TWI785907B - Pressure chamber level maintaining device - Google Patents

Abstract

A pressure chamber level maintaining device includes a chamber, a fixture platform, a base, connecting members and adjusting members. The fixture platform is disposed in the chamber. The base is located outside the chamber. The connecting members are connected to the fixture platform in the chamber and extend outside the chamber to be movably disposed on the base. The adjusting members are disposed outside the chamber and respectively linked to the connecting members to adjust positions of the connecting members relative to the base, so that the fixture platform is level in the chamber.

Description

Pressure chamber level keeping device

The present invention relates to a level maintaining device, and in particular to a pressure chamber level maintaining device.

At present, in view of the increasing number of products using vacuum coating, in the coating process, if the coated parts with tiny patterns are not used as a positioning reference through the horizontal positioning platform, the stacking of the coating patterns will be incomplete, resulting in the inability to effectively produce the desired coating. Performance seriously affects the yield of the product.

However, when the vacuum chamber is evacuated, the chamber wall will be deformed due to negative pressure. Even if a horizontal positioning platform is installed in the vacuum chamber, the horizontal positioning platform fixed on the chamber wall will be difficult to maintain level due to the deformation of the chamber wall. .

The invention provides a device for maintaining the level of a pressure chamber, in which a jig platform located in the cavity can be kept horizontal.

A pressure chamber level maintaining device of the present invention comprises a cavity body, a It has a platform, a base, multiple connecting pieces and multiple adjusting pieces. The jig platform is arranged in the cavity. The base is located outside the cavity. These connecting pieces are connected to the jig platform inside the cavity, and extend out of the cavity to be movably arranged on the base. The adjusting parts are arranged outside the cavity and respectively linked with the connecting parts to adjust the positions of the connecting parts relative to the base so that the jig platform is horizontal in the cavity.

In an embodiment of the present invention, the above-mentioned device for maintaining the level of the pressure chamber further includes a plurality of sealing components disposed outside the cavity and communicated with the cavity, and each sealing component is sleeved on a part of the corresponding connecting member outside the cavity.

In an embodiment of the present invention, each of the above-mentioned sealing components includes a flexible tube, and each flexible tube is sheathed on a part of the corresponding connecting element outside the cavity.

In an embodiment of the present invention, each of the above-mentioned sealing components includes a fixing piece, the fixing piece is disposed at one end of the corresponding flexible tube and fixed on the outer surface of the cavity, and the corresponding connecting piece passes through the fixing piece.

In an embodiment of the present invention, each of the above-mentioned sealing components includes a sealing element, the sealing element is disposed at the other end of the corresponding flexible tube, and the corresponding connecting element passes through the sealing element.

In an embodiment of the present invention, the above-mentioned adjusting elements are disposed between the sealing components and the base, each connecting element includes a screw portion, and each adjusting element is screwed to the screw portion.

In an embodiment of the present invention, the above-mentioned device for maintaining the level of the pressure chamber further includes a plurality of positioning pieces, each adjusting piece and the corresponding positioning piece are clamped on both sides of the base, and each screw part passes through the corresponding adjusting piece, The base and the corresponding positioning parts, the screw of each positioning part connected to the corresponding screw part, so that the corresponding connecting piece is fixed on the base.

In an embodiment of the present invention, each of the above-mentioned flexible tubes includes a corrugated tube.

In an embodiment of the present invention, the above-mentioned device for maintaining the level of the pressure chamber further includes a frame, the cavity is located on the frame, and the base and these connecting parts are located in the frame.

In an embodiment of the invention, when the pressure inside the cavity is lower than the pressure outside the cavity, the cavity is deformed and partially separated from the frame.

