TWI472750B - - Google Patents

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Publication number
TWI472750B
TWI472750B TW100149488A TW100149488A TWI472750B TW I472750 B TWI472750 B TW I472750B TW 100149488 A TW100149488 A TW 100149488A TW 100149488 A TW100149488 A TW 100149488A TW I472750 B TWI472750 B TW I472750B
Authority
TW
Taiwan
Application number
TW100149488A
Other languages
Chinese (zh)
Other versions
TW201326797A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to TW100149488A priority Critical patent/TW201326797A/en
Publication of TW201326797A publication Critical patent/TW201326797A/en
Application granted granted Critical
Publication of TWI472750B publication Critical patent/TWI472750B/zh

Links

TW100149488A 2011-12-29 2011-12-29 Chip defect inspection apparatus based on linear CCD array imaging and inspection method thereof TW201326797A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW100149488A TW201326797A (en) 2011-12-29 2011-12-29 Chip defect inspection apparatus based on linear CCD array imaging and inspection method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW100149488A TW201326797A (en) 2011-12-29 2011-12-29 Chip defect inspection apparatus based on linear CCD array imaging and inspection method thereof

Publications (2)

Publication Number Publication Date
TW201326797A TW201326797A (en) 2013-07-01
TWI472750B true TWI472750B (en) 2015-02-11

Family

ID=49224953

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100149488A TW201326797A (en) 2011-12-29 2011-12-29 Chip defect inspection apparatus based on linear CCD array imaging and inspection method thereof

Country Status (1)

Country Link
TW (1) TW201326797A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111551555A (en) * 2019-02-12 2020-08-18 微精科技股份有限公司 Automatic identification system on cloth flaw line
CN111146109B (en) * 2020-02-16 2020-10-30 徐州康禄新材料科技有限公司 Detection system

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6198529B1 (en) * 1999-04-30 2001-03-06 International Business Machines Corporation Automated inspection system for metallic surfaces
JP2003007746A (en) * 2001-06-18 2003-01-10 Sharp Corp Method and equipment for inspecting semiconductor element
US20040207863A1 (en) * 2003-04-16 2004-10-21 Christiansen Robert Douglas Automatic discovery of networked raster image processing engines
US20050240376A1 (en) * 2004-04-21 2005-10-27 Fuji Xerox Co., Ltd. Failure diagnosis method, failure diagnosis apparatus, image forming apparatus, program, and storage medium
US20090030544A1 (en) * 2007-07-26 2009-01-29 3M Innovative Properties Company Multi-unit process spatial synchronization of image inspection systems
TW201140042A (en) * 2010-03-16 2011-11-16 Panasonic Corp Pattern inspecting method, pattern inspecting device and imaging head for pattern inspecting device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6198529B1 (en) * 1999-04-30 2001-03-06 International Business Machines Corporation Automated inspection system for metallic surfaces
JP2003007746A (en) * 2001-06-18 2003-01-10 Sharp Corp Method and equipment for inspecting semiconductor element
US20040207863A1 (en) * 2003-04-16 2004-10-21 Christiansen Robert Douglas Automatic discovery of networked raster image processing engines
US20050240376A1 (en) * 2004-04-21 2005-10-27 Fuji Xerox Co., Ltd. Failure diagnosis method, failure diagnosis apparatus, image forming apparatus, program, and storage medium
US20090030544A1 (en) * 2007-07-26 2009-01-29 3M Innovative Properties Company Multi-unit process spatial synchronization of image inspection systems
TW201140042A (en) * 2010-03-16 2011-11-16 Panasonic Corp Pattern inspecting method, pattern inspecting device and imaging head for pattern inspecting device

Also Published As

Publication number Publication date
TW201326797A (en) 2013-07-01

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