TWI399784B - A high pressure discharge lamp, a manufacturing method thereof, and a light irradiation device - Google Patents

Description

High pressure discharge lamp, manufacturing method thereof and light irradiation device

The present invention relates to a high pressure discharge lamp, a method of manufacturing the same, and a light irradiation apparatus including the high pressure discharge lamp.

In the curing treatment of a resin such as an adhesive or a light-emitting treatment such as a printed circuit board, for example, an ultraviolet irradiation device is used, and as the ultraviolet light source of the ultraviolet irradiation device, for example, a high-pressure discharge lamp is used.

As a high-pressure discharge lamp, at least various types are proposed. For example, in Patent Document 1, as shown in FIG. 10, it is revealed that a pair of electrodes 83 are disposed opposite each other inside the glass tube portion 81 sealed at both ends, and mercury is sealed therein. The capillary type high-pressure mercury lamp 80 having the lead terminal 84 having the electrode 83 at the tip end thereof penetrates the sealing portion 82 in an airtight manner and protrudes outward in the axial direction.

Usually, the high-pressure discharge lamp is cooled while the lamp is being lit, but in order to prevent the discharge tube from being damaged and a sufficient cooling effect is to be obtained, the portion around the electrode of the discharge tube is supercooled, whereby the inside of the discharge tube is thereby The end portions do not have the effect of evaporating mercury and failing to obtain sufficient mercury vapor pressure, resulting in a problem of reducing the illuminance.

In such a capillary high pressure mercury lamp 80, the hollow layer 85 of the supercooling prevention means is formed in a portion around the electrode 83 of the glass tube portion 81.

Further, as shown in Fig. 11, between the outer peripheral faces of the glass tube portion 81 The tubular cooling jacket 88 in which the flow path 89 of the cooling water W is formed is disposed, and when the lamp is turned on, the cooling water W flows through the flow path 89 in the axial direction along the wall surface of the glass tube portion 81 to be cooled.

However, by providing the hollow layer 85, the glass tube portion 81 is directly cooled by the cooling water W according to the capillary type high pressure mercury lamp 80, so that a sufficient cooling effect can be obtained, and the periphery of the electrode of the glass tube portion 81 is obtained. In part, the cooling effect is weakened by the hollow layer 85, so that supercooling can be prevented.

Patent Document 1: Japanese Patent No. 2617978

However, according to the configuration as described above, it is possible to prevent the portion located around the electrode of the glass tube portion 81 from being supercooled, but it is difficult to form the hollow layer 85, so that individual differences are likely to occur, and a stable output is obtained. Unable to get the problem.

Further, in the lighting lamp, when the glass tube portion 81 is broken, the mercury sealed in the glass tube portion 81 flows out to the outside through the flow path 89 of the cooling water, for example.

The present invention has been made in accordance with the above circumstances, and a first object is to provide a high-pressure discharge lamp which is stably available for a stable output over a long period of time.

A second object of the present invention is to provide a method for producing a high pressure discharge lamp which can reliably produce a desired performance.

A third object of the present invention is to provide a high pressure discharge lamp comprising the above A light irradiation device that can perform a desired light irradiation process can be surely performed.

The high-pressure discharge lamp of the present invention is characterized in that: inside the inner tube sealed at both ends, a pair of electrodes are disposed opposite to each other, and at least mercury is sealed into a whole rod-shaped discharge tube and an outer tube. In the inner tube, the discharge tube is formed such that at least a part of its outer peripheral surface is disposed in the contact state or the close contact state on the inner peripheral surface of the outer tube, and the outer peripheral surface of the portion located around at least the electrode of the discharge tube and the inner circumference of the outer tube A gap extending toward the entire circumference is formed between the faces.

In the specification of the present invention, the "contact state" refers to a state in which the inner peripheral surface (inner wall) of the outer tube is in point contact or line contact with the outer peripheral surface (outer wall) of the discharge tube, and a state in which a part of the inner surface is in contact with the surface is also included. In addition, the "closed state" refers to a state in which the inner peripheral surface of the outer tube is in contact with the surface on which the outer peripheral surface of the discharge tube is dominant, and is a state in which both the discharge tube and the outer tube are integrated.

In the high-pressure discharge lamp of the present invention, as the outer tube, a discharge tube is used by using an enlarged diameter portion at both ends or as a straight tube. By forming a small diameter at both end portions around the electrode than at the center portion, a configuration for forming a void can be formed.

