TWI489079B - Projection apparatus and depth measuring system - Google Patents

Projection apparatus and depth measuring system Download PDF

Info

Publication number
TWI489079B
TWI489079B TW102139742A TW102139742A TWI489079B TW I489079 B TWI489079 B TW I489079B TW 102139742 A TW102139742 A TW 102139742A TW 102139742 A TW102139742 A TW 102139742A TW I489079 B TWI489079 B TW I489079B
Authority
TW
Taiwan
Prior art keywords
pattern
unit
light
beams
illumination
Prior art date
Application number
TW102139742A
Other languages
Chinese (zh)
Other versions
TW201518675A (en
Inventor
Chi Lung Chang
Keng Han Chuang
Po Chuan Kang
Original Assignee
Young Optics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Young Optics Inc filed Critical Young Optics Inc
Priority to TW102139742A priority Critical patent/TWI489079B/en
Priority to CN201410163069.6A priority patent/CN104614925B/en
Publication of TW201518675A publication Critical patent/TW201518675A/en
Application granted granted Critical
Publication of TWI489079B publication Critical patent/TWI489079B/en

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/14Details
    • G03B21/20Lamp housings
    • G03B21/2006Lamp housings characterised by the light source
    • G03B21/2013Plural light sources
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/22Measuring arrangements characterised by the use of optical techniques for measuring depth
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/254Projection of a pattern, viewing through a pattern, e.g. moiré
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/14Details
    • G03B21/20Lamp housings
    • G03B21/2073Polarisers in the lamp house

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Description

投影裝置與深度量測系統Projection device and depth measurement system

本發明是有關於一種光學裝置與量測系統,且特別是有關於一種投影裝置與深度量測系統。This invention relates to an optical device and measurement system, and more particularly to a projection device and depth measurement system.

關於求解物體表面的形貌,編碼結構光被認為是可靠的技術。結構光指的是一些具有特定圖案的光,從最簡單的線,面到格狀等更複雜的圖形都有。Coding structured light is considered a reliable technique for solving the topography of an object's surface. Structured light refers to some light with a specific pattern, from the simplest lines, faces to lattices and more complex graphics.

基本原理就是將結構光投射到物件或場景上,並從一個或多個視角取像。由於圖案已被編碼,取像的點和投射點之間的對應關係,可以很容易地找到。解碼後的各點可以利用三角函數法求解物體的三維信息。應用實例包括目標距離偵測、製造零件之檢測、逆向工程、手勢識別和三維地圖的建立。The basic principle is to project structured light onto an object or scene and take images from one or more perspectives. Since the pattern has been encoded, the correspondence between the imaged point and the projected point can be easily found. Each point after decoding can solve the three-dimensional information of the object by using the trigonometric function method. Application examples include target distance detection, manufacturing part inspection, reverse engineering, gesture recognition, and 3D map creation.

結構光編碼系統是基於投射一個單一的圖案或一組的圖案到測量場景上,之後由一個單一的攝像機或多個攝像機進行取像。圖案都是經過專門設計,使編碼代號被分配到一組像素上。每一個編碼像素具有其自己的編碼代號,所以從編碼代號直接映 射到對應的圖案中像素的坐標。根據使用者的編碼策略,區分為時間編碼、空間編碼和直接編碼。其中最常使用的策略是基於時間的編碼。時間編碼(temporal encoding based systems)的優點是將多個不同的編碼圖案按時序先後投射到景物表面,以得到相應的編碼圖像序列。之後,將編碼圖像序列組合起來進行解碼.它具有高準確度、高解析度等優點。A structured optical coding system is based on projecting a single pattern or set of patterns onto a measurement scene, followed by image capture by a single camera or multiple cameras. The patterns are designed so that the coded code is assigned to a set of pixels. Each coded pixel has its own code name, so it is directly reflected from the code name. The coordinates of the pixels in the corresponding pattern are shot. According to the user's coding strategy, it is divided into time coding, spatial coding and direct coding. The most commonly used strategy is time-based coding. An advantage of temporal encoding based systems is that a plurality of different coding patterns are projected onto the scene surface in a time sequence to obtain a corresponding sequence of encoded images. After that, the encoded image sequences are combined for decoding. It has the advantages of high accuracy and high resolution.

在使用時間編碼的情況下,一組圖案需依時間次序投射到測量表面。過去最典型的投影裝置是使用幻燈機,幻燈機需要機構切換幻燈片,造成體積龐大且笨重,使用操作較為不易,而近年常用的投影裝置為採用矽基液晶面板(liquid-crystal-on-silicon panel,LCOS panel)或數位微鏡元件(digital micro-mirror device,DMD)的視頻投影機,雖改善了笨重性,但投影機的設備不僅價值昂貴且只投影數個圖案,故顯得浪費。In the case of time coding, a set of patterns is projected onto the measurement surface in chronological order. In the past, the most typical projection device used a slide projector. The slide projector needs a mechanism to switch slides, which is bulky and cumbersome, and is difficult to use. In recent years, the commonly used projection device uses a liquid-crystal-on-silicon panel (liquid-crystal-on-silicon panel). LCOS panel) or digital micro-mirror device (DMD) video projectors have improved the bulkiness, but the projector's equipment is not only expensive but only projects a few patterns, so it is wasteful.

美國專利第5135308號揭露一投影系統。美國專利第5636025號則揭露一測量系統。美國專利第7397550號揭露一種三維掃描裝置。美國專利第5636025號揭露一種測量系統。美國專利第6263234號揭露一種使用視頻投影機的投影系統。美國專利第7742633號揭露一種快速建立足部三維形貌的裝置。美國專利第4212073號揭露一種圖案投影機。美國專利第4641972、4657394號揭露一種投影系統。美國專利第6977732號揭露一種微型量測儀。美國專利第6509559號揭露一種投影系統。美國專利第 6577405號揭露一種光柵投影機相位輪廓量測系統。其他應用實例包含美國專利第6501554號的三維掃描器以及美國專利第6750899號的檢測系統。中華民國專利第I358525號揭露一種應用條紋反射法量測物體表面形貌的方法。中華民國專利第I358606號揭露一種三維環場掃描裝置。中華民國專利第I371699號揭露一種影像快速量測足部三維尺寸方法與裝置。中華民國專利第I372554號揭露一種影像位移偵測方法。中華民國專利第M395155號揭露一種動態物像取樣裝置。中華民國專利第580556號揭露一種物體表面三維形貌量測方法。A projection system is disclosed in U.S. Patent No. 5,135,308. U.S. Patent No. 5,366,025 discloses a measuring system. U.S. Patent No. 7,397,550 discloses a three-dimensional scanning device. A measuring system is disclosed in U.S. Patent No. 5,366,025. U.S. Patent No. 6,263,234 discloses a projection system using a video projector. U.S. Patent No. 7,742,633 discloses a device for rapidly establishing a three-dimensional shape of a foot. A pattern projector is disclosed in U.S. Patent No. 4,212,073. A projection system is disclosed in U.S. Patent Nos. 4,464,1972 and 4,465,934. U.S. Patent No. 6,977,732 discloses a micrometer. A projection system is disclosed in U.S. Patent No. 6,509,559. US Patent No. 6,577,405 discloses a grating projector phase contour measuring system. Other application examples include the three-dimensional scanner of U.S. Patent No. 6,501,554 and the detection system of U.S. Patent No. 6,750,899. The Republic of China Patent No. I358525 discloses a method for measuring the surface topography of an object by using a stripe reflection method. A three-dimensional ring field scanning device is disclosed in the Republic of China Patent No. I358606. The Republic of China Patent No. I371699 discloses a method and apparatus for rapid measurement of the three-dimensional size of a foot. An image displacement detecting method is disclosed in the Republic of China Patent No. I372554. A dynamic object image sampling device is disclosed in the Republic of China Patent No. M395155. The Republic of China Patent No. 580556 discloses a method for measuring the three-dimensional shape of an object surface.

本發明提供一種投影裝置,具有較低的成本、較高的操作速度與較高的精確度。The invention provides a projection device with lower cost, higher operating speed and higher precision.

本發明提供一種深度量測系統,具有較低的成本、較高的操作速度與較高的精確度。The invention provides a depth measuring system with lower cost, higher operating speed and higher precision.

本發明的其他目的和優點可以從本發明所揭露的技術特徵中得到進一步的了解。Other objects and advantages of the present invention will become apparent from the technical features disclosed herein.

為達上述之一或部份或全部目的或是其他目的,本發明的一實施例提出一種投影裝置,其包括至少一光源、至少一圖案單元與投影鏡頭。至少一光源提供至少一照明光束。至少一圖案單元具有固定不變的圖案,且對應地配置於至少一照明光束的至少一傳遞路徑上,以將至少一照明光束轉換為至少一圖案光束。 投影鏡頭配置於圖案光束的傳遞路徑上。至少一光源提供至少一發光組合,至少一圖案光束對應地具有至少一圖案組合。In order to achieve one or a part or all of the above or other purposes, an embodiment of the present invention provides a projection apparatus including at least one light source, at least one pattern unit, and a projection lens. At least one light source provides at least one illumination beam. The at least one pattern unit has a fixed pattern and is correspondingly disposed on at least one transmission path of the at least one illumination beam to convert the at least one illumination beam into the at least one pattern beam. The projection lens is disposed on the transmission path of the pattern beam. The at least one light source provides at least one illumination combination, and the at least one pattern beam correspondingly has at least one pattern combination.

本發明的一實施例提出一種深度量測系統,其適於量測待測物的深度。深度量測系統包括上述的投影裝置以及攝像裝置。投影鏡頭用以將圖案光束投射至待測物,以在待測物上形成參考圖案。攝像裝置用以擷取參考圖案。An embodiment of the invention provides a depth measurement system adapted to measure the depth of a test object. The depth measuring system includes the above-described projection device and imaging device. The projection lens is used to project a pattern beam onto the object to be tested to form a reference pattern on the object to be tested. The camera device is used to capture a reference pattern.

在本發明的一實施例中,圖案單元包括穿透式圖案單元或反射式圖案單元的至少其一。In an embodiment of the invention, the pattern unit comprises at least one of a transmissive pattern unit or a reflective pattern unit.

