TWI388043B - Circuit board and method thereof - Google Patents

Circuit board and method thereof Download PDF

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TWI388043B
TWI388043B TW97148834A TW97148834A TWI388043B TW I388043 B TWI388043 B TW I388043B TW 97148834 A TW97148834 A TW 97148834A TW 97148834 A TW97148834 A TW 97148834A TW I388043 B TWI388043 B TW I388043B
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layer
core
circuit
dielectric
material layer
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TW97148834A
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TW201023312A (en
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Chen Chuan Chang
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Unimicron Technology Corp
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Description

線路板及其製作方法Circuit board and manufacturing method thereof

本發明是有關於一種線路板及其製作方法,且特別是有關於一種具有凹槽的線路板及其製作方法。The present invention relates to a circuit board and a method of fabricating the same, and more particularly to a circuit board having a recess and a method of fabricating the same.

由於市場對於電子產品有輕薄短小且攜帶方便的需求,因此電子產品中的電子元件與線路板的組裝厚度將朝向薄型化的方向發展。Due to the market demand for electronic products that are light, thin, and portable, the assembly thickness of electronic components and circuit boards in electronic products will be toward a thinner direction.

習知技術是藉由在線路板上形成一凹槽並將電子元件(如晶片封裝結構)配置於凹槽中,來減少電子元件與線路板的組裝厚度。圖1繪示習知之線路板的剖面圖。請參照圖1,線路板100具有一核心層110以及分別配置於核心層110之上下兩側的線路結構120與線路結構130,其中核心層110具有一核心介電層112與分別配置於核心介電層112之上下兩側的二線路層114、116。凹槽R1貫穿線路結構120與核心介電層112並暴露出線路層116。The conventional technique reduces the assembly thickness of the electronic component and the wiring board by forming a recess in the wiring board and disposing an electronic component such as a chip package structure in the recess. 1 is a cross-sectional view of a conventional circuit board. Referring to FIG. 1 , the circuit board 100 has a core layer 110 and a line structure 120 and a line structure 130 respectively disposed on the upper and lower sides of the core layer 110. The core layer 110 has a core dielectric layer 112 and is respectively disposed on the core layer. Two circuit layers 114, 116 on the upper and lower sides of the electrical layer 112. The recess R1 extends through the wiring structure 120 and the core dielectric layer 112 and exposes the wiring layer 116.

由於習知的線路板100的製程是從核心層110的上下兩側進行增層,以形成線路結構120與線路結構130,然後,移除部分的線路結構120與部分的核心介電層112以暴露出線路層116。因此,線路層116是內埋於線路結構130的介電層132中。Since the process of the conventional circuit board 100 is layered from the upper and lower sides of the core layer 110 to form the line structure 120 and the line structure 130, then part of the line structure 120 and part of the core dielectric layer 112 are removed. The circuit layer 116 is exposed. Therefore, the wiring layer 116 is buried in the dielectric layer 132 of the wiring structure 130.

本發明提供一種線路板,具有相互堆疊的二核心層。The present invention provides a wiring board having two core layers stacked on each other.

本發明提供一種線路板的製作方法,可製得一具有相互堆疊的二核心層的線路板。The invention provides a method for manufacturing a circuit board, which can produce a circuit board having two core layers stacked on each other.

本發明提出一種線路板,其具有一凹槽,線路板包括一第一核心層、一第二核心層與一中央介電層。第一核心層包括一核心介電層與一核心線路層,核心線路層配置於核心介電層上。第二核心層配置於第一核心層上。中央介電層配置於第一核心層與第二核心層之間。凹槽貫穿第二核心層與中央介電層並暴露出部分核心線路層。The invention provides a circuit board having a recess, the circuit board comprising a first core layer, a second core layer and a central dielectric layer. The first core layer includes a core dielectric layer and a core circuit layer, and the core circuit layer is disposed on the core dielectric layer. The second core layer is disposed on the first core layer. The central dielectric layer is disposed between the first core layer and the second core layer. The recess extends through the second core layer and the central dielectric layer and exposes a portion of the core wiring layer.

在本發明之一實施例中,核心線路層突出於核心介電層的表面。In one embodiment of the invention, the core circuit layer protrudes from the surface of the core dielectric layer.

在本發明之一實施例中,線路板更包括一第一線路結構與一第二線路結構。第一線路結構配置於第一核心層之遠離中央介電層的一側。第二線路結構配置於第二核心層之遠離中央介電層的一側,且凹槽貫穿第二線路結構。In an embodiment of the invention, the circuit board further includes a first line structure and a second line structure. The first line structure is disposed on a side of the first core layer away from the central dielectric layer. The second line structure is disposed on a side of the second core layer away from the central dielectric layer, and the groove extends through the second line structure.

在本發明之一實施例中,第一線路結構包括一第一介電層與一第一線路層,第一介電層配置於第一核心層上,第一線路層配置於第一介電層上。In an embodiment of the invention, the first circuit structure includes a first dielectric layer and a first circuit layer, the first dielectric layer is disposed on the first core layer, and the first circuit layer is disposed on the first dielectric layer. On the floor.

