TWM541120U - Light emitting device - Google Patents

Light emitting device Download PDF

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Publication number
TWM541120U
TWM541120U TW106202693U TW106202693U TWM541120U TW M541120 U TWM541120 U TW M541120U TW 106202693 U TW106202693 U TW 106202693U TW 106202693 U TW106202693 U TW 106202693U TW M541120 U TWM541120 U TW M541120U
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Taiwan
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hole
light
cover
carrier
metal layer
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TW106202693U
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Chinese (zh)
Inventor
謝新賢
吳上義
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聯京光電股份有限公司
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Priority to TW106202693U priority Critical patent/TWM541120U/en
Publication of TWM541120U publication Critical patent/TWM541120U/en

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Abstract

A light emitting device includes a carrier, a light emitting chip, and a covering part. The carrier includes a board and a guiding metal layer. The covering part is disposed on the carrier. The carrier includes a board, a guiding metal layer, and a sealing material. The board has a first surface, a second surface opposite to the first surface, and a through vent. The through vent is divided into a first partial hole and a second partial hole. The first partial hole extends from the first surface to the second partial hole, and the second partial hole extends from the second surface to the first partial hole. The guiding metal layer is formed on the second surface and in the second partial hole, and covers the sidewall of the second partial hole. The guiding metal layer extends from the second partial hole to the second surface, and does not cover the sidewall of the first partial hole and the first surface. The sealing material seals the second partial hole, and the guiding metal layer surrounds the sealing material.

Description

發光元件Light-emitting element

本新型是有關於一種發光元件,特別是有關於一種具有通氣貫孔(through vent)的發光元件。The present invention relates to a light-emitting element, and more particularly to a light-emitting element having a through vent.

在目前具有空腔(cavity)的發光二極體封裝件(Light Emitting Diode Package,LED Package)中,為了避免空腔裡面的發光二極體晶片(LED die)因長時間接觸外界水氣與氧氣而受到損傷(suffering),空腔必須是封閉的(closed),以密封(sealing)發光二極體晶片,而且空腔內的環境是真空環境或惰氣氣氛(noble gas atmosphere)。因此,現有發光二極體封裝件的製造方法需要使用大型真空腔體(large vacuum chamber),以在真空環境下將發光二極體晶片周遭的空氣排出。然而,大型真空腔體的費用相當高昂,而且需要花費相當多的時間才能使腔內環境從大氣環境轉變成適當的真空環境,所以這種發光二極體封裝件普遍需要花費較多的時間與金錢來製造。In the current Light Emitting Diode Package (LED Package) with cavity, in order to avoid long-term contact with the outside water vapor and oxygen in the LED die in the cavity In the case of a sinking, the cavity must be closed to seal the light-emitting diode wafer, and the environment within the cavity is a vacuum environment or a noble gas atmosphere. Therefore, the manufacturing method of the existing light-emitting diode package requires the use of a large vacuum chamber to discharge air around the light-emitting diode wafer in a vacuum environment. However, the cost of a large vacuum chamber is quite high, and it takes a considerable amount of time to convert the cavity environment from an atmospheric environment to a proper vacuum environment, so such a light-emitting diode package generally takes more time and Money to make.

本創作提供一種發光元件,其所具有的通氣貫孔能用來排出發光晶片所處的空腔內的空氣。The present invention provides a light-emitting element having a venting aperture for venting air within a cavity in which the luminescent wafer is located.

本創作所提供的發光元件包括一載件(carrier)、一發光晶片與一蓋體。載件包括一板體(board)、一導引金屬層(guiding metal layer)、一密封材料(sealing material)以及一線路層。板體具有一第一表面、一相對第一表面的第二表面以及一通氣貫孔,其中通氣貫孔區分成一第一部孔(first partial hole)與一連通第一部孔的第二部孔。第一部孔從第一表面延伸至第二部孔,而第二部孔從第二表面延伸至第一部孔。導引金屬層形成於第二表面上與第二部孔內,並覆蓋第二部孔的孔壁,其中導引金屬層從第二部孔延伸至第二表面,並且不覆蓋第一部孔的孔壁與第一表面。密封材料填入於第二部孔內,並密封第二部孔,其中導引金屬層圍繞密封材料。線路層形成於第一表面上。發光晶片裝設(mounted)於第一表面上,並電連接線路層。蓋體配置於載件上,其中蓋體與板體之間形成一空腔,而發光晶片位於空腔內。The light-emitting element provided by the present invention comprises a carrier, a light-emitting chip and a cover. The carrier member includes a board, a guiding metal layer, a sealing material, and a wiring layer. The plate body has a first surface, a second surface opposite to the first surface, and a venting through hole, wherein the venting through hole is divided into a first partial hole and a second hole communicating with the first hole . The first aperture extends from the first surface to the second aperture and the second aperture extends from the second surface to the first aperture. a guiding metal layer is formed on the second surface and the second hole and covers the hole wall of the second hole, wherein the guiding metal layer extends from the second hole to the second surface and does not cover the first hole The wall of the hole and the first surface. A sealing material is filled into the second hole and seals the second hole, wherein the guiding metal layer surrounds the sealing material. A wiring layer is formed on the first surface. The luminescent wafer is mounted on the first surface and electrically connected to the wiring layer. The cover body is disposed on the carrier, wherein a cavity is formed between the cover body and the plate body, and the light emitting chip is located in the cavity.

在本創作的一實施例中,上述第二部孔具有一凹槽與一連通孔。凹槽從第二表面延伸至連通孔,而連通孔從凹槽底部延伸至第一部孔。In an embodiment of the present invention, the second hole has a groove and a communication hole. The groove extends from the second surface to the communication hole, and the communication hole extends from the bottom of the groove to the first hole.

在本創作的一實施例中,上述導引金屬層覆蓋連通孔的孔壁與凹槽的側壁。In an embodiment of the present invention, the guiding metal layer covers the hole wall of the communication hole and the side wall of the groove.

在本創作的一實施例中,上述密封材料接觸導引金屬層。In an embodiment of the present creation, the sealing material contacts the guiding metal layer.

在本創作的一實施例中,上述密封材料為金屬材料。In an embodiment of the present creation, the sealing material is a metal material.

在本創作的一實施例中,上述蓋體具有一容置槽,而空腔由容置槽與板體所定義。In an embodiment of the present invention, the cover body has a receiving groove, and the cavity is defined by the receiving groove and the plate body.

在本創作的一實施例中,上述載件包括一支撐框。支撐框凸出於第一表面,並圍繞發光晶片,且支撐框固定於板體與蓋體之間。In an embodiment of the present creation, the carrier includes a support frame. The support frame protrudes from the first surface and surrounds the light emitting chip, and the support frame is fixed between the plate body and the cover body.

