WO2002046819A2 - Tilting mirror device - Google Patents

Tilting mirror device Download PDF

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Publication number
WO2002046819A2
WO2002046819A2 PCT/DE2001/004546 DE0104546W WO0246819A2 WO 2002046819 A2 WO2002046819 A2 WO 2002046819A2 DE 0104546 W DE0104546 W DE 0104546W WO 0246819 A2 WO0246819 A2 WO 0246819A2
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WO
WIPO (PCT)
Prior art keywords
mirror device
tilting mirror
material part
tilting
light beam
Prior art date
Application number
PCT/DE2001/004546
Other languages
German (de)
French (fr)
Other versions
WO2002046819A3 (en
Inventor
Christof Abel-Keilhack
Manfred Burkhard Helm
Original Assignee
Siemens Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Aktiengesellschaft filed Critical Siemens Aktiengesellschaft
Publication of WO2002046819A2 publication Critical patent/WO2002046819A2/en
Publication of WO2002046819A3 publication Critical patent/WO2002046819A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10603—Basic scanning using moving elements
    • G06K7/10633—Basic scanning using moving elements by oscillation
    • G06K7/10643—Activating means
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K7/00—Methods or arrangements for sensing record carriers, e.g. for reading patterns
    • G06K7/10—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation
    • G06K7/10544—Methods or arrangements for sensing record carriers, e.g. for reading patterns by electromagnetic radiation, e.g. optical sensing; by corpuscular radiation by scanning of the records by radiation in the optical part of the electromagnetic spectrum
    • G06K7/10554—Moving beam scanning
    • G06K7/10594—Beam path
    • G06K7/10603—Basic scanning using moving elements
    • G06K7/10633—Basic scanning using moving elements by oscillation
    • G06K7/10643—Activating means
    • G06K7/10653—Activating means using flexible or piezoelectric means

Definitions

  • the present invention relates to a tilting mirror device according to the preamble of patent claim 1.
  • Tilting mirror devices are known in which, according to FIG. 1, a first mirror 13 can be deflected in a first direction by a first galvanometer 14 and a second one
  • Mirror 15 can be deflected in a second direction by a second galvanometer 16.
  • the first direction is perpendicular to the second direction.
  • the incident light beam 17 strikes the first mirror 13 and is deflected to the second mirror 15.
  • the light beam is then focused by a lens 18 onto a work surface 19.
  • the light beam 20 striking the work surface 19 can track any continuous path when the first mirror 13 and the second mirror 15 move accordingly.
  • Such an arrangement is referred to as a scanner.
  • Laser beams are usually used as light beams if the tilting mirror device described is e.g. is used for laser marking.
  • the object of the present invention is to provide a tilting mirror device which is of comparatively simple construction and is therefore inexpensive to manufacture.
  • the main advantage is that the tilting mirror device according to the invention is comparatively simple and therefore inexpensive to manufacture. This is due in particular to the fact that the required drive devices only have a travel range of a few millimeters with tiv small forces (approx. 1 N).
  • the tilting mirror devices according to the invention are particularly suitable for applications in which only relatively small deflection angles are required.
  • the tilting mirror device according to the invention can also be used very well in resonance scanners.
  • Figure 1 is a schematic representation of a known tilting mirror device with two mirrors and two galvanometers
  • FIG. 2 shows a schematic side view of the tilting mirror device according to the invention in a moving state
  • Figure 3 shows the tilting mirror device of Figure 2 in a different state of motion
  • Figure 4 is a schematic representation of a preferred embodiment of the tilting mirror device according to the invention.
  • the tilting mirror device according to the invention which is preferably a four-bar structure, consists of a material part, which is preferably of a strip-like structure and comprises five elements which are connected to one another by four joints.
  • the entire device is designed as a solid structure. More precisely, a first outer element, which is designated by 1, is fixedly arranged in a housing of the tilting mirror device. This also applies to a second outer element 5, which is also fixedly arranged in the housing at a distance from the first element 1, wherein it is preferably located in the plane of the first element 1. Starting from the first outer element 1, a first intermediate element 2, a middle element 3 and a second intermediate element 4 are located between the outer elements 1 and 5.
  • the elements mentioned are each connected on the sides facing one another by joints. connected to each other.
  • the outer element 1 is connected via the joint 6 to the intermediate element 2, the intermediate element 2 via the joint 7 to the middle element 3, the middle element 3 via the joint 8 to the intermediate element 4 and the intermediate element 4 via the joint 9 connected to the outer element 5.
  • the joints are preferably 6, 7, 8 and 9 each notch joints, which are formed in the material part in the transverse direction and the outer element 1, the intermediate element 2, the middle element 3, the intermediate element 4 and the outer Define element 5.
  • the material part mentioned preferably consists of a superelastic material, which is, for example, nickel titanium (NiTi).
