TWI735844B - Abnormality monitoring device and abnormality monitoring method - Google Patents

Abnormality monitoring device and abnormality monitoring method Download PDF

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TWI735844B
TWI735844B TW108103031A TW108103031A TWI735844B TW I735844 B TWI735844 B TW I735844B TW 108103031 A TW108103031 A TW 108103031A TW 108103031 A TW108103031 A TW 108103031A TW I735844 B TWI735844 B TW I735844B
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門脇正法
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日商住友重機械工業股份有限公司
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    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00Testing or monitoring of control systems or parts thereof
    • G05B23/02Electric testing or monitoring
    • G05B23/0205Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0267Fault communication, e.g. human machine interface [HMI]
    • G05B23/0272Presentation of monitored results, e.g. selection of status reports to be displayed; Filtering information to the user
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00Testing or monitoring of control systems or parts thereof
    • G05B23/02Electric testing or monitoring
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00Testing or monitoring of control systems or parts thereof
    • G05B23/02Electric testing or monitoring
    • G05B23/0205Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0221Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods

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Abstract

本發明提供一種能夠容易掌握製程資料與事件資料的關聯性之異常監視技術。製程資料/事件資料時序列顯示部(70)將時間軸對齊而顯示與系統的狀態有關之製程值的時序列和與前述系統的製程控制有關之事件的時序列。製程資料/事件資料時序列顯示部(70)藉由在時間軸上的事件發生時刻顯示表示事件發生之標記來顯示事件的時序列。顯示態樣切換部(80)使操作員選擇將事件的時序列相對於製程值的時序列並列顯示還是重疊顯示。 The present invention provides an abnormality monitoring technology capable of easily grasping the correlation between process data and event data. The process data/event data time sequence display unit (70) aligns the time axis to display the time sequence of process values related to the state of the system and the time sequence of events related to the process control of the aforementioned system. The process data/event data time sequence display unit (70) displays the time sequence of the event by displaying a mark indicating the occurrence of the event on the time axis at the time of the event occurrence. The display mode switching unit (80) allows the operator to select whether to display the time series of the event in parallel or overlap the time series of the process value.

Description

異常監視裝置及異常監視方法 Abnormality monitoring device and abnormality monitoring method

本申請主張基於2018年3月20日申請之日本專利申請第2018-053118號之優先權。該日本申請的全部內容藉由參閱援用於本說明書中。 This application claims priority based on Japanese Patent Application No. 2018-053118 filed on March 20, 2018. The entire contents of this Japanese application are incorporated in this specification by reference.

本發明係有關一種異常監視裝置及異常監視方法。 The invention relates to an abnormality monitoring device and an abnormality monitoring method.

利用一種異常監視裝置,其對化學設備或發電設備等製程系系統的運用資料進行分析/監視而檢測異常。運用資料被分為製程資料(process data)和事件資料(event data)。製程資料係製程系系統的各種感測器的計量值、控制用目標設定值或控制補償值、用戶的設定值、基於複數個計量值而運算之指標群等與系統的狀態有關之值的時序列(Time series)資料。事件資料係在製程系系統中發生之事件的履歷,例如包括警報履歷、操作員的操作履歷。 An abnormality monitoring device is used to analyze/monitor the operating data of process systems such as chemical equipment or power generation equipment to detect abnormalities. The application data is divided into process data and event data. The process data is the measurement value of various sensors of the process system, the target setting value or control compensation value for control, the user's setting value, the index group calculated based on a plurality of measurement values, and other values related to the state of the system. Time series data. The event data is the history of events that occurred in the process system, for example, including alarm history and operator's operation history.

製程資料為計量值等時序列資料,因此一般在橫軸上取時間而以圖形(graph)顯示製程值的變化,但事件資料為事件的履歷,因此通常與時戳(timestamp)一同以列表形式進行顯示。如此,製程資料和事件資料採用各自的顯示形態。 The process data is time series data such as measurement values, so the time is generally taken on the horizontal axis and the change of the process value is displayed in a graph (graph), but the event data is the history of the event, so it is usually in the form of a list together with the timestamp. To display. In this way, the process data and event data adopt their own display formats.

(先前技術文獻) (Prior technical literature) (專利文獻) (Patent Document)

專利文獻1:日本特開2017-211839號公報 Patent Document 1: Japanese Patent Application Publication No. 2017-211839

當製程系系統中發生了異常時,操作員從事件的履歷列表中參閱發生了警報之時刻來確定異常原因,因此在製程資料的圖形中確認警報發生時刻的製程值的變化,進而從事件的履歷列表中確認同時間段的操作履歷。又,亦有時操作員參閱在製程資料的圖形中製程值顯示出異常變化之時刻,從事件的履歷列表中確認同時間段的操作內容或警報的有無。如此,操作員在異常發生時橫跨製程資料的時序列圖形和事件資料的履歷列表而進行跟蹤作業,但由於製程資料與事件資料的顯示形態不同,所以難以掌握製程資料與事件資料的關聯性,又,跟蹤花費時間,亦有時會發生看漏。 When an abnormality occurs in the process system, the operator refers to the time of the alarm from the event history list to determine the cause of the abnormality. Therefore, confirm the change of the process value at the time of the alarm in the graph of the process data, and then follow the event history. Check the operation history of the same time period in the history list. In addition, sometimes the operator refers to the time when the process value shows an abnormal change in the graph of the process data, and confirms the operation content or the presence of an alarm in the same time period from the event history list. In this way, when an abnormality occurs, the operator performs tracking operations across the time-series graph of the process data and the history list of the event data. However, due to the different display modes of the process data and the event data, it is difficult to grasp the correlation between the process data and the event data. Also, tracking takes time, and sometimes misses occur.

