TWI480118B - - Google Patents

Info

Publication number
TWI480118B
TWI480118B TW101107635A TW101107635A TWI480118B TW I480118 B TWI480118 B TW I480118B TW 101107635 A TW101107635 A TW 101107635A TW 101107635 A TW101107635 A TW 101107635A TW I480118 B TWI480118 B TW I480118B
Authority
TW
Taiwan
Application number
TW101107635A
Other languages
Chinese (zh)
Other versions
TW201336616A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW101107635A priority Critical patent/TW201336616A/en
Publication of TW201336616A publication Critical patent/TW201336616A/en
Application granted granted Critical
Publication of TWI480118B publication Critical patent/TWI480118B/zh

Links

TW101107635A 2012-03-07 2012-03-07 Feedback control system of motion platform TW201336616A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW101107635A TW201336616A (en) 2012-03-07 2012-03-07 Feedback control system of motion platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW101107635A TW201336616A (en) 2012-03-07 2012-03-07 Feedback control system of motion platform

Publications (2)

Publication Number Publication Date
TW201336616A TW201336616A (en) 2013-09-16
TWI480118B true TWI480118B (en) 2015-04-11

Family

ID=49627637

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101107635A TW201336616A (en) 2012-03-07 2012-03-07 Feedback control system of motion platform

Country Status (1)

Country Link
TW (1) TW201336616A (en)

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW217483B (en) * 1991-02-22 1993-12-11 Cyberoptics Corp
US6909517B2 (en) * 2000-03-29 2005-06-21 The Boeing Company Method for assessing accuracy of positioning of a multi-axis numerically controlled machine
TW200830056A (en) * 2006-09-01 2008-07-16 Nikon Corp Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
TW200908015A (en) * 2007-08-15 2009-02-16 Chroma Ate Inc Horizontal adjusting method of optical mechanism and related device
CN100554876C (en) * 2005-10-14 2009-10-28 鸿富锦精密工业（深圳）有限公司 Optical type positioning device
TWI323685B (en) * 2007-04-20 2010-04-21 Univ Nat Formosa
TWM398462U (en) * 2010-09-14 2011-02-21 Chiuan Yan Technology Co Ltd Modualized positioning device
CN101979248A (en) * 2010-09-08 2011-02-23 东莞市凯格精密机械有限公司 Planar position adjustable platform and full-automatic vision printer
TWM401195U (en) * 2010-09-14 2011-04-01 Chiuan Yan Technology Co Ltd Multi-directional adjustment device
TWI340680B (en) * 2005-11-04 2011-04-21 Hon Hai Prec Ind Co Ltd A running platform
TW201139040A (en) * 2010-05-12 2011-11-16 Univ Nat Formosa Error measurement device of micro processing machine
TWM420940U (en) * 2011-09-16 2012-01-11 Chiuan Yan Technology Co Ltd Carrier shifting mechanism using wireless transmission module

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW217483B (en) * 1991-02-22 1993-12-11 Cyberoptics Corp
US6909517B2 (en) * 2000-03-29 2005-06-21 The Boeing Company Method for assessing accuracy of positioning of a multi-axis numerically controlled machine
CN100554876C (en) * 2005-10-14 2009-10-28 鸿富锦精密工业（深圳）有限公司 Optical type positioning device
TWI340680B (en) * 2005-11-04 2011-04-21 Hon Hai Prec Ind Co Ltd A running platform
TW200830056A (en) * 2006-09-01 2008-07-16 Nikon Corp Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
TWI323685B (en) * 2007-04-20 2010-04-21 Univ Nat Formosa
TW200908015A (en) * 2007-08-15 2009-02-16 Chroma Ate Inc Horizontal adjusting method of optical mechanism and related device
TW201139040A (en) * 2010-05-12 2011-11-16 Univ Nat Formosa Error measurement device of micro processing machine
CN101979248A (en) * 2010-09-08 2011-02-23 东莞市凯格精密机械有限公司 Planar position adjustable platform and full-automatic vision printer
TWM398462U (en) * 2010-09-14 2011-02-21 Chiuan Yan Technology Co Ltd Modualized positioning device
TWM401195U (en) * 2010-09-14 2011-04-01 Chiuan Yan Technology Co Ltd Multi-directional adjustment device
TWM420940U (en) * 2011-09-16 2012-01-11 Chiuan Yan Technology Co Ltd Carrier shifting mechanism using wireless transmission module

Also Published As

Publication number Publication date
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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees