd integer numbers
- n is the effective refractive index for the waveguide mode at ⁇ 0 .
- R depends on number of trenches M according to the relationship:
- the DBR reflects optical power P in wavelength ranges ⁇ ... ⁇ N around ⁇ o forming a reflection band.
- the DBR arrangement is integrated with a Fabry-Perot (FP) cavity to ensure that the filter passes only light within a narrow wavelength band whilst reflecting light of all other wavelengths.
- Figure 3 shows an integrated optical circuit incorporating a waveguide 12, two identical DBRs 15 and 16, and a phase shifting element (PSE) 17 within a Fabry-Perot (FP) cavity of length w FP formed between the two DBRs.
- the FP cavity introduces one or more passbands F( ⁇ pp) within the reflection band of the DBRs 15, 16 around the or each FP resonance frequency: where m is an integer.
- a FP-DBR structure acts as an optical filter for filtering light of wavelengths P( ⁇ pp, ⁇ ⁇ ... ⁇ n) so as to transmit light of wavelengths within the or each passband P( ⁇ w) and reflect light of other wavelengths P( ⁇ .. A N ).
- the FP resonance frequency ⁇ pp and the position of the or each passband can be controlled by the PSE 17 within the cavity.
- Such a PSE enables filters to be produced which are capable of acting as scanning or tunable filters.
- the PSE can be implemented as an integrated thermal heater which can be fabricated on SOI material.
- Figure 4 shows a development of such an integrated optical circuit to enable the reflected optical power to be utilised in further optical processing stages.
- the integrated optical circuit 20 comprises effectively two identical systems as described with reference to Figure 3 connected in parallel between two 3dB directional couplers 21 and 22. More particularly the circuit 20 comprises two waveguides 23 and 24 connected to respective arms of each coupler 21, 22, and two sets of trenches 32 intersecting both waveguides 23, 24 and forming two DBRs 25 and 26 separated by a FP cavity and two DBRs 27 and 28 separated by a further FP cavity.
- Each set of trenches 32 may comprise one or more trenches, six such trenches being provided in the example given.
- the first coupler 21 has an input 29 for the inputted light of wavelengths P( ⁇ pp, ⁇ i ... ⁇ >j) and an output 30 for the reflected light of wavelengths -P( ⁇ ... ⁇ - N ) to be outputted for further filtering or some other function in further processing stages, whereas the second coupler has an output 31 for the light of wavelength P( ⁇ pp) passed by the filter.
- the 3dB couplers 21 and 22 are directional couplers of a known type, for example as shown in Figure 3 of US 4963177.
- FIG. 5 shows an integrated optical circuit 50 comprising N individual FP-DBR filters connected in series. More particularly such a circuit 50 comprises N + 1 DBRs 51, that is DBRt, DBR 2 , DBR 3 DBR N+1) separated by N FP cavities 52, that is FPi, FP 2 FPN, distributed along a waveguide 53.
- such an arrangement acts as an optical filter for filtering light of wavelengths P ;n ( ⁇ ) so as to transmit light of wavelengths within the or each passband P 0 « /( ⁇ ) and reflect light of other wavelengths P_ n ( ⁇ ) - P 0M ⁇ ( ⁇ ).
- Figure 6 shows a development of such an integrated optical circuit to enable the reflected optical power to be utilised in further optical processing stages.
- the circuit 60 comprises effectively two identical systems as described with reference to Figure 5 connected in parallel between two 3dB directional couplers 61 and 62. More particularly the circuit 60 comprises two waveguides 63 and 64 connected to respective arms of each coupler 61, 62, and two sets of FP-DBR circuits 65 and 66, each comprising N+l DBRs, that is DBR ls DBR 2 , DBR 3 DBR N+ ⁇ , separated by N FP cavities, that is FPi, FP 2 FPN., distributed along a respective one of the waveguides
- the circuit incorporates a first coupler 61 having an input for the inputted light of wavelengths P, petition( ⁇ ) and an output for the reflected light of wavelengths Pt n ( ⁇ ) - P 0Ut (X) to be outputted to the further processing stages, and a second coupler 62 having an output for the light of wavelength P ow ⁇ ( ⁇ ) passed by the filter.