在本創作的一實施例中,上述蓋體包括一蓋板以及一支撐框。支撐框圍繞發光晶片,並固定於板體與蓋板之間。In an embodiment of the present invention, the cover body includes a cover plate and a support frame. The support frame surrounds the light emitting chip and is fixed between the board and the cover.

在本創作的一實施例中,上述蓋板是透明的。In an embodiment of the present creation, the cover is transparent.

在本創作的一實施例中,上述蓋板是不透明的。In an embodiment of the present creation, the cover is opaque.

在本創作的一實施例中,上述發光晶片為紅外光光源、可見光光源或紫外光光源。In an embodiment of the present invention, the light emitting chip is an infrared light source, a visible light source or an ultraviolet light source.

在本創作的一實施例中,上述發光元件還包括一惰性填充氣體。惰性填充氣體充滿空腔內,並選自於由惰性氣體與氮氣所組成的群組。In an embodiment of the present invention, the light-emitting element further includes an inert filling gas. An inert fill gas fills the cavity and is selected from the group consisting of an inert gas and nitrogen.

在本創作的一實施例中,上述空腔內的環境為真空。In an embodiment of the present creation, the environment within the cavity is a vacuum.

基於上述,利用通氣貫孔,可將發光元件的空腔內的空氣排出,並搭配使用密封材料來密封通氣貫孔,以幫助防止發光晶片接觸到外界水氣與氧氣,從而保護發光晶片不受水氣與氧氣的損傷。Based on the above, the venting through hole can be used to discharge the air in the cavity of the illuminating element, and the sealing material is used to seal the venting through hole to help prevent the illuminating wafer from contacting the outside water and oxygen, thereby protecting the illuminating wafer from being protected. Water and oxygen damage.

為讓本創作的特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式,作詳細說明如下。In order to make the features and advantages of the present invention more comprehensible, the following embodiments are described in detail with reference to the accompanying drawings.

請參閱圖1,發光元件100包括載件110以及發光晶片130。載件110可以是線路板,例如印刷線路板(Printed Circuit Board,PCB)。以圖1為例,載件110包括板體111以及線路層114a與114b,其中板體111的構成材料可以是樹脂或陶瓷。板體111具有第一表面111a以及一相對第一表面111a的第二表面111b,而線路層114a與114b分別形成於第一表面111a上與第二表面111b上。由此可見,在圖1所示的實施例中,載件110為雙面線路板(double sided circuit board)。不過,在其他實施例中,載件110也可為單面線路板(single sided circuit board)或多層線路板(multilayer circuit board)。也就是說,載件110所包括的線路層的數量可以僅為一層或至少三層。Referring to FIG. 1 , the light emitting element 100 includes a carrier 110 and a light emitting chip 130 . The carrier 110 can be a circuit board such as a Printed Circuit Board (PCB). Taking FIG. 1 as an example, the carrier 110 includes a plate body 111 and circuit layers 114a and 114b, wherein the material of the plate body 111 may be resin or ceramic. The plate body 111 has a first surface 111a and a second surface 111b opposite to the first surface 111a, and the circuit layers 114a and 114b are formed on the first surface 111a and the second surface 111b, respectively. Thus, in the embodiment shown in FIG. 1, the carrier 110 is a double sided circuit board. However, in other embodiments, the carrier 110 can also be a single sided circuit board or a multilayer circuit board. That is to say, the number of circuit layers included in the carrier 110 may be only one layer or at least three layers.

發光晶片130可以是發光二極體晶片,並具有出光面131,而發光晶片130可從出光面131發出光線L1。此外,發光晶片130所發出的光線L1可以是紅外光(infrared light,IR)、可見光或紫外光(ultraviolet light,UV)。所以,發光晶片130可以是紅外光光源、可見光光源或紫外光光源。發光晶片130裝設於載件110上。以圖1為例,發光晶片130可經由打線接合(wire bonding)而裝設於載件110的第一表面111a上,並且電連接線路層114a。當然,發光晶片130也可以採用其他手段而裝設於載件110,例如覆晶接合(flip chip)。此外,載件110還可以包括一根或多根導電柱115,而這些導電柱115位於板體111內,並且連接線路層114a與114b,以使這兩層線路層114a與114b能彼此電連接。The light emitting chip 130 may be a light emitting diode chip and has a light emitting surface 131, and the light emitting chip 130 may emit light L1 from the light emitting surface 131. In addition, the light L1 emitted by the light emitting chip 130 may be infrared light (IR), visible light or ultraviolet light (UV). Therefore, the illuminating wafer 130 may be an infrared light source, a visible light source or an ultraviolet light source. The light emitting chip 130 is mounted on the carrier 110. Taking FIG. 1 as an example, the light-emitting chip 130 can be mounted on the first surface 111a of the carrier 110 via wire bonding, and electrically connected to the circuit layer 114a. Of course, the luminescent wafer 130 can also be mounted on the carrier 110 by other means, such as a flip chip. In addition, the carrier 110 may further include one or more conductive pillars 115, and the conductive pillars 115 are located in the board body 111, and connect the circuit layers 114a and 114b so that the two circuit layer layers 114a and 114b can be electrically connected to each other. .

載件110還包括導引金屬層112,而板體111還具有通氣貫孔111h,其中通氣貫孔111h是從第一表面111a延伸至第二表面111b,而導引金屬層112形成於第二表面111b上以及部分通氣貫孔111h內。通氣貫孔111h區分成第一部孔H1與第二部孔H2,其中第二部孔H2與第一部孔H1連通。第一部孔H1從第一表面111a延伸至第二部孔H2,而第二部孔H2從第二表面111b延伸至第一部孔H1。導引金屬層112形成於第二部孔H2內,並覆蓋第二部孔H2的孔壁,但不覆蓋第一部孔H1的孔壁以及第一表面111a。換句話說,導引金屬層112是從通氣貫孔111h內部延伸至第二表面111b。由此可知,導引金屬層112僅形成於板體111的其中一面(即第二表面111b)以及通氣貫孔111h的其中一段(即第二部孔H2)。The carrier 110 further includes a guiding metal layer 112, and the plate body 111 further has a venting through hole 111h, wherein the venting through hole 111h extends from the first surface 111a to the second surface 111b, and the guiding metal layer 112 is formed in the second The surface 111b and the partially vented through hole 111h. The vent hole 111h is divided into a first hole H1 and a second hole H2, wherein the second hole H2 is in communication with the first hole H1. The first hole H1 extends from the first surface 111a to the second portion hole H2, and the second portion hole H2 extends from the second surface 111b to the first portion hole H1. The guiding metal layer 112 is formed in the second portion hole H2 and covers the hole wall of the second portion hole H2, but does not cover the hole wall of the first portion hole H1 and the first surface 111a. In other words, the guiding metal layer 112 extends from the inside of the vent through hole 111h to the second surface 111b. It can be seen that the guiding metal layer 112 is formed only on one side of the plate body 111 (ie, the second surface 111b) and one of the venting through holes 111h (ie, the second hole H2).

