US20060201813A1 - Apparatus and method for plating solution analysis - Google Patents
Apparatus and method for plating solution analysis Download PDFInfo
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- US20060201813A1 US20060201813A1 US11/333,781 US33378106A US2006201813A1 US 20060201813 A1 US20060201813 A1 US 20060201813A1 US 33378106 A US33378106 A US 33378106A US 2006201813 A1 US2006201813 A1 US 2006201813A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/416—Systems
- G01N27/48—Systems using polarography, i.e. measuring changes in current under a slowly-varying voltage
Definitions
- Embodiments of the invention generally relate to an apparatus and method for conducting chemical analysis of substrate plating solutions.
- Metallization of sub-quarter micron sized features is a foundational technology for present and future generations of integrated circuit manufacturing processes. More particularly, in devices such as ultra large scale integration-type of devices, i.e., devices having integrated circuits with more than a million logic gates, the multilevel interconnects that lie at the heart of these devices are generally formed by filling high aspect ratio interconnect features with a conductive material, such as copper or aluminum, for example.
- a conductive material such as copper or aluminum
- CVD chemical vapor deposition
- PVD physical vapor deposition
- plating techniques such as electrochemical plating (ECP) and electroless plating, for example, have emerged as viable processes for filling sub-quarter micron sized high aspect ratio interconnect features in integrated circuit manufacturing processes.
- ECP plating processes are generally two stage processes, wherein a seed layer is first formed over the surface and features of the substrate, and then the surface and features of the substrate are exposed to a plating solution, while an electrical bias is simultaneously applied between the substrate and an anode positioned within the plating solution.
- the plating solution is generally rich in ions to be plated onto the surface of the substrate, and therefore, the application of the electrical bias causes these ions to be reduced and thereby plated onto the seed layer.
- the plating solution generally contains organic additives, such as, for example, levelers, suppressors, and accelerators configured to control the plating distribution throughout the plating process. These additives are generally maintained within narrow tolerances, so that the repeatability of the plating operation may be maintained.
- ECP systems generally utilize a cyclic voltammetric stripping (CVS) process to determine the organic additive concentrations in the plating solution. More particularly, three electrodes, a working electrode, a counter electrode, and a reference electrode, are immersed in a cell having a plating solution to be measured therein. The reference electrode and the working electrode are typically connected to a device for measuring the electrical potential difference between the respective electrodes.
- the reference electrode generally consists of three components, a half-cell electrode, a half-cell electrolyte, and a reference junction.
- half-cell electrode generally refers to a solid phase, electron-conducting contact within the half-cell electrolyte, at which contact a half-cell oxidation-reduction reaction occurs that establishes a stable potential between the half-cell electrolyte and the working electrode.
- Direct physical, and therefore electrical contact between the half-cell electrolyte and the sample plating solution is established through the reference junction, which usually consists of a porous ceramic, glass, or plastic plug (e.g. frit), or other device capable of achieving a fluid mechanical leak having pores large enough to allow equal transport of anions and cations.
- the reference junction is necessary to establish electrical contact with the plating solution, and therefore, the working electrode.
- the potential of the working electrode is swept through a voltammetric cycle that includes both a metal plating range and a metal stripping range.
- the potential of the working electrode is swept through at least two reference baths of non-plating quality, and an additional bath where the quality or concentration of organic additives therein is unknown.
- an integrated or peak current used during the metal stripping range may be correlated with the quality of the non-plating bath.
- the integrated or peak current may be compared to the correlation of the non-plating bath, and the quality of the unknown plating bath determined therefrom.
- the amount of metal deposited during the metal plating cycle and then re-dissolved into the plating bath during the metal stripping cycle generally correlates to the concentration of particular organics in the plating solution.
- CVS methods generally observe the total copper ions reduced on an electrode over a predetermined potential range.
- accelerators or brighteners counteract the suppressors to increase the plating rate, their quantities may be determined from observation using standard addition or dilution titration techniques.
- measured quantities of additives are injected from the top of the cell into the plating solution using syringes or tubes for testing the plating solution.
- test volumes may vary from a few milliliters to several hundred milliliters, the cell size must be changed accordingly to accommodate the differing test volumes.
- tubes or syringes are used to inject the additives into the plating solutions, it is difficult to accurately inject a microliter or less of the additives into the plating solutions as the volume of the additives must be large enough to be dispensed as a droplet.
- Micro amounts of additives may be injected by immersing the tube tips into the plating solution.
- residual additives contained within the tubes may diffuse out into the reference bath during the test and contaminate the measurement.
- a plating solution under test may be incorrectly analyzed and therefore cause a plating problem that may affect several batches of substrates affecting the plating throughput, and may ultimately increase the cost of production.
- Embodiments of the invention generally provide an apparatus for analyzing one or more solutions used in a plating process.
- the invention provides an apparatus for analyzing plating solutions, wherein the apparatus includes a vessel defining a cavity having a larger volumetric portion adjacent a smaller volumetric portion. Generally, the larger and smaller volumetric portions are adapted to hold solutions.
- the apparatus further includes a rotating electrode disposed within the cavity, and a fluid injection apparatus coupled to a bottom portion of the vessel adjacent the smaller volumetric region, wherein the fluid injection apparatus is adapted to inject one or more fluids into at least some of the one or more solutions.
- the invention provides an apparatus for analyzing plating solutions used in a substrate plating process.
- the apparatus includes a vessel defining a cavity adapted to hold the plating solutions, a rotatable working electrode extending at least partially within the cavity, and a motor disposed on top of the vessel and adapted to rotate the working electrode.
- the apparatus further includes a base coupled to a lower portion of the cavity adjacent a bottom portion of the vessel, wherein the base includes a plurality of fluid ports for coupling fluids from external fluid sources to the cavity.
- the base further includes a connection member having an upper surface in communication with at least a portion of the cavity, and a fluid junction disposed within the upper surface of the connection member and adapted to combine fluids from the plurality of fluid ports with one or more test solutions.
- the apparatus further includes a counter electrode disposed parallel to and higher than the working electrode.
- the apparatus also includes a reference electrode disposed within the base and adapted to couple reference electrolyte fluid to one or more solutions, and a process controller in communication with the system to control the analysis process thereof.
- the invention provides a system for analyzing one or more plating solutions used in a substrate plating process.
- the system -includes a plating cell disposed on a frame having a base thereon.
- the plating cell includes a conical cavity portion adjacent the base.
- the base is adapted to couple a plurality of solutions to the plating cell.
- the system further includes a motor coupled to the plating cell and adapted to rotate a working electrode therein, and a plurality of pumps disposed on the frame and in fluidic communication with the base.
- the system further includes a heat exchanger disposed on the plating cell and adapted to control temperatures of the one or more plating solutions, and a process controller coupled to at least one of the plating cell, heat exchanger, and pumps, wherein the controller is adapted to control the plating cell, the heat exchanger, and the pumps.
- FIG. 1 illustrates a perspective view of one embodiment of a plating solution analysis apparatus for use with aspects of the invention.
- FIG. 2A illustrates a perspective view of one embodiment of a plating cell for use with aspects of the invention.
- FIG. 2B illustrates a partial side view of a heat exchanger of FIG. 2A .
- FIG. 3 illustrates a perspective view of one embodiment of a plating cell base.
- FIG. 4 illustrates a diagrammatic view of one embodiment of a reference electrode configuration for use with aspects of the invention.
- FIGS. 5A and 5B illustrate a simplified view of one embodiment of a heat exchanger used with aspects of the invention.