在本發明之一實施例中,第二線路結構包括一第二介電層與一第二線路層,第二介電層配置於第二核心層上,第二線路層配置於第二介電層上。In an embodiment of the invention, the second circuit structure includes a second dielectric layer and a second circuit layer, the second dielectric layer is disposed on the second core layer, and the second circuit layer is disposed on the second dielectric layer. On the floor.

在本發明之一實施例中,核心線路層具有一雷射阻擋圖案,雷射阻擋圖案位於核心介電層之被凹槽所暴露出的部分的邊緣上。In one embodiment of the invention, the core circuit layer has a laser blocking pattern on the edge of the portion of the core dielectric layer that is exposed by the recess.

在本發明之一實施例中,中央介電層覆蓋一部分的雷射阻擋圖案,凹槽暴露出另一部分的雷射阻擋圖案。In one embodiment of the invention, the central dielectric layer covers a portion of the laser blocking pattern and the recess exposes another portion of the laser blocking pattern.

本發明提出一種線路板的製作方法如下所述。首先,提供一第一核心層、一第二核心材料層與一中心介電材料層。第一核心層包括一核心介電層與一核心線路層,核心線路層配置於核心介電層上,且核心線路層為一非內埋式線路層,第二核心材料層配置於第一核心層上,中心介電材料層配置於第一核心層與第二核心材料層之間。接著,壓合第一核心層、第二核心材料層與中心介電材料層,以形成一複合線路結構,複合線路結構具有一預移除區,且至少部分核心線路層位於預移除區內。然後,移除中心介電材料層之位於預移除區邊緣的部分以及第二核心材料層之位於預移除區邊緣的部分。之後,移除中心介電材料層之位於預移除區內的部分以及第二核心材料層之位於預移除區內的部分,以形成一中央介電層與一第二核心層。The present invention provides a method of fabricating a circuit board as follows. First, a first core layer, a second core material layer and a central dielectric material layer are provided. The first core layer includes a core dielectric layer and a core circuit layer, the core circuit layer is disposed on the core dielectric layer, and the core circuit layer is a non-embedded circuit layer, and the second core material layer is disposed on the first core layer. On the layer, a central dielectric material layer is disposed between the first core layer and the second core material layer. Then, the first core layer, the second core material layer and the central dielectric material layer are pressed together to form a composite circuit structure, the composite circuit structure has a pre-removal zone, and at least part of the core circuit layer is located in the pre-removal zone. . Then, the portion of the central dielectric material layer at the edge of the pre-removal region and the portion of the second core material layer at the edge of the pre-removal region are removed. Thereafter, a portion of the central dielectric material layer in the pre-removal zone and a portion of the second core material layer in the pre-removal zone are removed to form a central dielectric layer and a second core layer.

在本發明之一實施例中,在壓合第一核心層、第二核心材料層與中心介電材料層時,更包括下述製程。首先,壓合一第一介電材料層與一第一導電層至第一核心層上,其中第一介電材料層位於第一核心層與第一導電層之間,以及壓合一第二介電材料層與一第二導電層至第二核心層上,其中第二介電材料層位於第二核心層與第二導電層之間。然後,圖案化第一導電層與第二導電層,以形成一第一線路層與一第二線路層。In an embodiment of the invention, when the first core layer, the second core material layer and the central dielectric material layer are pressed together, the following process is further included. First, a first dielectric material layer and a first conductive layer are pressed onto the first core layer, wherein the first dielectric material layer is located between the first core layer and the first conductive layer, and is pressed into a second a layer of dielectric material and a second conductive layer to the second core layer, wherein the second layer of dielectric material is between the second core layer and the second conductive layer. Then, the first conductive layer and the second conductive layer are patterned to form a first circuit layer and a second circuit layer.

在本發明之一實施例中,線路板的製作方法更包括在移除中心介電材料層之位於預移除區邊緣的部分以及第二核心材料層之位於預移除區邊緣的部分時,移除第二介電材料層之位於預移除區邊緣的部分,以及在移除中心介電材料層之位於預移除區內的部分以及第二核心材料層之位於預移除區內的部分時,移除第二介電材料層之位於預移除區內的部分,以形成一第二介電層。In an embodiment of the present invention, the method of fabricating the circuit board further includes: when removing a portion of the central dielectric material layer at the edge of the pre-removal region and a portion of the second core material layer at the edge of the pre-removal region, Removing a portion of the second layer of dielectric material at the edge of the pre-removal region, and removing a portion of the central dielectric material layer within the pre-removal region and the second core material layer within the pre-removal region In part, the portion of the second dielectric material layer in the pre-removal zone is removed to form a second dielectric layer.

在本發明之一實施例中,移除中心介電材料層之位於預移除區邊緣的部分以及第二核心材料層之位於預移除區邊緣的部分的方法包括雷射蝕刻。In one embodiment of the invention, a method of removing a portion of the central dielectric material layer at the edge of the pre-removal region and a portion of the second core material layer at the edge of the pre-removal region comprises laser etching.

在本發明之一實施例中,核心線路層具有一雷射阻擋圖案,雷射阻擋圖案位於預移除區邊緣。In an embodiment of the invention, the core circuit layer has a laser blocking pattern, and the laser blocking pattern is located at the edge of the pre-removal zone.

