TWI449625B - Structure having hydrophilicity and oleophobicity and method of fabricating the same - Google Patents

Description

Structure having hydrophobic and oleophobic properties and preparation method thereof

The invention relates to a structure having hydrophobic and oleophobic properties and a preparation method thereof, in particular to a structure having hydrophobic and oleophobic properties comprising a hydrophobic diamond-like carbon film and a hydrophilic diamond-like carbon film and a preparation method thereof.

With the rapid development of the electronics industry, various types of electronic products have been widely used in the daily lives of the public. Among them, since the touch-sensitive electronic device has an easy-to-operate feature, the touch panel is widely used in various electronic products, such as liquid crystal display devices, personal digital assistants, cash machines, or portable computers. As a medium for human-computer interaction. According to the physical principle of the touch panel detecting the touch point, the touch panel can be divided into a resistive type, a capacitive type and a wave type.

However, due to the manner of detecting the touch point, the user must frequently press or slide the finger or the stylus on the surface of the glass substrate of the touch panel to make the touch panel corresponding. Signal transmission. Therefore, after long-term use by the user, the surface of the glass substrate of the touch panel is often subjected to friction or tapping force generated by the finger or the stylus, thereby causing scratches and abrasion, and the glass substrate is caused. The surface structure forms grooves or holes of different shapes; or the surface of the glass substrate is exposed to oil and moisture, and the oil and moisture are easily embedded in the grooves or holes, thereby affecting the surface of the glass substrate. Flatness and light transmission, which seriously affect the handling performance of the touch panel. What is more, if the force of the user tapping or pressing the touch panel is too large, it is more likely that the glass substrate is broken and the touch panel is scrapped.

At present, the method for solving the above problems is to strengthen the mechanical properties of the glass substrate by a surface treatment method. For example, in Taiwan Patent No. 200825202, the surface of the glass substrate is mainly coated with a diamond-like carbon (DLC) layer to have high visible/infrared penetration by the diamond-like carbon itself. High mechanical strength and other characteristics to increase the mechanical strength of the glass substrate and maintain the light transmittance of the glass substrate. However, since it is only provided with a diamond-like carbon layer on a glass substrate, such a carbon-drilled carbon is also adhered to oil and moisture, and is filled on the surface of the diamond-like carbon layer. In the cracks or holes, the sensitivity of the touch panel is seriously disturbed, which affects its handling and durability.

Therefore, there is a need in the art for a new surface structure design that can have both hydrophobic and oleophobic properties and wear resistance.

In view of the above, the present invention provides a structure having hydrophobic and oleophobic properties, comprising: a substrate; a hydrophobic diamond-like carbon film having a dot array structure and disposed on the substrate; And a hydrophilic diamond-like carbon film disposed on the substrate and located between the dot array structures of the hydrophobic diamond-like carbon film.

The structure having hydrophobic and oleophobic properties of the present invention comprises a hydrophobic diamond-like carbon film and a hydrophilic diamond-like carbon film, wherein the hydrophobic diamond-like carbon film has a dot-like array structure. The hydrophobic diamond-like carbon film can achieve a hydrophobic effect, and the hydrophilic diamond-like carbon film can achieve an oleophobic and/or hydrophilic effect, thus making the structure of the present invention both hydrophobic and oleophobic and/or hydrophilic. While the diamond-like carbon film itself has excellent hardness and scratch resistance, the substrate coated with the hydrophobic and hydrophilic diamond-like carbon film of the present invention can have high hardness, scratch resistance, and hydrophobic and oleophobic properties. Therefore, the structure having hydrophobic and oleophobic properties of the present invention can improve the reinforcing structure of the conventional glass substrate to easily adhere to impurities such as oil stains and moisture; the light transmittance and mechanical strength are insufficient; and the anti-etching layer provided is easily peeled off, etc. problem.

The structure of the present invention having hydrophobic and oleophobic properties has a flat surface rather than a convex or concave hole. Therefore, the finger can be made to feel good without a rough feeling, and it is not easily peeled off from the substrate due to the flat surface.

