WO1998013605B1 - Integrated electrically operable micro-valve - Google Patents

Integrated electrically operable micro-valve

Info

Publication number
WO1998013605B1
WO1998013605B1 PCT/US1997/016921 US9716921W WO9813605B1 WO 1998013605 B1 WO1998013605 B1 WO 1998013605B1 US 9716921 W US9716921 W US 9716921W WO 9813605 B1 WO9813605 B1 WO 9813605B1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
port
fluid
integrated
valve element
Prior art date
Application number
PCT/US1997/016921
Other languages
French (fr)
Other versions
WO1998013605A2 (en
WO1998013605A3 (en
Filing date
Publication date
Priority claimed from US08/720,099 external-priority patent/US5865417A/en
Application filed filed Critical
Priority to KR1019997002655A priority Critical patent/KR100610908B1/en
Priority to DE69727237T priority patent/DE69727237T2/en
Priority to JP51580398A priority patent/JP4143984B2/en
Priority to AU45880/97A priority patent/AU4588097A/en
Priority to EP97944369A priority patent/EP0928371B1/en
Publication of WO1998013605A2 publication Critical patent/WO1998013605A2/en
Publication of WO1998013605A3 publication Critical patent/WO1998013605A3/en
Publication of WO1998013605B1 publication Critical patent/WO1998013605B1/en

Links

Abstract

Integrated, electrically operable micro-valves are formed to control fluid flow and pressure. These valves convert electrical energy to mechanical energy through an energy conversion device (120) having a sealed cavity (100) with a flexible wall (200). The sealed cavity (100) contains a fluid (130) that expands and contracts as it is heated or cooled, thus causing the flexible wall (200) to move. Movement of this wall (200) or membrane is used to move a valve element (300) and dynamically control the opening or closing of a valve port (400) over a predetermined range.

