TWI586842B - Plant for fluorine production and a process using it - Google Patents

Description

Fluorine manufacturing plant and method of using the same

The present invention claims the priority of U.S. Provisional Patent Application No. 61/383,204, filed on Sep. 15, 2010, and U.S. Provisional Patent Application No. 61/383,533, filed on Sep. All of the objects are hereby incorporated by reference, the present invention relates to a factory for the production of fluorine in the form of a plurality of assembled slides and a method in which it is applied.

In the fabrication of semiconductors, photovoltaic cells, thin film transistor (TFT) liquid crystal displays, and microelectromechanical systems (MEMS), multiple steps of continuously depositing materials and etching corresponding articles are often performed in suitable chambers; The processes are usually plasma assisted. In this deposition step, deposits are not only often formed on the article but also on the walls and other interior parts of the chamber. It has been observed that the elemental fluorine-based very effective reagent is used both for etching and for cleaning the chambers to remove undesirable deposits. Such methods are for example in WO 2007/116033 (which describes the use of fluorine and certain mixtures as etchants and chamber cleaners), WO 2009/080615 (which illustrates the manufacture of MEMS), 2009/092453 (which illustrates solar energy) The manufacture of batteries is described in the unpublished European application 09174034.0, which relates to the manufacture of TFTs.

U.S. Patent Application describes the production and distribution of fluorine in a manufacturing facility. The provision of fluoride on site reduces the risks associated with transporting it from a facility that produces fluorine to a point of use.

There are still many problems to be solved related to the devices used in the on-site concept, such as the destruction of a larger amount of pure fluorine (F ₂ ) and HF in the event of leakage or equipment damage.

The present invention provides an improved plant suitable for use in the field of fluorine production, particularly as an etchant and chamber cleaner in the fabrication of semiconductors, photovoltaic cells, thin film transistor liquid crystal displays, and microelectromechanical systems.

The plant of the present invention supplies a tool to a fluorine gas that uses fluorine gas as a reactant to chemically act in the apparatus, the apparatus comprising a plurality of sliding mounting modules including at least one sliding mounting die selected from the group consisting of Group, the composition of the group is

- a sliding mounting module comprising at least one HF storage tank, represented as a slide 1,

- the installation comprises at least one sliding module of the cell F _2, showing the sliding member 2,

- a sliding mounting module comprising a purification device for purifying F ₂ , represented as a slide 3,

a sliding mounting module comprising means for delivering fluorine gas to the point of use, designated as slide 4,

- a sliding mounting module comprising a cooling water circuit, represented as a slide 5,

- a sliding mounting module comprising means for treating exhaust gases, represented as a slide 6,

- mounting module comprising means for analyzing the slide F _2, showing the sliding member 7, and

- A sliding mounting module comprising means for operating the electrolytic cells, designated as a slider 8.

The preferred plant of the present invention provides a gas to a tool that uses fluorine gas as a reactant to chemically act in the tool. The device includes a plurality of sliding mounting modules including the following:

- a sliding mounting module comprising at least one HF storage tank, represented as a slide 1,

- the installation comprises at least one sliding module of the cell F _2, showing the sliding member 2,

- a sliding mounting module comprising a purification device for purifying F ₂ , represented as a slide 3,

- a sliding mounting module comprising means for delivering fluorine gas to the point of use, designated as slide 4,

- a sliding mounting module comprising a cooling water circuit, represented as a slide 5,

- a sliding mounting module comprising means for treating exhaust gases, represented as a slide 6,

- mounting module comprising means for analyzing the slide F _2, showing the sliding member 7, and

- A sliding mounting module comprising means for operating the electrolytic cells, designated as a slider 8.

Preferably, the factory further includes a slider module, which may be located adjacent to the slider modules 1 to 8 but may be separated therefrom, ie

- a slider module 9, which converts the medium voltage into a low voltage substation, and/or

- Sliding module 10, which houses utility facilities (control room, laboratory, lounge).

Furthermore, the apparatus may comprise means for supplying an inert gas, such as means for providing liquid nitrogen and gaseous nitrogen: means for providing compressed air and water; and aids and amenities. At least, the sliders 1, 2, 3, 4 and 7, preferably all sliders, including the housing for safety reasons.

In the context of the present invention, the term "fluorine gas" specifically refers to molecular fluorine (F ₂ ) and various mixtures thereof (particularly with inert gases). The inert gas is preferably selected, for example, from the group consisting of argon, nitrogen, oxygen, and N ₂ O. A preferred fluorine gas consists of or consists essentially of F ₂ .

Hereinafter, a preferred factory shown in Fig. 1 will be described in detail.

Figure 1 shows a factory P in accordance with the present invention. Its size is 39 m × 23 m. Reference numeral 1 in Fig. 1 denotes a slider 1 including HF storage and evaporation. Reference numeral 2 denotes a slider 2, indicated by a broken line, which comprises the electrolytic cells; it is located in the factory basement below the modules 5 and 7. Reference numeral 3 of Fig. 1 denotes a slider 3 which comprises a purifying device for purifying the produced F ₂ . Reference numeral 4 of Fig. 1 denotes a slider 4 which includes a storage device for fluorine gas. According to one embodiment, the slide 4 further comprises a single slot FT-IR analysis of the final spare or final storage of purified F _2. Reference numeral 5 of Fig. 1 denotes a slider 5 which houses means for cooling water. It is located above the slider 2. Reference numeral 6A in Fig. 1 denotes a slider 6A which includes an emergency response scrubber ERS, and reference numeral 6B denotes a slider 6B with an F ₂ scrubber and a H ₂ scrubber. In Figure 1 reference numeral 7 denotes a sliding member 7, comprising means F ₂ can be freely used for analysis (which may comprise, for example, a FT-IR and / or a UV spectrometer). Reference numeral 8 in Fig. 1 refers to a rectifier box in the slider 8. Reference numerals 9A and 9B refer to a medium voltage electric sub-slider 9A and a low voltage electric sub-slider 9B. Reference numeral 10A denotes a slider 10A including a laboratory and a control room, and reference numeral 10B denotes a slider 10B having a plurality of comfort facilities such as a restroom and a dressing room. Reference numerals 11a and 11b denote escalators and platforms for walking to reach the upper sliding members (especially the sliding members 5 and 7). Reference numeral 12 shows the forklift in action. Reference numeral 13 denotes a stockyard for the KOH solution and other required chemicals, and reference numeral 14 denotes an emergency shower. If desired, the plant can be fenced, as indicated by the black line in Figure 1. A fenced facility has several advantages, since the staff to avoid unforeseen operation into the F ₂ production facility wherein, thus reducing the risk of the staff and the like. In this case, the fluorine gas plant can be constructed on site at a semiconductor manufacturing plant that consumes the fluorine gas, and delivery of fluorine gas occurs over the fence.

