US5715051A - Method and system for detecting defects in optically transmissive coatings formed on optical media substrates - Google Patents
Method and system for detecting defects in optically transmissive coatings formed on optical media substrates Download PDFInfo
- Publication number
- US5715051A US5715051A US08/735,197 US73519796A US5715051A US 5715051 A US5715051 A US 5715051A US 73519796 A US73519796 A US 73519796A US 5715051 A US5715051 A US 5715051A
- Authority
- US
- United States
- Prior art keywords
- high frequency
- data
- coating
- defect data
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9506—Optical discs
Abstract
Description
Claims (24)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/735,197 US5715051A (en) | 1996-10-21 | 1996-10-21 | Method and system for detecting defects in optically transmissive coatings formed on optical media substrates |
PCT/US1997/016881 WO1998018135A1 (en) | 1996-10-21 | 1997-09-23 | Method and system for detecting defects in optically transmissive coatings formed on optical media substrates |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/735,197 US5715051A (en) | 1996-10-21 | 1996-10-21 | Method and system for detecting defects in optically transmissive coatings formed on optical media substrates |
Publications (1)
Publication Number | Publication Date |
---|---|
US5715051A true US5715051A (en) | 1998-02-03 |
Family
ID=24954753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/735,197 Expired - Fee Related US5715051A (en) | 1996-10-21 | 1996-10-21 | Method and system for detecting defects in optically transmissive coatings formed on optical media substrates |
Country Status (2)
Country | Link |
---|---|
US (1) | US5715051A (en) |
WO (1) | WO1998018135A1 (en) |
Cited By (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6011620A (en) * | 1998-04-06 | 2000-01-04 | Northrop Grumman Corporation | Method and apparatus for the automatic inspection of optically transmissive planar objects |
EP1069401A1 (en) * | 1999-07-13 | 2001-01-17 | ODME International B.V. | Optical film thickness measuring device |
EP1103783A1 (en) * | 1999-11-19 | 2001-05-30 | Electronic Systems S.P.A. | Equipment and method for measuring the basic weight and thickness of the materials in films, ribbons and the like, while simultaneously inspecting their surface |
EP1115107A2 (en) * | 1999-12-14 | 2001-07-11 | Fuji Photo Film Co., Ltd. | Optical information recording medium and method of manufacturing same |
US6292261B1 (en) | 1998-05-22 | 2001-09-18 | Cyberoptics Corporation | Rotary sensor system with at least two detectors |
US6356346B1 (en) * | 2000-01-21 | 2002-03-12 | International Business Machines Corporation | Device and method for inspecting a disk for physical defects |
US6526355B1 (en) * | 2000-03-30 | 2003-02-25 | Lam Research Corporation | Integrated full wavelength spectrometer for wafer processing |
US6529270B1 (en) * | 1999-03-31 | 2003-03-04 | Ade Optical Systems Corporation | Apparatus and method for detecting defects in the surface of a workpiece |
US6538750B1 (en) | 1998-05-22 | 2003-03-25 | Cyberoptics Corporation | Rotary sensor system with a single detector |
US20030120714A1 (en) * | 2001-12-26 | 2003-06-26 | Wolff Robert A. | Human/machine interface for a machine vision sensor and method for installing and operating the same |
US6608675B1 (en) * | 2000-08-28 | 2003-08-19 | Nissan Arc, Ltd. | Method for visualizing higher-order structure of transparent optical polymer molding |
US20050077460A1 (en) * | 2000-12-15 | 2005-04-14 | Andrew Krutchinsky | High capacity and scanning speed system for sample handling and analysis |
