WO2002012925A3 - Micromirror elements, package for the micromirror elements, and protection system therefor - Google Patents
Micromirror elements, package for the micromirror elements, and protection system therefor Download PDFInfo
- Publication number
- WO2002012925A3 WO2002012925A3 PCT/US2001/024332 US0124332W WO0212925A3 WO 2002012925 A3 WO2002012925 A3 WO 2002012925A3 US 0124332 W US0124332 W US 0124332W WO 0212925 A3 WO0212925 A3 WO 0212925A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- micromirror elements
- micromirrors
- package
- protection system
- system therefor
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0067—Packages or encapsulation for controlling the passage of optical signals through the package
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/14—Details
- G03B21/28—Reflectors in projection beam
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70283—Mask effects on the imaging process
- G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
- H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
- H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0369—Static structures characterized by their profile
- B81B2203/0384—Static structures characterized by their profile sloped profile
Abstract
Priority Applications (17)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/343,307 US6962419B2 (en) | 1998-09-24 | 2001-03-08 | Micromirror elements, package for the micromirror elements, and projection system therefor |
JP2002517555A JP3889705B2 (en) | 2000-08-03 | 2001-08-03 | Micromirror device, package for micromirror device, and projection system therefor |
AU2001281019A AU2001281019A1 (en) | 2000-08-03 | 2001-08-03 | Micromirror elements, package for the micromirror elements, and protection system therefor |
EP01959466A EP1315993A4 (en) | 2000-08-03 | 2001-08-03 | Micromirror elements, package for the micromirror elements, and protection system therefor |
KR1020037001542A KR100724081B1 (en) | 2000-08-03 | 2003-02-03 | Micromirror array, Projection System, Light Modulation Method, Optical Micromechanical Element and Method for Spatially Modulating a Light Beam |
US10/402,777 US6960305B2 (en) | 1999-10-26 | 2003-03-28 | Methods for forming and releasing microelectromechanical structures |
US10/437,776 US7099065B2 (en) | 2000-08-03 | 2003-05-13 | Micromirrors with OFF-angle electrodes and stops |
US10/857,514 US7196740B2 (en) | 2000-08-30 | 2004-05-28 | Projection TV with improved micromirror array |
US10/857,519 US7172296B2 (en) | 2000-08-30 | 2004-05-28 | Projection display |
US10/857,133 US7012731B2 (en) | 2000-08-30 | 2004-05-28 | Packaged micromirror array for a projection display |
US10/857,055 US7006275B2 (en) | 2000-08-30 | 2004-05-28 | Packaged micromirror array for a projection display |
US10/857,132 US7300162B2 (en) | 2000-08-30 | 2004-05-28 | Projection display |
US10/857,058 US7023606B2 (en) | 2001-08-03 | 2004-05-28 | Micromirror array for projection TV |
US10/857,059 US7167297B2 (en) | 2000-08-30 | 2004-05-28 | Micromirror array |
US10/856,174 US7018052B2 (en) | 2000-08-30 | 2004-05-28 | Projection TV with improved micromirror array |
US10/914,038 US7262817B2 (en) | 2000-08-30 | 2004-08-05 | Rear projection TV with improved micromirror array |
US10/986,588 US7221498B2 (en) | 2000-08-30 | 2004-11-12 | Methods and apparatus for selectively updating memory cell arrays |
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/631,536 US6529310B1 (en) | 1998-09-24 | 2000-08-03 | Deflectable spatial light modulator having superimposed hinge and deflectable element |
US09/631,536 | 2000-08-03 | ||