Based on the above, in the device for maintaining the level of the pressure chamber of the present invention, the jig platform is arranged in the cavity, and the connecting parts are connected to the jig platform in the cavity, and extend out of the cavity to be movably arranged on the base. In addition, the adjusting part is arranged outside the cavity and linked to the connecting parts to adjust the positions of the connecting parts relative to the base so that the jig platform is horizontal in the cavity. Therefore, the operator only needs to adjust the position of these connecting parts relative to the base to correct the fixture platform in the cavity to be horizontal. In the subsequent process, even if the internal pressure of the cavity is less than or greater than the external pressure And deformation, because the jig platform is fixed on the base outside the cavity through the connecting piece, and does not directly contact the wall of the cavity, therefore, the jig platform in the cavity will not be affected by the deformation of the wall of the cavity, and can remain horizontal.

100: Pressure chamber level maintaining device

110: Cavity

112: Internal space

114: perforation

120: Fixture platform

121:Fixer

121a: through hole

122: connector

122a: screw part

123: seal

125: sealing assembly

126: Adjustment parts

127: Positioning piece

128: flexible tube

130: Rack

135: base

Fig. 1 is a schematic diagram of a pressure chamber level maintaining device according to an embodiment of the present invention.

Fig. 2 is the connecting piece, sealing assembly, adjusting device of the pressure chamber level maintaining device in Fig. 1 Schematic diagram of the whole and positioning parts.

Fig. 3 is a schematic diagram of the chamber of the device for maintaining the level of the pressure chamber in Fig. 1 when the chamber is under negative pressure.

Fig. 1 is a schematic diagram of a pressure chamber level maintaining device according to an embodiment of the present invention. Fig. 2 is a schematic diagram of the connecting part, sealing assembly, adjusting part and positioning part of the device for maintaining the pressure chamber level in Fig. 1 . Fig. 3 is a schematic diagram of the chamber of the device for maintaining the level of the pressure chamber in Fig. 1 when the chamber is under negative pressure.

Referring to FIGS. 1 to 3 , the device 100 for maintaining the pressure chamber level in this embodiment includes a cavity 110 , a jig platform 120 , a base 135 , a plurality of connecting parts 122 and a plurality of adjusting parts 126 . In this embodiment, the cavity 110 includes an inner space 112 . During the process, the inner space 112 may be evacuated, for example, to have a negative pressure, or, for example, the inner space 112 may be filled with gas, to have a high pressure.

The jig platform 120 is disposed in the cavity 110 , therefore, the pressure that the jig platform 120 bears is the pressure of the inner space 112 of the cavity 110 . The base 135 is located outside the cavity 110 , and the pressure that the base 135 bears is external pressure, such as atmospheric pressure.

The cavity 110 includes a plurality of through holes 114 . These connecting members 122 are connected to the jig platform 120 inside the cavity 110 , and extend out of the cavity 110 through the through holes 114 to be movably disposed on the base 135 . The connecting member 122 can move up and down relative to the base 135 and can be fixed on the base 135 .

In detail, in this embodiment, each connecting piece 122 includes a screw portion 122a ( FIG. 2 ). The screw portion 122a is located at the lower end of the connecting piece 122 , but the position of the screw portion 122a is not limited thereto. The screw portion 122 a of the connecting member 122 passes through the base 135 .

In addition, the pressure chamber level maintaining device 100 further includes a plurality of positioning pieces 127 , the positioning pieces 127 have internal threads and can be screwed to the screw portion 122 a and abut against the base 135 to fix the connecting piece 122 to the base 135 .

Therefore, when the positioning member 127 is released, the connecting member 122 can move up and down relative to the base 135 . When the relative position between the connecting member 122 and the base 135 is to be fixed, as long as the positioning member 127 is screwed to the screw portion 122 a and abuts against the base 135 , the connecting member 122 will not move relative to the base 135 .

It should be noted that, in this embodiment, since the pressure in the internal space 112 of the cavity 110 can be negative pressure or high pressure, in order to avoid pressure leakage, the pressure chamber level maintaining device 100 further includes a plurality of sealing components 125, set Outside the cavity 110 and communicated with the cavity 110 .

Specifically, in this embodiment, the sealing assembly 125 includes a flexible tube 128 , a fixing part 121 and a sealing part 123 . The flexible tube 128 is, for example, a corrugated tube. The wall of the flexible tube 128 is airtight and deformable, but the type of the flexible tube 128 is not limited thereto. The flexible tube 128 is sheathed on a portion of the connecting member 122 outside the cavity 110 .

