TWI688055B - Resin molding device and method for manufacturing resin molded product - Google Patents
Resin molding device and method for manufacturing resin molded product Download PDFInfo
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- TWI688055B TWI688055B TW107133615A TW107133615A TWI688055B TW I688055 B TWI688055 B TW I688055B TW 107133615 A TW107133615 A TW 107133615A TW 107133615 A TW107133615 A TW 107133615A TW I688055 B TWI688055 B TW I688055B
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- mold
- cavity block
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- model cavity
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/03—Injection moulding apparatus
- B29C45/04—Injection moulding apparatus using movable moulds or mould halves
- B29C45/0408—Injection moulding apparatus using movable moulds or mould halves involving at least a linear movement
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
- B29C33/68—Release sheets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/02—Transfer moulding, i.e. transferring the required volume of moulding material by a plunger from a "shot" cavity into a mould cavity
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C45/14065—Positioning or centering articles in the mould
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/2602—Mould construction elements
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
- B29C2045/14852—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles incorporating articles with a data carrier, e.g. chips
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
本發明提供一種即便被成型品的厚度存在偏差也能抑制或防止成型缺陷的樹脂成型裝置。樹脂成型裝置包括:成型模;和模楔形機構;和模型腔塊驅動機構,所述成型模包括一模和另一模,模包括模型腔塊和模型腔框構件,模型腔框構件包括滑動孔,模型腔塊能夠在滑動孔中在所述成型模的模開閉方向上移動,能夠以模型腔塊的與另一模相對的面和所述模型腔框構件的內側面形成模型腔,使用模型腔塊驅動機構能夠使模型腔塊在所述模開閉方向上移動,使用模楔形機構能夠固定一個模型腔塊在所述模開閉方向上的位置。 The present invention provides a resin molding device capable of suppressing or preventing molding defects even if the thickness of a product to be molded varies. The resin molding device includes: a molding die; and a mold wedge mechanism; and a mold cavity block driving mechanism, the molding die includes a mold and another mold, the mold includes a mold cavity block and a mold cavity frame member, and the mold cavity frame member includes a sliding hole , The model cavity block can move in the sliding hole in the mold opening and closing direction of the molding die, the model cavity block can be formed with the surface of the model cavity block opposite to the other mold and the inner side surface of the model cavity frame member, using the model The cavity block driving mechanism can move the model cavity block in the mold opening and closing direction, and a mold wedge mechanism can fix the position of a model cavity block in the mold opening and closing direction.
Description
本發明關於樹脂成型裝置及樹脂成型品的製造方法。 The present invention relates to a resin molding device and a method of manufacturing a resin molded product.
在樹脂成型品的製造方法中,例如會使用具備成型模的樹脂成型裝置。 In the method of manufacturing a resin molded product, for example, a resin molding device equipped with a molding die is used.
例如專利文獻1中記載了將第一基板的一個面及第二基板的一個面之間進行樹脂封裝而製造電子裝置的方法。 For example,
專利文獻1:日本專利公開案第2015-076547號公報。 Patent Document 1: Japanese Patent Publication No. 2015-076547.
不過,在具備多塊基板的被成型物(也稱被成型品)的樹脂成型中,由於被成型物的厚度偏差而有可能導致出現例如樹脂漏出等成型缺陷。 However, in resin molding of a molded object (also referred to as a molded product) including a plurality of substrates, molding defects such as resin leakage may occur due to variations in the thickness of the molded object.
因此,本發明的目的在於提供即便被成型物的厚度存在偏差也能抑制或防止成型缺陷的樹脂成型裝置及樹脂成型品的製造方法。 Therefore, an object of the present invention is to provide a resin molding device and a method of manufacturing a resin molded product that can suppress or prevent molding defects even if the thickness of the object to be molded varies.
為了達成所述目的,本發明的樹脂成型裝置包括:成型模;和一個模楔形機構;和一個模型腔塊驅動機構,所述成型模包括一個模和另一個模,所述一個模包括一個模型腔塊和一個模型腔框構件,所述一個模型腔框構件上形成有滑動孔,所述一個模型腔塊能夠在所述滑動孔中在所述成型模的模開閉方向上移動,能夠以所述一個模型腔塊的與所述另一個模相對的面和所述一個模型腔框構件的內側面形成一個模型腔,使用所述一個模型腔塊驅動機構能夠使所述一個模型腔塊在所述模開閉方向上移動,使用所述一個模楔形機構能夠固定所述一個模型腔塊在所述模開閉方向上的位置。 In order to achieve the object, the resin molding device of the present invention includes: a molding die; and a die wedge mechanism; and a model cavity block driving mechanism, the molding die includes one die and another die, and the one die includes a model A cavity block and a model cavity frame member, the one model cavity frame member is formed with a sliding hole, the one model cavity block can move in the sliding hole in the mold opening and closing direction of the molding die, and can A surface of the one model cavity block opposite to the other mold and an inner side surface of the one model cavity frame member form a model cavity, and the use of the one model cavity block driving mechanism enables the one model cavity block to The mold is moved in the opening and closing direction, and the position of the one mold cavity block in the mold opening and closing direction can be fixed using the one mold wedge mechanism.
本發明的樹脂成型品的製造方法使用包括成型模的樹脂成型裝置進行,所述成型模包括一個模和另一個模,所述一個模包括一個模型腔塊和一個模型腔框構件,所述一個模型腔框構件上形成有滑動孔,所述一個模型腔塊能夠在所述滑動孔內在所述成型模的模開閉方向上移動,能夠以所述一個模型腔塊的與所述另一個模相對的面 和所述一個模型腔框構件的內側面形成一個模型腔,所述樹脂成型品的製造方法包括:被成型物供給步驟,向所述成型模供給所述被成型物;一個模型腔塊位置改變步驟,改變所述一個模型腔塊在所述成型模的模開閉方向上的位置;和樹脂成型步驟,將所述被成型物在所述一個模型腔中進行樹脂成型。 The method for manufacturing a resin molded product of the present invention is performed using a resin molding apparatus including a molding die including one mold and another mold, the one mold including a mold cavity block and a mold cavity frame member, the one A sliding hole is formed in the model cavity frame member, the one model cavity block can move in the sliding hole in the mold opening and closing direction of the forming mold, and the one model cavity block can be opposed to the other mold And the inner surface of the one model cavity frame member form a model cavity, and the manufacturing method of the resin molded product includes: a step of supplying a molded object, supplying the molded object to the molding die; and a model cavity block The position changing step changes the position of the one mold cavity block in the mold opening and closing direction of the molding die; and the resin molding step, performs resin molding of the object to be molded in the one mold cavity.
根據本發明,能夠提供即便被成型物的厚度存在偏差也能抑制或防止成型缺陷的樹脂成型裝置及樹脂成型品的製造方法。 According to the present invention, it is possible to provide a resin molding device and a method of manufacturing a resin molded product that can suppress or prevent molding defects even if the thickness of the object to be molded varies.
10‧‧‧基板(被成型物、被成型品) 10‧‧‧substrate (object to be molded, object to be molded)
10A‧‧‧樹脂成型品 10A‧‧‧Resin molded product
11‧‧‧第一基板 11‧‧‧The first substrate
12‧‧‧第二基板 12‧‧‧Second substrate
13‧‧‧第一連接部(第一連接端子) 13‧‧‧First connection part (first connection terminal)
14‧‧‧第二連接部(第二連接端子) 14‧‧‧Second connection part (second connection terminal)
15‧‧‧晶片 15‧‧‧chip
20‧‧‧固化樹脂(封裝樹脂) 20‧‧‧cured resin (encapsulating resin)
20a‧‧‧板(樹脂材料) 20a‧‧‧Board (resin material)
20b‧‧‧熔融樹脂(流動性樹脂) 20b‧‧‧Melted resin (fluid resin)
20d‧‧‧剩餘樹脂(無用樹脂部) 20d‧‧‧Residual resin (useless resin part)
40‧‧‧脫模膜 40‧‧‧Release film
41‧‧‧排氣孔部的脫模膜 41‧‧‧ Release film at the vent
1000‧‧‧樹脂成型裝置 1000‧‧‧Resin molding device
1100、1100a‧‧‧上模(一個模) 1100, 1100a‧‧‧ Upper mold (one mold)
1101、1101a‧‧‧上模型腔塊(一個模型腔塊) 1101, 1101a‧‧‧up model cavity block (one model cavity block)
1102、1102a‧‧‧上模型腔框構件(一個模型腔框構件) 1102, 1102a‧‧‧up model cavity frame member (a model cavity frame member)
1103、1103a‧‧‧上模型腔框構件(一個模型腔框構件) 1103, 1103a‧‧‧up model cavity frame member (a model cavity frame member)
1104、1104a‧‧‧排氣孔槽 1104, 1104a‧‧‧ vent slot
1105、1105a‧‧‧滑動孔 1105, 1105a ‧‧‧ sliding hole
1106、1106a‧‧‧上模型腔(一個模型腔) 1106, 1106a‧‧‧up model cavity (one model cavity)
1200、1200a‧‧‧下模(另一個模) 1200, 1200a‧‧‧lower die (another die)
1201、1201a‧‧‧下模型腔塊(另一個模型腔塊) 1201, 1201a‧‧‧Lower model cavity block (another model cavity block)
1202、1202a‧‧‧下模側塊(另一個模側塊) 1202, 1202a‧‧‧Lower mold side block (another mold side block)
1203、1203a‧‧‧槽塊 1203, 1203a‧‧‧slot block
1204、1204a‧‧‧下模型腔塊支柱(另一個模型腔塊支柱) 1204, 1204a ‧‧‧ Lower model cavity block pillar (another model cavity block pillar)
1205、1205a‧‧‧下模彈性構件(另一個模彈性構件) 1205, 1205a ‧‧‧ lower elastic member (another elastic member)
1211‧‧‧槽 1211‧‧‧slot
1212‧‧‧柱塞 1212‧‧‧ Plunger
1300‧‧‧上模型腔塊位置改變機構設置部(一個模型腔塊位置改變機構設置部) 1300‧‧‧Upper model cavity block position changing mechanism setting part (one model cavity block position changing mechanism setting part)
1301‧‧‧上模型腔塊驅動機構(一個模型腔塊驅動機構) 1301‧‧‧Up model cavity block drive mechanism (a model cavity block drive mechanism)
1302‧‧‧上模型腔塊保持構件(一個模型腔塊保持構件) 1302‧‧‧ Upper model cavity block holding member (one model cavity block holding member)
1303‧‧‧測力感測器(按壓力測量機構) 1303‧‧‧force sensor (pressing pressure measuring mechanism)
1304‧‧‧上模型腔塊支柱(一個模型腔塊支柱) 1304‧‧‧Up model cavity block pillar (one model cavity block pillar)
1310‧‧‧上模楔形機構(一個模楔形機構) 1310‧‧‧ Upper die wedge mechanism (one die wedge mechanism)
1311a‧‧‧上模第一楔形構件(一個模第一楔形構件) 1311a‧‧‧The first wedge member of the upper die (the first wedge member of one die)
1311b‧‧‧上模第二楔形構件(一個模第二楔形構件) 1311b‧‧‧ Upper wedge-shaped member (one wedge-shaped member)
1312‧‧‧上模楔形構件動力傳送構件(一個模楔形構件動力傳送構件) 1312‧‧‧ Upper die wedge member power transmission member (one die wedge member power transmission member)
1313‧‧‧上模楔形構件驅動機構(一個模楔形構件驅動機構) 1313‧‧‧ Upper die wedge member drive mechanism (one die wedge member drive mechanism)
1321‧‧‧上模第二楔形構件保持構件(一個模第二楔形部件保持構件) 1321‧‧‧ Upper mold second wedge-shaped member holding member (one mold second wedge-shaped member holding member)