- FIG. 6 illustrates one type of stimulation waveform for use with aspects of the invention.
- FIG. 1 illustrates a perspective view of a plating solution analysis device 105 useful in practicing the invention.
- the plating solution analysis device 105 includes a frame 101 that may be divided into functional sections to allow for ease of service and to separate electronic devices from fluids used during testing.
- the basic sections include a test section 103 , a rear electronics section 106 , and a grab sample compartment 107 .
- the plating solution analysis device 105 includes a plating cell 108 disposed on the frame 101 within the test section 103 .
- the plating cell 108 is described below with respect to FIG. 2A .
- the plating solution analysis device 105 may include a reference electrolyte container 112 used to hold electrolytes, such as potassium chloride or other reference electrolytes.
- a reference electrolyte pump 118 may be adapted to pump reference electrolytes from the reference electrolyte container 112 to the plating cell 108 at the start of the analysis process.
- the plating solution analysis device 105 may also include a cell water valve 110 adapted to control the flow of water, such as de-ionized water, from external sources (not shown) through a water regulator 116 into the plating cell 108 .
- One or more additive pumps 128 may be disposed on the frame 101 and are adapted to pump solutions, additives, and other testing fluids from external solution containers, such as syringes, through a sample selector valve 120 .
- Plating cell 108 may be fluidly coupled to waste pump/valves 122 disposed on the frame 101 to pump waste fluids therefrom.
- a potentiostat 126 may be disposed on a wall 102 of the frame 101 to shield the potentiostat from any solution splashing. The potentiostat 126 may be adapted to control the energy input of the plating cell 108 .
- the plating solution analysis device 105 may be coupled to a data processing system 109 .
- the data processing system 109 may include a computer or other controller adapted to analyze and display input/output signals of the plating solution analysis device 105 , and may display the data on an output device such as a computer monitor screen.
- the data processing system 109 may include a controller, such as programmable logic controller (PLC), computer, or other microprocessor-based controller.
- PLC programmable logic controller
- the data processing system 109 may include a central processing unit (CPU) in electrical communication with a memory, wherein the memory may contain a plating solution testing program that, when executed by the CPU, provide instructions for controlling the plating solution analysis device 105 .
- CPU central processing unit
- the plating solution testing program may use any one of a number of different programming languages.
- the program code can be written in PLC code (e.g., ladder logic), a higher level language such as C, C++, Java, or a number of other languages.
- the data processing system 109 may receive inputs from the various components of the plating solution analysis device 105 and generate control signals that may be transmitted to the respective components of the plating solution analysis device 105 for controlling the operation thereof.
- the data processing system 109 may be configured to control parameters such as the flow rate and the quantity of plating solution dispensed into the plating cell 108 , and the timing and quantity of chemicals added to the plating solution by the additive pumps 128 .
- the plating solution analysis device 105 may utilize a plurality of solutions, additives, and other mixtures during testing of a plating solution.
- An additive free solution (AFS) may be used as the main carrier for the additives during testing.
- the AFS can include copper sulfate, sulfuric acid, chloride ions, and other known AFS solutions.
- the additives which may be, for example, levelers, suppressors, accelerators, or other additives known in the art, are typically organic materials that adsorb onto the surface of a substrate being plated.
- Useful suppressors typically include polyethers, such as polyethylene glycol, or other polymers, such as polypropylene oxides, which adsorb on the substrate surface, slowing down copper deposition in the adsorbed sites.
- Other useful suppressors typically include sodium benzoate and sodium sulfite, which inhibit the rate of copper deposition on the substrate.
- Useful accelerators typically include sulfides or disulfides, such as bis( 3 -sulfopropyl) disulfide, which compete with suppressors for adsorption sites, accelerating copper deposition in adsorbed areas.
- FIG. 2A is a perspective view of one embodiment of a plating cell 108 .
- the plating cell 108 includes a vessel 130 supported by a base 160 , and coupled to the wall 102 .
- the vessel 130 is adapted to hold one or more plating solutions.
- the vessel 130 may be formed from a low porosity material, such as glass or a low porosity plastic.
- the vessel 130 may be configured to allow external visibility of the one or more plating solutions.
- the shape of the vessel 130 may include a larger top cylindrical section 134 disposed adjacent a smaller conical bottom section 136 forming a cavity 131 .
- Conical section 136 permits a small volume of liquid to be used to reach a tip 139 of a working electrode 138 , while the larger cylindrical top section 134 allows larger volumes to be accommodated, such as required for dilutions.
- the vessel 130 may be configured to analyze test solution volumes from about 20 ml to about 100 ml.
- the working electrode 138 may be rotatably disposed in the vessel 130 and adapted to contact at least some of the test plating solution within the cavity 131 .
- the working electrode 138 includes a metal disk 153 disposed on the working electrode tip 139 .
- the metal disk 153 may include corrosive resistant metals, such as platinum and gold, for example, that can be plated and stripped repeatedly without substantial oxidation or dissolution.
- the metal disk 153 typically has a flat, polished surface between about 2 mm and 7 mm in diameter, and is disposed about flush on the working electrode tip 139 .
- the metal disk 153 is sized at a thickness adapted to sustain one or more plating/stripping processes.
- the working electrode 138 further includes a rotating electrical contact end 148 distal a solution contact end 150 disposed within the cavity 131 .
- the rotating electrical contact 148 may be configured to allow the working electrode 138 to rotate about its longitudinal axis, while providing a continuous electrical contact with the potentiostat 126 (See FIG. 1 ).
- the working electrode 138 is generally mounted in an axial position using a lower and upper bearing 140 , 141 axially aligned with the longitudinal axis of the working electrode 138 and disposed within a plating cell cap 142 .
- the plating cell cap 142 is disposed above the larger section 134 of the vessel 130 to allow the working electrode 138 to extend from the plating cell cap 142 though a lid 144 .
- the lid 144 may include a spray nozzle 146 thereon to dispense water within the cavity 131 from a fluid coupling 151 .
- the plating cell cap 142 includes a motor unit 132 .
- the motor unit 132 to establish relative motion between the working electrode 138 and the test plating solution, the motor unit 132 includes a motor 152 typically used to rotate the working electrode 138 .
- the rotating working electrode 138 may in effect “stir” the test plating solution to allow a fresh supply of test plating solution to encounter the surface of the working electrode 138 . Without such relative motion between the test plating solution and the working electrode 138 , the test plating solution becomes depleted at the surface of the working electrode 138 and the deposition rate obtained will not reflect the correct plating rate for the test plating solution.
- the motor 152 may be positioned within the electronics section 106 (See FIG.
- a shaft 155 of the motor 152 may be coupled to the working electrode 138 via a drive belt system 154 .
- the drive belt system 154 may include a motor pulley 156 attached to the shaft 155 and an electrode pulley 157 mounted between the lower and upper bearings 140 , 141 to the working electrode 138 .
- one or more drive belts 158 couple the motor pulley 156 to the electrode pulley 157 to couple the motor rotation to the working electrode 138 .
- the motor 152 is adapted to provide a rotational rpm range between about 100 rpm to about 4000-rpm and may be adjusted in incremental rpm steps of about less than about 10 rpm per step. While the motor 152 may be a DC motor, other motor types are contemplated.
- FIG. 3 is a perspective view of one embodiment of a base 160 used to couple fluids to the vessel 130 .
- the base 160 is coupled to the vessel 130 via a connection member 162 adapted to allow the base 160 to be separated from the vessel 130 when needed, such as for example, when being cleaned.