Such a plant comprising a plurality of parts assembled in several sliders has many advantages. For example, the sliders can be pre-assembled and tested in a device; therefore, they are a "off the shelf" product and only need to be installed in the field. This saves time. It is also very easy to disassemble a plurality of specific sliders for maintenance, repair, or replacement by other sliders, which include parts having the same function but with improved performance, or having a lower or higher output. There are also a number of improvements in safety: for example, as explained above, the slider 2 comprises at least one electrolytic cell; preferably, all of the electrolytic cells have been filled with electrolyte and then delivered to the field for assembly to the slide 2 in. Thus, the filling can be carried out under corresponding safety considerations and does not have to be performed at a local location where such safety precautions may not be available. The capacity of the plant can be expanded by adding modules. Preferably, the sliders are of the size of a shipping container, thus permitting easy transport of the module. A great advantage is the reliable production of high purity F ₂ 24 hours a day, 7 days a week.

The sliders will now be described in detail.

It is generally preferred that the cells are lumped and attached to the structure to avoid movement, for example as a seismic protection. It is also preferred that the plant includes means for detecting an earthquake and signaling the control room that automatically shuts down the device or manually shuts it down manually. Preferably, the plant includes at least one geophone, such as a geodetic geophone (accelerometer) that detects vibration acceleration of the device and transmits if a level, such as 0.5 G, is reached. A corresponding signal that triggers an alarm and/or an automatic shutdown of the device.

All lines connecting the cells and connected to the cells must be electrically insulating, for example by spacers between the plurality of flanges. The floor must also be electrically insulated.

Preferably, all of the process sliders (sliders 1 to 8) are included in a closed space.

Slide 1: The slider module for HF storage (slider 1) includes at least one HF (hydrogen fluoride) storage tank for storing HF and delivering it to the electrolytic cells. The tanks for HF are generally hollow bodies which can optionally be mounted on a plurality of wheels or they can be transported, for example, by a forklift. Preferably, the slider comprises several storage tanks, more preferably 2, 3, 4, 5 or 6 storage tanks. Preferably, the HF is stored in the tank in liquid form. The slider 1 is connectable to a can comprising pressurized N ₂ . HF-based liquid pressurized with N ₂ and is delivered to an evaporator, in which the evaporator is evaporated. The resulting gas phase containing HF is delivered to this electrolytic cell or to such electrolytic cells. If desired, an evaporator can be installed for each cell.

The evaporator preferably comprises a heating means such as an electric heating means or a heat exchanger (heat using hot cooling water) to produce the evaporated HF. More preferably, the HF storage container can be isolated from the HF supply line by a dual isolation valve having a closed isolation space. In that case, the slider 1 suitably further comprises at least one gap venting valve connected to the one or more enclosed spaces. The gap vent valve is generally operable to freely remove hydrogen fluoride present from the enclosed isolation space. Removal can be performed, for example, by applying a vacuum. In another aspect, the removal can be performed, for example, by rinsing the enclosed isolated space using an inert gas and/or a pressurized sweeping gas (e.g., like anhydrous air, preferably nitrogen).

In one aspect, the removal is performed continuously.

Preferably, the removal is discontinuous, particularly when an HF storage container is attached to and/or disconnected from the supply line. The gas recovered from the enclosed isolated space is suitably discharged to an HF destruction unit, such as a scrubber in the slide 6.

In a plant according to the invention, a plurality of parts thereof (presumed to be in contact with a gas), such as, for example, hollow bodies, valves, and lines for charging and/or venting gases, are resistant to molecules Fluorine materials are suitably made or coated with such materials. Examples of such materials include Monel metal, stainless steel, copper, and, preferably, nickel.

In a preferred aspect of the slider 1, the hydrogen fluoride storage container is contained in a closed space having at least one closable door that allows a hydrogen fluoride storage container to be closed from the The space enters or is removed. In an embodiment of this aspect, the enclosed space comprises the hydrogen fluoride storage container and a connection to the hydrogen fluoride supply line. In a further embodiment, the enclosed space further comprises an evaporator for evaporating the liquid HF. In this preferred aspect, and in its embodiment, the enclosed space suitably includes an HF sensor capable of triggering the enclosed space to a connection on a scrubber as described below. .

The slider 1 generally has at least one liquid line and one gas line. In that case, the liquid line can be connected, if appropriate, to the hydrogen fluoride supply line, for example by a flange connection. The gas line may additionally be connected to an inert gas (e.g., anhydrous air, nitrogen, etc.) supply line which allows for pressurization of the hydrogen fluoride storage vessel.

In the slider 1, each of the hydrogen fluoride storage containers has a capacity of generally from 10 to 5,000 liters, usually from 500 to 4,000 liters, preferably from 500 to 3,000 liters. A specific example of a hydrogen fluoride storage container is a tank approved by RID/ADR-IMDG, of the UN T22 type or preferably of the UN T20 type. Such cans are commercially available.

Each of the HF storage containers in the slider 1 can be suitably connected to the hydrogen fluoride supply line through a manifold.

Each of the HF storage containers in the slider 1 is preferably separately separable from the hydrogen fluoride supply line.

The HF storage container in the slider 1 can be generally separated from the hydrogen fluoride supply line by a remote control, preferably a remote control valve. More preferably, each storage container is provided with a remote control, preferably a remote control valve, which allows the container to be separated from the hydrogen fluoride supply line.

When a remote control valve is present, a manual valve is additionally installed. Such remote control valves, for example, allow operation of the HF storage container from a remote control room.

In a preferred embodiment, the HF storage containers include an automatic HF level sensor. In particular, the HF storage containers can be mounted on a scale. In that case, preferably, a process processing system, specifically an automatic program control system, is operable to close a first remote control valve, evacuate the HF vessel, and open another second HF-containing hydrogen fluoride storage. Remote valve for the container. This embodiment is particularly effective for avoiding manual operation of the HF valve and for ensuring a continuous HF supply.

In a preferred aspect, the valves are operable to automatically close in the event of an abnormal operating condition (e.g., a process interruption in a process equipment coupled to the HF supply line).

In another preferred aspect, the valves are operable to automatically close in the event of an HF leak in the slider 1. Such HF leakage may be caused, for example, by leakage of a freely flanged connection inside the HF storage container, and there is a possibility that the valves are closed by remote control. This specifically avoids the necessity of approaching the hydrogen fluoride supply line in this case.

The slider also includes a valve for shutting off the supply of HF and nitrogen. Preferably, the slider 1 comprises from 3 to 10 HF containers; particularly preferably, it comprises 4, 5, 6, 7 or 8 containers. For a productivity of 150 tons F ₂ /year, 4 HF containers are suitable. In particular, tanks with smaller sizes (if they can be closed by separate valves) improve plant safety. The cans may be made of a material that is resistant to HF or at least lined with a material that is resistant to HF. The walls should be thick enough; preferably, they have a thickness equivalent to a 10 mm IMDG code (International Maritime Dangerous Goods Code).

