USD795315S1 - Dresser disk - Google Patents

Dresser disk Download PDF

Info

Publication number
USD795315S1
USD795315S1 US29/528,791 US201529528791F USD795315S US D795315 S1 USD795315 S1 US D795315S1 US 201529528791 F US201529528791 F US 201529528791F US D795315 S USD795315 S US D795315S
Authority
US
United States
Prior art keywords
dresser disk
dresser
view
disk
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/528,791
Inventor
Mitsuru Miyazaki
Kuniaki Yamaguchi
Naoki TOYOMURA
Takuya Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JPD2014-27814F external-priority patent/JP1528168S/ja
Priority claimed from JPD2014-27815F external-priority patent/JP1528309S/ja
Priority claimed from JPD2014-27816F external-priority patent/JP1528169S/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Assigned to EBARA CORPORATION reassignment EBARA CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: INOUE, TAKUYA, MIYAZAKI, MITSURU, TOYOMURA, NAOKI, YAMAGUCHI, KUNIAKI
Application granted granted Critical
Publication of USD795315S1 publication Critical patent/USD795315S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Description

FIG. 1 is a perspective view of a first dresser disk showing our new design;
FIG. 2 is a plan view thereof;
FIG. 3 is a bottom view thereof;
FIG. 4 is a front view thereof, where rear, right-side and left-side views are identical thereto;
FIG. 5 is a cross-section view taken along the line 5-5 of FIG. 3 thereof
FIG. 6 is a perspective view of a second dresser disk showing our new design;
FIG. 7 is a plan view thereof;
FIG. 8 is a bottom view thereof;
FIG. 9 is a front view thereof, where rear, right-side and left-side views are identical thereto; and,
FIG. 10 is a cross-section view taken along the line 10-10 of FIG. 8 thereof.
The internal details shown in FIGS. 5 and 10 form no part of the claimed design. The particular cross-hatching patterns in FIGS. 5 and 10 do not represent any particular materials.

Claims (1)

    CLAIM
  1. The ornamental design for a dresser disk, as shown and described.
US29/528,791 2014-12-12 2015-06-01 Dresser disk Active USD795315S1 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2014-027814 2014-02-17
JP2014-027816 2014-12-12
JPD2014-27814F JP1528168S (en) 2014-12-12 2014-12-12
JPD2014-27815F JP1528309S (en) 2014-12-12 2014-12-12
JPD2014-27816F JP1528169S (en) 2014-12-12 2014-12-12
JP2014-027815 2014-12-12

Publications (1)

Publication Number Publication Date
USD795315S1 true USD795315S1 (en) 2017-08-22

Family

ID=59580787

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/528,791 Active USD795315S1 (en) 2014-12-12 2015-06-01 Dresser disk

Country Status (1)

Country Link
US (1) USD795315S1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD954567S1 (en) * 2019-06-25 2022-06-14 Ebara Corporation Measurement jig

