TWM312786U - Surface acoustic wave filter with tunable bandwidth and high passband selectivity - Google Patents

Surface acoustic wave filter with tunable bandwidth and high passband selectivity Download PDF

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Publication number
TWM312786U
TWM312786U TW95222558U TW95222558U TWM312786U TW M312786 U TWM312786 U TW M312786U TW 95222558 U TW95222558 U TW 95222558U TW 95222558 U TW95222558 U TW 95222558U TW M312786 U TWM312786 U TW M312786U
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Taiwan
Prior art keywords
surface acoustic
acoustic wave
electrode
suppression
electrode fingers
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TW95222558U
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Chinese (zh)
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Hsin-Yuan Tung
Ru-Yen Lo
Hsin-Hsien Wu
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Advance Design Technology Inc
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Priority to TW95222558U priority Critical patent/TWM312786U/en
Publication of TWM312786U publication Critical patent/TWM312786U/en

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Description

M312786 八、新型說明: -【新型所屬之技術領域】 本創作係有關於一種表面聲波濾波器,其特別有關於一種藉由 Kaiser視窗函數設計之表面聲波濾波器,使其具有可調頻寬與高旁波 辦抑制之功能。 【先前技術】 瞻表面聲波(surface acoustic wave,SAW)諧振濾波器目前廣泛地應 用於行動式通訊裝置中。近幾年來,數位信號傳送技術已經在機動通 訊系統變得普遍。然而,不像類比機動通訊系統,數位機動通訊系统 用的那些濾波為非常需要不僅有南溫穩定性和在頻帶邊緣明顯的戴止 特性,也需要有一寬的頻寬和一遍於全部帶通之上的平坦波群延遲時 間特性。特別地,這些要求對中頻(IF)濾波器是具決定性的。 &挺員比行動式的通訊系、统中,絲聲波濾波器由橫向連結的表面 •聲波譜振器所組成。橫向的表面聲波濾波器或縱向連結的表面聲波譜 振濾波器被用在那些數位機動通訊系統來献上述的要求。雖然橫: f面耳波濾波器有能輕易連到寬的頻寬和平坦的波群延遲時間特性^ 優點,但是它們也有高插入損耗與低旁㈣抑制的缺,而且難以較 小尺寸生產此種濾波器。 表面聲波共振器(surface acoustic wave _ ::::件概糊式。雜為㈣娜域上)_= 包極及反射^當外界南頻電訊號傳送到此元件時,經由逆壓 M312786 電效應,電訊號將轉成聲波訊號,此聲波將在由兩個反射器所形成的 共振腔中產生串聯共振與並聯共振。經由適當地設計壓電^料指又 狀電極及反射獅職、金屬厚度,可以設計此共振器之中心辦。 在先前技術中’若欲得到足夠的頻寬必須選擇機電轉合因數較大 的基板材料(如γ _ 36度_轉),或騎梯式·器之恤 共振器之中心頻率設計較為分開。然而,機賴合目數大的基板材料 有限,而且即使機_合隨大,但其他材料特性不佳(如頻率温度 係數太大),減會關此基姆料的剌。料若將_式滤波哭 =兩組共振器之中心頻率設計較為分開,由於阻抗匹配之故,將使得 ^波器頻轉應在帶财心部份魅較大_人難。料要獲得一 數有高_抑制能力的階梯式_,傳統上需增加 數’但相·將增加树狀寸。又,賴 2 加通訊系統錯誤率的增特別是較差的旁波辦抑制會增 而降低系統的可靠度。㈣錢對於外界干擾變的非常敏感,因 因=為了解決這_題,有需錢供—觀 从克服先前技術的缺點。 耳政4及态 【新型内容】 之問題,本創作-種提供具有可調頻寬與 與高旁 波辦抑制之絲聲波濾_,、* … 之重疊寬度,用以調整_ = _視_函數設計該指又式電極 皮裔之頻寬。另外,利用不等比例方式設 M312786 …十濾'波☆中兩共振器之重疊寬度之比例,可增加該濾波器之旁波辦抑 -制。 本創作之主要目的在於提供—種具有可調頻寬與高旁波辦抑制之 表面聲麟妓,藉由Kaisei: •聽料該指叉錢極之重疊寬 度’用以調整該濾波器之頻寬。 賴作之丨—目的松提供1具有可糊寬錢较辦抑制之 表面聲波驗n,藉由不#_方式設計濾波財兩共振器之重疊寬 _度之比例,可增加該濾波H之旁波辦抑制。 為^上返之主要目的’本創作提供—種具有可調頻寬與高旁波辦 =之表鱗賴波n,其結構料有兩抑h鮮之表面聲波共 “以階_式串接域’該表面聲波共振要包含—壓電基板. —指叉式電極;以及細。純叉式電極配置钱祐 ^魏個反射祕配題魏板上並分獅成_ 2 ’該稷數個下電極指狀物係與該複數個上電極指狀物曰 極結構;該複數個上電極指狀物與複數個下電極指狀狀重=2電 Μ不均勻形式配置’可調整該表面聲波濾波器之頻寬。i見又係 為達上述之另-目的,本創作提供—種具有可= ,歡表面聲魏波器,其"複數個表面聲波共振^重二波辦 M不等比例方式配置,_增加驗器之旁__。 根據本創作之一特徵,該複數個上電 狀物之重疊寬度係以Kaiser.視窗函數決定。&數個下電極 M312786 ' 為讓本創作之上述和其他目的、特徵、和優點能更明顯易懂,下 •文特舉數個較佳實施例,並配合所附圖式,作詳細說明如下。 【實施方式】 雖然本創作可表現為不同形式之實施例,但附圖所示者及於下文 、兒月者係為本創作可之較佳實施例,並請了解本文所揭示者係考量 :虐丨作之範例,且並非意圖用以將本創作限制於圖示及/或所描述 之特定實施例中。 -题ΐ參照第1圖’如圖所示為表骑波共振器1G之結構圖。包含有 —屋電基板90 ;—指又式電極5();糊贩抑3()。織叉式電極 配置於該壓電基板90上;複數個反射哭3〇你阶罢认#厂+ 上並分別料料减做I 30値置於雜電基板如 抑dir電極5G之—端。該具有可調頻寬與高旁波辦 响之表面聲波驗H 8G如圖2所示。 狀物有複數虹電極錄物2G鱗數個下電極指 成指又式電極5G ^触狀物21係與該複數個上_狀物2〇形 狀物2!之重疊寬^;、該複數個上餘餘物2G與複數個下電極指 、又系以不均勻形式配置,可整 8〇之頻寬。其中,該n 亥表面琴波濾波器 電極4m㈣ 包含―第一㊆㈣以及一第二 及該第二4G配置於該複數個上細旨狀物2〇之1 ;以 η兮厂屯配置於該複數個下電極指狀物21之—端。”立 疋,该壓電基板9〇之 又柒。主意的 板;該指又式電極5〇 Υ切割Χ傳播之邱〇3基 之材料係使用翻,、鶴,、鋼、金、絡、 M312786 ‘ YBCO肖ITO所組成族群巾之_種材料。根據本創作之最佳實施例, _該指叉式電極50之材料係使用鋁。 本創作之主旨在於藉由Kaisw視窗函數設計該指叉式電極5〇之重 度’用以调整該表面聲波濾波器8〇之頻寬。另外,利用不等比例 方弋又计該表面聲波濾波器8〇中兩共振器之重疊寬度之比例,用以增 力絲面耳波濾波為8〇之旁波辦抑制。因此,一般來說,該表面聲波 振10之屯又式電極5〇之重疊寬度(〇_叩wi她)為相等,但此類 φ 5L之振若用於階梯式指叉式電極之結構時,其頻率響應特性較 不理想(旁波辦抑制能力較低且頻寬有一定限制)。但採用視窗 函絲設計該表面聲波共振器1〇之重疊寬度時,將增加該表面聲波共 振态10之串聯共振點與並聯共振點之距離,也因此能夠增加該表面聲 波濾波器、80之頻寬。重疊寬度不等比例的技術將可以增加該表面聲波 ;慮波80之旁波辦抑制能力。結合此兩種技術將可以設計出一具有高 旁波辦抑制及高頻寬之該表面聲波濾波器80。