TWI638452B - Room temperature oscillator - Google Patents

Room temperature oscillator Download PDF

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TWI638452B
TWI638452B TW106145294A TW106145294A TWI638452B TW I638452 B TWI638452 B TW I638452B TW 106145294 A TW106145294 A TW 106145294A TW 106145294 A TW106145294 A TW 106145294A TW I638452 B TWI638452 B TW I638452B
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room temperature
etching
temperature oscillator
low
layer
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TW201929228A (en
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林嘉洤
羅國彰
萬良芳
劉冠彣
劉璦瑜
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林嘉洤
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Abstract

本發明提供一種室溫振盪器,其特徵在於:該室溫振盪器具有一二極體,該二極體係由一多孔矽結構和二電極層所組成,該等電極層係分別設於該多孔矽結構兩端,而該多孔矽結構係為一矽基板上形成有複數高孔隙率層和複數低孔隙率層,且該等高孔隙率層與該等低孔隙率層係為間隔設置之結構;其中,當該二極體被供以一偏置電源時,該二極體兩端之電壓會在二電壓值間振盪,進而使該室溫振盪器產生固定頻率之穩定振盪波形。如此一來,本發明所提供之室溫振盪器,就能透過材料本身的特性,無須再添加其他的製程,就能在室溫下產生固定頻率之振盪波形。 The present invention provides a room temperature oscillator, characterized in that the room temperature oscillator has a diode, and the two-pole system is composed of a porous germanium structure and a two-electrode layer, and the electrode layers are respectively disposed on the The porous tantalum structure has a plurality of high porosity layers and a plurality of low porosity layers formed on the substrate, and the high porosity layers are spaced apart from the low porosity layers. The structure; wherein, when the diode is supplied with a bias power supply, the voltage across the diode oscillates between two voltage values, thereby causing the room temperature oscillator to generate a stable oscillation waveform of a fixed frequency. In this way, the room temperature oscillator provided by the invention can transmit the oscillating waveform of the fixed frequency at room temperature without passing through other processes through the characteristics of the material itself.

Description

室溫振盪器 Room temperature oscillator

本發明係屬於振盪器的領域,特別是關於一種在通以電流或電壓後完全依靠材料特性而在室溫範圍內即可產生振盪之室溫振盪器。 The present invention is in the field of oscillators, and more particularly to a room temperature oscillator that oscillates over a range of room temperatures by relying entirely on material properties after passing current or voltage.

按,目前振盪器係廣泛運用於各類有線及無線電子產品或系統上,舉凡軍事、機械、通訊、電子、醫療等消費性產業中都有使用振盪器的產品,因此在現今電子系統中是重要的部件之一,而在諧波振盪器中,除了反饋振盪器以外,最常被使用的是負微分電阻(NDR,Negative differential resistance)振盪器。一般而言,NDR通常係利用LC電路、CMOS放大器之複雜電路,只有一些特殊的雙端二極體,像是甘恩二極體(Gunn diode),及近期眾多討論之諧振穿隧二極體(RTDs,Resonant tunneling diodes)等等,才能以簡單的二極體方式形成。 According to the current oscillators, they are widely used in various wired and wireless electronic products or systems. In the military, machinery, communications, electronics, medical and other consumer industries, there are products that use oscillators. Therefore, in today's electronic systems, One of the important components, and in the harmonic oscillator, in addition to the feedback oscillator, the most commonly used is a negative differential resistance (NDR) oscillator. In general, NDRs are usually complex circuits using LC circuits and CMOS amplifiers. There are only a few special two-terminal diodes, such as the Gunn diode, and many recently discussed resonant tunneling diodes. (RTDs, Resonant tunneling diodes), etc., can be formed in a simple diode.

不過,上述二極體之振盪器皆是在低功率範圍,且RTD更需在極低溫狀態下才能產生振盪波形,原因係為RTD振盪器需要靠量子電子才能產生出振盪波形,但一般的振盪器在室溫下時,熱電子的活動較為活躍,進而遮蔽了量子電子的活動,因此無法偵測到量子電子的活動,更無從提起量子電子所產生之振盪波形。因此,傳統作法係將溫度降低至熱電子幾乎不活躍之程度,以突顯出量子電子的活動性,這樣才能夠偵測到振盪波形,進而形成振盪器。然而,極低溫之振盪器以應用面來說十分狹 窄,無法具有廣泛的應用,因此,如何能製作出在室溫下能偵測到振盪波形,且是具有固定頻率之振盪波形的振盪器是相當重要的課題。 However, the above-mentioned diode oscillators are all in the low power range, and the RTD needs to be in an extremely low temperature state to generate an oscillating waveform. The reason is that the RTD oscillator needs to rely on quantum electrons to generate an oscillating waveform, but the general oscillation At room temperature, the activity of the hot electrons is more active, which obscures the activity of the quantum electrons, so the activity of the quantum electrons cannot be detected, and the oscillation waveform generated by the quantum electrons is not lifted. Therefore, the conventional method reduces the temperature to such an extent that the thermal electrons are almost inactive to highlight the activity of the quantum electrons, so that the oscillation waveform can be detected and the oscillator can be formed. However, the cryogenic oscillator is very narrow in terms of application It is narrow and cannot be used in a wide range of applications. Therefore, how to make an oscillator that can detect an oscillating waveform at room temperature and has an oscillating waveform with a fixed frequency is an important issue.

