TWI506281B - Low impedance value of the probe module - Google Patents

Low impedance value of the probe module Download PDF

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Publication number
TWI506281B
TWI506281B TW102125237A TW102125237A TWI506281B TW I506281 B TWI506281 B TW I506281B TW 102125237 A TW102125237 A TW 102125237A TW 102125237 A TW102125237 A TW 102125237A TW I506281 B TWI506281 B TW I506281B
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Taiwan
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probe
signal
conductor
electrically connected
conductors
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TW102125237A
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Chinese (zh)
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TW201502525A (en
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Wei Cheng Ku
Jun Liang Lai
Chun Chung Huang
Wei Chen
Hsin Hsiang Liu
Jing Zhi Hung
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Mpi Corp
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Description

低阻抗值之探針模組Low impedance probe module

本發明係與探針卡有關;特別是指一種低阻抗值之探針模組。The invention relates to a probe card; in particular to a probe module of low impedance value.

按,許多電子產品於出廠前,必須經過多道檢測程序以確保品質。其中檢測項目之一的通電測試即是為了驗證電子產品內部之各精密電子元件間的電性連接是否確實、功能是否符合驗收規格。而用以檢測電子產品之各精密電子元件間的電性連接是否確實的方法,通常是以一探針卡作為一檢測裝置與待測電子裝置之間的測試訊號與電源訊號之傳輸介面。Press, many electronic products must go through multiple inspection procedures to ensure quality before leaving the factory. The power-on test of one of the test items is to verify whether the electrical connection between the various precision electronic components inside the electronic product is true and whether the function meets the acceptance specifications. The method for detecting the electrical connection between the precision electronic components of the electronic product is usually a probe card as a transmission interface between the test signal and the power signal between the detecting device and the electronic device to be tested.

然而,電子產品上之訊號接點與接地接點間的距離,通常決定了探針卡之探針間的擺放距離,使得探針組的微量電阻、電容與電感的值會依據該等接點之距離固定,而呈現一預定的大小。換言之,因為該等接點之間通常隔有較大之距離以避免皆點短路之情事發生,如此一來,探針與探針間的常因間隔距離較大而具有較小的電容值,使得高頻訊號傳輸時會出現較大的電抗,而增加高頻訊號傳輸之的損耗,進而增加檢測裝置辨識訊號之難度。However, the distance between the signal contact and the ground contact on the electronic product usually determines the distance between the probes of the probe card, so that the values of the micro-resistance, capacitance and inductance of the probe set are based on the connection. The distance of the points is fixed and presents a predetermined size. In other words, because there is usually a large distance between the contacts to avoid the occurrence of a short-circuit point, the probe and the probe are often separated by a large distance and have a small capacitance value. When the high-frequency signal is transmitted, a large reactance occurs, and the loss of the high-frequency signal transmission is increased, thereby increasing the difficulty of detecting the signal by the detecting device.

有鑑於此,本發明之目的用於提供一種探針模組,具有低阻抗值之優點,而使得訊號通過時的損耗較小,而使得檢測裝置能更輕易地辨識訊號。In view of the above, the object of the present invention is to provide a probe module which has the advantage of having a low impedance value, so that the loss of the signal passing through is small, so that the detecting device can more easily recognize the signal.

緣以達成上述目的,本發明所提供低阻抗值之 探針模組用以設置於一檢測裝置及一待測電子裝置之間,且該檢測裝置具有一訊號端子及一接地端子,而該待測電子裝置則具有一訊號接點及一接地接點。該探針模組包含有一基板、複數第一導體、複數第二導體、一第三導體、一第四導體、一訊號探針以及一接地探針。其中,該基板具有一訊號線路、一接地線路、一第一連接線路及一第二連接線路;該訊號線路一端與該訊號端子電性連接,而該接地線路一端則與該接地端子電性連接;該等第一導體一端同時與該訊號線路之另一端電性連接;該等第二導體一端同時與該接地線路之另一端電性連接;該第三導體一端與該第一連接線路的一端電性連接,另一端則電性連接該等第一導體的另一端;該第四導體一端與該第二連接線路的一端電性連接,另一端則電性連接該等第二導體的另一端;該訊號探針一端與該第一連接線路的另一端電性連接,而另一端則用以點觸該待測電子裝置之訊號接點;該接地探針一端與該第二連接線路的另一端電性連接,而另一端則用以點觸該待測電子裝置之接地接點。In order to achieve the above object, the present invention provides a low impedance value. The probe module is disposed between a detecting device and a device to be tested, and the detecting device has a signal terminal and a grounding terminal, and the electronic device to be tested has a signal contact and a ground contact . The probe module includes a substrate, a plurality of first conductors, a plurality of second conductors, a third conductor, a fourth conductor, a signal probe, and a grounding probe. The substrate has a signal line, a ground line, a first connection line and a second connection line; one end of the signal line is electrically connected to the signal terminal, and one end of the ground line is electrically connected to the ground terminal One end of the first conductor is electrically connected to the other end of the signal line; one end of the second conductor is electrically connected to the other end of the ground line; one end of the third conductor and one end of the first connecting line Electrically connected, the other end is electrically connected to the other end of the first conductor; one end of the fourth conductor is electrically connected to one end of the second connecting line, and the other end is electrically connected to the other end of the second conductor One end of the signal probe is electrically connected to the other end of the first connecting line, and the other end is used to touch the signal contact of the electronic device to be tested; the grounding probe has one end and the second connecting line One end is electrically connected, and the other end is used to touch the ground contact of the electronic device to be tested.