在本發明的一實施例中,當光源的數量為多個且圖案單元的數量為多個時,圖案單元分成多個圖案單元對,每一圖案單元對包括穿透式圖案單元與反射式圖案單元,光源分成多個光源對,光源對分別與圖案單元對相對應,每一光源對的其一光源與對應的圖案單元對的反射式圖案單元相對應,每一光源對的另一光源與對應的圖案單元對的穿透式圖案單元相對應。In an embodiment of the invention, when the number of the light sources is plural and the number of the pattern units is plural, the pattern unit is divided into a plurality of pattern unit pairs, and each pattern unit pair includes the transmissive pattern unit and the reflective pattern. a unit, the light source is divided into a plurality of light source pairs, the light source pairs respectively corresponding to the pattern unit pairs, one light source of each light source pair corresponding to the reflective pattern unit of the corresponding pattern unit pair, and the other light source of each light source pair Corresponding pattern unit pairs correspond to the transmissive pattern elements.

在本發明的一實施例中,光源包括雷射光源、發光二極體、有機發光二極體、汞燈、鹵素燈或其組合。In an embodiment of the invention, the light source comprises a laser source, a light emitting diode, an organic light emitting diode, a mercury lamp, a halogen lamp, or a combination thereof.

在本發明的一實施例中,當光源的數量為多個時,照明光束的顏色不相同。In an embodiment of the invention, when the number of light sources is plural, the colors of the illumination beams are different.

在本發明的一實施例中,當光源的數量為多個時,投影裝置更包括控制單元,控制單元電性連接至光源,以控制光源的發光組合。In an embodiment of the invention, when the number of the light sources is plural, the projection device further includes a control unit electrically connected to the light source to control the light combination of the light sources.

在本發明的一實施例中,當光源的數量為多個且圖案單 元的數量為多個時,投影裝置更包括合光單元,合光單元配置於圖案光束的傳遞路徑上,且用以合併圖案光束。在一實施例中,合光單元包括分色X稜鏡、分色X板、偏振分光稜鏡或偏振分光板。In an embodiment of the invention, when the number of light sources is multiple and the pattern is single When the number of the elements is plural, the projection device further includes a light combining unit, and the light combining unit is disposed on the transmission path of the pattern beam, and is used to merge the pattern beams. In an embodiment, the light combining unit comprises a color separation X 稜鏡, a color separation X plate, a polarization split 稜鏡 or a polarization beam splitter.

在本發明的一實施例中,當光源的數量為多個且圖案單元的數量為多個時,投影裝置更包括合光單元以及內部全反射稜鏡。合光單元配置於照明光束的傳遞路徑上,內部全反射稜鏡配置於照明光束與圖案光束的傳遞路徑上。In an embodiment of the invention, when the number of the light sources is plural and the number of the pattern units is plural, the projection device further includes a light combining unit and an internal total reflection unit. The light combining unit is disposed on the transmission path of the illumination beam, and the internal total reflection unit is disposed on the transmission path of the illumination beam and the pattern beam.

在本發明的一實施例中,深度量測系統更包括計算單元,計算單元電性連接至攝像裝置,且用以根據攝像裝置所擷取的參考圖案來計算出待測物的深度。In an embodiment of the invention, the depth measurement system further includes a calculation unit electrically connected to the imaging device and configured to calculate the depth of the object to be tested according to the reference pattern captured by the camera device.

本發明之實施例可以達到下列優點或功效的至少其中之一。在本發明的實施例的深度量測系統與投影裝置中,藉由光源的不同發光組合與圖案單元的搭配,可使投影出的圖案光束具有多種不同的組合。由於圖案單元為成本較低的固定不變的圖案,因此本發明的實施例的深度量測系統與投影裝置可以在較低成本的情況下達到較高的操作速度與較高的精確度。Embodiments of the invention may achieve at least one of the following advantages or benefits. In the depth measurement system and the projection device of the embodiment of the present invention, the projected pattern beam can be combined in a plurality of different combinations by the combination of different illumination combinations of the light source and the pattern unit. Since the pattern unit is a fixed pattern with a lower cost, the depth measurement system and the projection apparatus of the embodiment of the present invention can achieve higher operation speed and higher precision at a lower cost.

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the invention will be apparent from the following description.

100‧‧‧深度量測系統100‧‧‧Deep Measurement System

100a、200a、300a、400a‧‧‧投影裝置100a, 200a, 300a, 400a‧‧‧projector

10‧‧‧待測物10‧‧‧Test object

120、120a、120b、120c‧‧‧光源120, 120a, 120b, 120c‧‧‧ light source

120a1、120a2、120b1、120b2、120c1、120c2‧‧‧光源對120a1, 120a2, 120b1, 120b2, 120c1, 120c2‧‧‧ light source pair

B1、B1'、B1a、B1b、B1c、B1d、B1e、B1f‧‧‧照明光束B1, B1', B1a, B1b, B1c, B1d, B1e, B1f‧‧‧ illumination beam

B2、B2'、B2a、B2b、B2c、B2d、B2e、B2f‧‧‧圖案光束B2, B2', B2a, B2b, B2c, B2d, B2e, B2f‧‧‧ pattern beam

140、140a、140a1、140a2、140a3、140b1、140b2、140b3‧‧‧圖案單元140, 140a, 140a1, 140a2, 140a3, 140b1, 140b2, 140b3‧‧‧ pattern unit

150a、150a1、150a2、150a3、150a4、150a5、150a6‧‧‧透鏡150a, 150a1, 150a2, 150a3, 150a4, 150a5, 150a6‧‧ lens

150b1、150b3‧‧‧反射鏡150b1, 150b3‧‧‧ mirror

150d1、150d2、150d3‧‧‧四分之一波長板150d1, 150d2, 150d3‧‧‧ quarter wave plate

160、170、170a、170b、170c‧‧‧合光單元160, 170, 170a, 170b, 170c‧‧ ‧ light unit

160a、160b‧‧‧第一分色膜、第二分色膜160a, 160b‧‧‧first dichroic film, second dichroic film

180‧‧‧投影鏡頭180‧‧‧Projection lens

190‧‧‧內部全反射稜鏡190‧‧‧Internal total reflection稜鏡

220‧‧‧攝像裝置220‧‧‧ camera

240‧‧‧控制單元240‧‧‧Control unit

260‧‧‧計算單元260‧‧‧Computation unit

T'‧‧‧相位T'‧‧‧ phase

S1、S2、S3‧‧‧正弦週期圖案S1, S2, S3‧‧‧ sinusoidal periodic pattern

G1-8‧‧‧格雷碼圖案G1-8‧‧‧Gray code pattern

A、B、C、D、E、F、G、H‧‧‧點A, B, C, D, E, F, G, H‧‧ points

圖1A是本發明第一實施例的一種深度量測系統的架構示意 圖。1A is a schematic structural diagram of a depth measurement system according to a first embodiment of the present invention; Figure.

圖1B是圖1A中的一種投影裝置的架構示意圖。FIG. 1B is a schematic structural diagram of a projection apparatus in FIG. 1A.

圖1C是採用格雷碼編排的圖案光束的示意圖。Figure 1C is a schematic illustration of a pattern beam arranged in Gray code.

圖1D是採用正弦週期圖案的圖案光束的示意圖。Figure 1D is a schematic illustration of a pattern beam employing a sinusoidal periodic pattern.

圖1E是圖1D的圖案光束的強度對時間變化圖。Figure 1E is a graph of intensity versus time for the pattern beam of Figure 1D.

圖2A是本發明第二實施例中深度量測系統的投影裝置的示意圖。2A is a schematic view of a projection apparatus of a depth measuring system in a second embodiment of the present invention.

圖2B是另一實施例的投影裝置中的部分示意圖。2B is a partial schematic view of a projection apparatus of another embodiment.

圖3是本發明第三實施例中深度量測系統的投影裝置的示意圖。3 is a schematic view of a projection apparatus of a depth measuring system in a third embodiment of the present invention.

圖4是本發明第四實施例中深度量測系統的投影裝置的示意圖。4 is a schematic view of a projection apparatus of a depth measuring system in a fourth embodiment of the present invention.

有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之一較佳實施例的詳細說明中,將可清楚的呈現。以下實施例中所提到的方向用語,例如:上、下、左、右、前或後等,僅是參考附加圖式的方向。因此,使用的方向用語是用來說明並非用來限制本發明。The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments. The directional terms mentioned in the following embodiments, such as up, down, left, right, front or back, etc., are only directions referring to the additional drawings. Therefore, the directional terminology used is for the purpose of illustration and not limitation.

圖1A是本發明第一實施例的一種深度量測系統的架構示意圖,而圖1B是圖1A中的一種投影裝置的架構示意圖。請參照圖1A,在本實施例中,深度量測系統100包括投影裝置100a 以及攝像裝置220。深度量測系統100用以量測待測物10的表面深度,其中待測物10的深度可透過投影裝置100a投射參考圖案(容後詳述)至待側物10上以及攝像裝置220擷取待側物10上的參考圖案來求得。詳細而言,投影裝置100a用以將編碼後的圖案光束B2投影至待測物10表面上。本實施例的深度量測系統100更包括計算單元260,計算單元260電性連接至攝像裝置220,用以根據攝像裝置220所擷取的待測物10上的圖案光束B2的影像計算出待測物10的深度,例如是藉由圖案光束B2的解碼結果以及三角法(triangulation)原理計算出待測物10的深度。1A is a schematic structural view of a depth measuring system according to a first embodiment of the present invention, and FIG. 1B is a schematic structural view of a projection device of FIG. 1A. Referring to FIG. 1A, in the embodiment, the depth measurement system 100 includes a projection device 100a. And an imaging device 220. The depth measurement system 100 is configured to measure the surface depth of the object to be tested 10, wherein the depth of the object to be tested 10 can be projected through the projection device 100a (to be detailed later) to the side object 10 and captured by the camera device 220. The reference pattern on the side object 10 is obtained. In detail, the projection device 100a is used to project the encoded pattern beam B2 onto the surface of the object 10 to be tested. The depth measurement system 100 of the present embodiment further includes a calculation unit 260. The calculation unit 260 is electrically connected to the imaging device 220 for calculating the image of the pattern light beam B2 on the object to be tested 10 captured by the image capturing device 220. The depth of the object 10 is calculated, for example, by the decoding result of the pattern beam B2 and the triangulation principle to calculate the depth of the object 10 to be tested.

