US20060180814A1 - Thin film transistor-liquid crystal display and manufacturing method therefor - Google Patents
Thin film transistor-liquid crystal display and manufacturing method therefor Download PDFInfo
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- US20060180814A1 US20060180814A1 US11/397,414 US39741406A US2006180814A1 US 20060180814 A1 US20060180814 A1 US 20060180814A1 US 39741406 A US39741406 A US 39741406A US 2006180814 A1 US2006180814 A1 US 2006180814A1
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- 239000010409 thin film Substances 0.000 title claims description 5
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 4
- 238000004519 manufacturing process Methods 0.000 title abstract description 13
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 43
- 238000002161 passivation Methods 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 238000000151 deposition Methods 0.000 abstract description 20
- 238000005530 etching Methods 0.000 abstract description 19
- 238000000034 method Methods 0.000 abstract description 12
- 239000002184 metal Substances 0.000 abstract description 10
- 230000007547 defect Effects 0.000 abstract description 4
- 230000000873 masking effect Effects 0.000 abstract description 3
- 230000003647 oxidation Effects 0.000 description 9
- 238000007254 oxidation reaction Methods 0.000 description 9
- 239000011810 insulating material Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1288—Multistep manufacturing methods employing particular masking sequences or specially adapted masks, e.g. half-tone mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4908—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET for thin film semiconductor, e.g. gate of TFT
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66765—Lateral single gate single channel transistors with inverted structure, i.e. the channel layer is formed after the gate
Definitions
- the present invention relates to a thin film transistor-liquid crystal display (hereinafter referred to as a TFT-LCD) and a manufacturing method therefor. More particularly, this invention relates to a TFT-LCD and a manufacturing method therefor which etches multi-layer patterns in a single process step.
- a TFT-LCD thin film transistor-liquid crystal display
- TFT-LCD A conventional TFT-LCD is disclosed in Society for Information Display '94 DIGEST, page 263, the content of which is hereby expressly incorporated by reference herein in its entirety. That TFT-LCD will now be described with reference to FIGS. 1 , 2 A- 2 H, and 3 A- 3 H.
- a conventional TFT-LCD which comprises: a substrate 1 , a gate electrode 2 , an anodic oxidation layer 3 , an insulating layer 4 , an amorphous silicon layer 5 , an n+ amorphous silicon layer 6 , a source/drain electrode 9 , a passivation layer 10 , and a pixel electrode layer 13 .
- FIGS. 2A-2H show several cross-sectional views depicting different stages of a fabrication sequence for the conventional TFT-LCD shown in FIG. 1 .
- FIGS. 3A-3H show cell views of layouts corresponding to the steps illustrated in FIGS. 2A-2H , respectively. Some layers are omitted from the cell layout views of FIGS. 3A-3H for purposes of simplification.
- a conventional method for fabricating a TFT-LCD generally comprises the steps of:
- a gate pad 21 forming a gate pad 21 , a gate electrode 2 , and a gate line by depositing and etching a metal layer on a substrate 1 ;
- anodic oxidation layer 3 on both the gate electrode 2 and a portion of the gate pad 21 ;
- a passivation layer 10 having a contact hole 12 by depositing and etching an insulating material
- a pixel electrode 13 by depositing and etching a transparent conductive material.
- An objective of the present invention is to provide a TFT LCD and a manufacturing method therefor which etches multi-layer patterns in a single process step. Accordingly, the present invention not only reduces the number of masking processes but also produces a high quality device with less defects.
- a method for manufacturing a TFT-LCD according to the present invention which comprises the steps of:
- a TFT-LCD includes: a gate electrode and a gate pad that are formed on a substrate; an insulating layer having a contact hole exposing the gate pad; an amorphous silicon layer which is formed on the insulating layer; a source/drain electrode which is formed on the amorphous silicon layer; a passivation layer, having contact holes which are formed on both the source/drain electrode and the gate pad; and a pixel electrode layer formed on the passivation layer.
- FIG. 1 shows a conventional TFT-LCD
- FIGS. 2A-2H show cross sectional views depicting a fabrication sequence for producing a conventional TFT-LCD.
- FIGS. 3A-3H show cell layout views depicting the steps as illustrated in FIGS. 2A-2H respectively.
- FIG. 4 shows a TFT-LCD according to a preferred embodiment of the present invention
- FIGS. 5A-5G are cross sectional views showing sequential steps of a method of producing the TFT-LCD of FIG. 4 ;
- FIGS. 6A-6G are cell layout views of the steps as illustrated in FIGS. 5A-5G .
- FIG. 4 shows a TFT-LCD according to a preferred embodiment of the present invention.