依據上述構思,於其中一實施例中,該等第一導體其中之一係位於該接地探針與該第三導體之間,該等第二導體其中之一係位於該訊號探針與該第四導體之間,而其他第一導體與第二導體則交錯地設置於該接地探針與該訊號探針之間。According to the above concept, in one embodiment, one of the first conductors is located between the ground probe and the third conductor, and one of the second conductors is located between the signal probe and the first Between the four conductors, the other first conductor and the second conductor are alternately disposed between the ground probe and the signal probe.

依據上述構思,於另外一實施例中,該等第一導體係環繞該接地探針設置,而該等第二導體係環繞該訊號探針設置。According to the above concept, in another embodiment, the first guiding systems are disposed around the grounding probe, and the second guiding systems are disposed around the signal probe.

藉此,透過上述之設計,便可有效地降低該探針模組的阻抗值,使得訊號通過時的損耗較小。Therefore, through the above design, the impedance value of the probe module can be effectively reduced, so that the loss when the signal passes is small.

10‧‧‧基板10‧‧‧Substrate

12‧‧‧訊號線路12‧‧‧ Signal Line

121‧‧‧接點121‧‧‧Contacts

14‧‧‧接地線路14‧‧‧ Grounding circuit

141‧‧‧接點141‧‧‧Contacts

16‧‧‧第一連接線路16‧‧‧First connection line

161‧‧‧接點161‧‧‧Contacts

18‧‧‧第二連接線路18‧‧‧Second connection line

181‧‧‧接點181‧‧‧Contacts

20‧‧‧針座20‧‧‧ needle seat

22、24‧‧‧導接線路22, 24‧‧‧ lead line

31‧‧‧第一導體31‧‧‧First conductor

32‧‧‧第二導體32‧‧‧Second conductor

33‧‧‧第三導體33‧‧‧ Third conductor

34‧‧‧第四導體34‧‧‧fourth conductor

S‧‧‧訊號探針S‧‧‧ signal probe

G‧‧‧接地探針G‧‧‧ Grounding probe

100‧‧‧檢測裝置100‧‧‧Detection device

110‧‧‧訊號端子110‧‧‧ Signal Terminal

120‧‧‧接地端子120‧‧‧ Grounding terminal

200‧‧‧待測電子裝置200‧‧‧Electronic device to be tested

210‧‧‧訊號接點210‧‧‧Signal contacts

220‧‧‧接地接點220‧‧‧ Grounding contacts

圖1係本發明第一較佳實施例之探針模組之結構圖;1 is a structural view of a probe module according to a first preferred embodiment of the present invention;

圖2係本發明第二較佳實施例之探針及導體之排列圖。2 is a view showing the arrangement of a probe and a conductor in a second preferred embodiment of the present invention.