請參照圖1B,本實施例的投影裝置100a包括多個光源120(例如是光源120a、120b及120c)、多個圖案單元140(例如是圖案單元140a1、140a2及140a3)、合光單元160以及投影鏡頭180。這些光源120分別提供多個照明光束B1。這些圖案單元140具有固定不變的圖案,且每一圖案單元140配置於對應的照明光束B1的傳遞路徑上,以將照明光束B1轉換為圖案光束B2。具體而言,在本實施例中,光源120包括光源120a、光源120b及光源120c,其中光源120a、120b及120c分別提供不同波段的照明光束B1a、B1b及B1c於不同的光傳遞路徑上。光源120例如為發光二極體(light-emitting diode,LED),然而,在其他實施例中,光源120亦可以是其他適當的光源,例如雷射光源、有機發光二極體、汞燈、鹵素燈或其組合。此外,在本實施例中的圖案單元140例如為穿透式圖案單元,然而,本發明不以此為限,舉例來說, 在其他實施例中,可採用反射式圖案單元或採用穿透式圖案單元與反射式圖案單元的組合。在本實施例中,圖案單元140例如為遮光片、幻燈片或其他可使入射光束部分穿透及部分反射的光學元件。Referring to FIG. 1B, the projection apparatus 100a of the present embodiment includes a plurality of light sources 120 (eg, light sources 120a, 120b, and 120c), a plurality of pattern units 140 (eg, pattern units 140a1, 140a2, and 140a3), a light combining unit 160, and Projection lens 180. These light sources 120 provide a plurality of illumination beams B1, respectively. These pattern units 140 have a fixed pattern, and each pattern unit 140 is disposed on a transmission path of the corresponding illumination beam B1 to convert the illumination beam B1 into a pattern beam B2. Specifically, in the embodiment, the light source 120 includes a light source 120a, a light source 120b, and a light source 120c, wherein the light sources 120a, 120b, and 120c respectively provide illumination beams B1a, B1b, and B1c of different wavelength bands on different light transmission paths. The light source 120 is, for example, a light-emitting diode (LED). However, in other embodiments, the light source 120 may be other suitable light sources, such as a laser light source, an organic light emitting diode, a mercury lamp, and a halogen. Light or a combination thereof. In addition, the pattern unit 140 in this embodiment is, for example, a transmissive pattern unit. However, the invention is not limited thereto, for example, In other embodiments, a reflective pattern unit or a combination of a transmissive pattern unit and a reflective pattern unit may be employed. In the present embodiment, the pattern unit 140 is, for example, a light shielding sheet, a slide or other optical element that partially penetrates and partially reflects the incident light beam.

進一步而言,在本實施例中,投影裝置100a的光源120a提供第一波段的照明光束B1a,其中照明光束B1a傳遞於第一光學路徑上。照明光束B1a通過透鏡150a1後而被傳遞至反射鏡150b1,且反射鏡150b1將照明光束B1a反射至穿透式圖案單元140a1。而穿透式圖案單元140a1配置於照明光束B1a的傳遞路徑上,以將照明光束B1a轉換為圖案光束B2a。接著,圖案光束B2a被傳遞至合光單元160。另外,光源120b提供第二波段的照明光束B1b,其中照明光束B1b傳遞於第二光學路徑上,照明光束B1b通過透鏡150a2後直接被傳遞至穿透式圖案單元140a2,而穿透式圖案單元140a2配置於照明光束B1b的傳遞路徑上,以將照明光束B1b轉換為圖案光束B2b。接著,圖案光束B2b被傳遞至合光單元160。此外,光源120c提供第三波段的照明光束B1c,其中照明光束B1c傳遞於第三光學路徑上,照明光束B1c通過透鏡150a3後而被傳遞至反射鏡150b3,反射鏡150b3將照明光束B1c反射至穿透式圖案單元140a3。而穿透式圖案單元140a3配置於照明光束B1c的傳遞路徑上,以將照明光束B1c轉換為圖案光束B2c。接著,圖案光束B2c被傳遞至合光單元160。Further, in the present embodiment, the light source 120a of the projection device 100a provides the illumination beam B1a of the first wavelength band, wherein the illumination beam B1a is transmitted on the first optical path. The illumination beam B1a is transmitted to the mirror 150b1 after passing through the lens 150a1, and the mirror 150b1 reflects the illumination beam B1a to the transmissive pattern unit 140a1. The transmissive pattern unit 140a1 is disposed on the transmission path of the illumination beam B1a to convert the illumination beam B1a into the pattern beam B2a. Then, the pattern light beam B2a is transmitted to the light combining unit 160. In addition, the light source 120b provides an illumination beam B1b of the second wavelength band, wherein the illumination beam B1b is transmitted on the second optical path, and the illumination beam B1b is directly transmitted to the transmissive pattern unit 140a2 after passing through the lens 150a2, and the transmissive pattern unit 140a2 It is disposed on the transmission path of the illumination beam B1b to convert the illumination beam B1b into the pattern beam B2b. Then, the pattern light beam B2b is transmitted to the light combining unit 160. In addition, the light source 120c provides an illumination beam B1c of a third wavelength band, wherein the illumination beam B1c is transmitted on the third optical path, and the illumination beam B1c is transmitted to the mirror 150b3 after passing through the lens 150a3, and the mirror 150b3 reflects the illumination beam B1c to Transmissive pattern unit 140a3. The transmissive pattern unit 140a3 is disposed on the transmission path of the illumination beam B1c to convert the illumination beam B1c into the pattern beam B2c. Then, the pattern light beam B2c is transmitted to the light combining unit 160.

承上述,合光單元160配置於圖案光束B2a、B2b及B2c 的傳遞路徑上,且接收並傳遞圖案光束B2a、B2b及B2c,以進一步將圖案光束B2a、B2b及B2c合併。本實施例中的合光單元160例如為分色X稜鏡,在其他實施例中,合光單元160例如為分色X板,本發明不以此為限。具體而言,合光單元160具有第一分色膜160a與第二分色膜160b,並配置於第一光學路徑、第二光學路徑及第三光學路徑上,且圖案光束B2a、B2b及B2c的波段不同。在本實施例中,合光單元160將圖案光束B2a、B2b及B2c合併為圖案光束B2,並傳遞至投影鏡頭180。詳言之,圖案光束B2a被第一分色膜160a反射至投影鏡頭180,且第一分色膜160a讓圖案光束B2b以及圖案光束B2c穿透。另一方面,圖案光束B2c被第二分色膜160b反射至投影鏡頭180,且第二分色膜160b讓圖案光束B2a以及圖案光束B2b穿透。圖案光束B2c則是穿透第一分色膜160a與第二分色膜160b並傳遞至投影鏡頭180。In accordance with the above, the light combining unit 160 is disposed on the pattern beams B2a, B2b, and B2c. The pattern beams B2a, B2b, and B2c are received and transmitted on the transfer path to further combine the pattern beams B2a, B2b, and B2c. The light combining unit 160 in this embodiment is, for example, a color separation X. In other embodiments, the light combining unit 160 is, for example, a color separation X plate, and the invention is not limited thereto. Specifically, the light combining unit 160 has a first dichroic film 160a and a second dichroic film 160b, and is disposed on the first optical path, the second optical path, and the third optical path, and the pattern beams B2a, B2b, and B2c The bands are different. In the present embodiment, the light combining unit 160 combines the pattern beams B2a, B2b, and B2c into the pattern beam B2 and transmits it to the projection lens 180. In detail, the pattern beam B2a is reflected by the first dichroic film 160a to the projection lens 180, and the first dichroic film 160a penetrates the pattern beam B2b and the pattern beam B2c. On the other hand, the pattern beam B2c is reflected by the second dichroic film 160b to the projection lens 180, and the second dichroic film 160b penetrates the pattern beam B2a and the pattern beam B2b. The pattern beam B2c penetrates the first dichroic film 160a and the second dichroic film 160b and is transmitted to the projection lens 180.

另外,在本實施例中,至少一光源120發出照明光束B1,因而光源120可提供至少一發光組合,進而使合光單元160所傳遞的圖案光束B2可對應地具有至少一圖案組合。具體而言,在本實施例中,投影裝置100a包括控制單元240,控制單元240電性連接至光源120a、120b及120c,以控制各光源120的發光組合。控制單元240控制各光源120分別於不同的傳遞路徑發出三個照明光束B1a、B1b及B1c,照明光束B1a、B1b及B1c分別通過相對應的穿透式圖案單元140a1、140a2、140a3後而分別轉換為圖案光束B2a、B2b及B2c,以使被合光單元160所合併的圖案光束 B2可同時包含圖案光束B2a、B2b及B2c三者。或者,在其他實施例中,控制單元240控制三個光源120選擇性地發出照明光束,例如三個光源120a、120b及120c中之任意一者發出照明光束,或三個光源120a、120b及120c中之任意二者發出照明光束,或三個光源120a、120b及120c皆發出照明光束。如此一來,由合光單元160所傳遞的圖案光束可具有至少一種圖案組合,即本實施例可提供B2a圖案光束、B2b圖案光束、B2c圖案光束、B2a與B2b所構成的圖案光束、B2a與B2c所構成的圖案光束、B2b與B2c所構成的圖案光束、B2a、B2b與B2c所構成的圖案光束等七種圖案組合。In addition, in the embodiment, at least one light source 120 emits an illumination beam B1, and thus the light source 120 can provide at least one illumination combination, so that the pattern beam B2 transmitted by the light combining unit 160 can correspondingly have at least one pattern combination. Specifically, in the embodiment, the projection device 100a includes a control unit 240 electrically connected to the light sources 120a, 120b, and 120c to control the combination of illumination of the respective light sources 120. The control unit 240 controls each of the light sources 120 to respectively emit three illumination beams B1a, B1b, and B1c on different transmission paths, and the illumination beams B1a, B1b, and B1c are respectively converted by the corresponding transmissive pattern units 140a1, 140a2, and 140a3, respectively. The pattern beams B2a, B2b, and B2c are patterned to merge the combined light beams of the light combining unit 160 B2 can include both pattern beams B2a, B2b, and B2c. Alternatively, in other embodiments, the control unit 240 controls the three light sources 120 to selectively emit an illumination beam, for example, any one of the three light sources 120a, 120b, and 120c emits an illumination beam, or three light sources 120a, 120b, and 120c. Either of them emits an illumination beam, or three of the sources 120a, 120b, and 120c emit an illumination beam. In this way, the pattern beam transmitted by the light combining unit 160 can have at least one pattern combination, that is, the embodiment can provide a B2a pattern beam, a B2b pattern beam, a B2c pattern beam, a pattern beam composed of B2a and B2b, and B2a and A pattern beam composed of B2c, a pattern beam composed of B2b and B2c, and a pattern beam composed of B2a, B2b, and B2c are combined in seven patterns.