  • NiTi nickel titanium
  • the material part has a dimension of 57 x 8 mm.
  • a first mirror 10 is arranged on one side of the intermediate element 2. Accordingly, a second mirror 11 is arranged on the same side of the intermediate element 4.
  • the middle element 3 is moved linearly perpendicular to the extension of the material part by a drive device, not shown, in the direction of the arrow P1. This movement is made possible by the elasticity of the joints 6, 7, 8 and 9 designed as notch joints in the material part.
  • the intermediate elements 2, 4 arranged to the right and left of it execute a tilting movement with the angle ⁇ .
  • the mirrors 10 and 11 are preferably each slightly inclined mirrors, the inclination of the mirrors running at an acute angle to the plane of the intermediate part 2 or 4 in the direction of the central element 3.
  • An incident light beam 12 is reflected on the first mirror 10 in the direction of the second mirror 11 (reference symbol 12 ⁇ ) in order to also be reflected there and to leave the tilting mirror device as a falling light beam 12 ".
  • FIGS. 2 and 3 show approximately the different maximum deflections of the middle element 3 in the opposite directions, as well as the deflections of the light beam 12 ′′ in the direction of the arrow P2 that can be achieved.
  • FIG. 4 shows in detail a strip-shaped material part which consists of a superelastic NiTi material in which the joints 6, 7, 8 and 9 are designed as notch joints.
  • a deflection of the middle element 3 by one millimeter leads to a tilting movement of approximately 4.5 ° of the intermediate elements 2 and 4, whereby a deflection of a total of ⁇ 18 ° can be achieved.
  • the maximum elongation occurring in the joints 7 and 8 is approximately 1.3% and the stresses occurring in these joints are a maximum of 330 N / mm 2 .
  • the material part and the notch joints are preferably produced by erosion, since nickel-titanium cannot be machined.
  • the minimum material thickness of the notch joints should not be less than about 0.3 mm, since the material mentioned becomes brittle at the edge areas due to the eroding.
  • the transmission ratio between the actuating path and the rotary movement can be varied within wide limits by the spacing relationships between the joints 6, 7, 8 and 9.
  • a highly precise and therefore expensive linear guidance of the drive is not necessary.
  • a force application that is not exactly perpendicular to the plane of the central element 3 does lead to a slightly asymmetrical deflection of the structure; however, this asymmetry is fully compensated for by the parallel approach.
  • Suitable as drives are, for example, plunger coils or, in the case of relatively small angular movements, also piezo stacks. The advantage of such piezo stacks is that very fast movements in the kHz range are possible.
  • the tilting mirror device described is suitable for converting a linear movement into a rotary movement.
  • two of the tilting mirror arrangements described are therefore required, which are connected in series, the light beam then being guided over a total of 4 mirrors.
  • the present tilting mirror device is particularly suitable, for example, as a guide gear in a light or laser deflection arrangement, in particular in a laser marking arrangement.
  • a guide gear in a light or laser deflection arrangement
  • it can also be used in a multi-axis drive, a robot wrist or in an inclinometer.
  • the material part can also be clamped differently than in the embodiment described above.

Abstract

The invention relates to an optical deflection device for deflecting an incident light beam (12) in a direction (P2). A material part (1, 2, 3, 4, 5) is tightly clamped at at least one end and can be excited by a drive device to perform linear movements perpendicularly to the plane of the material part. Two mirrors (10, 11) are located a distance apart from each other as seen in the direction of the longitudinal extension of the material part. When the material part is moved linearly, these mirrors (10, 11) are moved perpendicularly to the plane of said material part, so that the light beam (12) that is incident on one mirror (10) is reflected to the other mirror (11) and after reflection on said other mirror (11), is diverted in the direction (P2), perpendicularly to the plane of the material strip. Several pivot joints (6, 7, 8, 9) are preferably located in the longitudinal direction of the material part, dividing the material part into several elements.

Description

Beschreibungdescription
KippspiegeleinrichtungKippspiegeleinrichtung
Die vorliegende Erfindung betrifft eine Kippspiegeleinrichtung nach dem Oberbegriff des Patentanspruches 1.The present invention relates to a tilting mirror device according to the preamble of patent claim 1.