- the base. connection 162 may be configured as an interference fit, using the friction between a mating connection 129 (See FIG. 2A ) in the vessel 130 and the connection member 162 to form a seal therebetween, other types of connections are contemplated such as a threaded connection.
- the base 160 is formed of a relatively non-porous material such as ceramics, polymers, e.g., Teflon, and other materials employed to minimize absorption and desorbtion of the test plating solution and/or additives from/to surfaces of the base 160 and the connection member 162 in contact therewith.
- a relatively non-porous material such as ceramics, polymers, e.g., Teflon, and other materials employed to minimize absorption and desorbtion of the test plating solution and/or additives from/to surfaces of the base 160 and the connection member 162 in contact therewith.
- the base 160 includes a counter electrode receptacle 164 adapted to receive a counter electrode 166 .
- the counter electrode 166 may be slidably disposed within the counter electrode receptacle 164 to allow removal of the counter electrode 166 for cleaning or replacement, for example.
- the counter electrode 166 further includes a head member 167 distal the counter electrode receptacle 164 , and in about axial alignment with the working electrode 138 (see FIG. 2A ). In one configuration, the head member 167 may be aligned with the working electrode tip 139 for a more uniform charge distribution, and may be sized somewhat larger than the working electrode area to minimize the current density on the surface of the head member 167 .
- the counter electrode 166 may be formed or plated with materials resistant to corrosion in oxidizing and/or reducing conditions such stainless steel, for example.
- the connection member 162 is made of generally pliable material allowing the receptacle diameter to vary under external pressure, the diameter of the counter electrode receptacle 164 may be sized to seal against the edge of the head member 167 when the connection member 162 is compressed when inserted into the mating opening 129 .
- the counter electrode receptacle 164 may include a bore 181 at a distal end.
- the bore 181 includes an insertion opening 186 to allow the use of a tool, such as a pin, to push on the counter electrode 166 on an end distal head member 167 , to easily remove the counter electrode from the counter electrode receptacle 164 .
- a tool such as a pin
- the base 160 includes one or more fluid ports 127 (only four are shown) adapted to couple fluids between the base 160 and external fluid sources and/or storage facilities, such as syringes, and fluid removal systems for waste fluid removal.
- the fluid ports 127 are adapted to receive external tubing interconnects (not shown) configured to provide a seal between the ports 127 and the external tubing.
- two of the fluid ports 127 converge into a fluid hub 170 to combine at least one additive with the AFS to form a test plating solution (e.g., a test solution).
- a test plating solution e.g., a test solution
- the fluid hub 170 is coupled to the vessel 130 through a chamber 171 described below.
- the fluid ports 127 may be positioned so that the AFS fluid from one fluid port 127 does not flow by density-driven convection into another fluid port 127 . In one aspect, this is done by keeping the fluid port 127 coupled to the higher specific gravity fluid lower than the other fluid ports 127 .
- the fluid port 127 supplying the AFS to the fluid hub 170 may be placed lower relative other fluid ports 127 coupled to the other fluids.
- the fluid paths between fluid ports 127 and hub 170 are angled (i.e., sloped) downward into the more dense solution so that the lighter fluid within it is not exchanged by convention with the solution in the hub 170 .
- the fluid ports 127 may be adapted such that the fluid in the fluid ports 127 may be drawn back into a respective fluid port 127 to form an “air plug” when the one or more fluids are slightly retracted from the fluid hub 170 while it is empty.
- the air plugs keep the fluids isolated from the transport solution in fluid hub 170 and in turn from the test solution.
- the chamber 171 may also be sized a sufficient length to prevent diffusion from an additive in the chamber 171 from reaching the test solution contained in the vessel 130 within the time duration of a test. For example, if a test duration where one hour long, the chamber 171 may be sized so that it takes more than one hour for diffusion from an additive to reach the vessel 130 .
- the fluid ports 127 may be used to control the introduction of fluids into the fluid hub 170 , isolate fluids from the test solution, fluidically impede diffusion between the fluids and the AFS, and fluidically impede diffusion of the fluids into the test solution.
- Serial dilution may be done by simultaneously injecting fluids into fluid hub 170 while at about the same time, drawing them out the opposite end of the coil into a reservoir, such as a syringe pump, which is then used to deliver the mixture.
- a reservoir such as a syringe pump
- the additives and solutions may also be combined by the fluid hub 170 , dispensed into the vessel 130 , mixed by the rotating action of the working electrode 138 , and then drawn back through the fluid hub 170 into a container (not shown) such as a syringe pump to premix a test solution.
- the chamber 171 couples the fluid hub 170 to a liquid port 172 angled upward and about toward the center of the working electrode tip 139 .
- a test plating solution from the liquid port 172 provides a fluid stream to “sweep” the air bubbles from the electrode tip 139 during the filling of vessel 130 . This allows air bubbles to be swept from the downward facing working electrode tip 139 . This is in contrast to the conventional top fill approach where air bubbles may be trapped as the solution level rises past the working electrode.
- a thermal sensor 174 such as a thermistor or other thermal detection device, may be disposed in thermal contact with the counter electrode 166 to provide a temperature measure of the plating solution being tested.
- the thermal sensor 174 may be positioned proximate the underside of the head member 167 to provide improved thermal conduction with the test plating solution.
- the thermal sensor 174 may be coupled to an external temperature sensor circuit (not shown) using the temperature sensor port 177 .
- the potentiostat 126 accomplishes this by varying current between the counter electrode 166 and working electrode tip 139 .
- the potentiostat 126 is switched to work as a galvonostat where the current between the counter electrode 166 and the working electrode tip 139 , is kept proportional to a signal from the controller 109 .
- the voltage potential between the working electrode tip 139 and reference electrode 178 is recorded by the controller 109 .
- the reference electrode 178 may be disposed in a reference electrode chamber 180 .
- the reference electrode chamber 180 is coupled on one end to a reference solution port 182 , and on an opposing end 183 to a z-shaped chamber 185 .
- the z-shaped chamber 185 couples reference solutions (i.e., conductive salt solutions) from the reference electrode chamber 180 to the chamber 171 through a reference fluid junction 188 .
- Sections of the z-shaped chamber 185 may be inclined to prevent density-driven fluid exchange between the reference solution and the test plating solution within the chamber 171 to minimize cross-contamination.
- the chamber 171 may be sized to increase the diffusion time of the electrolyte salts to minimize the effects of diffusion.
- the z-shaped chamber 185 may also include a constricted section 189 sized to impede the reference solution and test plating solution exchange.
- the reference fluid junction 188 is sized to allow communication between the reference solution and the testing solution and to prevent changing junction potential due to clogging.
- the reference solution flow is stopped within the reference electrode chamber 180 and the z-shaped chamber 185 to form a conductive slug between the electrode chamber 180 and testing solution.
- the reference solution is delivered at a lower end of the reference electrode 178 from the reference solution port 182 and is pumped vertically about the reference electrode 178 to assist in the entrainment and removal of air bubbles.
- the chamber 189 may be coupled to the fluid exit port 175 to combine the reference solution with a test plating solution therein. This isolates the reference solution from the test plating solution in the vessel 130 , particularly to stirred solutions within the vessel 130 , while preventing diffused electrolyte salts from being carried into the test plating solution during the addition of additive doses.
- a heat exchanger 190 and thermo-electric module 192 may be disposed in thermal contact with the vessel 130 as illustrated in FIG. 2A and 2B .
