US20050194094A1 - Window type probe, plasma monitoring device, and plasma processing device - Google Patents
Window type probe, plasma monitoring device, and plasma processing device Download PDFInfo
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- US20050194094A1 US20050194094A1 US10/512,141 US51214104A US2005194094A1 US 20050194094 A1 US20050194094 A1 US 20050194094A1 US 51214104 A US51214104 A US 51214104A US 2005194094 A1 US2005194094 A1 US 2005194094A1
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- 239000000523 sample Substances 0.000 title claims abstract description 133
- 238000012545 processing Methods 0.000 title claims abstract description 55
- 238000012806 monitoring device Methods 0.000 title claims abstract description 19
- 238000001514 detection method Methods 0.000 claims abstract description 96
- 230000002547 anomalous effect Effects 0.000 claims description 50
- 239000011521 glass Substances 0.000 claims description 33
- 238000000034 method Methods 0.000 claims description 33
- 230000008569 process Effects 0.000 claims description 26
- 238000012544 monitoring process Methods 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 4
- 230000007246 mechanism Effects 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 3
- 210000002381 plasma Anatomy 0.000 description 122
- 230000008859 change Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 11
- 230000004907 flux Effects 0.000 description 8
- 239000007789 gas Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 5
- 239000012780 transparent material Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 230000001939 inductive effect Effects 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000009832 plasma treatment Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000004069 differentiation Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 239000004519 grease Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910000833 kovar Inorganic materials 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000004380 ashing Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
Definitions
- the present invention relates to a detection port type probe, a plasma monitoring device, and a plasma processing apparatus and, particularly, to those characterized by a constitution for easily, efficiently, and accurately detecting a fluctuation in plasma in a plasma processing apparatus which performs processing on a substrate using plasma discharge caused by a radio frequency or a high voltage.
- a plasma processing method for processing a substrate by using plasma discharge is widely used for the purpose of plasma CVD, ashing, etching, sputtering, or a surface treatment in the field of semiconductor manufacture.
- a variation in characteristics of electric elements provided on the substrate to be processed is undesirably caused due to insufficiency in stability and reproducibility of generated plasma in the case of applying a high voltage or a radio frequency voltage from a radio frequency power source.
- a detector is inserted in a power line.
- an object of this invention is to directly and conveniently detect a state of plasma generated by an application of a radio frequency or a high voltage.
- FIG. 1 is a theoretical block diagram of this invention, and means for solving the problems according to this invention will be described with reference to FIG. 1 .
- FIG. 1 Reference is made to FIG. 1 .
- a detection port type probe comprises at least, an electroconductive supporting member 5 having an opening formed on at least a part of a surface thereof facing to plasma and a dielectric member 1 having a probe electrode 2 formed on one side thereof positioned at the opening of the electroconductive supporting member 5 .
- detection port type probe Since such detection port type probe is simply mounted on a side wall of a process chamber, it is unnecessary to insert the probe into the process chamber for its installation; therefore, the detection port type probe will not influence on a state of the plasma and enables monitoring of the plasma state with the simple constitution.
- a potential called wall potential is induced on a surface of the dielectric member 1 facing to the plasma due to the plasma generated inside the process chamber, it is possible to monitor the plasma state through a monitoring of a fluctuation in wall potential.
- this invention according to item (1) is characterized by connecting an impedance matching unit 6 to the probe electrode 2 .
- the impedance matching unit 6 such as an amplifier, an impedance converter, and a resistance between the probe electrode 2 and a voltage measurement system.
- this invention is characterized in that the dielectric member 1 defined in item (1) or (2) is made from an optically transparent glass.
- the dielectric member 1 on which the wall potential is induced may not be transparent, but it is preferable to use an optically transparent glass for the dielectric member to make it possible to optically observe reactions and the like inside the process chamber.
- this invention is characterized in that the probe electrode 2 defined in item (3) is made from an optically transparent electroconductive substance.
- the probe electrode 2 In the case where an area of the probe electrode 2 is increased so as to enhance a wall potential detection sensitivity, it is necessary to form the probe electrode 2 from the optically transparent electroconductive substance for the purpose of optically observing reactions and the like occurring in the process chamber by way of the detection port type probe.
- this invention is characterized in that the opening defined in any one of items (1) to (4) formed on the electroconductive supporting member 5 has a function of a viewing port.
- the viewing port function it is possible to use the opening also as a viewing port disposed in the process chamber, thereby simplifying an apparatus constitution.
- this invention is characterized in that a plasma monitoring device uses the detection port type probe defined in any one of items (1) to (5) and comprises a voltage waveform measuring unit for measuring voltage waveform, the voltage waveform measuring unit being disposed at an output end of the detection port type probe.
- the voltage waveform measuring unit for measuring voltage waveforms is disposed at the output end of the detection port type probe, thereby monitoring the plasma state using the voltage waveforms.
- the voltage waveform measuring unit is provided at least with an A/D converter for analog/digital converting voltage waveforms and a data processing unit for monitoring the plasma state by deriving an average waveform, an average voltage, an average amplitude, and the like by processing the voltage waveforms.
- this invention according to item (6) is characterized by comprising a process monitoring mechanism for detecting a stability of plasma by detecting a degree of nonuniformity among cyclical waveform changes of the voltage waveform detected by the voltage waveform measuring unit.
- this invention according to item (6) is characterized by comprising an anomalous discharge monitoring mechanism for detecting plasma anomalous discharge from the change in voltage waveform detected by the voltage waveform measuring unit.
- a plasma processing apparatus of this invention is characterized by comprising the plasma monitoring device defined in any one of items (6) to (8).
- this invention is characterized in that the electroconductive supporting member 5 provided with the opening is a flange constituting a viewing port of a reaction vessel and that the dielectric member 1 is a transparent glass plate for sealing the flange.
- the viewing port i.e. the flange constituting the viewing port
- the necessity for extra space for the probe is eliminated, thereby simplifying the apparatus constitution.
- FIG. 1 is an illustration of a theoretical constitution of this invention.
- FIG. 2 is a schematic block diagram showing a plasma processing apparatus with a detection port type probe according to a first embodiment of this invention.
- FIG. 3 is a schematic block diagram showing the detection port type probe used in the first embodiment of this invention.
- FIG. 4 is an illustration of waveforms detected by the detection port type probe in RF discharge.
- FIG. 5 is an illustration of a waveform detected by the detection port type probe when an input power fluctuates in RF discharge.
- FIG. 6 is an illustration of a waveform detected by the detection port type probe when an RF power source is immediately disconnected after apparatus malfunction in RF discharge.
- FIG. 7 is an illustration of a method of processing the waveform detected by the detection port type probe in the first embodiment of this invention.
- FIG. 8 is a schematic block diagram showing a plasma processing apparatus with an anomalous discharge monitoring device according to a second embodiment of this invention.
- FIG. 9 is an illustration of a waveform detected by a detection port type probe in DC discharge in the second embodiment of this invention.
- FIG. 10 is an illustration of a waveform detected by the detection port type probe in RF discharge in the second embodiment of this invention.
- FIG. 11 is a schematic block diagram showing a plasma processing apparatus with an anomalous discharge monitoring device according to a third embodiment of this invention.
- FIG. 12 is an illustration of an anomalous discharge detection method in the third embodiment of this invention.
- FIG. 13 is a schematic block diagram showing a detection port type probe according to a fourth embodiment of this invention.
- FIGS. 2 to 7 a plasma processing apparatus with a detection port type probe and a detection signal processing method according to a first embodiment of this invention will be described with reference to FIGS. 2 to 7 .
- FIG. 2 Reference is made to FIG. 2 .
- FIG. 2 is a schematic block diagram showing the plasma processing apparatus with the detection port type probe according to the first embodiment of this invention.
- This plasma processing apparatus is constituted of a process chamber 11 having a gas inlet 12 , an outlet 13 , and a probe mounting portion 14 , a parallel flat plate type electrode disposed inside the process chamber and having a lower electrode 15 on which a Si wafer 16 is placed and an upper electrode 17 used also as a shower head for injecting an introduced gas and opposed to the lower electrode 15 , a radio frequency power source 19 for applying an RF power of 13.56 MHz via a matching unit 18 constituted of a blocking condenser or the like and performing an impedance matching with the lower electrode 15 , and an earthed wiring 20 for earthing the upper electrode 17 .
- the probe mounting portion 14 is formed of a flange member used for constituting ordinary viewing ports, and a detection port type probe 30 is attached to the flange member so that a detection output from the detection port type probe 30 is connected to a digital oscilloscope 40 via a coaxial cable.
- An input impedance of the digital oscilloscope 40 is 50 ohms for example.
- FIG. 3 Reference is made to FIG. 3 .
- FIG. 3 is a schematic block diagram showing the detection port type probe according to the first embodiment of this invention
- the detection port type probe 30 is constituted of a glass plate 31 made from an optically transparent glass used for ordinary viewing ports, such as a kovar glass, a probe electrode 32 disposed on outer surface of the glass plate 31 with respect to plasma and formed from ITO or the like, a transparent insulating film 33 made from polyester or the like and insulating-coating a surface of the probe electrode 32 , an ITO shield 34 for electromagnetically shielding the probe electrode 32 disposed on the transparent insulating film 33 , and an impedance converter 35 .
- the probe electrode 32 has no periphery so as to avoid electrical short with the probe mounting potion 14 , and a small opening is formed on each of the ITO shield 34 and the transparent insulating film 33 so that the probe electrode 32 is connected to the impedance converter 35 using the coaxial cable through the small openings.
- the probe mounting portion 14 has a structure that a vacuum sealing is achieved by using an O-ring, grease, or the like as is the case with ordinary viewing ports.
- the probe electrode 32 contacts with the coaxial cable by way of a spring pin, and a contact between the ITO shield 34 and the probe mounting portion 14 is achieved in the same manner.
- the detection port type probe 30 since whole parts of a viewing port portion of the detection port type probe 30 are formed from the transparent materials, the detection port type probe 30 has an innovative and great advantage of functioning as a viewing port of the process chamber of the plasma processing apparatus.
- an RF power is applied between the upper electrode 17 and the lower electrode 15 under a constant pressure to generate plasma 21 between the electrodes, and ions and electrons in the plasma diffuse into a wall of the process chamber 11 due to a density gradient of the plasma.