In a specific embodiment, the slider 1 preferably permanently includes at least one HF emergency container. Preferably, such an HF emergency container is an empty HF storage container as described herein attached to the HF supply line. The HF emergency container is typically operable to receive HF from a leaking HF storage container. The HF emergency container is suitably maintained under an inert gas pressure or maintained under vacuum.

The cans are preferably portable so that they can be transported by trucks and/or can be lifted by a forklift.

The slider 1 includes a ventilation system, and the ambient air is preferably permanently vented to a scrubber, particularly an ERS scrubber for removing HF and F ₂ (as described below).

Slide 2: The slider (slider 2) including the electrolytic cell 2 or more electrolytic cells will now be described in detail. It contains at least one electrolytic cell. Preferably, it comprises at least two electrolytic cells. More preferably, it contains at least 6 electrolytic cells. A slider 2 with 8 electrolytic cells is very suitable. The slider is preferably constructed such that, if desired, additional electrolytic cells can be added if the need for fluorine gas is increased. The pools include a plurality of jackets through which cooling water can be circulated. If desired, the slider 2 can be provided in the form of separate sub-sliders 2A, 2B and the like. In the sub-sliders, a determined number of electrolytic cells are assembled. The individual sub-sliders 2A and 2B (and any other sub-sliders) are joined together to form an electrolytic cell chamber. Typically, the cell compartment will contain 4, 6 or more electrolytic cells, such as 8 electrolytic cells or even more. The advantage of providing several electrolytic cells is that the closure of one or even more of the cells for maintenance or repair can be compensated by increasing the output of the other cells. In order to assemble several sub-sliders, the advantages are that the dimensions can be maintained within the maximum allowable size for normal road transport. The electrolytic cells are connected to a collector for the F ₂ and H ₂ produced. It should be noted that each cell may include one or more anodes. Typically, each cell comprises between 20 and 30 anodes. In other embodiments, the number of anodes in each of the electrolytic cells may be greater than 30; each cell may, for example, have more than 60 anodes, up to 70 or even up to 80 anodes. A cable connects each anode to the rectifier. The cathode of each cell is connected to the rectifier via a copper or aluminum bus. A rectifier can supply current to one or more cells. Preferably, a rectifier is applied to each anode. The advantage is that depending on the specific anode characteristics, the intensity at each individual anode can be fine-tuned, and anomalies at a particular anode (eg, overvoltage, short circuit, or broken anode) can be detected immediately, while continuing to produce F ₂ so as to allow all of the gas in the anode and the electrolytic cell anode off automatically faulty. Accordingly, the slider 2 preferably includes at least four electrolytic cells with a plurality of anodes, wherein each of the plurality of rectifiers in the slider 8 is assigned to a single anode, or wherein the slider 8 Each of the plurality of dual rectifiers is assigned to two anodes.

The slider 2 includes a cooling water circuit (either fed or connected thereto by a cooling water circuit of the slider 5) that supplies cooling water into the jacket of the cells.

The slider 2 also includes a settling tank; preferably, a settling tank for F _{2 and} a settling tank for H ₂ are connected to each tank. These settling tanks are used to reduce the gas velocity of the F ₂ and H ₂ produced in the tank to prevent the electrolyte dust from being carried away. Preferably, the settling tanks include a vibrator and a heating device to melt the separated electrolyte dust for removal.

The collector for collecting the generated F ₂ is connected to the slider 3 through a tube, and the collector for generating H ₂ is passed through a tube and slider 6B (which will be described in detail below) for H ₂ A scrubber is connected. In a preferred embodiment, the slider 2 also includes a ventilation system to handle the accidental release of F ₂ and/or H ₂ .

The ambient air of the slide 2 is vented with a scrubber, especially for safety reasons (the scrubber is described below).

Slider 3: which comprises purifying the means for generating the F _2. It includes a cooler in which F _{2 is} pre-cooled. The slider 3 also includes an HF scrubber in which the pre-cooled F _{2 is} contacted with HF maintained at a very low temperature. The HF scrubber includes a cooling jacket through which a coolant circulates. The slider 3 further includes a buffer tank, a compressor such as a diaphragm compressor, and an HF condenser operating at a low temperature and at least one HF absorbent column, preferably containing NaF as an absorption for HF. Agent. Preferably, at least two absorbent column columns are contained in the slider 3. If desired, the columns are superfluous so that one group is in absorption mode and the other group can be regenerated. The adsorption columns include a heating device. If desired, another set of absorbent cartridges may be present in the slider 3 or at a location for reloading the adsorbent. The HF condenser is connected to the electrolysis slide 2 by a plurality of tubes. Preferably, at least one set of posts is mounted on a wheeled cart to keep them movable (removable) from the slider.

This HF condenser can be cooled to a temperature where HF condenses to form a liquid or even a solid. It is preferred if it is condensed to form a liquid HF. It is highly desirable to cool the trap to a temperature of from -60 ° C to -80 ° C, preferably to about -70 ° C. As a cooling medium, well-known coolant systems that are operable at the desired low temperatures are suitable. It is preferred to apply a N ₂ gas obtained by mixing liquid N ₂ and gas N ₂ in an appropriate amount. This cooling method is very reliable. Thus, the slider 3 includes a plurality of lines to deliver and extract the cooling medium.

The ambient air of the slide 3 is vented with a scrubber, especially for safety reasons (described below).

Slide 4: This slide serves to store fluorine gas and deliver fluorine gas to the point of use. The slider 4 includes a plurality of filters for removing any remaining entrained solids. For example, in an electrolytic cell generated F ₂ may include a solid electrolyte entrained from the electrolysis cell, generally, KF to HF adducts. The filter is preferably constructed from materials resistant to HF and fluorine; stainless steel, copper, Monel metal and especially nickel are particularly suitable. Filters made from the particles of such a metal-based sintered very appropriate, nanoscale particles comprise those of the aperture to provide a semiconductor grade F _2, for example equal to or less than 5 nm pore diameter, and more preferably is, Has a pore size equal to or less than 3 nm.

If desired, the slider 4 includes a pre-filter to remove F ₂ coarse particles having a pore diameter equal to or smaller than 1 μm.

The slider 4 also includes a single slot FT-IR. In this single-slot FT-IR, purified F ₂ (which is prepared for storage or delivery to the point of use) can be analyzed. In this case, it is not necessary to provide an ultraviolet spectrometer and/or a multi-cell FT-IR in the slider 7.

The slider 4 preferably includes means for storing fluorine gas. It may, for example, comprise a buffer tank for fluorine gas.

In addition to the buffer tank, but preferably in place of the buffer tank, the slide 4 further comprises a permanent or temporary fluorine gas storage unit in the form of a plurality of hollow bodies for storing F ₂ . The storage unit is connectable to other slides.