US22924600P | 2000-08-30 | 2000-08-30 | |
US60/229,246 | 2000-08-30 | ||
US09/732,445 US6523961B2 (en) | 2000-08-30 | 2000-12-07 | Projection system and mirror elements for improved contrast ratio in spatial light modulators |
US09/732,445 | 2000-12-07 |
Related Parent Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/631,536 Continuation-In-Part US6529310B1 (en) | 1998-09-24 | 2000-08-03 | Deflectable spatial light modulator having superimposed hinge and deflectable element |
US09/732,445 Continuation-In-Part US6523961B2 (en) | 1998-09-24 | 2000-12-07 | Projection system and mirror elements for improved contrast ratio in spatial light modulators |
US09/732,455 Continuation-In-Part US6447558B1 (en) | 1999-12-21 | 2000-12-07 | Diesel fuel composition |
US10/176,478 Continuation-In-Part US7071520B2 (en) | 1999-10-26 | 2002-06-21 | MEMS with flexible portions made of novel materials |
Related Child Applications (16)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/343,307 A-371-Of-International US6962419B2 (en) | 1998-09-24 | 2001-03-08 | Micromirror elements, package for the micromirror elements, and projection system therefor |
US10343307 A-371-Of-International | 2001-08-03 | ||
US10/005,308 Continuation-In-Part US6969635B2 (en) | 1995-06-19 | 2001-12-03 | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
US10/366,297 Continuation-In-Part US6867897B2 (en) | 2000-08-03 | 2003-02-12 | Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays |
US10/402,777 Continuation-In-Part US6960305B2 (en) | 1999-10-26 | 2003-03-28 | Methods for forming and releasing microelectromechanical structures |
US10/407,061 Continuation-In-Part US6856447B2 (en) | 2000-08-30 | 2003-04-02 | Methods and apparatus for selectively updating memory cell arrays |
US10/437,776 Continuation-In-Part US7099065B2 (en) | 2000-08-03 | 2003-05-13 | Micromirrors with OFF-angle electrodes and stops |
US10/857,055 Continuation US7006275B2 (en) | 2000-08-30 | 2004-05-28 | Packaged micromirror array for a projection display |
US10/857,059 Continuation US7167297B2 (en) | 2000-08-30 | 2004-05-28 | Micromirror array |
US10/857,058 Continuation US7023606B2 (en) | 2001-08-03 | 2004-05-28 | Micromirror array for projection TV |
US10/856,174 Continuation US7018052B2 (en) | 2000-08-30 | 2004-05-28 | Projection TV with improved micromirror array |
US10/857,133 Continuation US7012731B2 (en) | 2000-08-30 | 2004-05-28 | Packaged micromirror array for a projection display |
US10/857,519 Continuation US7172296B2 (en) | 2000-08-30 | 2004-05-28 | Projection display |
US10/857,514 Continuation US7196740B2 (en) | 2000-08-30 | 2004-05-28 | Projection TV with improved micromirror array |
US10/857,132 Continuation US7300162B2 (en) | 2000-08-30 | 2004-05-28 | Projection display |
US10/914,038 Continuation US7262817B2 (en) | 2000-08-30 | 2004-08-05 | Rear projection TV with improved micromirror array |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002012925A2 WO2002012925A2 (en) | 2002-02-14 |
WO2002012925A3 true WO2002012925A3 (en) | 2002-09-06 |
Family
ID=27397927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/024332 WO2002012925A2 (en) | 1998-09-24 | 2001-08-03 | Micromirror elements, package for the micromirror elements, and protection system therefor |
Country Status (8)
Country | Link |
---|---|
EP (1) | EP1315993A4 (en) |
JP (5) | JP3889705B2 (en) |
KR (1) | KR100724081B1 (en) |
CN (5) | CN100412604C (en) |
AT (1) | ATE354814T1 (en) |
AU (1) | AU2001281019A1 (en) |
DE (10) | DE20122617U1 (en) |
WO (1) | WO2002012925A2 (en) |
Families Citing this family (45)