Es sind Kippspiegeleinrichtungen bekannt, bei denen gemäß der Figur 1 ein erster Spiegel 13 durch ein erstes Galvanometer 14 in einer ersten Richtung ablenkbar ist und ein zweiterTilting mirror devices are known in which, according to FIG. 1, a first mirror 13 can be deflected in a first direction by a first galvanometer 14 and a second one
Spiegel 15 durch ein zweites Galvanometer 16 in einer zweiten Richtung ablenkbar ist. Dabei verläuft die erste Richtung senkrecht zur zweiten Richtung. Der einfallende Lichtstrahl 17 trifft auf den ersten Spiegel 13 und wird zum zweiten Spiegel 15 abgelenkt. Anschließend wird der Lichtstrahl durch ein Objektiv 18 auf eine Arbeitsfläche 19 fokussiert. Der auf die Arbeitsfläche 19 auffallende Lichtstrahl 20 kann bei der entsprechenden Bewegung des ersten Spiegels 13 und des zweiten Spiegels 15 eine beliebige kontinuierliche Bahn verfol- gen. Eine solche Anordnung wird als Scanner bezeichnet.Mirror 15 can be deflected in a second direction by a second galvanometer 16. The first direction is perpendicular to the second direction. The incident light beam 17 strikes the first mirror 13 and is deflected to the second mirror 15. The light beam is then focused by a lens 18 onto a work surface 19. The light beam 20 striking the work surface 19 can track any continuous path when the first mirror 13 and the second mirror 15 move accordingly. Such an arrangement is referred to as a scanner.
Üblicherweise werden als Lichtstrahlen Laserstrahlen eingesetzt, wenn die beschriebene Kippspiegeleinrichtung z.B. zur Laserbeschriftung verwendet wird.Laser beams are usually used as light beams if the tilting mirror device described is e.g. is used for laser marking.
Die Aufgabe der vorliegenden Erfindung besteht darin, eine Kippspiegeleinrichtung zu schaffen, die vergleichsweise einfach aufgebaut und daher kostengünstig herstellbar ist.The object of the present invention is to provide a tilting mirror device which is of comparatively simple construction and is therefore inexpensive to manufacture.
Diese Aufgabe wird durch eine Kippspiegeleinrichtung mit den Merkmalen des Patentanspruches 1 gelöst .This object is achieved by a tilting mirror device with the features of claim 1.
Der wesentliche Vorteil besteht darin, dass die erfindungsgemäße Kippspiegeleinrichtung vergleichsweise einfach aufgebaut und daher kostengünstig herstellbar ist. Dies ist insbesondere auch darauf zurückzuführen, dass die erforderlichen Antriebseinrichtungen nur einige Millimeter Stellweg bei rela- tiv kleinen Kräften (ca. 1 N) benötigen. Insbesondere eignen sich die erfindungsgemäßen Kippspiegeleinrichtungen für Anwendungen, bei denen nur relativ kleine Ablenkwinkel erforderlich sind. Auch kann die erfindungsgemäße KippSpiegelein- richtung sehr gut in ResonanzScannern eingesetzt werden.The main advantage is that the tilting mirror device according to the invention is comparatively simple and therefore inexpensive to manufacture. This is due in particular to the fact that the required drive devices only have a travel range of a few millimeters with tiv small forces (approx. 1 N). The tilting mirror devices according to the invention are particularly suitable for applications in which only relatively small deflection angles are required. The tilting mirror device according to the invention can also be used very well in resonance scanners.
Im folgenden werden die Erfindungen deren Ausgestaltungen in Zusammenhang mit den Figuren näher erläutert. Es zeigen:In the following the inventions are explained in more detail in connection with the figures. Show it:
Figur 1 in schematischer Darstellung eine bekannte Kippspiegeleinrichtung mit zwei Spiegeln und zwei Galvanometern;Figure 1 is a schematic representation of a known tilting mirror device with two mirrors and two galvanometers;
Figur 2 in schematischer Darstellung eine Seitenansicht der erfindungsgemäßen Kippspiegeleinrichtung in einem Be- wegungszustand;FIG. 2 shows a schematic side view of the tilting mirror device according to the invention in a moving state;
Figur 3 die Kippspiegeleinrichtung der Figur 2 in einem anderen Bewegungszustand undFigure 3 shows the tilting mirror device of Figure 2 in a different state of motion and
Figur 4 in schematischer Darstellung eine bevorzugte Ausführungsform der erfindungsgemäßen Kippspiegeleinrich- tung .Figure 4 is a schematic representation of a preferred embodiment of the tilting mirror device according to the invention.