In the method for producing a high pressure discharge lamp according to the present invention, the discharge tube is expanded by heating in a state in which the discharge tube is inserted into the outer tube, and is disposed on the outer periphery of a portion located around at least the electrode of the discharge tube. a state in which a gap extending toward the entire circumference is formed between the surface and the inner peripheral surface of the outer tube , close connection between the discharge tube and the outer tube.

A light irradiation device according to the present invention is characterized by comprising the above-described high-pressure discharge lamp, and a cooling water edge for cooling the high-pressure discharge lamp formed when the lamp is lit A flow path forming member of the flow path through which the outer tube wall surface flows.

According to the high-pressure discharge lamp of the present invention, the outer tube is formed in the outer periphery of the discharge tube in a contact or close state in a state in which a gap extending toward the entire circumference is formed between the portion located at least around the electrode of the discharge tube. In the double tube structure of the surface, when the lamp is lit, for example, cooling water flows along the wall surface of the outer tube, and the portion around the electrode is weakened by the presence of the void (air layer). Therefore, the portion in close contact with the outer tube of the discharge tube is configured to prevent damage of the discharge tube by sufficiently cooling the cooling water. It is possible to surely prevent the portion located around the electrode from being overcooled without causing a decrease in illuminance caused by the mercury not evaporating, so that a stable output can be surely obtained for a long period of time.

Further, since the double tube structure is used, when the lamp is turned on, the mercury can be prevented from flowing out to the outside even if the discharge tube is broken.

According to the method for producing a high-pressure discharge lamp of the present invention, for example, a hollow layer is not required to be formed in a special process such as a discharge tube, and the double-tube structure is constructed so that a predetermined position gap is formed between the outer tube and the inner tube. It is possible to heat both of them, so that it is extremely easy to manufacture with desired properties.

According to the method for producing a high-pressure discharge lamp of the present invention, the high-pressure discharge lamp includes the ultraviolet light emitted from the high-pressure discharge lamp, and the object to be processed (workpiece) can be stably irradiated with sufficient illuminance. The desired ultraviolet irradiation treatment is performed.

(high voltage discharge tube)

The high-pressure discharge lamp of the present invention is a double-tube structure composed of an inner tube and an outer tube constituting a discharge tube, and a space extending toward the entire circumference is formed on an outer peripheral surface of a portion located around the electrode of the discharge tube, and the outer tube Between the inner peripheral surfaces, a structure for preventing overcooling is formed.

<First embodiment>

The high-pressure discharge lamp according to the first embodiment is a component that is formed between the outer peripheral surface of the portion around the electrode of the discharge tube and the inner peripheral surface of the outer tube by using a specific component as the outer tube. . Hereinafter, the configuration of the high pressure discharge lamp according to the first embodiment will be specifically described.

1 is a schematic cross-sectional view showing a configuration of an example of a high pressure discharge lamp according to a first embodiment of the present invention, and FIG. 2 is an enlarged cross-sectional view showing a main part of the high pressure discharge lamp shown in Fig. 1. Figure.

In the high pressure discharge lamp 10, for example, a pair of rod-shaped electrodes 16 made of tungsten are disposed inside the straight tubular inner tube 12 formed of, for example, quartz glass sealed at both ends, and the electrodes 16 are airtightly buried. The metal foil 17 formed of, for example, molybdenum formed in the rod-shaped sealing portion 13 of the inner tube 12 is electrically connected to the outer lead 18 extending outward from the outer end of the sealing portion 13 in the axial direction. The rod-shaped discharge tube 11 and the discharge tube 11 are disposed inside, for example, an outer tube 20 made of quartz glass.

The sealing portion 13 of the discharge tube 11 is formed by, for example, a shrinkage sealing method in which both ends of the tubular body of the constituent material of the inner portion 12 are reduced in a molten state, and is formed as a central portion 14 of the discharge tube 11 ( Equivalent to hair Part of the light field) also trails.

The high pressure discharge lamp 10 is, for example, a capillary type high pressure mercury lamp which is called a "capillary lamp". For example, mercury of 1 mg/cm ³ or more is sealed in the inside of the discharge tube 11, and argon gas or the like is sealed in an appropriate amount. Rare gas. Further, for example, light containing ultraviolet rays having a wavelength of 350 to 450 nm is emitted.

