TWI493177B - Method of detecting defect on optical film with periodic structure and device thereof - Google Patents

Method of detecting defect on optical film with periodic structure and device thereof Download PDF

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TWI493177B
TWI493177B TW102137167A TW102137167A TWI493177B TW I493177 B TWI493177 B TW I493177B TW 102137167 A TW102137167 A TW 102137167A TW 102137167 A TW102137167 A TW 102137167A TW I493177 B TWI493177 B TW I493177B
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image
sub
optical film
periodic structure
comparison
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TW201514474A (en
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Chinhsun Chiu
Limin Yu
Weiyang Chen
Chihyuan Kao
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Benq Materials Corp
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一種檢測具週期性結構光學薄膜的瑕疵檢測方法及其檢測裝置Method for detecting flaw detection of optical film with periodic structure and detection device thereof

本發明是關於一種自動光學檢測(Automated Optical Inspection,AOI)方法及檢測設備,特別是用於檢測具週期性結構之光學薄膜,例如用於產生立體影像的相位延遲膜(phase retardation film)、導光板等。The present invention relates to an automated optical inspection (AOI) method and a detection apparatus, particularly for detecting an optical film having a periodic structure, such as a phase retardation film for guiding a stereoscopic image, and a guide. Light board, etc.

一般利用自動光學檢測方法檢測光學薄膜上的瑕疵,係先從光學薄膜上擷取一具有瑕疵的影像,接著藉由亮態及暗態的門檻值設定來判斷該光學薄膜是否具有瑕疵。然而利用上述檢測方法卻無法用於檢測具有週期性紋理結構的光學薄膜,例如相位延遲膜或導光板等等。Generally, the optical film on the optical film is detected by an automatic optical detection method. First, an image having defects is taken from the optical film, and then the threshold value of the bright state and the dark state is used to determine whether the optical film has germanium. However, the above detection method cannot be used to detect an optical film having a periodic texture structure, such as a phase retardation film or a light guide plate or the like.

請參閱第1A圖,係表示一無瑕疵的相位延遲膜上不同位置所對應的灰階分佈圖。此相位延遲膜係由複數個平行交錯排列之第一相位區11與第二相位區22所組成。因此當 計算此膜上不同位置的灰階值時,會出現如第1A圖所示之具週期性柵形的灰階分佈圖,且相位延遲膜結構上不同位置所對應的灰階值有高低的差異。從第1A圖可得知,此無瑕疵的相位延遲膜,其所對應的灰階值皆落於亮態門檻值及暗態門檻值所設定的範圍之間,其中亮態門檻值為200;而暗態門檻值為140。Referring to Figure 1A, there is shown a gray scale distribution map corresponding to different positions on a flawless phase retardation film. The phase retardation film is composed of a plurality of parallel phase-arranged first phase regions 11 and second phase regions 22. So when When the gray scale values at different positions on the film are calculated, a gray scale distribution map with a periodic grid as shown in FIG. 1A appears, and the gray scale values corresponding to different positions on the phase retardation film structure have different heights. . It can be seen from FIG. 1A that the gray scale value of the flawless phase retardation film falls between the range of the bright state threshold and the threshold of the dark state threshold, wherein the threshold value of the bright state is 200; The dark threshold is 140.

接著,請參閱第1B圖,係表示一具瑕疵的相位延遲膜,其相位延遲膜上不同位置所對應的灰階分佈圖。如第1B圖所示,於橫軸標示200左右的灰階分佈值有異常的現象(異常波形D),表示此相位延遲膜有缺陷的存在。但若使用上述所提的亮態門檻值及暗態門檻值的設定,則此缺陷將無法被檢測出來。Next, referring to Fig. 1B, there is shown a 相位 phase retardation film whose phase retardation corresponds to a gray scale distribution map at different positions on the film. As shown in FIG. 1B, an abnormal phenomenon (abnormal waveform D) indicating a gray scale distribution value of about 200 on the horizontal axis indicates that the phase retardation film is defective. However, if the above-mentioned bright threshold value and dark state threshold value are used, the defect cannot be detected.