- a potential called wall potential is induced on the insulator, i.e. on the glass plate 31 in this invention, so as to balance with a plasma potential of the plasma depending on a flux of ions or electrons diffused from the plasma and passing though a sheath formed near the surface of the insulator.
- the wall potential induced on the surface of the glass plate 31 is lower than the plasma potential by a sheath potential and exhibits potential changes in synchronization with an excitation frequency of plasma in the case of radio frequency discharge while exhibiting a constant potential in DC discharge.
- the state of the plasma 21 changes to that of plasma 22 so that the ion flux or the electron flux diffusing into the wall of the process chamber 11 changes delicately depending on the state change, thereby delicately changing the wall potential to be induced on the glass plate 31 which is the dielectric disposed in the process chamber 11 .
- the wall potential waveform is not constant but fluctuates in synchronization with the plasma fluctuation in the DC discharge, while the potential waveform in the RF discharge synchronizes with the plasma excitation frequency to change a waveform distortion or a peak value.
- the plasma changes rapidly to cause electrons having smaller mass to react delicately, so that the electron flux is sharply reduced to change the wall potential delicately and sharply to the plus side.
- the wall potential is changed to the minus side when the electron flux is increased.
- the impedance of the probe electrode 32 with respect to the radio frequency component, not only the excitation frequency, must be large enough for the probe electrode 32 to oscillate perfectly parallelly with the plasma potential.
- a surface area of the glass plate 31 has only to be increased for the purpose of reducing the sheath impedance, and an area of a portion facing to the plasmas 21 and 22 of the glass plate 31 of the detection port type probe 30 of this invention must be sufficiently increased.
- the impedance of the probe electrode 32 constituted of ITO It is not necessary to accurately detect the impedance of the probe electrode 32 constituted of ITO, and, since the probe voltage reaches to the maximum value when the impedance is at infinity, the impedance has only to be adjusted in such a manner that the wall potential of the probe reaches to its maximum value.
- FIG. 4 ( a ) Reference is made to FIG. 4 ( a ).
- Shown in FIG. 4 ( a ) is a voltage waveform output from the detection port type probe 30 when plasma is generated stably with a power supply from the radio frequency power source 18 to the process chamber 11 .
- FIG. 4 ( b ) Reference is made to FIG. 4 ( b ).
- Shown in FIG. 4 ( b ) is a voltage waveform observed in the case of unstable plasma, and, as shown in FIG. 4 ( b ), it is determined that the voltage waveform has a distortion and that a peak value fluctuates cyclically.
- FIG. 5 is an illustration of a waveform detected by the detection port type probe in the case where an input power fluctuates in RF discharge, and it is observed that the detected waveform gradually changes with the fluctuation in input power.
- a peak value in the detected waveform is in proportion to the RF input power.
- the waveform detected by the detection port type probe changes with a cycle of the frequency of the radio frequency power source 19 , and the waveform distortion state, the peak value, and the like reflect plasma characteristics.
- FIG. 6 is an illustration of a waveform detected by the detection port type probe when the RF power source is immediately disconnected after an apparatus malfunction in the RF discharge, wherein the detected waveform reacts to fluctuate on the plus side because the wall potential fluctuates to the minus side due to a rapid diffusion of electrons having smaller mass caused by the immediate disconnection of the RF power source.
- the detection port type probe 30 of this invention catches delicate changes of the ion flux or the electron flux diffused in response to the changes in plasma state, thereby detecting the changes in plasma state reliably, efficiently, and sensitively.
- FIG. 7 ( a ) Reference is made to FIG. 7 ( a ).
- an average value V av (m), an average amplitude V av (pp), and an averaged waveform f av (t) are obtained from waveforms f i (t) detected during cycles for an arbitrary period of time or in an arbitrary number (n) of cycles, the waveforms f i (t) being included among voltage waveforms f(t) detected by the detection port type probe 30 .
- the values obtained under predetermined conditions of a plasma processing apparatus for processing a basic waveform and using the detection port type probe when the plasma is in a stable state are obtained as detected waveform data to be used as basic waveform data.
- a waveform f av0 (t) averaged as a waveform of one cycle, V av0 (pp), and V av0 (m) are then obtained by setting the cycles to an arbitrary period of time or an arbitrary number of the basic waveforms with respect to the basic waveform data.
- the coefficients ⁇ , m, and p are set for every input power in advance, and the average waveform f av (t) of the waveforms detected by the probe during the arbitrary period of time or the arbitrary cycles is obtained to be compared with the reference waveform f av ( 0 ). It is then judged whether the thus-obtained coefficient ⁇ ′ is larger or smaller than the value set in the data processing unit, so that a warning is sent to the plasma apparatus in the case where ⁇ ′ is larger or smaller than the predetermined value.
- the oscillation of plasma might be attributable to problems other than the plasma power input error, such as errors relating to a gas flow ratio and a degree of vacuum; therefore, a warning indicating the unstable state of plasma is transmitted.
- V av (pp) simply deviates from the predetermined value, such deviation is attributable to a mismatching between impedances of the plasma 21 and the radio frequency power source 19 or to an error in input power settings of the radio frequency power source 19 .
- V av (pp) is smaller than the predetermined value, the deviation is attributable to the mismatching with plasma; therefore, a warning is transmitted and a control signal is output to the plasma power source so that matching with the plasma is achieved.
- the detection port type probe of the first embodiment of this invention operates without any difficulty even when an insulating layer is deposited due to a long term plasma treatment insofar as the deposited insulating layer becomes extremely thick, applicability thereof to the plasma processing apparatuses in the production sites is excellent from the standpoint of cost and installation space.
- FIG. 8 Reference is made to FIG. 8 .
- FIG. 8 is a schematic block diagram showing the plasma processing apparatus with an anomalous discharge monitoring device according to the second embodiment of this invention.
- a basic constitution of the plasma processing apparatus is the same as that of the first embodiment except for using a plasma monitoring device 50 in place of the digital oscilloscope 40 in the detection system, and descriptions for the same parts are omitted.
- the plasma monitoring device 50 is constituted of a detection port type probe 30 , an A/D converter 51 , a data processing unit 52 , a filter processing unit 53 , and an anomalous discharge detection unit 54 , and so forth.
- an average waveform f av (t), an average voltage V av (m), an average amplitude V av (pp), and coefficients ⁇ , m, and p, which are described in the first embodiment, are obtained based on detected waveforms.
- a normal process monitoring is the same as that described in the first embodiment, and anomalous discharge detection will hereinafter be described with reference to FIGS. 9 and 10 .
- FIG. 9 is an illustration of a waveform detected by the detection port type probe in the case of anomalous discharge in DC discharge in the second embodiment, wherein a plasma generating power source voltage and a waveform detected by an discharge monitor for detecting anomalous discharge by measuring a fluctuation in current are also shown.
- the detected waveform of the discharge monitor shown in the upper side is increased rapidly in response to the generation of anomalous discharge.
- the detected waveform of the detection port type probe shown in the lower side fluctuates on the plus side instantaneously with a sharp rising and then converges as fluctuating from the minus side to the plus side.
- FIG. 10 is an illustration of a waveform detected by the detection port type probe in the case of anomalous discharge in RF discharge in the second embodiment, wherein a waveform detected by a supersonic wave sensor for detecting a supersonic wave at the time of occurrence of anomalous discharge in RF plasma is also shown.
- the present inventor has proposed a method of specifying a discharge occurrence position by detecting an AE (Acoustic Emission) generated by anomalous discharge with the use of an AE sensor attached to an outer wall of a plasma processing apparatus by taking advantage of the fact that the supersonic wave (AE) is generated when anomalous discharge 24 occurs during plasma processing to diffuse into the outer wall of the plasma processing device (see JP-A-2000-89840, when necessary).
- AE Acoustic Emission
- the detected waveform of the detection port type probe shown in the upper side responds delicately to the anomalous discharge 24 to rapidly fluctuate on the minus side as is the case with the anomalous discharge occurred in the DC plasma shown in FIG. 9 and to cause the wall potential to fluctuate on the minus side, thereby revealing that a diffused electron amount is increased to bring the plasma into an instantaneous suspension state.
- the detected waveform of the supersonic wave sensor shown in the lower side reveals that the supersonic wave detection relating to the anomalous discharge is performed after the change in detected waveform of the detection port type probe of the upper side due to a relationship between a position of the occurrence of the anomalous discharge and a diffusion speed of the supersonic wave diffusing into the outer wall of the process chamber 11 .
- the detected waveform of the detection port type probe 30 is input via the A/D converter 51 , and an RF component at 13.56 MHz of waveform data thereof is eliminated by using a low-pass filter in the filter processing unit 53 , followed by a detection of an anomalous discharge signal in the anomalous discharge detecting unit 54 .
- the detected waveform f(t) is subjected to differentiation so as to obtain a fluctuation amount of the waveform from the detected signal.
- ⁇ df ( t )/ dt holds.
- the wall potential changes sharply to change a value of ⁇ toward the plus side or the minus side in the anomalous discharge detecting unit 54 .
- an anomalous state is detected when a value of f(t) exceeds a certain threshold value to cause the value of ⁇ to be larger than a predetermined value, and it is judged that the anomalous discharge has occurred when the value ⁇ is on the minus side, whereby a warning is sent to the plasma processing apparatus.
- FIG. 11 Reference is made to FIG. 11 .
- FIG. 11 is a schematic block diagram showing a plasma processing apparatus with an anomalous discharge monitoring device according to the third embodiment of this invention.
- a basic apparatus constitution is the same as that of the plasma processing apparatus of the second embodiment shown in FIG. 8 .
- three or more AE sensors 25 , 26 , and 27 for specifying a position at which anomalous discharge has occurred are attached to an outer wall of a process chamber 11 (see, JP-A-2001-370610, when necessary).
- FIG. 12 Reference is made to FIG. 12 .
- FIG. 12 is an illustration of a method for detecting anomalous discharge in the third embodiment of this invention. It is judged whether or not the anomalous discharge has occurred from a waveform shown in the upper side, which is detected by the detection port type probe 30 , by employing the above-described method, and, when it is judged that the anomalous discharge 24 has occurred, operation of the AE sensors 25 to 27 for determining the position of occurrence of the anomalous discharge 24 starts.
