US20220280963A1 - Sensor for determining the oscillating frequency in a fluidic oscillating nozzle and a method using the sensor - Google Patents

Sensor for determining the oscillating frequency in a fluidic oscillating nozzle and a method using the sensor Download PDF

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Publication number
US20220280963A1
US20220280963A1 US17/539,786 US202117539786A US2022280963A1 US 20220280963 A1 US20220280963 A1 US 20220280963A1 US 202117539786 A US202117539786 A US 202117539786A US 2022280963 A1 US2022280963 A1 US 2022280963A1
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Prior art keywords
flexible foil
nozzle
splitter
foil
flexible
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US17/539,786
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Martin Trump
Michael Burkart
Raphael Wieczorek
Fabian Hinderer
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Stratec SE
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Stratec SE
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Publication of US20220280963A1 publication Critical patent/US20220280963A1/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/02Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
    • B05B1/08Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape of pulsating nature, e.g. delivering liquid in successive separate quantities ; Fluidic oscillators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/004Arrangements for controlling delivery; Arrangements for controlling the spray area comprising sensors for monitoring the delivery, e.g. by displaying the sensed value or generating an alarm
    • B05B12/006Pressure or flow rate sensors
    • B05B12/008Pressure or flow rate sensors integrated in or attached to a discharge apparatus, e.g. a spray gun
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B12/00Arrangements for controlling delivery; Arrangements for controlling the spray area
    • B05B12/004Arrangements for controlling delivery; Arrangements for controlling the spray area comprising sensors for monitoring the delivery, e.g. by displaying the sensed value or generating an alarm
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0653Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/16Measuring force or stress, in general using properties of piezoelectric devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00Devices or apparatus for measuring differences of two or more fluid pressure values
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007Fluidic connecting means
    • G01L19/0023Fluidic connecting means for flowthrough systems having a flexible pressure transmitting element
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007Fluidic connecting means
    • G01L19/0046Fluidic connecting means using isolation membranes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration

Definitions

  • the invention relates to sensor for determining the oscillating frequency in a fluidic oscillating nozzle and a method for monitoring a dispensed fluid jet.
  • Automated analyzer systems for use in clinical diagnostics and life sciences are produced by a number of companies. For example, STRATEC® SE, Birkenfeld, Germany, produces a number of devices for specimen handling and detection for use in automated analyzer systems and other laboratory instrumentation.
  • STRATEC designs and manufactures automated analyzer systems which are used for instance in diagnostic applications.
  • Said analyzer systems may comprise flow sensors and oscillation nozzles which are usually used for cleaning purposes or for producing an oscillating jet at high frequency. It is a characteristic of all fluidic oscillators that there has to be a kind of feedback mechanism to drive the oscillations.
  • the oscillation frequency is usually measured by electrodes which are inserted into or are in contact with the liquid.
  • the present invention shall provide a solution of measuring the oscillation frequency without using a metal that gets in contact with the liquid or fluid.
  • Fluidic oscillating nozzles are usually used to generate a fluid jet oscillating without having to rely on moving parts and/or active components. This technology is therefore regularly used where there are very harsh environmental conditions or where costs must be kept very low. Since the oscillation frequency of these oscillating nozzles is directly dependent on the flow rate, they can also be used as flow sensors if the oscillation frequency is detected in the nozzle. Usually electrically conductive electrodes are inserted into the nozzle for this purpose. In addition, there are many other methods to measure the flow velocity of liquids, e.g., thermoelectric, ultrasonic, or Coriolis based methods.
  • the prior art also describes certain devices which provide an oscillating nozzle having a so-called splitter mounted to its outlet. Through the splitter, the liquid flows through only one of the two channels at a time. In the other channel the liquid is at a standstill. This creates an overpressure in the channel through which the liquid flows and a negative pressure in the channel through which it does not flow.
  • thermocouple is inserted into a side channel of the oscillating nozzle and heated by a current flow. The oscillating flow in the area of the thermocouple then cools down which can be detected.
  • Another method for determining the oscillation frequency in an oscillating nozzle is the use of a floating element.
  • a floating element accommodated, e.g., a ball which is deflected alternately to one side and the other by the over- or under pressure in the two channels. The movement of the ball is then detected, e.g., inductively or capacitively.
  • the oscillation of a liquid or fluid in the nozzle can also cause the housing of the nozzle to vibrate, which can be measured by a structure-borne sound microphone, a piezo element or an acceleration sensor.
  • Moving parts as described in the example employing a floating element, are also susceptible to the unintended deposition of materials, which may cause the floating element to become stuck with such materials which can be regarded as a contamination.
  • the thermal method tends to be slow which is disadvantageous, and therefore less suitable for higher measuring resolutions or oscillation frequencies.
  • the extraction of the oscillation frequency from the ambient noise is susceptible to interference which may cause results reflecting the influence of the ambient noise so that this method is error prone.
  • FR 2 754 342 A1 relates to a cell for converting differential pressure into an electric signal comprising: two chambers filled with an incompressible fluid each delimited by a membrane capable of being deformed by the action of external pressure and separated from each other by a rigid wall; a sensor associated with said wall, sensitive to the difference of pressure exerted on either side of the wall and delivering in response an electric signal.
  • the cell according to this document is characterised in that at least one passage is provided between the two chambers and having dimensions adapted for at least attenuating a spurious pressure difference occurring on either side of the wall with a low or even no frequency, and for enabling said sensor to detect the pressure difference exerted on either side of the wall with higher frequencies.
  • an oxygen therapy monitoring device comprising an oscillation chamber comprised in a gas flow path adapted to pass a gas flow from a source to a breathing interface for a person.
  • the oscillation chamber induces an oscillation in the gas flow that varies as a function of a flow rate of the gas flow.
  • a measurement arrangement measures the oscillation induced in the gas flow and determines the flow rate on the basis of the oscillation that is measured.
  • Published European Patent Application EP 0 269 384 A1 relates to a fluidic device having an inlet and a flow path extending from the inlet to an outlet.
  • a part of the flow path defines a power jet nozzle upstream of and leading to an interaction chamber.
  • the interaction chamber leads to the outlet.
  • a splitter is spaced from the power nozzle across the interaction chamber and is in alignment therewith to separate a pair of feedback inlets leading from the interaction chamber.
  • a pair of feedback channels extend from the pair of feedback inlets to respective feedback outlets.
  • the feedback outlets are oppositely disposed perpendicularly to the power nozzle and intermediate the latter and the interaction chamber.
  • a branch passage extends from each feedback channel to a respective variable-volume chamber which is bounded by a flexible diaphragm.