本發明的一態樣的例示性目的之一在於提供一種能夠容易掌握製程資料與事件資料的關聯性之異常監視技術。 One of the illustrative purposes of one aspect of the present invention is to provide an abnormality monitoring technology that can easily grasp the correlation between process data and event data.

為了解決上述問題,本發明的一態樣的異常監視裝置包括時序列顯示部,該時序列顯示部將時間軸對齊而顯示與系統的狀態有關之製程值的時序列和與前述系統的製程 控制有關之事件的時序列。 In order to solve the above-mentioned problems, an abnormality monitoring device of one aspect of the present invention includes a time series display unit that aligns the time axis to display the time series of the process value related to the state of the system and the process of the aforementioned system Control the time sequence of related events.

依該態樣,操作員能夠根據製程值的時序列與事件的時序列的時間軸對齊之情況來在視覺上掌握製程值與事件的關聯性。 According to this aspect, the operator can visually grasp the correlation between the process value and the event according to the alignment of the time series of the process value with the time axis of the time series of the event.

本發明的另一態樣係異常監視方法。該方法包括時序列顯示步驟,在該時序列顯示步驟中,將時間軸對齊而顯示與系統的狀態有關之製程值的時序列和與前述系統的製程控制有關之事件的時序列。 Another aspect of the present invention is an abnormality monitoring method. The method includes a time series display step, in which the time axis is aligned to display the time series of process values related to the state of the system and the time series of events related to the process control of the aforementioned system.

另外,將以上構成要素的任意組合或本發明的構成要素或表現在方法、裝置、系統、電腦程式、資料結構、記錄媒體等之間相互替換者,亦作為本發明的態樣而有效。 In addition, any combination of the above constituent elements or the constituent elements of the present invention, or alternatives expressed in methods, devices, systems, computer programs, data structures, recording media, etc., are also effective as aspects of the present invention.

依本發明,能夠容易掌握製程資料與事件資料的關聯性。 According to the present invention, it is possible to easily grasp the relevance of process data and event data.

10:製程資料獲取部 10: Process data acquisition department

20:製程資料選擇候選顯示部 20: Candidate display for process data selection

30:製程資料選擇部 30: Process data selection department

40:事件資料獲取部 40: Incident Data Acquisition Department

50:事件資料選擇候選顯示部 50: Event data selection candidate display part

60:事件資料選擇部 60: Event Data Selection Department

70:製程資料/事件資料時序列顯示部 70: Process data/event data time sequence display

80:顯示態樣切換部 80: Display mode switching part

300:異常監視裝置 300: Abnormal monitoring device

圖1係本實施形態之異常監視裝置的構成圖。 Fig. 1 is a configuration diagram of the abnormality monitoring device of this embodiment.

圖2係用以說明複數個製程值的時序列資料的例子之圖。 FIG. 2 is a diagram for explaining an example of time series data of a plurality of process values.

圖3(a)係用以說明操作履歷的例子之圖,圖3(b)係用以說明警報履歷的例子之圖。 Fig. 3(a) is a diagram for explaining an example of an operation history, and Fig. 3(b) is a diagram for explaining an example of an alarm history.

圖4係用以說明圖1的異常監視裝置的畫面例之圖。 Fig. 4 is a diagram for explaining a screen example of the abnormality monitoring device of Fig. 1.

圖5係用以說明複數個事件的時序列資料被重合顯示 之例子之圖。 Figure 5 is used to illustrate that the time series data of multiple events are superimposed and displayed The diagram of the example.

圖6係用以說明事件的時序列資料與製程值的時序列資料重疊顯示之例子之圖。 FIG. 6 is a diagram for explaining an example of overlapping display of the time series data of the event and the time series data of the process value.

圖7係用以說明等級高的警報與製程值的時序列資料重疊顯示之例子之圖。 FIG. 7 is a diagram for explaining an example of overlapping display of time-series data of high-level alarms and process values.

圖8係表示基於圖1的異常監視裝置之異常監視處理的步驟之流程圖。 Fig. 8 is a flowchart showing the procedure of abnormality monitoring processing based on the abnormality monitoring device of Fig. 1.

以下,基於較佳實施形態並參閱圖式對本發明進行說明。對各圖式所示之形態相同或等同的構成要素、構件、處理標註相同符號,並適當省略重複說明。又,實施形態並非限定發明者,而是例示,實施形態中所記述之所有特徵或其組合並不一定是發明的本質性者。 Hereinafter, the present invention will be described based on preferred embodiments and with reference to the drawings. The same or equivalent structural elements, members, and processes shown in the various drawings are denoted by the same symbols, and repeated descriptions are appropriately omitted. In addition, the embodiment does not limit the inventor, but is an example, and all the features or combinations of the features described in the embodiment are not necessarily essential to the invention.