- delay times T 0 , T 1 , and T 2 due to differences in distance between the occurrence position of the anomalous discharge 24 and earthing positions of the AE sensors 25 to 27 are obtained from three waveforms detected by the three AE sensors 25 to 27 , and then the occurrence position of the anomalous discharge 24 is specified by a theory similar to that for specifying the epicenter of an earthquake from the delay times T 0 , T 1 , and T 2 .
- FIG. 13 Reference is made to FIG. 13 .
- FIG. 13 is a schematic block diagram showing the detection port type probe of the fourth embodiment of this invention, wherein the detection port type probe has a basic constitution which is similar to that of the detection port type probe 30 shown in FIG. 3 and is constituted of a glass plate 31 made from the optically transparent kovar glass or the like which is used for ordinary viewing ports, a probe electrode 32 disposed on an outer surface of the glass plate 31 with respect to the process chamber and made from ITO or the like, a transparent insulating film 33 insulating coating a surface of the probe electrode 32 and made from polyester or the like, an ITO shield 34 disposed on the transparent insulating film 33 so as to electromagnetically shield the probe electrode 32 , and an impedance converter 35 .
- the detection port type probe has a basic constitution which is similar to that of the detection port type probe 30 shown in FIG. 3 and is constituted of a glass plate 31 made from the optically transparent kovar glass or the like which is used for ordinary viewing ports, a probe electrode 32 disposed on an outer surface of the glass plate 31
- an optically transparent deposition-free glass plate 36 is disposed at a position which is closer to a plasma generation region than the glass plate 31 is, and it is possible to prevent occurrence of contamination on a surface of the glass plate 31 constituting the detection port type probe owing to the deposition-free glass plate 36 .
- the probe electrode 32 has no periphery so as to prevent an occurrence of electrical short with a probe mounting portion 14 , and a small opening is formed on each of the ITO shield 34 and the transparent insulating film 33 so that the probe electrode 32 is connected to the impedance converter 35 through the small openings by way of a coaxial cable.
- the probe mounting portion 14 has a structure that a vacuum sealing is achieved by using an O-ring, grease, or the like as is the case of ordinary viewing ports.
- the detection port type probe since a viewing port portion of the detection port type probe and the deposition-free glass plate 36 are formed from the transparent materials, the detection port type probe has the innovative and great advantage of functioning also as a viewing port of the process chamber of a plasma processing apparatus.
- the deposition-free glass plate 36 has only to be replaced in the case of contamination by reaction products of plasma processing, a necessity for replacement and cleaning of the glass plate 31 of the detection port type probe is eliminated.
- the parallel flat plate electrode type plasma processing apparatus is used by way of example for describing the plasma processing apparatus in the above embodiments
- the constitution of the plasma processing apparatus is not limited to that of the parallel flat plate electrode type plasma processing apparatus, and the invention is applicable to plasma processing apparatuses of various constitutions.
- the detection port type probe is disposed at one position of the outer wall of the process chamber in the above embodiments, the detection port type probe may be disposed at a plurality of positions on the process chamber outer wall.
- the detection port type probe may be attached to an existing plasma processing apparatus.
- the existing plasma processing apparatus has a viewing port
- the probe potential measurement device is not limited to the digital oscilloscope, and any device such as a sampling oscilloscope and a frequency analyzer may be used insofar as it is capable of measuring the radio frequency voltage.
- the dielectric used for inducing the wall potential in the detection port type probe is the substrate-like glass plate in the above embodiments, the dielectric is not limited to the substrate-like glass plate.
- the glass plate is used as a material for inducing the wall potential in the detection port type probe in the above embodiments
- the material for inducing the wall potential is not limited thereto, and a dielectric substrate such as a sapphire substrate may be used as the dielectric substrate insofar as it is dielectric.
- the whole part of the detection port type probe is formed from the transparent materials so that the detection port type probe functions also as the viewing port, it is unnecessary to form the whole part from the transparent materials.
- the probe electrode may be formed from Al or Au.
- the function of viewing port is achieved by using a small disk-like electrode or a circular electrode as the probe electrode.
- the function of the viewing port is not always necessary, and at least a part of the detection port type probe may be formed from a non-transparent material in the case where the viewing port function is unnecessary.
- the probe electrode of the detection port type probe may not necessarily have the disk-like shape, and it is needless to say that a glass plate to which a wire electrode is attached functions as a probe.
- the detection port type probe and the plasma monitoring device of this invention it is possible to determine changes in plasma state through measurements of the average wall potential and the potential oscillation wave form as well as to conveniently detect an anomalous state or the like of anomalous discharge.
- the detection port type probe can be used as a viewing port, it is possible to automatically detect a condition of a plasma processing apparatus. Therefore, the detection port type probe is suitably used for plasma processing apparatuses capable of preventing defective products by automatically stopping and controlling plasma.
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Abstract
This invention relates to a detection port type probe, a plasma monitoring device, and a plasma processing apparatus. It is intended to directly and conveniently detect a state of plasma generated by an application of a radio frequency or a high voltage, and the detection port type probe is provided with at least an electroconductive supporting member (5) having an opening formed on at least a part of a surface thereof facing to plasma and a dielectric member (1) having a probe electrode (2) formed on one side thereof positioned at the opening of the electroconductive supporting member (5).
Description
- The present invention relates to a detection port type probe, a plasma monitoring device, and a plasma processing apparatus and, particularly, to those characterized by a constitution for easily, efficiently, and accurately detecting a fluctuation in plasma in a plasma processing apparatus which performs processing on a substrate using plasma discharge caused by a radio frequency or a high voltage.
- At present, a plasma processing method for processing a substrate by using plasma discharge is widely used for the purpose of plasma CVD, ashing, etching, sputtering, or a surface treatment in the field of semiconductor manufacture.
- In plasma processing steps of the plasma treatment, a variation in characteristics of electric elements provided on the substrate to be processed is undesirably caused due to insufficiency in stability and reproducibility of generated plasma in the case of applying a high voltage or a radio frequency voltage from a radio frequency power source.
- In order to solve the above problem, there is a demand for accurately detecting determinations of the reproducibility and the stability of the plasma.
- At present, various studies are conducted so as to meet such demand, and a fluctuation in plasma is detected through a detection of changes in plasma emission intensity, changes in voltage and current of a power source, changes in plasma impedance, or changes in higher harmonic wave in the case of anomalous discharge and through detections of a fluctuation in gas pressure and changes in emission spectrum in the case of the determinations of the reproducibility and the stability of plasma, i.e. determination of the fluctuation in plasma.
- Further, in order to monitor the changes in voltage or current from the RF power source or the changes in plasma impedance, a detector is inserted in a power line.
- However, the above-described known methods involve drawbacks relating to influences on plasma characteristics, efficiency, and convenience and raises problems of increased cost and necessity for extra space for installing the components.
- Therefore, an object of this invention is to directly and conveniently detect a state of plasma generated by an application of a radio frequency or a high voltage.
-
FIG. 1 is a theoretical block diagram of this invention, and means for solving the problems according to this invention will be described with reference toFIG. 1 . - Reference is made to
FIG. 1 . - (1) This invention is characterized in that a detection port type probe comprises at least, an electroconductive supporting
member 5 having an opening formed on at least a part of a surface thereof facing to plasma and adielectric member 1 having aprobe electrode 2 formed on one side thereof positioned at the opening of the electroconductive supportingmember 5. - Since such detection port type probe is simply mounted on a side wall of a process chamber, it is unnecessary to insert the probe into the process chamber for its installation; therefore, the detection port type probe will not influence on a state of the plasma and enables monitoring of the plasma state with the simple constitution.
- More specifically, since a potential called wall potential is induced on a surface of the
dielectric member 1 facing to the plasma due to the plasma generated inside the process chamber, it is possible to monitor the plasma state through a monitoring of a fluctuation in wall potential. In order to stabilize the detected potential, it is preferable to shield theprobe electrode 2 with anelectromagnetic shielding member 4 via an insulating member 3. - (2) Also, this invention according to item (1) is characterized by connecting an impedance matching
unit 6 to theprobe electrode 2. - In order to detect the voltage from the
probe electrode 2, it is necessary to connect the impedance matchingunit 6 such as an amplifier, an impedance converter, and a resistance between theprobe electrode 2 and a voltage measurement system. - (3) Also, this invention is characterized in that the
dielectric member 1 defined in item (1) or (2) is made from an optically transparent glass. - The
dielectric member 1 on which the wall potential is induced may not be transparent, but it is preferable to use an optically transparent glass for the dielectric member to make it possible to optically observe reactions and the like inside the process chamber. - (4) Also, this invention is characterized in that the
probe electrode 2 defined in item (3) is made from an optically transparent electroconductive substance. - In the case where an area of the
probe electrode 2 is increased so as to enhance a wall potential detection sensitivity, it is necessary to form theprobe electrode 2 from the optically transparent electroconductive substance for the purpose of optically observing reactions and the like occurring in the process chamber by way of the detection port type probe. - (5) Also, this invention is characterized in that the opening defined in any one of items (1) to (4) formed on the electroconductive supporting
member 5 has a function of a viewing port. - Thus, owing to the viewing port function, it is possible to use the opening also as a viewing port disposed in the process chamber, thereby simplifying an apparatus constitution.
- (6) Also, this invention is characterized in that a plasma monitoring device uses the detection port type probe defined in any one of items (1) to (5) and comprises a voltage waveform measuring unit for measuring voltage waveform, the voltage waveform measuring unit being disposed at an output end of the detection port type probe.
- In the case of constituting the plasma monitoring device using the detection port type probe, the voltage waveform measuring unit for measuring voltage waveforms is disposed at the output end of the detection port type probe, thereby monitoring the plasma state using the voltage waveforms.
- The voltage waveform measuring unit is provided at least with an A/D converter for analog/digital converting voltage waveforms and a data processing unit for monitoring the plasma state by deriving an average waveform, an average voltage, an average amplitude, and the like by processing the voltage waveforms.