更進一步而言,請同時參照圖1A與圖1B,深度量測系統100中的投影裝置100a的投影鏡頭180配置於來自合光單元160的所傳遞的圖案光束B2的傳遞路徑上,並用以將圖案光束B2投影至待測物10。在本實施例中,深度量測系統100更包括計算單元260,計算單元260電性連接至攝像裝置220。當投影裝置100a將圖案光束B2投射至待測物10表面上時,則深度量測系統100中的攝像裝置220擷取待測物10上的圖案光束B2,並可進一步藉由解碼圖案光束B2或運用三角法原理來計算出待測物10的深度。在本實施例中,由於圖案單元140為固定不變的圖案因而成本較低,因此本發明的實施例可以在低成本的情況下提高深度量測系統與投影裝置的操作速度與精確度。Furthermore, referring to FIG. 1A and FIG. 1B simultaneously, the projection lens 180 of the projection device 100a in the depth measurement system 100 is disposed on the transmission path of the transmitted pattern beam B2 from the light combining unit 160, and is used to The pattern beam B2 is projected onto the object to be tested 10. In the embodiment, the depth measurement system 100 further includes a calculation unit 260 electrically connected to the imaging device 220. When the projection device 100a projects the pattern light beam B2 onto the surface of the object to be tested 10, the image pickup device 220 in the depth measurement system 100 captures the pattern light beam B2 on the object to be tested 10, and can further decode the pattern light beam B2. Or use the principle of trigonometry to calculate the depth of the object to be tested 10. In the present embodiment, since the pattern unit 140 is a fixed pattern and thus the cost is low, the embodiment of the present invention can improve the operation speed and accuracy of the depth measuring system and the projection apparatus at low cost.

請參照圖1C,本實施例的圖案光束採用格雷碼(Gray code)編排,其中格雷碼圖案G1至格雷碼圖案G8可依序投影至待測物10的表面。然而,依格雷碼方式編碼的圖案數量可依照實際上解析度的需求來增減圖案的數量。在其他實施例中,例如可使用九張格雷碼圖案,本發明不以此為限。Referring to FIG. 1C, the pattern beam of this embodiment adopts Gray code (Gray). The arrangement of the Gray code pattern G1 to the Gray code pattern G8 may be sequentially projected onto the surface of the object 10 to be tested. However, the number of patterns encoded by the Gray code can increase or decrease the number of patterns according to the actual resolution requirements. In other embodiments, for example, nine Gray code patterns can be used, and the present invention is not limited thereto.

請參照圖1D,本實施例的三個圖案光束分別為彼此相差一特定相位差的正弦週期圖案S1、S2及S3。舉例而言,正弦週期圖案S1、S2及S3兩兩之間的相位差例如為2π/3度。另外,本實施例的正弦週期圖案S1、S2及S3依序投影至待測物10表面上。然而,本發明並不限制圖案光束的態樣,舉例來說,圖案光束也可以是上述圖案的組合或其他編碼圖案。Referring to FIG. 1D, the three pattern beams of the present embodiment are sinusoidal periodic patterns S1, S2, and S3 which are different from each other by a specific phase difference. For example, the phase difference between the two sinusoidal periodic patterns S1, S2, and S3 is, for example, 2π/3 degrees. In addition, the sinusoidal periodic patterns S1, S2, and S3 of the present embodiment are sequentially projected onto the surface of the object 10 to be tested. However, the present invention does not limit the aspect of the pattern beam. For example, the pattern beam may also be a combination of the above patterns or other coding patterns.

詳細而言,請參照圖1A及圖1E,本實施例的投影裝置100a中的三個光源120所提供三個照明光束B1分別經由三個圖案單元140而產生具有正弦週期圖案S1、S2及S3的圖案光束B2a、B2b以及B2c,且依據三步相位移原理,使得原始的照明光束B1轉換成包含特定編碼資訊與結構的圖案光束B2,而後圖案光束B2被投影至待測物10表面,攝像裝置220藉由擷取待測物10表面上的影像並將擷取結果傳輸至計算單元260,經計算後所獲得相位T’與高度之間的對應關係及三角法原理可進一步得到待測物10的表面輪廓或計算出待測物10的深度。In detail, referring to FIG. 1A and FIG. 1E, the three illumination light beams B1 provided by the three light sources 120 in the projection apparatus 100a of the present embodiment are respectively generated through the three pattern units 140 to have sinusoidal periodic patterns S1, S2 and S3. The pattern beams B2a, B2b, and B2c, and according to the three-step phase shift principle, the original illumination beam B1 is converted into a pattern beam B2 containing a specific coded information and structure, and then the pattern beam B2 is projected onto the surface of the object to be tested 10, and the image is captured. The device 220 can further obtain the object to be tested by extracting the image on the surface of the object to be tested 10 and transmitting the captured result to the calculating unit 260, and calculating the correspondence between the phase T′ and the height obtained by the calculation and the trigonometric principle. The surface profile of 10 or the depth of the object to be tested 10 is calculated.

圖2A是本發明第二實施例中深度量測系統的投影裝置的示意圖。請參照圖2A,在本實施例中,投影裝置200a中的光源120a1、120a2、120b1、120b2、120c1及120c2所發出的不同波 段的照明光束B1a、B1b、B1c、B1d、B1e及B1f皆為偏振光束。投影裝置200a更包括多個合光單元170a、170b及170c,合光單元170a、170b及170c為偏振分光器,且分別配置於來自不同的圖案單元對的圖案光束B2a、B2b、B2c、B2d、B2e及B2f的傳遞路徑上,用以傳遞圖案光束B2。合光單元170a、170b及170c位於對應的圖案單元對與合光單元160之間的圖案光束B2的傳遞路徑上。詳細而言,圖案單元140分成多個圖案單元對,每一圖案單元對包括穿透式圖案單元與反射式圖案單元,即穿透式圖案單元140a1與反射式圖案單元140b1所構成的圖案單元對、穿透式圖案單元140a2與反射式圖案單元140b2所構成的圖案單元對以及穿透式圖案單元140a3與反射式圖案單元140b3所構成的圖案單元對。此外,光源120具有分別與多個圖案單元對相對應的多個光源對。舉例而言,由光源120a1及光源120a2所構成的光源對與由穿透式圖案單元140a1與反射式圖案單元140b1所構成的圖案單元對相互對應,其中光源120a1與反射式圖案單元140b1對應設置,而光源120a2與穿透式圖案單元140a1對應設置;由光源120b1及光源120b2所構成的光源對與由穿透式圖案單元140a2與反射式圖案單元140b2所構成的圖案單元對相互對應,其中光源120b1與穿透式圖案單元140a2對應設置,而光源120b2與反射式圖案單元140b2對應設置;由光源120c1及光源120c2所構成的光源對與由穿透式圖案單元140a3與反射式圖案單元140b3所構成的圖案單元對相互對應,其中光源120c1與反射式圖 案單元140b3對應設置,而光源120c2與穿透式圖案單元140a3對應設置。2A is a schematic view of a projection apparatus of a depth measuring system in a second embodiment of the present invention. Referring to FIG. 2A, in the present embodiment, different waves emitted by the light sources 120a1, 120a2, 120b1, 120b2, 120c1, and 120c2 in the projection device 200a The illumination beams B1a, B1b, B1c, B1d, B1e, and B1f of the segment are all polarized beams. The projection device 200a further includes a plurality of light combining units 170a, 170b, and 170c, and the light combining units 170a, 170b, and 170c are polarization beam splitters, and are respectively disposed on the pattern light beams B2a, B2b, B2c, and B2d from different pattern unit pairs. The transfer path of B2e and B2f is used to transmit the pattern beam B2. The light combining units 170a, 170b, and 170c are located on the transmission path of the pattern light beam B2 between the corresponding pattern unit pair and the light combining unit 160. In detail, the pattern unit 140 is divided into a plurality of pattern unit pairs, each pattern unit pair including a transmissive pattern unit and a reflective pattern unit, that is, a pattern unit pair formed by the transmissive pattern unit 140a1 and the reflective pattern unit 140b1 The pattern unit pair formed by the transmissive pattern unit 140a2 and the reflective pattern unit 140b2 and the pattern unit pair formed by the transmissive pattern unit 140a3 and the reflective pattern unit 140b3. Further, the light source 120 has a plurality of light source pairs respectively corresponding to a plurality of pattern unit pairs. For example, a pair of light sources composed of the light source 120a1 and the light source 120a2 and the pattern unit pair formed by the transmissive pattern unit 140a1 and the reflective pattern unit 140b1 respectively correspond to each other, wherein the light source 120a1 is disposed corresponding to the reflective pattern unit 140b1, The light source 120a2 is disposed corresponding to the transmissive pattern unit 140a1; the light source pair composed of the light source 120b1 and the light source 120b2 and the pattern unit pair formed by the transmissive pattern unit 140a2 and the reflective pattern unit 140b2 respectively correspond to each other, wherein the light source 120b1 Corresponding to the transmissive pattern unit 140a2, the light source 120b2 is disposed corresponding to the reflective pattern unit 140b2; the pair of light sources composed of the light source 120c1 and the light source 120c2 and the pair of the transmissive pattern unit 140a3 and the reflective pattern unit 140b3 The pattern unit pairs correspond to each other, wherein the light source 120c1 and the reflection pattern The file unit 140b3 is correspondingly disposed, and the light source 120c2 is disposed corresponding to the transmissive pattern unit 140a3.

