TWI469284B - Cooling systems incorporating heat transfer meshes - Google Patents

Cooling systems incorporating heat transfer meshes Download PDF

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TWI469284B
TWI469284B TW95147786A TW95147786A TWI469284B TW I469284 B TWI469284 B TW I469284B TW 95147786 A TW95147786 A TW 95147786A TW 95147786 A TW95147786 A TW 95147786A TW I469284 B TWI469284 B TW I469284B
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wire
heat
fluid
network cable
pump
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TW95147786A
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John M Popovich
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Olantra Fund X L L C
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Description

結合熱傳網線之冷卻系統Cooling system combined with heat transfer network

本發明大抵關於裝置之有效冷卻,例如電氣裝置,及較特別的是關於高效率熱傳導構件,其包括線網,可界定曲折之流動路徑通道以用於冷卻劑流體,且與電氣裝置或其封裝呈緊密組合關係。The present invention generally relates to effective cooling of devices, such as electrical devices, and more particularly to high efficiency heat conducting members, including wire meshes, which can define tortuous flow path channels for coolant fluids, and electrical devices or packages thereof In a close combination.

在工業上頗為需要有效率、精巧、及簡便之熱傳導構件,如上所述者。而提供用於此項冷卻之先前熱技術及裝置則在結構、功能、及成果上皆欠缺由本文內所揭露裝置提供之罕見優點。There is a need in the industry for efficient, compact, and simple heat transfer members, as described above. The prior thermal technology and devices provided for this cooling lack the unique advantages provided by the devices disclosed herein in terms of structure, function, and results.

本發明之一主要目的在提供一種符合上述需求之簡便、及精巧之熱傳導裝置。基本上,該改良裝置包含:a)一結構,其包括一中空主體且界定出一容置冷卻流體之孔穴,b)該結構界定一開孔或通道,藉此使該冷卻流體與該封裝之直接接觸被建立用於將熱從該封裝傳導至該孔穴內所容置之該流體,一熱連接網線設置於該冷卻劑流體之流動路徑中,c)及構件,其用於將該流體循環,以將熱傳導至用於將熱從該流體去除之熱傳導構件。It is a primary object of the present invention to provide a simple and elegant heat transfer device that meets the above needs. Basically, the improved apparatus comprises: a) a structure comprising a hollow body and defining a cavity for receiving a cooling fluid, b) the structure defining an opening or passage whereby the cooling fluid and the package are Direct contact is established to conduct heat from the package to the fluid contained within the cavity, a thermal connection wire is disposed in the flow path of the coolant fluid, c) and a member for the fluid Cycling to conduct heat to a heat conducting member for removing heat from the fluid.

另一目的包括網線結構之設置,例如顯微網線,其相關聯於上述開孔或通道,其設置於流體循環路徑中以在流體流過由網線界定之曲折通道時可增進此熱傳導。該網線典型上延伸通過或交叉於該開孔或通道,且可具有一荷蘭編織束圖案,以界定一有效率、曲折之冷卻劑流動路徑或圖案。此外,一或多個流體封閉件係提供用於將該主體上之表面與該封裝之間封閉,且其鄰近於該開孔。Another object includes the arrangement of a wire structure, such as a micro-wire, associated with the aperture or channel described above, disposed in the fluid circulation path to enhance the heat transfer as the fluid flows through the tortuous path defined by the wire. . The wire typically extends through or intersects the opening or channel and may have a Dutch braid pattern to define an efficient, tortuous coolant flow path or pattern. Additionally, one or more fluid enclosures are provided for closing the surface between the body and the package, and adjacent to the aperture.

又一目的在提供一用於作動以將該流體沿著一循環路徑移位之泵,且其相關聯於該孔穴。關於此點,該泵可在孔穴內、或在孔穴內曝現於該流體,且較佳具有在泵送期間作為流體剪力表面之移動表面。一泵馬達可設置於該孔穴外,且磁性耦合可提供用於從馬達到泵之轉矩傳動。Yet another object is to provide a pump for actuation to displace the fluid along a circulation path and associated with the aperture. In this regard, the pump can be exposed to the fluid within the aperture, or within the aperture, and preferably has a moving surface that acts as a fluid shear surface during pumping. A pump motor can be disposed outside of the aperture and magnetic coupling can provide torque transmission from the motor to the pump.

再一目的包括提供一用於該主體與該馬達之殼體、複數個設於該殼體上以接收從該流體傳導至該殼體之熱、及用於移動該冷卻氣體而與該等鰭片呈冷卻關係之構件。Still another object includes providing a housing for the body and the motor, a plurality of housings disposed on the housing to receive heat from the fluid to the housing, and for moving the cooling gas to the fins The piece is a component of the cooling relationship.

又再一目的包括提供一種熱傳導裝置,其包括:a)一熱源,其來自電氣設備且具有一熱傳導表面,b)一線網,其延伸鄰近於該表面,以接收從該處傳導之熱,該網線包括特定線及其他線,該等特定及其他線形成隙縫,c)及構件,其用於將一冷卻劑流體傳送大致平行於該網線,以供流動通過該等隙縫,以接收從該網線傳導之熱。Still another object includes providing a heat transfer device comprising: a) a heat source from an electrical device and having a thermally conductive surface, b) a wire mesh extending adjacent the surface to receive heat conducted therefrom, The wire comprises a particular line and other lines, the particular and other lines forming a slit, c) and a member for conveying a coolant fluid substantially parallel to the wire for flow through the slot to receive The heat transmitted by the cable.

由此可知,該冷卻劑流體可經導引以流入且平行於該網線;一第二熱傳導網線可提供用於接收該冷卻劑流體;及一具有冷卻鰭片之熱接收器可從該第二網線接收熱。It can be seen that the coolant fluid can be guided to flow in and parallel to the wire; a second heat transfer wire can be provided for receiving the coolant fluid; and a heat receiver having cooling fins can be The second network cable receives heat.

本發明之上述及其他目的及優點、以及一繪示實施例之細節可從以下說明書及圖式中充分瞭解,其中:The above and other objects and advantages of the present invention, as well as the details of the illustrated embodiments, are fully understood from the following description and drawings.

本發明結合了可以在電子與微電子系統與子系統內大幅增加功率密度及資訊傳送速率之科技範圍。這些增加是藉由使用以電子導體組成之編織網線、及將緊密接觸於熱產生區之流體輸送通過由一或多網線產生之通道而提供。大幅增加熱傳送率及順應性中介片則進一步提昇了使用一或多個薄形半導體晶粒及具二作用側之晶粒的可行性。本發明可與微電子、微電機、及/或微流體性元件/陣列配合使用。The present invention incorporates a range of technologies that can substantially increase power density and information transfer rates within electronic and microelectronic systems and subsystems. These increases are provided by the use of braided wire meshes composed of electronic conductors and the transport of fluids in intimate contact with the heat generating zone through passages created by one or more wire wires. The substantial increase in heat transfer rate and compliance interposer further enhances the feasibility of using one or more thin semiconductor dies and dies with two sides. The invention can be used in conjunction with microelectronics, micromotors, and/or microfluidic components/arrays.

本發明可以在製程強化之外,藉由降低操作溫度與熱梯度及藉由提供增加之機械順應性,以達成可靠性及耐久性之增加。The present invention can achieve increased reliability and durability in addition to process enhancement by reducing operating temperatures and thermal gradients and by providing increased mechanical compliance.

改良網線可與現有之二、二分之一、三維電子封裝及互連製程配合使用,在應用上包括計算、功率電子、及照明。The improved network cable can be used with existing two-, one-half, three-dimensional electronic packaging and interconnection processes, including computing, power electronics, and lighting in applications.

現行之電子產品與系統將熱有效地輸送至當處周圍環境之能力有限。本發明藉由引用編織網線與一或多個半導體晶粒共同平面且極為接近、將流體流入線網與該晶粒之所在平面中、將熱從該晶粒之作用區傳導至當處周圍環境,以尋求解決此問題。Current electronic products and systems have limited ability to efficiently deliver heat to the surrounding environment. The present invention conducts heat from the active area of the die to the surrounding area by referring to the woven wire and the one or more semiconductor dies in plane and in close proximity, flowing the fluid into the plane of the wire and the die. Environment to seek to resolve this issue.