有鑑於此,本發明人感其未臻完善而竭其心智苦心研究,並憑其從事該項研究多年之累積經驗,進而提供一種室溫振盪器,以期可以改善上述習知技術之缺失。 In view of this, the present inventors feel that they have not perfected their efforts and painstakingly studied, and based on their accumulated experience in the research for many years, and then provided a room temperature oscillator, in order to improve the lack of the above-mentioned prior art.

於是,本發明之一目的,旨在提供一種在室溫下能夠運作之振盪器,且是能夠在室溫下產生高功率和固定頻率之振盪波形的振盪器。 Accordingly, it is an object of the present invention to provide an oscillator that can operate at room temperature and that is capable of generating an oscillating waveform of high power and a fixed frequency at room temperature.

為達上述目的,本發明之室溫振盪器,其特徵在於:該室溫振盪器具有一二極體,該二極體係由一多孔矽結構和二電極層所組成,該等電極層係分別設於該多孔矽結構兩端,而該多孔矽結構係為一矽基板上形成有複數高孔隙率層和複數低孔隙率層,且該等高孔隙率層與該等低孔隙率層係為間隔設置之結構;其中,當該二極體被供以一偏置電源時,該二極體兩端之電壓會在二電壓值間振盪,進而使該室溫振盪器產生固定頻率之穩定振盪波形。這樣在通以能源後,透過材料本身的特性便能讓振盪器在室溫下便可產生振盪波形。 In order to achieve the above object, the room temperature oscillator of the present invention is characterized in that the room temperature oscillator has a diode composed of a porous germanium structure and a two-electrode layer, and the electrode layer is Separately disposed at two ends of the porous tantalum structure, the porous tantalum structure is formed on a substrate having a plurality of high porosity layers and a plurality of low porosity layers, and the high porosity layers and the low porosity layers are a structure for spacing; wherein, when the diode is supplied with a bias power supply, the voltage across the diode oscillates between two voltage values, thereby making the room temperature oscillator stable to a fixed frequency Oscillating waveform. In this way, after passing through the energy source, the characteristics of the material itself can make the oscillator generate an oscillating waveform at room temperature.

在某些實施例中,該偏置電源係為一固定電流,以利用電流使該室溫振盪器透過材料特性產生振盪波形。 In some embodiments, the bias supply is a fixed current to cause the room temperature oscillator to generate an oscillating waveform through material properties using current.

較佳者,利用一蝕刻溶液和具有週期性高低變化之一電流在該矽基板上進行陽極氧化蝕刻而形成該等高孔隙率層與該等低孔隙率層,以利用週期性變化的電流蝕刻製成能夠在室溫產生振盪之振盪器。 Preferably, the high porosity layer and the low porosity layer are formed by anodization etching on the germanium substrate using an etching solution and a current having a periodic high and low variation to utilize a periodically varying current etching. An oscillator capable of generating oscillation at room temperature is produced.

較佳者,利用一蝕刻溶液和具有週期性高低變化之一電壓在 該矽基板上進行陽極氧化蝕刻而形成該等高孔隙率層與該等低孔隙率層,以利用週期性變化的電壓蝕刻製成能夠在室溫產生振盪之振盪器。 Preferably, an etching solution and a voltage having a periodic high and low variation are utilized Anodization etching is performed on the germanium substrate to form the high-porosity layer and the low-porosity layers to form an oscillator capable of generating oscillation at room temperature by periodically varying voltage etching.

較佳者,利用一蝕刻溶液和具有週期性亮暗變化之一光源進行照光,以在該矽基板上進行陽極氧化蝕刻而形成該等高孔隙率層與該等低孔隙率層,以利用週期性變化的光源蝕刻製成能夠在室溫產生振盪之振盪器。 Preferably, an etching solution and a light source having a periodic light-dark change are used for illuminating the anode substrate to form the high-porosity layer and the low-porosity layer to utilize the cycle. A source of varying light is etched into an oscillator that is capable of oscillating at room temperature.