在本實施例中,合光單元170a、170b及170c例如為偏振分光稜鏡,而在其他實施例中,合光單元170a、170b及170c也可以是偏振分光板。舉例而言,本實施例的光源120a1提供照明光束B1a,且照明光束B1a例如為具有S偏振方向的偏振光。照明光束B1a通過透鏡150a1後被傳遞至合光單元170a,合光單元170a可使照明光束B1a被反射至四分之一波長板150d1,其中四分之一波長板150d1配置於反射式圖案單元140b1與合光單元170a之間。之後,照明光束B1a被傳遞至對應於光源120a1的反射式圖案單元140b1,反射式圖案單元140b1將照明光束B1a轉換成圖案光束B2a,且圖案光束B2a被反射至四分之一波長板150d1並再次通過四分之一波長板150d1,此時圖案光束B2a的光偏振方向為P偏振方向並在穿透合光單元170a後傳遞至合光單元160。另一方面,與光源120a1同屬於同一光源對的另一光源120a2所發出的照明光束B1b為偏振光束且其偏振方向例如為S偏振方向。照明光束B1b通過透鏡150a2後,接著通過相對應的圖案單元對的穿透式圖案單元140a1並被轉換成圖案光束B2b。接著圖案光束B2b被傳遞至合光單元170a並被反射至合光單元160。圖案光束B2a與圖案光束B2b穿透合光單元160中的第一分光膜160b,且圖案光束B2a與圖案光束B2b兩者皆被合光單元160中的第一分光膜160a反射至投影鏡頭180。In the present embodiment, the light combining units 170a, 170b, and 170c are, for example, polarization splitters, and in other embodiments, the light combining units 170a, 170b, and 170c may also be polarizing beamsplitters. For example, the light source 120a1 of the present embodiment provides the illumination beam B1a, and the illumination beam B1a is, for example, polarized light having an S polarization direction. The illumination beam B1a is transmitted to the light combining unit 170a after passing through the lens 150a1. The light combining unit 170a can reflect the illumination beam B1a to the quarter wave plate 150d1, wherein the quarter wave plate 150d1 is disposed in the reflective pattern unit 140b1. Between the light combining unit 170a. Thereafter, the illumination beam B1a is transmitted to the reflective pattern unit 140b1 corresponding to the light source 120a1, the reflective pattern unit 140b1 converts the illumination beam B1a into the pattern beam B2a, and the pattern beam B2a is reflected to the quarter-wave plate 150d1 and again Through the quarter-wave plate 150d1, the light polarization direction of the pattern light beam B2a is the P polarization direction and is transmitted to the light combining unit 160 after passing through the light combining unit 170a. On the other hand, the illumination light beam B1b emitted from the other light source 120a2 belonging to the same light source pair as the light source 120a1 is a polarized light beam and its polarization direction is, for example, an S polarization direction. The illumination beam B1b passes through the lens 150a2, then passes through the transmissive pattern unit 140a1 of the corresponding pattern unit pair and is converted into the pattern beam B2b. The pattern light beam B2b is then transmitted to the light combining unit 170a and is reflected to the light combining unit 160. The pattern beam B2a and the pattern beam B2b penetrate the first beam splitting film 160b in the light combining unit 160, and both the pattern beam B2a and the pattern beam B2b are reflected by the first beam splitting film 160a in the combining unit 160 to the projection lens 180.

另一光源對的光源120b2所發出的照明光束B1c被相對應的圖案單元對的反射式圖案單元140b2反射成圖案光束B2c,且同一光源對的另一光源120b1所發出的照明光束B1d穿透相對應的圖案單元對的穿透式圖案單元140a2而形成圖案光束B2d。詳細而言,光源120b2提供照明光束B1c,且照明光束B1c例如為具有S偏振方向的偏振光,通過透鏡150a4後傳遞至合光單元170b。S偏振方向的照明光束B1c被合光單元170b反射並通過四分之一波長板150d2,其中四分之一波長板150d2配置於反射式圖案單元140b2與合光單元170b之間。之後,照明光束B1c傳遞至對應於光源120b2的反射式圖案單元140b2,照明光束B1c被反射式圖案單元140b2轉換成圖案光束B2c,並再次通過四分之一波長板150d2。此時圖案光束B2c的光偏振方向為P偏振方向並穿透合光單元170b後傳遞至合光單元160。另一方面,與光源120b2同屬於同一光源對的另一光源120b1所發出的照明光束B1d且其偏振方向例如為S偏振方向。照明光束B1d通過透鏡150a3後,接著穿透相對應的圖案單元對的穿透式圖案單元140a2而形成圖案光束B2d。接著,圖案光束B2d被傳遞至合光單元170b並被反射至合光單元160。圖案光束B2c與圖案光束B2d兩者皆被合光單元160中的第二分光膜160b反射至投影鏡頭180,且圖案光束B2c與圖案光束B2d穿透合光單元160中的第一分光膜160a。The illumination light beam B1c emitted by the light source 120b2 of the other light source pair is reflected by the reflective pattern unit 140b2 of the corresponding pattern unit pair into the pattern light beam B2c, and the illumination light beam B1d emitted by the other light source 120b1 of the same light source pair penetrates the phase A pattern beam B2d is formed by the transmissive pattern unit 140a2 of the corresponding pattern unit pair. In detail, the light source 120b2 supplies the illumination light beam B1c, and the illumination light beam B1c is, for example, polarized light having an S polarization direction, passes through the lens 150a4 and is transmitted to the light combining unit 170b. The illumination beam B1c in the S polarization direction is reflected by the light combining unit 170b and passes through the quarter wave plate 150d2, wherein the quarter wave plate 150d2 is disposed between the reflective pattern unit 140b2 and the light combining unit 170b. Thereafter, the illumination beam B1c is transmitted to the reflective pattern unit 140b2 corresponding to the light source 120b2, and the illumination beam B1c is converted into the pattern beam B2c by the reflective pattern unit 140b2 and passes through the quarter-wave plate 150d2 again. At this time, the light polarization direction of the pattern light beam B2c is the P polarization direction and passes through the light combining unit 170b and is transmitted to the light combining unit 160. On the other hand, the illumination light beam B1d emitted from the other light source 120b1 belonging to the same light source pair as the light source 120b2 and whose polarization direction is, for example, the S polarization direction. After the illumination beam B1d passes through the lens 150a3, it then penetrates the transmissive pattern unit 140a2 of the corresponding pattern unit pair to form the pattern beam B2d. Then, the pattern light beam B2d is transmitted to the light combining unit 170b and is reflected to the light combining unit 160. Both the pattern beam B2c and the pattern beam B2d are reflected by the second beam splitting film 160b in the combining unit 160 to the projection lens 180, and the pattern beam B2c and the pattern beam B2d penetrate the first beam splitting film 160a in the combining unit 160.

又一光源對的光源120c1提供照明光束B1e,且照明光束B1e例如為具有S偏振方向的偏振光,通過透鏡150a6後會傳遞 至合光單元170c。S偏振方向的照明光束B1e被合光單元170c反射並通過四分之一波長板150d3,其中四分之一波長板150d3配置於反射式圖案單元140b3與合光單元170c之間。之後,照明光束B1e傳遞至對應於光源120c1的反射式圖案單元140b3,其將照明光束B1e轉換成圖案光束B2e且被反射式圖案單元140b3反射,照明光束B1e接著再次通過四分之一波長板150d3。此時圖案光束B2e的光偏振方向為P偏振方向並穿透合光單元170c後傳遞至合光單元160。另一方面,與光源120c1同屬於同一光源對的另一光源120c2所發出的照明光束B1f,照明光束B1f為偏振光束且偏振方向例如為S偏振方向。照明光束B1f通過透鏡150a5後,再穿透相對應的圖案單元對的穿透式圖案單元140a3而形成圖案光束B2f。接著圖案光束B2f被傳遞至合光單元170c並被反射至合光單元160。圖案光束B2e與圖案光束B2f穿透合光單元160中的第一分光膜160a與第二分光膜160b並傳遞至投影鏡頭180。基於上述,可知本實施例的深度量測系統藉由不同波段的光源與圖案單元的搭配,即可使投影至待測物上的圖案光束具有至少一種組合。The light source 120c1 of the other pair of light sources provides the illumination beam B1e, and the illumination beam B1e is, for example, polarized light having an S polarization direction, which is transmitted after passing through the lens 150a6. To the light combining unit 170c. The illumination beam B1e of the S polarization direction is reflected by the light combining unit 170c and passes through the quarter wave plate 150d3, wherein the quarter wave plate 150d3 is disposed between the reflective pattern unit 140b3 and the light combining unit 170c. Thereafter, the illumination beam B1e is transmitted to the reflective pattern unit 140b3 corresponding to the light source 120c1, which converts the illumination beam B1e into the pattern beam B2e and is reflected by the reflective pattern unit 140b3, and the illumination beam B1e then passes through the quarter-wave plate 150d3 again. . At this time, the light polarization direction of the pattern light beam B2e is the P polarization direction and passes through the light combining unit 170c and is transmitted to the light combining unit 160. On the other hand, the illumination beam B1f emitted from the other light source 120c2 belonging to the same source pair as the light source 120c1 is a polarized beam and the polarization direction is, for example, the S polarization direction. After the illumination beam B1f passes through the lens 150a5, it penetrates the transmissive pattern unit 140a3 of the corresponding pattern unit pair to form the pattern beam B2f. The pattern light beam B2f is then transmitted to the light combining unit 170c and is reflected to the light combining unit 160. The pattern beam B2e and the pattern beam B2f pass through the first beam splitting film 160a and the second beam splitting film 160b in the light combining unit 160 and are transmitted to the projection lens 180. Based on the above, it can be seen that the depth measurement system of the present embodiment can make at least one combination of the pattern beams projected onto the object to be tested by the combination of the light sources of different wavelength bands and the pattern unit.

需說明的是,上述每一光源提供不同波段的照明光束B1a、B1b、B1c、B1d、B1e及B1f例如為偏振光,但本發明不以此為限,即每一照明光束也可為非偏振光。此外,由於控制單元240控制可六個光源120a1、120a2、120b1、120b2、120c1及120c2選擇性地發出照明光束,例如六個光源120a1、120a2、120b1、 120b2、120c1及120c2中至少其一發出照明光束,如此一來,本實施例可提供六十三種圖案組合。It should be noted that the illumination beams B1a, B1b, B1c, B1d, B1e, and B1f that provide different wavelengths for each of the above-mentioned light sources are, for example, polarized light, but the invention is not limited thereto, that is, each illumination beam may also be unpolarized. Light. In addition, since the control unit 240 controls the six light sources 120a1, 120a2, 120b1, 120b2, 120c1, and 120c2 to selectively emit illumination light beams, for example, six light sources 120a1, 120a2, 120b1. At least one of 120b2, 120c1, and 120c2 emits an illumination beam, and thus, the embodiment can provide sixty-three pattern combinations.