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US7307775B2 (en) * | 2000-12-07 | 2007-12-11 | Texas Instruments Incorporated | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
SG111972A1 (en) * | 2002-10-17 | 2005-06-29 | Agency Science Tech & Res | Wafer-level package for micro-electro-mechanical systems |
US7397517B2 (en) | 2003-05-30 | 2008-07-08 | Kazuhiro Ohara | Display system and signal processing using diamond-shaped DMDs |
US7012669B2 (en) | 2003-08-18 | 2006-03-14 | Evans & Sutherland Computer Corporation | Reflection barrier for panoramic display |
US6871958B2 (en) | 2003-08-18 | 2005-03-29 | Evans & Sutherland Computer Corporation | Wide angle scanner for panoramic display |
US7334902B2 (en) | 2003-08-18 | 2008-02-26 | Evans & Sutherland Computer Corporation | Wide angle scanner for panoramic display |
US6861277B1 (en) * | 2003-10-02 | 2005-03-01 | Hewlett-Packard Development Company, L.P. | Method of forming MEMS device |
US6995830B2 (en) * | 2003-12-22 | 2006-02-07 | Asml Netherlands B.V. | Lithographic projection apparatus and device manufacturing method |
US7057794B2 (en) * | 2004-05-19 | 2006-06-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Micromirror for MEMS device |
US7273693B2 (en) * | 2004-07-30 | 2007-09-25 | Hewlett-Packard Development Company, L.P. | Method for forming a planar mirror using a sacrificial oxide |
US7038831B2 (en) * | 2004-09-30 | 2006-05-02 | Lucent Technologies, Inc. | Micromirror apparatus with improved in-plane rotation tolerance |
KR100815358B1 (en) * | 2004-10-08 | 2008-03-19 | 삼성전기주식회사 | Optical modulator having tilted cline type window |
JP4568579B2 (en) | 2004-10-29 | 2010-10-27 | 富士通株式会社 | Light switch |
IL165212A (en) | 2004-11-15 | 2012-05-31 | Elbit Systems Electro Optics Elop Ltd | Device for scanning light |
US7372617B2 (en) * | 2005-07-06 | 2008-05-13 | Peter Enoksson | Hidden hinge MEMS device |
GB2453104B (en) | 2007-09-19 | 2012-04-25 | Wolfson Microelectronics Plc | Mems device and process |
US11157977B1 (en) | 2007-10-26 | 2021-10-26 | Zazzle Inc. | Sales system using apparel modeling system and method |
TWI418850B (en) | 2007-11-09 | 2013-12-11 | 尼康股份有限公司 | Micro-actuator, optical device, display device, exposure device and device production method |
JP2009233836A (en) * | 2008-03-28 | 2009-10-15 | Yamaha Corp | Mems and method for manufacturing mems |
DE102008001038B4 (en) * | 2008-04-08 | 2016-08-11 | Robert Bosch Gmbh | Micromechanical component with a slanted structure and corresponding manufacturing method |
US8537446B2 (en) * | 2008-04-08 | 2013-09-17 | Cornell University | Multi-axis, large tilt angle, wafer level micromirror array for large scale beam steering applications |
US8096182B2 (en) * | 2008-05-29 | 2012-01-17 | Freescale Semiconductor, Inc. | Capacitive sensor with stress relief that compensates for package stress |
JP5151756B2 (en) * | 2008-07-16 | 2013-02-27 | 株式会社豊田中央研究所 | Optical device |
US10719862B2 (en) | 2008-07-29 | 2020-07-21 | Zazzle Inc. | System and method for intake of manufacturing patterns and applying them to the automated production of interactive, customizable product |
KR101373380B1 (en) * | 2009-07-17 | 2014-03-13 | 칼 짜이스 에스엠티 게엠베하 | Microlithographic projection exposure apparatus and method of measuring a parameter related to an optical surface contained therein |
KR101912092B1 (en) | 2010-10-05 | 2018-10-26 | 삼성전자 주식회사 | Fluidic lens |
KR101912093B1 (en) | 2010-10-29 | 2018-10-26 | 삼성전자 주식회사 | Optical apparatus |
CN102087414B (en) * | 2010-11-03 | 2012-12-26 | 凝辉(天津)科技有限责任公司 | Array-type partition projection method |