- a gate electrode 22 and a gate pad 21 are provided, each formed on a substrate 20 .
- An anodic oxidation layer 23 is provided which is formed on both the gate electrode 22 and the gate pad 21 .
- An insulating layer 24 is deposited on the anodic oxidation layer 23 , and comprises a contact hole exposing the gate pad 21 .
- An amorphous silicon layer 25 is formed on the insulating layer 24 .
- a source/drain electrode 29 is formed on the amorphous silicon layer 25 .
- a passivation layer 30 made of insulating material is formed on the source/drain electrode 29 and has a contact hole exposing the gate pad 21 .
- FIGS. 5A-5H and 6 A- 6 H A manufacturing method for producing a TFT-LCD according to a preferred embodiment of the present invention is shown in FIGS. 5A-5H and 6 A- 6 H.
- FIGS. 5A-5H show cross-sectional side views of the device during various fabrication stages, and
- FIGS. 6A-6H show corresponding cell layout views. Some layers are omitted from the cell layout views of FIGS. 6A-6H for purposes of simplification.
- a gate metal is deposited on a substrate 20 . Then, the gate electrode 22 and the gate pad 21 are formed by etching the gate metal.
- an anode oxidation layer 23 is formed on both the gate electrode 22 and the gate pad 21 .
- an insulating layer 24 is then deposited on the anode oxidation layer 23 .
- an amorphous silicon layer 25 is deposited on the insulating layer 24 .
- an n+ amorphous silicon layer 26 is deposited on the amorphous silicon layer 25 .
- a source/drain electrode metal 29 is deposited on the n+ amorphous silicon layer 25 .
- the source/drain 29 , the n+ amorphous silicon layer 26 and the amorphous silicon 25 are etched to form a triple layer pattern.
- the source/drain 29 and the n+ amorphous silicon layer 26 are etched to form a source/drain pattern, partially exposing amorphous silicon layer 25 .
- a passivation layer 30 is deposited on the source/drain 29 and the gate pad 21 . Then, the passivation layer 30 is etched, together with portions of anode oxidation layer 23 and insulating layer 24 , to expose both a portion of the source/drain 29 and a portion of the gate pad 21 .
- a pixel electrode 31 is deposited on the passivation layer 30 . Then a pixel electrode pattern is etched.
- this invention not only reduces steps of the masking process but also producing a high quality device with less defects.
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Thin Film Transistor (AREA)
- Liquid Crystal (AREA)
Abstract
This invention relates to a TFT-LCD and a manufacturing method therefor which etches triple layer patterns in a single process step. As a result, the number of masking processes is reduced and a high quality device is produced with less defects. The method comprises the steps of: depositing a gate metal on a substrate; forming and a gate pad a gate electrode by etching the gate metal; forming an insulating layer on both the gate metal and the gate pad; depositing an amorphous silicon layer on the insulating layer; depositing an n+ amorphous silicon layer on the amorphous silicon layer; depositing a source/drain on the n+ amorphous silicon layer; etching the amorphous silicon, the n+ amorphous silicon layer and the source/drain to form a triple layer pattern; etching the n+ amorphous silicon layer and the source/drain to form a source/drain electrode; depositing a passivation layer; etching a passivation layer to expose both a portion of the source/drain electrode and a portion of the gate pad; depositing a pixel electrode layer on the passivation layer; and etching the pixel electrode layer to form a pixel electrode.
Description
- This application is a continuation of U.S. patent application Ser. No. 10/113,491, filed Mar. 29, 2002, by Dong-Gyu Kim, entitled “THIN FILM TRANSISTOR-LIQUID CRYSTAL DISPLAY AND MANUFACTURING METHOD THEREFOR;” which is a continuation of U.S. patent application Ser. No. 08/600,132 filed Feb. 12, 1996, now U.S. Pat. No. 6,406,949, which issued Jun. 18, 2002, which claims priority of Korean Patent Application No. 95-2509 filed Feb. 11, 1995.
- 1. Field of the Invention
- The present invention relates to a thin film transistor-liquid crystal display (hereinafter referred to as a TFT-LCD) and a manufacturing method therefor. More particularly, this invention relates to a TFT-LCD and a manufacturing method therefor which etches multi-layer patterns in a single process step.
- 2. Description of the Related Art
- A conventional TFT-LCD is disclosed in Society for Information Display '94 DIGEST, page 263, the content of which is hereby expressly incorporated by reference herein in its entirety. That TFT-LCD will now be described with reference to FIGS. 1, 2A-2H, and 3A-3H.