  • the diaphragms are movable in response to pressure variations within the respective variable-volume chamber and are each associated with a transducer for producing an output signal in response to such movement.
  • Fluid flow restrictions are provided in each branch passage for resisting dynamic oscillation (ringing) of fluid flow in the feedback channels with the variable volume of fluid in the variable-volume chambers.
  • the present invention provides an oscillating nozzle, comprising
  • the outlet of the fluidic oscillator before the splitter is a gorge portion.
  • the outer surface of the flexible foil can be coated with a conductive material.
  • two counter electrodes can be arranged with a predefined distance next to the conductively coated outer surface of the flexible foil.
  • the present invention may further encompass an embodiment, wherein the two counter electrodes are part of a circuit board.
  • a single counter electrode can be configured to be in a distance next to the conductively coated outer surface of the flexible foil so that the conductive coating of the outer surface of the flexible foil and a surface of the single counter electrode can be used for measuring a capacity change.
  • Another embodiment of the present invention comprises an inductive sensor which is arranged with a predefined distance next to the conductively coated outer surface of the flexible foil.
  • the flexible foil is on the outer surface of the sleeve surrounded by a sealed housing and a pressure sensor is arranged within the said sealed housing.
  • the present invention may further encompass an embodiment, wherein each of the at least two splitter channels is partly covered with a flexible foil and each of the flexible foils is surrounded by a sealed housing, wherein the housings are connected by a channel which comprises a differential pressure sensor.
  • a piezo element or a piezo foil can be attached to the outer surface of the flexible foil.
  • the present invention encompasses further an embodiment, wherein a strain gauge is attached to the outer surface of the flexible foil.
  • an acceleration sensor can be attached to the outer surface of the flexible foil.
  • the outer surface of the flexible foil can be coated with a reflecting material.
  • Another embodiment may encompass a light source that illuminates the reflective outer surface of the flexible foil and a light sensor detects the amount and/or direction of reflected light.
  • the present invention comprises an embodiment, wherein the flexible foil is made of a translucent material and a light source which is arranged outside the splitter channel illuminates through the flexible foil the inner volume of the splitter channel and a light sensor is arranged inside the splitter channel opposite the translucent flexible foil for detecting the amount and/or direction of light passing through the foil.
  • Another object of the present invention is a method for monitoring a dispensed fluid jet, comprising the steps of
  • the oscillation frequency of the fluid is determined by measuring capacity changes, electromagnetic induction, pressure changes, differential pressure changes, piezoelectricity, changes of the shape of the flexible form and acceleration on the surface of the flexible foil or refractive changes of a translucent flexible foil
  • FIG. 1 shows an embodiment with a flexible foil.
  • FIGS. 2A and 2B show a concave or convex shape of a foil.
  • FIG. 3 shows an embodiment measuring capacity changes.
  • FIG. 4 shows an embodiment with a single counter electrode.
  • FIG. 5 shows an embodiment for an inductive measurement.
  • FIG. 6 shows an embodiment for determining pressure changes.
  • FIG. 7 shows an embodiment for differential pressure determination.
  • FIG. 8 shows an embodiment using a piezo element.
  • FIG. 9 shows an embodiment with expansion elements.
  • FIG. 10 shows an embodiment employing an acceleration sensor.
  • FIGS. 11A and 11B show an optical detection using a foil which has a reflective coating.
  • FIG. 12 shows an embodiment where a change of the focal length is use for determining the deformation of the foil.
  • FIG. 13 shows alternatives to the splitter channel shape.
  • FIGS. 14A and 14B show an embodiment with flexible foils that are arranged within the splitter channel in two layers.
  • the invention relates to a device and method for determining oscillation frequencies in a fluidic oscillating nozzle.
  • outer refers to the outside of a channels sleeve, so that an outer surface is directed towards the surrounding environment and the inner surface is directed towards the inner part of a channel.
  • conductive material refers to any material that is suitable for conducting electricity or an electrical potential.
  • predefined distance refers to a distance between electrically conductive surfaces so that they are separated by an air gap for instance. Such a predefined distance may allow or prohibit a contact of the separated conductive surfaces.
  • a basic idea of the present invention is the at least partly replacement of the cover in the area of the two splitter channels of an oscillating nozzle with a flexible foil.
  • the foil or film replaces at least partly the sleeve of at least one of the splitter channels and can basically be applied in different areas of the splitter or oscillator.
  • FIG. 1 shows an oscillating nozzle 1 which comprises a fluidic oscillator 2 with an inlet 3 and an outlet 4 .
  • a splitter 5 is attached to the outlet 4 of the fluidic oscillator 2 .
  • the splitter 5 has two splitter channel 7 merging an outlet 8 of the splitter.
  • the sleeve of one of the splitter channels 7 a , 7 b is partly replaces by a flexible foil or film 9 .
  • the flexible foil 9 may be arranged at any place of the oscillating nozzle but preferably in the splitter sleeve as outlet 4 of the fluidic oscillator may be formed as a narrowing.
  • a fluid e.g., a liquid
  • an overpressure is created, which deforms the foil convex.
  • a negative pressure is created in the first splitter channel 7 a , which causes the film to deform concave. Thereby the film pulsates with the oscillation frequency.
  • the flexible foil 9 is at least partly replacing the sleeve 11 of the splitter channel and will with respect to the changing pressure in the splitter channels alternately be convex ( FIG. 2A ) if the pressure in the splitter channel is high or concave ( FIG. 2B ) if the pressure in the splitter channel is low.
  • This deformation or the change in the direction of the deformation of the foil can be measured, and the result may be used as a measure for the actual oscillation frequency.
  • the measurement of the deformation can be done by different measuring principles, which will be described in detail below.
  • the dimensioning of the actual oscillating nozzle remains flexible and is not restricted by other requirements resulting from the measurement.
  • the pressure differences and thus the deformation of the foil can be increased by a narrowing behind the splitter.
  • the deformation of the foil may be measured by determining capacity changes ( FIG. 3 ).
  • the flexible foil 9 is coated/vaporized to be electrically conductive by applying a conductive layer 13 .
  • a capacitor 15 is formed with an air layer in between as dielectric. The capacity of this capacitor 15 depends directly on the distance between the electrodes.
  • the deformation of the film therefore changes the distance and thus the capacitance, which can be measured by a suitable electronic circuit which is part of a circuit board 17 , e.g., an electric resonant circuit.
  • This method has the advantage that the conductive layer 13 on the flexible foil 9 does not have to be contacted directly electrically.