為能更清楚地說明本發明,茲舉較佳實施例並配合圖示詳細說明如後。請參圖1,本發明第一較佳實施例低阻抗值之探針模組設置於一檢測裝置100及一待測電子200裝置之間,且該檢測裝置100具有一訊號端子110及一接地端子120,而該待測電子裝置200則具有一訊號接點210及一接地接點220。該探針模組包含有一基板10、一針座20、三第一導體31、三第二導體32、一第三導體33、一第四導體34、一訊號探針S以及一接地探針G。其中:該基板10於本實施例中為一多層印刷電路板,且埋設有一訊號線路12、一接地線路14、一第一連接線路16及一第二連接線路18。該訊號線路12一端於該基板10頂面形成有一接點與該訊號端子110接觸,而另一端則於該基板10底面形成有複數接點121。該接地線路14一端則於該基板10頂端形成有一接點與該接地端子120接觸,而另一端則於該基板10底面同樣形成有複數接點141。該第一連接線路16與該第二連接線路18的兩端則分別於該基座10底面形成一接點161、181。In order that the present invention may be more clearly described, the preferred embodiments are illustrated in the accompanying drawings. Referring to FIG. 1 , a low-impedance probe module of the first preferred embodiment of the present invention is disposed between a detecting device 100 and a device to be tested 200, and the detecting device 100 has a signal terminal 110 and a ground. The terminal 120 and the electronic device 200 to be tested have a signal contact 210 and a ground contact 220. The probe module comprises a substrate 10, a socket 20, three first conductors 31, three second conductors 32, a third conductor 33, a fourth conductor 34, a signal probe S and a grounding probe G. . The substrate 10 is a multilayer printed circuit board in the embodiment, and a signal line 12, a ground line 14, a first connection line 16, and a second connection line 18 are embedded. One end of the signal line 12 is formed with a contact on the top surface of the substrate 10 to be in contact with the signal terminal 110, and the other end is formed with a plurality of contacts 121 on the bottom surface of the substrate 10. One end of the grounding line 14 is formed with a contact at the top end of the substrate 10 to be in contact with the grounding terminal 120, and the other end is also formed with a plurality of contacts 141 on the bottom surface of the substrate 10. Both ends of the first connecting line 16 and the second connecting line 18 form a contact 161, 181 on the bottom surface of the base 10, respectively.

該針座20則設於該基板10與該待測電子裝置200之間,且頂端與底端分別具有複數穿孔。另外,該針座20中設有複數導接線路22、24。The needle holder 20 is disposed between the substrate 10 and the electronic device 200 to be tested, and has a plurality of perforations at the top end and the bottom end, respectively. In addition, a plurality of lead wires 22 and 24 are provided in the hub 20.

該等第一導體31係設於該針座20上,且一端 分別穿過該針座20頂端之穿孔而抵接於該基板10底面之接點121,進而與該訊號線路12電性連接,另一端則連接該針座20中的導接線路22,使其相互電性連接,而使該等第一導體31呈並聯。The first conductors 31 are disposed on the needle holder 20 and have one end Passing through the through hole at the top of the needle holder 20 to abut the contact 121 on the bottom surface of the substrate 10, and then electrically connected to the signal line 12, and the other end is connected to the conductive line 22 in the needle holder 20, so that The first conductors 31 are electrically connected in parallel with each other.

該等第二導體32係設於該針座20上,且一端分別穿過該針座20頂端之穿孔而抵接於該基板10底面之接點141,進而與該接地線路14電性連接,另一端則連接該針座20中的導接線路24,使其相互電性連接,而使該等第二導體32呈並聯。The second conductors 32 are disposed on the needle holder 20, and one end of the second conductor 32 passes through the through hole at the top end of the needle holder 20 to abut the contact point 141 of the bottom surface of the substrate 10, and is electrically connected to the grounding line 14. The other end is connected to the conductive line 24 in the hub 20 to be electrically connected to each other, so that the second conductors 32 are connected in parallel.

該第三導體33係設於該針座20上,且一端穿過該針座20頂端之穿孔而抵接於該基板10底面之接點161,進而與該第一連接線路16電性連接。該第三導體33的另一端則連接該針座20中的導接線路22,而電性連接該等第一導體31的另一端。The third conductor 33 is disposed on the needle holder 20 , and one end passes through the through hole at the top end of the needle holder 20 to abut the contact 161 of the bottom surface of the substrate 10 , and is electrically connected to the first connection line 16 . The other end of the third conductor 33 is connected to the conductive line 22 in the hub 20, and is electrically connected to the other end of the first conductor 31.

該第四導體34係設於該針座20上,且一端穿過該針座20頂端之穿孔而抵接於該基板10底面之接點181,進而與該第二連接線路18電性連接。該第四導體34的另一端則連接該針座20中的導接線路24,而電性連接該等第二導體32的另一端。The fourth conductor 34 is disposed on the needle holder 20 , and one end passes through the through hole at the top end of the needle holder 20 to abut the contact 181 on the bottom surface of the substrate 10 , and is electrically connected to the second connection line 18 . The other end of the fourth conductor 34 is connected to the guiding line 24 in the hub 20, and is electrically connected to the other end of the second conductor 32.