圖1係本實施形態之異常監視裝置300的構成圖。異常監視裝置300用以監視製程系系統的異常。異常監視裝置300包括製程資料獲取部10、製程資料選擇候選顯示部20、製程資料選擇部30、事件資料獲取部40、事件資料選擇候選顯示部50、事件資料選擇部60、製程資料/事件資料時序列顯示部70及顯示態樣切換部80。 Fig. 1 is a configuration diagram of an abnormality monitoring device 300 of this embodiment. The abnormality monitoring device 300 is used for monitoring abnormalities of the manufacturing process system. The abnormality monitoring device 300 includes a process data acquisition unit 10, a process data selection candidate display unit 20, a process data selection unit 30, an event data acquisition unit 40, an event data selection candidate display unit 50, an event data selection unit 60, and process data/event data. The time series display unit 70 and the display mode switching unit 80.

圖4係用以說明異常監視裝置300的畫面例之圖。參閱圖4的畫面例對圖1的異常監視裝置300的各構成進行說明。 FIG. 4 is a diagram for explaining a screen example of the abnormality monitoring device 300. Each configuration of the abnormality monitoring device 300 of FIG. 1 will be described with reference to the screen example of FIG. 4.

製程資料獲取部10以時序列資料形式獲取表示製程系 系統的狀態之複數個製程值。 The process data acquisition part 10 acquires and represents the process system in the form of time-series data Multiple process values of the state of the system.

圖2係用以說明複數個製程值的時序列資料的例子之圖。與時戳一同獲取製程值A、製程值B、製程值C、製程值D等時序列資料。 FIG. 2 is a diagram for explaining an example of time series data of a plurality of process values. Together with the time stamp, time series data such as process value A, process value B, process value C, and process value D are obtained.

製程資料選擇候選顯示部20將由製程資料獲取部10獲取之複數個製程值作為選擇候選而以列表形式等一覽顯示於畫面。 The process data selection candidate display unit 20 displays the plurality of process values acquired by the process data acquisition unit 10 as selection candidates in a list format or the like on the screen.

圖4的製程資料選擇窗口210係由製程資料選擇候選顯示部20顯示之複數個製程值的候選的列表,窗口內的項目能夠藉由上下滾動來實現無法完全顯示之部分的閱覽。在該例子中,製程值A~F顯示於製程資料選擇窗口210。 The process data selection window 210 in FIG. 4 is a list of multiple process value candidates displayed by the process data selection candidate display unit 20, and the items in the window can be scrolled up and down to realize the viewing of parts that cannot be completely displayed. In this example, the process values A~F are displayed in the process data selection window 210.

製程資料選擇部30使操作員從由製程資料選擇候選顯示部20一覽顯示之複數個製程值的候選中選擇一個以上的欲閱覽之製程值。操作員藉由用滑鼠在圖4的製程資料選擇窗口210中點擊欲閱覽之製程值來進行選擇。在該例子中,選擇兩個製程值B、D,且該等所選擇之製程值被強調顯示。 The process data selection unit 30 allows the operator to select one or more process values to be viewed from among a plurality of process value candidates displayed by the process data selection candidate display unit 20 in a list. The operator selects the process value to be viewed in the process data selection window 210 of FIG. 4 with the mouse. In this example, two process values B and D are selected, and the selected process values are highlighted.

事件資料獲取部40獲取控制製程系系統的製程時之操作員的操作或警報等事件的履歷。 The event data acquisition unit 40 acquires the history of events such as operator operations or alarms when controlling the manufacturing process of the manufacturing system.

圖3(a)係用以說明操作履歷的例子之圖。與時戳一同獲取操作類別和操作結果的履歷。在該例子中,以操作A、操作A、操作B的順序執行,操作結果依序為S(成功)、F(失敗)、S(成功)、S(成功)。 Fig. 3(a) is a diagram for explaining an example of the operation history. Get the history of the operation category and operation result together with the time stamp. In this example, operation A, operation A, and operation B are executed in the order, and the operation result is S (success), F (failure), S (success), S (success) in order.

圖3(b)係用以說明警報履歷的例子之圖。與時戳一同 獲取警報類別和警報等級的履歷。在該例子中,以警報P、警報P、警報P、警報Q的順序發生了警報事件,警報等級依序為L(低)、L(低)、H(高)、L(低)。 Fig. 3(b) is a diagram for explaining an example of the alarm history. With time stamp Obtain the history of alarm types and alarm levels. In this example, alarm events have occurred in the order of alarm P, alarm P, alarm P, and alarm Q, and the alarm levels are L (low), L (low), H (high), and L (low) in order.

事件資料選擇候選顯示部50將由事件資料獲取部40獲取之複數個事件資料作為選擇候選而以列表形式等一覽顯示於畫面。 The event data selection candidate display unit 50 displays the plurality of event data acquired by the event data acquisition unit 40 as selection candidates in a list format or the like on the screen.

圖4的事件資料選擇窗口220係由事件資料選擇候選顯示部50顯示之複數個事件的候選的列表,窗口內的項目能夠藉由上下滾動來實現無法完全顯示之部分的閱覽。在該例子中,警報P、Q、R、操作A、B、C顯示於事件資料選擇窗口220。 The event data selection window 220 in FIG. 4 is a list of multiple event candidates displayed by the event data selection candidate display unit 50, and the items in the window can be scrolled up and down to allow viewing of parts that cannot be fully displayed. In this example, alarms P, Q, R, operations A, B, and C are displayed in the event data selection window 220.