冷卻流體包括液體、蒸氣、及/或氣體,且可利用相態變化以協助熱傳導。可用之內部熱輸送流體包括水、酒精、聚α烯烴、聚乙基醚、聚乙基矽氧烷、及如3M公司所售之FLUORINERT品牌氟化液體。The cooling fluid includes liquids, vapors, and/or gases, and phase changes can be utilized to assist in heat transfer. Useful internal heat transfer fluids include water, alcohol, polyalphaolefins, polyethyl ethers, polyethyl siloxanes, and FLUORINERT brand fluorinated liquids such as those sold by 3M Company.

泵送機構包括正位移、動力及剪力型。微電機泵送機構使用現象例如壓電效應即為頗吸引人之選項。泵可與待冷卻之電子整合,或者可設於遠端成為一模組化系統之一部分。一單泵可用於將流體輸送至多數個電子模組。Pumping mechanisms include positive displacement, power and shear. The use of micro-motor pumping mechanisms such as the piezoelectric effect is an attractive option. The pump can be integrated with the electronics to be cooled or can be located at the far end as part of a modular system. A single pump can be used to deliver fluid to a number of electronic modules.

線網可以大幅增加用於熱輸送之有效面積,及產生一或多條曲折路徑且有一極小之有效邊緣層,藉此大幅增加從該晶粒至熱輸送流體之熱輸送率。The wire web can substantially increase the effective area for heat transport, and create one or more tortuous paths with a very small effective edge layer, thereby substantially increasing the heat transfer rate from the die to the heat transfer fluid.

所要的線網亦可作為電子功率及/或通信線管,且藉此提供增加之功率密度及通信率。該等線網典型上由高傳導率金屬線製成,例如金、銀、銅、及/或鋁,且可被電鍍以增強塗料黏性及/或改善對於接觸區域之電通信及/或協助諸如焊接、線接及/或黏接等製程。該等線可編織成方形或三角形陣列,且典型上有薄介電性塗料以防止所需者以外之電通信。介電性塗料選項包括無機材料,例如氧化物、氮化物、及/或玻璃,及/或有機塗料,例如聚對二甲苯及/或諸如用在"磁鐵線"上之日用品聚合物塗料。介電性塗料可以藉由包括雷射及研磨在內等方式從需要電通信之區域內去除。對於接觸區域之電通信可以透過包括壓力式接觸、電傳導性黏接、焊接、共鎔接合、顯微熔接、及線接在內等方式。The desired wire mesh can also serve as an electronic power and/or communication conduit, and thereby provide increased power density and communication rates. The wire mesh is typically made of a high conductivity metal wire, such as gold, silver, copper, and/or aluminum, and can be plated to enhance paint adhesion and/or improve electrical communication and/or assistance to the contact area. Processes such as soldering, wire bonding and/or bonding. The wires can be woven into a square or triangular array and typically have a thin dielectric coating to prevent electrical communication other than those desired. Dielectric coating options include inorganic materials such as oxides, nitrides, and/or glasses, and/or organic coatings such as parylene and/or commodity coatings such as those used in "magnet wires." Dielectric coatings can be removed from areas requiring electrical communication by means of lasers and grinding. Electrical communication for the contact area can be achieved by means of pressure contact, electrical conductive bonding, soldering, conjugate bonding, microsplicing, and wire bonding.

一X-Y柵(行列式陣列)導體可供從其邊緣(線端)選擇性電通信於任意個別X-Y點,即各X-Y點(節點)含有一二極體或X與Y導體之間之一或多個切換元件處。該等二極體及/或一或多個切換元件可接附於該網線,及/或接附於相鄰之晶粒,及/或作為該晶粒電路之一整合部分且在各節點處與該網線X與Y線呈電氣連接。該等節點可適應於半導體發射器及/或偵測器,例如雷射或發光二極體(LEDs),以提供該等網線節點及/或網線至晶粒及/或晶粒至晶粒及/或晶粒來回於遠端元件之間之高資料率通信。An X-Y gate (row array) conductor is selectively electrically communicable from its edge (line end) to any individual X-Y point, ie each X-Y point (node) contains a diode or X and Y One or more switching elements between the conductors. The diodes and/or one or more switching elements can be attached to the network cable and/or attached to adjacent dies, and/or as an integral part of the dies circuit and at each node It is electrically connected to the X and Y lines of the network cable. The nodes can be adapted to semiconductor emitters and/or detectors, such as laser or light emitting diodes (LEDs), to provide the network line nodes and/or network lines to the die and/or die to crystal The particles and/or grains are communicated back and forth to the high data rate between the remote elements.

一由一X-Y柵線組成且在節點處無二極體或開關、及經絕緣以防止在相交點接觸之網線除了可作為一順應性中介片及提供增加之熱輸送外,其可用於提供電力及通信至該網線一或二側上之晶粒。一項可行之配置方式為令某一軸線中之線陣列作為電力線管而另一軸線中之線陣列作為電通信線管。許多變化型式可以透過例如多工及無二極體之網線等系統而實施,其容許使用較類似於動物中樞神經系統(神經網絡)之複雜電氣性交互作用,而非一般數位式電子系統。A network consisting of an X-Y grid line and having no diodes or switches at the nodes, and insulated to prevent contact at the point of intersection, in addition to being a compliant interposer and providing increased heat transfer, is available Providing power and communication to the die on one or both sides of the network cable. One possible configuration is to make the array of lines in one axis as the power line tube and the line array in the other axis as the electrical communication line tube. Many variations can be implemented through systems such as multiplexed and diode-free network cables that allow for the use of complex electrical interactions that are more similar to the animal's central nervous system (neural network) than general digital electronic systems.

電氣性Electrical

編織線網提供比球形柵陣列(BGA)、針腳柵陣列(PGA)、接點柵陣列(LGA)、或線接式更微細之間距。絕緣之金屬線可用之直徑小於0.0005吋。編織線篩布可用在網線內,其在包括二極體或半導體開關例如節點電晶體在內之系統中足以提供每平方吋(>1500/平方毫米)超過一百萬個個別可定址節點。編織線網柵可以藉由隨著軸線改變間距方式製成。荷蘭網則可以藉由軸線之間之間距大小差異方式製成。此一結構使更有效率之電力透過一較大截面列導體之粗略間距及一較小截面導體之精細間距而提供至一柵。Braided wire mesh provides a finer spacing than a ball grid array (BGA), a pin grid array (PGA), a contact grid array (LGA), or a wire bond. The insulated metal wire can be used with a diameter of less than 0.0005 吋. Braided wire screens can be used in the wire, which is sufficient to provide more than one million individual addressable nodes per square inch (>1500/mm2) in systems including diodes or semiconductor switches such as node transistors. The braided wire grid can be made by varying the spacing along the axis. The Dutch net can be made by the difference in the size of the distance between the axes. This configuration provides more efficient power to a grid through the coarse pitch of a larger cross-section conductor and the fine pitch of a smaller cross-section conductor.

由本發明達成之緊密晶粒間隔意指電通信路徑長度大幅減小,且此進一步造成較高資料輸送率。The tight grain spacing achieved by the present invention means that the length of the electrical communication path is substantially reduced, and this further results in a higher data transfer rate.

編織線網可以遠比晶粒上之對應接觸陣列精細,且藉此達成較大之對準容差,同時仍可確保至少一線之提供,以利電通信於各墊塊及/或網線內增加之線量可供增加電通信選擇。The braided wire mesh can be much finer than the corresponding contact array on the die, and thereby achieve a large alignment tolerance while still ensuring at least one line for electrical communication within the pads and/or wires The increased amount of wire is available to increase the choice of electrical communication.

一種結構將晶粒之作用側上之一編織線網柵使用於通信,及一背側柵使用於透過金屬通孔而提供之電力。One configuration uses one of the braided wire grids on the active side of the die for communication, and a backside gate is used to provide power through the through metal vias.

編織線網陣列也可以使用作為一晶粒之一側上之單一電導體,用於提供電力或作為一接地及/或一EMI/RFI蔽極。The braided wire mesh array can also be used as a single electrical conductor on one side of a die for providing power or as a ground and/or an EMI/RFI shield.

溫度性Temperature

編織線網可以大幅增加熱輸送用之面積。The braided wire mesh can greatly increase the area for heat transfer.