1322‧‧‧上模第二楔形構件保持構件的彈性構件(一個模第二楔形構件保持構件的彈性構件) 1322‧‧‧Elastic member of the second wedge-shaped member holding member of the upper mold (one member of the elastic member of the second wedge-shaped member holding member)
1330‧‧‧排氣孔開閉機構 1330‧‧‧ vent opening and closing mechanism
1331‧‧‧排氣孔銷動力機構 1331‧‧‧Exhaust pin power mechanism
1332‧‧‧排氣孔銷 1332‧‧‧ vent pin
1340‧‧‧壓板(上模型腔塊位置改變機構設置部基底構件或一個模型腔塊位置改變機構設置部基底構件) 1340‧‧‧Pressing plate (upper model cavity block position changing mechanism setting part base member or a model cavity block position changing mechanism setting part base member)
1341‧‧‧上模型腔塊位置改變機構設置部框構件(一個模型腔塊位置改變機構設置部框構件) 1341‧‧‧Upper model cavity block position changing mechanism setting part frame member (one model cavity block position changing mechanism setting part frame member)
1342‧‧‧上模型腔塊位置改變機構設置部底面構件(一個模型腔塊位置改變機構設置部底面構件)/上部構件 1342‧‧‧Upper model cavity block position changing mechanism setting part bottom surface member (one model cavity block position changing mechanism setting part bottom surface member)/upper member
1343‧‧‧上模型腔塊位置改變機構設置部底面構件(一個模型腔塊位置改變機構設置部底面構件)/下部構件 1343‧‧‧ Upper model cavity block position changing mechanism setting part bottom surface member (one model cavity block position changing mechanism setting part bottom surface member)/lower member
1351‧‧‧脫模膜吸附機構 1351‧‧‧ Release film adsorption mechanism
1352‧‧‧脫模膜吸附配管 1352‧‧‧Desorption film adsorption piping
1353‧‧‧脫模膜吸附孔 1353‧‧‧Adsorption hole for release film
1400‧‧‧下模型腔塊位置改變機構設置部(另一個模型腔塊位置改變機構設置部) 1400‧‧‧ Lower model cavity block position changing mechanism setting part (another model cavity block position changing mechanism setting part)
1410‧‧‧下模楔形機構(另一個模楔形機構) 1410‧‧‧Lower die wedge mechanism (another die wedge mechanism)
1411a‧‧‧下模第一楔形構件(另一個模第一楔形構件) 1411a‧‧‧The first wedge member of the lower die (the first wedge member of the other die)
1411b‧‧‧下模第二楔形構件(另一個模第2楔形構件) 1411b‧‧‧Second wedge member (the second wedge member of the other die)
1412‧‧‧下模楔形構件動力傳送構件(另一個模楔形 構件動力傳送構件) 1412‧‧‧Lower die wedge member power transmission member (another die wedge member power transmission member)
1413‧‧‧下模楔形構件驅動機構(另一個模楔形構件驅動機構) 1413‧‧‧Lower die wedge member drive mechanism (another die wedge member drive mechanism)
1421‧‧‧下模安裝構件(另一個模安裝構件) 1421‧‧‧Lower mold mounting member (another mold mounting member)
1422‧‧‧壓板(下模第二楔形構件保持構件或另一個模第二楔形構件保持構件) 1422‧‧‧Pressing plate (lower mold second wedge member holding member or another mold second wedge member holding member)
X1~X4‧‧‧表示下模(另一個模)1200上升方向或施力方向的箭頭 X1~X4‧‧‧arrow indicating the upward direction or force direction of the lower die (another die) 1200
Y1~Y2‧‧‧表示下模(另一個模)1200下降方向的箭頭 Y1~Y2‧‧‧ indicates the downward direction of the lower die (another die) 1200
a1~a2‧‧‧表示下模第一楔形構件(另一個模第一楔形部件)1411a前進方向的箭頭 a1~a2‧‧‧arrow indicating the direction of advancement of the first wedge-shaped member of the lower die (the first wedge-shaped member of the other die) 1411a
c1~c2‧‧‧表示上模型腔塊(一個模型腔塊)1101下降方向的箭頭 c1~c2‧‧‧ indicates the downward direction of the upper model cavity block (a model cavity block) 1101
d1‧‧‧表示上模型腔塊(一個模型腔塊)1101上升方向的箭頭 d1‧‧‧arrow indicating the upward direction of the upper model cavity block (a model cavity block) 1101
e1~e2‧‧‧表示上模第一楔形構件(一個模第一楔形構件)1311a前進方向的箭頭 e1~e2‧‧‧arrow indicating the direction of the advancement of the first wedge-shaped member (the first wedge-shaped member of the mold) 1311a
g1~g2‧‧‧表示柱塞1212推入方向的箭頭 g1~g2‧‧‧arrow indicating the direction of
s‧‧‧空間 s‧‧‧Space
h1‧‧‧表示排氣孔銷1332下降方向的箭頭 h1‧‧‧ Arrow indicating the downward direction of the
D‧‧‧被成型物10的厚度(高度) D‧‧‧Thickness (height) of the
圖1為示意性示出本發明的樹脂成型裝置的一例的剖視圖。 FIG. 1 is a cross-sectional view schematically showing an example of the resin molding apparatus of the present invention.
圖2為示意性示出使用了圖1的樹脂成型裝置的樹脂成型品的製造方法的一例的一個步驟的剖視圖。 2 is a cross-sectional view schematically showing one step of an example of a method of manufacturing a resin molded product using the resin molding device of FIG. 1.
圖3為示意性示出與圖2相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 FIG. 3 is a cross-sectional view schematically showing another step of the method of manufacturing the same resin molded product as FIG. 2.
圖4為示意性示出與圖2相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 4 is a cross-sectional view schematically showing another step of the method for manufacturing the same resin molded product as FIG. 2.
圖5為示意性示出與圖2相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 FIG. 5 is a cross-sectional view schematically showing another step of the method of manufacturing the same resin molded product as FIG. 2.
圖6為示意性示出與圖2相同的樹脂成型品的製造方 法的另一個步驟的剖視圖。 Fig. 6 is a cross-sectional view schematically showing another step of the method of manufacturing the same resin molded product as Fig. 2.
圖7為示意性示出與圖2相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 7 is a cross-sectional view schematically showing another step of the method for manufacturing the same resin molded product as FIG. 2.
圖8為示意性示出與圖2相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 FIG. 8 is a cross-sectional view schematically showing another step of the method of manufacturing the same resin molded product as FIG. 2.
圖9為示意性示出與圖2相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 9 is a cross-sectional view schematically showing another step of the method for manufacturing the same resin molded product as FIG. 2.
圖10為示意性示出與圖2相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 FIG. 10 is a cross-sectional view schematically showing another step of the method of manufacturing the same resin molded product as FIG. 2.
圖11為示意性示出與圖2相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 FIG. 11 is a cross-sectional view schematically showing another step of the method of manufacturing the same resin molded product as FIG. 2.
圖12為示意性示出與圖2相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 FIG. 12 is a cross-sectional view schematically showing another step of the method of manufacturing the same resin molded product as FIG. 2.
圖13為示意性示出與圖2相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 FIG. 13 is a cross-sectional view schematically showing another step of the method for manufacturing the same resin molded product as FIG. 2.
圖14為示意性示出與圖2相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 14 is a cross-sectional view schematically showing another step of the method of manufacturing the same resin molded product as FIG. 2.
圖15為示意性示出與圖2相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 FIG. 15 is a cross-sectional view schematically showing another step of the method of manufacturing the same resin molded product as FIG. 2.
圖16為示意性示出與圖2相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 FIG. 16 is a cross-sectional view schematically showing another step of the method of manufacturing the same resin molded product as FIG. 2.
圖17為示意性示出與圖2相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 FIG. 17 is a cross-sectional view schematically showing another step of the method of manufacturing the same resin molded product as FIG. 2.
圖18為示意性示出與圖2相同的樹脂成型品的製造方 法的另一個步驟的剖視圖。 Fig. 18 is a cross-sectional view schematically showing another step of the method of manufacturing the same resin molded product as Fig. 2.
圖19為示意性示出與圖1相同的樹脂成型裝置的剖視圖。 FIG. 19 is a cross-sectional view schematically showing the same resin molding apparatus as FIG. 1.
圖20為示意性示出從圖19的樹脂成型裝置卸下上模及下模的狀態的剖視圖。 20 is a cross-sectional view schematically showing a state in which the upper mold and the lower mold are removed from the resin molding apparatus of FIG. 19.
圖21為示意性示出將與圖19不同的上模及下模安裝到圖19的樹脂成型裝置的狀態的剖視圖。 21 is a cross-sectional view schematically showing a state in which an upper mold and a lower mold different from FIG. 19 are attached to the resin molding apparatus of FIG. 19.
圖22為示意性示出使用圖1的樹脂成型裝置的樹脂成型品的製造方法的另一例的一個步驟的剖視圖。 22 is a cross-sectional view schematically showing one step of another example of a method of manufacturing a resin molded product using the resin molding device of FIG. 1.
圖23為示意性示出與圖22相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 FIG. 23 is a cross-sectional view schematically showing another step of the method of manufacturing the same resin molded product as FIG. 22.
圖24為示意性示出與圖22相同的樹脂成型品的製造方法的另一個步驟的剖視圖。 FIG. 24 is a cross-sectional view schematically showing another step of the method of manufacturing the same resin molded product as FIG. 22.
圖25為示意性示出在圖1的樹脂成型裝置中,將脫模膜吸附於上模的結構的一例的剖視圖。 25 is a cross-sectional view schematically showing an example of a structure in which a mold release film is adsorbed to an upper mold in the resin molding apparatus of FIG. 1.
圖26之(a)為示意性示出被成型物的一例的剖視圖。圖26之(b)為示意性示出將圖26之(a)的被成型物進行了樹脂成型的樹脂成型品的一例的剖視圖。 FIG. 26(a) is a cross-sectional view schematically showing an example of the object to be molded. FIG. 26(b) is a cross-sectional view schematically showing an example of a resin molded product in which the object to be molded in FIG. 26(a) is resin-molded.
接下來,藉由舉例進一步詳細地說明本發明。不過,本發明不限於以下說明。 Next, the present invention will be described in further detail by examples. However, the present invention is not limited to the following description.
本發明的樹脂成型裝置例如可進一步包括脫模膜吸附機構。 The resin molding apparatus of the present invention may further include a release film adsorption mechanism, for example.
本發明的樹脂成型裝置例如能夠隔著脫模膜 以所述一個模型腔塊按壓被樹脂成型的被成型物。 The resin molding apparatus of the present invention can press, for example, the object to be molded by the resin with the one mold cavity block via the release film.
本發明的樹脂成型裝置例如能夠進一步包括按壓力測量機構,所述按壓力測量機構測量使用所述一個模型腔塊驅動機構按壓所述一個模型腔塊的按壓力。 The resin molding apparatus of the present invention can further include, for example, a pressing force measuring mechanism that measures the pressing force of pressing the one model cavity block using the one model cavity block driving mechanism.