Gemäß Figur 2 besteht die erfindungsgemäße Kippspiegeleinrichtung, bei der es sich vorzugsweise um eine Viergelenkstruktur handelt, aus einem Materialteil, das vorzugsweise streifenförmig beschaffen ist und fünf Elemente, die durch vier Gelenke miteinander verbunden sind, umfasst. Die ganze Einrichtung ist als Festkörperstruktur ausgebildet. Genauer gesagt ist ein erstes äußeres Element, das mit 1 bezeichnet ist, in einem Gehäuse der Kippspiegeleinrichtung fest ange- ordnet. Dies gilt auch für ein zweites äußeres Element 5, das vom ersten Element 1 beabstandet ebenfalls im Gehäuse fest angeordnet ist, wobei es sich vorzugsweise in der Ebene des ersten Elementes 1 befindet. Zwischen den äußeren Elementen 1 und 5 befinden sich vom ersten äußeren Element 1 ausgehend ein erstes Zwischenelement 2, ein mittleres Element 3 und ein zweites Zwischenelement 4. Die genannten Elemente sind jeweils an den einander zugewandten Seiten durch Gelenke mit- einander verbunden. Das äußere Element 1 ist über das Gelenk 6 mit dem Zwischenelement 2, das Zwischenelement 2 über das Gelenk 7 mit dem mittleren Element 3, das mittlere Element 3 über das Gelenk 8 mit dem Zwischenelement 4 und das Zwi- schenelement 4 über das Gelenk 9 mit dem äußeren Element 5 verbunden.According to FIG. 2, the tilting mirror device according to the invention, which is preferably a four-bar structure, consists of a material part, which is preferably of a strip-like structure and comprises five elements which are connected to one another by four joints. The entire device is designed as a solid structure. More precisely, a first outer element, which is designated by 1, is fixedly arranged in a housing of the tilting mirror device. This also applies to a second outer element 5, which is also fixedly arranged in the housing at a distance from the first element 1, wherein it is preferably located in the plane of the first element 1. Starting from the first outer element 1, a first intermediate element 2, a middle element 3 and a second intermediate element 4 are located between the outer elements 1 and 5. The elements mentioned are each connected on the sides facing one another by joints. connected to each other. The outer element 1 is connected via the joint 6 to the intermediate element 2, the intermediate element 2 via the joint 7 to the middle element 3, the middle element 3 via the joint 8 to the intermediate element 4 and the intermediate element 4 via the joint 9 connected to the outer element 5.
Vorzugsweise handelt es sich bei den Gelenken um 6, 7, 8 und 9 jeweils um Kerbgelenke, die in dem Materialteil in Quer- richtung ausgebildet sind und das äußere Element 1, das Zwischenelement 2, das mittlere Element 3, das Zwischenelement 4 und das äußere Element 5 definieren. Das genannte Materialteil besteht vorzugsweise aus einem supereleastischen Material, bei dem es sich beispielsweise um Nickel-Titan (NiTi) handelt. Beispielsweise besitzt das Materialteil eine Abmessung von 57 x 8 mm.The joints are preferably 6, 7, 8 and 9 each notch joints, which are formed in the material part in the transverse direction and the outer element 1, the intermediate element 2, the middle element 3, the intermediate element 4 and the outer Define element 5. The material part mentioned preferably consists of a superelastic material, which is, for example, nickel titanium (NiTi). For example, the material part has a dimension of 57 x 8 mm.
Auf der einen Seite des Zwischenelementes 2 ist ein erster Spiegel 10 angeordnet. Entsprechend ist auf der selben Seite des Zwischenelementes 4 ein zweiter Spiegel 11 angeordnet.A first mirror 10 is arranged on one side of the intermediate element 2. Accordingly, a second mirror 11 is arranged on the same side of the intermediate element 4.
Das mittlere Element 3 wird senkrecht zur Erstreckung des Materialteiles durch eine nicht dargestellte Antriebseinrichtung in der Richtung des Pfeiles Pl linear bewegt. Diese Bewegung wird durch die Elastizität der als Kerbgelenke in dem Materialteil ausgebildeten Gelenke 6, 7, 8 und 9 ermöglicht. Bei der genannten Bewegung des mittleren Elementes 3 führen die rechts und links davon angeordneten Zwischenelemente 2, 4 eine Kippbewegung mit dem Winkel α aus .The middle element 3 is moved linearly perpendicular to the extension of the material part by a drive device, not shown, in the direction of the arrow P1. This movement is made possible by the elasticity of the joints 6, 7, 8 and 9 designed as notch joints in the material part. In the aforementioned movement of the middle element 3, the intermediate elements 2, 4 arranged to the right and left of it execute a tilting movement with the angle α.
Bei den Spiegeln 10 und 11 handelt es sich vorzugsweise jeweils um leicht schräg gestellte Spiegel, wobei die Neigung der Spiegel unter einem spitzen Winkel zur Ebene des Zwischenteiles 2 bzw. 4 in Richtung auf das mittlere Element 3 verläuft. Ein einfallender Lichtstrahl 12 wird am ersten Spiegel 10 in Richtung auf den zweiten Spiegel 11 reflektiert (Bezugszeichen 12 λ ) , um dort ebenfalls reflektiert zu werden und als ausfallender Lichtstrahl 12" die Kippspiegeleinrichtung zu verlassen.The mirrors 10 and 11 are preferably each slightly inclined mirrors, the inclination of the mirrors running at an acute angle to the plane of the intermediate part 2 or 4 in the direction of the central element 3. An incident light beam 12 is reflected on the first mirror 10 in the direction of the second mirror 11 (reference symbol 12 λ ) in order to also be reflected there and to leave the tilting mirror device as a falling light beam 12 ".
