TWI488819B - Scriber and multi-head scriber - Google Patents

Description

Scribing device and multi-axis scribing device

The present invention relates to a scribing apparatus for scribing a thin plate-shaped workpiece such as a glass substrate or a semiconductor wafer.

When a thin plate-shaped workpiece such as a glass substrate or a semiconductor wafer is cut, a scribe line is scribed in advance on the surface of the workpiece. The scribing tool is pressed against the surface of the workpiece with an appropriate load, and by moving the scribing tool along the surface of the workpiece, a line of scribing can be scored on the surface of the workpiece. After forming the scribe line, when the workpiece is bent along the scribe line, the vertical crack of the scribe line reaches the back of the workpiece and cuts the workpiece. If a deep vertical crack can be formed in the workpiece, the workpiece can be cut only by the scribing step.

In recent years, substrates for FPD (Flat Panel Display) have been thinned, and for example, glass bonded substrates having a thickness of 0.1 mm or less have begun to appear. When the workpiece is thinned and the brittleness is further improved, the load imparted to the workpiece from the scribing tool must be maintained in a small and stable state when the workpiece forms a scribe line. The reason is that when a load change occurs, it is difficult to maintain the cut quality due to sudden breakage or the like.

As shown in FIG. 11 , in the conventional scribing device, the load is applied to the scribing tool 61, and the load applied to the workpiece W from the scribing tool 61 is adjusted by the adjuster (see, for example, Patent Document 1). . Further, in order to cause the scribing tool 61 to track the unevenness of the surface of the workpiece W, it is convenient to support the scribing head 64 by a floating mechanism using the linear slide 63. That is, the scribing head 64 to which the scribing tool 61 is attached is supported by the linear slide 63 so as to move the scribing tool 61 up and down in accordance with the unevenness of the surface height of the workpiece W. Then, the rotation bearing 66 is used to guide the rotation of the vertical shaft 65 in such a manner that the vertical axis 65 is rotatable about the axis in accordance with the traveling direction of the scribe line tool 61.

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-82413

However, in the conventional scribing device, when a load is applied to the workpiece from the scribing tool, the load may fluctuate due to the following (1) to (3), and the workpiece may be locally chipped or cracked. Sex. Especially when the load is small, it is easier to cause load fluctuations.

(1) When the surface of the workpiece is concavo-convex and the scribing head is moved up and down, the pressure in the cylinder fluctuates, and the load applied to the workpiece fluctuates.

(2) The weight of the scribing head tends to become heavier. Therefore, due to the inertia of the scribing head, the scribing head of the surface of the profiling workpiece will be passivated up and down. In addition, the vertical movement of the scribing head is passivated due to the sliding resistance of the linear slide or the tension spring for reducing the weight of the scribing head imparted to the workpiece.

(3) The load transmitted from the scribing head to the scribing tool is absorbed or amplified by the rotary bearing, so that the load applied to the workpiece from the scribing tool varies.

Accordingly, it is an object of the present invention to provide a scribing device and a multi-axis scribing device that can stabilize the load applied to a workpiece from a scribing tool.

In order to solve the above problems, the scribing apparatus according to the first aspect of the invention includes a shaft member having a magnet, an armature having a coil surrounding the shaft member, and a scribing tool provided at a front end of the shaft member for a thin plate-shaped workpiece scribing a line; and a moving mechanism for relatively moving the scribing tool along the surface of the workpiece; and by flowing a current through the coil of the armature, causing the scribing tool to face the surface of the workpiece Advancing and retreating, when the scribing tool contacts the surface of the workpiece, further passing the current through the coil of the armature, and the shaft member can be made around the axis thereof in accordance with the traveling direction of the scribing tool in the surface of the workpiece. In the rotated state, the load is applied to the workpiece from the scribing tool.

According to a second aspect of the invention, in the scribing device of the first aspect of the invention, the scribing device further includes: a control device that performs position control and load control, wherein the position control controls a position of the shaft member that advances and retreats toward the surface of the workpiece, The load control system controls a load applied to the workpiece from the scribing tool that is in contact with the workpiece.

