US20060249823A1 - Semiconductor package having ultra-thin thickness and method of manufacturing the same - Google Patents
Semiconductor package having ultra-thin thickness and method of manufacturing the same Download PDFInfo
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- US20060249823A1 US20060249823A1 US11/458,640 US45864006A US2006249823A1 US 20060249823 A1 US20060249823 A1 US 20060249823A1 US 45864006 A US45864006 A US 45864006A US 2006249823 A1 US2006249823 A1 US 2006249823A1
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- Prior art keywords
- circuit board
- forming
- supporter
- semiconductor chip
- hole
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- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
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Definitions
- the EMC 50 is formed by spreading the resin material on the semiconductor chip 30 and the circuit board 10 and then curing the resin material at a predetermined temperature. The EMC 50 contracts in the curing process.
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
A semiconductor package having an ultra thin thickness and a method of manufacturing the same are provided. The ultra thin semiconductor package comprises a circuit board in which a through hole is formed. A semiconductor chip is located in the through hole and a connecting element electrically connects the circuit board and the semiconductor chip. An epoxy molding compound (EMC) covers the semiconductor chip and the connecting element and a supporter having a thermal expansion coefficient similar to the EMC is attached inside the through hole on a lower surface of the semiconductor chip. An external connecting terminal is attached to at least one side of the circuit board. Because of the inclusion of the supporter, warpage of the semiconductor package resulting from the curing of the EMC is prevented.
Description
- This application is a Divisional of U.S. patent application Ser. No. 10/982,361, filed on Nov. 3, 2004, which claims the priority of Korean Patent Application No. 2003-79597, filed on Nov. 11, 2003, in the Korean Intellectual Property Office, the disclosure of which is incorporated herein in its entirety by reference.
- 1. Field of the Invention
- The present invention relates to a semiconductor package and a method of manufacturing the same, and more particularly, to an ultra-thin semiconductor package having a supporter that prevents warpage of the semiconductor package and a method of manufacturing the same.
- 2. Description of the Related Art
- Smaller and thinner semiconductor packages such as a chip scale package, a micro ball grid array package, and an ultra-thin semiconductor package have recently been developed.
- An ultra-thin semiconductor package is disclosed in U.S. Pat. No. 6,395,579. The structure of an ultra-thin semiconductor package will now be described.
- FIG, 1 is a cross-sectional view of a
conventional semiconductor package 100 having a through hole. - Referring to
FIG. 1 , acircuit board 10 has a throughhole 12 with a size similar to a chip and asemiconductor chip 30 is located in the throughhole 12. Thesemiconductor chip 30, which is located in the throughhole 12, is electrically connected to acircuit pattern 18 of thecircuit board 10. Predetermined portions of thesemiconductor chip 30 and thecircuit board 10 are molded by an epoxy molding compound (EMC) 50 composed of a resin material. In addition, aconductive ball 60 is attached to a lower surface of thecircuit board 10. - The
semiconductor package 100 can have a thickness similar to the height of thesemiconductor chip 30. - A resin material is generally used for the EMC 50, covering predetermined portions of the
semiconductor chip 30 and predetermined portions of thecircuit board 10. - The EMC 50 is formed by spreading the resin material on the
semiconductor chip 30 and thecircuit board 10 and then curing the resin material at a predetermined temperature. The EMC 50 contracts in the curing process. - However, as is well known to those skilled in the art, the EMC 50 formed of the resin material and the
semiconductor chip 30 formed of a silicon material have different thermal expansion coefficients, and thus, they contract by different amounts in the curing process. Therefore, as illustrated by W inFIG. 1 , thesemiconductor chip 30 and the EMC 50 may warp due to the relatively low contraction rate of thesemiconductor chip 30. This is called warpage. - A degree of warpage d of the
semiconductor chip 30 and the EMC 50 may be 100 to 400 μm. The warpage causes the height of the semiconductor package to increase. Thus, an ultra-thin semiconductor package would not be obtained. Furthermore, cracks may occur due to the warpage of the semiconductor package. - The present invention provides a semiconductor package having an ultra-thin thickness and a method of manufacturing the same in such a way that warpage of the semiconductor package is prevented.