- (7) Also, this invention according to item (6) is characterized by comprising a process monitoring mechanism for detecting a stability of plasma by detecting a degree of nonuniformity among cyclical waveform changes of the voltage waveform detected by the voltage waveform measuring unit.
- Thus, by detecting the nonuniformity among cyclical waveform changes of the voltage waveforms, it is possible to accurately monitor the plasma state during the plasma processing.
- (8) Also, this invention according to item (6) is characterized by comprising an anomalous discharge monitoring mechanism for detecting plasma anomalous discharge from the change in voltage waveform detected by the voltage waveform measuring unit.
- Thus, by detecting plasma anomalous discharge from the change in voltage waveform detected by the voltage waveform measuring unit, it is possible to monitor an anomalous discharge occurs suddenly during the plasma processing.
- (9) Also, a plasma processing apparatus of this invention is characterized by comprising the plasma monitoring device defined in any one of items (6) to (8).
- It is possible to perform plasma processing with higher reproducibility by providing the plasma processing apparatus with the plasma monitoring device.
- (10) Also, this invention according to item (9) is characterized in that the electroconductive supporting
member 5 provided with the opening is a flange constituting a viewing port of a reaction vessel and that thedielectric member 1 is a transparent glass plate for sealing the flange. - Since it is possible to use the viewing port, i.e. the flange constituting the viewing port, for mounting the plasma monitoring device on an existing plasma processing apparatus, the necessity for extra space for the probe is eliminated, thereby simplifying the apparatus constitution.
-
FIG. 1 is an illustration of a theoretical constitution of this invention. -
FIG. 2 is a schematic block diagram showing a plasma processing apparatus with a detection port type probe according to a first embodiment of this invention. -
FIG. 3 is a schematic block diagram showing the detection port type probe used in the first embodiment of this invention. -
FIG. 4 is an illustration of waveforms detected by the detection port type probe in RF discharge. -
FIG. 5 is an illustration of a waveform detected by the detection port type probe when an input power fluctuates in RF discharge. -
FIG. 6 is an illustration of a waveform detected by the detection port type probe when an RF power source is immediately disconnected after apparatus malfunction in RF discharge. -
FIG. 7 is an illustration of a method of processing the waveform detected by the detection port type probe in the first embodiment of this invention. -
FIG. 8 is a schematic block diagram showing a plasma processing apparatus with an anomalous discharge monitoring device according to a second embodiment of this invention. -
FIG. 9 is an illustration of a waveform detected by a detection port type probe in DC discharge in the second embodiment of this invention. -
FIG. 10 is an illustration of a waveform detected by the detection port type probe in RF discharge in the second embodiment of this invention. -
FIG. 11 is a schematic block diagram showing a plasma processing apparatus with an anomalous discharge monitoring device according to a third embodiment of this invention. -
FIG. 12 is an illustration of an anomalous discharge detection method in the third embodiment of this invention. -
FIG. 13 is a schematic block diagram showing a detection port type probe according to a fourth embodiment of this invention. - Hereinafter, a plasma processing apparatus with a detection port type probe and a detection signal processing method according to a first embodiment of this invention will be described with reference to FIGS. 2 to 7.
- Reference is made to
FIG. 2 . -
FIG. 2 is a schematic block diagram showing the plasma processing apparatus with the detection port type probe according to the first embodiment of this invention. - This plasma processing apparatus is constituted of a
process chamber 11 having agas inlet 12, anoutlet 13, and aprobe mounting portion 14, a parallel flat plate type electrode disposed inside the process chamber and having alower electrode 15 on which aSi wafer 16 is placed and anupper electrode 17 used also as a shower head for injecting an introduced gas and opposed to thelower electrode 15, a radiofrequency power source 19 for applying an RF power of 13.56 MHz via amatching unit 18 constituted of a blocking condenser or the like and performing an impedance matching with thelower electrode 15, and anearthed wiring 20 for earthing theupper electrode 17. - The
probe mounting portion 14 is formed of a flange member used for constituting ordinary viewing ports, and a detectionport type probe 30 is attached to the flange member so that a detection output from the detectionport type probe 30 is connected to adigital oscilloscope 40 via a coaxial cable. - An input impedance of the
digital oscilloscope 40 is 50 ohms for example. - Reference is made to
FIG. 3 . -
FIG. 3 is a schematic block diagram showing the detection port type probe according to the first embodiment of this invention, and the detectionport type probe 30 is constituted of aglass plate 31 made from an optically transparent glass used for ordinary viewing ports, such as a kovar glass, aprobe electrode 32 disposed on outer surface of theglass plate 31 with respect to plasma and formed from ITO or the like, a transparentinsulating film 33 made from polyester or the like and insulating-coating a surface of theprobe electrode 32, anITO shield 34 for electromagnetically shielding theprobe electrode 32 disposed on the transparentinsulating film 33, and animpedance converter 35. - In this case, the
probe electrode 32 has no periphery so as to avoid electrical short with theprobe mounting potion 14, and a small opening is formed on each of theITO shield 34 and the transparentinsulating film 33 so that theprobe electrode 32 is connected to theimpedance converter 35 using the coaxial cable through the small openings. - The
probe mounting portion 14 has a structure that a vacuum sealing is achieved by using an O-ring, grease, or the like as is the case with ordinary viewing ports. - In this case, the
probe electrode 32 contacts with the coaxial cable by way of a spring pin, and a contact between the ITOshield 34 and theprobe mounting portion 14 is achieved in the same manner. - As described above, since whole parts of a viewing port portion of the detection
port type probe 30 are formed from the transparent materials, the detectionport type probe 30 has an innovative and great advantage of functioning as a viewing port of the process chamber of the plasma processing apparatus. - Hereinafter, a theory of monitoring a plasma state by the detection port type probe will be described.
- Reference is made to
FIG. 2 again. - After introducing a reaction gas from the
gas inlet 12 into theprocess chamber 11, an RF power is applied between theupper electrode 17 and thelower electrode 15 under a constant pressure to generateplasma 21 between the electrodes, and ions and electrons in the plasma diffuse into a wall of theprocess chamber 11 due to a density gradient of the plasma. - Since a current density of the diffused ions and electrons depends on the density of the plasma itself, when an insulator is disposed at a part of the
process chamber 11, a potential called wall potential is induced on the insulator, i.e. on theglass plate 31 in this invention, so as to balance with a plasma potential of the plasma depending on a flux of ions or electrons diffused from the plasma and passing though a sheath formed near the surface of the insulator. - The wall potential induced on the surface of the
glass plate 31 is lower than the plasma potential by a sheath potential and exhibits potential changes in synchronization with an excitation frequency of plasma in the case of radio frequency discharge while exhibiting a constant potential in DC discharge. - However, in the case where the
plasma 21 fluctuates and oscillates due to a factor such as a fluctuation in power source and a fluctuation in gas pressure, the state of theplasma 21 changes to that ofplasma 22 so that the ion flux or the electron flux diffusing into the wall of theprocess chamber 11 changes delicately depending on the state change, thereby delicately changing the wall potential to be induced on theglass plate 31 which is the dielectric disposed in theprocess chamber 11. - Therefore, the wall potential waveform is not constant but fluctuates in synchronization with the plasma fluctuation in the DC discharge, while the potential waveform in the RF discharge synchronizes with the plasma excitation frequency to change a waveform distortion or a peak value.
- In the case of occurrence of a sudden change such as anomalous discharge, the plasma changes rapidly to cause electrons having smaller mass to react delicately, so that the electron flux is sharply reduced to change the wall potential delicately and sharply to the plus side. In turn, the wall potential is changed to the minus side when the electron flux is increased.
- Therefore, when the wall potential changes, a potential change responsive to the plasma change is induced on the
probe electrode 32 disposed on the sideface which is not facing to the plasma of theglass plate 31 disposed in theprocess chamber 11 by an electrostatic induction. - By measuring the induced potential and processing potential data thereof, it is possible to detect changes in plasma state such as the peak value, the distortion state, and the like of the wall potential, and, by using the plasma state changes as an index, it is possible to efficiently and conveniently perform monitoring and determination of stability, reproducibility, changes, and the like of the plasma.
- Note that, since the wall potential induced on the surface of the
glass plate 31 of the detectionport type probe 30 depends on the impedance of the sheath formed around theglass plate 31 and the impedance of the probe itself, the impedance of theprobe electrode 32 with respect to the radio frequency component, not only the excitation frequency, must be large enough for theprobe electrode 32 to oscillate perfectly parallelly with the plasma potential. - That is to say, it is necessary to keep the sheath impedance small and the impedance of the detection port type probe itself large.
- A surface area of the
glass plate 31 has only to be increased for the purpose of reducing the sheath impedance, and an area of a portion facing to theplasmas glass plate 31 of the detectionport type probe 30 of this invention must be sufficiently increased. - It is not necessary to accurately detect the impedance of the
probe electrode 32 constituted of ITO, and, since the probe voltage reaches to the maximum value when the impedance is at infinity, the impedance has only to be adjusted in such a manner that the wall potential of the probe reaches to its maximum value. - Next, voltage waveforms measured by using the detection port type probe of this invention will be described with reference to FIGS. 4 to 6.