"Permanent fluorine gas storage unit" is understood to mean specifically a fluorine-containing gas storage unit integrated into a fluorine plant. For example, the fluorine gas storage unit may be a transferable or preferably a fixed unit that is present in the slider 4 throughout the operation of the fluorine plant. Preferably, the permanent fluorine gas storage unit is designed to contain more than 90 wt%, more preferably more than 95 wt%, based on the total weight of the fluorine gas stored in the plant, and most preferably More than 100 wt% of fluorine gas.

The slider 4 is further capable of transferring fluorine gas from the slider 2 to the point of use. Possible components of the slider 4 include, but are not limited to, supply lines, compressors, mixers, and buffer tanks.

"Connectable" is understood to mean in particular that the permanent fluorine gas storage unit is equipped to be connectable to a part of the slide 4. Preferably, the permanent fluorine gas storage unit is assembled to be connectable to a fluorine gas supply line. In a preferred aspect, the fluorine gas storage unit is coupled to a component of the slider 4, specifically a fluorine gas supply line, throughout operation of the fluorine gas plant. In a further preferred aspect, the fluorine gas storage unit is directly coupled to a component of the slider 4.

A suitable apparatus for connecting a fluorine gas storage unit connected to a component of the slider 4 includes a manifold connected to each of the hollow bodies of the fluorine gas storage unit via a line and preferably There is a shut-off valve on each line to allow for separate separation of each hollow body, and the manifold is further connected to a component of the slider 4.

The slider 4 preferably comprises from 4 to 25 hollow bodies, more preferably from 5 to 8 hollow bodies. The hollow bodies preferably have substantially the same shape and size. A cylindrical shape hollow body (tube) is preferred. Preferably, each hollow body of the fluorine gas storage has a shut-off valve.

The plurality of hollow bodies of the fluorine gas storage unit can be suitably fixed together by a suitable frame. Specific frame geometries include triangles, squares, and rectangular geometries.

In a fluorine gas plant according to the present invention, the fluorine gas storage devices can generally contain fluorine gas at a pressure of at least 25 psi (about 1.72 gauge). Typically, the pressure is equal to or greater than 35 psi (about 2.4 gauge), preferably equal to or greater than 40 psi (about 2.8 gauge). In a plant according to the invention, the fluorine gas storage means can generally comprise or comprise at most 400 psi (about 27.6 gauge), preferably equal to or less than 75 psi (about 5.2) Pressurize the pressure of the fluorine gas. Typically the pressure is equal to or lower than 65 psi (about 4.5 gauge), preferably equal to or lower than 60 psi (about 4.1 gauge). It should be understood that the hollow body of the fluorine gas storage unit can generally contain or contain fluorine gas at the above pressure. It is especially preferred that the hollow bodies contain fluorine gas at the above pressure.

In general the ratio of the fluorine gas plant of the present invention, stored in the storage means fluorine F ₂ F in the molecule with molecular fluorine gas daily production capacity of the apparatus ₂ is from 0.1 to 1, preferably from 0.1 to 0.25.

Preferably, each hollow body can be individually closed from the factory; this improves safety. The fluorine exiting slide 4 is preferably transported through a double walled tube to the point of use. The fluorine gas is carried in the inner tube; the outer double wall envelope comprises nitrogen. The piping systems include a pressure sensor to analyze the nitrogen pressure in the outer double wall envelope. Preferably, the walls of the tubes are thicker than the walls normally used to carry the gas, i.e., they are preferably 1 mm thicker, preferably 4 mm thicker; equal to or greater than 5 The wall thickness of mm is particularly good; the pipe system classified as "Table of Contents 80" is very suitable. They are used to improve security. A welded tube system with radiation inspection is very suitable.

This or such storage containers can be mounted on wheels or transported by a forklift.

The ambient air of the slide 4 is vented with a scrubber, in particular the ERS scrubber described below (for safety reasons).

In the fluorine gas plant according to the present invention, the point of use may be connected to an additional manufacturing plant, such as a chemical plant or a specific plant that uses fluorine gas for surface treatment. The site of use is typically associated with a semiconductor manufacturing facility, preferably a photovoltaic device or flat panel display.

In a preferred embodiment of the fluorine gas plant according to the present invention, the slider 4 including the fluorine gas storage unit is a closed space. The enclosed space generally includes a fluorine sensor capable of triggering the connection of the enclosed space to the slider 6. Suitably, the enclosed space is connected to the slider 6 by a suction line connected to a fan that is operable to transport gas from the enclosed space of the slider 4 to the slider 6.

In another embodiment, the fluorine gas plant according to the present invention further comprises a mixer, preferably a static mixer, which is preferably capable of accepting fluorine from the slider 4 and accepting from a The inert gas of the inert gas supply line is preferably argon and/or nitrogen.

In a discretionary embodiment, a pressure control loop regulates, generally reduces, the pressure of the fluorine gas supplied to the point of use to a desired value.

The slider 5 provides parts for cooling or heating the plant by cooling water. It is preferably located adjacent to the electrolyzed slider 2 or sub-sliders 2A and 2B or any other sub-slider 2X, and more preferably it is located above the sliders. The slider 5 includes at least one circuit for heating the electrolytic cell at the beginning of the reaction to melt the electrolyte salt and cooling the electrolytic cells while the reaction is running. The circuit is filled with cooling water, which may be tap water or distilled water. The circuit includes a buffer tank, a pump (preferably redundant), and a dry cooler having a fan (with variable rate drive). During operation, the cooling water is preferably maintained at 75 ° C to 95 ° C to avoid solidification of the electrolyte in the electrolytic cell.

Another circuit included in the slider 5 is used to cool other heat exchangers of the device. It contains a cooling liquid, preferably a mixture of water and ethylene glycol, more preferably 40% by weight of ethylene glycol. Also the circuit includes a buffer, a pump (preferably redundant), and a dry cooler. The cooling circuit includes a plurality of detectors for measuring the temperature of the cooling water, means for heating the cooling water (for example, electric heating), and a heat exchanger for cooling such circulating liquid. Optionally, the plant includes a steam generator to provide steam or hot wash water. The steam generator can be a portable one. The hot vapor can, for example, be used to provide hot water, in which the electrolyte salt can be dissolved, if desired. As a result, the slider 5 preferably comprises at least two cooling water circuits.

The slider 6 includes at least one scrubber, one for each of F ₂ and H ₂ . Preferably, the scrubber pumps are redundant. The slides of the plant (especially the slides 1, 2, 3, 4 and 7) include a ventilation system to permanently vent the ambient air of the slider housing by the scrubber in the slide 6.