Die Figuren 2 und 3 zeigen etwa die unterschiedlichen maxima- len Auslenkungen des mittleren Elementes 3 in die entgegengesetzten Richtungen, sowie die dabei erzielbaren Ablenkungen des Lichtstrahles 12" in der Richtung des Pfeiles P2.FIGS. 2 and 3 show approximately the different maximum deflections of the middle element 3 in the opposite directions, as well as the deflections of the light beam 12 ″ in the direction of the arrow P2 that can be achieved.
Die Figur 4 zeigt im Detail ein streifenförmiges Mate- rialteil, das aus einem superelastischen NiTi-Material besteht, in dem die Gelenke 6, 7, 8 und 9 als Kerbgelenke ausgebildet sind. Für die genannte Bemessung führt eine Auslenkung des mittleren Elementes 3 um einen Millimeter zu einer Kippbewegung von etwa 4,5° der Zwischenelemente 2 und 4, wo- bei eine Ablenkung von insgesamt ± 18° erreicht werden kann. Die in den Gelenken 7 und 8 auftretende maximale Dehnung beträgt etwa 1,3 % und die in diesen Gelenken auftretenden Spannungen betragen maximal 330 N/mm2.FIG. 4 shows in detail a strip-shaped material part which consists of a superelastic NiTi material in which the joints 6, 7, 8 and 9 are designed as notch joints. For the mentioned dimensioning, a deflection of the middle element 3 by one millimeter leads to a tilting movement of approximately 4.5 ° of the intermediate elements 2 and 4, whereby a deflection of a total of ± 18 ° can be achieved. The maximum elongation occurring in the joints 7 and 8 is approximately 1.3% and the stresses occurring in these joints are a maximum of 330 N / mm 2 .
Die Herstellung des Materialteiles und der Kerbgelenke erfolgt bei einem Nickel-Titan-Material vorzugsweise durch Erodieren, da Nickel-Titan nicht spanend bearbeitet werden kann. Die minimale Materialstärke der Kerbgelenke sollte etwa 0,3 mm nicht unterschreiten, da das genannte Material an den Randbereichen durch das Erodieren spröde wird.In the case of a nickel-titanium material, the material part and the notch joints are preferably produced by erosion, since nickel-titanium cannot be machined. The minimum material thickness of the notch joints should not be less than about 0.3 mm, since the material mentioned becomes brittle at the edge areas due to the eroding.
Es wird daraufhin gewiesen das bei der beschriebenen Anordnung das Übersetzungsverhältnis zwischen Stellweg und Drehbewegung in weiten Grenzen durch die Abstandsverhältnisse zwi- sehen den Gelenken 6, 7, 8 und 9 variierbar ist. Vorteilhafter Weise ist eine hoch präzise und damit kostspielige Linearführung des Antriebes nicht erforderlich. Ein nicht genau senkrecht zur Ebene des mittleren Elementes 3 liegender Kraftangriff führt zwar zu einer leicht unsymmetrischen Aus- lenkung der Struktur; diese Unsymmetrie wird jedoch durch den parallelen Ansatz voll kompensiert. Als Antriebe eigenen sich beispielsweise Tauchspulen oder bei relativ kleinen Winkelbewegungen auch Piezostapel . Der Vorteil solcher Piezostapel liegt darin, das sehr schnelle Bewegungen in kHz-Bereich möglich sind.It is then pointed out that, in the arrangement described, the transmission ratio between the actuating path and the rotary movement can be varied within wide limits by the spacing relationships between the joints 6, 7, 8 and 9. Advantageously, a highly precise and therefore expensive linear guidance of the drive is not necessary. A force application that is not exactly perpendicular to the plane of the central element 3 does lead to a slightly asymmetrical deflection of the structure; however, this asymmetry is fully compensated for by the parallel approach. Suitable as drives are, for example, plunger coils or, in the case of relatively small angular movements, also piezo stacks. The advantage of such piezo stacks is that very fast movements in the kHz range are possible.
Die beschriebene Kippspiegeleinrichtung eignet sich zur Umsetzung einer linearen Bewegung in eine Drehbewegung. Für eine Ablenkung eines Lichtstrahles in zwei Richtungen, beispielsweise für einen X-Y-Scanner, benötigt man daher zwei der beschriebenen Kippspiegelanordnungen, die in Reihe geschaltet sind, wobei der Lichtstrahl also dann über insgesamt 4 Spiegel geführt wird.The tilting mirror device described is suitable for converting a linear movement into a rotary movement. For deflecting a light beam in two directions, for example for an X-Y scanner, two of the tilting mirror arrangements described are therefore required, which are connected in series, the light beam then being guided over a total of 4 mirrors.