事件資料選擇部60使操作員從由事件資料選擇候選顯示部50一覽顯示之複數個事件的候選中選擇一個以上的欲閱覽之事件。操作員藉由用滑鼠等在圖4的事件資料選擇窗口220中點擊欲閱覽之事件來進行選擇。在該例子中,選擇了兩個警報P、Q和一個操作B,且該等所選擇之事件被強調顯示。 The event data selection unit 60 allows the operator to select one or more events to be viewed from among a plurality of event candidates listed in the event data selection candidate display unit 50. The operator selects an event to be viewed in the event data selection window 220 of FIG. 4 with a mouse or the like. In this example, two alarms P and Q and one operation B are selected, and the selected events are highlighted.

另外,若製程值超過既定的閾值,則發出警報或者操作員進行操作,進行警報輸出或操作輸入的結果,會對特定的製程值產生影響,因此有時製程值與事件會被相互建立關聯。為了使操作員容易選擇相互有關聯之製程值和事件,可以在操作員在製程資料選擇窗口210中選擇製程值時在事件資料選擇窗口220中強調顯示有關聯之事件。相反地,亦可以在操作員在事件資料選擇窗口220中選擇事 件時在製程資料選擇窗口210中強調顯示有關聯之製程值。 In addition, if the process value exceeds a predetermined threshold, an alarm is issued or the operator performs an operation, and the result of the alarm output or operation input will affect the specific process value. Therefore, sometimes the process value and the event will be associated with each other. In order to make it easy for the operator to select the process values and events that are related to each other, the event data selection window 220 may highlight the related events in the event data selection window 220 when the operator selects the process value in the process data selection window 210. Conversely, it is also possible for the operator to select an event in the event data selection window 220. In the process data selection window 210, the associated process value is highlighted in the process data selection window 210.

製程資料/事件資料時序列顯示部70(以下,為了簡化而稱為“時序列顯示部70”)將時間軸對齊而顯示由操作員選擇之製程值和事件的時序列資料。 The process data/event data time-series display unit 70 (hereinafter, referred to as the “time-series display unit 70” for simplification) aligns the time axis to display the time-series data of the process values and events selected by the operator.

製程資料選擇部30將由操作員選擇之製程值通知給時序列顯示部70,事件資料選擇部60將由操作員選擇之事件通知給時序列顯示部70。時序列顯示部70從製程資料獲取部10獲取由操作員選擇之製程值的時序列資料,並從事件資料獲取部40獲取由操作員選擇之事件的時序列資料。 The process data selection unit 30 notifies the time series display unit 70 of the process value selected by the operator, and the event data selection unit 60 notifies the time series display unit 70 of the event selected by the operator. The time series display unit 70 acquires the time series data of the process value selected by the operator from the process data acquisition unit 10, and acquires the time series data of the event selected by the operator from the event data acquisition unit 40.

作為製程值的時序列資料和事件的時序列資料的一種顯示態樣,時序列顯示部70將時間軸對齊而並列顯示製程值的時序列資料和事件的時序列資料。 As a display aspect of the time-series data of the process value and the time-series data of the event, the time-series display unit 70 aligns the time axis and displays the time-series data of the process value and the time-series data of the event side by side.

圖4的製程時序列圖形230係將橫軸作為時間而以折線圖顯示由操作員選擇之製程值的時序列資料者。在此,顯示有過去六天的製程值的時序列資料。製程值B的時序列資料以實線顯示,製程值D的時序列資料以點線顯示。 The process time series graph 230 of FIG. 4 uses the horizontal axis as the time and displays the time series data of the process values selected by the operator in a line graph. Here, the time series data of the process values of the past six days are displayed. The time series data of the process value B is displayed with a solid line, and the time series data of the process value D is displayed with a dotted line.

圖4的事件時序列圖240a、240b、240c係將橫軸作為時間而顯示由操作員選擇之事件的時序列資料者。與製程時序列圖形230的時間軸對齊而顯示過去六天的事件的時序列資料。藉由在時間軸上於發生了事件之時刻上顯示表示事件發生之標記(在此為縱條)來沿著時間軸顯示事件發生的有無。在此,與製程時序列圖形230的時間軸對齊而並列顯示警報P的時序列圖240a、警報Q的時序列圖240b、 操作B的時序列圖240c。 The event time series diagrams 240a, 240b, and 240c of FIG. 4 are those showing time series data of events selected by the operator with the horizontal axis as time. It is aligned with the time axis of the process time series graph 230 to display time series data of events in the past six days. The presence or absence of an event is displayed along the time axis by displaying a mark (here, a vertical bar) indicating the occurrence of the event on the time axis at the time when the event occurs. Here, the time series chart 240a of the alarm P, the time series chart 240b of the alarm Q, Time sequence diagram 240c of operation B.

表示事件發生之標記除了縱條以外,還可以為點或三角形,但在縱條的情況下,容易根據標記的密度來在視覚上掌握事件的發生頻率。 In addition to vertical bars, the marks indicating the occurrence of events can also be dots or triangles. However, in the case of vertical bars, it is easy to grasp the frequency of events on the visual screen based on the density of the marks.

圖4的製程時序列圖形230與事件時序列圖240a、240b、240c的時間軸對齊,因此操作員能夠同時閱覽製程值的時間變化和事件發生的時間變化而將製程值的變動與事件發生頻率建立關聯來進行掌握。 The process time sequence graph 230 of FIG. 4 is aligned with the time axis of the event time sequence diagrams 240a, 240b, 240c, so the operator can view the time change of the process value and the time change of the event at the same time to compare the change of the process value and the frequency of the event. Establish associations to master.