在某些實施例中,該偏置電源係為一固定電壓,以利用電壓驅動使該室溫振盪器透過材料特性產生振盪波形。 In some embodiments, the bias supply is a fixed voltage to drive the room temperature oscillator through the material characteristics to produce an oscillating waveform.

較佳者,利用一蝕刻溶液和具有週期性高低變化之一電流在該矽基板上進行陽極氧化蝕刻而形成該等高孔隙率層與該等低孔隙率層,以利用週期性變化的電流蝕刻製成能夠在室溫產生振盪之振盪器。 Preferably, the high porosity layer and the low porosity layer are formed by anodization etching on the germanium substrate using an etching solution and a current having a periodic high and low variation to utilize a periodically varying current etching. An oscillator capable of generating oscillation at room temperature is produced.

較佳者,利用一蝕刻溶液和具有週期性高低變化之一電壓在該矽基板上進行陽極氧化蝕刻而形成該等高孔隙率層與該等低孔隙率層,以利用週期性變化的電壓蝕刻製成能夠在室溫產生振盪之振盪器。 Preferably, the high porosity layer and the low porosity layer are formed by anodization etching on the germanium substrate by using an etching solution and a voltage having a periodic high and low variation to utilize a periodically varying voltage etching. An oscillator capable of generating oscillation at room temperature is produced.

較佳者,利用一蝕刻溶液和具有週期性亮暗變化之一光源進行照光,以在該矽基板上進行陽極氧化蝕刻而形成該等高孔隙率層與該等低孔隙率層,以利用週期性變化的光源蝕刻製成能夠在室溫產生振盪之振盪器。 Preferably, an etching solution and a light source having a periodic light-dark change are used for illuminating the anode substrate to form the high-porosity layer and the low-porosity layer to utilize the cycle. A source of varying light is etched into an oscillator that is capable of oscillating at room temperature.

此外,該矽基板內更可具有複數摻雜物,且摻雜濃度從該矽基板頂部向下隨著深度不同而有週期性高低變化,再利用一蝕刻溶液在該矽基板上進行陽極氧化蝕刻而形成該等高孔隙率層與該等低孔隙率層,以利用摻雜濃度的不同而蝕刻製成能夠在室溫產生振盪之振盪器。 In addition, the germanium substrate may further have a plurality of dopants, and the doping concentration changes periodically from the top of the germanium substrate to the depth, and then anodization is performed on the germanium substrate by using an etching solution. The high porosity layer and the low porosity layers are formed to be etched to form an oscillator capable of oscillating at room temperature by utilizing a difference in doping concentration.

如此一來,本發明所提供之室溫振盪器,就能夠透過材料本身的特性,而無須再添加其他的製程,就能在室溫下產生振盪,且是高功率及固定頻率之振盪波形,因此改善了傳統振盪器只能在低溫下使用之缺點,並利用室溫下可使用之特點,進而擴增應用之範疇,讓本發明能有更多的後續應用,增添實用性。 In this way, the room temperature oscillator provided by the invention can penetrate the characteristics of the material itself, and can generate oscillation at room temperature without adding another process, and is an oscillation waveform of high power and fixed frequency. Therefore, the disadvantages that the conventional oscillator can only be used at low temperature are improved, and the characteristics that can be used at room temperature are utilized, thereby expanding the scope of application, so that the present invention can have more subsequent applications and increase practicality.

1‧‧‧室溫振盪器 1‧‧‧ room temperature oscillator

11‧‧‧二極體 11‧‧‧II

111‧‧‧多孔矽結構 111‧‧‧Porous 矽 structure

112‧‧‧電極層 112‧‧‧electrode layer

1111‧‧‧矽基板 1111‧‧‧矽 substrate

1112‧‧‧高孔隙率層 1112‧‧‧High porosity layer

1113‧‧‧低孔隙率層 1113‧‧‧low porosity layer

2‧‧‧偏置電源 2‧‧‧ bias power supply

第1圖,為本發明已具體實現之較佳實施例之電路示意圖。 1 is a schematic circuit diagram of a preferred embodiment of the present invention.

第2圖,為本發明已具體實現之較佳實施例之結構示意圖。 2 is a schematic structural view of a preferred embodiment of the present invention.

第3圖,為本發明已具體實現之較佳實施例之蝕刻電流和電壓對蝕刻時間之數據圖。 Figure 3 is a graph of etch current and voltage versus etch time for a preferred embodiment of the invention.

第4圖,為本發明已具體實現之較佳實施例之二極體的I-V線圖。 Fig. 4 is a I-V diagram of a diode of a preferred embodiment of the invention.

第5A圖,為本發明已具體實現之較佳實施例之二極體在施予固定偏置電流後的振盪機制示意圖。 FIG. 5A is a schematic diagram showing the oscillation mechanism of the diode of the preferred embodiment of the present invention after applying a fixed bias current.

