TWI699252B - Light emitting method and light emitting device - Google Patents

Abstract

A light emitting method comprises a laser beam passing through at least one offset assembly and a focusing assembly in sequence and operating the offset assembly by a control mechanism to cause the laser beam to be offset so that the laser beam can quickly produce any shape of the controllable openings in the drilling process.

Description

Light emitting method and light emitting device

The present disclosure relates to a light-emitting method and device, especially a light-emitting path adjustment method and device.

Laser micro-hole processing technology has been widely used in many industries, such as probe cards for semiconductor process inspection, transparent hard and brittle materials, engine fuel injection holes, metal cutting holes and other processes. However, the current micro-holes produced by laser processing equipment are tapered round holes, so it is necessary to cooperate with the drilling module to have the ability to control the taper angle to produce different shapes of micro-holes. Rectangular micro-hole processing for pin cards, straight holes for strengthened glass, taper holes for engine nozzles, etc.

However, laser processing equipment is often limited by the diffraction characteristics of the laser beam and cannot adjust the taper angle of the micro-hole arbitrarily. As a result, the drilling module does not have flexible taper hole processing capabilities, and therefore cannot meet a single laser drilling process. For example, when the inclination of the edge of a rectangular hole is different from the inclination of the corner, it needs to be partially adjusted to a through hole or a taper hole.

Furthermore, in the prior art, the glass plate or the trepan type circular module (Trepan) is rotated by a hollow motor, but only the circular path deviation can be completed, and the rotation speed of the hollow motor is too low ( Is less than 4,000rpm), resulting in production It can be too low, so not only can it not meet the conditions of the high-speed and adjustable offset path required by the rectangular taper hole or other hole shape manufacturing process, but the drilling size is also limited, for example, it cannot be made with a diameter less than 50 microns (μm) Holes.

Therefore, how to overcome the various shortcomings of the conventional technology is actually a technical problem that all circles urgently want to solve.

In view of the various deficiencies of the above-mentioned conventional technologies, the present disclosure discloses a light emitting method which includes: passing a light beam through at least one offset component and a focusing component in sequence; and actuating the offset component by a regulating mechanism to make the light beam An offset is generated, wherein the control mechanism plans the displacement path of the offset element through a programmable logic controller to drive the displacement of the offset element and adjust the offset path of the light beam.

The present disclosure further discloses a light emitting device, which includes: an offset component for a light beam to pass through; a focusing component to receive the light beam from the offset component; and a control mechanism to actuate the offset component to generate the light beam Offset, wherein the control mechanism plans the displacement path of the offset component through a programmable logic controller to drive the displacement of the offset component and regulate the offset path of the light beam.

In the aforementioned light emitting method, the displacement path of the offset component is the change of the moving distance or the change of the angle deflection.

In the aforementioned light emitting method and light emitting device, the light emitting device is a laser device, and the light beam is a laser.

In the aforementioned light emitting method and light emitting device, the deviation of the light beam is parallel displacement.

In the aforementioned light emitting method and light emitting device, the light beam is used to form an opening. For example, the programmable logic controller plans the displacement path of the offset component according to the moving distance of the beam and the inclination angle of the wall of the opening.

In the aforementioned light emitting method and light emitting device, the offset component includes: a beam splitter; a wave plate arranged above the beam splitter; and a reflecting mirror arranged above the wave plate so that the light beam is incident from the beam splitter After being reflected by the beam splitter, it passes through the wave plate, is reflected by the mirror, passes through the wave plate again, and then is reflected by the beam splitter.

In the aforementioned light emitting method and the light emitting device, the control mechanism has a galvanometer motor to deflect the offset component at a deflection angle, and the offset distance of the light beam and the deflection angle are related to each other.

In the aforementioned light emitting method and light emitting device, the light beam passes through two sets of the offset components, and one of the offset components is used to offset the light beam in the X direction, and the other set of offset components is It is used to make the light beam shift in the Y direction, wherein the X direction and the Y direction are perpendicular to each other.