The outer tube 20 is, for example, a tubular member having the enlarged diameter portion 22 larger than the inner diameter of the central portion 21 at both end portions, and each of the enlarged diameter portions 22 is formed in the inner space (discharge space) of the discharge tube 11 The portion around the inner electrode portion. In other words, it corresponds to the position of the end portion of the electrode portion in the axial direction (hereinafter referred to as "supercooling preventing portion 15"). Therefore, the outer tube 20 is on the outer peripheral surface of the supercooling preventing portion 15 of the discharge tube 11. In a state in which a part of the outer circumferential surface of the sealing portion 13 of the supercooling preventing portion 15 is continuous with the inner circumferential surface of the outer tube 20, the inner circumferential surface of the central portion 21 is in contact with each other. The outer peripheral surface of the central portion 14 of the discharge tube 11 is provided.

The discharge tube 11 and the outer tube 20 are fixed by the adhesive 26 via the base 25 provided on the outer lead 18, and an air layer or an appropriate gas is formed in the gap between the discharge tube 11 and the outer tube 20. Gas layer.

The size of the gap 30, that is, the difference between the inner diameter L2 of the enlarged diameter portion 22 of the outer tube 20 and the outer diameter L1 of the supercooling preventing portion 15 of the discharge tube 11 is preferably 2 mm or more, whereby When the lighting is cooled, the supercooling preventing portion 15 of the discharge tube 11 surely prevents the supercooling.

The adhesive 26 can be an inorganic or organic binder. In particular, an inorganic binder (for example, Smith Schneider S (Japan Asahi Chemical Industry Co., Ltd.)) is capable of high-strength fixing. Further, in the adhesive of only one of the sealing portions, the amount of expansion of the discharge tube and the outer tube can be made different, and the amount of expansion can be prevented from being damaged. Further, an inorganic binder may be used for one of the sealing portions, and an organic binder (for example, a polyoxygen oxide binder) may be used for the other sealing portion. Since the organic adhesive is more flexible than the inorganic adhesive, when the discharge tube is expanded, it can be absorbed by the flexibility of the organic adhesive.

This high pressure discharge lamp 10 can be produced as follows.

First, for example, an appropriate amount of mercury is sealed inside the tubular body, and the electrode structures formed by electrically connecting the rod electrodes 16 and the outer leads 18 via the metal foil 17 are inserted from both sides of the tube body. In the state in which the electrode 16 is disposed, the discharge tube 11 is produced by sealing both end portions of the tube body by, for example, a shrinkage sealing method.

On the other hand, an inner diameter having a size equivalent to the outer diameter of the discharge tube 11 thus obtained is prepared, and a circle having a length corresponding to the length of the central portion 14 of the discharge tube 11 (corresponding to the length of the portion in the light-emitting region) is prepared. The tubular main body and the two enlarged diameter portion forming tubular bodies which are larger than the inner diameter of each of the main bodies are connected to the enlarged diameter portion forming tubular body at both ends of the main body, and are disposed in the discharge tube 11 In the internal state, the outer tube 20 having the enlarged diameter portion 22 is formed in a portion corresponding to at least the supercooling preventing portion 15 of the discharge tube 11.

Thereafter, the discharge tube 11 is fitted into the outer tube 20 to obtain The high pressure discharge lamp 10 constructed as described above.

In the configuration example of the high pressure discharge lamp 10, the inner diameter of the central portion 14 of the discharge tube 11 is 3.4 mm, the outer diameter of the central portion of the discharge tube 11 is 7.4 mm, the outer diameter of the sealing portion 13 is 6 mm, the entire length of the discharge tube 11 is 150 mm, the distance between the electrodes is 100 mm, the length of the electrode portion in the discharge space is 3 mm, the sealing amount of mercury is 44 mg//ccm ³ , and the outer diameter of the central portion 21 of the outer tube 20 is 9.5 mm, the inner diameter of the central portion of the outer tube 20 is 7.4 mm, the length of the enlarged diameter portion 22 is 60 mm, and the inner diameter of the enlarged diameter portion 22 is 11 mm, the size of the gap between the supercooling preventing portion of the discharge tube and the outer tube was 3.6 mm.

The high voltage discharge lamp 10 at the time of lighting the lamp has a rated voltage of 2000 V, a rated current of 1.25 A, and a lamp power of 2500 W.

The high-pressure discharge lamp 10 is, for example, a high-output person whose wall load is 100 w/cm ² or more when the lamp is turned on, and when the lamp is turned on, for example, the entire high-pressure discharge lamp 10 is cooled by the cooling water.