編織線網可藉由產生一窄而曲折之流體路徑以增加熱輸送,且藉此減小有效邊緣層厚度及其相關聯之熱阻。The braided wire web can increase heat transfer by creating a narrow, tortuous fluid path, and thereby reduce the effective edge layer thickness and its associated thermal resistance.

本發明所想要的流體運動可以藉由在流體輸送系統中之當處沸騰而達成,其類似於典型或環形熱管,或者流體可以藉由動態泵送而強制提供增加之熱輸送。來自該系統之熱通常傳導至當處之空氣流,且此可藉由自由對流或強制對流以增加熱輸送率。利用相態變化(沸騰)之強制對流冷卻及熱交換系統空氣側之強制對流冷卻可達成高熱傳導率。例如,超過10瓩/平方厘米之熱傳導率是可能的。個人電腦中所用之高電力密度微處理器具有15瓦/平方厘米之熱功率密度,且在此程度出現若干問題,例如在以與增加時脈率相關聯之一般功率密度增加之工作及較密電晶體陣列繼續下去之能力。The desired fluid motion of the present invention can be achieved by boiling anywhere in the fluid delivery system, which is similar to a typical or toroidal heat pipe, or the fluid can be forced to provide increased heat delivery by dynamic pumping. Heat from the system is typically conducted to the air stream there, and this can be increased by free convection or forced convection. High thermal conductivity can be achieved by forced convection cooling of the phase change (boiling) and forced convection cooling on the air side of the heat exchange system. For example, thermal conductivity of more than 10 瓩/cm 2 is possible. The high power density microprocessor used in personal computers has a thermal power density of 15 watts per square centimeter, and there are several problems with this level, such as the work of increasing the general power density associated with increasing the clock rate and the denser The ability of the transistor array to continue.

次周圍環境冷卻頗吸引人且為特定電子或光學電子系統所需,且其可透過包括壓縮冷凍及熱電在內等技術而由本科技達成。Sub-ambient cooling is attractive and required for specific electronic or optical electronic systems, and is achieved by the technology through technologies including compression refrigeration and thermoelectricity.

本發明使電子系統及子系統之設計者與產品指定商有能力提供以極高速率有效輸送熱之系統,且透過較緊密封裝而藉此減低系統成本、重量、及體積。例如3D封裝已被用於特定應用中之記憶體晶粒多年,但是所費不貲且無法用於高功率密度晶粒,例如處理器或功率轉換裝置。本發明容許一高功率密度晶粒依需要而堆疊成多層,同時維持晶粒溫度與高效率及長壽限一致。The present invention enables designers and product designators of electronic systems and subsystems to provide systems that efficiently deliver heat at very high rates, and through tighter packaging thereby reducing system cost, weight, and volume. For example, 3D packages have been used for memory grains in specific applications for many years, but are not costly and cannot be used for high power density dies, such as processors or power conversion devices. The present invention allows a high power density die to be stacked in multiple layers as needed while maintaining grain temperature consistent with high efficiency and long life.

替代性高速率系統例如"微通道冷卻"並未提供電導體陣列,其有通道堵塞之虞而無法令流體通過如編織線網者,且在提供具有與積體電路晶粒相關聯之熱不均一性的適當熱輸送上有更多困難度。Alternative high rate systems such as "microchannel cooling" do not provide an array of electrical conductors that have channel clogging that does not allow fluid to pass through, such as a braided wire mesh, and provide heat associated with the integrated circuit die. There is more difficulty in proper heat transfer for uniformity.

線網柵可以選擇性填入聚合物,以協助流動組織化,例如為了使不均一性受熱裝置中之熱輸送最佳化。The wire grid can be selectively filled with a polymer to assist in flow organization, for example, to optimize heat transfer in a non-uniform heat receiving device.

機械性/結構性Mechanical / structural

溫度性-機械性故障經常被引証作為微電子與光電子系統中之主要故障機構。相鄰元件之間之熱循環、溫度梯度、及熱膨脹差才是促成因素。Temperature-mechanical failures are often cited as the primary failure mechanism in microelectronics and optoelectronic subsystems. Thermal cycling, temperature gradients, and differences in thermal expansion between adjacent components are contributing factors.

本發明之編織線網係透過碎片性及/或塑性變形,以作為晶粒之間及/或晶粒與其他元件例如電路板或端板之間之機械性順應性中介片。用於線陣列中之金屬及線與陣列溫度性及機械性歷史可經選定,以提供機械順應性。其他順應性可以藉由使用多股線、順應性介電質塗料、及/或藉由在一或多條軸線中使用傳導性聚合物或傳導性塗佈聚合物線/絲、及/或藉由使用極薄晶粒以容許在線接觸區之當處彈性變形、及/或藉由在一編織網線與晶粒之一非作用側之間或對著一非作用元件使用彈性層達成。The braided wire mesh of the present invention is subjected to fragmentation and/or plastic deformation as a mechanically compliant interposer between the die and/or between the die and other components such as a circuit board or end plate. Metal and wire and array temperature and mechanical history for use in wire arrays can be selected to provide mechanical compliance. Other compliance may be through the use of multiple strands, compliant dielectric coatings, and/or by using a conductive polymer or conductive coated polymer wire/filament in one or more axes, and/or This is achieved by the use of very thin grains to allow for elastic deformation of the in-line contact area, and/or by the use of an elastic layer between a braided wire and one of the inactive sides of the die or against an inactive element.

壓力型接觸件之使用可以進一步減少熱機械性故障且將修改大幅簡化。The use of pressure-type contacts can further reduce thermomechanical failures and greatly simplify the modifications.

熱塑性及/或熱固性聚合物/彈性體可以和該等網線整合,以增加機械穩定性及/或順應性。Thermoplastic and/or thermoset polymers/elastomers can be integrated with such wires to increase mechanical stability and/or compliance.

對準係3D電子中之一重大事件。許多3D製程要求在切斷之前先進行晶圓對準。本發明所提出之對準方式假設晶粒與晶粒對網線對準式切斷,而非晶圓對晶圓或晶粒對晶粒對準式。所提出之方式包括:透過焊料表面張力之自行對準。此機構一般用於BGAs。積體電路晶粒典型上僅有一作用表面,且此表面可以利用固定件以與線網對準,該固定件將網線固定及容許該網線上方與下方之晶粒透過熔融狀焊料之表面張力以適應於該網線。Alignment is one of the major events in 3D electronics. Many 3D processes require wafer alignment prior to severing. The alignment method proposed by the present invention assumes that the die and die are aligned in alignment with the die, rather than wafer-to-wafer or die-to-die alignment. The proposed method includes self-alignment through the surface tension of the solder. This institution is generally used for BGAs. The integrated circuit die typically has only one active surface, and the surface can be aligned with the wire mesh by means of a fixture that secures the wire and allows the die above and below the wire to pass through the surface of the molten solder. Tension to accommodate the cable.

具有遠比晶粒接合墊塊者小之間距的網線。此原理可用於非等向性傳導性構件。A network cable having a much smaller distance than the die bond pad. This principle can be applied to anisotropic conductive members.

機械性通孔及/或刻槽式最小限制之固定件。該等網線可有開放區域,以供對準針腳、機械性、電氣性、光學性、及/或流體通孔使用。Mechanical through-hole and / or grooved minimum limit fasteners. The wires may have open areas for alignment stitches, mechanical, electrical, optical, and/or fluid through holes.

用於將晶圓對準於晶圓以利接合之光學方式。An optical method for aligning wafers to wafers for bonding.

上述方式之組合。A combination of the above.

詳細說明Detailed description

在圖1中,一電氣性元件或結構,例如一微處理器中之一晶粒或晶片10,其產生如熱傳導箭頭11所示之熱。流過一散熱器層12後,此熱較佳為流至一與層12鄰近之網線層13。該網線可用熱傳導關係延伸或傳導性接觸於層12之側面12a,以作有效率之熱傳導,例如傳導。圖1a揭示嵌埋於或部分嵌埋於或沉入網線層13內之元件10、12,以將熱傳導至該網線及至該冷卻劑流體。In Fig. 1, an electrical component or structure, such as a die or wafer 10 in a microprocessor, produces heat as indicated by heat conduction arrow 11. After flowing through a heat spreader layer 12, the heat preferably flows to a mesh layer 13 adjacent to layer 12. The wire may extend or conductively contact the side 12a of the layer 12 in a thermally conductive relationship for efficient heat transfer, such as conduction. Figure 1a discloses elements 10, 12 embedded or partially embedded or sunk into the wire layer 13 to conduct heat to the wire and to the coolant fluid.