In the aforementioned light-emitting method and light-emitting device, it further includes guiding the light beam passing through the offset component to the focusing component through the scanning component. For example, the scanning component and the programmable logic controller are used to control the deviation path of the beam, which can be a circular, square, triangular, polygonal or tortuous path, which can be applied to the laser manufacturing process of complex components.

It can be seen from the above that in the light emitting method and the light emitting device of the present disclosure, the path of the light beam is adjusted mainly by the configuration of the adjusting mechanism and the offset component. Therefore, it is applied to the drilling process of laser processing, not only Need to quickly produce controllable and arbitrary shape tapered holes or through holes, and can make rulers Inch small size hole.

1,3‧‧‧Light emitting device

10‧‧‧Light source

11,21,31x,31y‧‧‧Offset component

12‧‧‧Regulatory agency

13‧‧‧Focusing component

20,310‧‧‧Polarization beam splitter

20a‧‧‧First surface

20b‧‧‧Second surface

21a, 21b, 311‧‧‧1/4 wave plate

22a,22b,312‧‧‧Mirror

32‧‧‧Scanning components

320‧‧‧Guiding mirror

8‧‧‧Target

80‧‧‧Circular taper hole

81‧‧‧Round inverted taper hole

82‧‧‧Star opening

83‧‧‧Cross-shaped opening

9‧‧‧Probe card

90‧‧‧Opening

a‧‧‧origin

b‧‧‧offset point

D‧‧‧Parallel displacement distance

e‧‧‧Inclination

W‧‧‧long side

L,L1,L2,L3,L4,L,L6,L7,L9‧‧‧Beam

R1‧‧‧Rectangular path

R2‧‧‧Circular path

R3‧‧‧Offset path

θ‧‧‧Deflection angle

Figure 1 is a schematic diagram of the first embodiment of the light emitting device disclosed in the disclosure; Figures 1A and 1B are schematic diagrams of other aspects of the beam path planning of Figure 1; Figures 1C and 1D are of Figure 1 A schematic diagram of other aspects of the shape of the opening; Fig. 2A is a partial schematic diagram of the second embodiment of the disclosed light emitting device; Fig. 2B is a schematic diagram of the beam shift state of Fig. 2A; Fig. 2C is a diagram 2B is a schematic diagram of the result of the beam on the target; and FIG. 3 is a schematic diagram of the third embodiment of the light emitting device disclosed in the disclosure.

The following specific examples illustrate the implementation of the present invention. Those familiar with the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

It should be noted that the structures, proportions, sizes, etc. shown in the drawings in this manual are only used to match the contents disclosed in the manual for the understanding and reading of those familiar with the art, and are not intended to limit the implementation of the present invention. Therefore, it does not have any technical significance. Any structural modification, proportional relationship change or size adjustment does not affect the function of the present invention. The effect and the achievable purpose should still fall within the scope of the technical content disclosed in the present invention. At the same time, the terms "upper", "lower", "first", "second" and "one" quoted in this manual are only for convenience of description, and are not intended to limit the scope of the present invention. The scope of implementation, the change or adjustment of the relative relationship, shall be regarded as the scope of the implementation of the present invention without substantial changes to the technical content.

Please refer to FIG. 1, which is a schematic diagram of the first embodiment of the light emitting device 1 of this disclosure. As shown in FIG. 1, the light emitting device 1 is modularized, which includes an offset component 11, a regulating mechanism 12 and a focusing component 13.

The offset component 11 includes a beam splitter.

The control mechanism 12 actuates the offset component 11, and includes a galvo motor (Galvo motor) to plan the displacement path of the offset component 11 by a programmable logic controller (PLC). As shown in Figure 1, the rectangular path R1), the galvanometer motor drives the displacement of the offset assembly. The programming method of the programmable logic controller is based on the light beam moving distance (such as the probe card 9 guides the probe The size of the long side W of the opening 90 used) and the inclination angle of the beam opening wall (that is, the inclination e of the cone of the opening 90), that is, the programming method of the programmable logic controller is the beam moving distance and The correlation equation of the inclination angle of the beam opening wall.