Preferably, the slider 6 includes an F ₂ scrubber for destroying any F ₂ or venting HF for safety reasons or maintenance operations. The F ₂ and HF of vented air from the sliders are processed in an scrubber for emergency response (ERS). Preferably, the scrubbers are jet scrubbers and provide suction. Such scrubber H can be mounted on the sub-sliding member, such as a sub-sliding member. 6A, which comprises a scrubber at least one emergency response (ERS), and a slide member 6B, which is used to produce a washed ₂ The purpose is to remove the HF entrained therein, and a scrubber to remove HF and/or F ₂ in the vented exhaust gas from the ambient air of the slider (as explained above).

A regular F ₂ scrubber (optionally mounted in sub-slider 6B) corresponds at least to the desired amount of F ₂ to be removed during regular operation. F ₂ is removed by contact with a mitigating solution. The scrubber preferably includes a jet scrubber, and a packed column to provide a solution to alleviate the F ₂ between high contact area. Preferably, the gas exiting the regular F ₂ scrubber passes through the support scrubber of the ERS scrubber.

The ERS scrubbers are used as a support scrubber for a regular F ₂ scrubber for removing F ₂ or HF from vented air and for venting gases containing HF and/or F ₂ to leak After the emergency treatment. The capacity of the ERS scrubber (optionally mounted in the subslider 6A) preferably corresponds at least to the amount of fluorine and HF to be removed in the event of an emergency, for example, in the event of a tube crack that does not necessarily occur. In the case of an accident involving a tube containing fluorine or a storage tank of HF. It is recommended to select the capacity of the ERS scrubber according to the worst case; for example, if there is an HF tank with a capacity of 2 m ³ and an F ₂ storage tube with a capacity of 8 kg F ₂ , the ERS should be able to reduce the corresponding HF and The amount of F _{2 and} the amount of plant retention. Preferably, the ERS scrubber includes two units for washing to achieve high destruction and removal efficiency; the excess pump is fed by normal and emergency power. It preferably includes a jet scrubber and a packed column to achieve good contact between the gas to be treated and the mitigation solution. Other units for emergency handling may include a packed column, but preferably it includes two jet scrubbers in series. F ₂ removal can be carried out using known reagents for removing F ₂ . Preferably, a KOH solution or NaOH (optionally including an alkali metal thiosulfate such as sodium thiosulfate or potassium thiosulfate) is used as a lightening solution and through the scrubber or the scrubber and the column is (if present) is pumped, as a decomposing agent for the F _2. It is foreseen that a cooler is used to cool the KOH solution. Of course, this advantage of a system emergency scrubber for processing concepts HF and F _2.

A scrubber for the HF reduction of the H ₂ gas stream can be installed in the subslider 6B. 6B the sub-sliding member preferably includes a jet scrubber aqueous HF solution to reduce the HF content of the operation in H _2. The concentration of HF may be in the range between 1% and 10% by weight. The scrubber further includes a packed column wherein fresh water is applied to the top of the column to reduce the HF content. The slider 6B also includes a line that allows dilution of H ₂ by nitrogen, which is used as a cooling medium in the slider 3.

The reliability of the scrubber in the slider 6, or in the corresponding sliders 6A and 6B, is very important. Therefore, the basic components, such as fans or pumps, used to circulate the mitigation solution through the scrubbers may be redundant. From time to time, fresh moderators, such as KOH solutions, and/or thiosulfate or solutions thereof, such as provided by a truck, are added to the recycle reducing solution.

The slider 6 preferably further includes one or more trapped depressions for the liquid in the event of an accidental leak.

The slider 7 relates to a device for analyzing the generated F ₂ . It is preferably mounted near the sliders 2A and 2B; very preferably, it is located above the sliders 2A and 2B. The slider 7 is, for example, an analyzer barrier. The ambient atmosphere around it is preferably ventilated to the ERS. The analysis apparatus comprising an analyzer for determining the appropriate content of the main impurities of the generated F ₂ a.

In one embodiment, an ultraviolet spectrometer (which analyzes the ultraviolet spectrum) and a multi-input, multi-cell FT-IR spectrometer (Fourier transform infrared spectroscopy) analyzer are well suited. Preferably, both the crude F ₂ taken from the electrolytic cell and the purified F ₂ can be sent to a single tank FT-IR or a multi tank FT-IR. In a multi-slot FT-IR, a channel is analyzed at a given time. The amounts of HF, CF ₄ , C ₂ F ₆ and COF ₂ can be measured, for example, by FT-IR, and the content of F ₂ can be analyzed by UV. It has been found, UV spectroscopy may be used as a direct measurement tool fluorine, anode burn occurs when it shows a drastic reduction of the fluorine concentration; CF ₄ dramatically increase observed at the same time in the FT-IR. Therefore, this combustion is easily detected by a sharp drop in the concentration of F ₂ during combustion, in which impurities (mainly CF ₄ and C ₂ F ₆ ) are formed. The result of this combustion (the F ₂ produced contains more CF ₄ , C ₂ F ₆ , COF ₂ , HF than during regular operation) is not only a change in the impurity content but also by the detector (especially in the present invention) The middle is a sharp decrease in the fluorine content monitored by UV spectroscopy. The entire UV spectrum can be used during measurements using UV spectroscopy. Preferably, instead of the entire spectrum, only the absorption at this particular wavelength (specifically between 200 and 400 nm, more preferably between 250 and 330 nm, optimally between 270 and 290 nm, or even at about 280 UV spectrum nm at) for measuring, as it is almost the maximum F UV ₂ absorption. FTIR and UV measurement is also used to control the purity of the purified F _2. Therefore, this analysis was used to detect anode combustion by measuring crude F ₂ with UV and CF ₄ by FT-IR and used to demonstrate and control the purity of purified F ₂ .

All of the electrolytic cell and the crude purified F ₂ F ₂ are continuously sampled and analyzed. The current FT-IR can accept up to 9 samples. Thus, purified F ₂ and crude F _{2 of} up to 8 electrolytic cells can be analyzed using a multi-cell FTIR of a current generating device.

According to another embodiment, the analysis of the produced fluorine is carried out only by single-slot FT-IR; no UV spectrometer is applied. This single-well FT-IR was used to analyze the purified F ₂ (final analysis).

Slide 8 contains multiple rectifiers, BPCS (Basic Program Control System), ESD (Emergency Shutdown System), F&G (Fire and Gas System) panels (aligned with fire alarms and gas alarms), small motor starters, light intensity distribution And other devices to provide power and control the power plant of the plant. The slider 8 is mounted near the sliders 2A and 2B; preferably, it is located above them. Each electrolytic cell, as described above, typically has at least one but often multiple anodes, for example, 26. The term "plurality of anodes" may refer to any digit equal to or greater than two. The number of anodes is only limited by practical considerations, such as pools or pool units (consisting of several pools) should not be unreasonably large. Often, the number of anodes is equal to or lower than 80, preferably equal to or lower than 70. A rectifier can supply current to one, two or more anodes. Preferably, each anode is supplied by a rectifier. Rectifiers are commercially available that can separately supply current to several anodes. For example, if 26 anodes are present in a cell, it is preferred to provide 26 rectifiers or 13 dual rectifiers (which separately supply current to the 2 anodes). The rectifiers are preferably assembled in a rectifier box housed in an air-conditioned housing.