Besonders geeignet ist die vorliegende Kippspiegeleinrichtung beispielsweise als Führungsgetriebe in einer Licht- bzw. Laserablenkanordnung, insbesondere in einer Laser- Beschriftungsanordnung. Beispielsweise kann sie auch in einem Mehrachsantrieb, einem Roboterhandgelenk oder in einem Inkli- nometer verwendet werden.The present tilting mirror device is particularly suitable, for example, as a guide gear in a light or laser deflection arrangement, in particular in a laser marking arrangement. For example, it can also be used in a multi-axis drive, a robot wrist or in an inclinometer.
Es wird darauf hingewiesen, dass das Materialteil auch anders als bei der voranstehend beschriebenen Ausführungsform eingespannt sein kann. Beispielsweise ist es denkbar, das Materialteil nur einseitig gemäß Figur 2 an dem einen Ende des äußeren Elementes 1 fest einzuspannen, wobei das entgegengesetzte Ende des anderen äußeren Elementes 5 nicht eingespannt ist und die Antriebseinrichtung am mittleren Element 3 oder am äußeren Element 5 angreift. Zudem ist es denkbar, in diesem Fall das mittlere Element 3 ganz wegzulassen, sodass es sich bei der vorliegenden Kippspiegeleinrichtung dann um eine Dreigelenkanordnung handelt. BezugszeichenlisteIt is pointed out that the material part can also be clamped differently than in the embodiment described above. For example, it is conceivable to clamp the material part firmly on one side only, as shown in FIG. 2, at one end of the outer element 1, the opposite end of the other outer element 5 not being clamped in and the drive device engaging the central element 3 or the outer element 5. In addition, it is conceivable in this case to omit the central element 3 completely, so that the present tilting mirror device is then a three-joint arrangement. LIST OF REFERENCE NUMBERS
1 äußeres Element1 outer element
2 Zwischenelement2 intermediate element
3 mittleres Element3 middle element
4 Zwischenelement4 intermediate element
5 äußeres Element5 outer element
6 Gelenk6 joint
7 Gelenk7 joint
8 Gelenk8 joint
9 Gelenk9 joint
10 Spiegel10 mirrors
11 Spiegel11 mirrors
12 einfallender Lichtstrahl 12 ' reflektierter Lichtstrahl12 incident light beam 12 'reflected light beam
12 ' ■ ausfallender Lichtstrahl12 ' ■ outgoing light beam
13 Spiegel13 mirrors
14 Galvanometer14 galvanometers
15 Spiegel15 mirrors
16 Galvanometer16 galvanometers
17 Lichtstrahl17 light beam
18 Objektiv18 lens
19 Arbeitsfläche 20 Lichtstrahl Pl Pfeil19 work surface 20 light beam Pl arrow
P2 Pfeil P2 arrow

Claims

Patentansprüche claims
1. Kippspiegeleinrichtung zur Ablenkung eines einfallenden Lichtstrahles (12) in eine Richtung (P2) , gekennzeichnet durch ein Materialteil (1, 2, 3, 4, 5), das an wenigstens einem Ende fest eingespannt ist und durch eine Antriebseinrichtung zu linearen Bewegungen senkrecht zur Ebene des Materialteils angeregbar ist, wobei in der Längserstreckung des Materialteils gesehen zwei Spiegel (10, 11) voneinander beabstandet angeordnet sind und wobei die Spiegel (10, 11) bei der linearen Bewegung des Materialteils senkrecht zur Ebene desselben bewegt werden, so dass der auf einen Spiegel (10) einfallende Lichtstrahl (12) zum anderen Spiegel (11) reflektiert und nach der Reflexion am anderen Spiegel (11) in der Richtung (P2) senkrecht zur Ebene des Materialstreifens abgelenkt wird.1. tilting mirror device for deflecting an incident light beam (12) in one direction (P2), characterized by a material part (1, 2, 3, 4, 5) which is firmly clamped at at least one end and perpendicular to linear movements by a drive device can be excited to the level of the material part, two mirrors (10, 11) being arranged spaced apart from one another as seen in the longitudinal extent of the material part and the mirrors (10, 11) being moved perpendicular to the plane of the same during the linear movement of the material part, so that the light beam (12) incident on a mirror (10) is reflected to the other mirror (11) and after reflection on the other mirror (11) is deflected in the direction (P2) perpendicular to the plane of the material strip.
2. Kippspiegeleinrichtung nach Anspruch 1, dadurch gekennzeichnet, dass in der Längsrichtung des Materialteils mehrere Drehgelenke (6, 7, 8, 9) angeordnet sind, die das Materialteil in mehrere Elemente untergliedern.2. Tilting mirror device according to claim 1, characterized in that a plurality of rotary joints (6, 7, 8, 9) are arranged in the longitudinal direction of the material part, which subdivide the material part into several elements.
