TWI513810B - Imaging device module - Google Patents

Imaging device module Download PDF

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TWI513810B
TWI513810B TW100103579A TW100103579A TWI513810B TW I513810 B TWI513810 B TW I513810B TW 100103579 A TW100103579 A TW 100103579A TW 100103579 A TW100103579 A TW 100103579A TW I513810 B TWI513810 B TW I513810B
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Taiwan
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conductive sheet
thermally conductive
image pickup
epoxy resin
sheet
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TW100103579A
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Chinese (zh)
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TW201142003A (en
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Seiji Izutani
Hisae Uchiyama
Takahiro Fukuoka
Kazutaka Hara
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Nitto Denko Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14618Containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/1464Back illuminated imager structures
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/57Mechanical or electrical details of cameras or camera modules specially adapted for being embedded in other devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70SSIS architectures; Circuits associated therewith
    • H04N25/76Addressed sensors, e.g. MOS or CMOS sensors

Description

攝像零件Camera parts

本發明係關於一種攝像零件,詳細而言係關於一種裝備於攝像裝置上之攝像零件。The present invention relates to an image pickup component, and more particularly to an image pickup component equipped on an image pickup apparatus.

近年來,在數位相機等攝像裝置中,根據攝像裝置之像素數,使用有複數個CCD(電荷耦合元件,Charge Coupled Device)影像感測器、CMOS(互補型金屬氧化膜半導體,Complementary Metal Oxide Semiconductor)影像感測器等攝像元件。In recent years, in an imaging device such as a digital camera, a plurality of CCD (Charge Coupled Device) image sensors and CMOS (Complementary Metal Oxide Semiconductor, Complementary Metal Oxide Semiconductor) are used depending on the number of pixels of the imaging device. Image sensor such as image sensor.

該等攝像元件存在若處於高溫下,則會發生產生雜訊等不良情況之情形。When such imaging elements are exposed to high temperatures, problems such as noise generation may occur.

因此,業者正在研究於攝像元件上設置放熱構件,以抑制攝像元件之溫度上升。Therefore, the industry is investigating that a heat radiation member is provided on the image pickup element to suppress an increase in temperature of the image pickup element.

更具體而言,例如提出有:於固體攝像裝置中,於攝像元件之攝像面之背面設置包含石墨片材之熱傳導構件,並且以與該石墨片材接觸之方式於與攝像元件之攝像面相對之側面設置珀耳帖元件等電子冷卻元件及放熱構件(例如,參照日本專利特開2008-177917號公報)。More specifically, for example, in the solid-state imaging device, a heat conduction member including a graphite sheet is provided on the back surface of the imaging surface of the imaging element, and is in contact with the imaging surface of the imaging element so as to be in contact with the graphite sheet. An electronic cooling element such as a Peltier element and a heat releasing member are provided on the side surface (for example, refer to Japanese Laid-Open Patent Publication No. 2008-177917).

於日本專利特開2008-177917號公報所記載之固體攝像裝置中,於攝像元件之側面側配置電子冷卻元件及放熱構件,並且以接觸電子冷卻元件與攝像元件之方式於厚度方向上配置熱傳導效率較高之石墨片材作為熱傳導構件,藉此實現放熱性之提高及固體攝像裝置之小型化。In the solid-state imaging device described in Japanese Laid-Open Patent Publication No. 2008-177917, the electronic cooling element and the heat radiation member are disposed on the side surface side of the image sensor, and the heat conduction efficiency is arranged in the thickness direction so as to contact the electronic cooling element and the image sensor. The higher graphite sheet serves as a heat conduction member, thereby achieving an improvement in heat dissipation and miniaturization of the solid-state imaging device.

然而,由於日本專利特開2008-177917號公報中使用之石墨片材價格高,故存在於成本方面較差之不良情況。However, since the graphite sheet used in Japanese Laid-Open Patent Publication No. 2008-177917 has a high price, it is inferior in terms of cost.

另外,由於攝像元件存在感度根據溫度條件而發生變化之情形,因此為實現其感度之均勻化,而要求減少溫度不均(實現溫度之均勻化)。Further, since the image sensor has a change in sensitivity depending on temperature conditions, it is required to reduce temperature unevenness (to achieve uniformity of temperature) in order to achieve uniformity of sensitivity.

因此,本發明之目的在於提供一種可實現低成本化及溫度之均勻化、放熱性優異之攝像零件。Therefore, an object of the present invention is to provide an image pickup unit which can achieve cost reduction, uniform temperature, and excellent heat dissipation.

本發明之攝像零件之特徵在於:包括攝像元件,其具備使光入射之光入射面及配置於上述光入射面之相反側的背面;及熱傳導性片材,其設置於上述背面,用以使自上述攝像元件產生之熱放出;且上述熱傳導性片材含有板狀氮化硼粒子,上述熱傳導性片材相對於厚度方向正交之方向上之熱傳導率為4 W/m‧K以上。An imaging device according to the present invention includes an imaging element including a light incident surface on which light is incident and a back surface disposed on a side opposite to the light incident surface, and a thermally conductive sheet provided on the back surface for enabling The heat radiation from the image pickup element is released; and the heat conductive sheet contains plate-shaped boron nitride particles, and the thermal conductivity of the thermally conductive sheet in a direction orthogonal to the thickness direction is 4 W/m·K or more.

於此種攝像零件中,於攝像元件之配置於光入射面之相反側之背面具備熱傳導性片材,詳細而言,具備含有板狀氮化硼粒子,且相對於厚度方向正交之方向(即,面方向)上之熱傳導率為4 W/m‧K以上的熱傳導性片材。因此,可使熱於面方向上均勻地擴散,減少溫度不均(實現溫度之均勻化),並且可確保優異之放熱性,其結果可實現感度之提高。In the image pickup device, the heat conductive sheet is provided on the back surface of the image pickup element disposed on the opposite side of the light incident surface, and specifically includes a plate-like boron nitride particle and a direction orthogonal to the thickness direction ( That is, the thermal conductivity sheet having a thermal conductivity of 4 W/m‧K or more in the plane direction). Therefore, the heat can be uniformly diffused in the plane direction, the temperature unevenness can be reduced (the temperature is uniformized), and the excellent heat release property can be ensured, and as a result, the sensitivity can be improved.

另外,由於此種熱傳導性片材較之石墨片材可更低廉地製造,故可實現低成本化。Further, since such a thermally conductive sheet can be manufactured at a lower cost than the graphite sheet, cost reduction can be achieved.

另外,本發明之攝像零件較佳為CMOS影像感測器。Further, the image pickup unit of the present invention is preferably a CMOS image sensor.

另外,本發明之攝像零件較佳為背面照射型CMOS影像感測器。Further, the image pickup unit of the present invention is preferably a back side illumination type CMOS image sensor.

根據本發明之攝像零件,可實現溫度之均勻化,並且可確保優異之放熱性,進而可實現低成本化。According to the image pickup component of the present invention, uniformity of temperature can be achieved, and excellent heat dissipation can be ensured, and cost reduction can be achieved.

圖1為本發明之攝像零件之一實施形態之概略構成圖,圖2為用以說明圖1所示之攝像零件所具備之熱傳導性片材的製造方法之步驟圖,圖3為圖2所示之熱傳導性片材之立體圖。1 is a schematic configuration diagram of an embodiment of an image pickup component of the present invention, and FIG. 2 is a step diagram for explaining a method of manufacturing the heat conductive sheet included in the image pickup component shown in FIG. 1. FIG. A perspective view of a thermally conductive sheet as shown.

於圖1中,攝像零件1具備攝像元件2、及用以使自攝像元件2產生之熱放出之熱傳導性片材3。In FIG. 1, the imaging element 1 includes an imaging element 2 and a thermally conductive sheet 3 for discharging heat generated from the imaging element 2.

攝像元件2係具備將接受之光轉換成電訊號之光電轉換元件(後述受光元件10)之元件,於數位相機或數位攝影機等攝像裝置(未圖示)中,根據其像素數而具備複數個。The imaging element 2 is an element including a photoelectric conversion element (a light-receiving element 10 to be described later) that converts received light into an electric signal, and is provided in a plurality of imaging devices (not shown) such as a digital camera or a digital camera, depending on the number of pixels. .

作為攝像元件2,可舉出CCD影像感測器、或表面照射型CMOS影像感測器、背面照射型CMOS影像感測器等CMOS影像感測器等,於本實施形態中,作為攝像元件2,係採用CMOS影像感測器,詳細而言係採用表面照射型CMOS影像感測器。Examples of the image pickup device 2 include a CCD image sensor, a surface illumination type CMOS image sensor, and a CMOS image sensor such as a back side illumination type CMOS image sensor. In the present embodiment, the image pickup element 2 is used. The CMOS image sensor is used in detail, and the surface illumination type CMOS image sensor is used in detail.

此種攝像元件2具備聚光透鏡4、濾光器5、電路基板6及受光基板7。Such an imaging element 2 includes a collecting lens 4, a filter 5, a circuit board 6, and a light receiving substrate 7.

聚光透鏡4為剖面觀察大致形成為半橢圓形之透鏡,其底面密接於濾光器5,並且上表面(曲面)露出,作為使光入射之光入射面。The condensing lens 4 is a lens which is formed in a substantially semi-elliptical shape in cross section, and has a bottom surface which is in close contact with the filter 5 and an upper surface (curved surface) which is exposed as a light incident surface into which light is incident.

此種聚光透鏡4於攝像元件2中以對應於後述綠色濾光器5G、紅色濾光器5R及藍色濾光器5B之方式設置有複數個(3個)。The condensing lens 4 is provided in the imaging element 2 in a plurality (three) so as to correspond to the green filter 5G, the red filter 5R, and the blue filter 5B which will be described later.

濾光器5形成為薄膜,具備綠色濾光器5G、紅色濾光器5R及藍色濾光器5B。The filter 5 is formed as a thin film, and includes a green filter 5G, a red filter 5R, and a blue filter 5B.

綠色濾光器5G係對應於綠色之波段之光之穿透率較高之透光膜,將自聚光透鏡4之光入射面入射之光分光,使綠色光穿透。The green filter 5G is a light-transmissive film having a higher transmittance of light in the green band, and splits the light incident from the light incident surface of the condensing lens 4 to pass the green light.

紅色濾光器5R係對應於紅色之波段之光之穿透率較高之透光膜,將自聚光透鏡4之光入射面入射之光分光,使紅色光穿透。The red filter 5R is a light-transmissive film having a higher transmittance of light in a red band, and splits light incident from the light incident surface of the condensing lens 4 to pass the red light.

藍色濾光器5B係對應於藍色之波段之光之穿透率較高之透光膜,將自聚光透鏡4之光入射面入射之光分光,使藍色光穿透。The blue filter 5B is a light-transmissive film having a higher transmittance of light in the blue band, and splits light incident from the light incident surface of the condensing lens 4 to pass the blue light.

該等綠色濾光器5G、紅色濾光器5R及藍色濾光器5B係利用公知之方法製造,藉由鄰接配置而形成濾光器5。The green filter 5G, the red filter 5R, and the blue filter 5B are manufactured by a known method, and the filter 5 is formed by being arranged adjacent to each other.

電路基板6具備絕緣層8、埋設於絕緣層8中之導體圖案9。The circuit board 6 includes an insulating layer 8 and a conductor pattern 9 embedded in the insulating layer 8.

絕緣層8係由使光穿透之透光性材料形成,為使導體圖案9絕緣而插入導體圖案9之間。The insulating layer 8 is formed of a light transmissive material that transmits light, and is inserted between the conductor patterns 9 in order to insulate the conductor pattern 9.

作為透光性材料,並無特別限制,例如可舉出氧化矽等,進而,可舉出於該氧化矽中添加例如磷、硼等而獲得之添加氧化矽等。The light-transmitting material is not particularly limited, and examples thereof include cerium oxide and the like, and further, cerium oxide added thereto by adding, for example, phosphorus or boron to the cerium oxide.

導體圖案9例如係由鋁、銅等金屬材料形成,詳細而言,例如利用公知之印刷方法形成為特定圖案並埋設於絕緣層8中。The conductor pattern 9 is formed of, for example, a metal material such as aluminum or copper, and is formed, for example, in a specific pattern by a known printing method and embedded in the insulating layer 8.

此種導體圖案9為傳遞受光元件10(後述)中獲得之電訊號而與外部構件電性連接。Such a conductor pattern 9 is electrically connected to an external member by transmitting an electric signal obtained by the light receiving element 10 (described later).

受光基板7例如為包含聚矽氧樹脂等之基板,以接觸電路基板6之方式設置。The light-receiving substrate 7 is, for example, a substrate including a polysilicon oxide resin, and is provided so as to contact the circuit board 6.

另外,受光基板7含有受光元件10。Further, the light receiving substrate 7 includes the light receiving element 10.

受光元件10係將接受之光轉換成電訊號之光電轉換元件,剖面觀察大致形成為矩形。The light-receiving element 10 is a photoelectric conversion element that converts the received light into an electric signal, and is roughly rectangular in cross section.

此種受光元件10係以對應於濾光器5之方式設置有複數個(3個),各受光元件10以對向於各濾光器5(綠色濾光器5G、紅色濾光器5R及藍色濾光器5B)之方式埋設於受光基板7中。The light-receiving element 10 is provided in a plurality (three) corresponding to the optical filter 5, and each of the light-receiving elements 10 is opposed to each of the filters 5 (green filter 5G, red filter 5R, and The blue filter 5B) is embedded in the light-receiving substrate 7.