According to a third aspect of the invention, the scribing device further includes: a current sensor that detects a current flowing through the coil; and a position sensor that detects the shaft member Positioning in the axial direction; and the control device performs the position control according to the command and the information from the position sensor, and performs the load control according to the command and the information from the current sensor.

According to a fourth aspect of the invention, the scribing device further includes: a static air bearing that utilizes a force of supplying air from the outside of the bearing body; The shaft member is floated in the bearing body to guide the linear movement of the shaft member in the axial direction thereof or the rotation about the axis.

The multi-axis scribing device according to the fifth aspect of the present invention, wherein the shaft member, the armature, and the scribing tool of the scribing tool of the scribing device according to any one of the first to fourth aspects are plural, and the shaft member is They are laminated in parallel with each other.

According to the present invention, since the scribing tool is provided to the shaft member which is originally light in weight and rotatable about the axis, the weight of the scribing tool portion can be kept lighter. Moreover, since the sliding resistance of the shaft member when the armature moves in the axial direction is close to zero, the tracking property of the scribing tool on the surface unevenness of the workpiece can be improved. Therefore, the load applied from the scribing tool to the workpiece can be stabilized.

The other objects and aspects of the present invention will become more apparent from the description and appended claims.

Embodiments of the scribing apparatus of the present invention will be described in detail based on the drawings. 1 and 2 show a scribing apparatus according to a first embodiment of the present invention. Figure 1 is a vertical cross-sectional view of the scribing device, and Figure 2 is a perspective view of the scribing head.

The scribing device includes a stage 6 on which the workpiece W is placed, a scribing head 11 on which the cutter wheel 4 as a scribing tool is provided, and a moving mechanism that relatively moves the scribing head 11 on the surface of the workpiece W along the workpiece W. twenty one. The platform 6 is extended in the horizontal plane. A plurality of air suction holes for absorbing the workpiece W are opened on the platform 6. The moving mechanism 21 moves either the scribing head 11 or the platform 6. The moving mechanism 21 relatively moves the cutter wheel 4 along the surface of the workpiece W in the X-axis direction in a state where the cutter wheel 4 is brought into contact with the surface of the workpiece W, so that the cutter wheel 4 rotates in the X-axis direction on the surface of the workpiece W. Thereby, the line of the line is scored on the surface of the workpiece W. When a plurality of scribe lines are scored on the surface of the workpiece W, after a scribe line is scored, the moving mechanism 21 moves any one of the scribe head 11 or the stage 6 in the Y-axis direction, and then the moving mechanism 21 The cutter wheel 4 that contacts the surface of the workpiece W is moved along the surface of the workpiece W in the X-axis direction.

The scribing head 11 is provided with a rod-shaped linear motor, a static air bearing 22, a holding member 3, and a cutter wheel 4, which is composed of a rod 1 as a shaft member and an armature 2 surrounding the rod 1. The static air bearing 22 is a linear motion of the guiding rod 1 to the axis direction of the armature 2, and the holding member 3 is directly fixed to the front end of the rod 1 (without a rotary bearing), the cutting The cutter wheel 4 is rotatably supported by the holder 3.

An axle holding portion 3a bifurcated into two via a slit is formed at the lower end portion of the holder 3. The abacus bead cutter wheel 4 is rotatably held by the axle holding portion 3a. The axle of the cutter wheel 4 extends in the horizontal direction. The cutter wheel 4 extending in the horizontal direction is orthogonal to the axis of the rod 1 extending in the vertical direction. Since the cutter wheel 4 can be easily rotated in the horizontal plane in accordance with the traveling direction, the axle of the cutter wheel 4 can be offset from the axis of the rod 1 like a caster of a chair.