在圖4中,時序列顯示部70將複數個事件的時序列資料並列顯示,但亦能夠將複數個事件的時序列資料重合顯示。 In FIG. 4, the time-series display unit 70 displays the time-series data of a plurality of events in parallel, but it is also possible to superimpose and display the time-series data of a plurality of events.

圖5係用以說明複數個事件的時序列資料被重合顯示之例子之圖。在該例子中示出操作員將警報R和操作C作為閱覽對象的事件資料而選擇之情況。與製程時序列圖形230的時間軸對齊而顯示事件時序列圖242。在事件時序列圖242中,警報R的時序列資料與操作C的時序列資料被重合顯示,警報R的時序列資料以實線表示,操作C的時序列資料以點線表示。亦可以藉由顏色的差異將警報R的時序列資料和操作C的時序列資料區分顯示。如此,藉由將複數個事件的時序列資料以能夠相互識別之方式重合顯示,操作員能夠容易掌握複數個事件之間的關聯性。例如,藉由這種重合顯示,能夠確認複數個警報的重疊情況或操作與警報的關聯性或影響。 Fig. 5 is a diagram for explaining an example in which the time-series data of a plurality of events are overlapped and displayed. In this example, the operator selects the alarm R and the operation C as the event data to be viewed. The event time sequence diagram 242 is displayed in alignment with the time axis of the process time sequence graph 230. In the event time series diagram 242, the time series data of the alarm R and the time series data of the operation C are overlapped and displayed, the time series data of the alarm R is represented by a solid line, and the time series data of the operation C is represented by a dotted line. The time series data of the alarm R and the time series data of the operation C can also be displayed separately by the difference of colors. In this way, by superimposing and displaying the time-series data of a plurality of events in a mutually identifiable manner, the operator can easily grasp the correlation between the plurality of events. For example, with this overlapping display, it is possible to confirm the overlap of multiple alarms or the relevance or influence of operations and alarms.

當顯示三個以上的事件的時序列資料時,可以將所有 事件的時序列資料進行重合,但亦可以由操作員選擇欲重合之事件。在該情況下,未被選擇為重合的對象之事件的時序列圖相對於重合之事件的時序列圖並列顯示。藉此,能夠僅將欲重合閱覽之事件相互重合而在一個圖表上進行確認,除此以外的事件則能夠在並列顯示之圖表上另行確認。若將三個以上的事件的時序列資料重合在一個圖表中,則亦有時難以在視覚上區分不同事件的時序列資料,但若能夠選擇特定的至少兩個事件並將其重合在一個圖表中,關於剩餘的事件,能夠在並列顯示之圖表中個別地進行確認,則操作員能夠一邊在一個圖表中分析特定的至少兩個事件之間的關聯性,一邊對剩餘事件的發生亦一併進行分析。 When displaying time series data of more than three events, all The time series data of the events are overlapped, but the operator can also select the events to be overlapped. In this case, the time-series diagrams of the events that are not selected as overlapping objects are displayed side by side with the time-series diagrams of the overlapping events. Thereby, only the events to be viewed in overlap can be checked on one graph by superimposing each other, and other events can be confirmed separately on the graph displayed side by side. If the time series data of more than three events are superimposed on one chart, it is sometimes difficult to distinguish the time series data of different events on the visual screen, but if you can select at least two specific events and superimpose them on one chart In this, the remaining events can be individually confirmed in the graphs displayed side by side, so that the operator can analyze the correlation between at least two specific events in one graph, and also the occurrence of the remaining events. Perform analysis.

作為製程值的時序列資料和事件的時序列資料的另一種顯示態樣,時序列顯示部70將時間軸對齊而重疊顯示製程值的時序列資料和事件的時序列資料。 As another display aspect of the time-series data of the process value and the time-series data of the event, the time-series display unit 70 aligns the time axis to overlap and display the time-series data of the process value and the time-series data of the event.

圖6係用以說明事件的時序列資料與製程值的時序列資料被重疊顯示之例子之圖。在製程值/事件時序列圖形250中,在作為製程值B、製程值D的時序列資料之折線圖上重疊顯示作為警報R和操作C的時序列資料之圖表。藉由如此將事件的時序列資料與製程值的時序列資料重疊,操作員能夠將製程值的變化與事件發生的頻率在一個圖形中建立關聯而進行掌握。 FIG. 6 is a diagram for explaining an example in which the time series data of the event and the time series data of the process value are overlapped and displayed. In the process value/event time series graph 250, the time series data of the alarm R and the operation C are overlapped and displayed on the line graph of the time series data of the process value B and the process value D. By overlapping the time-series data of the event with the time-series data of the process value in this way, the operator can associate the change of the process value and the frequency of the event occurrence in a graph for grasping.