另外,各受光元件10係以如下方式配置:其一側面自受光基板7露出,且與各彩色濾光器5(綠色濾光器5G、紅色濾光器5R及藍色濾光器5B)之與上述一側相對之另一側面(與電路基板6接觸一側之面)相對向。Further, each of the light receiving elements 10 is disposed such that one side thereof is exposed from the light receiving substrate 7 and is connected to each of the color filters 5 (the green filter 5G, the red filter 5R, and the blue filter 5B). The other side opposite to the one side (the surface on the side in contact with the circuit board 6) faces each other.

並且,此種受光基板7具備配置於光入射面之相反側之背面,作為與聚光透鏡4之光入射面側之表面(接觸受光基板7與電路基板6之面)相對的另一側面。受光基板7之背面(攝像元件2之背面)形成為平面,於該背面設置有熱傳導性片材3。Further, the light-receiving substrate 7 is provided on the back surface disposed on the opposite side of the light incident surface, and serves as the other side surface facing the light incident surface side of the condensing lens 4 (the surface contacting the light-receiving substrate 7 and the circuit board 6). The back surface of the light-receiving substrate 7 (the back surface of the image sensor 2) is formed into a flat surface, and the heat conductive sheet 3 is provided on the back surface.

熱傳導性片材3形成為平板狀,以其表面密接於受光基板7之背面(攝像元件2之背面)之方式配置。The thermally conductive sheet 3 is formed in a flat shape, and is disposed such that its surface is in close contact with the back surface of the light receiving substrate 7 (the back surface of the image sensor 2).

此種熱傳導性片材3含有氮化硼粒子。Such a thermally conductive sheet 3 contains boron nitride particles.

具體而言,熱傳導性片材3含有氮化硼(BN)粒子作為必需成分,進而含有例如樹脂成分。Specifically, the thermally conductive sheet 3 contains boron nitride (BN) particles as an essential component, and further contains, for example, a resin component.

氮化硼粒子形成為板狀(或者鱗片狀),以配向於特定方向(後述)之形態分散於熱傳導性片材3中。The boron nitride particles are formed into a plate shape (or a scaly shape), and are dispersed in the thermally conductive sheet 3 in a form oriented in a specific direction (described later).

氮化硼粒子之長邊方向長度(相對於板之厚度方向正交之方向上之最大長度)平均為例如1~100 μm,較佳為3~90 μm。另外,氮化硼粒子之長邊方向長度平均為5 μm以上,較佳為10 μm以上,進而較佳為20 μm以上,特佳為30 μm以上,最佳為40 μm以上,通常例如為100 μm以下,較佳為90 μm以下。The length in the longitudinal direction of the boron nitride particles (the maximum length in the direction orthogonal to the thickness direction of the sheet) is, for example, 1 to 100 μm, preferably 3 to 90 μm. Further, the length of the boron nitride particles in the longitudinal direction is 5 μm or more on average, preferably 10 μm or more, more preferably 20 μm or more, particularly preferably 30 μm or more, and most preferably 40 μm or more, and is usually, for example, 100. Below μm, preferably less than 90 μm.

另外,氮化硼粒子之厚度(板之厚度方向長度、即粒子之短邊方向長度)平均為例如0.01~20 μm,較佳為0.1~15 μm。Further, the thickness of the boron nitride particles (the length in the thickness direction of the sheet, that is, the length in the short-side direction of the particles) is, for example, 0.01 to 20 μm, preferably 0.1 to 15 μm.

另外,氮化硼粒子之縱橫比(長邊方向長度/厚度)例如為2~10000,較佳為10~5000。Further, the aspect ratio (length in the longitudinal direction/thickness) of the boron nitride particles is, for example, 2 to 10,000, preferably 10 to 5,000.

並且,氮化硼粒子藉由光散射法所測定之平均粒徑例如為5 μm以上,較佳為10 μm以上,進而較佳為20 μm以上,特佳為30 μm以上,最佳為40 μm以上,通常為100 μm以下。Further, the average particle diameter of the boron nitride particles measured by a light scattering method is, for example, 5 μm or more, preferably 10 μm or more, more preferably 20 μm or more, particularly preferably 30 μm or more, and most preferably 40 μm. The above is usually 100 μm or less.

再者,藉由光散射法所測定之平均粒徑係利用動態光散射式粒度分佈測定裝置所測定之體積平均粒徑。Further, the average particle diameter measured by the light scattering method is a volume average particle diameter measured by a dynamic light scattering type particle size distribution measuring apparatus.

若氮化硼粒子藉由光散射法所測定之平均粒徑未滿上述範圍,則存在熱傳導性片材3變脆,操作性下降之情況。When the average particle diameter of the boron nitride particles measured by the light scattering method is less than the above range, the thermally conductive sheet 3 becomes brittle and the workability is lowered.

另外,氮化硼粒子之鬆密度(JIS K 5101、視密度)例如為0.3~1.5 g/cm3 ,較佳為0.5~1.0 g/cm3Further, the bulk density (JIS K 5101, apparent density) of the boron nitride particles is, for example, 0.3 to 1.5 g/cm 3 , preferably 0.5 to 1.0 g/cm 3 .

另外,氮化硼粒子可使用市售品或將其加工而成之加工品。作為氮化硼粒子之市售品,例如可舉出Momentive Performance Materials Japan公司製造之「PT」系列(例如,「PT-110」等)、昭和電工公司製造之「SHOBN UHP」系列(例如,「SHOBN UHP-1」等)等。Further, as the boron nitride particles, commercially available products or processed products obtained by processing them can be used. For example, the "PT" series (for example, "PT-110") manufactured by Momentive Performance Materials Japan Co., Ltd. and the "SHOBN UHP" series manufactured by Showa Denko Co., Ltd. (for example, " SHOBN UHP-1", etc.).

樹脂成分係能夠分散氮化硼粒子者,即分散氮化硼粒子之分散介質(基質),例如,可舉出熱硬化性樹脂成分、熱塑性樹脂成分等樹脂成分。The resin component is a dispersion medium (matrix) in which boron nitride particles are dispersed, and examples thereof include a resin component such as a thermosetting resin component and a thermoplastic resin component.

作為熱硬化性樹脂成分,例如可舉出:環氧樹脂、熱硬化性聚醯亞胺、酚樹脂、脲樹脂、三聚氰胺樹脂、不飽和聚酯樹脂、鄰苯二甲酸二烯丙酯樹脂、聚矽氧樹脂、熱硬化性胺酯樹脂等。Examples of the thermosetting resin component include an epoxy resin, a thermosetting polyimide, a phenol resin, a urea resin, a melamine resin, an unsaturated polyester resin, a diallyl phthalate resin, and a poly A silicone resin, a thermosetting amine resin, or the like.

作為熱塑性樹脂成分,例如可舉出:聚烯烴(例如,聚乙烯、聚丙烯、乙烯-丙烯共聚物等)、丙烯酸樹脂(例如,聚甲基丙烯酸甲酯等)、聚乙酸乙烯酯、乙烯-乙酸乙烯酯共聚物、聚氯乙烯、聚苯乙烯、聚丙烯腈、聚醯胺、聚碳酸酯、聚縮醛、聚對苯二甲酸乙二酯、聚苯醚、聚苯硫醚、聚碸、聚醚碸、聚醚醚酮、聚烯丙基碸、熱塑性聚醯亞胺、熱塑性胺酯樹脂、聚胺基雙馬來醯亞胺、聚醯胺醯亞胺、聚醚醯亞胺、雙馬來醯亞胺三樹脂、聚甲基戊烯、氟化樹脂、液晶聚合物、烯烴-乙烯醇共聚物、離子聚合物、聚芳酯、丙烯腈-乙烯-苯乙烯共聚物、丙烯腈-丁二烯-苯乙烯共聚物、丙烯腈-苯乙烯共聚物等。Examples of the thermoplastic resin component include polyolefin (for example, polyethylene, polypropylene, ethylene-propylene copolymer, etc.), acrylic resin (for example, polymethyl methacrylate, etc.), polyvinyl acetate, and ethylene. Vinyl acetate copolymer, polyvinyl chloride, polystyrene, polyacrylonitrile, polyamine, polycarbonate, polyacetal, polyethylene terephthalate, polyphenylene ether, polyphenylene sulfide, polyfluorene , polyether oxime, polyether ether ketone, polyallyl fluorene, thermoplastic polyimide, thermoplastic amine ester resin, polyamine bismaleimide, polyamidimide, polyetherimine, Bismaleimide III Resin, polymethylpentene, fluorinated resin, liquid crystal polymer, olefin-vinyl alcohol copolymer, ionic polymer, polyarylate, acrylonitrile-ethylene-styrene copolymer, acrylonitrile-butadiene-styrene Copolymer, acrylonitrile-styrene copolymer, and the like.

該等樹脂成分可單獨使用或併用2種以上。These resin components may be used alone or in combination of two or more.

樹脂成分中,較佳為舉出環氧樹脂。Among the resin components, an epoxy resin is preferred.

環氧樹脂於常溫下為液狀、半固體狀及固體狀之任意形態。The epoxy resin is in any form of liquid, semi-solid or solid at normal temperature.

具體而言,作為環氧樹脂,可舉出:例如雙酚型環氧樹脂(例如,雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、氫化雙酚A型環氧樹脂、二聚酸改性雙酚型環氧樹脂等)、酚醛清漆型環氧樹脂(例如,苯酚酚醛清漆型環氧樹脂、甲酚酚醛清漆型環氧樹脂、聯苯型環氧樹脂等)、萘型環氧樹脂、茀型環氧樹脂(例如,雙芳基茀型環氧樹脂等)、三苯基甲烷型環氧樹脂(例如,三羥基苯基甲烷型環氧樹脂等)等芳香族系環氧樹脂;例如異三聚氰酸三環氧丙酯(異三聚氰酸三縮水甘油酯)、乙內醯脲環氧樹脂等含氮環環氧樹脂;例如脂肪族型環氧樹脂;例如脂環式環氧樹脂(例如,二環環型環氧樹脂等);例如縮水甘油醚型環氧樹脂;例如縮水甘油胺型環氧樹脂等。Specifically, examples of the epoxy resin include bisphenol type epoxy resins (for example, bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, hydrogenated bisphenol) A type epoxy resin, dimer acid modified bisphenol type epoxy resin, etc.), novolak type epoxy resin (for example, phenol novolak type epoxy resin, cresol novolak type epoxy resin, biphenyl type ring) Oxygen resin, etc., naphthalene type epoxy resin, fluorene type epoxy resin (for example, bisaryl fluorene type epoxy resin, etc.), triphenylmethane type epoxy resin (for example, trishydroxyphenylmethane type epoxy resin) Or an aromatic epoxy resin; for example, a nitrogen-containing epoxy resin such as triglycidyl isocyanurate (triglycidyl isocyanurate) or an ethyl carbendazole epoxy resin; for example, fat A family epoxy resin; for example, an alicyclic epoxy resin (for example, a bicyclic ring type epoxy resin); for example, a glycidyl ether type epoxy resin; for example, a glycidylamine type epoxy resin or the like.

該等環氧樹脂可單獨使用或併用2種以上。These epoxy resins may be used alone or in combination of two or more.

較佳為舉出液狀之環氧樹脂及固體狀之環氧樹脂之組合,進而較佳為舉出液狀之芳香族系環氧樹脂及固體狀之芳香族系環氧樹脂之組合等。作為此種組合,具體而言,可舉出液狀之雙酚型環氧樹脂及固體狀之三苯基甲烷型環氧樹脂之組合、或液狀之雙酚型環氧樹脂及固體狀之雙酚型環氧樹脂之組合。Preferably, a combination of a liquid epoxy resin and a solid epoxy resin is used, and a combination of a liquid aromatic epoxy resin and a solid aromatic epoxy resin is preferably used. Specific examples of such a combination include a combination of a liquid bisphenol type epoxy resin and a solid triphenylmethane type epoxy resin, or a liquid bisphenol type epoxy resin and a solid form. A combination of bisphenol type epoxy resins.

另外,作為環氧樹脂,較佳為舉出單獨使用半固體狀之環氧樹脂,進而較佳為舉出單獨使用半固體狀之芳香族系環氧樹脂。作為此種環氧樹脂,更具體而言可舉出半固體狀之茀型環氧樹脂。Further, as the epoxy resin, a semi-solid epoxy resin is preferably used, and a semi-solid aromatic epoxy resin is preferably used alone. More specifically, such an epoxy resin is a semi-solid fluorene type epoxy resin.

只要為液狀之環氧樹脂及固體狀之環氧樹脂之組合、或半固體狀之環氧樹脂,則可提高熱傳導性片材3之階差追隨性(後述)。When it is a combination of a liquid epoxy resin and a solid epoxy resin, or a semi-solid epoxy resin, the step followability (described later) of the thermally conductive sheet 3 can be improved.