以14表示之該冷卻劑流體流入且通過該網線,大體上在該網線平面中,且通過該等線之間、及該等線上下方之隙縫,以利有效地將熱從該等網線去除,藉此使晶粒或晶片10可由一簡便且極精巧之組件組合有效地冷卻。再者,冷卻劑由該網線導引而流動成多道曲折流,其與該散熱器之側面或表面12a呈熱磨擦接觸關係。請參閱圖1a中之空氣流箭頭14a。因此該熱即由冷卻劑依二種方式擷取;曲折流動接觸於該等網線及曲折流動接觸於該散熱器之表面12a。該散熱器可以省略且該晶粒或晶片之側面10a可以與該網線接觸,如圖1a所示。散熱器12可由一或多種良好熱傳導性金屬組成,例如銅及/或鵭,或其合金。泵90在編號91處控制,以達成該網線內之橫向流動14。泵90可設在孔穴92內且以磁性耦合於該凹穴外之一馬達93。The coolant fluid, indicated at 14, flows into and through the wire, generally in the plane of the wire, and through the gaps between the wires, and below the wires, to effectively transfer heat from the mesh The wire is removed, thereby allowing the die or wafer 10 to be effectively cooled by a combination of simple and extremely compact components. Furthermore, the coolant is guided by the wire to flow into a plurality of meandering flows in a hot frictional relationship with the side or surface 12a of the heat sink. Please refer to the air flow arrow 14a in Figure 1a. Therefore, the heat is extracted by the coolant in two ways; the meandering flow contacts the wire and the meandering flow contacts the surface 12a of the heat sink. The heat sink can be omitted and the side 10a of the die or wafer can be in contact with the wire, as shown in Figure 1a. The heat sink 12 can be composed of one or more good thermally conductive metals, such as copper and/or tantalum, or alloys thereof. Pump 90 is controlled at number 91 to achieve lateral flow 14 within the wire. A pump 90 can be disposed within the aperture 92 and magnetically coupled to a motor 93 outside of the recess.

冷卻劑流體例如空氣者之流動可以被導向邊緣方向,即沿橫向通過且在該網線平面內,例如藉由該網線之相對立側之線管壁面15、16,線管元件則標示於15b、16b。壁面15可以形成一開孔15a,以容納該散熱器而使其接觸於網線層之一側,如圖所示。該網線之成分可參考如上。壁面15、16可呈隔熱性。一封閉件18可被採用於及設置於開孔15a之邊緣處,亦即散熱器12之表面12b與壁面15之表面15a之間,以防止冷卻劑從由該等網線形成之隙縫逸出。The flow of the coolant fluid, such as air, can be directed to the edge direction, i.e., in the transverse direction and in the plane of the wire, for example by the tube wall faces 15, 16 of the opposite sides of the wire, the conduit elements are labeled 15b, 16b. The wall 15 may define an opening 15a for receiving the heat sink to contact one side of the wire layer as shown. The composition of the network cable can be referred to as above. The walls 15, 16 may be thermally insulating. A closure member 18 can be used and disposed at the edge of the opening 15a, that is, between the surface 12b of the heat sink 12 and the surface 15a of the wall surface 15 to prevent coolant from escaping from the slit formed by the mesh wires. .

冷卻劑所含之熱隨後藉由傳導至裝置外之周圍空氣而去除。例如請參閱呈一第二網線層25形式之較佳除熱構件,或者延伸鄰近於且較佳地與具有鰭片27之主體26呈熱傳導性接觸之網線層13之延伸段13a。熱從沿邊緣方向通過網線層25之受熱冷卻劑流到該等網線,接著傳導至主體26及鰭片27。熱亦從冷卻劑直接流到主體26之表面26a。熱係藉由傳導至空氣而從該等鰭片去除,空氣則由馬達29驅動之一風扇28驅送向該等鰭片。延伸於網線層25之相對立側之線管壁面30、31將冷卻劑拘限於沿邊緣方向流入網線25或13之平面中。The heat contained in the coolant is then removed by conduction to the ambient air outside the device. For example, reference is made to a preferred heat removal member in the form of a second wire layer 25, or an extension 13a extending adjacent to, and preferably in thermal conductive contact with, the body 26 having fins 27. Heat flows from the heated coolant passing through the mesh layer 25 in the edge direction to the mesh wires, and then to the body 26 and the fins 27. Heat also flows directly from the coolant to the surface 26a of the body 26. The heat is removed from the fins by conduction to air, and the air is driven by the motor 29 to drive the fins 28 toward the fins. The conduit wall faces 30, 31 extending on opposite sides of the wire layer 25 limit the coolant to the plane of the wire 25 or 13 flowing in the edge direction.

該等網線可用於攜載電流,例如用於通信或其他電路用途。請參閱連接於網線42與外部通信電路43之間之輸入或輸出線44。網線42、45係交織且延伸於X與Y橫向中。諸此線可呈電絕緣性,但是非隔熱性。線42可用於電通信或線45可以使用作為電力線。These network cables can be used to carry current, such as for communication or other circuit purposes. Please refer to the input or output line 44 connected between the network cable 42 and the external communication circuit 43. The network wires 42, 45 are interlaced and extend in the X and Y transverse directions. These wires can be electrically insulating but not thermally insulating. Line 42 can be used for electrical communication or line 45 can be used as a power line.

剪力泵係較佳者,一部分是因為除了可呈非常精巧之潛在因素外,其亦可在一單級中提供高壓力且另可作為有效掃掠表面之熱交換器。Shear pumps are preferred, in part because they can provide high pressure in a single stage and can serve as a heat exchanger for effectively sweeping surfaces, in addition to being a very delicate potential factor.

結合了單一玻璃碟片轉子之泵送系統已被製成及測試,且有利的是其特徵在具有以下者:轉子穩定性 :轉子與配合之定子之間之間隙必須極小,特別是含有極低黏度之液體如3M Fluorinerts時,而此需要準確製造及一多軸承式輪轂。此可為一正回授回路(柏努利效應),其藉由略小之轉子-定子間隙使轉子逐漸抽向一定子區,因而在當處增加流體黏度。A pumping system incorporating a single glass disc rotor has been fabricated and tested, and is advantageously characterized by the following: rotor stability : the gap between the rotor and the mating stator must be extremely small, especially with very low Viscosity fluids such as 3M Fluorinerts require accurate fabrication and a multi-bearing hub. This can be a positive feedback loop (Bernoulli effect) which progressively draws the rotor towards a certain sub-region by a slightly smaller rotor-stator gap, thereby increasing the fluid viscosity everywhere.

轉子熱輸送 :若轉子之一側作為一熱側掃掠表面熱交換器,而轉子之另一側作為一冷側掃掠表面熱交換器,則轉子應將從一側至另一側之熱傳導減到最小。 Rotor heat transfer : If one side of the rotor acts as a hot side sweep surface heat exchanger and the other side of the rotor acts as a cold side sweep surface heat exchanger, the rotor should conduct heat from one side to the other side Minimize to a minimum.

轉子耐久性 :玻璃轉子提供低成本、低熱傳導率、及材質之高勁度。尤以一螺旋形動力泵較佳。 Rotor durability : Glass rotors provide low cost, low thermal conductivity, and high stiffness in materials. A spiral power pump is preferred.

圖2揭示一設置於邊緣流網線61(對應於網線13)與實質上較大邊緣流網線62(對應於網線25)之間之冷卻劑流體泵60。此泵具有齒輪63、64且以相互嚙合之輪齒轉動而產生冷卻劑流體之正位移流,其沿邊緣方向流過第一網線61,接著到達線管65及第二網線62,以流回到該泵之入口。網線61為一熱源側熱交換器,而網線62為一散熱側熱交換器。該結構在功能上係對應於圖1者,且鰭片66對應於鰭片27。2 discloses a coolant fluid pump 60 disposed between the edge streamline 61 (corresponding to the mesh 13) and the substantially larger edge streamline 62 (corresponding to the mesh 25). The pump has gears 63, 64 and rotates with the intermeshing teeth to create a positive displacement flow of coolant fluid that flows through the first wire 61 in the edge direction, and then to the wire tube 65 and the second wire 62 to Flow back to the inlet of the pump. The network cable 61 is a heat source side heat exchanger, and the network cable 62 is a heat radiation side heat exchanger. This structure corresponds functionally to FIG. 1 and the fins 66 correspond to the fins 27.