就本發明的樹脂成型裝置而言,例如能夠:所述一個模楔形機構包括一對一個模楔形構件,所述一對一個模楔形構件包括一個模第一楔形構件和一個模第二楔形構件,所述一個模第一楔形構件和所述一個模第二楔形構件分別具備斜坡面,並以相互的所述斜坡面相對的方式配置,藉由移動所述一個模第一楔形構件及所述一個模第二楔形構件當中的至少一個,能夠在所述一個模第一楔形構件和所述一個模第二楔形構件接觸時,改變所述一對一個模楔形構件在所述模開閉方向上的長度。另外,使所述至少一個楔形構件移動的方向例如可為所移動楔形構件的楔形前端方向或後端方向。 With regard to the resin molding device of the present invention, for example, the one die wedge mechanism includes a pair of die wedge members, and the pair of die wedge members includes a die first wedge member and a die second wedge member, The one-mould first wedge-shaped member and the one-mould second wedge-shaped member respectively have slope surfaces, and are arranged so that the sloped surfaces face each other, by moving the one-mould first wedge-shaped member and the one At least one of the second wedge-shaped members of the mold can change the length of the pair of one wedge-shaped members in the mold opening and closing direction when the first wedge-shaped member of the one mold contacts the second wedge-shaped member of the one mold . In addition, the direction in which the at least one wedge member is moved may be, for example, a wedge-shaped front end direction or a rear end direction of the moved wedge member.
就本發明的樹脂成型裝置而言,例如能夠:所述樹脂成型裝置進一步包括另一個模楔形機構,所述另一個模包括另一個模型腔塊,使用所述另一個模楔形機構,能夠固定所述另一個模型腔塊在所述模開閉方向上的位置。 With regard to the resin molding apparatus of the present invention, for example, the resin molding apparatus can further include another mold wedge mechanism, and the other mold includes another mold cavity block. Using the other mold wedge mechanism, the resin mold can be fixed The position of the other mold cavity block in the opening and closing direction of the mold.
就本發明的樹脂成型裝置而言,例如能夠,所述另一個模楔形機構包括一對另一個模楔 形構件,所述一對另一個模楔形構件包括另一個模第一楔形構件和另一個模第二楔形構件,所述另一個模第一楔形構件和所述另一個模第二楔形構件分別具備斜坡面,並以相互的所述斜坡面相對的方式配置,藉由移動所述一個模第一楔形構件及所述一個模第二楔形構件當中的至少一個,能夠在所述另一個模第一楔形構件和所述另一個模第二楔形構件接觸時,改變所述一對另一個模楔形構件在所述模開閉方向上的長度。另外,移動所述至少一個楔形構件的方向例如可為被移動的楔形構件的楔形前端方向或後端方向。 With respect to the resin molding apparatus of the present invention, for example, the another die wedge mechanism includes a pair of another die wedge members including the other die first wedge member and the other die The second wedge-shaped member, the first wedge-shaped member of the other mold and the second wedge-shaped member of the other mold respectively have slope surfaces, and are arranged in such a manner that the slope surfaces face each other, by moving the first mold At least one of a wedge member and the second wedge member of the one mold can change the wedge shape of the pair of other molds when the first wedge member of the other mold contacts the second wedge member of the other mold The length of the member in the mold opening and closing direction. In addition, the direction in which the at least one wedge member is moved may be, for example, a wedge-shaped front end direction or a rear end direction of the moved wedge member.
就本發明的樹脂成型裝置而言,例如可藉由在所述一個模第一楔形構件和所述一個模第二楔形構件接觸時,改變所述一對一個模楔形構件在所述模開閉方向上的長度,而能夠改變所述一個模型腔塊在所述模開閉方向上的位置。 In the resin molding apparatus of the present invention, for example, when the first wedge member of the one mold and the second wedge member of the one mold are in contact, the direction of opening and closing of the pair of one wedge members in the mold can be changed The length of the mold cavity can change the position of the one mold cavity block in the mold opening and closing direction.
就本發明的樹脂成型裝置而言,例如能夠: For the resin molding device of the present invention, for example, it is possible to:
藉由使所述一個模及所述另一個模當中的至少一個向所述成型模的閉模方向移動,而以所述一個模及所述另一個模夾持所述被成型物,並藉由使用所述一個模型腔塊驅動機構,使所述一個模型腔塊向所述被成型物移動,而隔著脫模膜以所述一個模型腔塊按壓所述被成型物,之後,使用所述一個模楔形機構,能夠固定所述一個 模型腔塊在所述模開閉方向上的位置。 By moving at least one of the one mold and the other mold in the mold closing direction, the one mold and the other mold hold the object to be molded, and By using the one model cavity block driving mechanism, the one model cavity block is moved toward the object to be molded, and the one model cavity block is pressed against the object to be molded via the release film. The one mold wedge mechanism can fix the position of the one mold cavity block in the mold opening and closing direction.
就本發明的樹脂成型裝置而言,例如能夠在將所述一個模型腔塊的位置固定後,使所述一個模及所述另一個模的至少一個向所述成型模的開模方向移動,再之後,能夠使用所述一個模型腔塊驅動機構和所述一個模楔形機構改變並固定所述一個模型腔塊的位置。 In the resin molding apparatus of the present invention, for example, after the position of the one mold cavity block is fixed, at least one of the one mold and the other mold can be moved in the mold opening direction of the mold, After that, the position of the one model cavity block can be changed and fixed using the one model cavity block driving mechanism and the one model wedge mechanism.
就本發明的樹脂成型裝置而言,例如所述一個模可為上模,所述另一個模可為下模。另外,例如,與此相反,就本發明的樹脂成型裝置而言,所述一個模可為下模,所述另一個模可為上模。 In the resin molding apparatus of the present invention, for example, the one mold may be an upper mold, and the other mold may be a lower mold. In addition, for example, in contrast to this, in the resin molding apparatus of the present invention, the one mold may be a lower mold and the other mold may be an upper mold.
就本發明的樹脂成型裝置而言,例如可為傳遞成型用的裝置。並且,本發明的樹脂成型裝置不限於此,例如也可為壓縮成型用等的裝置。 The resin molding device of the present invention may be, for example, a device for transfer molding. In addition, the resin molding apparatus of the present invention is not limited to this, and may be an apparatus for compression molding, for example.
就本發明的樹脂成型品的製造方法而言,如上所述,雖然使用包括成型模的樹脂成型裝置來進行,不過例如所述樹脂成型裝置也可為所述本發明的樹脂成型裝置。 As for the method of manufacturing the resin molded product of the present invention, as described above, although a resin molding device including a molding die is used, for example, the resin molding device may be the resin molding device of the present invention.
就本發明的樹脂成型品的製造方法而言,例如可進一步包括用脫模膜覆蓋所述一個模的模表面的一個模表面覆蓋步驟。 The method for manufacturing a resin molded article of the present invention may further include a mold surface covering step of covering the mold surface of the one mold with a release film.
就本發明的樹脂成型品的製造方法而言,例如可進一步包括隔著脫模膜以所述一個模型腔塊按壓被樹脂成型的被成型物的被成型物按壓步驟。 The method for manufacturing a resin molded article of the present invention may further include, for example, a molded object pressing step of pressing the molded object molded by the resin with the one mold cavity block via the release film.
就本發明的樹脂成型品的製造方法而言,例 如可進一步包括改變所述另一個模型腔塊在所述模開閉方向上的位置的另一個模型腔塊位置改變步驟。 The method for manufacturing a resin molded product of the present invention may further include a step of changing the position of the other mold cavity block in the mold opening and closing direction, for example.
就本發明的樹脂成型品的製造方法而言,例如能夠為:所述樹脂成型裝置為所述本發明的樹脂成型裝置,所述本發明的樹脂成型裝置進一步包括所述另一個模楔形機構。 The method for manufacturing the resin molded product of the present invention may be, for example, that the resin molding device is the resin molding device of the present invention, and the resin molding device of the present invention further includes the other mold wedge mechanism.
就本發明的樹脂成型品的製造方法而言,例如能夠進一步包括:被成型物夾緊步驟,藉由使所述一個模及所述另一個模當中的至少一個向所述成型模的閉模方向移動,而藉由所述一個模及所述另一個模夾持並固定所述被成型物;和被成型物按壓步驟,隔著脫模膜以所述一個模型腔塊按壓所述被成型物;和一個模型腔塊固定步驟,固定所述一個模型腔的位置,在所述一個模型腔塊位置改變步驟中,使用所述一個模型腔塊驅動機構,使所述一個模型腔塊向所述被成型物移動,在所述被成型物按壓步驟中,使用所述一個模型腔塊驅動機構,隔著脫模膜以所述一個模型腔塊按壓所述被成型物,在所述被成型物按壓步驟之後,在所述一個模型腔塊固定步驟中,使用所述一個模楔形機構固定所述一個模型腔塊在所述模開閉方向上的位置。 The method for manufacturing a resin molded product of the present invention may further include, for example, a step of clamping a molded object, by closing at least one of the one mold and the other mold to the molding mold Moving in the direction, and clamping and fixing the object to be molded by the one mold and the other mold; and the step of pressing the object to be molded, pressing the object to be molded with the one mold cavity block through the release film And a model cavity block fixing step, fixing the position of the one model cavity, in the step of changing the position of the one model cavity block, using the one model cavity block driving mechanism, so that the one model cavity block The molded object moves, and in the step of pressing the molded object, the one mold cavity block driving mechanism is used to press the molded object with the one mold cavity block through the release film, and the molded object is molded. After the object pressing step, in the one model cavity block fixing step, the one model cavity block is used to fix the position of the one model cavity block in the mold opening and closing direction.
就本發明的樹脂成型品的製造方法而言,例 如能夠包括:在所述一個模型腔塊固定步驟之後,使所述一個模及所述另一個模當中的至少一個向所述成型模的開模方向移動,再之後,使用所述一個模型腔塊驅動機構改變所述一個模型腔塊的位置的第二一個模型腔塊位置改變步驟和使用所述一個模楔形機構固定所述一個模型腔塊的位置的第二一個模型腔塊固定步驟。 The method for manufacturing a resin molded product of the present invention may include, for example, after the step of fixing the one mold cavity block, opening at least one of the one mold and the other mold toward the molding mold The mold direction moves, and then, the second model cavity block position changing step using the one model cavity block driving mechanism to change the position of the one model cavity block and fixing the one model cavity using the one mold wedge mechanism The block position is the second model cavity block fixing step.
就本發明的樹脂成型品的製造方法而言,例如,能夠在所述樹脂成型步驟中,藉由傳遞成型將所述被成型物進行樹脂成型。另外,本發明的樹脂成型品的製造方法不限於此,例如能夠在所述樹脂成型步驟中,藉由壓縮成型等將所述被成型物進行成型。 In the method for manufacturing a resin molded article of the present invention, for example, in the resin molding step, the object to be molded can be resin molded by transfer molding. In addition, the method of manufacturing the resin molded article of the present invention is not limited to this, and for example, the object to be molded can be molded by compression molding or the like in the resin molding step.
就本發明的樹脂成型品的製造方法而言,例如能夠:所述被成型物可包括多塊基板,並藉由將所述各基板之間進行樹脂封裝而將所述被成型物進行樹脂成型。 In the method of manufacturing a resin molded article of the present invention, for example, the object to be molded may include a plurality of substrates, and the object to be molded may be resin molded by encapsulating the resin between the substrates .
另外,雖然在本發明中,“成型模”例如為金屬模具,不過不限於此,例如也可為陶瓷模具等。 In addition, in the present invention, the "forming mold" is, for example, a metal mold, but it is not limited to this, and may be, for example, a ceramic mold.
在本發明中,樹脂成型品不被特別限定,例如可為僅將樹脂進行成型的樹脂成型品,也可為將晶片等部件進行樹脂封裝的樹脂成型品。在本發明中,樹脂成型品例如也可為電子部件等。 In the present invention, the resin molded product is not particularly limited, and may be, for example, a resin molded product that molds only resin, or a resin molded product that packages resin such as a wafer. In the present invention, the resin molded product may be, for example, an electronic component.