- the thermoelectric module 192 may be disposed in contact with a flat area of the vessel 130 .
- the heat exchanger 190 may generally include a coolant input 191 to accept coolant from a coolant valve 114 (see FIG. 1 ).
- the heat exchanger 190 includes one or more of the thermo-electric modules 192 sandwiched between the heat exchanger 190 and the vessel 130 to allow the test plating solution to be brought above, and below, ambient temperature.
- FIG. 5A and 5B illustrate two embodiments 190 A and 190 B of heat exchanger 190 .
- Heat exchangers 190 A and 190 B reflect trade offs between lower cost and a more compact design, respectively.
- the process controller 109 controls the thermo-electric module 192 in a loop process using the thermal data derived from the thermal sensor 174 to maintain a desired test plating solution temperature.
- Embodiments of the invention further provide cyclic or pluse voltammetric methods for measuring the concentration of additives in a plating solution.
- the methods generally include pumping electrolyte solution from the reference electrolyte pump 118 into the reference electrode chamber 180 and z-shaped chamber 185 .
- the vessel 130 is cleaned and a carrier solution (e.g., AFS) along with the sample of the plating solution, and one or more additives, is pumped from the fluid ports 127 through the fluid hub 170 and through the liquid port 172 to form a test solution in the vessel 130 .
- a carrier solution e.g., AFS
- the metal stripping step includes pulsing a potential between the working electrode 138 and the reference electrode 178 between an initial voltage and a metal stripping potential, until the corresponding stripping current is approximately 0 mA/cm.
- the term “pulse” refers to immediately applying a desired potential from a prior potential.
- the potential is pulsed between an initial potential and a cleaning potential to clean the working electrode 138 in the cleaning step.
- a thin layer of metal is then plated onto the surface of the working electrode 138 in a pre-plating step by pulsing to a pre-plating potential.
- the potential is then pulsed back to the initial potential in an equilibration stage.
- the final step is a metal deposition step.
- the deposition step includes scanning to an additive sensitive potential, i.e., a potential where the additive desorbs from the working electrode, holding the additive sensitive potential, and reversing the potential and scanning back to the open circuit potential.
- an additive sensitive potential i.e., a potential where the additive desorbs from the working electrode, holding the additive sensitive potential, and reversing the potential and scanning back to the open circuit potential.
- scanning refers to either linear or pulsed ramping to a desired potential from a prior potential.
- the additive sensitive potential may vary and is dependent on the additive to be measured.
- FIG. 6 illustrates one example of a pulsed ramp waveform 600 used to perform voltammetric organic analysis of a test plating solution with the plating solution analysis device 105 .
- the waveform 600 includes a plurality of anodic and cathodic pulses adapted to provide either a controlled current or potential to the working electrode 138 .
- the waveform 600 is formed from a plurality of varying pulses 604 that correspond to
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Abstract
A method and apparatus for analyzing plating solutions. The apparatus generally includes a plating cell, a reference electrolyte input, one or more external additive pumps, and a process controller. In one embodiment, the plating cell includes a cavity therein having a larger volumetric portion adjacent a smaller volumetric portion adapted to hold one or more solutions therein. The plating cell also includes a base disposed adjacent the bottom of the plating cell and adapted to receive and mix one or more test solutions as part of the plating solution analysis. In one configuration, the base includes electrical ports adapted to connect stimulation signals to a working electrode, counter electrode, and reference electrode disposed within the cell. The base also includes a thermal sensor in thermal contact with test solutions contained within the vessel.
Description
- This application is a divisional of co-pending U.S. patent application Ser. No. 10/287,901, filed Nov. 4, 2002 (APPM/006884). The aforementioned related patent application is herein incorporated by reference.
- 1. Field of the Invention
- Embodiments of the invention generally relate to an apparatus and method for conducting chemical analysis of substrate plating solutions.
- 2. Description of the Related Art
- Metallization of sub-quarter micron sized features is a foundational technology for present and future generations of integrated circuit manufacturing processes. More particularly, in devices such as ultra large scale integration-type of devices, i.e., devices having integrated circuits with more than a million logic gates, the multilevel interconnects that lie at the heart of these devices are generally formed by filling high aspect ratio interconnect features with a conductive material, such as copper or aluminum, for example. Conventionally, deposition techniques such as chemical vapor deposition (CVD) and physical vapor deposition (PVD) have been used to fill interconnect features. However, as interconnect sizes decrease and aspect ratios increase, efficient void-free interconnect feature fill by conventional deposition techniques becomes increasingly difficult. As a result thereof, plating techniques, such as electrochemical plating (ECP) and electroless plating, for example, have emerged as viable processes for filling sub-quarter micron sized high aspect ratio interconnect features in integrated circuit manufacturing processes.
- In an ECP process, for example, sub-quarter micron sized high aspect ratio features formed into the surface of a substrate may be efficiently filled with a conductive material, such as copper. ECP plating processes are generally two stage processes, wherein a seed layer is first formed over the surface and features of the substrate, and then the surface and features of the substrate are exposed to a plating solution, while an electrical bias is simultaneously applied between the substrate and an anode positioned within the plating solution. The plating solution is generally rich in ions to be plated onto the surface of the substrate, and therefore, the application of the electrical bias causes these ions to be reduced and thereby plated onto the seed layer. Furthermore, the plating solution generally contains organic additives, such as, for example, levelers, suppressors, and accelerators configured to control the plating distribution throughout the plating process. These additives are generally maintained within narrow tolerances, so that the repeatability of the plating operation may be maintained.
- Conventional ECP systems generally utilize a cyclic voltammetric stripping (CVS) process to determine the organic additive concentrations in the plating solution. More particularly, three electrodes, a working electrode, a counter electrode, and a reference electrode, are immersed in a cell having a plating solution to be measured therein. The reference electrode and the working electrode are typically connected to a device for measuring the electrical potential difference between the respective electrodes. The reference electrode generally consists of three components, a half-cell electrode, a half-cell electrolyte, and a reference junction. As used herein, the term “half-cell electrode” generally refers to a solid phase, electron-conducting contact within the half-cell electrolyte, at which contact a half-cell oxidation-reduction reaction occurs that establishes a stable potential between the half-cell electrolyte and the working electrode. Direct physical, and therefore electrical contact between the half-cell electrolyte and the sample plating solution is established through the reference junction, which usually consists of a porous ceramic, glass, or plastic plug (e.g. frit), or other device capable of achieving a fluid mechanical leak having pores large enough to allow equal transport of anions and cations. The reference junction is necessary to establish electrical contact with the plating solution, and therefore, the working electrode. Conventionally, the potential of the working electrode is swept through a voltammetric cycle that includes both a metal plating range and a metal stripping range. The potential of the working electrode is swept through at least two reference baths of non-plating quality, and an additional bath where the quality or concentration of organic additives therein is unknown. In this process, an integrated or peak current used during the metal stripping range may be correlated with the quality of the non-plating bath. As such, the integrated or peak current may be compared to the correlation of the non-plating bath, and the quality of the unknown plating bath determined therefrom. The amount of metal deposited during the metal plating cycle and then re-dissolved into the plating bath during the metal stripping cycle generally correlates to the concentration of particular organics in the plating solution. CVS methods generally observe the total copper ions reduced on an electrode over a predetermined potential range. Inasmuch as accelerators or brighteners counteract the suppressors to increase the plating rate, their quantities may be determined from observation using standard addition or dilution titration techniques.