該訊號探針S係設於該針座20上,且一端穿過該針座20頂端之穿孔而抵接於該基板10底面之接點161,而與該第一連接線路16電性連接。另外,該訊號探針S另一端則穿過該針座20底端之穿孔以點觸該待測電子裝置200之訊號接點210。The signal probe S is disposed on the needle holder 20, and one end passes through the through hole at the top end of the needle holder 20 to abut the contact 161 of the bottom surface of the substrate 10, and is electrically connected to the first connection line 16. In addition, the other end of the signal probe S passes through the through hole at the bottom end of the needle holder 20 to touch the signal contact 210 of the electronic device 200 to be tested.

該接地探針G係設於該針座20上,且一端穿過該針座20頂端之穿孔而抵接於該基板10底面之接點181,而與該第二連接線路18電性連接。另外,該接地探針G另一端則穿過該針座20底端之穿孔以點觸該待測電子裝 置200之接地接點220。The grounding probe G is disposed on the needle holder 20, and one end passes through the through hole at the top end of the needle holder 20 to abut the contact 181 on the bottom surface of the substrate 10, and is electrically connected to the second connection line 18. In addition, the other end of the grounding probe G passes through the through hole at the bottom end of the needle holder 20 to touch the electronic device to be tested. Place 200 ground contact 220.

另外,除上述電性連接關係外,該等導體與該等探針之位置關係如下:In addition, in addition to the above electrical connection relationship, the positional relationship between the conductors and the probes is as follows:

1. 其中一該第一導體31位於該接地探針G與該第三導體33之間。1. One of the first conductors 31 is located between the grounding probe G and the third conductor 33.

2. 其中一該第二導體32位於該訊號探針S與該第四導體34之間。2. One of the second conductors 32 is located between the signal probe S and the fourth conductor 34.

3. 其他第一導體31與第二導體32則交錯地設置於該接地探針G與該訊號探針S之間。3. The other first conductor 31 and the second conductor 32 are alternately disposed between the ground probe G and the signal probe S.

4. 該接地探針G係位於其中二根第一導體31之間。4. The grounding probe G is located between the two first conductors 31.

5. 該訊號探針S係位於其中二根第二導體32之間。5. The signal probe S is located between two of the second conductors 32.

藉此,當訊號自該檢測裝置100之訊號端子110輸出後,流經該訊號線路12及該等第一導體31,再由該第三導體33流至該第一連接線路16,最後由該訊號探針S傳遞至該待測電子裝置200之訊號接點210。而後,訊號便由該待測電子裝置200之接地接點220流出,通過該接地探針G後,流經該第二連接線路18以及該第四導體34後,通過該等第二導體32與該接地線路14而回流至該檢測裝置100之接地端子120,使訊號路徑形成一迴路而達到檢測之目的。Thereby, after the signal is output from the signal terminal 110 of the detecting device 100, the signal flows through the signal line 12 and the first conductors 31, and then flows from the third conductor 33 to the first connecting line 16, and finally The signal probe S is transmitted to the signal contact 210 of the electronic device 200 to be tested. Then, the signal flows out from the ground contact 220 of the electronic device 200 to be tested, passes through the grounding probe G, flows through the second connecting line 18 and the fourth conductor 34, and passes through the second conductor 32. The ground line 14 is returned to the ground terminal 120 of the detecting device 100, so that the signal path forms a loop for the purpose of detection.

另外,透過上述之結構與電性連接關係之設計,訊號傳輸時,各該導體31~34與各該探針S、G之訊號走向,皆相異於相鄰導體31~34之訊號走向,而不會更動原本預設的電性傳導方向,且各探針S、G與相異流向之導體31~34的距離於習用探針間之距離,使得電容量提升,進而降低高頻傳輸時,訊號線路之等效電抗值。另外,透過上述該等第一導體31與該等第二導體32呈並聯之設計,更能降低訊號路徑之等效電阻值。如此一來,透過前述設計達到降 低整體阻抗值之目的,而降低訊號通過時的損耗,使訊號能維持原先之波形,使得該檢測裝置100能更輕易地辨識接受到的測試訊號是否正常。In addition, through the above-mentioned structure and electrical connection design, when the signal is transmitted, the signal directions of the conductors 31-34 and the probes S and G are different from the signal directions of the adjacent conductors 31-34. The electromagnetic conduction direction of the original preset is not changed, and the distance between the probes S and G and the conductors 31 to 34 of the different flow directions is different from the distance between the conventional probes, so that the capacitance is increased, thereby reducing the high frequency transmission. , the equivalent reactance value of the signal line. In addition, by designing the first conductors 31 and the second conductors 32 in parallel, the equivalent resistance value of the signal path can be further reduced. In this way, the design is achieved through the aforementioned design. The purpose of the low overall impedance value is to reduce the loss of the signal passing, so that the signal can maintain the original waveform, so that the detecting device 100 can more easily recognize whether the received test signal is normal.