在本發明之一實施例中,移除中心介電材料層之位於預移除區內的部分以及第二核心材料層之位於預移除區內的部分的方法包括剝除法。In one embodiment of the invention, the method of removing the portion of the central dielectric material layer that is located within the pre-removal zone and the portion of the second core material layer that is located within the pre-removal zone comprises stripping.

在本發明之一實施例中,第一核心層更包括一保護層,其覆蓋核心線路層之位於預移除區內的部分。In an embodiment of the invention, the first core layer further includes a protective layer covering a portion of the core circuit layer located within the pre-removal zone.

在本發明之一實施例中,線路板的製作方法更包括在移除中心介電材料層之位於預移除區內的部分以及第二核心材料層之位於預移除區內的部分之後,移除保護層。In an embodiment of the present invention, the method of fabricating the circuit board further includes: after removing a portion of the central dielectric material layer located in the pre-removal region and a portion of the second core material layer located within the pre-removal region, Remove the protective layer.

本發明提出一種線路板具有一凹槽,線路板包括一多層核心結構,多層核心結構包括交替堆疊的多個核心層與多個中央介電層,凹槽貫穿多層核心結構之部分核心層與至少部分中央介電層,且核心層其中之一位於凹槽的底部,凹槽暴露位於凹槽底部的核心層的一核心線路層。The invention provides a circuit board having a recess, the circuit board comprising a multi-layer core structure comprising a plurality of core layers and a plurality of central dielectric layers alternately stacked, the recess penetrating a part of the core layer of the multi-layer core structure and At least a portion of the central dielectric layer, and one of the core layers is located at the bottom of the recess, the recess exposing a core circuit layer of the core layer at the bottom of the recess.

在本發明之一實施例中,線路板更包括一第一線路結構與一第二線路結構。第一線路結構配置於多層核心結構的一第一側。第二線路結構配置於多層核心結構的一第二側,其中第一側相對於第二側,且凹槽貫穿第二線路結構。In an embodiment of the invention, the circuit board further includes a first line structure and a second line structure. The first line structure is disposed on a first side of the multilayer core structure. The second line structure is disposed on a second side of the multilayer core structure, wherein the first side is opposite the second side and the recess extends through the second line structure.

在本發明之一實施例中,第一線路結構包括一第一介電層與一第一線路層。第一介電層配置於多層核心結構的第一側上。第一線路層配置於第一介電層上。In an embodiment of the invention, the first wiring structure includes a first dielectric layer and a first wiring layer. The first dielectric layer is disposed on the first side of the multilayer core structure. The first circuit layer is disposed on the first dielectric layer.

在本發明之一實施例中,第二線路結構包括一第二介電層與一第二線路層。第二介電層配置於多層核心結構的第二側上。第二線路層配置於第二介電層上。In an embodiment of the invention, the second wiring structure includes a second dielectric layer and a second wiring layer. The second dielectric layer is disposed on the second side of the multilayer core structure. The second circuit layer is disposed on the second dielectric layer.

基於上述,由於本發明的線路板具有交替堆疊的多個核心層與多個中央介電層,因此,當凹槽貫穿總介電層數之一半以上的層數時,凹槽可貫穿部分核心層與至少部分中央介電層並暴露出位於凹槽底部的核心層的核心線路層。Based on the above, since the circuit board of the present invention has a plurality of core layers and a plurality of central dielectric layers alternately stacked, when the grooves penetrate the number of layers of one or more than half of the total dielectric layers, the grooves may penetrate through the partial core The layer is with at least a portion of the central dielectric layer and exposes a core circuit layer of the core layer at the bottom of the recess.

為讓本發明之上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the present invention will be more apparent from the following description.

圖2A為本發明一實施例之線路板的剖面圖,圖2B為圖2A之線路板的一種變化。請參照圖2A,本實施例之線路板200具有一凹槽R,線路板200包括一第一核心層210、一第二核心層220、一中央介電層230、一第一線路結構240與一第二線路結構250。2A is a cross-sectional view of a wiring board according to an embodiment of the present invention, and FIG. 2B is a variation of the wiring board of FIG. 2A. Referring to FIG. 2A, the circuit board 200 of the embodiment has a recess R. The circuit board 200 includes a first core layer 210, a second core layer 220, a central dielectric layer 230, and a first line structure 240. A second line structure 250.

第一核心層210包括一核心介電層212以及二核心線路層214、216,核心線路層214、216分別配置於核心介電層212之上下二表面212a、212b上並相互電性連接。核心線路層214、216分別突出於核心介電層212的表面212a、212b。The first core layer 210 includes a core dielectric layer 212 and two core circuit layers 214 and 216 respectively disposed on the lower surface 212a, 212b of the core dielectric layer 212 and electrically connected to each other. The core circuit layers 214, 216 protrude from the surfaces 212a, 212b of the core dielectric layer 212, respectively.