  • FIG. 5 shows an embodiment for an inductive measurement which is achieved using an inductive sensor 19 which is arranged above the flexible foil 9 that is covered with a conductive layer 13 .
  • FIG. 6 shows an embodiment for determining pressure changes caused by the deformation of the flexible foil 9 .
  • the area above the film is hermetically sealed by a housing 20 and the pressure change in the resulting chamber 20 a caused by the deformation of the flexible foil 9 is measured by pressure sensor 21 .
  • FIG. 7 Another possibility for measuring the changing deformations of the flexible foil 9 is a differential pressure determination ( FIG. 7 ).
  • This method is an extension of the simple pressure measurement method.
  • a first splitter channel 7 a and a second splitter channel 7 b the sleeve of the first splitter channel 11 a and the sleeve of the second splitter channel 11 b , respectively, are at least partly covered with a flexible foil 9 .
  • These two channels are flowed through with a 180° phase shift, which is why the associated foils always deform in opposite directions.
  • pressure measuring chambers 20 a are placed above the flexible foils 9 in each splitter channel and the pressure difference between these chambers is measured by a differential pressure sensor 22 , the oscillation frequency can be measured. In contrast to the simple pressure measurement, the amplitude of the measured signal doubles, which leads to a more robust system.
  • a piezo element 24 may also be used for determining the deformation of the flexible foil 9 ( FIG. 8 ).
  • a piezo element 24 deforms when an electrical voltage is applied or generates an electrical voltage when it is mechanically deformed.
  • the flexible foil 9 is not conductively coated in this embodiment, but it is directly bonded to a piezo foil 24 .
  • the piezo film 24 could also be used directly as a flexible foil 9 for at least partly replacing the sleeve 11 of the splitter channel. The voltage generated by the deformation of the piezo element 24 is then again identical to the oscillation frequency of the nozzle
  • Expansion elements 26 may also be used for determining differences in the deformation of the flexible foil 9 ( FIG. 9 ) which at least partly replaces the sleeve 11 of the splitter channel.
  • An expansion element 26 changes its electrical resistance when it is deformed. This method is similar to the piezo electrical method, described above, with the difference that a change in resistance is detected.
  • An acceleration sensor 28 ( FIG. 10 ).
  • An accelerometer or the acceleration sensor 28 is mounted directly on the flexible foil 9 and can thus directly measure the vibration/pulsation/deformation of the flexible foil 9 .
  • this method is probably also susceptible to vibration in the direct environment.
  • the flexible foil 9 is coated with a reflective coating 34 .
  • the deformation of the flexible foil 9 can be measured, because sometimes more times less light is reflected into the sensor 32 or the reflected light hits at different places of the sensor 32 or when using several sensors 32 at different positions.
  • An alternative to the above-described optical determination is to employ a method where the light source 30 is not reflected but focused by the film and the liquid behind it ( FIG. 12 ). Such a method is thus based on a change of the focal length.
  • FIGS. 14A and 14B show another alternative embodiment of channels of the splitter 5 which are bordered by flexible foils 9 which are only mounted to the rim so that they may move in their middle part.
  • These two foils may also be coated with a conductive material like a metal from the outside (i.e., electrically insulated from each other) and form an electrical capacitor.
  • a conductive material like a metal from the outside (i.e., electrically insulated from each other) and form an electrical capacitor.
  • the foils lie against each other, their distance against each other is close to zero.
  • the foils are driven apart and the capacitance changes which can be determined, e.g., it increases because a signal stroke results from the increased distance between the foils.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

A sensor for determining the oscillating frequency in a fluidic oscillating nozzle and provides an oscillating nozzle, comprising a fluidic oscillator with inlet and outlet and a main channel and at least one control passage surrounding the main channel, and a splitter comprising at least two splitter channels which is attached to the outlet of the fluidic oscillator, wherein the sleeve of at least one of the at least two splitter channels comprises partially a flexible foil. The invention also relates to a method for monitoring a dispensed fluid jet, comprising the steps of providing an oscillating nozzle as described above; and injecting a fluid jet and in parallel determining the oscillation frequency by determining the deformation changes of the flexible foil.

Description

    CROSS-REFERENCE TO RELATED APPLICATIONS
  • The present application claims priority to Luxembourg Patent Application No. LU102636 filed on Mar. 4, 2021. The aforementioned application is hereby incorporated by reference in its entirety.
  • BACKGROUND OF THE INVENTION Field of the Invention
  • The invention relates to sensor for determining the oscillating frequency in a fluidic oscillating nozzle and a method for monitoring a dispensed fluid jet.
  • Brief Description of the Related Art
  • Automated analyzer systems for use in clinical diagnostics and life sciences are produced by a number of companies. For example, STRATEC® SE, Birkenfeld, Germany, produces a number of devices for specimen handling and detection for use in automated analyzer systems and other laboratory instrumentation.
  • STRATEC designs and manufactures automated analyzer systems which are used for instance in diagnostic applications. Said analyzer systems may comprise flow sensors and oscillation nozzles which are usually used for cleaning purposes or for producing an oscillating jet at high frequency. It is a characteristic of all fluidic oscillators that there has to be a kind of feedback mechanism to drive the oscillations.
  • When using fluidic oscillating nozzles as a flow sensor, the oscillation frequency is usually measured by electrodes which are inserted into or are in contact with the liquid. However, since this metallic/conductive contacting of the liquid is usually not desired or permitted in diagnostic analysis devices, the present invention shall provide a solution of measuring the oscillation frequency without using a metal that gets in contact with the liquid or fluid.
  • Fluidic oscillating nozzles are usually used to generate a fluid jet oscillating without having to rely on moving parts and/or active components. This technology is therefore regularly used where there are very harsh environmental conditions or where costs must be kept very low. Since the oscillation frequency of these oscillating nozzles is directly dependent on the flow rate, they can also be used as flow sensors if the oscillation frequency is detected in the nozzle. Usually electrically conductive electrodes are inserted into the nozzle for this purpose. In addition, there are many other methods to measure the flow velocity of liquids, e.g., thermoelectric, ultrasonic, or Coriolis based methods.
  • The prior art also describes certain devices which provide an oscillating nozzle having a so-called splitter mounted to its outlet. Through the splitter, the liquid flows through only one of the two channels at a time. In the other channel the liquid is at a standstill. This creates an overpressure in the channel through which the liquid flows and a negative pressure in the channel through which it does not flow.
  • The prior art further describes devices using a thermal process for determining the oscillations frequency. In this process a thermocouple is inserted into a side channel of the oscillating nozzle and heated by a current flow. The oscillating flow in the area of the thermocouple then cools down which can be detected.