- According to an aspect of the present invention, there is provided an ultra thin semiconductor package comprising a circuit board having a through hole; a semiconductor chip located in the through hole of the circuit board; a connecting element electrically connecting the circuit board and the semiconductor chip; an epoxy molding compound (EMC) covering the semiconductor chip and the connecting element; an external connecting terminal which is electrically connected to at least one side of the circuit board; and a supporter attached to a lower surface of the semiconductor chip and having a thermal expansion coefficient substantially equal to or greater than a thermal expansion coefficient of the EMC.
- According to still another aspect of the present invention, there is provided a method of manufacturing an ultra thin semiconductor package, the method comprising providing a circuit board in which a through hole is formed; attaching a closure member to a lower surface of the circuit board, thereby covering the through hole; forming a supporter on an upper surface of the closure member; attaching a semiconductor chip having an input/output pad in its upper edge to an upper surface of the supporter; electrically connecting the input/output pad of the semiconductor chip and the circuit board; forming an epoxy molding compound (EMC) that covers at least part of the semiconductor chip, and the circuit board; attaching a solder ball to the lower surface of the circuit board; and removing the closure member, where a thermal expansion coefficient of the supporter is substantially equal to or greater than a thermal expansion coefficient of the EMC.
- The above and other features and advantages of the present invention will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings in which:
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FIG. 1 is a cross-sectional view of a conventional semiconductor package having a through hole; -
FIG. 2 is a cross-sectional view of an ultra-thin semiconductor package having a through hole according to a first embodiment of the present invention; -
FIG. 3 is a cross-sectional view of an ultra-thin semiconductor package according to a second embodiment of the present invention; -
FIG. 4 is a cross-sectional view of an ultra-thin semiconductor package according to a third embodiment of the present invention; -
FIG. 5 is a cross-sectional view of an ultra-thin semiconductor package according to a fourth embodiment of the present invention; -
FIG. 6 is a cross-sectional view of a stacked semiconductor package using ultra-thin semiconductor packages according to a fifth embodiment of the present invention; and -
FIGS. 7A through 7F are cross-sections illustrating a method of manufacturing an ultra-thin semiconductor package according to a sixth embodiment of the present invention. - The present invention will now be described more fully with reference to the accompanying drawings in which exemplary embodiments of the invention are shown. This invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein; rather these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. In the drawings, the forms of the elements are exaggerated for clarity. To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements.
-
FIG. 2 is a cross-section of an ultra-thin semiconductor package having a through hole according to a first embodiment of the present invention. - Referring to
FIG. 2 , asemiconductor package 200 comprises acircuit board 110 having afirst surface 110 a and asecond surface 110 b. Thecircuit board 110 is formed of aresin board 105, for instance, BT (mismaleimide triazine). A throughhole 115 is formed in a predetermined portion of thecircuit board 110. Acircuit pattern 120 is formed in upper and lower portions of thecircuit board 110 as well as through thecircuit board 110. Thecircuit pattern 120 includes abond finger 120 a,ball lands 120 b, and astud 120 c. Thebond finger 120 a is disposed near the throughhole 115 and is formed of an Au, Ag, or metal layer. In addition, thebond finger 120 a may be formed selectively on thefirst surface 110 a or thesecond surface 110 b of thecircuit board 110. Theball lands 120 b include upper and lower ball lands, which are respectively formed on thefirst surface 110 a and thesecond surface 110 b of thecircuit board 110. The upper andlower ball lands 120 b, disposed opposite each other across thecircuit board 110, are formed of Au, Ag, Ni, or Pd. Thestud 120 c electrically connects the corresponding upper andlower ball lands 120 b. - A