- In
FIG. 1 , a conventional TFT-LCD is depicted which comprises: asubstrate 1, agate electrode 2, ananodic oxidation layer 3, aninsulating layer 4, anamorphous silicon layer 5, an n+amorphous silicon layer 6, a source/drain electrode 9, apassivation layer 10, and apixel electrode layer 13. -
FIGS. 2A-2H show several cross-sectional views depicting different stages of a fabrication sequence for the conventional TFT-LCD shown inFIG. 1 .FIGS. 3A-3H show cell views of layouts corresponding to the steps illustrated inFIGS. 2A-2H , respectively. Some layers are omitted from the cell layout views ofFIGS. 3A-3H for purposes of simplification. Referring to those figures, a conventional method for fabricating a TFT-LCD generally comprises the steps of: - forming a
gate pad 21, agate electrode 2, and a gate line by depositing and etching a metal layer on asubstrate 1; - forming a
anodic oxidation layer 3 on both thegate electrode 2 and a portion of thegate pad 21; - depositing an
insulating layer 4; - depositing an
amorphous silicon layer 5 on theinsulating layer 4; - depositing an n+
amorphous silicon layer 6 on theamorphous silicon layer 5; - etching both the
amorphous silicon layer 5 and the n+amorphous silicon layer 6 to form anactive island 56; - partially etching the
insulating layer 4 on thegate pad 21; - forming both a source/
drain electrode 9 and a data line by depositing and etching a metal layer; - forming a
passivation layer 10 having acontact hole 12 by depositing and etching an insulating material; and - forming a
pixel electrode 13 by depositing and etching a transparent conductive material. - The above-described conventional TFT-LCD has many problems.
- First, it reduces production yield. In addition, the etchants used during the etching process steps cause defects in the resulting TFT-LCD.
- Moreover, it is more costly because many etching processes are employed in its fabrication.
- An objective of the present invention is to provide a TFT LCD and a manufacturing method therefor which etches multi-layer patterns in a single process step. Accordingly, the present invention not only reduces the number of masking processes but also produces a high quality device with less defects.
- In order to achieve this objective, a method is provided for manufacturing a TFT-LCD according to the present invention, which comprises the steps of:
- depositing a gate metal on a substrate;
- forming a gate electrode and a gate pad by etching the gate metal;
- depositing an insulating layer;
- depositing an amorphous silicon layer;
- depositing an n+ amorphous silicon layer on the amorphous silicon layer. depositing a source/drain layer on the n+ amorphous silicon layer;
- etching the source/drain layer, the n+ amorphous silicon layer, and the amorphous silicon layer to form a triple layer pattern in a single process step;
- etching the source/drain layer and the n+ amorphous silicon layer to form a source/drain electrode pattern; depositing a passivation layer;
- etching a passivation layer to expose both a portion of the source/drain electrode and a portion of the gate pad;
- depositing a pixel electrode on the passivation layer; and
- etching the pixel electrode;
- A TFT-LCD according to the present invention includes: a gate electrode and a gate pad that are formed on a substrate; an insulating layer having a contact hole exposing the gate pad; an amorphous silicon layer which is formed on the insulating layer; a source/drain electrode which is formed on the amorphous silicon layer; a passivation layer, having contact holes which are formed on both the source/drain electrode and the gate pad; and a pixel electrode layer formed on the passivation layer.
- The present invention will now be described more specifically with reference to the attached drawings, wherein:
FIG. 1 shows a conventional TFT-LCD; -
FIGS. 2A-2H show cross sectional views depicting a fabrication sequence for producing a conventional TFT-LCD. -
FIGS. 3A-3H show cell layout views depicting the steps as illustrated inFIGS. 2A-2H respectively. -
FIG. 4 shows a TFT-LCD according to a preferred embodiment of the present invention; -
FIGS. 5A-5G are cross sectional views showing sequential steps of a method of producing the TFT-LCD ofFIG. 4 ; and -
FIGS. 6A-6G are cell layout views of the steps as illustrated inFIGS. 5A-5G . - A preferred embodiment of the present invention will become apparent from a study of the following detailed description, when viewed in light of the accompanying drawings.