It is preferred to provide a slight overpressure in this slider 8 to protect against gas ingress. All cables and cathode bus lines should be carefully sealed.

Preferably, the rectifier box is bolted to a fixed frame for seismic protection.

The slider 8 includes a plurality of walls and a top cover. It preferably further comprises a fire detection system, in particular a VESDA (very early smoke detection device) and a flameout system, for example using HFC-227ea or (A mixture of inert gases (nitrogen, argon, and carbon dioxide) is operated.

The slider 9 is preferably a prefabricated chamber having a concrete wall or a container similar to that made of metal shield. It contains means for connecting to a current and converting it from a medium voltage to a low voltage. Preferably, it contains "sub-power station" sub-sliders 9A and 9B. The slider 9A is preferably a current and bypass current containing an MV (medium voltage) cell for introduction and output and a transformer for converting the medium voltage current into a low voltage current. It is operable for the local network; for example, the transformers are selected such that they are suitable for local voltages, which may be, for example, 380 V or 400 V (50 Hz) or 440 V (60 Hz). The slider 9 preferably further comprises a fire detection system, in particular a VESDA (very early smoke detection device) and a flameout system, for example using HFC-227ea or (A mixture of inert gases (nitrogen, argon, and carbon dioxide) is operated.

The slider 9B is also preferably a prefabricated concrete chamber having a plurality of walls and a top cover. The substation houses a low voltage switchgear (LVCS) and a diesel generator. It is interconnected by wires to a slider that requires low voltage power, for example through a cable trough. It preferably further comprises a fire detection system, in particular a VESDA (very early smoke detection device) and a flameout system, for example using HFC-227ea or (A mixture of inert gases (nitrogen, argon, and carbon dioxide) is operated.

The slider 9B preferably further includes a battery charging station for a forklift.

The slider 9B must be interconnected to the process slide, in particular with several rectifiers in the slider 8.

The slider 10 includes practical facilities for an individual, such as a control room, a laboratory, and a lounge. Preferably, it is divided into a sub-slider 10A and a sub-slider 10B. The subslider 10A includes a control room and a laboratory. It may be that the small laboratory includes a fume hood with good ventilation, for example up to 500 m ³ /h and even larger, the cupboard is preferably made of acid-resistant material and can be used for analytical titration, a safety The cabinet is used for reagents and samples, a wash basin and a chemical tank in which chemical waste can be collected, preferably in a cylinder made of an acid resistant material. Preferably, the laboratory has a gas detector mounted at the fresh air inlet and a closing mechanism that closes the gas inlet in the event of a gas alarm. The subslider 10A is preferably kept under slight overpressure to prevent air from entering. The slider 10A preferably includes air conditioning.

The control panel of the control room is preferably connected in-line to a remote control panel, which may be located at another facility. This allows a number of fluorine gas production plants to be operated remotely from a single control room.

The subslider 10B includes a lounge. It contains equipment that is useful to the control room. It preferably includes a plurality of drawers, a dressing room, a toilet, a shower, and a cabinet for chemical gowns (gloves, shawls, etc.). The factory safety shower includes an eye shower system and is preferably located adjacent the exterior of the subslider 10B as it must be supplied with hot water. Slide 10 preferably includes ventilation and heating.

The plant will include additional equipment useful for operating it.

A compressor is required to provide pressurized fluorine gas. They must be resistant to fluorine. Compressors for fluorine gas treatment in the nuclear industry are very suitable. They are preferably diaphragm compressors. Such compressors are available on the market. The diaphragms are made of F ₂ resistant materials (especially with Monel metal, stainless steel, copper, or nickel). Such membrane-based 3-ply film, so that in case of a rupture of the diaphragm, the measuring device will be broken by the pressure to be detected, and F ₂ will not leave the compressor to the external region of the membrane.

The plant will also require instruments and valves for operation.

For example, if a mixer is present to provide a mixture of F ₂ and an inert gas or other gas, the process steps of mixing the gases include mass flow meters for F ₂ and one or more gases to be mixed with, a control valve installed to the dedicated program control circuit and an interlocking means to ensure that the gases and the like (e.g., an inert gas or more inert gases) F ₂ with an appropriate and safe for mixing.

The plant, as explained above, has means for analyzing certain parameters, such as mass flow control of fluorine gas or inert gas, for its operation. For this purpose, a mass flow controller is preferably used. With such a mass flow controller, the amount of fluorine gas can be controlled, passing through the pipeline carrying it, for example to the FTIR and UV analyzers. These mass flow controllers should be "low ΔP type" controllers, causing only a low pressure drop. Such flow meters for delivering gas to such analyzers, which must be suitable for the transport of fluorine gas, are also commercially available along with pipes, tubes, and fittings. The valve should be a heavy duty duty valve seal. A PLC (programmable logic controller) manages the movement of the FTIR mirrors, collects fault alarms and transmits the results to the BPRS (Basic Program Control System). For the analysis of pure F ₂ , it is preferred to use a window made of AgCl. For the analysis of the crude F ₂ , such as the crude F ₂ of the sampling line from the electrolytic cells, an Al ₂ O ₃ window can be applied.

According to the above description, it becomes clear that several alternatives may be applied on F ₂ analysis.

According to a first alternative, the single-slot FT-IR is located in the slider 4. It is used for the final analysis of this F ₂ .

According to a second alternative, the multi-slot FT-IR and optionally an ultraviolet analyzer are located in the slider 7.

According to a third alternative, the single-slot FT-IR is located in the slider 4, and the multi-slot FT-IR and optionally an ultraviolet analyzer are located in the slider 7.

This first alternative is the cheapest solution. The second alternative system is more expensive than a first alternative; it allows a rapid response, F or if a plurality of pools of _2, then the production is disturbed. It also allows for the identification of irregular operations of the pool. The third most expensive alternative a system; it allows a quick response and simultaneously identify a faulty cell, and it allows to check the final purity F _2.

The choice of such alternatives depends on the consumer's expectations or needs, the individual's experience, the propensity of the plant to operate to faulty conditions, and the like. It is often also possible to provide a plurality of analyzers in the sliders 4 and 7 to operate discontinuously or intermittently on one or both of them.

Safety equipment: It is well known that especially F ₂ and HF are compounds that require careful handling. H _{2 is of} course flammable. Therefore, the device includes a security device. For example, the plant includes a safety panel with multiple transfer switches for an emergency shutdown (ESD), for alarms, and for the highest priority automatic handling.