第5B圖,為本發明已具體實現之較佳實施例之二極體在施予固定偏置電流後的振盪機制示意圖。 FIG. 5B is a schematic diagram showing the oscillation mechanism of the diode of the preferred embodiment of the present invention after applying a fixed bias current.

第6圖,為本發明已具體實現之較佳實施例之二極體所產生之振盪波形與正弦波之比較示意圖。 Fig. 6 is a view showing a comparison of an oscillating waveform and a sine wave generated by a diode of a preferred embodiment of the present invention.

為使 貴審查委員能清楚了解本發明之內容,謹以下列說明搭配圖式,為使便於理解,下述實施例中之相同元件係以相同之符號標示來說明。 In the following description, the same components are denoted by the same reference numerals for the sake of understanding.

請參閱第1圖和第2圖,係為本發明已具體實現之較佳實施例的電路示意圖和結構示意圖。如圖中所示,本發明之室溫振盪器1,其特徵在於:該室溫振盪器1具有一二極體11,該二極體11係由一多孔矽結構111和二電極層112所組成,該等電極層112係分別設於該多孔矽結構111兩端,而該多孔矽結構111係為一矽基板1111上形成有複數高孔隙率層1112和複數低孔隙率層1113,且該等高孔隙率層1112與該等低孔隙率層1113係為間隔設置之結構;其中,當該二極體11被供以一偏置電源2時,該二極體11兩端之電壓會在二電壓值間振盪,進而使該室溫振盪器1產生固定頻率之穩定振盪波形。而在本實施例中,該偏置電源2係使用固定電流來進行後續實驗之成果示意,當然使用固定電壓亦可,並不以此為限。 Please refer to FIG. 1 and FIG. 2, which are circuit diagrams and structural diagrams of a preferred embodiment of the present invention. As shown in the figure, the room temperature oscillator 1 of the present invention is characterized in that the room temperature oscillator 1 has a diode 11 which is composed of a porous germanium structure 111 and a two-electrode layer 112. The electrode layers 112 are respectively disposed at two ends of the porous tantalum structure 111, and the porous tantalum structure 111 is formed on the tantalum substrate 1111 with a plurality of high porosity layers 1112 and a plurality of low porosity layers 1113, and The high-porosity layer 1112 and the low-porosity layer 1113 are spaced apart from each other; wherein when the diode 11 is supplied with a bias power source 2, the voltage across the diode 11 is The oscillation between the two voltage values causes the room temperature oscillator 1 to generate a stable oscillation waveform of a fixed frequency. In the present embodiment, the bias power supply 2 is a result of using a fixed current for subsequent experiments. Of course, a fixed voltage may be used, and is not limited thereto.

在本實施例中,該矽基板1111晶面之米勒指數為(100),且電阻係為1~10Ω.cm,而相關的陽極氧化蝕刻程序係建立在鐵氟龍腔體中。此外,該蝕刻溶液係由氫氟酸與乙醇相互混合製成,且氫氟酸與乙醇之混合比為1:4,陽極係為銅片與該矽基板產生金屬接觸,而陰極則使用銀板。並且,本實施例中所有的實驗和量測皆在室溫下進行。 In this embodiment, the Miller index of the crystal plane of the germanium substrate 1111 is (100), and the resistance is 1~10Ω. Cm, and the associated anodizing etching process is established in the Teflon cavity. In addition, the etching solution is prepared by mixing hydrofluoric acid and ethanol, and the mixing ratio of hydrofluoric acid and ethanol is 1:4, the anode is a copper sheet to make metal contact with the crucible substrate, and the cathode is silver plate. . Moreover, all experiments and measurements in this example were performed at room temperature.

該矽基板和該蝕刻溶液之間的化學反應係表示如下:Si+2HF+2h+→SiF2+2H+ SiF2+4H+→H2+H2SiF6 The chemical reaction between the germanium substrate and the etching solution is expressed as follows: Si+2HF+2h + →SiF 2 +2H + SiF 2 +4H + →H 2 +H 2 SiF 6

在HF為基底的電解質中,氟離子係持續被蝕刻電壓驅動而移動到該矽基板的表面,並與電洞(h+)和矽原子而產生H2SiF6。因為H2SiF6具有可溶性,當H2SiF6溶進電解質時,該矽基板111上便會產生奈米級的細孔而導致空位(vacancy)出現。這個過程便能形成該多孔矽結構111。 In the HF-based electrolyte, the fluoride ion is continuously driven by the etching voltage to move to the surface of the germanium substrate, and generates H 2 SiF 6 with the hole (h + ) and the germanium atom. Since H 2 SiF 6 is soluble, when H 2 SiF 6 is dissolved in the electrolyte, nano-sized pores are formed on the ruthenium substrate 111 to cause vacancy to occur. This process can form the porous tantalum structure 111.