在圖1所示的實施例中,第二部孔H2可具有連通孔H21與凹槽(depression)H22。凹槽H22從第二表面111b延伸至連通孔H21,而連通孔H21是從凹槽H22的底部延伸至第一部孔H1。因此,第二部孔H2可以是孔徑不均勻(constant)的孔洞。導引金屬層112覆蓋連通孔H21的孔壁與凹槽H22的側壁。以圖1為例,導引金屬層112可以全面性覆蓋連通孔H21與凹槽H22的所有表面,但不覆蓋第一部孔H1的任何表面。此外,通氣貫孔111h可用機械鑽孔與雷射鑽孔其中至少一種手段來形成,而導引金屬層112可用無電電鍍(electroless plating)或濺鍍(sputtering)來形成。載件110還包括密封材料113,而密封材料113可為金屬材料,例如錫膏。密封材料113填入於部分通氣貫孔111h內,並用來密封通氣貫孔111h。詳細而言,密封材料113填入於第二部孔H2內,以密封第二部孔H2。密封材料113會接觸導引金屬層112,而導引金屬層112圍繞密封材料113,如圖1所示。此外,密封材料113的熔點高於發光晶片130的工作溫度。例如,當運作中的發光晶片130所產生的工作溫度可約為150℃,而可作為密封材料113的錫膏的熔點約是220℃,其高於前述150℃的工作溫度。由於密封材料113的熔點高於發光晶片130的工作溫度,所以運作中的發光晶片130所產生的熱能難以熔化密封材料113。In the embodiment shown in FIG. 1, the second hole H2 may have a communication hole H21 and a depression H22. The groove H22 extends from the second surface 111b to the communication hole H21, and the communication hole H21 extends from the bottom of the groove H22 to the first hole H1. Therefore, the second hole H2 may be a hole having a constant aperture. The guiding metal layer 112 covers the hole wall of the communication hole H21 and the side wall of the groove H22. Taking FIG. 1 as an example, the guiding metal layer 112 can cover all surfaces of the communication hole H21 and the groove H22 in a comprehensive manner, but does not cover any surface of the first hole H1. Further, the venting through hole 111h may be formed by at least one of mechanical drilling and laser drilling, and the guiding metal layer 112 may be formed by electroless plating or sputtering. The carrier 110 further includes a sealing material 113, and the sealing material 113 may be a metal material such as a solder paste. The sealing material 113 is filled in the partial venting through hole 111h and is used to seal the venting through hole 111h. In detail, the sealing material 113 is filled in the second hole H2 to seal the second hole H2. The sealing material 113 will contact the guiding metal layer 112, and the guiding metal layer 112 will surround the sealing material 113, as shown in FIG. Further, the melting point of the sealing material 113 is higher than the operating temperature of the light-emitting wafer 130. For example, when the illuminating wafer 130 in operation produces an operating temperature of about 150 ° C, the solder paste which can be used as the sealing material 113 has a melting point of about 220 ° C which is higher than the aforementioned operating temperature of 150 ° C. Since the melting point of the sealing material 113 is higher than the operating temperature of the luminescent wafer 130, it is difficult for the thermal energy generated by the illuminating wafer 130 in operation to melt the sealing material 113.

發光元件100還包括蓋體120,其配置及固定於載件110上。蓋體120與板體111之間形成空腔C1,而發光晶片130位於空腔C1內,其中通氣貫孔111h與空腔C1連通。在圖1所示的實施例中,蓋體120可包括蓋板(covering plate)121及支撐框(supporting frame)122。支撐框122圍繞發光晶片130,並固定於板體111與蓋板121之間,其中支撐框122固定於板體111與蓋板121之間的方法可以是膠黏(gluing)或共晶接合(eutectic bonding)。蓋板121與支撐框122會定義出容置槽(圖1未標示),而空腔C1是由蓋體120所具有的容置槽以及板體111所定義。如此,空腔C1得以形成在蓋體120與板體111之間。The light emitting device 100 further includes a cover 120 disposed and fixed to the carrier 110. A cavity C1 is formed between the cover 120 and the plate 111, and the illuminating wafer 130 is located in the cavity C1, wherein the venting hole 111h communicates with the cavity C1. In the embodiment shown in FIG. 1, the cover 120 may include a covering plate 121 and a supporting frame 122. The support frame 122 surrounds the light-emitting chip 130 and is fixed between the plate body 111 and the cover plate 121. The method for fixing the support frame 122 between the plate body 111 and the cover plate 121 may be gluing or eutectic bonding ( Eutectic bonding). The cover plate 121 and the support frame 122 define an accommodating groove (not shown in FIG. 1 ), and the cavity C1 is defined by the accommodating groove of the cover 120 and the plate body 111 . Thus, the cavity C1 is formed between the cover 120 and the plate body 111.

在圖1所示的實施例中,蓋板121可以是透明的(transparent)。例如,蓋板121可以是由玻璃或聚甲基丙烯酸甲酯(Polymethylmethacrylate,PMMA,也就是壓克力)等透明材料所製成。而且,蓋板121還可具有將光線集中(converging)或發散(diverging)的功能。以圖1為例,蓋板121具有凸透鏡結構而能集中發光晶片130所發出的光線L1。不過,在其他實施例中,蓋板121可以不具有任何集中或發散光線的功能,所以蓋板121也可以是兩面都平坦的玻璃板。此外,雖然圖1實施例的蓋板121是透明的,但在其他實施例中,蓋板121也可以是不透明的(opaque)。In the embodiment shown in Figure 1, the cover plate 121 can be transparent. For example, the cover plate 121 may be made of a transparent material such as glass or polymethylmethacrylate (PMMA, that is, acrylic). Moreover, the cover plate 121 may also have a function of converging or diverging light. Taking FIG. 1 as an example, the cover plate 121 has a convex lens structure and can concentrate the light L1 emitted from the light-emitting chip 130. However, in other embodiments, the cover plate 121 may not have any function of concentrating or diverging light, so the cover plate 121 may also be a glass plate that is flat on both sides. Moreover, although the cover 121 of the embodiment of FIG. 1 is transparent, in other embodiments, the cover 121 may also be opaque.