  • Another method for determining the oscillation frequency in an oscillating nozzle is the use of a floating element. In the middle of the splitter is a chamber arranged which is connected to both channels of the splitter via thin channels. In this chamber is a floating element accommodated, e.g., a ball which is deflected alternately to one side and the other by the over- or under pressure in the two channels. The movement of the ball is then detected, e.g., inductively or capacitively.
  • In order to measure the oscillation frequency magnetically, electrically conductive electrodes are inserted into the oscillating nozzle. In addition, an electric field is generated around the nozzle. By charge separation an electric voltage is formed between the electrodes which varies with according to the oscillation. The frequency of the measured voltage is therefore identical to the oscillation frequency.
  • The oscillation of a liquid or fluid in the nozzle can also cause the housing of the nozzle to vibrate, which can be measured by a structure-borne sound microphone, a piezo element or an acceleration sensor.
  • In diagnostic equipment, like an automated analyzer for performing biochemical assays, it is a disadvantage or even to be avoided that a liquid gets in contact with other materials, e.g., metals, in order to avoid a contamination of the respective liquid. Therefore, the magnetic inductive method is not suitable in diagnostic analyzer systems.
  • Moving parts, as described in the example employing a floating element, are also susceptible to the unintended deposition of materials, which may cause the floating element to become stuck with such materials which can be regarded as a contamination.
  • The thermal method tends to be slow which is disadvantageous, and therefore less suitable for higher measuring resolutions or oscillation frequencies. Indirectly measuring structure-borne noise or vibration of the housing, the extraction of the oscillation frequency from the ambient noise is susceptible to interference which may cause results reflecting the influence of the ambient noise so that this method is error prone.
  • Published French Patent Application FR 2 754 342 A1 relates to a cell for converting differential pressure into an electric signal comprising: two chambers filled with an incompressible fluid each delimited by a membrane capable of being deformed by the action of external pressure and separated from each other by a rigid wall; a sensor associated with said wall, sensitive to the difference of pressure exerted on either side of the wall and delivering in response an electric signal. The cell according to this document is characterised in that at least one passage is provided between the two chambers and having dimensions adapted for at least attenuating a spurious pressure difference occurring on either side of the wall with a low or even no frequency, and for enabling said sensor to detect the pressure difference exerted on either side of the wall with higher frequencies.
  • Published European Patent Application EP 3 146 897 A1 discloses an oxygen therapy monitoring device comprising an oscillation chamber comprised in a gas flow path adapted to pass a gas flow from a source to a breathing interface for a person. The oscillation chamber induces an oscillation in the gas flow that varies as a function of a flow rate of the gas flow. A measurement arrangement measures the oscillation induced in the gas flow and determines the flow rate on the basis of the oscillation that is measured.
  • Published European Patent Application EP 0 269 384 A1 relates to a fluidic device having an inlet and a flow path extending from the inlet to an outlet. A part of the flow path defines a power jet nozzle upstream of and leading to an interaction chamber. The interaction chamber leads to the outlet. A splitter is spaced from the power nozzle across the interaction chamber and is in alignment therewith to separate a pair of feedback inlets leading from the interaction chamber. A pair of feedback channels extend from the pair of feedback inlets to respective feedback outlets. The feedback outlets are oppositely disposed perpendicularly to the power nozzle and intermediate the latter and the interaction chamber. A branch passage extends from each feedback channel to a respective variable-volume chamber which is bounded by a flexible diaphragm. The diaphragms are movable in response to pressure variations within the respective variable-volume chamber and are each associated with a transducer for producing an output signal in response to such movement. Fluid flow restrictions are provided in each branch passage for resisting dynamic oscillation (ringing) of fluid flow in the feedback channels with the variable volume of fluid in the variable-volume chambers.
  • Thus, there is a need for an alternative device and method for determining the oscillating frequency in an oscillating nozzle.
  • SUMMARY OF THE INVENTION
  • It is an object of this invention to provide a device and a method for determining the oscillation frequency in fluidic oscillating nozzles.
  • The present invention provides an oscillating nozzle, comprising
      • a fluidic oscillator with inlet and outlet and a main channel and at least one control passage surrounding the main channel, and
      • a splitter comprising at least two splitter channels which is attached to the outlet of the fluidic oscillator, wherein the sleeve of at least one of the at least two splitter channels comprises partially a flexible foil.
  • In a further aspect of the present invention, the outlet of the fluidic oscillator before the splitter is a gorge portion.
  • In another embodiment of the present invention, the outer surface of the flexible foil can be coated with a conductive material.
  • In another aspect of the present invention, two counter electrodes can be arranged with a predefined distance next to the conductively coated outer surface of the flexible foil.
  • The present invention may further encompass an embodiment, wherein the two counter electrodes are part of a circuit board.
  • In another aspect of the present invention, a single counter electrode can be configured to be in a distance next to the conductively coated outer surface of the flexible foil so that the conductive coating of the outer surface of the flexible foil and a surface of the single counter electrode can be used for measuring a capacity change.
  • Another embodiment of the present invention comprises an inductive sensor which is arranged with a predefined distance next to the conductively coated outer surface of the flexible foil.
  • It can further be intended that the flexible foil is on the outer surface of the sleeve surrounded by a sealed housing and a pressure sensor is arranged within the said sealed housing.
  • The present invention may further encompass an embodiment, wherein each of the at least two splitter channels is partly covered with a flexible foil and each of the flexible foils is surrounded by a sealed housing, wherein the housings are connected by a channel which comprises a differential pressure sensor.
  • In another aspect of the present invention, a piezo element or a piezo foil can be attached to the outer surface of the flexible foil.
  • The present invention encompasses further an embodiment, wherein a strain gauge is attached to the outer surface of the flexible foil.
  • In another aspect of the present invention, an acceleration sensor can be attached to the outer surface of the flexible foil.
  • It is also intended that the outer surface of the flexible foil can be coated with a reflecting material.
  • Another embodiment may encompass a light source that illuminates the reflective outer surface of the flexible foil and a light sensor detects the amount and/or direction of reflected light.
  • The present invention comprises an embodiment, wherein the flexible foil is made of a translucent material and a light source which is arranged outside the splitter channel illuminates through the flexible foil the inner volume of the splitter channel and a light sensor is arranged inside the splitter channel opposite the translucent flexible foil for detecting the amount and/or direction of light passing through the foil.