在陽極氧化蝕刻中,電解液的HF濃度、該矽基板1111中h+的濃度和蝕刻電流密度是針對該多孔矽結構111的細孔大小等細節的控制來說三個相當重要的因子。在本實施例中,透過調整該蝕刻電流之端點值,亦即在6mA和2mA之間交替,且該蝕刻電流在每個端點值係持續15秒,而交替之週期數係為10次而形成該多孔矽結構111,並且蝕刻的面積係為5.3平方公分,而像電壓等其他參數係為定值,亦即只有電流值產生週期性變化。因為該蝕刻電流係在6mA和2mA之間交替,該蝕刻電流的密度分別為1.13和0.38mA/cm-2。此外,依照前述方式調整該蝕刻電流之兩個端點值後即可製成該多孔矽結構111,不過雖然不同的高低蝕刻電流組合均能形成該多孔矽結構111,但是當該蝕刻電流之兩個端點值為6mA和2mA時,所製成之該二極體11才會具有較為明顯的NDR和振盪的性質。 In the anodizing etching, the HF concentration of the electrolytic solution, the concentration of h + in the tantalum substrate 1111, and the etching current density are three important factors for the control of details such as the pore size of the porous tantalum structure 111. In this embodiment, by adjusting the end value of the etching current, that is, alternating between 6 mA and 2 mA, and the etching current lasts for 15 seconds at each end point, and the number of alternating cycles is 10 times. The porous tantalum structure 111 is formed, and the area of etching is 5.3 square centimeters, and other parameters such as voltage are constant, that is, only the current value changes periodically. Since the etching current was alternated between 6 mA and 2 mA, the etching current had a density of 1.13 and 0.38 mA/cm -2 , respectively . In addition, the porous germanium structure 111 can be formed by adjusting the two end values of the etching current in the foregoing manner, but although different combinations of high and low etching currents can form the porous germanium structure 111, when the etching current is two When the endpoint values are 6 mA and 2 mA, the diode 11 produced will have more pronounced NDR and oscillation properties.

在其他實施例中,在進行陽極蝕刻時則是改成使用週期性高低變化的電壓,其他參數像蝕刻電流等為定值;或是使用光源之亮暗為週期性變化之照光行為作為蝕刻的條件之一,而其他參數像蝕刻電流和蝕刻電壓等為定值;抑或是使該矽基板1111內可具有複數摻雜物,且摻雜濃度從該矽基板1111頂部向下隨著深度不同而有週期性高低變化,再利用該蝕刻溶液在該矽基板1111上進行陽極氧化蝕刻而形成該等高孔隙率層1112與該等低孔隙率層1113,而其他參數如蝕刻電流和蝕刻電壓等為定值。這樣便可提供多種進行陽極蝕刻之製程選擇,並不單以週期性變化之電流為限。 In other embodiments, when the anode etching is performed, the voltage is changed to a periodic high or low voltage, other parameters such as an etching current are fixed, or the light and dark of the light source are periodically changed as an etching behavior. One of the conditions, and other parameters such as an etch current and an etch voltage are constant values; or the ruthenium substrate 1111 may have a plurality of dopants therein, and the doping concentration is different from the top of the ruthenium substrate 1111 with depth The periodic high and low variations are performed, and the etching solution is used to perform anodization etching on the germanium substrate 1111 to form the high porosity layer 1112 and the low porosity layer 1113, and other parameters such as an etching current and an etching voltage are Value. This provides a variety of process options for anode etching, not limited to periodically varying currents.

請配合參閱第3圖,其係為本發明已具體實現之較佳實施例之蝕刻電流和電壓對蝕刻時間之數據圖。如圖所示,圖中的實線係表示蝕 刻進行時該等電極層112兩端的電壓,虛線則表示該蝕刻電流,從圖中可以看出,該蝕刻電流確實在6mA和2mA之間交互替換,因該蝕刻電流呈週期性變化,導致蝕刻電流密度亦呈高低之週期性變化,所以會產生週期性的孔隙率變化,因此而在該矽基板1111上形成該多孔矽結構111。 Please refer to FIG. 3, which is a data diagram of etching current and voltage versus etching time for a preferred embodiment of the present invention. As shown in the figure, the solid line in the figure represents the eclipse. The voltage across the electrode layer 112 is indicated by the dotted line, and the dotted line indicates the etching current. As can be seen from the figure, the etching current is alternately replaced between 6 mA and 2 mA because the etching current changes periodically, resulting in etching. The current density also changes periodically, so that a periodic change in porosity occurs, and thus the porous crucible structure 111 is formed on the crucible substrate 1111.