在本發明中,“樹脂成型”或“樹脂封裝”是指例如樹脂固化(硬化)的狀態。 In the present invention, “resin molding” or “resin encapsulation” refers to, for example, a state where the resin is cured (hardened).
在本發明中,作為成型前的樹脂材料及成型後的樹脂不被特別限定,例如可為環氧樹脂和矽酮樹脂等 熱固性樹脂,也可為熱塑性樹脂。並且,也可為包含一部分熱固性樹脂或熱塑性樹脂的複合材料。在本發明中,作為成型前的樹脂材料的形態例如可舉例顆粒樹脂、流動性樹脂、片狀樹脂、板狀樹脂、粉狀樹脂等。在本發明中,所述流動性樹脂如果是具有流動性的樹脂,則不被特別限定,例如可舉例液狀樹脂、熔融樹脂等。在本發明中,所述液狀樹脂是指例如在室溫下為液體或者具有流動性的樹脂。在本發明中,所述熔融樹脂是指例如藉由熔融而成為液狀或成為具有流動性狀態的樹脂。所述樹脂的形態只要能供給到成型模的型腔和槽等中,則其他形態也可以。 In the present invention, the resin material before molding and the resin after molding are not particularly limited, and may be, for example, thermosetting resins such as epoxy resins and silicone resins, or thermoplastic resins. Also, it may be a composite material containing a part of thermosetting resin or thermoplastic resin. In the present invention, examples of the form of the resin material before molding include pellet resin, fluid resin, sheet resin, plate resin, and powder resin. In the present invention, the fluid resin is not particularly limited if it is a fluid resin, and examples thereof include liquid resin and molten resin. In the present invention, the liquid resin refers to a resin that is liquid or has fluidity at room temperature, for example. In the present invention, the molten resin refers to a resin that becomes liquid or has a fluid state by melting, for example. The form of the resin may be other forms as long as it can be supplied into the cavity and groove of the mold.
另外,雖然通常就“電子部件”而言,有指進行樹脂封裝前的晶片的情況和指將晶片進行了樹脂封裝的狀態的情況,但在本發明中,在僅稱“電子部件”的情況下,除非另外指明,則指所述晶片進行了樹脂封裝的電子部件(作為成品的電子部件)。在本發明中,“晶片”是指進行樹脂封裝前的晶片,具體而言,例如可舉例積體電路(IC)、半導體晶片、電力控制用半導體元件等晶片。在本發明中,進行樹脂封裝前的晶片為了和樹脂封裝後的電子部件區分,方便起見稱為“晶片”。但是,本發明的“晶片”只要是進行樹脂封裝前的晶片,就不受特別限定,也可以不是晶片狀。 In addition, although the term “electronic component” generally refers to a wafer before resin encapsulation and refers to a state where the wafer is resin encapsulated, in the present invention, it is only referred to as “electronic component”. Hereinafter, unless otherwise specified, it refers to an electronic component in which the wafer is resin-encapsulated (electronic component as a finished product). In the present invention, the "wafer" refers to a wafer before resin encapsulation, and specifically, for example, an integrated circuit (IC), a semiconductor wafer, a semiconductor element for power control, or the like. In the present invention, the wafer before resin packaging is referred to as a "wafer" for convenience in order to distinguish it from the electronic components after resin packaging. However, the “wafer” of the present invention is not particularly limited as long as it is a wafer before resin encapsulation, and may not be in a wafer shape.
在本發明中,“倒裝晶片”是指在積體電路(IC)晶片表面部的電極(焊盤)上有被稱為焊點的鼓包狀突起電極的積體電路(IC)晶片或該種晶片形態。該晶 片可以向下(面向下)安裝在印刷基板等的佈線部上。所述倒裝晶片例如可以用作無引線接合用的晶片或安裝方法的一種。 In the present invention, “flip-chip” refers to an integrated circuit (IC) wafer or an integrated circuit (IC) wafer having bump-shaped bump electrodes called solder joints on electrodes (pads) on the surface portion of the integrated circuit (IC) wafer. Kinds of wafer morphology. The wafer can be mounted downward (face down) on a wiring portion such as a printed circuit board. The flip chip can be used, for example, as a wafer for wireless bonding or as one of mounting methods.
在本發明中,例如可以將安裝在基板上的部件(例如晶片、倒裝晶片等)進行樹脂封裝(樹脂成型)來製造樹脂成型品。在本發明中,作為所述基板(也稱為插入物)不被特別限定,不過例如可以是引線框、佈線基板、晶片、陶瓷基板等。所述基板例如如上所述,可以是在其一個表面或兩個表面上安裝有晶片的安裝基板。就所述晶片的安裝方法而言,雖然不被特別限定,不過例如可舉例引線結合、倒裝晶片接合等。在本發明中,例如可以藉由將所述安裝基板進行樹脂封裝來製造所述晶片被進行了樹脂封裝的電子部件。並且,就用本發明的樹脂封裝裝置進行了樹脂封裝的基板的用途而言,不被特殊限定,例如可舉例移動通信終端用高頻模組基板、電力控制用模組基板、機械控制用基板等。 In the present invention, for example, a resin molded product can be manufactured by resin-encapsulating (resin molding) a component (for example, wafer, flip chip, etc.) mounted on a substrate. In the present invention, the substrate (also referred to as an interposer) is not particularly limited, but for example, it may be a lead frame, a wiring substrate, a wafer, a ceramic substrate, or the like. The substrate may be, for example, as described above, a mounting substrate on which wafers are mounted on one surface or both surfaces. Although the method of mounting the wafer is not particularly limited, for example, wire bonding, flip chip bonding, etc. may be mentioned. In the present invention, for example, the electronic component in which the wafer is resin-encapsulated can be manufactured by resin-encapsulating the mounting substrate. In addition, the use of the resin-encapsulated substrate with the resin encapsulation device of the present invention is not particularly limited, and examples include high-frequency module substrates for mobile communication terminals, module substrates for power control, and substrates for machine control.
另外,在本發明中,“安裝”包括“載置”或“固定”。進一步,在本發明中,“載置”包括“固定”。 In addition, in the present invention, "installation" includes "mounting" or "fixing". Further, in the present invention, "mounting" includes "fixing".
以下,將基於圖式對本發明的具體實施例進行說明。為了方便說明,對各圖式進行了適當省略、誇張等而示意性描述。 Hereinafter, specific embodiments of the present invention will be described based on the drawings. For convenience of explanation, the drawings are schematically described by appropriately omitting, exaggerating, etc.
在本實施例中,就本發明的樹脂成型裝置的 一例和使用其的樹脂成型品的製造方法的一例進行說明。 In this embodiment, an example of a resin molding apparatus of the present invention and an example of a method of manufacturing a resin molded product using the same will be described.
在圖1的剖視圖中,示意性地示出了本實施例的樹脂成型裝置的結構。如圖所示,該樹脂成型裝置1000包括作為主要構件的含上模(一個模)1100及下模(另一個模)1200的成型模;上模型腔塊位置改變機構設置部(一個模型腔塊位置改變機構設置部)1300;下模型腔位置改變機構設置部(另一個模型腔塊位置改變機構設置部)1400。並且,樹脂成型裝置1000進一步包括作為主要構件的脫模膜吸附機構(未在圖1中圖示)及排氣孔開閉機構1330。在本實施例中如後所述,排氣孔開閉機構1330雖為上模型腔塊位置改變機構設置部1300的構件之一,不過本發明不限於此。例如,排氣孔開閉機構1330可為與上模型腔塊位置改變機構設置部1300不同的樹脂成型裝置1000的構件之一。 In the cross-sectional view of FIG. 1, the structure of the resin molding apparatus of this embodiment is schematically shown. As shown in the figure, the
上模(一個模)1100包括上模型腔塊(一個模型腔塊)1101和上模型腔框構件(一個模型腔框構件)1102及1103。如圖所示,就上模型腔塊1101而言,並列配置有2個。在構成上模型腔框構件的構件中,上模型腔框構件1103以被2個上模型腔塊1101夾持的方式配置。上模型腔框構件1102如圖所示配置於上模型腔塊1101的外側。在上模型腔框構件上,以被上模型腔框構件1102及1103包圍的方式形成有滑動孔1105。上模型腔塊1101能夠在滑動孔1105中在所述成型模的模開閉方向上移動。另外,所述“模開閉方向”在圖1中為上模1100及下模1200的開閉方向,亦 即圖的上下方向。進一步,如圖所示,能夠藉由以上模型腔塊1101的與下模(另一個模)1200相對的面和上模型腔框構件1102及1103的內側面包圍空間形成上模型腔(一個模型腔)1106。然後,如後所述,能夠隔著脫模膜以上模型腔塊1101按壓被樹脂成型的被成型物。並且,在上模型腔框構件1102的下端形成有排氣孔槽1104。 The upper mold (one mold) 1100 includes an upper mold cavity block (one mold cavity block) 1101 and upper mold cavity frame members (one mold cavity frame member) 1102 and 1103. As shown in the figure, two upper cavity blocks 1101 are arranged side by side. Among the members constituting the upper mold cavity frame member, the upper mold