In the structure of the present invention having hydrophobic and oleophobic properties, the substrate (ie, the application of the present invention) may be a touch panel, a liquid crystal display device, or other display screen, personal digital assistant, cash machine or laptop computer. Such electronic products, or the body (such as cars, locomotives, bicycles) shells, handles, etc., can avoid the substrate itself from the friction or impact force generated by the finger or the stylus, resulting in scratches and wear, At the same time, it can avoid the adhesion of oil and moisture, and maintain the flatness and light transmission of the surface of the substrate.

In one aspect of the structure having hydrophobic and oleophobic properties of the present invention, the hydrophilic diamond-like carbon film preferably has a plurality of pores (for example, circular, square or polygonal pores), and the hydrophobic diamond-like carbon film is more Jiake is located in the hole to form a dot array structure. Further, the pitch between the dots in the dot array structure of the hydrophobic diamond-like carbon film may preferably be from 100 nm to 500 nm.

In the structure having hydrophobic and oleophobic properties of the present invention, the substrate is preferably glass, ceramic or polymer. Among them, the ceramic substrate may preferably be an aluminum nitride plated glass substrate.

In the structure having hydrophobic and oleophobic properties of the present invention, the hydrophobic diamond-like carbon film is preferably a fluorine-doped diamond-like carbon film, and the hydrophobic diamond-like carbon film has hydrophobic properties.

In the structure having hydrophobic and oleophobic properties of the present invention, the hydrophilic diamond-like carbon film is preferably a carbon film doped with oxygen, nitrogen, helium or hydrogen, and the hydrophilic diamond-like carbon film has a sparse Oil characteristics.

In the structure having hydrophobic and oleophobic properties of the present invention, the content of the dopant may preferably be from 5% to 50% by atom.

In the structure having hydrophobic and oleophobic properties of the present invention, the content of the dopant may preferably be from 5% to 30% by atom.

In the structure having hydrophobic and oleophobic properties of the present invention, the thickness of the hydrophobic diamond-like carbon film or the hydrophilic diamond-like carbon film may preferably be between 1 nm and 500 nm.

The structure having hydrophobic and oleophobic properties of the present invention preferably further comprises an intermediate layer disposed between the substrate and the hydrophobic diamond-like carbon film or the hydrophilic diamond-like carbon film. The intermediate layer can be used to increase the adhesion between the substrate and the hydrophilic diamond-like carbon film.

In the structure of the present invention having hydrophobic and oleophobic properties, the material of the intermediate layer is preferably selected from the group consisting of niobium carbide, aluminum nitride, boron nitride, hydrocarbons, and mixtures thereof. It is tantalum carbide.

In the structure of the present invention having hydrophobic and oleophobic properties, the intermediate layer preferably comprises from 5% to 40% by atomic percent of ruthenium.

The invention further provides a preparation method of a structure having hydrophobic and oleophobic properties, comprising: (A) providing a substrate; (B) forming a hydrophobic diamond-like carbon film having a dot array structure on the substrate; And (C) forming a hydrophilic diamond-like carbon film between the dot array structures of the hydrophobic diamond-like carbon film.

The structure having hydrophobic and oleophobic properties prepared by the preparation method of the present invention comprises a hydrophobic diamond-like carbon film and a hydrophilic diamond-like carbon film, and the two kinds of drilled carbon films are alternately arranged in a dot array manner. Or staggered at a preset distance (range). The hydrophobic diamond-like carbon film can achieve a hydrophobic effect, and the hydrophilic diamond-like carbon film can achieve an oleophobic effect, thus making the structure prepared by the invention have both hydrophobic and oleophobic properties. While the diamond-like carbon film itself has excellent hardness and scratch resistance, the substrate coated with the hydrophobic and hydrophilic diamond-like carbon film prepared by the invention can have high hardness, scratch resistance, and hydrophobicity and oleophobicity. Characteristics. Therefore, the structure having hydrophobic and oleophobic properties prepared by the present invention can improve the reinforcing structure of the conventional glass substrate to easily adhere to impurities such as oil stains, moisture and the like; insufficient light transmittance and mechanical strength; and the anti-etching layer provided Easy to peel off and other issues.