再者,上述門檻值的設定通常係由一標準品上擷取影像,計算其影像灰階值以作為門檻值,並將該門檻值輸入檢測裝置。爾後不論何時檢測光學薄膜,皆以先前所設定的門檻值進行比對。然而,在擷取標準品影像的光源強度與每次擷取待檢測樣品之影像的光源強度並不完全相同,因此使用此種標準品比對的方式,仍會有環境光源所造成的誤差情形產生。Furthermore, the threshold value is usually set by capturing an image from a standard, calculating the image grayscale value as a threshold value, and inputting the threshold value to the detecting device. Whenever the optical film is detected, it is compared with the previously set threshold value. However, the intensity of the light source that captures the image of the standard is not exactly the same as the intensity of the light source that captures the image of the sample to be tested each time. Therefore, using the standard comparison method, there is still an error caused by the ambient light source. produce.

因此,本發明提出一種用於檢測具週期性結構之光學薄膜的瑕疵檢測方法,除了可有效地檢測出具週期性結構之光學薄膜上的瑕疵,更可避免環境光源的影響。Therefore, the present invention proposes a flaw detection method for detecting an optical film having a periodic structure, in addition to effectively detecting defects on an optical film having a periodic structure, and avoiding the influence of an ambient light source.

有鑒於此,本發明之目的係提供一種用於檢測具週期性結構之光學薄膜的瑕疵檢測方法,此方法包括以下步驟:(A)於一具有週期性結構之待檢測光學薄膜上擷取之一原始影像,原始影像具有m個週期之週期性結構,其中m為正數;(B)從原始影像中擷取一子影像,第一子影像包含n個週期之週期性結構,其中n為正數,n<m;(C)從原始影像中擷取一比對影像,比對影像包含n個週期之週期性結構,其中n為正數,n<m,比對影像的擷取位置與子影像不同,但比對影像的面積與子影像相同;(D)將子影像與比對影像進行影像處理以得到一處理影像;(E)計算處理影像之平均灰階值;以及(F)分析平均灰階值以判斷子影像所對應之光學薄膜是否具有瑕疵。In view of the above, an object of the present invention is to provide a flaw detection method for detecting an optical film having a periodic structure, the method comprising the steps of: (A) drawing on an optical film to be inspected having a periodic structure; An original image having a periodic structure of m periods, wherein m is a positive number; (B) extracting a sub-image from the original image, the first sub-image comprising a periodic structure of n periods, wherein n is a positive number , n<m; (C) extracting a pair of images from the original image, the comparison image contains a periodic structure of n periods, where n is a positive number, n < m, the position and sub-image of the comparison image Different, but the area of the comparison image is the same as the sub-image; (D) image processing the sub-image and the comparison image to obtain a processed image; (E) calculating the average grayscale value of the processed image; and (F) analyzing the average The gray scale value is used to determine whether the optical film corresponding to the sub image has flaws.

本發明之另一目的,係提供一種用於檢測具週期性結構之光學薄膜的瑕疵檢測裝置,其包括:一光學攝像單元;一影像處理單元;一灰階值計算單元;以及一分析單元。光學攝像單元係用以於待檢測光學薄膜上擷取一原始影像,並從原始影像擷取一子影像及一比對影像。影像處理單元係耦接於光學攝像單元,用以將子影像與比對影像進行影像處理以得到一處理影像。灰階值計算單元係耦接於影像處理單元,用以計算處理影像的平均灰階值。分析單元係耦接 於灰階值計算單元,用以從處理影像的平均灰階值分析子影像所對應之光學薄膜是否具有瑕疵。Another object of the present invention is to provide a flaw detection apparatus for detecting an optical film having a periodic structure, comprising: an optical image pickup unit; an image processing unit; a gray scale value calculation unit; and an analysis unit. The optical imaging unit is configured to capture an original image on the optical film to be detected, and capture a sub-image and a comparison image from the original image. The image processing unit is coupled to the optical imaging unit for performing image processing on the sub-image and the comparison image to obtain a processed image. The grayscale value calculation unit is coupled to the image processing unit for calculating an average grayscale value of the processed image. Analysis unit is coupled The gray scale value calculation unit is configured to analyze whether the optical film corresponding to the sub image has flaws from the average gray scale value of the processed image.

上述具週期性結構之光學薄膜係至少具有兩種紋理結構,且此兩種紋理結構係相互平行且重複排列,例如可為相位延遲膜或導光板。The above optical film having a periodic structure has at least two texture structures, and the two texture structures are parallel and repeatedly arranged to each other, and may be, for example, a phase retardation film or a light guide plate.