CN102683474B (en) * | 2011-03-18 | 2014-11-05 | 浙江大立科技股份有限公司 | Infrared detector manufacturing method based on compound sacrificial layers |
US9641826B1 (en) | 2011-10-06 | 2017-05-02 | Evans & Sutherland Computer Corporation | System and method for displaying distant 3-D stereo on a dome surface |
US10969743B2 (en) * | 2011-12-29 | 2021-04-06 | Zazzle Inc. | System and method for the efficient recording of large aperture wave fronts of visible and near visible light |
CN104520750B (en) | 2012-07-26 | 2018-02-23 | 苹果公司 | Twin axle scanning mirror |
US9110354B2 (en) * | 2012-09-20 | 2015-08-18 | Palo Alto Research Center Incorporated | Steerable illumination source for a compact camera |
KR20150063540A (en) * | 2012-10-23 | 2015-06-09 | 애플 인크. | Production of micro-mechanical devices |
DE102013213842A1 (en) * | 2013-07-16 | 2015-01-22 | Carl Zeiss Smt Gmbh | Optical component |
DE102013217269A1 (en) * | 2013-08-29 | 2015-03-05 | Carl Zeiss Smt Gmbh | Micromirror array |
CN103777450A (en) * | 2014-01-06 | 2014-05-07 | 吴震 | Light emitting device, projection display device and light emitting system |
CN103777445B (en) * | 2014-01-06 | 2018-12-25 | 杨毅 | Projection display equipment |
JP2016029430A (en) * | 2014-07-25 | 2016-03-03 | セイコーエプソン株式会社 | Electro-optic device, manufacturing method of electro-optic device and electronic apparatus |
DE102015200626B3 (en) | 2015-01-16 | 2016-07-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | MEMS actuator, system with a plurality of MEMS actuators and method of manufacturing a MEMS actuator |
CN104835908A (en) * | 2015-04-17 | 2015-08-12 | 上海华虹宏力半导体制造有限公司 | Tantalum nitride etching method for 3D Anisotropic Magnetoresistance (AMR) |
US10589980B2 (en) * | 2017-04-07 | 2020-03-17 | Texas Instruments Incorporated | Isolated protrusion/recession features in a micro electro mechanical system |
DE102018207783B4 (en) * | 2018-05-17 | 2022-11-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | MEMS array made of MEMS, each with a movable structural element |
CN111246187B (en) * | 2018-11-29 | 2022-07-29 | 青岛海信激光显示股份有限公司 | Light valve driving control method and projection equipment |
KR102211618B1 (en) * | 2019-07-26 | 2021-02-02 | 인하대학교 산학협력단 | A retroreflective micromirror array for a 3-dimensional floating image |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4592628A (en) * | 1981-07-01 | 1986-06-03 | International Business Machines | Mirror array light valve |
US5659374A (en) * | 1992-10-23 | 1997-08-19 | Texas Instruments Incorporated | Method of repairing defective pixels |
US5696619A (en) * | 1995-02-27 | 1997-12-09 | Texas Instruments Incorporated | Micromechanical device having an improved beam |
US6123985A (en) * | 1998-10-28 | 2000-09-26 | Solus Micro Technologies, Inc. | Method of fabricating a membrane-actuated charge controlled mirror (CCM) |
US6128121A (en) * | 1996-06-10 | 2000-10-03 | Samsung Electronics Co., Ltd. | Deformable mirror device and manufacturing method thereof |
US6175443B1 (en) * | 1999-05-01 | 2001-01-16 | Lucent Technologies, Inc. | Article comprising a deformable segmented mirror |
US6222667B1 (en) * | 1999-02-09 | 2001-04-24 | Advanced Optics Electronics, Inc. | Electro-optic light valve array |
US6288828B1 (en) * | 1997-09-10 | 2001-09-11 | Light And Sound Design Ltd. | Programmable light beam shape altering device using programmable micromirrors |
US6351330B2 (en) * | 1998-04-10 | 2002-02-26 | Samsung Electronics Co., Ltd. | Micromirror device for image display apparatus |
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JPH08304924A (en) * | 1995-05-10 | 1996-11-22 | Nikon Corp | Projector device |