According to the preparation method of the structure having hydrophobic and oleophobic properties according to the present invention, in the step (B), the hydrophobic diamond-like carbon film and/or the hydrophilic diamond-like carbon film are preferably physically vapor deposited or chemically vaporized. The deposition method is formed. The physical vapor deposition method may preferably be a sputtering method or a cathodic arc method; the chemical vapor deposition method may preferably be a plasma assisted or microwave chemical vapor deposition method.

The method for preparing a structure having hydrophobic and oleophobic properties according to the present invention, wherein the hydrophobic diamond-like carbon film is preferably a fluorine-doped diamond-like carbon film, and the hydrophobic diamond-like carbon film has hydrophobic properties.

The method for preparing a structure having hydrophobic and oleophobic properties according to the present invention, wherein the hydrophilic diamond-like carbon film is preferably a carbon film doped with oxygen, nitrogen, helium or hydrogen, and the hydrophilic drill The carbon film system has oleophobic properties.

The method for producing a structure having hydrophobic and oleophobic properties according to the present invention, wherein the content of the dopant is preferably from 5% to 30% by atom.

The method for preparing a structure having hydrophobic and oleophobic properties according to the present invention, wherein the step (A) and the step (B) preferably further comprise a step (A1): forming an intermediate layer on the substrate The surface. Wherein, the intermediate layer is preferably selected from the group consisting of niobium carbide, aluminum nitride, boron nitride, hydrocarbons, and mixtures thereof.

A method of producing a structure having hydrophobic and oleophobic properties according to the present invention, wherein the intermediate layer preferably comprises from 5% to 40% by atomic percent of ruthenium.

The method for preparing a structure having hydrophobic and oleophobic properties according to the present invention, wherein in the step (B), the distance between the dots in the dot array structure is preferably from 100 nm to 500 nm.

The method for preparing a structure having hydrophobic and oleophobic properties according to the present invention, wherein in the step (B), each dot of the dot array structure preferably has a size of 400 nm to 1000 nm.

The method for preparing a structure having hydrophobic and oleophobic properties according to the present invention, wherein the hydrophobic diamond-like carbon film or the hydrophilic diamond-like carbon film preferably has a thickness of from 1 nm to 500 nm.

The invention further provides a method for preparing a structure having hydrophobic and oleophobic properties, comprising: (A) providing a substrate; (B) forming a hydrophilic diamond-like carbon film on the substrate; (C) the hydrophilic The surface of the carbon-like carbon film is formed with a plurality of pores; and (D) forming a hydrophobic diamond-like carbon film in the plurality of pores of the hydrophilic diamond-like carbon film, and the hydrophobic diamond-like carbon film has a dot array structure.

The structure of the hydrophobic and oleophobic properties obtained by the above method, the hydrophilic diamond-like carbon film has pores (for example, circular, square or polygonal pores), and the hydrophobic diamond-like carbon film is disposed in the pore. In addition, the spacing between the plurality of holes may preferably be from 100 nm to 500 nm. Since the hydrophobic diamond-like carbon film can achieve a hydrophobic effect, and the hydrophilic diamond-like carbon film can achieve an oleophobic effect, the structure prepared by the present invention has both hydrophobic and oleophobic properties. While the diamond-like carbon film itself has excellent hardness and scratch resistance, the substrate coated with the hydrophobic and hydrophilic diamond-like carbon film of the present invention can have high hardness, scratch resistance, and hydrophobic and oleophobic properties. Therefore, the structure having hydrophobic and oleophobic properties prepared by the present invention can improve the reinforcing structure of the conventional glass substrate to easily adhere to impurities such as oil stains, moisture and the like; insufficient light transmittance and mechanical strength; and the anti-etching layer provided Easy to peel off and other issues.