In the high-pressure discharge lamp 10 having the above configuration, the outer tube 20 is formed with a gap 30 extending toward the entire circumference between the outer circumferential surface of the supercooling preventing portion 15 of the discharge tube 11 and the outer circumferential surface of the continuous sealing portion 13. By the double tube structure which is disposed on the outer peripheral surface of the central portion 14 of the discharge tube 11 in a contact state, when the lamp is turned on, the high pressure discharge lamp 10 is cooled by flowing, for example, cooling water along the wall surface of the outer tube 20. The cooling prevention portion 15 attenuates the cooling effect by the presence of the void 30 (air layer). Therefore, the central portion that is in contact with the outer tube 20 of the discharge tube 11 is configured to prevent the discharge tube 11 from being damaged by the cooling water being sufficiently cooled, and is surely prevented. When the supercooling prevention portion 15 is supercooled, the illuminance due to the non-evaporation of mercury does not decrease, and a stable output can be surely obtained for a long period of time.

Here, in the high pressure discharge lamp 10, the outer peripheral surface of the central portion 14 of the discharge tube 11 is in contact with the inner peripheral surface of the outer tube 20 (in a state of point contact or line contact), and each such as quartz glass is used. The discharge tube 11 and the outer tube 20 are formed to have fine irregularities on the surface thereof. Therefore, in fact, a very small gap is between the discharge tube 11 and the outer tube 20, but for example, there is a gap of up to about 100 μm. A sufficient cooling effect can also be obtained.

Further, since the double tube structure is used, when the lamp is turned on, the mercury can be prevented from flowing out to the outside even if the discharge tube 11 is broken.

The high pressure discharge lamp 10 formed by such a supercooling prevention structure is, for example, a special process in which a hollow layer is not required to be formed in a discharge tube or the like, and is disposed by inserting the discharge tube 11 into the outer tube 20 formed by the enlarged diameter portion 22. It can be produced as a double pipe structure at a predetermined position, and it is easy to form the enlarged diameter portion 22 by processing a pipe body having a uniform inner diameter dimension in the pipe axis direction, and thus it is easy and sure to manufacture the same. Expected performance.

As described above, an example of the high pressure discharge lamp according to the first embodiment of the present invention will be described. However, in the high pressure discharge lamp of the present invention, higher cooling efficiency can be obtained, and thus the outer peripheral surface of the central portion of the discharge tube and the outer portion are provided. The inner peripheral surface of the tube is preferably configured to be in an intimate state. That is, by avoiding the state in which the outer peripheral surface existing in the central portion of the discharge tube and the inner peripheral surface of the outer tube are only in contact A very small gap. It is possible to prevent heat transfer from the discharge tube at the time of lighting the lamp by the gap, whereby higher cooling efficiency can be obtained.

Such a high pressure discharge lamp can be produced, for example, as follows.

As shown in Fig. 3(a), the discharge tube 11 is prepared in the same manner as described above, and has an inner diameter which is slightly larger than the outer diameter of the discharge tube 11, and has a central portion 14 corresponding to the discharge tube 11. a cylindrical main body having a length and two tube portions for forming an enlarged diameter portion having a larger inner diameter than the main body, and a tube for forming a diameter-enlarged portion is connected to both ends of the main body to form a discharge tube The outer tube 20 having the enlarged diameter portion 22 at a portion corresponding to at least the supercooling preventing portion 15 of the discharge tube 11 is disposed in the internal state.

Thereafter, as shown in Fig. 3(b), the discharge tube 11 is inserted and disposed inside the outer tube 20. In this state, as shown in FIG. 3(c), a small annular gap 35 exists between the outer circumferential surface of the central portion 14 of the discharge tube 11 and the inner circumferential surface of the outer tube 20.

Further, in a state where the discharge tube 11 is placed in the outer tube 20, for example, heating is performed in an electric furnace or the like, as shown in the third (d), the outer peripheral surface of the central portion 14 of the discharge tube 11 is closely adhered to the outer surface. The inner circumferential surface of the tube 20. In other words, the inner tube 12 and the outer tube 20 of the discharge tube 11 are made of, for example, quartz glass. However, it is generally known that the quartz glass is slightly softened when it is heated at a temperature of, for example, about 1,250 ° C. . In the discharge tube 11, the mercury is sealed, and the pressure in the discharge tube 11 is raised by evaporating the mercury by heating, so that the discharge tube 11 is expanded to be in contact with the inner wall of the outer tube 20. Further, the outer tube 20 is deformed by the expansion of the discharge tube 11, whereby the outer peripheral surface and the outer tube of the central portion 14 of the discharge tube 11 are made When the inner peripheral surface of 20 is in a close contact state, both of the discharge tube 11 and the outer tube 20 are integrated.