請配合參閱第4圖,其係為本發明已具體實現之較佳實施例之二極體的I-V特性曲線圖。如圖所示,可以清晰看出該二極體11能提供一個明顯的NDR曲線,尤其在第三象限中,相對的波峰值為(-6.8V,-64.6mA),而波谷值為(-6.9V,-8.2mA),所以其峰谷電流比係高達7.9。 Please refer to FIG. 4, which is an I-V characteristic diagram of a diode of a preferred embodiment of the present invention. As shown, it can be clearly seen that the diode 11 can provide a distinct NDR curve, especially in the third quadrant, the relative peak value is (-6.8V, -64.6mA), and the trough value is (- 6.9V, -8.2mA), so the peak-to-valley current ratio is as high as 7.9.

該多孔矽結構111係透過調整該蝕刻電流之端點值所產生兩種不同的孔隙率而形成,而該等高孔隙率層1112與該等低孔隙率層1113實際上係分別對應為不同大小的多個微型柱體,這兩種較大或較小的微型柱體係對應兩種量子局限效應、兩種能帶隙和兩種電子遷移率。由於局限效應和散射效應的關係,相較於較小的微型柱體(低孔隙層1113),在較大的微型柱體(高孔隙率層1112)中電子遷移率較高,而在施加較低電壓的區域,電子傾向在較大的微型柱體(高孔隙率層1112)傳導,而不是在較小的微型柱體(低孔隙層1113)中傳導。當施予的電壓達到一極限值時會產生劇烈的散射效應,且電子會具有足夠的能量克服不連續能帶並跨過奈米級的細孔而進入較小的微型柱體(低孔隙層1113)中,此時平均遷移率便會驟降便導致NDR現象的產生。 The porous germanium structure 111 is formed by adjusting two different porosityes generated by the end values of the etching currents, and the high porosity layers 1112 and the low porosity layers 1113 are actually correspondingly different in size. Multiple microcolumns, the two larger or smaller microcolumn systems correspond to two quantum confinement effects, two band gaps, and two electron mobility. Due to the relationship between the confinement effect and the scattering effect, the electron mobility is higher in the larger microcylinder (high porosity layer 1112) compared to the smaller microcylinder (low porosity layer 1113). In the low voltage region, electrons tend to conduct in the larger microcylinder (high porosity layer 1112) rather than in the smaller microcylinder (low porosity layer 1113). When the applied voltage reaches a limit, a sharp scattering effect is produced, and the electrons have enough energy to overcome the discontinuous band and cross the nano-scale pores into the smaller micro-cylinder (low porosity layer) In 1113), the average mobility will drop suddenly and the NDR phenomenon will occur.

請再配合參閱第5A圖、第5B圖,其係為本發明已具體實現之較佳實施例之二極體在施予固定偏置電流後的振盪機制示意圖。如圖所示,當該二極體11在供以該偏置電源2(此處為固定電流)時,該二極體 11兩端之電壓會在二電壓值間振盪,進而產生近似正弦波之固定頻率的穩定振盪波形。在本實施例中,當該二電極層112被施加之該固定電流,其值設為-70mA時,NDR曲線的操作點會從一開始的狀態Q0(0V,0mA)移動到電流峰值點Qp(-15.2V,-64.6mA),因為這個點非常接近該固定電流的值(-70mA),所以非常容易因為過電流效應的慣性就短暫到達Qp+dQp點(-16.0V,-17.0mA)。然而,Qp+dQp點在NDR曲線上並不是穩定的狀態,於是系統為了穩定而使流過該二極體11之固定電流瞬間下降到Q3+dQ3點(-16V,-17.0mA),不過在下降超過Q3+dQ3點後的瞬間,該固定電流會具有繼續向前移動的慣性,因此該固定電流會繼續順著NDR曲線下降至10.0mA。此時,在NDR曲線上有兩個穩定態,一個是Q3點(-12.0V,-10mA),另一個是Q1點(-4.0V,-10mA),Q1點也是NDR曲線和Q3起始的電路負載線相交的三個點中的一個,因此會吸引操作點從Q3點移動到Q1點,並且會產生如諧波運動般一直重復這個過程,如第5B圖所示。 Please refer to FIG. 5A and FIG. 5B together, which is a schematic diagram of the oscillation mechanism of the diode of the preferred embodiment of the present invention after applying a fixed bias current. As shown in the figure, when the diode 11 is supplied with the bias power source 2 (here, a fixed current), the voltage across the diode 11 oscillates between two voltage values, thereby generating an approximate sine wave. A stable oscillation waveform of a fixed frequency. In this embodiment, when the fixed current is applied to the two-electrode layer 112 and the value is set to -70 mA, the operating point of the NDR curve is moved from the initial state Q 0 (0 V, 0 mA) to the current peak point. Q p (-15.2V, -64.6mA), because this point is very close to the value of the fixed current (-70mA), so it is very easy to reach the Q p +dQ p point (-16.0V) due to the inertia of the overcurrent effect. -17.0mA). However, the Q p +dQ p point is not in a stable state on the NDR curve, so the system temporarily drops the fixed current flowing through the diode 11 to Q 3 +dQ 3 point (-16V, -17.0 mA) for stability. However, at a moment after falling more than 3 points of Q 3 +dQ, the fixed current will have an inertia that continues to move forward, so the fixed current will continue to fall to 10.0 mA along the NDR curve. At this time, there are two stable states on the NDR curve, one is Q 3 point (-12.0V, -10mA), the other is Q 1 point (-4.0V, -10mA), and the Q 1 point is also the NDR curve and Q. 3 One of the three points at which the initial circuit load line intersects, thus attracting the operating point from Q 3 to Q 1 and will repeat the process as harmonic motion, as shown in Figure 5B .