-
FIG. 4 shows a TFT-LCD according to a preferred embodiment of the present invention. Agate electrode 22 and agate pad 21 are provided, each formed on asubstrate 20. Ananodic oxidation layer 23 is provided which is formed on both thegate electrode 22 and thegate pad 21. An insulatinglayer 24 is deposited on theanodic oxidation layer 23, and comprises a contact hole exposing thegate pad 21. Anamorphous silicon layer 25 is formed on the insulatinglayer 24. A source/drain electrode 29 is formed on theamorphous silicon layer 25. Apassivation layer 30 made of insulating material is formed on the source/drain electrode 29 and has a contact hole exposing thegate pad 21. - A manufacturing method for producing a TFT-LCD according to a preferred embodiment of the present invention is shown in
FIGS. 5A-5H and 6A-6H.FIGS. 5A-5H show cross-sectional side views of the device during various fabrication stages, and -
FIGS. 6A-6H show corresponding cell layout views. Some layers are omitted from the cell layout views ofFIGS. 6A-6H for purposes of simplification. - As shown in
FIGS. 5A and 6A , a gate metal is deposited on asubstrate 20. Then, thegate electrode 22 and thegate pad 21 are formed by etching the gate metal. - As shown in
FIG. 5B andFIG. 6B , ananode oxidation layer 23 is formed on both thegate electrode 22 and thegate pad 21. - As shown in
FIG. 5C andFIG. 6C , an insulatinglayer 24 is then deposited on theanode oxidation layer 23. Then anamorphous silicon layer 25 is deposited on the insulatinglayer 24. Then an n+amorphous silicon layer 26 is deposited on theamorphous silicon layer 25. Then a source/drain electrode metal 29 is deposited on the n+amorphous silicon layer 25. - As shown in
FIG. 5D andFIG. 6D , the source/drain 29, the n+amorphous silicon layer 26 and theamorphous silicon 25 are etched to form a triple layer pattern. - As shown in
FIG. 5E andFIG. 6E , the source/drain 29 and the n+amorphous silicon layer 26 are etched to form a source/drain pattern, partially exposingamorphous silicon layer 25. - As shown in
FIGS. 5F and 6F , apassivation layer 30 is deposited on the source/drain 29 and thegate pad 21. Then, thepassivation layer 30 is etched, together with portions ofanode oxidation layer 23 and insulatinglayer 24, to expose both a portion of the source/drain 29 and a portion of thegate pad 21. - At this time, when both the insulating
layer 24 and theanodic oxidation layer 23 on thegate pad 21 are partially etched, portions of the insulatinglayer 24 and theanodic oxidation layer 23 which are on thegate electrode 22 are protected from the etchant because they are covered with the source/drain layer 29. - As shown in
FIG. 5G andFIG. 6G , apixel electrode 31 is deposited on thepassivation layer 30. Then a pixel electrode pattern is etched. - As described above, this invention not only reduces steps of the masking process but also producing a high quality device with less defects.
- It is understood that various other modifications will be apparent to and can be readily made by those skilled in the art without departing from the scope and spirit of this invention. Accordingly, it is not intended that the scope of the claims appended hereto be limited to the description as set forth herein, but rather that the claims be construed as encompassing all the features of patentable novelty that reside in the present invention, including all features that would be treated as equivalents thereof by those skilled in the art which this invention pertains.
Claims (6)
1. A thin film transistor-liquid crystal device (TFT-LCD), the thin film transistor comprising:
a gate electrode and a gate pad formed on a substrate;
a first insulating layer covering the gate electrode and having an opening exposing the gate pad;
an amorphous silicon layer formed on the first insulating layer and having a channel portion;
an n+ amorphous silicon layer formed on the amorphous silicon layer;
a source electrode and a drain electrode formed on the n+ amorphous silicon layer;
a passivation layer covering the source and drain electrodes and having a first contact hole exposing the gate pad and a second contact hole exposing the drain electrode, the passivation layer contacting with a side of the amorphous silicon layer, a side of the n+ amorphous silicon layer and a side of the drain electrode, and a pixel electrode formed on the passivation layer and electrically connected with the drain electrode through the second contact hole.
2. The TFT-LCD of claim 1 , wherein the passivation layer contacts the amorphous silicon layer at the channel portion.
3. The TFT-LCD of claim 1 , wherein the amorphous silicon layer, the n+ amorphous silicon layer and the source and the drain electrodes have substantially a same planar shape except for the channel portion.
4. The TFT-LCD of claim 1 , wherein the first contact hole of the passivation layer is larger than the opening of the first insulating layer.