圖2B是另一實施例的投影裝置中的部分示意圖。請參照圖2A,光源120a1提供照明光束B1a,其中照明光束B1a例如為具有P偏振方向的偏振光束。照明光束B1a通過透鏡150a1後被傳遞至合光單元170a,合光單元170a可使P偏振方向的光束穿透,因此P偏振方向的照明光束B1a穿透合光單元170a並通過四分之一波長板150d1,其中四分之一波長板150d1配置於反射式圖案單元140b1與合光單元170a之間。之後,照明光束B1a被傳遞至對應於光源120a1的反射式圖案單元140b1,反射式圖案單元140b1將照明光束B1a轉換成圖案光束B2a且將圖案光束B2a反射至四分之一波長板150d1,圖案光束B2a再次通過四分之一波長板150d1,此時圖案光束B2a的光偏振方向為S偏振方向並被合光單元170a反射後可再被傳遞至後續的合光單元(未繪示)。2B is a partial schematic view of a projection apparatus of another embodiment. Referring to FIG. 2A, the light source 120a1 provides an illumination beam B1a, wherein the illumination beam B1a is, for example, a polarized beam having a P polarization direction. The illumination beam B1a is transmitted to the light combining unit 170a after passing through the lens 150a1, and the light combining unit 170a can penetrate the light beam of the P polarization direction, so that the illumination beam B1a of the P polarization direction penetrates the light combining unit 170a and passes through the quarter wavelength. The plate 150d1, wherein the quarter-wave plate 150d1 is disposed between the reflective pattern unit 140b1 and the light combining unit 170a. Thereafter, the illumination beam B1a is transmitted to the reflective pattern unit 140b1 corresponding to the light source 120a1, and the reflective pattern unit 140b1 converts the illumination beam B1a into the pattern beam B2a and reflects the pattern beam B2a to the quarter-wave plate 150d1, the pattern beam B2a passes through the quarter-wave plate 150d1 again. At this time, the light polarization direction of the pattern beam B2a is the S-polarization direction and is reflected by the light combining unit 170a, and then can be transmitted to the subsequent light combining unit (not shown).

圖3是本發明第三實施例中深度量測系統的投影裝置的示意圖。請參照圖3,在本實施例中,深度量測系統的投影裝置300a包含的圖案單元140皆為反射式圖案單元140b1、140b2及140b3。在本實施例中,合光單元160包括第一分色膜160a及第二分色膜160b,合光單元170例如為分色X稜鏡,然而在另一實施例中,合光單元170可為分色X板。合光單元170配置於來自光源120a、120b及120c的照明光束B1a、B1b及B1c的傳遞路徑上,以將分別通過透鏡150a1、150a2及150a3的照明光束B1a、 B1b及B1c合併為照明光束B1’,照明光束B1’被傳遞至內部全反射稜鏡190的點A附近,由於照明光束B1’的入射角與入射路徑經由適當的設計而照明光束B1’的入射角得以大於臨界角,如此使得照明光束B1’全反射至合光單元160中的點B附近。3 is a schematic view of a projection apparatus of a depth measuring system in a third embodiment of the present invention. Referring to FIG. 3, in the embodiment, the pattern unit 140 included in the projection apparatus 300a of the depth measurement system is the reflective pattern units 140b1, 140b2, and 140b3. In this embodiment, the light combining unit 160 includes a first dichroic film 160a and a second dichroic film 160b, and the light combining unit 170 is, for example, a color separation X稜鏡. However, in another embodiment, the light combining unit 170 may be For the color separation X board. The light combining unit 170 is disposed on the transmission paths of the illumination light beams B1a, B1b, and B1c from the light sources 120a, 120b, and 120c to pass the illumination light beams B1a passing through the lenses 150a1, 150a2, and 150a3, respectively. B1b and B1c are combined into an illumination beam B1', and the illumination beam B1' is transmitted to the vicinity of point A of the internal total reflection 稜鏡190, since the incident angle of the illumination beam B1' and the incident path are incident through the appropriate design of the illumination beam B1' The angle is greater than the critical angle such that the illumination beam B1' is totally reflected to the vicinity of the point B in the light combining unit 160.

此外,在本實施例中的每一光源120a、120b及120c所發出的照明光束B1a、B1b及B1c的波段不相同,照明光束B1a、B1b及B1c的波段例如分別為第一波段、第二波段及第三波段。本實施例的第一波段、第二波段以及第三波段例如分別為藍色、綠色以及紅色,但本發明不以此為限,舉例來說,第一波段、第二波段以及第三波段也可分別為藍色、綠色以及紅色的其他組合。在本實施例中,合光單元160中的第一分色膜160a可使第三波段的光束反射且使第一波段與第二波段的光束穿透,然而在其他實施例中,第一分色膜160a可使第二波段的光束反射且使第一波段與第三波段的光束穿透;或者,第一分色膜160a也可使第一波段的光束反射且使第二波段與第三波段的光束穿透,本發明不以此為限。另外,由於本實施例的合光單元160中的第二分色膜160b可使第三波段的光束反射且使第二波段的光束穿透,因此當照明光束B1’傳遞至第一分色膜160a中的點B附近時,照明光束B1’中第三波段的照明光束B1c被第一分色膜160a反射至合光單元160中的點C附近,此時照明光束B1c的入射角大於臨界角,因此照明光束B1c全反射至反射式圖案單元140b1,照明光束B1c被反射式圖案單元140b1轉換成圖案光束B2c並被反射回第一分 色膜160a的點D附近。接著,圖案光束B2c於點D附近再次反射並被傳遞至合光單元160之外。In addition, the wavelength bands of the illumination beams B1a, B1b, and B1c emitted by each of the light sources 120a, 120b, and 120c in this embodiment are different, and the wavelength bands of the illumination beams B1a, B1b, and B1c are, for example, the first band and the second band, respectively. And the third band. The first band, the second band, and the third band of the embodiment are respectively blue, green, and red, but the invention is not limited thereto. For example, the first band, the second band, and the third band are also Other combinations of blue, green, and red can be used. In this embodiment, the first dichroic film 160a in the light combining unit 160 can reflect the light beam of the third wavelength band and penetrate the light beam of the first wavelength band and the second wavelength band. However, in other embodiments, the first minute The color film 160a can reflect the light beam of the second wavelength band and penetrate the light beams of the first wavelength band and the third wavelength band; or the first color separation film 160a can also reflect the light beam of the first wavelength band and make the second wavelength band and the third wavelength band The beam penetration of the band is not limited by this invention. In addition, since the second dichroic film 160b in the light combining unit 160 of the present embodiment can reflect the light beam of the third wavelength band and penetrate the light beam of the second wavelength band, when the illumination light beam B1' is transmitted to the first color separation film When the vicinity of the point B in 160a, the illumination beam B1c of the third wavelength band in the illumination beam B1' is reflected by the first dichroic film 160a to the vicinity of the point C in the light combining unit 160, and the incident angle of the illumination beam B1c is greater than the critical angle. Therefore, the illumination beam B1c is totally reflected to the reflective pattern unit 140b1, and the illumination beam B1c is converted into the pattern beam B2c by the reflective pattern unit 140b1 and reflected back to the first point. The vicinity of the point D of the color film 160a. Then, the pattern light beam B2c is reflected again near the point D and is transmitted to the outside of the light combining unit 160.

另一方面,照明光束B1’中的第一波段與第二波段於點B附近穿透第一分色膜160a並被傳遞至第二分色膜160b上的點E附近,第二分色膜160b使照明光束B1’中的第一波段的照明光束B1a反射且使第二波段的照明光束B1b穿透。進一步而言,照明光束B1b於點E附近穿透第二分色膜160b並被傳遞至反射式圖案單元140b2,照明光束B1b被反射式圖案單元140b2轉換成圖案光束B2b並被反射回第二分色膜160b的點H附近。接著,圖案光束B2b於點H穿透第二分色膜160b及於點D附近穿透第一分色膜160a並被傳遞至合光單元160之外。On the other hand, the first band and the second band in the illumination beam B1' penetrate the first dichroic film 160a near the point B and are transmitted to the vicinity of the point E on the second dichroic film 160b, and the second dichroic film The 160b reflects the illumination beam B1a of the first band in the illumination beam B1' and penetrates the illumination beam B1b of the second band. Further, the illumination beam B1b penetrates the second dichroic film 160b near the point E and is transmitted to the reflective pattern unit 140b2, and the illumination beam B1b is converted into the pattern beam B2b by the reflective pattern unit 140b2 and reflected back to the second point. The vicinity of the point H of the color film 160b. Next, the pattern beam B2b penetrates the second dichroic film 160b at a point H and penetrates the first dichroic film 160a near the point D and is transmitted to the outside of the light combining unit 160.

另外,第一波段的照明光束B1a於第二分色膜160b上的點E附近反射至第一分色膜160a上的點F附近,由於此時照明光束B1a的入射角大於臨界角,照明光束B1a於點F附近上全反射至反射式圖案單元140b3。照明光束B1a被反射式圖案單元140b3轉換成圖案光束B2a並再次被反射式圖案單元140b3反射至第一分色膜160a上的點G附近,且此時再次因圖案光束B2a的入射角大於臨界角,圖案光束B2a全反射至第二分色膜160b上的點H附近,第二分色膜160b將圖案光束B2a反射傳遞至第一分色膜160a的點D附近,而後圖案光束B2a於點D附近穿透第一分色膜160a並被傳遞至合光單元160之外。In addition, the illumination beam B1a of the first wavelength band is reflected near the point E on the second dichroic film 160b to the vicinity of the point F on the first dichroic film 160a. Since the incident angle of the illumination beam B1a is greater than the critical angle at this time, the illumination beam B1a is totally reflected to the reflective pattern unit 140b3 near the point F. The illumination beam B1a is converted into the pattern beam B2a by the reflective pattern unit 140b3 and is again reflected by the reflective pattern unit 140b3 to the vicinity of the point G on the first dichroic film 160a, and at this time again because the incident angle of the pattern beam B2a is larger than the critical angle The pattern beam B2a is totally reflected to the vicinity of the point H on the second dichroic film 160b, and the second dichroic film 160b transmits the pattern beam B2a to the vicinity of the point D of the first dichroic film 160a, and then the pattern beam B2a is at the point D. The first dichroic film 160a is penetrated nearby and is transmitted to the outside of the light combining unit 160.