- Reference is made to
FIG. 4 (a). - Shown in
FIG. 4 (a) is a voltage waveform output from the detectionport type probe 30 when plasma is generated stably with a power supply from the radiofrequency power source 18 to theprocess chamber 11. - Referring to
FIG. 4 (a), time (second) and a voltage are indicated by the horizontal axis and the vertical axis, and it is revealed that a stable voltage waveform is repeated with a cycle of 73 nanoseconds (73 ns=7.3×10−8 s) in accordance with the frequency of 13.56 MHz, thereby making it possible to measure an oscillation waveform and an amplitude of the plasma. - Reference is made to
FIG. 4 (b). - Shown in
FIG. 4 (b) is a voltage waveform observed in the case of unstable plasma, and, as shown inFIG. 4 (b), it is determined that the voltage waveform has a distortion and that a peak value fluctuates cyclically. - Reference is made to
FIG. 5 . -
FIG. 5 is an illustration of a waveform detected by the detection port type probe in the case where an input power fluctuates in RF discharge, and it is observed that the detected waveform gradually changes with the fluctuation in input power. - In this case, it is confirmed that a peak value in the detected waveform is in proportion to the RF input power. The waveform detected by the detection port type probe changes with a cycle of the frequency of the radio
frequency power source 19, and the waveform distortion state, the peak value, and the like reflect plasma characteristics. - Reference is made to
FIG. 6 . -
FIG. 6 is an illustration of a waveform detected by the detection port type probe when the RF power source is immediately disconnected after an apparatus malfunction in the RF discharge, wherein the detected waveform reacts to fluctuate on the plus side because the wall potential fluctuates to the minus side due to a rapid diffusion of electrons having smaller mass caused by the immediate disconnection of the RF power source. - Thus, the detection
port type probe 30 of this invention catches delicate changes of the ion flux or the electron flux diffused in response to the changes in plasma state, thereby detecting the changes in plasma state reliably, efficiently, and sensitively. - Next, a method of processing a waveform detected by the detection port type probe in the first embodiment of this invention will be described with reference to
FIG. 7 . - Reference is made to
FIG. 7 (a). - As shown in
FIG. 7 (a), an average value Vav(m), an average amplitude Vav(pp), and an averaged waveform fav(t) are obtained from waveforms fi(t) detected during cycles for an arbitrary period of time or in an arbitrary number (n) of cycles, the waveforms fi(t) being included among voltage waveforms f(t) detected by the detectionport type probe 30. - In this case, the averaged waveform fav(t) is obtained from
f av(t)=Σf i(t)/n. - Reference is made to
FIG. 7 (b). - Next, based on the averaged waveform fav(t), the average value Vav(m) and the amplitude Vav(pp) are obtained.
- In order to use, as an index, ratios of distortions of the average value Vav(m), the amplitude Vav(pp), and the average waveform fav(t) to those obtained in a stable plasma state, the values obtained under predetermined conditions of a plasma processing apparatus for processing a basic waveform and using the detection port type probe when the plasma is in a stable state are obtained as detected waveform data to be used as basic waveform data.
- A waveform fav0(t) averaged as a waveform of one cycle, Vav0(pp), and Vav0(m) are then obtained by setting the cycles to an arbitrary period of time or an arbitrary number of the basic waveforms with respect to the basic waveform data.
- Further, since the above values change in accordance with input power for generating plasma, a coefficient for the input power is obtained to be stored as an initial setting value.
- Here, when the waveform to be detected is f(t), the distortion ratio α as the index for indicating a degree of a distortion of a probe waveform undergoing the plasma treatment with respect to the basic waveform can be expressed as
α=f av(t)/f av0(t),
and a proportion of a higher harmonic wave component and the degree of distortion of the waveform are detected by the above expression. - Likewise, Vav(m) and Vav0(pp) can be defined as follows, wherein Vav0(m) and Vav0(pp) are reference values and m and p are coefficients:
m=V av(m)/V av0(m); and
p=V av(pp)/V av0(pp). - By the use of the coefficients α, m, and p, it is possible to detect a fluctuation in size and a state of oscillation of the waveform detected by the probe.
- More specifically, the coefficients α, m, and p are set for every input power in advance, and the average waveform fav(t) of the waveforms detected by the probe during the arbitrary period of time or the arbitrary cycles is obtained to be compared with the reference waveform fav(0). It is then judged whether the thus-obtained coefficient α′ is larger or smaller than the value set in the data processing unit, so that a warning is sent to the plasma apparatus in the case where α′ is larger or smaller than the predetermined value.
- For instance, in the case where the distortion ratio α′ or Vav(pp) is the predetermined value and Vav(m) is not the predetermined value, the oscillation of plasma might be attributable to problems other than the plasma power input error, such as errors relating to a gas flow ratio and a degree of vacuum; therefore, a warning indicating the unstable state of plasma is transmitted.
- Also, when the Vav(pp) simply deviates from the predetermined value, such deviation is attributable to a mismatching between impedances of the
plasma 21 and the radiofrequency power source 19 or to an error in input power settings of the radiofrequency power source 19. In the case where Vav(pp) is smaller than the predetermined value, the deviation is attributable to the mismatching with plasma; therefore, a warning is transmitted and a control signal is output to the plasma power source so that matching with the plasma is achieved. - In turn, in the case where the Vav(pp) is larger than the predetermined value, the deviation is attributable to the error in input power setting of the radio
frequency power source 19; therefore, a warning of a setting error is transmitted. - Since the detection port type probe of the first embodiment of this invention operates without any difficulty even when an insulating layer is deposited due to a long term plasma treatment insofar as the deposited insulating layer becomes extremely thick, applicability thereof to the plasma processing apparatuses in the production sites is excellent from the standpoint of cost and installation space.
- Next, with reference to FIGS. 8 to 10, a plasma processing apparatus according to a second embodiment of this invention, which is provided with the above-described detection port type probe and detects a fluctuation in plasma, anomalous discharge, and so forth, will be described.
- Reference is made to
FIG. 8 . -
FIG. 8 is a schematic block diagram showing the plasma processing apparatus with an anomalous discharge monitoring device according to the second embodiment of this invention. A basic constitution of the plasma processing apparatus is the same as that of the first embodiment except for using aplasma monitoring device 50 in place of thedigital oscilloscope 40 in the detection system, and descriptions for the same parts are omitted. - The
plasma monitoring device 50 is constituted of a detectionport type probe 30, an A/D converter 51, adata processing unit 52, afilter processing unit 53, and an anomalousdischarge detection unit 54, and so forth. - By the use of the
data processing unit 52, an average waveform fav(t), an average voltage Vav(m), an average amplitude Vav(pp), and coefficients α, m, and p, which are described in the first embodiment, are obtained based on detected waveforms. - A normal process monitoring is the same as that described in the first embodiment, and anomalous discharge detection will hereinafter be described with reference to
FIGS. 9 and 10 . - Reference is made to
FIG. 9 . -
FIG. 9 is an illustration of a waveform detected by the detection port type probe in the case of anomalous discharge in DC discharge in the second embodiment, wherein a plasma generating power source voltage and a waveform detected by an discharge monitor for detecting anomalous discharge by measuring a fluctuation in current are also shown. - The detected waveform of the discharge monitor shown in the upper side is increased rapidly in response to the generation of anomalous discharge.
- In turn, the detected waveform of the detection port type probe shown in the lower side fluctuates on the plus side instantaneously with a sharp rising and then converges as fluctuating from the minus side to the plus side. This indicates that, because of the instantaneous suspension is caused upon occurrence of the anomalous discharge to sharply increase the diffusing electron flux, the wall potential fluctuated to the minus side instantaneously and in reverse to the fluctuation at the time of the power source disconnection shown in
FIG. 6 and then converged with the comparatively gradual change owing to the power source control. - It will be understood from the detected waveform of the detection port type probe that the waveform is quicker in rising than that of the discharge monitor and responses delicately and sensitively.
- Reference is made to
FIG. 10 . -
FIG. 10 is an illustration of a waveform detected by the detection port type probe in the case of anomalous discharge in RF discharge in the second embodiment, wherein a waveform detected by a supersonic wave sensor for detecting a supersonic wave at the time of occurrence of anomalous discharge in RF plasma is also shown. - In addition, the present inventor has proposed a method of specifying a discharge occurrence position by detecting an AE (Acoustic Emission) generated by anomalous discharge with the use of an AE sensor attached to an outer wall of a plasma processing apparatus by taking advantage of the fact that the supersonic wave (AE) is generated when
anomalous discharge 24 occurs during plasma processing to diffuse into the outer wall of the plasma processing device (see JP-A-2000-89840, when necessary). - The detected waveform of the detection port type probe shown in the upper side responds delicately to the
anomalous discharge 24 to rapidly fluctuate on the minus side as is the case with the anomalous discharge occurred in the DC plasma shown inFIG. 9 and to cause the wall potential to fluctuate on the minus side, thereby revealing that a diffused electron amount is increased to bring the plasma into an instantaneous suspension state. - Note that an RF component has been eliminated from the detected waveform of the detection port type probe.
- In turn, the detected waveform of the supersonic wave sensor shown in the lower side reveals that the supersonic wave detection relating to the anomalous discharge is performed after the change in detected waveform of the detection port type probe of the upper side due to a relationship between a position of the occurrence of the anomalous discharge and a diffusion speed of the supersonic wave diffusing into the outer wall of the
process chamber 11. - Next, a method of detecting anomalous discharge will be briefly described.
- The detected waveform of the detection
port type probe 30 is input via the A/D converter 51, and an RF component at 13.56 MHz of waveform data thereof is eliminated by using a low-pass filter in thefilter processing unit 53, followed by a detection of an anomalous discharge signal in the anomalousdischarge detecting unit 54. - Then, the detected waveform f(t) is subjected to differentiation so as to obtain a fluctuation amount of the waveform from the detected signal. When the value obtained by the differentiation is represented by β,
β=df(t)/dt
holds. - It is possible to detect a fluctuation state of the waveform by monitoring β.
- As shown in
FIGS. 10 and 6 , in the case of the anomalous discharge or the instantaneous suspension of power supply, the wall potential changes sharply to change a value of β toward the plus side or the minus side in the anomalousdischarge detecting unit 54. - Accordingly, an anomalous state is detected when a value of f(t) exceeds a certain threshold value to cause the value of β to be larger than a predetermined value, and it is judged that the anomalous discharge has occurred when the value β is on the minus side, whereby a warning is sent to the plasma processing apparatus.
- Further, since the changes in current supply are relevant to the size of anomalous discharge, it is possible to estimate the size of the anomalous discharge from a peak value V(pp) of the waveform.
- Hereinafter, a third embodiment of this invention which uses a unit for determining a position of anomalous discharge will be described with reference to
FIG. 11 . - Reference is made to
FIG. 11 . -
FIG. 11 is a schematic block diagram showing a plasma processing apparatus with an anomalous discharge monitoring device according to the third embodiment of this invention. A basic apparatus constitution is the same as that of the plasma processing apparatus of the second embodiment shown inFIG. 8 . - In the third embodiment, three or
more AE sensors - In this case, three AE sensors are shown.