M312786 VIII. New description: - [New technical field] This creation is about a surface acoustic wave filter, which is especially related to a surface acoustic wave filter designed by Kaiser window function, which has adjustable bandwidth and height. Side wave suppression function. [Prior Art] Surface acoustic wave (SAW) resonant filters are currently widely used in mobile communication devices. In recent years, digital signal transmission technology has become commonplace in mobile communication systems. However, unlike analog mobile communication systems, those used in digital mobile communication systems are highly desirable to have not only souther temperature stability but also significant wear characteristics at the edge of the band, but also a wide bandwidth and one pass. Flat wave group delay time characteristics. In particular, these requirements are decisive for intermediate frequency (IF) filters. & is better than the mobile communication system, the system, the silk acoustic wave filter consists of a laterally connected surface • Acoustic spectrum oscillator. Lateral surface acoustic wave filters or longitudinally coupled surface acoustic wave spectral filters are used in those digital mobile communication systems to meet these requirements. Although the horizontal: f-face ear filter has the advantage of being able to easily connect to wide bandwidth and flat wave group delay time characteristics, they also have high insertion loss and low side (four) suppression, and it is difficult to produce this in a smaller size. Kind of filter. Surface acoustic wave resonator (surface acoustic wave _ :::: paste type. Miscellaneous (four) Na domain) _= Baoji and reflection ^ When the external south frequency signal is transmitted to this component, via the reverse voltage M312786 The electrical signal will be converted into an acoustic signal that will produce series resonance and parallel resonance in the resonant cavity formed by the two reflectors. The center of the resonator can be designed by appropriately designing the piezoelectric electrode and the electrode and the reflective lion's position and metal thickness. In the prior art, if a sufficient bandwidth is desired, it is necessary to select a substrate material having a large electromechanical coupling factor (e.g., γ _ 36 degrees _ turn), or a center frequency design of a ladder-type body resonator is relatively separate. However, the substrate material with a large number of meshes is limited, and even if the machine is large, the other material properties are not good (such as the frequency temperature coefficient is too large), which reduces the enthalpy of the kiwi material. If the _-type filter is crying = the center frequency design of the two sets of resonators is more separate, due to the impedance matching, it will make the frequency of the waver should be more attractive. It is expected that a number of steps with high _ suppression capability will be added, and it is traditionally necessary to increase the number ' but the phase will increase the tree size. In addition, the increase in the error rate of the Lai 2 plus communication system, especially the poor side-wave suppression, will increase the reliability of the system. (4) Money is very sensitive to external interference, because = in order to solve this problem, there is a need for money to overcome the shortcomings of the prior art. The problem of the ear-polished 4 and the state [new content], this creation-species provides the overlapping width of the sine wave filter _, , * ... with adjustable bandwidth and high side-wave suppression to adjust _ = _ visual_function Design the bandwidth of the finger-type electrode skin. In addition, by using the unequal ratio method to set the ratio of the overlap width of the two resonators in the M312786 ... ten filter 'wave ☆, the side wave suppression of the filter can be increased. The main purpose of this creation is to provide a surface acoustic symmetry with adjustable bandwidth and high side-wave suppression, by Kaisei: • Listening to the overlap width of the fork to adjust the bandwidth of the filter .