- a first coupler 61 having an input for the inputted light of wavelengths P, petition( ⁇ ) and an output for the reflected light of wavelengths Pt n ( ⁇ ) - P 0Ut (X) to be outputted to the further processing stages
- a second coupler 62 having an output for the light of wavelength P ow ⁇ ( ⁇ ) passed by the filter.
- the shape of the passband can alternatively be enhanced by the combining of individual FP filters in cascade as shown in the circuit of Figure 7.
- the integrated optical circuit 70 comprises N individual FP-DBR filter stages 71, each stage comprising two DBRs separated by a FP cavity, connected in cascade and connected by respective waveguides 72 to a N X 1 coupler 73 (using a circuit arrangement similar to that shown in Figure 13 of IEEE J.of Sel. Top. in Quant. Elect., Vol. 2, No. 2, 1996, page 151).
- Such an arrangement acts as an optical filter for filtering light of wavelengths P, let( ⁇ ) supplied to the input 75 so as to transmit light of wavelength P;( ⁇ ) from the output of the first FP-DBR filter stage 71, light of wavelength P 2 ( ⁇ ) from the output of the second FP-DBR filter stage 71, and light of wavelength P_ ( ⁇ ) from the output of the last FP-DBR filter stage 71.
- the optical spectra of all the filter stages 71, P ⁇ ... N ( ⁇ ) are combined in the coupler 73 to produce a desirable shape of the whole transmitted spectrum, P out ( ⁇ ), with the reflected light of other wavelengths P, ;( ⁇ ) - P out X) being outputted from the output 74 for further processing.
- a layer of photoresist 80 is applied to a SiO 2 layer 81 on top of an epitaxial layer 82 which in turn overlies a buried SiO layer 83 on the silicon substrate 84, as shown in Figure 8a.
- the photoresist layer 80 is then exposed through a mask (not shown) and developed prior to being etched, preferably using a dry etch technique, to form five slots 85 in the SiO layer 81, as shown in Figure 8b.
- the photoresist layer 80 is then removed leaving the SiO layer 81 incorporating the slots 85 in position on top of the epitaxial layer 82, as shown in Figure 8c.
- the epitaxial layer 82 is then etched to produce five trenches 86 (one more than is shown in Figure 1) using , the SiO 2 layer 81 as a mask with the buried SiO 2 layer 83 being used as an etch stop, as shown in Figure 8d.
- a further layer of photoresist 87 is then applied to the SiO 2 layer 81, and the photoresist layer 87 is exposed through a further mask (not shown) defining the required waveguide pattern.
- the exposed photoresist is then developed and the SiO layer 81 is selectively etched, as shown in Figure 8e.
- a suitable deep etching process which may be used in this application is dry plasma etching as disclosed in "High etch rate, deep anisotropic plasma etching of silicon for MEMS fabrication " by T. Pandhumsopom, L. Wang, M. Feldbaum, P. Gadgil, Alcatel Comptech Inc. Finally, using the SiO 2 layer 81 as a mask, the epitaxial layer 82 is partially etched to produce the waveguide 88, as shown in Figure 8f.
- Figure 9 shows a cross-sectional view of a heater 93, which may be used as the PSE 17 of Figure 3 for tuning the filter, incorporated within the waveguide
- Figure 10 is a top view of the FP-DBR cavity incorporating the heater 93.
- the waveguide 2 is formed on a silicon layer 6 separated from the silicon substrate 4 by a silica (SiO 2 ) optical confinement layer 3.
- the heater 93 is formed by a SiO 2 insulating layer 94 on top of the waveguide 2 and a resistive alloy layer 95 on top of the layer 94.
- the resistive alloy of the layer 95 is preferably Ti/W/Au.
- the insulating layer 94 extends within the FP cavity between the trenches 5 of the two DBR's 15 and 17, and the resistive layer 95 is provided with contacts 97 to which a voltage source is connected for passing a current through the resistive layer 95 to effect local heating of the waveguide 2.