The method for preparing a structure having hydrophobic and oleophobic properties according to the present invention, wherein in step (B), the hydrophilic diamond-like carbon film is formed on the substrate by physical vapor deposition or chemical vapor deposition; In the step (C), a mask is formed on the surface of the hydrophilic diamond-like carbon film to form a hole.

In the preparation method of the structure having hydrophobic and oleophobic properties of the present invention, the hydrophobic diamond-like carbon film is a fluorine-doped diamond-like carbon film.

The method for preparing a structure having hydrophobic and oleophobic properties of the present invention, wherein in step (D), the hydrophobic diamond-like carbon film is formed on the hydrophilic diamond-like carbon film by physical vapor deposition or chemical vapor deposition. The hole.

In the preparation method of the structure having hydrophobic and oleophobic properties of the present invention, the hydrophilic diamond-like carbon film is a diamond-like carbon film doped with oxygen, nitrogen, helium or hydrogen.

In the preparation method of the structure having hydrophobic and oleophobic properties of the present invention, the content of the dopant is from 5% to 30% by atom.

In the preparation method of the structure having hydrophobic and oleophobic properties of the present invention, the physical vapor deposition method may preferably be a sputtering method or a cathodic arc method; and the chemical vapor deposition method may preferably be plasma assisted or microwaved. Chemical vapor deposition.

In the preparation method of the structure having hydrophobic and oleophobic properties of the present invention, the step (A) and the step (B) preferably further comprise a step (A1): forming an intermediate layer on the surface of the substrate .

In the preparation method of the structure having hydrophobic and oleophobic properties of the present invention, the intermediate layer is preferably selected from the group consisting of niobium carbide, aluminum nitride, boron nitride, hydrocarbons, and mixtures thereof.

In the preparation method of the structure having hydrophobic and oleophobic properties of the present invention, the intermediate layer preferably comprises from 5% to 40% by atomic percent of ruthenium.

In the preparation method of the structure having hydrophobic and oleophobic properties of the present invention, in the step (C), the spacing between the plurality of pores may preferably be from 100 nm to 500 nm, and the pore size may preferably be from 400 nm to 1000 nm.

In the preparation method of the structure having hydrophobic and oleophobic properties of the present invention, the thickness of the hydrophobic diamond-like carbon film or the hydrophilic diamond-like carbon film may preferably be between 1 nm and 500 nm.

The embodiments of the present invention are described by way of specific examples, and those skilled in the art can readily appreciate the other advantages and advantages of the present invention. The present invention may be embodied or applied in various other specific embodiments, and various modifications and changes can be made without departing from the spirit and scope of the invention.

[Example 1]

As shown in FIG. 1A, first, a substrate 11 (for example, a glass substrate or a germanium substrate) is provided, and a patterned photoresist layer 3 is formed on the substrate 11 by photolithography, wherein the patterned photoresist is formed. The layer 3 comprises a plurality of holes 31 arranged in an array, and the holes 31 are about 400 nm to 1000 nm in size, the distance between the holes 31 is about 100 nm to 500 nm, and the thickness of the patterned photoresist layer 3 is about 1 nm to 500 nm. . Next, a hydrophobic diamond-like carbon film 12 having a dot array structure (5% to 30% of atoms) is formed in the plurality of holes 31 of the patterned photoresist layer 3 by physical vapor deposition (for example, sputtering). Percentage fluorine doped diamond film). Next, the patterned photoresist layer 3 is removed to obtain a hydrophobic diamond-like carbon film 12 arranged in an array as shown in FIG. 1B.

Next, as shown in FIG. 1C, a mask 5 (which may be a baffle or a photoresist) is formed on the hydrophobic diamond-like carbon film 12 arranged in the array, and the physical vapor deposition method is used. A hydrophilic diamond-like carbon film 13 (5% to 30% atomic percent oxygen-doped diamond-like carbon film) is formed between the dot array structures of the hydrophobic diamond-like carbon film 12. Finally, the mask 5 is removed to obtain a structure having hydrophobic and oleophobic properties of the present embodiment, as shown in Fig. 1D.