赖 丨 丨 —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— —— Wave suppression. For the main purpose of returning to the original 'this creation provides a kind of adjustable scale width and high side wave to do the scale scale Laibo n, the structure of the material has two suppression of the fresh surface acoustic wave "to the _-type concatenation domain 'The surface acoustic wave resonance should include - piezoelectric substrate. - Finger fork electrode; and fine. Pure fork electrode configuration Qian You ^ Wei a reflection secret matching problem on the Wei board and divided into lions _ 2 'The number of times The electrode fingers are connected to the plurality of upper electrode fingers and the bottom electrode structure; the plurality of upper electrode fingers and the plurality of lower electrode fingers are in the form of a weight=2 electric uneven distribution configuration to adjust the surface acoustic wave filter The bandwidth of the device. I see it is the other purpose of the above, this creation provides a kind of can, = Huan surface acoustic wave, its " plural surface acoustic resonance ^ two waves do not equal ratio Mode configuration, _ add detector next to __. According to one of the features of this creation, the overlap width of the plurality of power-ups is determined by the Kaiser. window function. & several lower electrodes M312786 'for the creation of this The above and other objects, features, and advantages will be more apparent and easy to understand. The embodiments are described in detail below with reference to the accompanying drawings. [Embodiment] Although the present invention can be embodied in different forms, the figures shown in the drawings and the following are intended to be creative. The preferred embodiment is to be understood as an example of abusive practice and is not intended to limit the present invention to the particular embodiments illustrated and/or described. Figure 'As shown in the figure, the structure diagram of the surface riding resonator 1G includes - the house substrate 90; - the finger electrode 5 (); the paste vendor 3 (). The fork electrode is disposed on the piezoelectric On the substrate 90; a plurality of reflections cry 3 〇 阶 罢 # 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂 厂The surface acoustic wave test H 8G of the operation is shown in Fig. 2. The object has a plurality of rainbow electrode recordings, 2G scales, a lower electrode finger, a finger-shaped electrode 5G, a touch 21, and the plurality of upper elements 2重叠 Shape 2! The overlap width ^;, the plurality of upper residuals 2G and a plurality of lower electrode fingers, and in a non-uniform form, can be 8 The n-hai surface acoustic wave filter electrode 4m (4) includes "the first seven (four) and a second and the second 4G are disposed on the plurality of upper objects 2; The plurality of lower electrode fingers 21 are end-to-end. The piezoelectric substrate 9 is further folded. The board of the idea; the material of the finger-type electrode 5〇 Υ Χ Χ Χ 〇 〇 〇 基 基 基 基 基 基 、 、 、 、 、 、 、 、 鹤 鹤 鹤 鹤 鹤 鹤 鹤 鹤 鹤 鹤 鹤 鹤 鹤 鹤 鹤 鹤 鹤 鹤 鹤 M M M M M M M M M M M According to a preferred embodiment of the present invention, the material of the interdigitated electrode 50 is aluminum. The main idea of the present invention is to design the weight of the yoke electrode 5 藉 by the Kaisw window function to adjust the bandwidth of the surface acoustic wave filter 8 。. In addition, the ratio of the overlapping widths of the two resonators in the surface acoustic wave filter 8 is calculated by using the unequal ratio square, and the side wave filtering of the surface of the surface acoustic wave filter is used to suppress the side wave of 8 〇. Therefore, in general, the overlap width (〇_叩wi her) of the surface acoustic wave 10 of the surface acoustic wave 10 is equal, but such a vibration of φ 5L is used for the structure of the stepped interdigital electrode. The frequency response characteristics are less than ideal (the side-wave suppression capability is low and the bandwidth is limited). However, when the overlap width of the surface acoustic wave resonator is designed by using the window filament, the distance between the series resonance point of the surface acoustic wave resonance state 10 and the parallel resonance point is increased, and thus the surface acoustic wave filter and the frequency of the 80 are increased. width. A technique in which the overlapping widths are not equal will increase the surface acoustic wave; the side wave of the wave 80 can suppress the ability. Combining these two techniques, a surface acoustic wave filter 80 having high sideband suppression and high frequency width can be designed.