3. Kippspiegeleinrichtung nach Anspruch 2, dadurch gekennzeichnet, dass das Materialteil in seiner Längserstrek- kung gesehen ein erstes äußeres Element (1) , das mit seinem einen Ende fest eingespannt ist, ein erstes Zwischenelement (2) , das mit seinem einen Ende mit dem anderen Ende des ersten äußeren Elementes (1) in einem ersten Drehgelenk (6) verbunden ist, ein mittleres Element (3) , das mit seinem einen Ende in einem zweiten Drehgelenk (7) mit dem anderen Ende des ersten Zwischenelementes (2) verbunden ist, ein zweites Zwischenelement (4) , das mit seinem einen Ende in einem dritten Drehgelenk (8) mit dem anderen Ende des mittleren Elementes (3) verbunden ist, und ein zweites äußeres Element (5) , das mit seinem einen Ende in einem vierten Drehgelenk (9) mit dem anderen Ende des zweiten Zwischenelementes (4) verbunden ist und dass an dem ersten Zwischenelement (2) der eine Spiegel (10) und an dem zweiten Zwischenelement (4) der andere Spiegel (11) angeordnet sind.3. Tilting mirror device according to claim 2, characterized in that the material part seen in its longitudinal extension a first outer element (1) which is firmly clamped at one end, a first intermediate element (2) which at one end with the the other end of the first outer element (1) is connected in a first swivel joint (6), a middle element (3) which is connected at one end in a second swivel joint (7) to the other end of the first intermediate element (2) , a second intermediate element (4), which is connected at one end in a third pivot joint (8) to the other end of the central element (3), and a second outer element (5), which has one end in a fourth Swivel joint (9) is connected to the other end of the second intermediate element (4) and that one mirror (10) is arranged on the first intermediate element (2) and the other mirror (11) is arranged on the second intermediate element (4).
Kippspiegeleinrichtung nach Anspruch 3 , dadurch gekennzeichnet, dass das mittlere Element (3) durch die Antriebseinrichtung senkrecht zur Ebene des Materialteils linear bewegt wird und dass das andere Ende des zweiten äußeren Elementes (5) fest eingespannt ist.Tilting mirror device according to claim 3, characterized in that the central element (3) is moved linearly by the drive device perpendicular to the plane of the material part and that the other end of the second outer element (5) is firmly clamped.
5. Kippspiegeleinrichtung nach Anspruch 3 , dadurch gekennzeichnet, dass das andere Ende des zweiten äußeren Elementes (5) frei bewegbar ist und dass die Antriebseinrichtung am mittleren Element (3) oder am zweiten äußeren Element (5) angreift.5. Tilting mirror device according to claim 3, characterized in that the other end of the second outer element (5) is freely movable and that the drive device engages the central element (3) or the second outer element (5).
6. Kippspiegeleinrichtung nach Anspruch 3, dadurch gekennzeichnet, dass das andere Ende des zweiten äußeren Elementes frei bewegbar ist, dass das mittlere Element ent- fällt und dass die Antriebseinrichtung am zweiten äußeren Element (5) angreift.6. Tilting mirror device according to claim 3, characterized in that the other end of the second outer element is freely movable, that the middle element is omitted and that the drive device acts on the second outer element (5).
7. Kippspiegeleinrichtung nach einem der Ansprüche 1 bis 6, dadurch gekennzeichnet, dass das Materialteil (1, 2, 3, 4, 5) streifenförmig ausgebildet ist.7. tilting mirror device according to one of claims 1 to 6, characterized in that the material part (1, 2, 3, 4, 5) is strip-shaped.
8. Kippspiegeleinrichtung nach einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, dass die Spiegel (10, 11) an der der Ebene des Materialteiles abgewandten Seite jeweils unter einem Winkel in Richtung auf den jeweils anderen Spiegel geneigt sind.8. Tilting mirror device according to one of claims 1 to 7, characterized in that the mirrors (10, 11) on the side facing away from the plane of the material part are each inclined at an angle in the direction of the other mirror.
9. Kippspiegeleinrichtung nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass der Materialstreifen aus ei- nem superelastischen Material besteht. 9. Tilting mirror device according to one of claims 1 to 8, characterized in that the material strip consists of a super-elastic material.
10. Kippspiegeleinrichtung nach Anspruch 9, dadurch gekennzeichnet, dass das Material ein Nickel-Titan-Material ist.10. Tilting mirror device according to claim 9, characterized in that the material is a nickel-titanium material.
11. Kippspiegeleinrichtung nach einem der Ansprüche 1 bis 10, dadurch gekennzeichnet, dass der Materialstreifen eine Abmessung von etwa 57 x 8 mm aufweist.11. Tilting mirror device according to one of claims 1 to 10, characterized in that the material strip has a dimension of about 57 x 8 mm.