200‧‧‧檢測裝置200‧‧‧Detection device

210‧‧‧光學攝像單元210‧‧‧ Optical camera unit

220‧‧‧影像處理單元220‧‧‧Image Processing Unit

230‧‧‧灰階值計算單元230‧‧‧ Gray scale value calculation unit

240‧‧‧分析單元240‧‧‧Analysis unit

400、500‧‧‧原始影像400, 500‧‧‧ original images

401、402、501、502‧‧‧紋理結構401, 402, 501, 502‧‧‧ texture structure

11‧‧‧第一相位區11‧‧‧First phase zone

22‧‧‧第二相位區22‧‧‧Second phase zone

41、51‧‧‧子影像41, 51‧ ‧ sub-image

42、52‧‧‧比對影像42, 52‧‧‧ alignment images

D‧‧‧異長波形D‧‧‧isolated waveform

D1、D2‧‧‧缺陷D1, D2‧‧‧ Defects

S31、S32、S33、S34、S35、S36‧‧‧步驟S31, S32, S33, S34, S35, S36‧‧ steps

第1A圖係為一無瑕疵的相位延遲膜之灰階分佈圖;第1B圖係為一具有瑕疵的相位延遲膜之灰階分佈圖;第2圖係為本發明之檢測具週期性結構光學薄膜之瑕疵檢測裝置的一實施例;第3圖係為一檢測具週期性結構光學薄膜的流程圖;第4圖係從週期性結構之光學薄膜上所擷取之一原始影像;以及第5圖係為本發明之檢測具週期性結構之相位延遲薄膜的另一較佳實施例。1A is a gray scale distribution diagram of a flawless phase retardation film; 1B is a gray scale distribution diagram of a phase retardation film having a 瑕疵; and FIG. 2 is a periodic structure optical of the detection of the present invention. An embodiment of a film detecting device for a film; FIG. 3 is a flow chart for detecting an optical film having a periodic structure; and FIG. 4 is an original image taken from an optical film of a periodic structure; and The figure is another preferred embodiment of the phase retardation film of the present invention for detecting a periodic structure.

有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式知較佳實施例的詳細說明中,將可清楚的呈現。The above and other technical contents, features, and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments.

請參考第2圖,其係為本發明之檢測具週期性結構 光學薄膜之瑕疵檢測裝置200的一實施例。此週期性結構光學薄膜係為一相位延遲膜,其具有兩種紋理結構且此兩種紋理結構相互平行且重複排列。Please refer to FIG. 2, which is a periodic structure of the detection tool of the present invention. An embodiment of the optical film detection device 200. The periodic structured optical film is a phase retardation film having two texture structures and the two texture structures are arranged parallel to each other and repeatedly.

本發明所提出之瑕疵檢測裝置200,其包括一光學攝像單元210;一影像處理單元220;一灰階值計算單元230以及一分析單元240。The flaw detection device 200 of the present invention includes an optical imaging unit 210, an image processing unit 220, a grayscale value calculation unit 230, and an analysis unit 240.

上述光學攝像單元210係用以於待檢測光學薄膜上擷取一原始影像,並從原始影像擷取一子影像及一比對影像。上述影像處理單元220係耦接於光學攝像單元210,用以將子影像與比對影像進行影像處理以得到一處理影像。上述灰階值計算單元230係耦接於影像處理單元220,用以計算處理影像的平均灰階值。上述分析單元240係耦接於灰階值計算單元230,用以分析平均灰階值以判斷子影像所對應光學薄膜之區域是否具有瑕疵。The optical imaging unit 210 is configured to capture an original image on the optical film to be detected, and capture a sub-image and a comparison image from the original image. The image processing unit 220 is coupled to the optical imaging unit 210 for performing image processing on the sub-image and the comparison image to obtain a processed image. The grayscale value calculation unit 230 is coupled to the image processing unit 220 for calculating an average grayscale value of the processed image. The analysis unit 240 is coupled to the grayscale value calculation unit 230 for analyzing the average grayscale value to determine whether the region of the optical film corresponding to the subimage has flaws.