見窗函數常被用於有限脈衝響應(m)濾波器之設計,在一個FIR 2系統中,利用視窗函數如Kaiser、Hanning、Η__與版恤 寻^只要給定此系統之長度,帶通寬度及旁波辦抑制大小,我們即可 以獲得-組加權係數可以用來設計FIR濾波蒸。由於實際的指叉式電 極5〇其對數是有限的,整個該指叉式電極π之頻率響應可以近似為 “曰又對之個別解響應總如。因此我們可以利用視窗函數獲得一組 加權係數來設計該指叉式電極5〇之物理結構(重疊寬度大小)Γ視窗函 數之加權係數可以由下式決定·· 10 M312786 w(n)= ⑻ Μ /0(α) f 1 2 Ο otherwise ⑴ 其中Ιο是第零階修正型貝索函數的笫— 型伸e zeroth order modified Bessel function of the first kind), 〇.25x2 . f〇.25x2)2 (〇.25x2)3 (3〇2 ⑻2 I q (x) = 1 + · (2) .是任意實數:魏N為視窗錢喊度。參數可絲示成下式: 、,ί U-ijj (3) 有歓驗時,該表醉軸、絲8G將具錄大的頻寬但相 =也其旁_卩概力賴少,反之·具編、的辦,_將呈 P小的織但姆地其旁输卩概力㈣加,藉由㈣.的从 在1 P可以獲侍所欲没計慮波器之頻寬及旁波辦抑制能力。因此,冬 3要姻Kaise刚函絲_旨叉雜_4寬度大小時二 將原本具有相同重疊寬度之指又換能器之各指叉對,將其重疊寬度 直接乘上所得之視窗函數加權係數即可。 & «上述之設計公式’即可得到—組加權係數,如第3圖所示, 二二出4表面聲波共振器1G之該指叉式電極5G重疊寬度比例關 声^圖中,其該指叉式電極5〇係為3〇對:粗實線表示為相同寬 二’細實線表示為採用Kaiser視窗函數(賊,=2)設計後之寬度。 =該圖之分析’即可適當選擇該指叉式電極5〇之重疊寬度。為了表 第Kalser視窗函數設計之該指叉式電極%之頻率響應,請參照 。/、‘員示為以不同Kaiser視窗函數設計該表面聲波共振器1〇 11 M312786 率二應。在該圖中’實線代表該指叉式電極5°未採用κ— 事又式電極5G數目為鄉虛線㈣,.吐4)及粗鏈線 U 了,=)表示為採細κ如係數設計1dt之編。根據該 声可有it _ Κ_ __咐該指叉式電極5〇重疊寬 :有錄大共振器1G的並聯共振點的距離,並藉此達_整頻寬的 政果。 以驗雜用Kaiser視窗函數設計該表面聲波共振器10確實可 抑制之所福該具有可_寬與高旁波辦 調鐵,8()之頻率f應圖°在_中’細實線表示未經 驗證兮‘=^用Kalser視窗函數調變(Μ=30, ·=2Ό)。由圖中可 之表面耳波滤波器80之頻寬確實可以藉由Kaiser視窗函數調整 80 頻率表面聲波面聲波濾波器8G係由一高共振 而成,且操作在_頻率Γ面: 乍紙、振鱗表面聲波共振器㈣之並聯共振辭似。若 振鮮麵聲波共振馳ω _低共振鮮表 她冗之翻又錢_㈣寬度 = :該表面聲波細-之旁波辦— 有可調頻寬與高旁波辦抑制之表面聲波濾波器斷頻率響應㈣例 12 M312786 -來說’若該冑共振頻样面聲波舰驗6〇無低共振_表面聲波 共振器組70之重疊寬度以不同比例配置,如0.8:1.2或0.6:14等。雖 然,該表面聲波濾波器80之旁波辦抑制增加,但該表面聲波濾波器 8〇之頻寬卻大幅縮小。因此,該高共振頻率表面聲波共振器組6〇 : 該低共振頻率表面聲波共振器組7〇之重疊寬度,結合視窗函數 之不等寬度的概念,即可以獲得高旁波辦抑制與可調頻寬的功效。 綜上所述,本創作以鑛的方式,藉由Kaiser視窗函數設計該指 籲又式電極50之重疊寬度以縦該絲躲舰_ 8()之織。另外, 利用不等比例方式設計濾波器巾兩共振器之重疊寬度之比例,可增加 該表面聲波濾波器80之旁波辦抑制。 雖然本創作已以前述較佳實施例揭示,然其並非用以限定本創 作、’=何熟習此技藝者’在不脫離本創作之精神和範圍内,如以不同 的視窗函數設計滤波器之共振器重疊寬度之加權係數,當可作各種之 更動與修改。如地懈釋,都可以作各型式的修正與變化,而不會 •破壞此創作嘯申。因此本創作之保護範圍❺見後附之申請專利範圍 所界定者為準。 13 M312786 【圖式簡單說明】 第1圖顯示為表面聲波共振器之結構圖; 第2圖顯示為本創作之最佳實施例之結構圖; :3圖顯㈣表面聲波共翻之指叉式電極重疊寬度比例圖; 弟4圖顯示相不同Kaisei•視g設計表面聲振器所得之頻率響Window function is often used in the design of finite impulse response (m) filters. In a FIR 2 system, using window functions such as Kaiser, Hanning, Η__ and t-shirts, as long as the length of the system is given, bandpass Width and side-wave suppression size, we can get - group weighting coefficient can be used to design FIR filter steam. Since the actual interdigitated electrode 5〇 has a finite logarithm, the frequency response of the entire interdigitated electrode π can be approximated as “曰 and the response to the individual solutions is always the same. Therefore, we can use the window function to obtain a set of weighting coefficients. To design the physical structure of the interdigitated electrode 5〇 (the size of the overlap width), the weighting coefficient of the window function can be determined by the following formula: · 10 M312786 w(n)= (8) Μ /0(α) f 1 2 Ο otherwise (1) Where Ιο is the zero-order modified Bessel function, 〇.25x2 . f〇.25x2)2 (〇.25x2)3 (3〇2 (8)2 I q (x) = 1 + · (2) . is any real number: Wei N is the window money shouting. The parameter can be expressed as follows: ,, ί U-ijj (3) When there is a test, the watch is drunk , silk 8G will have a large bandwidth, but the phase = also next to it _ 卩 力 赖 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , By (4). From the 1 P can get the waiter's desire to ignore the bandwidth and side-wave suppression ability of the wave. Therefore, the winter 3 is a marriage Kaise just wire _ _ _ _ _ 4 width size two Originally, the fingers with the same overlapping width and the pair of fingers of