After the end of the heat treatment, the high pressure discharge lamp is cooled, but the discharge tube 11 is sealed with mercury, so that the internal pressure of the discharge tube 11 is higher than atmospheric pressure, and the temperature of the discharge tube 11 is converged until the evaporation of mercury e. At about 360 ° C, the quartz glass is sufficiently hard, so that it is cooled by the high pressure discharge lamp, the discharge tube 11 does not shrink, and the close state of the discharge tube 11 and the outer tube 20 is maintained.

In the above manufacturing method, the heating holding time is set in accordance with the size difference between the inner diameter of the outer tube 20 and the outer diameter of the discharge tube 11 (the size of the annular gap 35), specifically, the heating becomes larger as the size becomes larger. Keep the time set for a long time.

For example, when the inner tube 12 has a tube thickness of 2 mm and the outer tube 20 has a tube thickness of 1 mm and the size difference is 0.1 mm, for example, at a temperature of 1,250 ° C, the heating holding time is set to about 3.5 hours.

Further, the heat treatment is not limited to the method according to the electric furnace, and may be performed by heating by a burner that requires a long period of time.

<Second embodiment>

In the high-pressure discharge lamp of the second embodiment, for example, a straight tubular shape having an inner diameter dimension that is uniform in the axial direction is used, and a supercooling prevention portion located around the electrode is used as the discharge tube than the central portion. The rod of the small diameter is formed by forming a gap extending toward the entire circumference between the outer peripheral surface of at least the supercooling preventing portion of the discharge tube and the inner peripheral surface of the outer tube. Constitute. Hereinafter, the configuration of the high pressure discharge lamp according to the second embodiment will be specifically described.

Fig. 4 is a cross-sectional view showing a schematic configuration of an example of a high pressure discharge lamp according to a second embodiment of the present invention, and Fig. 5 is an enlarged cross-sectional view showing a main part of the high pressure discharge lamp shown in Fig. 4. Figure. In the fourth and fifth aspects, the same components as those of the high-pressure discharge lamp according to the first embodiment described above are denoted by the same reference numerals, and the description thereof is omitted.

The high-pressure discharge lamp 40 is provided in the direction of the axial direction of the sealing portion 43 which is continuous with the outer diameter L3 which is smaller than the outer dimension L4 of the central portion 44 except for the supercooling preventing portion 45 around the electrode portion located in the discharge space. The discharge tube 41 having the same configuration as that of the above-described first embodiment, and the discharge tube 41 are disposed inside, except that the inner tube 42 having the reduced diameter portion 46 having a small outer diameter is formed. The outer diameter of the outer tube 50 which is uniform in the tube axis direction and which is uniform in the tube axis direction, the outer peripheral surface of the sealing portion 43 which is continuous with the supercooling preventing portion 45, and the outer tube 50 of the outer tube 50 A gap 30 extending toward the entire circumference is formed between the inner peripheral surfaces.

The high pressure discharge lamp of the second embodiment can be produced by the same method as the high pressure discharge lamp of the first embodiment.

According to the high-pressure discharge lamp 40 having the above-described configuration, the same effect as that of the first embodiment, that is, when the lamp is turned on, the high-pressure discharge lamp 40 is cooled by flowing, for example, cooling water along the wall surface of the outer tube 50. The supercooling preventing portion 45 is weakened by the presence of the void 30 (air layer) . Therefore, the central portion 44 that is in contact with or in close contact with the outer tube 50 of the discharge tube 41 is configured to prevent the discharge tube 41 from being damaged by the cooling water being sufficiently cooled, and it is possible to surely prevent the supercooling prevention portion 45 from being supercooled. In the case of the part, as a result, there is no decrease in the illuminance due to the evaporation of mercury, and a stable output can be surely obtained for a long period of time.

Moreover, since it is a double pipe structure, when a lamp is lighted, even if the discharge tube 41 is damaged, the mercury can be prevented from flowing out to the outside.

Further, the discharge tube 41 can be easily formed by making the supercooling preventing portion 45 smaller than the central portion 44. Therefore, it is possible to easily and surely produce a desired performance.