第二核心層220配置於第一核心層210上。第二核心層220可包括一核心介電層222以及二核心線路層224、226,核心線路層224、226分別配置於核心介電層222之上下二表面222a、222b上並相互電性連接。中央介電層230配置於第一核心層210與第二核心層220之間。The second core layer 220 is disposed on the first core layer 210. The second core layer 220 can include a core dielectric layer 222 and two core circuit layers 224 and 226 respectively disposed on the lower two surfaces 222a and 222b of the core dielectric layer 222 and electrically connected to each other. The central dielectric layer 230 is disposed between the first core layer 210 and the second core layer 220.

第一線路結構240配置於第一核心層210之遠離中央介電層230的一側218。在本實施例中,第一線路結構240包括相互堆疊的二介電層242、246與二線路層244、248。介電層242配置於第一核心層210上,線路層244配置於介電層242上並位於介電層242、246之間,線路層248配置於介電層246之遠離線路層244的一側。當然,本實施例並不限定第一線路結構240的線路層與介電層的數量,換言之,線路層或介電層的數量可為一個或多個。The first line structure 240 is disposed on a side 218 of the first core layer 210 that is remote from the central dielectric layer 230. In the present embodiment, the first line structure 240 includes two dielectric layers 242, 246 and two circuit layers 244, 248 stacked on each other. The dielectric layer 242 is disposed on the first core layer 210. The circuit layer 244 is disposed on the dielectric layer 242 and located between the dielectric layers 242 and 246. The circuit layer 248 is disposed on the dielectric layer 246 away from the circuit layer 244. side. Of course, the embodiment does not limit the number of circuit layers and dielectric layers of the first line structure 240. In other words, the number of circuit layers or dielectric layers may be one or more.

第二線路結構250配置於第二核心層220之遠離中央介電層230的一側228。在本實施例中,第二線路結構250包括相互堆疊的二介電層252、256與二線路層254、258,其中介電層252配置於第二核心層220上,線路層254配置於介電層252上並位於介電層252、256之間,線路層258配置於介電層256之遠離線路層254的一側。當然,本實施例並不限定第二線路結構250的線路層與介電層的數量,換言之,線路層或介電層的數量可為一個或多個。The second line structure 250 is disposed on a side 228 of the second core layer 220 that is remote from the central dielectric layer 230. In this embodiment, the second circuit structure 250 includes two dielectric layers 252, 256 and two circuit layers 254, 258 stacked on each other, wherein the dielectric layer 252 is disposed on the second core layer 220, and the circuit layer 254 is disposed on the interface layer 254. The electrical layer 252 is located between the dielectric layers 252, 256, and the wiring layer 258 is disposed on the side of the dielectric layer 256 that is remote from the wiring layer 254. Of course, this embodiment does not limit the number of circuit layers and dielectric layers of the second circuit structure 250. In other words, the number of circuit layers or dielectric layers may be one or more.

線路板200的凹槽R貫穿第二核心層220、中央介電層230與第二線路結構250並暴露出部分核心線路層214。值得注意的是,在本實施例中,凹槽R貫穿的總介電層數(包括中央介電層230、核心介電層222與介電層252、256)大於凹槽R未貫穿的總介電層數(包括核心介電層212與介電層242、246)。換言之,凹槽R可貫穿(線路板200的)總介電層數之一半以上的層數。當然,在其他未繪示的實施例中,凹槽R可貫穿總介電層數之一半以下的層數。由於本實施例的線路板200具有相互堆疊的第一與第二核心層210、220,因此,當凹槽R貫穿總介電層數之一半以上的層數時,凹槽R可貫穿第二核心層220並暴露出第一核心層210的核心線路層214。The recess R of the circuit board 200 penetrates the second core layer 220, the central dielectric layer 230, and the second wiring structure 250 and exposes a portion of the core wiring layer 214. It should be noted that, in this embodiment, the total number of dielectric layers (including the central dielectric layer 230, the core dielectric layer 222 and the dielectric layers 252, 256) penetrated by the recess R is greater than the total number of the recesses R that are not penetrated. The number of dielectric layers (including core dielectric layer 212 and dielectric layers 242, 246). In other words, the groove R can penetrate the number of layers of more than one-half of the total number of dielectric layers (of the wiring board 200). Of course, in other embodiments not shown, the groove R may penetrate the number of layers below one-half of the total number of dielectric layers. Since the circuit board 200 of the present embodiment has the first and second core layers 210 and 220 stacked on each other, the recess R can penetrate through the second when the recess R penetrates the number of layers of one or more than half of the total dielectric layer. The core layer 220 exposes the core circuit layer 214 of the first core layer 210.