另外,本發明之導體31~34與探針S、G之排列方式,除上述利用橫向交錯排列來達到降低阻抗值之目的外,亦可如圖2所示之第二較佳實施例般,將等些第一導體31環繞接地探針G設置且相互並聯,並將等些第二導體32環繞訊號探針S設置且同樣呈相互並聯,而其中一該第一導體31同樣位於該接地探針G與第三導體33之間,且其中一第二導體32亦同樣位於該訊號探針S與該第四導體34之間。如此一來,當該等第一導體31、該第四導體34與該訊號探針S往該待測電子裝置200之方向輸送訊號,而該等第二導體32、該第三導體33與該接地探針G往該檢測裝置100之方向輸送訊號時,訊號走向同樣等同於原本預設的電性傳導方向,且同時也能達到前述降低訊號線路之等效阻抗值之目的。In addition, the arrangement of the conductors 31-34 and the probes S and G of the present invention may be the same as the second preferred embodiment shown in FIG. 2, except that the above-mentioned lateral staggered arrangement is used to achieve the purpose of reducing the impedance value. The first conductors 31 are disposed around the grounding probe G and connected in parallel with each other, and the second conductors 32 are disposed around the signal probes S and are also connected in parallel with each other, and one of the first conductors 31 is also located in the grounding probe. Between the pin G and the third conductor 33, and a second conductor 32 is also located between the signal probe S and the fourth conductor 34. In this way, when the first conductor 31, the fourth conductor 34 and the signal probe S are sent to the electronic device 200 to be tested, the second conductor 32 and the third conductor 33 are When the grounding probe G transmits the signal in the direction of the detecting device 100, the signal direction is also equivalent to the originally preset electrical conduction direction, and at the same time, the purpose of reducing the equivalent impedance value of the signal line can be achieved.

再者,以上所述僅為本發明較佳可行實施例而已,舉凡應用本發明說明書及申請專利範圍所為之等效變化,理應包含在本發明之專利範圍內。Furthermore, the above description is only for the preferred embodiments of the present invention, and equivalent changes to the scope of the present invention and the scope of the claims are intended to be included in the scope of the present invention.

10‧‧‧基板10‧‧‧Substrate

12‧‧‧訊號線路12‧‧‧ Signal Line

121‧‧‧接點121‧‧‧Contacts

14‧‧‧接地線路14‧‧‧ Grounding circuit

141‧‧‧接點141‧‧‧Contacts

16‧‧‧第一連接線路16‧‧‧First connection line

161‧‧‧接點161‧‧‧Contacts

18‧‧‧第二連接線路18‧‧‧Second connection line

181‧‧‧接點181‧‧‧Contacts

20‧‧‧針座20‧‧‧ needle seat

22、24‧‧‧導接線路22, 24‧‧‧ lead line

31‧‧‧第一導體31‧‧‧First conductor

32‧‧‧第二導體32‧‧‧Second conductor

33‧‧‧第三導體33‧‧‧ Third conductor

34‧‧‧第四導體34‧‧‧fourth conductor

S‧‧‧訊號探針S‧‧‧ signal probe

G‧‧‧接地探針G‧‧‧ Grounding probe

100‧‧‧檢測裝置100‧‧‧Detection device

110‧‧‧訊號端子110‧‧‧ Signal Terminal

120‧‧‧接地端子120‧‧‧ Grounding terminal

200‧‧‧待測電子裝置200‧‧‧Electronic device to be tested

210‧‧‧訊號接點210‧‧‧Signal contacts

220‧‧‧接地接點220‧‧‧ Grounding contacts

Claims (9)