In the high pressure discharge lamp 40 of the second embodiment, when the central portion 44 of the discharge tube 41 is also placed in contact with the inner peripheral surface of the outer tube 50, a sufficient cooling effect at the time of lighting the lamp can be obtained. However, the central portion 44 of the discharge tube 41 is configured to be disposed in close contact with the inner peripheral surface of the outer tube 50, whereby a higher cooling effect can be obtained.

[Light irradiation device]

The light irradiation device of the present invention includes the above-described high-pressure discharge lamp, and is provided with a flow path forming member that partitions a flow path through which the cooling water of the cooling lamp flows along the wall surface of the outer tube when the lamp is turned on.

Fig. 6 is a cross-sectional view showing a schematic configuration of an example of a light irradiation device according to the present invention, and Fig. 7 is a cross-sectional view taken along line B-B of Fig. 6.

In the light irradiation device, for example, the high pressure discharge lamp 10 of the first embodiment described above is provided as a light source, and the glass of the high pressure discharge lamp 10 is passed through the inside. The cylindrical cooling of the flow path forming member which is formed along the tube axis of the high pressure discharge lamp 10 and has a cooling water flow path 65 through which the cooling water W flows between the outer peripheral surface of the high pressure discharge lamp 10 is provided. The sleeve 60 and the internal space disposed at both ends of the high pressure discharge lamp 10 and the cooling jacket 60 are connected to the cooling water supply flow path forming member 61 and the cooling water via the cooling water flow path 65 between the high pressure discharge lamp 10 and the cooling jacket 60. The cooling mechanism constituted by the flow path forming member 62 is discharged.

The cooling water supply flow path forming member 61 and the cooling water discharge flow path forming member 62 are generally L-shaped tubular, and the high pressure discharge lamp 10 and the cooling jacket 60 are connected in a posture in which, for example, the tube axis extends in the horizontal direction. The outer peripheral surface of the cooling jacket 60 is held and fixed by the lock portion 63 on the inner side in the axial direction, for example, via an O-ring (not shown), and the lock portion 64 such as an O-ring (for example, by the outer side of the direction) As shown in the figure, the outer peripheral surface of the high pressure discharge lamp 10 is kept fixed.

The cooling jacket 60 is a material that transmits ultraviolet rays emitted from the high pressure discharge lamp 10, and is made of, for example, quartz glass.

In the light irradiation direction (the lower direction in FIGS. 6 and 7) on the back side of the high pressure discharge lamp 10, for example, a grooved mirror 70 having a parabolic reflecting surface 71 in cross section, at its first focus and high pressure The center of the discharge lamp 10 (the straight line connecting the centers of the pair of electrodes 16 of the high pressure discharge lamp 10) is arranged to extend along the high pressure discharge lamp 10, and the light emitted from the high pressure discharge lamp 10 is directly or borrowed. The reflecting mirror 70 is reflected as parallel light and is irradiated onto the liquid crystal surface coated with the sensitizer such as a photoresist or the like placed on the workpiece stage 76 via the mask M held by the mask stage 75. A workpiece 77 such as a board or a semiconductor element. Here, the reflecting surface 71 is formed by a multilayer film formed by alternately vapor-depositing a different reflective layer such as titanium dioxide or cerium oxide.

In the above-described light irradiation device, when the high pressure discharge lamp 10 is turned on, the cooling water W is constituted by an appropriate cooling water supply means (pump) (not shown). Here, the cooling of the high pressure discharge lamp 10 is achieved by circulating cooling water W at a flow rate of, for example, 5 liters/min.

The supplied cooling water W is in the cooling water flow path 65 formed between the high pressure discharge lamp 10 and the cooling jacket 60, along the wall surface of the high pressure discharge lamp 10, specifically along the outer peripheral surface of the outer tube 20 toward the axis After the entire direction of the high pressure discharge lamp 10 is cooled, the cooling water discharge flow path forming member 62 is discharged.

Therefore, according to the above-described light irradiation device, when the lamp is lit, the high-pressure discharge lamp 10 is selectively cooled, that is, the supercooling preventing portion 15 of the discharge tube 11 is weakened by the presence of the gap 30 (air layer). Further, since the central portion 14 which is in contact with the outer tube 20 of the discharge tube 11 is sufficiently cooled by the cooling water W, the damage of the discharge tube 11 can be prevented, and the supercooling preventing portion 15 can be surely prevented from being prevented. Supercooling Since the illuminance of the unvaporized invention due to mercury is not lowered, a stable output can be surely obtained for a long period of time, so that the desired ultraviolet irradiation treatment can be surely performed.

