TWI578410B - A packaging apparatus and method for transferring integrated circuits to a packaging - Google Patents

Description

Packaging device and method for transferring integrated circuit to package

The present invention relates to a packaging apparatus and method for transferring an integrated circuit to a package, and more particularly to a packaging apparatus for a semiconductor wafer.

Currently, packaging devices for semiconductor wafers or integrated circuits can simultaneously perform a layout of a defined number of integrated circuits or layout a circuit to a package at a time.

High precision is required to transfer, align, and layout each circuit to a distribution base in the package and to ensure that the job is completed in the shortest amount of time and has the highest throughput. The circuit is typically transferred to the package by one of the trays containing it. To ensure the accuracy of the transfer and layout, the two solutions are typically applied separately or in combination.

One of the solutions is to use a vision guided feedback mechanism to accurately pick up and align the circuits during the transfer process. Visual guidance compensation is accomplished to achieve acceptable alignment.

This other solution uses components that are used to transfer the circuits with high precision (eg, one transfer unit with one pick arm). If the components are machined with high precision, the visual guidance compensation (ie, the uncompensated layout) can be omitted.

However, one problem with existing packaging devices is that the maximum number of transfer units available to simultaneously transfer circuits is limited. The two solutions mentioned are not practically used to complete the manufacture of machine components and at the pitch adjustment axis and with respect to one of the central axes of each circuit. Rotationally achieves the high precision required to simultaneously lay out a large number of circuits (eg, more than six circuits).

At present, it is well known to use visual guidance compensation for transferring multiple circuits and/or high-precision transfer units for uncompensated layouts of multiple circuits (without visual guidance compensation), which can only be done simultaneously with a maximum number of 3 circuit layouts. A non-compensated layout to a package, and the use of visual guidance compensation simultaneously simultaneously lays a maximum number of 6 circuits to a package.

According to one aspect of the present invention, a package apparatus for transferring an integrated circuit to a package is provided, the apparatus comprising: a carrier for carrying a plurality of integrated circuits and combining the plurality of integrated circuits in a first Moving between a position of the package and a first position, the first package is configured to hold a plurality of integrated circuits; a first plurality of transfer units, the first plurality of transfer units are configured Transferring one or more integrated circuits from the first package to the carrier; and a second plurality of transfer units configured to transfer one or more integrated circuits The carrier is located in the first position in one or more respective brackets of a second package, the carrier comprising a plurality of seats for receiving an integrated circuit, the carrier being configured for adjustment Each received integrated circuit assumes a predetermined orientation misalignment with the predetermined orientation.

The apparatus can include a second carrier for carrying a plurality of integrated circuits and moving the plurality of integrated circuits between the first package and a second position when the carrier is in the first position The first plurality of transfer units are configured to transfer one or more integrated circuits from the first package to the second carrier; the second plurality of transfer units are configured to transfer one or more a plurality of integrated circuits from the second carrier positioned in the second position to one or more respective brackets of the package, wherein the second carrier includes a plurality of seats for receiving an integrated circuit, the second The carrier is configured to adjust each received integrated circuit to assume whether a predetermined orientation occurs with the The predetermined orientation is out of alignment.

The second location can be adjacent to the first location.

When the first plurality of transfer units transfer one or more integrated circuits from the first package to the carrier, the second plurality of transfer units may transfer one or more integrated circuits from the second The second carrier is positioned to one or more of the respective brackets of the second package.

The first plurality of transfer units may be configured to adjust a pitch between the transfer units of the first plurality of transfer units.

a transfer unit of the first plurality of transfer units is configured to adjust the orientation of a transferred integrated circuit by rotating a longitudinal axis of the transfer unit relative to the first plurality of transfer units

The second plurality of transfer units can be configured to adjust a pitch between the transfer units of the second plurality of transfer units.

A transfer unit of the second plurality of transfer units is configured to adjust the orientation of the transferred integrated circuit by rotation relative to a longitudinal axis of the transfer unit of the second plurality of transfer units.

The second plurality of transfer units can be mounted on a replaceable head that can be separated from the device.

The transfer units of the second plurality of transfer units may be spaced apart by a fixed pitch.

The device can include an actuator coupled to a connector for coupling to the replaceable head, and the actuator can be configured to secure the replaceable head in position on the device and The replaceable head is released for removal from the device.

Each of the plurality of seats may include a side wall that is inclined in a manner to cooperate with gravity to orient an integrated circuit when the edge of the integrated circuit contacts the inclined portions It is assumed that the predetermined orientation is located in the seat.

Each of the plurality of seats may include a movable side wall to orient an integrated circuit for assuming the predetermined orientation in the seat.

The plurality of seats may include a seat for placing a defective integrated circuit.

Each of the plurality of seats may include a stepped portion around the circumference of the predetermined direction and the stepped portion is located at a leg portion of the inclined side walls.

The apparatus may further comprise one or more inspection stations for inspecting the integrated circuits, a holding station for holding the first package for transfer to the second package, and for processing the returned integrated circuit One of the return stations, and one or more inspection stations, the holding station, and the return station can be continuously arranged in a line manner.

The apparatus may further comprise one or more inspection stations for inspecting the integrated circuits; a holding station for holding the first package to transfer to the second package; and a processing unit for processing the returned a return station of the circuit; and one or more transfer mechanisms for transferring the integrated circuits between the stations, wherein each station can be disposed in a channel and resident one or more between the channels Transfer agencies.

The apparatus can further include a conveyor belt for moving the first package including one or more integrated circuits along the line.

The movement axis of the carrier and the transfer of the second plurality of the one or more integrated circuits from the carrier located in the first position to the one or more respective carriers in the second package The moving axes of the units are perpendicular to each other.

According to another aspect of the present invention, a packaging method for transferring an integrated circuit to a package is provided, the method comprising: using a carrier between a location of a first package and a first location to carry a complex product And a plurality of integrated circuit circuits, the first package being configured to hold the plurality of integrated circuits; using a first plurality of transfer units to More integrated circuits are transferred from the first package to the carrier; using a second plurality of transfer units to transfer one or more integrated circuits from the carrier located at the first location to a second Encapsulating one or more respective brackets, and using a carrier to adjust an integrated circuit received by the carrier to assume that a predetermined orientation is out of alignment with the predetermined orientation, the carrier comprising a plurality of seats Used to receive integrated circuits.

The method can include using a second carrier between the first package and a second location to carry a plurality of integrated circuits and moving the plurality of integrated circuits, the use of the carrier when the carrier is in the first position The first plurality of transfer units transfer one or more integrated circuits from the first package to the second carrier, and the second plurality of transfer units transfer one or more integrated circuits from the second position The second carrier to one or more of the respective carriers of the package, using one or more respective grippers of the second plurality of transfer unit packages, and adjusting the second carrier by using the second carrier Each of the received integrated circuits assumes a misalignment with the predetermined orientation assuming a predetermined orientation, wherein the second carrier includes a plurality of seats for receiving the integrated circuit.

The method can include, when the first plurality of transfer units transfer one or more integrated circuits from the first package to the carrier, using the second plurality of transfer units to one or more integrated circuits The second carrier positioned in the second position is transferred to one or more of the respective carriers of the second package.

The method can include adjusting a pitch between the transfer units of the first plurality of transfer units using the first plurality of transfer units.

The method can include adjusting to orient an integrated circuit that is shifted by a longitudinal axis of a transfer unit relative to the first plurality of transfer units.