In this embodiment, the physical vapor deposition method may use, for example, a sputtering method or a cathodic arc method, or a chemical vapor deposition method may be used instead of the physical vapor deposition method. The hydrophilic diamond-like carbon film 13 may be an oxygen-doped carbon film, or may be a carbon film doped with nitrogen, helium or hydrogen.

In this embodiment, the substrate 11 may be glass, ceramic, or polymer. For example, the substrate 11 can be a touch panel, an LCD panel, or other display screen, or a car body (such as a car, a locomotive, a bicycle) casing, a handle, and the like.

The surface of the structure having hydrophobic and oleophobic properties completed in this embodiment is flat, not convex. Therefore, the finger can be made to feel good without a rough feeling, and it is not easily peeled off from the substrate due to the flat surface.

In the present embodiment, the material of the patterned photoresist layer 3 is not particularly limited as long as it is a light group material which can be used in the general lithography method. In addition to this, it is also possible to use a prefabricated metal baffle instead of the patterned photoresist layer 3.

In this embodiment, the hydrophobic diamond-like carbon film and the hydrophilic diamond-like carbon film can be exchanged with each other. In detail, the hydrophobic diamond-like carbon film system may have pores, and the hydrophilic diamond-like carbon film system is disposed in the pores, but the hydrophobic and oleophobic effects of the structure formed by this method are not good.

In this embodiment, an intermediate layer (not shown) may be formed on the surface of the substrate 11 before the photoresist layer 3 is patterned. The intermediate layer can be used to increase the adhesion between the substrate 11 and the hydrophilic diamond-like carbon film 13 and the hydrophobic diamond-like carbon film 12. The material of the intermediate layer may be selected from the group consisting of tantalum carbide, aluminum nitride, boron nitride, hydrocarbons, and a mixture thereof (preferably tantalum carbide), and the material of the intermediate layer may preferably include 5%. Up to 40% atomic percent of cesium.

As shown in FIG. 1D, the structure having hydrophobic and oleophobic properties produced in the present embodiment includes: a substrate 11; a hydrophobic diamond-like carbon film 12 having a dot array structure and And a hydrophilic diamond-like carbon film 13 disposed on the substrate 11 and disposed between the dot array structures of the hydrophobic diamond-like carbon film 12.

The structure having hydrophobic and oleophobic properties of the present embodiment comprises a hydrophobic diamond-like carbon film 12 and a hydrophilic diamond-like carbon film 13, which are arranged in a staggered array with holes in a staggered manner. The hydrophobic diamond-like carbon film can achieve a hydrophobic effect, and the hydrophilic diamond-like carbon film can achieve an oleophobic and/or hydrophilic effect, thus making the structure of the present invention both hydrophobic and oleophobic and/or hydrophilic. While the diamond-like carbon film itself has excellent hardness and scratch resistance, the substrate coated with the hydrophobic and hydrophilic diamond-like carbon film of the present invention can have high hardness, scratch resistance, and hydrophobic and oleophobic properties. Therefore, the structure having hydrophobic and oleophobic properties of the present invention can improve the reinforcing structure of the conventional glass substrate to easily adhere to impurities such as oil stains and moisture; the light transmittance and mechanical strength are insufficient; and the anti-etching layer provided is easily peeled off, etc. problem.

[Embodiment 2]

As shown in FIG. 2A, first, a substrate 11 is provided, and a hydrophilic diamond-like carbon film 13 (5% to 30% of atoms) is formed on the substrate 11 by physical vapor deposition (such as cathodic arc method). Percent oxygen doping like carbon film). Then, a patterned photoresist layer 3 is formed on the substrate 11 by photolithography, as shown in FIG. 2B, wherein the patterned photoresist layer 3 includes a plurality of holes 31 arranged in an array, and the holes The size of 31 is about 400 nm to 1000 nm, and the distance between the holes 31 is about 100 nm to 500 nm. Next, as shown in FIG. 2C, a plurality of holes 131 arranged in an array form are formed in the hydrophilic diamond-like carbon film 13 by an etching method (by oxygen or chlorine plasma).