the transducer can directly multiply the overlap width by the obtained window function weighting coefficient. & «The above design formula can be obtained - group weighting coefficient, such as As shown in Fig. 3, in the two-two-out surface acoustic wave resonator 1G, the interdigitated electrode 5G overlaps the width ratio of the sound. In the figure, the interdigitated electrode 5 is 3 〇 pairs: the thick solid line indicates The same width two 'thin solid line is expressed as the width after design using the Kaiser window function (thief, = 2). = The analysis of the figure can be appropriately selected to overlap the width of the interdigitated electrode 5 。. For the table Kalser window For the frequency response of the finger-finger electrode % of the function design, please refer to /. 'The member shows that the surface acoustic wave resonator is designed with different Kaiser window functions. 〇11 M312786 rate II. In the figure, the solid line represents the The finger-fork electrode 5° is not used κ—the number of the electrode 5G is the dotted line of the township (four), the spit 4) and the thick chain line U, and the =) is the design of the 1dt of the fine-grained κ coefficient. There is _ Κ _ __ 咐 the yoke electrode 5 〇 overlap width: there is a recording large resonator 1G The distance between the parallel resonance points and the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The frequency f of iron, 8 () should be in the _ middle 'thin solid line means unverified 兮 '= ^ with Kalser window function modulation (Μ = 30, · = 2 Ό). The bandwidth of the filter 80 can be adjusted by the Kaiser window function. The 80-frequency surface acoustic wave surface acoustic wave filter 8G is formed by a high resonance and operates at the _frequency plane: 乍 paper, vibrating surface acoustic wave resonator (4) Parallel resonance is similar. If the fresh surface acoustic resonance ω _ low resonance fresh table her redundant turn and money _ (four) width =: the surface acoustic wave fine - the side wave - there is adjustable surface bandwidth and high side wave suppression of the surface acoustic wave filter Frequency response (4) Example 12 M312786 - For example, if the 胄 resonance frequency sample acoustic wave ship is 6 〇 no low resonance _ the overlapping width of the surface acoustic wave resonator group 70 is configured in different proportions, such as 0.8:1.2 or 0.6:14. Although the suppression of the side wave of the surface acoustic wave filter 80 is increased, the bandwidth of the surface acoustic wave filter 8 is greatly reduced. Therefore, the high-resonance frequency surface acoustic wave resonator group 6〇: the low-resonance frequency surface acoustic wave resonator group 7〇 overlap width, combined with the concept of the unequal width of the window function, can obtain high side-wave suppression and adjustable frequency Wide effect. In summary, the present invention designs the overlap width of the finger-receiving electrode 50 by means of a Kaiser window function in a mine manner to woven the wire _ 8 (). In addition, by designing the ratio of the overlapping widths of the two resonators of the filter towel by the unequal ratio method, the side wave suppression of the surface acoustic wave filter 80 can be increased. Although the present invention has been disclosed in the foregoing preferred embodiments, it is not intended to limit the present invention, and it is not limited to the spirit and scope of the present invention, such as designing filters with different window functions. The weighting coefficient of the overlap width of the resonator can be changed and modified. If the land is released, it can be used to make corrections and changes of various types, and it will not destroy the creation of the whistle. Therefore, the scope of protection of this creation is subject to the definition of the scope of the patent application attached. 