另外,環氧樹脂之環氧當量例如為100~1000 g/eqiv.,較佳為160~700 g/eqiv.,軟化溫度(環球法)例如為80℃以下(具體而言為20~80℃),較佳為70℃以下(具體而言為25~70℃)。Further, the epoxy equivalent of the epoxy resin is, for example, 100 to 1000 g/eqiv., preferably 160 to 700 g/eqiv., and the softening temperature (ring and ball method) is, for example, 80 ° C or lower (specifically, 20 to 80 ° C). It is preferably 70 ° C or less (specifically, 25 to 70 ° C).

另外,環氧樹脂於80℃下之熔融黏度例如為10~20,000 mPa‧s,較佳為50~15,000 mPa‧s。於併用2種以上之環氧樹脂之情形時,該等之混合物之熔融黏度設定於上述範圍內。Further, the epoxy resin has a melt viscosity at 80 ° C of, for example, 10 to 20,000 mPa ‧ s, preferably 50 to 15,000 mPa ‧ s. When two or more types of epoxy resins are used in combination, the melt viscosity of the mixtures is set within the above range.

另外,併用常溫下為固體狀之環氧樹脂與常溫下為液狀之環氧樹脂之情形時,係將軟化溫度例如為未滿45℃、較佳為35℃以下之第1環氧樹脂與軟化溫度例如為45℃以上、較佳為55℃以上之第2環氧樹脂併用。藉此,可將樹脂成分(混合物)之動力黏度(依據JIS K 7233,後述)設定於所期望之範圍內,另外,可提高熱傳導性片材3之階差追隨性。Further, when an epoxy resin which is solid at normal temperature and an epoxy resin which is liquid at normal temperature are used in combination, the softening temperature is, for example, a first epoxy resin which is less than 45 ° C, preferably 35 ° C or less. The second epoxy resin having a softening temperature of, for example, 45 ° C or higher, preferably 55 ° C or higher is used in combination. Thereby, the dynamic viscosity of the resin component (mixture) (described later in accordance with JIS K 7233) can be set within a desired range, and the step followability of the thermally conductive sheet 3 can be improved.

另外,使環氧樹脂中含有例如硬化劑及硬化促進劑,可製成環氧樹脂組合物。Further, an epoxy resin composition can be prepared by including, for example, a curing agent and a curing accelerator in the epoxy resin.

硬化劑係藉由加熱可使環氧樹脂硬化之潛在性硬化劑(環氧樹脂硬化劑),例如可舉出:咪唑化合物、胺化合物、酸酐化合物、醯胺化合物、醯肼化合物、咪唑啉化合物等。另外,除上述以外,亦可舉出:酚化合物、脲化合物、多硫化物化合物等。The hardener is a latent hardener (epoxy resin hardener) which hardens an epoxy resin by heating, and examples thereof include an imidazole compound, an amine compound, an acid anhydride compound, a guanamine compound, an anthraquinone compound, and an imidazoline compound. Wait. Further, in addition to the above, a phenol compound, a urea compound, a polysulfide compound, and the like may be mentioned.

作為咪唑化合物,例如可舉出:2-苯基咪唑、2-甲基咪唑、2-乙基-4-甲基咪唑、2-苯基-4-甲基-5-羥基甲基咪唑等。Examples of the imidazole compound include 2-phenylimidazole, 2-methylimidazole, 2-ethyl-4-methylimidazole, and 2-phenyl-4-methyl-5-hydroxymethylimidazole.

作為胺化合物,可舉出:例如乙二胺、丙二胺、二伸乙三胺、三伸乙四胺等脂肪族聚胺,例如間苯二胺、二胺基二苯基甲烷、二胺基二苯基碸等芳香族聚胺等。The amine compound may, for example, be an aliphatic polyamine such as ethylenediamine, propylenediamine, diethylenetriamine or triethylenetetramine, such as m-phenylenediamine, diaminodiphenylmethane or diamine. An aromatic polyamine such as a diphenyl hydrazine.

作為酸酐化合物,例如可舉出:鄰苯二甲酸酐、順丁烯二酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐、4-甲基-六氫鄰苯二甲酸酐、甲基耐地酸酐、均苯四甲酸酐、十二烯基丁二酸酐、二氯丁二酸酐、二苯甲酮四甲酸酐、氯茵酸酐等。Examples of the acid anhydride compound include phthalic anhydride, maleic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, and 4-methyl-hexahydrophthalic anhydride. Methylic acid anhydride, pyromellitic anhydride, dodecenyl succinic anhydride, dichlorosuccinic anhydride, benzophenone tetracarboxylic anhydride, chlorinic anhydride, and the like.

作為醯胺化合物,例如可舉出二氰基二醯胺、聚醯胺等。Examples of the guanamine compound include dicyanodiamine, polyamine, and the like.

作為醯肼化合物,例如可舉出己二酸二醯肼等。Examples of the ruthenium compound include diammonium adipate and the like.

作為咪唑啉化合物,例如可舉出:甲基咪唑啉、2-乙基-4-甲基咪唑啉、乙基咪唑啉、異丙基咪唑啉、2,4-二甲基咪唑啉、苯基咪唑啉、十一烷基咪唑啉、十七烷基咪唑啉、2-苯基-4-甲基咪唑啉等。Examples of the imidazoline compound include methyl imidazoline, 2-ethyl-4-methylimidazoline, ethyl imidazoline, isopropyl imidazoline, 2,4-dimethylimidazoline, and phenyl. Imidazoline, undecyl imidazoline, heptadecyl imidazoline, 2-phenyl-4-methylimidazoline and the like.

該等硬化劑可單獨使用或併用2種以上。These hardeners may be used alone or in combination of two or more.

作為硬化劑,較佳為舉出咪唑化合物。As the curing agent, an imidazole compound is preferred.

作為硬化促進劑,可舉出:例如三伸乙二胺、三-2,4,6-二甲基胺基甲基苯酚等三級胺化合物,例如三苯基膦、四苯基鏻四苯基硼酸鹽、四正丁基鏻-o,o-二乙基二硫代磷酸鹽等磷化合物,例如四級銨鹽化合物、有機金屬鹽化合物、及該等之衍生物等。該等硬化促進劑可單獨使用或併用2種以上。The hardening accelerator may, for example, be a tertiary amine compound such as triethylenediamine or tris-2,4,6-dimethylaminomethylphenol, such as triphenylphosphine or tetraphenylphosphonium tetraphenyl. A phosphorus compound such as a borate or a tetra-n-butylphosphonium-o,o-diethyldithiophosphate, such as a quaternary ammonium salt compound, an organometallic salt compound, and the like. These hardening accelerators may be used alone or in combination of two or more.

環氧樹脂組合物中之硬化劑之調配比例相對於環氧樹脂100質量份例如為0.5~50質量份,較佳為1~10質量份,硬化促進劑之調配比例例如為0.1~10質量份,較佳為0.2~5質量份。The compounding ratio of the curing agent in the epoxy resin composition is, for example, 0.5 to 50 parts by mass, preferably 1 to 10 parts by mass, based on 100 parts by mass of the epoxy resin, and the ratio of the curing accelerator is, for example, 0.1 to 10 parts by mass. It is preferably 0.2 to 5 parts by mass.

上述硬化劑及/或硬化促進劑視需要可製備成藉由溶劑而溶解及/或分散之溶劑溶液及/或溶劑分散液來使用。The curing agent and/or the curing accelerator may be prepared by using a solvent solution and/or a solvent dispersion which is dissolved and/or dispersed by a solvent, if necessary.

作為溶劑,可舉出:例如丙酮、甲基乙基酮等酮類,例如乙酸乙酯等酯類,例如N,N-二甲基甲醯胺等醯胺類等有機溶劑等。另外,作為溶劑,亦可舉出:例如水,例如甲醇、乙醇、丙醇、異丙醇等醇類等水系溶劑。作為溶劑,較佳為舉出有機溶劑,進而較佳為舉出酮類、醯胺類。Examples of the solvent include ketones such as acetone and methyl ethyl ketone, and esters such as ethyl acetate, and organic solvents such as guanamine such as N,N-dimethylformamide. Further, examples of the solvent include water, for example, an aqueous solvent such as an alcohol such as methanol, ethanol, propanol or isopropanol. The solvent is preferably an organic solvent, and more preferably a ketone or a guanamine.

熱塑性樹脂成分之中,較佳為舉出聚烯烴。Among the thermoplastic resin components, polyolefin is preferred.

作為聚烯烴,較佳為舉出聚乙烯、乙烯-丙烯共聚物。As the polyolefin, a polyethylene or an ethylene-propylene copolymer is preferred.

作為聚乙烯,例如可舉出低密度聚乙烯、高密度聚乙烯等。Examples of the polyethylene include low density polyethylene and high density polyethylene.

作為乙烯-丙烯共聚物,例如可舉出乙烯及丙烯之無規共聚物、嵌段共聚物或接枝共聚物等。Examples of the ethylene-propylene copolymer include a random copolymer of ethylene and propylene, a block copolymer, and a graft copolymer.

該等聚烯烴可單獨使用或併用2種以上。These polyolefins may be used alone or in combination of two or more.

另外,聚烯烴之重量平均分子量及/或數平均分子量例如為1000~10000。Further, the weight average molecular weight and/or the number average molecular weight of the polyolefin is, for example, 1,000 to 10,000.

另外,聚烯烴可單獨使用或併用複數種。Further, the polyolefin may be used singly or in combination of plural kinds.

另外,樹脂成分藉由依據JIS K 7233(氣泡黏度計法)之動力黏度試驗(溫度:25℃±0.5℃、溶劑:丁基卡必醇、樹脂成分(固形物成分)濃度:40質量%)所測定之動力黏度例如為0.22×10-4 ~2.00×10-4 m2 /s,較佳為0.3×10-4 ~1.9×10-4 m2 /s,進而較佳為0.4×10-4 ~1.8×10-4 m2 /s。另外,亦可將上述動力黏度設定為例如0.22×10-4 ~1.00×10-4 m2 /s,較佳為0.3×10-4 ~0.9×10-4 m2 /s,進而較佳為0.4×10-4 ~0.8×10-4 m2 /s。Further, the resin component was subjected to a dynamic viscosity test in accordance with JIS K 7233 (bubble viscosity meter method) (temperature: 25 ° C ± 0.5 ° C, solvent: butyl carbitol, resin component (solid content) concentration: 40% by mass) The measured dynamic viscosity is, for example, 0.22 × 10 -4 to 2.00 × 10 -4 m 2 /s, preferably 0.3 × 10 -4 to 1.9 × 10 -4 m 2 /s, and more preferably 0.4 × 10 - 4 ~ 1.8 × 10 -4 m 2 / s. Further, the dynamic viscosity may be set to, for example, 0.22 × 10 -4 to 1.00 × 10 -4 m 2 /s, preferably 0.3 × 10 -4 to 0.9 × 10 -4 m 2 /s, and more preferably 0.4 × 10 -4 ~ 0.8 × 10 -4 m 2 / s.

於樹脂成分之動力黏度超過上述範圍之情形時,有時無法賦予熱傳導性片材3優異之柔軟性及階差追隨性(後述)。另一方面,於樹脂成分之動力黏度未滿上述範圍之情形時,有時無法使氮化硼粒子配向於特定方向。When the dynamic viscosity of the resin component exceeds the above range, the thermal conductive sheet 3 may not be provided with excellent flexibility and step followability (described later). On the other hand, when the dynamic viscosity of the resin component is less than the above range, the boron nitride particles may not be aligned in a specific direction.

再者,於依據JIS K 7233(氣泡黏度計法)之動力黏度試驗中,將樹脂成分樣本中之氣泡之上升速度與標準樣本(已知動力黏度)中之氣泡之上升速度加以比較,判定上升速度一致之標準樣本之動力黏度為樹脂成分之動力黏度,藉此測定樹脂成分之動力黏度。Furthermore, in the dynamic viscosity test according to JIS K 7233 (bubble viscometer method), the rising speed of the bubble in the resin component sample is compared with the rising speed of the bubble in the standard sample (known dynamic viscosity), and the rise is judged. The dynamic viscosity of the standard sample with the same speed is the dynamic viscosity of the resin component, thereby determining the dynamic viscosity of the resin component.

並且,於熱傳導性片材3中,氮化硼粒子之體積基準之含有比例(固形物成分,即氮化硼粒子相對於樹脂成分及氮化硼粒子之總體積之體積百分率)例如為35體積%以上,較佳為60體積%以上,較佳為65體積%以上,通常例如為95體積%以下,較佳為90體積%以下。Further, in the thermally conductive sheet 3, the volume ratio of the boron nitride particles (the solid content component, that is, the volume fraction of the boron nitride particles to the total volume of the resin component and the boron nitride particles) is, for example, 35 volumes. % or more is preferably 60% by volume or more, preferably 65% by volume or more, and usually, for example, 95% by volume or less, preferably 90% by volume or less.

於氮化硼粒子之體積基準之含有比例未滿上述範圍之情形時,有時無法使氮化硼粒子於熱傳導性片材3中配向於特定方向。另一方面,於氮化硼粒子之體積基準之含有比例超過上述範圍之情形時,有時熱傳導性片材3會變脆,操作性下降。When the content ratio of the volume basis of the boron nitride particles is less than the above range, the boron nitride particles may not be aligned in the specific direction in the thermally conductive sheet 3. On the other hand, when the content ratio of the volume basis of the boron nitride particles exceeds the above range, the thermally conductive sheet 3 may become brittle and workability may deteriorate.