一種低阻抗值之探針模組,用以設置於一檢測裝置及一待測電子裝置之間,且該檢測裝置具有一訊號端子及一接地端子,而該待測電子裝置則具有一訊號接點及一接地接點;該探針模組包含有:一基板,具有一訊號線路、一接地線路、一第一連接線路及一第二連接線路;該訊號線路一端與該訊號端子電性連接,而該接地線路一端則與該接地端子電性連接;複數第一導體,其一端同時與該訊號線路之另一端電性連接;複數第二導體,其一端同時與該接地線路之另一端電性連接;一第三導體,其一端與該第一連接線路的一端電性連接,另一端則電性連接該等第一導體的另一端;一第四導體,其一端與該第二連接線路的一端電性連接,另一端則電性連接該等第二導體的另一端;一訊號探針,其一端與該第一連接線路的另一端電性連接,而另一端則用以點觸該待測電子裝置之訊號接點;以及一接地探針,其一端與該第二連接線路的另一端電性連接,而另一端則用以點觸該待測電子裝置之接地接點。A low-impedance probe module is disposed between a detecting device and a device to be tested, and the detecting device has a signal terminal and a grounding terminal, and the electronic device to be tested has a signal connection a probe and a ground contact; the probe module includes: a substrate having a signal line, a ground line, a first connection line, and a second connection line; one end of the signal line is electrically connected to the signal terminal And one end of the grounding line is electrically connected to the grounding terminal; one end of the plurality of first conductors is electrically connected to the other end of the signal line at the same time; and one end of the plurality of second conductors is electrically connected to the other end of the grounding line at the same time. a third conductor, one end of which is electrically connected to one end of the first connecting line, and the other end is electrically connected to the other end of the first conductor; a fourth conductor, one end thereof and the second connecting line One end is electrically connected, and the other end is electrically connected to the other end of the second conductor; a signal probe has one end electrically connected to the other end of the first connecting line, and the other end is used for the point Signal contact of the electronic device under test; and a ground probe, having one end connected to the other end electrically connected to the second line, and the other end to touch the ground contact of the electronic device under test. 如請求項1所述低阻抗值之探針模組,其中,該等第一導體其中之一係位於該接地探針與該第三導體之間,該等第二導體其中之一係位於該訊號探針與該第四導體之間,而 其他第一導體與第二導體則交錯地設置於該接地探針與該訊號探針之間。The low-impedance probe module of claim 1, wherein one of the first conductors is located between the ground probe and the third conductor, and one of the second conductors is located Between the signal probe and the fourth conductor, and The other first conductor and the second conductor are alternately disposed between the ground probe and the signal probe. 如請求項2所述低阻抗值之探針模組,其中,該接地探針係位於其中二根第一導體之間。The low-impedance probe module of claim 2, wherein the ground probe is located between two of the first conductors. 如請求項2所述低阻抗值之探針模組,其中,該訊號探針係位於其中二根第二導體之間。The low-impedance probe module of claim 2, wherein the signal probe is located between two of the second conductors. 如請求項1所述低阻抗值之探針模組,其中,該等第一導體之數量等於該等第二導體之數量。The low-impedance probe module of claim 1, wherein the number of the first conductors is equal to the number of the second conductors. 如請求項1所述低阻抗值之探針模組,其中,該等第一導體係環繞該接地探針設置。The low-impedance probe module of claim 1, wherein the first guiding system is disposed around the grounding probe. 如請求項1所述低阻抗值之探針模組,其中,該等第二導體係環繞該訊號探針設置。The low-impedance probe module of claim 1, wherein the second guiding system is disposed around the signal probe. 如請求項1所述低阻抗值之探針模組,更包含有一針座,係位於該基板與該待測電子裝置之間,而該等導體與探針皆設置於該針座上。The low-impedance probe module of claim 1 further includes a pin holder disposed between the substrate and the electronic device to be tested, and the conductors and the probe are disposed on the hub. 如請求項8所述低阻抗值之探針模組,該針座更設有複數導接線路,用以使該等第一探針電性連接該第三探針、以及使該等第二探針電性連接該第四探針。The probe module of the low impedance value according to claim 8, wherein the needle holder further has a plurality of guiding lines for electrically connecting the first probes to the third probes and the second The probe is electrically connected to the fourth probe.
TW102125237A 2013-07-15 2013-07-15 Low impedance value of the probe module TWI506281B (en)

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US3702439A (en) * 1970-08-12 1972-11-07 Bell Telephone Labor Inc Low impedance fixed point test probe
US5952843A (en) * 1998-03-24 1999-09-14 Vinh; Nguyen T. Variable contact pressure probe
US7427868B2 (en) * 2003-12-24 2008-09-23 Cascade Microtech, Inc. Active wafer probe
TWI314651B (en) * 2007-01-25 2009-09-11 Asp Test Technology Ltd High frequency probe assembly for ic testing
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