- the heater 93 may be fabricated as an integral part of the fabrication method already described with reference to Figures 8a to 8f.
- the insulating layer 94 is formed by oxidising a part of the waveguide in a similar manner to the SiO 2 layer 81 of Figures 8a to 8£ and the resistive layer 95 is deposited on top of the insulating layer 94 and shaped using conventional photoresist masking and etching techniques prior to the bonding of the contacts 97 to the resistive layer 95 in conventional manner.
- an appropriate voltage is applied to the contacts 97 to pass a current through the resistive layer 95 to thereby cause resistive heating of the layer 95 and the section of the waveguide 2 under the layer 95.
- the refractive index of the waveguide 2 changes due to its temperature dependence (thermo-optic effect) causing a change in the optical length of the section of the waveguide 2 under the layer 95.
- an electronic control circuit (not shown) allows the phase of the light outputted by the waveguide 2 to be controlled relative to the phase prior of the input light
- the heater may be implemented by two similarly doped regions on opposite sides of the waveguide separated by the intrinsic silicon of the waveguide, as described in GB 9815655.7. It is also possible for the PSE to be in the form of a Peltier device in which heating is effected at a junction between two dissimilar materials, for example at a junction between p-doped and n-doped regions of the silicon layer, due to the Peltier effect.
- the filters in accordance with the invention are particularly suitable for integration within an integrated optical circuit, and can be used with advantage in a hybrid laser design.
- a major advantageous feature of the filters in accordance with the invention is their small size by comparison with wavelength-selecting components based on free diffraction and propagation such as an arrayed waveguide grating (AWG) or various implementations of the Mach-Zehnder interferometer (MZI) scheme.
- AWG arrayed waveguide grating
- MZI Mach-Zehnder interferometer
- filters in accordance with the invention are ideal for building various types of optical spectrum analyser (OSA), as well as for optical channel monitors (OCM).
- OSA optical spectrum analyser
- OCM optical channel monitors
- the optical power can be measured not by integrating over the complete spectral span of a channel, but rather by sampling the channel at the wavelength of the filter. This wavelength can be scanned or tuned by means of thermal control over the whole spectral range.
- Filters in accordance with the invention can also be used in multiplexers or demultiplexers based on so-called interleavers having a periodic comb-like rejection function.
- interleavers having a periodic comb-like rejection function.
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- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
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Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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GBGB0108129.8A GB0108129D0 (en) | 2001-03-31 | 2001-03-31 | Optoelectronic filters |
GB0108129.8 | 2001-03-31 |
Publications (2)
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WO2002079863A2 true WO2002079863A2 (en) | 2002-10-10 |
WO2002079863A3 WO2002079863A3 (en) | 2003-02-20 |
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PCT/GB2002/001341 WO2002079863A2 (en) | 2001-03-31 | 2002-03-20 | Optoelectronic filters |
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GB (1) | GB0108129D0 (en) |
WO (1) | WO2002079863A2 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7555173B2 (en) * | 2003-04-09 | 2009-06-30 | Cornell Research Foundation, Inc. | Electro-optic modulator on rib waveguide |
WO2011134692A1 (en) * | 2010-04-27 | 2011-11-03 | Asml Netherlands B.V. | Spectral purity filter |