JPH08304892A (en) * | 1995-05-11 | 1996-11-22 | Asahi Optical Co Ltd | Built-in flash camera |
EP0877272B1 (en) * | 1997-05-08 | 2002-07-31 | Texas Instruments Incorporated | Improvements in or relating to spatial light modulators |
-
2001
- 2001-08-03 DE DE20122617U patent/DE20122617U1/en not_active Expired - Lifetime
- 2001-08-03 DE DE20122370U patent/DE20122370U1/en not_active Expired - Lifetime
- 2001-08-03 CN CNB2004100546604A patent/CN100412604C/en not_active Expired - Fee Related
- 2001-08-03 DE DE20122616U patent/DE20122616U1/en not_active Expired - Lifetime
- 2001-08-03 CN CNB2004100546591A patent/CN100371763C/en not_active Expired - Fee Related
- 2001-08-03 CN CNB2004100546572A patent/CN100412602C/en not_active Expired - Fee Related
- 2001-08-03 DE DE20122373U patent/DE20122373U1/en not_active Expired - Lifetime
- 2001-08-03 JP JP2002517555A patent/JP3889705B2/en not_active Expired - Fee Related
- 2001-08-03 CN CNB2004100546587A patent/CN100412603C/en not_active Expired - Fee Related
- 2001-08-03 DE DE20122372U patent/DE20122372U1/en not_active Expired - Lifetime
- 2001-08-03 AU AU2001281019A patent/AU2001281019A1/en not_active Abandoned
- 2001-08-03 WO PCT/US2001/024332 patent/WO2002012925A2/en active Application Filing
- 2001-08-03 DE DE60126849T patent/DE60126849T2/en not_active Expired - Fee Related
- 2001-08-03 DE DE20122618U patent/DE20122618U1/en not_active Expired - Lifetime
- 2001-08-03 DE DE20122371U patent/DE20122371U1/en not_active Expired - Lifetime
- 2001-08-03 AT AT05000599T patent/ATE354814T1/en not_active IP Right Cessation
- 2001-08-03 EP EP01959466A patent/EP1315993A4/en not_active Ceased
- 2001-08-03 DE DE20122614U patent/DE20122614U1/en not_active Expired - Lifetime
- 2001-08-03 DE DE20122615U patent/DE20122615U1/en not_active Expired - Lifetime
- 2001-08-03 CN CNB018136087A patent/CN100392467C/en not_active Expired - Fee Related
-
2003
- 2003-02-03 KR KR1020037001542A patent/KR100724081B1/en not_active IP Right Cessation
-
2004
- 2004-09-03 JP JP2004257715A patent/JP3889757B2/en not_active Expired - Fee Related
- 2004-09-17 JP JP2004272332A patent/JP3768514B2/en not_active Expired - Fee Related
- 2004-09-17 JP JP2004272333A patent/JP3889759B2/en not_active Expired - Fee Related
-
2005
- 2005-12-07 JP JP2005353848A patent/JP2006178447A/en not_active Abandoned
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4592628A (en) * | 1981-07-01 | 1986-06-03 | International Business Machines | Mirror array light valve |
US5659374A (en) * | 1992-10-23 | 1997-08-19 | Texas Instruments Incorporated | Method of repairing defective pixels |
US5696619A (en) * | 1995-02-27 | 1997-12-09 | Texas Instruments Incorporated | Micromechanical device having an improved beam |
US6128121A (en) * | 1996-06-10 | 2000-10-03 | Samsung Electronics Co., Ltd. | Deformable mirror device and manufacturing method thereof |
US6288828B1 (en) * | 1997-09-10 | 2001-09-11 | Light And Sound Design Ltd. | Programmable light beam shape altering device using programmable micromirrors |
US6351330B2 (en) * | 1998-04-10 | 2002-02-26 | Samsung Electronics Co., Ltd. | Micromirror device for image display apparatus |
US6123985A (en) * | 1998-10-28 | 2000-09-26 | Solus Micro Technologies, Inc. | Method of fabricating a membrane-actuated charge controlled mirror (CCM) |
US6222667B1 (en) * | 1999-02-09 | 2001-04-24 | Advanced Optics Electronics, Inc. | Electro-optic light valve array |
US6175443B1 (en) * | 1999-05-01 | 2001-01-16 | Lucent Technologies, Inc. | Article comprising a deformable segmented mirror |
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