  • Another object of the present invention is a method for monitoring a dispensed fluid jet, comprising the steps of
      • Providing an oscillating nozzle as described above;
      • Injecting a fluid jet and in parallel determining the oscillation frequency by determining the deformation changes of the flexible foil.
  • In a further aspect of a method according to the present invention, the oscillation frequency of the fluid is determined by measuring capacity changes, electromagnetic induction, pressure changes, differential pressure changes, piezoelectricity, changes of the shape of the flexible form and acceleration on the surface of the flexible foil or refractive changes of a translucent flexible foil
  • Still other aspects, features, and advantages of the present invention are readily apparent from the following detailed description, simply by illustrating preferable embodiments and implementations. The present invention is also capable of other and different embodiments and its several details can be modified in various obvious respects, all without departing from the spirit and scope of the present invention. Accordingly, the drawings and descriptions are to be regarded as illustrative in nature, and not as restrictive. Additional objects and advantages of the invention will be set forth in part in the description which follows and in part will be obvious from the description or may be learned by practice of the invention.
  • BRIEF DESCRIPTION OF THE FIGURES
  • The invention will be described based on figures. It will be understood that the embodiments and aspects of the invention described in the figures are only examples and do not limit the protective scope of the claims in any way. The invention is defined by the claims and their equivalents. It will be understood that features of one aspect or embodiment of the invention can be combined with a feature of a different aspect or aspects of other embodiments of the invention, in which:
  • FIG. 1 shows an embodiment with a flexible foil.
  • FIGS. 2A and 2B show a concave or convex shape of a foil.
  • FIG. 3 shows an embodiment measuring capacity changes.
  • FIG. 4 shows an embodiment with a single counter electrode.
  • FIG. 5 shows an embodiment for an inductive measurement.
  • FIG. 6 shows an embodiment for determining pressure changes.
  • FIG. 7 shows an embodiment for differential pressure determination.
  • FIG. 8 shows an embodiment using a piezo element.
  • FIG. 9 shows an embodiment with expansion elements.
  • FIG. 10 shows an embodiment employing an acceleration sensor.
  • FIGS. 11A and 11B show an optical detection using a foil which has a reflective coating.
  • FIG. 12 shows an embodiment where a change of the focal length is use for determining the deformation of the foil.
  • FIG. 13 shows alternatives to the splitter channel shape.
  • FIGS. 14A and 14B show an embodiment with flexible foils that are arranged within the splitter channel in two layers.
  • DETAILED DESCRIPTION OF THE INVENTION AND THE FIGURES
  • The technical problem is solved by the independent claims. The dependent claims cover further specific embodiments of the invention.
  • The invention relates to a device and method for determining oscillation frequencies in a fluidic oscillating nozzle.
  • The term “outer” refers to the outside of a channels sleeve, so that an outer surface is directed towards the surrounding environment and the inner surface is directed towards the inner part of a channel.
  • The term “conductive material” refers to any material that is suitable for conducting electricity or an electrical potential.
  • The term “predefined distance” refers to a distance between electrically conductive surfaces so that they are separated by an air gap for instance. Such a predefined distance may allow or prohibit a contact of the separated conductive surfaces.
  • A basic idea of the present invention is the at least partly replacement of the cover in the area of the two splitter channels of an oscillating nozzle with a flexible foil. The foil or film replaces at least partly the sleeve of at least one of the splitter channels and can basically be applied in different areas of the splitter or oscillator. Several foils and thus several measuring points are also conceivable.
  • FIG. 1 shows an oscillating nozzle 1 which comprises a fluidic oscillator 2 with an inlet 3 and an outlet 4. A splitter 5 is attached to the outlet 4 of the fluidic oscillator 2. The splitter 5 has two splitter channel 7 merging an outlet 8 of the splitter. The sleeve of one of the splitter channels 7 a, 7 b is partly replaces by a flexible foil or film 9. The flexible foil 9 may be arranged at any place of the oscillating nozzle but preferably in the splitter sleeve as outlet 4 of the fluidic oscillator may be formed as a narrowing. When a fluid, e.g., a liquid, flows through the first splitter channel 7 a, an overpressure is created, which deforms the foil convex. When the liquid flows through the second splitter channel 7 b, a negative pressure is created in the first splitter channel 7 a, which causes the film to deform concave. Thereby the film pulsates with the oscillation frequency.
  • The flexible foil 9 is at least partly replacing the sleeve 11 of the splitter channel and will with respect to the changing pressure in the splitter channels alternately be convex (FIG. 2A) if the pressure in the splitter channel is high or concave (FIG. 2B) if the pressure in the splitter channel is low. This deformation or the change in the direction of the deformation of the foil can be measured, and the result may be used as a measure for the actual oscillation frequency. The measurement of the deformation can be done by different measuring principles, which will be described in detail below.
  • By separating the fluidic oscillator and the measuring chamber (i.e., the splitter arrangement with flexible foil) of an oscillating nozzle, the dimensioning of the actual oscillating nozzle remains flexible and is not restricted by other requirements resulting from the measurement. The pressure differences and thus the deformation of the foil can be increased by a narrowing behind the splitter.
  • The deformation of the foil may be measured by determining capacity changes (FIG. 3). In this process, the flexible foil 9 is coated/vaporized to be electrically conductive by applying a conductive layer 13. Together with two counter-electrodes which are e.g., part of a printed circuit board, a capacitor 15 is formed with an air layer in between as dielectric. The capacity of this capacitor 15 depends directly on the distance between the electrodes. The deformation of the film therefore changes the distance and thus the capacitance, which can be measured by a suitable electronic circuit which is part of a circuit board 17, e.g., an electric resonant circuit. This method has the advantage that the conductive layer 13 on the flexible foil 9 does not have to be contacted directly electrically.
  • It is also envisaged that a capacitance measurement with only one counter electrode 14 is used (FIG. 4). This method works on the same principle, but with only one counter-electrode 14, which is why the second electrode is formed by the conductive layer 13 on the flexible foil 9 and must therefore be directly electrically contacted.
  • FIG. 5 shows an embodiment for an inductive measurement which is achieved using an inductive sensor 19 which is arranged above the flexible foil 9 that is covered with a conductive layer 13.
  • FIG. 6 shows an embodiment for determining pressure changes caused by the deformation of the flexible foil 9. In this process the area above the film is hermetically sealed by a housing 20 and the pressure change in the resulting chamber 20 a caused by the deformation of the flexible foil 9 is measured by pressure sensor 21.