13 M312786 [Simple diagram of the diagram] Figure 1 shows the structure diagram of the surface acoustic wave resonator; Figure 2 shows the structure diagram of the best embodiment of the creation; 3: Figure 4 (4) Surface acoustic wave common flip fork type Electrode overlap width ratio map; Figure 4 shows the frequency response of different surface acoustic oscillators from different Kaisei

第5圖顯示為具有可調頻寬 第6圖顯示為具有可調頻寬 率響應圖; 之表面聲波濾波H之辭響麵;以及 與高旁波辩卩歡表醉域波器之頻 20上電極指狀物 30反射器 41第二電極Figure 5 is shown as having an adjustable bandwidth. Figure 6 is shown as having an adjustable bandwidth response map; the surface acoustic wave filtering H is the reverberation surface; and the high-side wave is used to determine the frequency of the drunk domain wave device. Finger 30 reflector 41 second electrode

60高共振頻轉鱗波共振器組 【主要元件符號說明】 表面聲波共振器 21下電極指狀物 4〇第一電極 50指又式電極 7〇低共振頻率表面聲波共振器組 8〇表面錢濾波胃 90壓電基板 1460 high resonance frequency conversion scale wave resonator group [main component symbol description] surface acoustic wave resonator 21 lower electrode finger 4 〇 first electrode 50 finger again electrode 7 〇 low resonance frequency surface acoustic wave resonator group 8 〇 surface money Filter stomach 90 piezoelectric substrate 14

Claims (1)

M312786 九、申請專利範圍: 器,其主要包 1· -種具有可調喊與高旁波爾卩制之表面聲波遽波 含: 一壓電基板; -指叉式電極,係配置於該壓電基板上,具有複數個上電極指狀物 與複數個下電極指狀物,該複數個下電極指狀物係與該複數個上带 極指狀物形成指叉式電極結構; 毛 叉式電極 複數個反射器,係配置於該壓電基板上並分別形成於該指 之一端;以及 9 其中,該複數個上電極指狀倾複數個下電極指狀物之重疊寬 以不均勻形式配置,肋調整 〜 面聲波濾波器之·。 之表 2' ===_1項所述之具有可調織舆高旁波辦抑制之表 面务波滤波益,盆中每累恭装^ "τ 4k私基板之材料係為36。 播之LiTa〇3基板。 I的Y切刮X傳 3·如申請專利範圍第1 面聲波滅妙,以頻寬與^賴抑制之表 耳反〆愿波益,其中該指叉式電極更包含: =电極’係配置於該複數個上電極指狀物之1.以及 一弟二電極,係配置於該複數個下電極指狀物之一端。,及 M312786 乂如申請專利範圍第1項所述之具有可調頻寬與高旁波辦抑制之表 -面聲波遽波器,其中該指叉式電極之材料係使用钥、銘、鶴、翻、 銅、金、鉻、YBCO與ΙΤ0所組成族群中之—種材料。 5.如申專利耗_ 1項所述之具有可調頻寬與高旁波辦抑制之表 面聲麟波器,其中該複數個上電極指狀物與複數個下躲指狀物 之重豐見度係以Kaiser視窗函數或其他視窗函數決定。 6. 一 器,其包含 種具有可_寬與高纽辩卩歡表面聲波濾波 複數個表面聲波共振器; 其中,該複數個表面聲波共振器更包含: 一壓電基板; -指叉式電極’係配置於該壓電基板上,具有複數個上電極指狀物 電 與複數個下電極指狀物,該複數個下電極指狀物係與該複數個上 極指狀物形成指叉式電極結構; 該指叉式電極 複數個反射器,係配置於該壓電基板上並分別形成於 之一端;以及 其中,該複數個共振n之上電極缝物與複數個下電麵狀物之重 疊寬度係以稍勻形式配置,用明整該具有可_寬與高旁 抑制之表面聲波濾波器之頻寬。 〃 7.如申請補棚第5項所述之《可調魅與衫_抑制之表 16 M312786 面聲波濾波器,其中該指叉式電極之材料係使用鉬、鋁、鎢、麵 銅、金、鉻、YBCO與ITO所組成族群中之一種材料。。 8·如申請專魏圍第6項所述之具有可調舰與高綠辩卩制^ 面聲波濾波器,其中該指叉式電極更包含: ^ 一第一電極,係配置於該複數個上電極指狀物之一端;以及 一第二電極,係配置於該複數個下電極指狀物之一端。 9.如申請祠翻第6項所述之具材觸寬與高精辦抑制 面聲波濾、波器,其中共振ϋ之複數個上電極指狀物與複數個下' 指狀物之重疊寬度係以Kaiser視窗函數或其他視窗函數決定。电遂 m如申請專利觀第6顧述之具有可調戦與高旁波辦抑制 面聲波滤波H,其巾職數絲面聲波共之重疊寬度係以不^ 比例方式配置,㈣增加濾波H之旁波辦抑制。 寺 .-種具有可觸寬與高旁波辦抑制之表 / m ^ λ fh rk /皮/慮波咨’其結構係由 具有兩柯巾心解之概财巧聲料 成,該複數個表面聲波共振n主要包含: &概式串接而 一壓電基板; -指叉式電極,係配置於電基板上, 與處下_嶋,職自τ _旨嶋觸 == 17 M312786 極指狀物形成指叉式電極結構; 複數個反射ϋ ’係配置_壓電基板上並分卿成於該指叉式電極 之一端;以及 其中,該複數個上電極指狀物與複數個下電極指狀物之重疊寬度係 以不均勻形式配置’用·整該具有可調織與高旁麟抑制之表 面聲波濾波器之頻寬。 播之LiTa03基板 I2.如申請專纖圍第u項所述之具有可調頻寬與高旁波辦抑制之表 面聲波渡波ϋ,其中該壓電基板之材料係為36。旋轉的γ切割χ傳 !3.如_利範圍第u項所述之具有可調頻寬與高旁波辦抑制之表 面箄波濾波器,其中該指叉式電極更包含: 〖之一端。 一=-電極,係配置於該複數個上電極指狀物之_端;以及 第二電極’係配置於該複數個下電極指狀物· 調頻寬與高旁波辦抑制之表 14·如申请專利範圍第1項所述之具有可 面琴波濾波器,其中該指叉式電極之材料係使用翻、紹、鶴、銘、 銅、金、鉻、YBCO與ίΤ0所組成族群中之一種材料。 