The fixing member 121 is disposed on one end (upper end) of the corresponding flexible tube 128 and fixed on the outer surface of the cavity 110 . The fixing member 121 is, for example, a flange, but not limited thereto system. The fixing member 121 can be locked on the wall of the cavity 110 through screws. The fixing part 121 includes a through hole 121 a corresponding to the through hole 114 of the cavity 110 , and the connecting part 122 passes through the through hole 121 a of the fixing part 121 .

The sealing element 123 is disposed on the other end (lower end) of the corresponding flexible tube 128 , and the connecting element 122 passes through the sealing element 123 . The seal 123 is, for example, a flange, but not limited thereto. An O-ring (not shown) may be provided between the sealing member 123 and the connecting member 122 to maintain airtightness.

As shown in Figure 3, when the wall surface of the cavity 110 is deformed because the internal pressure of the cavity 110 is less than or greater than the external pressure during the manufacturing process, since the fixing member 121 is fixed on the wall surface of the cavity 110, it will change its position and be flexible. The tube 128 is correspondingly slightly bent to absorb deformation. Therefore, the position between the sealing member 123 and the connecting member 122 can remain unchanged.

Please return to FIG. 1 , in this embodiment, these adjustment parts 126 are arranged outside the cavity 110 and linked to these connecting parts 122, so as to adjust the position of these connecting parts 122 relative to the base 135, so that the jig platform 120 It is horizontal in the cavity 110 .

Specifically, the adjusting pieces 126 are disposed between the sealing pieces 123 of the sealing assembly 125 and the base 135 . The upper edge of the adjustment member 126 abuts against the sealing member 123 , and the upper edge of the adjustment member 126 abuts against the base 135 . The adjustment member 126 and the corresponding positioning member 127 are clamped on two sides of the base 135 , and the screw portion 122 a passes through the corresponding adjustment member 126 , the base 135 and the corresponding positioning member 127 .

In this embodiment, the adjustment member 126 has internal threads and is screwed to the screw portion 122a. Therefore, when the position of the connecting member 122 relative to the base 135 needs to be adjusted, As long as the adjusting member 126 is rotated, the connecting member 122 can move up or down, thereby adjusting the angle of the jig platform 120 in the cavity 110 .

Of course, the type of the adjustment member 126 is not limited thereto. In other embodiments, the adjusting member 126 can also be a motor, which is disposed on the base 135 and moves the connecting member 122 up and down relative to the base 135 .

In addition, in this embodiment, the pressure chamber level maintaining device 100 further includes a frame 130 , the cavity 110 is located on the frame 130 , and the base 135 and the connecting parts 122 are located in the frame 130 . As shown in FIG. 3 , when the pressure inside the cavity 110 is lower than the pressure outside the cavity 110 , the cavity 110 is deformed and partially separated from the frame 130 .

That is to say, the part where the cavity 110 is in contact with the frame 130 may not be completely fixed, but partially fixed, so as to reduce the probability of causing the frame 130 to deform when the cavity 110 is deformed under pressure, so that the frame 130 can be more stable. Stand firmly on the ground to support the cavity 110 .

When using the pressure chamber level maintaining device 100 of this embodiment, before the chamber 110 is evacuated or pressurized, the operator can place a level (not shown) on the jig platform 120 in the chamber 110 , to determine whether the jig platform 120 is horizontal. If the jig platform 120 is not yet level, the operator only needs to first adjust the position of these connecting pieces 122 relative to the base 135, so that after the jig platform 120 in the cavity 110 is corrected to be horizontal, the connecting piece 122 can be fixed relative to the horizontal position. base 135 and remove the spirit level.

During the subsequent manufacturing process, even if the wall surface of the cavity 110 is deformed because the internal pressure of the cavity 110 is less than or greater than the external pressure, because the fixture platform 120 passes through the continuous The connector 122 is fixed on the base 135 outside the cavity 110 and does not directly contact the wall of the cavity 110 . Therefore, the jig platform 120 in the cavity 110 is not affected by the deformation of the wall of the cavity 110 and can maintain a horizontal state.

