WO1997028669B1 - Model-based predictive control of thermal processing - Google Patents
Model-based predictive control of thermal processingInfo
- Publication number
- WO1997028669B1 WO1997028669B1 PCT/US1997/001318 US9701318W WO9728669B1 WO 1997028669 B1 WO1997028669 B1 WO 1997028669B1 US 9701318 W US9701318 W US 9701318W WO 9728669 B1 WO9728669 B1 WO 9728669B1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- temperature
- output
- model
- thermal process
- future
- Prior art date
Links
- 238000000034 method Methods 0.000 claims abstract 77
- 230000001537 neural Effects 0.000 claims abstract 9
- 238000004364 calculation method Methods 0.000 claims 3
- 210000002569 neurons Anatomy 0.000 claims 3
- 238000005259 measurement Methods 0.000 claims 1
Abstract
A nonlinear model-based predictive temperature control system (100) is described for use in thermal process reactors. A multivariable temperature response is predicted using a nonlinear parameterized model of a thermal process reactor. The nonlinear parameterized model is implemented using a neural network. Predictions are made in an auto-regressive moving average fashion with a receding prediction horizon. Model predictions are incorporated into a control law for estimating the optimum future control strategy. The high-speed, predictive nature of the controller (62) renders it advantageous in multivariable rapid thermal processing reactors where fast response and high temperature uniformity are needed.
Claims
1. A temperature controlled thermal process reactor comprising; a reaction chamber enclosing an object to be heated; a source of thermal energy which heats said object; a thermal sensor which measures a temperature related to a temperature of said object and which provides an input signal representative of said temperature; and a model-based predictive temperature controller which receives said output signal representative of said temperature and which controls said source of thermal energy in response to said output signal.
2. The temperature controlled thermal process reactor of Claim 1, wherein the model-based predictive temperature controller comprises multivariable temperature control.
3. The temperature controlled rapid thermal process reactor of Claim 2, wherein the model-based predictive temperature cortroller comprises: a multivariable thermal process model which relates multivariable process input thermal energy to multivariable process output temperature; a prediction calculator which uses said thermal process model, to calculate a predicted nominal temperature output over a predetermined future time period; and a control calculator which uses said predicted nominal temperature output to calculate an optimum control strategy by which to control said source of thermal energy.
4. The temperature controlled thermal process reactor of Claim 3, wherein said prediction calculator calculates the predicted nominal temperature output using an auto-regressive moving average, having a predetermined prediction horizon.
5. The temperature controlled thermal process reactor of Claim 4, wherein the prediction calculator calculates an unoptimized initial estimate for a future control strategy.
6. The temperature controlled thermal process reactor of Claim 5, wherein said predicted nominal temperature output is calculated recursively over a
78 predetermined future time period using a recursive approximation strategy, said recursive approximation strategy beginning with said unoptimized initial estimate.
7. The temperature controlled thermal process reactor of Claim 6, wherein said thermal process model has parameters selected to substantially decouple the influence of system input variables from system input disturbance.
8. The temperature controlled thermal process reactor of Claim 3, wherein the control calculator compares said predicted nominal temperature output to a desired future temperature output and uses said comparison in a recursive algorithm to compute said optimum control strategy.
9. The temperature controlled thermal process reactor of Claim 3, wherein said thermal process model is a nonlinear model.
10. The temperature controlled thermal process reactor of Claim 3, wherein said thermal process model is based on a neural network.
11. The temperature controlled thermal process reactor of Claim 1, wherein the model-based predictive temperature controller comprises nonlinear multivariable temperature control.
12. The temperature controlled rapid thermal process reactor of Claim 11, wherein the nonlinear model-based predictive temperature controller comprises: a nonlinear multivariable thermal process model which relates multivariable process input thermal energy to multivariable process output temperature; a prediction calculator which uses said thermal process model, to calculate a predicted nominal temperature output over a predetermined future time period; and a control calculator which uses said predicted nominal temperature output to calculate an optimum control strategy by which to control said source of thermal energy.
13. The temperature controlled thermal process reactor of Claim 12, wherein said prediction calculator calculates the predicted nominal temperature output using a neural network.
14. The temperature controlled thermal process reactor of Claim 13, wherein the prediction calculator assumes a future control strategy.
79
15. The temperature controlled thermal process reactor of Claim 14, wherein said neural network is a feed forward network.
16. The temperature controlled thermal process reactor of Claim 15, wherein said neural network comprises a hidden layer of neurons.
17. The temperature controlled thermal process reactor of Claim 16, wherein said hidden layer of neurons comprises nonlinear sigmoid-type neurons.
18. The temperature controlled thermal process reactor of Claim 13, wherein said neural network is trained using a pseudo least squares method.
19. The temperature controlled thermal process reactor of Claim 12, wherein the control calculator compares said predicted nominal temperature output to a desired future temperature output to derive said optimum control strategy.
20. The temperature controlled thermal process reactor of Claim 1, further comprising a soflsensor model.
21. The temperature controlled thermal process reactor of Claim 20, wherein said soflsensor model is created from a dataset generated by using an instrumented wafer.
22. The temperature controlled thermal process reactor of Claim 1, further comprising a setpoint generator, said setpoint generator automatically generating a correction to said recipe inputs into said thermal process reactor, said correction facilitating control of actual wafer surface temperatures.