值得注意的是,在本實施例中,並不限制核心層的數目,換言之,核心層的數目亦可為三個或三個以上,凹槽可貫穿部分核心層與至少部分中央介電層,這些核心層其中之一位於凹槽的底部,且凹槽暴露位於凹槽底部的核心層的一核心線路層。舉例來說,請參照圖2B,本實施例之線路板200a包括一多層核心結構M,多層核心結構M具有一第一核心層210、一第二核心層220、一第三核心層270、配置於第一與第二核心層210、220之間的一中央介電層230以及配置於第二與第三核心層220、270之間的一中央介電層280。凹槽R貫穿第二與第三核心層220、270與中央介電層230、280並暴露出位於凹槽R的底部的第一核心層210的一核心線路層214。值得注意的是,本實施例並非用以限定多層核心結構M之被凹槽R貫穿的核心層數以及未被凹槽R貫穿的核心層數,換言之,凹槽R亦可只貫穿第三核心層270。It should be noted that, in this embodiment, the number of core layers is not limited, in other words, the number of core layers may be three or more, and the recess may penetrate part of the core layer and at least part of the central dielectric layer. One of the core layers is located at the bottom of the recess and the recess exposes a core circuit layer of the core layer at the bottom of the recess. For example, referring to FIG. 2B, the circuit board 200a of the present embodiment includes a multi-layer core structure M having a first core layer 210, a second core layer 220, and a third core layer 270. A central dielectric layer 230 disposed between the first and second core layers 210, 220 and a central dielectric layer 280 disposed between the second and third core layers 220, 270. The recess R extends through the second and third core layers 220, 270 and the central dielectric layers 230, 280 and exposes a core wiring layer 214 of the first core layer 210 at the bottom of the recess R. It should be noted that this embodiment is not used to limit the number of core layers of the multi-layer core structure M penetrated by the groove R and the number of core layers not penetrated by the groove R. In other words, the groove R may only penetrate the third core. Layer 270.

請再次參照圖2A,在本實施例中,核心線路層214具有一雷射阻擋圖案214a,雷射阻擋圖案214a位於凹槽R所暴露出的核心介電層212的邊緣。中央介電層230可覆蓋一部分的雷射阻擋圖案214a,且凹槽R可暴露出另一部分的雷射阻擋圖案214a。另外,在本實施例中,可在第一線路結構240、第二線路結構250與第一核心層210上分別形成一焊罩層260,以覆蓋並保護部分的線路層248、258與核心線路層214。Referring again to FIG. 2A, in the present embodiment, the core circuit layer 214 has a laser blocking pattern 214a that is located at the edge of the core dielectric layer 212 exposed by the recess R. The central dielectric layer 230 may cover a portion of the laser blocking pattern 214a, and the recess R may expose another portion of the laser blocking pattern 214a. In addition, in the embodiment, a solder mask layer 260 may be formed on the first line structure 240, the second line structure 250 and the first core layer 210 to cover and protect part of the circuit layers 248, 258 and the core line. Layer 214.

以下將詳細介紹本實施例之線路板200的其中一種製作方法。One of the manufacturing methods of the circuit board 200 of the present embodiment will be described in detail below.

圖3A~圖3E為本發明一實施例之線路板的製程剖面圖。3A to 3E are cross-sectional views showing a process of a circuit board according to an embodiment of the present invention.

首先,請參照圖3A,提供一第一核心層210、一第二核心材料層220a、一中心介電材料層230a、一介電層242、一導電層244a、一介電材料層252a與一導電層254a。First, referring to FIG. 3A, a first core layer 210, a second core material layer 220a, a central dielectric material layer 230a, a dielectric layer 242, a conductive layer 244a, a dielectric material layer 252a and a Conductive layer 254a.

第一核心層210的結構與圖2A的第一核心層210相同。第二核心材料層220a配置於第一核心層210上,中心介電材料層230a配置於第一核心層210與第二核心材料層220a之間。介電層242配置於第一核心層210之遠離中心介電材料層230a的一側,並位於第一核心層210與導電層244a之間。介電材料層252a配置於第二核心材料層220a之遠離中心介電材料層230a的一側,並位於導電層254a與第二核心材料層220a之間。The structure of the first core layer 210 is the same as that of the first core layer 210 of FIG. 2A. The second core material layer 220a is disposed on the first core layer 210, and the central dielectric material layer 230a is disposed between the first core layer 210 and the second core material layer 220a. The dielectric layer 242 is disposed on a side of the first core layer 210 away from the central dielectric material layer 230a and between the first core layer 210 and the conductive layer 244a. The dielectric material layer 252a is disposed on a side of the second core material layer 220a away from the central dielectric material layer 230a and between the conductive layer 254a and the second core material layer 220a.

接著,請參照圖3B,壓合第一核心層210、第二核心材料層220a、中心介電材料層230a、介電層242、導電層244a、介電材料層252a與導電層254a,以形成一複合線路結構C,複合線路結構C具有一預移除區P,且部分核心線路層214位於預移除區P內。之後,可分別圖案化導電層244a與導電層254a,以形成一線路層244與一線路層254,以及形成多個導電通道V1、V2,以使線路層244與線路層254分別電性連接至第一核心層210與第二核心材料層220a。Next, referring to FIG. 3B, the first core layer 210, the second core material layer 220a, the central dielectric material layer 230a, the dielectric layer 242, the conductive layer 244a, the dielectric material layer 252a, and the conductive layer 254a are laminated to form A composite circuit structure C having a pre-removed area P and a portion of the core line layer 214 is located in the pre-removed area P. Thereafter, the conductive layer 244a and the conductive layer 254a may be separately patterned to form a circuit layer 244 and a circuit layer 254, and a plurality of conductive paths V1, V2 are formed to electrically connect the circuit layer 244 and the circuit layer 254 to the circuit layer 254, respectively. The first core layer 210 and the second core material layer 220a.