另外,氮化硼粒子相對於形成熱傳導性片材3之各成分(氮化硼粒子及樹脂成分)之總量(固形物成分總量)100質量份的質量基準之調配比例例如為40~95質量份,較佳為65~90質量份,樹脂成分相對於形成熱傳導性片材3之各成分之總量100質量份的質量基準之調配比例例如為5~60質量份,較佳為10~35質量份。再者,氮化硼粒子相對於樹脂成分100質量份之質量基準之調配比例例如為60~1900質量份,較佳為185~900質量份。In addition, the blending ratio of the boron nitride particles to the mass basis (the total amount of the solid content component) of 100 parts by mass of each component (the boron nitride particles and the resin component) forming the thermally conductive sheet 3 is, for example, 40 to 95. The mass fraction is preferably 65 to 90 parts by mass, and the blending ratio of the resin component to the mass basis of 100 parts by mass of the total amount of each component forming the thermally conductive sheet 3 is, for example, 5 to 60 parts by mass, preferably 10 to 10 parts by mass. 35 parts by mass. Further, the blending ratio of the boron nitride particles to 100 parts by mass of the resin component is, for example, 60 to 1900 parts by mass, preferably 185 to 900 parts by mass.

另外,於併用2種環氧樹脂(第1環氧樹脂及第2環氧樹脂)之情形時,第1環氧樹脂相對於第2環氧樹脂之質量比例(第1環氧樹脂之質量/第2環氧樹脂之質量)可根據各環氧樹脂(第1環氧樹脂及第2環氧樹脂)之軟化溫度等適當地設定,例如為1/99~99/1,較佳為10/90~90/10。In the case where two types of epoxy resins (the first epoxy resin and the second epoxy resin) are used in combination, the mass ratio of the first epoxy resin to the second epoxy resin (the mass of the first epoxy resin / The mass of the second epoxy resin can be appropriately set according to the softening temperature of each epoxy resin (the first epoxy resin and the second epoxy resin), and is, for example, 1/99 to 99/1, preferably 10/. 90~90/10.

再者,於樹脂成分中,除上述各成分(聚合物)以外,例如亦含有聚合物前驅物(例如,含有寡聚物之低分子量聚合物等)及/或單體。Further, the resin component may contain, for example, a polymer precursor (for example, a low molecular weight polymer containing an oligomer) and/or a monomer in addition to the above components (polymer).

其次,就形成熱傳導性片材3之方法加以說明。Next, a method of forming the thermally conductive sheet 3 will be described.

於此方法中,首先以上述調配比例調配上述各成分,並攪拌混合,藉此製備混合物。In this method, the above components are first formulated in the above-mentioned blending ratio, and stirred and mixed, whereby a mixture is prepared.

於攪拌混合中,為高效率地混合各成分,例如可將溶劑與上述各成分一併調配,或者例如可藉由加熱而使樹脂成分(較佳為熱塑性樹脂成分)熔融。In the stirring and mixing, the components are mixed with high efficiency. For example, the solvent may be blended together with the above components, or the resin component (preferably a thermoplastic resin component) may be melted by heating, for example.

作為溶劑,可舉出與上述同樣之有機溶劑。另外,於將上述硬化劑及/或硬化促進劑製備成溶劑溶液及/或溶劑分散液之情形時,可於攪拌混合時不追加溶劑,而直接以用以攪拌混合之混合溶劑之形式供給溶劑溶液及/或溶劑分散液之溶劑。或者,亦可於攪拌混合時以混合溶劑之形式進而追加溶劑。The solvent is the same as the above-mentioned organic solvent. Further, when the curing agent and/or the curing accelerator are prepared as a solvent solution and/or a solvent dispersion, the solvent may be supplied as a mixed solvent for stirring and mixing without adding a solvent during stirring and mixing. Solvent for solution and / or solvent dispersion. Alternatively, a solvent may be further added as a mixed solvent at the time of stirring and mixing.

於使用溶劑進行攪拌混合之情形時,於攪拌混合之後去除溶劑。In the case of stirring and mixing using a solvent, the solvent is removed after stirring and mixing.

為去除溶劑,例如於室溫下放置1~48小時,例如於40~100℃加熱0.5~3小時,或者例如於0.001~50 kPa之減壓環境下於20~60℃加熱0.5~3小時。To remove the solvent, for example, it is allowed to stand at room temperature for 1 to 48 hours, for example, at 40 to 100 ° C for 0.5 to 3 hours, or for example, at a temperature of 20 to 60 ° C for 0.5 to 3 hours under a reduced pressure of 0.001 to 50 kPa.

於藉由加熱使樹脂成分熔融之情形時,加熱溫度例如為樹脂成分之軟化溫度附近或超過其之溫度,具體而言為40~150℃,較佳為70~140℃。When the resin component is melted by heating, the heating temperature is, for example, near or above the softening temperature of the resin component, specifically 40 to 150 ° C, preferably 70 to 140 ° C.

其次,於此方法中熱壓所獲得之混合物。Next, the obtained mixture is hot pressed in this method.

具體而言,如圖2(a)所示,將混合物例如視需要經由2片脫模膜16而熱壓,藉此獲得壓製片材3A。關於熱壓之條件,溫度例如為50~150℃,較佳為60~140℃,壓力例如為1~100 MPa,較佳為5~50 MPa,時間例如為0.1~100分鐘,較佳為1~30分鐘。Specifically, as shown in FIG. 2( a ), the mixture is hot-pressed via, for example, two release films 16 as needed, whereby the pressed sheet 3A is obtained. With respect to the conditions of hot pressing, the temperature is, for example, 50 to 150 ° C, preferably 60 to 140 ° C, and the pressure is, for example, 1 to 100 MPa, preferably 5 to 50 MPa, and the time is, for example, 0.1 to 100 minutes, preferably 1 ~30 minutes.

進而較佳為真空熱壓混合物。真空熱壓時之真空度例如為1~100 Pa,較佳為5~50 Pa,溫度、壓力及時間與上述熱壓之條件相同。Further preferably, it is a vacuum hot press mixture. The degree of vacuum during vacuum hot pressing is, for example, 1 to 100 Pa, preferably 5 to 50 Pa, and the temperature, pressure and time are the same as those of the above hot pressing.

熱壓時之溫度、壓力及/或時間於上述範圍外之情形時,有時無法將熱傳導性片材3之空隙率P(後述)調整為所期望之值。When the temperature, pressure, and/or time at the time of hot pressing are outside the above range, the void ratio P (described later) of the thermally conductive sheet 3 may not be adjusted to a desired value.

藉由熱壓所獲得之壓製片材3A之厚度例如為50~1000 μm,較佳為100~800 μm。The pressed sheet 3A obtained by hot pressing has a thickness of, for example, 50 to 1000 μm, preferably 100 to 800 μm.

其次,於此方法中,如圖2(b)所示,將壓製片材3A分割成複數個(例如,4個),獲得分割片材3B(分割步驟)。於分割壓製片材3A時,以投影至厚度方向上時分割成複數個之方式將壓製片材3A沿其厚度方向切斷。再者,將壓製片材3A以各分割片材3B投影至厚度方向上時成為相同形狀之方式切斷。Next, in this method, as shown in Fig. 2(b), the pressed sheet 3A is divided into a plurality of (for example, four) sheets to obtain a divided sheet 3B (dividing step). When the pressed sheet 3A is divided, the pressed sheet 3A is cut in the thickness direction thereof so as to be divided into a plurality of pieces when projected in the thickness direction. In addition, the pressed sheet 3A is cut so that each of the divided sheets 3B has the same shape when projected in the thickness direction.

其次,於此方法中,如圖2(c)所示,將各分割片材3B於厚度方向上積層,獲得積層片材3C(積層步驟)。Next, in this method, as shown in FIG. 2(c), each of the divided sheets 3B is laminated in the thickness direction to obtain a laminated sheet 3C (layering step).

其後,於此方法中,如圖2(a)所示,熱壓積層片材3C(較佳為真空熱壓)(熱壓步驟)。熱壓之條件與上述混合物之熱壓條件相同。Thereafter, in this method, as shown in Fig. 2 (a), the laminated sheet 3C (preferably vacuum hot pressing) (hot pressing step) is formed. The conditions of hot pressing are the same as those of the above mixture.

熱壓後之積層片材3C之厚度例如為1 mm以下,較佳為0.8 mm以下,通常例如為0.05 mm以上,較佳為0.1 mm以上。The thickness of the laminated sheet 3C after the hot pressing is, for example, 1 mm or less, preferably 0.8 mm or less, and is usually 0.05 mm or more, preferably 0.1 mm or more.

其後,如參照圖3所示,為使氮化硼粒子14於熱傳導性片材3中於樹脂成分15中有效地配向於特定方向,而反覆實施上述分割步驟(圖2(b))、積層步驟(圖2(c))及熱壓步驟(圖2(a))之一系列步驟。重複次數並無特別限定,可根據氮化硼粒子之填充狀態而適當地設定,例如為1~10次,較佳為2~7次。Then, as shown in FIG. 3, in order to effectively arrange the boron nitride particles 14 in the heat conductive sheet 3 in the resin component 15 in a specific direction, the above-described dividing step (Fig. 2(b)) is repeated. A series of steps of the lamination step (Fig. 2(c)) and the hot pressing step (Fig. 2(a)). The number of repetitions is not particularly limited, and may be appropriately set depending on the filling state of the boron nitride particles, and is, for example, 1 to 10 times, preferably 2 to 7 times.

再者,於上述熱壓步驟(圖2(a))中,例如亦可藉由複數個軋輥等壓延混合物及積層片材3C。Further, in the hot pressing step (Fig. 2 (a)), for example, the mixture and the laminated sheet 3C may be rolled by a plurality of rolls or the like.

藉此,可形成圖2及圖3所示之熱傳導性片材3。Thereby, the thermally conductive sheet 3 shown in FIGS. 2 and 3 can be formed.

所形成之熱傳導性片材3之厚度例如為1 mm以下,較佳為0.8 mm以下,通常例如為0.05 mm以上,較佳為0.1 mm以上。The thickness of the thermally conductive sheet 3 to be formed is, for example, 1 mm or less, preferably 0.8 mm or less, and is usually 0.05 mm or more, preferably 0.1 mm or more.

另外,熱傳導性片材3中之氮化硼粒子14之體積基準之含有比例(固形物成分,即氮化硼粒子14相對於樹脂成分15及氮化硼粒子14之總體積之體積百分率)如上所述例如為35體積%以上(較佳為60體積%以上,進而較佳為75體積%以上),通常為95體積%以下(較佳為90體積%以下)。Further, the volume ratio of the boron nitride particles 14 in the thermally conductive sheet 3 (the solid content component, that is, the volume fraction of the total volume of the boron nitride particles 14 to the resin component 15 and the boron nitride particles 14) is as above The content is, for example, 35% by volume or more (preferably 60% by volume or more, more preferably 75% by volume or more), and usually 95% by volume or less (preferably 90% by volume or less).

於氮化硼粒子14之含有比例未滿上述範圍之情形時,有時無法使氮化硼粒子14於熱傳導性片材3中配向於特定方向。When the content ratio of the boron nitride particles 14 is less than the above range, the boron nitride particles 14 may not be aligned in a specific direction in the thermally conductive sheet 3.

另外,於樹脂成分15為熱硬化性樹脂成分之情形時,例如於未硬化狀態下反覆實施上述分割步驟(圖2(b))、積層步驟(圖2(c))及熱壓步驟(圖2(a))之一系列步驟,直接獲得未硬化狀態之熱傳導性片材3。再者,將未硬化狀態之熱傳導性片材3安裝於攝像零件1後,視需要使其熱硬化。When the resin component 15 is a thermosetting resin component, for example, the above-described dividing step (Fig. 2(b)), the laminating step (Fig. 2(c)), and the hot pressing step (Fig. 2) are repeatedly performed in an uncured state. A series of steps of 2(a)) directly obtains the thermally conductive sheet 3 in an uncured state. Further, after the thermally conductive sheet 3 in an uncured state is attached to the image pickup unit 1, it is thermally cured as necessary.

並且,於如此形成之熱傳導性片材3中,如圖3及其部分擴大模式圖所示,氮化硼粒子14之長邊方向LD沿著交叉(正交)於熱傳導性片材3之厚度方向TD之面方向SD配向。Further, in the thermally conductive sheet 3 thus formed, as shown in FIG. 3 and a partial enlarged pattern thereof, the longitudinal direction LD of the boron nitride particles 14 is along the intersection (orthogonal) to the thickness of the thermally conductive sheet 3. The orientation of the direction of the TD is SD alignment.

另外,氮化硼粒子14之長邊方向LD與熱傳導性片材3之面方向SD所成之角度之算術平均(氮化硼粒子14相對於熱傳導性片材3之配向角度α)例如為25度以下,較佳為20度以下,通常為0度以上。The arithmetic mean of the angle between the longitudinal direction LD of the boron nitride particles 14 and the surface direction SD of the thermally conductive sheet 3 (the alignment angle α of the boron nitride particles 14 with respect to the thermally conductive sheet 3) is, for example, 25 Below the degree, it is preferably 20 degrees or less, and usually 0 degree or more.