GB2522252A (en) * | 2014-01-20 | 2015-07-22 | Rockley Photonics Ltd | Tunable SOI laser |
CN109828331A (en) * | 2019-03-27 | 2019-05-31 | 浙江大学 | A kind of wavelength locker and adjustable wavelength laser |
US10811848B2 (en) | 2017-06-14 | 2020-10-20 | Rockley Photonics Limited | Broadband arbitrary wavelength multichannel laser source |
US11177627B2 (en) | 2016-02-19 | 2021-11-16 | Rockley Photonics Limited | Tunable laser |
US11699892B2 (en) | 2016-02-19 | 2023-07-11 | Rockley Photonics Limited | Discrete wavelength tunable laser |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0480370A1 (en) * | 1990-10-08 | 1992-04-15 | Fujitsu Limited | Optical waveguide type wavelength filter |
GB2339919A (en) * | 1998-07-17 | 2000-02-09 | Bookham Technology Ltd | Thermo-optic semiconductor device |
EP0999461A2 (en) * | 1998-11-06 | 2000-05-10 | Heriot-Watt University | Switchable filter |
GB2347230A (en) * | 1999-02-23 | 2000-08-30 | Marconi Electronic Syst Ltd | Optical slow wave modulator |
-
2001
- 2001-03-31 GB GBGB0108129.8A patent/GB0108129D0/en not_active Ceased
-
2002
- 2002-03-20 WO PCT/GB2002/001341 patent/WO2002079863A2/en not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0480370A1 (en) * | 1990-10-08 | 1992-04-15 | Fujitsu Limited | Optical waveguide type wavelength filter |
GB2339919A (en) * | 1998-07-17 | 2000-02-09 | Bookham Technology Ltd | Thermo-optic semiconductor device |
EP0999461A2 (en) * | 1998-11-06 | 2000-05-10 | Heriot-Watt University | Switchable filter |
GB2347230A (en) * | 1999-02-23 | 2000-08-30 | Marconi Electronic Syst Ltd | Optical slow wave modulator |
Non-Patent Citations (3)
Title |
---|
BAUMEISTER P: "BANDPASS FILTERS FOR WAVELENGTH DIVISION MULTIPLEXING-MODIFICATION OF THE SPECTRAL BANDWIDTH" APPLIED OPTICS, OPTICAL SOCIETY OF AMERICA,WASHINGTON, US, vol. 37, no. 28, 1 October 1998 (1998-10-01), pages 6609-6614, XP000996846 ISSN: 0003-6935 cited in the application * |
COCORULLO G ET AL: "ALL-SILICON FABRY-PEROT MODULATOR BASED ON THE THERMO-OPTIC EFFECT" OPTICS LETTERS, OPTICAL SOCIETY OF AMERICA, WASHINGTON, US, vol. 19, no. 6, 15 March 1994 (1994-03-15), pages 420-422, XP000434799 ISSN: 0146-9592 * |
LIU M Y ET AL: "HIGH-MODULATION-DEPTH AND SHORT-CAVITY-LENGHT SILICON FABRY-PEROT MODULATOR WITH TWO GRATING BRAGG REFLECTORS" APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 68, no. 2, 8 January 1996 (1996-01-08), pages 170-172, XP000552701 ISSN: 0003-6951 cited in the application * |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7555173B2 (en) * | 2003-04-09 | 2009-06-30 | Cornell Research Foundation, Inc. | Electro-optic modulator on rib waveguide |
WO2011134692A1 (en) * | 2010-04-27 | 2011-11-03 | Asml Netherlands B.V. | Spectral purity filter |
US9726989B2 (en) | 2010-04-27 | 2017-08-08 | Asml Netherlands B.V. | Spectral purity filter |
GB2522252A (en) * | 2014-01-20 | 2015-07-22 | Rockley Photonics Ltd | Tunable SOI laser |
US9270078B2 (en) | 2014-01-20 | 2016-02-23 | Rockley Photonics Limited | Tunable SOI laser |
GB2522252B (en) * | 2014-01-20 | 2016-04-20 | Rockley Photonics Ltd | Tunable SOI laser |
US9660411B2 (en) | 2014-01-20 | 2017-05-23 | Rockley Photonics Limited | Tunable SOI laser |
US11177627B2 (en) | 2016-02-19 | 2021-11-16 | Rockley Photonics Limited | Tunable laser |
US11699892B2 (en) | 2016-02-19 | 2023-07-11 | Rockley Photonics Limited | Discrete wavelength tunable laser |
US10811848B2 (en) | 2017-06-14 | 2020-10-20 | Rockley Photonics Limited | Broadband arbitrary wavelength multichannel laser source |
CN109828331A (en) * | 2019-03-27 | 2019-05-31 | 浙江大学 | A kind of wavelength locker and adjustable wavelength laser |
Also Published As
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GB0108129D0 (en) | 2001-05-23 |
WO2002079863A3 (en) | 2003-02-20 |
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