Next, a hydrophobic diamond-like carbon film 12 having a dot array structure (5% to 30% atomic percent fluorine doped diamonds) is formed in the plurality of holes 131 of the hydrophilic diamond-like carbon film 13 by chemical vapor deposition. Carbon film), as shown in Figure 2D. Finally, after the patterned photoresist layer 3 is removed, the structure having the hydrophobic and oleophobic properties of the present embodiment is obtained, as shown in FIG. 2E.

As shown in FIG. 2E, the structure having hydrophobic and oleophobic properties of the present embodiment includes: a substrate 11; a hydrophobic diamond-like carbon film 12 having a dot array structure and disposed on the substrate And a hydrophilic diamond-like carbon film 13 disposed on the substrate and disposed between the dot array structures of the hydrophobic diamond-like carbon film. In this embodiment, the hydrophilic diamond-like carbon film 13 has an array of holes 131 (circular, square or polygonal), and the hydrophobic diamond-like carbon film 12 is disposed in the array of the holes 131, and the holes of the array of holes 131 The pitch is from 100 nm to 500 nm.

In this embodiment, the hydrophobic diamond-like carbon film and the hydrophilic diamond-like carbon film can be exchanged with each other. In detail, the hydrophobic diamond-like carbon film system may have pores, and the hydrophilic diamond-like carbon film system is disposed in the pores, but the hydrophobic and oleophobic effects of the structure formed by this method are not good.

[Example 3]

The manufacturing method of the structure having the hydrophobic and oleophobic properties of the present embodiment is substantially the same as that of the second embodiment, but the difference is that the present embodiment is formed on the hydrophilic diamond-like carbon after forming the patterned photoresist layer 3 as shown in FIG. 2B. The plurality of holes 131 in the film 13 are required to penetrate the hydrophilic diamond-like carbon film 13 itself as shown in Fig. 2C'.

After the plurality of holes 131 are formed, as shown in FIG. 2D′′′′′, a hydrophobic diamond-like carbon film 12 having a dot array structure is formed, and then the patterned photoresist layer 3 is removed, and then the embodiment is obtained. The structure with hydrophobic and oleophobic properties is shown in Figure 2E'.

Although the preparation steps of the present embodiment are different from those of the first embodiment, the structure having the hydrophobic and oleophobic properties obtained in the present embodiment is the same as that of the first embodiment.

[Example 4]

As shown in FIG. 3, the manufacturing method of the structure having the hydrophobic and oleophobic properties of the present embodiment is substantially the same as that of the second embodiment, but the difference is that the present embodiment needs to be preceded by the formation of the hydrophilic diamond-like carbon film 13. An intermediate layer 14 is formed on the surface of the substrate 11. The intermediate layer 14 can be used to increase the adhesion between the substrate 11 and the hydrophilic diamond-like carbon film 13. The material of the intermediate layer 14 may be selected from the group consisting of niobium carbide, aluminum nitride, boron nitride, hydrocarbons, and a mixture thereof (preferably niobium carbide), and the material of the intermediate layer 14 may preferably include 5% to 40% atomic percent of ruthenium.

In summary, the present invention provides a structure having hydrophobic and oleophobic properties and a method for preparing the same. The structure having hydrophobic and oleophobic properties of the present invention comprises a hydrophobic diamond-like carbon film and a hydrophilic diamond-like carbon film, and the two types of drilled carbon films are alternately arranged in a dot array with holes. The hydrophobic diamond-like carbon film can achieve a hydrophobic effect, and the hydrophilic diamond-like carbon film can achieve an oleophobic and/or hydrophilic effect, thus making the structure of the present invention both hydrophobic and oleophobic and/or hydrophilic. While the diamond-like carbon film itself has excellent hardness and scratch resistance, the substrate coated with the hydrophobic and hydrophilic diamond-like carbon film of the present invention can have high hardness, scratch resistance, and hydrophobic and oleophobic properties. Therefore, the structure having hydrophobic and oleophobic properties of the present invention can improve the reinforcing structure of the conventional glass substrate to easily adhere to impurities such as oil stains and moisture; the light transmittance and mechanical strength are insufficient; and the anti-etching layer provided is easily peeled off, etc. problem.