- Generally, measured quantities of additives are injected from the top of the cell into the plating solution using syringes or tubes for testing the plating solution. Unfortunately, as test volumes may vary from a few milliliters to several hundred milliliters, the cell size must be changed accordingly to accommodate the differing test volumes. Further, as tubes or syringes are used to inject the additives into the plating solutions, it is difficult to accurately inject a microliter or less of the additives into the plating solutions as the volume of the additives must be large enough to be dispensed as a droplet. Micro amounts of additives may be injected by immersing the tube tips into the plating solution. However, residual additives contained within the tubes may diffuse out into the reference bath during the test and contaminate the measurement. Accordingly, due to the potential variation of additives due to the imprecise injections, a plating solution under test may be incorrectly analyzed and therefore cause a plating problem that may affect several batches of substrates affecting the plating throughput, and may ultimately increase the cost of production.
- As such, there is a need for an efficient and cost effective apparatus and method for plating solution analysis.
- Embodiments of the invention generally provide an apparatus for analyzing one or more solutions used in a plating process. In one embodiment, the invention provides an apparatus for analyzing plating solutions, wherein the apparatus includes a vessel defining a cavity having a larger volumetric portion adjacent a smaller volumetric portion. Generally, the larger and smaller volumetric portions are adapted to hold solutions. The apparatus further includes a rotating electrode disposed within the cavity, and a fluid injection apparatus coupled to a bottom portion of the vessel adjacent the smaller volumetric region, wherein the fluid injection apparatus is adapted to inject one or more fluids into at least some of the one or more solutions.
- In another embodiment, the invention provides an apparatus for analyzing plating solutions used in a substrate plating process. The apparatus includes a vessel defining a cavity adapted to hold the plating solutions, a rotatable working electrode extending at least partially within the cavity, and a motor disposed on top of the vessel and adapted to rotate the working electrode. The apparatus further includes a base coupled to a lower portion of the cavity adjacent a bottom portion of the vessel, wherein the base includes a plurality of fluid ports for coupling fluids from external fluid sources to the cavity. The base further includes a connection member having an upper surface in communication with at least a portion of the cavity, and a fluid junction disposed within the upper surface of the connection member and adapted to combine fluids from the plurality of fluid ports with one or more test solutions. The apparatus further includes a counter electrode disposed parallel to and higher than the working electrode. The apparatus also includes a reference electrode disposed within the base and adapted to couple reference electrolyte fluid to one or more solutions, and a process controller in communication with the system to control the analysis process thereof.
- In another embodiment, the invention provides a system for analyzing one or more plating solutions used in a substrate plating process. The system-includes a plating cell disposed on a frame having a base thereon. The plating cell includes a conical cavity portion adjacent the base. The base is adapted to couple a plurality of solutions to the plating cell. The system further includes a motor coupled to the plating cell and adapted to rotate a working electrode therein, and a plurality of pumps disposed on the frame and in fluidic communication with the base. The system further includes a heat exchanger disposed on the plating cell and adapted to control temperatures of the one or more plating solutions, and a process controller coupled to at least one of the plating cell, heat exchanger, and pumps, wherein the controller is adapted to control the plating cell, the heat exchanger, and the pumps.
- So that the manner in which the above recited features of the invention are attained can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to the embodiments thereof, which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only typical embodiments of this invention, and are therefore, not to be considered limiting of its scope, for the invention may admit to other equally effective embodiments.
-
FIG. 1 illustrates a perspective view of one embodiment of a plating solution analysis apparatus for use with aspects of the invention. -
FIG. 2A illustrates a perspective view of one embodiment of a plating cell for use with aspects of the invention. -
FIG. 2B illustrates a partial side view of a heat exchanger ofFIG. 2A . -
FIG. 3 illustrates a perspective view of one embodiment of a plating cell base. -
FIG. 4 illustrates a diagrammatic view of one embodiment of a reference electrode configuration for use with aspects of the invention. -
FIGS. 5A and 5B illustrate a simplified view of one embodiment of a heat exchanger used with aspects of the invention. -
FIG. 6 illustrates one type of stimulation waveform for use with aspects of the invention. -
FIG. 1 illustrates a perspective view of a platingsolution analysis device 105 useful in practicing the invention. In one embodiment, the platingsolution analysis device 105 includes aframe 101 that may be divided into functional sections to allow for ease of service and to separate electronic devices from fluids used during testing. The basic sections include atest section 103, arear electronics section 106, and agrab sample compartment 107. In one aspect, the platingsolution analysis device 105 includes aplating cell 108 disposed on theframe 101 within thetest section 103. The platingcell 108 is described below with respect toFIG. 2A . In one configuration, the platingsolution analysis device 105 may include areference electrolyte container 112 used to hold electrolytes, such as potassium chloride or other reference electrolytes. Areference electrolyte pump 118 may be adapted to pump reference electrolytes from thereference electrolyte container 112 to theplating cell 108 at the start of the analysis process. The platingsolution analysis device 105 may also include acell water valve 110 adapted to control the flow of water, such as de-ionized water, from external sources (not shown) through awater regulator 116 into the platingcell 108. One or moreadditive pumps 128 may be disposed on theframe 101 and are adapted to pump solutions, additives, and other testing fluids from external solution containers, such as syringes, through a sample selector valve 120. Platingcell 108 may be fluidly coupled to waste pump/valves 122 disposed on theframe 101 to pump waste fluids therefrom. As illustrated, apotentiostat 126 may be disposed on awall 102 of theframe 101 to shield the potentiostat from any solution splashing. Thepotentiostat 126 may be adapted to control the energy input of the platingcell 108. - In one configuration, the plating
solution analysis device 105 may be coupled to adata processing system 109. Thedata processing system 109 may include a computer or other controller adapted to analyze and display input/output signals of the platingsolution analysis device 105, and may display the data on an output device such as a computer monitor screen. In general, thedata processing system 109 may include a controller, such as programmable logic controller (PLC), computer, or other microprocessor-based controller. Thedata processing system 109 may include a central processing unit (CPU) in electrical communication with a memory, wherein the memory may contain a plating solution testing program that, when executed by the CPU, provide instructions for controlling the platingsolution analysis device 105. The plating solution testing program may use any one of a number of different programming languages. For example, the program code can be written in PLC code (e.g., ladder logic), a higher level language such as C, C++, Java, or a number of other languages. As such, thedata processing system 109 may receive inputs from the various components of the platingsolution analysis device 105 and generate control signals that may be transmitted to the respective components of the platingsolution analysis device 105 for controlling the operation thereof. For example, thedata processing system 109 may be configured to control parameters such as the flow rate and the quantity of plating solution dispensed into the platingcell 108, and the timing and quantity of chemicals added to the plating solution by the additive pumps 128. - The plating