Claims

AMENDED CLAIMS
[received by the International Bureau on 16 April 1998 (16.04.98); original claims 1 and 25 amended; new claim 28 added; remaining claims unchanged (4 pages)]
1. An integrated, electrically operable micro-valve comprising: a fluid guiding structure containing a fluid inlet port and a fluid outlet port; a fluid communication channel, formed within said fluid guiding structure, fluidically coupling said fluid inlet port to said fluid outlet port; an intermediary port, formed within said fluid communication channel wherein said fluid inlet port is fluidically coupled to said fluid outlet port valve through said intermediary port; a valve element, moveably positioned proximate to said intermediary port within said fluid communication channel; and an energy conversion device comprising a flexible membrane mechanically coupled to said valve element, wherein said energy conversion device converts input energy to mechanical energy thereby providing for movement of said valve element by and through said flexible membrane to open or close said intermediary port.
2. The integrated, electrically operable micro-valve of claim 1 wherein said energy conversion device comprises a structure formed from one or more dies, said structure having a sealed cavity wherein one wall of said sealed cavity is said flexible membrane.
3. The integrated, electrically operable micro-valve of claim 2 wherein said sealed cavity contains a fluidic material, said fluidic material comprising a material that expands in response to an increase in temperature and contracts in response to a decrease in temperature wherein said flexible membrane is moved.
4. The integrated, electrically operable micro-valve of claim 2 comprising a heating and/or cooling device wherein said heating and/or cooling device is thermally coupled to said sealed cavity.
- 28 -
20. The integrated, electrically operable micro-valve of claim 1 wherein said flexible membrane comprises a pedestal mechanically coupled to said valve element wherein said pedestal provides for movement of said valve element in response to movement of said flexible membrane.
21. The integrated, electrically operable micro-valve of claim 1 further comprising a force-providing device coupled to said valve element, wherein said force-providing device applies force to said valve element.
22. The integrated, electrically operable micro-valve of claim 21 wherein said force applied to said valve element seats said valve element with said valve seat closing said intermediary port when said integrated, electrically operable micro-valve is de-energized.
23. The integrated, electrically operable micro-valve of claim 21 wherein said force applied to said valve element prevents said valve element from seating with said valve seat keeping open said intermediary port when said integrated, electrically operable micro-valve is de-energized.
24. The integrated, electrically operable micro-valve of claim 1 wherein said valve element is essentially spherical.
25. An integrated microminiature valve comprising: a fluid guiding structure containing a inlet port and a outlet port; a fluid communication channel, formed within said fluid guiding structure, coupling said inlet port to said outlet port; an intermediary port, formed within said fluid communication channel wherein said inlet port is coupled to said outlet port valve through said intermediary port, said intermediary port further comprising a valve seat; a valve element, moveably positioned proximate to said intermediary port to seat against said valve seat; a sealed cavity having a first wall coupled to a heating device within said sealed cavity and at least a portion of a second wall forming a flexible membrane mechanically coupled to said valve element; and a working fluid contained within said sealed cavity, wherein said working fluid expands when heated with said heating device to move said flexible membrane and said valve element to control fluidic communication between said input port and said output port.
26. A flow controller comprising: the integrated electrically operable micro-valve of claim 1; and an apparatus for determining flow rate wherein said apparatus provides dynamic feedback to said energy conversion device to variably position said valve element within said fluid communication channel.
27. A pressure controller comprising: the integrated electrically operable micro-valve of claim 1 ; and an apparatus for determining pressure wherein said apparatus provides dynamic feedback to said energy conversion device to variably position said valve element within said fluid communication channel.
28. An integrated, electrically operable micro-valve comprising: a fluid guiding structure containing a fluid inlet port and a fluid outlet port; a fluid communication channel, formed within said fluid guiding structure, fluidically coupling said fluid inlet port to said fluid outlet port; an intermediary port, formed within said fluid communication channel wherein said fluid inlet port is fluidically coupled to said fluid outlet port valve through said intermediary port; an energy conversion device comprising a flexible membrane; and a valve element, mechanically coupled to said flexible membrane, moveably positioned proximate to said intermediary port within said fluid communication channel, wherein said valve element moves in response to flexure of said flexible membrane through said mecahnical coupling to open or close said intermediary port.
- 31 -
PCT/US1997/016921 1996-09-27 1997-09-25 Integrated electrically operable micro-valve WO1998013605A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1019997002655A KR100610908B1 (en) 1996-09-27 1997-09-25 Electrically operated integrated microvalve
DE69727237T DE69727237T2 (en) 1996-09-27 1997-09-25 INTEGRATED ELECTRICALLY CONTROLLED MICROVALVE
JP51580398A JP4143984B2 (en) 1996-09-27 1997-09-25 Electrically driven integrated microvalve
AU45880/97A AU4588097A (en) 1996-09-27 1997-09-25 Integrated electrically operable micro-valve
EP97944369A EP0928371B1 (en) 1996-09-27 1997-09-25 Integrated electrically operable micro-valve

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/720,099 US5865417A (en) 1996-09-27 1996-09-27 Integrated electrically operable normally closed valve
US08/720,099 1996-09-27

Publications (3)

Publication Number Publication Date
WO1998013605A2 WO1998013605A2 (en) 1998-04-02
WO1998013605A3 WO1998013605A3 (en) 1998-07-09
WO1998013605B1 true WO1998013605B1 (en) 1998-08-13

Family

ID=24892637

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1997/016921 WO1998013605A2 (en) 1996-09-27 1997-09-25 Integrated electrically operable micro-valve

Country Status (9)

Country Link
US (2) US5865417A (en)
EP (1) EP0928371B1 (en)
JP (1) JP4143984B2 (en)
KR (1) KR100610908B1 (en)
CN (1) CN1153010C (en)
AU (1) AU4588097A (en)
DE (1) DE69727237T2 (en)
TW (1) TW379282B (en)
WO (1) WO1998013605A2 (en)