The structure of the present invention having hydrophobic and oleophobic properties has a flat surface rather than a convex or concave hole. Therefore, the finger can be made to feel good without a rough feeling, and it is not easily peeled off from the substrate due to the flat surface.

The structure with hydrophobic and oleophobic characteristics of the invention can be applied to touch panels, liquid crystal display devices, or other electronic products such as display screens, personal digital assistants, cash machines or portable computers, or car bodies (such as automobiles and locomotives). , bicycle) shell, handle, etc., can avoid the substrate itself from the friction or impact force generated by the finger or the stylus, resulting in scratches and wear, and at the same time avoid oil and moisture adhesion, keep Flatness and light transmission of the surface of the substrate.

The above-mentioned embodiments are merely examples for convenience of description, and the scope of the claims is intended to be limited to the above embodiments.

11. . . Substrate

12. . . Hydrophobic diamond-like carbon film

13. . . Hydrophilic diamond-like carbon film

131. . . Hole

14. . . middle layer

3. . . Photoresist layer

31. . . Hole

5. . . Mask

1A-1D are flow diagrams showing the preparation of a structure having hydrophobic and oleophobic properties according to Example 1 of the present invention.

2A-2E are flow diagrams showing the preparation of a structure having hydrophobic and oleophobic properties according to Example 2 of the present invention.

2C'-2E' is a flow chart showing the preparation of a structure having hydrophobic and oleophobic properties according to Example 3 of the present invention.

Fig. 3 is a schematic view showing the structure of the fourth embodiment of the present invention having hydrophobic and oleophobic properties.

11. . . Substrate

12. . . Hydrophobic diamond-like carbon film

13. . . Hydrophilic diamond-like carbon film

Claims (27)