當顯示複數個事件的時序列資料時,可以將所有事件的時序列資料與製程值的時序列資料重疊,但亦可以由操 作員選擇欲重疊之事件。在該情況下,未被選擇為重疊的對象之事件的時序列圖相對於製程值的時序列圖形並列顯示。藉此,操作員能夠僅將欲與製程值的時序列重疊而閱覽之事件與製程值的時序列圖形重疊而在一個圖形中進行確認,關於其他事件則能夠在並列顯示之圖表中另行確認。若將複數個事件的時序列資料與製程值的時序列資料重疊,則亦有時難以在視覺上區分不同事件的時序列資料,但若能夠僅選擇性地切換特定的事件而與製程值的時序列資料重疊,關於剩餘的事件,能夠在相對於製程值的時序列圖形並列顯示之圖表中個別地進行確認,則操作員能夠一邊在一個圖形中分析特定的事件的發生與製程值的變化的關聯性,一邊對剩餘事件的發生亦一併進行分析。 When displaying the time-series data of multiple events, the time-series data of all events can be overlapped with the time-series data of the process value, but it can also be operated by The staff chooses the events to be overlapped. In this case, the time-series graphs of the events that are not selected as overlapping objects are displayed side by side with the time-series graphs of the process values. Thereby, the operator can only superimpose the event to be viewed with the time series of the process value and the time series graph of the process value to confirm in one graph, and other events can be confirmed separately in the graph displayed side by side. If the time-series data of multiple events and the time-series data of the process value are overlapped, it is sometimes difficult to visually distinguish the time-series data of different events. The time series data overlaps, and the remaining events can be individually confirmed in the graph displayed side by side with the time series graph relative to the process value, so that the operator can analyze the occurrence of a specific event and the change of the process value in one graph. On the other hand, the occurrence of the remaining events is also analyzed.

時序列顯示部70亦能夠將等級高的警報與製程值的時序列資料重疊顯示。藉此,即使操作員未將特定的事件選擇為重疊顯示的對象,亦能夠將等級高的警報等重要事件的時序列資料與製程值的時序列資料自動重疊而掌握關聯性。 The time series display unit 70 can also superimpose and display the high-level alarms and the time series data of the process value. In this way, even if the operator does not select a specific event as the object of overlapping display, the time series data of important events such as high-level alarms and the time series data of process values can be automatically overlapped to grasp the relevance.

圖7係用以說明等級高的警報與製程值的時序列資料被重疊顯示之例子之圖。在此,與圖4同樣地,製程時序列圖形230和事件時序列圖240a、240b、240c將時間軸對齊而並列顯示,但例如關於警報Q,在發生了警報等級高於既定值的“嚴重警報”之時刻,如符號244所示,將表示嚴重警報的發生之標記與製程時序列圖形230重疊顯示。藉此,關於嚴重警報,能夠在製程時序列圖形230上容易 進行確認,關於輕微警報,能夠在事件時序列圖240a、240b、240c中另行確認。藉此,關於嚴重警報,能夠將其與製程值的時序列資料重疊而使操作員迅速掌握與製程值的變化的關聯性。又,關於輕微警報,亦有可能頻繁發生,因此若將其與製程值的時序列資料重疊,則會變得看不清楚,因此無需將其與製程值的時序列資料重疊,便能夠藉由與製程時序列圖形並列地顯示於事件時序列圖表來個別地進行確認。 FIG. 7 is a diagram for explaining an example in which time series data of high-level alarms and process values are overlapped and displayed. Here, similar to FIG. 4, the process time sequence graph 230 and the event time sequence graphs 240a, 240b, and 240c are displayed side by side with the time axis aligned. At the time of "alarm", as shown by the symbol 244, the mark indicating the occurrence of a serious alarm is displayed superimposed on the process time sequence graph 230. In this way, critical alarms can be easily displayed on the sequence graph 230 during the manufacturing process. Confirmation. Minor alarms can be confirmed separately in the event sequence diagrams 240a, 240b, and 240c. In this way, the critical alarm can be overlapped with the time-series data of the process value so that the operator can quickly grasp the correlation with the change of the process value. In addition, minor alarms may also occur frequently. Therefore, if they overlap with the time series data of the process value, it will become unclear. Therefore, there is no need to overlap it with the time series data of the process value. It is displayed in the event time series chart side by side with the process time series graph for individual confirmation.

時序列顯示部70可以以不同的顏色區分警報等級的差異來顯示警報的時序列資料。例如,藉由以黃色顯示低等級的警報,以紅色顯示高等級的警報,能夠在視覺上容易確認警報等級的高低。 The time series display unit 70 can distinguish the difference of the alarm level with different colors to display the time series data of the alarm. For example, by displaying a low-level alarm in yellow and a high-level alarm in red, it is easy to visually confirm the level of the alarm.

顯示態樣切換部80使操作員選擇製程值和事件的時序列資料的顯示態樣,並指示時序列顯示部70切換顯示態樣。顯示態樣切換部80使操作員選擇將事件的時序列資料與製程值的時序列資料並列顯示還是將事件的時序列資料與製程值的時序列資料重疊顯示。又,當存在複數個事件時,顯示態樣切換部80使操作員選擇將哪個事件的時序列資料與製程值的時序列資料重疊。又,顯示態樣切換部80使操作員選擇是否將複數個事件的時序列資料相互重合顯示。 The display mode switching unit 80 allows the operator to select the display mode of the time series data of the process values and events, and instructs the time series display unit 70 to switch the display mode. The display mode switching unit 80 allows the operator to select whether to display the time series data of the event and the time series data of the process value side by side or to display the time series data of the event and the time series data of the process value overlappingly. Moreover, when there are a plurality of events, the display mode switching unit 80 allows the operator to select which event's time-series data and the process value's time-series data are to be overlapped. In addition, the display mode switching unit 80 allows the operator to select whether or not to display time series data of a plurality of events superimposed on each other.