接著請參閱第2圖、第3圖及第4圖,並配合本發明之具週期性結構光學薄膜之檢測方法的一較佳實施例,進一步說明檢測裝置配合檢測方法所執行的各檢測步驟。Referring to FIG. 2, FIG. 3 and FIG. 4, and in conjunction with a preferred embodiment of the method for detecting a periodic structured optical film of the present invention, each detecting step performed by the detecting device cooperative detecting method is further described.

請參考第3圖,其係為檢測具週期性結構光學薄膜的流程圖。第4圖係從本發明之具週期性結構之光學薄膜上所擷取之一原始影像。Please refer to FIG. 3, which is a flow chart for detecting an optical film having a periodic structure. Figure 4 is an image of one of the original images taken from the optical film of the present invention having a periodic structure.

步驟S31中,於一具有週期性結構之待檢測光學薄膜上擷取之一原始影像,原始影像具有m個週期之週期性結構,其中m為正數。本發明所指週期性結構意指一光學薄膜至少具有兩種紋理結構,且此兩種紋理結構相互平行且 重複排列。In step S31, an original image is captured on an optical film to be detected having a periodic structure, and the original image has a periodic structure of m periods, where m is a positive number. The periodic structure referred to in the present invention means that an optical film has at least two texture structures, and the two texture structures are parallel to each other and Repeat the arrangement.

如第4圖所示,原始影像400係由第2圖的光學攝像單元210於一具週期性結構之相位延遲膜上所擷取之影像。原始影像400係由複數個紋理結構401及402所組成,且諸紋理結構401及402相互平行且重複排列。此原始影像400係具有8個週期性結構(m=8),符合m為正數。As shown in FIG. 4, the original image 400 is an image captured by the optical imaging unit 210 of FIG. 2 on a phase retardation film having a periodic structure. The original image 400 is composed of a plurality of texture structures 401 and 402, and the texture structures 401 and 402 are parallel and repeatedly arranged. This original image 400 has eight periodic structures (m=8), which is consistent with m being a positive number.

於步驟S32中,從原始影像中擷取一子影像,子影像包含n個週期之週期性結構,其中n為正數,且n<m。In step S32, a sub-image is captured from the original image, and the sub-image includes a periodic structure of n periods, where n is a positive number and n<m.

如第4圖所示,第2圖的光學攝像單元210所擷取之子影像為41。子影像41係由複數個平行且重複排列的紋理結構401及402所組成。此子影像410係具有3個週期之週期性結構(n=3),符合n為正數且n<m。As shown in FIG. 4, the sub-image captured by the optical imaging unit 210 of FIG. 2 is 41. The sub-image 41 is composed of a plurality of parallel and repeatedly arranged texture structures 401 and 402. This sub-image 410 has a periodic structure of three cycles (n=3), and n is a positive number and n<m.

接著,於步驟S33中,從原始影像中擷取一比對影像,比對影像包含n個週期之週期性結構,其中n為正數,且n<m。其中,比對影像的擷取位置與子影像不同,但比對影像的面積與子影像相同。Next, in step S33, a comparison image is captured from the original image, and the comparison image includes a periodic structure of n periods, where n is a positive number and n<m. The capture position of the comparison image is different from the sub-image, but the area of the comparison image is the same as the sub-image.

如第4圖所示,第2圖的光學攝像單元210所擷取之比對影像為42。比對影像42包含3個週期之週期性結構(n=3),比對影像420與子影像410的擷取位置不同,但兩者的影像面積相同。As shown in FIG. 4, the comparison image captured by the optical imaging unit 210 of FIG. 2 is 42. The comparison image 42 includes a periodic structure of three cycles (n=3), and the alignment positions of the comparison image 420 and the sub-image 410 are different, but the image areas of the two are the same.

上述比對影像與子影像的擷取位置不同意指擷取兩影像的位置仍可有部分重疊,但不包含完全重疊。The difference between the above-mentioned comparison image and the sub-image capture position means that the positions of the two images can still partially overlap, but do not include complete overlap.

於步驟S34中,利用影像處理將子影像與比對影像進行影像處理即可判斷子影像所對應之光學薄膜是否具有 瑕疵。In step S34, image processing is performed on the sub-image and the comparison image by image processing to determine whether the optical film corresponding to the sub-image has defect.

