USRE34489F1 - Atomic force microscope with optimal replacement fluid cell - Google Patents

Atomic force microscope with optimal replacement fluid cell Download PDF

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Publication number
USRE34489F1
USRE34489F1 US89598492A USRE34489F1 US RE34489 F1 USRE34489 F1 US RE34489F1 US 89598492 A US89598492 A US 89598492A US RE34489 F1 USRE34489 F1 US RE34489F1
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United States
Prior art keywords
probe
atomic force
force microscope
module
replacement fluid
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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Paul K Hansma
Barney Drake
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University of California
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University of California
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Priority to US07895984 priority Critical patent/USRE34489F1/en
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Publication of USRE34489E publication Critical patent/USRE34489E/en
Assigned to REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE reassignment REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ALEXANDER, BERNICE, EXECUTRIX OF THE ESTATE OF SAMUEL T. ALEXANDER
Publication of USRE34489F1 publication Critical patent/USRE34489F1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G01Q30/025—Optical microscopes coupled with SPM
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/12—Fluid environment
    • G01Q30/14—Liquid environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G01Q70/04—Probe holders with compensation for temperature or vibration induced errors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/863—Atomic force probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/868—Scanning probe structure with optical means
    • Y10S977/87—Optical lever arm for reflecting light

Abstract

An atomic force microscope which is readily useable for researchers for its intended use without extensive lost tome for setup and repair. The probe used therein is a cantilevered optical lever which imparts surface information in a gentle and reliable manner by reflecting an incident laser beam. The probe (20) is carried by a replaceable probe-carrying module (48) which is factory set up and merely inserted and fine tuned by the user. Calibration tools are provided to make initial set up and fine tuning of the microscope a simple and straightforward operation requiring little or no technical talent. The probe module (48) is mechanically coupled to a probe module support (38) so that the probe is substantial alignment with a deflection detection system (26, 66). <IMAGE>
US07895984 1989-03-13 1992-06-04 Atomic force microscope with optimal replacement fluid cell Expired - Lifetime USRE34489F1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US07895984 USRE34489F1 (en) 1989-03-13 1992-06-04 Atomic force microscope with optimal replacement fluid cell

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/322,001 US4935634A (en) 1989-03-13 1989-03-13 Atomic force microscope with optional replaceable fluid cell
US07895984 USRE34489F1 (en) 1989-03-13 1992-06-04 Atomic force microscope with optimal replacement fluid cell

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US07/322,001 Reissue US4935634A (en) 1989-03-13 1989-03-13 Atomic force microscope with optional replaceable fluid cell

Publications (2)

Publication Number Publication Date
USRE34489E USRE34489E (en) 1993-12-28
USRE34489F1 true USRE34489F1 (en) 1999-12-14

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
US07/322,001 Ceased US4935634A (en) 1989-03-13 1989-03-13 Atomic force microscope with optional replaceable fluid cell
US07895984 Expired - Lifetime USRE34489F1 (en) 1989-03-13 1992-06-04 Atomic force microscope with optimal replacement fluid cell

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US07/322,001 Ceased US4935634A (en) 1989-03-13 1989-03-13 Atomic force microscope with optional replaceable fluid cell

Country Status (5)

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US (2) US4935634A (en)
EP (3) EP0388023B1 (en)
JP (1) JPH0776696B2 (en)
AT (3) ATE172536T1 (en)
DE (3) DE69021235T2 (en)

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JPH0776696B2 (en) 1995-08-16
EP0650029A3 (en) 1996-08-28
ATE172536T1 (en) 1998-11-15
JPH02284015A (en) 1990-11-21
ATE384245T1 (en) 2008-02-15
ATE125934T1 (en) 1995-08-15
EP0650029B1 (en) 1998-10-21
DE69032714T2 (en) 1999-06-02
DE69034251D1 (en) 2008-03-06
EP0388023A2 (en) 1990-09-19
DE69032714D1 (en) 1998-11-26
EP0862045A3 (en) 2000-10-04
US4935634A (en) 1990-06-19
DE69021235T2 (en) 1996-01-04
EP0388023B1 (en) 1995-08-02
EP0862045B1 (en) 2008-01-16
USRE34489E (en) 1993-12-28
EP0650029A2 (en) 1995-04-26
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EP0862045A2 (en) 1998-09-02
DE69021235D1 (en) 1995-09-07

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