The focusing component 13 includes a focusing lens.

During operation, a light source 10 generates a laser beam L, the beam L passes through the offset component 11, and then through the focusing component 13, to focus the beam L on a target (such as the probe card 9 90 holes) on it, and by The adjusting mechanism 12 displaces the offset component 11 (for example, along the rectangular path R1 shown in FIG. 1) to adjust the offset path of the light beam L (being the light beam L or the light beam L9 according to different offset paths).

Therefore, the light emitting device 1 of the present disclosure uses the design of the galvanometer motor of the adjusting mechanism 12 and the programmable logic controller to adjust the offset of the offset element 11 so that the path of the light beam L (as shown in Figure 1 The rectangular path R1 shown or the circular path R2 shown in Figures 1A and 1B) can be planned according to requirements, so the light emitting device 1 can adjust the taper angle of the opening arbitrarily (such as the inclination of the long side W of the rectangular opening 90 e is different from the inclination e at the corner), so it can be applied to the production of various hole shapes, such as the circular taper hole 80 and the circular inverted taper hole 81 of the target 8 shown in Figures 1A and 1B, Figure 1C The star-shaped opening 82 and the cross-shaped opening 83 of the target 8 shown, or the chamfered rectangular opening 90 of the probe card 9 shown in Fig. 1D, can be made especially with a diameter of less than 50 microns ( μm) holes (such as the rectangular opening 90 of the probe card 9).

Please refer to FIGS. 2A and 2B, which are partial schematic diagrams of the second embodiment of the light emitting device disclosed in this disclosure. The difference between this embodiment and the first embodiment lies in the components of the offset assembly, and the other configurations are substantially the same, so the same points will not be repeated below.

As shown in Figure 2A, the offset component 21 includes a polarizing beam splitter (PBS) 20, two quarter wave plates (wave plates) 21a, 21b, and two mirrors (mirror) 22a. 22b.

In this embodiment, the polarizing beam splitter 20 has a first surface 20a and a second surface 20b opposite to each other, and the two quarter wave plates 21a, 21b are respectively disposed on the first surface 20a and the second surface 20b. One side, and the two mirrors 22a and 22b are respectively arranged on one side of the two quarter wave plates 21a and 21b.

When in use, the light beam L1 of the light source 10 is S-polarized light, which enters from the first surface 20a of the polarizing beam splitter 20, is reflected by the first surface 20a of the polarizing beam splitter 20, and then passes through the first surface 20a The quarter-wave plate 21a on one side is reflected by the mirror 22a on it and passes through the quarter-wave plate 21a on the first surface 20a again. At this time, the beam L2 becomes P-polarized light, so it will pass through Pass the first surface 20a and the second surface 20b of the polarizing beam splitter 20. After that, the light beam L2 (P polarized light) passes through the polarization beam splitter 20 and passes through the quarter-wave plate 21b on the second surface 20b, and then is reflected by the mirror 22b thereon to pass through the second surface again The quarter wave plate 21b on one side of 20b, at this time, the light beam L3 will change back to S-polarized light, so it will be reflected by the second surface 20b of the polarization beam splitter 20 to emit light.

Therefore, the polarization beam splitter 20 is used to have high reflection characteristics for S-polarized light and high penetration characteristics for P-polarized light to adjust the polarization characteristics of the light beam L1 so that the light beam L3 is on the second surface 20b of the polarization beam splitter 20 Reflect the light to produce a controllable and arbitrary offset position.