作為使操作員選擇顯示態樣之方法,能夠利用圖形使用者界面(Graphical User Interface)。例如,操作員能夠藉由用滑鼠等將特定的事件的時序列顯示拖放在製程時序列 圖形上而選擇欲與製程值的時序列資料重疊之事件。又,操作員能夠藉由用滑鼠等將特定的事件的時序列顯示拖放在其他事件的時序列顯示上而選擇欲相互重合顯示之事件。 As a method for the operator to select the display mode, a graphical user interface (Graphical User Interface) can be used. For example, the operator can drag and drop the time series display of a specific event with a mouse, etc. Graphically select the event to be overlapped with the time series data of the process value. In addition, the operator can drag and drop the time series display of a specific event on the time series display of other events with a mouse or the like to select the events to be displayed overlapping each other.

圖8係表示基於異常監視裝置300之異常監視處理的步驟之流程圖。 FIG. 8 is a flowchart showing the steps of the abnormality monitoring process based on the abnormality monitoring device 300.

操作員從複數個製程值的候選中選擇應閱覽之製程值(S10)。操作員從複數個事件的候選中選擇應閱覽之事件(S12)。在此,設為選擇製程值之後選擇事件之順序,但亦可以在選擇事件之後選擇製程值。這是因為,由於操作員橫跨製程值的時序列資料和事件的時序列資料而進行跟蹤作業,所以既存在欲根據製程值的異常變化來閱覽同時間段的事件之情況,亦存在欲根據事件的發生時刻來閱覽同時間段的製程值的變化之情況。 The operator selects the process value that should be read from the candidates of a plurality of process values (S10). The operator selects an event to be viewed from the candidates of a plurality of events (S12). Here, it is set to select the order of events after selecting the process value, but it is also possible to select the process value after selecting the event. This is because the operator is tracking the time-series data of the process value and the time-series data of the event, so there are situations in which he wants to view the events of the same time period based on the abnormal change in the process value. View the change of the process value in the same time period at the time of the event.

時序列顯示部70將時間軸對齊而顯示所選擇之製程值的時序列資料和所選擇之事件的時序列資料(S14)。作為顯示態樣,有與製程值的時序列圖形的時間軸對齊而並列顯示事件的時序列標記之態樣和與製程值的時序列圖形的時間軸對齊而重疊顯示事件的時序列標記之態樣。在製程值的時序列圖形中並列顯示事件的時序列標記之態樣中,操作員能夠個別地閱覽並監視製程值的時間變化和事件的發生頻率,在製程值的時序列圖形中重疊顯示事件的時序列標記之態樣中,操作員能夠在一個圖形中閱覽並監視製程值的時間變化與事件的發生頻率的關聯性。 The time series display unit 70 aligns the time axis to display the time series data of the selected process value and the time series data of the selected event (S14). As a display aspect, there are the aspect that aligns with the time axis of the time-series graph of the process value and displays the time-series mark of the event side by side, and the aspect that aligns with the time axis of the time-series graph of the process value and overlaps the time-series mark of the event. Sample. In the state where the time series mark of the event is displayed side by side in the time series graph of the process value, the operator can individually view and monitor the time change of the process value and the occurrence frequency of the event, and the event is displayed in the time series graph of the process value. In the aspect of time series marking, the operator can view and monitor the correlation between the time change of the process value and the occurrence frequency of the event in a graph.

顯示態樣切換部80使操作員選擇製程值和事件的時序列資料的顯示態樣(S16)。當操作員指示切換顯示態樣時(S16的“是”),顯示態樣切換部80使時序列顯示部70變更顯示態樣(S18),並返回到步驟S14。例如,當操作員指示了並列顯示的態樣時,將時間軸對齊而將事件的時序列圖與製程值的時序列圖形並列顯示。當操作員指示了重疊顯示的態樣時,將時間軸對齊而將事件的時序列圖與製程值的時序列圖形重疊顯示。當操作員未指示切換顯示態樣時(S16的“否”),跳躍步驟S18,返回到步驟S14。 The display mode switching unit 80 allows the operator to select the display mode of the time-series data of the process values and events (S16). When the operator instructs to switch the display mode (Yes in S16), the display mode switching unit 80 causes the time sequence display unit 70 to change the display mode (S18), and returns to step S14. For example, when the operator instructs the side-by-side display mode, the time axis is aligned and the time-series graph of the event and the time-series graph of the process value are displayed side-by-side. When the operator instructs the overlapping display mode, the time axis is aligned and the time series graph of the event and the time series graph of the process value are superimposed and displayed. When the operator does not instruct to switch the display mode (No in S16), step S18 is skipped, and step S14 is returned.

依本實施形態的異常監視裝置300,藉由將時間軸對齊而顯示製程值的時序列資料和事件的時序列資料,操作員能夠容易將製程值的變化與事件發生的頻率建立關聯而進行掌握,因此能夠提前支援異常原因的確定與對策擬定。由於製程值的時序列圖形與事件的時序列圖的時間軸對齊,所以操作員能夠容易進行橫跨製程資料和事件資料之跟蹤作業,異常發生時能夠迅速對應。 According to the abnormality monitoring device 300 of the present embodiment, by aligning the time axis to display the time series data of the process value and the time series data of the event, the operator can easily associate the change of the process value with the frequency of the occurrence of the event. Therefore, it can support the determination of the cause of the abnormality and the formulation of countermeasures in advance. Since the time series graph of the process value is aligned with the time axis of the time series graph of the event, the operator can easily track the process data and the event data, and can quickly respond when an abnormality occurs.