US20080082579A1 (en) * | 2006-09-29 | 2008-04-03 | Chung-Ho Huang | Dynamic component-tracking system and methods therefor |
US20080082653A1 (en) * | 2006-09-28 | 2008-04-03 | Chung-Ho Huang | Targeted data collection architecture |
US7356580B1 (en) | 2000-03-30 | 2008-04-08 | Lam Research Corporation | Plug and play sensor integration for a process module |
US20080243988A1 (en) * | 2000-03-30 | 2008-10-02 | Chung-Ho Huang | Recipe-and-component control module and methods thereof |
US20090207245A1 (en) * | 2007-12-27 | 2009-08-20 | Fujifilm Corporation | Disk inspection apparatus and method |
US20100053790A1 (en) * | 2008-08-27 | 2010-03-04 | Fujifilm Corporation | Hard disk inspection apparatus and method, as well as program |
US20110102775A1 (en) * | 2009-11-04 | 2011-05-05 | Practical engineering, LLC | Ophthalmic lens scanner |
US7962898B1 (en) | 2000-12-29 | 2011-06-14 | Cognex Corporation | Optimized distribution of machine vision processing |
US7961201B1 (en) | 2000-12-21 | 2011-06-14 | Cognex Corporation | Method and apparatus for producing graphical machine vision content for distribution via a network |
WO2017136477A1 (en) * | 2016-02-01 | 2017-08-10 | Game Changer Holdings, Llc | Media validation platform |
US11385280B2 (en) * | 2018-05-23 | 2022-07-12 | Tokyo Electron Limited | Inspection apparatus and temperature control meihod |
US11499993B2 (en) * | 2019-11-25 | 2022-11-15 | Tokyo Electron Limited | Stage and inspection apparatus for inspecting electronic device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19958641A1 (en) | 1999-12-06 | 2001-06-28 | Inst Chemo Biosensorik | Process for quality control of layers of material |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4568984A (en) * | 1982-06-03 | 1986-02-04 | Dr. Ing. Rudolf Hell Gmbh | Method and apparatus for scanning masters |
US5067812A (en) * | 1988-05-25 | 1991-11-26 | Kabushiki Kaisha Csk | Systems for inspecting defects in an optical recording medium |
US5268735A (en) * | 1990-12-14 | 1993-12-07 | International Business Machines Corporation | Apparatus for observing features and defects of a sample |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5066132A (en) * | 1989-08-09 | 1991-11-19 | Sunstar Engineering, Inc. | Method of and apparatus for inspecting paint coating |
FR2697086B1 (en) * | 1992-10-20 | 1994-12-09 | Thomson Csf | Method and device for inspecting transparent material. |
-
1996
- 1996-10-21 US US08/735,197 patent/US5715051A/en not_active Expired - Fee Related
-
1997
- 1997-09-23 WO PCT/US1997/016881 patent/WO1998018135A1/en active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4568984A (en) * | 1982-06-03 | 1986-02-04 | Dr. Ing. Rudolf Hell Gmbh | Method and apparatus for scanning masters |
US5067812A (en) * | 1988-05-25 | 1991-11-26 | Kabushiki Kaisha Csk | Systems for inspecting defects in an optical recording medium |
US5268735A (en) * | 1990-12-14 | 1993-12-07 | International Business Machines Corporation | Apparatus for observing features and defects of a sample |
Cited By (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6011620A (en) * | 1998-04-06 | 2000-01-04 | Northrop Grumman Corporation | Method and apparatus for the automatic inspection of optically transmissive planar objects |
US6292261B1 (en) | 1998-05-22 | 2001-09-18 | Cyberoptics Corporation | Rotary sensor system with at least two detectors |
US6538750B1 (en) | 1998-05-22 | 2003-03-25 | Cyberoptics Corporation | Rotary sensor system with a single detector |
US6529270B1 (en) * | 1999-03-31 | 2003-03-04 | Ade Optical Systems Corporation | Apparatus and method for detecting defects in the surface of a workpiece |