A static air bearing 22 is mounted at the lower end of the armature 2 of the rod-shaped linear motor. As shown in Fig. 3, an air supply path 22b for supplying air between the rod 1 and the bearing body 22a is formed in the cylindrical bearing body 22a. The air supply path 22b supplies compressed air from the outside of the bearing body 22a, and an air film 23 is formed between the rod 1 and the bearing body 22a. The hydrostatic air bearing 22 is such that the rod 1 is floated by the force of the air in the bearing body 22a, and the guide rod 1 is linearly moved in the axial direction or rotated about the axis. Since the rod 1 does not come into contact with the bearing body 22a, the sliding resistance of the rod 1 can be made close to zero. Further, if the rod-shaped linear motor that holds the rod 1 in the floating state in the armature 2 by the magnetic force is used, the rod 1 in the armature 2 may be shaken. The linear motion or the rotational motion of the rod 1 can be stabilized by the static air bearing provided with the air film 23 interposed between the rod 1 and the bearing body 22a (the effect of the fourth application of the patent application).

Figure 4 shows a detailed view of the tie rod type linear motor. The rod-shaped linear motor is composed of a rod 1 and an armature 2 having a plurality of magnets, and magnetic poles of N poles and S poles are alternately formed in the axial direction. As a shaft member, the armature 2 has an outer circumference around the rod 1. The complex coil 8. There is a magnetic gap between the rod 1 and the coil 8. The complex coil 8 is covered by a casing 17 made of a molded body. The plurality of coils 8 and the casing 17 constitute an armature 2. The rod-shaped linear motor obtains a thrust force for linearly moving the rod 1 by a magnetic field generated on the magnet 5 of the rod 1 and a current flowing through the coil 8.

The rod 1 is made of a non-magnetic material such as stainless steel, and has a hollow space like a tube. In the hollow space of the rod 1, a cylindrical complex magnet 5 (fragment magnet) is laminated in the same direction as the opposite poles. A pole piece 7 (magnetic pole region) made of a magnetic material such as iron is interposed between the magnets 5. By the arrangement of the pole piece 7, the magnetic field formed by the magnet 5 can be made close to a sine wave.

The coil 8 holds the copper wire in a spiral shape and is held by the coil holding member 9. A detailed view of the coil 8 shown in Figs. 5 and 6, and the coil holder 9 of the holding coil 8. The plurality of annular coils 8 are arranged in a line in such a manner that the mutual axes are aligned in the axial direction. The three coils arranged adjacent to each other in the axial direction constitute a three-phase (U-phase, V-phase, W-phase) coil. The integral coil unit is constructed by combining a plurality of three-phase coils. Since it is necessary to insulate the adjacent coils 8, a resin spacer portion 9b is interposed between the coils 8 as an insulating material. The spacer portion 9b is formed in a ring shape having the same shape as that of the front surface of the coil 8. The spacer portion 9b is integrally formed on the plate-shaped holder main body portion 9a that extends elongated in the axial direction of the coil 8. In other words, the coil holder 9 is a resin molded product and is configured by a plate-shaped holder main body portion 9a elongated in the axial direction of the coil 8 and a thin-walled plural spacer projecting downward from the holder main body portion 9a. Part 9b. On the side surface of the holder main body portion 9a, a projection 9c for fixing the coil holding member 9 to the mold at the time of injection molding is provided. A curved recess 9d that fits the outer shape of the coil 8 is formed on the lower surface of the holder main body portion 9a.

A rectangular insulating substrate 10 having the same planar shape as the holder main body portion 9a is attached to the upper surface of the coil holder 9. A conductive pattern electrically connected to the leads 8a of the coil 8 is formed on the insulating substrate 10. The conductive pattern is formed by connecting a coil between the U phases, a coil between the V phases, and a coil between the W phases.

The coil 8 and the coil holder 9 are covered by a casing 17 as a molded body. The coil 8 and the coil holder 9 are attached to the mold for injection molding, and the coil 8 and the coil holder 9 are integrally formed in the casing 17 by ejecting the molding material to the mold. By integrally molding the coil 8 and the casing 17, it is advantageous in that the thickness of the casing 17 can be thinned compared to the case where the coil 8 is covered by the casing of the other member. By thinning the wall thickness of the casing 17, the size of the rod-shaped linear motor can be reduced.