圖3相似於圖2,不同的是其使用一剪力泵馬達68,取代該等正位移齒輪。平面形網線69、70內之沿邊緣方向流動係對應於網線61、62內之流動。Figure 3 is similar to Figure 2 except that it uses a shear pump motor 68 in place of the positive displacement gears. The flow in the edge direction within the planar mesh lines 69, 70 corresponds to the flow within the mesh lines 61, 62.

圖4揭示一模組化系統,其被支撐於一電腦或其他電子裝置上,例如母板75。熱源網線(如13)係在一設於待冷卻之熱源電路組件76上的容器77內;而散熱網線在母板75上的容器77內。冷卻鰭片(如27)設在78。冷卻劑經過線管80而從76內之網線流至77內之網線;且冷卻劑從鰭片結構78內之一泵82流至77內之網線,或經過一線管81。Figure 4 illustrates a modular system that is supported on a computer or other electronic device, such as motherboard 75. The heat source cable (e.g., 13) is housed in a container 77 disposed on the heat source circuit assembly 76 to be cooled; and the heat sink wire is in the container 77 on the motherboard 75. The cooling fins (such as 27) are located at 78. The coolant flows through the conduit 80 from the wire in the 76 to the wire in the 77; and the coolant flows from a pump 82 in the fin structure 78 to the wire in the 77 or through a conduit 81.

圖5-11揭示多種網線織法,其識別如下:圖5:網線90圖6:網線91圖7:網線92圖8:網線93圖9:網線94圖10:網線95圖11:網線96(請注意接合球116)Figures 5-11 disclose various network cable weaves, which are identified as follows: Figure 5: Network cable 90 Figure 6: Network cable 91 Figure 7: Network cable 92 Figure 8: Network cable 93 Figure 9: Network cable 94 Figure 10: Network cable 95 Figure 11: Network cable 96 (please note the ball 116)

本發明在其範疇內包括由編織網線產生之微通道陣列,且流體流於該等網線平面內。The invention includes within its scope a microchannel array produced by a woven mesh and fluid flows in the plane of the mesh.

編織網線陣列將一額外維度添加至流體流,藉此容許流體在可能造成矽微通道堵塞之障礙物周側轉向。該等網線亦作為微流體性靜態混合器,且使流體流週期性地接觸於第一拘限層及隨後另一拘限層。平面2D對1D之流動能力增加同時提供了產生包括障礙物在內之系統,該等障礙物諸如用於電氣性、機械性、結構性、流體、溫度性及/或光學性目的之通孔。The braided wire array adds an additional dimension to the fluid stream, thereby allowing the fluid to steer on the side of the obstacle that may cause blockage of the microchannels. The wires also act as a microfluidic static mixer and periodically contact the fluid stream with the first barrier layer and subsequently another barrier layer. The increased flow capability of the planar 2D to 1D provides for the creation of systems including obstacles such as through holes for electrical, mechanical, structural, fluid, temperature, and/or optical purposes.

編織線網可取自多種材料、網線尺寸及編織款式。銅線篩布為一低成本之日用品材料且其3倍於矽之熱傳導率,及其可修改於廣範圍之製程,包括退火、彎折、沖切、銅焊、錡壓、電氣放電加工、蝕刻、嵌件模塑、銑削、鉋削、沖孔、滾軋、剪切、焊接、沖壓、回火、及熔接。Braided wire mesh can be obtained from a variety of materials, wire mesh sizes and woven styles. The copper wire screen cloth is a low-cost commodity material and it is three times the thermal conductivity of the crucible, and can be modified in a wide range of processes, including annealing, bending, punching, brazing, rolling, electrical discharge machining, Etching, insert molding, milling, planing, punching, rolling, shearing, welding, stamping, tempering, and welding.

編織網線可以作為大幅差異性熱膨脹係數之材料之間之機械性/結構性緩衝層。此為一項重大效益,因為熱機械性故障乃微電子中之主要故障結構。The braided wire can act as a mechanical/structural buffer between the materials of the greatly different coefficients of thermal expansion. This is a significant benefit because thermomechanical failure is the main failure structure in microelectronics.

編織線網提供較高之材料熱傳導率、對於晶粒之較佳熱耦合、及大幅增加之熱傳導面積比,其每單位泵送功率之熱傳導量為10倍於矽之微通道陣列者。The braided wire mesh provides a higher thermal conductivity of the material, a better thermal coupling to the die, and a substantially increased heat transfer area ratio, with a heat transfer per unit pumping power of 10 times that of the microchannel array.

本發明提供一種半導體晶粒,其藉由提供新穎且較實用之熱輸送、電力輸送方式,以在晶粒之二側上有積體電路。The present invention provides a semiconductor die having an integrated circuit on both sides of the die by providing a novel and more practical method of heat transfer and power transfer.

增加之熱輸送率應被視為電子工業中之強化製程之基本項目,而非一用於降低重要組件操作溫度之緊急措施。在許多例子中,增加之熱輸送率遠比替代性者更具成本效益。微處理器及圖形處理器即為透過改良之熱輸送方式而可用大幅增加速率操作且可較靠近之產品範例。The increased heat transfer rate should be considered as a basic item in the enhanced process in the electronics industry, rather than an emergency measure to reduce the operating temperature of critical components. In many cases, the increased heat transfer rate is far more cost effective than alternatives. Microprocessors and graphics processors are examples of products that can be operated at significantly increased rates and closer by improved heat transfer.

本發明提供方法藉由將網線設置接近於或接觸於作用區域且流體流入該等網線之平面中,而以大幅減少之熱阻及大幅增加之熱輸送率將熱從半導體之作用區輸送到當處周圍環境。The present invention provides a method for transporting heat from an active area of a semiconductor by placing the network line close to or in contact with the active area and flowing fluid into the plane of the network lines, with substantially reduced thermal resistance and substantially increased heat transfer rate. Go to the surroundings.

本發明所容許提供高熱傳導性及熱輸送率之低成本熱輸送系統可以戲劇化地加速3D電子之發展且導致半導體材料之利益與開發上之復甦,其原本因溫度性考量而有一部分被忽視。鍺為一電子材料選項之例子,而硒化鎘及硒化鋅為光電材料選項之例子,其效益來自於由本發明提供之改良熱狀態。The invention provides a low-cost heat transport system that provides high thermal conductivity and heat transfer rate, which can dramatically accelerate the development of 3D electrons and lead to the recovery of the benefits and development of semiconductor materials, which were partially neglected due to temperature considerations. .锗 is an example of an electronic material option, and cadmium selenide and zinc selenide are examples of optoelectronic material options, the benefit of which comes from the improved thermal state provided by the present invention.

電子積體電路典型上產生於薄平基板上而此提供了短程熱通信路徑。3D電子組件係藉由半導體晶粒之堆疊而達成,以利於減小系統體積及/或減少與長電子路徑長度相關聯之問題。3D電子組件傳統上包括一主動晶粒(高電氣性與溫度性功率密度)及複數個被動晶粒(低電氣性與溫度性功率密度),以提供足以維持與合理壽限相關聯之晶粒溫度的熱輸送率。本發明容許極大群極高功率密度之晶粒以極緊密方式放置,藉此使加工、通信、及功率轉換系統之製造有大幅減少之成本、質量、及體積。除了與3D電子系統相關聯之熱議題外,其亦需花費製造,因為其與大量通信及所需電力輸送聯結相關聯之困難度及修改能力有限。本發明克服了這些傳統限制,且賦予設計者透過有隙縫之網線而通達各晶粒之一或二個面上之大量位置,該等網線提供週期性電子及/或質子線管,以利於藉由將網線延伸至晶粒邊緣以外而方便聯結於輸入及/或輸出電路。Electronic integrated circuits are typically produced on thin flat substrates which provide a short path thermal communication path. The 3D electronic components are achieved by stacking of semiconductor dies to facilitate reducing system volume and/or reducing problems associated with long electronic path lengths. 3D electronic components traditionally include an active die (high electrical and temperature power density) and a plurality of passive die (low electrical and temperature power density) to provide a die sufficient to maintain a reasonable lifetime The heat transfer rate of the temperature. The present invention allows for extremely large groups of extremely high power density dies to be placed in an extremely tight manner, thereby resulting in substantially reduced cost, quality, and volume for the fabrication of processing, communications, and power conversion systems. In addition to the thermal issues associated with 3D electronic systems, it also requires manufacturing because of its limited difficulty and ability to modify associated with large amounts of communication and required power delivery connections. The present invention overcomes these conventional limitations and provides the designer with access to a large number of locations on one or both sides of each die through a slotted network cable that provides periodic electronic and/or proton conduits to Conveniently coupled to the input and/or output circuitry by extending the wire beyond the edge of the die.

在本發明中用於提供機械順應性之方法包括使用彈性及/或塑性可變形金屬網線、由一軸線內之金屬線與相反軸線內之聚合物電子及/或質子導體組成之網線及由二軸線內之聚合物電子及/或質子導體組成之網線。Methods for providing mechanical compliance in the present invention include the use of elastic and/or plastically deformable metal mesh wires, wires composed of metal wires in an axis and polymer electrons and/or proton conductors in opposite axes and A wire consisting of polymer electrons and/or proton conductors in two axes.

由二軸線內之金屬線組成之順應性金屬網線之材料例子包括退火之銅、銀、及金編織線篩布且具有適當塗佈及/或電鍍。順應性可以藉由包括使用聚合物塗佈、金屬電鍍、退火、將(連續性及/或週期性)垂直於圍封面所在平面之線徑最小化、及/或藉由使用在相反軸線內有抗彈性與塑性變形差異比之線及/或藉由使用多線導體(束狀或多條)等方式加強。Examples of materials for compliant metal mesh wires composed of metal wires in two axes include annealed copper, silver, and gold braided wire mesh cloths with suitable coating and/or plating. Compliance can be minimized by using polymer coating, metal plating, annealing, (continuous and/or periodic) perpendicular to the plane of the cover, and/or by use in the opposite axis. The difference between the elastic and plastic deformation is stronger than the line and/or by using a multi-wire conductor (bundle or strips).

用於由一軸線內之金屬線與相反軸線內之聚合物纖維組成之順應性網線之材料例子包括選自以銅、鎳、銀及金組成之族群中之金屬線且具有適當塗佈及/或電鍍,而相反軸線內之聚合物纖維者則選自包括丙烯酸、聚矽氧、氨酯、及聚甲基戊烯在內之族群。Examples of materials for a compliant mesh composed of metal wires in one axis and polymer fibers in opposite axes include metal wires selected from the group consisting of copper, nickel, silver, and gold and have suitable coating and / or electroplating, while the polymer fibers in the opposite axis are selected from the group consisting of acrylic acid, polyfluorene oxide, urethane, and polymethylpentene.

由二軸線內之聚合物纖維組成之順應性網線之材料例子包括例如丙烯酸、聚矽氧、氨酯、及聚甲基戊烯等聚合物。聚合物纖維可以使用作為電子及/或質子線管。聚合物纖維內之電傳導率可以藉由固有傳導性聚合物之使用、碳添加、直線形或螺旋形纏繞之金屬線、及/或包括透明電傳導性塗料如銦錫氧化物在內之傳導性塗料/電鍍物而增加。Examples of the material of the compliant mesh composed of the polymer fibers in the two axes include polymers such as acrylic acid, polyfluorene oxide, urethane, and polymethylpentene. Polymer fibers can be used as electronic and/or proton tubes. The electrical conductivity within the polymer fibers can be achieved by the use of intrinsically conductive polymers, carbon addition, linear or spiral wound metal wires, and/or conduction including transparent electrically conductive coatings such as indium tin oxide. Increased in coatings/plating.

用於該總成之圍封可由金屬、聚合物、陶瓷、及/或玻璃構成,且結合有該總成之系統可以分割成模組化元件或與其他元件緊密整合,其他元件包括用於流體流動之泵及用於將熱從主動區輸送至當處周圍環境之風扇與鰭片列。The enclosure for the assembly may be constructed of metal, polymer, ceramic, and/or glass, and the system incorporating the assembly may be divided into modular components or tightly integrated with other components, including other components for fluids. A flow pump and a fan and fin row for transporting heat from the active zone to the surrounding environment.

積體電路晶粒與該間隙式網線之間之接觸與通信可由習知技術提供,例如焊接及/或透過壓力型接觸。壓力型接觸可以利用外部彈簧或螺絲及/或間隙式網線之彈塑性變形達成。Contact and communication between the integrated circuit die and the gapped network line can be provided by conventional techniques, such as soldering and/or through pressure type contact. Pressure-type contact can be achieved by elastoplastic deformation of an external spring or screw and/or a gapped wire.

10...晶粒或晶片10. . . Die or wafer

10a...晶片側面10a. . . Wafer side

11...熱傳導箭頭11. . . Heat conduction arrow

12...散熱器層12. . . Radiator layer

12a...散熱器層側面12a. . . Radiator layer side

12b...散熱器層表面12b. . . Radiator surface

13、25...網線層13,25. . . Network layer

13a...延伸段13a. . . Extension

14...冷卻劑流體14. . . Coolant fluid

14a...空氣流箭頭14a. . . Air flow arrow

15、16、30、31...線管壁面15, 16, 30, 31. . . Wire wall

15a...開孔/表面15a. . . Opening/surface

15b、16b...線管元件15b, 16b. . . Wire tube component

18...封閉件18. . . Closure

26...主體26. . . main body

26a...主體表面26a. . . Body surface

27、66、78...鰭片27, 66, 78. . . Fin

28...風扇28. . . fan

29、93...馬達29, 93. . . motor

41、44...輸入/輸出線41, 44. . . Input/output line

42、45、90-96...網線42, 45, 90-96. . . cable

43...外部通信電路43. . . External communication circuit

60...冷卻劑流體泵60. . . Coolant fluid pump

61...緣部流動網線61. . . Edge mobile network cable

62...較大緣部流動網線62. . . Larger edge mobile network cable

63、64...齒輪63, 64. . . gear

65、80、81...線管65, 80, 81. . . Line tube

68...剪力泵轉子68. . . Shear pump rotor

69、70...平面形網線69, 70. . . Flat network cable

75...母板75. . . motherboard

76...熱源電路組件76. . . Heat source circuit assembly

77...容器77. . . container

82、90...泵82, 90. . . Pump

91...控制91. . . control

92...孔穴92. . . hole

116...接合球116. . . Bonding ball

圖1說明本發明之一較佳形式之原理;圖1a係一電氣性封裝之立體圖,例如一嵌埋在一網線內之晶片;圖2-4揭示本發明之其他形式,及/或其一部分;圖5-11揭示網線編織結構。1 is a perspective view of a preferred form of the invention; FIG. 1a is a perspective view of an electrical package, such as a wafer embedded in a wire; FIGS. 2-4 reveal other forms of the invention, and/or A part; Figure 5-11 reveals the mesh weave structure.

10...晶粒或晶片10. . . Die or wafer

10a...晶片側面10a. . . Wafer side

11...熱傳導箭頭11. . . Heat conduction arrow

12...散熱器層12. . . Radiator layer

12a...散熱器層側面12a. . . Radiator layer side

12b...散熱器層表面12b. . . Radiator surface

13、25...網線層13,25. . . Network layer

13a...延伸段13a. . . Extension

14...冷卻劑流體14. . . Coolant fluid

15、16、30、31...線管壁面15, 16, 30, 31. . . Wire wall

15a...開孔/表面15a. . . Opening/surface

15b、16b...線管元件15b, 16b. . . Wire tube component

18...封閉件18. . . Closure

26...主體26. . . main body

26a...主體表面26a. . . Body surface

27...鰭片27. . . Fin

28...風扇28. . . fan

29、93...馬達29, 93. . . motor

41、44...輸入/輸出線41, 44. . . Input/output line

42、45...網線42, 45. . . cable

43...外部通信電路43. . . External communication circuit

90...泵90. . . Pump

91...控制91. . . control

92...孔穴92. . . hole

Claims (37)