此外,如第6圖所示並再配合參閱附件1,實線為正弦波的波形,虛線則為本發明的振盪波形,可以看出本實驗所得出的結果在Q3點移動到Q1點的波形係確實完美地與頻率為101.3kHz的正弦波波形吻合,因此可見本發明之室溫振盪器確實能產生具有固定頻率之振盪波形,且更好的是還幾乎能與正弦波波形吻合。接著,操作點回到Q1點後,由於該固定電流之電流值繼續增加至-70mA,使得操作點向Qp+dQV+dQi點移動,然後就持續沿著幾乎為直線的NDR曲線移動到Qp點,完成一個振盪週期後接下來便跟一開始所提及的一樣繼續穩定地持續這個週期。並且,雖然第5A圖中NDR曲線上的Q2點是其中一個NDR曲線和電路負載線相交點, 但Q2點只是Q1和Q3之間的暫態而不是穩定的狀態,因此操作點不會停留在此。 Furthermore, as shown in FIG. 6 and see Annex 1 together with solid line is for a sine wave oscillation waveform was broken line of the present invention, this experiment can be seen in the results point to Q 3 Q 1 point The waveform is indeed perfectly matched to a sinusoidal waveform having a frequency of 101.3 kHz, so that the room temperature oscillator of the present invention can indeed produce an oscillating waveform having a fixed frequency, and more preferably, it can almost coincide with a sinusoidal waveform. Then, after the operating point returns to Q 1 point, since the current value of the fixed current continues to increase to -70 mA, the operating point moves toward the point Q p +dQ V +dQ i , and then continues along the almost straight NDR curve. Move to the point Q p , complete an oscillation cycle and continue to continue this cycle steadily as mentioned at the beginning. Moreover, although the Q 2 point on the NDR curve in Fig. 5A is the intersection of one of the NDR curves and the circuit load line, the Q 2 point is only a transient state between Q 1 and Q 3 rather than a stable state, so the operating point Will not stay here.

綜上所述,本發明係確實提供了一種第一次以多孔矽為材料製作之N型NDR曲線之室溫振盪器1,以利用多孔矽本身之材料特性使該室溫振盪器1具有可在室溫下操作之NDR特性,並能產生具有固定頻率之振盪波形,而且振盪之波形具有12.4V的振幅和101.3kHz的頻率,又能具有穩定且高達7.9的峰谷電流比。並且,該室溫振盪器1內之該二極體11係為矽為材料基底,因此也能與現今主流之矽基VLSI做高度整合性。 In summary, the present invention does provide a room temperature oscillator 1 of the first N-type NDR curve made of porous tantalum material, so that the room temperature oscillator 1 can be made possible by utilizing the material properties of the porous tantalum itself. The NDR characteristic is operated at room temperature, and an oscillating waveform having a fixed frequency can be generated, and the oscillating waveform has an amplitude of 12.4 V and a frequency of 101.3 kHz, and can have a stable peak-to-valley current ratio of up to 7.9. Further, the diode 11 in the room temperature oscillator 1 is made of a material base, and therefore can be highly integrated with the current mainstream V-based VLSI.

惟,以上所述者,僅為本發明之較佳實施例而已,並非用以限定本發明實施之範圍,故該所屬技術領域中具有通常知識者,或是熟悉此技術所作出等效或輕易的變化者,在不脫離本發明之精神與範圍下所作之均等變化與修飾,皆應涵蓋於本發明之專利範圍內。 However, the above description is only for the preferred embodiment of the present invention, and is not intended to limit the scope of the practice of the present invention, so that it is common knowledge in the art or equivalent or easy to be familiar with the technology. Variations and modifications made by those skilled in the art without departing from the spirit and scope of the invention are intended to be included within the scope of the invention.