As shown in Fig. 4, the outer shape of the casing 17 having a cross section orthogonal to the axis of the rod 1 is formed into a substantially quadrangular shape (a rectangular shape in the present embodiment). On one of the sides of the housing 17, an internal thread 12 for mounting the housing 17 on the platform of the moving mechanism 21 is machined. The internal thread 12 is integrally formed with the housing 17 by embedding the insert nut 13 in the mold when the molded case 17 is injected. Further, two positioning holes 14 are formed in the upper surface of the casing 17 at intervals in the axial direction of the rod 1 and inserted into the positioning pins. The two positioning holes 14 are arranged on the axis of the rod 1, and the line connecting the two positioning holes 14 is parallel to the axis of the rod 1. By machining the positioning hole 14 in the casing 17, when the casing 17 is mounted on the platform of the moving mechanism 21, the rod 1 can be prevented from being installed obliquely.

A plurality of fins 17a for improving heat dissipation characteristics are formed in the casing 17. End members 19 positioned to the housing 17 are integrally formed at both ends of the housing 17 in the axial direction. The end member 19 is previously embedded in the mold in the same manner as the coil holder 9 and the coil holder 9. The static air bearing 22 (see FIG. 2) is attached to one of the end members 19 by a fixing means such as a screw. Further, on the other side of the end member 19, an encoder as a position sensor for detecting the position of the rod 1 in the axial direction is mounted. The encoder is housed in a case 20 that is attached to an end portion of the housing 17 in the axial direction.

Since it is mounted on the platform of the moving mechanism 21, the housing 17 is required to have a high mechanical strength. In addition, since the insulation with the coil 8 must be maintained, the housing 17 is required to have high insulation. Further, in order to improve the cooling efficiency, the housing 17 is required to have a high thermal conductivity. In order to satisfy these requirements, the material of the casing 17 is a molding material obtained by mixing a thermoplastic resin such as glass epoxy or a insulating metal oxide particle as a filler in a thermoplastic resin.

Figure 7 shows the positional relationship between the magnet 5 and the coil 8 of the linear motor. In the hollow space in the rod 1, a disc-shaped complex magnet 5 (fragment magnet) is laminated as a field magnet in such a manner that the same poles face each other, that is, the N pole and the N pole, the S pole and the S pole face each other. In addition, although not shown in FIG. 7, the pole piece 7 is actually interposed between the magnets 5 (refer FIG. 4). A plurality of coils 8 surrounding the rod 1 are laminated around the rod 1. The coil 8 is a combination of a plurality of three-phase coils composed of U‧V‧W phases. When three-phase currents of 120° phase difference are generated in the three-phase coil, a moving magnetic field moving in the axial direction of the coil 8 is generated. The moving magnet is used to apply a thrust to the magnet 5 in the rod 1, and the rod 1 linearly moves in synchronization with the speed of the moving magnetic field. As shown in Fig. 1, with the linear movement of the rod 1, the cutter wheel 4 attached to the front end of the rod 1 also linearly moves in the Z-axis direction and advances and retreats toward the surface of the workpiece W. Since the rod 1 is in a state in which the coil 8 is floated with a magnetic gap therebetween, the sliding resistance when the rod 1 is linearly moved is made close to zero.

The rod 1 is rotatably held around the axis of the rod 1 within the coil 8. When the cutter wheel 4 contacts the surface of the workpiece W, the cutter wheel 4 can be caused to generate a downward thrust by circulating a three-phase alternating current in the three-phase coil, and the workpiece W can be imparted from the cutter wheel 4. load. During the application of the load to the surface of the workpiece W by the cutter wheel 4, the rod 1 is also in a state of being rotatable about the axis. Therefore, when the moving mechanism 21 moves the cutter wheel 4 along the surface, the lever 1 rotates in accordance with the traveling direction of the cutter wheel 4. By arbitrarily changing the traveling direction of the cutter wheel 4 (the direction in which the cutter wheel 4 is rotated), not only the straight line but also the line of the curve can be stably formed.