- Reference is made to
FIG. 12 . -
FIG. 12 is an illustration of a method for detecting anomalous discharge in the third embodiment of this invention. It is judged whether or not the anomalous discharge has occurred from a waveform shown in the upper side, which is detected by the detectionport type probe 30, by employing the above-described method, and, when it is judged that theanomalous discharge 24 has occurred, operation of theAE sensors 25 to 27 for determining the position of occurrence of theanomalous discharge 24 starts. - Next, delay times T0, T1, and T2 due to differences in distance between the occurrence position of the
anomalous discharge 24 and earthing positions of theAE sensors 25 to 27 are obtained from three waveforms detected by the threeAE sensors 25 to 27, and then the occurrence position of theanomalous discharge 24 is specified by a theory similar to that for specifying the epicenter of an earthquake from the delay times T0, T1, and T2. - Since the judgment of the anomalous state is performed by the use of the detected waveform of the detection
port type probe 30, an erroneous judgment of judging a mechanical vibration detected by the AE sensors as the anomalous discharge is prevented. - Further, since the position specifying operation by the AE sensors is performed after confirming the occurrence of anomalous discharge based on the detected waveform of the detection
port type probe 30, wasteful actuation of the AE sensors is prevented. - Hereinafter, a detection port type probe of a fourth embodiment of this invention will be described with reference to
FIG. 13 . - Reference is made to
FIG. 13 . -
FIG. 13 is a schematic block diagram showing the detection port type probe of the fourth embodiment of this invention, wherein the detection port type probe has a basic constitution which is similar to that of the detectionport type probe 30 shown inFIG. 3 and is constituted of aglass plate 31 made from the optically transparent kovar glass or the like which is used for ordinary viewing ports, aprobe electrode 32 disposed on an outer surface of theglass plate 31 with respect to the process chamber and made from ITO or the like, a transparent insulatingfilm 33 insulating coating a surface of theprobe electrode 32 and made from polyester or the like, anITO shield 34 disposed on the transparent insulatingfilm 33 so as to electromagnetically shield theprobe electrode 32, and animpedance converter 35. - In the fourth embodiment, an optically transparent deposition-
free glass plate 36 is disposed at a position which is closer to a plasma generation region than theglass plate 31 is, and it is possible to prevent occurrence of contamination on a surface of theglass plate 31 constituting the detection port type probe owing to the deposition-free glass plate 36. - In this case, too, the
probe electrode 32 has no periphery so as to prevent an occurrence of electrical short with aprobe mounting portion 14, and a small opening is formed on each of theITO shield 34 and the transparent insulatingfilm 33 so that theprobe electrode 32 is connected to theimpedance converter 35 through the small openings by way of a coaxial cable. - Further, the
probe mounting portion 14 has a structure that a vacuum sealing is achieved by using an O-ring, grease, or the like as is the case of ordinary viewing ports. - In this case, too, since a viewing port portion of the detection port type probe and the deposition-
free glass plate 36 are formed from the transparent materials, the detection port type probe has the innovative and great advantage of functioning also as a viewing port of the process chamber of a plasma processing apparatus. - Since the deposition-
free glass plate 36 has only to be replaced in the case of contamination by reaction products of plasma processing, a necessity for replacement and cleaning of theglass plate 31 of the detection port type probe is eliminated. - Note that detection sensitivity is slightly degraded by the provision of the deposition-
free glass plate 36. - The foregoing is the description of the embodiments of this invention, and the constitutions and conditions described in the embodiments do not limit the invention and are subject to various modifications.
- For instance, though the parallel flat plate electrode type plasma processing apparatus is used by way of example for describing the plasma processing apparatus in the above embodiments, the constitution of the plasma processing apparatus is not limited to that of the parallel flat plate electrode type plasma processing apparatus, and the invention is applicable to plasma processing apparatuses of various constitutions.
- Also, though the detection port type probe is disposed at one position of the outer wall of the process chamber in the above embodiments, the detection port type probe may be disposed at a plurality of positions on the process chamber outer wall.
- Though the description is made on condition that the mounting portion of the detection port type probe is secured in the process chamber in the above embodiments, the detection port type probe may be attached to an existing plasma processing apparatus.
- That is, in the case where the existing plasma processing apparatus has a viewing port, it is possible to simply form the detection port type probe by attaching an optically transparent electroconductive sheet such as an ITO sheet as the electrode on the side facing to the air of the glass of the viewing port.
- Further, though the device which is capable of measuring the radio frequency voltage, such as the digital oscilloscope having the input impedance of 50 Ω, is used for the measurement of probe potential, the probe potential measurement device is not limited to the digital oscilloscope, and any device such as a sampling oscilloscope and a frequency analyzer may be used insofar as it is capable of measuring the radio frequency voltage.
- Though the dielectric used for inducing the wall potential in the detection port type probe is the substrate-like glass plate in the above embodiments, the dielectric is not limited to the substrate-like glass plate.
- Though the glass plate is used as a material for inducing the wall potential in the detection port type probe in the above embodiments, the material for inducing the wall potential is not limited thereto, and a dielectric substrate such as a sapphire substrate may be used as the dielectric substrate insofar as it is dielectric.
- Though the whole part of the detection port type probe is formed from the transparent materials so that the detection port type probe functions also as the viewing port, it is unnecessary to form the whole part from the transparent materials. For example, the probe electrode may be formed from Al or Au.
- In this case, the function of viewing port is achieved by using a small disk-like electrode or a circular electrode as the probe electrode.
- The function of the viewing port is not always necessary, and at least a part of the detection port type probe may be formed from a non-transparent material in the case where the viewing port function is unnecessary.
- The probe electrode of the detection port type probe may not necessarily have the disk-like shape, and it is needless to say that a glass plate to which a wire electrode is attached functions as a probe.
- As described in the foregoing, by the use of the detection port type probe and the plasma monitoring device of this invention, it is possible to determine changes in plasma state through measurements of the average wall potential and the potential oscillation wave form as well as to conveniently detect an anomalous state or the like of anomalous discharge. Particularly, since the detection port type probe can be used as a viewing port, it is possible to automatically detect a condition of a plasma processing apparatus. Therefore, the detection port type probe is suitably used for plasma processing apparatuses capable of preventing defective products by automatically stopping and controlling plasma.
Claims (10)
1. A detection port type probe characterized by comprising at least an electroconductive supporting member having an opening formed on at least a part of a surface thereof facing to plasma and a dielectric member having a probe electrode formed on one side thereof positioned at the opening of the electroconductive supporting member.
2. The detection port type probe according to claim 1 , characterized by connecting an impedance matching unit to the probe electrode.
3. The detection port type probe according to claim 1 , characterized in that the dialectic member is made from an optically transparent glass.
4. The detection port type probe according to claim 3 , characterized in that the probe electrode is made from an optically transparent electroconductive substance.
5. The detection port type probe according to claim 1 , characterized in that the opening formed on the electroconductive supporting member has a function of a viewing port.
6. A plasma monitoring device using the detection port type probe defined in claim 1 , characterized in that a voltage waveform measuring unit for measuring a voltage waveform is disposed at an output end of the detection port type probe.
7. The plasma monitoring device according to claim 6 , characterized by comprising a process monitoring mechanism for detecting a stability of plasma by detecting a degree of nonuniformity among cyclical waveform changes of the voltage waveform detected by the voltage waveform measuring unit.
8. The plasma monitoring device according to claim 6 , characterized by comprising an anomalous discharge monitoring mechanism for detecting anomalous discharge of plasma from the changes in voltage waveform detected by the voltage waveform measuring unit.