之後,請參照圖3C,可以形成介電層242、線路層244、介電材料層252a與線路層254的方式,選擇性地於介電層242上形成一介電層246與一線路層248,並於介電材料層252a上形成一介電材料層256a與一線路層258。3C, a dielectric layer 242, a wiring layer 244, a dielectric material layer 252a and a wiring layer 254 may be formed, and a dielectric layer 246 and a wiring layer 248 are selectively formed on the dielectric layer 242. A dielectric material layer 256a and a wiring layer 258 are formed on the dielectric material layer 252a.

然後,請參照圖3D,例如是以雷射蝕刻的方式移除位於預移除區P的邊緣的中心介電材料層230a、第二核心材料層220a、介電材料層252a、256a,以形成貫穿前述材料層230a、220a、252a、256a的一狹縫G。在本實施例中,核心線路層214可具有一位於預移除區P邊緣的雷射阻擋圖案214a,以保護核心介電層212免於遭受雷射蝕刻的破壞。此外,第一核心層210可具有一保護層A,其覆蓋核心線路層214之位於預移除區P內的部分,以於後續的移除製程中保護核心線路層214。此外,保護層A可為一離型層,其可有助於移除位於欲移除區P內的中心介電材料層230a。Then, referring to FIG. 3D, the central dielectric material layer 230a, the second core material layer 220a, and the dielectric material layers 252a, 256a located at the edge of the pre-removed region P are removed by laser etching, for example, to form A slit G penetrating through the aforementioned material layers 230a, 220a, 252a, 256a. In this embodiment, the core circuit layer 214 may have a laser blocking pattern 214a at the edge of the pre-removed area P to protect the core dielectric layer 212 from laser etch. In addition, the first core layer 210 may have a protective layer A covering a portion of the core wiring layer 214 located within the pre-removed region P to protect the core wiring layer 214 in a subsequent removal process. Additionally, the protective layer A can be a release layer that can aid in the removal of the central dielectric material layer 230a located within the region P to be removed.

之後,請參照圖3E,以例如剝除法移除位於預移除區P內的中心介電材料層230a、第二核心材料層220a與介電材料層252a、256a,以形成一中央介電層230、一第二核心層220、介電層252、256以及一凹槽R。介電層252、256與線路層254、258構成一第二線路結構250,凹槽R貫穿第二線路結構250、第二核心層220與中央介電層230。接著,移除保護層A。在其他實施例中,可同時移除保護層A與位於預移除區P內的中心介電材料層230a、第二核心材料層220a與介電材料層252a、256a。然後,在本實施例中,可在第一線路結構240、第二線路結構250與第一核心層210上分別形成一焊罩層260,以覆蓋並保護部分的線路層248、258與核心線路層214。Thereafter, referring to FIG. 3E, the central dielectric material layer 230a, the second core material layer 220a and the dielectric material layers 252a, 256a located in the pre-removed area P are removed by, for example, stripping to form a central dielectric layer. 230, a second core layer 220, dielectric layers 252, 256, and a recess R. The dielectric layers 252, 256 and the circuit layers 254, 258 form a second wiring structure 250 that extends through the second wiring structure 250, the second core layer 220, and the central dielectric layer 230. Next, the protective layer A is removed. In other embodiments, the protective layer A and the central dielectric material layer 230a, the second core material layer 220a, and the dielectric material layers 252a, 256a located within the pre-removed region P may be simultaneously removed. Then, in the embodiment, a solder mask layer 260 may be formed on the first line structure 240, the second line structure 250 and the first core layer 210 to cover and protect part of the circuit layers 248, 258 and the core line. Layer 214.

綜上所述,由於本發明的線路板具有交替堆疊的多個核心層與多個中央介電層,因此,當凹槽貫穿總介電層數之一半以上的層數時,凹槽可貫穿部分核心層與至少部分中央介電層並暴露出位於凹槽底部的核心層的核心線路層。In summary, since the circuit board of the present invention has a plurality of core layers and a plurality of central dielectric layers which are alternately stacked, when the grooves penetrate the number of layers of one or more than half of the total dielectric layers, the grooves can penetrate A portion of the core layer and at least a portion of the central dielectric layer expose the core circuit layer of the core layer at the bottom of the recess.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

100、200、200a...線路板100, 200, 200a. . . circuit board

110...核心層110. . . Core layer

112、212、222...核心介電層112, 212, 222. . . Core dielectric layer

114、116、132、244、248、254、258...線路層114, 116, 132, 244, 248, 254, 258. . . Circuit layer

120、130...線路結構120, 130. . . Line structure

132、242、246、252、256...介電層132, 242, 246, 252, 256. . . Dielectric layer

210...第一核心層210. . . First core layer

212a、212b、222a、222b...表面212a, 212b, 222a, 222b. . . surface

214、216、224、226...核心線路層214, 216, 224, 226. . . Core circuit layer

214a...雷射阻擋圖案214a. . . Laser blocking pattern

218、228...一側218, 228. . . One side

220...第二核心層220. . . Second core layer

220a...第二核心材料層220a. . . Second core material layer

230、280...中央介電層230, 280. . . Central dielectric layer

230a...中心介電材料層230a. . . Central dielectric material layer

240...第一線路結構240. . . First line structure

244a、254a...導電層244a, 254a. . . Conductive layer

250...第二線路結構250. . . Second line structure

252a、256a...介電材料層252a, 256a. . . Dielectric material layer

260...焊罩層260. . . Welding mask

270...第三核心層270. . . Third core layer

A...保護層A. . . The protective layer

C...複合線路結構C. . . Composite circuit structure

G...狹縫G. . . Slit

M...多層核心結構M. . . Multi-layer core structure

P...預移除區P. . . Pre-removal zone

R...凹槽R. . . Groove

V1、V2...導電通道V1, V2. . . Conductive channel

圖1繪示習知之線路板的剖面圖。1 is a cross-sectional view of a conventional circuit board.

