WO1998013605B1 - Integrated electrically operable micro-valve - Google Patents
Integrated electrically operable micro-valveInfo
- Publication number
- WO1998013605B1 WO1998013605B1 PCT/US1997/016921 US9716921W WO9813605B1 WO 1998013605 B1 WO1998013605 B1 WO 1998013605B1 US 9716921 W US9716921 W US 9716921W WO 9813605 B1 WO9813605 B1 WO 9813605B1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- valve
- port
- fluid
- integrated
- valve element
- Prior art date
Links
- 239000012530 fluid Substances 0.000 claims abstract 32
- 239000012528 membrane Substances 0.000 claims abstract 12
- 238000006243 chemical reaction Methods 0.000 claims abstract 7
- 230000001808 coupling Effects 0.000 claims 4
- 238000010168 coupling process Methods 0.000 claims 4
- 238000005859 coupling reaction Methods 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 4
- 239000000463 material Substances 0.000 claims 3
- 238000001816 cooling Methods 0.000 claims 2
Abstract
Integrated, electrically operable micro-valves are formed to control fluid flow and pressure. These valves convert electrical energy to mechanical energy through an energy conversion device (120) having a sealed cavity (100) with a flexible wall (200). The sealed cavity (100) contains a fluid (130) that expands and contracts as it is heated or cooled, thus causing the flexible wall (200) to move. Movement of this wall (200) or membrane is used to move a valve element (300) and dynamically control the opening or closing of a valve port (400) over a predetermined range.
Claims
AMENDED CLAIMS
[received by the International Bureau on 16 April 1998 (16.04.98); original claims 1 and 25 amended; new claim 28 added; remaining claims unchanged (4 pages)]
1. An integrated, electrically operable micro-valve comprising: a fluid guiding structure containing a fluid inlet port and a fluid outlet port; a fluid communication channel, formed within said fluid guiding structure, fluidically coupling said fluid inlet port to said fluid outlet port; an intermediary port, formed within said fluid communication channel wherein said fluid inlet port is fluidically coupled to said fluid outlet port valve through said intermediary port; a valve element, moveably positioned proximate to said intermediary port within said fluid communication channel; and an energy conversion device comprising a flexible membrane mechanically coupled to said valve element, wherein said energy conversion device converts input energy to mechanical energy thereby providing for movement of said valve element by and through said flexible membrane to open or close said intermediary port.
2. The integrated, electrically operable micro-valve of claim 1 wherein said energy conversion device comprises a structure formed from one or more dies, said structure having a sealed cavity wherein one wall of said sealed cavity is said flexible membrane.
3. The integrated, electrically operable micro-valve of claim 2 wherein said sealed cavity contains a fluidic material, said fluidic material comprising a material that expands in response to an increase in temperature and contracts in response to a decrease in temperature wherein said flexible membrane is moved.
4. The integrated, electrically operable micro-valve of claim 2 comprising a heating and/or cooling device wherein said heating and/or cooling device is thermally coupled to said sealed cavity.
- 28 -
20. The integrated, electrically operable micro-valve of claim 1 wherein said flexible membrane comprises a pedestal mechanically coupled to said valve element wherein said pedestal provides for movement of said valve element in response to movement of said flexible membrane.
21. The integrated, electrically operable micro-valve of claim 1 further comprising a force-providing device coupled to said valve element, wherein said force-providing device applies force to said valve element.
22. The integrated, electrically operable micro-valve of claim 21 wherein said force applied to said valve element seats said valve element with said valve seat closing said intermediary port when said integrated, electrically operable micro-valve is de-energized.
23. The integrated, electrically operable micro-valve of claim 21 wherein said force applied to said valve element prevents said valve element from seating with said valve seat keeping open said intermediary port when said integrated, electrically operable micro-valve is de-energized.
24. The integrated, electrically operable micro-valve of claim 1 wherein said valve element is essentially spherical.
25. An integrated microminiature valve comprising: a fluid guiding structure containing a inlet port and a outlet port; a fluid communication channel, formed within said fluid guiding structure, coupling said inlet port to said outlet port; an intermediary port, formed within said fluid communication channel wherein said inlet port is coupled to said outlet port valve through said intermediary port, said intermediary port further comprising a valve seat; a valve element, moveably positioned proximate to said intermediary port to seat against said valve seat;
a sealed cavity having a first wall coupled to a heating device within said sealed cavity and at least a portion of a second wall forming a flexible membrane mechanically coupled to said valve element; and a working fluid contained within said sealed cavity, wherein said working fluid expands when heated with said heating device to move said flexible membrane and said valve element to control fluidic communication between said input port and said output port.