2‧‧‧Transfer unit

3‧‧‧ Holding Station

5,13‧‧‧ Carrier Guides

6,12‧‧‧second package

8‧‧‧ first carrier

9‧‧‧second carrier

10‧‧‧Transfer unit

100‧‧‧Package

201‧‧‧Transfer unit

202‧‧‧pitch adjustment motor

203‧‧‧ suction cup

204‧‧‧pitch a

205‧‧‧ vertical axis

206‧‧‧ pneumatic cylinder

207‧‧‧Actuator

208‧‧‧Rack

209‧‧‧ pinion

210‧‧‧Motor

211‧‧‧Transfer unit

301‧‧‧First package/tray

302‧‧‧Integrated circuit

303‧‧‧ bracket

401‧‧13

402‧‧‧

403‧‧‧ side wall

404‧‧‧ corner

405‧‧‧round aperture

406‧‧‧step part

501, 502, 503‧‧‧

504‧‧‧flat bottom surface

505‧‧‧Bend edges

506‧‧‧Cylindrical flat bottom hole

507‧‧‧Axis

508‧‧‧ angle

601‧‧‧Transfer unit

602‧‧‧ pneumatic cylinder

603‧‧‧ suction cup

604‧‧‧pitch a

605‧‧‧ vertical axis

606‧‧‧Replaceable head

607‧‧‧Mechanical

608‧‧‧ pneumatic cylinder

700‧‧‧ layout

702‧‧‧Return to the station

703,705‧‧‧Checkpoint

704‧‧‧Inspection area

705‧‧‧Bottom inspection station

706‧‧‧ pick and place device

707‧‧‧ conveyor belt

708‧‧‧Tray

709‧‧‧First guiding member

710‧‧‧ bottom inspection area

711‧‧‧Second guiding member

712‧‧‧Buffer sorting device

713‧‧‧Unqualified tray

714‧‧‧Vertical axis/optical device

715‧‧‧Double detector

716‧‧‧ track

802‧‧‧ position

902‧‧‧ first position

903‧‧‧ horizontal axis

1002‧‧‧ vertical axis

1200‧‧‧ computer

1202‧‧‧Processing unit

1204‧‧‧Auxiliary keyboard

1208‧‧‧ display

1212‧‧‧Computer Network

1214‧‧‧ transceiver device

1218‧‧‧ processor

1220‧‧‧ Random access memory

1222‧‧‧Reading memory

1224‧‧‧I/O interface to the display

1226‧‧‧I/O interface to the keyboard

1228‧‧‧Interconnect bus

1230‧‧‧Data storage device

1232‧‧‧Wireless transceiver

1234‧‧‧Wireless communication enabling device

1236‧‧‧Computer mouse

1238‧‧‧I/O interface to computer mouse

1301‧‧‧Sleeve part

1302‧‧‧ bracket

1303‧‧‧Sleeve part

1304‧‧‧Top view

1305‧‧‧ bracket

1306‧‧‧ cross-sectional view

1307‧‧‧

1308‧‧‧Center vertical axis BB’

1309‧‧‧Axis AA’

1310‧‧‧pitch d

1311‧‧‧Width

1701, 1703‧‧‧ slots

1702, 1704‧‧‧ connectors

1802, 1804‧‧‧

2101‧‧‧

2102‧‧‧Additional seat

2103‧‧14

2104‧‧‧ side wall

2201‧‧ ‧ pitch

2300‧‧‧First package

2301‧‧‧Tray

2302‧‧‧pitch g

2303‧‧‧ bracket

2304‧‧‧Width f

2305‧‧‧Width c

2307‧‧‧Partial cross-sectional view

2308‧‧‧Axis AA’

2401, 2407‧‧‧ schema

2402‧‧‧ corner

2403‧‧‧ angle

2405‧‧‧ Length

2406‧‧‧孔口

2408‧‧‧flat bottom surface

2409‧‧‧Bend edges

2410‧‧‧Axis

Different specific embodiments of the invention will now be described, by way of example only, and with respect to the accompanying drawings, wherein:

Figure 1 shows a layout of a device for transferring an integrated circuit to a package.

Figure 2 is a perspective view of a first pick and place assembly in the device.

Figure 3 shows the transfer of a tray containing circuitry by the device.

Figure 4 shows a perspective view of a carrier in the device.

Figure 5 shows a top view, a perspective view and a cross-sectional view of a station in the carrier.

Figure 6 is a perspective view of a second pick and place assembly in the device.

Figure 7 shows a layout of the device along with the inspection station and a return station.

Figure 8 shows a layout of the device when the first pick and place assembly places the integrated circuit in a carrier.

Figure 9 shows a layout of the device as it moves toward a second transfer station.

Figure 10 shows a layout of the device when a second pick and place assembly picks up the integrated circuit on the carrier.

Figure 11 shows a layout of the device when the second pick and place assembly places the integrated circuit on a package strip.

Figure 12 shows a block diagram of one of the control units of the device.

Figure 13 shows a diagram illustrating a package strip.

Figure 14 shows a block diagram illustrating the first pick and place assembly.

Figure 15 shows a block diagram illustrating the second pick and place assembly.

Figure 16 shows an enlarged view of a portion of the first pick and place assembly.

Figure 17 shows an exploded view of the second pick and place assembly.

Figure 18 shows a side view of Figure 15.

Figure 19 shows an interchangeable head assembly of the second pick and place assembly.

Figure 20 shows a top view of a replaceable head assembly of the second pick and place assembly.

Figure 21 shows a perspective view of a second example of a carrier of the device.

Figure 22 shows a top view of a second example of a carrier of the device.

Figure 23 illustrates a second embodiment of a tray that includes circuitry for transfer by the apparatus.

Figure 24 shows a top view and a cross-sectional view of a seat in the second example of the carrier.

1 shows a first package for transferring a complex integrated circuit (also known as a wafer, a semiconductor wafer, a semiconductor unit, an integrated wafer, and the like) from a holding station 3 ( For example, a layout of the packaging device 100 in a position of 301 in FIG. 3 or 2300 in FIG. 23 to a second package 6 and/or 12. In this example, the first package is in the form of a tray (e.g., 301 in Figure 3). The second packages 6 and 12 enter a mandrel and are in a standard tape and reel package. Each of the first and second packages includes a plurality of brackets for holding the integrated circuit. It should be appreciated that other similar types of packages may be used, for example, the first package may be a standard tape package and the second package may be a tray. The first package and the second package may also be of the same type.

In this example, the example is capable of placing a plurality of integrated circuits in packages 6 and 12 at the same time. One of the limitations of existing devices for transferring integrated circuits from a first package to a second package is that high precision pitch and rotation adjustment means are required to be mated for placement in the second package during the transfer process. Each of the brackets is aligned upwardly to each integrated circuit. The high precision pitch and rotation adjustment device can include a visual guidance feedback mechanism for precision picking and alignment of the circuit. When the high precision pitch and rotation adjustment device pre-shifts the orientation of each circuit, more time is required to adjust each circuit. In terms of fast transfer operations, spending this adjustment time is one of the limiting factors. Furthermore, a high precision pitch and rotation adjustment device is complex and expensive in design. At the same time, it should be observed that the high precision pitch and rotation adjustment device cannot even completely compensate for the misalignment caused by the dimensional tolerances of the package of the first type and the package of the second type.

However, in Figure 1, the example allows for a random number of integrated circuits at high speeds. It is placed in the second package 6 or 12 at the same time. One factor used to accomplish this is to have a modular design. There are various kits available to support a simultaneous transfer of a higher number of circuits. Each of the kits includes a first carrier 8 and a second carrier 9 , and a first plurality of transfer units 2 are used to transfer the integrated circuits from the first position of the holding station 3 to the first carrier 8 Or a second carrier 9, and a second plurality of transfer units 10 for transferring the integrated circuits from the first carrier 8 or the second carrier 9 to the brackets of the second package 6 or 12. It should be appreciated that the apparatus 100 can be operated in conjunction with only one carrier to replace the two carrier operations. When the integrated circuit is transferred from the first package of the holding station 3 to the carrier 8 or 9 by the first plurality of transfer units 2, each carrier 8 or 9 has the capability to be placed in the second package. Each of the integrated circuits in one of 6 or 12 can be oriented.

In FIG. 1, the packages 6 and 12 are wound and guided by carrier guides 5 and 13, respectively. The packages 6 and 12 are pulled out by the carrier guides 5 and 13 to expose the hollow brackets or pockets of the packages 6 and 12 for use at a rate synchronized with the movement of the second plurality of transfer units 10. The integrated circuits are held such that the integrated circuits can be transferred from the first carrier 8 or the second carrier 9 to the empty carrier in the second package 6 or 12.