Families Citing this family (102)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19749011A1 (en) * 1996-11-19 1998-05-20 Lang Volker Micro=valve for one time use has opening closed by plug mounted on resistance plate
US6858469B1 (en) * 1997-08-06 2005-02-22 Micron Technology, Inc. Method and apparatus for epoxy loc die attachment
US7115976B1 (en) * 1997-08-06 2006-10-03 Micron Technology, Inc. Method and apparatus for epoxy LOC die attachment
US6051449A (en) 1997-08-06 2000-04-18 Micron Technology, Inc. Method and apparatus for Epoxy loc die attachment
US6036872A (en) 1998-03-31 2000-03-14 Honeywell Inc. Method for making a wafer-pair having sealed chambers
US6359333B1 (en) * 1998-03-31 2002-03-19 Honeywell International Inc. Wafer-pair having deposited layer sealed chambers
US6160243A (en) * 1998-09-25 2000-12-12 Redwood Microsystems, Inc. Apparatus and method for controlling fluid in a micromachined boiler
WO2000032972A1 (en) 1998-11-30 2000-06-08 The Regents Of The University Of California Micro-electromechanical block regulating fluid flow
US20020042140A1 (en) * 1999-03-03 2002-04-11 Alfred Hagemeyer Methods for analysis of heterogeneous catalysts in a multi-variable screening reactor
US7150994B2 (en) * 1999-03-03 2006-12-19 Symyx Technologies, Inc. Parallel flow process optimization reactor
US6349740B1 (en) * 1999-04-08 2002-02-26 Abbott Laboratories Monolithic high performance miniature flow control unit
KR100865105B1 (en) * 1999-06-28 2008-10-24 캘리포니아 인스티튜트 오브 테크놀로지 Microfabricated elastomeric valve and pump systems
US6899137B2 (en) * 1999-06-28 2005-05-31 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8052792B2 (en) * 2001-04-06 2011-11-08 California Institute Of Technology Microfluidic protein crystallography techniques
US20080277007A1 (en) * 1999-06-28 2008-11-13 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8550119B2 (en) * 1999-06-28 2013-10-08 California Institute Of Technology Microfabricated elastomeric valve and pump systems
US8709153B2 (en) 1999-06-28 2014-04-29 California Institute Of Technology Microfludic protein crystallography techniques
US7144616B1 (en) 1999-06-28 2006-12-05 California Institute Of Technology Microfabricated elastomeric valve and pump systems
EP1265700B1 (en) 2000-03-07 2005-01-19 Symyx Technologies, Inc. Parallel flow process optimization reactor
AU2001288661A1 (en) * 2000-08-31 2002-03-13 Advanced Sensor Technologies Micro-fluidic actuator
DE10048376C2 (en) * 2000-09-29 2002-09-19 Fraunhofer Ges Forschung Micro valve with a normally closed state
SE0100422D0 (en) * 2001-02-08 2001-02-08 Goeran Langstedt Microelectromechanical- and nanotechnology-based flow and analysis device
US6626417B2 (en) * 2001-02-23 2003-09-30 Becton, Dickinson And Company Microfluidic valve and microactuator for a microvalve
US7118917B2 (en) 2001-03-07 2006-10-10 Symyx Technologies, Inc. Parallel flow reactor having improved thermal control
US6845959B2 (en) * 2001-05-04 2005-01-25 Hydril Company, L.P. Quick release blowout preventer bonnet
EP1273808B1 (en) * 2001-07-02 2006-04-05 Medos International S.a.r.l. Adjustable micro valve and method of setting and actuating it
US20040094733A1 (en) * 2001-08-31 2004-05-20 Hower Robert W. Micro-fluidic system
US20040011977A1 (en) * 2001-08-31 2004-01-22 Hower Robert W Micro-fluidic valves
US7025323B2 (en) 2001-09-21 2006-04-11 The Regents Of The University Of California Low power integrated pumping and valving arrays for microfluidic systems
JP2003094395A (en) * 2001-09-26 2003-04-03 Olympus Optical Co Ltd Arrayed micro fluid control device
DE10149139A1 (en) * 2001-10-05 2003-04-24 Bosch Gmbh Robert Forming micro-cavities with optically-transparent walls, produces silicon region surrounded by transparent etch-resist with hole permitting silicon removal by etching
WO2003031828A1 (en) * 2001-10-06 2003-04-17 Medos S.A. Method of setting and actuating a multi-stable micro valve and adjustable micro valve
US7011288B1 (en) 2001-12-05 2006-03-14 Microstar Technologies Llc Microelectromechanical device with perpendicular motion
US6748975B2 (en) 2001-12-26 2004-06-15 Micralyne Inc. Microfluidic valve and method of manufacturing same
