M334129 八、新型說明： 【新型所屬之技術領域】 隨著工業的發展，對於材料的要求愈多元化，使得材料面 對更加嚴謹的挑戰，耐腐餘與磨耗的要求也愈來愈迫切，在許 多刀具、沖頭聽具的表面上，進行真空鍍驗層的被覆，也 就成為-項重要的与技術顧，制的微細_刀具相應為 微細車刀、平頭及球頭立銑刀、飛刀和鑽頭，細刀具應具有較 回的表面完整性及較小的表面粗縫度和微觀成行缺陷。 車父差的表面品質不僅會增加微細切削時的摩擦阻力，導致 加工表面惡化，將抗磨耗的超硬陶瓷薄膜應用在產品中，於 3C產品如印刷電路板等，多元高性能合金（High—E針⑺取 Alloys)是一嶄新的合金設計理念，單一主成分的合金設計觀 念’由已往研究中發現多元高性能合金在晶體結構及各種性質 上’和傳統合金有極大的差異，其中又以一種可同時將、妒、 Cr'Zr' Ta等多元高性能合金藉電弧熔煉成錠狀，更是突破 目前技術領域之中大成就者。 【先前技術】 傳統工業（如：機械工業、航太科技…等）隨著工業發展 對於材料的要求愈多元化，使得材料面對更加嚴謹的挑鉍，耐 腐钱與磨耗的要求也愈來愈迫切在許多刀具、沖頭及模具的表 面上，進行真空鍍膜塗層的被覆，也就成為一項重要的工業技 M334129 術應用’使用的微細切削刀具相應為微細車刀、平頭及球頭立 銑刀、飛刀和鑽頭，細刀具應具有較高的表面完整性及較小的 表面粗綠度和微贼行祕，較差的絲品f賴會增加微細 切削時的摩擦阻力，導致加卫表面惡化；其以多元者要成份取 代傳統上使用單一主要成分合金設計觀念。 【新型内容】M334129 VIII. New description: [New technology field] With the development of industry, the more diversified requirements for materials make the materials face more stringent challenges, and the requirements for corrosion resistance and wear are becoming more and more urgent. On the surface of many knives and punches, the coating of the vacuum plating layer is also an important and technical consideration. The micro _tools are micro-tools, flat heads and ball end mills, and fly. Knives and drill bits, fine tools should have a relatively good surface integrity and a small surface roughness and microscopic line defects. The surface quality of the car's father will not only increase the frictional resistance during micro-cutting, but also lead to deterioration of the machined surface. The wear-resistant super-hard ceramic film will be applied to the product. In 3C products such as printed circuit boards, multi-performance alloys (High- E needle (7) takes Alloys) is a new alloy design concept, the single principal component alloy design concept 'from the previous research found that the multi-performance alloy in the crystal structure and various properties' and the traditional alloy are very different, which A multi-functional high-performance alloy such as ruthenium, ruthenium and Cr'Zr' Ta can be smelted into a pellet by arc, and it is a breakthrough in the current technical field. [Prior Art] Traditional industries (such as: machinery industry, aerospace technology, etc.) are more diversified with the requirements of industrial development, making materials more rigorous provocation, and the requirements for corrosion resistance and wear are increasing. The more urgent it is to coat the coating of vacuum coating on the surface of many tools, punches and molds, it becomes an important industrial technology. M334129 Application The micro-cutting tools used are micro-turning tools, flat heads and ball heads. End mills, flying knives and drill bits, fine knives should have high surface integrity and small surface roughness and micro thief secrets. Poor silk products will increase the frictional resistance during micro-cutting, resulting in The surface of the surface is deteriorating; it replaces the traditional design concept of a single major component alloy with a multi-component component. [New content]