A structure having hydrophobic and oleophobic properties, comprising: a substrate; a hydrophobic diamond-like carbon film having a dot array structure and disposed on the substrate; and a hydrophilic diamond-like carbon film, The system is disposed on the substrate and is located between the dot array structures of the hydrophobic diamond-like carbon film. A structure having hydrophobicity and oleophobic property according to the first aspect of the patent application, wherein the substrate is a glass, a ceramic, or a polymer. The structure having hydrophobicity and oleophobic property according to the first aspect of the patent application, wherein the hydrophobic diamond-like carbon film is a fluorine-doped diamond-like carbon film, and the hydrophobic diamond-like carbon film has hydrophobic characteristics. A structure having hydrophobic and oleophobic properties according to the first aspect of the patent application, wherein the hydrophilic diamond-like carbon film is a carbon film doped with oxygen, nitrogen, helium or hydrogen, and the hydrophilic diamond-like carbon The membrane system has oleophobic properties. A structure having hydrophobic and oleophobic properties as claimed in claim 3 or 4, wherein the dopant is contained in an amount of from 5% to 50% by atomic percent. A structure having hydrophobic and oleophobic properties according to item 5 of the patent application, wherein the content of the dopant is 5% to 30% by atomic percent. The structure having hydrophobicity and oleophobic property according to claim 1, wherein the hydrophilic diamond-like carbon film has a plurality of pores, the hydrophobic diamond-like carbon film is located in the pore, and the hydrophobic diamond is The dot-to-point spacing in the dot array structure of the carbon film is from 100 nm to 500 nm. A structure having hydrophobic and oleophobic properties according to the first aspect of the patent application, wherein the hydrophobic diamond-like carbon film or the hydrophilic diamond-like carbon film has a thickness of between 1 nm and 500 nm. A structure having hydrophobic and oleophobic properties according to claim 1 of the patent application, further comprising an intermediate layer disposed between the substrate and the hydrophobic diamond-like carbon film or the hydrophilic diamond-like carbon film. A structure having hydrophobic and oleophobic properties according to claim 9 wherein the material of the intermediate layer is selected from the group consisting of: tantalum carbide, aluminum nitride, boron nitride, hydrocarbons, and mixtures thereof. group. A structure having hydrophobic and oleophobic properties according to claim 10, wherein the intermediate layer comprises from 5% to 40% by atomic percent of ruthenium. A method for preparing a structure having hydrophobic and oleophobic properties, comprising: (A) providing a substrate; (B) forming a hydrophobic diamond-like carbon film having a dot array structure on the substrate; and (C) A hydrophilic diamond-like carbon film is formed between the dot array structures of the hydrophobic diamond-like carbon film. The method for preparing a structure having hydrophobic and oleophobic properties according to claim 12, wherein the hydrophobic diamond-like carbon film in the step (B) is formed by physical vapor deposition or chemical vapor deposition. The method for preparing a structure having hydrophobic and oleophobic properties according to claim 12, wherein the hydrophilic diamond-like carbon film in the step (C) is formed by physical vapor deposition or chemical vapor deposition. The method for preparing a structure having hydrophobic and oleophobic properties according to claim 12, wherein the hydrophobic diamond-like carbon film is a fluorine-doped carbon film, and the hydrophobic diamond-like carbon film is hydrophobic. characteristic. The method for preparing a structure having hydrophobic and oleophobic properties according to claim 12, wherein the hydrophilic diamond-like carbon film is a carbon-based carbon film doped with oxygen, nitrogen, helium or hydrogen, and the hydrophilicity The diamond-like carbon film system has oleophobic properties. The method for preparing a structure having hydrophobic and oleophobic properties according to claim 12, wherein in the step (B), the distance between the dots in the dot array structure is from 100 nm to 500 nm. A method for preparing a structure having hydrophobic and oleophobic properties according to claim 12, wherein in the step (B), each dot of the dot array structure has a size of 400 nm to 1000 nm. A method for preparing a structure having hydrophobic and oleophobic properties according to claim 12, wherein the hydrophobic diamond-like carbon film or the hydrophilic diamond-like carbon film has a thickness of from 1 nm to 500 nm. A method for preparing a structure having hydrophobic and oleophobic properties, comprising: (A) providing a substrate; (B) forming a hydrophilic diamond-like carbon film on the substrate; (C) forming the hydrophilic diamond-like carbon The surface of the film is formed with a plurality of pores; and (D) a hydrophobic diamond-like carbon film is formed in the plurality of pores of the hydrophilic diamond-like carbon film, and the hydrophobic diamond-like carbon film has a dot-like array structure. The method for preparing a structure having hydrophobic and oleophobic properties according to claim 20, wherein in step (B), the hydrophilic diamond-like carbon film is formed on the base by physical vapor deposition or chemical vapor deposition. And in the step (C), a plurality of holes are formed on the surface of the hydrophilic diamond-like carbon film by a photomask. The method for preparing a structure having hydrophobic and oleophobic properties according to claim 20, wherein the hydrophobic diamond-like carbon film is a fluorine-doped carbon film, and the hydrophobic diamond-like carbon film is hydrophobic. characteristic. The method for preparing a structure having hydrophobic and oleophobic properties according to claim 20, wherein the hydrophilic diamond-like carbon film is a carbon-based carbon film doped with oxygen, nitrogen, helium or hydrogen, and the hydrophilic material The drilled carbon film has oleophobic properties. The method for preparing a structure having hydrophobic and oleophobic properties according to claim 20, wherein in the step (C), the spacing between the plurality of pores is from 100 nm to 500 nm. A method for preparing a structure having hydrophobic and oleophobic properties according to claim 20, wherein the size of the pores in the step (C) is from 400 nm to 1000 nm. The method for preparing a structure having hydrophobic and oleophobic properties according to claim 20, wherein the hydrophobic diamond-like carbon film or the hydrophilic diamond-like carbon film has a thickness of between 1 nm and 500 nm. An electronic product comprising a structure having hydrophobic and oleophobic properties as in claim 1 of the patent application.