Referring to Figures 2 and 14, the first plurality of transfer units 2 in Figure 1 can be a pick-and-place assembly or a portion of a device having eight detectors or probes (also known as transfer units) With a pitch a 204, or more specifically, the longitudinal axes 205 of the detectors or probes are evenly spaced apart from each other by a distance a 204. It should be appreciated that the first plurality of transfer units 2 are expandable to support more or fewer detectors or probes. The first plurality of transfer units 2 are constructed in a modular fashion such that individual detectors or probes can be installed if a higher number of detectors or probes are required.

Each of the transfer units of the first plurality of transfer units 2 is for picking up an integrated circuit to be transferred. The first plurality of transfer units 2 are capable of automatically adjusting the pitch and include a pitch adjustment motor 202 for adjusting the distance of the pitch a 204 between each transfer unit 2. This instance Among them, all the transfer units located in the first complex transfer unit 2 have a similar configuration. One of the transfer units 2 is selected as a reference point or reference point for adjusting the pitch a 204. Typically, when facing the transfer unit 2, the rightmost or leftmost transfer unit is selected as a reference. In this example, the rightmost transfer unit 211 is a reference. There is another motor 210 (not shown in Figure 2 but shown in Figure 14) for moving the first plurality of transfer units 2 to pick up one or more products from the holding station 3 in Figure 1 A position of the body circuit and the transfer unit 2 for moving the first plurality to a position for placing the (equal) integrated circuit in the carrier 8 or 9. Each of the transfer units 2 representing the first plurality of transfer units, one of the transfer units 201 of FIGS. 2 and 14 has a suction cup 203 for adhesion, via suction (operating on a vacuum principle), to the integrated body A surface of the circuit to pick up the integrated circuit. The surface of the integrated circuit is exposed when it is tethered in the first package at the holding station 3 in FIG. The suction cup 203 is generally a well known vacuum tip and is made of plastic or other suitable material. The placement of an integrated circuit is accomplished by performing a purge through the suction cup 203 to release the suction. After being purged, the integrated circuit will fall from the suction cup 203 onto a desired surface on which the integrated circuit is to be placed.

Moreover, each suction cup 203 is rotatable relative to its longitudinal axis 205 to adjust the orientation of the integrated circuit it carries. It is rotatable by a pneumatic cylinder 206 connected to the pinion 209 and the pinion 209. It will be appreciated that this rotation can also be accomplished by the use of a motor that joins the appropriate mechanical components. Furthermore, each of the transfer units of the first plurality of transfer units 2 is represented by a transfer unit 201 having an actuator 207 (each transfer unit having such an actuator 207) mounted above the suction cup 203. The transfer unit 201 is moved in a direction along the longitudinal axis 205. The transfer unit 201 is disabled by the actuator 207 by the actuator 207 by the mobile transfer unit 201 from an elongated configuration (operating) to a storage configuration.

Figure 16 is an enlarged view of the transfer unit 201, showing the pneumatic cylinder 206, the rack 208 and the pinion 209 more clearly. The pneumatic cylinder 206 is coupled to the rack 208 And the movement of the rack 208 is determined by how the pneumatic cylinder 206 is actuated. The rack 208 is coupled to the pinion 209 and is arranged to rotate the pinion 209 when the pneumatic cylinder 206 pulls the rack 208 or when the pneumatic cylinder 206 pushes the rack 208 accordingly. The pinion 209 is coupled to the suction cup 203 and is arranged to rotate the suction cup 203 as the rack 208 is pulled or pushed by the pneumatic cylinder 206. The rack 208 and the pinion 209 include tooth portions for engaging with each other and for converting the linear motion of the pneumatic cylinder 206 into a rotary motion for rotating the suction cup 203, which is sequentially rotated by the suction cup 203. An integrated circuit picked up.

Although the first plurality of transfer units 2 are capable of automatically setting the pitch and changing the orientation of the integrated circuit, it is still necessary to perform precise pitch adjustment of the integrated circuit by means of the adjustment capabilities of the carriers 8 and 9. .

It should be understood that the configuration of the first plurality of transfer units 2 is not limited to the examples disclosed herein. Other similar configurations are possible.

Referring to FIG. 3, the first package at the holding station 3 in FIG. 1 is a tray 301 having a plurality of brackets 303. The plurality of brackets 303 are an array having a predetermined number of columns and rows (i.e., three brackets and seven rows of brackets in one column for a total of 21 brackets). Each of the brackets may include an integrated circuit 302 that is generally shaped as a square or rectangle having a width a and a length b. In FIG. 3, the integrated circuit 302 will be oriented such that its top surface is exposed when placed in the first package of the holding station 3. It should be appreciated that the integrated circuit 302 can also be oriented such that its bottom surface is exposed.

Referring to Figure 23, there is another example of the first package shown in Figure 1 at the holding station 3. In this example, the first package is a tray 2301 having a plurality of brackets 2303 (only one is shown in FIG. 23), and more specifically, 14 brackets and 27 rows in one column. Racks (ie, a total of 378 brackets). Therefore, the tray 2301 holds 14 integrated circuit units in one column. Figure 23 further shows an axis AA' parallel to the tray 2301 of each column. A partial cross-sectional view 2307 of the tray 2301 taken by 2308. As shown in FIG. 23, each of the carriers 2303 is included in the integrated circuit 302 of FIG. In this example, the integrated circuit 302 has a width c 2305 of 4.0 +/- 0.1 mm. Each bracket has a width f2304 of 4.2 +/- 0.08 mm. The pitch g 2302 is 9.2 +/- 0.1 mm between the centers of the two brackets in the tray 2301.

The packages 6 and 12 are further illustrated in FIG. Figure 13 shows a top view 1304 of a portion of the strip 1307 of the second package 6 or 12, a second taken along a central longitudinal axis BB' 1308 of the portion of the strip 1307 of the second package 6 or 12. A cross-sectional view of the portion of the strip 1307 of the package 6 or 12 and the axis AA'1309 perpendicular to a central longitudinal axis BB' 1308 of the portion of the strip 1307 of the second package 6 or 12 A cross-sectional view 1306 of one of the partial strips 1307 of the second package 6 or 12. The axis AA'1309 cuts through a bracket 1305 of the second package 6 or 12. The partial strip 1307 has a row of brackets 1302 that are evenly spaced from one another. Each of the brackets 1302 is for containing an integrated circuit as in 302 of FIG. The row of brackets 1302 has two sleeve portions 1301 and 1303 extending away from the brackets 1302 along the length of the partial strips 1307. The sleeve portions 1301 and 1303 respectively include a plurality of apertures that are evenly spaced along the length of the portion of the strip 1307. The plurality of holes are used to move or position the second package 6 or 12 in FIG. 13, the bracket 1305 having a width of 13.35 +/- 0.01 mm 1311 (labeled in another bracket in FIG. 13) on). The pitch d 1310 between the centers of the two brackets in the second package 6 or 12 is 8.0 +/- 0.1 mm.

The first carrier 8 in Figure 1 is shown in Figure 4. The second carrier 9 in Figure 1 looks similar to the first carrier 8 and the following description will be used for the configuration of the second carrier 9. In FIG. 4, the first carrier 8 includes a plurality of 13 seats 401 arranged in a line. Each of the blocks, for example 402, is a recess in the first carrier 8 for receiving the first package from the holding station 3 of FIG. 1 by the first plurality of transfer units 2 of FIG. Transfer to an integrated circuit of the carrier 8. detailed In other words, each of the blocks, such as 402, is a depression which is generally a square or rectangular shape having four side walls 403. The side walls 403 are inclined in a manner to cooperate with gravity when the edge of the integrated circuit (e.g., 302 in Fig. 3) contacts the inclined portion to orient an integrated circuit (e.g., 302 in Fig. 3) and A predetermined or desired placement orientation is assumed in the block 402. If the integrated circuit (e.g., 302 in Fig. 3) is placed in the correct orientation by the first plurality of transfer units 2, then the edge of the integrated circuit (e.g., 302 in Fig. 3) is contacted. There is no directional compensation provided by the inclined portions when tilting the portion. The desired orientation ensures optimal alignment of the second plurality of transfer units 10 for transferring the integrated circuits from the first carrier 8 or the second carrier 9 to the second package 6 or 12 of these brackets.