  • Another possibility for measuring the changing deformations of the flexible foil 9 is a differential pressure determination (FIG. 7). This method is an extension of the simple pressure measurement method. Here, in both channels of the splitter, a first splitter channel 7 a and a second splitter channel 7 b, the sleeve of the first splitter channel 11 a and the sleeve of the second splitter channel 11 b, respectively, are at least partly covered with a flexible foil 9. These two channels are flowed through with a 180° phase shift, which is why the associated foils always deform in opposite directions. If pressure measuring chambers 20 a are placed above the flexible foils 9 in each splitter channel and the pressure difference between these chambers is measured by a differential pressure sensor 22, the oscillation frequency can be measured. In contrast to the simple pressure measurement, the amplitude of the measured signal doubles, which leads to a more robust system.
  • A piezo element 24 may also be used for determining the deformation of the flexible foil 9 (FIG. 8). A piezo element 24 deforms when an electrical voltage is applied or generates an electrical voltage when it is mechanically deformed. In contrast to the capacitive process, the flexible foil 9 is not conductively coated in this embodiment, but it is directly bonded to a piezo foil 24. Alternatively, the piezo film 24 could also be used directly as a flexible foil 9 for at least partly replacing the sleeve 11 of the splitter channel. The voltage generated by the deformation of the piezo element 24 is then again identical to the oscillation frequency of the nozzle
  • Expansion elements 26 may also be used for determining differences in the deformation of the flexible foil 9 (FIG. 9) which at least partly replaces the sleeve 11 of the splitter channel. An expansion element 26 changes its electrical resistance when it is deformed. This method is similar to the piezo electrical method, described above, with the difference that a change in resistance is detected.
  • Another possibility for determining the deformation of the foil which at least partly replaces the sleeve 11 of the splitter channel, is the use of an acceleration sensor 28 (FIG. 10). An accelerometer or the acceleration sensor 28 is mounted directly on the flexible foil 9 and can thus directly measure the vibration/pulsation/deformation of the flexible foil 9. However, this method is probably also susceptible to vibration in the direct environment.
  • It is also conceivable to determine optically the bending of the deformed foil 9 (FIGS. 11A and 11B). In this process, the flexible foil 9 is coated with a reflective coating 34. By the suitable arrangement of a light source 30 and a light sensor 32 the deformation of the flexible foil 9 can be measured, because sometimes more times less light is reflected into the sensor 32 or the reflected light hits at different places of the sensor 32 or when using several sensors 32 at different positions.
  • An alternative to the above-described optical determination is to employ a method where the light source 30 is not reflected but focused by the film and the liquid behind it (FIG. 12). Such a method is thus based on a change of the focal length.
  • Alternative approaches may encompass embodiments with a different geometry of the oscillating nozzle, wherein again at least partly the sleeve 11 of a splitter channel is replaced by a flexible foil (comp. FIG. 13).
  • FIGS. 14A and 14B show another alternative embodiment of channels of the splitter 5 which are bordered by flexible foils 9 which are only mounted to the rim so that they may move in their middle part. These two foils may also be coated with a conductive material like a metal from the outside (i.e., electrically insulated from each other) and form an electrical capacitor. In the resting state, the foils lie against each other, their distance against each other is close to zero. When the current liquid flows through them, the foils are driven apart and the capacitance changes which can be determined, e.g., it increases because a signal stroke results from the increased distance between the foils.
  • The advantages of the invention can be summarized as follows:
      • Contactless measurement of the oscillation frequency and thus the flow rate
      • No moving parts in the system
      • High measuring frequency possible/fast response
      • Direct measurement on the film, therefore less susceptible to interference
      • Partially non-contact measurement, i.e., measuring electronics and measuring chamber can be exchanged independently of each other, the measuring chamber could therefore also be used as a low-cost disposable part.
  • The foregoing description of the preferred embodiment of the invention has been presented for purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise form disclosed, and modifications and variations are possible in light of the above teachings or may be acquired from practice of the invention. The embodiment was chosen and described in order to explain the principles of the invention and its practical application to enable one skilled in the art to utilize the invention in various embodiments as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the claims appended hereto, and their equivalents. The entirety of each of the aforementioned documents is incorporated by reference herein.
  • REFERENCE NUMERALS
    • 1 oscillating nozzle
    • 2 fluidic oscillator
    • 3 inlet fluidic oscillator
    • 4 outlet fluidic oscillator
    • 5 splitter
    • 7 splitter channel
    • 7 a first splitter channel
    • 7 b second splitter channel
    • 8 outlet splitter
    • 9 flexible foil
    • 11 sleeve splitter channel
    • 11 a sleeve first splitter channel
    • 11 b sleeve second splitter channel
    • 13 conductive layer
    • 14 counter electrode
    • 15 capacitor
    • 17 circuit board
    • 19 inductive sensor
    • 20 housing
    • 20 a resulting chamber
    • 21 pressure sensor
    • 22 differential pressure sensor
    • 24 piezo element
    • 26 expansion element
    • 28 acceleration sensor
    • 30 light source
    • 32 light sensor
    • 34 reflective coating

Claims (17)

What is claimed is:
1. An oscillating nozzle, comprising
a fluidic oscillator with inlet and outlet and a main channel and at least one control passage surrounding the main channel; and
a splitter comprising at least two splitter channels which are attached to the outlet of the fluidic oscillator, wherein a sleeve of at least one of the at least two splitter channels comprises partially a flexible foil.
2. The nozzle of claim 1, wherein the outlet of the fluidic oscillator before the splitter is a gorge portion.
3. The nozzle of claim 1, wherein the outer surface of the flexible foil is coated with a conductive material.
4. The nozzle of claim 3, wherein two counter electrodes are arranged with a predefined distance next to the conductively coated outer surface of the flexible foil.
5. The nozzle of claim 4, wherein the two counter electrodes are part of a circuit board.
6. The nozzle of claim 3, wherein a single counter electrode is configured to be in a distance next to the conductively coated outer surface of the flexible foil so that the conductive coating of the outer surface of the flexible foil and a surface of the single counter electrode are configured to measure a capacity change.
7. The nozzle of claim 3, wherein an inductive sensor is arranged with a predefined distance next to the conductively coated outer surface of the flexible foil.
8. The nozzle of claim 1, wherein the flexible foil is on the outer surface of the sleeve surrounded by a sealed housing and a pressure sensor is arranged within the said sealed housing.
9. The nozzle of claim 1, wherein each of the at least two splitter channels is partly covered with a flexible foil and each of the flexible foils is surrounded by a sealed housing, wherein the housings are connected by a channel which comprises a differential pressure sensor.
10. The nozzle of claim 1, wherein a piezo element or a piezo foil is attached to the outer surface of the flexible foil.