protection layer 125 covers the first andsecond surfaces circuit board 110. Theprotection layer 125, formed of an insulating layer, protects thecircuit pattern 120 from an external environment and prevents a short between thecircuit patterns 120. However, theball lands 120 b that are exposed and contact the external connecting terminal should not be covered by theprotection layer 125. - A
supporter 130, which has a square or tiled shape, is located in the throughhole 115 and asemiconductor chip 140 is attached to an upper portion of thesupporter 130 by anadhesive bonding layer 135. - The
semiconductor chip 140 has afirst surface 140 a in which an input/output pad 145 is formed and asecond surface 140 b to which thesupporter 130 is attached. The input/output pad 145 is formed at an edge of thefirst surface 140 a of thesemiconductor chip 140. In addition, the input/output pad 145 may be electrically connected to thebond finger 120 a by a connectingelement 150 formed of one of Au and Al or a lead extended from thebond finger 120 a. - The
semiconductor chip 140, the connectingelement 150, and thefirst surface 110 a of thecircuit board 110 are sealed by an epoxy molding compound (EMC) 160. TheEMC 160 may be a resin material. - The
supporter 130, to which thesemiconductor chip 140 is attached, prevents warpage of thesemiconductor chip 140 and theEMC 160 due to the difference between thermal expansion coefficients of theEMC 160 and thesemiconductor chip 140. Thesupporter 130 may be formed of a resin or Cu foil having a thermal expansion coefficient equal to or 1 to 10 times larger than that of theEMC 160 and having a thickness of 10 to 50 μm. It is preferable that thesupporter 130 and theEMC 160 have the same thermal expansion coefficient. However, a material having a thermal expansion coefficient larger than that of theEMC 160 is more preferably used for thesupporter 130 since the size and thickness of thesupporter 130 are relatively smaller than the size and thickness of theEMC 160. - The
supporter 130 should be formed in the throughhole 115 in order to prevent the height of thesemiconductor package 100 from increasing. For instance, if thesupporter 130 occupies a predetermined region in a lower portion of thecircuit board 110, the height of thesemiconductor package 100 decreases by the thickness of thesupporter 130. Therefore, thesemiconductor package 100 is preferably located in the throughhole 115. - Furthermore, the
adhesive bonding layer 135 attaching thesupporter 130 to thesemiconductor chip 140 may be an adhesive sheet or paste and have a thickness to fully attach thesupporter 130 and thesemiconductor chip 140. The thickness of the adhesive bonding layer may be, for instance, a thickness of about 10 to 50 μm. -
Solder balls 170, which are external connecting terminals, are attached to the lower ball lands 120 b which are formed in thesecond surface 110 b of thecircuit board 110. - Referring to
FIG. 3 , theultra-thin semiconductor package 300 includes asidewall protection layer 126 on a sidewall of the throughhole 115 of thecircuit board 110. Thesidewall protection layer 126 improves the adhesive strength between thecircuit board 110 and theEMC 160. The sidewall of the throughhole 115 may become uneven when forming the throughhole 115 in thecircuit board 110. If the sidewall of the throughhole 115 is uneven, thecircuit board 110 and theEMC 160 may be lifted. Therefore, thesidewall protection layer 126 having a smooth surface is formed in the sidewall of the throughhole 115, and the adhesive strength between thecircuit board 110 and theEMC 160 is improved. In addition, thesidewall protection layer 126 may be further connected to theprotection layer 125 formed in thefirst surface 110 a or thesecond surface 110 b of thecircuit board 110. - Referring to
FIG. 4 , instead of theEMC 160 that covers the entirefirst surface 110 a of thecircuit board 110, anEMC 161 may be formed to occupy part of thecircuit board 110. In this case, theprotection layer 125 may be partly removed to expose the upper ball lands 120 b which are formed in thefirst surface 110 a of thecircuit board 110. - Referring to
FIG. 5 , thesupporter 130 may be disposed near thefirst surface 110 a of thecircuit board 110. In this case, theadhesive bonding layer 135 and thesemiconductor chip 140 are sequentially attached to a lower surface of thesupporter 130 and thebond finger 120 a is located at thesecond surface 110 b of thecircuit board 110. The input/output pad 145 of thesemiconductor chip 140 is electrically connected to thebond finger 120 a by the connectingelement 150. - Furthermore, a stacked semiconductor package may be formed by stacking several ultra thin semiconductor packages.