基於上述,被傳遞至合光單元160之外的圖案光束B2’ 包含圖案光束B2a、B2b及B2c並穿透內部全反射稜鏡190,而後再被傳遞至投影鏡頭180。此外,本實施例中的深度量測系統更包括控制單元240,控制單元240電性連接至光源120a、120b及120c,以控制各光源的發光組合。舉例而言,在本實施例中,控制單元240可控制光源120a、120b及120c同時提供照明光束B1a、B1b及B1c;或者亦可控制光源120a、120b及120c的其中兩者同時提供照明光束;或者更可控制光源120a、120b及120c的其中之一提供照明光束。在本實施例中,可以不需如數位微鏡元件、矽基液晶面板、穿透式液晶面板或其他空間光調變器等昂貴的元件,亦可以不需用以切換幻燈片的可動機構件。藉由擷取圖案光束投影至待測物上的影像,即可得到待測物的輪廓或深度。Based on the above, the pattern beam B2' is transmitted to the outside of the light combining unit 160. The pattern beams B2a, B2b, and B2c are included and penetrate the internal total reflection 稜鏡190, and then transferred to the projection lens 180. In addition, the depth measurement system in this embodiment further includes a control unit 240 electrically connected to the light sources 120a, 120b, and 120c to control the combination of illumination of the respective light sources. For example, in this embodiment, the control unit 240 may control the light sources 120a, 120b, and 120c to simultaneously provide the illumination beams B1a, B1b, and B1c; or may control both of the light sources 120a, 120b, and 120c to simultaneously provide the illumination beam; Alternatively, one of the light sources 120a, 120b, and 120c can be controlled to provide an illumination beam. In this embodiment, expensive components such as a digital micromirror device, a 矽-based liquid crystal panel, a transmissive liquid crystal panel or other spatial light modulators are not required, and an motivating member for switching the slides is not required. . The contour or depth of the object to be tested can be obtained by capturing the image of the pattern beam projected onto the object to be tested.

圖4是本發明第四實施例中深度量測系統的投影裝置的示意圖。請參照圖4,在本實施例中,深度量測系統中的投影裝置400a包含光源120、圖案單元140a及投影鏡頭180。在本實施例中,光源120例如為發光二極體或其他非同調光源,即光源120可以不是雷射光源,其中光源120提供照明光束B1。圖案單元140a為穿透式圖案單元。本實施例的投影裝置400a可具有單一圖案單元140a且可透過控制單元240控制單一光源120來達成,因此可降低生產成本。4 is a schematic view of a projection apparatus of a depth measuring system in a fourth embodiment of the present invention. Referring to FIG. 4, in the embodiment, the projection device 400a in the depth measurement system includes a light source 120, a pattern unit 140a, and a projection lens 180. In this embodiment, the light source 120 is, for example, a light emitting diode or other non-coherent light source, that is, the light source 120 may not be a laser light source, wherein the light source 120 provides the illumination light beam B1. The pattern unit 140a is a transmissive pattern unit. The projection device 400a of the present embodiment can have a single pattern unit 140a and can be achieved by controlling the single light source 120 through the control unit 240, thereby reducing production costs.

綜上所述,本發明的實施例至少具有下列其中一個優點:在本發明的實施例的深度量測系統與投影裝置中,藉由光源的不同發光組合與圖案單元的搭配,可使投影出的圖案光束具有 多種不同的組合。本發明的實施例中,深度量測系統與投影裝置可藉由不同波段的光源搭配對應的圖案單元而使投影至待測物上的圖案光束具有多種組合。由於圖案單元為成本較低的固定不變的圖案,且可以不需如數位微鏡元件、矽基液晶面板、穿透式液晶面板或其他空間光調變器等昂貴的元件,亦可以不需用以切換幻燈片的可動機構件。藉由擷取圖案光束投影至待測物上的影像,即可得到待測物的輪廓或深度,並具有成本低廉、高精確度以及量測快速的特性。In summary, the embodiment of the present invention has at least one of the following advantages: in the depth measurement system and the projection device of the embodiment of the present invention, by combining different illumination combinations of the light source and the pattern unit, the projection can be performed. Pattern beam has A variety of different combinations. In the embodiment of the present invention, the depth measuring system and the projection device can have a plurality of combinations of pattern beams projected onto the object to be tested by using light sources of different wavelength bands in combination with corresponding pattern units. Since the pattern unit is a fixed pattern with a lower cost and does not require expensive components such as a digital micromirror device, a germanium-based liquid crystal panel, a transmissive liquid crystal panel, or other spatial light modulators, A modifiable component for switching slides. By capturing the image of the pattern beam projected onto the object to be tested, the contour or depth of the object to be tested can be obtained, and the characteristics of low cost, high precision, and rapid measurement are obtained.

惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。另外本發明的任一實施例或申請專利範圍不須達成本發明所揭露之全部目的或優點或特點。此外,摘要部分和標題僅是用來輔助專利文件搜尋之用,並非用來限制本發明之權利範圍。The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent. In addition, any of the objects or advantages or features of the present invention are not required to be achieved by any embodiment or application of the invention. In addition, the abstract sections and headings are only used to assist in the search of patent documents and are not intended to limit the scope of the invention.

100a‧‧‧投影裝置100a‧‧‧Projector

120、120a、120b、120c‧‧‧光源120, 120a, 120b, 120c‧‧‧ light source

B1、B1a、B1b、B1c‧‧‧照明光束B1, B1a, B1b, B1c‧‧‧ illumination beam

B2、B2a、B2b、B2c‧‧‧圖案光束B2, B2a, B2b, B2c‧‧‧ pattern beam

140、140a1、140a2、140a3‧‧‧圖案單元140, 140a1, 140a2, 140a3‧‧‧ pattern unit

150a1、150a2、150a3‧‧‧透鏡150a1, 150a2, 150a3‧‧ lens

150b1、150b3‧‧‧反射鏡150b1, 150b3‧‧‧ mirror

160‧‧‧合光單元160‧‧‧Finishing unit

160a‧‧‧第一分色膜160a‧‧‧first color separation film

160b‧‧‧第二分色膜160b‧‧‧Second color separation film

180‧‧‧投影鏡頭180‧‧‧Projection lens

240‧‧‧控制單元240‧‧‧Control unit

Claims (17)