以上,根據實施例對本發明進行了說明。本發明並不限定於上述實施形態,本領域技術人員應可理解,能夠進行各種設計變更,能夠進行各種變形例,並且這種變形例亦在本發明的範圍內。 Above, the present invention has been described based on the embodiments. The present invention is not limited to the above-mentioned embodiments, and those skilled in the art should understand that various design changes and various modifications can be made, and such modifications are also within the scope of the present invention.

10:製程資料獲取部 10: Process data acquisition department

20:製程資料選擇候選顯示部 20: Candidate display for process data selection

30:製程資料選擇部 30: Process data selection department

40:事件資料獲取部 40: Incident Data Acquisition Department

50:事件資料選擇候選顯示部 50: Event data selection candidate display part

60:事件資料選擇部 60: Event Data Selection Department

70:製程資料/事件資料時序列顯示部 70: Process data/event data time sequence display

80:顯示態樣切換部 80: Display mode switching part

300:異常監視裝置 300: Abnormal monitoring device

Claims (9)

一種異常監視裝置,其特徵為,包括:製程資料獲取部,係以時序列資料形式獲取表示系統的狀態之複數個製程值;事件資料獲取部,係獲取系統的製程控制中之操作員的操作或警報等事件的時序列;及時序列顯示部,將時間軸對齊而顯示與系統的狀態有關之前述製程值的時序列和與前述系統的製程控制有關之前述事件的時序列;並且以縱條來顯示表示事件發生之標記。 An abnormality monitoring device, which is characterized by including: a process data acquisition part, which acquires a plurality of process values representing the state of the system in the form of time series data; an event data acquisition part, which acquires the operation of the operator in the process control of the system The time sequence of events such as alarms or alarms; the time sequence display unit aligns the time axis to display the time sequence of the foregoing process values related to the state of the system and the time sequence of the foregoing events related to the process control of the foregoing system; and a vertical bar To display the mark indicating the occurrence of the event. 如申請專利範圍第1項所述之異常監視裝置,其中前述時序列顯示部藉由在時間軸上的事件發生時刻顯示表示事件發生之標記來顯示前述事件的時序列。 According to the abnormality monitoring device described in claim 1, wherein the time series display unit displays the time series of the aforementioned events by displaying a mark indicating the occurrence of the event on the time axis at the time of occurrence of the event. 如申請專利範圍第1或2項所述之異常監視裝置,其還包括:選擇部,使操作員從前述製程值的候選或前述事件的候選中選擇應閱覽之前述製程值或應閱覽之前述事件,前述時序列顯示部切換顯示由前述操作員選擇之製程值或事件的時序列。 For example, the abnormality monitoring device described in item 1 or 2 of the scope of the patent application further includes: a selection unit that allows the operator to select the aforementioned process value or the aforementioned item to be read from among the aforementioned process value candidates or the aforementioned event candidates For events, the time sequence display unit switches to display the process value or the time sequence of the event selected by the operator. 如申請專利範圍第1或2項所述之異常監視裝置,其中 前述時序列顯示部將複數個前述事件的時序列並列或重合顯示。 Such as the abnormal monitoring device described in item 1 or 2 of the scope of patent application, wherein The aforementioned time series display unit displays the time series of a plurality of aforementioned events in parallel or overlapped. 如申請專利範圍第1或2項所述之異常監視裝置,其中前述時序列顯示部將前述事件的時序列與前述製程值的時序列並列顯示。 The abnormality monitoring device described in item 1 or 2 of the scope of patent application, wherein the time series display unit displays the time series of the aforementioned events and the time series of the aforementioned process values in parallel. 如申請專利範圍第1或2項所述之異常監視裝置,其中前述時序列顯示部將前述事件的時序列與前述製程值的時序列重疊顯示。 According to the abnormality monitoring device described in item 1 or 2 of the scope of the patent application, the time series display unit displays the time series of the aforementioned events and the time series of the aforementioned process values overlappingly. 如申請專利範圍第1或2項所述之異常監視裝置,其還包括:切換部,使操作員選擇將前述事件的時序列相對於前述製程值的時序列並列顯示還是重疊顯示。 For example, the abnormality monitoring device described in item 1 or 2 of the scope of patent application further includes: a switching unit that allows the operator to select whether to display the time series of the aforementioned events side by side or overlap the time series of the aforementioned process values. 一種異常監視方法,其特徵為,包括:製程資料獲取步驟,係以時序列資料形式獲取表示系統的狀態之複數個製程值;事件資料獲取步驟,係獲取系統的製程控制中之操作員的操作或警報等事件的時序列;及時序列顯示步驟,將時間軸對齊而顯示與系統的狀態有關之前述製程值的時序列和與前述系統的製程控制有關之前述事件的時序列; 並且以縱條來顯示表示事件發生之標記。 An abnormality monitoring method, which is characterized by including: a process data acquisition step, which is to acquire a plurality of process values representing the state of the system in the form of time series data; an event data acquisition step, which is to acquire the operator's operation in the process control of the system The time sequence of events such as alarms or alarms; the time sequence display step is to align the time axis to display the time sequence of the aforementioned process values related to the state of the system and the time sequence of the aforementioned events related to the process control of the aforementioned system; And a vertical bar is used to display the mark indicating the occurrence of the event. 一種電腦程式產品,其特徵為,使電腦執行:儲存有如請求項8所述之異常監視方法的程式者。 A computer program product, which is characterized by causing a computer to execute: a program storing the abnormality monitoring method as described in claim 8.
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