- Referring to
FIG. 6 , the stackedsemiconductor package 600 comprises a plurality of stacked unit packages 100 a, 100 b, 100 c and 100 d. The unit packages 100 a, 100 b, 100 c and 100 d may have the same structures. In addition, the unit packages 100 a, 100 b, 100 c and 100 d may include thesemiconductor chip 140, the connectingelement 150, and theEMC 161 partly covering thecircuit board 110. That is, the semiconductor package, 400 and 500 ofFIGS. 4 and 5 may be used. - The
protection layer 125 expose the upper and lower ball lands 120 b of thecircuit board 110 of each of the unit packages 100 a, 100 b, 100 c and 100 d such that the unit packages 100 a, 100 b, 100 c and 100 d are electrically connected. Furthermore, the upper ball lands 120 b formed on thefirst surface 110 a and the lower ball lands 120 b formed on thesecond surface 110 b in thecircuit board 110 of the unit packages 100 a, 100 b, 100 c and 100 d may be aligned. - In addition, the unit packages 100 a, 100 b, 100 c and 100 d are electrically connected by the
solder balls 170, that is, the external connecting terminals. Thesolder balls 170, which are located between the upper and lower ball lands 120 b, electrically connect the stacked unit packages 100 a, 100 b, 100 c and 100 d. Here, it is preferable that a height H2 of thesolder ball 170 is greater than a height H1 of theEMC 160, to allow for proper stacking and connection. - Therefore, by attaching the
supporter 130, which has a thermal expansion coefficient similar to or larger than that of theEMC 160, to a lower surface of thesemiconductor chip 140, the warpage of thesemiconductor chip 140 caused by curing theEMC 160 and due to the difference in thermal expansion coefficients of thesemiconductor chip 140 and theEMC 160, is reduced. -
FIGS. 7A through 7F are cross-sectional views illustrating a method of manufacturing an ultra-thin semiconductor package according to a sixth embodiment of the present invention. - Referring to
FIG. 7A , aresin board 105 is prepared. Theresin board 105 has afirst surface 110 a and asecond surface 110 b on an opposite side of theresin board 105 as thefirst surface 110 a. Then, acircuit pattern 120, which is electrically connected to each of the first andsecond surfaces resin board 105, is formed. The forming of thecircuit pattern 120 will now be explained. - A metal layer formed of Au, Ag, or Pd is plated on the
second surface 110 b of theresin board 105 and then a predetermined portion of the metal layer is etched to form lower ball lands 120 b. In order to expose the lower ball lands 120 b, a via hole (not shown) is formed by etching a predetermined portion of theresin board 105 and then astud 120 c is formed in theresin board 105 by filling a conductive layer inside the via hole. After plating the metal layer on thesecond surface 110 b of theresin board 105, upper ball lands 120 b and abond finger 120 a are formed by etching a predetermined portion of the metal layer in order for the metal layer and thestud 120 c to contact. Here, the processes of forming the upper and lower ball lands are interchangeable. Acircuit board 110 is completed by the formation of thebond finger 120 a, the ball lands 120 b and thestud 120 c. - A through
hole 115 is formed in a predetermined portion of thecircuit board 110 according to the method explained above. It is preferable that the throughhole 115 has a size larger than that of asemiconductor chip 140 that will be attached to the through hole later. Here, the order of forming thecircuit pattern 120 and the throughhole 115 can be reversed. - Thereafter, a
protection layer 125, for instance, a resin or insulating layer, is formed on each of the first andsecond surfaces circuit board 110. Then, a predetermined portion of theprotection layer 125 may be removed in order to expose thebond finger 120 a and the upper and lower ball lands 120 b. If theEMC 160 is formed on the whole surface of thecircuit board 110, as in theultra-thin semiconductor package 200 illustrated inFIG. 2 , it is preferable that only portions of theprotection layer 125 formed on thebond finger 120 a and formed on the lower ball lands 120 b are removed. In addition, in theultra-thin semiconductor package 200 as illustrated inFIG. 3 , asidewall protection layer 126 may be formed on a sidewall of the throughhole 115. Thesidewall protection layer 126 may be formed in the same process as the forming theprotection layer 125. - Referring to