FIG. 5 shows details of one example of the seat 402 of FIG. The block 402 is a representative drawing of all the seats in the carrier 8 of FIG. FIG. 5 has three other figures 501, 502, and 503 illustrating the seat 402 in detail. This first pattern 501 shows a perspective view of the seat 402. The seat 402 is generally rectangular in shape and includes a flat bottom surface 504, the four inclined side walls 403 of FIG. 4, four corners 404 of FIG. 4, a centrally located circular aperture 405 and four. A stepped portion 406 is disposed at the foot of each of the four inclined side walls 403 (positioned within the seat 402).

Figure 502 is a top view of the concave portion of the seat 402. Depending on the size of the integrated circuit (e.g., 302 in FIG. 3) to be transferred by the apparatus 100 of FIG. 1, the size of the block 402 may be adapted to include a length of 8.1 mm (with a length tolerance range of approximately It is from +0.01 mm to +0.03 mm; the width of the four inclined side walls 403 is not included) and a width of 7.5 mm. It should be noted that the length of 8.1 mm should not have a negative tolerance. Each of the four corners 404 can be formed with a curved edge 505 instead of a sharp corner. Each of the four corners 404 can be shaped as a cylindrical flat bottom aperture 506 having a diameter of about 2 mm and a depth of 1.6 mm (shown more clearly in Figure 503). The purpose of the cylindrical flat bottom aperture 506 is to facilitate processing of the seat 402 during fabrication of the first or second carrier 8 and 9. The cylindrical flat bottom hole In various aspects of the depth of 506, the curved edge 505 of each corner 404 is part of the surface area of the cylindrical flat bottom aperture 506. The four inclined side walls 403 are not encompassed within the volume of the cylindrical flat bottom aperture 506. The orifice 405 can be a circular through hole having a diameter of 1.5 mm and a diameter tolerance of -0.006 mm. The aperture 405 is for releasing air pressure when an integrated circuit is dropped or placed on the seat 402.

Figure 503 shows a cross-sectional view of the seat 402 taken along an axis A-A of the drawing 502 through which the center of the opening 405 is cut. An angle 508 is shown in diagram 503. The angle 508 is indicative of a range of tilt of each of the four angled sidewalls 403. The angle 508 is formed relative to a shaft 507 that is perpendicular to the flat bottom surface 504 of the seat 402. In the example of the diagram 503, the angle 508 is 25 degrees. It should be appreciated that other suitable angles may be used provided that an adjustment or alignment occurs when an integrated circuit is placed on the seat 402. The slope of the four side walls 403 must be sufficiently steep to allow the edge of a slightly misaligned integrated circuit disposed into the seat 402 to slide over the inclined portions under the force of gravity and by following the contour of the inclined portion of the four side walls 403. Adjust its orientation.

Each of the four stepped portions 406 positioned at the foot of each of the four respective inclined side walls 403 in the example of the drawing 503 is about 0.20 mm. The stepped portions 406 (i.e., the stepped portions) surround the circumference of the desired mounting arrangement (i.e., predetermined orientation) of the integrated circuit in the seat 402. When the integrated circuit (e.g., 302 in Fig. 3) is held in a desired orientation in the block 402, it is generally a square or rectangular shaped integrated circuit (e.g., 302 in Fig. 3). The four sides can be confined by the walls 403 of the stepped portions 406. The stepped portions 406 also prevent any unacceptable movement of the integrated circuit in the seat 402. The integrated circuit can be completely disposed within the area bounded by the wall 403 of the stepped portion 406 in terms of accurately placing an integrated circuit into the seat 402.

It should be noted that the four inclined side walls 403 of the seat 402 can be configured to be movable. It is used to adjust an integrated circuit that is placed into the socket 402 such that the integrated circuit is oriented for a predetermined orientation in the seat 402. Suitable mechanisms and configurations are required to move the walls 403. For example, the four inclined side walls 403 can be mounted to one or more pneumatic cylinders that are driven to push or remove the walls individually or independently from the first carrier 8 of FIG. Or an integrated circuit in an area on the second carrier 9 exits. The integrated circuit is properly aligned by being guided by the push provided by the walls.

Referring to Figures 6 and 15, the second plurality of transfer units 10 in Figure 1 is part of a second pick-and-place assembly or device having eight detectors or probes interposed therebetween. The pitch a 604 is located, or more specifically, the longitudinal axes 605 of the detectors or probes are evenly spaced apart from each other by a distance a 604. It will be appreciated that the second plurality of transfer units 10 are expandable to support more or fewer detectors or probes. The second plurality of transfer units 10 are attached to a replaceable head 606. The replaceable head 606 has a fixed number of detectors or probes (i.e., the transfer units) that are spaced apart by a fixed pitch. If there is a need for a higher or lower number of detectors or probes, the replaceable head 606 can be replaced with another replaceable head having a different number of detectors or probes. The replaceable head 606 can also be replaced with another replaceable head having a different pitch a 604 value between the detectors or probes. Moreover, the replaceable head 606 can be snapped onto the mechanism 607 that drives the second plurality of transfer units 10.

17 through 20 illustrate that the replaceable head 606 can be detachably mounted to the machine 607 that drives the second plurality of transfer units 10.

With respect to Figures 6 and 17 to 20, the machine 607 includes two pneumatic cylinders 602 and 608 (i.e., actuators) for assisting in securing the replaceable head 606 to the second plurality of transfer units. 10 mechanical 607. Generally, the pneumatic cylinders 602 and 608 are configured to secure the interchangeable head 606 in position on the device 100 of FIG. 1 and to release the replaceable head. Portion 606 is removed from the device 100 of FIG. It should be appreciated that in another example one, rather than two, pneumatic cylinders or more than two pneumatic cylinders may be used.

The two connectors 1702 and 1704 are respectively movable under the control of the two pneumatic cylinders 602 and 608. Each of the connectors 1702 and 1704 is an elongated structure (i.e., generally cylindrical in this example) coupled to the pneumatic cylinders 602 and 608 at one end, respectively. The other ends of the connectors 1702 and 1704 are configured to be received by two slots 1701 and 1703 respectively disposed on the interchangeable head 606. The connectors 1702 and 1704 each have a narrower diameter section 1802 and 1804 that are configured to fit into the slots 1701 and 1703, respectively. Each of the slots 1701 and 1703 has an open end that is sufficiently large to receive the segments 1802 and 1804, respectively. However, the open ends of the slots 1701 and 1703 are not capable of accepting any other portions of the connectors 1702 and 1704 except at the sections 1802 and 1804, respectively.

The pneumatic cylinders 602 and 608 and the respective connectors 1702 and 1704 are located at opposite sides of the machine 607. Therefore, the two receiving slots 1701 and 1703 are located at opposite sides of the replaceable head 606 below the pneumatic cylinders 602 and 608.

The replaceable head 606 is moved by first inserting the segments 1802 and 1804 into the slots 1701 and 1703 and thereafter actuating the pneumatic cylinders 602 and 608 to remove the connectors 1702 and 1704. Fixed to the pneumatic cylinders 602 and 608. To release the replaceable head 606, the pneumatic cylinders 602 and 608 are actuated to extend the connectors 1702 and 1704. As with the configuration described with respect to Figures 6 and 17 to 20, an advantage is that the replaceable head 606 can be quickly detached, removed and replaced with a new head, for example having different pitches and transfer units 2 The number is replaced.

In Figures 6 and 15, each of the second plurality of transfer units 10 is for picking up an integrated circuit to be transferred. In this example, the second plurality of transfer units 10 All of the transfer units in the same have a similar construction. Having another motor (not shown in Figures 6 and 15) for moving the second plurality of transfer units 10 to a position to pick up one or more from the first carrier 8 or the second carrier 9 in Figure 1 An integrated circuit, and an integrated circuit for picking up (equal) picks up to the second package 6 or 12. Representing each of the transfer units 10 of the second plurality, the transfer unit 601 of the second plurality of transfer units 10 has a suction cup 603 which is adhered to a surface of the integrated circuit via suction Pick up the integrated circuit. The surface of the integrated circuit is exposed when it is placed in the carrier 8 or 9. The construction and operation of the suction cup 603 is similar to the suction cup 203 of FIG.