US7025324B1 (en) * 2002-01-04 2006-04-11 Massachusetts Institute Of Technology Gating apparatus and method of manufacture
US6670071B2 (en) * 2002-01-15 2003-12-30 Quallion Llc Electric storage battery construction and method of manufacture
US6821347B2 (en) * 2002-07-08 2004-11-23 Micron Technology, Inc. Apparatus and method for depositing materials onto microelectronic workpieces
US6955725B2 (en) * 2002-08-15 2005-10-18 Micron Technology, Inc. Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces
US6884296B2 (en) * 2002-08-23 2005-04-26 Micron Technology, Inc. Reactors having gas distributors and methods for depositing materials onto micro-device workpieces
US20040040502A1 (en) * 2002-08-29 2004-03-04 Micron Technology, Inc. Micromachines for delivering precursors and gases for film deposition
US20040040503A1 (en) * 2002-08-29 2004-03-04 Micron Technology, Inc. Micromachines for delivering precursors and gases for film deposition
DE10243997B4 (en) * 2002-09-21 2005-05-25 Festo Ag & Co. Micro valve in multi-layer construction
EP1546587B1 (en) * 2002-10-04 2006-02-15 PBT (IP) Limited Gas valve with proportional output
US6869818B2 (en) * 2002-11-18 2005-03-22 Redwood Microsystems, Inc. Method for producing and testing a corrosion-resistant channel in a silicon device
US7195026B2 (en) * 2002-12-27 2007-03-27 American Air Liquide, Inc. Micro electromechanical systems for delivering high purity fluids in a chemical delivery system
US7090471B2 (en) * 2003-01-15 2006-08-15 California Institute Of Technology Integrated electrostatic peristaltic pump method and apparatus
US7335396B2 (en) * 2003-04-24 2008-02-26 Micron Technology, Inc. Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers
US7235138B2 (en) 2003-08-21 2007-06-26 Micron Technology, Inc. Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces
US7344755B2 (en) * 2003-08-21 2008-03-18 Micron Technology, Inc. Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers
US7422635B2 (en) 2003-08-28 2008-09-09 Micron Technology, Inc. Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces
US20050056799A1 (en) * 2003-09-11 2005-03-17 Malone Steven J. Valves having a thermostatic actuator controlled by a peltier device
US7056806B2 (en) * 2003-09-17 2006-06-06 Micron Technology, Inc. Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces
US20050058959A1 (en) * 2003-09-17 2005-03-17 General Electric Company Gas flow control for gas burners utilizing a micro-electro-mechanical valve
US7282239B2 (en) * 2003-09-18 2007-10-16 Micron Technology, Inc. Systems and methods for depositing material onto microfeature workpieces in reaction chambers
US7323231B2 (en) * 2003-10-09 2008-01-29 Micron Technology, Inc. Apparatus and methods for plasma vapor deposition processes
US7581511B2 (en) * 2003-10-10 2009-09-01 Micron Technology, Inc. Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes
US7647886B2 (en) * 2003-10-15 2010-01-19 Micron Technology, Inc. Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers
US7258892B2 (en) * 2003-12-10 2007-08-21 Micron Technology, Inc. Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition
US6988706B2 (en) * 2003-12-17 2006-01-24 General Electric Company Piezoelectric microvalve
US20050211937A1 (en) * 2003-12-29 2005-09-29 Popadiuc Peter O Method of sealing machine components
US7472432B2 (en) * 2003-12-30 2009-01-06 Letty Ann Owen Bathtub insert “Take-Five”
US7906393B2 (en) * 2004-01-28 2011-03-15 Micron Technology, Inc. Methods for forming small-scale capacitor structures
DE502004006313D1 (en) * 2004-03-10 2008-04-10 Festo Ag & Co Pneumatic microvalve
US7309056B2 (en) * 2004-03-26 2007-12-18 Smc Kabushiki Kaisha Dual pedestal shut-off valve
US7584942B2 (en) * 2004-03-31 2009-09-08 Micron Technology, Inc. Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers
US20050249873A1 (en) * 2004-05-05 2005-11-10 Demetrius Sarigiannis Apparatuses and methods for producing chemically reactive vapors used in manufacturing microelectronic devices
US8133554B2 (en) 2004-05-06 2012-03-13 Micron Technology, Inc. Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces
