USD799646S1 - Heater block - Google Patents

Heater block Download PDF

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Publication number
USD799646S1
USD799646S1 US29/575,867 US201629575867F USD799646S US D799646 S1 USD799646 S1 US D799646S1 US 201629575867 F US201629575867 F US 201629575867F US D799646 S USD799646 S US D799646S
Authority
US
United States
Prior art keywords
heater block
view
heater
block
broken lines
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/575,867
Inventor
Koei Aida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASM IP Holding BV
Original Assignee
ASM IP Holding BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASM IP Holding BV filed Critical ASM IP Holding BV
Priority to US29/575,867 priority Critical patent/USD799646S1/en
Assigned to ASM IP HOLDING B.V. reassignment ASM IP HOLDING B.V. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: AIDA, KOEI
Application granted granted Critical
Publication of USD799646S1 publication Critical patent/USD799646S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a top plan view of a heater block in accordance with my design;
FIG. 2 is a front elevation view thereof;
FIG. 3 is a bottom plan view thereof;
FIG. 4 is a longitudinal section view taken along line 4-4 of FIG. 1; and,
FIG. 5 is an enlarged detail view of FIG. 4.
The dashed broken lines depict portions of the heater block that form no part of the claim. The dash dot broken lines depict boundaries of the enlarged detail view and form no part of the claim.

Claims (1)

    CLAIM
  1. The ornamental design for a heater block, as shown and described.
US29/575,867 2016-08-30 2016-08-30 Heater block Active USD799646S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/575,867 USD799646S1 (en) 2016-08-30 2016-08-30 Heater block

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/575,867 USD799646S1 (en) 2016-08-30 2016-08-30 Heater block

Publications (1)

Publication Number Publication Date
USD799646S1 true USD799646S1 (en) 2017-10-10

Family

ID=59981160

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/575,867 Active USD799646S1 (en) 2016-08-30 2016-08-30 Heater block

Country Status (1)

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US (1) USD799646S1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD859484S1 (en) * 2017-06-12 2019-09-10 Asm Ip Holding B.V. Heater block
TWD210286S (en) 2018-10-24 2021-03-11 荷蘭商Ａｓｍ智慧財產控股公司 Susceptor
USD927575S1 (en) * 2019-01-18 2021-08-10 Shinkawa Ltd. Heater block for bonding apparatus