FIG. 7B , aclosure member 128 is attached to thesecond surface 110 b of thecircuit board 110 in order to cover the throughhole 115. Theclosure member 128 may be slightly larger than the throughhole 115 or be attached to the wholefirst surface 110 a of thecircuit board 110. Theclosure member 128 is formed of an insulating layer or an ultraviolet tape that can be exfoliated by ultraviolet rays. Then, asupporter 130 is attached to an upper surface of theclosure member 128. It is preferable that thesupporter 130 has a thermal expansion coefficient equal to or 1 to 10 times larger than that of an EMC which will be formed hereafter. In addition, thesupporter 130 may have a square shape and be built in the throughhole 115. A liquid material such as a resin material may be spread on the upper surface of theclosure member 128 and is subsequently cured to form thesupporter 130. - Referring to
FIG. 7C , after placing anadhesive bonding layer 135 with a thickness of 10 to 30 μm on an upper surface of thesupporter 130, asemiconductor chip 140 is attached to the upper surface of thesupporter 130. Theadhesive bonding layer 135 may be an adhesive sheet or paste. If thesupporter 130 is formed of a resin material, thesemiconductor chip 140 can be attached directly to the upper surface of thesupporter 130 without interposing theadhesive bonding layer 135. Thesemiconductor chip 140 has afirst surface 140 a on which an input/output pad 145 is disposed and asecond surface 140 b is attached to the upper surface of thesupporter 130 such that thefirst surface 140 a is directed upwards. - Referring to
FIG. 7D , the input/output pad 145 of thesemiconductor chip 140 and thebond finger 120 a, which is located at an edge of the throughhole 115, are connected by awire 150. - Referring to
FIG. 7E , in order to protect thesemiconductor chip 140 and thewire 150, a resin material is spread on a predetermined portion of thefirst surface 110 a of thecircuit board 110 and anEMC 161 is formed by carrying out a curing process with respect to the resin material at a predetermined temperature. As illustrated, theEMC 161 is formed to cover thesemiconductor chip 140, thewire 150, and part of thecircuit board 110. However, as in theultra-thin semiconductor package 200 illustrated inFIG. 2 , theEMC 161 may be formed on the entirety of thefirst surface 110 a of thecircuit board 110. - Referring to
FIG. 7F , an external connectingterminal 170, for instance, a solder ball, is attached to thesecond surface 110 b of thecircuit board 110 such that the external connecting terminal 170 contacts the respective ball lands 120 b. Then, thecircuit board 110 is separated into respective unit packages by a singulation tool such as a saw, and thereafter theclosure member 128 is removed from the lower surface of thesupporter 130. The process of separating theclosure member 128 may be performed prior to the separating of thecircuit board 110. Thus, the ultra-thin semiconductor package is completed. - As described above, the ultra thin semiconductor package having a built-in semiconductor chip according to exemplary embodiments of the present invention includes a supporter with a thermal expansion coefficient substantially equal to or greater than that of an EMC and is attached to a lower portion of the EMC in order to improve warpage of the semiconductor chip resulting from a the difference in thermal expansion coefficients between the semiconductor chip and the EMC.
- Thus, when curing the EMC, a contraction rate of the EMC is offset by that of the supporter, and, bending of the semiconductor chip and the EMC, that is the warpage, is prevented.