再者,氮化硼粒子14相對於熱傳導性片材3之配向角度α係藉由以下方法算出:沿厚度方向利用截面拋光儀(CP)對熱傳導性片材3進行切斷加工,以能夠觀察到200個以上之氮化硼粒子14之視野倍率利用掃描型電子顯微鏡(SEM)拍攝由此所顯現出之剖面,自所獲得之SEM照片,取得氮化硼粒子14之長邊方向LD相對於熱傳導性片材3之面方向SD(相對於厚度方向TD正交之方向)之傾斜角,算出其平均值。Further, the alignment angle α of the boron nitride particles 14 with respect to the thermally conductive sheet 3 is calculated by cutting the thermally conductive sheet 3 by a cross-section polisher (CP) in the thickness direction so as to be able to observe The cross-sectional magnification of 200 or more boron nitride particles 14 was taken by a scanning electron microscope (SEM) to obtain a cross section, and the long-side direction LD of the boron nitride particles 14 was obtained from the obtained SEM photograph. The inclination angle of the surface direction SD of the thermally conductive sheet 3 (the direction orthogonal to the thickness direction TD) was calculated and the average value was calculated.

藉此,熱傳導性片材3之面方向SD之熱傳導率為4 W/m‧K以上,較佳為5 W/m‧K以上,更佳為10 W/m‧K以上,進而較佳為15 W/m‧K以上,特佳為25 W/m‧K以上,通常為200 W/m‧K以下。Thereby, the thermal conductivity of the surface direction SD of the thermally conductive sheet 3 is 4 W/m‧K or more, preferably 5 W/m‧K or more, more preferably 10 W/m‧K or more, and further preferably 15 W/m‧K or more, especially preferably 25 W/m‧K or more, usually less than 200 W/m‧K.

再者,熱傳導性片材3之面方向SD之熱傳導率於樹脂成分15為熱硬化性樹脂成分之情形時,於熱硬化前後實質上相同。In addition, when the thermal conductivity of the surface direction SD of the thermally conductive sheet 3 is a thermosetting resin component, the resin component 15 is substantially the same before and after thermosetting.

若熱傳導性片材3之面方向SD之熱傳導率未滿上述範圍,則面方向SD之熱傳導性不充分,因此有時無法用於要求上述面方向SD之熱傳導性之放熱用途。When the thermal conductivity of the surface direction SD of the thermally conductive sheet 3 is less than the above range, the thermal conductivity in the plane direction SD is insufficient, and thus it may not be used for the heat release application requiring the thermal conductivity of the surface direction SD.

再者,熱傳導性片材3之面方向SD之熱傳導率藉由脈衝加熱法測定。脈衝加熱法中係使用氙燈閃光法導熱分析儀「LFA-447型」(NETZSCH公司製造)。Further, the thermal conductivity of the surface direction SD of the thermally conductive sheet 3 was measured by a pulse heating method. In the pulse heating method, a xenon flash thermal conductivity analyzer "LFA-447 type" (manufactured by NETZSCH Co., Ltd.) was used.

另外,熱傳導性片材3之厚度方向TD之熱傳導率例如為0.5~15 W/m‧K,較佳為1~10 W/m‧K。Further, the thermal conductivity of the thermally conductive sheet 3 in the thickness direction TD is, for example, 0.5 to 15 W/m‧K, preferably 1 to 10 W/m‧K.

再者,熱傳導性片材3之厚度方向TD之熱傳導率藉由脈衝加熱法、雷射閃光法或TWA(Temperature Wave Analysis,溫度波分析)法測定。脈衝加熱法中係使用與上述相同者,雷射閃光法中係使用「TC-9000」(ULVAC理工公司製造),TWA法中係使用「ai-Phase mobile」(ai-Phase公司製造)。Further, the thermal conductivity of the thermally conductive sheet 3 in the thickness direction TD is measured by a pulse heating method, a laser flash method, or a TWA (Temperature Wave Analysis) method. In the pulse heating method, the same as the above is used, and "TC-9000" (manufactured by ULVAC Corporation) is used in the laser flash method, and "ai-Phase mobile" (manufactured by ai-Phase Co., Ltd.) is used in the TWA method.

藉此,熱傳導性片材3之面方向SD之熱傳導率相對於熱傳導性片材3之厚度方向TD之熱傳導率的比(面方向SD之熱傳導率/厚度方向TD之熱傳導率)例如為1.5以上,較佳為3以上,進而較佳為4以上,通常為20以下。Thereby, the ratio of the thermal conductivity of the surface direction SD of the thermally conductive sheet 3 to the thermal conductivity of the thickness direction TD of the thermally conductive sheet 3 (thermal conductivity in the plane direction SD / thermal conductivity in the thickness direction TD) is, for example, 1.5 or more. It is preferably 3 or more, more preferably 4 or more, and usually 20 or less.

另外,圖2中雖未圖示,但熱傳導性片材3中例如形成有空隙(間隙)。Further, although not shown in FIG. 2, a void (gap) is formed in the thermally conductive sheet 3, for example.

熱傳導性片材3中之空隙之比例、即空隙率P可藉由氮化硼粒子14之含有比例(體積基準)、進而可藉由氮化硼粒子14及樹脂成分15之混合物之熱壓(圖2(a))之溫度、壓力及/或時間而進行調整,具體而言,可藉由將上述熱壓(圖2(a))之溫度、壓力及/或時間設定於上述範圍內而進行調整。The ratio of the voids in the thermally conductive sheet 3, that is, the void ratio P, can be made by the ratio of the boron nitride particles 14 (volume basis), and further by the hot pressing of a mixture of the boron nitride particles 14 and the resin component 15 ( Adjusting the temperature, pressure and/or time of Fig. 2(a)), specifically, by setting the temperature, pressure and/or time of the hot pressing (Fig. 2(a)) within the above range Make adjustments.

熱傳導性片材3中之空隙率P例如為30體積%以下,較佳為10體積%以下。The porosity P in the thermally conductive sheet 3 is, for example, 30% by volume or less, preferably 10% by volume or less.

上述空隙率P例如藉由如下方法測定:首先,利用截面拋光儀(CP)沿厚度方向對熱傳導性片材3進行切斷加工,利用掃描型電子顯微鏡(SEM)以200倍觀察由此顯現出之剖面,獲得圖像,自所獲得之圖像,對空隙部分與其以外之部分進行二值化處理,其次,算出空隙部分相對於熱傳導性片材3整體之剖面積的面積比。The void ratio P is measured, for example, by first cutting the thermally conductive sheet 3 in the thickness direction by a cross-section polisher (CP), and observing it by a scanning electron microscope (SEM) at 200 times. In the cross section, an image is obtained, and from the obtained image, the void portion and the other portions are binarized, and then, the area ratio of the void portion to the entire cross-sectional area of the thermally conductive sheet 3 is calculated.

再者,於熱傳導性片材3中,硬化後之空隙率P2相對於硬化前之空隙率P1例如為100%以下,較佳為50%以下。Further, in the thermally conductive sheet 3, the void ratio P2 after curing is, for example, 100% or less, preferably 50% or less, with respect to the void ratio P1 before curing.

於空隙率P(P1)之測定中,於樹脂成分15為熱硬化性樹脂成分之情形時,係使用熱硬化前之熱傳導性片材3。In the measurement of the porosity P (P1), when the resin component 15 is a thermosetting resin component, the thermally conductive sheet 3 before thermal curing is used.

只要熱傳導性片材3之空隙率P於上述範圍內,則可提高熱傳導性片材3之階差追隨性(後述)。When the porosity P of the thermally conductive sheet 3 is within the above range, the step followability (described later) of the thermally conductive sheet 3 can be improved.

另外,關於熱傳導性片材3,於依據JIS K 5600-5-1之圓筒形心軸法之耐彎曲性試驗中,以下述試驗條件進行評價時,較佳為未觀察到斷裂。Further, in the bending resistance test of the cylindrical conductive mandrel according to the cylindrical mandrel method according to JIS K 5600-5-1, it is preferable that no fracture is observed when the thermal conductive sheet 3 is evaluated under the following test conditions.

試驗條件Test conditions

試驗裝置:I型Test device: Type I

心軸:直徑10 mmMandrel: 10 mm in diameter

彎曲角度:90度以上Bending angle: 90 degrees or more

熱傳導性片材3之厚度:0.3 mmThickness of the thermally conductive sheet 3: 0.3 mm

再者,將I型試驗裝置之立體圖示於圖5及圖6,以下說明I型試驗裝置。Further, a three-dimensional diagram of the I-type test apparatus is shown in Figs. 5 and 6, and a type I test apparatus will be described below.

於圖5及圖6中,I型試驗裝置90具備:第1平板91、與第1平板91並列配置之第2平板92、為使第1平板91及第2平板92相對旋動而設置之心軸(旋轉軸)93。In FIG. 5 and FIG. 6, the I-type test apparatus 90 includes a first flat plate 91 and a second flat plate 92 arranged in parallel with the first flat plate 91, and is provided to rotate the first flat plate 91 and the second flat plate 92 relatively. Mandrel (rotation axis) 93.

第1平板91大致形成為矩形平板狀。另外,第1平板91之一端部(活動端部)上設置有止動部94。止動部94係以沿著第2平板92之一端部延伸之方式形成於第2平板92之表面上。The first flat plate 91 is formed substantially in a rectangular flat plate shape. Further, a stopper portion 94 is provided at one end portion (movable end portion) of the first flat plate 91. The stopper portion 94 is formed on the surface of the second flat plate 92 so as to extend along one end portion of the second flat plate 92.

第2平板92大致形成為矩形平板狀,係以其1邊與第1平板91之1邊(與設置有止動部94之一端部相反之側之他端部(基端部)之1邊)相鄰接之方式配置。The second flat plate 92 is formed in a substantially rectangular flat shape, and one side of the first flat plate 92 and one side of the first flat plate 91 (one end portion (base end portion) on the side opposite to the end portion on which one end of the stopper portion 94 is provided) ) Adjacent connection configuration.

心軸93係以沿著相鄰接之第1平板91及第2平板92之1邊延伸之方式形成。The mandrel 93 is formed to extend along one side of the adjacent first flat plate 91 and second flat plate 92.

如圖5所示,此I型試驗裝置90於開始耐彎曲性試驗之前,使第1平板91之表面與第2平板92之表面成為一個平面。As shown in Fig. 5, the type I test apparatus 90 has the surface of the first flat plate 91 and the surface of the second flat plate 92 as one plane before the start of the bending resistance test.

並且,為實施耐彎曲性試驗,而將熱傳導性片材3載置於第1平板91之表面與第2平板92之表面。再者,將熱傳導性片材3以其1邊抵接於止動部94之方式載置。Further, in order to carry out the bending resistance test, the thermally conductive sheet 3 is placed on the surface of the first flat plate 91 and the surface of the second flat plate 92. Further, the thermally conductive sheet 3 is placed such that one side thereof abuts against the stopper portion 94.

其次,如圖6所示,使第1平板91及第2平板92相對地旋動。具體而言,以心軸93為中心,使第1平板91之活動端部與第2平板92之活動端部旋動特定之角度。詳細而言,使第1平板91及第2平板92以彼等之活動端部之表面接近(對向)之方式旋動。Next, as shown in FIG. 6, the first flat plate 91 and the second flat plate 92 are relatively rotated. Specifically, the movable end portion of the first flat plate 91 and the movable end portion of the second flat plate 92 are rotated at a specific angle around the mandrel 93. Specifically, the first flat plate 91 and the second flat plate 92 are rotated such that the surfaces of the movable end portions thereof approach (opposite).

藉此,使熱傳導性片材3一面追隨第1平板91及第2平板92之旋動,一面以心軸93為中心彎曲。Thereby, the thermally conductive sheet 3 is bent around the mandrel 93 while following the rotation of the first flat plate 91 and the second flat plate 92.

進而較佳為熱傳導性片材3於上述試驗條件中,即便將彎曲角度設定為180度,亦未觀察到斷裂。Further, it is preferable that the thermally conductive sheet 3 has no fracture observed even when the bending angle is set to 180 degrees under the above test conditions.

再者,於樹脂成分15為熱硬化性樹脂成分之情形時,供彎曲性試驗之熱傳導性片材3為半硬化(B階段狀態)之熱傳導性片材3。In the case where the resin component 15 is a thermosetting resin component, the thermally conductive sheet 3 for the bendability test is a semi-cured (B-stage state) thermally conductive sheet 3.

於上述彎曲角度之耐彎曲性試驗中,當熱傳導性片材3觀察到斷裂之情形時,有時無法賦予熱傳導性片材3優異之柔軟性。In the bending resistance test of the above-described bending angle, when the thermally conductive sheet 3 is observed to be broken, the thermal conductive sheet 3 may not be provided with excellent flexibility.

另外,該熱傳導性片材3於依據JIS K 7171(2008年)之三點彎曲試驗中,以下述試驗條件進行評價時,例如未觀察到斷裂。Further, in the three-point bending test according to JIS K 7171 (2008), the heat conductive sheet 3 was evaluated under the following test conditions, and for example, no fracture was observed.

試驗條件Test conditions

試驗片:尺寸20 mm×15 mmTest piece: size 20 mm × 15 mm

支點間距離:5 mmDistance between fulcrums: 5 mm

試驗速度:20 mm/min(壓子之下壓速度)Test speed: 20 mm/min (pressure speed under the pressure)

彎曲角度:120度Bending angle: 120 degrees

評價方法:目視觀察以上述試驗條件進行試驗時試驗片之中央部有無裂痕等斷裂。Evaluation method: The crack in the central portion of the test piece at the time of the test under the above test conditions was observed by visual observation.