It should be appreciated that this configuration in the second plurality of transfer units 10 is not limited to the example disclosed herein. It should be further appreciated that the second plurality of transfer units 10 may alternatively have the same configuration as the first plurality of transfer units 2 of FIG. That is, the second plurality of transfer units 10 may be configured to complete the adjustment of the pitch between the transfer units of the transfer unit 10 of the second plurality and the transfer unit 10 of the second plurality Or more transfer units may be configured to complete the adjustment to orient the transferred integrated circuit by rotation relative to a longitudinal axis of one or more of the transfer units 10 of the second plurality of transfer units 10 . Other similar configurations are also possible.

The misalignment or misalignment of an integrated circuit, or, in other words, the variation of the integrated circuit and a desired pitch and orientation for packaging is caused by the following problems. This list is not exhaustive.

1) A variation in the dimensional tolerance of the pitch a 204 of the first or second plurality of transfer units 2, 10 in FIG.

2) a change in the dimensional tolerance of the mechanical portion of the transfer unit 2, 10 of the first or second plurality of elements in Fig. 3, which may result in a defective orientation adjustment of the integrated circuit or a misalignment in the picking action. .

3) The change in the dimensional tolerance of the seat 402 and the first carrier 8 or the second carrier 9 in FIG.

4) Variations in the dimensional tolerance of the first package (e.g., 301 in Figure 3) and the second package 6 or 12 and its carrier.

This arrangement and configuration of the device 100 in Figure 1 attempts to address some or all of the above problems in conjunction with the use of the first carrier 8 and the second carrier 9.

7 shows a layout 700 of the apparatus 100 of FIG. 1 when it is used in conjunction with two inspection stations 703, 705 and a return station 702 for processing a failed integrated circuit.

In the apparatus 100 of FIG. 1, the holding station 3 is located between the retreating station 702 and a inspection area 704. The inspection area includes two inspection stations, that is, a top inspection station 703 is used. Verifying top-down defects and/or 2-dimensional or 3-dimensional measurements of one or more integrated circuits (according to the test setup made), and a bottom inspection station 705 for testing the bottom of one or more integrated circuits Defects and/or 2D or 3D measurements (according to the test settings made). Operating a conveyor belt 707 to move a tray 708 containing integrated circuits in the direction (i.e., similar to the first package in the holding station 3 of Figure 1 and 301 in Figure 3) by the bottom inspection Station 705 to the return station 702. The tray 708 (i.e., a first package) can be moved in this order by the conveyor belt 707 through the vicinity of the bottom inspection station 705, after the top inspection station 703, the holding station 3 and finally pass the The neighborhood of the station 702 is returned.

In this example, the bottom inspection station 705, the top inspection station 703, the holding station 3, and the return station 702 are arranged in a sequential manner in a straight line. The conveyor belt 707 includes a flat track having a pair of rails 716 and a pair of double detectors 715 for holding on opposite sides of the tray 708, respectively. The dual detectors 715 are driven by a motor (not shown in Figure 7) along with the arrangement of the bottom inspection station 705, the top inspection station 703, the holding station 3, and the return station 702. A longitudinal axis 714 of the line parallel to the movement moves the tray 708. It should be known that the loss This configuration of the feed belt 707 is not necessarily limited to the example disclosed herein. Other similar configurations are possible.

It should be appreciated that in another example, the bottom inspection station 705, the top inspection station 703, the holding station 3, and the return station 702 can be separately disposed in dedicated channels (not shown in the drawings) ). Each dedicated channel can have a pair of rails for a straight track (similar to 716 in Figure 7) and a pair of dual detectors (similar to 715 in Figure 7) for holding the trays separately ( Similar to the 708 in Figure 7) on the opposite side. One or more pick and place assemblies (also known as a transfer mechanism) similar to the first plurality of transfer units (2 in FIG. 1) may be provided to reside at the bottom inspection station 705, the top inspection The station 703, the holding station 3 and the dedicated channel of the return station 702. The one or more pick and place assemblies are used to transfer the integrated circuits between the stations. At each station, the one or more pick and place assemblies can transfer the entire tray (similar to 708 in Figure 7) and/or the one or more pick and place assemblies can be individually or in groups The mode transfers the integrated circuits from one tray or from one holding tool to another tray or holding tool.

When the conveyor belt 707 has moved the pallet 708 to the bottom inspection station 705, a pick and place device 706 is actuated to pick up the integrated circuits from the tray 708. The pick and place device 706 moves the integrated circuits picked up along one of the longitudinal axes of a first guiding member 709 toward a bottom inspection region 710 of the bottom inspection station 705 for inspection and along the inspection. The same longitudinal axis of the first guiding member 709 moves the integrated circuits back to the tray 708 from the bottom inspection region 710. The pick and place device 706 includes a plurality of detectors (not shown in Figure 7). Each detector is used to pick up an integrated circuit to transfer between the bottom inspection region 710 and the tray 708. The bottom inspection region 710 includes an optical device (not shown in Figure 7) for capturing images of the integrated circuits that have been inspected for defects. A transparent glass sheet may be included where an integrated circuit is placed or only appears and not placed on top of the glass sheet for inspection. One or more optical devices may be positioned under the transparent glass sheet for capturing the integrated circuit placement or appearing in the transparent The bottom of the glass piece.

The top inspection station 703 includes an optical device 714 that is movable along a longitudinal axis of a second guiding member 711 for capturing a tray 708 when the conveyor belt 707 moves the tray 708 to the top inspection station 703. The image of the integrated circuit in the test is for inspection. It should be appreciated that the top views of the integrated circuits located in the tray are exposed. In the example of FIG. 7, the conveyor belt 707 moves the tray 708 to the holding station 3 after the top inspection is completed.

If a defective integrated circuit is found at the inspection stations 703 and 705, a computer (not shown in FIG. 7) connected to the inspection stations 703 and 705 will be updated in the tray. Information on the location of the integrated circuit. This information can be used by the holding station 3 to activate the first plurality of transfer units 2 of FIG. 1 to transfer all of the defect-free integrated circuits to the second package 6 or 12. The remaining integrated circuit in the tray should be defective.

After all of the defect free integrated circuits have been removed from the tray 708, the conveyor belt 707 moves the tray 708 to the return station 702. The return station 702 includes a buffer sorting device 712, which may be in the form of a robot arm or a detector for picking up the (or other) surplus integrated circuit in the tray 708 and transferring it to a no Qualified tray 713.

In more detail, the following is the operation of the example shown in FIG.

The tray 708 first loads the integrated circuit for inspection and transfers to the second package 6 or 12 of FIG. The conveyor belt 707 then moves the tray 708 toward the pick and place device 706 in one direction.

The pick and place device 706 picks up a plurality of integrated circuits and moves along the longitudinal axis of the first guiding member 709 to the bottom inspection region 710. At the bottom inspection region 710 after inspection, the plurality of integrated circuits are moved back from the bottom inspection region 710 by the pick and place device 706 back into the tray 708. The pick and place device 706 is moved between the position of the tray 708 and the position of the bottom inspection region 710 along the longitudinal axis of the first guiding member 709 for picking up a plurality of digits located in the tray 708 Integrated circuit for the bottom inspection area At 710, the inspection is continued until all of the integrated circuits in the tray have been verified at the bottom inspection station 705. It should be appreciated that the pick and place device 706 can also transfer only an integrated circuit for inspection by the bottom inspection station 705.

After the integrated circuits in the tray 708 have been verified at the bottom inspection station 705, the conveyor belt 707 moves the tray 708 in a direction toward the optical device 714. The optical device 714 moves over the tray 708 along the longitudinal axis of the second guiding member 711 for verifying all of the top surfaces of the integrated circuits within the field of view of the optical device 714. The field of view of the optical device 714 can include one or more columns of trays in the tray 708. The conveyor belt 707 can be configured to position the tray 708 (ie, move the tray 708 step by step) for alignment with the top surfaces of one or more integrated circuits to fit the optical device 714 The field of view is used to capture images of the top surfaces of one or more integrated circuits. The captured images are then processed for defect analysis. The top surface inspection is terminated after the optical device 714 has captured the images of all of the required integrated circuits in the tray 708 required for each defect analysis of the integrated circuit.