Citations (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD327534S (en) 1987-07-30 1992-06-30 CLM Investments, Inc. Floor drain strainer
USD363464S (en) * 1992-08-27 1995-10-24 Tokyo Electron Yamanashi Limited Electrode for a semiconductor processing apparatus
US6207932B1 (en) 1997-12-30 2001-03-27 Hyundai Electronics Industries, Co., Ltd. Heater block for heating wafer
US20010019777A1 (en) 2000-02-04 2001-09-06 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Chamber material made of Al alloy and heater block
US20020014204A1 (en) 2000-06-13 2002-02-07 Pyo Sung Gyu Heater block having catalyst spray means
US6370796B1 (en) 2000-09-29 2002-04-16 Sony Corporation Heater block cooling system for wafer processing apparatus
US6394797B1 (en) * 1997-04-02 2002-05-28 Hitachi, Ltd. Substrate temperature control system and method for controlling temperature of substrate
USD461233S1 (en) 2001-11-29 2002-08-06 James Michael Whalen Marine deck drain strainer
US6688784B1 (en) 2000-10-25 2004-02-10 Advanced Micro Devices, Inc. Parallel plate development with multiple holes in top plate for control of developer flow and pressure
USD486891S1 (en) 2003-01-21 2004-02-17 Richard W. Cronce, Jr. Vent pipe protective cover
US20050258280A1 (en) 2004-05-24 2005-11-24 Shin-Etsu Chemical Co., Ltd. Shower plate for plasma processing apparatus and plasma processing apparatus
US20060011298A1 (en) * 2004-07-15 2006-01-19 Ji-Eun Lim Showerhead with branched gas receiving channel and apparatus including the same for use in manufacturing semiconductor substrates
USD529057S1 (en) * 2004-08-16 2006-09-26 Williams Advanced Materials, Inc. Sputtering target
US20070125762A1 (en) 2005-12-01 2007-06-07 Applied Materials, Inc. Multi-zone resistive heater
US20080092815A1 (en) 2006-10-18 2008-04-24 Advanced Micro-Fabrication Equipment, Inc. Asia Gas distribution assembly for use in a semiconductor work piece processing reactor
USD602575S1 (en) 2007-11-19 2009-10-20 Silvano Breda Shower strainer
US20090283217A1 (en) 2008-05-15 2009-11-19 Applied Materials, Inc. Apparatus for etching semiconductor wafers
USD609652S1 (en) * 2008-07-22 2010-02-09 Tokyo Electron Limited Wafer attracting plate
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
USD629874S1 (en) 2009-11-23 2010-12-28 Ty Gerard Hermans Garbage disposal cover with scraper
US20110107512A1 (en) 2008-02-12 2011-05-12 Patrick Gilbert Heat exchange devices
USD643055S1 (en) 2008-09-11 2011-08-09 Asm Japan K.K. Heater block for use in a semiconductor processing tool
USD653734S1 (en) 2010-01-08 2012-02-07 Bulk Tank, Inc. Screened gasket
USD665055S1 (en) 2012-01-24 2012-08-07 Asm Ip Holding B.V. Shower plate
US20120207456A1 (en) 2009-08-21 2012-08-16 Ap Systems Inc. Heater block for a rapid thermal processing apparatus
US20130126515A1 (en) 2011-11-23 2013-05-23 Asm Ip Holding B.V. Radiation shielding for a substrate holder
US20130134148A1 (en) 2011-11-25 2013-05-30 Nhk Spring Co., Ltd. Substrate support device
US20140014642A1 (en) 2012-06-12 2014-01-16 Component Re-Engineering Company, Inc. Multiple Zone Heater
US20140182053A1 (en) 2012-12-29 2014-07-03 Alexander Yeh Industry Co., Ltd. Pullable drain plug
US20140283747A1 (en) 2013-03-21 2014-09-25 Tokyo Electron Limited Plasma processing apparatus and shower plate
USD715410S1 (en) 2012-03-21 2014-10-14 Blucher Metal A/S Roof drain
USD716742S1 (en) * 2013-09-13 2014-11-04 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD720838S1 (en) * 2014-02-04 2015-01-06 Asm Ip Holding B.V. Shower plate
USD724701S1 (en) * 2014-02-04 2015-03-17 ASM IP Holding, B.V. Shower plate
USD725168S1 (en) 2014-02-04 2015-03-24 Asm Ip Holding B.V. Heater block
USD726884S1 (en) * 2014-02-04 2015-04-14 Asm Ip Holding B.V. Heater block
USD732145S1 (en) * 2014-02-04 2015-06-16 Asm Ip Holding B.V. Shower plate
USD732644S1 (en) * 2014-02-04 2015-06-23 Asm Ip Holding B.V. Top plate
US9299595B2 (en) * 2012-06-27 2016-03-29 Asm Ip Holding B.V. Susceptor heater and method of heating a substrate
USD753269S1 (en) * 2015-01-09 2016-04-05 Asm Ip Holding B.V. Top plate
USD769200S1 (en) * 2013-05-15 2016-10-18 Ebara Corporation Elastic membrane for semiconductor wafer polishing apparatus
US20160358808A1 (en) * 2015-06-02 2016-12-08 Lam Research Corporation Hybrid 200 mm/300 mm semiconductor processing apparatuses
USD785766S1 (en) * 2016-06-15 2017-05-02 Asm Ip Holding B.V. Shower plate
USD787458S1 (en) * 2015-11-18 2017-05-23 Asm Ip Holding B.V. Gas supply plate for semiconductor manufacturing apparatus