Fig. 8 is a view showing the configuration of a driver as a control device for a control rod type linear motor. The driver 30 is composed of a power converter 31, a current sensor 32, a position/speed sensor 33, and controllers 34 to 36, which are supplied with a suitable voltage-shaped PWM inverter (Pulse Width Modulation). The electric current in the form of a rod-shaped linear motor, the current sensor 32 detects the current flowing through the coil of the rod-shaped linear motor, and the position/speed sensor 33 detects the rod. The controllers 34 to 36 control the rod-shaped linear motor by controlling the power converter 31 in the axial direction position and speed. The position/speed sensor 33 shares an encoder.

The control system is composed of a position control loop 37 that performs position control, a speed control loop 38 that performs speed control, and a current control loop 39 that performs current control. The position control loop 37 is the main loop, and becomes a partial loop in accordance with the order of the speed control loop 38 and the current control loop 39. The current control loop 39 has two cases in which the AC current state constitutes a control loop, and the three-phase AC current is converted into a vector on the rotation orthogonal two axes to constitute a control loop.

The position controller 34 calculates the deviation from the position commander 40, the deviation from the feedback signal from the position sensor 33, and generates a speed command with the deviation approaching zero. The speed controller 35 calculates a deviation between the speed command generated by the position controller 34 and the feedback signal from the speed sensor 33, and generates a current command with the deviation approaching zero. The current controller 36 calculates a deviation between the current command generated by the speed controller 35 and the feedback signal from the current sensor 32, and generates a voltage command in such a manner that the deviation approaches zero. The power converter 31 supplies a three-phase alternating current to the rod-shaped linear motor 42 in accordance with a voltage command generated by the current controller 36.

There is also a case where the current controller 36 directly inputs a current command from the load commander 41. The current command from the speed controller 35 and the current command from the load commander 41 are switched by the switch 44. In this way, the current supplied to the rod-shaped linear motor 42, that is, the thrust generated by the rod-shaped linear motor can be controlled, so that the load applied to the workpiece W from the cutter wheel 4 can be further controlled.

The driver 30 first lowers the lever 1 in the Z-axis direction in accordance with the position command from the position commander 40, and performs position control for bringing the cutter wheel 4 into contact with the surface of the workpiece W. When the cutter wheel 4 contacts the surface of the workpiece W, the switch 44 is switched, and the driver 30 performs load control. The driver 30 controls the load applied from the cutter wheel 4 to the workpiece W to be constant in accordance with an instruction from the load commander 41. In this state, the moving mechanism 21 moves the cutter wheel 4 along the surface of the workpiece W. While the moving mechanism 21 moves the cutter wheel 4 along the surface of the workpiece W, the load applied from the cutter wheel 4 to the workpiece W is kept constant. After the scribing line is formed, when the cutter wheel 4 is moved away from the surface of the workpiece W in the Z-axis direction, the switch 44 is again switched, and the driver 30 raises the rod 1 in the Z-axis direction in accordance with the position command.

When the driver 30 that can switch position control and load control is used, a single rod-shaped linear motor can be used to collectively perform position control of the cutter wheel 4 and load control imparted to the workpiece W from the cutter wheel 4. Since it is not necessary to use a linear motor for controlling the position and a cylinder for controlling the load, the structure of the scribing head 11 can be simplified. Further, since the load applied from the cutter wheel 4 to the workpiece W can be kept constant, when the cylinder is used to track the unevenness of the surface of the workpiece W to move the cutter wheel 4 up and down, it is prevented from being given from the cutter wheel 4. The case where the load to the workpiece W fluctuates (the effect of the second item of the patent application).

Fig. 9 shows a multi-axis scribing apparatus according to a second embodiment of the present invention. In the scribing apparatus of the present embodiment, the scribing heads 11 of the scribing apparatus according to the first embodiment are plural, and are stacked in parallel with each other. Since the structure of the rod 1, the armature 2, the static air bearing 22, the holder 3, and the cutter wheel 4 that constitute the scribing head 11 is the same as that of the above-described first embodiment, the same reference numerals will be given thereto, and the description thereof will be omitted.