After the integrated circuits have been verified at the top inspection station 703 in the tray 708, the conveyor belt 707 moves the tray 708 in a direction toward the holding station 3. At the holding station 3, the non-defect integrated circuits determined by the bottom inspection station 705 and the top inspection station 703 are then transferred to the second package 6 or 12 of FIG. The details of the transfer to the second package 6 or 12 will be covered later. Thereafter, the returned integrated circuit remaining in the tray 708 is moved to the buffer sorting device 712 by the conveyor belt 707. The returned integrated circuits in the tray 708 are then transferred to the reject tray 713 for cleaning or for any other purpose.

The operation of the apparatus 100 for transferring an integrated circuit to a package in FIG. 1 is described below with respect to FIGS. 1, 7 through 11. 1, 8 to 11 illustrate the movement of the same device 100.

After the integrated circuits have been verified at the top inspection station 703 in the tray 708, the conveyor belt 707 moves the tray 708 in a direction toward the holding station 3. In this hold At station 3, the first plurality of transfer units 2 pick up the non-defect integrated circuits determined by the bottom inspection station 705 and the top inspection station 703 and transfer them from the tray 708 to the first in FIG. A package 8.

In the example of FIGS. 1, 7 to 11, the first carrier 8 and the second carrier 9 are configured to be alternately moved to a position 802 in FIG. 8 that is sufficiently close to the holding station 3 for the The first plurality of transfer units 2 pick up the defect-free integrated circuit from the tray 708 of the holding station 3 and transfer it to the first carrier 8 or the second carrier 9 at the position 802. Either. More specifically, the first carrier 8 and the second carrier 9 are moved to a position adjacent to each other at the position 802. 1 shows the situation when the first plurality of transfer units 2 pick up a defect-free integrated circuit from the tray 708 of the holding station 3 for transfer to the first carrier 8, which is moved to approach the position 802. .

Figure 8 shows the case where the first plurality of transfer units 2 place the non-defect integrated circuits picked up from the tray 708 as shown in Figure 1 into the first carrier 8. When the first carrier 8 and the second carrier 9 are capable of finely adjusting the placement orientation of the integrated circuits, if a misalignment with the predetermined placement orientation occurs, one of the seats is placed (for example, in the figure) A defect free integrated circuit of 402 in 4 can be guided by the self-adjusting design of the seat (e.g., 402 in FIG. 4) to adjust its placement to the predetermined placement orientation. If one of the transfer units of the first plurality of transfer units 2 held on the defect-free integrated circuit is slightly misaligned so that the defect-free integrated circuit cannot be accurately placed into the first carrier 8 or a seat of the second carrier 9 (e.g., 402 in FIG. 4), the defect-free integrated circuit can be adjusted, aligned or oriented to be placed in the predetermined orientation. The first carrier 8 or the second carrier 9 can be adapted to be placed into the first carrier 8 or the second carrier 9 by the first plurality of transfer units 2 when each defect-free integrated circuit 2 is The deviation of the small pitch and angle at each seat is compensated.

In order to have better accuracy in placing the integrated circuit into the first carrier 8 or the second carrier 9, the first plurality of transfer units 2 can be organized for pitch adjustment, The integrated circuit is matched with the shape of the first carrier 8 or the second carrier 9 before being placed in the first carrier 8 or the second carrier 9. The first carrier 8 or the second carrier 9 can then be placed into the first carrier 8 or the second carrier 9 by the first plurality of transfer units 2 when the non-defective integrated circuits are placed. The deviation of the small pitch and angle of a different seat is compensated.

After placing the integrated circuits into the first carrier 8 as shown in FIG. 8, the first carrier 8, in this example, is along an axis, in particular, in FIG. 9, relative to FIG. And a horizontal axis 903 of 8 to 11 (that is, the moving axis of the first carrier 8) linearly moves to a first position 902 in FIGS. 9, 10 and 11 for holding on the first carrier 8 The integrated circuit in is transferred to the package 6 or package 12. The packages 6 and 12 are located a distance away from the first location 902 for transferring the integrated circuitry held in the first carrier 8 to the package 6 or package 12.

10 shows that when the first carrier 8 is in the first position 902, the second plurality of transfer units 10 are actuated to pick up the integrated circuits from the first carrier 8 to the second package 6. Or 12.

In the example illustrated by Figures 1 and 8 to 11, the second plurality of transfer units 10 are organized along an axis, in particular, with respect to Figures 1 and 8 through 11 in Figure 10 The vertical axis 1002 of the horizontal axis 903 in FIG. 9 is vertical (ie, the moving axis of the second plurality of transfer units 10 is used to transfer the first carrier 8 or the second carrier 9 at the first position 902 One or more integrated circuits are linearly moved in position on one or more respective carriers of the second package 6 or 12 to the second package 6 or 12 located away from the first position 902 .

Figure 11 shows that the second plurality of transfer units 10 are actuated to place or lower the integrated circuits picked up by the first carrier 8 at position 902 in the holder of the package 6. in. The package 6 has been wound and straightened for placement of the integrated circuit into its holder by suitable mechanical means. A conventional machine for the same purpose can be used.

It will be appreciated that the second plurality of transfer units 10 can be organized to transfer the integrated circuits from the first carrier 8 to the package 12 rather than from the first carrier 8 to the package 6. A possible configuration is the sequence of operations with the following steps.

Step 1: The first carrier 8 is moved to a position 802 close to the holding station 3.

Step 2: The first plurality of transfer units 2 transfer one or more integrated circuits from the holding station 3 to the first carrier 8. The second plurality of transfer units 10 are moved back to the position 902 at the same time or any time after the second plurality of transfer units 10 have placed the integrated circuit in the second package 6 or 12.

Step 3: After the transfer is completed by the first plurality of transfer units 2 in step 2, the first carrier 8 including one or more transferred integrated circuits is moved to the position 902.

Step 4: The second plurality of transfer units 10 transfer one or more integrated circuits to the package 6 from the first carrier 8 at the location 902. At a time after the second plurality of transfer units 10 have picked up one or more integrated circuits from the second carrier 9, or at any time, the second carrier 9 is moved to the vicinity of the holding station 3. Location 802.

Step 5: The first plurality of transfer units 2 transfer one or more integrated circuits from the holding station 3 to the second carrier 9. The second plurality of transfer units 10 are moved back to the position 902 at the same time or any time after the second plurality of transfer units 10 have placed the integrated circuit in the second package 6 or 12.

Step 6: After the transfer is completed by the first plurality of transfer units 2 in step 5, the second carrier 9 containing one or more transferred integrated circuits is moved to the position 902.

Step 7: The second plurality of transfer units 10 transfer one or more integrated circuits to the package 12 from the second carrier 9 at the location 902. In the second plurality of transfer units 10 have been The first carrier 8 is moved to the position 802 of the holding station 3 at the same time or any time after the first carrier 8 picks up one or more integrated circuits.

After step 7, steps 1 through 7 are repeated until the device 100 is powered off.

It will be appreciated that the second plurality of transfer units 10 in step 7 may alternatively transfer one or more integrated circuits from the second carrier 9 at the location 902 to the package 6. Similarly, in step 4, the second plurality of transfer units 10 may alternatively transfer one or more integrated circuits from the first carrier 8 at the location 902 to the package 12.