Patent Citations (46)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD327534S (en) 1987-07-30 1992-06-30 CLM Investments, Inc. Floor drain strainer
USD363464S (en) * 1992-08-27 1995-10-24 Tokyo Electron Yamanashi Limited Electrode for a semiconductor processing apparatus
US6394797B1 (en) * 1997-04-02 2002-05-28 Hitachi, Ltd. Substrate temperature control system and method for controlling temperature of substrate
US6207932B1 (en) 1997-12-30 2001-03-27 Hyundai Electronics Industries, Co., Ltd. Heater block for heating wafer
US20010019777A1 (en) 2000-02-04 2001-09-06 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Chamber material made of Al alloy and heater block
US20020014204A1 (en) 2000-06-13 2002-02-07 Pyo Sung Gyu Heater block having catalyst spray means
US6370796B1 (en) 2000-09-29 2002-04-16 Sony Corporation Heater block cooling system for wafer processing apparatus
US6688784B1 (en) 2000-10-25 2004-02-10 Advanced Micro Devices, Inc. Parallel plate development with multiple holes in top plate for control of developer flow and pressure
USD461233S1 (en) 2001-11-29 2002-08-06 James Michael Whalen Marine deck drain strainer
USD486891S1 (en) 2003-01-21 2004-02-17 Richard W. Cronce, Jr. Vent pipe protective cover
US20050258280A1 (en) 2004-05-24 2005-11-24 Shin-Etsu Chemical Co., Ltd. Shower plate for plasma processing apparatus and plasma processing apparatus
US20060011298A1 (en) * 2004-07-15 2006-01-19 Ji-Eun Lim Showerhead with branched gas receiving channel and apparatus including the same for use in manufacturing semiconductor substrates
USD529057S1 (en) * 2004-08-16 2006-09-26 Williams Advanced Materials, Inc. Sputtering target
US20070125762A1 (en) 2005-12-01 2007-06-07 Applied Materials, Inc. Multi-zone resistive heater
US20080092815A1 (en) 2006-10-18 2008-04-24 Advanced Micro-Fabrication Equipment, Inc. Asia Gas distribution assembly for use in a semiconductor work piece processing reactor
USD602575S1 (en) 2007-11-19 2009-10-20 Silvano Breda Shower strainer
US20110107512A1 (en) 2008-02-12 2011-05-12 Patrick Gilbert Heat exchange devices
US20090283217A1 (en) 2008-05-15 2009-11-19 Applied Materials, Inc. Apparatus for etching semiconductor wafers
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
USD609652S1 (en) * 2008-07-22 2010-02-09 Tokyo Electron Limited Wafer attracting plate
USD643055S1 (en) 2008-09-11 2011-08-09 Asm Japan K.K. Heater block for use in a semiconductor processing tool
US20120207456A1 (en) 2009-08-21 2012-08-16 Ap Systems Inc. Heater block for a rapid thermal processing apparatus
USD629874S1 (en) 2009-11-23 2010-12-28 Ty Gerard Hermans Garbage disposal cover with scraper
USD653734S1 (en) 2010-01-08 2012-02-07 Bulk Tank, Inc. Screened gasket
US20130126515A1 (en) 2011-11-23 2013-05-23 Asm Ip Holding B.V. Radiation shielding for a substrate holder
US20130134148A1 (en) 2011-11-25 2013-05-30 Nhk Spring Co., Ltd. Substrate support device
USD665055S1 (en) 2012-01-24 2012-08-07 Asm Ip Holding B.V. Shower plate
USD715410S1 (en) 2012-03-21 2014-10-14 Blucher Metal A/S Roof drain
US20140014642A1 (en) 2012-06-12 2014-01-16 Component Re-Engineering Company, Inc. Multiple Zone Heater
US9299595B2 (en) * 2012-06-27 2016-03-29 Asm Ip Holding B.V. Susceptor heater and method of heating a substrate
US20140182053A1 (en) 2012-12-29 2014-07-03 Alexander Yeh Industry Co., Ltd. Pullable drain plug
US20140283747A1 (en) 2013-03-21 2014-09-25 Tokyo Electron Limited Plasma processing apparatus and shower plate
USD769200S1 (en) * 2013-05-15 2016-10-18 Ebara Corporation Elastic membrane for semiconductor wafer polishing apparatus
USD716742S1 (en) * 2013-09-13 2014-11-04 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD725168S1 (en) 2014-02-04 2015-03-24 Asm Ip Holding B.V. Heater block
USD726884S1 (en) * 2014-02-04 2015-04-14 Asm Ip Holding B.V. Heater block
USD732145S1 (en) * 2014-02-04 2015-06-16 Asm Ip Holding B.V. Shower plate
USD732644S1 (en) * 2014-02-04 2015-06-23 Asm Ip Holding B.V. Top plate
USD733261S1 (en) * 2014-02-04 2015-06-30 Asm Ip Holding B.V. Top plate
USD735836S1 (en) * 2014-02-04 2015-08-04 Asm Ip Holding B.V. Shower plate
USD724701S1 (en) * 2014-02-04 2015-03-17 ASM IP Holding, B.V. Shower plate
USD720838S1 (en) * 2014-02-04 2015-01-06 Asm Ip Holding B.V. Shower plate
USD753269S1 (en) * 2015-01-09 2016-04-05 Asm Ip Holding B.V. Top plate
US20160358808A1 (en) * 2015-06-02 2016-12-08 Lam Research Corporation Hybrid 200 mm/300 mm semiconductor processing apparatuses
USD787458S1 (en) * 2015-11-18 2017-05-23 Asm Ip Holding B.V. Gas supply plate for semiconductor manufacturing apparatus
USD785766S1 (en) * 2016-06-15 2017-05-02 Asm Ip Holding B.V. Shower plate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD859484S1 (en) * 2017-06-12 2019-09-10 Asm Ip Holding B.V. Heater block
TWD210286S (en) 2018-10-24 2021-03-11 荷蘭商Ａｓｍ智慧財產控股公司 Susceptor
USD927575S1 (en) * 2019-01-18 2021-08-10 Shinkawa Ltd. Heater block for bonding apparatus
USD959525S1 (en) * 2019-01-18 2022-08-02 Shinkawa Ltd. Heater block for bonding apparatus

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