Citations (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US441099A (en) * 1890-11-18 Game apparatus
US2611615A (en) * 1949-09-27 1952-09-23 Walter J Watson Simulated basketball game
US3069919A (en) * 1960-10-18 1962-12-25 Nagel Chase Mfg Company Stepped pulley
USD243664S (en) * 1975-11-10 1977-03-15 Hardinge Brothers, Inc. Index ring for a machine tool
US4021048A (en) * 1975-02-03 1977-05-03 Duovel Company Carrier accessory for use with record discs on phonographs
US5167145A (en) * 1990-09-19 1992-12-01 Butler David M Measurement of blood coagulation time using infrared electromagnetic energy
USD336442S (en) * 1991-08-19 1993-06-15 Uppendahl Elizabeth S Horizontal T-square indicator
US5657198A (en) * 1995-10-11 1997-08-12 Flener; Jeff M. Canister for surface mount electronic components
US5743784A (en) * 1995-12-19 1998-04-28 Applied Materials, Inc. Apparatus and method to determine the coefficient of friction of a chemical mechanical polishing pad during a pad conditioning process and to use it to control the process
US6036583A (en) * 1997-07-11 2000-03-14 Applied Materials, Inc. Conditioner head in a substrate polisher and method
US6200207B1 (en) * 1999-03-23 2001-03-13 Vanguard International Semiconductor Corp. Dressing apparatus for chemical mechanical polishing pad
US6231425B1 (en) * 1998-08-18 2001-05-15 Nec Corporation Polishing apparatus and method
US20010046621A1 (en) * 2000-05-23 2001-11-29 Richard Colli Terminal saver
US6354918B1 (en) * 1998-06-19 2002-03-12 Ebara Corporation Apparatus and method for polishing workpiece
US6379229B1 (en) * 1999-05-17 2002-04-30 Ebara Corporation Polishing apparatus
US6402588B1 (en) * 1998-04-27 2002-06-11 Ebara Corporation Polishing apparatus
US6443815B1 (en) * 2000-09-22 2002-09-03 Lam Research Corporation Apparatus and methods for controlling pad conditioning head tilt for chemical mechanical polishing
US6517414B1 (en) * 2000-03-10 2003-02-11 Appied Materials, Inc. Method and apparatus for controlling a pad conditioning process of a chemical-mechanical polishing apparatus
US6602119B1 (en) * 1999-06-08 2003-08-05 Ebara Corporation Dressing apparatus
US6607427B2 (en) * 2000-11-17 2003-08-19 Ebara Corporation Dressing apparatus and polishing apparatus
US6607426B2 (en) * 2000-11-09 2003-08-19 Ebara Corporation Polishing apparatus
US6640795B1 (en) * 1999-09-29 2003-11-04 Kabushiki Kaisha Toshiba Dresser, polishing apparatus and method for producing an article
US6682405B2 (en) * 2001-03-15 2004-01-27 Oki Electric Industry Co., Ltd. Polishing apparatus having a dresser and dresser adjusting method
US6953382B1 (en) * 2004-06-24 2005-10-11 Novellus Systems, Inc. Methods and apparatuses for conditioning polishing surfaces utilized during CMP processing
US7066795B2 (en) * 2004-10-12 2006-06-27 Applied Materials, Inc. Polishing pad conditioner with shaped abrasive patterns and channels
US7094695B2 (en) * 2002-08-21 2006-08-22 Micron Technology, Inc. Apparatus and method for conditioning a polishing pad used for mechanical and/or chemical-mechanical planarization
US7131900B2 (en) * 2003-07-28 2006-11-07 Samuel Chou Grinding wheel in combination with a grinding ring
US7217172B2 (en) * 2005-07-09 2007-05-15 Tbw Industries Inc. Enhanced end effector arm arrangement for CMP pad conditioning
US7367872B2 (en) * 2003-04-08 2008-05-06 Applied Materials, Inc. Conditioner disk for use in chemical mechanical polishing
US20080310932A1 (en) * 2004-12-24 2008-12-18 Mcintyre Dale Michael Washer
USD658692S1 (en) * 2011-03-30 2012-05-01 Tokyo Electron Limited Liner for plasma processing apparatus
US20130129577A1 (en) * 2011-11-23 2013-05-23 ASM Holding B.V. Chamber sealing member
US20140000843A1 (en) * 2012-06-27 2014-01-02 Asm Ip Holding B.V. Susceptor heater and method of heating a substrate
USD699199S1 (en) * 2011-09-30 2014-02-11 Tokyo Electron Limited Electrode plate for a plasma processing apparatus
USD699200S1 (en) * 2011-09-30 2014-02-11 Tokyo Electron Limited Electrode member for a plasma processing apparatus
US20150020418A1 (en) * 2012-03-22 2015-01-22 Dennis Wayne Clift Cutting blade apparatus and methods
USD729730S1 (en) * 2013-06-06 2015-05-19 Jon Simon Gillespie-Brown Power charging ring
JP1524299S (en) 2014-05-15 2015-05-25
US9102038B2 (en) * 2011-08-24 2015-08-11 Nippon Steel & Sumikin Materials Co., Ltd. Beveling grindstone
USD737873S1 (en) * 2012-09-26 2015-09-01 Ebara Corporation Dresser disk
US9167625B2 (en) * 2011-11-23 2015-10-20 Asm Ip Holding B.V. Radiation shielding for a substrate holder
USD741823S1 (en) * 2013-07-10 2015-10-27 Hitachi Kokusai Electric Inc. Vaporizer for substrate processing apparatus
USD743455S1 (en) * 2013-03-26 2015-11-17 Ebara Corporation Dresser disk
USD743456S1 (en) * 2012-09-26 2015-11-17 Ebara Corporation Dresser disk
US9202727B2 (en) * 2012-03-02 2015-12-01 ASM IP Holding Susceptor heater shim
US9242343B2 (en) * 2013-03-11 2016-01-26 Hong Fu Jin Precision Industry (Shenzhen) Co., Ltd. Grinding wheel machining device
US9403259B2 (en) * 2013-03-15 2016-08-02 United Technologies Corporation Removing material from a workpiece with a water jet