Further, since the high pressure discharge lamp 10 has a double pipe structure, even when the lamp is lit, even if the discharge tube 11 is broken, the mercury can be prevented from flowing out to the outside through the circulation flow path of the cooling water W. Preventable The light irradiation device is contaminated.

The embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments, and various modifications can be made.

For example, in the high pressure discharge lamp according to the first embodiment, the enlarged diameter portion of the outer tube is formed on the outer peripheral surface of the supercooling preventing portion located around the electrode portion of the discharge tube that protrudes at least in the inner space, and the inner circumference of the outer tube. A gap extending toward the entire circumference may be formed between the surfaces. For example, as shown in FIG. 8, the portion which is located on the inner side in the axial direction of the supercooling preventing portion 15 of the discharge tube 11 is formed to extend outward in the axial direction. The enlarged diameter portion 22 may be formed, and a portion of the region between the outer peripheral surface of the supercooling preventing portion 15 including the discharge tube 11 and the inner peripheral surface of the outer tube 20 may be formed with a gap 30 extending toward the entire surface.

Further, the shape of the outer tube is not particularly limited, and an inner shape having an outer shape depending on the outer shape of the discharge tube is used. For example, when the outer shape of the discharge tube is elliptical, the inner shape of the outer tube is The elliptical shape of the discharge tube can be processed (formed), and the outer peripheral surface of the central portion of the discharge tube and the inner peripheral surface of the outer tube can be adhered to each other in a state in which the discharge tube is disposed inside by the above method.

Further, the present invention is not limited to a capillary type lamp, and can be applied to a high-output high-pressure discharge lamp such as a metal halide lamp that needs to be cooled when the lamp is turned on. In the case of a metal halide lamp, for example, A metal halide such as iron iodide or a rare gas such as argon gas is enclosed in the discharge tube together with mercury.

Moreover, the sealing portion of the high pressure discharge lamp of the above embodiment is a quartz The tube body of the glass is made into a clamping method in which it is crushed in a molten state, or is directly entangled in the heated intermediate glass (glass of an intermediate linear expansion ratio of the electrode and the quartz glass) on the outer periphery of the pole, and is deposited. It is also possible to use a gradual closure method for sealing the quartz glass, that is, it is not limited.

Further, as shown in Fig. 9, the sealing portion 13A is a case where the high pressure discharge lamp 10 is not narrowed in the direction of the tube axis in the direction of the tube axis (including the case of expansion), but in this case, the first In the configuration of the embodiment, the outer diameter of the enlarged diameter portion 22 of the outer tube 22 is larger than the maximum outer diameter L5 of the sealing portion 13A. On the other hand, a gap 30 extending toward the entire circumference is formed between the outer peripheral surface of the supercooling preventing portion 15 of the discharge tube 11 and the inner peripheral surface of the outer tube 20, whereby a desired supercooling preventing portion can be formed. .

Further, the light irradiation device of the present invention includes the high-pressure discharge lamp of the present invention, and if the cooling mechanism for cooling the cooling water of the high-pressure discharge lamp is provided when the lamp is turned on, the specific configuration of the other constituent members is not Specially limited.

For example, the mirror is a desired light characteristic for the purpose of processing, specifically as a function of illuminating the workpiece by parallel light, or is selected by concentrating light to be irradiated to the workpiece, and for example, an elliptical reflection may be used for the section. The groove of the face. At this time, the high-pressure discharge lamp is disposed at a position where the center coincides with the first focus of the mirror, so that the light from the high-pressure discharge lamp is concentrated at the position of the second focus of the mirror.

10,40‧‧‧High pressure discharge lamp

11,41‧‧‧Discharge tube

12,42‧‧‧Inside

13,13A, 43‧‧‧ Sealing Department

14,44‧‧‧Central Department

15,45‧‧‧Overcooling prevention section

16‧‧‧Electrode

17‧‧‧metal foil

18‧‧‧External leads

20,50‧‧‧External management

21‧‧‧Central Department

22‧‧‧Extended section

25‧‧‧Base

26‧‧‧Adhesive

30‧‧‧ gap

35‧‧‧ annular gap

46‧‧‧Reducing section

60‧‧‧ Cooling sleeve

61‧‧‧Cooling water supply flow path forming member

62‧‧‧Cooling discharge flow path forming member

63,64‧‧‧Locking

65‧‧‧Cooling water flow path

W‧‧‧Cooling water

70‧‧‧Mirror

71‧‧‧reflecting surface

75‧‧‧ Covering platform

M‧‧‧ mask

76‧‧‧Workpiece platform

77‧‧‧ work

80‧‧‧High pressure mercury lamp

81‧‧‧ Glass Tube Department

82‧‧‧ Sealing Department

83‧‧‧Electrode

84‧‧‧Lead terminal

85‧‧‧ hollow layer

88‧‧‧Cooling sleeve

89‧‧‧Flow

Fig. 1 is a cross-sectional view showing a schematic configuration of an example of a high pressure discharge lamp according to a first embodiment of the present invention.