11. The nozzle of claim 1, wherein a strain gauge is attached to the outer surface of the flexible foil.
12. The nozzle of claim 1, wherein an acceleration sensor is attached to the outer surface of the flexible foil.
13. The nozzle of claim 1, wherein the outer surface of the flexible foil is coated with a reflecting material.
14. The nozzle of claim 13, wherein a light source illuminates the reflective outer surface of the flexible foil and a light sensor detects the amount and/or direction of reflected light.
15. The nozzle of claim 1, wherein the flexible foil is made of a translucent material and a light source which is arranged outside the splitter channel illuminates through the flexible foil the inner volume of the splitter channel and a light sensor is arranged inside the splitter channel opposite the translucent flexible foil for detecting the amount and/or direction of light passing through the foil.
16. A method for monitoring a dispensed fluid jet, comprising the steps of:
providing an oscillating nozzle comprising:
a fluidic oscillator with inlet and outlet and a main channel and at least one control passage surrounding the main channel, and;
a splitter comprising at least two splitter channels which are attached to the outlet of the fluidic oscillator, wherein a sleeve of at least one of the at least two splitter channels comprises partially a flexible foil; and
injecting a fluid jet and in parallel determining the oscillation frequency by determining the deformation changes of the flexible foil.
17. The method of claim 16, wherein the oscillation frequency of the fluid is determined by measuring capacity changes, electromagnetic induction, pressure changes, differential pressure changes, piezoelectricity, changes of the shape of the flexible form and acceleration on the surface of the flexible foil or refractive changes of a translucent flexible foil.
US17/539,786 2021-03-04 2021-12-01 Sensor for determining the oscillating frequency in a fluidic oscillating nozzle and a method using the sensor Pending US20220280963A1 (en)

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Citations (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3788141A (en) * 1971-08-27 1974-01-29 Westinghouse Electric Corp Flow meter
US3902367A (en) * 1973-04-05 1975-09-02 Atomic Energy Authority Uk Flowmeters
US4182172A (en) * 1977-08-19 1980-01-08 Danielsson Olf H Flow meter
US4838091A (en) * 1986-06-27 1989-06-13 Thorn Emi Flow Measurement Limited Fludic oscillator flowmeters
US4930357A (en) * 1986-11-21 1990-06-05 Allied-Signal Inc. Fluidic volumetric fluid flow meter
US5003810A (en) * 1987-08-28 1991-04-02 Thorn Emi Flow Measurement Limited Fluid meter
US5063786A (en) * 1989-02-01 1991-11-12 Severn Trent Water Limited Fluid flow meters
US5127173A (en) * 1990-10-12 1992-07-07 Allied-Signal Inc. Volumetric fluid flowmeter and method
US5363704A (en) * 1991-07-09 1994-11-15 Schlumberger Industries Fluidic oscillator and a flow meter including such an oscillator
US5396808A (en) * 1992-04-29 1995-03-14 Schlumberger Industries, S.A. Fluidic oscillator
US5463904A (en) * 1994-02-04 1995-11-07 The Foxboro Company Multimeasurement vortex sensor for a vortex-generating plate
US5638867A (en) * 1993-07-13 1997-06-17 Schlumberger Industries, S.A. Fluidic oscillator having a wide range of flow rates, and a fluid meter including such an oscillator
US5808209A (en) * 1994-03-23 1998-09-15 Schlumberger Industries, S.A. Vortex fluid meter including a profiled pipe
US5827976A (en) * 1995-06-12 1998-10-27 Bowles Fluidics Corporation Fluidic flow meter with fiber optic sensor
US5847288A (en) * 1997-04-04 1998-12-08 Harwill Corporation Photo detector bending beam flow switch and flow meter
US5864067A (en) * 1994-06-17 1999-01-26 Schlumberger Industries, S.A. Fluidic oscillator and a method of measuring a volume-related quantity of fluid flowing through such a fluidic oscillator
US6003383A (en) * 1994-03-23 1999-12-21 Schlumberger Industries, S.A. Vortex fluid meter incorporating a double obstacle
US6536946B1 (en) * 1998-03-24 2003-03-25 Schlumberger Industries, S.A. Device and method for directly measuring calorific energy contained in a fuel gas
US6938489B2 (en) * 2002-01-21 2005-09-06 Fujikin Incorporated Oscillatory type pressure sensor
US7259574B2 (en) * 2005-04-15 2007-08-21 Vaidya Avinash Shrikrishna Sensor device for measuring frequency and amplitude of varying force signals
US7383740B2 (en) * 2003-11-17 2008-06-10 Spirojet Medical Ltd Spirometer
US7464609B2 (en) * 2004-05-03 2008-12-16 Sinvent As Means for measuring fluid flow in a pipe
US7793554B2 (en) * 2009-02-05 2010-09-14 Masco Corporation Flexible sensor flow and temperature detector
US7827870B2 (en) * 2005-04-26 2010-11-09 Severn Trent Metering Services Limited Meter
US20110071773A1 (en) * 2007-10-23 2011-03-24 Saylor David J Method and Device for the Assessment of Fluid Collection Networks
US8091434B2 (en) * 2008-06-10 2012-01-10 Avinash Shrikrishna Vaidya Fluidic oscillator flow meter
US8136413B2 (en) * 2007-03-13 2012-03-20 Elster Metering Limited Bi-directional oscillating jet flowmeter
US8201462B2 (en) * 2008-06-10 2012-06-19 Avinash Shrikrishna Vaidya Recirculation type oscillator flow meter
US8573066B2 (en) * 2011-08-19 2013-11-05 Halliburton Energy Services, Inc. Fluidic oscillator flowmeter for use with a subterranean well
US8733401B2 (en) * 2010-12-31 2014-05-27 Halliburton Energy Services, Inc. Cone and plate fluidic oscillator inserts for use with a subterranean well
US9134152B2 (en) * 2008-09-12 2015-09-15 Elster Metering Limited Bi-directional flow meter with two fluidic oscillators connected in series
US9140619B2 (en) * 2012-05-02 2015-09-22 National Applied Research Laboratories Piezoelectric vacuum gauge and measuring method thereof