solution analysis device 105 may utilize a plurality of solutions, additives, and other mixtures during testing of a plating solution. An additive free solution (AFS) may be used as the main carrier for the additives during testing. For a copper electroplating solution, for example, the AFS can include copper sulfate, sulfuric acid, chloride ions, and other known AFS solutions. The additives, which may be, for example, levelers, suppressors, accelerators, or other additives known in the art, are typically organic materials that adsorb onto the surface of a substrate being plated. Useful suppressors typically include polyethers, such as polyethylene glycol, or other polymers, such as polypropylene oxides, which adsorb on the substrate surface, slowing down copper deposition in the adsorbed sites. Other useful suppressors typically include sodium benzoate and sodium sulfite, which inhibit the rate of copper deposition on the substrate. Useful accelerators typically include sulfides or disulfides, such as bis(3-sulfopropyl) disulfide, which compete with suppressors for adsorption sites, accelerating copper deposition in adsorbed areas. -
FIG. 2A is a perspective view of one embodiment of aplating cell 108. The platingcell 108 includes avessel 130 supported by abase 160, and coupled to thewall 102. Thevessel 130 is adapted to hold one or more plating solutions. As such, to minimize absorption and desorbtion of the plating solution and/or additives from/to the vessel walls, thevessel 130 may be formed from a low porosity material, such as glass or a low porosity plastic. Thevessel 130 may be configured to allow external visibility of the one or more plating solutions. To provide an extended volumetric operating range, the shape of thevessel 130 may include a larger topcylindrical section 134 disposed adjacent a smallerconical bottom section 136 forming acavity 131.Conical section 136 permits a small volume of liquid to be used to reach atip 139 of a workingelectrode 138, while the larger cylindricaltop section 134 allows larger volumes to be accommodated, such as required for dilutions. For example, thevessel 130 may be configured to analyze test solution volumes from about 20 ml to about 100 ml. - The working
electrode 138 may be rotatably disposed in thevessel 130 and adapted to contact at least some of the test plating solution within thecavity 131. The workingelectrode 138 includes ametal disk 153 disposed on the workingelectrode tip 139. Themetal disk 153 may include corrosive resistant metals, such as platinum and gold, for example, that can be plated and stripped repeatedly without substantial oxidation or dissolution. Themetal disk 153 typically has a flat, polished surface between about 2 mm and 7 mm in diameter, and is disposed about flush on the workingelectrode tip 139. Themetal disk 153 is sized at a thickness adapted to sustain one or more plating/stripping processes. The workingelectrode 138 further includes a rotatingelectrical contact end 148 distal asolution contact end 150 disposed within thecavity 131. The rotatingelectrical contact 148 may be configured to allow the workingelectrode 138 to rotate about its longitudinal axis, while providing a continuous electrical contact with the potentiostat 126 (SeeFIG. 1 ). The workingelectrode 138 is generally mounted in an axial position using a lower andupper bearing electrode 138 and disposed within a platingcell cap 142. In one configuration, the platingcell cap 142 is disposed above thelarger section 134 of thevessel 130 to allow the workingelectrode 138 to extend from the platingcell cap 142 though alid 144. Thelid 144 may include aspray nozzle 146 thereon to dispense water within thecavity 131 from afluid coupling 151. - The plating
cell cap 142 includes a motor unit 132. In one aspect, to establish relative motion between the workingelectrode 138 and the test plating solution, the motor unit 132 includes amotor 152 typically used to rotate the workingelectrode 138. The rotating workingelectrode 138 may in effect “stir” the test plating solution to allow a fresh supply of test plating solution to encounter the surface of the workingelectrode 138. Without such relative motion between the test plating solution and the workingelectrode 138, the test plating solution becomes depleted at the surface of the workingelectrode 138 and the deposition rate obtained will not reflect the correct plating rate for the test plating solution. Themotor 152 may be positioned within the electronics section 106 (SeeFIG. 1 ) to minimize mechanical interference with the platingcell 108 and avoid contact with fluids. To rotate the workingelectrode 138, ashaft 155 of themotor 152 may be coupled to the workingelectrode 138 via adrive belt system 154. Thedrive belt system 154 may include amotor pulley 156 attached to theshaft 155 and anelectrode pulley 157 mounted between the lower andupper bearings electrode 138. In one aspect, one ormore drive belts 158 couple themotor pulley 156 to theelectrode pulley 157 to couple the motor rotation to the workingelectrode 138. In another aspect of the invention, themotor 152 is adapted to provide a rotational rpm range between about 100 rpm to about 4000-rpm and may be adjusted in incremental rpm steps of about less than about 10 rpm per step. While themotor 152 may be a DC motor, other motor types are contemplated. -
FIG. 3 is a perspective view of one embodiment of a base 160 used to couple fluids to thevessel 130.FIGS. 1 and 2 are referenced as needed in the discussion ofFIG. 3 . Thebase 160 is coupled to thevessel 130 via aconnection member 162 adapted to allow the base 160 to be separated from thevessel 130 when needed, such as for example, when being cleaned. While the base.connection 162 may be configured as an interference fit, using the friction between a mating connection 129 (SeeFIG. 2A ) in thevessel 130 and theconnection member 162 to form a seal therebetween, other types of connections are contemplated such as a threaded connection. In one configuration, thebase 160 is formed of a relatively non-porous material such as ceramics, polymers, e.g., Teflon, and other materials employed to minimize absorption and desorbtion of the test plating solution and/or additives from/to surfaces of thebase 160 and theconnection member 162 in contact therewith. - In one aspect, the
base 160 includes acounter electrode receptacle 164 adapted to receive acounter electrode 166. Thecounter electrode 166 may be slidably disposed within thecounter electrode receptacle 164 to allow removal of thecounter electrode 166 for cleaning or replacement, for example. Thecounter electrode 166 further includes ahead member 167 distal thecounter electrode receptacle 164, and in about axial alignment with the working electrode 138 (seeFIG. 2A ). In one configuration, thehead member 167 may be aligned with the workingelectrode tip 139 for a more uniform charge distribution, and may be sized somewhat larger than the working electrode area to minimize the current density on the surface of thehead member 167. Thecounter electrode 166 may be formed or plated with materials resistant to corrosion in oxidizing and/or reducing conditions such stainless steel, for example. As theconnection member 162 is made of generally pliable material allowing the receptacle diameter to vary under external pressure, the diameter of thecounter electrode receptacle 164 may be sized to seal against the edge of thehead member 167 when theconnection member 162 is compressed when inserted into themating opening 129. Thecounter electrode receptacle 164 may include abore 181 at a distal end. Thebore 181 includes aninsertion opening 186 to allow the use of a tool, such as a pin, to push on thecounter electrode 166 on an enddistal head member 167, to easily remove the counter electrode from thecounter electrode receptacle 164. - In one configuration, the
base 160 includes one or more fluid ports 127 (only four are shown) adapted to couple fluids between the base 160 and external fluid sources and/or storage facilities, such as syringes, and fluid removal systems for waste fluid removal. In one configuration, thefluid ports 127 are adapted to receive external tubing interconnects (not shown) configured to provide a seal between theports 127 and the external tubing. As shown, two of thefluid ports 127 converge into afluid hub 170 to combine at least one additive with the AFS to form a test plating solution (e.g., a test solution). Although for clarity only twofluid ports 127 are shown connected to thefluid hub 170, one or morefluid ports 127 may be coupled to thefluid hub 170. Thefluid hub 170 is coupled to thevessel 130 through achamber 171 described below. In one operational aspect, when combining precise small volumes of additives with the AFS, it is important to keep the additives from diffusing or flowing into the AFS or into the test solution until the additives are needed. For this purpose, thefluid ports 127 may be positioned so that the AFS fluid from onefluid port 127 does not flow by density-driven convection into anotherfluid port 127. In one aspect, this is done by keeping thefluid port 127 coupled to the higher specific gravity fluid lower than theother fluid ports 127. For example, if the AFS has a higher specific gravity relative other fluids, thefluid port 127 supplying the AFS to thefluid hub 170 may be placed lower relative otherfluid ports 127 coupled to the other fluids. In another aspect, the fluid paths betweenfluid ports 127 andhub 170 are angled (i.e., sloped) downward into the more dense solution so that the lighter fluid within it is not exchanged by convention with the solution in thehub 170. In another aspect, thefluid ports 127 may be adapted such that the fluid in thefluid ports 127 may be drawn back into a respectivefluid port 127 to form an “air plug” when the one or more fluids are slightly retracted from thefluid hub 170 while it is empty. The air plugs keep the fluids isolated from the transport solution influid hub 170 and in turn from the test solution. Thechamber 171 may also be sized a sufficient length to prevent diffusion from an additive in thechamber 171 from reaching the test solution contained in thevessel 130 within the time duration of a test. For example, if a test duration where one hour long, thechamber 171 may be sized so that it takes more than one hour for diffusion from an additive to reach thevessel 130. Thus, thefluid ports 127 may be used to control the introduction of fluids into thefluid hub 170, isolate fluids from the test solution, fluidically impede diffusion between the fluids and the AFS, and fluidically impede diffusion of the fluids into the test solution. - In one configuration, the