在圖1所示的實施例中,發光元件100可以還包括惰性填充氣體140,其充滿空腔C1內。惰性填充氣體140為不會損傷發光晶片130的氣體,並選自於由惰性氣體(noble gas)與氮氣所組成的群組。也就是說,惰性填充氣體140可以是惰性氣體或氮氣。或者,惰性填充氣體140可包含惰性氣體與氮氣。雖然通氣貫孔111h與空腔C1連通,但是密封材料113能密封通氣貫孔111h,讓外界水氣與氧氣不會進入空腔C1內,以保持空腔C1處於惰氣氣氛(noble gas atmosphere)、氮氣氣氛或氮氣與惰性氣體混合的氣氛,防止發光晶片130接觸到外界水氣與氧氣。如此,發光晶片130不會因接觸外界水氣與氧氣而受到損傷。此外,在其他實施例中,空腔C1內的環境也可為真空,所以空腔C1內也可不充滿任何氣體。In the embodiment shown in FIG. 1, the light emitting element 100 may further include an inert fill gas 140 that fills the cavity C1. The inert fill gas 140 is a gas that does not damage the luminescent wafer 130 and is selected from the group consisting of a noble gas and nitrogen. That is, the inert fill gas 140 can be an inert gas or nitrogen. Alternatively, the inert fill gas 140 can comprise an inert gas and nitrogen. Although the vent hole 111h communicates with the cavity C1, the sealing material 113 can seal the vent hole 111h so that the outside water and oxygen do not enter the cavity C1 to keep the cavity C1 in a noble gas atmosphere. An atmosphere of nitrogen gas or nitrogen mixed with an inert gas prevents the luminescent wafer 130 from coming into contact with external moisture and oxygen. As such, the luminescent wafer 130 is not damaged by contact with external moisture and oxygen. In addition, in other embodiments, the environment within the cavity C1 may also be a vacuum, so the cavity C1 may not be filled with any gas.

圖2A至圖2E是圖1中的發光元件的製造方法的剖面示意圖。請參閱圖2A,在本實施例的發光元件100的製造方法中,首先,提供包括導引金屬層112的載件110。接著,將發光晶片130裝設於第一表面111a上。例如,採用打線接合或覆晶接合來將發光晶片130裝設於第一表面111a上。2A to 2E are schematic cross-sectional views showing a method of manufacturing the light-emitting element of Fig. 1. Referring to FIG. 2A, in the method of fabricating the light-emitting element 100 of the present embodiment, first, a carrier 110 including a guiding metal layer 112 is provided. Next, the luminescent wafer 130 is mounted on the first surface 111a. For example, the light-emitting wafer 130 is mounted on the first surface 111a by wire bonding or flip chip bonding.

請參閱圖2B,在發光晶片130裝設於第一表面111a上之後,將蓋體120配置於載件110上,以在蓋體120與載件110之間形成空腔C1,其中發光晶片130位於空腔C1內。將蓋體120配置於載件110的方法有多種方法,例如膠黏或共晶接合。此外,上述蓋體120配置於載件110的步驟是在大氣環境下進行,而這與現有發光二極體封裝件的製造方法有所不同。根據現有發光二極體封裝件的製造方法,蓋體120配置於載件110的步驟是在真空環境下進行,以至於現有發光二極體封裝件的製造方法必須要使用大型真空腔體來進行。因此,相較於現有技術而言,蓋體120配置於載件110的步驟可在大氣環境下進行,無需在大型真空腔體內的真空環境下進行。Referring to FIG. 2B, after the illuminating wafer 130 is mounted on the first surface 111a, the cover 120 is disposed on the carrier 110 to form a cavity C1 between the cover 120 and the carrier 110, wherein the illuminating chip 130 Located in the cavity C1. There are various methods of arranging the cover 120 on the carrier 110, such as adhesive or eutectic bonding. In addition, the step of disposing the cover 120 on the carrier 110 is performed in an atmospheric environment, which is different from the manufacturing method of the conventional LED package. According to the manufacturing method of the conventional light-emitting diode package, the step of disposing the cover 120 on the carrier 110 is performed under a vacuum environment, so that the manufacturing method of the existing LED package must use a large vacuum chamber. . Therefore, the step of disposing the cover 120 on the carrier 110 can be performed in an atmospheric environment as compared with the prior art, and does not need to be performed in a vacuum environment in a large vacuum chamber.

接著,形成填充金屬材料113i於導引金屬層112上。填充金屬材料113i可為錫膏,且在後續流程中,填充金屬材料113i會熔化而變成密封通氣貫孔111h的密封材料113(請參閱圖2E)。不過,此時的填充金屬材料113i不密封通氣貫孔111h,如圖2B所示。此外,當蓋體120是採用共晶接合而配置於載件110時,填充金屬材料113i適合在蓋體120配置於載件110之後而形成,以避免在前述共晶接合過程中,填充金屬材料113i因受熱熔化而堵住通氣貫孔111h。Next, a filling metal material 113i is formed on the guiding metal layer 112. The filler metal material 113i may be a solder paste, and in a subsequent process, the filler metal material 113i may be melted to become a sealing material 113 that seals the vent hole 111h (see FIG. 2E). However, the filling metal material 113i at this time does not seal the vent hole 111h as shown in Fig. 2B. In addition, when the cover 120 is disposed on the carrier 110 by eutectic bonding, the filler metal material 113i is formed after the cover 120 is disposed on the carrier 110 to avoid filling the metal material during the eutectic bonding process. The 113i blocks the vent hole 111h due to heat fusion.

請參閱圖2C,接著,從第二表面111b上的通氣貫孔111h排出空腔C1內的氣體。詳細而言,在蓋體120配置於載件110上之後,將載件110與蓋體120置放於由真空腔體21所形成的真空環境V1中,其中真空腔體21可連接一台幫浦22與一個氣閥(valve)23。另外,當載件110與蓋體120置放於真空環境V1時,可以倒置載件110,以使第二表面111b朝上,蓋體120朝下。Referring to FIG. 2C, next, the gas in the cavity C1 is discharged from the vent hole 111h on the second surface 111b. In detail, after the cover 120 is disposed on the carrier 110, the carrier 110 and the cover 120 are placed in a vacuum environment V1 formed by the vacuum chamber 21, wherein the vacuum chamber 21 can be connected to a gang. Pu 22 with a valve 23 (valve). In addition, when the carrier 110 and the cover 120 are placed in the vacuum environment V1, the carrier 110 may be inverted such that the second surface 111b faces upward and the cover 120 faces downward.

氣閥23可外接至少一瓶氣瓶(未繪示),而此氣瓶內裝有惰性氣體(noble gas)或氮氣。或者,氣閥23可外接兩瓶氣瓶,而這兩瓶氣瓶分別裝有惰性氣體與氮氣。氣閥23能控制上述氣瓶內的氣體(例如惰性氣體或氮氣)進入真空腔體21內。此外,在圖2C至圖2E中,塗黑的氣閥23表示關閉的氣閥23,其會阻擋氣瓶內的氣體進入真空腔體21內。空白的氣閥23表示打開的氣閥23,其會允許氣瓶內的氣體進入真空腔體21內。The gas valve 23 can be externally connected with at least one gas cylinder (not shown), and the gas cylinder is filled with a noble gas or nitrogen gas. Alternatively, the gas valve 23 may be externally connected to two cylinders, and the two cylinders are respectively filled with an inert gas and nitrogen. The gas valve 23 can control the gas (for example, inert gas or nitrogen gas) in the above gas cylinder to enter the vacuum chamber 21. Further, in FIGS. 2C to 2E, the blackened air valve 23 represents the closed air valve 23, which blocks the gas in the cylinder from entering the vacuum chamber 21. The blank gas valve 23 represents an open gas valve 23 that allows gas within the cylinder to enter the vacuum chamber 21.

