US10756127B2 - Germanium-silicon light sensing apparatus - Google Patents
Germanium-silicon light sensing apparatus Download PDFInfo
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- US10756127B2 US10756127B2 US15/712,852 US201715712852A US10756127B2 US 10756127 B2 US10756127 B2 US 10756127B2 US 201715712852 A US201715712852 A US 201715712852A US 10756127 B2 US10756127 B2 US 10756127B2
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- photodiodes
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- germanium
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- photodiode
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- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 title claims abstract description 89
- 238000000034 method Methods 0.000 claims abstract description 69
- 239000004065 semiconductor Substances 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims description 60
- 229910052732 germanium Inorganic materials 0.000 claims description 36
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 36
- 239000000203 mixture Substances 0.000 claims description 13
- 238000005498 polishing Methods 0.000 claims description 9
- 125000006850 spacer group Chemical group 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 description 83
- 238000010521 absorption reaction Methods 0.000 description 42
- 229910052710 silicon Inorganic materials 0.000 description 41
- 239000010703 silicon Substances 0.000 description 41
- 239000000969 carrier Substances 0.000 description 40
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 39
- 239000000463 material Substances 0.000 description 29
- 239000002019 doping agent Substances 0.000 description 25
- 230000008569 process Effects 0.000 description 23
- 238000013461 design Methods 0.000 description 20
- 239000003574 free electron Substances 0.000 description 19
- 238000004519 manufacturing process Methods 0.000 description 16
- 238000012545 processing Methods 0.000 description 15
- 238000003384 imaging method Methods 0.000 description 14
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 12
- 229910052796 boron Inorganic materials 0.000 description 12
- 230000005684 electric field Effects 0.000 description 12
- 238000002955 isolation Methods 0.000 description 11
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 8
- 229910052698 phosphorus Inorganic materials 0.000 description 8
- 239000011574 phosphorus Substances 0.000 description 8
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 5
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
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- 238000010586 diagram Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910000676 Si alloy Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000000407 epitaxy Methods 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000003190 augmentative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- -1 e.g. Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000002329 infrared spectrum Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 238000004806 packaging method and process Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
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- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
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Abstract
Description
where c is the speed of light.
Claims (10)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/712,852 US10756127B2 (en) | 2015-08-04 | 2017-09-22 | Germanium-silicon light sensing apparatus |
US16/929,861 US11756969B2 (en) | 2015-08-04 | 2020-07-15 | Germanium-silicon light sensing apparatus |
US18/236,667 US20230395618A1 (en) | 2015-08-04 | 2023-08-22 | Germanium-silicon light sensing apparatus |
Applications Claiming Priority (10)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562200652P | 2015-08-04 | 2015-08-04 | |
US201562209349P | 2015-08-25 | 2015-08-25 | |
US201562210946P | 2015-08-27 | 2015-08-27 | |
US201562210991P | 2015-08-28 | 2015-08-28 | |
US201562211004P | 2015-08-28 | 2015-08-28 | |
US201562217031P | 2015-09-11 | 2015-09-11 | |
US201562251691P | 2015-11-06 | 2015-11-06 | |
US201562271386P | 2015-12-28 | 2015-12-28 | |
US15/228,282 US9954016B2 (en) | 2015-08-04 | 2016-08-04 | Germanium-silicon light sensing apparatus |
US15/712,852 US10756127B2 (en) | 2015-08-04 | 2017-09-22 | Germanium-silicon light sensing apparatus |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US15/228,282 Division US9954016B2 (en) | 2015-08-04 | 2016-08-04 | Germanium-silicon light sensing apparatus |
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US16/929,861 Continuation US11756969B2 (en) | 2015-08-04 | 2020-07-15 | Germanium-silicon light sensing apparatus |
Publications (2)
Publication Number | Publication Date |
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US20180012917A1 US20180012917A1 (en) | 2018-01-11 |
US10756127B2 true US10756127B2 (en) | 2020-08-25 |
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US15/228,282 Active US9954016B2 (en) | 2015-08-04 | 2016-08-04 | Germanium-silicon light sensing apparatus |
US15/712,852 Active US10756127B2 (en) | 2015-08-04 | 2017-09-22 | Germanium-silicon light sensing apparatus |
US15/713,251 Active US10056415B2 (en) | 2015-08-04 | 2017-09-22 | Germanium-silicon light sensing apparatus |
US15/712,777 Active US10256264B2 (en) | 2015-08-04 | 2017-09-22 | Germanium-silicon light sensing apparatus |
US15/895,932 Active US10269838B2 (en) | 2015-08-04 | 2018-02-13 | Germanium-silicon light sensing apparatus |
US15/982,559 Active 2037-01-23 US10685994B2 (en) | 2015-08-04 | 2018-05-17 | Germanium-silicon light sensing apparatus |
US16/929,861 Active 2037-11-06 US11756969B2 (en) | 2015-08-04 | 2020-07-15 | Germanium-silicon light sensing apparatus |
US18/236,667 Pending US20230395618A1 (en) | 2015-08-04 | 2023-08-22 | Germanium-silicon light sensing apparatus |
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