另外,雖然未示於圖1中,不過可在上模型腔框構件1103上進一步形成有作為容納樹脂成型時的剩餘樹脂(無用樹脂)的空間的剩餘樹脂部(也稱無用樹脂部或殘料部)。 In addition, although not shown in FIG. 1, the upper mold
下模(另一個模)1200以下模型腔塊(另一個模型腔塊)1201、下模側塊(另一個模側塊)1202及槽塊1203作為主要構件,並進一步包括下模型腔塊支柱(另一個模型腔塊支柱)1204、下模彈性構件(另一個模彈性構件)1205、及柱塞1212。另外,雖然柱塞1212可如上述般,為下模1200的構件之一,不過也可為和下模1200不同的、樹脂成型裝置1000的構件之一。下模型腔塊1201有2個,分別以上表面面對上模型腔塊1101的方式配置。槽塊1203以被2個下模型腔塊1201夾持的方式配置。下模側塊1202如圖所示配置在下模型腔塊1201的外側。然後,2個下模型腔塊1201分別配置在下模側塊1202及槽塊1203的內側。在槽塊1203中,形成有槽1211,槽1211為在上下方向上貫通的孔。柱塞1212能夠在槽1211中上下移動。如後所述,藉由使柱塞1212上升,而能夠將槽1211中的流動性樹 脂推入上模型腔1106中。 Lower mold (another mold) below 1200 model cavity block (another mold cavity block) 1201, lower mold side block (another mold side block) 1202 and
下模型腔塊支柱1204安裝於下模型腔塊1201的下表面。下模彈性構件1205以包圍下模型腔塊支柱1204的方式配置,並能夠在模開閉方向(圖上下方向)上伸縮。 The lower mold
上模型腔塊位置改變機構設置部(一個模型腔塊位置改變機構設置部)1300包括上型腔塊驅動機構(一個模型腔塊驅動機構)1301、上模型腔塊保持構件(一個模型腔塊保持構件)1302、測力感測器(按壓力測量機構)1303、上模型腔塊支柱(一個模型腔塊支柱)1304、上模楔形機構(也稱一個模楔形機構、上模楔機構或一個模楔機構)1310、上模第二楔形構件保持構件(也稱一個模第二楔形構件保持構件或者上模第二楔構件或一個模第二楔保持構件)1321、上模第二楔形構件保持構件的彈性構件(一個模第二楔形構件保持構件的彈性構件)1322、排氣孔開閉機構1330、壓板(上模型腔塊位置改變機構設置部基底構件或一個模型腔塊位置改變機構設置部基底構件)1340、上模型腔塊位置改變機構設置部框構件(一個模型腔塊位置改變機構設置部框構件)1341、上模型腔塊位置改變機構設置部底面構件(一個模型腔塊位置改變機構設置部底面構件)1342及1343。壓板1340為一塊板狀構件,在上模1100的上方以覆蓋上模1100整體的方式配置。並且,如後所述,在壓板1340上直接或間接地安裝有上模型腔塊位置改變機構設置部1300的其他構件。 The upper mold cavity block position changing mechanism setting part (one mold cavity block position changing mechanism setting part) 1300 includes an upper cavity block driving mechanism (one model cavity block driving mechanism) 1301, an upper mold cavity block holding member (one model cavity block holding Component) 1302, load cell (pressing force measuring mechanism) 1303, upper model cavity block pillar (a model cavity block pillar) 1304, upper die wedge mechanism (also called a die wedge mechanism, upper die wedge mechanism or a die) Wedge mechanism) 1310, upper die second wedge member holding member (also called a die second wedge member retaining member or upper die second wedge member or a die second wedge retaining member) 1321, upper die second wedge member retaining member Elastic member (an elastic member of a mold second wedge-shaped member holding member) 1322, vent opening and closing mechanism 1330, pressure plate (upper mold cavity block position changing mechanism setting part base member or a mold cavity block position changing mechanism setting part base member ) 1340, upper model cavity block position changing mechanism setting part frame member (one model cavity block position changing mechanism setting part frame member) 1341, upper model cavity block position changing mechanism setting part bottom member (one model cavity block position changing mechanism setting part Bottom member) 1342 and 1343. The
上模型腔塊保持構件1302如圖所示在上下方 向上貫通壓板1340,且能夠上下移動。在一個模型腔塊保持構件1302的下端安裝有上模型腔塊支柱1304。在上模型腔塊支柱1304的下端安裝有上模型腔塊1101。並且,如後所述,上模型腔塊1101相對於上模型腔塊支柱1304能夠安裝拆卸。上模型腔塊驅動機構1301連接在上模型腔塊保持構件1302的上端。藉由以上模型腔塊驅動機構1301使上模型腔塊保持構件1302上下移動,而能夠使上模型腔塊1101上下移動(亦即在模開閉方向上)。 As shown in the figure, the upper mold cavity
上模楔形機構1310如圖所示包括上模第一楔形構件(也稱一個模第一楔形構件、上模第一楔或一個模第一楔)1311a、上模第二楔形構件(也稱一個模第二楔形構件、上模第二楔或一個模第二楔)1311b、上模楔形構件動力傳送構件(也稱一個模楔形構件動力傳送構件、上模楔動力傳送構件或一個模楔動力傳送構件)1312、上模楔形構件驅動機構(也稱一個模楔形構件驅動機構、上模楔驅動機構或一個模楔驅動機構)1313。如圖1所示,就上模第一楔形構件1311a和上模第二楔形構件1311b而言,各自厚度方向(圖上下方向)的一個表面為斜坡面。更具體而言,如圖所示,上模第一楔形構件1311a的下表面及上模第二楔形構件1311b的上表面分別為斜坡面。就上模第一楔形構件1311a和上模第二楔形構件1311b而言,以相互的斜坡面相面對的方式配置。 The upper
另外,上模第一楔形構件1311a介由上模楔形構件動力傳送構件1312連接於上模楔形構件驅動機構 1313。然後,藉由上模楔形構件驅動機構1313,在由上模第一楔形構件1311a和上模第二楔形構件1311b所形成的一對上模楔形構件(一對一個模楔形構件。以下有時僅稱“一對上模楔形構件”、“上模楔形構件”或“上模楔”)的斜坡面的斜坡方向(圖左右方向)上滑移,而能夠改變所述一對上模楔形構件在厚度方向上的長度。例如,如果使上模第一楔形構件1311a向其前端方向滑移,則上模第二楔形構件1311b會相對於上模第一楔形構件1311a向反方向滑移。如此一來,所述一對上模楔形構件在厚度方向(圖上下方向)上的長度增大。並且,例如反之,藉由使上模第一楔形構件1311a向其後端方向滑動,能夠縮小所述一對上模楔形構件在厚度方向(圖上下方向)上的長度。由此,如後所述,能夠改變在上下方向(模開閉方向)上的上模型腔塊1101的位置。由此,即便被成型品的厚度具有偏差,也能將上模型腔塊1101的位置調節到合適的位置。亦即,由此,能夠將上模型腔1106的深度調整為合適的深度。 In addition, the upper die
另外,在圖1的例子中,藉由上模楔形構件驅動機構1313能夠在水平(圖左右)方向上滑動(滑移)所述一對上模楔形構件上側的上模第一楔形構件1311a。但是不限於此,例如藉由上模楔形構件驅動機構1313也能夠滑移下側的上模第二楔形構件1311b,也能夠滑移上模第一楔形構件1311a及上模第二楔形構件1311b雙方。另外,作為上模楔形構件驅動機構1313不被特別限定,例如能夠使用伺服電機、氣缸等。 In addition, in the example of FIG. 1, the upper die
並且,在圖1中,上模第一楔形構件1311a及上模第二楔形構件1311b的各自一個表面整體為斜坡面。但是,本發明不限於此,能夠使至少一個楔形構件沿著所述斜坡面滑移即可。例如,就上模第一楔形構件1311a及上模第二楔形構件1311b中的一個或兩個而言,僅其一個表面的一部分為斜坡面即可。更具體而言,例如,就圖示的上模第一楔形構件1311a及上模第二楔形構件1311b當中的至少一個而言,僅一個表面的前端側(較細側)為斜坡面,根基側(較粗側)為水平面也可。 In addition, in FIG. 1, the entire surface of each of the upper die
上模第二楔形構件保持構件1321的上表面與上模第二楔形構件1311b的下表面接觸。另一方面,壓板1340的下表面與上模第一楔形構件1311a的上表面接觸。亦即所述一對上模楔形構件以被上模第二楔形構件保持構件1321的上表面與壓板1340的下表面夾持的方式配置。另外,使用上模第二楔形構件保持構件的彈性構件1322及上模第二楔形構件保持構件1321保持上模第一楔形構件1311a和上模第二楔形構件1311b相接觸的狀態。 The upper surface of the upper mold second wedge
上模型腔塊位置改變機構設置部底面構件由上部構件1342及下部構件1343形成。上模型腔塊位置改變機構設置部底面構件1343如圖所示,能夠在其下表面安裝上模型腔框構件1102及1103。如後所述,上模型腔框構件1102及1103能夠相對於上模型腔塊位置改變機構設置部底面構件1343安裝拆卸。並且,上模型腔塊支柱1304向上下方向貫通上模型腔塊位置改變機構設置部底面構件1342及 1343,且能上下移動。上模第二楔形構件保持構件的彈性構件1322以被上模第二楔形構件保持構件1321的下表面和上模型腔塊位置改變機構設置部底面構件1342的上表面夾持的方式配置並能夠在上下方向上伸縮。就上模型腔塊位置改變機構設置部框構件1341而言,其上端連接在上模型腔塊位置改變機構設置部基底構件1340的下表面,其下端連接在上模型腔塊位置改變機構設置部底面構件1342的上表面。並且,上模型腔塊位置改變機構設置部框構件1341以包圍上模第二楔形構件保持構件1321、上模型腔塊保持構件1302和所述一對上模楔形構件的方式配置。 The bottom surface member of the upper mold cavity block position changing mechanism installation portion is formed of an
排氣孔開閉機構1330包括排氣孔銷動力機構1331、排氣孔銷1332。排氣孔銷1332如圖所示在上下方向上貫通上模型腔框構件1102的上部、上模型腔塊位置改變機構設置部底面構件1342及1343、上模型腔塊位置改變機構設置部框構件1341及壓板1340,且能上下移動。藉由以排氣孔銷動力機構1331使排氣孔銷1332上下移動,而如後述般,能夠開閉排氣孔槽1104。另外,作為排氣孔銷動力機構1331不被特別限定,例如能夠使用伺服電機、氣缸等。 The vent opening and
另外,設置於上模型腔塊位置改變機構設置部(一個模型腔塊位置改變機構設置部)1300的“上模型腔塊位置改變機構(一個模型腔塊位置改變機構)”在本實施例中包括上模型腔塊驅動機構(一個模型腔塊驅動機構)1301和上模楔形機構(一個模楔形機構)1310。不過,本發明不限於此,例如上模型腔塊位置改變機構(一個模 型腔塊位置改變機構)可進一步包括其他構件。 In addition, the "upper model cavity block position changing mechanism (one model cavity block position changing mechanism)" provided in the upper model cavity block position changing mechanism setting section (one model cavity block position changing mechanism setting section) 1300 includes in this embodiment An upper mold cavity block drive mechanism (a mold cavity block drive mechanism) 1301 and an upper mold wedge mechanism (a mold wedge mechanism) 1310. However, the present invention is not limited to this, for example, the upper mold cavity block position changing mechanism (a mold cavity block position changing mechanism) may further include other members.