幫浦22例如是轉葉幫浦(rotary vane pump),而真空環境V1的壓力約在10 -3托爾(torr)以內。不過,真空腔體21也可額外連接另一台幫浦,其例如是渦輪幫浦(turbo pump),而真空環境V1的壓力可介於10 -3托爾至10 -6托爾之間。由於通氣貫孔111h與空腔C1連通,且填充金屬材料113i不密封通氣貫孔111h,因此空腔C1內的氣體會從第二表面111b上的通氣貫孔111h排出至真空環境V1中,之後被幫浦22排放到外面大氣環境中。 The pump 22 is, for example, a rotary vane pump, and the pressure in the vacuum environment V1 is within about 10 -3 torr. However, the vacuum chamber 21 can also be additionally connected to another pump, such as a turbo pump, and the pressure in the vacuum environment V1 can be between 10 -3 Torr and 10 -6 Torr. Since the vent hole 111h communicates with the cavity C1, and the filling metal material 113i does not seal the vent hole 111h, the gas in the cavity C1 is discharged from the vent hole 111h on the second surface 111b into the vacuum environment V1, after which It is discharged into the outside atmosphere by the pump 22 .

請參閱圖2D,在排出空腔C1內的氣體後,接著,打開氣閥23,通入惰性填充氣體140於真空腔體21內,以使惰性填充氣體140從第二表面111b上的通氣貫孔111h進入空腔C1中。請參閱圖2D與圖2E,之後,熔化填充金屬材料113i,以使填充金屬材料113i沿著導引金屬層112流入通氣貫孔111h內,其中填充金屬材料113i可利用熱傳導(thermal conduction)或輻射加熱至熔化。舉例來說,填充金屬材料113i可用裝設於真空腔體21內的電阻加熱器(未繪示)來加熱。或者,填充金屬材料113i也可用雷射或紅外光加熱而熔化。由於填充金屬材料113i與導引金屬層112都是金屬,所以填充金屬材料113i與導引金屬層112之間會有較強的附著力,以至於熔化的填充金屬材料113i能沿著導引金屬層112流動。Referring to FIG. 2D, after the gas in the cavity C1 is exhausted, then the gas valve 23 is opened, and an inert filling gas 140 is introduced into the vacuum chamber 21 to vent the inert filling gas 140 from the second surface 111b. The hole 111h enters the cavity C1. Referring to FIG. 2D and FIG. 2E, after that, the filling metal material 113i is melted so that the filling metal material 113i flows into the vent hole 111h along the guiding metal layer 112, wherein the filling metal material 113i can utilize thermal conduction or radiation. Heat to melt. For example, the filling metal material 113i may be heated by an electric resistance heater (not shown) installed in the vacuum chamber 21. Alternatively, the filler metal material 113i may be melted by heating with laser or infrared light. Since the filling metal material 113i and the guiding metal layer 112 are both metal, there is strong adhesion between the filling metal material 113i and the guiding metal layer 112, so that the molten filling metal material 113i can follow the guiding metal. Layer 112 flows.

熔化的填充金屬材料113i可利用重力驅使而移動。例如,在本實施例中,由於置放於真空環境V1的載件110是呈現倒置狀態,所以熔化的填充金屬材料113i可受重力驅使而從第二表面111b流入通氣貫孔111h中。不過,在其他實施例中,當通氣貫孔111h具有較小的孔徑時,載件110可以不必倒置,而熔化的填充金屬材料113i可利用毛細現象而流入通氣貫孔111h內。The molten filler metal material 113i can be moved by gravity. For example, in the present embodiment, since the carrier 110 placed in the vacuum environment V1 is in an inverted state, the molten filler metal material 113i can be driven by gravity to flow from the second surface 111b into the vent hole 111h. However, in other embodiments, when the vent hole 111h has a small aperture, the carrier 110 may not need to be inverted, and the molten filler metal material 113i may flow into the vent hole 111h by capillary action.

請參閱圖2E,之後,凝固填充金屬材料113i,以使填充金屬材料113i變成密封通氣貫孔111h的密封材料113。至此,發光元件100基本上已製造完成。此外,由於密封材料113的熔點(也等於填充金屬材料113i的熔點)高於發光晶片130的工作溫度,所以運作中的發光晶片130所產生的熱能難以熔化密封材料113。因此,當發光元件100正常運作時,密封材料113因難以熔化而能夠一直密封通氣貫孔111h,以使外界水氣與氧氣不會接觸到正在發光的發光晶片130,從而能持續保護發光晶片130不受水氣與氧氣所損傷。Referring to FIG. 2E, thereafter, the filling metal material 113i is solidified so that the filling metal material 113i becomes the sealing material 113 sealing the vent hole 111h. So far, the light-emitting element 100 has been substantially completed. Further, since the melting point of the sealing material 113 (which is also equal to the melting point of the filling metal material 113i) is higher than the operating temperature of the light-emitting wafer 130, it is difficult for the heat energy generated by the operating light-emitting wafer 130 to melt the sealing material 113. Therefore, when the light-emitting element 100 operates normally, the sealing material 113 can always seal the vent hole 111h because it is difficult to melt, so that the outside water and oxygen do not contact the illuminating wafer 130 that is emitting light, so that the illuminating wafer 130 can be continuously protected. Not damaged by moisture and oxygen.

承上述,當凝固填充金屬材料113i時,填充金屬材料113i會堵住通氣貫孔111h,而惰性填充氣體140會充滿及侷限在空腔C1內。不過,在其他實施例中,空腔C1內的環境也可以是真空,所以圖2D所敘述的通入惰性填充氣體140於真空腔體21內的步驟可以省略。也就是說,當凝固填充金屬材料113i時,空腔C1內可以不充滿任何氣體(例如惰性填充氣體140),即空腔C1內的環境也可以是真空。In the above, when the filling metal material 113i is solidified, the filling metal material 113i blocks the vent hole 111h, and the inert filling gas 140 is filled and confined in the cavity C1. However, in other embodiments, the environment within the cavity C1 may also be a vacuum, so the step of introducing the inert fill gas 140 into the vacuum chamber 21 as illustrated in FIG. 2D may be omitted. That is, when the filling metal material 113i is solidified, the cavity C1 may not be filled with any gas (for example, the inert filling gas 140), that is, the environment inside the cavity C1 may also be a vacuum.