US8642353B2 (en) * 2004-05-10 2014-02-04 The Aerospace Corporation Microfluidic device for inducing separations by freezing and associated method
US7694694B2 (en) * 2004-05-10 2010-04-13 The Aerospace Corporation Phase-change valve apparatuses
US7699932B2 (en) * 2004-06-02 2010-04-20 Micron Technology, Inc. Reactors, systems and methods for depositing thin films onto microfeature workpieces
US7686040B2 (en) * 2004-06-24 2010-03-30 The Aerospace Corporation Electro-hydraulic devices
US7650910B2 (en) * 2004-06-24 2010-01-26 The Aerospace Corporation Electro-hydraulic valve apparatuses
US7721762B2 (en) 2004-06-24 2010-05-25 The Aerospace Corporation Fast acting valve apparatuses
US20060057520A1 (en) * 2004-09-16 2006-03-16 Saia Richard J Control valve assembly for controlling gas flow in gas combustion systems
US7691723B2 (en) * 2005-01-07 2010-04-06 Honeywell International Inc. Bonding system having stress control
US20060237138A1 (en) * 2005-04-26 2006-10-26 Micron Technology, Inc. Apparatuses and methods for supporting microelectronic devices during plasma-based fabrication processes
EP1946019A2 (en) * 2005-10-20 2008-07-23 Earthlinked Technologies, Inc. Refrigerant fluid flow control device and method
US7913928B2 (en) 2005-11-04 2011-03-29 Alliant Techsystems Inc. Adaptive structures, systems incorporating same and related methods
US7815868B1 (en) 2006-02-28 2010-10-19 Fluidigm Corporation Microfluidic reaction apparatus for high throughput screening
US20070234785A1 (en) * 2006-03-30 2007-10-11 Timothy Beerling System and method for using a flexible membrane for controlling fluid flow in a microfluidic circuit
US7851876B2 (en) * 2006-10-20 2010-12-14 Hewlett-Packard Development Company, L.P. Micro electro mechanical system
EP2217379A2 (en) * 2007-11-22 2010-08-18 Koninklijke Philips Electronics N.V. Valve for a microfluidic system
EP2247819B1 (en) 2008-01-18 2022-11-02 Pivotal Systems Corporation Method and apparatus for in situ testing of gas flow controllers
US8096786B2 (en) * 2008-02-27 2012-01-17 University Of Massachusetts Three dimensional micro-fluidic pumps and valves
WO2009157474A1 (en) * 2008-06-27 2009-12-30 株式会社村田製作所 Microvalve and valve seat member
DE102009018365A1 (en) * 2009-04-23 2010-11-04 Albert-Ludwigs-Universität Freiburg Thermo-pneumatic actuator and method for producing such
EP2436961B1 (en) * 2009-05-25 2020-09-30 Murata Manufacturing Co., Ltd. Valve, fluid apparatus and fluid supply apparatus
TWM378928U (en) * 2009-07-29 2010-04-21 Pixart Imaging Inc Mems device and spring element of mems
TWI435196B (en) * 2009-10-15 2014-04-21 Pivotal Systems Corp Method and apparatus for gas flow control
JP5565856B2 (en) * 2010-03-24 2014-08-06 セイコーインスツル株式会社 Diaphragm, diaphragm valve, and method for manufacturing diaphragm
KR101889106B1 (en) 2010-04-16 2018-09-20 인텔리전트 에너지 리미티드 Pressure regulator assembly
US9400004B2 (en) 2010-11-29 2016-07-26 Pivotal Systems Corporation Transient measurements of mass flow controllers
US9493228B2 (en) * 2012-11-28 2016-11-15 The Boeing Company High heat transfer rate reusable thermal protection system
CN104956279B (en) * 2013-01-28 2018-02-27 株式会社岛津制作所 Gas pressure regulator
US9551435B2 (en) * 2014-06-05 2017-01-24 Dunan Microstaq, Inc. Method of preventing clogging in a microvalve
NL2014801B1 (en) * 2015-05-13 2017-01-27 Berkin Bv Fluid flow device, comprising a valve unit, as well as method of manufacturing the same.
CN107924199A (en) 2015-07-10 2018-04-17 关键系统公司 Method and apparatus for gas flow control
CN105805400A (en) * 2016-05-16 2016-07-27 江苏微全芯生物科技有限公司 Temperature control valve element assembly, temperature control valve, a micro-channel control chip and control system
CN108217576B (en) * 2016-12-21 2020-05-22 上海傲睿科技有限公司 Diaphragm stop valve and manufacturing method thereof
CN109185554B (en) * 2018-09-30 2019-10-18 浙江大学 A kind of miniature flexible valve of voice coil driving
CN112295615A (en) * 2020-05-15 2021-02-02 广州普世君安生物科技有限公司 Micro-fluidic valve and micro-fluidic chip
CN114704687B (en) * 2022-04-28 2023-09-19 靖江市新博液压件有限公司 Overflow valve mechanism with self-cleaning function