再者,於三點彎曲試驗中樹脂成分3為熱硬化性樹脂成分之情形時,係使用熱硬化前之熱傳導性片材3。In the case where the resin component 3 is a thermosetting resin component in the three-point bending test, the thermally conductive sheet 3 before thermal curing is used.

因此,該熱傳導性片材3於上述三點彎曲試驗中未觀察到斷裂,因此階差追隨性優異。再者,所謂階差追隨性,係指將熱傳導性片材3設置於有階差之設置對象上時,以沿著該階差密接之方式追隨之特性。Therefore, the thermally conductive sheet 3 was not observed to have been broken in the above three-point bending test, and therefore the step followability was excellent. In addition, the step followability refers to the fact that when the thermally conductive sheet 3 is placed on a setting object having a step difference, the characteristics are closely followed along the step.

另外,熱傳導性片材3上例如可附著文字、記號等標記。即,熱傳導性片材3之標記附著性優異。所謂標記附著性,係指使上述標記可靠地附著於熱傳導性片材3之特性。Further, for example, a mark such as a character or a mark may be attached to the thermally conductive sheet 3. That is, the heat conductive sheet 3 is excellent in the label adhesion property. The label adhesion refers to a property of reliably adhering the above-mentioned label to the thermally conductive sheet 3.

具體而言,標記可藉由印刷或刻印等附著於熱傳導性片材3上(塗佈、定著或固著)。Specifically, the mark can be attached (coated, fixed or fixed) to the thermally conductive sheet 3 by printing or imprinting or the like.

作為印刷,例如可舉出噴墨印刷、凸版印刷、凹版印刷、雷射印刷等。Examples of the printing include inkjet printing, letterpress printing, gravure printing, and laser printing.

再者,藉由噴墨印刷、凸版印刷或凹版印刷而印刷標記之情形時,例如可將用以提高標記之定著性之油墨定著層設置於熱傳導性片材3之表面(印刷側表面)。Further, when printing a mark by inkjet printing, letterpress printing or gravure printing, for example, an ink fixing layer for improving the fixing property of the marking can be provided on the surface of the heat conductive sheet 3 (printing side surface) ).

另外,於藉由雷射印刷而印刷標記之情形時,例如可將用以提高標記之定著性之色劑定著層設置於熱傳導性片材3之表面(印刷側表面)。Further, in the case of printing a mark by laser printing, for example, a toner fixing layer for improving the fixing property of the mark can be provided on the surface (printing side surface) of the heat conductive sheet 3.

作為刻印,例如可舉出雷射刻印、打刻等。As the imprinting, for example, laser marking, engraving, and the like can be cited.

另外,如此所得之熱傳導性片材3通常為絕緣性。Further, the thermally conductive sheet 3 thus obtained is usually insulative.

並且,於獲得此種攝像零件1時,並無特別限制,例如,首先製造攝像元件2,其後於所獲得之攝像元件2之背面貼合熱傳導性片材3。Further, when such an image pickup element 1 is obtained, it is not particularly limited. For example, the image pickup element 2 is first produced, and then the heat conductive sheet 3 is bonded to the back surface of the obtained image pickup element 2.

作為製造攝像元件2之方法,並無特別限制,可採用公知之方法。The method of manufacturing the image pickup element 2 is not particularly limited, and a known method can be employed.

更具體而言,雖無圖示,但例如利用公知之方法於受光基板7中埋設受光元件10,其次依序積層絕緣層8及導體圖案9,藉此於受光基板7之上形成電路基板6。其後,於電路基板6之上載置濾光器5及聚光透鏡4。藉此可獲得攝像元件2。More specifically, although not shown, the light-receiving element 10 is buried in the light-receiving substrate 7 by a known method, and the insulating layer 8 and the conductor pattern 9 are sequentially laminated, thereby forming the circuit substrate 6 on the light-receiving substrate 7. . Thereafter, the filter 5 and the collecting lens 4 are placed on the circuit board 6. Thereby, the image pickup element 2 can be obtained.

其次,於該方法中,於所獲得之攝像元件2之背面貼合熱傳導性片材3。Next, in this method, the thermally conductive sheet 3 is bonded to the back surface of the obtained image pickup element 2.

再者,此時,當於熱傳導性片材3中樹脂成分15為熱硬化性樹脂成分之情形時,較佳為將B階段狀態之熱傳導性片材3貼合於攝像元件2之背面。藉此獲得攝像零件1。In the case where the resin component 15 is a thermosetting resin component in the thermally conductive sheet 3, it is preferable to bond the thermally conductive sheet 3 in the B-stage state to the back surface of the image sensor 2. Thereby, the imaging unit 1 is obtained.

另外,雖未圖示,但當於該攝像零件1中熱傳導性片材3為B階段狀態之情形時,視需要可加熱攝像零件1,使熱傳導性片材3熱硬化。另外,熱硬化之時序及條件根據目的及用途而適當地決定。Further, although not shown, when the thermally conductive sheet 3 is in the B-stage state in the image pickup device 1, the image pickup member 1 can be heated as needed, and the thermally conductive sheet 3 can be thermally cured. Further, the timing and conditions of the thermal curing are appropriately determined depending on the purpose and use.

進而,雖未圖示,但於該攝像零件1中,視需要可進而適當地配置發散透鏡、光導構件等。Further, although not shown, a diverging lens, a light guiding member, and the like may be appropriately disposed in the imaging component 1 as needed.

並且,此種攝像零件1安裝於數位相機、數位攝影機等攝像裝置上。Further, such an image pickup unit 1 is mounted on an image pickup apparatus such as a digital camera or a digital camera.

並且,在攝像裝置中,於攝像零件1中,自其光入射面(聚光透鏡4之光入射面)入射之光由聚光透鏡4聚光,穿透濾光器5(綠色濾光器5G、紅色濾光器5R或藍色濾光器5B)與電路基板6之絕緣層8部分。藉此,光到達受光基板7(受光元件10)。Further, in the image pickup device, light incident from the light incident surface (light incident surface of the condensing lens 4) is collected by the condensing lens 4, and penetrates the filter 5 (green filter). 5G, red filter 5R or blue filter 5B) and the insulating layer 8 portion of the circuit substrate 6. Thereby, the light reaches the light receiving substrate 7 (light receiving element 10).

到達受光基板7之光於受光元件10中轉換成電訊號,該電訊號由導體圖案9傳遞,用於未圖示之外部構件中。The light reaching the light-receiving substrate 7 is converted into an electrical signal by the light-receiving element 10, and the electric signal is transmitted by the conductor pattern 9 for use in an external member (not shown).

此時,於攝像元件2中,存在於電路基板6或受光基板7等中產生熱之情形,但攝像元件2存在若處於高溫下則會發生產生雜訊等不良情況之情形,另外,存在感度根據其溫度條件而產生變化之情形。At this time, in the image pickup device 2, heat is generated in the circuit board 6 or the light-receiving substrate 7 or the like. However, when the image pickup device 2 is at a high temperature, problems such as noise generation may occur, and sensitivity may exist. A situation that changes depending on its temperature conditions.

相對於此,於攝像零件1中,在配置於攝像元件2之光入射面之相反側的背面具備熱傳導性片材3,詳細而言,具備含有板狀氮化硼粒子,且相對於厚度方向正交之方向(即,受光基板7之背面延伸之面方向)上之熱傳導率為4 W/m‧K以上之熱傳導性片材3。因此,可使自受光基板7之背面產生之熱於面方向上均勻地擴散,減少溫度不均(實現溫度之均勻化),並且可確保優異之放熱性,其結果,可實現感度之提高。On the other hand, in the imaging device 1 , the thermally conductive sheet 3 is provided on the back surface disposed on the opposite side of the light incident surface of the image sensor 2, and in detail, it includes plate-like boron nitride particles and is oriented in the thickness direction. The thermally conductive sheet 3 having a thermal conductivity of 4 W/m‧K or more in the direction orthogonal to the direction (that is, the direction in which the back surface of the light-receiving substrate 7 extends). Therefore, the heat generated from the back surface of the light-receiving substrate 7 can be uniformly diffused in the surface direction, the temperature unevenness can be reduced (the temperature is uniformized), and the excellent heat dissipation property can be ensured, and as a result, the sensitivity can be improved.

另外,由於此種熱傳導性片材3較之石墨片材可更低廉地製造,因此可實現低成本化。Further, since such a thermally conductive sheet 3 can be manufactured at a lower cost than the graphite sheet, cost reduction can be achieved.

進而,由於石墨片材為導電性,因此存在例如以下不良情況:若產生缺損等,則其碎片於攝像裝置之內部引起短路。Further, since the graphite sheet is electrically conductive, for example, there is a problem that if a defect occurs or the like, the chip is short-circuited inside the image pickup apparatus.

然而,由於此種熱傳導性片材3為絕緣性,因此即便於攝像裝置(未圖示)之內部產生缺損之情形時,亦可防止短路之產生。However, since such a thermally conductive sheet 3 is insulative, it is possible to prevent the occurrence of a short circuit even when a defect occurs inside the imaging device (not shown).

圖4為本發明之攝像零件1之其他實施形態之概略構成圖。Fig. 4 is a schematic block diagram showing another embodiment of the image pickup unit 1 of the present invention.

再者,關於對應於上述各部之構件,於圖4中標記相同之參照符號,省略其詳細說明。It is to be noted that the same reference numerals are given to the components in the above-mentioned respective portions, and the detailed description thereof will be omitted.

於上述說明中,攝像元件2係採用於聚光透鏡4及濾光器5之下配置有電路基板6、於該電路基板6之下配置有受光基板7之表面照射型CMOS影像感測器,攝像元件2例如亦可採用公知之背面照射型CMOS影像感測器。In the above description, the image pickup device 2 is a surface illumination type CMOS image sensor in which the circuit board 6 is disposed under the condensing lens 4 and the filter 5, and the light receiving substrate 7 is disposed under the circuit board 6. As the image pickup element 2, for example, a known back side illumination type CMOS image sensor can be used.

更具體而言,於該實施形態中,如圖4所示,於聚光透鏡4及濾光器5之下配置受光基板7,於該受光基板7之下配置電路基板6。More specifically, in this embodiment, as shown in FIG. 4, the light-receiving substrate 7 is disposed under the condensing lens 4 and the filter 5, and the circuit board 6 is placed under the light-receiving substrate 7.

再者,此時受光基板7通常削掉聚矽氧樹脂等,實施薄型化。In addition, at this time, the light-receiving substrate 7 is usually cut off by a polyoxymethylene resin or the like, and is reduced in thickness.

並且,於該攝像零件1中,於電路基板6之背面(攝像元件2之背面)貼合熱傳導性片材3。Further, in the image pickup device 1, the thermally conductive sheet 3 is bonded to the back surface of the circuit board 6 (the back surface of the image sensor 2).

此種攝像零件1亦與上述同樣,可確保優異之放熱性,實現溫度之均勻化,進而可實現低成本化。In the same manner as described above, the image pickup unit 1 can ensure excellent heat dissipation, achieve uniform temperature, and achieve cost reduction.

此外,於此種攝像零件1中,由於攝像元件2為背面照射型CMOS影像感測器,因此可提高光到達受光基板7(受光元件10)之效率,實現感度之提高。Further, in the image pickup device 1, the image pickup device 2 is a back side illumination type CMOS image sensor, so that the efficiency of light reaching the light receiving substrate 7 (light receiving element 10) can be improved, and the sensitivity can be improved.

即,於攝像元件2為表面照射型CMOS影像感測器之攝像零件1(參照圖1)中,自光入射面入射之光在到達受光基板7(受光元件10)之前穿透電路基板6。因此,存在光由電路基板6內之導體圖案9反射,而無法充分地確保光到達受光基板7(受光元件10)之效率之情形。In other words, in the image pickup device 1 (see FIG. 1) in which the image pickup device 2 is a surface illumination type CMOS image sensor, light incident from the light incident surface penetrates the circuit substrate 6 before reaching the light receiving substrate 7 (light receiving element 10). Therefore, light is reflected by the conductor pattern 9 in the circuit board 6, and the efficiency of the light reaching the light-receiving board 7 (light-receiving element 10) cannot be sufficiently ensured.

然而,於攝像元件2為背面照射型CMOS影像感測器之攝像零件1(參照圖4)中,自光入射面入射之光在穿透電路基板6之前到達受光基板7(受光元件10),因此可抑制由導體圖案9引起之光之反射等,充分地確保光到達受光基板7(受光元件10)之效率。However, in the imaging device 1 (see FIG. 4) in which the imaging element 2 is a back-illuminated CMOS image sensor, light incident from the light incident surface reaches the light receiving substrate 7 (light receiving element 10) before penetrating the circuit substrate 6. Therefore, it is possible to suppress the reflection of light by the conductor pattern 9 and the like, and to sufficiently ensure the efficiency of the light reaching the light-receiving substrate 7 (light-receiving element 10).

實施例Example

以下揭示實施例,更加具體地說明本發明,但本發明絲毫不受實施例限定。The invention will be more specifically described below, but the invention is not limited by the examples.