值得一提的是,雖然圖2A至圖2E所示的發光元件100製造方法有使用真空腔體21,但由於蓋體120配置於載件110的步驟是在大氣環境下進行,所以蓋體120與載件110不用在真空環境V1下結合。也就是說,真空腔體21不需要具備龐大的容納空間來移動與結合蓋體120與載件110。所以,真空腔體21的內部空間會小於大型真空腔體的內部空間。由此可知,相較於現有技術,發光元件100的製造方法可使用小型或中型真空腔體,無須使用大型真空腔體。It is to be noted that although the manufacturing method of the light-emitting element 100 shown in FIGS. 2A to 2E uses the vacuum chamber 21, since the step of disposing the cover 120 on the carrier 110 is performed in an atmospheric environment, the cover 120 is It is not combined with the carrier 110 in a vacuum environment V1. That is to say, the vacuum chamber 21 does not need to have a large accommodation space to move and bond the cover 120 and the carrier 110. Therefore, the internal space of the vacuum chamber 21 is smaller than the internal space of the large vacuum chamber. It can be seen that, compared to the prior art, the manufacturing method of the light-emitting element 100 can use a small or medium-sized vacuum chamber without using a large vacuum chamber.

請參閱圖3,其繪示本創作另一實施例的發光元件200。圖3實施例所示的發光元件200與圖1實施例所示的發光元件100相似。例如,發光元件200與100兩者製造方法相同,而且發光元件200也包括載件210、蓋體220與發光晶片130,其中這些元件之間的相對位置以及連接關係皆與發光元件100相同。以下主要敘述發光元件100與200兩者的差異。至於兩者製造方法以及相同的技術特徵,原則上不再重複敘述,也不再繪示於圖式。Please refer to FIG. 3, which illustrates a light-emitting element 200 of another embodiment of the present invention. The light-emitting element 200 shown in the embodiment of Fig. 3 is similar to the light-emitting element 100 shown in the embodiment of Fig. 1. For example, the light-emitting elements 200 and 100 are manufactured in the same manner, and the light-emitting element 200 also includes the carrier 210, the cover 220, and the light-emitting chip 130, wherein the relative positions and connection relationships between the elements are the same as those of the light-emitting element 100. The difference between the light-emitting elements 100 and 200 will be mainly described below. As for the two manufacturing methods and the same technical features, the description will not be repeated in principle, and will not be shown in the drawings.

有別於圖1實施例中的蓋體120,在圖3實施例中,蓋體220所包括的蓋板221及支撐框222是一體成型。也就是說,蓋板221及支撐框222兩者可由相同材料所構成,且可由同一道製造流程所製成。例如,蓋板221及支撐框222可由同一道射出成型而形成。或者,蓋體220可由一塊板材,經化學蝕刻或機械加工(machining)而形成,其中此板材例如是玻璃板或塑膠板(例如壓克力板)。所以,蓋板221及支撐框222之間可不出現明顯的分界(boundary)。當發光晶片130為紅外光光源時,蓋體220可以是不透明的,並可由塑膠板所製成,但是蓋體220能被發光晶片130所發出的紅外光完全穿透。此外,圖1中的蓋體120與圖3的蓋體220可以彼此替換,即蓋體120與220皆可用於發光元件100與200任一者。Different from the cover 120 in the embodiment of FIG. 1, in the embodiment of FIG. 3, the cover 221 and the support frame 222 included in the cover 220 are integrally formed. That is, both the cover 221 and the support frame 222 can be made of the same material and can be made by the same manufacturing process. For example, the cover plate 221 and the support frame 222 can be formed by the same injection molding. Alternatively, the cover 220 may be formed from a sheet of material by chemical etching or machining, wherein the sheet is, for example, a glass sheet or a plastic sheet (for example, an acrylic sheet). Therefore, there is no obvious boundary between the cover 221 and the support frame 222. When the light emitting chip 130 is an infrared light source, the cover 220 may be opaque and may be made of a plastic plate, but the cover 220 can be completely penetrated by the infrared light emitted by the light emitting chip 130. In addition, the cover 120 of FIG. 1 and the cover 220 of FIG. 3 can be replaced with each other, that is, both the covers 120 and 220 can be used for any of the light-emitting elements 100 and 200.

另外,圖3所示的載件210也不同於圖1所示的載件110。具體而言,在圖3的實施例中,載件210包括板體211,而板體211也具有通氣貫孔211h,其與圖1的通氣貫孔111h相似,但是通氣貫孔211h具有均勻的孔徑。也就是說,通氣貫孔211h並不具有如圖1所示的凹槽H22。此外,值得一提的是,在圖1的發光元件100中,通氣貫孔111h也可換成圖3所示通氣貫孔211h。也就是說,圖1中的板體111也可具有如圖3所示的通氣貫孔211h。In addition, the carrier 210 shown in FIG. 3 is also different from the carrier 110 shown in FIG. Specifically, in the embodiment of FIG. 3, the carrier 210 includes a plate body 211, and the plate body 211 also has a venting through hole 211h similar to the venting through hole 111h of FIG. 1, but the venting through hole 211h has uniformity. Aperture. That is, the venting through hole 211h does not have the groove H22 as shown in FIG. In addition, it is worth mentioning that in the light-emitting element 100 of FIG. 1, the vent hole 111h may be replaced with the vent hole 211h shown in FIG. That is, the plate body 111 in FIG. 1 may also have a venting through hole 211h as shown in FIG.

請參閱圖4,其繪示本創作另一實施例的發光元件300。圖4實施例所示的發光元件300與圖1實施例所示的發光元件100相似。例如,發光元件300與100兩者製造方法相同,而且發光元件300也包括載件310、蓋體320與發光晶片130,其中這些元件之間的相對位置以及連接關係皆與發光元件100相同。以下主要敘述發光元件100與300兩者的差異。至於兩者製造方法以及相同的技術特徵,原則上不再重複敘述,也不再繪示於圖式。Please refer to FIG. 4, which illustrates a light-emitting element 300 of another embodiment of the present invention. The light-emitting element 300 shown in the embodiment of Fig. 4 is similar to the light-emitting element 100 shown in the embodiment of Fig. 1. For example, the light-emitting elements 300 and 100 are manufactured in the same manner, and the light-emitting element 300 also includes the carrier 310, the cover 320, and the light-emitting chip 130, wherein the relative positions and connection relationships between the elements are the same as those of the light-emitting element 100. The differences between the light-emitting elements 100 and 300 will be mainly described below. As for the two manufacturing methods and the same technical features, the description will not be repeated in principle, and will not be shown in the drawings.