It should be further observed that the device 100 can in each case have only one carrier 8 or 9 operating under its operation. Referring to Figures 21 and 22, another example of the first carrier 8 of Figure 1 is shown. The second carrier 9 in Figure 1 can also have the same construction. It should be noted that in this example the carrier 8 is constructed to operate in conjunction with the tray 2301 of Figure 23 and the second package 6 or 12 as illustrated in relation to Figure 13. In Figures 21 and 22, the first carrier 8 comprises a plurality of 14 seats 2103 arranged in a row. Each of the blocks, for example 2101, is a recess in the first carrier 8 for receiving the transfer from the first package of the holding station 3 in FIG. 1 by the first plurality of transfer units 2 in FIG. An integrated circuit to the carrier 8. More specifically, each seat, such as 2101, is a recess that is generally square or rectangular in shape with four side walls 2104 (only one wall is shown in Figure 21). The side walls 2104 are inclined in a manner to cooperate with gravity when the edge of the integrated circuit (e.g., 302 in FIG. 3) contacts the inclined portion to orient an integrated circuit (e.g., 302 in FIG. 3) and A predetermined or desired placement orientation is assumed in the seat 2101. If the integrated circuit (e.g., 302 in Fig. 3) is placed in the correct orientation by the first plurality of transfer units 2, then the edge of the integrated circuit (e.g., 302 in Fig. 3) is contacted. There is no directional compensation provided by the inclined portions when tilting the portion. The desired orientation ensures optimal alignment of the second plurality of transfer units 10 for transferring the integrated circuits from the first carrier 8 or the second carrier 9 to the second in FIG. The brackets of the package 6 or 12. In this example, they are arranged next to each other. The pitch 2201 of the two of the plurality of seats 2103 is 8 mm.

In Figures 21 and 22, there is an additional seat 2102, i.e., a 15th seat positioned at a distance of 14 seats 2103 arranged in line along the carrier 8. The 15th seat 2102 is an integrated circuit for processing defects. If the package 6 or 12 of FIG. 1 performs a visual inspection and finds that there is a defective integrated circuit in the package 6 or 12, an additional one or more detectors or probes can be actuated. The mechanical arm member (not shown in the drawings) is used to pick up the defective integrated circuit and place it into the 15th seat 2102.

If the carrier 8 returns to the position 802 in FIG. 8 or the position 902 in FIG. 9, another mechanical arm member or the additional mechanical arm member (not shown in the drawings) can be picked up by the 15th seat 2102. The defective integrated circuit is placed back into the first package of FIG. 7, for example, the tray 708.

Figure 24 shows details of an example of the seat 2101 of Figure 21. Figure 24 has two separate figures 2401 and 2407 illustrating the seat 2101 in detail. The seat 2101 is representative of all of the seats in the carrier 8 of FIG.

The first pattern 2401 shows a top view of the recessed portion of the seat 2101. The seat 2101 is generally in the shape of a square and includes a flat bottom surface 2408, the four inclined side walls 2104, four corners 2402 in Fig. 21, and a circular aperture 2406 disposed at the center. Depending on the size of the integrated circuit (e.g., 302 in Figure 3) transferred by the apparatus 100 of Figure 1, the suitable size for the seat 2101 may include a length of 4,10 mm 2405 (length tolerance) The position is in the range of about +0.01 to +0.03 mm; the width of the four inclined side walls 2104 is not included). It should be noted that the length of the 4.10 mm 2405 should have no negative tolerance. Each of the four corners 2402 can be formed with a curved edge 2409 instead of a sharp corner. Each of the four corners 2402 can be shaped as a cylindrical flat bottom aperture having a diameter of about 1.5 mm and a depth of 1.6 mm. The purpose of the cylindrical flat bottom hole is to facilitate the processing of the seat 2101 during the fabrication of the first or second carriers 8 and 9. The curvature of each corner 2402 in the entire depth of the cylindrical flat bottom hole Edge 2409 is part of this surface area of the cylindrical flat bottom aperture. The four sloping sidewalls 2104 are not encompassed in the volume of the cylindrical flat bottom aperture. The orifice 2406 can be a circular through hole having a diameter of 1.5 mm and having a diameter tolerance of -0.006 mm. The aperture 2406 is for releasing air pressure when an integrated circuit is dropped or placed into the seat 2101.

2407 shows a cross-sectional view of the fifteenth seat 2102 of FIGS. 22 and 22 taken along an axis D-D of FIG. 22, cut through the center of the aperture 2406. It should be noted that the structure of the fifteenth seat 2102 in FIG. 21 is similar to the structure of the seat 2101. An angle 2403 is shown in Figure 2407. The angle 2403 is indicative of the range of tilt of each of the four inclined side walls 2104. The angle 2403 is formed relative to a shaft 2410 that is perpendicular to the flat bottom surface 2408 of the seat 2102 or 2101. The angle 2403 in this example of Figure 2407 is 30 degrees. It should be appreciated that other suitable angles may be used provided that adjustment or alignment occurs when an integrated circuit is placed into the seat 2102 or 2101. The inclined portion of the four side walls 2104 must be sufficiently steep to allow the edge of a slightly misaligned integrated circuit disposed into the seat 2102 or 2101 to slide over the inclined portions under the force of gravity and by following the four side walls 2104 The outline of the portion is tilted to adjust its orientation. The length from the end to the end of the square seat 2102 or 2101 is about 5.49 mm, including the width of the sloped portion of the four side walls 2104.

It will be appreciated that the dimensions of the carriers 8 or 9, including the dimensions of the seats, may be sized in a manner to accommodate the dimensions of a particular type of integrated circuit.

The particular relationship that can be derived from the dimensions provided in Figures 13, 21 to 24 should ideally be as e (1311 in Figure 13) > f (2304 in Figure 23) > c (in Figure 23) 2305) relationship. The apparatus 100 of Fig. 1 attempts to solve the misalignment of the integrated circuit which occurs when e (1311 in Fig. 13) is less than or equal to f (2304 in Fig. 23). In this configuration of the apparatus 100, e (1311 in Fig. 13) should be constructed to have a size greater than f (2304 in Fig. 23) and f (2304 in Fig. 23) should have greater than c (2305 in Fig. 23). )size of.

Furthermore, the device 100 of Figure 1 includes a control unit (not shown in Figure 1). The control unit can be a computer 1200, shown diagrammatically in FIG. 12, or more than one of the computers 1200. For more than one such computer, the computers can be connected to each other via technologies such as Ethernet or similar. Software may be provided, such as one or more computer applications, programs, or subroutines executed in the computer 1200, and the computer 1200 is instructed to operate, wherein the returned top and bottom surfaces are inspected for the returned body. The processing of the circuit, the control of the first and second plurality of transfer units 2 and 10, the movement of the first and second carriers 8 and 9, the movement of the reels of the packages 6 and 12, located at the holding station 3 The movement of the tray (e.g., 708 in Fig. 7), relative to steps 1 through 7 of the drawings, and the display, for example, information relating to operation and user control of the apparatus 100 on a display.

The computer 1200 includes a processing unit 1202 for processing one or more computer programs, and an input module such as a computer mouse 1236, a keyboard/secondary keyboard 1204, and/or a plurality of output devices such as a display 1208.

The processing unit 1202 can be coupled to a computer network 1212 via a suitable transceiver device 1214 (ie, a network interface) to enable access to, for example, the Internet or other network system such as a wired local area network ( LAN) or wide area network (WAN). The processing unit 1202 can also be coupled to a suitable wireless transceiver device 1232, such as a WiFi transceiver, a Bluetooth module, a Global System for Mobile Communications (GSM), 3G, 3.5G, 4G telecommunications system, or the like. Or more external wireless communication enabling devices 1234 are connected.

In this example, the processing unit 1202 includes a processor 1218, a random access memory (RAM) 1220, and a read only memory (ROM) 1222. The processing unit 1202 also includes a plurality of input/output (I/O) interfaces, such as an I/O interface 1238 to the computer mouse 1236, an I/O interface 1224 to the display 1208, and an I of the keyboard 1204. /O interface 1226.

The components of the processing unit 1202 are typically via an interconnect bus 1228 is connected in a manner well known to those skilled in the relevant art.

The computer programs may further include one or more software applications for, for example, an instant messaging platform, audio/video playback, internet accessibility, operating the computer 1200 (ie, operating system), network security , file accessibility, database management, which is typically used in a desktop or portable computer application. The computer program can be used by a user of the computer system 1200 to encode a data storage medium such as a CD-ROM, a flash memory carrier or a hard disk drive, and use a corresponding one of the data storage devices 1230. The data storage medium drive device reads it. These applications can also be downloaded from the computer network 1212. The applications are read and controlled by the processor 1218. The intervening storage of program data can be done using RAM 1220.