5. The TFT-LCD of claim 1 , wherein the pixel electrode overlaps the n+ amorphous silicon layer in part.
6. The TFT-LCD of claim 1 , further comprising, a second insulating layer between the gate electrode and the first insulating layer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US11/397,414 US20060180814A1 (en) | 1995-02-11 | 2006-04-03 | Thin film transistor-liquid crystal display and manufacturing method therefor |
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR95-2509 | 1995-02-11 | ||
KR1019950002509A KR0145900B1 (en) | 1995-02-11 | 1995-02-11 | Thin film transistor liquid crystal display elements and its manufacturing method |
US08/600,132 US6406949B1 (en) | 1995-02-11 | 1996-02-12 | Thin film transistor-liquid crystal display and manufacturing method therefor |
US10/113,491 US7022536B2 (en) | 1995-02-11 | 2002-03-29 | Thin film transistor-liquid crystal display and manufacturing method therefor |
US11/397,414 US20060180814A1 (en) | 1995-02-11 | 2006-04-03 | Thin film transistor-liquid crystal display and manufacturing method therefor |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US10/113,491 Continuation US7022536B2 (en) | 1995-02-11 | 2002-03-29 | Thin film transistor-liquid crystal display and manufacturing method therefor |
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US20060180814A1 true US20060180814A1 (en) | 2006-08-17 |
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US08/600,132 Expired - Lifetime US6406949B1 (en) | 1995-02-11 | 1996-02-12 | Thin film transistor-liquid crystal display and manufacturing method therefor |
US09/669,614 Expired - Lifetime US6545292B1 (en) | 1995-02-11 | 2000-09-26 | Thin film transistor-liquid crystal display and manufacturing method thereof |
US10/113,491 Expired - Fee Related US7022536B2 (en) | 1995-02-11 | 2002-03-29 | Thin film transistor-liquid crystal display and manufacturing method therefor |
US11/397,414 Abandoned US20060180814A1 (en) | 1995-02-11 | 2006-04-03 | Thin film transistor-liquid crystal display and manufacturing method therefor |
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US08/600,132 Expired - Lifetime US6406949B1 (en) | 1995-02-11 | 1996-02-12 | Thin film transistor-liquid crystal display and manufacturing method therefor |
US09/669,614 Expired - Lifetime US6545292B1 (en) | 1995-02-11 | 2000-09-26 | Thin film transistor-liquid crystal display and manufacturing method thereof |
US10/113,491 Expired - Fee Related US7022536B2 (en) | 1995-02-11 | 2002-03-29 | Thin film transistor-liquid crystal display and manufacturing method therefor |
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KR (1) | KR0145900B1 (en) |
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US20110037070A1 (en) * | 2009-08-14 | 2011-02-17 | Sung-Ryul Kim | Thin film transistor array panel and method for manufacturing the same |
US20130146864A1 (en) * | 2011-12-12 | 2013-06-13 | Samsung Display Co., Ltd. | Thin film transistor display panel and manufacturing method thereof |
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KR0145900B1 (en) * | 1995-02-11 | 1998-09-15 | 김광호 | Thin film transistor liquid crystal display elements and its manufacturing method |
KR100190023B1 (en) * | 1996-02-29 | 1999-06-01 | 윤종용 | Tft-lcd and fabrication method thereof |
US6949417B1 (en) * | 1997-03-05 | 2005-09-27 | Lg. Philips Lcd Co., Ltd. | Liquid crystal display and method of manufacturing the same |
US6380559B1 (en) * | 1999-06-03 | 2002-04-30 | Samsung Electronics Co., Ltd. | Thin film transistor array substrate for a liquid crystal display |
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JP2001272929A (en) * | 2000-03-24 | 2001-10-05 | Toshiba Corp | Method of manufacturing array substrate for flat display device |
KR100715943B1 (en) * | 2001-01-29 | 2007-05-08 | 삼성전자주식회사 | Liquid crystal display device and method for manufacturing the same |
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US20110037070A1 (en) * | 2009-08-14 | 2011-02-17 | Sung-Ryul Kim | Thin film transistor array panel and method for manufacturing the same |
US20130146864A1 (en) * | 2011-12-12 | 2013-06-13 | Samsung Display Co., Ltd. | Thin film transistor display panel and manufacturing method thereof |
US9178024B2 (en) * | 2011-12-12 | 2015-11-03 | Samsung Display Co., Ltd. | Thin film transistor display panel and manufacturing method thereof |
WO2020248992A1 (en) * | 2019-06-11 | 2020-12-17 | 惠科股份有限公司 | Preparation method for array substrate, array substrate and display panel |
US11961852B2 (en) | 2019-06-11 | 2024-04-16 | HKC Corporation Limited | Manufacture method of array substrate, array substrate, and display panel |
Also Published As
Publication number | Publication date |
---|---|
KR960032058A (en) | 1996-09-17 |
US6406949B1 (en) | 2002-06-18 |
US6545292B1 (en) | 2003-04-08 |
US7022536B2 (en) | 2006-04-04 |
KR0145900B1 (en) | 1998-09-15 |
US20020106840A1 (en) | 2002-08-08 |
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