發光元件300與100兩者最大差異在於載件310。比較圖1與圖4,載件310的外型明顯不同於圖1中的平板狀載件110。詳細而言,載件310包括板體311與支撐框316。支撐框316凸出於板體311的第一表面311a,並圍繞發光晶片130,且支撐框316固定於板體311與蓋體320之間。板體311與支撐框316可為一體成型,即板體311與支撐框316可由相同材料所構成,且可由同一道製造流程所製成。例如,板體311與支撐框316可經由陶瓷燒結而形成。所以,板體311與支撐框316之間不會出現明顯的分界。此外,圖1與圖3中的載件110與210皆可以換成圖3中的載件310,所以圖3的載件310也可用於圖1與圖3的發光元件100與200。The biggest difference between the light-emitting elements 300 and 100 is the carrier 310. Comparing Figures 1 and 4, the shape of the carrier 310 is significantly different from the flat carrier 110 of Figure 1. In detail, the carrier 310 includes a plate body 311 and a support frame 316. The support frame 316 protrudes from the first surface 311 a of the board body 311 and surrounds the light emitting chip 130 , and the support frame 316 is fixed between the board body 311 and the cover body 320 . The plate body 311 and the support frame 316 may be integrally formed, that is, the plate body 311 and the support frame 316 may be composed of the same material, and may be made by the same manufacturing process. For example, the plate body 311 and the support frame 316 may be formed by ceramic sintering. Therefore, there is no obvious boundary between the plate body 311 and the support frame 316. In addition, the carriers 110 and 210 in FIGS. 1 and 3 can be replaced with the carrier 310 in FIG. 3, so the carrier 310 of FIG. 3 can also be used for the light-emitting elements 100 and 200 of FIGS. 1 and 3.

發光元件300與100之間還有另一個差異,其在於蓋體320。詳細而言,蓋體320為一塊兩面都平坦的平板,其可以是透明的。例如,蓋體320可以是玻璃板或是壓克力板。當然,如同圖3實施例所述的蓋體220,蓋體320也可以是不透明的,並且可被紅外光完全穿透。所以,蓋體320不限定是透明的。此外,蓋體320也可以是透鏡,例如凸透鏡或凹透鏡,而圖1中的蓋板121與圖4中的蓋體320可以彼此替換,即蓋體320與蓋板121皆可用於發光元件100與300任一者。There is another difference between the light-emitting elements 300 and 100, which lies in the cover 320. In detail, the cover 320 is a flat plate that is flat on both sides, which may be transparent. For example, the cover 320 may be a glass plate or an acrylic plate. Of course, as with the cover 220 described in the embodiment of Figure 3, the cover 320 can also be opaque and can be completely penetrated by infrared light. Therefore, the cover 320 is not limited to being transparent. In addition, the cover 320 can also be a lens, such as a convex lens or a concave lens, and the cover plate 121 in FIG. 1 and the cover 320 in FIG. 4 can be replaced with each other, that is, the cover 320 and the cover plate 121 can be used for the light-emitting element 100 and 300 of any.

綜上所述,利用通氣貫孔,可將發光元件的空腔內的空氣排出,並搭配使用密封材料來密封通氣貫孔,如此,密封材料不僅能阻擋水氣與氧氣從外界環境並經由通氣貫孔進入空腔內,而且還能保持空腔處於真空環境,或是處於惰氣氣氛、氮氣氣氛或氮氣與惰性氣體混合的氣氛,從而保護發光晶片不受水氣與氧氣的損傷。此外,本創作實施例的發光元件製造方法可在小型或中型真空腔體(請參閱圖2C至圖2D)內進行,無須使用大型真空腔體。相較於現有技術,本創作實施例的發光元件製造方法具有低製造成本的優點。In summary, the venting through hole can be used to discharge the air in the cavity of the illuminating element, and the sealing material is used to seal the venting through hole, so that the sealing material can not only block the moisture and oxygen from the external environment and through the ventilation. The through hole enters the cavity, and can also keep the cavity in a vacuum environment, or in an inert atmosphere, a nitrogen atmosphere or an atmosphere in which nitrogen and an inert gas are mixed, thereby protecting the light-emitting wafer from moisture and oxygen. Further, the method of manufacturing the light-emitting element of the present embodiment can be carried out in a small or medium-sized vacuum chamber (see FIGS. 2C to 2D) without using a large vacuum chamber. Compared with the prior art, the light-emitting element manufacturing method of the present embodiment has an advantage of low manufacturing cost.

雖然本創作已以實施例揭露如上,然其並非用以限定本創作,本創作所屬技術領域中具有通常知識者,在不脫離本創作之精神和範圍內,當可作些許之更動與潤飾,因此本創作之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Those skilled in the art to which the present invention pertains may have some modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of this creation is subject to the definition of the scope of the patent application attached.

21‧‧‧真空腔體
22‧‧‧幫浦
23‧‧‧氣閥
100、200、300‧‧‧發光元件
110、210、310‧‧‧載件
111、211、311‧‧‧板體
111a、311a‧‧‧第一表面
111b‧‧‧第二表面
111h、211h‧‧‧通氣貫孔
112‧‧‧導引金屬層
113‧‧‧密封材料
113i‧‧‧填充金屬材料
114a、114b‧‧‧線路層
115‧‧‧導電柱
120、220、320‧‧‧蓋體
121、221‧‧‧蓋板
122、222、316‧‧‧支撐框
130‧‧‧發光晶片
131‧‧‧出光面
140‧‧‧惰性填充氣體
C1‧‧‧空腔
H1‧‧‧第一部孔
H2‧‧‧第二部孔
H21‧‧‧連通孔
H22‧‧‧凹槽
L1‧‧‧光線
V1‧‧‧真空環境
21‧‧‧vacuum chamber
22‧‧‧ pump
23‧‧‧ gas valve
100, 200, 300‧‧‧Lighting elements
110, 210, 310‧‧‧ shipments
111, 211, 311‧‧‧ board
111a, 311a‧‧‧ first surface
111b‧‧‧second surface
111h, 211h‧‧‧ venting through hole
112‧‧‧ Guide metal layer
113‧‧‧ Sealing material
113i‧‧‧Filled metal materials
114a, 114b‧‧‧ circuit layer
115‧‧‧conductive column
120, 220, 320‧‧‧ cover
121, 221‧‧ ‧ cover
122, 222, 316‧‧‧ support frame
130‧‧‧Lighting chip
131‧‧‧Glossy surface
140‧‧‧Inert filling gas
C1‧‧‧ cavity
H1‧‧‧ first hole
H2‧‧‧ second hole
H21‧‧‧Connected holes
H22‧‧‧ Groove
L1‧‧‧Light
V1‧‧‧vacuum environment

圖1是本創作一實施例的發光元件的剖面示意圖。 圖2A至圖2E是圖1中的發光元件的製造方法的剖面示意圖。 圖3是本創作另一實施例的發光元件的剖面示意圖。 圖4是本創作另一實施例的發光元件的剖面示意圖。BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing a light-emitting element of an embodiment of the present invention. 2A to 2E are schematic cross-sectional views showing a method of manufacturing the light-emitting element of Fig. 1. Fig. 3 is a schematic cross-sectional view showing a light-emitting element of another embodiment of the present invention. Fig. 4 is a schematic cross-sectional view showing a light-emitting element of another embodiment of the present invention.