EP1069401A1 (en) * | 1999-07-13 | 2001-01-17 | ODME International B.V. | Optical film thickness measuring device |
EP1103783A1 (en) * | 1999-11-19 | 2001-05-30 | Electronic Systems S.P.A. | Equipment and method for measuring the basic weight and thickness of the materials in films, ribbons and the like, while simultaneously inspecting their surface |
EP1115107A3 (en) * | 1999-12-14 | 2002-11-06 | Fuji Photo Film Co., Ltd. | Optical information recording medium and method of manufacturing same |
US6495234B2 (en) | 1999-12-14 | 2002-12-17 | Fuji Photo Film Co., Ltd. | Optical information recording medium and method of manufacturing same |
EP1115107A2 (en) * | 1999-12-14 | 2001-07-11 | Fuji Photo Film Co., Ltd. | Optical information recording medium and method of manufacturing same |
EP1378900A3 (en) * | 1999-12-14 | 2004-01-14 | Fuji Photo Film Co., Ltd. | Optical information recording medium and method of manufacturing same |
EP1378900A2 (en) * | 1999-12-14 | 2004-01-07 | Fuji Photo Film Co., Ltd. | Optical information recording medium and method of manufacturing same |
US6356346B1 (en) * | 2000-01-21 | 2002-03-12 | International Business Machines Corporation | Device and method for inspecting a disk for physical defects |
US20080243988A1 (en) * | 2000-03-30 | 2008-10-02 | Chung-Ho Huang | Recipe-and-component control module and methods thereof |
US7672747B2 (en) | 2000-03-30 | 2010-03-02 | Lam Research Corporation | Recipe-and-component control module and methods thereof |
US6526355B1 (en) * | 2000-03-30 | 2003-02-25 | Lam Research Corporation | Integrated full wavelength spectrometer for wafer processing |
US7356580B1 (en) | 2000-03-30 | 2008-04-08 | Lam Research Corporation | Plug and play sensor integration for a process module |
US6608675B1 (en) * | 2000-08-28 | 2003-08-19 | Nissan Arc, Ltd. | Method for visualizing higher-order structure of transparent optical polymer molding |
US20050077460A1 (en) * | 2000-12-15 | 2005-04-14 | Andrew Krutchinsky | High capacity and scanning speed system for sample handling and analysis |
US7012249B2 (en) * | 2000-12-15 | 2006-03-14 | The Rockefeller University | High capacity and scanning speed system for sample handling and analysis |
US7961201B1 (en) | 2000-12-21 | 2011-06-14 | Cognex Corporation | Method and apparatus for producing graphical machine vision content for distribution via a network |
US7962898B1 (en) | 2000-12-29 | 2011-06-14 | Cognex Corporation | Optimized distribution of machine vision processing |
US20030120714A1 (en) * | 2001-12-26 | 2003-06-26 | Wolff Robert A. | Human/machine interface for a machine vision sensor and method for installing and operating the same |
US7305114B2 (en) * | 2001-12-26 | 2007-12-04 | Cognex Technology And Investment Corporation | Human/machine interface for a machine vision sensor and method for installing and operating the same |
US7565220B2 (en) | 2006-09-28 | 2009-07-21 | Lam Research Corporation | Targeted data collection architecture |
US20080082653A1 (en) * | 2006-09-28 | 2008-04-03 | Chung-Ho Huang | Targeted data collection architecture |
US20080082579A1 (en) * | 2006-09-29 | 2008-04-03 | Chung-Ho Huang | Dynamic component-tracking system and methods therefor |
US7814046B2 (en) | 2006-09-29 | 2010-10-12 | Lam Research Corporation | Dynamic component-tracking system and methods therefor |
US20100325084A1 (en) * | 2006-09-29 | 2010-12-23 | Chung-Ho Huang | Component-tracking system and methods therefor |
US8010483B2 (en) | 2006-09-29 | 2011-08-30 | Lam Research Corporation | Component-tracking system and methods therefor |