範圍第U項所述之具有可調頻寬與高旁波辦抑制之表 曲耳波濾波器,其中該複數個上_狀物與複數個下電極指狀物 18 M312786 之重疊寬度係以Kaiser視窗函數或其他視窗函數決定。M312786 Nine, the scope of application for patents: The main package of the type 1 - a kind of surface acoustic wave chopping with adjustable shouting and high-side Boering contains: a piezoelectric substrate; - the interdigitated electrode, which is placed at the pressure The electric substrate has a plurality of upper electrode fingers and a plurality of lower electrode fingers, and the plurality of lower electrode fingers form an interdigitated electrode structure with the plurality of upper cap fingers; a plurality of reflectors disposed on the piezoelectric substrate and respectively formed at one end of the finger; and 9 wherein the plurality of upper electrode fingers are inclined and the plurality of lower electrode fingers are arranged in an uneven manner , rib adjustment ~ surface acoustic wave filter. The table 2' ===_1 has the adjustable woven high side wave suppression table. The face wave filter benefits, the material in the basin is ^36. The LiTa〇3 substrate was broadcast. I's Y-cutting X-ray 3·If the first surface acoustic wave of the patent application range is extinct, the frequency of the band and the suppression of the ear are counter-willing, and the finger-type electrode further includes: = electrode ' And a second electrode disposed on the plurality of upper electrode fingers is disposed at one end of the plurality of lower electrode fingers. And M312786, for example, the surface-surface acoustic wave chopper with adjustable bandwidth and high side-wave suppression as described in claim 1, wherein the material of the interdigitated electrode is key, inscription, crane, and , copper, gold, chromium, YBCO and ΙΤ0 of the group of materials. 5. The surface acoustic lining device with adjustable width and high sideband suppression as described in the patent _1 item, wherein the plurality of upper electrode fingers and the plurality of lower hiding fingers are heavy The degree is determined by the Kaiser window function or other window functions. 6. A device comprising a plurality of surface acoustic wave resonators having a wide and a high resolution surface acoustic wave filter; wherein the plurality of surface acoustic wave resonators further comprise: a piezoelectric substrate; The system is disposed on the piezoelectric substrate, and has a plurality of upper electrode fingers electrically connected to the plurality of lower electrode fingers, and the plurality of lower electrode fingers form an interdigitated form with the plurality of upper electrode fingers An electrode structure; the plurality of reflectors of the interdigitated electrode are disposed on the piezoelectric substrate and respectively formed at one end; and wherein the plurality of resonance n is above the electrode slit and the plurality of power-off surfaces The overlap width is configured in a slightly uniform form to clarify the bandwidth of the surface acoustic wave filter having _width and height side suppression. 〃 7. If you apply for the tuned charm and shirt _ suppression table 16 M312786 surface acoustic wave filter, the material of the yoke electrode is molybdenum, aluminum, tungsten, copper, gold. A material of the group consisting of chromium, YBCO and ITO. . 