100‧‧‧發光元件 100‧‧‧Lighting elements

110‧‧‧載件 110‧‧‧Ship

111‧‧‧板體 111‧‧‧ board

111a‧‧‧第一表面 111a‧‧‧ first surface

111b‧‧‧第二表面 111b‧‧‧second surface

111h‧‧‧通氣貫孔 111h‧‧‧ Vented through hole

112‧‧‧導引金屬層 112‧‧‧ Guide metal layer

113‧‧‧密封材料 113‧‧‧ Sealing material

114a、114b‧‧‧線路層 114a, 114b‧‧‧ circuit layer

115‧‧‧導電柱 115‧‧‧conductive column

120‧‧‧蓋體 120‧‧‧ cover

121‧‧‧蓋板 121‧‧‧ Cover

122‧‧‧支撐框 122‧‧‧Support frame

130‧‧‧發光晶片 130‧‧‧Lighting chip

131‧‧‧出光面 131‧‧‧Glossy surface

140‧‧‧惰性填充氣體 140‧‧‧Inert filling gas

C1‧‧‧空腔 C1‧‧‧ cavity

H1‧‧‧第一部孔 H1‧‧‧ first hole

H2‧‧‧第二部孔 H2‧‧‧ second hole

H21‧‧‧連通孔 H21‧‧‧Connected holes

H22‧‧‧凹槽 H22‧‧‧ Groove

L1‧‧‧光線 L1‧‧‧Light

Claims (13)

一種發光元件,包括: 一載件,包括: 一板體,具有一第一表面、一相對該第一表面的第二表面以及一通氣貫孔,其中通氣貫孔區分成一第一部孔(first partial hole)與一連通該第一部孔的第二部孔,該第一部孔從該第一表面延伸至該第二部孔,而該第二部孔從該第二表面延伸至該第一部孔; 一導引金屬層,形成於該第二表面上與該第二部孔內,並覆蓋該第二部孔的孔壁,其中該導引金屬層從該第二部孔延伸至該第二表面,並且不覆蓋該第一部孔的孔壁與該第一表面; 一密封材料,填入於該第二部孔內,並密封該第二部孔,其中該導引金屬層圍繞該密封材料; 一線路層,形成於該第一表面上;以及 一發光晶片,裝設於該第一表面上,並電連接該線路層;以及 一蓋體,配置於該載件上,其中該蓋體與該板體之間形成一空腔,而該發光晶片位於該空腔內。A light-emitting component comprising: a carrier comprising: a plate having a first surface, a second surface opposite the first surface, and a venting aperture, wherein the venting aperture is divided into a first aperture (first a partial hole and a second hole communicating with the first hole, the first hole extending from the first surface to the second hole, and the second hole extending from the second surface to the first a hole; a guiding metal layer formed on the second surface and the second hole and covering the hole wall of the second hole, wherein the guiding metal layer extends from the second hole to The second surface does not cover the hole wall of the first hole and the first surface; a sealing material is filled in the second hole and seals the second hole, wherein the guiding metal layer Surrounding the sealing material; a circuit layer formed on the first surface; and a light-emitting chip mounted on the first surface and electrically connected to the circuit layer; and a cover disposed on the carrier Wherein a cavity is formed between the cover and the plate body, and the light emitting chip is located in the space Inside the cavity. 如請求項1所述之發光元件,其中該第二部孔具有一凹槽與一連通孔,該凹槽從該第二表面延伸至連通孔,而該連通孔從該凹槽底部延伸至該第一部孔。The illuminating element of claim 1, wherein the second hole has a groove and a communication hole extending from the second surface to the communication hole, and the communication hole extends from the bottom of the groove to the The first hole. 如請求項2所述之發光元件,其中該導引金屬層覆蓋該連通孔的孔壁與該凹槽的側壁。The illuminating element of claim 2, wherein the guiding metal layer covers a hole wall of the communication hole and a sidewall of the groove. 如請求項1所述之發光元件,其中該密封材料接觸該導引金屬層。The light-emitting element of claim 1, wherein the sealing material contacts the guiding metal layer. 如請求項1所述之發光元件,其中該密封材料為金屬材料。The light-emitting element of claim 1, wherein the sealing material is a metal material. 如請求項1所述之發光元件,其中該蓋體具有一容置槽,而該空腔由該容置槽與該板體所定義。The illuminating element of claim 1, wherein the cover has a receiving groove defined by the receiving groove and the plate. 如請求項1所述之發光元件,其中該載件包括一支撐框,該支撐框凸出於該第一表面,並圍繞該發光晶片,且該支撐框固定於該板體與該蓋體之間。The light-emitting element of claim 1, wherein the carrier comprises a support frame protruding from the first surface and surrounding the light-emitting chip, and the support frame is fixed to the plate body and the cover body between. 如請求項1所述之發光元件,其中該蓋體包括: 一蓋板;以及 一支撐框,圍繞該發光晶片,並固定於該板體與該蓋板之間。The light-emitting element of claim 1, wherein the cover comprises: a cover; and a support frame surrounding the light-emitting chip and fixed between the plate and the cover. 如請求項8所述之發光元件,其中該蓋板是透明的。The illuminating element of claim 8, wherein the cover is transparent. 如請求項8所述之發光元件,其中該蓋板是不透明的。The illuminating element of claim 8, wherein the cover is opaque. 如請求項1所述之發光元件,其中該發光晶片為紅外光光源、可見光光源或紫外光光源。The illuminating element of claim 1, wherein the illuminating wafer is an infrared light source, a visible light source or an ultraviolet light source. 如請求項1所述之發光元件,還包括一惰性填充氣體,該惰性填充氣體充滿該空腔內,並選自於由惰性氣體與氮氣所組成的群組。The light-emitting element according to claim 1, further comprising an inert filling gas filled in the cavity and selected from the group consisting of an inert gas and nitrogen. 如請求項1所述之發光元件,其中該空腔內的環境為真空。The illuminating element of claim 1, wherein the environment within the cavity is a vacuum.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI664751B (en) * 2017-02-24 2019-07-01 聯京光電股份有限公司 Light emitting device and method of manufacturing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI664751B (en) * 2017-02-24 2019-07-01 聯京光電股份有限公司 Light emitting device and method of manufacturing the same

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