fluid hub 170 may be used to combine fluids to produce mixtures with high dilution ratios. Higher dilution ratios may enable increased measurement precision where small doses of additives or solutions are used. Thefluid ports 127 andfluid hub 170 may be used to combine a sample or additive and simultaneously draw the combined mixture from thevessel 130 into a mixing coil (not shown). The mixing coil may be coupled to afluid port 127, and used to supply the mixture to thevessel 130 during analysis. The mixing coil typically consists of a length of tubing, tightly wound into a coil that may be about five to ten turns long. Drawing solution into and through the mixing coil mixes a combination of fluids, such as is needed for serial dilution. Serial dilution may be done by simultaneously injecting fluids intofluid hub 170 while at about the same time, drawing them out the opposite end of the coil into a reservoir, such as a syringe pump, which is then used to deliver the mixture. Alternatively, the additives and solutions may also be combined by thefluid hub 170, dispensed into thevessel 130, mixed by the rotating action of the workingelectrode 138, and then drawn back through thefluid hub 170 into a container (not shown) such as a syringe pump to premix a test solution. - To help dislodge air bubbles that may be trapped at the surface of the working
electrode tip 139, thechamber 171 couples thefluid hub 170 to aliquid port 172 angled upward and about toward the center of the workingelectrode tip 139. A test plating solution from theliquid port 172 provides a fluid stream to “sweep” the air bubbles from theelectrode tip 139 during the filling ofvessel 130. This allows air bubbles to be swept from the downward facing workingelectrode tip 139. This is in contrast to the conventional top fill approach where air bubbles may be trapped as the solution level rises past the working electrode. - To allow efficient fluid removal after a test, the
connection member 162 may be coupled to afluid waste port 173 using afluid exit port 175 disposed onsurface 169 ofconnection member 162. Thefluid exit port 175 may be configured to rapidly flush waste solutions when required. Thefluid exit port 175 may have an oblong cross section adapted to allow sufficient liquid surface tension to keep the test plating solutions from escaping during a testing process, while having a cross-sectional area sized to allow rapid removal of the testing solutions when desired though thefluid waste port 173. - The base 160 may include a plurality of electrical connections to provide stimulation signals to and from the
base 160 andcontroller 109. Anelectrical connection port 165 is adapted to receive electric signals, such as current from a potentiostat 126 (SeeFIG. 1 ), to power thecounter electrode 166. A replaceable contact pin 168 (SeeFIG. 2A ), illustrated in a disconnected position, when in contact with thecounter electrode 166, conducts an electric bias to thecounter electrode 166 from an external source (not shown). It is contemplated that thecontact pin 168 may be spring-loaded to urge thecontact pin 168 against thecounter electrode 166 to provide lower electrical contact resistance. The base 160 may also include areference electrode port 176 adapted to conduct reference current to a connecting wire described below with reference toFIG. 4 described below. - A
thermal sensor 174, such as a thermistor or other thermal detection device, may be disposed in thermal contact with thecounter electrode 166 to provide a temperature measure of the plating solution being tested. Thethermal sensor 174 may be positioned proximate the underside of thehead member 167 to provide improved thermal conduction with the test plating solution. Thethermal sensor 174 may be coupled to an external temperature sensor circuit (not shown) using thetemperature sensor port 177. - With reference to
FIGS. 3 and 4 , thebase 160 may also include areference electrode port 176 to receive areference electrode 178. Thereference electrode 178 may be a saturated Calomel reference wire electrode (SCE) or silver lined with silver chloride, for example. In one configuration, thereference electrode 178 may be formed from a connectingwire 184, such as a silver/silver chloride wire having asilver chloride layer 187 thereon. The connectingwire 184 is connected to a potentiostat 126 (SeeFIG. 1 ), through thereference electrode port 176. Thepotentiostat 126 keeps the voltage between the workingelectrode tip 139 and thereference electrode 178 constantly proportional to a signal fromcontroller 109. Thepotentiostat 126 accomplishes this by varying current between thecounter electrode 166 and workingelectrode tip 139. In another mode, thepotentiostat 126 is switched to work as a galvonostat where the current between thecounter electrode 166 and the workingelectrode tip 139, is kept proportional to a signal from thecontroller 109. In this mode, the voltage potential between the workingelectrode tip 139 andreference electrode 178 is recorded by thecontroller 109. - As illustrated in
FIG. 4 , thereference electrode 178 may be disposed in areference electrode chamber 180. Thereference electrode chamber 180 is coupled on one end to areference solution port 182, and on anopposing end 183 to a z-shapedchamber 185. The z-shapedchamber 185 couples reference solutions (i.e., conductive salt solutions) from thereference electrode chamber 180 to thechamber 171 through areference fluid junction 188. Sections of the z-shapedchamber 185 may be inclined to prevent density-driven fluid exchange between the reference solution and the test plating solution within thechamber 171 to minimize cross-contamination. Thechamber 171 may be sized to increase the diffusion time of the electrolyte salts to minimize the effects of diffusion. The z-shapedchamber 185 may also include aconstricted section 189 sized to impede the reference solution and test plating solution exchange. Thereference fluid junction 188 is sized to allow communication between the reference solution and the testing solution and to prevent changing junction potential due to clogging. During testing, to minimize the reference solution contamination with the test plating solution, while allowing the reference solution and test plating solution to make electrical contact, the reference solution flow is stopped within thereference electrode chamber 180 and the z-shapedchamber 185 to form a conductive slug between theelectrode chamber 180 and testing solution. In another configuration, the reference solution is delivered at a lower end of thereference electrode 178 from thereference solution port 182 and is pumped vertically about thereference electrode 178 to assist in the entrainment and removal of air bubbles. In an alternative configuration, thechamber 189 may be coupled to thefluid exit port 175 to combine the reference solution with a test plating solution therein. This isolates the reference solution from the test plating solution in thevessel 130, particularly to stirred solutions within thevessel 130, while preventing diffused electrolyte salts from being carried into the test plating solution during the addition of additive doses. - In order to maintain a desired temperature of a test plating solution, a
heat exchanger 190 and thermo-electric module 192 may be disposed in thermal contact with thevessel 130 as illustrated inFIG. 2A and 2B . For improved thermal contact, thethermoelectric module 192 may be disposed in contact with a flat area of thevessel 130. Theheat exchanger 190 may generally include acoolant input 191 to accept coolant from a coolant valve 114 (seeFIG. 1 ). In one aspect, as illustrated inFIG. 2B , theheat exchanger 190 includes one or more of the thermo-electric modules 192 sandwiched between theheat exchanger 190 and thevessel 130 to allow the test plating solution to be brought above, and below, ambient temperature.FIGS. 5A and 5B illustrate twoembodiments heat exchanger 190.Heat exchangers process controller 109 controls the thermo-electric module 192 in a loop process using the thermal data derived from thethermal sensor 174 to maintain a desired test plating solution temperature. - Embodiments of the invention further provide cyclic or pluse voltammetric methods for measuring the concentration of additives in a plating solution. The methods generally include pumping electrolyte solution from the