一種用於冷卻一電氣元件封裝之裝置,其組合上包含:a)一結構,其包括一中空主體且界定出一容置冷卻流體之孔穴,b)該結構界定一開孔或通道,藉此使該冷卻流體與該封裝之直接接觸被建立用於將熱從該封裝傳導至該孔穴內所容置之該流體,c)一網線,其設置用於加強該熱傳導,d)及用於循環該流體之構件,其用以將熱傳導至另一用於將熱從該流體去除之熱傳導構件,e)且包括一設於由該主體界定之複數個表面與該封裝之間之流體封閉件,且其鄰近於該開孔。 A device for cooling an electrical component package, the combination comprising: a) a structure including a hollow body and defining a cavity for receiving a cooling fluid, b) the structure defining an opening or passageway Directly contacting the cooling fluid with the package is established to conduct heat from the package to the fluid contained within the cavity, c) a wire that is configured to enhance the heat transfer, d) and Recycling a member of the fluid for conducting heat to another heat conducting member for removing heat from the fluid, e) and including a fluid enclosure disposed between the plurality of surfaces defined by the body and the package And adjacent to the opening. 如請求項1之裝置,該構件包括一用於作動以將該流體沿著一循環路徑移位之泵,且其相關聯於該孔穴。 The apparatus of claim 1 wherein the member includes a pump for actuating to displace the fluid along a circulation path and associated with the aperture. 如請求項2之裝置,其中該泵係在孔穴內曝露於該流體。 The device of claim 2, wherein the pump is exposed to the fluid within the aperture. 如請求項3之裝置,其中該泵具有作為流體剪力表面之移動表面。 The device of claim 3, wherein the pump has a moving surface as a fluid shear surface. 如請求項3之裝置,其包括一設置於該孔穴外用於驅動該泵之馬達。 The device of claim 3, comprising a motor disposed outside the aperture for driving the pump. 如請求項5之裝置,其包括該馬達與該泵間之磁性耦合。 The device of claim 5, comprising magnetic coupling between the motor and the pump. 如請求項5之裝置,其包括一用於該主體與該馬達之殼體、複數個設於該殼體上以接收從該流體傳導至該殼體之熱及用於移動 該冷卻流體而與該等鰭片呈冷卻關係之構件。 The device of claim 5, comprising a housing for the main body and the motor, a plurality of housings disposed on the housing for receiving heat from the fluid to the housing, and for moving The cooling fluid is in a cooling relationship with the fins. 一種熱傳導裝置,其組合上包含:a)一熱源,其來自電氣設備且具有一熱傳導表面,b)一線網,其延伸鄰近於該表面,以接收從該處傳導之熱,該網線包括特定線及其他線,該等特定及其他線形成隙縫,c)及傳送構件,其用於將一冷卻劑流體大致平行於該網線來傳送以供流動通過該等隙縫,以接收從該網線傳導之熱,d)且包含第二熱傳導網線,其用於接收從該第一上述網線流出之該冷卻劑流體,及另一用於將該第二網線之熱傳導之構件,e)且該另一構件包括通過該第二網線之冷卻劑流體,且大致上與一由該第二網線界定之平面平行。 A heat transfer device comprising: a) a heat source from an electrical device and having a thermally conductive surface, b) a wire mesh extending adjacent the surface to receive heat transferred therefrom, the wire comprising a specific Lines and other lines, the particular and other lines forming a slit, c) and a transfer member for conveying a coolant fluid substantially parallel to the wire for flow through the slot to receive from the wire Conducting heat, d) and comprising a second heat conducting wire for receiving the coolant fluid flowing from the first wire and another member for conducting heat of the second wire, e) And the further member includes a coolant fluid passing through the second wire and is substantially parallel to a plane defined by the second wire. 如請求項8之熱傳導裝置,其中該構件包括複數個鰭片,熱可從已通過該第二網線之流體傳導至此,及一風扇,其將空氣循環通過該等鰭片。 The heat transfer device of claim 8, wherein the member comprises a plurality of fins, heat can be conducted therethrough from the fluid that has passed through the second wire, and a fan that circulates air through the fins. 一種熱傳導裝置,其組合上包含:a)一熱源,其來自電氣設備且具有一熱傳導表面,b)一線網,其延伸鄰近於該表面,以接收從該處傳導之熱,該網線包括特定線及其他線,該等特定及其他線形成隙縫,c)及傳送構件,其用於將一冷卻劑流體大致平行於該網線來傳送以供流動通過該等隙縫,以接收從該網線傳導之熱,d)其中該網線係一第一網線,且其包括一用於從該第一網線接收該冷卻劑流體之第二網線,以從該處接收熱及用於將熱傳導至散熱構件, e)且其中該第一網線係概呈平面形,且該冷卻劑流體在該網線內以其平面範圍之一或多個方向流動,及該第二網線係概呈平面形,且該冷卻劑流體在該網線內以其平面範圍之一或多個方向流動。 A heat transfer device comprising: a) a heat source from an electrical device and having a thermally conductive surface, b) a wire mesh extending adjacent the surface to receive heat transferred therefrom, the wire comprising a specific Lines and other lines, the particular and other lines forming a slit, c) and a transfer member for conveying a coolant fluid substantially parallel to the wire for flow through the slot to receive from the wire Heat of conduction, d) wherein the network cable is a first network cable, and includes a second network cable for receiving the coolant fluid from the first network cable to receive heat therefrom and for Heat is transferred to the heat dissipating member, e) and wherein the first network cable is substantially planar, and the coolant fluid flows in one or more of its planar ranges within the mesh line, and the second network cable is substantially planar, and The coolant fluid flows within the wire in one or more of its planar extents. 如請求項10之熱傳導裝置,其中該第二網線係以下之其中一者:i)其間隔於該第一網線,ii)其係該第一網線之一延伸段。 The heat transfer device of claim 10, wherein the second network cable is one of: i) spaced apart from the first network cable, and ii) being an extension of the first network cable. 如請求項10之熱傳導裝置,其包括一設於該第一與該第二網線之間之流體冷卻劑泵。 The heat transfer device of claim 10, comprising a fluid coolant pump disposed between the first and second network wires. 如請求項10之熱傳導裝置,其中該第一與該第二網線之至少一者具有交織束,以形成供該冷卻劑流體流過之隙縫。 The heat transfer device of claim 10, wherein at least one of the first and the second wire has an interlaced bundle to form a slit through which the coolant fluid flows. 如請求項13之熱傳導裝置,其中該等交織束包括多數條子束熱導體。 The heat transfer device of claim 13, wherein the interlaced bundles comprise a plurality of sliver beam thermal conductors. 如請求項13之熱傳導裝置,其中該等束形成以下之其中一者:i)一荷蘭編織圖案,ii)一菱形編織圖案;iii)一三軸形編織圖案。 The heat transfer device of claim 13, wherein the bundles form one of: i) a Dutch weave pattern, ii) a diamond weave pattern; iii) a triaxial weave pattern. 如請求項13之熱傳導裝置,其包括設於特定束上之接合球。 A heat transfer device according to claim 13 comprising a splice ball disposed on a particular bundle. 一種用於冷卻一具有一封裝之積體電路的裝置,該裝置可接附於該積體電路且具有一中空主體,其中一由該中空主體形成之孔穴容置流體,供其通過該孔穴之一開孔而將該積體電路冷卻,及在表面處達成該冷卻裝置與該積體電路之間之接觸,使 該流體與該積體電路之封裝直接接觸。 A device for cooling an integrated circuit having a package, the device being attachable to the integrated circuit and having a hollow body, wherein a cavity formed by the hollow body receives fluid for passage therethrough Cooling the integrated circuit with an opening, and achieving contact between the cooling device and the integrated circuit at the surface The fluid is in direct contact with the package of the integrated circuit. 如請求項17之裝置,其中該流體係藉由一泵而在該孔穴內移動。 The device of claim 17, wherein the flow system moves within the aperture by a pump. 如請求項18之裝置,其中該泵係藉由磁性耦合於一外部馬達而驅動。 The device of claim 18, wherein the pump is driven by magnetic coupling to an external motor. 如請求項17之裝置,其中該孔穴之開孔實質上呈圓形,及其包括一設於該積體電路與該冷卻裝置之孔穴之間之密封,該密封由一O形環建立。 The device of claim 17, wherein the opening of the aperture is substantially circular and includes a seal disposed between the integrated circuit and the aperture of the cooling device, the seal being established by an O-ring. 