Fig. 2 is an enlarged cross-sectional view showing a main part of the high pressure discharge lamp shown in Fig. 1.

Fig. 3 is a view for explaining a method of manufacturing the high pressure discharge lamp shown in Fig. 1. (a) is a cross-sectional view for explaining the configuration of the outer tube and the discharge tube, and (b) is for showing the outside. A cross-sectional view for explaining a state in which a discharge tube is disposed in a tube, (c) is a cross-sectional view taken along line A-A of (b), and (d) is a view showing an outer peripheral surface of the discharge tube by heat treatment. A cross-sectional view of the cut portion in the same state as (c) in which the inner peripheral surface of the tube is in close contact with each other.

Fig. 4 is a cross-sectional view showing a schematic configuration of an example of a high pressure discharge lamp according to a second embodiment of the present invention.

Fig. 5 is an enlarged cross-sectional view showing the main part of the high pressure discharge lamp shown in Fig. 4.

Fig. 6 is a cross-sectional view showing a schematic configuration of an example of a light irradiation device according to the present invention.

Fig. 7 is a sectional view taken along line B-B of Fig. 6.

Fig. 8 is a cross-sectional view showing the main part of another configuration example of the high pressure discharge lamp of the present invention.

Fig. 9 is a cross-sectional view showing the main part of another configuration example of the high pressure discharge lamp of the present invention.

FIG. 10 is a cross-sectional view showing a schematic configuration of an example of a conventional high-pressure discharge lamp.

Figure 11 is a view showing the high pressure discharge lamp shown in Figure 10 A description of the state of use is provided in a sectional view.

10‧‧‧High pressure discharge lamp

11‧‧‧Discharge tube

12‧‧‧Inside

13‧‧‧ Sealing Department

14‧‧‧Central Department

15‧‧‧Overcooling prevention section

16‧‧‧Electrode

17‧‧‧metal foil

18‧‧‧External leads

20‧‧‧External management

21‧‧‧Central Department

22‧‧‧Extended section

25‧‧‧Base

26‧‧‧Adhesive

30‧‧‧ gap

Claims (6)

A high-pressure discharge lamp characterized in that: a pair of electrodes are disposed opposite each other in an inner tube sealed at both ends, and at least mercury is sealed into a whole rod-shaped discharge tube, and the discharge tube is disposed In the inner tube, the discharge tube has a double tube structure in which the discharge tube is disposed in the inner peripheral surface of the central portion of the outer tube in a contact state or a close contact state in at least a part of the outer peripheral surface of the central portion, and is disposed in the discharge. At least the gap extending toward the entire circumference is formed between the outer peripheral surface of the both end portions around the electrode and the inner peripheral surface of the both end portions of the outer tube. The high-pressure discharge lamp according to claim 1, wherein the outer tube has an enlarged diameter portion at both end portions, and a gap is formed by the enlarged diameter portion. The high-pressure discharge lamp according to claim 1, wherein the outer tube is a straight tube, and the discharge tube has a small diameter at both end portions around the electrode than the central portion, whereby a gap is formed. The high-pressure discharge lamp according to claim 1, wherein the discharge tube and the outer tube are fixed by an adhesive. A method of manufacturing a high-pressure discharge lamp, characterized in that: in a state in which a discharge tube is inserted into an outer tube, the discharge tube is expanded by heating, and the outer circumference of both end portions around at least the electrode of the discharge tube is expanded In a state in which a gap extending toward the entire circumference is formed between the surface and the inner peripheral surface of the both end portions of the outer tube, the outer peripheral surface of the central portion of the discharge tube and the outer peripheral surface of the central portion of the outer tube are in close contact with each other. A light irradiation device characterized by: The high-pressure discharge lamp according to any one of the items 1 to 3, wherein the flow of the cooling water that cools the high-pressure discharge lamp while flowing the lamp along the outer tube wall surface is formed. The road forms a member.