9. A plasma processing apparatus characterized by comprising the plasma monitoring device defined in claim 6 .
10. The plasma processing apparatus according to claim 9 , characterized in that the electroconductive supporting member provided with the opening is a flange constituting a viewing port of a reaction vessel, and that the dielectric member is a transparent glass plate for sealing the flange.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2002-122240 | 2002-04-24 | ||
JP2002122240A JP3773189B2 (en) | 2002-04-24 | 2002-04-24 | Window probe, plasma monitoring apparatus, and plasma processing apparatus |
PCT/JP2003/004016 WO2003092059A1 (en) | 2002-04-24 | 2003-03-28 | Window type probe, plasma monitoring device, and plasma processing device |
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US20050194094A1 true US20050194094A1 (en) | 2005-09-08 |
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US10/512,141 Abandoned US20050194094A1 (en) | 2002-04-24 | 2003-03-28 | Window type probe, plasma monitoring device, and plasma processing device |
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---|---|
US (1) | US20050194094A1 (en) |
EP (1) | EP1531490A4 (en) |
JP (1) | JP3773189B2 (en) |
KR (1) | KR100582013B1 (en) |
CN (1) | CN1647252A (en) |
TW (1) | TWI256278B (en) |
WO (1) | WO2003092059A1 (en) |
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US8698037B2 (en) | 2005-09-30 | 2014-04-15 | Kla-Tencor Corporation | Methods of and apparatuses for maintenance, diagnosis, and optimization of processes |
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US10170336B1 (en) | 2017-08-04 | 2019-01-01 | Applied Materials, Inc. | Methods for anisotropic control of selective silicon removal |
US10186428B2 (en) | 2016-11-11 | 2019-01-22 | Applied Materials, Inc. | Removal methods for high aspect ratio structures |
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US10256112B1 (en) | 2017-12-08 | 2019-04-09 | Applied Materials, Inc. | Selective tungsten removal |
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US10283324B1 (en) | 2017-10-24 | 2019-05-07 | Applied Materials, Inc. | Oxygen treatment for nitride etching |
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US10319603B2 (en) | 2016-10-07 | 2019-06-11 | Applied Materials, Inc. | Selective SiN lateral recess |
US10354889B2 (en) | 2017-07-17 | 2019-07-16 | Applied Materials, Inc. | Non-halogen etching of silicon-containing materials |
US10354843B2 (en) | 2012-09-21 | 2019-07-16 | Applied Materials, Inc. | Chemical control features in wafer process equipment |
US10403507B2 (en) | 2017-02-03 | 2019-09-03 | Applied Materials, Inc. | Shaped etch profile with oxidation |
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US10424485B2 (en) | 2013-03-01 | 2019-09-24 | Applied Materials, Inc. | Enhanced etching processes using remote plasma sources |
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US10504754B2 (en) | 2016-05-19 | 2019-12-10 | Applied Materials, Inc. | Systems and methods for improved semiconductor etching and component protection |
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US11164730B2 (en) * | 2017-09-05 | 2021-11-02 | Tokyo Electron Limited | Plasma probe device and plasma processing apparatus |
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US11721527B2 (en) | 2019-01-07 | 2023-08-08 | Applied Materials, Inc. | Processing chamber mixing systems |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2005277397A (en) * | 2004-02-26 | 2005-10-06 | Tokyo Electron Ltd | Plasma processing apparatus |
US7292045B2 (en) * | 2004-09-04 | 2007-11-06 | Applied Materials, Inc. | Detection and suppression of electrical arcing |
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US20090308734A1 (en) * | 2008-06-17 | 2009-12-17 | Schneider Automation Inc. | Apparatus and Method for Wafer Level Arc Detection |
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JPWO2023033067A1 (en) | 2021-08-31 | 2023-03-09 | ||
KR102570106B1 (en) * | 2021-09-17 | 2023-08-24 | 주식회사 플라즈맵 | Apparatus for plasma surface treatment |
WO2023043235A1 (en) * | 2021-09-17 | 2023-03-23 | 주식회사 플라즈맵 | Apparatus for plasma surface treatment |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5173443A (en) * | 1987-02-13 | 1992-12-22 | Northrop Corporation | Method of manufacture of optically transparent electrically conductive semiconductor windows |
US5576629A (en) * | 1994-10-24 | 1996-11-19 | Fourth State Technology, Inc. | Plasma monitoring and control method and system |
US5942889A (en) * | 1997-06-20 | 1999-08-24 | Applied Materials, Inc. | Capacitive probe for in situ measurement of wafer DC bias voltage |
US6356097B1 (en) * | 1997-06-20 | 2002-03-12 | Applied Materials, Inc. | Capacitive probe for in situ measurement of wafer DC bias voltage |
US6562186B1 (en) * | 1998-08-31 | 2003-05-13 | Tokyo Electron Limited | Apparatus for plasma processing |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4842683A (en) * | 1986-12-19 | 1989-06-27 | Applied Materials, Inc. | Magnetic field-enhanced plasma etch reactor |
JP2859308B2 (en) * | 1989-08-02 | 1999-02-17 | 三井化学株式会社 | How to measure plasma parameters |
JPH03185825A (en) * | 1989-12-15 | 1991-08-13 | Hitachi Ltd | Semiconductor wafer processing equipment |
US5339039A (en) * | 1992-09-29 | 1994-08-16 | Arizona Board Of Regents On Behalf Of The University Of Arizona | Langmuir probe system for radio frequency excited plasma processing system |
JP3045444B2 (en) * | 1993-10-20 | 2000-05-29 | 東京エレクトロン株式会社 | Plasma processing apparatus and control method therefor |
FR2738984B1 (en) * | 1995-09-19 | 1997-11-21 | Centre Nat Rech Scient | METHOD AND DEVICE FOR MEASURING AN ION FLOW IN A PLASMA |
JPH09139377A (en) * | 1995-11-13 | 1997-05-27 | Fujitsu Ltd | Terminal detection of dry etching and its method |
JP3497091B2 (en) * | 1998-07-23 | 2004-02-16 | 名古屋大学長 | Method for controlling high frequency power for plasma generation and plasma generator |
JP4619468B2 (en) * | 1999-03-25 | 2011-01-26 | 株式会社東芝 | Plasma processing method, plasma processing apparatus, and plasma monitoring apparatus |
US6409896B2 (en) * | 1999-12-01 | 2002-06-25 | Applied Materials, Inc. | Method and apparatus for semiconductor wafer process monitoring |
JP2001203097A (en) * | 2000-01-17 | 2001-07-27 | Canon Inc | Apparatus and method of plasma density measurement and plasma processing apparatus and method by using it |
JP4633881B2 (en) * | 2000-02-21 | 2011-02-16 | 株式会社日立製作所 | Plasma processing apparatus and processing method using the same |
JP3631212B2 (en) * | 2002-02-14 | 2005-03-23 | ファブソリューション株式会社 | Abnormal discharge detection apparatus and method |
-
2002
- 2002-04-24 JP JP2002122240A patent/JP3773189B2/en not_active Expired - Lifetime
-
2003
- 2003-02-26 TW TW092104091A patent/TWI256278B/en not_active IP Right Cessation
- 2003-03-28 WO PCT/JP2003/004016 patent/WO2003092059A1/en active IP Right Grant
- 2003-03-28 EP EP03747203A patent/EP1531490A4/en not_active Withdrawn
- 2003-03-28 CN CNA038088932A patent/CN1647252A/en active Pending
- 2003-03-28 KR KR1020047016922A patent/KR100582013B1/en active IP Right Grant
- 2003-03-28 US US10/512,141 patent/US20050194094A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5173443A (en) * | 1987-02-13 | 1992-12-22 | Northrop Corporation | Method of manufacture of optically transparent electrically conductive semiconductor windows |
US5576629A (en) * | 1994-10-24 | 1996-11-19 | Fourth State Technology, Inc. | Plasma monitoring and control method and system |
US5942889A (en) * | 1997-06-20 | 1999-08-24 | Applied Materials, Inc. | Capacitive probe for in situ measurement of wafer DC bias voltage |
US6356097B1 (en) * | 1997-06-20 | 2002-03-12 | Applied Materials, Inc. | Capacitive probe for in situ measurement of wafer DC bias voltage |
US6562186B1 (en) * | 1998-08-31 | 2003-05-13 | Tokyo Electron Limited | Apparatus for plasma processing |
Cited By (120)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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US7974067B2 (en) | 2005-09-06 | 2011-07-05 | Renesas Electronics Corporation | Plasma processing apparatus and method of suppressing abnormal discharge therein |
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US20100243470A1 (en) * | 2007-11-30 | 2010-09-30 | Panasonic Corporation | Plasma treatment apparatus and plasma treatment method |
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US9129779B2 (en) | 2008-07-07 | 2015-09-08 | Lam Research Corporation | Processing system for detecting in-situ arcing events during substrate processing |
US20120316834A1 (en) * | 2008-07-07 | 2012-12-13 | Jean-Paul Booth | Passive capacitively-coupled electrostatic (cce) probe method for detecting plasma instabilities in a plasma processing chamber |
US9153421B2 (en) * | 2008-07-07 | 2015-10-06 | Lam Research Corporation | Passive capacitively-coupled electrostatic (CCE) probe method for detecting plasma instabilities in a plasma processing chamber |
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US10283321B2 (en) | 2011-01-18 | 2019-05-07 | Applied Materials, Inc. | Semiconductor processing system and methods using capacitively coupled plasma |
US10354843B2 (en) | 2012-09-21 | 2019-07-16 | Applied Materials, Inc. | Chemical control features in wafer process equipment |
US11264213B2 (en) | 2012-09-21 | 2022-03-01 | Applied Materials, Inc. | Chemical control features in wafer process equipment |
US11024486B2 (en) | 2013-02-08 | 2021-06-01 | Applied Materials, Inc. | Semiconductor processing systems having multiple plasma configurations |
US10256079B2 (en) | 2013-02-08 | 2019-04-09 | Applied Materials, Inc. | Semiconductor processing systems having multiple plasma configurations |
US10424485B2 (en) | 2013-03-01 | 2019-09-24 | Applied Materials, Inc. | Enhanced etching processes using remote plasma sources |
US10465294B2 (en) | 2014-05-28 | 2019-11-05 | Applied Materials, Inc. | Oxide and metal removal |
US10593523B2 (en) | 2014-10-14 | 2020-03-17 | Applied Materials, Inc. | Systems and methods for internal surface conditioning in plasma processing equipment |
US10796922B2 (en) | 2014-10-14 | 2020-10-06 | Applied Materials, Inc. | Systems and methods for internal surface conditioning assessment in plasma processing equipment |
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US11637002B2 (en) | 2014-11-26 | 2023-04-25 | Applied Materials, Inc. | Methods and systems to enhance process uniformity |