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2388696A (en) * 1942-01-02 1945-11-13 Electrimatic Corp Automatic valve
US2833507A (en) * 1953-10-22 1958-05-06 Alco Valve Co Heat motor valve
US3198481A (en) * 1961-07-31 1965-08-03 Grove Valve & Regulator Co Reciprocating valve having a throttling arrangement and particular head and seat cooperation
US3856259A (en) * 1973-12-20 1974-12-24 Texas Instruments Inc Thermally responsive valve assembly
US4943032A (en) * 1986-09-24 1990-07-24 Stanford University Integrated, microminiature electric to fluidic valve and pressure/flow regulator
US4821997A (en) * 1986-09-24 1989-04-18 The Board Of Trustees Of The Leland Stanford Junior University Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator
US4966646A (en) 1986-09-24 1990-10-30 Board Of Trustees Of Leland Stanford University Method of making an integrated, microminiature electric-to-fluidic valve
US4824073A (en) * 1986-09-24 1989-04-25 Stanford University Integrated, microminiature electric to fluidic valve
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
DE3814150A1 (en) * 1988-04-27 1989-11-09 Draegerwerk Ag VALVE ARRANGEMENT MADE FROM MICROSTRUCTURED COMPONENTS
US5074629A (en) * 1988-10-26 1991-12-24 Stanford University Integrated variable focal length lens and its applications
US5270125A (en) * 1989-07-11 1993-12-14 Redwood Microsystems, Inc. Boron nutride membrane in wafer structure
US5238223A (en) * 1989-08-11 1993-08-24 Robert Bosch Gmbh Method of making a microvalve
US5058856A (en) * 1991-05-08 1991-10-22 Hewlett-Packard Company Thermally-actuated microminiature valve
US5176358A (en) * 1991-08-08 1993-01-05 Honeywell Inc. Microstructure gas valve control
EP0587912B1 (en) * 1992-04-02 1997-09-10 Seiko Epson Corporation Fluid controlling microdevice and method of manufacturing the same
US5190068A (en) * 1992-07-02 1993-03-02 Brian Philbin Control apparatus and method for controlling fluid flows and pressures
DE4422971C2 (en) * 1994-06-30 2003-09-04 Bosch Gmbh Robert microvalve
US5671905A (en) * 1995-06-21 1997-09-30 Hopkins, Jr.; Dean A. Electrochemical actuator and method of making same

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