Patent Citations (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US441099A (en) * 1890-11-18 Game apparatus
US2611615A (en) * 1949-09-27 1952-09-23 Walter J Watson Simulated basketball game
US3069919A (en) * 1960-10-18 1962-12-25 Nagel Chase Mfg Company Stepped pulley
US4021048A (en) * 1975-02-03 1977-05-03 Duovel Company Carrier accessory for use with record discs on phonographs
USD243664S (en) * 1975-11-10 1977-03-15 Hardinge Brothers, Inc. Index ring for a machine tool
US5167145B1 (en) * 1990-09-19 2000-05-23 David M Butler Measurement of blood coagulation time using infrared electromagnetic energy
US5167145A (en) * 1990-09-19 1992-12-01 Butler David M Measurement of blood coagulation time using infrared electromagnetic energy
USD336442S (en) * 1991-08-19 1993-06-15 Uppendahl Elizabeth S Horizontal T-square indicator
US5657198A (en) * 1995-10-11 1997-08-12 Flener; Jeff M. Canister for surface mount electronic components
US5743784A (en) * 1995-12-19 1998-04-28 Applied Materials, Inc. Apparatus and method to determine the coefficient of friction of a chemical mechanical polishing pad during a pad conditioning process and to use it to control the process
US6036583A (en) * 1997-07-11 2000-03-14 Applied Materials, Inc. Conditioner head in a substrate polisher and method
US6402588B1 (en) * 1998-04-27 2002-06-11 Ebara Corporation Polishing apparatus
US6354918B1 (en) * 1998-06-19 2002-03-12 Ebara Corporation Apparatus and method for polishing workpiece
US6231425B1 (en) * 1998-08-18 2001-05-15 Nec Corporation Polishing apparatus and method
US6200207B1 (en) * 1999-03-23 2001-03-13 Vanguard International Semiconductor Corp. Dressing apparatus for chemical mechanical polishing pad
US6379229B1 (en) * 1999-05-17 2002-04-30 Ebara Corporation Polishing apparatus
US6602119B1 (en) * 1999-06-08 2003-08-05 Ebara Corporation Dressing apparatus
US6640795B1 (en) * 1999-09-29 2003-11-04 Kabushiki Kaisha Toshiba Dresser, polishing apparatus and method for producing an article
US6517414B1 (en) * 2000-03-10 2003-02-11 Appied Materials, Inc. Method and apparatus for controlling a pad conditioning process of a chemical-mechanical polishing apparatus
US20010046621A1 (en) * 2000-05-23 2001-11-29 Richard Colli Terminal saver
US6443815B1 (en) * 2000-09-22 2002-09-03 Lam Research Corporation Apparatus and methods for controlling pad conditioning head tilt for chemical mechanical polishing
US6607426B2 (en) * 2000-11-09 2003-08-19 Ebara Corporation Polishing apparatus
US6607427B2 (en) * 2000-11-17 2003-08-19 Ebara Corporation Dressing apparatus and polishing apparatus
US6682405B2 (en) * 2001-03-15 2004-01-27 Oki Electric Industry Co., Ltd. Polishing apparatus having a dresser and dresser adjusting method
US7094695B2 (en) * 2002-08-21 2006-08-22 Micron Technology, Inc. Apparatus and method for conditioning a polishing pad used for mechanical and/or chemical-mechanical planarization
US7367872B2 (en) * 2003-04-08 2008-05-06 Applied Materials, Inc. Conditioner disk for use in chemical mechanical polishing
US7131900B2 (en) * 2003-07-28 2006-11-07 Samuel Chou Grinding wheel in combination with a grinding ring