US10573496B2 (en) | 2014-12-09 | 2020-02-25 | Applied Materials, Inc. | Direct outlet toroidal plasma source |
US10224210B2 (en) | 2014-12-09 | 2019-03-05 | Applied Materials, Inc. | Plasma processing system with direct outlet toroidal plasma source |
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US10468276B2 (en) | 2015-08-06 | 2019-11-05 | Applied Materials, Inc. | Thermal management systems and methods for wafer processing systems |
US11158527B2 (en) | 2015-08-06 | 2021-10-26 | Applied Materials, Inc. | Thermal management systems and methods for wafer processing systems |
US10424463B2 (en) | 2015-08-07 | 2019-09-24 | Applied Materials, Inc. | Oxide etch selectivity systems and methods |
US10424464B2 (en) | 2015-08-07 | 2019-09-24 | Applied Materials, Inc. | Oxide etch selectivity systems and methods |
US11476093B2 (en) | 2015-08-27 | 2022-10-18 | Applied Materials, Inc. | Plasma etching systems and methods with secondary plasma injection |
US10504700B2 (en) | 2015-08-27 | 2019-12-10 | Applied Materials, Inc. | Plasma etching systems and methods with secondary plasma injection |
US10522371B2 (en) | 2016-05-19 | 2019-12-31 | Applied Materials, Inc. | Systems and methods for improved semiconductor etching and component protection |
US11735441B2 (en) | 2016-05-19 | 2023-08-22 | Applied Materials, Inc. | Systems and methods for improved semiconductor etching and component protection |
US10504754B2 (en) | 2016-05-19 | 2019-12-10 | Applied Materials, Inc. | Systems and methods for improved semiconductor etching and component protection |
US10629473B2 (en) | 2016-09-09 | 2020-04-21 | Applied Materials, Inc. | Footing removal for nitride spacer |
US10224180B2 (en) | 2016-10-04 | 2019-03-05 | Applied Materials, Inc. | Chamber with flow-through source |
US10546729B2 (en) | 2016-10-04 | 2020-01-28 | Applied Materials, Inc. | Dual-channel showerhead with improved profile |
US11049698B2 (en) | 2016-10-04 | 2021-06-29 | Applied Materials, Inc. | Dual-channel showerhead with improved profile |
US10541113B2 (en) | 2016-10-04 | 2020-01-21 | Applied Materials, Inc. | Chamber with flow-through source |
US10319603B2 (en) | 2016-10-07 | 2019-06-11 | Applied Materials, Inc. | Selective SiN lateral recess |
US10163696B2 (en) | 2016-11-11 | 2018-12-25 | Applied Materials, Inc. | Selective cobalt removal for bottom up gapfill |
US10186428B2 (en) | 2016-11-11 | 2019-01-22 | Applied Materials, Inc. | Removal methods for high aspect ratio structures |
US10770346B2 (en) | 2016-11-11 | 2020-09-08 | Applied Materials, Inc. | Selective cobalt removal for bottom up gapfill |
US10242908B2 (en) | 2016-11-14 | 2019-03-26 | Applied Materials, Inc. | Airgap formation with damage-free copper |
US10600639B2 (en) | 2016-11-14 | 2020-03-24 | Applied Materials, Inc. | SiN spacer profile patterning |
US10566206B2 (en) | 2016-12-27 | 2020-02-18 | Applied Materials, Inc. | Systems and methods for anisotropic material breakthrough |
US10748797B2 (en) | 2017-01-18 | 2020-08-18 | Applied Materials, Inc. | Plasma parameters and skew characterization by high speed imaging |
US11545376B2 (en) | 2017-01-18 | 2023-01-03 | Applied Materials, Inc. | Plasma parameters and skew characterization by high speed imaging |
US10403507B2 (en) | 2017-02-03 | 2019-09-03 | Applied Materials, Inc. | Shaped etch profile with oxidation |
US10431429B2 (en) | 2017-02-03 | 2019-10-01 | Applied Materials, Inc. | Systems and methods for radial and azimuthal control of plasma uniformity |
US10903052B2 (en) | 2017-02-03 | 2021-01-26 | Applied Materials, Inc. | Systems and methods for radial and azimuthal control of plasma uniformity |
US10529737B2 (en) | 2017-02-08 | 2020-01-07 | Applied Materials, Inc. | Accommodating imperfectly aligned memory holes |
US10325923B2 (en) | 2017-02-08 | 2019-06-18 | Applied Materials, Inc. | Accommodating imperfectly aligned memory holes |
US10319739B2 (en) | 2017-02-08 | 2019-06-11 | Applied Materials, Inc. | Accommodating imperfectly aligned memory holes |
US10943834B2 (en) | 2017-03-13 | 2021-03-09 | Applied Materials, Inc. | Replacement contact process |
US10319649B2 (en) | 2017-04-11 | 2019-06-11 | Applied Materials, Inc. | Optical emission spectroscopy (OES) for remote plasma monitoring |
US11276590B2 (en) | 2017-05-17 | 2022-03-15 | Applied Materials, Inc. | Multi-zone semiconductor substrate supports |
US11361939B2 (en) | 2017-05-17 | 2022-06-14 | Applied Materials, Inc. | Semiconductor processing chamber for multiple precursor flow |
US11276559B2 (en) | 2017-05-17 | 2022-03-15 | Applied Materials, Inc. | Semiconductor processing chamber for multiple precursor flow |
US11915950B2 (en) | 2017-05-17 | 2024-02-27 | Applied Materials, Inc. | Multi-zone semiconductor substrate supports |
US10468267B2 (en) | 2017-05-31 | 2019-11-05 | Applied Materials, Inc. | Water-free etching methods |
US10497579B2 (en) | 2017-05-31 | 2019-12-03 | Applied Materials, Inc. | Water-free etching methods |
US10920320B2 (en) | 2017-06-16 | 2021-02-16 | Applied Materials, Inc. | Plasma health determination in semiconductor substrate processing reactors |
US10541246B2 (en) | 2017-06-26 | 2020-01-21 | Applied Materials, Inc. | 3D flash memory cells which discourage cross-cell electrical tunneling |
US10727080B2 (en) | 2017-07-07 | 2020-07-28 | Applied Materials, Inc. | Tantalum-containing material removal |
US10541184B2 (en) | 2017-07-11 | 2020-01-21 | Applied Materials, Inc. | Optical emission spectroscopic techniques for monitoring etching |
US10354889B2 (en) | 2017-07-17 | 2019-07-16 | Applied Materials, Inc. | Non-halogen etching of silicon-containing materials |
US10593553B2 (en) | 2017-08-04 | 2020-03-17 | Applied Materials, Inc. | Germanium etching systems and methods |
US10170336B1 (en) | 2017-08-04 | 2019-01-01 | Applied Materials, Inc. | Methods for anisotropic control of selective silicon removal |
US10297458B2 (en) | 2017-08-07 | 2019-05-21 | Applied Materials, Inc. | Process window widening using coated parts in plasma etch processes |
US11101136B2 (en) | 2017-08-07 | 2021-08-24 | Applied Materials, Inc. | Process window widening using coated parts in plasma etch processes |
US11164730B2 (en) * | 2017-09-05 | 2021-11-02 | Tokyo Electron Limited | Plasma probe device and plasma processing apparatus |
US10283324B1 (en) | 2017-10-24 | 2019-05-07 | Applied Materials, Inc. | Oxygen treatment for nitride etching |
US10128086B1 (en) | 2017-10-24 | 2018-11-13 | Applied Materials, Inc. | Silicon pretreatment for nitride removal |
US10424487B2 (en) | 2017-10-24 | 2019-09-24 | Applied Materials, Inc. | Atomic layer etching processes |
US10256112B1 (en) | 2017-12-08 | 2019-04-09 | Applied Materials, Inc. | Selective tungsten removal |
US10903054B2 (en) | 2017-12-19 | 2021-01-26 | Applied Materials, Inc. | Multi-zone gas distribution systems and methods |
US11328909B2 (en) | 2017-12-22 | 2022-05-10 | Applied Materials, Inc. | Chamber conditioning and removal processes |
US10861676B2 (en) | 2018-01-08 | 2020-12-08 | Applied Materials, Inc. | Metal recess for semiconductor structures |
US10854426B2 (en) | 2018-01-08 | 2020-12-01 | Applied Materials, Inc. | Metal recess for semiconductor structures |
US10964512B2 (en) | 2018-02-15 | 2021-03-30 | Applied Materials, Inc. | Semiconductor processing chamber multistage mixing apparatus and methods |
US10699921B2 (en) | 2018-02-15 | 2020-06-30 | Applied Materials, Inc. | Semiconductor processing chamber multistage mixing apparatus |
US10679870B2 (en) | 2018-02-15 | 2020-06-09 | Applied Materials, Inc. | Semiconductor processing chamber multistage mixing apparatus |
US10615047B2 (en) | 2018-02-28 | 2020-04-07 | Applied Materials, Inc. | Systems and methods to form airgaps |
US10593560B2 (en) | 2018-03-01 | 2020-03-17 | Applied Materials, Inc. | Magnetic induction plasma source for semiconductor processes and equipment |
US11004689B2 (en) | 2018-03-12 | 2021-05-11 | Applied Materials, Inc. | Thermal silicon etch |
US10319600B1 (en) | 2018-03-12 | 2019-06-11 | Applied Materials, Inc. | Thermal silicon etch |
US10497573B2 (en) | 2018-03-13 | 2019-12-03 | Applied Materials, Inc. | Selective atomic layer etching of semiconductor materials |
US10573527B2 (en) | 2018-04-06 | 2020-02-25 | Applied Materials, Inc. | Gas-phase selective etching systems and methods |
US10490406B2 (en) | 2018-04-10 | 2019-11-26 | Appled Materials, Inc. | Systems and methods for material breakthrough |
US10699879B2 (en) | 2018-04-17 | 2020-06-30 | Applied Materials, Inc. | Two piece electrode assembly with gap for plasma control |
US10886137B2 (en) | 2018-04-30 | 2021-01-05 | Applied Materials, Inc. | Selective nitride removal |
US10872778B2 (en) | 2018-07-06 | 2020-12-22 | Applied Materials, Inc. | Systems and methods utilizing solid-phase etchants |
US10755941B2 (en) | 2018-07-06 | 2020-08-25 | Applied Materials, Inc. | Self-limiting selective etching systems and methods |
US10672642B2 (en) | 2018-07-24 | 2020-06-02 | Applied Materials, Inc. | Systems and methods for pedestal configuration |
US10892198B2 (en) | 2018-09-14 | 2021-01-12 | Applied Materials, Inc. | Systems and methods for improved performance in semiconductor processing |
US11049755B2 (en) | 2018-09-14 | 2021-06-29 | Applied Materials, Inc. | Semiconductor substrate supports with embedded RF shield |
US11062887B2 (en) | 2018-09-17 | 2021-07-13 | Applied Materials, Inc. | High temperature RF heater pedestals |
US11417534B2 (en) | 2018-09-21 | 2022-08-16 | Applied Materials, Inc. | Selective material removal |
US11682560B2 (en) | 2018-10-11 | 2023-06-20 | Applied Materials, Inc. | Systems and methods for hafnium-containing film removal |
US11121002B2 (en) | 2018-10-24 | 2021-09-14 | Applied Materials, Inc. | Systems and methods for etching metals and metal derivatives |
US11437242B2 (en) | 2018-11-27 | 2022-09-06 | Applied Materials, Inc. | Selective removal of silicon-containing materials |
US11721527B2 (en) | 2019-01-07 | 2023-08-08 | Applied Materials, Inc. | Processing chamber mixing systems |
US10920319B2 (en) | 2019-01-11 | 2021-02-16 | Applied Materials, Inc. | Ceramic showerheads with conductive electrodes |
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KR20040108751A (en) | 2004-12-24 |
TW200306136A (en) | 2003-11-01 |
CN1647252A (en) | 2005-07-27 |
WO2003092059A1 (en) | 2003-11-06 |
EP1531490A1 (en) | 2005-05-18 |
TWI256278B (en) | 2006-06-01 |
EP1531490A4 (en) | 2009-07-15 |
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JP3773189B2 (en) | 2006-05-10 |
JP2003318115A (en) | 2003-11-07 |
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