23. The temperature controlled thermal process reactor of Claim 22, said correction facihtating improved control of actual wafer surface temperatures based on measurement of susceptor temperatures.
24. A temperature control system for controlling a thermal process comprising; a controllable source of thermal energy which heats an object; a temperature sensor which measures a temperature related to a temperature of said object and which generates an output signal responsive to said temperature; and a model-based predictive temperature controller which receives said output signal representative of said temperature and which controls said source of thermal energy in response to said output signal, said controller comprising:
80 a thermal process model which relates process input thermal energy to a process output temperature; a prediction calculator which uses said thermal process model to calculate a predicted nominal temperature output over a predetermined future time period; and a control calculator which uses said predicted nominal temperature output to calculate an optimum strategy by which to control said source of thermal energy, said controller generating output signals to said source of thermal energy in response to said optimum strategy.
25. The temperature control system of Claim 24, wherein said thermal process model has parameters selected to substantially decouple the influence of system input variables from system input disturbances.
26. The temperature control system of Claim 24, wherein said prediction calculator includes a postulated future control strategy and a recursive algorithm to optimize said postulated future control strategy.
27. The temperature control system of Claim 24, wherein said thermal process model is a nonlinear model.
28. The temperature control system of Claim 27, wherein said thermal process model substantially decouples the influence of system input variables from system input disturbances.
29. The temperature control system of Claim 27, wherein said prediction calculator comprises a neural network.
30. The temperature control system of Claim 27, wherein said prediction calculator comprises a feed forward neural network, said prediction calculator having a receding calculation horizon.
31. A method of controlling a thermal process comprising the steps of: measuring a process output temperature; using a model to predict a future process output temperature; using said measured process output temperatures and said predicted future process temperature to calculate an optimum process input control strategy; and
81 controlling a process input thermal energy using the calculated optimum process input control strategy.
32. The method of Claim 31, wherein the step of predicting a future process output temperature comprises: identifying a thermal process model which relates process input thermal energy to process output temperature; and recursively predicting future process output temperatures using said thermal process model, said process output temperature predicted over a predetermined future time period.
33. The method of Claim 32, wherein the step of predicting future process output temperatures further comprises periodically updating said predictions in accordance with a receding horizon calculation.
34. The method of Claim 31, wherein the step of predicting a future process output temperature comprises postulating a stationary future control strategy.
35. The method of Claim 31 , wherein the step of calculating an optimum process input control strategy comprises comparing said predicted future process output temperatures to a desired future process output temperature.
36. The method of Claim 31 , wherein the step of predicting a future process output temperature comprises: identifying a nonlinear thermal process model which relates process input thermal energy to process output temperature; and training a neural network to predict future process output temperatures using said thermal process model, said process output temperature predicted over a predetermined future time period.
37. The method of Claim 36, wherein the step of predicting future process output temperatures further comprises periodically updating said predictions in accordance with a receding horizon calculation.
38. The method of Claim 36, wherein the step of predicting a future process output temperature comprises postulating a stationary future control strategy.
39. The method of Claim 36, wherein the step of calculating an optimum process input control strategy comprises comparing said predicted future process output temperatures to a desired future process output temperature.
82
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AU18435/97A AU1843597A (en) | 1996-01-31 | 1997-01-30 | Model-based predictive control of thermal processing |
| DE69728256T DE69728256T2 (en) | 1996-01-31 | 1997-01-30 | MODEL-BASED PREDICTIVE CONTROL FOR THERMAL TREATMENTS |
| EP97904022A EP0879547B1 (en) | 1996-01-31 | 1997-01-30 | Model-based predictive control of thermal processing |
| JP52776597A JP3956057B2 (en) | 1996-01-31 | 1997-01-30 | Model reference predictive control of heat treatment |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US59743896A | 1996-01-31 | 1996-01-31 | |
| US08/597,438 | 1996-01-31 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| WO1997028669A1 WO1997028669A1 (en) | 1997-08-07 |
| WO1997028669B1 true WO1997028669B1 (en) | 1997-09-12 |
| WO1997028669A9 WO1997028669A9 (en) | 1997-10-30 |
Family
ID=24391498
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US1997/001318 WO1997028669A1 (en) | 1996-01-31 | 1997-01-30 | Model-based predictive control of thermal processing |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US6207936B1 (en) |
| EP (1) | EP0879547B1 (en) |
| JP (1) | JP3956057B2 (en) |
| KR (1) | KR100486158B1 (en) |
| AU (1) | AU1843597A (en) |
| DE (1) | DE69728256T2 (en) |
| WO (1) | WO1997028669A1 (en) |
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- 1997-01-30 DE DE69728256T patent/DE69728256T2/en not_active Expired - Fee Related
- 1997-01-30 JP JP52776597A patent/JP3956057B2/en not_active Expired - Lifetime
- 1997-01-30 KR KR10-1998-0705938A patent/KR100486158B1/en not_active IP Right Cessation
- 1997-01-30 EP EP97904022A patent/EP0879547B1/en not_active Expired - Lifetime
- 1997-01-30 WO PCT/US1997/001318 patent/WO1997028669A1/en active IP Right Grant
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2000
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