12. Kippspiegeleinrichtung nach einem der Ansprüche 1 bis 11, dadurch gekennzeichnet, dass das erste (6) , das zweite (7) , das dritte (8) und gegebenenfalls das vierte (9) Drehgelenk die Form von quer zur Längserstreckung des Materialteils verlaufenden Kerbgelenken aufweist .12. Tilting mirror device according to one of claims 1 to 11, characterized in that the first (6), the second (7), the third (8) and optionally the fourth (9) swivel joint have the shape of notch joints extending transversely to the longitudinal extension of the material part having .
13. Kippspiegeleinrichtung nach Anspruch 12, dadurch gekennzeichnet, dass der Materialstreifen im Bereich der Kerbgelenke eine Dicke von minimal etwa 0,3 mm aufweist.13. Tilting mirror device according to claim 12, characterized in that the material strip in the area of the notch joints has a thickness of at least about 0.3 mm.
14. Kippspiegeleinrichtung nach einem der Ansprüche 1 bis 13, dadurch gekennzeichnet, dass der Materialstreifen und die14. Tilting mirror device according to one of claims 1 to 13, characterized in that the material strip and the
Kerbgelenke durch Erodieren eines Ausgangsmaterialteils hergestellt sind.Notch joints are made by eroding a raw material part.
15. Kippspiegeleinrichtung nach einem der Ansprüche 1 bis 14, dadurch gekennzeichnet, dass die Antriebseinrichtung in der Längserstreckung des Materialteiles gesehen in der Mitte des mittleren Elementes (3) angreift.15. Tilting mirror device according to one of claims 1 to 14, characterized in that the drive device, viewed in the longitudinal extent of the material part, engages in the middle of the central element (3).
16. Kippspiegeleinrichtung nach einem der Ansprüche 1 bis 15, dadurch gekennzeichnet, dass die Antriebseinrichtung ein16. Tilting mirror device according to one of claims 1 to 15, characterized in that the drive device
Tauchspulen-Antrieb ist.Voice coil drive is.
17. Kippspiegeleinrichtung nach einem der Ansprüche 1 bis 15, dadurch gekennzeichnet, dass die Antriebseinrichtung ei- nen Piezzostapel umfaßt. 17. Tilting mirror device according to one of claims 1 to 15, characterized in that the drive device comprises a piezo stack.
18. Kippspiegeleinrichtung nach einem der Ansprüche 1 bis 17, dadurch gekennzeichnet, dass der einfallende Lichtstrahl (12) ein Laserstrahl ist.18. Tilting mirror device according to one of claims 1 to 17, characterized in that the incident light beam (12) is a laser beam.
19. Kippspiegeleinrichtung nach einem der Ansprüche 1 bis 18, dadurch gekennzeichnet, dass zur Ablenkung des einfallenden Lichtstrahles (12) in zwei Richtungen der Kippspiegeleinrichtung eine weitere Kippspiegelemrichtung gemäß einem der Ansprüche 1 bis 13 nachgeschaltet ist, derart, dass der aus der Kippspiegeleinrichtung vom anderen Spiegel (11) ausfallende Lichtstrahl (12'') auf einen Spiegel der weiteren Kippspiegeleinrichtung gelenkt wird, derart, dass der aus der weiteren Kippspiegeleinrichtung ausfallende Lichtstrahl bei der Betätigung der Antriebseinrich- tungen der Kippspiegeleinrichtung und der weiteren Kippspiegeleinrichtung in zwei unterschiedliche, vorzugsweise senkrecht zueinander verlaufende Richtungen ablenkbar ist.19. Tilting mirror device according to one of claims 1 to 18, characterized in that for deflecting the incident light beam (12) in two directions of the tilting mirror device, a further tilting mirror device according to one of claims 1 to 13 is connected in such a way that that of the tilting mirror device from the other The light beam (12 ″) emerging from the mirror (11) is directed onto a mirror of the further tilting mirror device in such a way that the light beam emerging from the further tilting mirror device when actuating the drive devices of the tilting mirror device and the further tilting mirror device into two different, preferably perpendicular to each other extending directions is deflectable.
20. Anwendung einer Kippspiegeleinrichtung nach einem der Ansprüche 1 bis 19 zum Scannen eines Laserstrahls in einer Laserablenkeinrichtung, insbesondere zur Laserbeschriftung. 20. Use of a tilting mirror device according to one of claims 1 to 19 for scanning a laser beam in a laser deflection device, in particular for laser marking.
PCT/DE2001/004546 2000-12-04 2001-12-04 Tilting mirror device WO2002046819A2 (en)

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DE10060111.1 2000-12-04
DE10060111A DE10060111C1 (en) 2000-12-04 2000-12-04 Optical deflection device

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WO2004003625A1 (en) * 2002-06-28 2004-01-08 Clvr Pty Ltd Scanning device and method of scanning an optical beam over a surface
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WO2004008218A1 (en) * 2002-07-10 2004-01-22 Infm Istituto Nazionale Per La Fisica Della Materia Optical microscope able to operate a rapid three dimensional modulation of the position of the observation point

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