下模型腔塊位置改變機構設置部1400如圖所示包括下模楔形機構(另一個模楔形機構)1410、下模安裝構件(另一個模安裝構件)1421、壓板(也稱下模第二楔形構件保持構件或另一個模第二楔形構件保持構件、下模第二楔保持構件或另一個模第二楔保持構件)1422。 The lower mold cavity block position changing
下模楔形機構1410如圖所示包括下模第一楔形構件(也稱另一模第一楔形構件、下模第一楔或另一模第一楔)1411a、下模第二楔形構件(又稱另一個模第二楔形構件、下模第二楔或另一個模第二楔)1411b、下模楔形構件動力傳送構件(又稱另一個模楔形構件動力傳送構件、下模楔動力傳送構件或另一個模楔動力傳送構件)1412、下模楔形構件驅動機構(又稱另一個模楔形構件驅動機構、下模楔驅動機構或另一個模楔驅動機構)1413。如圖1所示,下模第一楔形構件1411a和下模第二楔形構件1411b各自厚度方向(圖上下方向)的另一個表面為斜坡面。更具體而言,如圖所示,下模第一楔形構件1411a的上表面及下模第二楔形構件1411b的下表面分別為斜坡面。下模第一楔形構件1411a和下模第二楔形構件1411b以相互的斜坡面相面對的方式配置。 The lower
並且,下模第一楔形構件1411a介由下模楔形構件動力傳送構件1412連接於下模楔形構件驅動機構1413。並且,藉由下模楔形構件驅動機構1413在由下模第一楔形構件1411a和下模第二楔形構件1411b所形成的一對 下模楔形構件(一對另一個模楔形構件。以下有時僅稱“一對下模楔形構件”“下模楔形構件”或“下模楔”)的斜坡面的斜坡方向(圖左右方向)上滑移,能夠改變所述一對下模楔形構件的厚度方向的長度。例如,使下模第一楔形構件1411a向其前端方向滑移,則下模第二楔形構件1411b會相對於下模第一楔形構件1411a向反方向滑移。如此一來,所述一對下模楔形構件的厚度方向(圖上下方向)的長度增大。並且,例如反之,能夠藉由使下模第一楔形構件1411a向其後端方向滑移,而縮小所述一對下模楔形構件的厚度方向(圖上下方向)上的長度。由此,如後所述,能夠改變在上下方向(模開閉方向)上的下模型腔塊1201的位置。由此,例如即便後述的被成型品10的第一基板11的厚度具有偏差(例如,即便後述圖3的左右第一基板11的厚度不同),也能夠藉由適當改變(調整)各下模型腔塊1201(例如,圖3的左右下模型腔塊1201)的位置,而以恰當的按壓力夾緊左右第一基板11。 Also, the lower die
另外,在圖1的例子中,藉由下模楔形構件驅動機構1413,能夠使所述一對的下模楔形構件下側的下模第一楔形構件1411a在水平(圖左右)方向上滑動(滑移)。但是,不限於此,例如可藉由下模楔形構件驅動機構1413使上側的下模第二楔形構件1411b滑移,也可使下模第一楔形構件1411a及下模第二楔形構件1411b雙方滑移。並且,作為下模楔形構件驅動機構1413不被特別限定,例如能夠使用伺服電機、氣缸等。 In addition, in the example of FIG. 1, the lower die
另外,在圖1中,下模第一楔形構件1411a及下模第二楔形構件1411b的各自一個表面整體為斜坡面。但是,本發明不限於此,能夠將至少一個楔形構件沿著所述斜坡面滑移。例如,就下模第一楔形構件1411a及下模第二楔形構件1411b的一個或雙方而言,可以僅其一個表面的一部分為斜坡面。更具體而言,例如就圖示的下模第一楔形構件1411a及下模第二楔形構件1411b當中的至少一個而言,可以僅一個表面的前端側(較細側)為斜坡面,根基側(較粗側)為水平面。並且,雖然在圖1中,下模第一楔形構件1411a和下模第二楔形構件1411b不連接,但也能夠與上模楔形構件1310同樣,保持下模第一楔形構件1411a和下模第二楔形構件1411b接觸的狀態。 In addition, in FIG. 1, the entire surface of each of the lower first wedge-shaped
下模第二楔形構件保持構件1422的上表面與下模第一楔形構件1411a的下表面接觸。一方面,下模型腔塊支柱1204的下端連接於下模第二楔形構件1411b的上表面。亦即所述一對下模楔形構件以被下模第二楔形構件保持構件1422的上表面和下模型腔塊支柱1204的下端夾持的方式配置。並且,藉由改變所述一對下模楔形構件的厚度方向的長度,而能夠上下移動下模型腔塊1201。 The upper surface of the lower mold second wedge
下模安裝構件1421配置在下模第二楔形構件保持構件1422的上方,以相對於下模第二楔形構件保持構件1422不上下移動的方式固定。能夠在被下模安裝構件1421和下模第二楔形構件保持構件1422夾著的空間中,藉由如上所述般驅動所述一對下模楔形構件而改變其厚度方 向的長度。在下模安裝構件1421的上表面設置有下模側塊1202及槽塊1203。並且,下模型腔塊支柱1204向上下方向貫通下模安裝構件1421內部,並能夠上下移動。下模彈性構件1205被下模型腔塊1201的下表面和下模安裝構件1421的上表面所夾持,並如上所述,能夠在模開閉方向(圖上下方向)上伸縮。 The lower
另外,設置於下模型腔塊位置改變機構設置部(另一個模型腔塊位置改變機構設置部)1400的“下模型腔塊位置改變機構(另一個模型腔塊位置改變機構)”在本實施例中包括下模楔形機構(另一個模楔形機構)1410。但是,本發明不限於此,例如下模型腔塊位置改變機構(另一個模型腔塊位置改變機構)可進一步包括其他構件。 In addition, the "lower model cavity block position changing mechanism (another model cavity block position changing mechanism)" provided in the lower model cavity block position changing mechanism setting section (another model cavity block position changing mechanism setting section) 1400 in this embodiment The lower die wedge mechanism (another die wedge mechanism) 1410 is included. However, the present invention is not limited to this, for example, the lower mold cavity block position changing mechanism (another mold cavity block position changing mechanism) may further include other members.
使用圖1的樹脂成型裝置的樹脂成型品的製造方法例如能夠如圖2~19所示般進行。 The method of manufacturing a resin molded product using the resin molding apparatus of FIG. 1 can be performed as shown in FIGS. 2 to 19, for example.
首先,如圖2所示,向上模1100的模表面(上模表面)供給脫模膜40。然後,藉由吸附等以脫模膜40覆蓋上模表面(一個模表面覆蓋步驟)。吸附如後所述可使用脫模膜吸附機構(未在圖2中示出)。並且,吸附有脫模膜40的“上模1100的模表面(上模表面)”如圖所示包括上模型腔1106的模表面及上模型腔框構件1102的下表面。進一步,此時,如圖所示,也向排氣孔槽1104內部供給脫模膜41。在圖2的狀態下,由於排氣孔槽1104未被阻塞,因此能夠介由排氣孔槽1104吸附脫模膜40。 First, as shown in FIG. 2, the
另外,脫模膜40的吸附例如能夠如圖25所示般進行。在圖25中,樹脂成型裝置1000具備脫模膜吸附機構1351。脫模膜吸附機構1351雖不被特別限定,不過例如能夠使用抽吸泵等。在壓板1340、上模型腔塊位置改變機構設置部框構件1341、上模型腔塊位置改變機構設置部底面構件1342及1343、上模型腔框構件1102及1103上設置有脫模膜吸附配管1352。脫模膜吸附配管1352分成支線,分支的各一端作為脫模膜吸附孔1353開孔於上模型腔框構件1102及1103的下端。然後,藉由從脫模膜吸附配管1352的另一端,用脫模膜吸附機構1351進行吸引,而能夠介由脫模膜吸附孔1353,將脫模膜40及脫模膜41吸附到上模表面及排氣孔槽1104。 In addition, the adsorption of the
並且,脫模膜40及脫模膜41例如可藉由脫模膜搬運機構(未圖示)等,搬運至成型模的位置,之後如上述般向上模1100的模表面(上模表面)進行供給。 In addition, the
接下來,如圖3所示,將板(樹脂材料)20a供給到槽1211中。與此同時,如圖所示將被成型品(被成型物)10供給到下模型腔塊1201的上表面(被成型物供給步驟)。樹脂材料20a例如可為熱固性樹脂,不過不限於此,例如也可為熱塑性樹脂。此時,可預先藉由加熱器(未圖示)將上模1100及下模1200或僅將下模1200加熱升溫。另外,例如可藉由搬運機構(未圖示)分別將樹脂材料20a及被成型品10搬運至成型模的位置並供給到成型模。 Next, as shown in FIG. 3, the board (resin material) 20a is supplied into the
並且,被成型品(被成型物,以下有時簡稱 為“基板”)10如圖所示包括第一基板11、第二基板12、第一連接部(第一連接端子)13、第二連接部(第二連接端子)14、晶片15。第一基板11和第二基板12以各自的一個面互相面對的方式配置。就第一基板11和第二基板12而言,相互的相對面彼此藉由第一連接端子13連接。晶片15藉由第二連接端子14連接在第一基板11的與第二基板12的相對的面上。另外,在該圖中,1個基板(被成型品)10雖然包括各一塊第一基板11和第二基板12,不過本發明不限於此。例如1個基板(被成型品)10可包括多塊第二基板12,並在第一基板11上可搭載所述多塊第二基板12。另外,使用了基板(被成型品)10的樹脂成型品的製造方法的概況例如能夠藉由圖26之(a)及(b)來表示。首先,如圖26之(a)所示的基板(被成型品)10與圖3的基板(被成型品)10相同,其結構如前所述。基板(被成型品)10的厚度(從第一基板11的下表面到第二基板12上表面的高度)在圖26之(a)中用符號D表示。另外,如先前技術26之(a)所示,藉由以樹脂填充第一基板11和第二基板12之間,而以封裝樹脂20封裝第一連接端子13、第二連接端子14、晶片15來進行成型。如此一來,如先前技術所示,能夠製造樹脂成型品10A。就本實施例的所述樹脂封裝(樹脂成型)的具體方法將在後面描述。並且,例如如後述的實施例3中所示般,在本發明中,即便基板(被成型品)10的厚度D不同,也能進行應對。 In addition, the article to be molded (object to be molded, hereinafter sometimes simply referred to as "substrate") 10 includes a
接下來,如圖4所示,藉由驅動源(未圖示) 使下模1200向箭頭X1的方向上升,並用下模型腔塊1201和上模型腔框構件1102夾持第一基板11。此時,如圖所示,藉由預先升溫的下模1200的熱量,使樹脂材料20a熔融成為熔融樹脂(流動性樹脂)20b。 Next, as shown in FIG. 4, the
接下來,如圖5所示,使下模1200進一步向箭頭X2的方向上升。由此,藉由下模型腔塊1201對被下模型腔塊1201和上模型腔框構件1102所夾持的第一基板11施加向上的壓力。如此一來,用下模型腔塊1201和上模型腔框構件1102夾持按壓並夾緊第一基板11(被成型物夾緊步驟)。 Next, as shown in FIG. 5, the
接下來,如圖6所示,使下模第一楔形構件1411a向其前端方向(箭頭a1的方向)移動,並接觸到下模第二楔形構件1411b。藉由在該位置固定下模第一楔形構件1411a及下模第二楔形構件1411b,使下模型腔塊1201在上下方向上的位置固定於該位置上。 Next, as shown in FIG. 6, the lower
接下來,如圖7所示,藉由上模型腔塊驅動機構1301使上模型腔塊1101向箭頭c1的方向下降。由此,隔著脫模膜40使上模型腔塊1101和第二基板12接觸。此時,以測力感測器1303測量因上模型腔塊1101產生的第二基板12的按壓力(夾緊力)。由此,能夠控制第二基板12的按壓力。由此一來,能夠抑制因所述按壓力過強而導致的基板10的破損。 Next, as shown in FIG. 7, the upper
接下來,如圖8所示,使上模第一楔形構件1311a向其前端方向(箭頭e1的方向)移動。由此,使上模 楔(上模第一楔形構件1311a及上模第二楔形構件1311b)的厚度方向的長度增大,如圖所示,按下上模第二楔形構件保持構件1321使其接觸上模型腔塊保持構件1302。藉由在該位置上固定上模第一楔形構件1311a、上模第二楔形構件1311b及上模型腔塊保持構件1302,而將上模型腔塊1101在上下方向上的位置固定在該位置上(一個模型腔塊固定步驟)。 Next, as shown in FIG. 8, the
接下來,如圖9所示,使下模1200向箭頭Y1的方向下降,並稍微打開模具。所述“稍微打開模具”是指以第二基板12和脫模膜40變成不接觸狀態的稍微打開。具體而言,雖不被特別限定,不過可使第二基板12和脫模膜40的距離成為例如0.1mm左右等很小的距離。 Next, as shown in FIG. 9, the
接下來,如圖10所示,藉由上模型腔塊驅動機構1301使上模型腔塊1101再次向箭頭c2的方向下降(第二一個模型腔塊位置改變步驟)。由此,如圖所示,再次隔著脫模膜40使上模型腔塊1101和第二基板12接觸。由此,能夠藉由再次使上模型腔塊1101向箭頭c2的方向下降,而在上模型腔塊保持構件1302和上模第二楔形構件保持構件1321之間形成使上模第二楔形構件1311b下降的空間s。 Next, as shown in FIG. 10, the upper mold cavity
接下來,如圖11所示,使上模第一楔形構件1311a向其前端方向(箭頭e2的方向)稍微移動。如此一來,如圖11所示,考慮到第二基板12的過盈量(向閉模方向收縮的尺寸量),使上模第二楔形構件1311b從圖10的狀態稍微下降。如此一來,藉由考慮到第二基板12的過盈量,而 能夠抑制或防止在第二基板12和脫模膜40之間進入樹脂。 Next, as shown in FIG. 11, the upper wedge-shaped
接下來,如圖12所示使用上模型腔塊驅動機構1301,使上模型腔塊1101向箭頭d1的方向上升。由此,如圖所示,使上模型腔塊保持構件1302和上模第二楔形構件保持構件1321接觸。 Next, as shown in FIG. 12, the upper mold cavity
另外,本發明的樹脂成型品的製造方法的所述“一個模型腔塊位置改變步驟”例如雖然能夠如在圖8~12中所說明般進行,但不限定於該方法,可任意。例如在圖8~12中,使用上模楔形機構(一個模楔形機構)1310及上模型腔塊驅動機構(一個模型腔塊驅動機構)1301雙方,進行了所述“一個模型腔塊位置改變步驟”。但是,所述“一個模型腔塊位置改變步驟”例如可僅使用所述兩個機構之中的一個進行,也可以都不使用。另外,進行所述“一個模型腔塊位置改變步驟”的具體方法及步驟不限於圖8~12的方法及步驟,可任意。 In addition, although the "one mold cavity block position changing step" of the method for manufacturing a resin molded article of the present invention can be performed as described in FIGS. 8 to 12, for example, it is not limited to this method, and may be arbitrary. For example, in FIGS. 8 to 12, the upper mold wedge mechanism (one mold wedge mechanism) 1310 and the upper mold cavity block drive mechanism (one mold cavity block drive mechanism) 1301 are used to perform the "one mold cavity block position change step". ". However, the "one model cavity block position changing step" may be performed using only one of the two mechanisms, for example, or may not be used. In addition, the specific method and steps for performing the "one model cavity block position changing step" are not limited to the methods and steps in FIGS. 8 to 12, and may be arbitrary.