Furthermore, as shown in Figure 2B, the galvo motor of the adjusting mechanism 12 is used to deflection clockwise to adjust the angle of the polarization beam splitter 20, so that the beam L3 is parallel shifted (such as the shifted beam L4), and can achieve high-speed control (for example, the motor speed is greater than 20,000 rpm). Specifically, the initial position of the polarization beam splitter 20 is the position of the dotted line (or as shown in Figure 2A), and the deflection angle of the galvanometer motor clockwise or counterclockwise to deflect the polarization beam splitter 20 is ±θ, so It is deduced that the parallel displacement distance D of the beam L3 is 2(D1+D2)tan(2θ), where D1 It represents the distance from the mirror 22a on the first surface 20a to the polarization beam splitter 20, and D2 represents the distance from the mirror 22b on the second surface 20b to the polarization beam splitter 20. For example, when the deflection angle θ of the polarization beam splitter 20 is 1 degree and the length of the offset component 21 is 86 mm (that is, D1 and D2 are regarded as 43 mm), then D=2(43+43)tan(2.1 )=6.006mm, make the parallel displacement of the beam L3 6.006mm to become the lower beam L4 shown in Figure 2B, that is, as shown in Figure 2C from the origin a (before the displacement of the beam L3 is the target after focusing The opening on the object 8 is displaced to the offset point b (the beam L4 after displacement is at the opening on the target 8 after focusing). It should be understood that if the galvanometer motor deflects the polarization beam splitter 20 counterclockwise, the beam L3 before the displacement will shift upward into another beam L5.

Furthermore, according to the above formula, the parallel displacement distance D is related to the deflection angle θ of the polarization beam splitter 20. Therefore, in actual operations (such as a drilling process), the control mechanism 12 can The programming method of the Program Logic Controller (PLC) is the correlation equation between the beam moving distance (such as the parallel displacement distance D) and the inclination angle of the hole wall (ie the hole taper), so just enter the desired displacement value (parallel The displacement distance D) can calculate the required deflection angle θ, and then the programmable logic controller (PLC) can control the galvanometer motor to deflect the polarization beam splitter 20.

According to the present disclosure, through the design of the offset component 21 and the adjusting mechanism 12, not only the offset of the light beam L3 can be adjusted, but the adjustment speed is high. Therefore, the light emitting device can adjust the taper angle of the opening arbitrarily, and thus can be applied to various holes. Shape production.

Furthermore, the volume of the offset component 21 is small, so the module of the light emitting device The space must also be miniaturized.

FIG. 3 is a schematic diagram of the third embodiment of the light emitting device 3 of the disclosure. The difference between this embodiment and the first embodiment lies in the layout of the offset components, and the other configurations are substantially the same, so the same points will not be repeated in the following.

As shown in FIG. 3, the light emitting device 3 includes at least two sets of offset components 31x, 31y and a scanning component 32.

The offset components 31x, 31y can be the offset component 21 shown in the second embodiment, which includes a polarization beam splitter 310, two quarter-wave plates 311, and two mirrors 312 to utilize the control mechanism The galvo motor 12 adjusts the deflection angle of the polarization beam splitter 310. One set of offset components 31y is used to offset the beam in the Y-axis direction, and the other set of offset components 31x is used to offset the beam in the Y-axis direction. The X-axis direction is offset.

The scanning component 32 is a galvanometer type, such as a finite-state machine (FSM) scanner or a two-dimensional scanner such as an XY scanner, which has two guide mirrors arranged vertically 320. There are many types of scanning components 32, which are not limited to the above-mentioned types. For example, they may be a one-dimensional scanner.

When in use, the light beam L6 of the light source 10 passes through the two offset components 31x and 31y successively, and then is reflected and guided to the focusing component 13 by the guide mirror 320 of the scanning component 32 to focus the beam on the target . If applied in the drilling process, the taper inclination of the opening (ie, taper of the hole) can be adjusted by the two offset components 31x, 31y. The related description can refer to the second embodiment, as shown by the dotted line in Figure 3 Indicates the adjusted light beam L7), and the light beam L6 is controlled by the scanning component 32 and the programmable logic controller (PLC) The offset path R3 shown in the figure is a circular path, but in other embodiments, the offset path R3 can be any path, such as a square, triangle, polygon, or zigzag path, to be applied to complex components Laser process.

The present disclosure uses two independent offset components 31x, 31y to offset the beam L6 in the X and Y directions, and the scanning component 32 generates a controllable and arbitrary cone on the XY plane and the focusing optical axis. angle.