F ₂ , HF, if appropriate, the detector of H ₂ is installed, for example, in a venting tube to the ERS scrubber and at the point of emission. For safety reasons, a gas alarm signal is sent to the ESD. The plant includes a plurality of alarm lights that are turned on, that is, if a gas alarm signal is sent to the ESD. The alarms must also be detectable in the control room of the slider 10. The gas measurement must be given in the control chamber, for example in ppm. It would be advantageous if the factory included a fire and gas panel in the control room of the slider 10 to display all fire and gas alarms, as well as ventilation failures.

As mentioned above, the plant includes a plurality of smoke detectors and a VESDA detector. Such slider particular process, e.g., 3, 4 and 7 the slider comprises means (e.g., emergency button) F ₂ produced manually stopping means elimination of fire and / or start. The CC TV (Closed Circuit Television) can be used to monitor the plant. It can be used to monitor access to the plant, unloading of materials (such as portable HF tanks or KOH solutions).

Safety Instrumented Systems (SIS), including sensors, ESD systems, and safety actuators, are included in this facility. The SIS is designed to achieve a safety integrity level of "2". In particular, where a motor or electrical load is required to be included as a component of a securely inserted functional component, alternate or separate devices that disconnect the motor/load are contemplated, such as By disconnecting the upstream circuit breaker, if the contactor or circuit breaker dedicated to the motor/electrical load is not open.

An emergency generator, preferably a 100 kVA diesel generator, is preferably included in the plant if an external power supply is interrupted.

It is also preferred if the control room includes a "dead man" detection for an operator working alone.

Furthermore, it is preferred that the control room provides information about the direction of the wind and the speed of the wind.

The assembled process slides for a factory (with a capacity of 150 tons/year) have an footprint of 30 m‧9.2 m. The slides used for the implementation, the area for maintenance and repair, and the entrance clearance are approximately 39 m‧23 m. The height of the sliders can be higher than the standard (standard height of 64 inches). The slider 6A, including the emergency scrubber, often has a standard footprint but is adapted to the specific requirements of the corresponding plant.

Often, the slider structure is a painted steel frame on which all of the equipment is secured; they are designed for outdoor installation. Panels, doors, and roofs, if mounted on the exterior structure of the slider, imply that the dimensions of the outer slides exceed the dimensions of the standard shipping containers. If desired, the sliders are prefabricated and the panels, doors, and roof are correspondingly assembled to the sliders in the field. The sliders are anchored to an existing concrete slab or passed through or on a particular chassis.

The advantages of such sliders are, for example, they are manufactured, piped, routed and assembled together prior to workshop testing. It is preferred if they are constructed such that the interface between the sliders is minimized and all of the components in the corresponding slider are as easily accessible as possible for maintenance, inspection or repair.

The advantages of these slides are the safety aspects of reliable F ₂ production of high purity F ₂ 24 hours a day, 7 days a week.

Hereinafter, the assembly and operation of a factory composed of a plurality of sliders will be described.

The sliders as described above are assembled in a workshop; in one embodiment, the electrolytic cell of the slider 2 is already provided with an electrolyte salt. This improves security. Such pre-test slider in the workshop and then transported by them to the needs of production facilities in the F _2. In the facility, it is preferred that if a concrete slab has been sufficiently established in advance, the F ₂ production plant can be constructed thereon.

The sliders are assembled and connected. The slider 2 includes six electrolytic cells forming a unit cell. In this case, each electrolytic cell comprises 26 anodes; other multiples such as up to 80 anodes or even more, would be possible, if desired. They are built on the ground before or after the connection as an earthquake or weather prevention measure.

The slider 13 is used in a storage chamber for a desired chemical (e.g., thiosulfate, hydroxide, and/or electrolyte salt).

The operability of these built-in components is preferably tested.

The operation of the plant will now be described in detail.

A factory with 6 pools is available. The nominal capacity of this plant is approximately 100 tons/year of pure F ₂ (12 kg/h, peak 20 kg/h) if operated 24 hours a day, 7 days a week. This capacity can be expanded by adding two additional electrolytic cells and a rectifier or rectifier frame. It would be possible to expand the capacity to 300 tons/year by adding additional slides (additional pool spaces and rectifiers, additional cooling slides, additional analyzers). The cans (preferably having an internal volume of 1 to 20 m ³ , preferably having a size of 1 to 3 m ³ and filled with HF) are assembled in the slider 1 and connected to the electrolytic cells. Prior to the final assembly of the plant, the electrolyte salt of the crude composition KF‧2HF has been filled into the cells. The contents of the electrolytic cells are heated to about 80 ° C - 120 ° C to melt therein. The HF from the evaporator of the slider 1 is fed into the electrolytic cell. The medium voltage is supplied from the slider 9A to the slider 9B, converted into a low voltage direct current, the voltage thereof is in the range of 8 to 12 V, and the current is passed through the molten composition of the HF and the molten electrolyte salt, and the molten composition is A temperature in the range between 80 ° C and 120 ° C is maintained. A rectifier can be distributed to each cell; preferably, a rectifier is assigned to each anode. It is especially preferred to use a dual rectifier; this double rectifier can be used as two anodes. If there are 26 anodes in each cell, then 13 dual rectifiers can be applied to supply current to the anodes. The cells are operated at a pressure above ambient pressure (e.g., at a gauge pressure of 7 to 10 m). Elemental fluorine (F ₂ ) and elemental hydrogen (H ₂ ) are formed in the corresponding electrode compartments of the slider ₂ .

The HF system is advantageously provided such that the levels of electrolyte salts and HF in the corresponding pool do not exceed a particular upper and lower level. Preferably, the slider comprising one or more electrolytic cells further includes a sensor that determines the temperature in the cell, the level of liquid in the cell or the cells, pressure or differential pressure, anode current, and voltage and gas temperature. The cells are cooled with cooling water having a temperature of from about 75 ° C to 95 ° C, preferably from 75 ° C to 85 ° C.

The formed H _{2 is} sent to the slider 6B and brought into contact with a jet washer (with an aqueous solution comprising 0 to about 5% by weight of HF in water). The gas leaving the scrubber is sent to the bottom of a packed column where it is contacted with fresh water sprayed on top of the column. The gas leaving the packed column was diluted with nitrogen and passed to the atmosphere.

The plant produced an F ₂ of approximately 415 kg/day.

Such a pool of F ₂ is first produced by removing particles (mostly entrained resolidified electrolyte salt) pre-purification is performed. The crude F ₂ stream is cooled, whereby a portion of the entrained concentrated HF and may be removed. Then, the crude F ₂ by a diaphragm compressor a compressed to a pressure of about 3.5 psig. The excess pairs of NaF towers are mounted on the trolley to make them movable, especially for the case where the NaF pellets need to be completely exchanged (when further regeneration is no longer possible). The compressed F _{2 is then} passed through a trap and cooled by evaporation of liquid N ₂ and gaseous N ₂ to about -70 ° C. The remaining HF is removed by concentration in this trap. Any residual traces of HF are then removed by passing one of the two lines in the two absorption columns containing the NaF pellets; the lines are sometimes superfluous, The NaF column is heated to about 350 ° C to 400 ° C and N _{2 is} passed through them to remove the absorbed HF and regenerate the corresponding columns. The pressure in the absorption mode in the NaF columns is about 3.5 gauge. The F ₂ gas stream leaving the two NaF columns is passed through two filters to remove any solids, especially NaF, which are preferably made of Monel metal and the second filter The device has a hole diameter of 3 nm. The temperature of the first column is about 100 ° C and the temperature of the second column is about 30 ° C to 40 ° C. The purified F _{2 was} continuously sampled.