接下來,如圖13所示,使下模第一楔形構件1411a向前端方向(箭頭a2的方向)稍微移動。由此,考慮到第一基板11的過盈量,而使下模第一楔形構件1411a及下模第二楔形構件1411b構成的一對下模楔的厚度方向的長度增大一些。此時,如圖所示,藉由上模型腔塊驅動機構1301向箭頭d1的方向對上模型腔塊保持構件1302持續施加向上的力。 Next, as shown in FIG. 13, the
接下來,如圖14所示,使下模1200向箭頭X3的方向上升,再次關閉成型模。由此,隔著脫模膜40以上 模型腔塊1101按壓被樹脂成型的基板(被成型物)10(被成型物按壓步驟)。進一步,使用減壓機構(未圖示),將成型模內部(上模型腔1106內部等)減壓。此時,如圖15所示,持續向箭頭X4的方向對下模1200施加向上的力。 Next, as shown in FIG. 14, the
接下來,如圖16所示,使柱塞1212向上(向箭頭g1的方向)移動,將槽1211中的流動性樹脂20b推入上模型腔1106中。 Next, as shown in FIG. 16, the
進一步如圖17所示,藉由排氣孔銷動力機構1331向下(向箭頭h1的方向)下壓排氣孔銷1332,並堵住排氣孔槽1104。之後,如該圖所示,使柱塞1212進一步向箭頭g2的方向上升,進行向上模型腔1106中的流動性樹脂20b的最終填充。此時,使用上模楔形機構1310固定上模型腔塊1101(第二一個模腔塊固定步驟)。進一步,使用下模楔形機構1410固定下模型腔塊1201。如此,由於上模型腔塊1101及下模型腔塊1201被固定,即便向上模型腔1106內部施加樹脂壓,也能夠抑制或防止上模型腔塊1101及下模型腔塊1201向模開閉方向移動。 Further, as shown in FIG. 17, the
進一步如圖18所示,在流動性樹脂20b固化成為固化樹脂(封裝樹脂)20及剩餘樹脂(無用樹脂)20d後,使下模1200向箭頭Y2的方向下降,並進行開模。另外,使流動性樹脂20b固化成為固化樹脂(封裝樹脂)20的方法不被特別限定。例如在流動性樹脂20b為熱固性樹脂的情況下,可藉由進一步持續加熱而使其固化。並且,例如在流動性樹脂20b為熱塑性樹脂的情況下,可藉由停止對成型模 加熱,並保持原樣放置冷卻而使其固化。如此一來,能夠製造第一基板11和第二基板12之間被固化樹脂(封裝樹脂)20封裝的樹脂成型品。之後,以卸載機(未圖示)等向樹脂成型裝置1000的外部搬出並回收所述樹脂成型品。 Further, as shown in FIG. 18, after the
另外,在本發明的樹脂成型品的製造方法中,所述“樹脂成型步驟”不限於圖2~18中所說明的方法。例如雖然在圖2~18中示出了傳遞成型的例子,不過在本發明中,能夠使用壓縮成型等其他任意的樹脂成型方法。並且,傳遞成型的方法也不限定於圖2~18的方法,可任意。 In addition, in the method of manufacturing a resin molded article of the present invention, the "resin molding step" is not limited to the method described in FIGS. 2 to 18. For example, although examples of transfer molding are shown in FIGS. 2 to 18, in the present invention, other arbitrary resin molding methods such as compression molding can be used. In addition, the method of transfer molding is not limited to the method of FIGS. 2 to 18 and may be arbitrary.
在本發明中,例如如本實施例所說明般,能夠根據被成型品的厚度而改變一個模型腔塊的位置。由此,由於能夠改變一個模型腔的深度,即便被成型品的厚度存在偏差,也能抑制或防止成型缺陷。具體而言,藉由本發明,例如能夠抑制或防止因成型模關閉過松(相對於被成型品的厚度,一個模型腔的深度過大)而造成的樹脂漏出。並且,藉由本發明,例如能夠抑制或防止相反地因成型模關閉過緊(相對於被成型品的厚度,一個模型腔的深度過小)而造成的被成型品的破損。由此,在本發明中,由於能夠抑制或防止樹脂成型品產生缺陷,而能夠高成品率地製造樹脂成型品。 In the present invention, for example, as described in this embodiment, the position of one mold cavity block can be changed according to the thickness of the article to be molded. Thus, since the depth of one mold cavity can be changed, even if the thickness of the molded product varies, molding defects can be suppressed or prevented. Specifically, with the present invention, for example, it is possible to suppress or prevent resin leakage caused by the mold being closed too loosely (the depth of one mold cavity is too large relative to the thickness of the molded product). Furthermore, with the present invention, for example, it is possible to suppress or prevent damage to the molded article caused by the mold being closed too tightly (the depth of one mold cavity is too small relative to the thickness of the molded article). Thus, in the present invention, since the resin molded product can be suppressed or prevented from being defective, the resin molded product can be manufactured with high yield.
另外,在所述一個模型腔塊的位置改變中,例如可使用所述一個模楔形機構。並且,在所述位置改變中,根據需要例如可如在本實施例中所說明般,使用所述 一個模型腔塊驅動機構、所述另一個模楔形機構等。 In addition, in changing the position of the one model cavity block, for example, the one die wedge mechanism can be used. Also, in the change of the position, the one mold cavity block driving mechanism, the other mold wedge mechanism, etc. may be used as necessary, for example, as explained in this embodiment.
並且,本發明不限定於本實施例,能夠任意變化。例如,在本實施例中,所述“一個模”為上模,所述“另一個模”為下模。但是,本發明不限於此,例如相反,所述“一個模”也可為下模,所述“另一個模”也可為上模。 Furthermore, the present invention is not limited to this embodiment, and can be arbitrarily changed. For example, in this embodiment, the "one mold" is an upper mold, and the "other mold" is a lower mold. However, the present invention is not limited to this. For example, on the contrary, the "one mold" may be a lower mold, and the "other mold" may also be an upper mold.
接下來,就本發明的其他實施例進行說明。 Next, other embodiments of the present invention will be described.
本發明的樹脂成型裝置例如能夠僅將成型模替換為其他成型模。由此,也能容易應對用不同規格的成型模進行的樹脂成型。 The resin molding apparatus of the present invention can replace only the molding die with another molding die, for example. Therefore, it is possible to easily cope with resin molding using molding dies of different specifications.
圖19為示出與圖1(實施例1)相同的樹脂成型裝置1000的結構的剖視圖。該樹脂成型裝置的結構如以圖1進行的說明。 FIG. 19 is a cross-sectional view showing the structure of the same
圖20為示意性示出從圖19(圖1)的樹脂成型裝置1000卸下上模1100及下模1200,且保留上模型腔塊位置改變機構設置部(一個模型腔塊位置改變機構設置部)1300及下模型腔塊位置改變機構設置部(另一個模型腔塊位置改變機構設置部)1400的狀態的剖視圖。上模型腔塊位置改變機構設置部1300及下模型腔塊位置改變機構設置部1400的結構如以圖1進行的說明。 20 is a schematic view showing that the
圖21為示意性示出圖20中安裝了和圖19(圖1)的裝置不同的上模1100a及不同的下模1200a的狀態的樹脂成型裝置的結構剖視圖。就上模(一個模)1100a而言, 替代上模型腔塊(一個模型腔塊)1101而具備上模型腔塊(一個模型腔塊)1101a,替代上模型腔框構件(一個模型腔框構件)1102而具備上模型腔框構件(一個模型腔框構件)1102a,替代上模型腔框構件(一個模型腔框構件)1103而具備上模型腔框構件(一個模型腔框構件)1103a、替代排氣孔槽1104而具備排氣孔槽1104a、替代滑動孔1105而具備滑動孔1105a、替代上模型腔(一個模型腔)1106而具備上模型腔(一個模型腔)1106a。就上模1100a而言,除了各部分(例如上模型腔塊及上模型腔框構件)的形狀、尺寸等略有不同以外,與圖19(圖1)的上模1100相同。另外,就下模(另一個模)1200a而言,替代下模型腔塊(另一個模型腔塊)1201而具備下模型腔塊(另一個模型腔塊)1201a、替代下模側塊(另一個模側塊)1202而具備下模側塊(另一個模側塊)1202a、替代槽塊1203而具備槽塊1203a、替代下模型腔塊支柱(另一個模型腔塊支柱)1204而具備下模型腔塊支柱(另一個模型腔塊支柱)1204a、替代另一個模彈性構件(下模彈性構件)1205而具備下模彈性構件(另一個模彈性構件)1205a。就下模1200a而言,除了各部分(例如,下模型腔塊及槽塊)的形狀、尺寸等略有不同以外,與圖19(圖1)的下模1200相同。 21 is a cross-sectional view schematically showing the structure of a resin molding apparatus in a state where an
例如,如圖19~21所示,藉由將成型模替換為不同規格的成型模,也能夠應對不同規格的樹脂成型。具體而言,例如如圖19~21所示,可配合必要的型腔形狀,而改變上模型腔塊的形狀。並且,例如如圖19~21所示,可配 合所使用基板的形狀改變下模型腔塊的形狀。另外,例如如圖19~21所示,可配合所使用的樹脂板(樹脂材料)的數量、形狀等而改變槽塊的形狀。並且,例如可配合成型模的形狀而移動排氣孔開閉機構。 For example, as shown in FIGS. 19 to 21, by replacing the molding die with a molding die of different specifications, it is also possible to cope with resin molding of different specifications. Specifically, for example, as shown in FIGS. 19-21, the shape of the upper mold cavity block can be changed in accordance with the necessary cavity shape. Also, as shown in Figs. 19 to 21, for example, the shape of the lower mold cavity block can be changed in accordance with the shape of the substrate used. In addition, as shown in FIGS. 19 to 21, for example, the shape of the groove block can be changed according to the number and shape of the resin plates (resin materials) used. Further, for example, the vent opening and closing mechanism can be moved in accordance with the shape of the molding die.