一種投影裝置,包括:多個光源,提供多個照明光束;多個圖案單元,且對應地配置於該些照明光束的多個傳遞路徑上,以將該些照明光束轉換為多個圖案光束;一投影鏡頭,配置於該些圖案光束的一傳遞路徑上,其中,該些光源提供至少一發光組合,該些圖案光束對應地具有至少一圖案組合;一第一合光單元,配置於該些照明光束的該些傳遞路徑上;以及一內部全反射稜鏡,配置於該些照明光束與該些圖案光束的該些傳遞路徑上。 A projection device, comprising: a plurality of light sources, providing a plurality of illumination beams; a plurality of pattern units, and correspondingly disposed on the plurality of transmission paths of the illumination beams to convert the illumination beams into a plurality of pattern beams; a projection lens disposed on a transmission path of the pattern beams, wherein the light sources provide at least one illumination combination, the pattern beams correspondingly having at least one pattern combination; a first light combining unit disposed on the The transmission paths of the illumination beam; and an internal total reflection 配置 are disposed on the transmission paths of the illumination beams and the pattern beams. 如申請專利範圍第1項所述的投影裝置,其中該些圖案單元包括至少一穿透式圖案單元或至少一反射式圖案單元的至少其一。 The projection device of claim 1, wherein the pattern units comprise at least one of at least one transmissive pattern unit or at least one reflective pattern unit. 如申請專利範圍第1項所述的投影裝置,其中該些圖案單元分成多個圖案單元對,每一該圖案單元對包括一穿透式圖案單元與一反射式圖案單元,該些光源分成多個光源對,該些光源對分別與該些圖案單元對相對應,每一該光源 對的其一該光源與對應的該圖案單元對的該反射式圖案單元相對應,每一該光源對的另一該光源與對應的該圖案單元對的該穿透式圖案單元相對應。 The projection device of claim 1, wherein the pattern units are divided into a plurality of pattern unit pairs, each of the pattern unit pairs comprising a transmissive pattern unit and a reflective pattern unit, wherein the plurality of light sources are divided into Pair of light sources, the pair of light sources respectively corresponding to the pair of pattern elements, each of the light sources One of the pair of light sources corresponds to the corresponding reflective pattern unit of the pair of pattern elements, and the other of the light source pairs corresponds to the corresponding transmissive pattern unit of the pair of pattern elements. 如申請專利範圍第1項所述的投影裝置,其中該些光源包括雷射光源、發光二極體、有機發光二極體、汞燈、鹵素燈或其組合。 The projection device of claim 1, wherein the light sources comprise a laser light source, a light emitting diode, an organic light emitting diode, a mercury lamp, a halogen lamp, or a combination thereof. 如申請專利範圍第1項所述的投影裝置,其中該些照明光束的顏色不相同。 The projection device of claim 1, wherein the illumination beams are different in color. 如申請專利範圍第1項所述的投影裝置,更包括一控制單元,該控制單元電性連接至該些光源,以控制該些光源的發光組合。 The projection device of claim 1, further comprising a control unit electrically connected to the light sources to control the combination of illumination of the light sources. 如申請專利範圍第1項所述的投影裝置,更包括:一第二合光單元,配置於該些圖案光束的該些傳遞路徑上,且用以合併該些圖案光束。 The projection device of claim 1, further comprising: a second light combining unit disposed on the transmission paths of the pattern beams and configured to combine the pattern beams. 如申請專利範圍第7項所述的投影裝置,其中該第二合光單元包括分色X稜鏡、分色X板、偏振分光稜鏡或偏振分光板。 The projection device of claim 7, wherein the second light combining unit comprises a color separation X 稜鏡, a color separation X plate, a polarization split 稜鏡 or a polarization beam splitter. 一種深度量測系統,適於量測一待測物的深度,該深度量測系統包括: 一投影裝置,包括:多個光源,提供多個照明光束;多個圖案單元,且對應地配置於該些照明光束的多個傳遞路徑上,以將該些照明光束轉換為多個圖案光束;一投影鏡頭,配置於該些圖案光束的一傳遞路徑上,該投影鏡頭用以將該些圖案光束投射至該待測物,以在該待測物上形成一參考圖案;一第一合光單元,配置於該些照明光束的該些傳遞路徑上;以及一內部全反射稜鏡,配置於該些照明光束與該些圖案光束的該些傳遞路徑上;以及一攝像裝置,用以擷取該參考圖案,且該參考圖案能用以計算出該待測物的深度,其中,該些光源提供至少一發光組合,該些圖案光束對應地具有至少一圖案組合。 A depth measurement system adapted to measure a depth of a test object, the depth measurement system comprising: a projection device comprising: a plurality of light sources, providing a plurality of illumination beams; a plurality of pattern units, and correspondingly disposed on the plurality of transmission paths of the illumination beams to convert the illumination beams into a plurality of pattern beams; a projection lens disposed on a transmission path of the pattern beams, the projection lens for projecting the pattern beams onto the object to be tested to form a reference pattern on the object to be tested; a unit disposed on the transmission paths of the illumination beams; and an internal total reflection 稜鏡 disposed on the transmission paths of the illumination beams and the pattern beams; and an imaging device for capturing The reference pattern can be used to calculate the depth of the object to be tested, wherein the light sources provide at least one combination of illuminations, the pattern beams correspondingly having at least one pattern combination. 如申請專利範圍第9項所述的深度量測系統,其中該些圖案單元包括至少一穿透式圖案單元或至少一反射式圖案單元的至少其一。 The depth measuring system of claim 9, wherein the pattern units comprise at least one of at least one transmissive pattern unit or at least one reflective pattern unit. 如申請專利範圍第9項所述的深度量測系統,該些 圖案單元分成多個圖案單元對,每一該圖案單元對包括一穿透式圖案單元與一反射式圖案單元,該些光源分成多個光源對,該些光源對分別與該些圖案單元對相對應,每一該光源對的其一該光源與對應的該圖案單元對的該反射式圖案單元相對應,每一該光源對的另一該光源與對應的該圖案單元對的該穿透式圖案單元相對應。 Such as the depth measurement system described in claim 9 of the patent scope, The pattern unit is divided into a plurality of pattern unit pairs, each of the pattern unit pairs includes a transmissive pattern unit and a reflective pattern unit, and the light sources are divided into a plurality of light source pairs, and the pair of light sources are respectively opposite to the pattern unit Correspondingly, one of the light source pairs corresponds to the corresponding reflective pattern unit of the pair of pattern elements, and the other of the light source pairs and the corresponding pair of the pattern unit are transparent. The pattern unit corresponds. 如申請專利範圍第9項所述的深度量測系統,其中該些光源包括雷射光源、發光二極體、有機發光二極體、汞燈、鹵素燈或其組合。 The depth measuring system of claim 9, wherein the light sources comprise a laser light source, a light emitting diode, an organic light emitting diode, a mercury lamp, a halogen lamp or a combination thereof. 如申請專利範圍第9項所述的深度量測系統,其中該些照明光束的顏色不相同。 The depth measurement system of claim 9, wherein the illumination beams are different in color. 如申請專利範圍第9項所述的深度量測系統,更包括一控制單元,該控制單元電性連接至該些光源,以控制該些光源的發光組合。 The depth measurement system of claim 9, further comprising a control unit electrically connected to the light sources to control the combination of illumination of the light sources. 如申請專利範圍第9項所述的深度量測系統,更包括一計算單元,電性連接至該攝像裝置,且用以根據該攝像裝置所擷取的該參考圖案來計算出該待測物的深度。 The depth measuring system of claim 9, further comprising a computing unit electrically connected to the camera device, and configured to calculate the object to be tested according to the reference pattern captured by the camera device depth. 如申請專利範圍第9項所述的深度量測系統,更包括:一第二合光單元,配置於該些圖案光束的該些傳遞路徑上,且用以合併該些圖案光束。 The depth measuring system of claim 9, further comprising: a second light combining unit disposed on the transmission paths of the pattern beams and configured to combine the pattern beams. 如申請專利範圍第16項所述的深度量測系統,其中該第二合光單元包括分色X稜鏡、分色X板、偏振分光稜鏡或偏振分光板。 The depth measuring system of claim 16, wherein the second light combining unit comprises a color separation X 稜鏡, a color separation X plate, a polarization split 稜鏡 or a polarization beam splitter.
TW102139742A 2013-11-01 2013-11-01 Projection apparatus and depth measuring system TWI489079B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW102139742A TWI489079B (en) 2013-11-01 2013-11-01 Projection apparatus and depth measuring system
CN201410163069.6A CN104614925B (en) 2013-11-01 2014-04-22 Projection device and depth measurement system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW102139742A TWI489079B (en) 2013-11-01 2013-11-01 Projection apparatus and depth measuring system

Publications (2)

Publication Number Publication Date
TW201518675A TW201518675A (en) 2015-05-16
TWI489079B true TWI489079B (en) 2015-06-21

Family

ID=53149440

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102139742A TWI489079B (en) 2013-11-01 2013-11-01 Projection apparatus and depth measuring system

Country Status (2)

Country Link
CN (1) CN104614925B (en)
TW (1) TWI489079B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10002439B2 (en) 2016-11-15 2018-06-19 Industrial Technology Research Institute Three-dimensional measurement system and method thereof

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI638566B (en) * 2016-08-08 2018-10-11 魯班嫡系機器人 A shooting method and that image forming method, apparatus and equipment
CN109489583B (en) * 2018-11-19 2021-09-17 先临三维科技股份有限公司 Projection device, acquisition device and three-dimensional scanning system with same
CN109708588A (en) * 2019-01-14 2019-05-03 业成科技(成都)有限公司 Structured light projector and structure light depth sense device
CN110441981A (en) * 2019-07-26 2019-11-12 华中科技大学 A kind of colored structures optical projection device
JP7062798B1 (en) 2021-01-21 2022-05-06 株式会社トヨタシステムズ Inspection system and inspection method
JP2024509390A (en) * 2021-02-23 2024-03-01 ホアウェイ・テクノロジーズ・カンパニー・リミテッド Optical systems, devices, and terminals
CN115421349A (en) * 2022-11-02 2022-12-02 四川川大智胜软件股份有限公司 Non-digital optical machine structure light projection module, acquisition device and three-dimensional measurement system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1518351A (en) * 2003-01-14 2004-08-04 台达电子工业股份有限公司 Projection device and protective method for operation of projector
TW200921243A (en) * 2007-11-02 2009-05-16 Hon Hai Prec Ind Co Ltd Projection device
WO2011054083A1 (en) * 2009-11-04 2011-05-12 Technologies Numetrix Inc. Device and method for obtaining three-dimensional object surface data
WO2013132494A1 (en) * 2012-03-09 2013-09-12 Galil Soft Ltd System and method for non-contact measurement of 3d geometry

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005114642A (en) * 2003-10-10 2005-04-28 Mitsuru Kawaguchi System for forming three-dimensional object and method
JP2009025189A (en) * 2007-07-20 2009-02-05 Nikon Corp Measuring instrument
GB2497031A (en) * 2010-09-08 2013-05-29 Canon Kk Method and apparatus for 3D-measurement by detecting a predetermined pattern
CN102760234B (en) * 2011-04-14 2014-08-20 财团法人工业技术研究院 Depth image acquisition device, system and method

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1518351A (en) * 2003-01-14 2004-08-04 台达电子工业股份有限公司 Projection device and protective method for operation of projector
TW200921243A (en) * 2007-11-02 2009-05-16 Hon Hai Prec Ind Co Ltd Projection device
WO2011054083A1 (en) * 2009-11-04 2011-05-12 Technologies Numetrix Inc. Device and method for obtaining three-dimensional object surface data
WO2013132494A1 (en) * 2012-03-09 2013-09-12 Galil Soft Ltd System and method for non-contact measurement of 3d geometry

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10002439B2 (en) 2016-11-15 2018-06-19 Industrial Technology Research Institute Three-dimensional measurement system and method thereof

Also Published As

Publication number Publication date
CN104614925B (en) 2016-09-21
CN104614925A (en) 2015-05-13
TW201518675A (en) 2015-05-16

Similar Documents

Publication Publication Date Title
TWI489079B (en) Projection apparatus and depth measuring system
US10782126B2 (en) Three-dimensional scanning method containing multiple lasers with different wavelengths and scanner
JP6587158B2 (en) Projection system
CN107735645B (en) Three-dimensional shape measuring device
KR20190051052A (en) A three-dimensional scanning method including a laser of a plurality of different wavelengths,
JP4379056B2 (en) Three-dimensional imaging apparatus and method
JP2009043139A (en) Position detecting device
JP7236680B2 (en) projection system
TW201405092A (en) Three-dimensional image measuring apparatus
TWI567364B (en) Structured light generating apparatus, measuring system and method thereof
JP2004239886A (en) Three-dimensional image imaging apparatus and method
JPWO2017212509A1 (en) Projection system
JP6964223B2 (en) Projection system and projection method
WO2020235067A1 (en) Three-dimensional measurement system and three-dimensional measurement method
WO2020183711A1 (en) Image processing device and three-dimensional measuring system
JP2017020873A (en) Measurement device for measuring shape of measurement object
WO2023207756A1 (en) Image reconstruction method and apparatus, and device
CN112710253A (en) Three-dimensional scanner and three-dimensional scanning method
JP3818028B2 (en) 3D image capturing apparatus and 3D image capturing method
JP2020020640A (en) Three-dimensional shape measuring system, three-dimensional shape measuring method, and three-dimensional shape measuring program
JP2010078339A (en) Device and method for measuring three-dimensional shape, and program
US10060733B2 (en) Measuring apparatus
TWI630431B (en) Device and system for capturing 3-d images
JP7236854B2 (en) Shape information acquisition device, shape information acquisition method, program, and storage medium
JP7401024B2 (en) 3D measuring device