如請求項17之裝置,其中一顯微網線覆蓋該孔穴之該開孔。 The device of claim 17, wherein a microscopic wire covers the opening of the aperture. 如請求項21之裝置,其中該顯微網線使用一荷蘭編織圖案。 The device of claim 21, wherein the microscopic mesh uses a Dutch weave pattern. 如請求項21之裝置,其中該顯微網線使用一菱形編織圖案。 The device of claim 21, wherein the microscopic mesh uses a diamond weave pattern. 如請求項21之裝置,其中該顯微網線使用一三軸形編織圖案。 The device of claim 21, wherein the microscopic mesh uses a triaxial weave pattern. 如請求項21之裝置,其中該顯微網線使用一具有次導體之編織圖案。 The device of claim 21, wherein the micro-network wire uses a weave pattern having a secondary conductor. 如請求項21之裝置,其中該顯微網線使用一具有貼附接合球之編織圖案。 The device of claim 21, wherein the microscopic mesh uses a weave pattern having attached bonding balls. 如請求項21之裝置,其中該流體係藉由一設於該孔穴內之泵而在該孔穴內移動。 The device of claim 21, wherein the flow system moves within the aperture by a pump disposed within the aperture. 如請求項27之裝置,其中該泵係藉由磁性耦合於一外部馬達而驅動。 The device of claim 27, wherein the pump is driven by magnetic coupling to an external motor. 如請求項21之裝置,其中該泵係一位移型泵。 The device of claim 21, wherein the pump is a displacement pump. 如請求項21之裝置,其中該泵具有一剪力表面。 The device of claim 21, wherein the pump has a shear surface. 如請求項19之裝置,其中該外部馬達驅動一風扇,該風扇將空 氣移位通過冷卻鰭片,以接收從一通過該冷卻流體之網線傳導之熱。 The device of claim 19, wherein the external motor drives a fan, the fan will be empty The gas is displaced by cooling the fins to receive heat conducted from a wire passing through the cooling fluid. 如請求項31之裝置,其中該冷卻流體係一低黏度碳酸氟。 The apparatus of claim 31, wherein the cooling stream system has a low viscosity of carbon fluoride. 如請求項17之裝置,其包括一網線鄰近於該開孔且具有線以及電路以電通信於至少一些該等網線。 The device of claim 17, comprising a network cable adjacent to the aperture and having a line and circuitry for electrically communicating with at least some of the network lines. 一種熱傳導裝置,其組合上包含:a)一熱源,其來自電氣設備且具有一熱傳導表面,b)一線網,其延伸鄰近於該表面,以接收從該處傳導之熱,該網線包括特定線及其他線,該等特定及其他線形成隙縫,c)及傳送構件,其用於將一冷卻劑流體大致平行於該網線來傳送以供流動通過該等隙縫,以接收從該網線傳導之熱,d)其中該網線係一第一網線,且其包括一用於從該第一網線接收該冷卻劑流體之第二網線,以從該處接收熱及用於將熱傳導至散熱構件,e)且其中該散熱構件包括另一流體,其可操作以在從該冷卻流體接收熱時改變相態。 A heat transfer device comprising: a) a heat source from an electrical device and having a thermally conductive surface, b) a wire mesh extending adjacent the surface to receive heat transferred therefrom, the wire comprising a specific Lines and other lines, the particular and other lines forming a slit, c) and a transfer member for conveying a coolant fluid substantially parallel to the wire for flow through the slot to receive from the wire Heat of conduction, d) wherein the network cable is a first network cable, and includes a second network cable for receiving the coolant fluid from the first network cable to receive heat therefrom and for Heat is conducted to the heat dissipating member, e) and wherein the heat dissipating member includes another fluid operable to change the phase state upon receiving heat from the cooling fluid. 一種熱傳導裝置,其組合上包含:a)一熱源,其來自電氣設備且具有一熱傳導表面,b)一線網,其延伸鄰近於該表面,以接收從該處傳導之熱,該網線包括特定線及其他線,該等特定及其他線形成隙縫,c)及傳送構件,其用於將一冷卻劑流體大致平行於該網線來傳送以供流動通過該等隙縫,以接收從該網線傳導之熱,d)且包含第二熱傳導網線,其用於接收從該第一上述網線流出 之該冷卻劑流體,及另一用於將該第二網線之熱傳導之構件,e)且其包括一聚合物,係選擇性填入該等網線至少一者之至少一或多個部分內,以供該冷卻流體流動組織化。 A heat transfer device comprising: a) a heat source from an electrical device and having a thermally conductive surface, b) a wire mesh extending adjacent the surface to receive heat transferred therefrom, the wire comprising a specific Lines and other lines, the particular and other lines forming a slit, c) and a transfer member for conveying a coolant fluid substantially parallel to the wire for flow through the slot to receive from the wire Conducting heat, d) and including a second heat transfer network wire for receiving flow from the first wire The coolant fluid, and another member for thermally conducting the second wire, e) and comprising a polymer, selectively filling at least one or more portions of at least one of the wires Inside, for the cooling fluid to flow and organize. 一種熱傳導裝置,其組合上包含:a)一熱源,其來自電氣設備且具有一熱傳導表面,b)一線網,其延伸鄰近於該表面,以接收從該處傳導之熱,該網線包括特定線及其他線,該等特定及其他線形成隙縫,c)及傳送構件,其用於將一冷卻劑流體大致平行於該網線來傳送以供流動通過該等隙縫,以接收從該網線傳導之熱,d)其中該網線係一第一網線,且其包括一用於從該第一網線接收該冷卻劑流體之第二網線,以從該處接收熱及用於將熱傳導至散熱構件,e)其中該第一網線係概呈平面形,且該冷卻劑流體在該網線內以其平面範圍之一或多個方向流動,及該第二網線係概呈平面形,且該冷卻劑流體在該網線內以其平面範圍之一或多個方向流動,f)一設於該第一與該第二網線之間之流體冷卻劑泵,g)且其中該泵具有一玻璃碟片轉子。 A heat transfer device comprising: a) a heat source from an electrical device and having a thermally conductive surface, b) a wire mesh extending adjacent the surface to receive heat transferred therefrom, the wire comprising a specific Lines and other lines, the particular and other lines forming a slit, c) and a transfer member for conveying a coolant fluid substantially parallel to the wire for flow through the slot to receive from the wire Heat of conduction, d) wherein the network cable is a first network cable, and includes a second network cable for receiving the coolant fluid from the first network cable to receive heat therefrom and for Conducting heat to the heat dissipating member, e) wherein the first wire is substantially planar, and the coolant fluid flows in one or more of its planar ranges within the wire, and the second wire is a planar shape, and the coolant fluid flows in one or more of its planar ranges within the wire, f) a fluid coolant pump disposed between the first and second wire, g) and The pump has a glass disc rotor. 一種用於一電氣元件封裝之冷卻裝置,其組合上包含:a)一結構,其包括一中空主體且界定出一容置冷卻流體之孔穴,b)該結構界定一開孔或通道,藉此使該冷卻流體與該封裝之直接接觸被建立用於將熱從該封裝傳導至該孔穴內所容置之該流 體,c)一網線,其設置用於加強該熱傳導,d)及用於循環該流體之構件,其用以將熱傳導至另一用於將熱從該流體去除之熱傳導構件e)且其中該封裝係至少一部分嵌埋或沉入該網線內。 A cooling device for an electrical component package, the combination comprising: a) a structure including a hollow body defining a cavity for receiving a cooling fluid, b) the structure defining an opening or passageway Directly contacting the cooling fluid with the package is established to conduct heat from the package to the flow contained within the cavity Body, c) a wire provided to enhance the heat transfer, d) and means for circulating the fluid for conducting heat to another heat conducting member e for removing heat from the fluid and wherein The package is at least partially embedded or sunk into the network cable.
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US20060137856A1 (en) * 2004-12-23 2006-06-29 Ch Capital, Inc. Aka Ch Capital, Llc Cooling systems incorporating heat transfer meshes

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060137856A1 (en) * 2004-12-23 2006-06-29 Ch Capital, Inc. Aka Ch Capital, Llc Cooling systems incorporating heat transfer meshes
WO2006071631A2 (en) * 2004-12-23 2006-07-06 Onscreen Technologies, Inc. Cooling systems incorporating heat transfer meshes

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