在本發明的樹脂成型裝置中,例如如圖1~21所示,楔形機構(楔機構)並未作為成型模的一部分組裝,而是與成型模和楔形機構(楔機構)分別構成。由此,例如如圖19~21所示,即便不更換楔形機構(楔機構)、不準備其他楔形構件(楔),也能簡單地更換成型模。由此,根據本發明的樹脂成型裝置,例如使用於樹脂成型品的品種更換等的成型模更換變得容易。 In the resin molding apparatus of the present invention, for example, as shown in FIGS. 1 to 21, the wedge mechanism (wedge mechanism) is not assembled as a part of the molding die, but is constituted separately from the molding die and the wedge mechanism (wedge mechanism). Thus, for example, as shown in FIGS. 19 to 21, even if the wedge-shaped mechanism (wedge mechanism) is not replaced or another wedge-shaped member (wedge) is not prepared, the molding die can be easily replaced. Thus, according to the resin molding apparatus of the present invention, for example, the replacement of the molding die used for the replacement of the types of resin molded products becomes easy.
接下來,就本發明的其他實施例進行說明。 Next, other embodiments of the present invention will be described.
在本實施例中,就使用實施例1的樹脂成型裝置(圖1)的樹脂成型品的製造方法的另一例進行說明。 In this embodiment, another example of a method of manufacturing a resin molded product using the resin molding device (FIG. 1) of
圖22為示意性示出本實施例的樹脂成型品的製造方法的一個步驟的剖視圖。在該圖中,基板(被成型品)10左右的厚度(從第一基板11下表面到第二基板12上表面的高度)不同(右側的厚度較大)。除此之外,圖22和圖3相同。另外,在圖22和圖3中,雖然圖示的上模型腔1106的寬度不同,不過就樹脂成型品的製造方法的各步驟而言,即便上模型腔1106的寬度不同也能同樣進行。 22 is a cross-sectional view schematically showing one step of the method of manufacturing the resin molded article of the present embodiment. In this figure, the thickness (the height from the lower surface of the
從該狀態,進行例如與圖4~5相同的步驟,如圖23所示,以下模型腔塊1201和上模型腔框構件1102夾持 並夾緊第一基板11。再之後,進行例如與圖6~8相同的步驟,如圖24所示,將上模型腔塊1101在上下方向上的位置固定於該位置上。由此,能夠分別決定圖24所示的左右不同的上模型腔1106的深度。 From this state, for example, the same steps as in FIGS. 4 to 5 are performed. As shown in FIG. 23, the lower
圖22~24為本實施例的樹脂成型品的製造方法的步驟的一部分。本實施例的樹脂成型品的製造方法更具體而言,例如,可按照與實施例1(圖2~18)相同的順序及步驟進行。 22 to 24 are a part of the steps of the manufacturing method of the resin molded article of this embodiment. The manufacturing method of the resin molded article of this embodiment is more specifically, for example, it can be performed in the same order and procedure as in Embodiment 1 (FIGS. 2 to 18 ).
並且,在圖22~24中,為了方便圖示及說明,在圖的左右示出了基板(被成型品)10的厚度不同的例子。但是,在本發明中,應對被成型物(被成型品)的厚度變化的例子不限於此。具體而言,例如在1次樹脂成型品的製造方法中,在使所有被成型物的厚度一致,再次進行樹脂成型品的製造方法的情況下,可根據需要改變被成型物上次的厚度來進行應對。 In addition, in FIGS. 22 to 24, for convenience of illustration and explanation, examples in which the thickness of the substrate (molded product) 10 is different are shown on the left and right sides of the figure. However, in the present invention, examples of responding to changes in the thickness of the object to be molded (moulded product) are not limited to this. Specifically, for example, in the method of manufacturing a primary resin molded product, when the thickness of all objects to be molded is made uniform, and the method of manufacturing the resin molded product is performed again, the thickness of the object to be molded may be changed as necessary Respond.
進一步,本發明不受上述實施例的限定,在不脫離本發明主旨的範圍內,能夠根據需要進行任意且恰當的組合、變化或選擇使用。 Further, the present invention is not limited by the above-mentioned embodiments, and can be arbitrarily and appropriately combined, changed, or selected for use as needed without departing from the gist of the present invention.
該申請主張以2017年10月30日申請的日本申請特願2017-209713為基礎的優先權,其公開的全部內容納入本文。 This application claims priority based on Japanese application Japanese Patent Application No. 2017-209713 filed on October 30, 2017, and the entire contents of its disclosure are incorporated herein.
1000‧‧‧樹脂成型裝置 1000‧‧‧Resin molding device
1100‧‧‧上模(一個模) 1100‧‧‧ Upper mold (one mold)
1101‧‧‧上模型腔塊(一個模型腔塊) 1101‧‧‧Upper model cavity block (one model cavity block)
1102‧‧‧上模型腔框構件(一個模型腔框構件) 1102‧‧‧Up model cavity frame member (a model cavity frame member)
1103‧‧‧上模型腔框構件(一個模型腔框構件) 1103‧‧‧Up model cavity frame member (a model cavity frame member)
1104‧‧‧排氣孔槽 1104‧‧‧Vent slot
1105‧‧‧滑動孔 1105‧‧‧sliding hole
1106‧‧‧上模型腔(一個模型腔) 1106‧‧‧Up model cavity (one model cavity)
1200‧‧‧下模(另一個模) 1200‧‧‧ Lower mold (another mold)
1201‧‧‧下模型腔塊(另一個模型腔塊) 1201‧‧‧Lower model cavity block (another model cavity block)
1202‧‧‧下模側塊(另一個模側塊) 1202‧‧‧Lower mold side block (another mold side block)
1203‧‧‧槽塊 1203‧‧‧Slot block
1204‧‧‧下模型腔塊支柱(另一個模型腔塊支柱) 1204‧‧‧Lower model cavity block pillar (another model cavity block pillar)
1205‧‧‧下模彈性構件(另一個模彈性構件) 1205‧‧‧Lower mold elastic member (another mold elastic member)
1211‧‧‧槽 1211‧‧‧slot
1212‧‧‧柱塞 1212‧‧‧ Plunger
1300‧‧‧上模型腔塊位置改變機構設置部(一個模型腔塊位置改變機構設置部) 1300‧‧‧Upper model cavity block position changing mechanism setting part (one model cavity block position changing mechanism setting part)
1301‧‧‧上模型腔塊驅動機構(一個模型腔塊驅動機構) 1301‧‧‧Up model cavity block drive mechanism (a model cavity block drive mechanism)
1302‧‧‧上模型腔塊保持構件(一個模型腔塊保持構 件) 1302‧‧‧Up model cavity block holding member (one model cavity block holding member)
1303‧‧‧測力感測器(按壓力測量機構) 1303‧‧‧force sensor (pressing pressure measuring mechanism)
1304‧‧‧上模型腔塊支柱(一個模型腔塊支柱) 1304‧‧‧Up model cavity block pillar (one model cavity block pillar)
1310‧‧‧上模楔形機構(一個模楔形機構) 1310‧‧‧ Upper die wedge mechanism (one die wedge mechanism)
1311a‧‧‧上模第一楔形構件(一個模第一楔形構件) 1311a‧‧‧The first wedge member of the upper die (the first wedge member of one die)
1311b‧‧‧上模第二楔形構件(一個模第二楔形構件) 1311b‧‧‧ Upper wedge-shaped member (one wedge-shaped member)
1312‧‧‧上模楔形構件動力傳送構件(一個模楔形構件動力傳送構件) 1312‧‧‧ Upper die wedge member power transmission member (one die wedge member power transmission member)
1313‧‧‧上模楔形構件驅動機構(一個模楔形構件驅動機構) 1313‧‧‧ Upper die wedge member drive mechanism (one die wedge member drive mechanism)
1321‧‧‧上模第二楔形構件保持構件(一個模第二楔形部件保持構件) 1321‧‧‧ Upper mold second wedge-shaped member holding member (one mold second wedge-shaped member holding member)
1322‧‧‧上模第二楔形構件保持構件的彈性構件(一個模第二楔形構件保持構件的彈性構件) 1322‧‧‧Elastic member of the second wedge-shaped member holding member of the upper mold (one member of the elastic member of the second wedge-shaped member holding member)
1330‧‧‧排氣孔開閉機構 1330‧‧‧ vent opening and closing mechanism
1331‧‧‧排氣孔銷動力機構 1331‧‧‧Exhaust pin power mechanism
1332‧‧‧排氣孔銷 1332‧‧‧ vent pin
1340‧‧‧壓板(上模型腔塊位置改變機構設置部基底構件或一個模型腔塊位置改變機構設置部基底構件) 1340‧‧‧Pressing plate (upper model cavity block position changing mechanism setting part base member or a model cavity block position changing mechanism setting part base member)
1341‧‧‧上模型腔塊位置改變機構設置部框構件(一個模型腔塊位置改變機構設置部框構件) 1341‧‧‧Upper model cavity block position changing mechanism setting part frame member (one model cavity block position changing mechanism setting part frame member)
1342‧‧‧上模型腔塊位置改變機構設置部底面構件(一個模型腔塊位置改變機構設置部底面 構件)/上部構件 1342‧‧‧Upper model cavity block position changing mechanism setting part bottom surface member (one model cavity block position changing mechanism setting part bottom surface member)/upper member
1343‧‧‧上模型腔塊位置改變機構設置部底面構件(一個模型腔塊位置改變機構設置部底面構件)/下部構件 1343‧‧‧ Upper model cavity block position changing mechanism setting part bottom surface member (one model cavity block position changing mechanism setting part bottom surface member)/lower member
1400‧‧‧下模型腔塊位置改變機構設置部(另一個模型腔塊位置改變機構設置部) 1400‧‧‧ Lower model cavity block position changing mechanism setting part (another model cavity block position changing mechanism setting part)
1410‧‧‧下模楔形機構(另一個模楔形機構) 1410‧‧‧Lower die wedge mechanism (another die wedge mechanism)
1411a‧‧‧下模第一楔形構件(另一個模第一楔形構件) 1411a‧‧‧The first wedge member of the lower die (the first wedge member of the other die)
1411b‧‧‧下模第二楔形構件(另一個模第2楔形構件) 1411b‧‧‧Second wedge member (the second wedge member of the other die)
1412‧‧‧下模楔形構件動力傳送構件(另一個模楔形構件動力傳送構件) 1412‧‧‧Lower die wedge member power transmission member (another die wedge member power transmission member)
1413‧‧‧下模楔形構件驅動機構(另一個模楔形構件驅動機構) 1413‧‧‧Lower die wedge member drive mechanism (another die wedge member drive mechanism)
1421‧‧‧下模安裝構件(另一個模安裝構件) 1421‧‧‧Lower mold mounting member (another mold mounting member)
1422‧‧‧壓板(下模第二楔形構件保持構件或另一個模第二楔形構件保持構件) 1422‧‧‧Pressing plate (lower mold second wedge member holding member or another mold second wedge member holding member)
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TWI704652B (en) * | 2019-10-31 | 2020-09-11 | 邱昱維 | Method for forming surrounding wall on ceramic substrate with circuit layout and the substrate |
JP6704159B1 (en) * | 2019-12-02 | 2020-06-03 | アサヒ・エンジニアリング株式会社 | Resin sealing device |
KR102240866B1 (en) * | 2021-03-23 | 2021-04-16 | 코리아플랜트(주) | Exhaust pipe for stainless steel flue with enhanced corrosion resistance and its manufacturing method |
KR102446919B1 (en) * | 2021-06-02 | 2022-09-23 | 한화솔루션 주식회사 | Undercover molding apparatus |
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CN109727878B (en) | 2022-10-18 |
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