The plurality of scribing heads 11 are neatly mounted on the platform of the moving mechanism 21. When the moving mechanism 21 moves the plurality of scribing heads 11 along the surface of the workpiece W, a plurality of scribing lines are simultaneously formed on the surface of the workpiece W. Each of the scribing heads 11 is configured as a simple structure in which the holder 3 is attached to the front end of the rod 1 of the rod-shaped linear motor, so that the distance between the plurality of scribing heads 11 can be shortened. Therefore, the pitch of the plurality of scribe lines formed at the same time in the workpiece W can be narrowed (the effect of the fifth item of the patent application).

Fig. 10 shows a scribing apparatus according to a third embodiment of the present invention. In the scribing apparatus of the present embodiment, the height measuring unit 51 that dynamically tracks the height of the cutter wheel 4 on the surface unevenness of the workpiece W is assembled. The height measuring unit 51 is configured by a laser distance meter or the like, and measures the height of the measuring point W1 of the workpiece W in the forward direction of the cutting wheel 4 . When the cutter wheel 4 passes the measurement point W1 of the workpiece W, the height of the measurement point W1 of the workpiece W measured by the height measuring unit 51 is determined by the cutter wheel 4 cutting the depth of the workpiece W by the cutter wheel 4 In a certain way, the position of the lever 1 in the Z-axis direction. Thereby, it is possible to prevent the cutter wheel 4 from being excessively pressed against the workpiece W, and it is possible to suppress the occurrence of fine line debris often when the cutter wheel 4 passes through the unevenness of the workpiece W. Further, in the present embodiment, the position control by the driver can be performed together with the load control.

When the height measuring unit 51 is disposed at the same position as the cutter wheel 4, the driver 30 is not required to respond at high speed, and it takes time until the cutting wheel 4 moves up and down, so that the cutting wheel 4 cannot be made correct. The ground is tracked on the surface unevenness of the workpiece W. In order to prevent the time delay from moving up and down the cutter wheel 4, the height measuring unit 51 is disposed at the measurement point W1 in front of the cutting direction of the cutter wheel 4. After the weighting of the cutter wheel 4 reaches the measurement point W1 of the front workpiece W and the response time of the rod 1, the cutter 30 passes the cutting point 4 of the workpiece W when the cutter wheel 4 passes the measurement point W1 of the workpiece W. The cutter wheel 4 is moved up and down in a certain manner.

The present invention is not limited to the above-described embodiments, and various embodiments can be embodied without departing from the spirit and scope of the invention. For example, as a scribing tool, it is also possible to replace the cutting tool wheel with a sharp-edged front end tool using a diamond ball. In addition, an oscillator such as a piezoelectric element may be interposed between the rod and the holder to cause the scribing tool to vibrate. However, care must be taken not to make the mass of the rod containing the oscillator heavier. Furthermore, the rod of the rod type linear motor can also vibrate itself. In this case, for example, the voice coil motor may be provided with a single magnet on the rod, or the plurality of magnets may be disposed between the N poles or the S poles. Furthermore, a drive mechanism for rotating the rod about the axis may be provided to control the angle of rotation of the cutter wheel in the horizontal plane.

The present invention is not limited to the above embodiments, and various changes and modifications may be made without departing from the scope of the invention.

The invention is based on the Japanese Patent Application No. 2008-107148 filed on Apr. 16, 2008, and the Japanese Patent Application No. 2009-045718, filed on Feb. 27, 2009, the contents of This is incorporated herein by reference.