8. If the application of the Weiweiwei item 6 has the adjustable ship and the high green dialect system, the surface acoustic wave filter further includes: ^ a first electrode, which is disposed in the plurality of One end of the upper electrode finger; and a second electrode disposed at one end of the plurality of lower electrode fingers. 9. If applying for the smashing of the material width and high precision suppression surface acoustic wave filter and wave device described in Item 6, the overlap width of the plurality of upper electrode fingers and the plurality of lower 'finger fingers of the resonance ϋ It is determined by the Kaiser window function or other window functions. The electric 遂m, as applied for the patent view, has the adjustable 戦 and the high-side wave suppression surface acoustic wave filter H, and the overlapping width of the silk surface acoustic wave of the towel is not proportionally configured. (4) Adding the filter H The side wave is suppressed. Temple.--The table with the touchable and high side wave suppression / m ^ λ fh rk / skin / wave wave consultation' its structure is made up of two kinds of surface acoustic waves The resonance n mainly includes: & a generalized series connection and a piezoelectric substrate; - a finger-type electrode, which is disposed on the electric substrate, and is placed under the _ 嶋, from τ _ 嶋 = == 17 M312786 Forming an interdigitated electrode structure; a plurality of reflective structures are disposed on the piezoelectric substrate and are formed at one end of the interdigitated electrode; and wherein the plurality of upper electrode fingers and the plurality of lower electrode fingers The overlap width of the objects is configured in a non-uniform form to adjust the bandwidth of the surface acoustic wave filter with adjustable weave and high sidelin suppression. LiTa03 substrate for broadcasting I2. The surface acoustic wave wave enthalpy with adjustable width and high side wave suppression as described in the application of the special fiber enclosure, wherein the material of the piezoelectric substrate is 36. Rotating gamma-cutting ! ! 3 3 3 3 3 3 3 3 3 3 3 3 3 3 如 如 如 如 如 如 如 如 如 如 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有a =-electrode is disposed at the end of the plurality of upper electrode fingers; and the second electrode is disposed in the plurality of lower electrode fingers. Table 14 of the modulation width and high side-wave suppression The invention relates to a versatile wave filter according to the first aspect of the invention, wherein the material of the interdigitated electrode is one of a group consisting of turned, Shao, crane, Ming, copper, gold, chromium, YBCO and Τ0. material. The episomic ear wave filter having the adjustable bandwidth and high sideband suppression according to the item U, wherein the overlapping width of the plurality of upper elements and the plurality of lower electrode fingers 18 M312786 is a Kaiser window Function or other window function decision. 1919
TW95222558U 2006-12-20 2006-12-20 Surface acoustic wave filter with tunable bandwidth and high passband selectivity TWM312786U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI481189B (en) * 2010-06-17 2015-04-11 Seiko Epson Corp Surface acoustic wave resonator, surface acoustic wave oscillator and electronic machine

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI481189B (en) * 2010-06-17 2015-04-11 Seiko Epson Corp Surface acoustic wave resonator, surface acoustic wave oscillator and electronic machine

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