- The height of the ultra-thin semiconductor package does not increase since warpage of the semiconductor package is prevented. Furthermore, the supporter is formed in the through hole of the circuit board, and thus, the height of the ultra-thin semiconductor package does not increase. In addition, cracks caused by warpage are also prevented.
- While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the following claims.
Claims (7)
1. A method of manufacturing a semiconductor package, the method comprising:
forming a circuit board;
forming a through hole in the circuit board;
attaching a closure member to a lower surface of the circuit board, thereby covering the through hole;
forming a supporter on an upper surface of the closure member;
attaching a semiconductor chip to an upper surface of the supporter, the chip having an input/output on its upper edge;
electrically connecting the input/output pad of the semiconductor chip and the circuit board;
forming an epoxy molding compound (EMC) that covers at least part of the semiconductor chip, and the circuit board;
attaching a solder ball to the lower surface of the circuit board; and
removing the closure member.
2. The method of claim 1 , wherein the forming the circuit board includes:
preparing a resin board having a first surface and a second surface on an opposite side of the resin board;
forming a first circuit pattern in the first surface of the resin board;
etching the resin board to form a via hole therethrough and to expose the first circuit pattern;
forming a conductive stud in the via hole; and
forming a second circuit pattern in contact with the conductive stud on the second surface of the resin board.
3. The method of claim 2 , wherein forming a through hole occurs before forming the first circuit pattern in the first surface of the resin board or after forming the second circuit pattern.
4. The method of claim 2 , wherein the closure member is an insulating or ultraviolet tape.
5. The method of claim 2 , wherein the forming of the supporter comprises:
preparing a square plate smaller than the through hole; and
attaching the plate to an upper portion of the supporter with an adhesive.
6. The method of claim 2 , wherein the forming of the supporter includes:
coating a liquid material used for a supporter on the upper surface of the closure member; and
curing the liquid material to be a square shape.
7. The method of claim 2 , wherein the forming of the EMC includes:
coating a resin material on an upper portion of the semiconductor chip, the connecting element, and the circuit board; and
curing the resin material.
Priority Applications (1)
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US11/458,640 US20060249823A1 (en) | 2003-11-11 | 2006-07-19 | Semiconductor package having ultra-thin thickness and method of manufacturing the same |
Applications Claiming Priority (4)
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KR10-2003-0079597A KR100510556B1 (en) | 2003-11-11 | 2003-11-11 | Semiconductor package having ultra thin thickness and method for manufacturing the same |
KR2003-79597 | 2003-11-11 | ||
US10/982,361 US7105919B2 (en) | 2003-11-11 | 2004-11-03 | Semiconductor package having ultra-thin thickness and method of manufacturing the same |
US11/458,640 US20060249823A1 (en) | 2003-11-11 | 2006-07-19 | Semiconductor package having ultra-thin thickness and method of manufacturing the same |
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US10/982,361 Division US7105919B2 (en) | 2003-11-11 | 2004-11-03 | Semiconductor package having ultra-thin thickness and method of manufacturing the same |
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US20060249823A1 true US20060249823A1 (en) | 2006-11-09 |
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US11/458,640 Abandoned US20060249823A1 (en) | 2003-11-11 | 2006-07-19 | Semiconductor package having ultra-thin thickness and method of manufacturing the same |
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US10/982,361 Expired - Fee Related US7105919B2 (en) | 2003-11-11 | 2004-11-03 | Semiconductor package having ultra-thin thickness and method of manufacturing the same |
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US10381288B2 (en) | 2011-12-21 | 2019-08-13 | Intel Corporation | Packaged semiconductor die and CTE-engineering die pair |
Also Published As
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KR100510556B1 (en) | 2005-08-26 |
US20050098879A1 (en) | 2005-05-12 |
KR20050045509A (en) | 2005-05-17 |
US7105919B2 (en) | 2006-09-12 |
JP2005150718A (en) | 2005-06-09 |
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