reference electrolyte pump 118 into thereference electrode chamber 180 and z-shapedchamber 185. Thevessel 130 is cleaned and a carrier solution (e.g., AFS) along with the sample of the plating solution, and one or more additives, is pumped from thefluid ports 127 through thefluid hub 170 and through theliquid port 172 to form a test solution in thevessel 130. A small volume of additives may be added (e.g., 5 micoliters) before the addition of a carrier solution, which is subsequently added to flush the additive into thevessel 130 to create a liquid plug, or gap within thechamber 171. The liquid plug isolates the additive supply from the test plating solution, thus preventing diffusion of the additive from altering test results during testing. The methods further include cycling the potential of the workingelectrode 138 through a series of steps while measuring current to determine the amount of additives present. The methods also includes steps such as a stripping, cleaning, pre-plating, equilibration, and metal deposition step. For example, the metal stripping step includes pulsing a potential between the workingelectrode 138 and thereference electrode 178 between an initial voltage and a metal stripping potential, until the corresponding stripping current is approximately 0 mA/cm. As used herein, the term “pulse” refers to immediately applying a desired potential from a prior potential. Next, the potential is pulsed between an initial potential and a cleaning potential to clean the workingelectrode 138 in the cleaning step. A thin layer of metal is then plated onto the surface of the workingelectrode 138 in a pre-plating step by pulsing to a pre-plating potential. The potential is then pulsed back to the initial potential in an equilibration stage. The final step is a metal deposition step. The deposition step includes scanning to an additive sensitive potential, i.e., a potential where the additive desorbs from the working electrode, holding the additive sensitive potential, and reversing the potential and scanning back to the open circuit potential. As used herein, the term “scanning” refers to either linear or pulsed ramping to a desired potential from a prior potential. The additive sensitive potential may vary and is dependent on the additive to be measured.FIG. 6 illustrates one example of apulsed ramp waveform 600 used to perform voltammetric organic analysis of a test plating solution with the platingsolution analysis device 105. Thewaveform 600 includes a plurality of anodic and cathodic pulses adapted to provide either a controlled current or potential to the workingelectrode 138. In one aspect, thewaveform 600 is formed from a plurality of varyingpulses 604 that correspond to a range of working electrode current or potential. - While the foregoing is directed to embodiments of the invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
Claims (20)
1. A system for analyzing one or more plating solutions used in a substrate plating process, comprising; a plating cell disposed on a frame having a base thereon, wherein the base is disposed adjacent a conical bottom cavity portion of the plating cell and adapted to couple a plurality of solutions to the plating cell; a motor coupled to the plating cell and adapted to rotate a working electrode therein; and a plurality of pumps disposed on the frame and in fluidic communication with the base, the pumps are adapted to pump the one or more solutions to the base, wherein the one or more solutions are combined within the base and plating cell to define a test plating solution to be analyzed.
2. The system of claim 1 , wherein the plating cell comprises an upper cavity portion having a larger volume than the conical cavity portion.
3. The system of claim 1 , wherein the base comprises a plurality of fluid ports thereon adapted to couple one or more fluids from the fluid pumps to the plating cell.
4. The system of claim 3 , wherein the fluid ports are coupled to a fluid junction adapted to combine one or more fluids pumped into the fluid ports into the test plating solution.
5. The system of claim 3 , wherein the fluid ports are coupled to a fluid junction adapted to direct a stream of the one or more solutions toward the working electrode to dislodge air bubbles therefrom during a fill process.
6. The system of claim 5 , further comprising a heat exchanger disposed on the plating cell and adapted to control a temperature of the one or more plating solutions.
7. The system of claim 6 , wherein the heat exchanger comprises a thermoelectric heat module in thermal contact with the plating cell and adapted to control a temperature of the one or more solutions.
8. The system of claim 6 , further comprising a process controller coupled to at least one of the plating cell, the heat exchanger, and the pumps.
9. The system of claim 8 , wherein the process controller is adapted to control a potentiostat to drive one or more stimulus signals between the working electrode and a counter electrode disposed in the base.
10. The system of claim 8 , wherein the process controller is adapted to receive a reference signal from a reference electrode disposed in the base.
11. The system of claim 8 , wherein the process controller is adapted to control at least one operation of the plating cell, the heat exchanger, thermoelectric modules, and the pumps.
12. The system of claim 1 , wherein the base comprises a fluid exit port having an oblong cross-section adapted to provide a desired surface tension to prevent leakage of the one or more plating solutions from the plating cell prior to discharge, and provide a rapid discharge when the one or more plating solutions are discharged from the plating cell.
13. A method of analyzing solutions used in a plating process, comprising: receiving at least one fluid and at least one solution into a fluid hub; mixing the at least one fluid and at least one solution in the fluid hub to form a test solution; delivering the test solution to a vessel; isolating the at least one fluid and at least one solution from each other; providing a liquid plug of the at least one solution between the fluid hub and the test solution contained in the vessel; providing an electrolyte slug in contact with a reference electrode; wherein the electrolyte slug is in contact with the test solution; and testing the test solution.
14. The method of claim 13 , wherein receiving comprises providing a plurality of fluid delivery paths to couple external fluids to the fluid hub, the fluid delivery paths are configured to fluidically inhibit the intrusion of the at least one solution into the at least one fluid.
15. The method of claim 13 , wherein isolating comprises providing an air plug between the at least one fluid and the test solution.
16. The method of claim 13 , wherein providing the electrolyte slug comprises fluidically inhibiting a flow of the electrolyte between the electrolyte and the test solution.
17. The method of claim 16 , wherein providing an electrolyte slug comprises providing a passage for an electrolyte to contact the test solution, wherein the passage is configured to prevent density driven fluid exchange between the electrolyte and the test solution.
18. The method of claim 13 , further comprising combining a plurality of fluids to form a premixed version of the at least one fluid.
19. The method of claim 18 , wherein combining comprises mixing the plurality of fluids in the fluid hub.
20. The method of claim 18 , wherein combining comprises mixing the plurality of fluids in the vessel.
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US10/287,901 US6986835B2 (en) | 2002-11-04 | 2002-11-04 | Apparatus for plating solution analysis |
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US6986835B2 (en) * | 2002-11-04 | 2006-01-17 | Applied Materials Inc. | Apparatus for plating solution analysis |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US20090155936A1 (en) * | 2007-12-12 | 2009-06-18 | Kurt Weiner | Modular flow cell and adjustment system |
US9059223B2 (en) * | 2007-12-12 | 2015-06-16 | Intermolecular, Inc. | Modular flow cell and adjustment system |
US20100200403A1 (en) * | 2009-02-09 | 2010-08-12 | Applied Materials, Inc. | Metrology methods and apparatus for nanomaterial characterization of energy storage electrode structures |
US8192605B2 (en) | 2009-02-09 | 2012-06-05 | Applied Materials, Inc. | Metrology methods and apparatus for nanomaterial characterization of energy storage electrode structures |
Also Published As
Publication number | Publication date |
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US20040084327A1 (en) | 2004-05-06 |
US6986835B2 (en) | 2006-01-17 |
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