26. A flow controller comprising: the integrated electrically operable micro-valve of claim 1; and an apparatus for determining flow rate wherein said apparatus provides dynamic feedback to said energy conversion device to variably position said valve element within said fluid communication channel.
27. A pressure controller comprising: the integrated electrically operable micro-valve of claim 1 ; and an apparatus for determining pressure wherein said apparatus provides dynamic feedback to said energy conversion device to variably position said valve element within said fluid communication channel.
28. An integrated, electrically operable micro-valve comprising: a fluid guiding structure containing a fluid inlet port and a fluid outlet port; a fluid communication channel, formed within said fluid guiding structure, fluidically coupling said fluid inlet port to said fluid outlet port;
an intermediary port, formed within said fluid communication channel wherein said fluid inlet port is fluidically coupled to said fluid outlet port valve through said intermediary port; an energy conversion device comprising a flexible membrane; and a valve element, mechanically coupled to said flexible membrane, moveably positioned proximate to said intermediary port within said fluid communication channel, wherein said valve element moves in response to flexure of said flexible membrane through said mecahnical coupling to open or close said intermediary port.
- 31 -
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019997002655A KR100610908B1 (en) | 1996-09-27 | 1997-09-25 | Electrically operated integrated microvalve |
DE69727237T DE69727237T2 (en) | 1996-09-27 | 1997-09-25 | INTEGRATED ELECTRICALLY CONTROLLED MICROVALVE |
JP51580398A JP4143984B2 (en) | 1996-09-27 | 1997-09-25 | Electrically driven integrated microvalve |
AU45880/97A AU4588097A (en) | 1996-09-27 | 1997-09-25 | Integrated electrically operable micro-valve |
EP97944369A EP0928371B1 (en) | 1996-09-27 | 1997-09-25 | Integrated electrically operable micro-valve |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/720,099 US5865417A (en) | 1996-09-27 | 1996-09-27 | Integrated electrically operable normally closed valve |
US08/720,099 | 1996-09-27 |
Publications (3)
Publication Number | Publication Date |
---|---|
WO1998013605A2 WO1998013605A2 (en) | 1998-04-02 |
WO1998013605A3 WO1998013605A3 (en) | 1998-07-09 |
WO1998013605B1 true WO1998013605B1 (en) | 1998-08-13 |
Family
ID=24892637
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1997/016921 WO1998013605A2 (en) | 1996-09-27 | 1997-09-25 | Integrated electrically operable micro-valve |
Country Status (9)
Country | Link |
---|---|
US (2) | US5865417A (en) |
EP (1) | EP0928371B1 (en) |
JP (1) | JP4143984B2 (en) |
KR (1) | KR100610908B1 (en) |
CN (1) | CN1153010C (en) |
AU (1) | AU4588097A (en) |
DE (1) | DE69727237T2 (en) |
TW (1) | TW379282B (en) |
WO (1) | WO1998013605A2 (en) |
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- 1996-09-27 US US08/720,099 patent/US5865417A/en not_active Expired - Lifetime
-
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- 1997-09-25 WO PCT/US1997/016921 patent/WO1998013605A2/en not_active Application Discontinuation
- 1997-09-25 JP JP51580398A patent/JP4143984B2/en not_active Expired - Fee Related
- 1997-09-25 KR KR1019997002655A patent/KR100610908B1/en not_active IP Right Cessation
- 1997-09-25 DE DE69727237T patent/DE69727237T2/en not_active Expired - Lifetime
- 1997-09-25 CN CNB971998809A patent/CN1153010C/en not_active Expired - Lifetime
- 1997-09-25 EP EP97944369A patent/EP0928371B1/en not_active Expired - Lifetime
- 1997-09-25 US US08/937,611 patent/US6149123A/en not_active Expired - Lifetime
- 1997-09-25 AU AU45880/97A patent/AU4588097A/en not_active Abandoned
- 1997-09-27 TW TW086114164A patent/TW379282B/en not_active IP Right Cessation
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