In summary, the light emitting method and the light emitting device disclosed in the present disclosure regulate the path of the light beam by the configuration of the adjusting mechanism and the offset component. Therefore, it is applied to the drilling process of laser processing, not only can It is required to quickly produce controllable and arbitrary-shaped tapered holes or through holes, and to make holes with a size greater than, equal to or less than 50 microns.

In addition, the galvanometer motor of the regulating mechanism 12 can be replaced by a voice coil motor or a torque motor, and there is no particular limitation.

The above-mentioned embodiments are used to exemplify the principles and effects of the present invention, but not to limit the present invention. Anyone familiar with this technique can modify the above-mentioned embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the rights of the present invention should be listed in the scope of patent application described later.

1‧‧‧Light emitting device

10‧‧‧Light source

11‧‧‧Offset component

12‧‧‧Regulatory agency

13‧‧‧Focusing component

9‧‧‧Probe card

90‧‧‧Opening

e‧‧‧Inclination

W‧‧‧long side

L,L9‧‧‧Beam

R1‧‧‧Rectangular path

Claims (12)

A light emitting method includes: sequentially passing a laser beam for forming an opening through at least one offset component including a beam splitter and a focusing component; and actuating the offset component by a regulating mechanism to make the beam The deviation is generated, wherein the deviation of the beam is parallel displacement, and the control mechanism plans the displacement path of the deviation component according to the moving distance of the beam and the inclination angle of the opening wall through a programmable logic controller to drive the deviation The displacement component is displaced and regulates the deviation path of the light beam, and the displacement path of the deviation component is the change of the moving distance or the change of the angle deflection. As described in the first item of the scope of patent application, the offset component further comprises: a wave plate arranged above the beam splitter; and a reflecting mirror arranged above the wave plate so that the light beam enters the The beam splitter is reflected by the beam splitter, passes through the wave plate, is reflected by the mirror, passes through the wave plate again, and then is reflected by the beam splitter. According to the light emitting method described in claim 1, wherein the adjusting mechanism has a galvanometer motor to deflect the offset component at a deflection angle, and the deflection distance of the light beam is related to the deflection angle. As described in the first item of the scope of patent application, the light beam passes through two sets of the offset components, and one of the offset components is used to offset the light beam in the X direction, and the other The offset component is set to make the beam offset in the Y direction, wherein the X direction and the Y direction are perpendicular to each other. As described in the first item of the scope of patent application, the light emitting method further includes guiding the light beam passing through the offset component to the focusing component through the scanning component. A light emitting device includes: an offset component including a beam splitter for a laser beam used to form an opening to pass through; a focusing component to receive the beam from the offset component; and a regulating mechanism to actuate the deviation Shift the component to make the beam shift, wherein the shift of the beam is parallel displacement, and the control mechanism plans the shift component of the shift component according to the moving distance of the beam and the inclination angle of the opening wall through a programmable logic controller The displacement path is used to drive the displacement of the deflection component and regulate the deflection path of the light beam, and the displacement path of the deflection component is the change of the movement distance or the change of the angle deflection. According to the light emitting device described in item 6 of the scope of patent application, the offset component further includes: a wave plate arranged above the beam splitter; and a reflecting mirror arranged above the wave plate. According to the light emitting device described in item 6 of the scope of patent application, the adjusting mechanism has a galvanometer motor to deflect the offset component at a deflection angle, and the deflection distance of the light beam is related to the deflection angle. For the light emitting device described in item 6 of the scope of patent application, the light beam passes through two sets of the offset components, and one of the offset components is used to offset the light beam in the X direction, and the other The offset component is set to make the beam offset in the Y direction, wherein the X direction and the Y direction are perpendicular to each other. As described in item 6 of the scope of patent application, the light emitting device further includes a scanning component, which is arranged between the offset component and the focusing component, so as to guide the light beam passing through the offset component to the focusing component. According to the light emitting device described in claim 10, the scanning element and the programmable logic controller are used to control the deviation path of the light beam. For the light emitting device described in item 11 of the scope of the patent application, the offset path is a circular, square, triangular, polygonal or tortuous path for use in the laser manufacturing process of complex components.

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