製造例1(熱傳導性片材之製造)Production Example 1 (Manufacture of Thermal Conductive Sheet)

調配PT-110(商品名、板狀之氮化硼粒子、平均粒徑(光散射法)45 μm、Momentive Performance Materials Japan公司製造)13.42 g、JER828(商品名、雙酚A型環氧樹脂、第1環氧樹脂、液狀、環氧當量184~194 g/eqiv.、軟化溫度(環球法)未滿25℃、熔融黏度(80℃)70 mPa‧s、日本環氧樹脂公司製造)1.0 g、及EPPN-501HY(商品名、三苯基甲烷型環氧樹脂、第2環氧樹脂、固體狀、環氧當量163~175 g/eqiv.、軟化溫度(環球法)57~63℃、日本化藥公司製造)2.0 g、硬化劑(Curezol 2P4MHZ-PW(商品名、四國化成公司製造)之5質量%甲基乙基酮分散液)3 g(固形物成分0.15 g)(相對於作為環氧樹脂之JER828及EPPN-501HY之總量為5質量%)並加以攪拌,於室溫(23℃)下放置1晚,使甲基乙基酮(硬化劑之分散介質)揮發,而製備半固體狀之混合物。PT-110 (trade name, plate-shaped boron nitride particles, average particle diameter (light scattering method) 45 μm, manufactured by Momentive Performance Materials Japan Co., Ltd.) 13.42 g, JER828 (trade name, bisphenol A epoxy resin, The first epoxy resin, liquid, epoxy equivalent 184 ~ 194 g / eqiv., softening temperature (global method) less than 25 ° C, melt viscosity (80 ° C) 70 mPa ‧ s, manufactured by Japan Epoxy resin company) 1.0 g, and EPPN-501HY (trade name, triphenylmethane epoxy resin, second epoxy resin, solid, epoxy equivalent 163 ~ 175 g / eqiv., softening temperature (ring and ball method) 57 ~ 63 ° C, Manufactured by Nippon Kasei Co., Ltd., 2.0 g, hardener (5 mass% methyl ethyl ketone dispersion of Curezol 2P4MHZ-PW (trade name, manufactured by Shikoku Chemicals Co., Ltd.)) 3 g (solid content 0.15 g) (relative to The total amount of JER828 and EPPN-501HY as epoxy resin was 5% by mass), and the mixture was stirred at room temperature (23 ° C) for 1 night to volatilize methyl ethyl ketone (the dispersion medium of the hardener). A semi-solid mixture was prepared.

再者,於上述調配中,氮化硼粒子相對於硬化劑除外之固形物成分(即,氮化硼粒子與環氧樹脂之固形物成分)之總體積之體積百分率(體積%)為70體積%。Furthermore, in the above formulation, the volume fraction (% by volume) of the total volume of the boron nitride particles relative to the solid content of the hardener (ie, the solid content of the boron nitride particles and the epoxy resin) is 70 volumes. %.

其次,以經聚矽氧處理之2片脫模膜夾住所獲得之混合物,利用真空熱壓機,於80℃、10 Pa之環境(真空環境)下,以5噸之荷重(20 MPa)對該等熱壓2分鐘,獲得厚度0.3 mm之壓製片材(參照圖2(a))。Next, the obtained mixture was sandwiched by two release films treated with polyoxyxylene, and a vacuum heat press was used at a temperature of 80 ° C and 10 Pa (vacuum environment) at a load of 5 tons (20 MPa). These hot pressing was carried out for 2 minutes to obtain a pressed sheet having a thickness of 0.3 mm (refer to Fig. 2 (a)).

其後,以投影至壓製片材之厚度方向上時分割成複數個之方式切斷所獲得之壓製片材,藉此獲得分割片材(參照圖2(b)),接著將分割片材於厚度方向上積層而獲得積層片材(參照圖2(c))。Thereafter, the obtained pressed sheet is cut into a plurality of pieces when projected in the thickness direction of the pressed sheet, thereby obtaining a divided sheet (see FIG. 2(b)), and then the divided sheet is then A laminated sheet is obtained by laminating in the thickness direction (see Fig. 2(c)).

接著,藉由與上述相同之真空熱壓機,利用與上述相同之條件對所獲得之積層片材進行熱壓(參照圖2(a))。Next, the obtained laminated sheet was hot-pressed by the same vacuum heat press as described above under the same conditions as above (see Fig. 2(a)).

其次,反覆進行4次上述切斷、積層及熱壓之一系列操作(參照圖2),獲得厚度為0.3 mm之熱傳導性片材(未硬化狀態)(參照圖3)。Next, one of the above-described cutting, laminating, and hot pressing operations (see FIG. 2) was repeated four times to obtain a thermally conductive sheet having a thickness of 0.3 mm (unhardened state) (see FIG. 3).

製造例2~9及11~16Manufacturing Examples 2~9 and 11~16

根據表1~表3之調配配方及製造條件,與製造例1同樣地進行處理,獲得熱傳導性片材According to the formulation and manufacturing conditions of Tables 1 to 3, the same treatment as in Production Example 1 was carried out to obtain a thermally conductive sheet.

製造例10Manufacturing Example 10

根據表2之調配配方,調配並攪拌各成分(氮化硼粒子及聚乙烯),藉此製備混合物。即,於各成分之攪拌中,加熱至130℃,使聚乙烯熔融。According to the formulation of Table 2, the components (boron nitride particles and polyethylene) were blended and stirred, thereby preparing a mixture. That is, the mixture was heated to 130 ° C during the stirring of each component to melt the polyethylene.

其次,以經聚矽氧處理之2片脫模膜夾住所獲得之混合物,利用真空熱壓機,於120℃、10 Pa之環境(真空環境)下,以1噸之荷重(4 MPa)對該等熱壓2分鐘,藉此獲得厚度0.3 mm之壓製片材(參照圖2(a))。Next, the obtained mixture was sandwiched by two release films treated with polyoxymethylene, and subjected to a vacuum heat press at a temperature of 120 ° C and 10 Pa (vacuum atmosphere) at a load of 1 ton (4 MPa). These hot pressing were carried out for 2 minutes, whereby a pressed sheet having a thickness of 0.3 mm was obtained (refer to Fig. 2 (a)).

其後,以投影至壓製片材之厚度方向上時分割成複數個之方式切斷所獲得之壓製片材,藉此獲得分割片材(參照圖2(b)),接著將分割片材於厚度方向上積層而獲得積層片材(參照圖2(c))。Thereafter, the obtained pressed sheet is cut into a plurality of pieces when projected in the thickness direction of the pressed sheet, thereby obtaining a divided sheet (see FIG. 2(b)), and then the divided sheet is then A laminated sheet is obtained by laminating in the thickness direction (see Fig. 2(c)).

接著,藉由與上述相同之真空熱壓機,利用與上述相同之條件對所獲得之積層片材進行熱壓(參照圖2(a))。Next, the obtained laminated sheet was hot-pressed by the same vacuum heat press as described above under the same conditions as above (see Fig. 2(a)).

其次,反覆進行4次上述切斷、積層及熱壓之一系列操作(參照圖2),獲得厚度為0.3 mm之熱傳導性片材(未硬化狀態)。Next, a series of operations of cutting, laminating, and hot pressing were repeated four times (see Fig. 2) to obtain a thermally conductive sheet having a thickness of 0.3 mm (unhardened state).

實施例1Example 1

於表面照射型影像感測器之配置於光入射面之相反側之背面上貼合製造例1中獲得之未硬化(B階段)狀態之熱傳導性片材(參照圖1)。其後,將該等於150℃加熱120分鐘,藉此使熱傳導性片材熱硬化,製造攝像零件。The thermally conductive sheet in the uncured (B-stage) state obtained in Production Example 1 was bonded to the back surface of the surface-illuminated image sensor disposed on the opposite side of the light incident surface (see FIG. 1). Thereafter, the film was heated at 150 ° C for 120 minutes to thermally cure the thermally conductive sheet to produce an image pickup member.

實施例2~16Example 2~16

使用製造例2~16中獲得之熱傳導性片材,以與實施例1相同之方式製造實施例2~16之攝像零件。The image-sensitive components of Examples 2 to 16 were produced in the same manner as in Example 1 using the thermally conductive sheets obtained in Production Examples 2 to 16.

再者,使製造例10中獲得之熱傳導性片材於120℃熱融著來代替熱硬化。Further, the thermally conductive sheet obtained in Production Example 10 was thermally fused at 120 ° C instead of thermal curing.

實施例17Example 17

於背面照射型影像感測器之配置於光入射面之相反側之背面貼合製造例1中獲得之未硬化(B階段)狀態之熱傳導性片材(參照圖1)。其後,將該等於150℃加熱120分鐘,藉此使熱傳導性片材熱硬化,製造攝像零件。The thermally conductive sheet in the uncured (B-stage) state obtained in Production Example 1 was bonded to the back surface of the back-illuminated image sensor disposed on the opposite side of the light incident surface (see FIG. 1). Thereafter, the film was heated at 150 ° C for 120 minutes to thermally cure the thermally conductive sheet to produce an image pickup member.

實施例18~32Example 18~32

使用製造例2~16中獲得之熱傳導性片材,以與實施例17相同之方式製造實施例18~32之攝像零件。The image pickup parts of Examples 18 to 32 were produced in the same manner as in Example 17 using the heat conductive sheets obtained in Production Examples 2 to 16.

再者,使製造例10中獲得之熱傳導性片材於120℃熱融著來代替熱硬化。Further, the thermally conductive sheet obtained in Production Example 10 was thermally fused at 120 ° C instead of thermal curing.

比較例1Comparative example 1

將實施例1中使用之表面照射型影像感測器作為攝像零件。再者,於此攝像零件上貼合熱傳導性片材。The surface illumination type image sensor used in Example 1 was used as an image pickup part. Further, a thermally conductive sheet is bonded to the image pickup member.

比較例2Comparative example 2

將實施例17中使用之背面照射型影像感測器作為攝像零件。再者,於此攝像零件上未貼合熱傳導性片材。The back side illumination type image sensor used in Example 17 was used as an image pickup part. Further, the thermally conductive sheet is not attached to the image pickup member.

(評價)(Evaluation)

1.熱傳導率Thermal conductivity

對製造例1~16之熱傳導性片材測定熱傳導率。The thermal conductivity of the thermally conductive sheets of Production Examples 1 to 16 was measured.

即,藉由利用氙燈閃光法導熱分析儀「LFA-447型」(NETZSCH公司製造)之脈衝加熱法測定面方向(SD)上之熱傳導率。In other words, the thermal conductivity in the plane direction (SD) was measured by a pulse heating method using a xenon flash thermal conductivity analyzer "LFA-447 type" (manufactured by NETZSCH Co., Ltd.).

將其結果示於表1~表3。The results are shown in Tables 1 to 3.

2.放熱性及溫度不均2. Exothermic and temperature uneven

使實施例1~32之攝像零件動作後,利用紅外線相機測定熱傳導性片材之溫度,結果確認幾乎無溫度上升及溫度不均。After the imaging members of Examples 1 to 32 were operated, the temperature of the thermally conductive sheet was measured by an infrared camera, and as a result, it was confirmed that there was almost no temperature rise and temperature unevenness.

另外,與上述同樣地使比較例1~2之攝像零件動作後,利用紅外線相機測定背面之溫度,結果確認溫度上升及溫度不均。In the same manner as described above, the imaging members of Comparative Examples 1 and 2 were operated, and the temperature of the back surface was measured by an infrared camera. As a result, temperature rise and temperature unevenness were confirmed.

3.空隙率(P)3. Void ratio (P)

藉由下述測定方法測定製造例1~16之熱硬化前之熱傳導性片材之空隙率(P1)。The void ratio (P1) of the thermally conductive sheet before heat curing of Production Examples 1 to 16 was measured by the following measurement method.

空隙率之測定方法:首先,藉由截面拋光儀(CP)沿厚度方向對熱傳導性片材進行切斷加工,利用掃描型電子顯微鏡(SEM)以200倍觀察由此顯現出之剖面,獲得圖像。其後,自所獲得之圖像,對空隙部分與其以外之部分進行二值化處理,其次,算出空隙部分相對於熱傳導性片材整體之剖面積的面積比。Method for measuring void ratio: First, the thermally conductive sheet was cut in the thickness direction by a cross-section polisher (CP), and the cross-section thus observed was observed by a scanning electron microscope (SEM) at 200 times to obtain a map. image. Thereafter, from the obtained image, the void portion and the other portions were subjected to binarization processing, and secondly, the area ratio of the void portion to the entire cross-sectional area of the thermally conductive sheet was calculated.

將其結果示於表1~表3。The results are shown in Tables 1 to 3.

4.階差追隨性(三點彎曲試驗)4. Step followability (three-point bending test)

針對製造例1~16之熱硬化前之熱傳導性片材,依據JIS K 7171(2010年)實施下述試驗條件下之三點彎曲試驗,根據下述評價基準評價階差追隨性。將其結果示於表1~表3。With respect to the heat conductive sheets before the heat curing of Production Examples 1 to 16, a three-point bending test under the following test conditions was carried out in accordance with JIS K 7171 (2010), and the step followability was evaluated based on the following evaluation criteria. The results are shown in Tables 1 to 3.