圖2A為本發明一實施例之線路板的剖面圖。2A is a cross-sectional view of a wiring board according to an embodiment of the present invention.

圖2B為圖2A之線路板的一種變化。Figure 2B is a variation of the circuit board of Figure 2A.

圖3A~圖3E為本發明一實施例之線路板的製程剖面圖。3A to 3E are cross-sectional views showing a process of a circuit board according to an embodiment of the present invention.

200...線路板200. . . circuit board

210...第一核心層210. . . First core layer

212、222...核心介電層212, 222. . . Core dielectric layer

212a、212b、222a、222b...表面212a, 212b, 222a, 222b. . . surface

214、216、224、226...核心線路層214, 216, 224, 226. . . Core circuit layer

214a...雷射阻擋圖案214a. . . Laser blocking pattern

218、228...一側218, 228. . . One side

220...第二核心層220. . . Second core layer

230...中央介電層230. . . Central dielectric layer

240...第一線路結構240. . . First line structure

242、246、252、256...介電層242, 246, 252, 256. . . Dielectric layer

244、248、254、258...線路層244, 248, 254, 258. . . Circuit layer

250...第二線路結構250. . . Second line structure

260...焊罩層260. . . Welding mask

R...凹槽R. . . Groove

Claims (11)

一種線路板,具有一凹槽,該線路板包括:一第一核心層,包括一核心介電層與一核心線路層,該核心線路層配置於該核心介電層上,其中該核心線路層具有一雷射阻擋圖案,該雷射阻擋圖案位於該核心介電層之被該凹槽所暴露出的部分的邊緣上;一第二核心層,配置於該第一核心層上;以及一中央介電層,配置於該第一核心層與該第二核心層之間,其中該凹槽貫穿該第二核心層與該中央介電層並暴露出部分該核心線路層。 A circuit board having a recess, the circuit board comprising: a first core layer comprising a core dielectric layer and a core circuit layer, the core circuit layer being disposed on the core dielectric layer, wherein the core circuit layer Having a laser blocking pattern on an edge of a portion of the core dielectric layer exposed by the recess; a second core layer disposed on the first core layer; and a central portion a dielectric layer disposed between the first core layer and the second core layer, wherein the recess extends through the second core layer and the central dielectric layer and exposes a portion of the core circuit layer. 如申請專利範圍第1項所述之線路板,更包括:一第一線路結構,配置於該第一核心層之遠離該中央介電層的一側;以及一第二線路結構,配置於該第二核心層之遠離該中央介電層的一側,且該凹槽貫穿該第二線路結構。 The circuit board of claim 1, further comprising: a first circuit structure disposed on a side of the first core layer away from the central dielectric layer; and a second circuit structure disposed on the circuit board The second core layer is away from the side of the central dielectric layer, and the recess extends through the second line structure. 如申請專利範圍第2項所述之線路板,其中該第一線路結構包括:一第一介電層,配置於該第一核心層上;以及一第一線路層,配置於該第一介電層上。 The circuit board of claim 2, wherein the first circuit structure comprises: a first dielectric layer disposed on the first core layer; and a first circuit layer disposed on the first interface On the electrical layer. 如申請專利範圍第2項所述之線路板,其中該第二線路結構包括:一第二介電層,配置於該第二核心層上;以及一第二線路層,配置於該第二介電層上。 The circuit board of claim 2, wherein the second circuit structure comprises: a second dielectric layer disposed on the second core layer; and a second circuit layer disposed on the second layer On the electrical layer. 如申請專利範圍第1項所述之線路板,其中該中央 介電層覆蓋一部分的該雷射阻擋圖案,該凹槽暴露出另一部分的該雷射阻擋圖案。 The circuit board of claim 1, wherein the central board The dielectric layer covers a portion of the laser blocking pattern that exposes another portion of the laser blocking pattern. 一種線路板的製作方法,包括:提供一第一核心層、一第二核心材料層與一中心介電材料層,該第一核心層包括一核心介電層與一核心線路層,該核心線路層配置於該核心介電層上,該第二核心材料層配置於該第一核心層上,該中心介電材料層配置於該第一核心層與該第二核心材料層之間,其中該核心線路層具有一雷射阻擋圖案;壓合該第一核心層、該第二核心材料層與該中心介電材料層,以形成一複合線路結構,該複合線路結構具有一預移除區,且至少部分該核心線路層位於該預移除區內,其中該雷射阻擋圖案位於該預移除區邊緣;進行一雷射蝕刻以移除該中心介電材料層之位於該預移除區邊緣的部分以及該第二核心材料層之位於該預移除區邊緣的部分;以及移除該中心介電材料層之位於該預移除區內的部分以及該第二核心材料層之位於該預移除區內的部分,以形成一中央介電層與一第二核心層。 A method for manufacturing a circuit board, comprising: providing a first core layer, a second core material layer and a central dielectric material layer, the first core layer comprising a core dielectric layer and a core circuit layer, the core circuit a layer is disposed on the core dielectric layer, the second core material layer is disposed on the first core layer, and the central dielectric material layer is disposed between the first core layer and the second core material layer, where The core circuit layer has a laser blocking pattern; pressing the first core layer, the second core material layer and the central dielectric material layer to form a composite circuit structure, the