上述影像處理係可包含影像相減及/或一影像濾除。影像處理單元220係將子影像41與比對影像42相減以得到一第一處理影像。接著進行影像濾除,以確認第一處理影像中是否存在比對影像42所具有之瑕疵。若上述第一處理影像不具有比對影像42所具有的瑕疵,則可繼續進行步驟S35。若上述第一處理影像具有比對影像42所具有的瑕疵,則需先將瑕疵濾除以避免影響最後瑕疵的判斷。The image processing system described above may include image subtraction and/or image filtering. The image processing unit 220 subtracts the sub-image 41 from the comparison image 42 to obtain a first processed image. Image filtering is then performed to confirm whether or not there is a flaw in the first processed image. If the first processed image does not have the 瑕疵 of the matching image 42, the step S35 can be continued. If the first processed image has a contrast to the image 42 , the 瑕疵 is filtered first to avoid the determination of the final flaw.

於步驟S35中,藉由第2圖的灰階值計算單元230計算處理影像的平均灰階值。In step S35, the grayscale value calculation unit 230 of Fig. 2 calculates the average grayscale value of the processed image.

於步驟S36中,第2圖的分析單元240藉由分析該處理影像的平均灰階值以判斷子影像所對應的光學薄膜是否具有瑕疵存在。當第一處理影像之平均灰階值為0,即表示子影像所對應之光學薄膜並無缺陷存在。反之,當該平均灰階值大於0,即表示子影像所對應之光學薄膜有缺陷存在。於此實施例中,第一處理影像的平均灰階值大於0,意即子影像410所對應之相位延遲膜有缺陷D1存在。In step S36, the analyzing unit 240 of FIG. 2 determines whether the optical film corresponding to the sub-image has flaws by analyzing the average grayscale value of the processed image. When the average grayscale value of the first processed image is 0, it means that the optical film corresponding to the subimage has no defects. On the contrary, when the average grayscale value is greater than 0, it means that the optical film corresponding to the sub-image is defective. In this embodiment, the average grayscale value of the first processed image is greater than 0, that is, the phase retardation film corresponding to the subimage 410 has a defect D1.

但於上述步驟S32中,從原始影像中擷取一子影像的方法並不限於第4圖所示之實施例。第5圖係為本發明之檢測具週期性結構之相位延遲薄膜的另一實施例。However, in the above step S32, the method of extracting a sub-image from the original image is not limited to the embodiment shown in FIG. Fig. 5 is another embodiment of the phase retardation film of the present invention for detecting a periodic structure.

原始影像500係從一具週期性結構之相位延遲膜上所擷取的影像。原始影像500具有複數個平行且重複排列的紋理結構501及502。此原始影像500係具有8個週期性結構(m=8),符合m為正數。The original image 500 is an image taken from a phase retardation film of a periodic structure. The original image 500 has a plurality of parallel and repeatedly arranged textures 501 and 502. This original image 500 has eight periodic structures (m=8), which is consistent with m being a positive number.

首先,從原始影像500擷取一子影像51,子影像51係由複數個平行且重複排列的紋理結構501及502所組成。此子影像51係具有4個週期之週期性結構(n=4),符合n為正數且n<m。First, a sub-image 51 is captured from the original image 500, and the sub-image 51 is composed of a plurality of parallel and repeatedly arranged texture structures 501 and 502. This sub-image 51 has a periodic structure of four cycles (n=4), and n is a positive number and n<m.

接著,從原始影像500擷取比對影像52。比對影像52亦具有4組重複排列之結構(n=4)。Next, the comparison image 52 is captured from the original image 500. The alignment image 52 also has four sets of repeating structures (n=4).

相較於第4圖的子影像與比對影像的擷取方式,第5圖所示的子影像與比對影像則有部分重疊,但仍符合兩者的擷取位置不同,且面積相同。其後續影像處理步驟、計算步驟及分析步驟皆同於第4圖所示之實施例。Compared with the sub-image and the comparison image of FIG. 4, the sub-image and the comparison image shown in FIG. 5 partially overlap, but still meet the same extraction position and the same area. The subsequent image processing steps, calculation steps and analysis steps are the same as those in the embodiment shown in FIG.

上述從原始影像中擷取子影像及比對影像的方法,並不以任一種方式為限,可依檢測需求及檢測效率的考量作適當地調整。The method for extracting sub-images and comparing images from the original image is not limited to any one of the methods, and can be appropriately adjusted according to the detection requirements and the detection efficiency.