試驗條件Test conditions

試驗片:尺寸20 mm×15 mmTest piece: size 20 mm × 15 mm

支點間距離:5 mmDistance between fulcrums: 5 mm

試驗速渡:20 mm/min(壓子之下壓速度)Test speed: 20 mm/min (pressure speed under the pressure)

彎曲角度:120度Bending angle: 120 degrees

(評價基準)(evaluation benchmark)

◎:完全未觀察到破裂。◎: No cracking was observed at all.

○:幾乎未觀察到破裂。○: Little cracking was observed.

×:明確觀察到破裂。×: Cracking was clearly observed.

5.印刷標記視認性(印刷標記附著性:噴墨印刷或雷射印刷之標記附著性)5. Print mark visibility (print mark adhesion: mark adhesion of inkjet printing or laser printing)

藉由噴墨印刷及雷射印刷於製造例1~16之熱傳導性層上印刷標記,觀察該標記。The marks were printed on the thermally conductive layers of Production Examples 1 to 16 by inkjet printing and laser printing, and the marks were observed.

其結果,製造例1~16之熱傳導性層均可良好地辨認由噴墨印刷及雷射印刷兩者印刷之標記,確認印刷標記附著性良好。As a result, in the heat conductive layers of Production Examples 1 to 16, the marks printed by both the ink jet printing and the laser printing were well recognized, and the adhesion of the printed marks was confirmed to be good.

[表1][Table 1]

[表2][Table 2]

[表3][table 3]

表1~表3中之各成分中之數值於無特別記載之情形時表示g數。The numerical values in the respective components in Tables 1 to 3 indicate the number of g unless otherwise specified.

再者,於表1~表3之氮化硼粒子之欄中,上段之數值為氮化硼粒子之調配質量(g),中段之數值為熱傳導性片材中氮化硼粒子相對於硬化劑除外之固形物成分(即,氮化硼粒子與環氧樹脂或聚乙烯之固形物成分)之總體積之體積百分率(體積%),下段之數值表示氮化硼粒子相對於熱傳導性片材之固形物成分(即,氮化硼粒子與環氧樹脂及硬化劑之固形物成分)之總體積之體積百分率(體積%)。Further, in the column of boron nitride particles in Tables 1 to 3, the value of the upper stage is the blending mass (g) of the boron nitride particles, and the value of the middle stage is the boron nitride particle in the heat conductive sheet relative to the hardener. The volume fraction (% by volume) of the total volume of the solid component (ie, the solid content of the boron nitride particles and the epoxy resin or polyethylene), and the value of the lower segment indicates that the boron nitride particles are relative to the thermally conductive sheet. The volume fraction (% by volume) of the total volume of the solid component (i.e., the solid content of the boron nitride particles and the epoxy resin and the hardener).

另外,關於表1~表3之各成分中標記※符號之成分,以下記載其詳細內容。In addition, the components of the symbols * in the respective components of Tables 1 to 3 are described below in detail.

PT-110※1 :商品名、板狀之氮化硼粒子、平均粒徑(光散射法)45 μm、Momentive Performance Materials Japan公司製造PT-110 *1 : Product name, plate-shaped boron nitride particles, average particle size (light scattering method) 45 μm, manufactured by Momentive Performance Materials Japan

UHP-1※2 :商品名:SHOBN UHP-1、板狀之氮化硼粒子、平均粒徑、(光散射法)9 μm、昭和電工公司製造UHP-1 *2 : Product name: SHOBN UHP-1, plate-shaped boron nitride particles, average particle size, (light scattering method) 9 μm, manufactured by Showa Denko

環氧樹脂A※3 :OGSOL EG(商品名)、雙芳基茀型環氧樹脂、半固體狀、環氧當量294 g/eqiv.、軟化溫度(環球法)47℃、熔融黏度(80℃)1360 mPa‧s、大阪瓦斯化學公司製造Epoxy Resin A *3 : OGSOL EG (trade name), bisaryl fluorene epoxy resin, semi-solid, epoxy equivalent 294 g/eqiv., softening temperature (ring and ball method) 47 ° C, melt viscosity (80 ° C )1360 mPa‧s, manufactured by Osaka Gas Chemical Co., Ltd.

環氧樹脂B※4 :JER828(商品名)、雙酚A型環氧樹脂、液狀、環氧當量184~194 g/eqiv.、軟化溫度(環球法)未滿25℃、熔融黏度(80℃)70 mPa‧s、日本環氧樹脂公司製造Epoxy resin B *4 : JER828 (trade name), bisphenol A epoxy resin, liquid, epoxy equivalent 184~194 g/eqiv., softening temperature (ring and ball method) less than 25 ° C, melt viscosity (80 °C) 70 mPa‧s, manufactured by Japan Epoxy Resin Co., Ltd.

環氧樹脂C※5 :JER1002(商品名)、雙酚A型環氧樹脂、固體狀、環氧當量600~700 g/eqiv.、軟化溫度(環球法)78℃、熔融黏度(80℃)10000 mPa‧s以上(測定極限以上)、日本環氧樹脂公司製造Epoxy resin C ※5 : JER1002 (trade name), bisphenol A epoxy resin, solid, epoxy equivalent 600~700 g/eqiv., softening temperature (ring and ball method) 78°C, melt viscosity (80°C) 10000 mPa ‧ or more (above the measurement limit), manufactured by Japan Epoxy Resin Co., Ltd.

環氧樹脂D※6 :EPPN-501HY(商品名)、三苯基甲烷型環氧樹脂、固體狀、環氧當量163~175 g/eqiv.、軟化溫度(環球法)57~63℃、日本化藥公司製造Epoxy resin D *6 : EPPN-501HY (trade name), triphenylmethane epoxy resin, solid, epoxy equivalent 163~175 g/eqiv., softening temperature (ring and ball method) 57~63°C, Japan Chemical company manufacturing

硬化劑※7 :Curezol 2PZ(商品名、四國化成公司製造)之5質量%甲基乙基酮溶液Hardener *7 : 5 mass% methyl ethyl ketone solution of Curezol 2PZ (trade name, manufactured by Shikoku Chemicals Co., Ltd.)

硬化劑※8 :Curezol 2P4MHZ-PW(商品名、四國化成公司製造)之5質量%甲基乙基酮分散液Hardener *8 : 5 mass% methyl ethyl ketone dispersion of Curezol 2P4MHZ-PW (trade name, manufactured by Shikoku Chemicals Co., Ltd.)

聚乙烯※9 :低密度聚乙烯、重量平均分子量(Mw)4000、數量平均分子量(Mw)1700、Aldrich公司製造再者,上述說明係以本發明之例示之實施形態之方式提供,但其僅為例示,並不作限定性之解釋。對該技術領域之從業者而言清楚之本發明之變形例包含於後述申請專利範圍中。Polyethylene *9 : low-density polyethylene, weight average molecular weight (Mw) 4000, number average molecular weight (Mw) 1700, manufactured by Aldrich Co., Ltd., the above description is provided by way of an exemplified embodiment of the present invention, but only As an example, it is not to be construed as limiting. Modifications of the invention that are apparent to those skilled in the art are included in the scope of the appended claims.

1...攝像零件1. . . Camera parts

2...攝像元件2. . . Camera element

3...熱傳導性片材3. . . Thermally conductive sheet

3A...壓製片材3A. . . Pressed sheet

3B...分割片材3B. . . Split sheet

3C...積層片材3C. . . Laminated sheet

4...聚光透鏡4. . . Condenser lens

5...濾光器5. . . Filter

5B...藍色濾光器5B. . . Blue filter

5G...綠色濾光器5G. . . Green filter

5R...紅色濾光器5R. . . Red filter

6...電路基板6. . . Circuit substrate

7...受光基板7. . . Light receiving substrate

8...絕緣層8. . . Insulation

9...導體圖案9. . . Conductor pattern

10...受光元件10. . . Light receiving element

14...氮化硼粒子14. . . Boron nitride particles

15...樹脂成分15. . . Resin composition

16...脫模膜16. . . Release film

90...I型試驗裝置90. . . Type I test device

91...第1平板91. . . First tablet

92...第2平板92. . . 2nd tablet

93...心軸(旋轉軸)93. . . Mandrel (rotary axis)

94...止動部94. . . Stop

LD...長邊方向LD. . . Long side direction

TD...厚度方向TD. . . Thickness direction

SD...面方向SD. . . Face direction

α...配向角度α. . . Orientation angle

圖1為本發明之攝像零件之一實施形態之概略構成圖;1 is a schematic configuration diagram of an embodiment of an image pickup component of the present invention;

圖2表示用以說明圖1所示之攝像零件所具備之熱傳導性片材的製造方法之步驟圖;FIG. 2 is a view showing a step of explaining a method of manufacturing the thermally conductive sheet provided in the image pickup unit shown in FIG. 1;

圖2(a)表示對混合物或積層片材進行熱壓之步驟;Figure 2 (a) shows the step of hot pressing the mixture or the laminated sheet;

圖2(b)表示將壓製片材分割成複數個之步驟;Figure 2 (b) shows the steps of dividing the pressed sheet into a plurality of pieces;

圖2(c)表示將分割片材積層之步驟;Figure 2 (c) shows the step of layering the divided sheets;

圖3表示圖2所示之熱傳導牲片材之立體圖;Figure 3 is a perspective view of the heat conduction sheet shown in Figure 2;

圖4表示本發明之攝像零件之其他實施形態之概略構成圖;Fig. 4 is a view showing a schematic configuration of another embodiment of the image pickup unit of the present invention;

圖5表示耐彎曲性試驗之I型試驗裝置(耐彎曲性試驗前)之立體圖;及Figure 5 is a perspective view showing a type I test device (before the bending resistance test) of the bending resistance test;

圖6表示耐彎曲性試驗之I型試驗裝置(耐彎曲性試驗中途)之立體圖。Fig. 6 is a perspective view showing a type I test apparatus (in the middle of the bending resistance test) of the bending resistance test.

1...攝像零件1. . . Camera parts

2...攝像元件2. . . Camera element

3...熱傳導性片材3. . . Thermally conductive sheet

4...聚光透鏡4. . . Condenser lens

5...濾光器5. . . Filter

5B...藍色濾光器5B. . . Blue filter

5G...綠色濾光器5G. . . Green filter

5R...紅色濾光器5R. . . Red filter

6...電路基板6. . . Circuit substrate

7...受光基板7. . . Light receiving substrate

8...絕緣層8. . . Insulation

9...導體圖案9. . . Conductor pattern

10...受光元件10. . . Light receiving element

Claims (7)

一種攝像零件,其特徵在於:包括攝像元件,其具備使光入射之光入射面及配置於上述光入射面之相反側的背面;及熱傳導性片材,其設置於上述背面,使自上述攝像元件產生之熱放出;且上述熱傳導性片材含有板狀氮化硼粒子,上述熱傳導性片材相對於厚度方向正交之方向上之熱傳導率為4W/m‧K以上,上述熱傳導性片材之空隙率為30體積%以下。 An image pickup device comprising: an image pickup element including a light incident surface on which light is incident and a back surface disposed on a side opposite to the light incident surface; and a thermally conductive sheet provided on the back surface to be imaged from the image pickup unit The heat-conductive sheet contains plate-shaped boron nitride particles, and the thermal conductive sheet has a thermal conductivity of 4 W/m·K or more in a direction orthogonal to the thickness direction, and the thermally conductive sheet is used. The void ratio is 30% by volume or less. 如請求項1之攝像零件,其中上述攝像元件為CMOS影像感測器。 The imaging component of claim 1, wherein the imaging component is a CMOS image sensor. 如請求項1之攝像零件,其中上述攝像元件為背面照射型CMOS影像感測器。 The imaging component of claim 1, wherein the imaging element is a back-illuminated CMOS image sensor. 如請求項1之攝像零件,其中上述空隙率為10體積%以下。 The image pickup unit of claim 1, wherein the void ratio is 10% by volume or less. 如請求項1之攝像零件,其中上述氮化硼粒子分散於樹脂成分中。 The image pickup unit of claim 1, wherein the boron nitride particles are dispersed in the resin component. 如請求項1之攝像零件,其中上述熱傳導性片材係藉由以下步驟所製備:將混合上述氮化硼粒子與樹脂成分所製備之混合物進行熱壓以製備壓製片材,分割步驟,其將上述壓製片材分割為複數之分割片材,積層步驟,其積層上述複數之分割片材以製備積層片材,及 熱壓步驟,其將上述積層片材進行熱壓。 The image-capturing part of claim 1, wherein the thermally conductive sheet is prepared by hot-pressing a mixture prepared by mixing the boron nitride particles and a resin component to prepare a pressed sheet, and a dividing step, which will The pressed sheet is divided into a plurality of divided sheets, and a laminating step of laminating the plurality of divided sheets to prepare a laminated sheet, and A hot pressing step of hot pressing the laminated sheet. 如請求項6之攝像零件,其反覆實施上述分割步驟、上述積層步驟及上述熱壓步驟之一系列步驟,藉此製備上述熱傳導性片材,且該等步驟之重複次數為2~7次。The image-capturing part of claim 6 is subjected to the step of performing the above-described dividing step, the laminating step and the hot pressing step, thereby preparing the thermally conductive sheet, and the number of repetitions of the steps is 2 to 7 times.
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