composite circuit structure having a pre-removal area, And at least part of the core circuit layer is located in the pre-removal zone, wherein the laser blocking pattern is located at an edge of the pre-removal zone; performing a laser etching to remove the central dielectric material layer in the pre-removal zone a portion of the edge and a portion of the second core material layer at an edge of the pre-removal region; and a portion of the central dielectric material layer that is removed within the pre-removal region and the second core material layer is located Pre-shift Part region, center to form a second dielectric layer and a core layer. 如申請專利範圍第6項所述之線路板的製作方法,其中在壓合該第一核心層、該第二核心材料層與該中心介電材料層時,更包括:壓合一第一介電材料層與一第一導電層至該第一核心層上,其中該第一介電材料層位於該第一核心層與該第 一導電層之間;壓合一第二介電材料層與一第二導電層至該第二核心層上,其中該第二介電材料層位於該第二核心層與該第二導電層之間;以及圖案化該第一導電層與該第二導電層,以形成一第一線路層與一第二線路層。 The method for manufacturing a circuit board according to claim 6, wherein when the first core layer, the second core material layer and the central dielectric material layer are pressed together, the method further comprises: pressing a first medium. And a first conductive layer on the first core layer, wherein the first dielectric material layer is located on the first core layer and the first Between a conductive layer; pressing a second dielectric material layer and a second conductive layer to the second core layer, wherein the second dielectric material layer is located between the second core layer and the second conductive layer And patterning the first conductive layer and the second conductive layer to form a first circuit layer and a second circuit layer. 如申請專利範圍第7項所述之線路板的製作方法,更包括:在移除該中心介電材料層之位於該預移除區邊緣的部分以及該第二核心材料層之位於該預移除區邊緣的部分時,移除該第二介電材料層之位於該預移除區邊緣的部分;以及在移除該中心介電材料層之位於該預移除區內的部分以及該第二核心材料層之位於該預移除區內的部分時,移除該第二介電材料層之位於該預移除區內的部分,以形成一第二介電層。 The method for fabricating a circuit board according to claim 7, further comprising: removing a portion of the central dielectric material layer at an edge of the pre-removal region and the second core material layer at the pre-shifting Removing a portion of the second layer of dielectric material at an edge of the pre-removal region in addition to a portion of the edge of the region; and removing a portion of the central dielectric material layer within the pre-removal region and the portion When the portion of the second core material layer is located in the pre-removal region, the portion of the second dielectric material layer located in the pre-removal region is removed to form a second dielectric layer. 如申請專利範圍第6項所述之線路板的製作方法,其中移除該中心介電材料層之位於該預移除區內的部分以及該第二核心材料層之位於該預移除區內的部分的方法包括剝除法。 The method for fabricating a circuit board according to claim 6, wherein the portion of the central dielectric material layer in the pre-removal zone and the second core material layer are located in the pre-removal zone. Part of the method includes stripping. 如申請專利範圍第6項所述之線路板的製作方法,其中該第一核心層更包括:一保護層,覆蓋該核心線路層之位於該預移除區內的部分。 The method for fabricating a circuit board according to claim 6, wherein the first core layer further comprises: a protective layer covering a portion of the core circuit layer located in the pre-removal zone. 如申請專利範圍第10項所述之線路板的製作方法,更包括:在移除該中心介電材料層之位於該預移除區內的部分以及該第二核心材料層之位於該預移除區內的部分的同時或之後,移除該保護層。 The method for manufacturing a circuit board according to claim 10, further comprising: removing the portion of the central dielectric material layer located in the pre-removal region and the second core material layer at the pre-shifting The protective layer is removed at the same time as or after the portion of the zone.
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CN102271463B (en) * 2010-06-07 2013-03-20 富葵精密组件(深圳)有限公司 Manufacturing method for circuit board
TWI417018B (en) * 2010-07-29 2013-11-21 Unimicron Technology Corp Circuit board and manufacturing method thereof
TWI392407B (en) * 2010-12-08 2013-04-01 Unimicron Technology Corp Circuit board and manufacturacting mthod thereof
CN102548253B (en) 2010-12-28 2013-11-06 富葵精密组件(深圳)有限公司 Manufacturing method of multilayer circuit board
TWI403244B (en) * 2010-12-31 2013-07-21 Zhen Ding Technology Co Ltd Method for manufacturing multilayer printed circuit board
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