US6953382B1 (en) * 2004-06-24 2005-10-11 Novellus Systems, Inc. Methods and apparatuses for conditioning polishing surfaces utilized during CMP processing
US7066795B2 (en) * 2004-10-12 2006-06-27 Applied Materials, Inc. Polishing pad conditioner with shaped abrasive patterns and channels
US20080310932A1 (en) * 2004-12-24 2008-12-18 Mcintyre Dale Michael Washer
US7217172B2 (en) * 2005-07-09 2007-05-15 Tbw Industries Inc. Enhanced end effector arm arrangement for CMP pad conditioning
USD658692S1 (en) * 2011-03-30 2012-05-01 Tokyo Electron Limited Liner for plasma processing apparatus
US9102038B2 (en) * 2011-08-24 2015-08-11 Nippon Steel & Sumikin Materials Co., Ltd. Beveling grindstone
USD699199S1 (en) * 2011-09-30 2014-02-11 Tokyo Electron Limited Electrode plate for a plasma processing apparatus
USD699200S1 (en) * 2011-09-30 2014-02-11 Tokyo Electron Limited Electrode member for a plasma processing apparatus
US20130129577A1 (en) * 2011-11-23 2013-05-23 ASM Holding B.V. Chamber sealing member
US9167625B2 (en) * 2011-11-23 2015-10-20 Asm Ip Holding B.V. Radiation shielding for a substrate holder
US9340874B2 (en) * 2011-11-23 2016-05-17 Asm Ip Holding B.V. Chamber sealing member
US9202727B2 (en) * 2012-03-02 2015-12-01 ASM IP Holding Susceptor heater shim
US20150020418A1 (en) * 2012-03-22 2015-01-22 Dennis Wayne Clift Cutting blade apparatus and methods
US9299595B2 (en) * 2012-06-27 2016-03-29 Asm Ip Holding B.V. Susceptor heater and method of heating a substrate
US20140000843A1 (en) * 2012-06-27 2014-01-02 Asm Ip Holding B.V. Susceptor heater and method of heating a substrate
USD737873S1 (en) * 2012-09-26 2015-09-01 Ebara Corporation Dresser disk
USD743456S1 (en) * 2012-09-26 2015-11-17 Ebara Corporation Dresser disk
US9242343B2 (en) * 2013-03-11 2016-01-26 Hong Fu Jin Precision Industry (Shenzhen) Co., Ltd. Grinding wheel machining device
US9403259B2 (en) * 2013-03-15 2016-08-02 United Technologies Corporation Removing material from a workpiece with a water jet
USD743455S1 (en) * 2013-03-26 2015-11-17 Ebara Corporation Dresser disk
USD729730S1 (en) * 2013-06-06 2015-05-19 Jon Simon Gillespie-Brown Power charging ring
USD741823S1 (en) * 2013-07-10 2015-10-27 Hitachi Kokusai Electric Inc. Vaporizer for substrate processing apparatus
USD753736S1 (en) * 2014-05-15 2016-04-12 Ebara Corporation Dresser disk
JP1524299S (en) 2014-05-15 2015-05-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD954567S1 (en) * 2019-06-25 2022-06-14 Ebara Corporation Measurement jig

Similar Documents

Publication Publication Date Title
USD803001S1 (en) Tumbler
USD850954S1 (en) Main body for a data logger
USD854826S1 (en) Trunk
USD784956S1 (en) Headphone
USD727200S1 (en) Ring
USD729138S1 (en) Wheel
USD743872S1 (en) Tyre
USD866384S1 (en) Ring
USD751030S1 (en) Tire
USD748228S1 (en) Valve seat
USD723459S1 (en) Charging base
USD715298S1 (en) Stylus
USD700682S1 (en) Valve seat
USD817743S1 (en) Removable shim
USD766661S1 (en) Tumbler
USD796190S1 (en) Bag
USD743456S1 (en) Dresser disk
USD750750S1 (en) Valve disk
USD755019S1 (en) Herb keeper
USD734686S1 (en) Ring
USD763024S1 (en) Organizer
USD891704S1 (en) Multiple layer false eyelash
USD703580S1 (en) Buckle
USD753401S1 (en) Toothbrush
USD791841S1 (en) Impeller for pumps