US9170135B2 (en) * 2012-10-30 2015-10-27 Itron, Inc. Module for gas flow measurements with a dual sensing assembly
US20170136472A1 (en) * 2014-07-15 2017-05-18 Dlhbowles, Inc. Three-jet fluidic oscillator circuit, method and nozzle assembly
US9706946B2 (en) * 2012-05-22 2017-07-18 Sparo Inc. Spirometer system and methods of data analysis
US20170276527A1 (en) * 2016-03-25 2017-09-28 General Electric Company System and method for metering gas
US20180318848A1 (en) * 2015-11-18 2018-11-08 Fdx Fluid Dynamix Gmbh Fluidic Component
US10646886B2 (en) * 2015-06-08 2020-05-12 Fdx Fluid Dynamix Gmbh Fluidic oscillator and applications of the fluidic oscillator
US10724879B2 (en) * 2015-07-17 2020-07-28 Endress + Hauser Flowtec Ag Flow measuring device operating on the vortex counter principle
US10960157B2 (en) * 2015-09-22 2021-03-30 Srett (Sas) Oxygen therapy monitoring device and method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2754342B1 (en) * 1996-10-09 1998-11-27 Schlumberger Ind Sa DIFFERENTIAL PRESSURE CONVERSION CELL TO ELECTRICAL SIGNAL

Patent Citations (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3788141A (en) * 1971-08-27 1974-01-29 Westinghouse Electric Corp Flow meter
US3902367A (en) * 1973-04-05 1975-09-02 Atomic Energy Authority Uk Flowmeters
US4182172A (en) * 1977-08-19 1980-01-08 Danielsson Olf H Flow meter
US4838091A (en) * 1986-06-27 1989-06-13 Thorn Emi Flow Measurement Limited Fludic oscillator flowmeters
US4930357A (en) * 1986-11-21 1990-06-05 Allied-Signal Inc. Fluidic volumetric fluid flow meter
US5003810A (en) * 1987-08-28 1991-04-02 Thorn Emi Flow Measurement Limited Fluid meter
US5063786A (en) * 1989-02-01 1991-11-12 Severn Trent Water Limited Fluid flow meters
US5127173A (en) * 1990-10-12 1992-07-07 Allied-Signal Inc. Volumetric fluid flowmeter and method
US5363704A (en) * 1991-07-09 1994-11-15 Schlumberger Industries Fluidic oscillator and a flow meter including such an oscillator
US5396808A (en) * 1992-04-29 1995-03-14 Schlumberger Industries, S.A. Fluidic oscillator
US5638867A (en) * 1993-07-13 1997-06-17 Schlumberger Industries, S.A. Fluidic oscillator having a wide range of flow rates, and a fluid meter including such an oscillator
US5463904A (en) * 1994-02-04 1995-11-07 The Foxboro Company Multimeasurement vortex sensor for a vortex-generating plate
US5808209A (en) * 1994-03-23 1998-09-15 Schlumberger Industries, S.A. Vortex fluid meter including a profiled pipe
US6003383A (en) * 1994-03-23 1999-12-21 Schlumberger Industries, S.A. Vortex fluid meter incorporating a double obstacle
US5864067A (en) * 1994-06-17 1999-01-26 Schlumberger Industries, S.A. Fluidic oscillator and a method of measuring a volume-related quantity of fluid flowing through such a fluidic oscillator
US5827976A (en) * 1995-06-12 1998-10-27 Bowles Fluidics Corporation Fluidic flow meter with fiber optic sensor
US5847288A (en) * 1997-04-04 1998-12-08 Harwill Corporation Photo detector bending beam flow switch and flow meter
US6536946B1 (en) * 1998-03-24 2003-03-25 Schlumberger Industries, S.A. Device and method for directly measuring calorific energy contained in a fuel gas
US6938489B2 (en) * 2002-01-21 2005-09-06 Fujikin Incorporated Oscillatory type pressure sensor
US7383740B2 (en) * 2003-11-17 2008-06-10 Spirojet Medical Ltd Spirometer
US7464609B2 (en) * 2004-05-03 2008-12-16 Sinvent As Means for measuring fluid flow in a pipe
US7259574B2 (en) * 2005-04-15 2007-08-21 Vaidya Avinash Shrikrishna Sensor device for measuring frequency and amplitude of varying force signals
US7827870B2 (en) * 2005-04-26 2010-11-09 Severn Trent Metering Services Limited Meter
US8136413B2 (en) * 2007-03-13 2012-03-20 Elster Metering Limited Bi-directional oscillating jet flowmeter
US20110071773A1 (en) * 2007-10-23 2011-03-24 Saylor David J Method and Device for the Assessment of Fluid Collection Networks
US8201462B2 (en) * 2008-06-10 2012-06-19 Avinash Shrikrishna Vaidya Recirculation type oscillator flow meter
US8091434B2 (en) * 2008-06-10 2012-01-10 Avinash Shrikrishna Vaidya Fluidic oscillator flow meter
US9134152B2 (en) * 2008-09-12 2015-09-15 Elster Metering Limited Bi-directional flow meter with two fluidic oscillators connected in series
US7793554B2 (en) * 2009-02-05 2010-09-14 Masco Corporation Flexible sensor flow and temperature detector
US8733401B2 (en) * 2010-12-31 2014-05-27 Halliburton Energy Services, Inc. Cone and plate fluidic oscillator inserts for use with a subterranean well
US8573066B2 (en) * 2011-08-19 2013-11-05 Halliburton Energy Services, Inc. Fluidic oscillator flowmeter for use with a subterranean well
US9140619B2 (en) * 2012-05-02 2015-09-22 National Applied Research Laboratories Piezoelectric vacuum gauge and measuring method thereof
US9706946B2 (en) * 2012-05-22 2017-07-18 Sparo Inc. Spirometer system and methods of data analysis
US9170135B2 (en) * 2012-10-30 2015-10-27 Itron, Inc. Module for gas flow measurements with a dual sensing assembly
US20170136472A1 (en) * 2014-07-15 2017-05-18 Dlhbowles, Inc. Three-jet fluidic oscillator circuit, method and nozzle assembly
US10646886B2 (en) * 2015-06-08 2020-05-12 Fdx Fluid Dynamix Gmbh Fluidic oscillator and applications of the fluidic oscillator
US10724879B2 (en) * 2015-07-17 2020-07-28 Endress + Hauser Flowtec Ag Flow measuring device operating on the vortex counter principle
US10960157B2 (en) * 2015-09-22 2021-03-30 Srett (Sas) Oxygen therapy monitoring device and method
US20180318848A1 (en) * 2015-11-18 2018-11-08 Fdx Fluid Dynamix Gmbh Fluidic Component
US11471898B2 (en) * 2015-11-18 2022-10-18 Fdx Fluid Dynamix Gmbh Fluidic component
US20170276527A1 (en) * 2016-03-25 2017-09-28 General Electric Company System and method for metering gas

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