Therefore, the pressure chamber level maintaining device 100 of this embodiment can be applied to various precise micro-pattern coating processes, and the jig platform 120 can provide a good level to meet the high-yield precision coating process requirements. In addition, in the pressure chamber level maintaining device 100 of this embodiment, only part of the jig platform 120 and the connecting piece 122 are located in the cavity 110 , and the number of components used to adjust the level in the cavity 110 is relatively small, which has the advantage of easy maintenance.

To sum up, in the device for maintaining the level of the pressure chamber of the present invention, the jig platform is arranged in the cavity, and the connecting parts are connected to the jig platform in the cavity, and extend out of the cavity to be movably arranged on the base. In addition, the adjusting part is arranged outside the cavity and linked to the connecting parts to adjust the positions of the connecting parts relative to the base so that the jig platform is horizontal in the cavity. Therefore, the operator only needs to adjust the position of these connecting parts relative to the base to correct the fixture platform in the cavity to be horizontal. In the subsequent process, even if the internal pressure of the cavity is less than or greater than the external pressure And deformation, because the jig platform is fixed on the base outside the cavity through the connecting piece, and does not directly contact the wall of the cavity, therefore, the jig platform in the cavity will not be affected by the deformation of the wall of the cavity, and can remain horizontal.

100: Pressure chamber level maintaining device

110: Cavity

112: Internal space

114: perforation

120: Fixture platform

121:Fixer

121a: through hole

122: connector

123: seal

125: sealing assembly

126: Adjustment parts

127: Positioning piece

128: flexible tube

130: Rack

135: base

Claims (9)

A device for maintaining the level of a pressure chamber, comprising: a cavity; a jig platform disposed in the cavity; a base located outside the cavity; a plurality of connectors connected to the jig platform in the cavity, and extend out of the cavity and be movably arranged on the base; a plurality of adjustment parts are arranged outside the cavity and respectively link with the connecting parts to adjust the positions of the connecting parts relative to the base, so that The jig platform is horizontal in the cavity; and a plurality of sealing components are arranged outside the cavity and communicated with the cavity, and each sealing component is sleeved on a corresponding part of the connecting part outside the cavity. The device for maintaining the level of the pressure chamber according to claim 1, wherein each of the sealing components includes a flexible tube, and each of the flexible tubes is sheathed on the corresponding portion of the connecting member outside the cavity. The device for maintaining the pressure chamber level according to claim 2, wherein each of the sealing components includes a fixing piece, the fixing piece is arranged at one end of the corresponding flexible tube and fixed on the outer surface of the cavity, and the corresponding connecting piece piece through the mount. The device for maintaining the level of the pressure chamber according to claim 3, wherein each of the sealing components includes a sealing member, the sealing member is arranged at the other end of the corresponding flexible tube, and the corresponding connecting member passes through the sealing member. The pressure chamber level maintaining device according to claim 1, wherein the adjustment pieces are arranged between the sealing components and the base, each of the connecting pieces includes a screw part, and each of the adjustment pieces is screwed to the screw part . The pressure chamber level maintaining device as described in claim 5 further includes a plurality of positioning parts, each of the adjustment parts and the corresponding positioning parts are clamped on both sides of the base, and each of the screw parts passes through the corresponding adjustment parts. Component, the base and the corresponding positioning component, each positioning component is screwed to the corresponding screw part, so that the corresponding connecting component is fixed on the base. The pressure chamber level maintaining device as claimed in claim 2, wherein each of the flexible tubes includes a bellows. The device for maintaining the level of the pressure chamber according to claim 1 further includes a frame on which the cavity is located, and the base and the connecting parts are located in the frame. The pressure chamber level maintaining device as claimed in claim 8, wherein when the pressure inside the chamber is lower than the pressure outside the chamber, the chamber deforms and is partially separated from the frame.

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