-本創作係為-種多元高性能合金靶材之結構，尤指一種可 同寺將Τι V、Cr、Zr、Ta多το高性能合金藉電弧熔煉成錠狀 ^ 既可減少電漿系、统依賴達降低設備造價與製造成本之實用 經濟效益者，並增加材料表㈣腐賴耐磨耗之工業迫切需要 以多7L主要成份取代傳統上使用單一主成分的合金, 计親念，由已往研究巾發财元高性能合金在晶舰構及各ί 性^ ’和傳統合金有極大的差異，包括：⑴易產生無和 =曰貝相及奈米析出物；⑵良好的熱穩定性;(3)極高的石j 度（4)優越之耐腐蝕性。 【實施方式】 通^根據摘作之具體實施情況，關時將Ti、V、Cr、 Γ、々多元高性能合金藉電弧_成錠狀者，該多元高性能 M334129 合金鍵齡來當作顧狀树2，本練2侧崎頻磁 控物理雜設備3之驟產生系、_電解後魏積多元高性 的合金氮錄_再基材31上，_增加材料表面耐腐钱與 财磨耗之工業迫切需要者，並因可同時將Ti、v、- This creation is a structure of a multi-component high-performance alloy target, especially a kind of high-performance alloy of Vι V, Cr, Zr, Ta, and can be smelted into an ingot by the same temple. Relying on the practical economic benefits of reducing the cost of equipment and manufacturing costs, and increasing the material list (4) The industry that is resistant to wear and tear is urgently required to replace the traditionally used single-component alloy with more than 7L of main components. Research on the development of high-performance alloys in the crystal ship in the crystal ship and the various ^ ' and the traditional alloys have great differences, including: (1) easy to produce no and = mussel phase and nano precipitates; (2) good thermal stability; (3) Extremely high stone j degree (4) Superior corrosion resistance. [Embodiment] According to the specific implementation of the abstract, the Ti, V, Cr, Γ, 々 multi-high-performance alloys are arc-formed into the shape of the alloy, and the multi-component high-performance M334129 alloy is used as the age of the bond. Shape tree 2, this training 2 side Saki frequency magnetic control physical equipment 3 sudden generation system, _ post-electrolysis Wei product multi-high alloy nitrogen record _ re-substrate 31, _ increase material surface corrosion resistance and wealth wear The industry is in urgent need, and because it can simultaneously Ti, v,
Ta多元高性能合金藉電弧溶煉一體成則大者。 其中無材2之結構’係選擇TiCrZrTa多元高性能合金 為乾材元素，並以真空電弧溶解爐⑽，爐溶解量約⑽ 克）將純 Zr ( 99· 8%)、Ti (99· 8%)、A1 (99· 9%)、v (如.⑽） 及^ (99.9%)等合金料置於水冷姆_，抽真空至 ω 〇 6t〇rr後’在通入高純度Ar (5N5)於〇. _壓力下進 仃溶解，並且以敝作getter断除氧驗，轉料凝固定 _轉，如此魏解八次以碟保合金均勻，完成母合金赠 製之靶材結構者’料但既可齡絲產㈣驗賴，達降 低設備造價與製造成本之實用經濟效益者。 M334129 【圖式簡單說明】 第一圖：係為射頻磁控物理濺鍍設備之示意圖 第二圖：係為本創作多元高性能合金靶材之立體圖 【主要元件符號說明】 2靶材 3射頻磁控物理濺鍍設備 30電漿產生系統 31基材Ta multi-performance high-performance alloys are integrated by arc melting. Among them, the structure of the materialless material 2 is selected from the TiCrZrTa multi-component high-performance alloy as a dry material element, and the vacuum arc melting furnace (10) has a furnace dissolved amount of about (10) g. The pure Zr (99·8%) and Ti (99·8%) ), A1 (99·9%), v (such as .(10)) and ^ (99.9%) are placed in water-cooled _, and after vacuuming to ω 〇6t〇rr, 'pass high purity Ar (5N5) Yu Yu. _ under pressure, the enthalpy is dissolved, and the sputum is used as a getter to remove the oxygen test, and the transfer material is fixed and _ turn, so that the mechanical solution is uniformed eight times to complete the alloy of the plate, and the target structure of the master alloy is completed. However, it is not only the age of silk production (4), but also the practical economic benefits of reducing equipment cost and manufacturing cost. M334129 [Simple description of the diagram] The first picture is a schematic diagram of the RF magnetron physical sputtering equipment. The second picture is the perspective view of the multi-component high-performance alloy target. [Main component symbol description] 2 Target 3 RF magnetic Control physical sputtering device 30 plasma generation system 31 substrate