Furthermore, the steps of the computer programs can be performed in parallel rather than sequentially. One or more computer programs can be stored on any computer readable medium. The computer readable medium may include a storage device such as a magnetic disk or a compact disk, a memory chip, or other storage device suitable for use as an interface for a general purpose computer. The computer readable medium can also include a hard-wired medium such as those illustrated in the Internet system, or a wireless medium such as exemplified in the wireless local area network (WLAN) system. The computer program, when loaded and executed on the general purpose computer, causes a device to efficiently generate a device to perform the steps of the computing methods of the example described herein.

It should be noted that a wafer or a plurality of wafers mentioned herein are respectively related to an integrated circuit or a wafer, which is also a circuit such as an integrated circuit type well known by other names, a microchip or A plurality of microchips, microcircuits or complex microcircuits and the like.

Although reference has been made to transferring more than one integrated circuit in the complex region in the present description, it should be appreciated that the device 100 of FIG. 1 can also transfer only one integrated circuit from the holding station 3 in FIG. 1 to the one in FIG. The second package 6 or 12.

It should be appreciated that all of the pneumatic cylinders referenced herein (e.g., 206 in Figure 2, and 602 and 608 in Figure 6) are generally well known actuators and can also be based on hydraulic devices or Actuated by a combination of air pressure and hydraulic pressure. Electric actuators can also be used.

Those skilled in the art having the benefit of the above description, together with the understanding of the drawings, can make various modifications and other examples of the packaged device and the method for transferring the integrated circuit to a package. Accordingly, it is to be understood that the packaged device and the method for transferring the integrated circuit to a package are not limited to the above description contained herein, and that modifications are possible in the scope of the disclosure of the disclosure.

2‧‧‧Transfer unit

3‧‧‧ Holding Station

5,13‧‧‧ Carrier Guides

6,12‧‧‧second package

8‧‧‧ first carrier

9‧‧‧second carrier

10‧‧‧Transfer unit

100‧‧‧Package

Claims (15)

A package device for transferring an integrated circuit to a package, the device comprising: a movable carrier for carrying a plurality of integrated circuits and placing the plurality of integrated circuits in a position of the first package Moving between a first position, the first package is configured to hold a plurality of integrated circuits; a first plurality of transfer units, when the carrier is at the position of the first package, the first a plurality of transfer units configured to transfer one or more integrated circuits from the first package to the carrier; and a second plurality of transfer units configured to be configured for Transferring one or more integrated circuits to one or more respective brackets in a second package by the carrier in the first position; the carrier includes a plurality of seats for receiving integrated circuits The plurality of pedestals are configured to adjust each of the received integrated circuits to assume whether a predetermined orientation occurs with the predetermined directional misalignment, the predetermined orientation being located at the second package The orientation of the integrated circuits of one of the shelves. According to the apparatus of claim 1, the apparatus comprises: a movable second carrier for carrying a plurality of integrated circuits and the plurality of integrated circuits at the position of the first package and a second Moving between positions; when the second carrier is in the position of the first package, the first plurality of transfer units are configured to transfer one or more integrated circuits from the first package And the second plurality of transfer units are configured to transfer one or more integrated circuits from the second carrier positioned in the second position to one of the second packages or More individual brackets, Wherein the second carrier includes a plurality of seats for receiving the integrated circuit, the plurality of seats of the second carrier being configured to adjust each received integrated circuit to assume whether a predetermined orientation occurs with the predetermined The orientation misalignment is the orientation of the integrated circuits that are located in one of the brackets of the second package. The apparatus of claim 1 or 2, wherein a transfer unit of the first plurality of transfer units or a transfer unit of the second plurality of transfer units is configured to be used by A vertical axis of the transfer unit of the plurality of transfer units or the transfer unit of the second plurality of transfer units rotates the integrated circuit to adjust the orientation of the transferred integrated circuit. The apparatus of claim 1 or 2, wherein the second plurality of transfer units are formed with a fixed pitch between the transfer units of the transfer unit of the second plurality. The device of claim 1 or 2, wherein each of the plurality of seats includes a side wall that is inclined in a manner to cooperate with gravity so that the product can be integrated when the edge of an integrated circuit contacts the inclined portion The body circuit is oriented and assumes the predetermined orientation in the seat. A device according to claim 1 or 2, wherein each of the plurality of seats comprises a side wall that is movable to orient an integrated circuit to assume the predetermined orientation in the seat . The device of claim 2, wherein the second package comprises separate packages at different locations, and the two plurality of transfer units are organized from the carrier at the first location or from the first The second carrier transfer integrated circuit of the two locations to one or more of the carriers in each of the separate packages. The device of claim 1, 2 or 7, wherein each of the plurality of seats comprises a stepped portion around the circumference of the predetermined direction and the stepped portion is located at a foot portion of the inclined side walls At the office. The device of claim 1, 2 or 7, wherein the device further comprises: one or more inspection stations for inspecting the integrated circuits; for holding the first package to transfer to the second a holding station of the package; and a return station for processing the returned integrated circuit, and the one or more inspection stations, the holding station, and the returning station are continuously arranged in a straight line. The apparatus of claim 1, 2 or 7, further comprising one or more inspection stations for inspecting the integrated circuits; and a means for holding the first package to transfer to the second package a holding station; a return station for processing the returned integrated circuit; and one or more transfer mechanisms for transferring the integrated circuits between the stations, wherein each station is disposed in a channel And the one or more transfer mechanisms are resident between the channels. The apparatus of claim 1, 2 or 7, wherein the first plurality of transfer units are configured to adjust a pitch between the transfer units of the first plurality of transfer units to place The integrated circuit is previously matched to each of the outer versions of the seats to each of the seats, and the second plurality of transfer units are formed with a fixed pitch between the transfer units of the second plurality of transfer units. A packaging method for transferring an integrated circuit to a package, the method comprising: carrying a plurality of integrated circuits and using a movable carrier to connect the plurality of integrated circuits in a position of a first package and a first Moving between positions, the first package is configured to hold the plurality of integrated circuits, the carrier includes a plurality of seats for receiving the integrated circuit; and when the carrier is in the first package At the location, one or more integrated circuits are transferred from the first package to the carrier using a first plurality of transfer units; one or more integrated circuits are placed in position using a second plurality of transfer units The carrier in the first position is transferred to one or more respective brackets in a second package; The sockets of the carrier are used to adjust an integrated circuit received by the carrier to assume that a predetermined orientation is misaligned with the predetermined orientation, the predetermined orientation being located in the second package Orientation of each integrated circuit of one of the shelves; and adjusting a pitch between the transfer units of the first plurality of transfer units to match each of the external types of the blocks to each of the integrated circuits The seat. The method of claim 12, wherein the method comprises: using a second carrier to carry a plurality of integrated circuits and moving the plurality of integrated circuits between the first package and a second position, wherein The second carrier includes a plurality of sockets for receiving the integrated circuit; when the second carrier is in the position of the first package, the first plurality of transfer units are used to Transferring the first package to the second carrier; transferring the one or more integrated circuits from the second carrier located at the second location to the second package using the second plurality of transfer units The respective brackets, and the plurality of seats using the second carrier adjust each integrated circuit received by the second carrier to assume whether a predetermined orientation is out of alignment with the predetermined orientation, and The predetermined orientation is the orientation of the integrated circuits that are located in one of the brackets of the second package. The method of claim 13, wherein the second package comprises separate packages at different locations, the method comprising: using the second plurality of transfer units to position the integrated circuits from the first location The carrier or the second carrier positioned in the second position is transferred to one or more of the respective carriers of the second package. According to the method of claim 12, 13 or 14, the method comprises: The orientation of the transferred integrated circuit is adjusted by rotating an integrated circuit with respect to a longitudinal axis of one of the transfer units of the first plurality or the second plurality of transfer units.