According to one embodiment, multiple samples are fed into a multi-slot FT-IR and into a UV analyzer as explained above. According to another embodiment, application of single-slot for selectively FT-IR analysis The purified F _2. The analytical data can be sent online to the control panel in the control room of the slider 10A.

If the analysis of these samples shows that one or more of the electrolytic cells produce too impure F ₂ and cannot be used for semiconductor manufacturing purposes, for example, contains much more CF ₄ or higher homologues. (indicating that the cell is faulty), then this or the corresponding sample and the F ₂ produced by the cell pass through the F ₂ scrubber in the slide 5 and are used to destroy by the KOH solution containing sodium thiosulfate Emergency scrubber. Alternatively, impure F ₂ collection can be used for the purpose that purity is sufficient. If such sample exhibits produced and F ₂ corresponding to the desired degree of purity, then we will return to these samples F ₂ line. The F is then transferred to a storage device _2, the storage device comprises a container 6 of the same shape, each having an internal volume of 1.3 m ^3. Any of the cylinders may be open and individually closed by a closing valve. Alternatively, a pressure control loop via the F ₂ produced pressure is reduced to about 1.5 psig and then sent to a point of use, the use of F ₂ for chamber cleaning flat panel display manufacturing facility. Use of a double-walled tube surrounding in which the space between the inner and outer tubes contains a nitrogen, the F ₂ and the inner tube therethrough.

In normal operation, these lines open and close the valve to provide a pressure difference between F ₂ and the point of the storage unit a buffer, the buffer allows a smooth control of the delivery of a fluorine gas flow, even for Different consumption patterns available at the point or during the interruption of the production of the F ₂ generating unit.

In the event that any disclosure of patents, patent applications, and publications incorporated herein by reference is inconsistent with the description of the present application to the extent that it may make the term unclear, this description should be preferred.

P. . . factory

1. . . Slide

2. . . Slide

2A. . . Subslider

2B. . . Subslider

3. . . Slide

4. . . Slide

5. . . Slide

6. . . Slide

6A. . . Subslider

6B. . . Subslider

7. . . Slide

8. . . Slide

9. . . Slide

9A. . . Subslider

9B. . . Subslider

10. . . Slide

10A. . . Subslider

10B. . . Subslider

11. . . Slide

11a. . . Escalators and platforms

11b. . . Escalators and platforms

12. . . Forklift

13. . . Storage yard

14. . . Emergency shower

Figure 1 shows an embodiment of a factory according to the invention having a useful arrangement of sliders.

P. . . factory

1. . . Slide

2. . . Slide

3. . . Slide

4. . . Slide

5. . . Slide

6A. . . Subslider

6B. . . Subslider

7. . . Slide

8. . . Slide

9A. . . Subslider

9B. . . Subslider

10A. . . Subslider

10B. . . Subslider

11a. . . Escalators and platforms

11b. . . Escalators and platforms

12. . . Forklift

13. . . Storage yard

14. . . Emergency shower

Claims (17)

Manufacturing plant of a fluorine gas, comprising: - at least one module is slidably mounted HF storage tank, expressed as a sliding member 1, - comprising at least one sliding mounting of the cell module F _2, showing the sliding member 2, - a sliding mounting module, shown as slide 3, comprising a cooler for pre-cooling the coarse F ₂ stream, wherein the cooler is connected to a compressor and the compressor is connected to an HF condensation operating at low temperatures Wherein the HF condenser comprises a cooling medium, wherein the cooling medium is N ₂ gas obtained by mixing liquid N ₂ and gaseous N ₂ , and - including a buffer tank and a sliding mounting mold for a supply line delivered to the point of use Group, denoted as slider 4. The factory of claim 1, further comprising: a slider module 9, which is a substation that converts a medium voltage to a low voltage, and/or a slider module 10 that accommodates utilities and amenities . A factory according to claim 1, wherein the HF storage tank in the slider 1 has an internal volume of 1 to 2 m ³ . A plant according to claim 1, wherein the sliding member 2 comprises at least four electrolytic cells, each of which is distributed to at least one of the separate rectifiers. A plant according to claim 1, wherein the sliding member 3 comprises an HF scrubber for contacting the crude F ₂ gas with the liquid HF, a condenser for removing HF from the F ₂ , and at least one absorption from the F ₂ Absorbent column for HF. A factory according to claim 1, wherein the slider 4 comprises a plurality of hollow bodies for storage of fluorine gas. A factory as claimed in claim 6, wherein each hollow body can be separately closed from the factory. A factory according to claim 1 further comprising a sliding mounting module of the cooling water circuit, designated as a sliding member 5, wherein the sliding member 5 comprises at least two cooling water circuits and heating and cooling means for the cooling water. A factory according to claim 1, further comprising a sliding mounting module for treating the exhaust gas, represented as a sliding member 6, wherein the sliding member 6 comprises a subslider 6A comprising an emergency scrubber, and comprising F for ₂ and sub-slider 6B of the scrubber of H ₂ . The factory of claim 1, further comprising a sliding mounting module for analyzing the F ₂ device, represented as a slider 7, wherein the slider 7 comprises a multi-slot FT-IR spectrometer and optionally an ultraviolet spectrometer, and / or wherein the slider 4 comprises a single slot FT-IR for the final analysis of the fluorine. A factory according to claim 1, further comprising a sliding mounting module for operating the electrolytic cell, represented as a sliding member 8, wherein the sliding member 8 comprises a plurality of rectifiers, wherein the number of rectifiers corresponds to the number of anodes Or wherein the slider 8 comprises a plurality of dual rectifiers, wherein the dual rectifiers respectively supply current to the two anodes. A factory according to claim 2, wherein the slider 9 includes a sub-sliding of a medium voltage battery that accommodates current, current, and bypass current Piece 9A, and a sliding device 9B for accommodating a low voltage switching device, an emergency generator, and a battery charging station. A factory according to claim 2, wherein the slider 10 includes a sub-slider 10A that houses a control room including a laboratory, and a sub-slider 10B that houses the restroom. A factory as claimed in claim 1, wherein there is at least one emergency button in each of the sliders. For example, the factory of claim 1 includes a geophone. For example, the factory of claim 15 of the patent scope, wherein the geophone is a strong geophone. A plant of claim 15 or 16, wherein the geophone is coupled to the control panel and triggers shutdown of the plant.