綜上所述,雖然本發明已以較佳實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。因此,本發明之保護範圍當視後附之申請專利範圍所界定者為準。In conclusion, the present invention has been disclosed in the above preferred embodiments, and is not intended to limit the present invention. A person skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

S31~S36‧‧‧步驟S31~S36‧‧‧Steps

Claims (6)

一種用於檢測具週期性結構之光學薄膜的瑕疵檢測方法,包括以下步驟:(A)於一具有週期性結構之待檢測光學薄膜上擷取之一原始影像,該原始影像具有m個週期之週期性結構,其中m為正數;(B)從該原始影像中擷取一子影像,該子影像包含n個週期之週期性結構,其中n為正數,且n<m;(C)從該原始影像中擷取一比對影像,該比對影像包含n組重複排列之結構,其中n為正數,n<m,該比對影像的擷取位置與該子影像不同,但該比對影像的面積與該子影像相同;(D)將該子影像與該比對影像進行一影像處理以得到一處理影像;(E)計算該處理影像之一平均灰階值;以及(F)分析該平均灰階值以判斷該子影像所對應之光學薄膜是否具有瑕疵。A method for detecting flaws in an optical film having a periodic structure, comprising the steps of: (A) drawing an original image on an optical film to be inspected having a periodic structure, the original image having m cycles a periodic structure, wherein m is a positive number; (B) extracting a sub-image from the original image, the sub-image comprising a periodic structure of n cycles, wherein n is a positive number, and n < m; Obtaining a comparison image in the original image, the comparison image comprises n sets of repeated arrangement structures, wherein n is a positive number, n<m, the position of the comparison image is different from the sub-image, but the comparison image The area is the same as the sub-image; (D) performing an image processing on the sub-image and the comparison image to obtain a processed image; (E) calculating an average grayscale value of the processed image; and (F) analyzing the image The average grayscale value is used to determine whether the optical film corresponding to the sub-image has flaws. 如申請專利範圍第1項所述之瑕疵檢測方法,其中該影像處理包含一影像相減及/或一影像濾除。The method for detecting flaws as described in claim 1, wherein the image processing comprises an image subtraction and/or an image filtering. 如申請專利範圍第1項所述之瑕疵檢測方法,其中當該處理影像之平均灰階值不為0時,則表示該子影像所對應之光學薄膜具有瑕疵。The method for detecting flaws as described in claim 1, wherein when the average grayscale value of the processed image is not 0, it indicates that the optical film corresponding to the sub-image has 瑕疵. 如申請專利範圍第1項所述之瑕疵檢測方法,其中該具週期性結構之光學薄膜可為一相位延遲膜或一導光板。The method of detecting a flaw according to the first aspect of the invention, wherein the optical film having a periodic structure may be a phase retardation film or a light guide plate. 一種用於檢測具週期性結構之光學薄膜的瑕疵檢測裝置,包括:一光學攝像單元,用以於待檢測的一光學薄膜上擷取一原始影像,並從該原始影像擷取一子影像及一比對影像;一影像處理單元,耦接於該光學攝像單元,用以將該子影像與該比對影像進行一影像處理以得到一處理影像;一灰階值計算單元,耦接於該影像處理單元,用以計算該處理影像的一平均灰階值;以及一分析單元,耦接於該灰階值計算單元,分析該平均灰階值以判斷該子影像所對應之該光學薄膜是否具有瑕疵。A cymbal detecting device for detecting an optical film having a periodic structure, comprising: an optical imaging unit for capturing an original image on an optical film to be detected, and extracting a sub-image from the original image and An image processing unit coupled to the optical camera unit for performing an image processing on the sub image and the comparison image to obtain a processed image; a gray scale value calculating unit coupled to the image An image processing unit is configured to calculate an average grayscale value of the processed image; and an analyzing unit coupled to the grayscale value calculating unit to analyze the average grayscale value to determine whether the optical film corresponding to the subimage corresponds to the optical film Have a flaw. 如申請專利範圍第5項所述之瑕疵檢測裝置,其中該影像處理單元還包括一影像相減單元及/或一影像濾除單元。The detection device of claim 5, wherein the image processing unit further comprises an image subtraction unit and/or an image filtering unit.
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