US8295963B2 (en) | 2007-03-29 | 2012-10-23 | Lam Research Corporation | Methods for performing data management for a recipe-and-component control module |
US20090207245A1 (en) * | 2007-12-27 | 2009-08-20 | Fujifilm Corporation | Disk inspection apparatus and method |
JP2010054281A (en) * | 2008-08-27 | 2010-03-11 | Fujifilm Corp | Instrument and method for inspecting hard disk and program |
US20100053790A1 (en) * | 2008-08-27 | 2010-03-04 | Fujifilm Corporation | Hard disk inspection apparatus and method, as well as program |
US20110102775A1 (en) * | 2009-11-04 | 2011-05-05 | Practical engineering, LLC | Ophthalmic lens scanner |
WO2017136477A1 (en) * | 2016-02-01 | 2017-08-10 | Game Changer Holdings, Llc | Media validation platform |
US11385280B2 (en) * | 2018-05-23 | 2022-07-12 | Tokyo Electron Limited | Inspection apparatus and temperature control meihod |
US11499993B2 (en) * | 2019-11-25 | 2022-11-15 | Tokyo Electron Limited | Stage and inspection apparatus for inspecting electronic device |
Also Published As
Publication number | Publication date |
---|---|
WO1998018135A1 (en) | 1998-04-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: MEDAR, INC., MICHIGAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:LUSTER, SPENCER D.;REEL/FRAME:008329/0736 Effective date: 19970122 |
|
AS | Assignment |
Owner name: NBD BANK, MICHIGAN Free format text: COLLATERAL ASSIGNMENT OF PROPRIETARY RIGHTS AND SECURITY AGREEMENT;ASSIGNOR:MEDAR, INC.;REEL/FRAME:008708/0355 Effective date: 19970715 |
|
AS | Assignment |
Owner name: DORRANCE STREET CAPITAL ADVISORS, L.L.C. (A DELAWA Free format text: COLLATERAL ASSIGNMENT;ASSIGNOR:MEDAR, INC., A CORP. OF MICHIGAN;REEL/FRAME:008639/0001 Effective date: 19970715 |
|
FEPP | Fee payment procedure |
Free format text: PAT HLDR NO LONGER CLAIMS SMALL ENT STAT AS NONPROFIT ORG (ORIGINAL EVENT CODE: LSM3); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY |
|
AS | Assignment |
Owner name: INTEGRAL VISION, INC., MICHIGAN Free format text: CHANGE OF NAME;ASSIGNOR:MEDAR, INC.;REEL/FRAME:011410/0918 Effective date: 19990629 |
|
AS | Assignment |
Owner name: WARREN CAMERON FAUST & ASCIUTTO, P.C., A MICHIGAN Free format text: COLLATERAL ASSIGNMENT OF PROPRIETARY RIGHTS AND SECURITY AGREEMENT;ASSIGNOR:INTEGRAL VISION, INC., FORMERLY, MEDAR, INC., A MICHIGAN CORPORATION;REEL/FRAME:011627/0096 Effective date: 20010329 |
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FPAY | Fee payment |
Year of fee payment: 4 |
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AS | Assignment |
Owner name: DATARIUS TECHNOLOGIES, INC., CALIFORNIA Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:INTEGRAL VISION, INC.;REEL/FRAME:013315/0479 Effective date: 20020830 Owner name: INTEGRAL VISION, INC., MICHIGAN Free format text: RELEASE OF SECURITY INTEREST;ASSIGNOR:WARREN CAMERON FAUST & ASCIUTTO, P.C.;REEL/FRAME:013315/0475 Effective date: 20020830 |
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FEPP | Fee payment procedure |
Free format text: PAT HOLDER CLAIMS SMALL ENTITY STATUS, ENTITY STATUS SET TO SMALL (ORIGINAL EVENT CODE: LTOS); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY |
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FPAY | Fee payment |
Year of fee payment: 8 |
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REMI | Maintenance fee reminder mailed | ||
LAPS | Lapse for failure to pay maintenance fees | ||
STCH | Information on status: patent discontinuation |
Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
|
FP | Lapsed due to failure to pay maintenance fee |
Effective date: 20100203 |