1. . . Rod (shaft member)

2. . . Armature

3. . . Holder

3a. . . Axle retaining portion

4. . . Cutting wheel (line tool)

5. . . magnet

6. . . platform

7. . . Polar boots

8. . . Coil

8a. . . lead

9. . . Coil holder

9a. . . Holding body

9b. . . Spacer

9c. . . Protrusion

9d. . . pit

10. . . Insulating substrate

11. . . Dash head

12. . . internal thread

13. . . Embedded nut

14. . . Positioning hole

17. . . case

17a. . . Fin

19. . . End member

20. . . Box

twenty one. . . Mobile agency

twenty two. . . Static air bearing

22a. . . Bearing body

22b. . . Air supply path

twenty three. . . Air film

30. . . Drive (control device)

31. . . Power converter

32. . . Current sensor

33. . . Position/speed sensor

34. . . Position controller

35. . . speed control device

36. . . Current controller

37. . . Position control loop

38. . . Speed control loop

39. . . Current control loop

40. . . Position commander

41. . . Load commander

42. . . Rod linear motor

44. . . switch

51. . . Height measurement department

61. . . Scribing tool

62. . . cylinder

63‧‧‧Linear slides

64‧‧‧Scribe head

65‧‧‧ vertical axis

66‧‧‧Rotary bearings

W‧‧‧Workpiece

W1‧‧‧ measuring point

Fig. 1 is a vertical sectional view showing a scribing apparatus according to a first embodiment of the present invention.

2 is a perspective view of a scribing head of the scribing device.

Figure 3 is a cross-sectional view of a hydrostatic air bearing.

4 is a perspective view (including a partial cross-sectional view) of a rod-shaped linear motor.

Figure 5 is a perspective view of the coil and the coil holder.

Fig. 6 is a detailed view of the coil and the coil holding member (the (A) is a front view of the coil holding member, and (B) is a cross-sectional view of the coil and the coil holding member in the axial direction).

Figure 7 is a diagram showing the positional relationship between the magnet and the coil.

Figure 8 is a block diagram of the driver.

Fig. 9 is a vertical sectional view showing a multi-axis scribing apparatus according to a second embodiment of the present invention.

Figure 10 is a vertical sectional view showing a scribing apparatus according to a third embodiment of the present invention.

Figure 11 is a side elevational view of a conventional scribing device.

1. . . Rod (shaft member)

2. . . Armature

3. . . Holder

3a. . . Axle retaining section

4. . . Cutting wheel (line tool)

6. . . platform

11. . . Dash head

twenty one. . . Mobile agency

twenty two. . . Static air bearing

W. . . Workpiece

Claims (5)

A scribing device comprising: a shaft member having a magnet; an armature having a three-phase coil formed by a U‧V‧W phase surrounding the shaft member; and a scribing tool disposed on the shaft member a front end for scribing the thin plate-shaped workpiece; and a moving mechanism for relatively moving the scribing tool along the surface of the workpiece; and the phase of the three-phase coil of the armature is different by 120° a three-phase current that advances and retreats the scribing tool toward the surface of the workpiece, and when the scribing tool contacts the surface of the workpiece, further flows current through the coil of the armature, in accordance with the scribing tool The load is applied from the scribing tool to the workpiece in a state where the traveling direction in the surface of the workpiece allows the shaft member to rotate about its axis. The scribing device according to claim 1, wherein the scribing device further includes: a control device that performs position control and load control, wherein the position control controls a position of the shaft member that advances and retreats toward the surface of the workpiece, The load control system controls a load applied to the workpiece from the scribing tool that is in contact with the workpiece. The scribing device of claim 2, wherein the scribing device further comprises: a current sensor detecting a current flowing in the coil; and a position sensor detecting an axial direction position of the shaft member; and the control device performs the position according to the command and information from the position sensor Controlling, while performing the above load control based on the command and information from the current sensor. The scribing device according to any one of claims 1 to 3, wherein the scribing device further includes: a hydrostatic air bearing that utilizes air supplied from the outside of the bearing body The force causes the shaft member to float in the bearing body, and guides the linear movement of the shaft member toward the axial direction thereof or the rotation about the axis. A multi-axis scribing device comprising the above-mentioned shaft member, the armature and the scribing tool of the scribing tool of the scribing device according to any one of claims 1 to 3, wherein the plurality of scribing heads are The members are laminated in parallel with each other.