Claims (9)

一種室溫振盪器,其特徵在於:該室溫振盪器具有一二極體,該二極體係由一多孔矽結構和二電極層所組成,該等電極層係分別設於該多孔矽結構兩端,而該多孔矽結構係為一矽基板上形成有複數高孔隙率層和複數低孔隙率層,且該等高孔隙率層與該等低孔隙率層係為間隔設置之結構,而該矽基板內係具有複數摻雜物,且摻雜濃度從該矽基板頂部向下隨著深度不同而有週期性高低變化,再利用一蝕刻溶液在該矽基板上進行陽極氧化蝕刻而形成該等高孔隙率層與該等低孔隙率層;其中,當該二極體被供以一偏置電源時,該二極體兩端之電壓會在二電壓值間振盪,進而使該室溫振盪器產生固定頻率之穩定振盪波形。 A room temperature oscillator is characterized in that the room temperature oscillator has a diode consisting of a porous crucible structure and a two-electrode layer, and the electrode layers are respectively disposed on the porous crucible structure. At both ends, the porous tantalum structure is a structure in which a plurality of high porosity layers and a plurality of low porosity layers are formed on a substrate, and the high porosity layers are spaced apart from the low porosity layers, and The ruthenium substrate has a plurality of dopants therein, and the doping concentration changes periodically from the top of the ruthenium substrate to the depth, and then anodization is performed on the ruthenium substrate by using an etching solution to form the a high porosity layer and the low porosity layer; wherein, when the diode is supplied with a bias power supply, the voltage across the diode oscillates between two voltage values, thereby making the room temperature The oscillator produces a stable oscillation waveform at a fixed frequency. 如申請專利範圍第1項所述之室溫振盪器,其中,該偏置電源係為一固定電流。 The room temperature oscillator of claim 1, wherein the bias power source is a fixed current. 如申請專利範圍第2項所述之室溫振盪器,其中,利用一蝕刻溶液和具有週期性高低變化之一電流在該矽基板上進行陽極氧化蝕刻而形成該等高孔隙率層與該等低孔隙率層。 The room temperature oscillator of claim 2, wherein the high porosity layer is formed by performing anodization etching on the germanium substrate by using an etching solution and a current having a periodic high and low variation Low porosity layer. 如申請專利範圍第2項所述之室溫振盪器,其中,利用一蝕刻溶液和具有週期性高低變化之一電壓在該矽基板上進行陽極氧化蝕刻而形成該等高孔隙率層與該等低孔隙率層。 The room temperature oscillator of claim 2, wherein the high porosity layer is formed by performing anodization etching on the germanium substrate by using an etching solution and a voltage having a periodic high or low variation Low porosity layer. 如申請專利範圍第2項所述之室溫振盪器,其中,利用一蝕刻溶液和具有週期性亮暗變化之一光源進行照光,以在該矽基板上進行陽極氧化蝕刻而形成該等高孔隙率層與該等低孔隙率層。 The room temperature oscillator of claim 2, wherein the etching is performed by using an etching solution and a light source having a periodic light-dark change to form the high-porosity by performing anodization etching on the germanium substrate. The rate layer and the low porosity layer. 如申請專利範圍第1項所述之室溫振盪器,其中,該偏置電源係為一固定電壓。 The room temperature oscillator of claim 1, wherein the bias power source is a fixed voltage. 如申請專利範圍第6項所述之室溫振盪器,其中,用一蝕刻溶液和具有週期性高低變化之一電流在該矽基板上進行陽極氧化蝕刻而形成該等高孔隙率層與該等低孔隙率層。 The room temperature oscillator of claim 6, wherein the high porosity layer is formed by performing anodization etching on the germanium substrate with an etching solution and a current having a periodic high and low variation. Low porosity layer. 如申請專利範圍第6項所述之室溫振盪器,其中,利用一蝕刻溶液和具有週期性高低變化之一電壓在該矽基板上進行陽極氧化蝕刻而形成該等高孔隙率層與該等低孔隙率層。 The room temperature oscillator of claim 6, wherein the high porosity layer is formed by performing anodization etching on the germanium substrate with an etching solution and a voltage having a periodic high or low variation Low porosity layer. 如申請專利範圍第6項所述之室溫振盪器,其中,利用一蝕刻溶液和具有週期性亮暗變化之一光源進行照光,以在該矽基板上進行陽極氧化蝕刻而形成該等高孔隙率層與該等低孔隙率層。 The room temperature oscillator of claim 6, wherein the etching is performed by using an etching solution and a light source having a periodic light-dark change to form the high-porosity by performing anodization etching on the germanium substrate. The rate layer and the low porosity layer.
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